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WO2024261804A1 - Marqueur, dispositif d'alignement et procédé d'alignement - Google Patents

Marqueur, dispositif d'alignement et procédé d'alignement Download PDF

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Publication number
WO2024261804A1
WO2024261804A1 PCT/JP2023/022570 JP2023022570W WO2024261804A1 WO 2024261804 A1 WO2024261804 A1 WO 2024261804A1 JP 2023022570 W JP2023022570 W JP 2023022570W WO 2024261804 A1 WO2024261804 A1 WO 2024261804A1
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WO
WIPO (PCT)
Prior art keywords
detection data
marker
image
mesh member
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2023/022570
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English (en)
Japanese (ja)
Inventor
卓哉 大塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to PCT/JP2023/022570 priority Critical patent/WO2024261804A1/fr
Publication of WO2024261804A1 publication Critical patent/WO2024261804A1/fr
Anticipated expiration legal-status Critical
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]

Definitions

  • This disclosure relates to a marker, an alignment device, and an alignment method.
  • nanometer-order shape measurements are made using a SEM (Scanning Electron Microscope) and molecular structure detection is performed using a micro-Raman spectrometer at the same time.
  • SEM Sccanning Electron Microscope
  • Patent Document 1 discloses that, in order to rapidly identify an unknown sample, measurements are performed on a sample placed on a sample stage using multiple measuring devices.
  • Patent Document 1 it is necessary to align the detection data detected by multiple measuring devices, and there is a problem that alignment is difficult when the observation area on the sample is very small.
  • This disclosure has been made in consideration of the above circumstances, and its purpose is to provide a marker, an alignment device, and an alignment method that make it possible to easily align detection data measured by multiple measuring devices.
  • the marker of one embodiment of the present disclosure is a marker used for aligning detection data, and includes a mesh member made of a random combination of multiple conductive linear members, and is formed into a flat plate shape by applying adhesive to the mesh member.
  • the alignment device of one embodiment of the present disclosure includes a mesh member formed by randomly combining a plurality of conductive linear members, a marker formed into a flat plate shape by applying adhesive to the mesh member, and a sample arranged to overlap a portion of the marker.
  • the alignment device includes an acquisition unit that acquires first detection data detected by a first device and second detection data detected by a second device, an extraction unit that extracts the markers contained in the first detection data and the second detection data, and a processing unit that aligns the first detection data and the second detection data based on the positions of the markers.
  • the alignment method includes a mesh member formed by randomly combining a number of conductive linear members, a marker formed into a flat plate by applying adhesive to the mesh member, and a sample arranged to overlap a portion of the marker.
  • First detection data is obtained by detecting the mesh member using a first device
  • second detection data is obtained by detecting the sample using a second device.
  • the markers included in the first detection data and the second detection data are extracted, and the first detection data and the second detection data are aligned based on the positions of the markers.
  • This disclosure makes it possible to easily align detection data measured using multiple measuring devices.
  • FIG. 1 is a block diagram showing the configuration of an alignment device according to an embodiment and its peripheral devices.
  • FIG. 2 is a configuration diagram of a marker according to the embodiment.
  • FIG. 3 is a configuration diagram of a mesh member included in the marker according to the embodiment.
  • FIG. 4 is a perspective view of a stage on which the sample and the markers are placed.
  • FIG. 5 is an explanatory diagram showing a state in which the sample and the markers are placed on the stage.
  • FIG. 6A is an explanatory diagram showing a region D2 in the sample and the marker placed on the stage.
  • FIG. 6B is an explanatory diagram showing a microscope image of the region D2 shown in FIG. 6A detected by the SEM 31.
  • FIG. 6C is an enlarged view of region D3 shown in FIG. 6B.
  • FIG. 7 is a graph showing the Raman spectrum of region D4 shown in FIG. 6C.
  • FIG. 8 is a flowchart showing a procedure for aligning marker positions using the alignment device according to the embodiment.
  • FIG. 9 is a block diagram showing the hardware configuration of this embodiment.
  • Figure 1 is a schematic diagram of the alignment device 100 according to the embodiment and its peripheral devices.
  • the alignment device 100 is connected to a scanning electron microscope 31 (hereinafter referred to as SEM (Scanning Electron Microscope)) and a micro-Raman spectrometer 32.
  • SEM scanning Electron Microscope
