[go: up one dir, main page]

WO2024223271A1 - Système de balayage destiné à être utilisé dans un appareil pour produire des pièces tridimensionnelles - Google Patents

Système de balayage destiné à être utilisé dans un appareil pour produire des pièces tridimensionnelles Download PDF

Info

Publication number
WO2024223271A1
WO2024223271A1 PCT/EP2024/059425 EP2024059425W WO2024223271A1 WO 2024223271 A1 WO2024223271 A1 WO 2024223271A1 EP 2024059425 W EP2024059425 W EP 2024059425W WO 2024223271 A1 WO2024223271 A1 WO 2024223271A1
Authority
WO
WIPO (PCT)
Prior art keywords
approximately
scanner
scanner mirror
coolant
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/EP2024/059425
Other languages
German (de)
English (en)
Inventor
Jan Wilkes
Philipp Rohse
Christiane Thiel
Karsten Neumann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon SLM Solutions AG
Original Assignee
Nikon SLM Solutions AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon SLM Solutions AG filed Critical Nikon SLM Solutions AG
Priority to CN202480026443.XA priority Critical patent/CN121013774A/zh
Publication of WO2024223271A1 publication Critical patent/WO2024223271A1/fr
Anticipated expiration legal-status Critical
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40—Radiation means
    • B22F12/49—Scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/141—Processes of additive manufacturing using only solid materials
    • B29C64/153—Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Definitions

