WO2024192963A1 - Laser-robot coaxial confocal follow-up cutting head for insulator micromachining - Google Patents

Abstract

A laser-robot coaxial confocal follow-up cutting head for insulator micromachining. Each of an image sub-module I (6) and an image sub-module II (7) at the same distance to a focusing lens (28) is provided with a tube lens (66); and the two tube lenses (66) and the focusing lens (28) form binocular vision for measuring the height and transverse position of a workpiece, and the height and transverse position of the workpiece are compensated for and then fed back to a six-axis robot (3) or a cutting head main body (2) for realizing follow-up. Infinite achromatic lenses are used as the tube lenses (66), and cooperate with the focusing lens (28), which corrects chromatic aberration from ultraviolet to near-infrared, thereby improving the imaging quality; and the tube lenses (66) are additionally provided on the basis of the focusing lens (28) to form an infinity system, and a laser focus coincides with an image focus by means of coaxial confocal imaging, thereby improving accuracy. In addition, a coaxial image is achieved by means of a rotating optical wedge pair to reduce mounting dimensions, and the follow-up cutting head main body (2) is adjusted by means of using binocular vision to measure the distance to an insulator, thereby realizing height compensation and offset adjustment in X and Y directions.

Description

Laser robot coaxial confocal follow-up cutting head for insulator micromachining Technical Field

The invention relates to a laser robot coaxial confocal follow-up cutting head for insulator micromachining, belonging to the technical field of laser intelligent manufacturing.

Background Art

At present, the follow-up focus used by the laser cutting head is mainly realized through the capacitive cutting head nozzle. For example: the patent "A high-precision laser follow-up cutting head and its monitoring and automatic focus method", authorization announcement number CN 105252144B, installs a capacitive height adjuster on the nozzle, the cutting head nozzle and the metal workpiece are two electrodes of the capacitor, a constant voltage is applied between the cutting head and the workpiece, and the amount of free charge stored in the metal conductor changes with the change of the capacitor, so as to measure the distance to adjust the height of the Z axis, thereby maintaining a constant height difference between the nozzle and the material to be cut; the patent "Material processing methods and related apparatus", which mentions that the cutting head is equipped with multiple cameras or sensors, but there is no tube lens in front of the camera, and only the focusing lens is used for imaging. According to the Gaussian formula, the sum of the reciprocal of the image distance and the reciprocal of the object distance is equal to the reciprocal of the focal length. The image focus does not coincide with the laser focus position behind the focusing lens, and confocality cannot be achieved.

In addition, the laser robot can be used to drive the follow-up cutting head to operate, and its image is usually imaged by paraxial imaging. For example: the patent "A laser focus deviation detection device", published as CN 104976953 A, uses an astigmatism detection method that cannot accurately detect the offset for different curved surfaces or planes with different tilt angles, and has poor versatility; the laser processing robot remanufacturing system mentioned in Figure 3-2-25 on page 387 of the professional book "Laser Intelligent Manufacturing Technology", which uses binocular vision in the cladding cutting head, also uses paraxial focus, and can only measure its height through the principle of triangulation; ... "Equipment, method and device for determining focal position in laser processing", publication number CN 106181026 A, uses a multi-channel laser indicator generator, which makes the focal point of the annular multi-channel indicator laser coincide with the focal point of the working laser through spectral confocality, and observes the overlap degree of the multi-channel indicator laser through a coaxial image sensor to infer the focus offset. Although this method uses coaxial instead of paraxial to improve the focus search efficiency, it cannot achieve the function or the detection accuracy is reduced on the curved surface, and it cannot detect the depth after processing.

It can be seen that when the laser robot is used to operate the follow-up cutting head, the focus search using paraxial imaging is inefficient and has low accuracy; technical methods such as spectral confocalization and astigmatism detection can only measure height, which has certain limitations.

Summary of the invention

The purpose of the present invention is to overcome the shortcomings of the prior art and provide a laser robot coaxial confocal follow-up cutting head for insulator micromachining.

