WO2023124433A1 - Optical device, optical module, and optical switching system - Google Patents

Abstract

An optical device, an optical module, and an optical switching system. The optical device comprises a first structural member (10), a second structural member (20), a connecting structure (40) and a thin film layer (30), wherein the connecting structure (40) is arranged between the first structural member (10) and the second structural member (20), one end of the connecting structure (40) is connected to the first structural member (10), and the other end of the connecting structure (40) is connected to the second structural member (20); and the thin film layer (30) covers a connection position between the first structural member (10) and the second structural member (20), and the thin film layer (30) seals a joint between the first structural member (10) and the second structural member (20). The cost of the optical device is reduced, while ensuring airtightness.

Description

Optical devices, optical modules and optical switching systems

Cross References to Related Applications

This application claims priority to a Chinese patent application filed with the China Patent Office on December 30, 2021, with application number 202111651160.9 and titled "Optical Device, Optical Module, and Optical Switching System", the entire contents of which are incorporated herein by reference. Applying.

technical field

The present application relates to the technical field of optical modules, and in particular to an optical device, an optical module and an optical switching system.

Background technique

Optical devices in the field of optical communications need to be sealed during use to ensure that the optical path components in the optical device work in an environment with relatively stable water vapor and gas densities. At present, the commonly used packaging method is to connect the metal shell and the metal base through high-precision welding. To ensure the airtightness of this connection method, the requirements for the metal are relatively high. cutting materials, leading to an increase in the overall cost of optical devices.

Based on this, how to reduce the production cost of the optical device on the premise of ensuring the airtightness of the optical device is an urgent technical problem to be solved at present.

Contents of the invention

The application provides an optical device, an optical module and an optical switching system, which can reduce the cost of the optical device on the premise of ensuring the airtightness of the optical device.

In a first aspect, the present application provides an optical device, which may include a first structural member, a second structural member, a connection structure and a film layer; the connection structure is disposed between the first structural member and the second structural member, And one end of the connecting structure is connected to the first structural member, the other end of the connecting structure is connected to the second structural member, the film layer covers the connection position between the first structural member and the second structural member, and the film layer is used to connect the first structure The connection between the component and the second structural component is sealed.

In the present application, the first structural member and the second structural member of the optical device are connected through a connection structure, and the connection between the first structural member and the second structural member is sealed by a thin film layer. Since the thin film layer can produce micro deformation, forming The stress is released to form a buffer area between the first structural member and the second structural member, which can not only ensure the sealing of the optical device, but also reduce the matching requirements of the expansion coefficients of the first structural member and the second structural member. The material requirements of the structural member and the second structural member are relatively low, so that the cost of the optical device can be reduced.

It should be noted that the process flow of the first structural member and the second structural member connected by a connecting structure without sealing treatment is relatively simple, and the process flow can also be simplified by forming the optical device in the above-mentioned manner. In addition, the thin film layer can be Metal film layer or polymer material layer, wherein when the film layer is a metal film layer, the thickness of the metal film layer can be 0.1 ~ 1mm, and the material of the metal film layer can be, but not limited to, copper foil, the following implementation Example The thin film layer is a metal thin film layer as an example for illustration.

In the above-mentioned embodiments, the materials of the first structural member and the second structural member can be various, for example: the material of the first structural member can be any one of metal materials, metal-ceramic composite materials, ceramics or glass, The material of the second structural part can also be any one of metal material, metal-ceramic composite material, pottery or glass; The structural member and the second structural member are welded, and the film layer surrounds the first structural member and the second structural member, so as to ensure that the film layer can seal the joint between the first structural member and the second rigid member.

When the material of the first structural member is metal, and the material of the second structural member is any one of metal-ceramic composite materials, ceramics or glass, the optical device may also include a first coating, wherein, due to the material of the second structural member The selection of the second structural member needs to be provided with a first coating on the surface of the second structural member, so that the thin film layer is connected to the second structural member, and the thin film layer is welded to the first coating layer and the first structural member, so that the first structural member and the second structural member The tightness of the connection between the two structural members.

When the material of the first structural member is any one of metal-ceramic composite material, ceramics or glass, and the material of the second structural member is a metal material, the optical device may also include a first coating, wherein, due to the The selection of materials requires a first coating on the surface of the first structural member, and the first coating can surround the first structural member, so that the first coating and the first structural member are sealed and connected to ensure that the thin film layer and the first structural member are sealed. When the second structural member and the first plating layer are welded, the joint between the first structural member and the second structural member is airtight.

