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WO2023119612A1 - Rare earth magnet powder and production method therefor - Google Patents

Rare earth magnet powder and production method therefor Download PDF

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Publication number
WO2023119612A1
WO2023119612A1 PCT/JP2021/048083 JP2021048083W WO2023119612A1 WO 2023119612 A1 WO2023119612 A1 WO 2023119612A1 JP 2021048083 W JP2021048083 W JP 2021048083W WO 2023119612 A1 WO2023119612 A1 WO 2023119612A1
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Prior art keywords
magnet
rare earth
particles
powder
magnet powder
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PCT/JP2021/048083
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French (fr)
Japanese (ja)
Inventor
和晃 榛葉
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Aichi Steel Corp
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Aichi Steel Corp
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Priority to PCT/JP2021/048083 priority Critical patent/WO2023119612A1/en
Priority to CN202280082911.6A priority patent/CN118355461A/en
Priority to PCT/JP2022/041306 priority patent/WO2023119908A1/en
Priority to JP2023569140A priority patent/JPWO2023119908A1/ja
Publication of WO2023119612A1 publication Critical patent/WO2023119612A1/en
Anticipated expiration legal-status Critical
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/06Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys in the form of particles, e.g. powder

Definitions

  • the present invention relates to a method for producing rare earth magnet powder and the like.
  • Rare earth magnets include sintered magnets obtained by sintering rare earth magnet particles and bonded magnets obtained by binding rare earth magnet particles with a binder resin.
  • Bonded magnets are made by injecting a mixture of magnet particles and binder resin (mainly thermoplastic resin) into a cavity and molding them. There is a compression bond magnet molded by compression and solidification (including hardening) with.
  • binder resin mainly thermoplastic resin
  • Bonded magnets have better formability than sintered magnets and have a greater degree of freedom in shape, so their applications are expanding. Along with this, there is a strong demand for bond magnets to have high reliability (also called durability, corrosion resistance, etc.) so that magnetic properties can be stably exhibited. Descriptions related to this can be found, for example, in the following patent documents.
  • Patent Documents 1 to 4 propose to subject magnetic powder to phosphoric acid treatment for the purpose of improving rust prevention and weather resistance in order to suppress the deterioration of magnetic properties.
  • the coating treatment is promoted by heat drying (baking drying).
  • the heating temperature is limited to 200° C. or less at most in order to suppress deterioration of magnetic properties (see, for example, Patent Document 3 [0065]).
  • Patent Documents 1 and 2 only describe examples in which SmFeN magnet alloy powder containing a large amount of fine particles, which is generally obtained by nitriding, is treated with phosphoric acid.
  • the present invention has been made in view of such circumstances, and aims to provide a new method for producing rare earth magnet powder.
  • the present invention comprises a treatment step of bringing magnet particles containing Nd, Fe and B into contact with a treatment solution containing phosphate ions, and a sintering step of heating the magnet particles after the treatment step at a sintering temperature of 250 to 350°C. and a method for producing a rare earth magnet powder comprising magnet particles having a coating containing P, O and Fe.
  • rare earth magnet powder whose magnetic properties (eg, coercive force) are less likely to deteriorate even when exposed to a corrosive environment in which water, oil, etc. are present can be obtained.
  • magnetic properties eg, coercive force
  • a highly corrosion-resistant coating that is difficult to oxidize is formed near the surface of the magnet particles, which greatly affects the deterioration of the magnetic properties.
  • the present invention can also be understood as a rare earth magnet powder.
  • the present invention is a rare earth magnet powder consisting of magnet particles having a coating, the magnet particles comprising Nd, Fe and B, the coating comprising P, O and Fe contained in the coating
  • the rare earth magnet powder may have a content ratio (Nd/Fe), which is the atomic ratio of Nd to Fe, of 0.5 or less in the outermost surface region from the outermost surface to a depth of 10 nm.
  • the film formed on the outermost surface area of the magnet particles for example, has a significantly lower content of base Nd, which is easily oxidized, than conventional phosphate films.
  • a rare earth magnet powder composed of magnet particles coated with such a film is less likely to deteriorate in magnetic properties even in a corrosive environment, and can exhibit high reliability.
  • the present invention provides, for example, a rare earth magnet powder composed of magnet particles having coatings, the magnet particles containing Nd, Fe and B, the coatings containing P, O and Fe, and the coatings
  • the maximum size of voids contained in the rare earth magnet powder may be 50 nm or less.
  • rare earth magnet powder consisting of magnet particles coated with a dense phosphate film without large voids (defects) does not easily deteriorate in magnetic properties even in a corrosive environment and has high reliability. can demonstrate.
  • a film with less Nd present in the outermost surface area and a dense film without conspicuous voids can be produced, for example, by the production method of the present invention described above.
  • the present invention can also be grasped as a bonded magnet using rare earth magnet powder and a manufacturing method thereof.
  • a bonded magnet is composed of magnet particles and a binder resin.
  • Such a bonded magnet can be produced, for example, by an injection molding method in which a cavity (magnet hole, etc.) is filled with a molten mixture of rare earth magnet powder and a thermoplastic resin and solidified; These compositions (compounds) are obtained by a compression molding method or the like in which they are compressed, melted and solidified.
  • the rare earth magnet powder is an anisotropic magnet powder, it is preferable to compact while applying an aligning magnetic field.
  • magnet particles containing Nd, Fe, and B are simply referred to as “magnet particles” as appropriate, regardless of whether they are before or after coating treatment (treatment step or firing step) or with or without a coating.
  • a rare earth magnet powder composed of such magnet particles is also simply referred to as "magnet powder”.
  • magnet particles (magnet powder) before the treatment process are referred to as “raw material particles (raw material powder),” magnet particles (magnet powder) after the treatment process are referred to as “treated particles (treated powder),” and after the firing process.
  • the magnet particles (magnet powder) are referred to as “fired particles (fired powder)”.
  • Coatings containing P, O and Fe are also simply referred to as "phosphate (based) coatings" regardless of their component composition, structure or structure.
  • the phosphate coating may contain elements other than P, O and Fe (for example, Nd, B, etc.).
  • the film according to the present invention only needs to have at least one layer on the surface of the magnet particles, and may be laminated (combined) with other types of films (films).
  • the film according to the present invention should normally have at least one layer on the outermost layer of the raw material particles.
  • Corrosion resistance means the degree of deterioration (decrease rate) of the magnetic properties of the magnet particles, regardless of the deterioration (deterioration, etc.) of the film itself.
  • a “highly corrosion-resistant film” means a film that can suppress the deterioration of the magnetic properties of magnet particles.
  • x to y as used herein includes the lower limit value x and the upper limit value y.
  • a new range such as “a to b” can be established as a new lower or upper limit of any numerical value included in the various numerical values or numerical ranges described herein.
  • x to ykA/m as used herein means xkA/m to ykA/m. The same applies to other unit systems.
  • FIG. 4 is a scatter diagram showing the relationship between demagnetization rate and firing temperature before and after coating treatment. It is a scatter diagram showing the relationship between the demagnetization rate and the firing temperature before and after the corrosion resistance test. 4 is a scatter diagram showing the relationship between the demagnetization rate after the corrosion resistance test and the firing temperature with respect to the initial state (before coating treatment). 4 is a bar graph comparing the demagnetization rate after the corrosion resistance test with respect to the initial state for samples with different coating treatment methods. It is the STEM image which observed the film