The purpose of the present invention is achieved through the following technical scheme: a laser robot coaxial confocal follow-up cutting head for insulator micromachining, comprising a cutting head body and a six-axis robot, the cutting head body being installed on the six-axis robot, and the cutting head body being provided with a focusing mirror, a coaxial optical path, an imaging sub-module one and an imaging sub-module two, and characterized in that: imaging sub-module one and imaging sub-module two, which are at the same distance to the focusing mirror, are both provided with tube lenses, and binocular vision is formed by two groups of tube lenses and the focusing mirror, which are used to measure the height and lateral position of the workpiece and compensate for them, and feed back to the six-axis robot or the cutting head body to achieve follow-up.

The focusing mirror is fixed in the first mirror frame with internal threads through a second retaining ring with external threads, a protective lens is fixedly installed in the first mirror frame through the first retaining ring, and is screwed into the thread adapter through external threads, the thread adapter is screwed into the XY adjustment frame with internal threads through external threads, the XY adjustment frame is fixed to the outer side of the cage plate adapter through four screws, the cage plate adapter is tightly attached to the outer surface of the first mirror frame, and is fixedly connected to the first cage plate of the coaxial optical path part through the four screws on its inner side.

The coaxial optical path controls the illumination light and the laser to be coaxially transmitted to the curved workpiece, and the generated reflected light and scattered light are irradiated onto the imaging sub-module 1 and the imaging sub-module 2. The illumination light is emitted from the illumination light source, passes through the built-in 50% transmission and 50% reflection cage-type beam splitter, and then passes through the first cage-type reflector and the beam combiner. After being reflected into the focusing mirror, the laser passes through the B-side light inlet reserved for the second baffle, and then passes through the beam combiner provided in the coaxial optical path. The beam combiner is installed in the second mirror frame through the side top screw, and the second mirror frame is fixed on the mounting base for rotation adjustment. The mounting base is fixed in the cage cube. At the same time, the illumination light and the laser are reflected by the beam combiner and the first cage-type reflector, and then pass through the light inlet provided on the breadboard. Some light box assemblies adjust the direction of the light path. A light box is installed on the light box assembly. The light box is provided with square holes for the power cord of the lighting source, the camera power cord and the network cable to enter and exit. The light box is also provided with a second baffle. The illumination light and laser pass through the A-side light inlet reserved on the second baffle, and continue to return through the attenuation plate. The attenuation plate is screwed into the threaded adapter through an external thread, and the threaded adapter is screwed into the first cage plate through an external thread. The first cage plate is fixed to the mounting base by screws and finally incident on the curved workpiece. The illumination light and laser reflected and scattered by the curved workpiece are fed back to the coaxial optical path, pass through the cage-type beam splitter, enter the imaging sub-module one on one way, and enter the imaging sub-module two on the other way through the second cage-type reflector fixed by the pressure block.

The imaging submodule 1 and the imaging submodule 2 are both composed of a first optical wedge, a second optical wedge, a tube lens and a camera. The first optical wedge and the second optical wedge are symmetrically fixed in a rotating mirror frame through a wedge-shaped pressure ring and a first pressure ring in turn. The rotating mirror frame is further fixed by a cage rod so that the first optical wedge, the second optical wedge, the tube lens and the camera have the same axis. The tube lens is installed by sequentially sleeve-connecting an adjustable sleeve and a fixed sleeve using a second pressure ring. The camera is screwed into a threaded adapter with an external thread through an internal thread. The threaded adapter is screwed into a sleeve with an internal thread through an adapter internal thread. The sleeve is screwed into one end of a fixed sleeve through a thread. The other end of the fixed sleeve is fixed in a second cage plate. The second cage plate is fixed to a mounting base through screws. The mounting base is fixedly connected to a breadboard through screws.

Furthermore, the laser robot coaxial confocal tracking cutting for insulator micromachining A cutting head, wherein: the first optical wedge and the second optical wedge have the same structure, and the first optical wedge and the second optical wedge are used to adjust the center of the reflected laser to coincide with the center of the camera.

