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WO2024013934A1 - Dispositif de transport de substrat et procédé de détection de substrat - Google Patents

Dispositif de transport de substrat et procédé de détection de substrat Download PDF

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Publication number
WO2024013934A1
WO2024013934A1 PCT/JP2022/027710 JP2022027710W WO2024013934A1 WO 2024013934 A1 WO2024013934 A1 WO 2024013934A1 JP 2022027710 W JP2022027710 W JP 2022027710W WO 2024013934 A1 WO2024013934 A1 WO 2024013934A1
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WO
WIPO (PCT)
Prior art keywords
substrate
board
sensor
detection
carry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/027710
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English (en)
Japanese (ja)
Inventor
大輔 山中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Corp filed Critical Fuji Corp
Priority to JP2024533442A priority Critical patent/JPWO2024013934A1/ja
Priority to DE112022007539.2T priority patent/DE112022007539T5/de
Priority to PCT/JP2022/027710 priority patent/WO2024013934A1/fr
Publication of WO2024013934A1 publication Critical patent/WO2024013934A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages

Definitions

  • This specification relates to a substrate transport device and a substrate detection method.
  • a substrate working device disclosed in Patent Document 1 and a substrate processing device disclosed in Patent Document 2 have been known.
  • Conventional board working devices are designed to check the detection state by having a board sensor that detects a board detect the presence or absence of a dummy board when there is no board to be produced on the conveyor belt.
  • the conventional board working apparatus is configured to image the board sensor with a camera and perform image diagnosis when it is determined that the detection state of the board sensor is abnormal through the above-described confirmation.
  • the conventional substrate processing apparatus constantly monitors the conveyor belt by taking images with a camera, and stops the conveyance if an abnormality is detected during conveyance of the substrate.
  • JP2015-126210A Japanese Patent Application Publication No. 2009-76633
  • the detection state of the board sensor is confirmed using a dummy board while production is stopped, such as during maintenance. For this reason, in the conventional board working apparatus, it is difficult to determine whether or not an abnormality has occurred in the detection state of the board sensor during production, for example.
  • the purpose of this specification is to provide a substrate transport device and a substrate detection method that can determine whether there is a false detection by a substrate sensor even during production.
  • This specification includes a drive unit that transports a substrate along a transport path, a substrate sensor that is installed at a predetermined position on the transport path and detects the presence or absence of a substrate at the predetermined position, and a drive unit that is movable in the horizontal direction and A board checking unit that can confirm the presence or absence of a board in the path, and a board control unit that controls the drive unit to stop the board transport when the amount of board transported by the drive unit does not correspond to the detection result of the board sensor, and also controls the drive unit to transport the board. a control unit that controls the board confirmation unit to check the presence or absence of a board in the path, and the control unit detects false detection of the board sensor based on the detection result of the board sensor and the confirmation result by the board confirmation unit.
  • a substrate transport device is disclosed that includes a determination unit that determines presence or absence.
  • this specification is applied to the above-described substrate transport device, and includes a transport process in which the drive section transports the substrate along the transport path, a detection process in which the board sensor detects the presence or absence of a substrate at a predetermined position, and a transport process in which the drive unit transports the substrate along the transport path.
  • a substrate detection method comprising a step and a determination step of determining the presence or absence of false detection by the substrate sensor based on the detection result of the substrate sensor in the detection step and the confirmation result of the substrate confirmation unit in the confirmation step.
  • the substrate transport device can determine whether there is an erroneous detection by the substrate sensor during production. Further, the substrate detection method can also determine whether there is any erroneous detection by the substrate sensor during production.
  • FIG. 2 is a diagram for explaining the configuration of a component mounting machine.
  • 3 is a diagram for explaining the configuration of the positioning device in FIG. 2.
  • FIG. FIG. 3 is a front sectional view of the substrate transport device of FIG. 2;
  • FIG. 3 is a side sectional view of the substrate transport device of FIG. 2;
  • 3 is a functional block diagram for explaining the configuration of the control device in FIG. 2.
  • FIG. FIG. 3 is a diagram for explaining the steps of a substrate detection method.
  • FIG. 7 is a diagram for explaining the determination by the determination unit of FIG. 6 and the determination in the determination step of FIG. 7;
  • FIG. 7 is a diagram for explaining the determination by the determination unit of FIG. 6 and the determination in the determination step of FIG. 7;
  • FIG. 7 is a diagram for explaining the determination by the determination unit of FIG. 6 and the determination in the determination step of FIG. 7;
  • the board transport device is provided in a component mounting machine that is a board-facing work machine.
  • the board-to-board work machine that can be equipped with a board transfer device is not limited to a component mounting machine, but may also include other machines equipped with a work execution device that performs a predetermined work on a board, such as a solder printing machine or a board Inspection machines etc. can be adopted.
  • the board-to-board work machine of this embodiment is exemplified by a component mounting machine 10 that performs a mounting operation of mounting components (for example, electronic components, etc.) on a board.
  • a component mounting machine 10 that performs a mounting operation of mounting components (for example, electronic components, etc.) on a board.
  • a plurality of component mounting machines 10 of the same type are lined up in the width direction to form a production line for mounting components on a board.
  • boards are sequentially transported into each component mounting machine 10, and components are mounted in each component mounting machine 10.
  • the component mounting machine 10 of this embodiment has a narrow width and can be placed close to each other in the width direction. Therefore, in this embodiment, a case will be exemplified in which three component mounting machines 10 are mounted on one base B, and the entire production line is configured compactly. Note that the arrangement of the component mounting machines 10 is not limited to mounting three component mounting machines 10 on one base B, but it is possible to install one, two, or four or more on one base B depending on the production content. It is also possible to mount a component mounting machine 10.
  • the component mounting machine 10 includes a working machine main body 11 fixed to a base B.
  • the work machine main body 11 includes a frame 12 and a cover member 13 that covers the frame 12.
  • the work machine main body 11 has a work space S therein, which is a space for carrying out mounting work as a board-to-board work on the board K (see FIG. 2).
  • the work space S includes a mounting surface on which the board K is mounted, an opposing surface facing the board K of a component transfer device 16 (described later) before implementation of the mounting work, and an inner surface of the cover member 13. It can be a space formed by
  • the three component mounting machines 10 are mounted on the base B so that their respective work spaces S are adjacent to each other.
  • Each cover member 13 that covers both side surfaces of the work machine main body 11 in the width direction is formed with a substrate transfer opening 13a.