  • Scanner system for use in a plant for the production of three-dimensional workpieces
  • the invention relates to a scanner system for use in a system for producing three-dimensional workpieces using a generative layer construction process.
  • the invention also relates to a method for operating such a scanner system and to a system equipped with such a scanner system for producing three-dimensional workpieces using a generative layer construction process.
  • a raw material powder is applied layer by layer to a carrier and, depending on the desired geometry of the workpiece to be created, is exposed to electromagnetic radiation, for example laser radiation or particle radiation, in a location-selective manner.
  • electromagnetic radiation for example laser radiation or particle radiation
  • the radiation penetrating the powder layer causes heating and consequently a fusion or sintering of the raw material powder particles.
  • further layers of raw material powder are successively applied to the already radiation-treated layer on the carrier until the workpiece has the desired shape and size.
  • the raw material powder can comprise ceramic, metal or plastic materials, but also material mixtures thereof.
  • Generative layer construction processes and in particular powder bed fusion processes can be used, for example, to produce prototypes, tools, spare parts or medical prostheses, such as dental or orthopedic prostheses, as well as to repair components using CAD data.
  • a system known for example from EP 2 335 848 B1 for producing three-dimensional workpieces by selectively irradiating a raw material powder comprises a process chamber sealed from the ambient atmosphere and a carrier arranged in the process chamber for receiving the raw material powder to be irradiated.
  • the system also comprises an irradiation device equipped with a radiation source, in particular a laser source, and an optical unit.
  • the optical unit serves to selectively guide an irradiation beam generated by the radiation source over the raw material powder layers applied to the carrier depending on the geometry of the workpiece to be produced.
  • the optical unit usually has a beam expander and a scanner system.
  • Diffractive optical elements can be provided which can be introduced into the beam path in order to split the radiation beam supplied to the scanner system into a plurality of partial beams.
  • the scanner system also comprises a pivotable mirror which serves to direct a radiation beam impinging on the mirror to a desired position on the powder bed.
  • the radiation beam emitted by the scanner system is finally fed to an objective lens which can be designed, for example, in the form of an f-theta lens.
  • the radiation energy introduced into the raw material powder causes the powder particles to melt and/or sinter.
  • a melt pool of molten raw material powder is usually formed in the area of an application point of the radiation beam on the raw material powder layer. Due to the thermal radiation emitted by the irradiated powder bed, the temperature in the process chamber and the optical unit usually increases during the construction of a workpiece.
  • the swiveling mirror of the scanner system also experiences a temperature increase due to the direct irradiation with the radiation beam deflected by the mirror.
  • temperature changes in the optical unit can result in temperature-dependent changes in specific optical properties of the optical elements of the optical unit.
  • the refractive index or the geometry of an optical element can change depending on the temperature of the optical element. This can lead to a shift in the focus position of the irradiation beam radiated onto the raw material powder layers.
  • WO 2022/096304 A1 proposes arranging absorption elements and reflection elements in the process chamber and/or the optical unit. Furthermore, WO 2022/096304 A1 describes cooling channels integrated into the walls of the process chamber and the optical unit and the absorption elements.
  • the invention is directed to the object of providing a scanner system that can be used in a system for producing high-quality three-dimensional workpieces using a generative layer construction process. Furthermore, the invention is directed to the object of providing a method for operating such a Scanner system as well as a system equipped with such a scanner system for the production of three-dimensional workpieces using a generative layer construction process.
  • a scanner system suitable for use in a system for producing three-dimensional workpieces by exposing layers of raw material powder to electromagnetic radiation or particle radiation comprises at least one pivotable scanner mirror.
  • the scanner mirror serves to deflect an irradiation beam, in particular a laser beam, emitted by a radiation source in such a way that the beam strikes a raw material powder layer at a desired position, which is applied to a carrier of the system for producing three-dimensional workpieces.
  • the scanner mirror comprises a first surface that is configured to be exposed to the irradiation beam emitted by the radiation source.
  • the first surface of the scanner mirror can be a front side of the scanner mirror facing the radiation source.
  • the first surface of the scanner mirror is preferably designed in the form of a reflective surface.
  • the scanner system therefore comprises a scanner mirror cooling device with a first coolant supply device that is configured to direct a first coolant flow over and/or onto the first surface of the scanner mirror.
  • a scanner mirror cooling device with a first coolant supply device that is configured to direct a first coolant flow over and/or onto the first surface of the scanner mirror.
  • the thermal energy introduced into the first surface of the scanner mirror by the irradiation beam can be dissipated directly at the point of entry, i.e. at the point where the irradiation beam strikes the scanner mirror.
  • This allows particularly effective cooling of the scanner mirror and in particular of the first surface of the scanner mirror that is particularly thermally stressed.
  • thermally induced displacements of a Focus position of the irradiation beam radiated onto the raw material powder layers in an xy irradiation plane can be reduced.
  • the scanner system is therefore particularly advantageous for use in a system for producing three-dimensional workpieces in which raw material powder layers are irradiated with high power and/or multiple radiation beams.
  • effective cooling of the scanner mirror enables an improvement in multi-laser alignment and thus the production of high-quality workpieces.
  • the scanner system can comprise only one scanner mirror. However, it is also conceivable that the scanner system comprises two or more pivotable scanner mirrors. Two scanner mirrors can be used to realize a deflection of the processing beam in the x and y directions. If the scanner system comprises two pivotable scanner mirrors, each of the scanner mirrors can be designed as described here, i.e. comprise a first surface that is configured to be exposed to the irradiation beam emitted by the radiation source and to be cooled by a first coolant flow directed over and/or onto the first surface of the scanner mirror. Each scanner mirror can be assigned a separate scanner mirror cooling device and/or a separate first coolant supply device.
  • the scanner mirror cooling device and/or the first coolant supply device can, however, also be configured to direct a first coolant flow or a plurality of first coolant flows over and/or onto the first surfaces of a plurality of scanner mirrors. Furthermore, each or some of the existing scanner mirrors can have the features discussed below.
  • the first coolant supply device is preferably configured to direct the first coolant flow at an angle of approximately 0° to approximately 30°, preferably at an angle of approximately 0° to approximately 25° and particularly preferably at an angle of approximately 0° to approximately 20° to the first surface over and/or onto the first surface of the scanner mirror.
  • a flow onto the first surface of the scanner mirror at a "flat" angle enables the first coolant flow to flow evenly over the first surface of the scanner mirror. This creates low turbulence and correspondingly low variations in the refractive indices in the first coolant flow.
  • dirt particles can be directed over the first surface of the scanner mirror and removed, so that dirt particles are transported from one optical element to another (optical) element of the scanner system can be avoided.
  • the first coolant supply device can, for example, comprise outlet openings which are arranged and aligned such that the first coolant flow impinges on the first surface of the scanner mirror at the desired "flat" angle.
  • the scanner mirror cooling device further comprises a second coolant supply device which is configured to direct a second coolant flow over and/or onto a second surface of the scanner mirror opposite the first surface.
  • the second surface of the scanner mirror can be, for example, a rear side of the scanner mirror which is not directly exposed to the radiation beam emitted by the radiation source and faces away from the radiation source.
  • a second coolant supply device can be assigned to each scanner mirror.
  • the second coolant supply device can also be configured to direct a second coolant flow or a plurality of second coolant flows over and/or onto the second surfaces of a plurality of scanner mirrors.
  • the scanner mirror By cooling both the first and the second surface of the scanner mirror, the scanner mirror is cooled homogeneously. This avoids or at least reduces temporal fluctuations in the scanner mirror temperature and a temperature gradient within the scanner mirror. Consequently, thermally induced deformations of the scanner mirror and the resulting influences on the optical properties of the scanner mirror can be avoided. Furthermore, by cooling both the first and the second surface of the scanner mirror, larger amounts of thermal energy can be dissipated from the scanner mirror.
  • Equipping the scanner mirror cooling device with both a first and a second coolant supply device is therefore particularly suitable when the scanner mirror is exposed to particularly high thermal loads, for example when the scanner system is used in a multi-laser system and/or when using radiation sources to generate and emit radiation beams with particularly high powers, which lead to high intensities on the surface of the scanner mirror.
