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WO2023228844A1 - Sonde - Google Patents

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Publication number
WO2023228844A1
WO2023228844A1 PCT/JP2023/018524 JP2023018524W WO2023228844A1 WO 2023228844 A1 WO2023228844 A1 WO 2023228844A1 JP 2023018524 W JP2023018524 W JP 2023018524W WO 2023228844 A1 WO2023228844 A1 WO 2023228844A1
Authority
WO
WIPO (PCT)
Prior art keywords
plunger
barrel
end turn
spring
loosely wound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/018524
Other languages
English (en)
Japanese (ja)
Inventor
拓也 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokowo Co Ltd
Original Assignee
Yokowo Co Ltd
Yokowo Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokowo Co Ltd, Yokowo Mfg Co Ltd filed Critical Yokowo Co Ltd
Publication of WO2023228844A1 publication Critical patent/WO2023228844A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

Definitions

  • the present invention relates to a probe.
  • This probe 5 has a conductive first plunger 60 fixed to one end of a conductive hollow barrel (tube) 50, and a conductive second plunger 70 that can protrude from the other end of the barrel 50. is slidably provided.
  • the probe 5 is configured such that a conductive spring 80 within the barrel 50 biases the tip of the second plunger 70 in a direction to protrude from the barrel 50.
  • both ends of the spring 80 are tapered and have a small diameter, and the ends of the spring 80 are attached to the outer periphery of the protrusions 61, 71 formed on the proximal end surfaces of the first and second plungers 60, 70. It is engaged.
  • the spring 80 has a structure in which both ends are concentrically tapered small diameter parts with respect to the middle part of the spring 80, as can be seen from FIG. . It is difficult to generate lateral pressure, that is, lateral pressure in the direction of pressing the entry pipe portion 72 of the second plunger 70 against the inner wall of the barrel 50. Therefore, the resistance value of the probe 5, in other words, the resistance value between the first plunger 60 and the second plunger 70 is not stable.
  • Patent Document 1 discloses a probe pin in which the part of the pin that contacts the spring (hereinafter referred to as the bottom surface of the pin) is processed into a conical shape, and a spring is installed in a space formed by a hole in the pin and a tube. has been done.
  • the spring has a central portion with approximately equal diameters and an adjacent tapered portion whose diameter gradually decreases and whose central axis is offset diagonally from the central axis of the central portion, and is curved as a whole. It is characterized by its shape.
  • the pin When both ends of the spring are compressed by the conical part on the bottom of the pin and the bottom of the tube hole, the pin receives a load from the tapered part of the spring in a direction inclined from the axial direction of the tube, so the pin is in an inclined state.
  • a side pressure corresponding to the amount of compression in the axial direction of the spring is generated.
  • the structure of the spring is complex and may take time to manufacture.
  • the probe with the general spring structure shown in FIGS. 1 and 2 cannot stably generate lateral pressure, and the resistance value of the probe is unstable. Further, in the case of the probe pin of Patent Document 1, it is difficult to apply it when the spring structure is complicated.
  • the present invention was made in recognition of this situation, and one of its objects is to provide a probe that uses a relatively simple spring structure to reliably generate internal side pressure of the plunger and stabilize the resistance value. There is a particular thing. Other objects of the invention will become apparent from the description herein.
  • One aspect of the invention is a probe comprising: an electrically conductive hollow barrel; a conductive first plunger provided at one end of the barrel; a second electrically conductive plunger slidable within the barrel and protruding from the other end of the barrel; a spring provided in the barrel and biasing the first plunger and the second plunger in a direction away from each other;
  • the spring includes a loosely wound portion, a first end portion that is located at one end of the loosely wound portion and abuts the first plunger, and a first end portion that is located at the other end of the loosely wound portion and contacts the second plunger.
  • the center axis of the first end turn portion is offset in a first direction with respect to the center axis of the loosely wound portion, and the center axis of the second end turn portion is offset with respect to the center axis of the loosely wound portion. and is offset in a second direction opposite to the first direction.
  • FIG. 3 is a vertical cross-sectional view of a conventional probe.
  • FIG. 2 is a vertical cross-sectional view of a conventional probe in a compressed state.
  • 1 is a longitudinal cross-sectional view showing Embodiment 1 of a probe according to the present invention.
  • FIG. 1 is a vertical cross-sectional view of the first embodiment in a compressed state.
  • FIG. 5 is an enlarged cross-sectional view of the main part of FIG. 4; 3 is a front view of a spring used in Embodiment 1.
  • FIG. It is a left side view of the same. It is a right side view of the same.
  • FIG. 3 is an explanatory diagram showing an example of how the probe shown in Embodiment 1 is used.
  • FIG. 3 is a vertical cross-sectional view showing a second embodiment of the probe according to the present invention.
  • FIG. 3 is a longitudinal sectional view showing Embodiment 1 of the probe according to the present invention
  • FIG. 4 is a longitudinal sectional view of the same in a compressed state
  • FIG. 5 is an enlarged sectional view of the essential part of FIG. 4.
  • the probe 1 has a conductive first plunger 20 fixed to one end of a hollow conductive barrel (tube) 10 and capable of protruding from the other end of the barrel 10.
  • a second electrically conductive plunger 30 is slidably provided.
  • the spring 40 urges the first plunger 20 and the second plunger 30 in a direction away from each other.
  • the probe 1 is configured such that a conductive spring 40 within the barrel 10 biases the tip of the second plunger 30 in a direction to protrude from the barrel 10.
  • the structure of the spring 40 is significantly different from the conventional example shown in FIGS. 1 and 2.
  • the spring 40 is a conductive coil spring made by winding an elastic metal wire, and includes a loosely wound portion 41 wound to have a constant outer diameter, and one end side of the loosely wound portion 41.
  • the first end turn portion 42 is located at the other end of the loosely wound portion 41 and comes into contact with the first plunger 20