  • a board K is carried into the work space S via the board transport opening 13a by a board transport device 20, which will be described later, and a board K that has been subjected to a mounting operation is carried out. (See Figure 2).
  • the work machine main body 11 is assembled with a positioning device 14, a component supply device 15, a component transfer device 16, a component camera 17, and a control device 18. Further, a substrate transfer device 20, which will be described in detail later, is assembled to the work machine main body 11.
  • the positioning device 14 positions the substrate K carried in by the substrate transport device 20. As shown in FIG. 3, the positioning device 14 includes a lifter 141 and a plurality of clamp rods 142 fixed to the lifter 141. placed at the bottom of the position. The plurality of clamp rods 142 push up the substrate K in the Z-axis direction as the lifter 141 moves upward, and clamp the substrate K between the guide rails 21 of the substrate transport device 20, which will be described later. Thereby, the substrate K is positioned so as not to move from the work execution position.
  • the component supply device 15 is removably installed in a plurality of groove-shaped slots provided in a pallet member 150 installed on the front side of the work machine main body 11.
  • the component supply device 15 includes a plurality of feeders 151 and a reel 152 provided corresponding to each feeder 151.
  • a carrier tape (not shown) is wound around the reel 152, and each feeder 151 is loaded with the carrier tape fed out from the reel 152.
  • a predetermined supply position 153 for supplying parts is set at the upper part of the feeder 151 near the rear side.
  • a carrier tape is intermittently fed to each feeder 151 by a tape feeding mechanism (not shown), and parts are fed to each feeder 151 so that they can be picked up at a feeding position 153. Thereby, the component supply device 15 performs a component supply operation.
  • the component transfer device 16 is a work implementation device that performs a mounting operation to mount the collected components onto the board K positioned at the work implementation position P in the work space S inside the machine.
  • the component transfer device 16 is arranged above the component supply device 15 in the Z-axis direction (vertical direction).
  • the component transfer device 16 picks up the components from the component supply device 15 and mounts the components onto the board K.
  • the component transfer device 16 includes a head drive mechanism 160, a moving table 164, a work head 165, a suction nozzle 166, and the like.
  • the head drive mechanism 160 includes a pair of Y-axis rails 161 and 162, a Y-axis slider 163, a drive motor (not shown), and the like.
  • the Y-axis rails 161 and 162 extend in the Y-axis direction and are spaced apart from each other and arranged in parallel.
  • the Y-axis slider 163, which is long in the X-axis direction, is provided across both Y-axis rails 161 and 162, and moves in the Y-axis direction.
  • the moving table 164 is assembled to the Y-axis slider 163 and moves in the X-axis direction.
  • the head drive mechanism 160 drives the Y-axis slider 163 in the Y-axis direction, and also drives the movable table 164 on the Y-axis slider 163 in the X-axis direction. That is, the movable table 164 can move in the X-axis direction and the Y-axis direction in the XY plane (that is, in the horizontal direction).
  • the moving table 164 holds a work head 165 that performs mounting work on the board K, which is a board-to-board work.
  • the work head 165 holds one or more suction nozzles 166 downward in the Z-axis direction.
  • the work head 165 is driven by the head drive mechanism 160 and moves together with the moving table 164 in the X-axis direction and the Y-axis direction.
  • the suction nozzle 166 is driven by a lift drive unit (not shown) to move up and down.
  • the suction nozzle 166 descends from above in the Z-axis direction of the supply position 153, and performs a suction operation to suction and collect parts by supplying negative pressure air. Further, the suction nozzle 166 is driven upward in the Z-axis direction of the substrate K, and performs a mounting operation for mounting components by supplying positive pressure air. There are multiple types of work heads 165 and suction nozzles 166, and they are replaced automatically or manually.
  • the component camera 17 is provided on the upper surface of the base B between the component supply device 15 and the substrate transfer device 20, facing upward in the Z-axis direction.
  • the component camera 17 images the component being sucked by the suction nozzle 166 while the work head 165 is moving from the supply position 153 of the component supply device 15 to the mounting position on the board K.
  • the image data acquired by the component camera 17 is used for image processing to determine the presence or absence of the component and whether it is correct or incorrect, and further to obtain the suction posture of the component.
  • the results of the image processing are reflected in the attachment operation of the suction nozzle 166.
  • the control device 18 is assembled to the base B, for example. Note that there are no particular limitations on the arrangement position of the control device 18.
  • the control device 18 is a computer device whose main components include a CPU, ROM, RAM, and various interfaces, and centrally controls the operation of the component mounting machine 10 including a board transfer device 20, which will be described in detail later. Note that the control device 18 may be configured with a plurality of CPUs distributed within the machine.
  • the control device 18 controls the component mounting work according to a control program stored in advance. Here, the control program differs depending on the type of substrate product to be produced.
  • the substrate transfer device 20 carries the substrate K to one side, for example, before being mounted along the transfer path T (see FIG. 5) to the work execution position P inside the work space S. It is carried in from the work space S of the adjacent component mounting machine 10. Further, the board transport device 20 carries out the board K that has been mounted at the work execution position inside the work space S toward the work space S of the adjacent component mounting machine 10 on the other side, for example. .
  • the substrate transport device 20 is provided with a substrate sensor 24 that detects the substrate K being transported along the transport path T, as will be described later.
  • the substrate sensor 24 is arranged at a predetermined position on the transport path T, and under normal conditions detects the substrate K passing on the transport path T and outputs a signal indicating the presence or absence of the substrate K in the detection range. This makes it possible for the control device 18 to grasp whether the substrates K are being transported along the transport path T without a hitch during production.
  • the board sensor 24 erroneously detects the board K during production, as a conventional countermeasure, for example, it is necessary for an operator to temporarily stop production in order to check the detection state of the board sensor 24. Then, when an erroneous detection occurs in the board sensor 24 by checking by the operator, the detection sensitivity of the board sensor 24 is adjusted each time, for example. In other words, in the conventional board working apparatus described above, if a false detection occurs in the board sensor 24 during production (there is a false detection), it is necessary to stop production until the operator completes confirmation. Productivity may be affected.
  • the substrate conveyance device 20 of this embodiment includes a conveyor belt 22 and a drive motor 23 that form a drive unit that conveys the substrate K along the conveyance path T, and A substrate sensor 24 is installed at a carry-in position Pi and a carry-out position Po as predetermined positions, and detects the presence or absence of the substrate K at the carry-in position Pi and the carry-out position Po, and a substrate sensor 24 is provided so as to be movable in the horizontal direction, and detects the presence or absence of the substrate K in the carry-in position Pi and the carry-out position Po.