  • Cooling fins can be provided in the area of the second surface of the scanner mirror.
  • the second surface of the scanner mirror can be partially or completely covered with cooling fins. This ensures particularly good Heat dissipation from the scanner mirror and consequently particularly effective cooling of the scanner mirror is possible.
  • the second coolant supply device is preferably configured to direct the second coolant flow at an angle of approximately 40° to approximately 90°, preferably at an angle of approximately 45° to approximately 90°, and particularly preferably at an angle of approximately 50° to approximately 90° to the second surface over and/or onto the second surface of the scanner mirror.
  • the second coolant supply device can, for example, comprise first outlet openings arranged and aligned such that the second coolant flow impinges on the second surface of the scanner mirror at the desired "steep" angle.
  • the second coolant supply device can also be configured to direct the second coolant flow at an angle of approximately 0° to approximately 30°, preferably at an angle of approximately 0° to approximately 25° and particularly preferably at an angle of approximately 0° to approximately 20° to the second surface over and/or onto the second surface of the scanner mirror.
  • the second coolant supply device can therefore, similar to the first coolant supply device, also provide a flow onto the second surface of the scanner mirror at a "flat" angle.
  • the second coolant supply device can comprise second outlet openings which are arranged and aligned such that the second coolant flow impinges on the second surface of the scanner mirror at the desired "flat" angle.
  • the first and second coolant supply devices can be configured to direct the first and second coolant streams over and/or onto the first and second surfaces of the scanner mirror at equal angles to the first and second surfaces, respectively, such that possible torques acting on the scanner mirror caused by the coolant streams cancel each other out.
  • the first and second coolant supply devices can be arranged symmetrically relative to the first and second surfaces of the scanner mirror such that the first and second coolant streams are directed over and/or onto the first and second surfaces of the scanner mirror at equal angles to the first and second surfaces, respectively.
  • the first coolant supply device is configured to supply a first coolant flow, which is adjustable in terms of a volume flow and/or a flow rate, over and/or onto the first surface of the scanner mirror.
  • the second coolant supply device can be configured to direct a second coolant flow, which can be adjusted in terms of a flow rate and/or a flow rate, over and/or onto the second surface of the scanner mirror.
  • the first and second coolant supply devices can be configured to deliver coolant flows with volume flows and/or flow rates that can be adjusted independently of one another.
  • Appropriate control of the volume flows and/or flow rates of the coolant flows delivered by the first and second coolant supply devices can then be used to ensure mutual cancellation or at least a reduction in the torques acting on the scanner mirror at different, non-symmetrical angles of incidence of the coolant flows relative to the first or second surface of the scanner mirror.
  • the second coolant supply device can comprise a first coolant supply element that faces the second surface of the scanner mirror.
  • the first coolant supply element can be arranged at an angle of approximately 70° to approximately 110°, preferably at an angle of approximately 80° to 100° and particularly preferably at an angle of approximately 90° to the second surface of the scanner mirror.
  • a longitudinal axis of the first coolant supply element can be arranged at an angle of approximately 70° to approximately 110°, preferably at an angle of approximately 80° to 100° and particularly preferably at an angle of approximately 90° to the second surface of the scanner mirror. This allows the flow onto the second surface of the scanner mirror to be realized at a "steep" angle.
  • the second coolant supply device can comprise a second coolant supply element which is arranged at an angle of approximately 0° to approximately 30°, preferably at an angle of approximately 0° to approximately 25° and particularly preferably at an angle of approximately 0° to approximately 20° to the second surface of the scanner mirror.
  • a longitudinal axis of the first coolant supply element can be arranged at an angle of approximately 0° to approximately 30°, preferably at an angle of approximately 0° to approximately 25° and particularly preferably at an angle of approximately 0° to approximately 20° to the second surface of the scanner mirror.
  • the first coolant supply device can be designed, for example, in the form of a nozzle. Additionally or alternatively, the first coolant supply element and/or the second coolant supply element of the second Coolant supply device can be designed in the form of a nozzle. One or more of these nozzles can be designed as a two-jet nozzle or T-piece in order to increase the accessibility of the coolant or the nozzle(s) to the scanner mirror to be cooled. Furthermore, the first coolant supply device and/or the second coolant supply device or in particular the first coolant supply element and/or the second coolant supply element of the second coolant supply device can be designed to be movable and configured to be moved depending on the movements of the scanner mirror. This can ensure optimal cooling of the scanner mirror in all positions.
  • the first and the second coolant supply device can be designed to be at least partially integrated with one another.
  • the second coolant supply element of the second coolant supply device can be integrated into the first coolant supply device.
  • the first coolant supply device is then not only designed to direct a first coolant flow over and/or onto the first surface of the scanner mirror, but is additionally equipped with a second coolant supply element assigned to the second coolant supply device, which in turn is designed to direct a second coolant flow over and/or onto the second surface of the scanner mirror.
  • the first coolant supply device is preferably arranged at an angle of approximately 0° to approximately 30° to the first surface of the scanner mirror.
  • a longitudinal axis of the first coolant supply device can be arranged at an angle of approximately 0° to approximately 30° to the first surface of the scanner mirror. This makes it particularly easy to achieve the flow of air onto the first surface of the scanner mirror at the desired "flat" angle.
  • the first coolant supply device can be arranged offset from the scanner mirror along the pivot axis of the scanner mirror. In other words, the first coolant supply device can be arranged "in front of" or "behind” the scanner mirror when viewed along the pivot axis of the scanner mirror. This ensures that the radiation beam directed onto the first surface of the scanner mirror is not shaded by the first coolant supply device.
  • the scanner mirror can be connected to a drive device, for example in the form of a galvanometer motor, via a drive shaft extending along the pivot axis of the scanner mirror.
  • the first coolant supply device can be arranged on a Side of the scanner mirror, ie viewed along the pivot axis, can be arranged "behind" the scanner mirror. Alternatively, however, it is also conceivable to arrange the first coolant supply device on a side of the scanner mirror facing the drive device. The first coolant supply device is then arranged "in front of" the scanner mirror viewed along the pivot axis.
  • the first coolant supply device can be arranged at an angle > 0°, for example at an angle of approximately 20° to the first surface of the scanner mirror.
  • the first coolant supply device can also be arranged at an angle of approximately 0° to the first surface of the scanner mirror.
  • the first coolant supply device can be arranged coaxially or parallel to a longitudinal axis of the drive shaft and/or integrated into the drive shaft.
  • the first coolant supply device then provides a first coolant flow that flows over the first surface of the scanner mirror at an angle of approximately 0°, i.e. parallel to the first surface.
  • the first coolant supply device is then particularly well suited to being designed integrated with a second coolant supply element of the second coolant supply device.
  • the first coolant supply device can then comprise a second coolant supply element of the second coolant supply device, which provides a second coolant flow that flows over the second surface of the scanner mirror at an angle of approximately 0°, i.e. parallel to the second surface.
  • the first coolant supply device is configured to direct the first coolant flow symmetrically relative to a pivot axis of the scanner mirror over and/or onto the first surface such that substantially no torque acts on the scanner mirror due to the first coolant flow.
  • the outlet openings of the first coolant supply device can be arranged and aligned such that the first coolant flow strikes the first surface of the scanner mirror symmetrically to the pivot axis of the scanner mirror.
  • the second coolant supply device can be configured to direct the second coolant flow over and/or onto the second surface symmetrically to a pivot axis of the scanner mirror such that substantially no torque acts on the scanner mirror due to the second coolant flow. This avoids undesirable deflections of the scanner mirror caused by the second coolant flow.
  • first and/or second outlet openings of the second coolant supply device can be arranged and aligned such that the second coolant flow strikes the second surface of the scanner mirror symmetrically to the pivot axis of the scanner mirror.
  • the first coolant flow and/or the second coolant flow preferably contains a gas, for example purified air or an inert gas such as helium, argon, nitrogen or a gas mixture.
  • a gas for example purified air or an inert gas such as helium, argon, nitrogen or a gas mixture.
  • Helium is particularly suitable as an inert cooling gas because helium has a high thermal conductivity and thus enables effective heat dissipation.
  • the first and/or the second coolant flow can be implemented with small volume flows because even a small coolant volume flow is sufficient to cool the first and/or the second surface of the scanner mirror as desired.
