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WO2024246987A1 - Procédé de retrait de revêtement pour outil, et dispositif de retrait de revêtement - Google Patents

Procédé de retrait de revêtement pour outil, et dispositif de retrait de revêtement Download PDF

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Publication number
WO2024246987A1
WO2024246987A1 PCT/JP2023/019699 JP2023019699W WO2024246987A1 WO 2024246987 A1 WO2024246987 A1 WO 2024246987A1 JP 2023019699 W JP2023019699 W JP 2023019699W WO 2024246987 A1 WO2024246987 A1 WO 2024246987A1
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WO
WIPO (PCT)
Prior art keywords
coating
pressure
plasma
valley
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2023/019699
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English (en)
Japanese (ja)
Inventor
靖典 安東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to PCT/JP2023/019699 priority Critical patent/WO2024246987A1/fr
Priority to CN202380090118.5A priority patent/CN120456993A/zh
Priority to JP2025523636A priority patent/JPWO2024246987A1/ja
Publication of WO2024246987A1 publication Critical patent/WO2024246987A1/fr
Anticipated expiration legal-status Critical
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Definitions

  • the present invention relates to a coating removal method and coating removal device that uses plasma to remove coatings from tools.
  • coated tools in which a coating process is applied to the surface of a base material made of tool steel or cemented carbide, thereby imparting additional properties such as wear resistance and heat resistance to the inherent properties of the base material.
  • the coating formed on the surface wears away and peels off as the tool is used, reaching the end of its life.
  • such used tools were often discarded without being reused, but in recent years, the coating on the surface of used tools has been completely removed (de-coated) and re-coated, allowing them to be reused.
  • Patent Document 1 describes a method for removing surface coatings by irradiating the tool with an ion beam emitted from an ion source.
  • this type of method using ion beam irradiation has a problem in that the processing area is narrow, so only a small number of tools can be processed at one time, making it an inefficient decoating process.
  • Coating removal methods that use plasma have the advantage that they can generate plasma over a wide area within the vacuum chamber, making it possible to treat a larger number of tools compared to methods that use ion beams, which have a narrow treatment area.
  • a potential difference occurs between the plasma and the surface of the tool, and a region called a plasma sheath, in which the flow of electrons and ions changes significantly compared to in the plasma, is formed to cover the surface, and this plasma sheath can become a barrier to efficient coating removal.
  • the distance to the plasma sheath surface the boundary surface between the plasma sheath and the plasma
  • the coating formed on the edge of the valley can be removed in a short time, it takes time to remove the coating formed on the bottom of the valley, and the coating cannot be removed efficiently overall, resulting in extra power consumption.
  • the present invention was made to solve these problems, and its main objective is to use plasma to efficiently remove the coating formed on the surface of a tool with a peak-valley structure.
  • the thickness of the plasma sheath formed around the tool can be adjusted by changing the pressure value in the vacuum vessel in which the plasma is generated.
  • the inventors have discovered that when removing a coating from a tool having a crest-valley (uneven) structure on the surface in which crests and valleys are arranged alternately, such as a drill, end mill, hob, or tap, the thickness of the plasma sheath can be reduced by increasing the pressure in the vacuum vessel, thereby increasing the ion incidence density near the bottom of the valleys of the crest-valley structure and efficiently removing the coating at the bottom, while decreasing the pressure in the vacuum vessel increases the thickness of the plasma sheath and increases the ion incidence density near the edge of the valleys, thereby efficiently removing the coating at the edge, and that by performing plasma processing under a combination of these multiple pressure conditions, the coating on the tool can be efficiently removed, which led to the present invention.
  • the coating removal method for a tool is a coating removal method in which a tool having a surface with a mountain-valley structure in which mountain portions and valley portions are alternately arranged is placed in a vacuum vessel, and the coating formed on the surface of the tool is removed by performing plasma treatment using the plasma, and is characterized in that the method switches between one or more times between a high-pressure plasma treatment process in which the pressure in the vacuum vessel is set to a predetermined first pressure value and plasma treatment is performed to make the coating removal rate at the bottom of the valleys greater than the coating removal rate at the edges of the valleys, and a low-pressure plasma treatment process in which the pressure in the vacuum vessel is set to a second pressure value smaller than the first pressure value and plasma treatment is performed to make the coating removal rate at the edges greater than the coating removal rate at the bottom.