  • FIG. 4 is a graph showing elemental distributions obtained by analyzing films with different firing temperatures by AES. It is a graph which shows the content ratio (Nd/Fe) of Nd with respect to Fe calculated
  • FIG. 4 is a schematic diagram for explaining a conjecture relating to the relationship between the morphology of the phosphate coating and the firing temperature. 4 is a bar graph comparing the demagnetization rate after the corrosion resistance test with respect to the initial state for samples with different coating treatment conditions.
  • a component related to a manufacturing method can also be a component related to an object. Which embodiment is the best depends on the target, required performance, and the like.
  • the treatment step is carried out by bringing magnet particles (powder) into contact with a treatment liquid containing phosphate ions.
  • a treatment liquid containing phosphate ions In the treatment process, as long as a film containing P, O and Fe (phosphate film) can be formed on the surface of the magnet particles, the raw material, preparation method, concentration, solvent, etc. of the treatment liquid are not limited.
  • Phosphate ions are not limited to typical orthophosphate ions (PO 4 3- ), but may be phosphite ions (PO 3 3- ), hypophosphite ions (PO 2 3- ), and the like.
  • the phosphate ions contained in the treatment liquid may have different compositions and different valences.
  • the treatment liquid may be, for example, phosphoric acid alone, or phosphoric acid or a phosphorous compound (including phosphate) prepared in a solvent.
  • the solvent may be water or an organic solvent (particularly a volatile solvent).
  • the coating treatment film formation treatment
  • phosphoric acid may be inorganic phosphoric acid such as phosphorous acid, hypophosphorous acid, pyrophosphoric acid, metaphosphoric acid, polyphosphoric acid, organic phosphoric acid, and the like.
  • orthophosphoric acid has high reactivity with iron and tends to form a film on the surface of magnet particles.
  • Phosphates which are a type of phosphorus compound, include zinc phosphate, manganese phosphate, magnesium phosphate, and the like.
  • Organic solvents include, for example, alcohols (isopropyl alcohol (IPA), ethanol, methanol, 2-methoxyethanol, etc.), formamide, N,N-dimethylformamide, and the like.
  • the treatment liquid may further contain a surfactant (for example, a silane coupling agent, etc.).
  • the orthophosphoric acid is, for example, 0.3 to 1.0% by mass, further 0.4 to 0.8% by mass with respect to the entire magnet powder. Good to have.
  • the raw material powder and the treatment liquid are brought into contact with each other by, for example, an immersion method, a spray method, or the like.
  • the two may be brought into contact (mixed) while stirring or the like.
  • at least one of the raw material powder and the treatment liquid may be heated and brought into contact with each other.
  • the heating vaporizes (evaporates) the solvent and promotes the formation of a phosphate film on the magnet particle surface.
  • the heating temperature is, for example, 40-110°C, further 60-90°C.
  • the treatment process is performed, for example, in an anti-oxidation atmosphere (eg, inert gas (N 2 , Ar, etc.) atmosphere).
  • an anti-oxidation atmosphere eg, inert gas (N 2 , Ar, etc.
  • the firing step is performed by heating the magnet particles (treated particles) after the treatment step.
  • the heating temperature (referred to as "firing temperature") is, for example, 250 to 350.degree. C., 270 to 330.degree. C., 275 to 325.degree. If the sintering temperature is too low, it is difficult to form a film with excellent corrosion resistance. If the sintering temperature is too high, the magnetic properties of the magnet particles themselves may deteriorate.
  • the firing process may be performed in an anti-oxidizing atmosphere (eg, vacuum atmosphere, inert gas (N 2 , Ar, etc.) atmosphere, etc.) or in an oxidizing atmosphere (eg, atmospheric atmosphere, semi-atmospheric atmosphere, etc.). If it is carried out in an oxidizing atmosphere, it is possible to reduce the burden on equipment and processes involved in the firing process.
  • an anti-oxidizing atmosphere eg, vacuum atmosphere, inert gas (N 2 , Ar, etc.) atmosphere, etc.
  • an oxidizing atmosphere eg, atmospheric atmosphere, semi-atmospheric atmosphere, etc.
  • the firing process is performed, for example, for 1 to 180 minutes, 3 to 150 minutes, or even 10 to 50 minutes. If the vicinity of the surface of the magnet particles (for example, about 1 ⁇ m in depth) reaches the desired firing temperature, the firing process may be short. By shortening the time of the sintering process of heating to a high temperature, not only the production efficiency can be improved, but also the deterioration of the magnetic properties can be suppressed.
  • the magnet powder after the treatment process may be heated at a temperature lower than the firing temperature described above before the firing process (preheating process).
  • the preheating step is not essential, and its purpose does not matter.
  • the preheating process is performed for the purpose of, for example, drying, baking, preheating before the firing process, and calcination before firing (the firing process).
  • the temperature of the preheating process is, for example, 80-220°C or 100-150°C.
  • the duration of the preheating step is, for example, 0.1 to 4 hours, or 0.5 to 3 hours.
  • the atmosphere of the preheating step may be either an anti-oxidizing atmosphere or an oxidizing atmosphere, as in the firing step.
  • the transition from the preheating step to the firing step may be continuous or intermittent. If the transfer is continuous, residual heat can be used, and if the transfer is intermittent, batch processing becomes possible. When a large amount of magnet powder is processed, the preheating step can further stabilize the formation of the desired phosphate-based film.
  • NdFeB magnet particles containing Nd, Fe, and B as essential components (basic components) are treated with phosphoric acid.
  • the magnet particles may contain elements (heavy rare earth elements such as Dy and Tb, Cu, Al, Co, Nb, etc.) that enhance coercive force and heat resistance.
  • the total amount of the essential elements is usually 80 atomic % or more, preferably 90 atomic % or more, relative to the entire magnet particles.
  • the magnet particles may be anisotropic magnet particles or isotropic magnet particles.
  • a bonded magnet with high magnetic properties can be obtained by molding anisotropic magnet particles (powder) in an oriented magnetic field.
  • Magnet particles are obtained, for example, by hydrogen-treating a magnet alloy.
  • Hydrogenation usually includes a disproportionation reaction due to hydrogen absorption (Hydrogenation-Disproportionation/simply referred to as "HD reaction”) and a recombination reaction due to dehydrogenation (Desorption-Recombination/simply referred to as "DR reaction”).
  • HD reaction disproportionation reaction due to hydrogen absorption
  • DR reaction dehydrogenation
  • the HD reaction and the DR reaction are collectively referred to simply as the “HDDR reaction”
  • the hydrogen treatment resulting in the HDDR reaction is simply referred to as "HDDR”.
  • the HDDR also includes an improved d-HDDR (dynamic-Hydrogenation-Disproportionation-Desorption-Recombination).
  • the d-HDDR is described in detail in, for example, International Publication (WO2004/064085). Furthermore, the magnet alloy before HDDR may be subjected to hydrogen cracking treatment in which it is exposed to a high temperature (425 to 550° C.) hydrogen atmosphere (see International Publication (WO2020/017529)).
  • the NdFeB magnet alloy usually contains more Nd than the theoretical composition (Nd: 11.8 at%, B: 5.9 at%, Fe: balance) constituting the main phase (Nd 2 Fe 14 B). It consists of an Nd-rich composition. Some of the Nd richer than the theoretical composition also appears on the surface of the magnet particles obtained by pulverizing the magnet alloy, forms an oxide (referred to as "Nd-rich oxide"), and is a factor in the deterioration of magnetic properties. Become. Such a tendency is more pronounced when the magnet alloy consists of an ingot (or its pulverized powder) than when it consists of a rapidly solidified amorphous ribbon (or its pulverized powder). According to the present invention, the corrosion resistance of magnet particles can be improved not only in the former case but also in the latter case. This point is particularly significant.
  • the magnet particles may be subjected to one or more types of antirust treatment in addition to the phosphoric acid treatment described above.