  • the second end turn portion 43 is located at the other end of the loosely wound portion 41 and comes into contact with the second plunger 30 .
  • the loosely wound portion 41 is an effective wound portion that functions as a compression spring.
  • the first end-turning portion 42 and the second end-turning portion 43 have a diameter smaller than that of the loosely wound portion 41, and are, for example, tightly wound.
  • the central axis a of the first end-wound portion 42 is offset in the first direction with respect to the central axis c of the loosely wound portion 41, and is aligned with the outer peripheral end of the loosely wound portion 41.
  • the outer peripheral end of the first end-wound portion 42 is aligned with the outer peripheral end of the first end-wound portion 42 on the outside in the first direction offset with respect to the center axis c of the loosely wound portion 41 .
  • the center axis b of the second end-wound portion 43 is offset in a second direction opposite to the first direction with respect to the center axis c of the loosely-wound portion 41, and The outer peripheral end of the second end-wound portion 43 is aligned with the outer peripheral end of the second end-wound portion 43 on the outside in the second direction offset from the central axis c of the loosely wound portion 41 .
  • the barrel 10 has a cylindrical hollow part
  • the first plunger 20 provided at one end of the barrel 10 has a flange part 21 and a proximal end that fits into the one end of the barrel 10. It has an entry tube part 22 and a tip part 25 protruding to the outside of the barrel 10.
  • the tip portion 25 has a plurality of sharp protrusions 26.
  • the entry tube portion 22 has a smaller diameter than the flange portion 21, and a groove 23 is formed at an intermediate position of the entry tube portion 22 to extend around its outer periphery.
  • the first plunger 20 is fixed to the barrel 10 by forming a protrusion 11 on the inner periphery of the barrel 10 that engages with the groove 23 by processing the barrel 10 (for example, punching). Note that there is no protrusion on the proximal end surface of the first plunger 20 that engages with the spring 40.
  • the second plunger 30 provided at the other end of the hollow barrel 10 has an entry tube portion 31 on the proximal end side and a tip portion 35 having a smaller diameter than the entry tube portion 31.
  • the entry pipe portion 31 has a sliding portion 31a that is slidable on the inner wall of the cylindrical hollow portion of the barrel 10, and a tapered chamfered portion 31b formed on the base end side thereof.
  • the entry tube part 31 is held by the caulking part 12 at the end of the barrel 10 so as not to come off from the barrel 10.
  • the second plunger 30 has a convex portion 32 formed on its proximal end surface.
  • the convex portion 32 has a cylindrical shape concentric with the central axis 30a of the second plunger 30, for example, and has a tapered tip end so that the second end turn portion 43 of the spring 40 can be easily fitted therein.
  • the first end turn portion 42 is in contact with the flat proximal end surface of the first plunger 20.
  • the second end turn portion 43 abuts against the proximal end surface of the second plunger 30 and urges the distal end portion 35 of the second plunger 30 in a direction to protrude from the barrel 10 .
  • the second plunger 30 is engaged with one side of the base (the lower side of the base in FIG. 5) to generate a force that tilts the second plunger 30. That is, in the enlarged cross-sectional view of the spring in the compressed state in FIG. 2, the loosely wound portion 41 of the spring 40 contracts in a substantially rhombic shape, so that it contracts at an angle with respect to the central axis 10a of the barrel 10.
  • the second end turn portion 43 pushes the second plunger 30 with a force Fa inclined with respect to the central axis 10a of the barrel 10.
  • the force Fa can be decomposed into a lateral pressure component Fa1 and a component Fa2 that does not contribute to the lateral pressure parallel to the central axis 10a of the barrel 10, and that the lateral pressure component Fa1 is generated.
  • the second plunger 30 pushes the spring 40 with a force Fb inclined with respect to the central axis 10a of the barrel 10.
  • the force Fb can be decomposed into a lateral pressure component Fb1 and a component Fb2 that does not contribute to the lateral pressure parallel to the central axis 10a of the barrel 10, and that the lateral pressure component Fb1 is generated.
  • This side pressure component ensures that the proximal end portion of the sliding portion 31a of the entry tube portion 31 comes into contact with the inner wall of the barrel 10.
  • the loosely wound portion 41 is inclined with respect to the central axis 10a of the barrel 10, and lateral pressure is generated.
  • a force is applied in a direction in which the central axis 30a of the second plunger 30 is inclined with respect to the central axis 10a of the barrel 10, and the base end portion of the sliding portion 31a of the second plunger 30 comes into contact with the inner wall of the barrel 10. do. Therefore, the resistance value of the probe 1, that is, the resistance value between the first plunger 20 and the second plunger 30 is kept sufficiently low.
  • FIG. 9 is an explanatory diagram showing an example of use of the probe 1 shown in Embodiment 1.
  • the probe 1 is installed in a socket 90 with an insulating support 100.
  • the insulating support 100 has a structure in which a first insulating support 101 having a through hole 101a and a second insulating support 102 having a through hole 102a are overlapped, and the probe 1 falls into the through hole 101a and the through hole 102a. It is held that it does not.
  • the protrusion 26 of the first plunger 20 comes into contact with the bump 111 of the test object 110 in a pressed state, and the tip of the second plunger 30 The portion 35 comes into contact with the electrode 121 of the test substrate 120. Thereby, electrical connection is established between the bumps 111 of the object to be inspected 110 and the inspection substrate 120 via the probe 1 .
  • the spring 40 in the barrel 10 is provided with a first end turn portion 42 and a second end turn portion 43 having a smaller diameter than the loosely wound portion 41 at one end and the other end of the loosely wound portion 41, respectively.
  • the center axis a of the first end turn portion 42 is offset in the first direction with respect to the center axis c of the loosely wound portion 41, and the center axis b of the second end turn portion 43 is offset with respect to the center axis c. It is offset in a second direction opposite to the first direction. Therefore, the loosely wound portion 41 is compressed with its central axis c inclined with respect to the central axis 10a of the barrel 10.