  • the scanner system or a scanner housing of the scanner system should be sealed as well as possible in order to keep coolant loss as low as possible.
  • the scanner system further comprises a cooling system for cooling an interior of a housing accommodating the scanner system.
  • the scanner system is then equipped with a "superordinate" cooling system that cools all components arranged within the housing.
  • the cooling system can be designed to supply a gaseous coolant, in particular an inert gas such as helium, to the housing accommodating the scanner system.
  • the cooling system can be designed in such a way that the housing accommodating the scanner system is continuously flushed with coolant, which is fed into the housing via a coolant supply line and discharged from the housing via a coolant discharge line.
  • the cooling system comprises a recirculation line connected to a coolant inlet and a coolant outlet of the housing, so that the coolant can be circulated through the housing.
  • a heat exchanger can be arranged in the recirculation line, which ensures that the coolant flowing through the recirculation line is cooled before it is returned to the housing. Furthermore, in the A filter must be installed in the recirculation line to remove dirt particles, oil and/or moisture from the coolant circulating in the circuit.
  • a cooling system provided with a recirculation line can also include a coolant supply line, which can be connected to the recirculation line or the housing. New or additional coolant can then be supplied or replenished into the closed circuit via the coolant supply line. This can be used to replace lost coolant in the event of leaks in the housing or other components of the cooling system, for example.
  • a check valve can therefore be provided in the coolant supply line or the recirculation line.
  • the check valve is preferably designed to allow gas to escape from the housing into the environment when the pressure in the housing exceeds an activation pressure of the check valve. This can prevent or at least significantly reduce undesirable pressure fluctuations in the housing.
  • the check valve is preferably also designed to prevent gas from entering the housing.
  • the check valve is designed to prevent gas from entering the housing even when the pressure in the housing is negative, i.e., for example, the pressure is lower than the ambient pressure. This prevents potentially contaminated air from the environment from entering the housing.
  • the scanner mirror cooling device and the "superordinate" cooling system can be designed separately from one another.
  • partial or complete integration of the scanner mirror cooling device into the cooling system is also conceivable.
  • a coolant supply line and/or a recirculation line of the cooling system can also supply the scanner mirror cooling device with cooling medium.
  • the scanner mirror cooling device and the cooling system then share a common coolant supply line and/or recirculation line.
  • the coolant flowing through the coolant supply line and/or the recirculation line can be fed into the scanner system accommodating cooling medium via a single coolant inlet. Housing.
  • the coolant can then be directed via several outlet openings of the coolant supply line and/or the recirculation line to the desired locations or to the components to be cooled, such as mirrors, lenses, holders, cooling elements, etc.
  • the coolant flowing through the coolant supply line and/or the recirculation line into the housing accommodating the scanner system via several coolant inlets.
  • the scanner system preferably further comprises at least one flow control device which is configured to implement or at least support a controlled removal of the coolant provided by the first and/or the second coolant supply device and/or the coolant provided by the "superordinate" cooling system from the environment of components to be cooled, for example the scanner mirror.
  • the at least one flow control device prevents coolant that has already been heated by the heat transfer from a component to be cooled from coming into thermal contact with another component to be cooled.
  • the at least one flow generation device prevents several components to be cooled from being successively flowed over by the same coolant flow and the heated coolant from being held between the components to be cooled.
  • the at least one flow control device can, for example, comprise at least one flow guide element, such as a guide plate or a shielding element, and/or at least one coolant guide channel.
  • the flow control device can be movable.
  • the flow control device can be movable in such a way that a position and/or orientation of the flow control device can be adjusted as desired depending on the position of the scanner mirror.
  • the at least one flow control device can optionally be designed such that other optical components arranged in and/or on the housing, such as lenses, protective glasses or deflecting mirrors, are also subjected to the coolant flow. Furthermore, the flow control device is advantageously designed such that coolant that has already been heated by the heat transfer from a component to be cooled is prevented from coming into thermal contact with another component to be cooled. This allows a uniform temperature distribution to be achieved on the optical components.
  • a cooling fin structure provided in the area of the second surface of the scanner mirror can act as a flow control device.
  • the cooling fins can then be designed as flow guide elements that direct a coolant flow flowing onto the second surface of the scanner mirror in a desired direction.
  • the cooling fins can direct the coolant flow in such a way that other components or cooling elements arranged in and/or on the housing are also affected by the coolant flow.
  • the cooling fins can also be designed in such a way that the coolant flow, after flowing over the second surface of the scanner mirror, is directed past other (optical) components or in the direction of an inner housing wall in order to prevent several components to be cooled from being successively flowed over by the same coolant flow.
  • a control unit of the scanner system which controls the operation of the first and/or the second coolant supply device and/or the "superordinate" cooling system and in particular the volume flow and/or the flow rate of the first coolant flow, the second coolant flow and/or the coolant flow provided by the "superordinate” cooling system, is preferably configured to take into account control parameters relevant to the state of the overall system when controlling the individual coolant flows.
  • Such relevant control parameters can be, for example, the temperature and in particular the temperature distribution or the pressure and in particular the pressure distribution in the housing accommodating the scanner system.
  • control unit can be configured to evaluate signals transmitted by corresponding temperature and/or pressure sensors and to use them as control parameters for controlling the individual coolant flows.
  • the temperature and/or pressure sensors can either measure the temperature and/or pressure in the entire housing accommodating the scanner system or record local temperature and/or pressure values prevailing at specific points in the housing.
  • one or more temperature sensors can be present to record the temperature(s) of one or more coolant flows and transmit corresponding signals to the control unit, which the control unit can then take into account when controlling the coolant flows.
  • control unit can be configured to coolant flows to resort to a simulation of the relevant control parameters and the heat transfer in the housing accommodating the scanner system at all relevant positions (ie angles) of the scanner mirror(s).
  • control unit of the scanner system can be configured to monitor the cleanliness of the coolant supplied by the first and/or second coolant supply device and/or the "superordinate" cooling system.
  • control unit can evaluate the signals from a particle counter and/or examine an optical reference surface against which the coolant to be monitored for cleanliness flows for contamination.
  • a scattered light sensor can be used for this purpose.
  • a first surface of at least one pivotable scanner mirror is exposed to an irradiation beam emitted by a radiation source.
  • a first coolant supply device of a scanner mirror cooling device a first coolant flow is directed over and/or onto the first surface of the scanner mirror.
  • the first coolant supply device preferably directs the first coolant flow at an angle of approximately 0° to approximately 30°, preferably at an angle of approximately 0° to approximately 25°, and particularly preferably at an angle of approximately 0° to approximately 20° to the first surface and/or onto the first surface of the scanner mirror.
  • a second coolant flow can be directed over and/or onto a second surface of the scanner mirror opposite the first surface.
  • the second coolant supply device can direct the second coolant flow at an angle of approximately 40° to approximately 90°, preferably at an angle of approximately 45° to approximately 90° and particularly preferably at an angle of approximately 50° to approximately 90° to the second surface over and/or onto the second surface of the scanner mirror.
  • the second coolant supply device can direct the second coolant flow at an angle of approximately 0° to approximately 30°, preferably at an angle of approximately 0° to approximately 25° and particularly preferably at an angle of approximately 0° to approximately 20° to the second surface over and/or onto the second surface of the scanner mirror.
  • the first coolant supply device preferably directs the first coolant flow symmetrically relative to a pivot axis of the scanner mirror and/or onto the first surface such that substantially no torque acts on the scanner mirror due to the first coolant flow.
  • the second coolant supply device can also direct the second coolant flow symmetrically relative to a pivot axis of the scanner mirror and/or onto the second surface such that substantially no torque acts on the scanner mirror due to the second coolant flow.
  • the method for operating a scanner system can have all the features described above in connection with the scanner system.