  • antirust treatment include metal alkoxy oligomer treatment for forming an organometallic compound layer, coupling treatment for forming a coupling agent layer, and the like.
  • a phosphate film directly formed on the surface of the magnet particles usually serves as a base layer for antirust treatment.
  • the size of the magnet particles does not matter.
  • NdFeB magnet particles obtained by HDDR have, for example, an average particle size of 40 to 250 ⁇ m.
  • the average particle size referred to in this specification is a volume median diameter (VMD) determined by measurement with a laser diffraction particle size distribution analyzer (HELOS manufactured by Japan Laser Co., Ltd.).
  • the magnet particles may include fine particles with a small average particle size as well as coarse particles with a relatively large average particle size.
  • the average particle size of the fine particles is, for example, 1 to 10 ⁇ m, further 2 to 6 ⁇ m.
  • Composite magnet powder obtained by mixing the magnet powder of the present invention with another magnet powder having different composition, anisotropy, isotropy, average particle size, etc., may be used for manufacturing bonded magnets according to the required specifications. good too.
  • the film contains at least P, O and Fe, and may have various specific compositions, textures, and structures.
  • the content ratio (Nd/Fe), which is the atomic ratio of Nd to Fe contained in the coating is preferably 0.5 or less, 0.4 or less, or 0.3 or less in the outermost region. . It should be noted that Nd/Fe can be 0.1 or more, or even 0.2 or more.
  • the outermost surface area referred to in this specification is, for example, the range from the outermost surface of the film to a depth of 10 nm.
  • the content ratio (Nd/Fe) can be obtained from the atomic ratio of Nd and Fe obtained by analyzing the vicinity of the outermost surface of the film by Auger Electron Spectroscopy (AES), for example. Specifically, the arithmetic mean value of the atomic ratio (Nd/Fe) at a depth of 0 nm (outermost surface), a depth of 5 nm, and a depth of 10 nm is compared with a predetermined value (threshold) as the content ratio (Nd/Fe). do it.
  • the measurement position is not necessarily the above-mentioned depth It doesn't have to be.
  • the coating preferably has a dense structure with few defects near the surface where corrosion resistance is greatly affected.
  • the maximum size of voids contained in the film is preferably 50 nm or less, 40 nm or less, or even 30 nm or less. In terms of the average size of voids, for example, it is preferably 30 nm or less, 20 nm or less, or even 15 nm.
  • the size of the void is the maximum length of the line segment that has both endpoints on the outline of the extracted void on the observation image of the film cross section.
  • the measurement of the maximum length may be performed visually and manually by setting a scale bar on the observation image, or may be performed using image processing software.
  • the maximum size of a void is the maximum of its maximum length.
  • the average size of voids is the arithmetic mean of their maximum lengths ( ⁇ (maximum length)/number).
  • the observed image of the cross section of the film is obtained by observing the vicinity of the surface of particles randomly extracted from the coated magnet powder with a transmission electron microscope (TEM) or scanning transmission electron microscope (STEM). Extraction of voids and measurement of their sizes may be performed, for example, on the basis of a cross section of the film within a predetermined field of view (14 ⁇ m ⁇ 14 ⁇ m) with respect to a secondary electron image at a magnification of about 8000 times. Since the thickness of the coating is not constant, the cross-sectional range of the coating is defined as the region where P is detected in the elemental mapping image obtained by energy dispersive X-ray spectroscopy (EDS).
  • EDS energy dispersive X-ray spectroscopy
  • the rare earth magnet powder of the present invention can be used for any application, but for example, it is used for bonded magnets that are exposed to water, oil, their mists, and the like. Bonded magnets may be injection molded or compression molded.
  • Bonded magnets serve as the magnetic field source for the magnetic field elements of electric motors and solenoids.
  • a field element of an electric motor is, for example, a rotor or a stator.
  • the rotor may be an internal magnet type in which bond magnets are integrally formed in slots (cavities) of the rotor core, or a surface magnet type in which bond magnets are arranged on the surface side of the rotor core.
  • the electric motor may be a generator as well as a motor.
  • the motor may be a DC motor or an AC motor.
  • the electric motor according to the present invention can be used for any application, but for example, it is used as a drive source for water pumps and oil pumps exposed to corrosive environments.
  • Sample 1 is a powder produced by performing only the above-described treatment process without performing the preheating process and the firing process.
  • Sample 2 is a powder produced by performing the treatment and preheating steps described above without performing the firing step. Therefore, sample 1 has a powder maximum heating temperature of 80°C, and sample 2 has a powder maximum heating temperature of 120°C.
  • Sample C is a powder produced by subjecting the raw material powder described above to the following three stages of treatment in order according to the description of Patent No. 5499738 (paragraph [0153]).
  • the treatment and preheating steps described above were applied.
  • the powder after the first step the metal alkoxy oligomer (X-40-9246 manufactured by Shin-Etsu Chemical Co., Ltd.) and the above-described orthophosphoric acid solution are stirred and mixed (in the air, 80 ° C. x 1 hour). and further dried by heating (120° C. ⁇ 2.5 hours in air).
  • the powder after the second step and a solution of a coupling agent (KBE-903 manufactured by Shin-Etsu Chemical Co., Ltd.) are stirred and mixed (in the atmosphere, 80 ° C. x 1 hour), and further dried by heating (inert 120° C. ⁇ 2.5 hours in atmosphere).
  • the thus-obtained magnet particles of Sample C are coated with three layers: a phosphate compound layer (first layer) and a composite coating containing a silicon compound and a phosphate compound (second and third layers). .
  • Table 1 also shows the magnetic properties and demagnetization ratios of Samples 1 and 2, which were not subjected to the firing process, and Sample S, which was not subjected to coating treatment (as raw material powder).
  • the demagnetization ratios of samples S, 1 and 2 are plotted in order from the firing temperatures of 20° C., 80° C. and 120° C. shown in FIG.
  • Table 1 also shows the magnetic properties and demagnetization rate of Sample C, which is coated with a different method.
  • FIG. 2 shows a bar graph comparing the demagnetization rate: ⁇ iHc S1 (%) of sample 6 and sample C. As shown in FIG.
  • FIG. 3A and elemental mapping (P, O, Nd) based on energy dispersive X-ray spectroscopy (EDS) is shown in FIG. 3B. Note that the magnification of the observation image shown in FIGS. 3A and 3B (both figures are simply referred to as "FIG. 3") is 80,000 times.
  • the demagnetization rate is much higher than that of the conventional three-layer-coated magnet powder. was small.
  • the film of sample 6 had a very dense structure with almost no voids.
  • Corrosion resistance is improved by forming a film (referred to as a "phosphate film") on the surface of such raw material particles by phosphating.
  • a film referred to as a "phosphate film”
  • the firing temperature is low, a large amount of Nd oxide remains near the outermost surface, and the improvement in corrosion resistance is insufficient (Samples 2 and 3).
  • the Nd oxide migrates to the lower layer side of the film for unknown reasons, and the Nd oxide remaining near the outermost surface is significantly reduced, greatly improving corrosion resistance.
  • Sample 6 It can be seen from the Nd concentration and O concentration shown in FIG. 5 that the Nd that has migrated to the lower layer side can be stably retained as Nd oxide at a deep position. It should be noted that the deterioration of the magnetic properties due to heating is slight because the magnetic properties are sintered at a predetermined temperature or lower. It is believed that, in this way, a highly corrosion-resistant magnet powder capable of remarkably suppressing deterioration of magnetic properties was obtained.
  • Samples were fabricated by variously changing the heating conditions after the treatment process shown in the first embodiment.
  • the raw material powder used was a commercially available NdFeB-based anisotropic magnet powder (manufactured by Aichi Steel Co., Ltd.: MF-P15 (Br: 1.3 T, iHc: 1093 kA/m, (BH) max: 297 kJ/m 3 , average particle size (VMD): 119 ⁇ m).