  • the thickness of the plasma sheath formed on the tool surface can be reduced in a high-pressure plasma processing process in which the pressure value is relatively high, thereby increasing the ion incidence density near the bottom of the valleys of the peak-valley structure and efficiently removing the coating at the bottom, while in a low-pressure plasma processing process in which the pressure value is relatively low, the thickness of the plasma sheath can be increased, thereby increasing the ion incidence density near the edges of the valleys of the peak-valley structure and efficiently removing the coating at the peaks.
  • a specific embodiment of the coating removal method is one in which the thickness of the plasma sheath formed around the tool in the high-pressure plasma treatment process relative to the valley portion is smaller than the thickness of the plasma sheath formed in the low-pressure plasma treatment process relative to the valley portion.
  • the coating removal method preferably involves switching between the high pressure plasma treatment step and the low pressure plasma treatment step at least two times.
  • the high-pressure plasma treatment process and the low-pressure plasma treatment process are alternately performed once each, there is a risk that the coating components removed and scattered in the plasma treatment process after the switching will re-adhere to the surface of the tool exposed by removing the coating in the plasma treatment process before the switching and remain without being removed.
  • By alternately performing the high-pressure plasma treatment process and the low-pressure plasma treatment process two or more times it becomes possible to more reliably remove such re-adhered coating components.
  • the plasma treatment is preferably carried out using inductively coupled plasma.
  • the high density plasma can be used to increase the film removal rate and more efficiently remove the film.
  • a coating removal device for a tool is a coating removal device that uses plasma to remove a coating formed on the surface of a tool having a surface with a mountain-valley structure in which mountain and valley portions are alternately arranged, and is characterized in that the coating removal device comprises a vacuum vessel in which the tool is placed, a plasma source that generates plasma in the vacuum vessel, and a control device that controls the pressure in the vacuum vessel and switches between a high-pressure plasma treatment mode in which plasma treatment is performed by setting the pressure in the vacuum vessel to a predetermined first pressure value and making the coating removal rate at the bottoms of the valleys greater than the coating removal rate at the edges of the valleys, and a low-pressure plasma treatment mode in which plasma treatment is performed by setting the pressure in the vacuum vessel to a second pressure value smaller than the first pressure value and making the coating removal rate at the edges of the valleys greater than the coating removal rate at the bottom of the valleys, and the control device removes the coating formed on the surface of the tool by switching between the high-pressure
  • the present invention configured in this way, can efficiently remove coatings formed on the surface of tools with a peak-valley structure using plasma.
  • FIG. 1 is a vertical cross-sectional view showing a schematic configuration of a coating removal device according to an embodiment of the present invention
  • FIG. 2 is a cross-sectional view showing a schematic configuration of the coating removal device according to the embodiment.
  • FIG. 2 is a diagram showing a tool to be treated by the coating removal device of the embodiment.
  • FIG. 2 is a diagram for explaining the principle of the coating removal method using the coating removal apparatus of the embodiment, showing the relationship between plasma density and a plasma sheath surface formed around the tool.
  • 1 is a graph showing the position of the remaining end of the coating when a coating removal test is performed under various different conditions.
  • 13 is a graph showing the amount of power from a high-frequency power source when a coating removal test is performed under different pressure conditions.
  • the coating removal device 100 of this embodiment removes a coating formed on the surface of a tool T by plasma processing using inductively coupled plasma.
  • the coating removal device 100 comprises a vacuum vessel 1 forming a processing chamber S which is evacuated to a vacuum and into which gas is introduced, an antenna 2 provided outside the vacuum vessel 1, and a high frequency power supply 3 which applies high frequency waves to the antenna 2.
  • a high frequency current flows through the antenna 2, generating an induced electric field within the vacuum vessel 1 and generating an inductively coupled plasma.
  • the plasma source is made up of the antenna 2 and the high frequency power supply 3 which applies high frequency waves to it.
  • the tool T which is the processing target of the coating removal device 100 of this embodiment, is a so-called coated tool, and is a tool having a coating (also called a coating film) formed on the surface of a base material made of, for example, tool steel or cemented carbide.
  • the coating is formed on the surface of the base material of the tool by a chemical vapor deposition method (CVD method) or a physical vapor deposition method (PVD method) for the purpose of improving, for example, hardness, wear resistance, or heat resistance.
