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WO2024252036A1 - Dispositif optoélectronique pour déterminer de manière simultanée le retard absolu et l'angle de rotation d'un retardateur optique - Google Patents

Dispositif optoélectronique pour déterminer de manière simultanée le retard absolu et l'angle de rotation d'un retardateur optique Download PDF

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Publication number
WO2024252036A1
WO2024252036A1 PCT/ES2023/070617 ES2023070617W WO2024252036A1 WO 2024252036 A1 WO2024252036 A1 WO 2024252036A1 ES 2023070617 W ES2023070617 W ES 2023070617W WO 2024252036 A1 WO2024252036 A1 WO 2024252036A1
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Prior art keywords
retarder
interferometer
optical
optical retarder
rotation
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Spanish (es)
Inventor
Jesús del Hoyo Muñoz
Joaquín Andrés Porras
Ángela SORIA GARCÍA
Luis Miguel Sánchez Brea
Javier Alda Serrano
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Universidad Complutense de Madrid
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Universidad Complutense de Madrid
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass

Definitions

  • Optoelectronic device for simultaneously determining the absolute retardance and the angle of rotation of an optical retarder
  • the present invention is part of the Optical Technology sector and, more specifically, of the optoelectronic devices sector. It relates to an interferometric device for measuring the characteristics of an optical retarder.
  • retarders [1]. These elements can be, among others: birefringent crystal sheets, birefringent thin films deposited on glass, crystals with voltage-induced birefringence (Pockels cells), etc. They are characterized because they introduce a phase shift (absolute retardation) between two different polarizations, which are their fast and slow eigenstates (polarization states that do not change when passing through the retarder except for the acquired phase). These eigenstates are orthogonal to each other, so it is only necessary to characterize one of them.
  • the linear polarization states stand out, in which case the retarder is referred to as a linear retarder, and the eigenstates as axes.
  • the circular polarization eigenstates also stand out, in which case the retarder is referred to as a circular retarder.
  • the rest of the eigenstates are called elliptical.
  • to characterize an optical retarder it is necessary to determine its absolute retardance and the rotation angle of the fast eigenstate, except in the case of the circular retarder since, by definition, a circular polarization state has rotational symmetry.
  • a light source that must be a Gaussian mode laser, a Liquid Crystal on Silicon spatial light modulator in phase modulation to transform the laser beam into a Laguerre-Gauss mode. It also uses a Dove prism to spatially invert one of the interferometer beams, a linear polarizer, a reflector, a CCD camera and a computer. Finally, the fringes captured by the camera have radial symmetry, so it is necessary to use two-dimensional cameras, it being impossible to use one-dimensional or single-photodetector cameras. The system is complex and the analysis of the data is complicated due to the radial symmetry of the device. Finally, the type of spatial light modulator used is composed of small retarders that must be previously characterized.
  • Patent application US20030179375A1 describes a system for characterizing a linear retarder using a previously characterized variable retarder. This system is complex and expensive, since it employs means to modulate the polarization of light, such as a photoelastic modulator (a variable retardation retarder), which must be previously characterized to operate.
  • a photoelastic modulator a variable retardation retarder
  • US7372567B2 describes a method and a polarimetric imaging system capable of measuring the complete polarimetric properties of a sample. This system uses previously calibrated retarding vapors, only measures the relative retardance and has a rather limited precision and a high complexity of measurement and alignment.
  • Patent application US20150100277A1 describes a method and an ellipsometer for measuring the complete polarhmetic properties of a sample, in a similar way to the previous one.
  • This system again, uses previously calibrated retarding vapors, only measures the relative retardation, and presents a high measurement complexity.
  • a device that is capable of simultaneously measuring the absolute retardance and the fast self-state rotation angle of any non-circular retarder, i.e. measurement by this device is not limited to linear retarders.
  • This device has the additional advantage of being able to characterize linear retarders without using any other retarder that must be previously characterized.