Furthermore, in the above-mentioned laser robot coaxial confocal follow-up cutting head for insulator micromachining, the tube lens is made of an infinity achromatic lens, so that an infinitely distant object is imaged at a focal position, that is, on the focal plane of the camera, and the distance between the camera and the built-in chip of the tube lens is adjusted by an adjustable sleeve and locked by a locking ring.

Furthermore, in the above-mentioned laser robot coaxial confocal follow-up cutting head for insulator micromachining, the imaging sub-module 1 and the imaging sub-module 2 have the same structure, and both the imaging sub-module 1 and the imaging sub-module 2 are installed on a breadboard, and the two are sealed by a light box assembly.

Furthermore, in the above-mentioned laser robot coaxial confocal follow-up cutting head for insulator micromachining, a first baffle is fixed on the light box, a door handle is provided on the first baffle, and the outer surface of the door handle is wrapped with an insulating sheath.

Compared with the prior art, the present invention has significant advantages and beneficial effects, which are specifically embodied in the following aspects:

(1) The coaxial image of the present invention is equivalent to the eyes on the robot, and no manual visual inspection is required, thereby eliminating the error introduced by the hand-eye transformation matrix of the robot and the image, making the transformation more accurate.

(2) The image tube lens of the present invention adopts an infinite achromatic lens, which is matched with a focusing lens that corrects chromatic aberration from ultraviolet to near infrared to improve the imaging quality.

(3) The present invention addresses the problem that the camera cannot achieve confocal imaging using only a focusing lens. A tube lens is added to the focusing lens to form an infinite system, and coaxial confocal imaging is used to make the laser focus coincide with the image focus, thereby effectively improving the accuracy.

(4) The present invention realizes coaxial imaging through a rotating optical wedge pair, reduces the installation size, is suitable for a cutting head body, and uses binocular vision to measure the distance of the insulator to adjust the follow-up cutting head body to achieve compensation height and offset adjustment in the X and Y directions.

Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or will be understood by practicing the specific embodiments of the present invention. The objectives and other advantages may be realized and attained by the structure particularly pointed out in the written description and the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

Figure 1: A schematic diagram of the structure of the laser robot system of the present invention;

Figure 2 is a front view of the cutting head body of the present invention;

FIG3 is a partial cross-sectional view of a focusing mirror of the present invention;

FIG4 is a bottom view of a focusing mirror portion of the present invention;

FIG5 is a left side view of the coaxial optical path of the present invention;

FIG6 is a cross-sectional view of the coaxial optical path of the present invention;

FIG7 is a cross-sectional view of the imaging submodule of the present invention;

FIG8 is a left side view of the cutting head body of the present invention;

FIG9 is a right side view of the cutting head body of the present invention;

FIG10 is a top view of the cutting head body of the present invention;

FIG11 is a diagram showing the deflection position of a single wedge mirror according to the present invention;

FIG12 is a diagram showing a double wedge mirror for adjusting the lateral position of the laser focus according to the present invention;

FIG13 : The lateral movement method of the present invention is shown in FIG.

Figure 14: The circular movement method of the present invention is referred to in the figure.

The meanings of the reference symbols in the figures are shown in the following table:

DETAILED DESCRIPTION

The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The components can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but only represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, in the description of the present invention, directional terms and order terms are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

As shown in Figures 1 and 2, a laser robot coaxial confocal follow-up cutting head for insulator micromachining of the present invention includes a cutting head body 2 and a six-axis robot 3. The six-axis robot 3 includes a frame-type robot and an articulated robot. When the six-axis robot 3 is an articulated robot, it includes 6 rotating axes. The cutting head body 2 is installed on the six-axis robot 3, and the cutting head body 2 is provided with a focusing mirror 28, a coaxial optical path 4, an imaging sub-module 1 6 and an imaging sub-module 2 7.

According to the technical solution of the present invention, imaging sub-module 1 6 and imaging sub-module 2 7, which are at the same distance from the focusing mirror 28, are both provided with tube lenses 66, and binocular vision is formed by two sets of tube lenses 66 and the focusing mirror 28, which are used to measure the height and lateral position of the workpiece and compensate for them, and feed back to the six-axis robot 3 or the cutting head body 2 to achieve follow-up.