  • the alignment device 100 acquires detection data obtained by imaging a sample to be observed using the SEM 31 and detection data obtained by the micro-Raman spectrometer 32, and aligns both sets of detection data.
  • the SEM 31 scanning electron microscope
  • the micro-Raman spectrometer 32 is an example of a second device. Note that a micro-infrared spectrometer may be used as the second device.
  • the alignment device 100 places a marker on the stage on which the sample to be observed is placed, and aligns the detection data captured by the SEM 31 and the detection data detected by the micro-Raman spectrometer 32 using the marker as an index.
  • Figure 2 is an explanatory diagram showing the marker 25 according to the embodiment
  • Figure 3 is an explanatory diagram showing the configuration of the mesh member M included in the marker 25.
  • the mesh member M is formed of a mesh of multiple linear members 11 randomly combined.
  • the linear members 11 are made of a conductive material and have a diameter of, for example, 10 ⁇ m.
  • the linear members 11 are preferably made of a material that does not emit fluorescence or phosphorescence.
  • the linear members 11 are preferably made of aluminum, for example. Note that the linear members 11 need only be conductive and are not limited to aluminum.
  • the marker 25 is formed by spraying an adhesive such as glue onto a mesh member M made of multiple linear members 11 woven randomly, and then pressing the mesh member into a sheet after the glue has been washed away. That is, the marker 25 is formed into a flat plate shape by applying adhesive to the mesh member M. The mesh member M is then cut into strips. Because the mesh member M is made up of multiple linear members 11 randomly combined, the marker 25 has a unique structure.
  • the marker 25 is in contact with multiple conductive linear members 11, all of the linear members 11 forming the mesh member M are electrically conductive to each other. In other words, by grounding a part of the mesh member M to ground, all of the linear members 11 that make up the mesh member M are grounded. Therefore, when measuring a non-conductive material using charged particles with the SEM 31 shown in FIG. 1, the charge on the sample surface can be discharged to ground.
  • the linear member 11 by constructing the linear member 11 from a material that does not emit fluorescence or phosphorescence, a known spectroscopic spectrum that can be distinguished from the sample being observed can be detected in the Raman spectroscopic image detected by the micro-Raman spectroscopic device 32, making it possible to easily identify the position of the mesh member M.
  • the marker 25 in this embodiment is used as an index to align the position of the detection data detected by each device with high precision when a sample placed on the stage is detected by the SEM 31 (first device) and the micro-Raman spectroscopic device 32 (second device). This will be explained in detail below.
  • FIG. 4 is a perspective view of the stage 20 on which the sample to be measured is placed.
  • the stage 20 is disk-shaped, with the center serving as a placement surface 21 for placing the sample, and the peripheral portion 22 of the stage 20 is formed of a metallic material.
  • the peripheral portion 22 is connected to the ground. In other words, the peripheral portion 22 serves as a ground electrode.
  • FIG. 5 is an explanatory diagram showing the state in which the sample s1 and the marker 25 are placed on the mounting surface 21 of the stage 20.
  • the diameter D1 of the mounting surface 21 is, for example, 10 mm.
  • the marker 25 is placed on the mounting surface 21 of the stage 20 so as to overlap a portion of the sample s1.
  • FIG. 5 shows an example in which the marker 25 is placed on the top surface of the sample s1, the sample s1 may also be placed on the top surface of the marker 25.
  • a portion of the marker 25 is in contact with the peripheral portion 22.
  • the conductive mesh member M included in the marker 25 is grounded to ground via the peripheral portion 22. Therefore, as described above, the charge of the sample s1 can be discharged to ground.
  • the SEM 31 (scanning electron microscope) captures a microscopic image of the sample s1 to be observed.
  • the SEM 31 has an EDS (energy dispersive X-ray analysis) function.
  • EDS is a function that performs elemental analysis by detecting characteristic X-rays emitted by atoms excited by an electron beam.
  • WDS wavelength dispersive X-ray analysis
  • the SEM 31 captures a microscope image (first detection data) of the sample s1 and the marker 25 placed on the stage 20. Furthermore, the SEM 31 acquires an EDS image (first detection data) of the sample s1.
  • the EDS image is used to identify the position of the marker 25. That is, the EDS image can be used to extract the area of the components of the linear member 11 (e.g., aluminum atoms), so that the area of the marker 25 can be easily identified.
  • the resolution of the EDS image is about the same as that of the SEM 31, so that detection data with a resolution of about 1 ⁇ m can be acquired with high accuracy.
  • the SEM 31 outputs the detected microscope image and EDS image to the alignment device 100.
  • the microscope image and EDS image are examples of the first detection data.