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Hard Magnetic Materials (AREA)
  • Powder Metallurgy (AREA)

Abstract

The present invention provides a production method for a rare earth magnet powder that is capable of stably exhibiting high magnetic properties even in a corrosive environment. The present invention is a production method for obtaining a rare earth magnet powder constituted by magnet particles that have a coating film including P, O, and Fe, said production method comprising a treatment step for bringing magnet particles containing Nd, Fe, and B, into contact with a treatment solution containing phosphoric acid ions, and a firing step for heating the magnet particles after the treatment step at 250-350°C. The content ratio (Nd/Fe), which is the atomic ratio of Nd with respect to Fe in the coating film, is, for example, not more than 0.5 in the range (outermost region) from the outermost surface of the coating film to a depth of 10 nm. The coating film may be dense, with no prominent voids etc. near the surface thereof. A bonded magnet using such a rare earth magnet powder is suitable, for example, as a field source for a pump motor to be used in corrosive environments (in water, oil, etc.).

Description

希土類磁石粉末およびその製造方法Rare earth magnet powder and method for producing the same

 本発明は、希土類磁石粉末の製造方法等に関する。 The present invention relates to a method for producing rare earth magnet powder and the like.

 高性能化や省エネルギー化等を図るため、希土類磁石を用いた電磁機器(電動機等)が多く用いられる。希土類磁石には、希土類磁石粒子を焼結させた焼結磁石と、希土類磁石粒子をバインダ樹脂で結着させたボンド磁石がある。 In order to improve performance and save energy, many electromagnetic devices (electric motors, etc.) using rare earth magnets are used. Rare earth magnets include sintered magnets obtained by sintering rare earth magnet particles and bonded magnets obtained by binding rare earth magnet particles with a binder resin.