  • the second plunger 30 has a proximal end surface against which the second end turn portion 43 of the spring 40 comes into contact, and further has a convex portion 32 protruding from the proximal end surface. Since the second end turn portion 43 engages with this convex portion 32 and applies force in the offset direction of the second end turn portion 43, side pressure can be generated more reliably.
  • the first plunger 20 is fixed to the barrel 10, and its proximal end surface may be a flat surface without a convex portion. Even on a flat surface, the spring 40 remains stable in a tilted state with respect to the central axis 10a of the barrel 10, as shown in FIGS. 3, 4, and 5.
  • the first end turn portion 42 and the second end turn portion 43 of the spring 40 rotate through an angle of 180° around an axis perpendicular to the center axis of the spring 40 (which can be considered as the center axis c of the loosely wound portion 41). Even when rotated, the positional relationship remains the same with respect to the loosely wound portion 41, so the same performance can be achieved even when upside down, so assembly is easy. There is no need to consider the direction in which the spring 40 is inserted into the barrel 10 during assembly.
  • the outer peripheral end of the loosely wound portion 41 of the spring 40 and the outer peripheral end of the first end turn portion 42 are defined in the direction in which the center axis of the first end turn portion 42 is offset from the center axis of the loosely wound portion 41. They are aligned on the outside. That is, in FIG. 3 and the like, the lower part of the first rounded part 42 is aligned with the lower left part of the sparsely wound part 41. Further, the outer peripheral end of the loosely wound portion 41 of the spring 40 and the outer peripheral end of the second end wound portion 43 are in the direction in which the central axis of the second end wound portion 43 is offset with respect to the central axis of the loosely wound portion 41. It's all lined up on the outside.
  • the upper part of the second rounded part 43 is aligned with the upper right part of the sparsely wound part 41. From the above, the center axes of the first end turn portion 42 and the second end turn portion 43 can be offset from each other with respect to the center axis of the sparse turn portion 41 by a large amount, and the probe 1 can be manufactured easily. .
  • FIG. 10 shows a second embodiment of the probe according to the present invention.
  • the first plunger 20A of the probe 2 is not fixed to the barrel 10, but has the same structure as the second plunger 30 and is slidable with respect to the barrel 10.
  • the other configurations are the same as those of the first embodiment described above.
  • both the first plunger 20A and the second plunger 30 are movable, it is possible to increase the expansion and contraction stroke.
  • Other effects are similar to those in the first embodiment.
  • the first plunger may have a barrel-plunger structure in which the barrel and the first plunger are integrally formed as one part. Moreover, a configuration without an independent barrel may be used.
  • the first plunger has a plurality of sharp protrusions at its tip, but it may have only one protrusion, and its shape and arrangement may vary depending on the bumps, electrodes, etc. of the object to be inspected. It can be changed as appropriate depending on the situation.
  • Aspect 1 includes an electrically conductive hollow barrel; a conductive first plunger provided at one end of the barrel; a second electrically conductive plunger slidable within the barrel and protruding from the other end of the barrel; a spring provided in the barrel and biasing the first plunger and the second plunger in a direction away from each other;
  • the spring includes a loosely wound portion, a first end portion that is located at one end of the loosely wound portion and abuts the first plunger, and a first end portion that is located at the other end of the loosely wound portion and contacts the second plunger.
  • the center axis of the first end turn portion is offset in a first direction with respect to the center axis of the loosely wound portion, and the center axis of the second end turn portion is offset with respect to the center axis of the loosely wound portion. and offset in a second direction opposite the first direction.
  • an internal side pressure that pushes the second plunger toward the inner wall of the barrel is generated to stably lower the resistance value of the probe, that is, the resistance value between the first plunger and the second plunger. value can be maintained.
  • the second plunger has a convex portion that engages with the second end turn portion.
  • the second end turn portion engages with the convex portion on the second plunger side and applies force in the offset direction of the second end turn portion, so that lateral pressure can be generated more reliably.
  • the first plunger has a convex portion that engages with the first end turn portion
  • the second plunger has a convex portion that engages with the second end turn portion
  • the first end turn portion engages with the convex portion on the first plunger side, and the first end turn portion engages with the protrusion on the first plunger side.
  • the first end turn part applies a force in the offset direction of the second end turn part.
  • lateral pressure can be reliably generated on both sides of the second plunger.
  • Aspect 4 is such that the outer peripheral end of the loosely wound portion and the outer peripheral ends of the first end turn portion and the second end turn portion are such that the central axes of the first end turn portion and the second end turn portion are They are aligned on the outside in a direction offset from the central axis of the sparsely wound portion, respectively.
  • the amount of offset of the first and second end-wound portions with respect to the loosely wound portion can be increased, and manufacturing is also easy.
  • Aspect 5 is that when the first end turn portion and the second end turn portion are rotated by 180° about an axis perpendicular to the central axis of the spring as a rotation fulcrum, the first end turn portion and the second end turn portion have the same positional relationship with respect to the sparse turn portion. Become.
  • the same performance can be obtained even when the spring is upside down, so it is easy to assemble. There is no need to consider the direction in which the spring is inserted into the barrel during assembly.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