  • the microscopic Raman spectroscopic device 32 detects a microscopic Raman spectroscopic image (second detection data, hereinafter abbreviated as "Raman spectroscopic image") of the sample s1 and marker 25 placed on the stage 20.
  • the microscopic Raman spectroscopic device 32 outputs data of the detected Raman spectroscopic image to the alignment device 100.
  • the Raman spectroscopic image is an example of second detection data.
  • a microscopic infrared spectroscopic device may be used instead of the microscopic Raman spectroscopic device 32.
  • the second detection data is a microscopic infrared spectroscopic image.
  • the stage 20 may be manually placed at a predetermined measurement position in the SEM 31 and the micro-Raman spectrometer 32 by an operator. Also, the stage 20 may be automatically moved to a predetermined measurement position in the SEM 31 and the micro-Raman spectrometer 32 by a transport mechanism (not shown).
  • the alignment device 100 includes an acquisition unit 101, an extraction unit 102, and a processing unit 103.
  • the acquisition unit 101 acquires data of the microscopic image and EDS image captured by the SEM 31, and data of the Raman spectroscopic image detected by the microscopic Raman spectroscopic device 32. That is, the acquisition unit 101 has a function of acquiring detection data of the sample s1 overlapping the marker 25 and a part of the marker 25, the microscopic image and EDS image (first detection data) detected by the SEM 31 (first device), and the Raman spectroscopic image (second detection data) detected by the microscopic Raman spectroscopic device 32 (second device). Note that, as described above, a WDS image may be used instead of the EDS image.
  • the extraction unit 102 extracts the markers 25 contained in the microscope image and EDS image, and the markers 25 contained in the Raman spectroscopic image.
  • the method of extracting the markers 25 will be described below.
  • FIG. 6A in the sample s1 and the marker 25 placed on the mounting surface 21 of the stage 20, a region D2 with a side of 1000 ⁇ m (1 mm) is extracted as image data of 1024 ⁇ 1024 pixels.
  • FIG. 6B the region D2 including the linear member 11 and the sample s1 is extracted.
  • the linear member 11 has a diameter of about 10 ⁇ m, so the linear member 11 becomes a linear image of about 10 pixels.
  • EDS the region of the Al (aluminum) atoms can be extracted, and the region of the linear member 11 can be easily identified.
  • the resolution of the SEM 31 is about 1 nm. Therefore, for example, an image of an enlarged area D3 with sides of 10 ⁇ m square shown in FIG. 6B can be obtained at high resolution.
  • FIG. 6C shows an image of an enlarged area D3, and for example, area D3 with sides of 10 ⁇ m can be extracted as image data of 1024 x 1024 pixels.
  • a Raman spectroscopic image (not shown) is obtained by the micro-Raman spectroscopic device 32.
  • the theoretical spatial resolution of a typical micro-Raman spectroscopic device 32 is on the order of the laser wavelength (several hundreds of nm to 1 ⁇ m) used as the excitation light. Therefore, the resolution of the Raman spectroscopic image is on the order of 1 ⁇ m, which is the same as the resolution of the microscope using the SEM 31, which produces image data of 1024 x 1024 pixels for an area with sides of 1000 ⁇ m shown in FIG. 6B.
  • Figure 7 is a graph showing the Raman spectrum in region D4, with sides measuring 1 ⁇ m, included in region D3 shown in Figure 6C.
  • the Raman spectroscopic image has spectral data at each measurement point. Since the linear member 11 included in the marker 25 is made of a known material (e.g., aluminum), its Raman spectrum can be obtained in advance. By comparing the spectral data shown in Figure 7 with the spectrum of the linear member 11, the region of the marker 25 in the Raman spectroscopic image can be identified.
  • the extraction unit 102 can extract the marker 25 from the microscope image captured by the SEM 31 and the Raman spectroscopic image detected by the microscopic Raman spectroscopic device 32.
  • the processing unit 103 shown in FIG. 1 aligns the two detection data by superimposing the markers 25 included in the microscope image extracted by the extraction unit 102 and the markers 25 included in the Raman spectroscopic image.
  • the two detection data can be acquired at a resolution of 1 pixel per 1 ⁇ m in a fine line region with a diameter of 10 ⁇ m, so the two images can be aligned with an error accuracy of about 1 ⁇ m.
  • the processing unit 103 performs processing to align the first detection data (microscope image, EDS image) and the second detection data (Raman spectroscopic image) based on the positions of the markers 25.
  • a position is searched for where the degree of overlap of the marker 25 in the two detection data is maximized.
  • the area of the marker 25 extracted from one of the detection data is set to 100%, and an arbitrary threshold value (e.g., 80%) is set.
  • step S11 shown in FIG. 8 the user places the sample s1 to be observed on the mounting surface 21 of the stage 20 shown in FIG. 4, and then places the marker 25 so that it overlaps with a portion of the sample s1.
  • the sample s1 and the marker 25 are placed on the mounting surface 21, as shown in FIG. 5, for example.