  • a system for producing three-dimensional workpieces by applying electromagnetic radiation or particle radiation to layers of raw material powder comprises a scanner system as described above.
  • the system can also comprise a process chamber, which is sealed in particular from the ambient atmosphere, and a carrier for receiving the raw material powder to be irradiated.
  • the carrier can be arranged in the process chamber. However, it is also conceivable for the process chamber to be movable over the carrier.
  • the carrier can be a rigidly fixed carrier. Preferably, however, the carrier is displaceable in the vertical direction, so that the carrier can be moved step by step downwards in the vertical direction as the height of a workpiece built on the carrier increases.
  • the raw material powder applied to the carrier is preferably a metal powder, in particular a metal alloy powder. However, the raw material powder can also be a ceramic powder or a powder containing various materials.
  • the powder can have any suitable particle size or particle size distribution. However, it is preferred to process powder with a particle size of less than 100 pm.
  • the system preferably further comprises an irradiation device which serves to selectively direct electromagnetic radiation or particle radiation onto the powder bed applied to the carrier.
  • the scanner system described above preferably forms a component of the irradiation device.
  • the irradiation device preferably further comprises a radiation source, in particular a laser source.
  • the irradiation device can comprise further optical elements for directing and/or Processing of the irradiation beam provided by the radiation source.
  • the beam emitted by the scanner system is preferably guided through an objective lens of the irradiation device, which can in particular be designed in the form of an f-theta lens.
  • Figure 1 shows a system for producing three-dimensional workpieces by exposing raw material powder layers to electromagnetic radiation or particle radiation, which is equipped with a first embodiment of a scanner system
  • FIG. 2 shows a detailed view of the first embodiment of the scanner system illustrated in Figure 1
  • Figure 3 shows a detailed view of a second embodiment of a scanner system
  • Figure 4 shows a detailed view of a third embodiment of a scanner system
  • Figure 5 shows a detailed view of a fourth embodiment of a scanner system
  • Figure 6 shows a detailed view of a fifth embodiment of a scanner system.
  • a system 100 shown in Figure 1 for producing three-dimensional workpieces by exposing raw material powder layers to electromagnetic radiation or particle radiation comprises a process chamber 102 which is sealed from the ambient atmosphere.
  • a powder application device 104 arranged in the process chamber 102 serves to apply raw material powder layers to a carrier 106.
  • the carrier 106 can be displaced in the vertical direction so that the carrier 106 can be moved step by step in the vertical direction downwards into a construction chamber 109 as the height of a workpiece 108 built on the carrier 106 increases.
  • the process chamber 102 is provided with a gas inlet 110 for supplying an inert gas (e.g. argon) into the process chamber 102.
  • a gas outlet 112 is also provided so that a continuous gas flow can be generated through the process chamber 102. The gas flow can serve to remove melt splashes and/or other undesirable dirt particles, such as welding fumes, from the process chamber 102.
  • the system 100 further comprises an irradiation device 112, which serves to selectively direct electromagnetic radiation or particle radiation onto the powder bed applied to the carrier 106.
  • the exemplary system 100 shown in Figure 1 comprises only one irradiation device 112. However, the system 100 can also have a plurality of irradiation devices 112.
  • the irradiation device 112 comprises a radiation source 114, which here is designed in particular in the form of a laser source.
  • the radiation source 114 which can comprise, for example, a diode-pumped ytterbium fiber laser which emits laser light with a wavelength of approximately 1070 to 1080 nm, can be integrated into the irradiation device 112.
  • the radiation source 114 is arranged outside the irradiation device 112, with a laser beam 116 emitted by the radiation source 114 being guided into the irradiation device 112 via an optical fiber 118.
  • the irradiation unit 112 further comprises two lenses 120 and 122.
  • both lenses 120 and 122 have a positive refractive power.
  • the lens 120 collimates the laser light emitted by the optical fiber 118 so that a collimated or substantially collimated laser beam 116 is generated.
  • the lens 122 is configured to focus the collimated (or substantially collimated) laser beam 116 to a desired z-position along a z-axis.
  • the irradiation unit 112 comprises a scanner system 10 with a scanner mirror 12 that can be pivoted about a pivot axis S.
  • the scanner system 10 and in particular the scanner mirror 12 serve to deflect the laser beam 116 emitted by the radiation source 114 such that the beam 116 strikes the raw material powder layer applied to the carrier 106 at a desired position.
  • the scanner mirror 12 comprises a first surface 14 which, during operation of the system 100 is exposed to the laser beam 116 emitted by the radiation source 114.
  • the first surface 14 of the scanner mirror 12 is a front side of the scanner mirror 12 facing the radiation source 114, which is designed in the form of a reflective surface.
  • the scanner mirror 12 also comprises a second surface 16 opposite the first surface 14.
  • the second surface 16 of the scanner mirror 12 is in particular a back side of the scanner mirror 12 facing away from the radiation source 114 and thus not directly exposed to the laser beam 116 emitted by the radiation source 114.
  • the second surface 16 of the scanner mirror 12 is provided with cooling fins 17.
  • the scanner mirror 12 is connected to a drive device 20, which is designed, for example, in the form of a galvanometer motor, via a drive shaft 18 extending along the pivot axis S of the scanner mirror 12.
  • the drive device 20 drives the scanner mirror 12 under the control of a control unit not shown in Figure 1, so that the scanner mirror 12 directs the laser beam 116 over the raw material powder layer on the carrier 106 in a location-selective manner and in accordance with a desired irradiation pattern depending on the geometry of the workpiece 108 to be produced.
  • the radiation energy introduced into the raw material powder causes the powder particles to melt and/or sinter.
  • the components of the irradiation system 112 are exposed to thermal radiation emitted by the irradiated powder bed.
  • the scanner mirror 12 of the scanner system 10 is also heated by the laser beam 116 striking the first surface 14 of the scanner mirror 12.
  • the scanner system 10 comprises a scanner mirror cooling device 22, which is only schematically indicated in Figure 1 and is described in more detail below with reference to Figures 2 to 6. Furthermore, the scanner system 10 comprises a cooling system 24, which is also only indicated schematically in Figure 1 and is also explained in more detail below.
  • the scanner mirror cooling device 22 comprises a first coolant supply device 26 which is configured to supply a first To direct the coolant flow 28 over and/or onto the first surface 14 of the scanner mirror 12.
  • the first coolant supply device 26, which is designed, for example, in the form of a nozzle, is configured to direct the first coolant flow 28 at an angle of approximately 10° to approximately 20° to the first surface 14 over and/or onto the first surface 14 of the scanner mirror 12.
  • the first coolant supply device 26 is arranged at an angle of approximately 15° to the first surface 14 of the scanner mirror 12, i.e. a longitudinal axis of the first coolant supply device 26 forms an angle of approximately 15° with the first surface 14 of the scanner mirror 12.
  • Outlet openings of the first coolant supply device 26, not shown in detail in Figure 1 thus enable a flow onto the first surface 14 of the scanner mirror 12 at an angle of approximately 10° to approximately 20°.
  • the first coolant flow 28 effectively dissipates the heat energy introduced into the first surface 14 of the scanner mirror 12 by the laser beam 116 directly at the point of entry.
  • the first coolant supply device 26 is arranged on a side of the scanner mirror 12 facing away from the drive device 20, i.e., viewed from the drive device 20 along the pivot axis S, "behind" the scanner mirror 12. This ensures that the laser beam 116 directed onto the first surface 14 of the scanner mirror 12 is not shadowed by the first coolant supply device 26.
  • the first coolant supply device 26 is configured to direct the first coolant flow 28 symmetrically relative to the pivot axis S of the scanner mirror 12 over and/or onto the first surface 14 of the scanner mirror 12 such that substantially no torque acts on the scanner mirror 12 due to the first coolant flow 28.
  • the outlet openings of the first coolant supply device 26 are arranged and aligned such that the first coolant flow 28 strikes the first surface 14 of the scanner mirror 12 symmetrically to the pivot axis S of the scanner mirror 12. This prevents the first coolant flow 28 striking the first surface 14 of the scanner mirror 12 from causing undesirable deflections of the scanner mirror 12 about the pivot axis S.
  • the scanner mirror cooling device 22 comprises a second coolant supply device 30 which is configured to supply a second coolant flow 32 via and/or to the second surface 16 of the scanner mirror 12 opposite the first surface 14.
  • the second coolant supply device 30 is configured to direct the second coolant flow 32 at an angle of approximately 55° to approximately 90° to the second surface 16 over and/or onto the second surface 16 of the scanner mirror 12.
  • the second coolant supply device 30 comprises a first coolant supply element 34, for example in the form of a nozzle, which faces the second surface 14 of the scanner mirror 12.
  • the first coolant supply element 34 is arranged at an angle of approximately 90° to the second surface 16 of the scanner mirror 12, i.e. a longitudinal axis of the first coolant supply element 34 of the second coolant supply device 30 of the first coolant supply device 26 forms an angle of approximately 90° with the second surface 16 of the scanner mirror 12.