 ボンド磁石には、磁石粒子とバインダ樹脂(主に熱可塑性樹脂)の混合物をキャビティへ射出して成形した射出ボンド磁石と、磁石粒子とバインダ樹脂(主に熱硬化性樹脂)の混合物をキャビティ内で圧縮固化(硬化を含む)して成形した圧縮ボンド磁石とがある。 Bonded magnets are made by injecting a mixture of magnet particles and binder resin (mainly thermoplastic resin) into a cavity and molding them. There is a compression bond magnet molded by compression and solidification (including hardening) with.

 いずれのボンド磁石も、焼結磁石よりも成形性に優れ形状自由度が大きいため、その用途が拡大しつつある。これに伴い、磁気特性が安定して発揮され得る高い信頼性(耐久性、耐食性等ともいう。)がボンド磁石に強く求められている。これに関連する記載が、例えば下記の特許文献にある。  Bonded magnets have better formability than sintered magnets and have a greater degree of freedom in shape, so their applications are expanding. Along with this, there is a strong demand for bond magnets to have high reliability (also called durability, corrosion resistance, etc.) so that magnetic properties can be stably exhibited. Descriptions related to this can be found, for example, in the following patent documents.

特許第3882490号Patent No. 3882490 特許第3882545号Patent No. 3882545 特許第4650593号Patent No. 4650593 特許第5499738号Patent No. 5499738

 特許文献1~4は、磁気特性の劣化を抑制するため、防錆や耐候性の向上等を目的として、リン酸処理を磁石粉末に施すことを提案している。その際、加熱乾燥(焼付け乾燥)することにより被覆処理の促進が図られている。もっとも、その加熱温度はいずれも、磁気特性の低下を抑制するため、高々200℃以下に留められている(例えば、特許文献3[0065]参照)。なお、特許文献1、2には、一般的に窒化処理して得られ微粒子を多く含むSmFeN系磁石合金粉末へ、リン酸処理した実施例しか記載されていない。 Patent Documents 1 to 4 propose to subject magnetic powder to phosphoric acid treatment for the purpose of improving rust prevention and weather resistance in order to suppress the deterioration of magnetic properties. At that time, the coating treatment is promoted by heat drying (baking drying). However, the heating temperature is limited to 200° C. or less at most in order to suppress deterioration of magnetic properties (see, for example, Patent Document 3 [0065]). Note that Patent Documents 1 and 2 only describe examples in which SmFeN magnet alloy powder containing a large amount of fine particles, which is generally obtained by nitriding, is treated with phosphoric acid.

 本発明はこのような事情に鑑みて為されたものであり、希土類磁石粉末の新たな製造方法等を提供することを目的とする。 The present invention has been made in view of such circumstances, and aims to provide a new method for producing rare earth magnet powder.

 本発明者はこの課題を解決すべく鋭意研究した結果、リン酸処理後、さらに所定の高温域で加熱されたNdFeB系磁石粉末は、腐食環境下でも磁気特性が劣化し難いことを新たに見出した。この成果を発展させることにより、以降に述べる本発明を完成するに至った。 As a result of intensive research to solve this problem, the present inventors newly found that the magnetic properties of NdFeB magnet powder that has been heated in a predetermined high temperature range after phosphate treatment are less likely to deteriorate even in a corrosive environment. rice field. Developing this result led to the completion of the present invention described below.

《希土類磁石粉末の製造方法》
 本発明は、Nd、FeおよびBを含む磁石粒子とリン酸イオンを含む処理液とを接触させる処理工程と、該処理工程後の磁石粒子を250~350℃の焼成温度で加熱する焼成工程とを備え、P、OおよびFeを含む皮膜を有する磁石粒子からなる希土類磁石粉末の製造方法である。
<<Method for producing rare earth magnet powder>>
The present invention comprises a treatment step of bringing magnet particles containing Nd, Fe and B into contact with a treatment solution containing phosphate ions, and a sintering step of heating the magnet particles after the treatment step at a sintering temperature of 250 to 350°C. and a method for producing a rare earth magnet powder comprising magnet particles having a coating containing P, O and Fe.

 本発明の製造方法によれば、例えば、水や油などが存在する腐食環境に曝されても、磁気特性(例えば保磁力)が劣化し難い希土類磁石粉末が得られる。その理由は定かではないが、磁気特性の劣化に大きな影響を及ぼす磁石粒子の表面付近に、酸化され難い高耐食性の皮膜が形成されるためと考えられる。 According to the production method of the present invention, for example, rare earth magnet powder whose magnetic properties (eg, coercive force) are less likely to deteriorate even when exposed to a corrosive environment in which water, oil, etc. are present can be obtained. Although the reason for this is not clear, it is thought that a highly corrosion-resistant coating that is difficult to oxidize is formed near the surface of the magnet particles, which greatly affects the deterioration of the magnetic properties.

《希土類磁石粉末》
(1)本発明は希土類磁石粉末としても把握される。例えば、本発明は、皮膜を有する磁石粒子からなる希土類磁石粉末であって、該磁石粒子は、Nd、FeおよびBを含み、該皮膜は、P、OおよびFeを含み、該皮膜に含まれるNdのFeに対する原子割合である含有比(Nd/Fe)が、該皮膜の最表面から深さ10nmまでの最表域で0.5以下である希土類磁石粉末でもよい。
《Rare earth magnet powder》
(1) The present invention can also be understood as a rare earth magnet powder. For example, the present invention is a rare earth magnet powder consisting of magnet particles having a coating, the magnet particles comprising Nd, Fe and B, the coating comprising P, O and Fe contained in the coating The rare earth magnet powder may have a content ratio (Nd/Fe), which is the atomic ratio of Nd to Fe, of 0.5 or less in the outermost surface region from the outermost surface to a depth of 10 nm.

 磁石粒子の最表域に形成される皮膜は、例えば、酸化されやすい卑なNdの含有率が従来のリン酸塩皮膜等よりも顕著に少ない。このような皮膜で被覆された磁石粒子からなる希土類磁石粉末は、腐食環境下でも磁気特性が劣化し難く、高い信頼性を発揮し得る。 The film formed on the outermost surface area of the magnet particles, for example, has a significantly lower content of base Nd, which is easily oxidized, than conventional phosphate films. A rare earth magnet powder composed of magnet particles coated with such a film is less likely to deteriorate in magnetic properties even in a corrosive environment, and can exhibit high reliability.