When the material of the first structural member is any one of metal-ceramic composite material, ceramics or glass, and the material of the second structural member is also any one of metal-ceramic composite material, ceramics or glass, the optical device may also include Two first coating layers, the two first coating layers are respectively arranged on the surface of the second structural member and the surface of the first structural member, wherein, when the two first coating layers are respectively arranged on the second structural member and the first structural member, it is necessary Ensure that the size of the connection between the two first coatings and the first structural member and the second structural member corresponds to ensure the sealing between the first structural member and the second structural member when the thin film layer is welded to the two first coatings sex.

In the above-mentioned embodiment, when both the first structural member and the second structural member are made of metal materials, the first structural member and the second structural member can be connected through a connecting structure (first supporting member); when the first structural member When the material of the second structural member is any one of metal-ceramic composite material, ceramics or glass, the connecting structure may include the second plating layer and the first support member, and when the second structural member faces the first structural member One side of the first support is provided with a second coating, one end of the first support can be welded to the first structure, and the other end of the first support can be welded to the second coating; when the material of the first structure is a cermet composite material, Any one of ceramics or glass, when the material of the second structural member is metal, the connecting structure includes a second coating and a first support member, and the second coating is arranged on the side of the first structural member facing the second structural member, One end of the first support is connected to the second coating, and the other end of the first support is connected to the side of the second structure facing the first structure; when the material of the first structure and the second structure is metal When any one of ceramic composite materials, ceramics or glass is used, the connection structure may include a first support member and two second coatings, and one second coating is provided on the side of the second structural member facing the first structural member, and Another second coating layer corresponding to the second coating layer is provided on the first structural member, and the two second coating layers can be connected by a first supporting piece or a connecting piece.

In the above-mentioned embodiment, the first structural member may be a base, the second structural member may be a housing, one end of the connecting structure is arranged on the mounting surface of the base, and the other end of the connecting structure is connected to the housing, so that the housing and An accommodating space is formed between the installation surfaces; the film layer is in sealing connection with the peripheral side of the base and the side wall of the housing away from the accommodating space. And when the base is a metal material, the optical device can also include a second support and an optical substrate, one end of the second support is arranged on the mounting surface of the base, and the other end of the second support is connected to the optical substrate, wherein the optical The substrate is used for installing optical path components. This kind of arrangement can prevent the deformation of the base of the metal material under plateau pressure, resulting in changes in the optical path elements arranged on the base, and a second support member and an optical substrate for installing the optical path elements can also be arranged in the accommodation space, wherein , there may be multiple second support members, one end of the second support member is connected to the installation surface, and the other end of the second support member is connected to the optical substrate.

It should be noted that when the material of the substrate is any one of metal-ceramic composite materials, ceramics or glass, the amount of deformation of this kind of substrate is small under plateau pressure, so the optical path components can be arranged on the rigid substrate on the mounting surface. That is, the second supporting member and the optical substrate may not be provided in the optical device, so as to reduce the cost of the optical device. Wherein, the second supporting member may be rubber material.

In a possible embodiment, in order to prevent the housing from being deformed by external stress and transmitting the stress to the base, causing the optical path components to be affected, a reinforcing member may be provided on the side wall of the housing away from the accommodation space.

Wherein, the reinforcing member may be a screw.

另外，上述实施例中的光学器件的连接方式也可以应用于其他的封装结构中。 In the above-mentioned embodiment, no matter which material is selected for the first structural member and the second structural member, it is required to meet the requirement that the modulus of elasticity is greater than or equal to 130GPa, and the coefficient of thermal expansion is less than or equal to

In addition, the connection manners of the optical devices in the above embodiments can also be applied to other packaging structures.

In the second aspect, the present application also provides an optical module, the optical module may include the optical device in any technical solution of the first aspect, wherein the optical device can transmit and receive optical signals; the optical module may also include a circuit board, The optical device may be arranged on the circuit board, and since the optical device is the optical device in the first aspect, the cost of the optical module is relatively low.

It should be noted that the optical module may specifically be a wavelength selective switch, and when the optical module is a wavelength selective switch, it may further include a casing, and the circuit board and the optical device may be stacked in the casing.

In a third aspect, the present application also provides an optical switching system, which includes at least two optical devices in the first aspect; at least two optical devices can be connected by optical fibers; because the cost of the optical devices is relatively Low, therefore, the cost of the optical switching system with this optical device is also relatively low.