  • the board camera 25 which serves as a board confirmation unit that can confirm the presence or absence of the board K, detects the board K when the transport amount Dr of the board K by the conveyor belt 22 and the detection result of the board sensor 24 (signal Sc to be described later) do not correspond.
  • a control device 18 (drive control unit 181) serves as a control unit that controls the drive motor 23 (conveyor belt 22) to stop the conveyance and also controls the substrate camera 25 to check the presence or absence of the substrate K in the conveyance path T. and a board confirmation control unit 182), and the control device 18 detects erroneous detection of the board sensor 24 based on the detection result (signal Sc) of the board sensor 24 and the confirmation result (image data Id) by the board camera 25. It has a determination unit 184 that determines the presence or absence.
  • control device 18 of the present embodiment includes a correspondence determining section 183 that determines whether the conveyance amount Dr of the substrate K by the conveyor belt 22 corresponds to the detection result (signal Sc) of the substrate sensor 24, and a determining section.
  • the adjustment unit 185 adjusts the detection sensitivity (reference light receiving amount Lb described later) of the substrate sensor 24 when a false detection by the substrate sensor 24 is determined by 184.
  • the substrate detection method of the present embodiment includes a conveyance process K1 in which the conveyor belt 22 and the drive motor 23 convey the substrate K along the conveyance path T, and a substrate sensor 24 at the carry-in position Pi.
  • the detection process K2 detects the presence or absence of the substrate K at the carry-out position Po
  • the conveyance amount Dr of the substrate K in the conveyance process K1 and the detection result (signal Sc) of the substrate sensor 24 in the detection process K2 do not correspond
  • the conveyor A stop process K4 in which the conveyance of the substrate K by the belt 22 is stopped
  • a confirmation process K5 in which the substrate camera 25 confirms the presence or absence of the substrate K in the conveyance path T
  • a determination step K6 for determining whether there is an erroneous detection by the board sensor 24 based on the confirmation result (image data Id) of the board camera 25 in the confirmation step K5.
  • the adjustment step K7 includes a correspondence determination step K3 for determining whether or not the correspondence is compatible, and adjusts the detection sensitivity (reference light reception amount Lb) of the substrate sensor 24 when a false detection by the substrate sensor 24 is determined in the determination step K6. Equipped with
  • the substrate transfer device 20 includes a pair of left and right guide rails 21, a conveyor belt 22, and a drive motor 23, as well as a substrate sensor 24 and a substrate confirmation sensor. It is equipped with a board camera 25 as a part.
  • the operation of the substrate transport device 20 is controlled by a control device 18 having a drive control section 181, a substrate confirmation control section 182, a correspondence judgment section 183, a judgment section 184, and an adjustment section 185. .
  • the substrate transport device 20 is provided with a pair of guide rails 21 above a pair of left and right support plates 201 that are erected.
  • the distance between the pair of guide rails 21 can be set in accordance with the width of the substrate K.
  • a belt guide 211 extending along the conveyance direction D is provided on the opposing inner sides of the pair of guide rails 21 .
  • the conveyance direction D is such that the board K is carried in toward the work space S (more specifically, the work execution position P) and the board K is carried out from the work space S (more specifically, the work execution position P). This is the direction in which the substrate K is transported.
  • the pair of conveyor belts 22 are formed into an endless ring shape.
  • the conveyor belt 22 is arranged along each guide rail 21 and guided on the upper surface of the belt guide 211.
  • the conveyance path T is formed by, for example, a pair of guide rails 21 (belt guides 211) and a pair of conveyor belts 22.
  • the conveyor belt 22 carries the substrate K along the conveyance path T (that is, along the conveyance direction D) by rotating along the guide rail 21 with the substrate K placed thereon.
  • the substrate transport device 20 is of a so-called single conveyor type, which includes a pair of conveyor belts 22.
  • the substrate transport device 20 may also be of a so-called double conveyor type, for example, consisting of two pairs of conveyor belts.
  • the conveyor belt 22 is rotatably supported by a group of pulleys 26.
  • the pulley group 26 includes a pair of front and rear transport guide pulleys 261, a pair of front and rear return pulleys 262, a direction change pulley 263, a drive pulley 264, and a tension applying pulley 265, and has a "drive section".
  • the drive pulley 264 is supported so as to rotate together with the spline shaft 266.
  • the spline shaft 266 is rotationally driven by the drive motor 23. Therefore, when the drive motor 23 rotates, the drive pulley 264 rotates via the spline shaft 266, and the drive pulley 264 rotates the conveyor belt 22. Thereby, the conveyor belt 22 transports the substrate K placed on the upper surface along the transport path T.
  • the substrate sensor 24 is provided at each of the carry-in position Pi and the carry-out position Po, which are predetermined positions on the transport path T.
  • the carry-in position Pi is a position on the conveyance path T at which, for example, the board K is carried from the work space S of the adjacent component mounting machine 10 to its own work execution position P (work space S).
  • the carry-out position Po is a position on the conveyance path T where, for example, the board K is carried out from the own work execution position P (work space S) to the work space S of the adjacent component mounting machine 10.
  • the substrate sensor 24 is, for example, a transmissive photoelectric sensor.
  • the substrate sensor 24 arranged facing the carry-in position Pi has a light projecting section 241 and a light receiving section 242. Further, the substrate sensor 24 arranged facing the carry-out position Po has a light projecting section 243 and a light receiving section 244.
  • the light projecting parts 241 and 243 are each arranged on the left guide rail 21 in FIG. Then, the light projecting sections 241 and 243 project detection light Ld toward the paired light receiving sections 242 and 244, respectively (see, for example, FIG. 10). Therefore, the detection range R in which the board sensor 24 detects the presence or absence of the board K is the range in which the detection light Ld projected by each of the light projecting parts 241 and 243 is received by the light receiving parts 242 and 244 arranged opposite to each other. (See, for example, FIG. 10). Note that the lighting and extinguishing of the light projectors 241 and 243 is controlled by the control device 18.
  • the light projecting units 241 and 243 have temperature dependence in that the amount of light emitted by the detection light Ld fluctuates over time due to temperature fluctuations immediately after the power is turned on or due to temporary interruption of operation.
  • the detection light Ld projected by the light projecting section 241 is not limited to visible light, and may be invisible light such as infrared light.