  • One aspect of the present invention relates to an optoelectronic device that allows measuring the characteristics of an optical retarder. In particular, it allows simultaneous measurement of the absolute retardance and the angle of rotation of the fast self-state of a non-circular optical retarder.
  • optical retarder or “retardant” means any optical element made from a material whose refractive index depends on the polarization state of the light passing through it.
  • the “polarization eigenstate” of the retarder means the polarization state of a beam that is not modified by the retarder when passing through it.
  • the “fast eigenstate” means the polarization eigenstate of the retarder that acquires more phase when passing through it, and the “slow eigenstate” means the one that acquires less phase.
  • the “axis” means a linear polarization eigenstate.
  • the “absolute retardance” means the phase difference experienced by its two polarization eigenstates.
  • the “rotation angle of the fast eigenstate” means the angle between the reference system and the fast eigenstate.
  • An optoelectronic device scheme described herein for determining the absolute retardance and the fast retarder eigenstate flip angle comprises: a light source, a system for varying the polarization of the light source, a dual-path interferometer, a system for varying the polarization of each of the interferometer arms differently, a retarder rotation system, a system for varying the polarization of the light emerging from the retarder, a photodetection system, and one or more data processing systems.
  • the light source is a device capable of emitting electromagnetic radiation, such as that from a laser beam source, laser diode, LED diode, etc.
  • the emitted light beam may or may not be collimated. It may be monochromatic or polychromatic.
  • the beam may have any polarization state: pure, partially polarized, and may even be a depolarized beam.
  • a beam polarization control system helps to improve the accuracy of the device.
  • the light beam is introduced into a double-path interferometer, for example a Michelson interferometer, a Mach-Zehnder interferometer, a Fresnel biprism, a Young double-slit or a Sagnac interferometer.
  • This interferometer is a device that splits the light beam in two, transforms the polarization of each of them differently, so that they have two polarization states orthogonal to each other. These states must be linear at 0 ° and 90°. Finally, the interferometer combines these beams again without affecting their polarization and maintaining their spatial and temporal coherence.
  • the interferometer may be able to vary the optical path difference of both arms, for example, by shifting one of its components or introducing a variable retarder. Depending on the light collection method, the interferometer must achieve that the beams are collinear or misaligned with each other.
  • both beams pass through the optical retarder and a second polarization control system causes both beams to have the same polarization state, so that they can interfere with each other.
  • a photodetection system such as a photodetector, a one- or two-dimensional photodetector array, or a CCD or CMOS camera.
  • the device will need one type of detector or another.
  • the interferometer generates interference fringes (such as the Young double-slit interferometer or the Michelson interferometer with a misaligned mirror)
  • a photodetector array or a camera must be used, since it is necessary to measure the period and the displacement of these interference fringes.
  • a single photodetector or a spectrometer can be used, and the intensity is measured at a single point, the difference in optical paths between the arms having to be varied in the interferometer.
  • Various measurements are then taken as the optical retarder is rotated. These measurements are fed to a data processing system, such as an electronic circuit or a computer, which outputs the absolute retardance and the fast eigenstate angle of the optical retarder.
  • a data processing system such as an electronic circuit or a computer, which outputs the absolute retardance and the fast eigenstate angle of the optical retarder.
  • One aspect of the invention therefore relates to an optoelectronic device. to simultaneously determine the absolute retardance and the fast eigenstate rotation angle of an optical retarder consisting of:
  • a dual-path interferometer capable of controlling the polarization of the beams from each of its arms
  • the light source may or may not be collimated and is selected from the group consisting of: laser, laser diode, LED, fluorescent lamp and/or incandescent lamp.
  • polarization control systems can be of several types and can be selected from the group consisting of: dichroic polarizers, dichroic sheet polarizers, nanoparticle polarizers, cube polarizers, Brewster polarizers, one-dimensional polarizer arrays and/or two-dimensional polarizer arrays.
  • dichroic polarizers dichroic sheet polarizers
  • nanoparticle polarizers nanoparticle polarizers
  • cube polarizers cube polarizers
  • Brewster polarizers Brewster polarizers
  • one-dimensional polarizer arrays and/or two-dimensional polarizer arrays.