  • First outlet openings of the first coolant supply element 34 not shown in detail in Figure 1, thus enable a flow onto the second surface 16 of the scanner mirror 12 at an angle of approximately 55° to approximately 90°.
  • the cooling of both the first and the second surface 14, 16 of the scanner mirror 12 enables a homogeneous cooling of the scanner mirror, so that temporal fluctuations in the scanner mirror temperature as well as a temperature gradient within the scanner mirror 12 can be avoided or at least reduced.
  • the second coolant supply device 30, i.e. the first coolant supply element 34 in the scanner system 10 shown in Figure 1, is configured to guide the second coolant flow 32 symmetrically to the pivot axis S of the scanner mirror 12 over and/or onto the second surface 16 of the scanner mirror 12 such that essentially no torque acts on the scanner mirror 12 due to the second coolant flow 32.
  • the outlet openings of the first coolant supply element 34 of the second coolant supply device 30 are arranged and aligned such that the second coolant flow 32 strikes the second surface 16 of the scanner mirror 12 symmetrically to the pivot axis S of the scanner mirror 12. This prevents the second coolant flow 32 striking the second surface 16 of the scanner mirror 12 from causing undesirable deflections of the scanner mirror 12 about the pivot axis S.
  • the first coolant stream 28 and/or the second coolant stream 32 contains/contain a gas, for example purified air or an inert gas.
  • a gas for example purified air or an inert gas.
  • Helium is particularly suitable as an inert cooling gas, as helium has a high thermal conductivity and therefore enables effective heat dissipation.
  • the cooling system 24 serves to cool an interior of a housing 36 that accommodates the scanner system 10.
  • the scanner system 10 is thus equipped with a "higher-level" cooling system 24 that cools all components arranged within the housing 36.
  • the housing 36 can be a scanner housing in which only the components of the scanner system 10 are accommodated. Alternatively, the housing 36 can also accommodate other or all components of the irradiation device 112.
  • the cooling system 24 supplies the interior of the housing 36 with a gaseous coolant from a coolant source 38.
  • the gaseous coolant is in particular an inert gas, such as helium.
  • a coolant inlet 40 of the housing 36 is connected to a coolant outlet 44 of the housing 36 via a recirculation line 42, so that the coolant can be circulated through the housing 36.
  • a coolant supply line 45 connects the coolant source 38 to the recirculation line 42. As a result, less contaminants are introduced into the housing 36 than with continuous flushing with coolant.
  • a heat exchanger 46 is arranged in the recirculation line 42, which ensures that the coolant flowing through the recirculation line 42 is cooled before it is returned to the housing 36.
  • filters may be provided in the recirculation line 42 for removing impurities from the coolant before it is returned to the housing 36.
  • the recirculation line 42 supplies not only the cooling system 24 but also the scanner mirror cooling device 22 with coolant.
  • a check valve 47 is provided in the recirculation line 42.
  • the check valve 47 is designed to allow gas to escape from the housing 36 into the environment when a pressure in the housing 36 exceeds an activation pressure of the check valve 47. Furthermore, the check valve 47 is designed to prevent gas from penetrating into the housing 36 even when a pressure in the housing 36 that is below the ambient pressure Negative pressure prevails. The check valve 47 reduces or prevents pressure fluctuations in the housing 36.
  • the cooling fin structure provided in the area of the second surface 16 of the scanner mirror 12 acts as a flow control device.
  • the individual cooling fins 17 act as flow guide elements that direct the coolant flow 32 flowing towards the second surface 16 of the scanner mirror 12 in a desired direction after flowing over the second surface 16 of the scanner mirror 12.
  • the cooling fins 17 can direct the coolant flow 32 in such a way that the coolant flow is guided past other (optical) components provided in the housing 32 after flowing over the second surface 16 of the scanner mirror 12.
  • further flow control devices and/or flow guide elements can be present, which ensure a desired direction of the coolant flows 28, 32 and the coolant flows guided by the cooling system 24 into and through the housing 36.
  • the second embodiment of a scanner system 10 shown in Figure 3 differs from the arrangement according to Figure 2 in that the first coolant supply device 26, viewed from the drive device 20 along the pivot axis S, is not arranged on the side of the scanner mirror 12 facing away from the drive device 20, but on the side facing the drive device 20.
  • the first coolant supply device 26, viewed from the drive device 20 along the pivot axis S is not arranged "behind” the scanner mirror, but rather “in front of” the drive device 20. This also ensures that the laser beam 116 striking the first surface 14 of the scanner mirror 12 is not shaded by the first coolant supply device 26. Otherwise, the structure and functioning of the scanner system 10 shown in Figure 3 correspond to the structure and functioning of the arrangement according to Figure 2.
  • the first coolant supply device 26 is arranged at an angle of approximately 0° to the first surface 14 of the scanner mirror 12, ie coaxially to a longitudinal axis of the drive shaft 18. Outlet openings of the first coolant supply device 26, not shown in detail in Figure 4, face the scanner mirror 12, so that the first coolant supply device 26 provides a first coolant flow 28 which contacts the first surface 14 of the scanner mirror 12 at an angle of approximately 0°, ie parallel to the first surface 14 and substantially parallel to the drive shaft 18.
  • the first and second coolant supply devices 26, 30 are at least partially integrated with one another.
  • a second coolant supply element 48 of the second coolant supply device 30 is integrated with the first coolant supply device 26, so that the first coolant supply device 26 and the second coolant supply element 48 of the second coolant supply device 30 form a type of "showerhead nozzle".
  • the second coolant supply element 48 of the second coolant supply device 30 is arranged at an angle of approximately 0° to the second surface 16 of the scanner mirror 12, i.e. coaxially to the longitudinal axis of the drive shaft 18, wherein outlet openings of the second coolant supply element 48 (not shown in detail in Figure 4) face the scanner mirror 12.
  • the second coolant supply element 48 of the second coolant supply device 30 provides a second coolant flow 32 which flows over the second surface 16 of the scanner mirror 12 at an angle of approximately 0°, i.e. parallel to the second surface 16 and substantially parallel to the drive shaft 18.
  • the first coolant supply device 26 and the second coolant supply element 48 of the second coolant supply device 30 are arranged on the side of the scanner mirror 12 facing away from the drive device 20 along the pivot axis S, i.e. the first coolant supply device 26 and the second coolant supply element 48 of the second coolant supply device 30 are again arranged "behind" the scanner mirror, viewed from the drive device 20 along the pivot axis S. This in turn ensures that the laser beam 116 striking the first surface 14 of the scanner mirror 12 is not shadowed. Otherwise, the structure and functioning of the scanner system 10 shown in Figure 4 correspond to the structure and functioning of the arrangement according to Figures 2 and 3.
  • the first coolant supply element 34 of the second coolant supply device 30 illustrated in Figures 1 and 2 was omitted.
  • the fourth embodiment of a scanner system 10 shown in Figure 5 differs from the arrangement according to Figure 4 in that the first coolant supply device 26 and the second coolant supply element 48 of the second coolant supply device 30, which is integrated with the first coolant supply device 26, are not arranged on the side of the scanner mirror 12 facing away from the drive device 20, but on the side facing the drive device 20 in the area of the drive device 20, as viewed from the drive device 20 along the pivot axis S.
  • the first coolant supply device 26 and the second coolant supply element 48 of the second coolant supply device 30, which is integrated with the first coolant supply device 26, are, however, still arranged at an angle of approximately 0° to the first and second surfaces 14, 16 of the scanner mirror 12, i.e. coaxially to the longitudinal axis of the drive shaft 18.
  • a first coolant supply element 34 of the second coolant supply device 30, already described in connection with Figures 2 and 3, is present, which is arranged at an angle of approximately 90° to the second surface 16 of the scanner mirror 12, and directs a first component 32a of the second coolant flow 32 at an angle of approximately 55° to approximately 90° to the second surface 16 over and/or onto the second surface 16 of the scanner mirror 12.
  • An outlet 50 of the first coolant supply device 26 is directed towards the first surface 14 of the scanner mirror 12 and directs the first cooling air flow 28 at an angle of approximately 0° to approximately 10° to the first surface 14 of the scanner mirror 12 and/or to the first surface 14.
  • an outlet 52 of the second coolant supply element 48 of the second coolant supply device 30 is directed towards the second surface 16 of the scanner mirror 12 and directs a second component 32b of the second cooling air flow 32 at an angle of approximately 0° to approximately 10° to the second surface 16 of the scanner mirror 12 and/or to the second surface 16.
  • the structure and functioning of the scanner system 10 shown in Figure 5 correspond to the structure and functioning of the arrangements according to Figures 2 to 4.
  • the fifth embodiment of a scanner system 10 shown in Figure 6 differs from the arrangement according to Figure 5 in that the first Coolant supply device 26 and the second coolant supply element 48 of the second coolant supply device 30, which is integrated with the first coolant supply device 26, are integrated into the drive shaft 18. Otherwise, the structure and functioning of the scanner system 10 shown in Figure 6 correspond to the structure and functioning of the arrangement according to Figure 5.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