(2)本発明は、例えば、皮膜を有する磁石粒子からなる希土類磁石粉末であって、該磁石粒子は、Nd、FeおよびBを含み、該皮膜は、P、OおよびFeを含み、該皮膜に含まれるボイドの最大サイズは50nm以下である希土類磁石粉末でもよい。 (2) The present invention provides, for example, a rare earth magnet powder composed of magnet particles having coatings, the magnet particles containing Nd, Fe and B, the coatings containing P, O and Fe, and the coatings The maximum size of voids contained in the rare earth magnet powder may be 50 nm or less.

 機序は定かではないが、大きなボイド(欠陥)がなく緻密なリン酸塩系皮膜で被覆された磁石粒子からなる希土類磁石粉末も、腐食環境下でも磁気特性が劣化し難く、高い信頼性を発揮し得る。 Although the mechanism is not clear, rare earth magnet powder consisting of magnet particles coated with a dense phosphate film without large voids (defects) does not easily deteriorate in magnetic properties even in a corrosive environment and has high reliability. can demonstrate.

 最表域に存在するNdが少ない皮膜や目立つボイドがない緻密な皮膜は、例えば、上述した本発明の製造方法により生成される。 A film with less Nd present in the outermost surface area and a dense film without conspicuous voids can be produced, for example, by the production method of the present invention described above.

《ボンド磁石とその製造方法》
 本発明は、希土類磁石粉末を用いたボンド磁石やその製造方法としても把握され得る。ボンド磁石は、磁石粒子とバインダ樹脂からなる。このようなボンド磁石は、例えば、希土類磁石粉末と熱可塑性樹脂からなる溶融混合物をキャビティ(磁石孔等)へ充填して固化させる射出成形法、キャビティへ投入した希土類磁石粉末と熱硬化性樹脂またはそれらの組成物(コンパウンド)を、圧縮、溶融および固化させる圧縮成形法等により得られる。なお、希土類磁石粉末が異方性磁石粉末であるとき、配向磁場を印加しつつ成形されるとよい。
《Bond magnet and its manufacturing method》
The present invention can also be grasped as a bonded magnet using rare earth magnet powder and a manufacturing method thereof. A bonded magnet is composed of magnet particles and a binder resin. Such a bonded magnet can be produced, for example, by an injection molding method in which a cavity (magnet hole, etc.) is filled with a molten mixture of rare earth magnet powder and a thermoplastic resin and solidified; These compositions (compounds) are obtained by a compression molding method or the like in which they are compressed, melted and solidified. When the rare earth magnet powder is an anisotropic magnet powder, it is preferable to compact while applying an aligning magnetic field.

《その他》
(1)本明細書では、被覆処理(処理工程または焼成工程)の前後または皮膜の有無を問わず、適宜、Nd、FeおよびBを含む磁石粒子を単に「磁石粒子」という。また、そのような磁石粒子からなる希土類磁石粉末を、単に「磁石粉末」ともいう。
"others"
(1) In this specification, magnet particles containing Nd, Fe, and B are simply referred to as "magnet particles" as appropriate, regardless of whether they are before or after coating treatment (treatment step or firing step) or with or without a coating. A rare earth magnet powder composed of such magnet particles is also simply referred to as "magnet powder".

 敢えて区別するときは、処理工程前の磁石粒子(磁石粉末)を「原料粒子(原料粉末)」、処理工程後の磁石粒子(磁石粉末)を「処理粒子(処理粉末)」、焼成工程後の磁石粒子(磁石粉末)を「焼成粒子(焼成粉末)」という。 When daring to distinguish, magnet particles (magnet powder) before the treatment process are referred to as "raw material particles (raw material powder)," magnet particles (magnet powder) after the treatment process are referred to as "treated particles (treated powder)," and after the firing process. The magnet particles (magnet powder) are referred to as "fired particles (fired powder)".

(2)P、OおよびFeを含む皮膜を、その成分組成、組織または構造等を問わず、単に「リン酸塩(系)皮膜」ともいう。なお、リン酸塩皮膜には、P、OおよびFe以外の元素(例えばNd、B等)が含まれ得る。 (2) Coatings containing P, O and Fe are also simply referred to as "phosphate (based) coatings" regardless of their component composition, structure or structure. The phosphate coating may contain elements other than P, O and Fe (for example, Nd, B, etc.).

 本発明に係る皮膜は、磁石粒子の表面に少なくとも1層あればよく、他種の皮膜(被膜)と積層(組合せ)されてもよい。本発明に係る皮膜は、通常、原料粒子の最表層上に少なくとも1層あるとよい。 The film according to the present invention only needs to have at least one layer on the surface of the magnet particles, and may be laminated (combined) with other types of films (films). The film according to the present invention should normally have at least one layer on the outermost layer of the raw material particles.

(3)本明細書でいう「耐食性」は、磁石粒子の磁気特性の劣化度合(低下率)を意味し、皮膜自体の劣化(変質等)は問わない。例えば、「高耐食性の皮膜」とは、磁石粒子の磁気特性の劣化を抑制できる皮膜という意味である。耐食性の指標として、特に断らない限り、実用上重要な磁石粒子の保磁力(iHc)の低下率(減磁率)を用いる。 (3) "Corrosion resistance" as used in this specification means the degree of deterioration (decrease rate) of the magnetic properties of the magnet particles, regardless of the deterioration (deterioration, etc.) of the film itself. For example, a "highly corrosion-resistant film" means a film that can suppress the deterioration of the magnetic properties of magnet particles. As an index of corrosion resistance, unless otherwise specified, the reduction rate (demagnetization rate) of coercive force (iHc) of magnet particles, which is practically important, is used.