  • CVD method chemical vapor deposition method
  • PVD method physical vapor deposition method
  • Specific examples of the coating include Ti-based coating films such as TiN coating film and TiAlN coating film, Cr-based coating films such as CrN coating film and AlCrN coating film, and DLC (amorphous hard carbon) coating film.
  • the tool T has a mountain-valley structure Z in which peaks M and valleys V (also called convexities and concaves), such as drill grooves, are alternately arranged on the surface of the base material, and a coating is formed on the surface of the mountain-valley structure.
  • the tool T is preferably a cutting tool such as a drill or an end mill, but is not limited to this.
  • the tool T that is the subject of processing in this embodiment is a drill that has a helical groove, or peak-valley structure Z, on its surface, as shown in FIG. 3.
  • the vacuum vessel 1 is, for example, a metal vessel, and in this embodiment, has a cylindrical shape. An opening is formed in the wall of the vacuum vessel 1 (here, the side wall 1a) that penetrates in the thickness direction.
  • the vacuum vessel 1 is electrically grounded here, and the processing chamber S inside it is evacuated by the vacuum exhaust device 4.
  • a plasma generating gas is introduced, for example, via a flow regulator 11 or one or more gas inlets 12 provided in the vacuum vessel 1.
  • the plasma generating gas is, for example, a rare gas such as argon gas, a halogen gas, or a mixture of these, and may be changed as appropriate depending on the material of the coating to be removed.
  • the gas inlet 12 is provided, for example, in the vicinity of the other side wall 1b opposite the side wall 1a in which the opening is formed, in the vacuum vessel 1, so as to blow out the plasma generating gas sideways toward the opening.
  • the gas inlet 12 is not limited to a position opposite the opening formed in the side wall 1a, and may be provided at any position. In this embodiment, multiple gas inlets 12 are provided along the axial direction (up and down direction) of the vacuum vessel 1.
  • the antenna 2 is arranged to face the opening formed in the vacuum vessel 1.
  • the number of antennas 2 is not limited to one, and multiple antennas 2 may be provided.
  • the antenna 2 in this embodiment is rod-shaped and is installed upright along the axial direction (vertical direction) of the vacuum vessel 1.
  • One end of the antenna 2, the power supply end 2a, is connected to the high-frequency power source 3 via a matching circuit 31, and the other end, the termination end 2b, is directly grounded.
  • the termination end 2b may also be grounded via a capacitor or coil, etc.
  • the high-frequency power supply 3 can pass a high-frequency current through the antenna 2 via a matching circuit 31.
  • the frequency of the high-frequency current is, for example, a typical 13.56 MHz, but is not limited to this and may be changed as appropriate.
  • This coating removal device 100 has a magnetic field transmission window W that allows the magnetic field generated by the antenna 2 to pass through.
  • the coating removal device 100 is equipped with a slit plate 7 that blocks an opening formed in the wall (side wall 1a) of the vacuum vessel 1 from the outside of the vacuum vessel 1, and a dielectric plate 8 that blocks a slit formed in the slit plate 7 from the outside of the vacuum vessel 1, and the slit plate 7 and the dielectric plate 8 form a magnetic field transmission window W.
  • the slit plate 7 allows the high-frequency magnetic field generated by the antenna 2 to pass through the vacuum vessel 1, while preventing the electric field from entering the inside of the vacuum vessel 1 from the outside.
  • the slit plate 7 is a flat rectangular metal plate with multiple slits that run through it in the thickness direction and are aligned at equal intervals along the longitudinal direction of the antenna 2.
  • the slit plate 7 is larger than the opening of the vacuum vessel in a plan view, and is supported by the side wall 1a to close the opening.
  • a sealing member such as an O-ring or gasket is interposed between the slit plate 7 and the side wall 1a, creating a vacuum seal between them.
  • the dielectric plate 8 is provided on the outward surface of the slit plate 7 that faces the outside of the vacuum vessel 1, and covers the slits of the slit plate 7.
  • the dielectric plate 8 is a flat plate made entirely of a dielectric material, such as ceramics such as alumina, silicon carbide, and silicon nitride, inorganic materials such as quartz glass and non-alkali glass, and resin materials such as fluororesin (e.g. Teflon).
  • a sealing member such as an O-ring or gasket is interposed between the dielectric plate 8 and the slit plate 7, and a vacuum seal is formed between them.