It should be noted that the optical switching system can specifically be a wavelength division optical switching system or a data center optical switching system; when the optical switching system is a wavelength division switching system, it can also include a multiplexer corresponding to the optical device, and the multiplexer The signal is integrated and sent to optics, which can receive and transmit the light signal. More specifically, there may be two or three optical devices in the wavelength division optical switching system, and at this time, there are at least two or three multiplexers in the wavelength division optical switching system.

Description of drawings

FIG. 1 is a schematic diagram of a partial structure of an optical device provided in an embodiment of the present application;

Fig. 2 is another partial structural schematic diagram of the optical device provided by the embodiment of the present application;

Fig. 3 is another partial structural schematic diagram of the optical device provided by the embodiment of the present application;

Fig. 4 is another partial structural schematic diagram of the optical device provided by the embodiment of the present application;

FIG. 5 is a schematic structural diagram of an optical device provided in an embodiment of the present application;

FIG. 6 is another schematic structural view of the optical device provided by the embodiment of the present application;

Fig. 7 is another schematic structural diagram of the optical device provided by the embodiment of the present application;

Fig. 8 is another schematic structural diagram of the optical device provided by the embodiment of the present application;

FIG. 9 is a schematic structural diagram of an optical module provided in an embodiment of the present application;

FIG. 10 is a schematic structural diagram of an optical switching system provided by an embodiment of the present application.

Reference signs:

1, 1a, 1b, 1c-optical device; 2-circuit board; 3-wave combiner; 4a, 4b, 4c-wave splitter; 10-first structure; 10a-first side; 11-base; 20 -Second structure; 20a-Second side; 21-Shell; 22-Reinforcing member; 30-Film layer; 31a-First coating; 31b-First coating; 40-Connection structure; 41-First support 42a-the second coating layer; 42b-the second coating layer; 50-accommodating space; 60-optical path components; 70-second supporting member; 80-optical substrate.

Detailed ways

In order to make the purpose, technical solution and advantages of the application clearer, the application will be further described in detail below in conjunction with the accompanying drawings.

In the traditional packaging structure, the box body and the box cover are usually made of the same metal, and are welded at low temperature by parallel sealing welding, laser welding or placing a third metal between the box body and the box cover; if the box body and the box cover are selected Aluminum is generally laser welded, and the equipment cost is high. In the plateau and low pressure environment, the aluminum material is easily deformed and the height of the packaging structure exceeds the standard; The cost of equipment for parallel sealing welding and laser welding of Kovar materials is also relatively high.

For this reason, the embodiment of the present application provides an optical device, which can reduce the cost of the optical device while ensuring the airtightness of the optical device.

In order to make the purpose, technical solution and advantages of the application clearer, the optical device provided by the application will be further described in detail below in conjunction with the drawings and specific embodiments.

The terms used in the following examples are for the purpose of describing particular examples only, and are not intended to limit the application. As used in the specification and appended claims of this application, the singular expressions "a", "an", "said", "above", "the" and "this" are intended to also Expressions such as "one or more" are included unless the context clearly dictates otherwise.

Reference to "one embodiment" or "some embodiments" or the like in this specification means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the present application. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in other embodiments," etc. in various places in this specification are not necessarily All refer to the same embodiment, but mean "one or more but not all embodiments" unless specifically stated otherwise. The terms "including", "comprising", "having" and variations thereof mean "including but not limited to", unless specifically stated otherwise.

Fig. 1 is a schematic structural diagram of an optical device provided in the embodiment of the present application. Referring to Fig. 1, in the embodiment of the optical device provided in the present application, the optical device may include a first structural member 10, a second structural member 20, a connection structure 40 and film layer 30; the connecting structure 40 is arranged between the first structural member 10 and the second structural member 20, the first structural member 10 and the second structural member 20 can be connected through the connecting structure 40, and when connecting, The connecting structure 40 may not provide a sealing function. After the first structural member 10 and the second structural member 20 are connected, the film layer 30 covers the position where the first structural member 10 and the second structural member 20 are connected, and the film layer 30 can The first structural member 10 and the second structural member 20 are connected to seal the joint of the first structural member 10 and the second structural member 20 . In this arrangement, since the thin film layer 30 can produce micro-deformation and form stress relief, a buffer zone can be formed between the first structural member 10 and the second structural member 20, ensuring that the first structural member 10 and the second structural member Under the premise of the sealed connection of the first structural member 10 and the second structural member 20, the matching requirements for the coefficient of expansion of the first structural member 10 and the second structural member 20 are relatively low, so the material requirements for the first structural member 10 and the second structural member 20 can be reduced, and further Reduce the cost of optics.