As shown in Figures 3 and 4, the focusing mirror 28 is fixed in the first mirror frame 29 with internal threads through a second retaining ring 27 with external threads. A protective lens 25 is fixedly installed in the first mirror frame 29 through a first retaining ring 24, and is screwed into the threaded adapter 23 through external threads. Air can be blown on the outside to prevent dust from damaging the protective lens. The threaded adapter 23 is screwed into the XY adjustment frame 21 with internal threads through external threads. Two-dimensional adjustments are made to ensure that the laser is emitted from the center of the lens. This is to address the shortcoming of using the XY adjustment frame 21 translation method to achieve coaxial imaging, which occupies a large space. The focusing mirror 28 consists of three lenses, and chromatic aberration is corrected to ensure a consistent focal length from ultraviolet to near-infrared. The lenses are separated by air to withstand high-power lasers. The XY adjustment frame 21 is fixed to the outside of the cage plate adapter 26 through four screws 22. The cage plate adapter 26 is closely attached to the surface of the first lens frame 29 and is fixedly connected to the first cage plate 46 of the coaxial optical path 4 via the four screws 22 on the inner side thereof.

As shown in Figures 5 and 6, the coaxial optical path 4 controls the illumination light 40 and the laser 20 to be coaxially transmitted to the curved workpiece 1, and the generated reflected light and scattered light are irradiated onto the imaging sub-module 1 6 and the imaging sub-module 2 7. The illumination light 40 is emitted from the illumination light source 43, passes through the built-in 50% transmission and 50% reflection cage-type beam splitter 48, and then passes through the first cage-type reflector 42 and the beam combiner 41. After being reflected into the focusing mirror 28, the laser 20 passes through the B-side light inlet 85 reserved by the second baffle 86, and then passes through the beam combiner 41 provided in the coaxial optical path 4. The beam combiner 41 is installed in the second mirror frame 45 through the side top screw, and the second mirror frame 45 is fixed in the cage cube 44. At the same time, the illumination light 40 and the laser 20 are reflected by the beam combiner 41 and the first cage-type reflector 42, and then pass through the light provided on the breadboard 5. The box assembly 8 adjusts the direction of the light path. A light box 80 is installed on the light box assembly 8. A square hole 87 is provided on the light box 80 for the power cord of the illumination light 40 to enter and exit. A second baffle 86 is also provided on the light box 80. The illumination light 40 and the laser 20 pass through the A-side light inlet 83 reserved by the second baffle 86, and continue to return through the attenuation plate 47. The attenuation plate 47 is screwed into the threaded adapter 23 through an external thread. The threaded adapter 23 is screwed into the first cage plate 46 through an external thread. The first cage plate 46 is fixed to the mounting base 68 by screws, and finally incident on the curved workpiece 1. The illumination light 40 and the laser 20 reflected and scattered by the curved workpiece 1 are fed back to the coaxial optical path 4, pass through the cage-type beam splitter 48, enter the imaging sub-module 1 6 on one way, and enter the imaging sub-module 2 7 on the other way through the second cage-type reflector 49 fixed by the pressing block 50.

As shown in FIG7 , the imaging submodule 1 6 and the imaging submodule 2 7 have the same structure, and both the imaging submodule 1 6 and the imaging submodule 2 7 are mounted on the breadboard 5, and the two are sealed by the light box assembly 8 for stable installation. The imaging submodule 1 6 and the imaging submodule 2 7 are both composed of a first optical wedge 61, a second optical wedge 64, a tube lens 66 and a camera 74. The first optical wedge 61 and the second optical wedge 64 are symmetrically fixed in the rotating mirror frame 60 by the wedge-shaped pressure ring 62 and the first pressure ring 63 in turn. The rotating mirror frame 60 is further fixed by the cage rod so that the first optical wedge 61, the second optical wedge 64 and the tube lens 66 and the camera 74 have the same axis. The coaxial image formed is equivalent to the eye on the manipulator, eliminating the error introduced by the hand-eye transformation matrix of the manipulator and the image, making its transformation accuracy higher. The tube lens 66 uses the second pressure ring 65 to The adjustable sleeve 67 and the fixed sleeve 69 are installed in sequence, the camera 74 is screwed into the threaded adapter 72 with external threads through the internal threads, the threaded adapter 72 is screwed into the sleeve 73 with internal threads through the internal threads of the adapter 71, the sleeve 73 is screwed into one end of the fixed sleeve 69 through the threads, and the other end of the fixed sleeve 69 is fixed in the second cage plate 70, the second cage plate 70 is fixed to the mounting base 68 via screws, and the mounting base 68 is fixedly connected to the breadboard 5 via screws.