  • the first polarization control system it can be incorporated into the light source itself.
  • the dual-path interferometer can also be selected from a number of options: a Michelson interferometer, a Mach-Zehnder interferometer, a Young double-slit interferometer, a Fresnel biphsma interferometer, or a Sagnac interferometer; and the polarization control systems for the two paths of the interferometer can be selected from polarizers, combinations of polarizers, or arrays of polarizers.
  • the rotating support where the retarder to be studied is placed can be manual or motorized.
  • the photodetection system it is selected from the group consisting of: it consists of a photodetector, a one-dimensional photodetector array, a matrix of three-dimensional photodetectors, a spectrophotometer, a CCD camera or a CMOS camera.
  • the data processing system may be a data processing card with a display, a computer or any other programmable digital electronic machine capable of executing commands to process input data.
  • a first way to determine the absolute retardance and the fast axis is to measure the displacement of a maximum or minimum (or of the fringe pattern as a whole) as the retarder is rotated and make a fit to Eq. 9.
  • a second way is to calculate the extreme values of said displacement, i.e., between which two values a maximum or minimum moves. To do this, one must calculate whose result depends on whether it is a maximum or a minimum.
  • Table 1 shows how, when rotating the retarder, the position of a maximum or minimum will oscillate between two values, and the difference between these two values is twice the absolute retardance. Furthermore, when the position of the maximum or minimum is at its lower value, it is known that the angle of rotation of the fast axis is equal to 0.
  • a second aspect of the invention therefore relates to a method for simultaneously determining the absolute retardance and the fast eigenstate rotation angle of a linear or elliptical optical retarder, using a device such as those described herein and performing the following steps: a) taking at least two measurements of the interference fringes as the optical retarder rotates by means of the rotating support, or the interference fringe pattern as a whole; b) calculating the position of at least one maximum or at least one minimum of the interference fringes in each of the measurements; c) performing an adjustment of the positions to Eq.9.
  • the third aspect of the invention relates to a method for simultaneously determining the absolute retardance and the angle of rotation of the fast self-state of a linear or elliptical optical retarder, using a device such as any of those described in this specification, which includes the following steps: a) measuring the intensity of the photodetection system for at least two optical path differences between the arms of the dual-path interferometer and two rotation angles of the optical retarder whose characteristics are to be determined; b) calculating the position of at least one maximum or at least one minimum of the intensity distributions as a function of the optical path difference, for each rotation angle of the optical retarder; c) making an adjustment of the positions to equation Eq.9.
  • step c) can be replaced by a step d) which consists of determining the rotation angles of the optical retarder at which the positions of the maxima and/or minima of the intensity distributions as a function of the optical path difference are maximum or minimum.
  • This device employs a two-path interferometer to produce two beams with orthogonal polarization states.
  • the beams are recombined before passing through the optical retarder and striking a light detector. Then, by rotating the optical retarder and measuring the changes produced by the light detector, both properties of the retarder can be characterized.
  • This device has the additional advantage of being able to characterize linear optical retarders without using any additional retarders that must be previously characterized. In addition, it is a low-cost system.
  • FIG. 15 Schematically shows an example of the optoelectronic device for determining retardance and fast axis rotation angle of an optical retarder.
  • a light source (1) emits a beam of light that passes through a first polarizer or polarization control system (2).
  • the beam passes through a two-path interferometer (3) that splits it into two, gives each part of the beam a polarization state so that they are orthogonal to each other, and combines them again.
  • the recombined beam then passes through the optical retarder (4) to be measured, which must be capable of rotation.
  • the recombined beam then passes through a second polarizer or polarization control system (5) before being collected by a photodetection system (6).
  • the signals generated by the photodetection system are processed by data processing elements (7).
  • FIG. 2 Schematic of a device for measuring the absolute retardance and the fast eigenstate flip angle of an optical retarder.
  • the light source (1) consists of a collimated He-Ne laser (1.1) with linear output polarization at 45°.