L'invention concerne un système de balayage (10) destiné à être utilisé dans un appareil (100) pour produire des pièces tridimensionnelles par application d'un rayonnement électromagnétique ou d'un rayonnement de particules à des couches de poudre de matière première, le système de balayage (10) comprenant un miroir de balayage pivotant (12) qui présente une première surface (14) conçue pour être frappée par un faisceau de rayonnement (116) émis par une source de rayonnement (114). En outre, le système de balayage (10) comprend un dispositif de refroidissement de miroir de balayage (22) doté d'un premier équipement d'alimentation en liquide de refroidissement (26) conçu pour conduire un premier flux de liquide de refroidissement (28) au-dessus de et/ou sur la première surface (14) du miroir de balayage (12).
PCT/EP2024/059425 2023-04-24 2024-04-08 Système de balayage destiné à être utilisé dans un appareil pour produire des pièces tridimensionnelles Pending WO2024223271A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202480026443.XA CN121013774A (zh) 2023-04-24 2024-04-08 用于生产三维工件的装置中所使用的扫描仪系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102023110377.6 2023-04-24
DE102023110377.6A DE102023110377A1 (de) 2023-04-24 2023-04-24 Scannersystem zur Verwendung in einer Anlage zur Herstellung von dreidimensionalen Werkstücken