In the above-mentioned embodiments, the materials of the first structural member 10 and the second structural member 20 may be the same or different. Specifically, the material of the first structural member 10 may be a metal material, a metal-ceramic composite material, ceramics or glass. Any one of the materials of the second structural member 20 can also be any one of metal materials, metal-ceramic composite materials, ceramics or glass, and the thin film layer can be a metal thin film layer or a polymer material layer, wherein when the thin film layer When it is a metal thin film layer, the thickness of the metal thin film layer can be 0.1-1 mm, and the material of the metal thin film layer can be, but not limited to, copper foil. In the following embodiments, the thin film layer is used as an example for illustration. of.

Continuing to refer to FIG. 1, in a specific embodiment, both the first structural member 10 and the second structural member 20 can be metal materials, and the connection structure 40 can only include the first support member 41, and the first support member 41 is connected to the second support member respectively. One end of a structural member 10 facing the second structural member 20, and one end of the second structural member 20 facing the first structural member 10 are welded, and the film layer 30 can be respectively connected to the first side 10a of the first structural member 10 and the second structural member The second side 20 a of the structure 20 is welded so as to securely connect the first structure member 10 and the second structure member 20 , and also to seal the first structure member 10 and the second structure member 20 .

Referring to Fig. 2, in another specific embodiment, the first structural member 10 can be a metallic material, the second structural member 20 can be any one of metal-ceramic composite material, ceramics or glass, and the connection structure 40 can include the first A support 41 and a second coating 42a, the second coating 42a is arranged on the side of the second structure 20 facing the first structure 10, the two ends of the first support are respectively connected to the second coating 42a and the first structure 10 Connect to connect the first structural member 10 and the second structural member 20; the optical device can also include a first coating 31a, the first coating 31a can be arranged on the second side 20a of the second structural member 20, and the first coating 31a Set around the second side 20a of the second structure 20 to ensure the sealing between the first coating 31a and the second structure 20, the film layer 30 can be respectively connected to the first side 10a of the first structure 10 and the second A plating layer 31a is welded, thereby completing the sealing of the first structural member 10 and the second structural member 20 .

Referring to Fig. 3, in another specific embodiment, the first structural member 10 can be any one of metal-ceramic composite material, ceramics or glass, the second structural member 20 can be a metal material, and the optical device can also include the first A coating layer 31b, the first coating layer 31b can be arranged on the first side 10a of the first structural member 10, and the first coating layer 31b is arranged around the first side 10a of the first structural member 10, the thin film layer 30 can be respectively combined with the first coating layer 31b and the second side 20a of the second structural member 20 are welded to ensure the sealing of the first structural member 10 and the second structural member 20 . In addition, the connection structure 40 may include a first support member 41 and a second plating layer 42b, wherein the second plating layer 42b is disposed on the side of the first structural member 10 facing the second structural member 20, and one end of the first support member 41 is disposed on On the second plating layer 42 b , the other end of the first support member 41 is connected to the second structural member 20 to ensure a stable connection between the first structural member 10 and the second structural member 20 .

Referring to Fig. 4, in another specific embodiment, the first structural member 10 can be any one of metal-ceramic composite material, ceramics or glass, and the second structural member 20 can also be made of metal-ceramic composite material, ceramic or glass. Any one of the optical devices can also include two first coating layers, the two first coating layers are respectively the first coating layer 31a and the first coating layer 31b, and the first coating layer 31a and the first coating layer 31b can be respectively arranged on the second structural member The second side 20a of the second structure 20 and the first side 10a of the first structure 10, and the first coating 31a and the first coating 31b can surround the second side 20a of the second structure 20 and the first side of the first structure 10 respectively. One side 10a, to ensure the sealing connection between the first coating layer 31a and the second structural member 20, and between the first coating layer 31b and the first structural member 10, the thin film layer 30 is sealed with the first coating layer 31a and the first coating layer 31b respectively connection, so as to ensure the sealing of the first structural member 10 and the second structural member 20. In addition, the connection structure 40 may include a first support member 41 and two second plating layers, the two second plating layers are respectively a second plating layer 42a and a second plating layer 42b, wherein the second plating layer 42a is arranged on the direction of the second structural member 20 On the first side of the first structural member 10, the second coating layer 42b is arranged on the side of the first structural member 10 facing the second structural member 20, and one end of the first support member 41 is arranged on the second coating layer 42b, and the first support member The other end of 41 is connected to the second plating layer 42a to ensure a stable connection between the first structural member 10 and the second structural member 20 .