(4)特に断らない限り本明細書でいう「x~y」は下限値xおよび上限値yを含む。本明細書に記載した種々の数値または数値範囲に含まれる任意の数値を新たな下限値または上限値として「a~b」のような範囲を新設し得る。また、特に断らない限り、本明細書でいう「x~ykA/m」は、xkA/m~ykA/mを意味する。他の単位系についても同様である。 (4) Unless otherwise specified, "x to y" as used herein includes the lower limit value x and the upper limit value y. A new range such as “a to b” can be established as a new lower or upper limit of any numerical value included in the various numerical values or numerical ranges described herein. Further, unless otherwise specified, "x to ykA/m" as used herein means xkA/m to ykA/m. The same applies to other unit systems.

被覆処理前後の減磁率と焼成温度の関係を示す散布図である。FIG. 4 is a scatter diagram showing the relationship between demagnetization rate and firing temperature before and after coating treatment. 耐食試験前後の減磁率と焼成温度の関係を示す散布図である。It is a scatter diagram showing the relationship between the demagnetization rate and the firing temperature before and after the corrosion resistance test. 初期状態(被覆処理前)に対する耐食試験後の減磁率と焼成温度の関係を示す散布図である。4 is a scatter diagram showing the relationship between the demagnetization rate after the corrosion resistance test and the firing temperature with respect to the initial state (before coating treatment). 被覆処理方法が異なる試料について、初期状態に対する耐食試験後の減磁率を比較した棒グラフである。4 is a bar graph comparing the demagnetization rate after the corrosion resistance test with respect to the initial state for samples with different coating treatment methods. 焼成温度が異なる皮膜を観察したSTEM像である。It is the STEM image which observed the film|membrane with which baking temperature differs. それらの皮膜に係るEDSによる元素マッピング像である。It is an elemental mapping image by EDS concerning those films. 焼成温度が異なる皮膜に含まれるボイドの個数とサイズをまとめた一覧表である。4 is a table summarizing the number and size of voids contained in films with different firing temperatures. 焼成温度が異なる皮膜をAESで分析して得られた元素分布を示すグラフである。4 is a graph showing elemental distributions obtained by analyzing films with different firing temperatures by AES. その元素分布から求めたFeに対するNdの含有比(Nd/Fe)を示すグラフである。It is a graph which shows the content ratio (Nd/Fe) of Nd with respect to Fe calculated|required from the element distribution. リン酸塩皮膜の形態と焼成温度の関係に係る推察を説明する模式図である。FIG. 4 is a schematic diagram for explaining a conjecture relating to the relationship between the morphology of the phosphate coating and the firing temperature. 被覆処理条件が異なる試料について、初期状態に対する耐食試験後の減磁率を比較した棒グラフである。4 is a bar graph comparing the demagnetization rate after the corrosion resistance test with respect to the initial state for samples with different coating treatment conditions.

 本明細書中に記載した事項から任意に選択した一つまたは二つ以上の構成要素を、上述した本発明の構成に付加し得る。製造方法に関する構成要素も物に関する構成要素ともなり得る。いずれの実施形態が最良であるか否かは、対象、要求性能等によって異なる。 One or more components arbitrarily selected from the matters described in this specification can be added to the configuration of the present invention described above. A component related to a manufacturing method can also be a component related to an object. Which embodiment is the best depends on the target, required performance, and the like.

《処理工程》
 処理工程は、磁石粒子(粉末)と、リン酸イオンを含む処理液とを接触させてなされる。処理工程は、磁石粒子の表面に、P、OおよびFeを含む皮膜(リン酸塩皮膜)を形成できれば、処理液の原料、調製方法、濃度、溶媒等を問わない。なお、リン酸イオンは、代表的なオルトリン酸イオン(PO 3- )に限らず、亜リン酸イオン(PO 3- )、次亜リン酸イオン(PO 3- )等でもよい。処理液に含まれるリン酸イオンには、組成や価数が異なるものが混在していてもよい。
《Process》
The treatment step is carried out by bringing magnet particles (powder) into contact with a treatment liquid containing phosphate ions. In the treatment process, as long as a film containing P, O and Fe (phosphate film) can be formed on the surface of the magnet particles, the raw material, preparation method, concentration, solvent, etc. of the treatment liquid are not limited. Phosphate ions are not limited to typical orthophosphate ions (PO 4 3- ), but may be phosphite ions (PO 3 3- ), hypophosphite ions (PO 2 3- ), and the like. The phosphate ions contained in the treatment liquid may have different compositions and different valences.

 具体的にいうと、処理液は、例えば、リン酸のみでもよいし、リン酸またはリン化合物(リン酸塩を含む)を溶媒で調製したものでもよい。溶媒は、水でも、有機溶媒(特に揮発性溶媒)でもよい。揮発性に優れる処理液を用いると、被覆処理(皮膜形成処理)の促進を図れる。 Specifically, the treatment liquid may be, for example, phosphoric acid alone, or phosphoric acid or a phosphorous compound (including phosphate) prepared in a solvent. The solvent may be water or an organic solvent (particularly a volatile solvent). The coating treatment (film formation treatment) can be promoted by using a highly volatile treatment liquid.

 リン酸は、オルトリン酸の他、亜リン酸系、次亜リン酸系、ピロリン酸、メタリン酸、ポリリン酸系などの無機リン酸、有機リン酸等でもよい。特にオルトリン酸は、鉄との反応性が高く、磁石粒子の表面に皮膜を形成しやすい。リン化合物の一種であるリン酸塩として、リン酸塩亜鉛、リン酸塩マンガン、リン酸塩マグネシウム等がある。有機溶媒には、例えば、アルコール類(イソプロピルアルコール(IPA))、エタノール、メタノール、2-メトキシエタノール等)の他、ホルムアミド、N,N-ジメチルホルムアミド等がある。処理液は、さらに、界面活性剤(例えばシランカップリング剤等)を含んでもよい。 In addition to orthophosphoric acid, phosphoric acid may be inorganic phosphoric acid such as phosphorous acid, hypophosphorous acid, pyrophosphoric acid, metaphosphoric acid, polyphosphoric acid, organic phosphoric acid, and the like. In particular, orthophosphoric acid has high reactivity with iron and tends to form a film on the surface of magnet particles. Phosphates, which are a type of phosphorus compound, include zinc phosphate, manganese phosphate, magnesium phosphate, and the like. Organic solvents include, for example, alcohols (isopropyl alcohol (IPA), ethanol, methanol, 2-methoxyethanol, etc.), formamide, N,N-dimethylformamide, and the like. The treatment liquid may further contain a surfactant (for example, a silane coupling agent, etc.).