Publications (1)

Publication Number Publication Date
WO2024223271A1 true WO2024223271A1 (fr) 2024-10-31

Family

ID=90810093

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2024/059425 Pending WO2024223271A1 (fr) 2023-04-24 2024-04-08 Système de balayage destiné à être utilisé dans un appareil pour produire des pièces tridimensionnelles

Country Status (3)

Country Link
CN (1) CN121013774A (fr)
DE (1) DE102023110377A1 (fr)
WO (1) WO2024223271A1 (fr)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100044922A1 (en) * 2008-08-22 2010-02-25 Panasonic Electric Works Co., Ltd. Method and apparatus for producing a three-dimensionally shaped object
EP2335848B1 (fr) 2009-12-04 2014-08-20 SLM Solutions GmbH Unité de rayonnement optique pour une installation destinée à la fabrication de pièces à usiner par rayonnement de couches de pulvérisation avec un rayonnement laser
DE102013003939A1 (de) * 2013-03-08 2014-09-25 Cl Schutzrechtsverwaltungs Gmbh Laserstrahl-Umlenkeinrichtung für eine Vorrichtung zum Bauen dreidimensionaler Objekte
EP3067132A1 (fr) 2015-03-11 2016-09-14 SLM Solutions Group AG Procédé et appareil de production d'une pièce de travail tridimensionnelle avec compensation des variations thermiques de la focalisation du laser
US20170136580A1 (en) * 2015-11-16 2017-05-18 Preco, Inc. Galvo cooling air bypass to reduce contamination
CN107999755A (zh) * 2017-12-29 2018-05-08 广东汉邦激光科技有限公司 模具的3d打印装置及打印方法
WO2021092475A1 (fr) * 2019-11-06 2021-05-14 Nuburu, Inc. Système de fabrication additive métallique utilisant un laser bleu
WO2022096304A1 (fr) 2020-11-09 2022-05-12 SLM Solutions Group AG Appareil de production d'une pièce à usiner tridimensionnelle
US20230294174A1 (en) * 2022-03-18 2023-09-21 Sodick Co., Ltd. Additive manufacturing apparatus and method of additive manufacturing an object

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19955574B4 (de) * 1999-11-18 2005-07-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Masseoptimierter Spiegel zur Laserbearbeitung und Verfahren zur Kühlung der masseoptimierten Spiegel bei der Laserbearbeitung
DE102004007178B4 (de) * 2004-02-13 2006-01-12 Precitec Kg Laserbearbeitungskopf

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100044922A1 (en) * 2008-08-22 2010-02-25 Panasonic Electric Works Co., Ltd. Method and apparatus for producing a three-dimensionally shaped object
EP2335848B1 (fr) 2009-12-04 2014-08-20 SLM Solutions GmbH Unité de rayonnement optique pour une installation destinée à la fabrication de pièces à usiner par rayonnement de couches de pulvérisation avec un rayonnement laser
DE102013003939A1 (de) * 2013-03-08 2014-09-25 Cl Schutzrechtsverwaltungs Gmbh Laserstrahl-Umlenkeinrichtung für eine Vorrichtung zum Bauen dreidimensionaler Objekte
EP3067132A1 (fr) 2015-03-11 2016-09-14 SLM Solutions Group AG Procédé et appareil de production d'une pièce de travail tridimensionnelle avec compensation des variations thermiques de la focalisation du laser
US20170136580A1 (en) * 2015-11-16 2017-05-18 Preco, Inc. Galvo cooling air bypass to reduce contamination
CN107999755A (zh) * 2017-12-29 2018-05-08 广东汉邦激光科技有限公司 模具的3d打印装置及打印方法
WO2021092475A1 (fr) * 2019-11-06 2021-05-14 Nuburu, Inc. Système de fabrication additive métallique utilisant un laser bleu
WO2022096304A1 (fr) 2020-11-09 2022-05-12 SLM Solutions Group AG Appareil de production d'une pièce à usiner tridimensionnelle
US20230294174A1 (en) * 2022-03-18 2023-09-21 Sodick Co., Ltd. Additive manufacturing apparatus and method of additive manufacturing an object

Also Published As

Publication number Publication date
CN121013774A (zh) 2025-11-25
DE102023110377A1 (de) 2024-10-24

Similar Documents

Publication Publication Date Title
EP3678810B1 (fr) Module optique muni d'un dispositif permettant de changer automatiquement une optique de collimation
EP2335848B1 (fr) Unité de rayonnement optique pour une installation destinée à la fabrication de pièces à usiner par rayonnement de couches de pulvérisation avec un rayonnement laser
DE102017215841B4 (de) Pulverdüse für eine Laserbearbeitungsmaschine
EP3678811B1 (fr) Module optique interchangeable pour machine-outil laser
DE102007061549B4 (de) Verfahren zur Änderung des Strahldurchmessers eines Laserstrahls in einer Bearbeitungsebene sowie dafür ausgebildete Anordnung
DE102010018686B4 (de) Vorrichtung und Verfahren zum Laser-Auftragschweißen mit pulverförmigem Zusatzwerkstoff
DE102019003528A1 (de) Additive fertigung bei metallen mit einer faserarraylaserquelle und adaptiver mehrfachstrahlformung
DE10045191A1 (de) Verfahren und Vorrichtung zur Echtzeitsteuerung der Strahlcharakteristiken bei einer mit einem Laser ausgerüsteten Werkzeugmaschine
DE102011009345B3 (de) Verfahren und Vorrichtung zur Erfassung einer Partikeldichteverteilung im Strahl einer Düse
DE102019122064A1 (de) Bearbeitungsvorrichtung zur Laserbearbeitung eines Werkstücks, Teilesatz für eine Bearbeitungsvorrichtung zur Laserbearbeitung eines Werkstücks und Verfahren zur Laserbearbeitung eines Werkstücks
DE102012003202A1 (de) Vorrichtung und Verfahren zum Bearbeiten von Werkstücken, insbesondere von Schneiden oder mit Schneiden versehenen Werkstücken, mit einem Nasslaser
DE112021002560T5 (de) Modulare Ablenkeinheiten in spiegelsymmetrischer Anordnung
DE202018107281U1 (de) Strahlformungseinheit mit Kühlsystem für Hochleistungslaser
DE102021103870A1 (de) Additive fertigung mit drehbarem abscheidekopf
DE102005058172B4 (de) Vorrichtung für die Lasermaterialbearbeitung
DE102018208752B4 (de) Vorrichtung und Verfahren zur Bearbeitung zur Bearbeitung schwer zugänglicher Werkstücke sowie Verwendung einer Vorrichtung
DE4126351A1 (de) Verfahren zum bearbeiten von werkstueckoberflaechen mit laserstrahlung
EP4031319B1 (fr) Dispositif d'alimentation en matière
WO2024223271A1 (fr) Système de balayage destiné à être utilisé dans un appareil pour produire des pièces tridimensionnelles
DE102017215840B4 (de) Laserbearbeitungskopf
DE102015212284A1 (de) Vorrichtung und Verfahren zum pulverbasierten Laser-Auftragsschweißen
EP4482637B1 (fr) Dispositif, systeme et procede de calibration d'un dispositif laser
DE102017210703A1 (de) Vorrichtung zum Laserauftragsschweißen
DE102023110357A1 (de) Vorrichtung und Verfahren zur gerichteten Gasbeaufschlagung eines Bauraums zur additiven Fertigung
DE102018112129A1 (de) Verfahren zur generativen Herstellung eines Bauteils, Vorrichtung zur Durchführung des Verfahrens und Kraftfahrzeug

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 24720023

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2024720023

Country of ref document: EP