且第一结构件10和第二结构件20形成的密封结构在受外界因素影响下，形变较小。另外，上述的技术方案还可以应用于中大型气密产品场景(长、宽、高均大于100mm)，以低成本实现更高的可靠性和气密的功能。例如可以应用在半导体高真空大型设备光刻机等场景，以克服现有技术中多种材料、温差以及复杂气体混合的限制。 It should be noted that the elastic modulus of the first structural member 10 and the second structural member 20 may be greater than or equal to 130GPa, and the coefficient of thermal expansion shall be less than or equal to

Moreover, the sealing structure formed by the first structural member 10 and the second structural member 20 is less deformed under the influence of external factors. In addition, the above technical solution can also be applied to medium and large airtight product scenarios (the length, width, and height are all greater than 100mm), so as to achieve higher reliability and airtight functions at low cost. For example, it can be applied to scenarios such as semiconductor high-vacuum large-scale equipment lithography machines to overcome the limitations of multiple materials, temperature differences, and complex gas mixing in the prior art.

In the above-mentioned embodiments, the first structural member 10 and the second structural member 20 can be electrical signal interfaces, optical signal interfaces, housings, and substrates, etc., and the first structural member 10 and the second structural member 20 can also be other structures , not listed here.

The following takes the first structural component 10 as the base 11 and the second structural component 20 as the casing 21 as an example for detailed description.

When the first structural member 10 is the base 11 and the second structural member 20 is the housing 21, the optical device may include the base 11, the housing 21, the film layer 30 and the connection structure 40, the base 11 has a mounting surface, and the mounting surface can be installed Optical path element 60. The casing 21 may include a cover body and a side wall connected to one side of the cover body, and the side wall may be disposed around a peripheral side of the cover body. One end of the connection structure 40 may be disposed on the installation surface, and the other end of the connection structure 40 is connected to the side wall of the housing 21 , so that an accommodation space 50 is formed between the housing 21 and the base 11 . One end of the film layer 30 is connected to the peripheral side of the base 11, and the other end is sealed to the side wall of the housing 21 away from the accommodating space 50, so as to seal the joint between the base 11 and the housing 21, so that the housing 21 and the base The accommodation space 50 formed between 11 is a sealed space. Specifically, when forming the above-mentioned sealing structure, the housing 21 and the base 11 can be connected through the connection structure 40 first, and the housing 21 and the base 11 can not be sealed during the connection, so that the housing 21 and the base 11 can be sealed. The requirements for the material of the base 11 are low, which is beneficial to reduce the cost. After the connection between the housing 21 and the base 11 is completed, a thin film layer 30 is arranged at the junction of the housing 21 and the base 11, and the accommodation space 50 formed between the housing 21 and the base 11 is sealed by the thin film layer 30, because the thin film The layer 30 can produce micro-deformation, form stress relief, and form a buffer zone between the substrate 11 and the housing 21, which can not only reduce the cost of the optical device, but also reduce the matching requirements of the expansion coefficients of the substrate 11 and the housing 21, and can also The airtightness of the optical device is ensured, so that the optical path element 60 arranged in the accommodation space 50 can work in a relatively stable environment sealed with water vapor and gas.

Continuing to refer to FIG. 5, when the base 11 is made of a metal material and the casing 21 is also made of a metal material, the connecting structure 40 may include a first support 41, and the first support 41 may be welded to the base 11 and the casing 21 respectively. way to connect. Alternatively, the base 11 and the housing 21 may also be connected by a connecting piece (not shown in the figure), that is, by a mechanical connection. In addition, the film layer 30 can surround the peripheral side of the base 11 and the side wall of the housing 21 away from the accommodating space 50, and the film layer 30 can pass between the peripheral side of the base 11 and the side wall of the housing 21. The connection is sealed by welding.

It should be noted that since the substrate 11 is made of metal material, there is a risk of deformation under plateau pressure. In order to prevent the optical path element 60 from being affected by the deformation of the metal substrate 11, it is ensured that the optical path element 60 set in the accommodation space 50 can work stably. , a second support 70 and an optical substrate 80 may be provided in the accommodation space 50, one end of the second support 70 is fixedly arranged on the mounting surface, the other end of the second support 70 is used to support the optical substrate 80, and the optical path element 60 is arranged on the side of the optical substrate 80 away from the second support member 70. When the substrate 11 is deformed, due to the setting of the second support member 70 and the optical substrate 80, the position of the optical path element 60 can be prevented from changing, thereby improving the operation of the optical path element 60. stability. In addition, a reinforcing member 22 may be provided on the side wall of the housing 21. The setting of the reinforcing member 22 can reduce the stress transmitted to the base 11 after the housing 21 is deformed by external stress, thereby reducing the impact on the optical path element 60. .