  • the dual-path interferometer controlling the polarization of each beam (3) consists of a polarization-insensitive 50/50 beam splitter cube (3.1) that splits the beam in two.
  • One of the output beams passes through a first polarizer at 90° (11.1), reflects off a mirror (8), and passes back through the first polarizer at 90° (11.1).
  • the other beam passes through a second polarizer at 0 o (11 .2), reflects off a misaligned mirror (9) such that an interference intensity distribution is obtained at the location of the CMOS camera (6.1), and passes back through the second polarizer at 0 o (11.2).
  • Both beams pass through the retarder being measured (4), which is placed on a motorized rotating support (10) to measure its angular position.
  • both beams pass through a third polarizer at 45° (5.1), and hit a CMOS camera (6.1).
  • the camera data is processed by a computer.
  • FIG. 3 Schematic of a device for measuring the absolute retardance and the fast eigenstate rotation angle of an optical retarder.
  • the light source (1) consists of a laser diode (1.2) collimated with a lens (12).
  • the light beam from the diode passes through a first polarizer (2.1) at 45° and a double slit (3.2).
  • the light emerging from each of the slits passes through a different polarizer, a second polarizer (3.3) and a third polarizer (3.4).
  • the light emerging from the The polarizers (11.1 and 11.2) pass through the optical retarder (4) to be characterized, which is mounted on a manual rotating support (10).
  • a second lens (12) is used to observe the interference fringes in the far field.
  • a one-dimensional photodetector array (6.2) is placed oriented in such a way that the interference fringes coincide with its direction.
  • the signal from the one-dimensional photodetector array is received by a processing card (7.2). This card is connected to a touch screen (13) to control the measurement. It also has a marking system (15), specifically, using ink.
  • Figure 4 Shows how the interference fringes move when rotating a 90° retardance linear retarder (quarter-wave plate) with an initial fast axis twist angle of 67.5° when mounted on the rotating stand.
  • the dotted lines show the positions between which the first interference maximum moves.
  • An arrow identifies the rotation angle where the first interference maximum is located furthest to the left, which coincides with the fast axis twist angle of 0°.
  • FIG. 5 Schematic of a device for measuring the absolute retardance and the fast eigenstate rotation angle of an optical retarder.
  • the light source (1) consists of a directional white light source (1.3) but not necessarily collimated, which passes through a first polarizer (2.1) at 45°. The light then falls on a polarizing beam splitter cube (3.3), so that the light polarized at 0 o is reflected and the light polarized at 90° is transmitted.
  • a system is introduced to vary the optical path of one of the arms, composed of two motorized mobile prisms (3.4), placed in such a way that applying a voltage to it alters the optical path of the arm in which it is located.
  • Both light beams are reflected in two mirrors (8) to recombine again with a 50/50 beam splitter cube (3.1) insensitive to polarization.
  • the recombined beams pass through the optical retarder (4) to be measured, which will have been placed on a motorized rotating support (10), and a second polarizer (5.1) at 45°.
  • a light collection system (14) such as a lens and an optical fiber, collects the two light beams and takes them to a spectrophotometer (6.3) controlled by a computer (7.1), which also controls the motorized rotating support (10) and the optical path difference introduced by the two motorized mobile prisms (3.4).
  • an optoelectronic device based on a collimated laser, a Michelson interferometer, a motorized rotating stage and a CMOS camera is shown to measure the absolute retardance and the twist angle of the fast eigenstate with high precision.
  • Example 2 an optoelectronic device is shown that employs a collimated laser diode, a Young interferometer, a manual rotating stand for the optical retarder and a one-dimensional photodetector array to fabricate a very compact and potentially cheap device.
  • Example 3 a system composed of a white light source, a Mach-Zehnder interferometer, a motorized optical path shifter, a motorized rotating stand for the optical retarder and a spectrophotometer to measure the retardance and the twist angle of the fast eigenstate for several wavelengths simultaneously is shown.