  • the light receiving sections 242 and 244 are each arranged on the right guide rail 21. That is, the light receiving sections 242 and 244 are arranged opposite to the pair of light projecting sections 241 and 243 via the transport path T.
  • the light receiving sections 242 and 244 receive the detection light Ld projected by the paired light projecting sections 241 and 243 to determine the amount of received light Lr.
  • the detection light Ld projected by the light projecting unit 241 disposed at the carry-in position Pi is transmitted when the board K is not present at the carry-in position Pi, in other words, when the board K is not present in the detection range R. , the light reaches the light receiving section 242, which is placed at the carry-in position Pi and facing the light projecting section 241.
  • the detection light Ld projected by the light projecting unit 241 disposed at the carry-in position Pi is transmitted when the board K is present at the carry-in position Pi, in other words, when the board K is present in the detection range R. , at least a part of the detection light Ld is blocked by the substrate K and does not reach the light receiving section 242. That is, when the substrate K is present at the carry-in position Pi, the amount of light received by the light receiving section 242 Lr decreases or becomes "0".
  • the detection light Ld projected by the light projecting unit 243 disposed at the carry-out position Po is transmitted when the substrate K is not present at the carry-out position Po, in other words, when the board K is not present in the detection range R. reaches the light receiving section 244 located at the carry-out position Po and facing the light projecting section 243.
  • the detection light Ld projected by the light projecting unit 243 disposed at the carry-out position Po when the substrate K is present at the carry-out position Po, in other words, when the substrate K is present in the detection range R. , at least a part of the detection light Ld is blocked by the substrate K and does not reach the light receiving section 244. That is, when the substrate K is present at the carry-out position Po, the amount of light received by the light receiving section 244 Lr decreases or becomes "0".
  • the light receiving sections 242 and 244 photoelectrically convert the incident detection light Ld to obtain an electrical signal representing the amount of received light Lr. Then, the light receiving units 242 and 244 compare the preset reference amount of received light Lb and the amount of received light Lr, and, for example, determine that "the board K is present" when the amount of received light Lr is less than the reference amount of received light Lb. A signal Sc representing “1” is output to the correspondence determining unit 183 of the control device 18 .
  • the light receiving units 242 and 244 compare the reference amount of received light Lb and the amount of received light Lr, and, for example, when the amount of received light Lr is equal to or greater than the reference amount of received light Lb, the light receiving units 242 and 244 output "0" indicating that "the board K is not present".
  • a signal Sc corresponding to the following is output to the correspondence determining section 183 of the control device 18.
  • the signal Sc output by the light receiver 242 will be referred to as "signal Sc1”
  • the signal Sc output by the light receiver 244 will be referred to as "signal Sc1". is defined as "signal Sc2".
  • the board camera 25 is provided in the component transfer device 16 of the component mounting machine 10. Specifically, the board camera 25 is assembled to the moving table 164 of the component transfer device 16. Here, the substrate camera 25 can be moved together with the work head 165 by being assembled to the moving table 164 together with the work head 165.
  • the board camera 25 mainly takes images of the top surface of the board K positioned at the work execution position P, carry-in position Pi, carry-out position Po, etc. by the positioning device 14 in the component mounting machine 10. More specifically, the board camera 25 is attached to the top surface of the board K. image the position mark. The image data acquired by the board camera 25 is used for image processing to detect the board K positioned at the work execution position P. In the present embodiment, the board camera 25 is also used as a board confirmation unit, and an image (image data Id) taken in the detection range R of the board sensor 24 is used to determine the presence or absence of the board K in the detection range R, as described later. Used for confirmation.
  • control device 18 of the present embodiment also controls the operation of the substrate transport device 20 in order to centrally control the operation of the component mounting machine 10.
  • control device 18 as a control section of this embodiment includes a drive control section 181, a board confirmation control section 182, a correspondence judgment section 183, a judgment section 184, and an adjustment section 185, as shown in FIG. ing.
  • the drive control unit 181 controls the drive of the drive motor 23. That is, the drive control unit 181 rotates the conveyor belt 22 by controlling the drive of the drive motor 23, thereby controlling the conveyance of the substrate K along the conveyance path T.
  • the drive control section 181 outputs the drive amount of the drive motor 23, in other words, the conveyance amount Dr by which the substrate K is conveyed by the conveyor belt 22 to the correspondence determination section 183.
  • the drive control unit 181 receives a stop signal Ss from the correspondence determination unit 183. get. Then, the drive control unit 181 stops driving the drive motor 23, that is, stops the conveyance of the substrate K by the conveyor belt 22.
  • the substrate confirmation control section 182 receives the operation signal So from the correspondence determination section 183 when the conveyance amount Dr and the detection results of the substrate sensor 24 (more specifically, the values of the signals Sc1 and Sc2) do not correspond. get.
  • the board confirmation control unit 182 controls the movement and operation of the board camera 25 as a board confirmation unit assembled on the moving table 164 of the component transfer device 16.
  • the board confirmation control unit 182 drives the head drive mechanism 160 to move the board camera 25 assembled on the moving table 164 in the X-axis direction and the Y-axis direction in the horizontal direction. Then, in accordance with the operation signal So, the board confirmation control unit 182 causes the board camera 25 to detect the board sensor 24 while the board camera 25 is moved together with the moving stage 164 to the vicinity of the carry-in position Pi and/or the vicinity of the carry-out position Po.
  • the detection range R is imaged.
  • the correspondence determining unit 183 acquires the signal Sc1 output from the light receiving unit 242.
  • the correspondence determining unit 183 also obtains the signal Sc2 output from the light receiving unit 244.
  • the correspondence determining unit 183 acquires the transport amount Dr output from the drive control unit 181. Then, the correspondence determining unit 183 determines whether the acquired transport amount Dr corresponds to the detection result of the substrate sensor 24 represented by the acquired signal Sc (signal Sc1 and/or signal Sc2), that is, the value of the signal Sc. to judge.
  • the correspondence determination unit 183 determines that the conveyance amount Dr does not correspond to the detection result, the correspondence determination unit 183 instructs the drive control unit 181 to stop driving the drive motor 23, that is, to stop the conveyance of the substrate K by the conveyor belt 22. Outputs a signal Ss.
  • the correspondence determining unit 183 determines that the transport amount Dr does not correspond to the detection result, the correspondence determining unit 183 moves the board camera 25 together with the moving table 164 to the board confirmation control unit 182 at the carry-in position Pi and the carry-out position Po.
  • An operation signal So for moving the camera in at least one direction to capture an image is output.