  • the high frequency magnetic field generated from the antenna 2 passes through the magnetic field transmission window W consisting of the slit plate 7 and the dielectric plate 8 and is formed (supplied) inside the vacuum vessel 1. This generates an induced electric field in the space inside the vacuum vessel 1, generating an inductively coupled plasma.
  • the coating removal device 100 is provided with a tool holder 5 that holds a tool T within the vacuum vessel 1.
  • This tool holder 5 is configured to hold a plurality of tools T and to rotate and move the plurality of tools T within the vacuum vessel 1.
  • this tool holder 5 includes a disk-shaped rotating table 51 that rotates within the vacuum vessel 1, a shaft 52 connected to the central axis (rotation axis) of the rotating table 51, and a drive device 53 (specifically a motor) that rotates the shaft 52.
  • the rotating table 51 is provided near the bottom wall 1c of the vacuum vessel 1 so that its central axis (axis of rotation) coincides with the axial direction (vertical direction) of the vacuum vessel 1.
  • a number of holding parts 511 are provided for holding the tool T upright with its tip facing upwards.
  • the multiple holding parts 511 are provided so as to be rotationally symmetrical to one another about the central axis of the rotating table 51 when viewed from the vertical direction.
  • the shaft 52 is a rod-shaped metal member with one end connected to the underside of the rotating table 51, and is arranged so as to coincide with the axial direction of the vacuum vessel 1.
  • the shaft 52 passes through the bottom wall 1c of the vacuum vessel 1, and one end is connected to a drive unit 53 placed outside the vacuum vessel 1.
  • the space between the shaft 52 and the bottom wall 1c is sealed with an insulating sealing member.
  • the rotary table 51 rotates when the shaft 52 is rotated by the drive device 53, and as a result, the multiple tools T held by the multiple holding parts 511 of the rotary table 51 rotate around the shaft 52. Note that in this embodiment, when the shaft 52 is rotated by the drive device 53, each holding part 511 itself is also configured to rotate on the rotary table 51.
  • the coating removal device 100 is equipped with a bias power supply 6 that applies a bias voltage to the tool holder 5.
  • the bias voltage is, for example, but not limited to, a negative DC voltage. This bias voltage controls the energy of positive ions in the plasma when they are incident on the coating on the surface of the tool T, thereby controlling the coating removal speed, etc.
  • the coating removal device 100 is equipped with a control device 9 that controls the conditions of the coating process.
  • This control device 9 is a computer that has an analog electrical circuit with, for example, a buffer, an amplifier, etc., a digital electrical circuit with a CPU, memory, or DSP, etc., and an A/D converter interposed between them.
  • the control device 9 performs the functions of an antenna power control unit 91, a bias voltage control unit 92, a pressure control unit 93, and a holder control unit 94 by the CPU and its peripheral devices working together in accordance with a predetermined program stored in the memory.
  • the antenna power control unit 91 controls the output of the high frequency power supply 3 and controls the high frequency current flowing through the antenna 2.
  • the bias voltage control unit 92 controls the bias power supply 6 and controls the bias voltage value applied to the tool holder 5.
  • the pressure control unit 93 controls the flow rate of the plasma generation gas supplied to the processing chamber S by controlling the flow regulator, and also controls the pressure inside the processing chamber S by adjusting the opening of a vacuum exhaust valve (not shown) installed on the top of the vacuum pump 4.
  • the holder control unit 94 controls the rotation of the rotary table 51 by controlling the drive unit 53.
  • the coating removal device 100 of this embodiment is capable of performing a high-pressure plasma processing mode in which the pressure inside the vacuum vessel 1 is set to a predetermined first pressure value and plasma processing is performed by adjusting the flow rate of the plasma generating gas supplied to the processing chamber S and the opening degree of the vacuum exhaust valve by the pressure control unit 93, and a low-pressure processing mode in which the pressure inside the vacuum vessel 1 is set to a second pressure value smaller than the first pressure value and plasma processing is performed by alternately switching between these two plasma processing modes to remove the coating formed on the surface of the tool T.
  • the coating removal device 100 of this embodiment can change the shape of the plasma sheath surface formed between the plasma formed in the processing chamber S and the surface of the tool T by switching between a high-pressure processing mode and a low-pressure processing mode, thereby efficiently removing the coating formed on the peak-valley structure Z of the tool T.
  • the first pressure value is set to a value at which the plasma sheath surface is formed along the surface of the valley V of the tool T and ions in the plasma can be incident on the bottom V1 of the valley V.