  • step S12 the user places the stage 20 shown in FIG. 5 at a predetermined measurement position in the SEM 31 shown in FIG. 1, and acquires a microscope image and an EDS image.
  • the data of the microscope image and the EDS image are output to the acquisition unit 101 of the alignment device 100.
  • step S13 the extraction unit 102 of the alignment device 100 extracts the mesh member M of the marker 25 from the EDS image acquired by the acquisition unit 101. Specifically, as shown in FIG. 6B, the linear member 11 is extracted from the EDS image of the mesh member M included in the region D2 having a side length of 1000 ⁇ m.
  • step S14 the user places the stage 20 shown in FIG. 5 at a predetermined measurement position in the micro-Raman spectroscopic device 32 shown in FIG. 1, and acquires a Raman spectroscopic image.
  • the data of the Raman spectroscopic image is output to the acquisition unit 101 of the alignment device 100.
  • step S15 the extraction unit 102 extracts the mesh member M of the marker 25 from the Raman spectroscopic image acquired by the acquisition unit 101. Specifically, the mesh member M is extracted by comparing the spectrum shown in FIG. 7 with the spectrum of the material of the linear member 11.
  • step S16 the processing unit 103 aligns the position of the mesh member M in the EDS image and the position of the mesh member M in the Raman spectroscopic image.
  • step S17 the processing unit 103 superimposes the microscope image and the Raman spectroscopic image. That is, since the microscope image and the EDS image detected by the SEM 31 correspond to each other, the microscope image and the Raman spectroscopic image can be superimposed on each other based on the relative positional relationship between the EDS image and the Raman spectroscopic image.
  • the marker 25 is a marker 25 used for aligning detection data, and includes a mesh member M that is a random combination of multiple conductive linear members 11, and is formed into a flat plate shape by applying an adhesive (e.g., glue) to the mesh member M.
  • an adhesive e.g., glue
  • the marker 25 according to this embodiment is a random combination of multiple linear members 11, so the probability that there are areas with the same combination pattern is extremely low. Therefore, it is possible to match the mesh members M contained in the markers 25 contained in two different pieces of detection data. As a result, it is possible to align the two pieces of detection data with high accuracy.
  • the marker 25 has a rectangular shape, it can be easily placed on the mounting surface 21 of the stage 20, and the boundary between the marker 25 and the sample s1 can be easily distinguished.
  • the first device is an SEM 31, and the second device is a micro-Raman spectrometer 32 or a micro-infrared spectrometer. Since the detection data detected by the SEM 31 and the micro-Raman spectrometer 32 or the micro-infrared spectrometer can be aligned, it is possible to measure the shape of the sample s1 and simultaneously obtain information on the chemical bonds that make up the molecules of the sample s1. Furthermore, it is possible to determine the characteristics of the sample s1 by superimposing the detection data detected by the SEM 31 and the micro-Raman spectrometer 32 or the micro-infrared spectrometer.
  • the mesh member M is formed by randomly combining a number of conductive linear members 11, and during measurement, the mesh member M is grounded by contacting it with the peripheral portion 22 of the stage 20 shown in FIG. 4. Therefore, when measuring a non-conductive material using charged particles in the SEM 31, the charge on the material surface can be discharged to the ground.
  • the alignment device 100 of the present embodiment described above can be, for example, a general-purpose computer system including a CPU (Central Processing Unit, processor) 901, memory 902, storage 903 (HDD: Hard Disk Drive, SSD: Solid State Drive), communication device 904, input device 905, and output device 906, as shown in FIG. 9.
  • the memory 902 and storage 903 are storage devices.
  • the CPU 901 executes a predetermined program loaded onto the memory 902, thereby realizing each function of the alignment device 100.
  • the alignment device 100 may be implemented in one computer, or in multiple computers.
  • the alignment device 100 may also be a virtual machine implemented in a computer.
  • the program for the alignment device 100 can be stored on a computer-readable recording medium such as a HDD, SSD, USB (Universal Serial Bus) memory, CD (Compact Disc), or DVD (Digital Versatile Disc), or can be distributed via a network.
  • a computer-readable recording medium such as a HDD, SSD, USB (Universal Serial Bus) memory, CD (Compact Disc), or DVD (Digital Versatile Disc), or can be distributed via a network.
  • the computer-readable recording medium is, for example, a non-transitory recording medium.
  • the present disclosure is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist of the disclosure.
  • the first device is an SEM 31 (scanning electron microscope) and the second device is a Raman microspectroscopic device 32, but the present disclosure is not limited to these, and other devices that acquire detection data may be used.