  • the correspondence determining unit 183 determines that the transport amount Dr and the detection result do not correspond, the correspondence determining unit 183 sends a signal Sc (signal Sc1 and/or signal Sc2) representing the detection result of the substrate sensor 24 to the determining unit 184. ) is output. Note that when the correspondence determining unit 183 determines that the transport amount Dr and the detection result correspond, it does not output the stop signal Ss and the operation signal So, and does not output the signal Sc to the determining unit 184.
  • the determination unit 184 acquires the signal Sc (signal Sc1 and/or signal Sc2) output from the correspondence determination unit 183. do. Then, the determination unit 184 acquires image data Id representing an image captured by the board camera 25 in accordance with the operation signal So output from the board confirmation control unit 182.
  • the determination unit 184 determines, for example, the image data Id captured by the board camera 25 in the carry-in position Pi or the carry-out position Po, that is, the detection range R of the board sensor 24, that is, the presence or absence of the board K at the carry-in position Pi or the carry-out position Po. Based on the confirmation result, it is determined whether or not there is an erroneous detection by the board sensor 24. For example, if the signal Sc is "1" even though there is no substrate K at the carry-in position Pi (or carry-out position Po) according to the image data Id, the determination unit 184 determines that the substrate sensor 24 has detected an erroneous detection. In other words, it is determined that there is a false detection.
  • the determination unit 184 outputs a request signal Sr requesting the adjustment unit 185 to adjust the detection sensitivity of the substrate sensor 24.
  • the determination unit 184 specifies the carry-in position Pi or the carry-out position Po, or the carry-in position Pi and the carry-out position Po, and outputs the request signal Sr.
  • the determining unit 184 determines that, for example, if the image data Id indicates that there is a substrate K at the carry-in position Pi (or the carry-out position Po) and the signal Sc is “1”, an erroneous detection has occurred in the substrate sensor 24. In other words, it is determined that there is no false detection. In this case, the determination unit 184 issues a notification to the effect that the substrate transport device 20 is to be stopped due to an error on a display device (not shown), for example, because the transport path T is clogged with substrates K or the like.
  • the adjustment unit 185 When the adjustment unit 185 acquires the request signal Sr from the determination unit 184, the adjustment unit 185 adjusts the detection sensitivity of the substrate sensor 24 according to the acquired request signal Sr. In this case, in the present embodiment, the adjustment unit 185 adjusts the detection sensitivity of the substrate sensor 24 by outputting a changed standard received light amount Lbn, which is obtained by changing the value of the standard received light amount Lb, to the light receiving units 242 and 244. do.
  • the substrate detection method includes a transport process K1, a detection process K2, a response determination process K3, a stopping process K4, a confirmation process K5, a determination process K6, and an adjustment process K7.
  • the drive control unit 181 of the control device 18 as a control unit conveys the substrate K along the conveyance path T by controlling the drive of the drive motor 23 as a drive unit, that is, the rotation of the conveyor belt 22. do.
  • the substrate K is transported on the transport path T along a transport direction D from the carry-in position Pi to the carry-out position Po via the work execution position P (see FIGS. 4-5).
  • the control device 18 operates the substrate sensor 24 to detect the presence or absence of the substrate K near the carry-in position Pi and/or the carry-out position Po, which are predetermined positions. That is, the substrate sensor 24 detects the substrate K present within the detection range R at each of the carry-in position Pi and the carry-out position Po (see FIG. 8-10).
  • the correspondence determination unit 183 of the control device 18 determines the conveyance amount Dr of the substrate K in the conveyance process K1 and the detection result of the substrate sensor 24 in the detection process K2 (i.e., the value of the signal Sc). Judging the response. As a result, if the transport amount Dr and the detection result (value of signal Sc) do not correspond, the correspondence determining section 183 outputs a stop signal Ss to the drive control section 181 and also outputs a stop signal Ss to the substrate confirmation control section 182. The operation signal So is output to the target (see FIG. 6).
  • the drive control unit 181 acquires the stop signal Ss output in the response determination step K3 (see FIG. 6). Then, the drive control unit 181 stops driving the drive motor 23, that is, stops the conveyance of the substrate K by the conveyor belt 22, in accordance with the stop signal Ss.
  • the board confirmation control section 182 acquires the operation signal So output in the correspondence determination step K3 (see FIG. 6). Then, the board confirmation control unit 182 operates the head drive mechanism 160 in accordance with the operation signal So, and sends an image of the detection range R near the carry-in position Pi and/or near the carry-out position Po to the board camera 25 as a board check unit. Take an image. That is, in the confirmation step K5, the substrate confirmation control unit 182 captures images near the carry-in position Pi and/or the carry-out position Po with the board camera 25, thereby detecting the inside of the transport path T, more specifically, the detection range R. Check the presence or absence of the board K inside.
  • the determination section 184 of the control device 18, which is a control section, checks the detection result of the board sensor 24 in the detection step K2 (i.e., the value of the signal Sc) and the confirmation of the board camera 25 in the confirmation step K5.
  • the result that is, image data Id representing the captured image
  • the determination unit 184 determines whether there is an erroneous detection by the board sensor 24 based on the detection result (i.e., the value of the signal Sc) and the confirmation result (i.e., the image data Id representing the captured image).
  • the determination unit 184 detects, for example, that the value of the signal Sc is "1", that is, the substrate sensor 24 detects that the substrate K is present near the carry-in position Pi and/or near the carry-out position Po. Nevertheless, if the board K is not confirmed in the image represented by the image data Id, it is determined that there is an erroneous detection by the board sensor 24.
  • the determination unit 184 determines that there is an erroneous detection in the board sensor 24 at the carry-in position Pi and/or the carry-out position Po, that is, when it is confirmed that there is no board K within the detection range R of the board sensor 24. , outputs a request signal Sr requesting the adjustment unit 185 to adjust the detection sensitivity.
  • the determination unit 184 detects, for example, that the value of the signal Sc is "1", that is, the substrate sensor 24 detects that the substrate K is present near the carry-in position Pi and/or near the carry-out position Po. , and if the substrate K is confirmed in the image represented by the image data Id, it is determined that there is no erroneous detection by the substrate sensor 24. In this case, the determination unit 184 issues a notification to the effect that the substrate transport device 20 is to be stopped due to an error on a display device (not shown), for example, because the transport path T is clogged with substrates K or the like.