  • Figure 1 shows a simplified diagram of the devices described below and represents: a light source (1), a first polarizer or first polarization control system (2), a dual-path interferometer (3), the optical retarder (4) that is being measured or that is to be characterized, a second polarizer or second polarization control system (5), a photodetection system (6) and a data processing system (7).
  • Example 1 Optoelectronic device including a collimated laser, a Michelson interferometer, a motorized rotating mount for the optical retarder being measured, and a CMOS camera.
  • the light source (1) consists of a collimated He-Ne laser (1.1) with linear output polarization at 45°.
  • the dual-path interferometer (3) is a Michelson interferometer, and features a polarization control system including two polarizers. It consists of a polarization-insensitive 50/50 beam splitter cube (3.1) that splits the beam in two.
  • One of the output beams passes through a first 90° polarizer (11.1), a dichroic polarizer in this example, is reflected off a mirror (8), and passes back through the first 90° polarizer (11.1).
  • the other beam passes through a second polarizer at 0 o (11.2), a dichroic sheet polarizer in this example, is reflected by an offset mirror (9), in this example 1 o , so that a phase is introduced according to Eq. 2 and a periodic intensity distribution is obtained at the location of the CMOS camera (6.1), and passes through the second polarizer again at 0 o (11.2).
  • the optical path of both arms is the same except for a slight inclination of one of the mirrors (9) to produce interference fringes. All these elements are glued together, so the difference in optical paths does not change, and a very compact device is obtained that does not need to be aligned except during its manufacture.
  • Both beams pass through the retarder being measured (4), which is mounted on a motorized rotating stand (10) to measure its angular position. Finally, both beams pass through a third 45° polarizer (5.1), a nanoparticle polarizer in this example, and hit a CMOS camera (6.1). The camera data is processed by a computer (7.1), which in turn controls the motorized rotating stand (10).
  • This device is very compact.
  • the device is designed to be used in such a way that interference fringes appear on the camera.
  • the computer (7.1) controls both the motor of the motorized rotating stand (10), allowing the retarder to rotate when necessary, and the CMOS camera (6.1).
  • the computer (7.1) takes each frame and integrates it in the direction of the interference fringes to obtain an accurate signal. Then, using the computer (7.1) the method of fitting to Eq. 9 is used if the optical retarder (4) to be measured is linear (the most accurate method), or the method of measuring the displacement ends of the fringes if the retarder (4) is not linear according to Table 1 and Figure 4.
  • Optoelectronic device including a collimated laser diode, a Young interferometer, a manually rotating holder for the retarder, and a one-dimensional photodetector array.
  • the light source (1) consists of a laser diode (1.2) collimated with a lens (12).
  • the light beam from the diode passes through a first polarizer (2.1) at 45° and a double slit (3.2).
  • the light emerging from each of the slits passes through a different polarizer of the polarization control system of the double-path interferometer (3): a polarizer (11.1) at 90° and another polarizer (11.2) at 0 o .
  • the laser diode (1.2), the collimating lens (12), the three polarizers (2.1, 11.1 and 11.2) and the double slit (3.2) are glued together to generate a very compact device that does not require alignment once mounted.
  • the light emerging from the polarizers (11.1 and 11.2) of the polarization control system of the dual-path interferometer (3) passes through the optical retarder (4) to be characterized, which is mounted on a manual rotating support (10).
  • a second lens (12) is used to observe the interference fringes in the far field.
  • a one-dimensional photodetector array (6.2) is placed oriented in such a way that the interference fringes coincide with its direction.
  • the signal from the one-dimensional photodetector array is received by a processing card (7.2). This card is connected to a touch screen (13) to control the measurement.
  • the optical retarder (4) placed on the rotating support (10) is manually rotated.
  • the processing card (7.2) analyzes the data sent by the one-dimensional photodetector array (6.2) to find the angles of rotation in which the fringes are most displaced in one direction or another of the one-dimensional photodetector array. Once it has identified both positions, it offers the result of the absolute retardance measurement on the screen (13) according to the result shown in Table 1. In addition, the user must continue rotating the optical retarder (4).