  • this first pressure value is set so that when plasma processing is performed, the removal rate (or ion incident density) of the coating at the bottom V1 of the valley V is greater than the removal rate (or ion incident density) of the coating at the edge V2 of the valley V.
  • FIG. 4(a) shows a cross section of the tool T.
  • FIG. 4(b) is similar.
  • the removal rate of the coating at the bottom V1 of the valley V is greater than the removal rate of the coating at the bottom V1 of the valley V in the low-pressure plasma treatment process described below.
  • the second pressure value is set to a value at which the plasma sheath surface is formed at a position farther from the surface of the tool T than in the case of the first pressure value (i.e., the plasma sheath is formed thicker), and ions in the plasma are more likely to be incident on the edge V2 of the valley V than on the bottom V1 of the valley V.
  • this second pressure value is set so that, when plasma processing is performed, the removal rate (or ion incident density) of the coating at the edge V2 of the valley V is greater than the removal rate (or ion incident density) of the coating at the bottom V1 of the valley V.
  • the low-pressure plasma processing mode also called the low-pressure plasma processing step
  • the coating formed on the edge V2 of the valley V of the tool T i.e., the outer region of the valley V
  • the region where the surface of the substrate is exposed gradually expands from the edge V2 of the valley V to the bottom V1.
  • the removal rate of the coating on the edge V2 of the valley V is greater than the removal rate of the coating on the edge V2 of the valley V in the previously described high-pressure plasma treatment process.
  • the coating removal device 100 preferably alternates between the high-pressure plasma treatment process and the low-pressure plasma treatment process at least once, preferably at least twice, at a predetermined timing to remove the coating from the tool T. Either the high-pressure plasma treatment process or the low-pressure plasma treatment process may be performed first.
  • the amount of high-frequency power supplied to the antenna 2 in the high-pressure plasma processing step and the low-pressure plasma processing step may be the same or different.
  • the amount of high-frequency power supplied to the antenna 2 is, for example, 400 W to 1000 W, but is not limited to this.
  • ⁇ Effects of this embodiment> when removing a coating from a tool T having a peak-valley structure Z in which peaks M and valleys V, such as spiral grooves, are arranged alternately, in a high-pressure plasma processing process in which the pressure value is relatively high, the thickness of the plasma sheath formed on the surface of the tool T is reduced, thereby increasing the ion incidence density, for example, near the inside (bottom V1, etc.) of the valley V of the peak-valley structure, and the coating on the bottom V1 can be efficiently removed; on the other hand, in a low-pressure plasma processing process in which the pressure value is relatively low, the thickness of the plasma sheath is increased, thereby increasing the ion incidence density, for example, near the outside (edge V2) of the valley V of the peak-valley structure Z, and the coating on the edge V2 can be efficiently removed.
  • the coating removal device 100 of the above embodiment is configured to switch between a high pressure plasma treatment process and a low pressure plasma treatment process, thereby switching between two different pressure conditions to perform the plasma treatment, but is not limited to this.
  • the coating removal device 100 of another embodiment may be configured to perform the plasma treatment at a third pressure value different from the first pressure value and the second pressure value, and to switch between three different pressure conditions to perform the plasma treatment.
  • the plasma processing is performed using inductively coupled plasma, but this is not limited to the above.
  • the plasma processing may be performed using plasma generated by other methods, such as capacitively coupled plasma.
  • the plasma source does not have to be configured using an antenna and a high-frequency power source.
  • the tool T is a drill and the peak-valley structure Z is a spiral groove, but this is not limited to this.
  • the tool T may be an end mill, a hob, a tap, or the like, and the peak-valley structure Z may be any uneven shape formed on the working part of these tools, such as a thread groove or cutting edge.
  • example 1 to 3 three 4 mm diameter drills (tools T) were prepared and coating removal processing was performed under different plasma processing conditions (samples 1 to 3).
  • the high frequency power applied to the antenna 2 was 500 W, and the pressure condition in the vacuum vessel 1 during plasma processing was 5 Pa, and coating removal was performed by plasma processing.
  • the high frequency power applied to the antenna 2 was 500 W, and the pressure condition in the vacuum vessel 1 during plasma processing was 15 Pa, and coating removal was performed by plasma processing.
  • sample 3 the high frequency power applied to the antenna 2 was 800 W, and the pressure condition in the vacuum vessel 1 during plasma processing was 5 Pa, and coating removal was performed by plasma processing.