  • the adjustment section 185 of the control device 18, which is a control section acquires the request signal Sr output from the determination section 184 in the determination step K6. Then, in accordance with the request signal Sr, the adjustment unit 185 changes the standard received light amount Lb stored in the light receiving unit 242 and/or the light receiving unit 244 forming the substrate sensor 24 to set the changed standard received light amount Lbn, and changes the standard received light amount Lbn. The amount Lbn is output to the light receiving section 242 and/or the light receiving section 244. Then, the adjustment unit 185 adjusts the detection sensitivity of the substrate sensor 24 by the light receiving unit 242 and/or the light receiving unit 244 updating and storing the modified reference light reception amount Lbn.
  • Example of determination by determination unit 184 as to whether there is false detection of substrate sensor 24 Next, an example of determination as to whether there is false detection of substrate sensor 24 by determination unit 184 will be described.
  • the board sensor 24 detects that the board is within the detection range R. It is detected that the substrate K is present, that is, the substrate K is still present at the carry-in position Pi.
  • the determination unit 184 acquires image data Id obtained by capturing the vicinity of the carry-in position Pi from the board camera 25.
  • the board confirmation control unit 182 moves the board camera 25 to the upper part of the carry-in position Pi by moving the moving table 164 of the component transfer device 16 in the X-axis direction. Then, the board confirmation control unit 182 operates the board camera 25 above the carry-in position Pi to image the vicinity of the carry-in position Pi, that is, the detection range R.
  • the determination unit 184 compares the image of the detection range R represented by the image data Id acquired from the board camera 25 and the reference image obtained by capturing a state in which the board K is not present in the detection range R on the carry-in position Pi side. compare. As a result of this comparison, if the board K does not exist in the detection range R on the carry-in position Pi side, the determination unit 184 determines that a false detection has occurred in the board sensor 24 on the carry-in position Pi side (there is a false detection). do.
  • the determining unit 184 determines that there is an erroneous detection in the board sensor 24 on the carry-in position Pi side, it outputs a request signal Sr to the adjusting unit 185.
  • the adjustment unit 185 that has acquired the request signal Sr sets the reference light reception amount Lb stored in the light receiving unit 242 forming the substrate sensor 24 at the loading position Pi to a low value such that the detection sensitivity decreases. change.
  • the adjustment unit 185 outputs the changed reference light reception amount Lbn to the light receiving unit 242.
  • the light receiving unit 242 compares the change standard amount of received light Lbn and the amount of received light Lr.
  • the substrate sensor 24 on the carry-in position Pi side detects the presence or absence of the substrate K with its detection sensitivity adjusted.
  • the drive control section 181 drives the stopped drive motor 23, The conveyance of the substrate K by the conveyor belt 22 is resumed (retry control). Then, in the restarted transportation of the substrate K, if the determination section 184 determines that there is an erroneous detection of the substrate sensor 24 again according to the detection result of the substrate sensor 24, the adjustment section 185 makes the change as described above.
  • the standard amount of received light Lbn is output and the detection sensitivity of the light receiving section 242 is repeatedly adjusted. As a result, when the substrate sensor 24 makes a false detection, the substrate transport device 20 can automatically return and resume transporting the substrate K.
  • the determination unit 184 determines that if the board K exists in the detection range R on the carry-in position Pi side, the board sensor 24 on the carry-in position Pi side It is determined that there are no false positives. That is, in this case, the substrate sensor 24 on the carry-in position Pi side detects the substrate K present in the detection range R.
  • the substrate transport device 20 is temporarily stopped due to an error, and, for example, the operator removes the substrate K present near the carry-in position Pi.
  • the determination unit 184 can notify the operator via a display device (not shown) or the like.
  • Example of Determination by Judgment Unit 184 as to whether there is a false detection of the substrate sensor 24 on the side of the carry-out position Po The determination of the presence or absence of false detection of the board sensor 24 disposed on the side of the carry-out position Po will be described with reference to FIG. 9 .
  • the determination as to whether there is an erroneous detection by the board sensor 24 placed on the carry-out position Po side is performed in the same manner as the determination as to whether there is an erroneous detection in the board sensor 24 placed on the carry-in position Pi described above.
  • the substrate K is located within the detection range R (shown in a rectangular shape by a dot pattern in FIG. 9) of the substrate sensor 24 on the side of the carry-out position Po as shown by the two-dot chain line. If it exists, there will be no false positives.
  • the transport amount Dr is large enough to move away from the carry-out position Po (for example, to the adjacent component mounting machine 10), or the transport amount Dr from the work execution position P is small, and the signal Sc2 is "0". In that case, if it does not exist within the detection range R of the substrate sensor 24, there will be no false detection.
  • the board sensor 24 detects that the board K exists within the detection range R, i.e. , it is detected that the substrate K still exists at the unloading position Po. Furthermore, if the signal SC2 is "1" even though the conveyance amount Dr is small enough to be close to the work execution position P (or the conveyance amount Dr is "0"), the substrate sensor 24 detects It is detected that the substrate K is present within the range R, that is, that the substrate K is present at the carry-out position Po even though the substrate K is positioned at the work execution position P.
  • the determination unit 184 acquires image data Id captured in the vicinity of the carry-out position Po from the board camera 25.
  • the correspondence determining section 183 outputs a stop signal Ss to the drive control section 181.
  • the drive control unit 181 stops the driving of the drive motor 23 and stops the conveyance of the substrate K by the conveyor belt 22.
  • the correspondence determining section 183 outputs the operation signal So to the board confirmation control section 182.
  • the component transfer device 16 moves the moving table 164 in the X-axis direction and moves the board camera 25 to the upper part of the carry-out position Po, and the board camera 25 takes an image of the vicinity of the carry-out position Po at the upper part of the carry-out position Po. do.
  • the determination unit 184 compares the image near the carry-out position Po represented by the image data Id acquired from the board camera 25 with a reference image captured in advance in a state in which the board K is not present near the carry-out position Po. As a result of this comparison, if the substrate K does not exist in the vicinity of the carry-out position Po, that is, in the detection range R, the determination unit 184 determines that there is an erroneous detection by the substrate sensor 24 on the carry-out position Po side.
  • the drive control unit 181 drives the stopped drive motor 23 to restart the conveyance of the substrates K by the conveyor belt 22. Thereby, even if an erroneous detection occurs in the substrate sensor 24 disposed on the side of the carry-out position Po, the substrate transport device 20 can automatically return and resume transporting the substrate K.