  • FIG. 4 shows a simulation of how the fringes shift when rotating a quarter-wave foil (linear retarder with 90° retardance) with an initial fast axis rotation angle of 67.5°.
  • the angle of rotation of the retarder (4) where the fast axis rotation angle is 0 o , and how the retardance is measured from the positions of maximum displacement in both directions is also identified.
  • Example 3 Optoelectronic device including a white light source, a Mach-Zehnder interferometer with an optical path shifter, and a spectrometer.
  • the light source (1) consists of a directional white light source (1.3) but not necessarily collimated, which passes through a first polarizer (2.1) at 45°. The light then falls on a polarizing beam splitter cube (3.3), so that the light polarized at 0 o is reflected and the light polarized at 90° is transmitted.
  • a system is introduced to change the optical path of one of the arms composed of two motorized mobile prisms (3.4), placed in such a way that applying a voltage to it alters the optical path of the arm in which it is located.
  • Both light beams are reflected in two mirrors (8) to recombine again with a 50/50 beam splitter cube (3.1) insensitive to polarization.
  • the recombined beams pass through the optical retarder (4) to be measured, which will have been placed on a motorized rotating support (10), and a second polarizer (5.1) at 45°.
  • a light collection system (14) such as a lens and an optical fiber, collect the two light beams and carry them to a spectrophotometer (6.3) controlled by a computer (7.1), which also controls the motorized rotating support (10) and the optical path difference introduced by the two motorized mobile prisms-(3.4).
  • the motorized rotating support (10) is set to rotate at a constant speed, in this example at 10 revolutions per minute.
  • the computer (7.1) simultaneously receives the spectrum of the light measured by the spectrophotometer (6.3) and the rotation position of the motorised rotating support (10).
  • the optical path of one of the arms of the double path interferometer (3) is varied by moving the motorised mobile double prism system (3.4), proceeding to measure the spectra again for the same rotation angles.
  • the computer analyses the data and can provide the measurement of the absolute retardance and the fast eigenstate rotation angle of the optical retarder (4) for the whole light spectrum covered by the light source (1) and the spectrophotometer (6.3).
  • the method of fitting to Eq. 9 is used if the optical retarder (4) to be measured is linear (the most accurate method), or the method of measuring the extremes of the interference fringe shifts if the retarder (4) is not linear according to Table 1 and Figure 4.

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Abstract

Dispositif optoélectronique pour déterminer le retard absolu et l'angle de rotation d'un retardateur optique. Dispositif optoélectronique pour déterminer de manière simultanée le retard absolu et l'angle de rotation de la déclaration rapide d'un retardateur optique (4). Le dispositif comprend une source de lumière (1), un système de commande de la polarisation (2), un interféromètre (3) capable de produire deux états de polarisation différents, un système de rotation du retardateur optique (4) à caractériser, un second système de commande de polarisation (5), un système de photodétection (6) et un système de traitement des données (7). L'invention comprend également des procédés pour calculer de manière simultanée le retard absolu et l'angle de rotation de l'axe rapide d'un retardateur optique (4) à partir des mesures de l'angle de rotation du retardateur (4) et du système de photodétection (6).
PCT/ES2023/070617 2023-06-09 2023-10-19 Dispositif optoélectronique pour déterminer de manière simultanée le retard absolu et l'angle de rotation d'un retardateur optique Pending WO2024252036A1 (fr)

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ES202330488A ES2948491B2 (es) 2023-06-09 2023-06-09 Dispositivo optoelectrónico para determinar de forma simultánea la retardancia absoluta y el ángulo de giro de un retardador óptico

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WO2008151155A2 (fr) * 2007-05-31 2008-12-11 Board Of Regents, The University Of Texas System Interférométrie spectrale sensible à la polarisation

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WO2008151155A2 (fr) * 2007-05-31 2008-12-11 Board Of Regents, The University Of Texas System Interférométrie spectrale sensible à la polarisation

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