FIG. 6 is a schematic structural diagram of an optical device provided by an embodiment of the present application. In the embodiment shown in FIG. 6 , the base 11 can be made of metal material, and the shell 21 can be made of any one of metal-ceramic composite material, ceramic or glass. Referring to FIG. 6 , the base 11 and the housing 21 can be connected through a connection structure 40 , or can also be connected by a mechanical connection (not shown in the figure). When the base 11 and the housing 21 are connected through the connection structure 40, the connection structure 40 may include a second plating layer 42a and a first support member 41, the second plating layer 42a may be disposed on one end of the side wall of the housing 21 facing the base 11, the second A supporting member 41 can be fixed between the second plating layer 42 a and the mounting surface of the base 11 . The first supporting member 41 is a rigid member to ensure that the base 11 is connected with the housing 21 to form an optical device with a small volume change. In addition, the gold optical device may also include a first coating layer 31a, the first coating layer 31a is disposed on the side of the side wall of the housing 21 away from the accommodating space 50, and the first coating layer 31a is disposed around the side wall of the housing 21; When the connection between the base 11 and the housing 21 is sealed, one end of the film layer 30 is welded to the first coating 31a, and the other end is welded to the peripheral side of the base 11, so that the housing 21 formed between the base 11 Space sealed.

It should be noted that the sealing connection between the thin film layer 30 and the first coating layer 31a can be carried out by melting, or it can be sealed and connected by melting a low-temperature metal such as solder to form an intermetallic compound. The thin film layer 30 and the first coating layer 31a It is also possible to seal the connection in other ways, which are not listed here.

Since the base 11 is made of metal material, there is a risk of deformation under plateau air pressure. In order to avoid the optical path element 60 being affected by the deformation of the metal base 11 and to ensure that the optical path element 60 set in the accommodation space 50 can work stably, under plateau air pressure , the metal base 11 is deformed, the optical path element 60 will not be affected, and a second support 70 and an optical substrate 80 can be arranged in the accommodation space 50, wherein the second support 70 can be made of a rigid material, and the second support 70 One end of the second support member 70 is fixedly arranged on the installation surface, and the other end of the second support member 70 is used to support the optical substrate 80. The optical path element 60 is arranged on the side of the optical substrate 80 away from the second support member 70. When the base 11 is deformed, due to the first The arrangement of the two support members 70 and the optical substrate 80 can prevent the position of the optical path element 60 from changing, thereby improving the stability of the optical path element 60 . In addition, a reinforcing member 22 is provided on the side wall of the housing 21 . The setting of the reinforcing member 22 can reduce the stress transmitted to the base 11 after the housing 21 is deformed by external stress, thereby reducing the impact on the optical path element 60 .

FIG. 7 is a schematic structural diagram of an optical device provided by an embodiment of the present application. In the embodiment shown in FIG. 7 , the substrate 11 can be made of any one of metal-ceramic composite material, ceramic or glass, and the shell 21 can be made of metal material. Referring to FIG. 7 , the base 11 and the housing 21 are connected through a connection structure 40 , or may also be connected by a mechanical connection. When the base 11 and the housing 21 are connected through the connection structure 40, the connection structure 40 may include a second coating 42b and a first support 41, the second coating 42b may be arranged on the mounting surface of the base 11, and the first support 41 may be One end of the side wall of the second coating 42b and the housing 21 facing the base 11 is arranged, and one end of the first support 41 can be connected to the second coating 42b, and the other end of the first support 41 can be connected to the side of the housing 21. One end of the wall facing the base 11 is connected so that the base 11 is fixedly connected with the housing 21 . In a specific implementation, the first supporting member 41 may be a rigid member to ensure that the base 11 is connected to the housing 21 to form an optical device with a small volume change. In addition, the optical device may include a first coating layer 31b, the first coating layer 31b is disposed on the peripheral side of the base, and the first coating layer 31b may be disposed around the peripheral side of the base 11; At this time, one end of the thin film layer 30 is welded to the first coating layer 31b, and the other end is welded to the side wall of the housing 21 away from the accommodating space, so as to seal the accommodating space formed between the housing 21 and the base 11.

It should be noted that the sealing connection between the thin film layer 30 and the first coating layer 31b can be carried out by melting, or the melting of low-temperature metals such as solder can be used to form an intermetallic compound for sealing connection. The thin film layer 30 and the first coating layer 31b It is also possible to seal the connection in other ways, which are not listed here.