  • the determination unit 184 determines that if the substrate K exists near the carry-out position Po, that is, in the detection range R, It is determined that there is no false detection by the sensor 24. That is, in this case, the substrate sensor 24 on the side of the carry-out position Po detects the substrate K present in the detection range R.
  • the substrate K in a situation where the substrate K is being carried out from the work execution position P, for example, the substrate K is not moved from the carrying out position Po even though the conveyance amount Dr of the conveyor belt 22 is large, that is, The substrate K is clogged near the unloading position Po.
  • the carried-in board K in a situation where the carried-in board K is positioned at the work execution position P, for example, a board K that is larger in size than the board K to be mounted is mistakenly carried in. Note that if a large-sized substrate K is carried in by mistake, there is a possibility that the substrate K may slip on the transport path T.
  • the substrate sensor 24 is normal and the abnormality is not related to the detection accuracy of the substrate sensor 24. Therefore, the operation of the substrate transfer device 20 is temporarily stopped due to an error, and, for example, the operator moves to the carry-out position Po. The substrate K existing in the vicinity or at the work execution position P is removed. In this case as well, the determination unit 184 can notify the operator that the substrate transport device 20 is to be stopped due to an error via a display device (not shown) or the like.
  • the substrate sensor 24 disposed on the carry-out position Po side receives a signal Sc2 of "1". It is possible that the output is being output.
  • the substrate sensor 24 disposed on the side of the carry-out position Po detects that the substrate K exists within the detection range R (shown in a rectangular shape by a dot pattern in FIG. 10), that is, the substrate K is located at the work execution position. It is detected that the substrate K is present at the carry-out position Po even though it is being carried into the carry-out position Po.
  • the substrate sensor 24 disposed on the carry-in position Pi side outputs the signal Sc1 of "1". This may be the case.
  • the board sensor 24 placed on the carry-in position Pi side detects that the board K exists within the detection range R (shown in a rectangular shape by a dot pattern in FIG. 10), that is, the board K is located at the work execution position. It is detected that the substrate K is present at the carry-in position Pi even though it is being carried out from P.
  • the determination unit 184 acquires image data Id obtained by capturing the vicinity of the carry-in position Po including the detection range R and/or image data Id capturing the vicinity of the carry-in position Pi including the detection range R from the board camera 25. Therefore, in the control device 18, the correspondence determining section 183 outputs the operation signal So to the board confirmation control section 182. As a result, the component transfer device 16 moves the moving table 164 in the X-axis direction to move the board camera 25 to the top of the carry-out position Po and/or the carry-in position Pi, and the board camera 25 moves the board camera 25 to the top of the carry-out position Po and/or the carry-in position Pi. An image is taken at the upper part of position Pi.
  • the correspondence determining section 183 outputs the stop signal Ss to the drive control section 181.
  • the drive control unit 181 stops the driving of the drive motor 23 and stops the conveyance of the substrate K by the conveyor belt 22.
  • the determination unit 184 compares the image near the carry-out position Po represented by the image data Id acquired from the board camera 25 with a reference image captured in advance in a state in which the board K is not present near the carry-out position Po. As a result of this comparison, if the substrate K does not exist in the vicinity of the carry-out position Po, that is, in the detection range R, the determination unit 184 determines that there is an erroneous detection by the substrate sensor 24 on the carry-out position Po side.
  • the determination unit 184 compares an image near the carry-in position Pi represented by the image data Id acquired from the board camera 25 with a reference image captured in advance in a state where the board K is not present near the carry-in position Pi. As a result of this comparison, if the substrate K does not exist in the vicinity of the carry-in position Pi, that is, in the detection range R, the determination unit 184 determines that there is an erroneous detection by the substrate sensor 24 on the carry-in position Pi side. Therefore, in this case, each reference amount of light received is stored in the light receiving section 242 forming the substrate sensor 24 on the carry-in position Pi side and/or the light receiving section 244 forming the substrate sensor 24 on the carrying-out position Po side. Lb is changed and adjusted.
  • the drive control unit 181 drives the stopped drive motor 23 to restart the conveyance of the substrates K by the conveyor belt 22.
  • the substrate transport device 20 automatically returns and resumes transporting the substrate K. It becomes possible to do so.
  • the light projecting section 241 and/or the light projecting section 243 and the light receiving section 242 (and/or the light receiving section 244) For example, the operator may be notified and guided to check whether there is a possibility that a foreign object may pass between the two.
  • the determination unit 184 determines that if the substrate K exists near the carry-out position Po, that is, in the detection range R, It is determined that there is no false detection by the sensor 24. That is, in this case, the substrate sensor 24 on the side of the carry-out position Po detects the substrate K present in the detection range R.
  • the determination unit 184 determines that if the board K exists near the carry-in position Pi, that is, in the detection range R, the determination unit 184 determines that It is determined that there is no erroneous detection by the board sensor 24. That is, in this case, the substrate sensor 24 on the carry-in position Pi side detects the substrate K present in the detection range R.
  • the substrate transport device 20 it is possible to automatically determine whether there is an erroneous detection by the substrate sensor 24 during production. As a result, when a false detection occurs in the board sensor 24 (there is a false detection), the time required for confirmation can be shortened, in other words, the time to stop production can be shortened, and as a result, productivity can be increased. It is possible to reduce the impact on
  • the adjustment unit 185 adjusts the detection sensitivity of the substrate sensor 24, that is, the light receiving unit 242 and/or the light receiving unit 244.
  • the adjustment can be made automatically by changing the reference light reception amount Lb to the modified reference light reception amount Lbn. That is, in the substrate transport device 20, the detection sensitivity of the substrate sensor 24 can be automatically adjusted even during production. Therefore, the time during which production is stopped to adjust the detection sensitivity of the substrate sensor 24 can be shortened, and as a result, the influence on productivity can be reduced.
  • the substrate detection method also provides the same effects as the substrate transport device 20.
  • the board camera 25 is used as the board checking section.
  • the board checking unit is not limited to the board camera 25 as long as it can detect the presence or absence of the board K at a predetermined position, for example, the carry-in position Pi and/or the carry-out position Po.
  • substrate work machine for example, the component mounting machine 10.
  • an example of the board checking unit is a distance measuring sensor that can be provided in the component mounting machine 10 in advance.
  • the distance measurement sensor like the substrate camera 25, can be assembled to the moving table 164 forming the head drive mechanism 160.
  • the ranging sensor can move in the horizontal direction, that is, in the X-axis direction and the Y-axis direction.