Selon l'invention, une valeur de résistance est stabilisée par production de manière sûre d'une pression côté partie interne d'un piston.　Plus précisément, l'invention concerne une sonde qui est équipée : d'un premier piston agencé au niveau d'une partie extrémité d'une valve ; d'un second piston capable de coulisser à l'intérieur de ladite valve, et dépassant de l'autre partie extrémité de ladite valve ; et d'un ressort qui sollicite lesdits premier et second piston dans une direction les éloignant l'un de l'autre. Ledit ressort possède : une partie enroulement lâche ; une première partie spire terminale positionnée du côté d'une extrémité de cette partie enroulement lâche, et venant en contact avec ledit premier piston ; et une seconde partie spire terminale positionnée de l'autre côté de l'extrémité de la partie enroulement lâche, et venant en contact avec ledit second piston. L'axe central de ladite première partie spire terminale, est décalé dans une première direction par rapport à l'axe central de ladite partie enroulement lâche, et l'axe central de ladite seconde partie spire terminale, est décalé dans une seconde direction opposée à ladite première direction par rapport à l'axe central de ladite partie enroulement lâche.
PCT/JP2023/018524 2022-05-26 2023-05-18 Sonde Ceased WO2023228844A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-085828 2022-05-26
JP2022085828A JP2023173518A (ja) 2022-05-26 2022-05-26 プローブ