As shown in Figures 8 to 10, a first baffle 84 is fixedly installed on the light box 80. The first baffle 84 is installed close to the cutting head body 2 to prevent dust from entering the light entrance of the focusing mirror. A door handle 81 is also provided on the first baffle 84, and the door can be opened to debug the light path. The outer surface of the door handle 81 is wrapped with a layer of insulating sheath 82.

Specifically, the first optical wedge 61 and the second optical wedge 64 have the same structure. The first optical wedge 61 and the second optical wedge 64 are used to adjust the center of the laser 20 and the camera 74 so that the centers of the two coincide. The first optical wedge 61 and the second optical wedge 64 are rotated to realize coaxial imaging, which is suitable for cutting head installation to compensate for the X and Y direction offsets between the paraxial image center and the laser center.

Specifically, the tube lens 66 is made of an infinite achromatic lens, which can image an infinitely distant object at a focal position, that is, on the focal plane of the camera 74. The distance between the camera 74 and the built-in chip of the tube lens 66 is adjusted by an adjustable sleeve 67 and locked by a locking ring.

As shown in Figures 12 to 14, compared with the lateral movement of the light source incident on the single wedge mirror, the present invention can make the laser center coincide with the image center through a circular movement. Among them, the reflected laser 20 is incident from the wedge plane, _and is transmitted along the optical axis _O1O4 into the inclined surface of the first wedge 61. The incident angle is equal to the wedge angle α of the first wedge 61. The refractive index of the wedge material is n, and the refraction angle β＝asin(n×sinα)≈nα. The refractive index of glass is approximately 1.5. When the wedge angle α≤10°, the error caused by the approximation is ≦asin(1.5×sin(10π/180))–1.5×10π/180＝1.7‰, so the approximation is established. The refraction of the wedge inclined surface causes the laser 20 to deflect by an angle β–α. The angle β–α between _the optical axis _O1O4 and the light _O2A is ≈(n-1)α. After passing through the focusing lens 28, it is focused on point B on the focal plane. The vector from the axis _O4 to point B is Rotating wedge 61, vector mode The focal length _f2 of the focusing lens 28, the refractive index n of the wedge, and the wedge angle α remain unchanged. Point B is centered on point _O4 on the optical axis. Similarly, considering the second optical wedge 64 alone, point B is centered at point O ₄ on the optical axis. When the wedge angle α is small, it is approximately considered that the laser 20 is incident vertically on the second wedge 64. At this time, the first wedge 61 and the second wedge 64 rotate respectively, forming a vector and The vectors are superimposed to form a ring with a radius of |r ₂ -r ₁ | to |r ₂ +r ₁ |. When r ₂ -r ₁ = 0, the vector and The overlapped circle covers a radius of 2r _1. When the angles of the first optical wedge 61 and the second optical wedge 64 are the same, the model Image position or laser center vector Pan To the camera center O, the displacement vector formed by the optical wedge pair is The angle θ=acos(r ₀ /(2r ₁ )).