When the material of the base 11 is any one of metal-ceramic composite material, ceramics or glass, the base 11 will not be deformed under plateau pressure, therefore, the optical path element 60 can be directly arranged on the mounting surface on the rigid substrate 10, An optical substrate may not be provided in the sealing structure formed in this way, so that the cost can be reduced.

FIG. 8 is a schematic structural diagram of an optical device provided by an embodiment of the present application. In the embodiment shown in FIG. 8 , the substrate 11 can be made of any one of metal-ceramic composite material, ceramic or glass, and the shell 21 can also be made of any one of metal-ceramic composite material, ceramic or glass. Referring to FIG. 8 , the base 11 and the housing 21 can be connected by using a connection structure 40 , or can also be connected by a mechanical connection. When the base 11 and the housing 21 are connected through the connection structure 40, the connection structure 40 may include a first support member 41 and two second coating layers, the two second coating layers are respectively a second coating layer 42a and a second coating layer 42b, and the second coating layer The coating 42b may be disposed on the mounting surface of the base 11, the second coating 42a may be disposed on one end of the side wall of the housing 21 facing the base 11, the first support 41 is disposed between the second coating 42a and the second coating 42b, and One end of the first supporting member 41 is connected to the second plating layer 42b, and the other end of the first supporting member 41 is connected to the second plating layer 42a, so that the base 11 is fixedly connected to the housing 21 . Wherein, the first supporting member 41 may be a rigid member, so as to ensure that the base 11 is connected with the housing 21 to form an optical device with a small volume change.

Wherein, there can be at least three first support members 41, and at least three second coating layers 42a can also be provided, and at least three second coating layers 42a are provided in one-to-one correspondence with at least three first support members 41. The support member 41 can also be a whole, and the second plating layer 42 a can cover the side of the housing 21 facing the base 11 .

In addition, the optical device may include two first coating layers, the two first coating layers are respectively a first coating layer 31a and a first coating layer 31b, and the first coating layer 31a may be disposed on the side wall of the housing 21 away from the accommodating space 50, And the first coating layer 31a can be arranged around the side wall of the housing 21; the first coating layer 31b can be arranged on the peripheral side of the base 11, and the first coating layer 31b can be arranged around the peripheral side of the base 11; When the connection between the shells 21 is sealed, the two ends of the film layer 30 can be welded to the first coating layer 31 a and the first coating layer 31 b respectively, so as to seal the accommodation space formed between the housing 21 and the base 11 .

It should be noted that the sealing connection between the thin film layer 30 and the first coating layer 31a and the first coating layer 31b can be carried out by melting, or it can be sealed and connected by melting a low-temperature metal such as solder to form an intermetallic compound. The thin film layer 30 The sealing connection with the first coating layer 31a and the first coating layer 31b can also be done in other ways, which are not listed here.

When the material of the substrate 11 is any one of metal-ceramic composite materials, ceramics or glass, the deformation of the substrate under plateau pressure is small, so the optical path element 60 can be directly arranged on the mounting surface on the rigid substrate 10 , the sealing structure formed in this way may not be provided with an optical substrate, thereby reducing the cost.

Referring to Figure 9, the present application also provides an optical module, the optical module includes the optical device in any of the above technical solutions, and also includes a circuit board 2, the optical device 1 can be arranged on the circuit board 2, the optical device 1 can emit and Receive light signal. Since the optical device 1 is the optical device in the first aspect, the cost of the optical module is relatively low.

It should be noted that the optical module may specifically be, but not limited to, a wavelength selective switch, and when the optical module is a wavelength selective switch, it may also include a casing, and the circuit board 2 and the optical device 1 may be stacked in the casing.

Referring to Figure 10, the present application also provides an optical switching system, the optical switching system may include at least two optical devices in any of the above-mentioned technical solutions, at least two optical devices may be connected by optical fibers, because the cost of optical devices The cost of the optical switching system with the optical device is also relatively low.

Wherein, the optical device can be plugged on the circuit board, or arranged on the circuit board, or the optical device is independently installed, and when the optical device is independently installed, the optical device can perform optical communication with the outside through the optical fiber. In addition, the optical switching system may specifically be, but not limited to, a wavelength division optical switching system or a data center optical switching system; when the optical switching system is a wavelength division switching system and includes multiple optical devices, it may include A plurality of wave splitters and a plurality of wave combiners 3, with three examples: wherein, the wave splitter 4a corresponding to the optical device 1a can divide the optical signal into two optical signals, and the two optical signals can be separated by the optical device 1b and the optical device 1c receive, similarly, the wave splitter 4b corresponding to the optical device 1b can divide the optical signal into two optical signals, and the two optical signals can be received by the optical device 1a and the optical device 1c respectively; The demultiplexer 4c corresponding to 1c can also divide the optical signal into two optical signals, and the two optical signals can be respectively received by the optical device 1a and the optical device 1b, thereby completing optical switching.