  • the results are shown in Figure 5.
  • the vertical axis of Figure 5 indicates the position of the remaining end of the coating on the tool during plasma processing (i.e., the boundary position between the exposed tool surface and the coating).
  • sample 3 which was plasma-treated with a vacuum vessel 1 pressure of 5 Pa and a high-frequency power of 800 W, the position of the remaining end moved over time from the outside (edge V2) of valley V to the inside (bottom V1), and the coating was removed in sequence from the outside of valley V. It was confirmed that in sample 3, the coating removal rate could be improved compared to sample 1, which was subjected to the same pressure conditions but lower high-frequency power. It was confirmed that, regardless of the conditions, the coating formed on the surface of the valley portion V could be completely removed by performing the treatment continuously.
  • Figure 6 shows the relationship between the amount of high frequency power required for coating treatment when plasma processing is performed under a single pressure condition (high frequency power of 800 W, pressure inside the vacuum chamber of 5 Pa) and the amount of high frequency power required for coating treatment when plasma processing is performed by switching the pressure condition between high pressure (500 W, 15 Pa) and low pressure (500 W, 5 Pa).
  • high frequency power 800 W, pressure inside the vacuum chamber of 5 Pa
  • high pressure 500 W, 15 Pa
  • low pressure 500 W, 5 Pa
  • the coating removal device of the present invention configured in this way can efficiently remove coatings formed on the surface of tools with a peak-valley structure using plasma.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

L'invention concerne un procédé de retrait de revêtement pour retirer un revêtement formé sur la surface d'un outil, qui est réalisé par génération de plasma dans un contenant sous vide dans lequel l'outil, ayant une structure à creux et vallées dans laquelle des parties de creux et de vallée sont agencées en alternance sur la surface, est disposé et par réalisation d'un traitement au plasma avec du plasma. Le procédé de retrait de revêtement effectue une commutation une fois ou plus entre une étape de traitement au plasma à haute pression, dans laquelle un traitement au plasma est effectué avec la pression de contenant sous vide réglée à une première valeur de pression prédéterminée, amenant la vitesse de retrait du revêtement au fond des parties de vallée à être supérieure à la vitesse de retrait du revêtement à des bords des parties de vallée, et une étape de traitement au plasma à basse pression, dans laquelle un traitement au plasma est effectué avec la pression de contenant sous vide réglée à une seconde valeur de pression qui est inférieure à la première valeur de pression prédéterminée, amenant la vitesse de retrait du revêtement à des bords des parties de vallée à être supérieure à la vitesse de retrait du revêtement au fond des parties de vallée.
PCT/JP2023/019699 2023-05-26 2023-05-26 Procédé de retrait de revêtement pour outil, et dispositif de retrait de revêtement Pending WO2024246987A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2023/019699 WO2024246987A1 (fr) 2023-05-26 2023-05-26 Procédé de retrait de revêtement pour outil, et dispositif de retrait de revêtement
CN202380090118.5A CN120456993A (zh) 2023-05-26 2023-05-26 工具的被膜去除方法、及被膜去除装置
JP2025523636A JPWO2024246987A1 (fr) 2023-05-26 2023-05-26

Applications Claiming Priority (1)

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PCT/JP2023/019699 WO2024246987A1 (fr) 2023-05-26 2023-05-26 Procédé de retrait de revêtement pour outil, et dispositif de retrait de revêtement

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116523A1 (fr) * 2006-04-10 2007-10-18 Osg Corporation Procede d'elimination d'un film de revetement dur
JP2012517671A (ja) * 2009-02-08 2012-08-02 エーピー ソルーションズ， インコーポレイテッド 圧力波を利用して基板から材料を除去するためのプラズマ源および方法
JP2016002603A (ja) * 2014-06-13 2016-01-12 学校法人 芝浦工業大学 脱膜方法及び脱膜装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116523A1 (fr) * 2006-04-10 2007-10-18 Osg Corporation Procede d'elimination d'un film de revetement dur
JP2012517671A (ja) * 2009-02-08 2012-08-02 エーピー ソルーションズ， インコーポレイテッド 圧力波を利用して基板から材料を除去するためのプラズマ源および方法
JP2016002603A (ja) * 2014-06-13 2016-01-12 学校法人 芝浦工業大学 脱膜方法及び脱膜装置

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