In specific applications, the laser 20 emitted from the cutting head body 2 is vertically incident on the surface of the curved workpiece 1, and the six-axis robot 3 moves according to the set distance, so that the laser 20 performs processing along the contour trajectory of the curved workpiece 1. First, the assembly drawings of the robot, tool and workpiece are drawn through CAD, and the CAD drawings are imported into the CAM software to create a model. The six-axis robot 3 performs basic calibration and three-point calibration of the tool coordinates (three-point calibration: refers to comparing the coordinates of the three points in the CAD drawing model in CAM with the coordinates of the three points corresponding to the six-axis robot 3 system in its controller, and calculating the rotation, translation and scaling of the model and the physical object). CAM plans the path and outputs the processing program. CAM offline programming is safe, low-cost, and has higher accuracy than manual teaching, avoiding rework caused by inappropriate CAD drawings. Finally, the processing program is copied to the controller of the six-axis robot 3, the entry point is turned on and the light is turned on, and it runs along the trajectory, and the exit point is turned off; the entry point does not coincide with the starting point, and the exit point does not coincide with the end point, so as to avoid excessive thermal effects caused by the long residence time of the laser 20 at the starting point and the end point, and improve the cutting accuracy.

Example 1

The six-axis robot 3 system processes a curved workpiece 1 of 0.2mmAl ₂ O ₃ ceramic. The laser adopts 1070nm quasi-continuous near-infrared, laser 20 frequency 1kHz, power factor 80%, average power 120W, peak power 1200W, cutting head body 2 focal length 90mm, processing speed 30mm/s, and processing times 1 time.

Example 2

Six-axis robot 3 system processes 0.3mm thick PMMA (polymethyl The laser used is Belin Amber NX UV-40 picosecond ultraviolet laser, the wavelength of laser 20 is 355nm, the frequency is 700kHz, the rated power is 40W, the power factor is 90% or 27W, the focal length of the cutting head focusing lens is 90mm, the processing speed is 60mm/s, and the processing times are 2 times.

In summary, the image tube mirror of the present invention adopts an infinite achromatic lens, and cooperates with a focusing mirror that corrects the chromatic aberration from ultraviolet to near infrared to improve the imaging quality. Moreover, a tube mirror is added on the basis of the focusing mirror, and the overall structure forms an infinite system. The image focus and the focusing mirror focus are coaxially confocal imaging, so that the laser focus and the image focus are completely overlapped, and the accuracy is higher; in addition, the coaxial image is realized by the rotating optical wedge pair, the installation size is reduced, and it is suitable for the cutting head body, and the follow-up cutting head body is adjusted by using the binocular vision to measure the distance of the insulator to achieve compensation height, X and Y direction offset adjustment.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention. It should be noted that similar numbers and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements for such process, method, article, etc. In the absence of more restrictions, the elements defined by the phrase "comprising a ..." do not exclude the existence of other identical elements in the process, method, article or device that includes the elements.

Claims (5)