It should be noted that the above-mentioned optical signal may be transmitted through optical fiber.

The above is only the specific implementation of the application, but the scope of protection of the application is not limited thereto. Anyone familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the application, and should cover Within the protection scope of this application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims (13)

An optical device, characterized by comprising: a first structural member, a second structural member, a film layer and a connection structure; The connecting structure is arranged between the first structural member and the second structural member, and one end of the connecting structure is connected to the first structural member, and the other end of the connecting structure is connected to the second structural member. Structural connection; The thin film layer covers the connection position between the first structure component and the second structure component, and the film layer seals the connection position between the first structure component and the second structure component. The optical device according to claim 1, wherein the material of the first structural member is a metal material, the material of the second structural member is a metal material, and the thin film layer is in contact with the first structural member and the first structural member. The second structural member is sealed and connected. The optical device according to claim 1, wherein the material of one of the first structural member and the second structural member is a metal material, and the other of the first structural member and the second structural member is Any one of metal-ceramic composite materials, ceramics or glass; The optical device also includes a first coating layer, the first coating layer is arranged on the surface of the first structural member or the second structural member when it is any one of metal-ceramic composite material, ceramics or glass, and the The thin film layer is in sealing connection with the first plating layer and the second structural component or the first structural component. The optical device according to claim 3, wherein the connection structure includes a second coating and a first support member, and when the first structural member is any one of metal-ceramic composite materials, ceramics or glass, The second coating is arranged on the side of the first structural member facing the second structural member, one end of the first support is connected to the second coating, and the other end of the first support is connected to the second coating. The second structural member is connected towards one side of the first structural member; Or, the connection structure includes a second coating and a first support member, and when the second structural member is any one of metal-ceramic composite material, ceramics or glass, the second coating is arranged on the second structure One side of the first support member facing the first structural member, one end of the first support member is connected to the side of the first structural member facing the second structural member, the other end of the first support member is connected to the second structural member The second plating connection is described. The optical device according to claim 1, wherein the material of the first structural member is any one of metal-ceramic composite material, ceramic or glass, and the second structural member is metal-ceramic composite material, ceramic or any kind of glass; The optical device also includes two first coating layers, the two first coating layers are respectively arranged on the surface of the first structural member and the surface of the second structural member, and the thin film layer and the two first coating layers A plated hermetic connection. The optical device according to claim 5, wherein the connecting structure comprises a first supporting member and two second coating layers, wherein one of the second coating layers is disposed on the second structural member facing the first On one side of the structural member, another second plating layer is disposed on the side of the first structural member facing the second structural member, and the two second plating layers are connected through the first support member. The optical device according to any one of claims 2 to 4, wherein the first structural member is a base, the second structural member is a casing, and the optical device further includes a second support member, an optical Substrate and optical path components; The base has an installation surface, one end of the second support is connected to the installation surface, the other end of the second support is connected to the optical substrate, and the optical path element is arranged on the optical substrate away from the optical substrate. One side of the second support. The optical device according to any one of claims 3-6, wherein the first structural member is a base, the second structural member is a casing, and the optical device further includes an optical path element; The base has an installation surface, and the optical path element is arranged on the installation surface. The optical device according to claim 7 or 8, wherein one end of the connection structure is arranged on the installation surface, and the other end of the connection structure is connected to the housing, so that the housing and An accommodation space is formed between the installation surfaces; The film layer is in sealing connection with the peripheral side of the base and the side wall of the casing away from the containing space. The optical device according to any one of claims 7-9, characterized in that the optical device further comprises a plurality of reinforcements, and the plurality of reinforcements are arranged on the side wall of the housing away from the accommodating space side. The optical device according to any one of claims 1-10, characterized in that, the elastic modulus of the material of the first structural member and the second structural member is greater than or equal to 130GPa, and the first structural member and the second structural member The coefficient of thermal expansion of the material of the second structural member is less than or equal to

An optical module, characterized in that it includes the optical device according to any one of claims 1 to 11, and further includes a circuit board, the optical device is placed on the circuit board, and the optical device is used for receiving and receiving emit a light signal. An optical switching system, characterized in that it comprises at least two optical devices according to any one of claims 1-11, and the at least two optical devices are connected by optical fibers.

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