Publications (1)

Publication Number Publication Date
WO2023228844A1 true WO2023228844A1 (fr) 2023-11-30

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ID=88919268

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/018524 Ceased WO2023228844A1 (fr) 2022-05-26 2023-05-18 Sonde

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JP (1) JP2023173518A (fr)
TW (1) TW202405449A (fr)
WO (1) WO2023228844A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050280433A1 (en) * 2004-06-16 2005-12-22 Nelson Larre H Electrical test probes, methods of making, and methods of using
US20080048701A1 (en) * 2006-08-25 2008-02-28 Henry David W Probe with contact ring
WO2008133209A1 (fr) * 2007-04-19 2008-11-06 Nhk Spring Co., Ltd. Contact conducteur et unité de contact conducteur
WO2011058646A1 (fr) * 2009-11-13 2011-05-19 テスト ツーリング ソリューションズ グループ ピイ ティ イー リミテッド Aiguille de sonde
JP2016008904A (ja) * 2014-06-25 2016-01-18 株式会社ミタカ コンタクトプローブ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050280433A1 (en) * 2004-06-16 2005-12-22 Nelson Larre H Electrical test probes, methods of making, and methods of using
US20080048701A1 (en) * 2006-08-25 2008-02-28 Henry David W Probe with contact ring
WO2008133209A1 (fr) * 2007-04-19 2008-11-06 Nhk Spring Co., Ltd. Contact conducteur et unité de contact conducteur
WO2011058646A1 (fr) * 2009-11-13 2011-05-19 テスト ツーリング ソリューションズ グループ ピイ ティ イー リミテッド Aiguille de sonde
JP2016008904A (ja) * 2014-06-25 2016-01-18 株式会社ミタカ コンタクトプローブ

Also Published As

Publication number Publication date
JP2023173518A (ja) 2023-12-07
TW202405449A (zh) 2024-02-01

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