A laser robot coaxial confocal follow-up cutting head for insulator micromachining comprises a cutting head body (2) and a six-axis robot (3), wherein the cutting head body (2) is mounted on the six-axis robot (3), and the cutting head body (2) is provided with a focusing mirror (28), a coaxial optical path (4), an imaging submodule 1 (6) and an imaging submodule 2 (7), wherein the cutting head body (2) is characterized in that: the imaging submodule 1 (6) and the imaging submodule 2 (7) which are at the same distance from the focusing mirror (28) are both provided with a tube lens (66), and binocular vision is formed by the two groups of tube lenses (66) and the focusing mirror (28), which are used to measure the height and lateral position of a workpiece and compensate for them, and feed back to the six-axis robot (3) or the cutting head body (2) to achieve follow-up; The focusing lens (28) is fixed in a first lens frame (29) with internal threads via a second retaining ring (27) with external threads; a protective lens (25) is fixedly installed in the first lens frame (29) via a first retaining ring (24) and is screwed into a thread adapter (23) via external threads; the thread adapter (23) is screwed into an X-Y adjustment frame (21) with internal threads via external threads; the X-Y adjustment frame (21) is fixed to the outer side of a cage plate adapter (26) via four screws (22); the cage plate adapter (26) is in close contact with the surface of the first lens frame (29) and is fixedly connected to a first cage plate (46) of the coaxial optical path (4) via four screws (22) on its inner side; The coaxial optical path (4) controls the illumination light (40) and the laser (20) to be coaxially transmitted to the curved workpiece (1), and the generated reflected light and scattered light are irradiated onto the imaging submodule 1 (6) and the imaging submodule 2 (7). The illumination light (40) is emitted from the illumination light source (43), passes through the built-in 50% transmission and 50% reflection cage-type beam splitter (48), and then passes through the first cage-type reflector (42) and the beam combiner (41), and is reflected into the focusing mirror ( 28), the laser (20) passes through the B-side light inlet (85) reserved by the second baffle (86), and then passes through the beam combiner (41) provided in the coaxial optical path (4), the beam combiner (41) is installed in the second mirror frame (45) through the side top screw, and the second mirror frame (45) is fixed in the cage cube (44), and at the same time, the illumination light (40) and the laser (20) are reflected by the beam combiner (41) and the first cage reflector (42), and then pass through the surface A light box assembly (8) is provided on the package plate (5) to adjust the direction of the light path. A light box (80) is installed on the light box assembly (8). The light box (80) is provided with a square hole (87) for the power line of the illumination light source (43), the power line of the camera (74) and the network cable to enter and exit. The light box (80) is also provided with a second baffle (86). The illumination light (40) and the laser (20) pass through the A-side light inlet (83) reserved on the second baffle (86), and continue to return through the attenuation plate (47). The attenuation plate (47) is screwed into the screw through the external thread. The thread adapter (23) is screwed into the first cage plate (46) through the external thread, and the first cage plate (46) is fixed on the mounting base (68) through screws, and finally incident on the curved workpiece (1), and the illumination light (40) and the laser (20) reflected and scattered by the curved workpiece (1) are fed back to the coaxial optical path (4), pass through the cage-type beam splitter (48), enter the imaging sub-module (6) on one path, and enter the imaging sub-module (7) on the other path through the second cage-type reflector (49) fixed by the pressing block (50); The imaging submodule 1 (6) and the imaging submodule 2 (7) are both composed of a first optical wedge (61), a second optical wedge (64), a tube lens (66) and a camera (74). The first optical wedge (61) and the second optical wedge (64) are symmetrically fixed in a rotating mirror frame (60) by a wedge-shaped pressure ring (62) and a first pressure ring (63) in sequence. The rotating mirror frame (60) is further fixed by a cage rod so that the first optical wedge (61), the second optical wedge (64) and the tube lens (66) and the camera (74) have the same axis. The tube lens (66) is connected to the adjustable sleeve (66) by a second pressure ring (65). 7) The fixed sleeve (69) is sequentially sleeved and installed, the camera (74) is screwed into the second threaded adapter (72) with external threads through the internal threads, the second threaded adapter (72) is screwed into the sleeve (73) with internal threads through the internal threads of the adapter (71), the sleeve (73) is screwed into one end of the fixed sleeve (69) through the threads, the other end of the fixed sleeve (69) is fixed in the second cage plate (70), the second cage plate (70) is fixed to the mounting base (68) through screws, and the mounting base (68) is fixedly connected to the breadboard (5) through screws. The laser robot coaxial confocal follow-up cutting head for insulator micromachining according to claim 1 is characterized in that: a first baffle (84) is fixedly mounted on the light box (80), a door handle (81) is provided on the first baffle (84), and the outer surface of the door handle (81) is Wrapped with an insulating sheath (82). According to the laser robot coaxial confocal follow-up cutting head for insulator micromachining according to claim 1, it is characterized in that the first optical wedge (61) and the second optical wedge (64) have the same structure, and the first optical wedge (61) and the second optical wedge (64) are used to adjust the center of the reflected laser (20) to coincide with the center of the camera. According to the laser robot coaxial confocal follow-up cutting head for insulator micromachining as described in claim 1, it is characterized in that: the tube lens (66) is made of an infinite achromatic lens, so that an infinitely distant object is imaged at a focal position, that is, on the focal plane of the camera (74), and the distance between the camera (74) and the built-in chip of the tube lens (66) is adjusted by an adjustable sleeve (67) and locked by a locking ring. According to the laser robot coaxial confocal follow-up cutting head for insulator micromachining as described in claim 1, it is characterized in that: the imaging sub-module one (6) and the imaging sub-module two (7) have the same structure, and the imaging sub-module one (6) and the imaging sub-module two (7) are both installed on the breadboard (5), and the two are sealed by a light box assembly (8).