  • the distance sensor can then move in the horizontal direction and measure the distance to the top surface of the substrate K. Note that by measuring the distance with the distance sensor, a physical quantity corresponding to the height of the substrate K, that is, the thickness of the substrate K, can be obtained, for example, when the top surface of the conveyor belt 22 that conveys the substrate K is used as a reference.
  • the distance measuring sensor by acquiring the distance measured by the distance sensor, the presence or absence of the substrate K in the transport path T can be detected. As a result, even when a distance measuring sensor is used as the board checking section, the same effects as in the embodiment described above can be obtained.
  • Second Modified Example Furthermore, in the above-described embodiment, after the board camera 25 as the board confirmation unit moves to the vicinity of the carry-in position Pi or the vicinity of the carry-out position Po by the drive of the head drive mechanism 160, Alternatively, an image near the carry-out position Po is captured. Further, in the first modification described above, by driving the head drive mechanism 160, the distance measurement sensor serving as the board confirmation section moves to the vicinity of the carry-in position Pi or the carry-out position Po, and then moves to the vicinity of the carry-in position Pi or the carry-out position Po. The distance near the position Po is measured. Thereby, the presence or absence of the substrate K within the detection range R provided near the carry-in position Pi and/or near the carry-out position Po is confirmed.
  • the distance measuring sensor may continuously measure the distance to the conveying path T while moving along the conveying path T by the head drive mechanism 160. It is possible. According to this, it becomes possible to detect even the position where the substrate K is present in the transport path T, and as a result, it becomes possible to improve the accuracy of determining whether there is an erroneous detection by the substrate sensor 24.
  • the substrate sensor 24 is a transmissive photoelectric sensor having light projecting sections 241, 243 and light receiving sections 242, 244.
  • the substrate sensor 24 is not limited to a transmission type photoelectric sensor, and may, for example, be a contact sensor that detects the presence or absence of the substrate K by making contact with the substrate K, or a contact sensor that detects the presence or absence of the substrate K by measuring the weight of the substrate K passing through. It is also possible to use a weight sensor or the like that detects.
  • the adjustment unit 185 adjusts the detection sensitivity of the substrate sensor 24.
  • the light projecting sections 241, 243 and the light receiving sections 242, 244 of the substrate sensor 24 may be cleaned. Thereby, for example, attached foreign matter is removed, and detection sensitivity can be maintained appropriately.
  • SYMBOLS 10 Component mounting machine, 11... Working machine main body, 12... Frame, 13... Cover member, 13a... Opening for board conveyance, 14... Positioning device, 15... Component supply device, 16... Component transfer device, 160... Head Drive mechanism, 164... Moving table, 165... Work head, 17... Component camera, 18... Control device (control unit), 181... Drive control unit, 182... Board confirmation control unit, 183... Compatibility judgment unit, 184...
  • Judgment unit 185...adjustment section, 20...substrate transport device, 21...guide rail, 211...belt guide, 22...conveyor belt (drive section), 23...drive motor (drive section), 24...substrate sensor, 241, 243...throw Light section, 242, 244... Light receiving section, 25... Board camera (board confirmation section), 26... Pulley group (drive section), K... Board, S... Working space, T... Transport path, D... Transport direction, P...

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Operations Research (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

L'invention concerne un dispositif de transport de substrat comprenant : une unité d'entraînement qui transporte un substrat le long d'un trajet de transport ; un capteur de substrat qui est disposé à une position prescrite sur le trajet de transport et qui détecte la présence/l'absence d'un substrat à la position prescrite ; une unité de confirmation de substrat qui est disposée de façon à être mobile horizontalement, et qui est capable de confirmer la présence/l'absence d'un substrat dans le trajet de transport ; et une unité de commande qui, lorsqu'une quantité de transport de substrat de l'unité d'entraînement ne correspond pas à un résultat de détection du capteur de substrat, commande l'unité d'entraînement pour arrêter le transport de substrat, et commande l'unité de confirmation de substrat pour confirmer la présence/l'absence d'un substrat dans le trajet de transport, l'unité de commande ayant une unité de détermination qui détermine la présence/l'absence d'une fausse détection du capteur de substrat sur la base du résultat de détection du capteur de substrat et du résultat de confirmation de l'unité de confirmation de substrat.
PCT/JP2022/027710 2022-07-14 2022-07-14 Dispositif de transport de substrat et procédé de détection de substrat Ceased WO2024013934A1 (fr)

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JP2024533442A JPWO2024013934A1 (fr) 2022-07-14 2022-07-14
DE112022007539.2T DE112022007539T5 (de) 2022-07-14 2022-07-14 Platinenfördervorrichtung und Platinenerkennungsverfahren
PCT/JP2022/027710 WO2024013934A1 (fr) 2022-07-14 2022-07-14 Dispositif de transport de substrat et procédé de détection de substrat

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006278714A (ja) * 2005-03-29 2006-10-12 Matsushita Electric Ind Co Ltd 基板認識システム、実装制御方法、及び部品実装装置並びに部品実装方法
JP2010092970A (ja) * 2008-10-06 2010-04-22 Juki Corp 搬送基板検出装置
JP2015126210A (ja) * 2013-12-27 2015-07-06 ヤマハ発動機株式会社 基板作業装置
WO2019159409A1 (fr) * 2018-02-14 2019-08-22 Ｎｅｃソリューションイノベータ株式会社 Dispositif de suivi de marchandises, compteur de marchandises, procédé de suivi de marchandises, procédé de comptage de marchandises, système de suivi de marchandises, système de comptage de marchandises
JP2020150101A (ja) * 2019-03-13 2020-09-17 パナソニックＩｐマネジメント株式会社 作業機および作業機の診断方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006278714A (ja) * 2005-03-29 2006-10-12 Matsushita Electric Ind Co Ltd 基板認識システム、実装制御方法、及び部品実装装置並びに部品実装方法
JP2010092970A (ja) * 2008-10-06 2010-04-22 Juki Corp 搬送基板検出装置
JP2015126210A (ja) * 2013-12-27 2015-07-06 ヤマハ発動機株式会社 基板作業装置
WO2019159409A1 (fr) * 2018-02-14 2019-08-22 Ｎｅｃソリューションイノベータ株式会社 Dispositif de suivi de marchandises, compteur de marchandises, procédé de suivi de marchandises, procédé de comptage de marchandises, système de suivi de marchandises, système de comptage de marchandises
JP2020150101A (ja) * 2019-03-13 2020-09-17 パナソニックＩｐマネジメント株式会社 作業機および作業機の診断方法

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