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  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

La présente invention concerne un dispositif d'alignement (100) pour aligner des premières données de détection avec des secondes données de détection à l'aide d'un marqueur de forme plate (25), le dispositif impliquant un élément de maillage (M) ayant une pluralité d'éléments de fil conducteur combinés de manière aléatoire (11), le marqueur impliquant un adhésif fixé à l'élément de maillage (M). Le dispositif d'alignement comprend : une unité d'acquisition (101) qui acquiert, sous la forme de premières données de détection détectées par un SEM (31) et des secondes données de détection détectées par un microspectromètre Raman (32), des données de détection concernant le marqueur (25) et un échantillon (s1) placé pour chevaucher une partie du marqueur (25); une unité d'extraction (102) qui extrait le marqueur (25) inclus dans les première et seconde données de détection; et une unité de traitement (103) qui aligne les premières données de détection avec les secondes données de détection sur la base de la position de chaque marqueur (25).
PCT/JP2023/022570 2023-06-19 2023-06-19 Marqueur, dispositif d'alignement et procédé d'alignement Pending WO2024261804A1 (fr)

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PCT/JP2023/022570 WO2024261804A1 (fr) 2023-06-19 2023-06-19 Marqueur, dispositif d'alignement et procédé d'alignement

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PCT/JP2023/022570 WO2024261804A1 (fr) 2023-06-19 2023-06-19 Marqueur, dispositif d'alignement et procédé d'alignement

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100084555A1 (en) * 2008-10-03 2010-04-08 Inotera Memories, Inc. Preparation method for an electron tomography sample with embedded markers and a method for reconstructing a three-dimensional image
JP2012119079A (ja) * 2010-11-29 2012-06-21 Hiramatsu Sangyo Kk 負極活物質、負極製造方法、負極、及び二次電池
JP2013512348A (ja) * 2009-12-01 2013-04-11 アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニー カーボンナノチューブ浸出繊維材料を含有する金属マトリックス複合材料及びその製造方法
US20140126801A1 (en) * 2012-03-16 2014-05-08 University Of Utah Research Foundation Microscopy Visualization
JP2015523133A (ja) * 2012-06-15 2015-08-13 コーニンクレッカ フィリップス エヌ ヴェ 内視鏡低侵襲手術のための誘導切開計画
JP2016119300A (ja) * 2014-12-22 2016-06-30 エフ・イ−・アイ・カンパニー 基準マークに基づく相関顕微鏡法
WO2016208731A1 (fr) * 2015-06-24 2016-12-29 三菱レイヨン株式会社 Matériau de résine renforcé de fibres, article moulé, procédé et dispositif de fabrication de matériau de résine renforcé de fibres, et dispositif d'inspection de groupe de faisceaux de fibres

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100084555A1 (en) * 2008-10-03 2010-04-08 Inotera Memories, Inc. Preparation method for an electron tomography sample with embedded markers and a method for reconstructing a three-dimensional image
JP2013512348A (ja) * 2009-12-01 2013-04-11 アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニー カーボンナノチューブ浸出繊維材料を含有する金属マトリックス複合材料及びその製造方法
JP2012119079A (ja) * 2010-11-29 2012-06-21 Hiramatsu Sangyo Kk 負極活物質、負極製造方法、負極、及び二次電池
US20140126801A1 (en) * 2012-03-16 2014-05-08 University Of Utah Research Foundation Microscopy Visualization
JP2015523133A (ja) * 2012-06-15 2015-08-13 コーニンクレッカ フィリップス エヌ ヴェ 内視鏡低侵襲手術のための誘導切開計画
JP2016119300A (ja) * 2014-12-22 2016-06-30 エフ・イ−・アイ・カンパニー 基準マークに基づく相関顕微鏡法
WO2016208731A1 (fr) * 2015-06-24 2016-12-29 三菱レイヨン株式会社 Matériau de résine renforcé de fibres, article moulé, procédé et dispositif de fabrication de matériau de résine renforcé de fibres, et dispositif d'inspection de groupe de faisceaux de fibres

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