 処理液にオルトリン酸(HPO)を用いるとき、オルトリン酸は、磁石粉末全体に対して、例えば、0.3~1.0質量%さらには、0.4~0.8質量%であるとよい。 When orthophosphoric acid (H 3 PO 4 ) is used for the treatment liquid, the orthophosphoric acid is, for example, 0.3 to 1.0% by mass, further 0.4 to 0.8% by mass with respect to the entire magnet powder. Good to have.

 原料粉末と処理液の接触は、例えば、浸漬法、噴霧法等によりなされる。磁石粒子の表面にリン酸塩皮膜を均一的に形成するため、両者を撹拌等しつつ接触(混合)させてもよい。また、原料粉末と処理液の少なくとも一方を加熱しつつ、両者を接触させてもよい。加熱により、溶媒が気化(蒸発)すると共に、磁石粒子表面におけるリン酸塩皮膜の形成が促進される。その加熱温度は、例えば、40~110℃さらには60~90℃である。処理工程は、例えば、酸化防止雰囲気(例えば不活性ガス(N、Ar等)雰囲気)でなされる。 The raw material powder and the treatment liquid are brought into contact with each other by, for example, an immersion method, a spray method, or the like. In order to uniformly form a phosphate film on the surface of the magnet particles, the two may be brought into contact (mixed) while stirring or the like. Alternatively, at least one of the raw material powder and the treatment liquid may be heated and brought into contact with each other. The heating vaporizes (evaporates) the solvent and promotes the formation of a phosphate film on the magnet particle surface. The heating temperature is, for example, 40-110°C, further 60-90°C. The treatment process is performed, for example, in an anti-oxidation atmosphere (eg, inert gas (N 2 , Ar, etc.) atmosphere).

《焼成工程》
 焼成工程は、処理工程後の磁石粒子(処理粒子)を加熱してなされる。その加熱温度(「焼成温度」という。)は、例えば、250~350℃、270~330℃、275~325℃さらには285~315℃である。焼成温度が過小では、耐食性に優れた皮膜が形成され難い。焼成温度が過大になると、磁石粒子自体の磁気特性が低下し得る。
《Baking process》
The firing step is performed by heating the magnet particles (treated particles) after the treatment step. The heating temperature (referred to as "firing temperature") is, for example, 250 to 350.degree. C., 270 to 330.degree. C., 275 to 325.degree. If the sintering temperature is too low, it is difficult to form a film with excellent corrosion resistance. If the sintering temperature is too high, the magnetic properties of the magnet particles themselves may deteriorate.

 焼成工程は、酸化防止雰囲気(例えば、真空雰囲気または不活性ガス(N、Ar等)雰囲気等)でなされても、酸化雰囲気(例えば、大気雰囲気や準大気雰囲気等)でなされてもよい。酸化雰囲気で行えば、焼成工程に係る設備や工程に係る負担を軽減できる。 The firing process may be performed in an anti-oxidizing atmosphere (eg, vacuum atmosphere, inert gas (N 2 , Ar, etc.) atmosphere, etc.) or in an oxidizing atmosphere (eg, atmospheric atmosphere, semi-atmospheric atmosphere, etc.). If it is carried out in an oxidizing atmosphere, it is possible to reduce the burden on equipment and processes involved in the firing process.

 焼成工程は、例えば、1~180分間、3~150分間さらには10~50分間なされる。磁石粒子の表面付近(例えば深さ1μm程度)が所望の焼成温度に到達すれば、焼成工程は短時間でもよい。高温加熱する焼成工程の時間短縮により、製造効率の向上のみならず、磁気特性の低下も抑制され得る。 The firing process is performed, for example, for 1 to 180 minutes, 3 to 150 minutes, or even 10 to 50 minutes. If the vicinity of the surface of the magnet particles (for example, about 1 μm in depth) reaches the desired firing temperature, the firing process may be short. By shortening the time of the sintering process of heating to a high temperature, not only the production efficiency can be improved, but also the deterioration of the magnetic properties can be suppressed.

《予熱工程》
 処理工程後の磁石粉末は、焼成工程前に、上述した焼成温度よりも低温で加熱されてもよい(予熱工程)。予熱工程は必須ではく、その目的も問わない。予熱工程は、例えば、乾燥、焼付け、焼成工程前の予備加熱、本焼(焼成工程)前の仮焼等を目的としてなされる。
《Preheating process》
The magnet powder after the treatment process may be heated at a temperature lower than the firing temperature described above before the firing process (preheating process). The preheating step is not essential, and its purpose does not matter. The preheating process is performed for the purpose of, for example, drying, baking, preheating before the firing process, and calcination before firing (the firing process).

 予熱工程の温度は、例えば、80~220℃さらには100~150℃である。予熱工程の時間は、例えば、0.1~4時間さらには0.5~3時間である。予熱工程の雰囲気は焼成工程と同様に、酸化防止雰囲気でも酸化雰囲気でもよい。予熱工程から焼成工程への移行は、連続的でも間欠的でもよい。連続的に移行すれば余熱を利用でき、間欠的に移行すれば一括処理(バッチ処理)が可能となる。なお、磁石粉末の処理量が多い場合、予熱工程を行うと、所望のリン酸塩系皮膜の生成がより安定化し得る。 The temperature of the preheating process is, for example, 80-220°C or 100-150°C. The duration of the preheating step is, for example, 0.1 to 4 hours, or 0.5 to 3 hours. The atmosphere of the preheating step may be either an anti-oxidizing atmosphere or an oxidizing atmosphere, as in the firing step. The transition from the preheating step to the firing step may be continuous or intermittent. If the transfer is continuous, residual heat can be used, and if the transfer is intermittent, batch processing becomes possible. When a large amount of magnet powder is processed, the preheating step can further stabilize the formation of the desired phosphate-based film.

《磁石粒子》
 NdとFeとBを必須成分(基本成分)とするNdFeB系磁石粒子に、リン酸処理がなされる。その磁石粒子は、保磁力や耐熱性等を高める元素(Dy、Tb等の重希土類元素、Cu、Al、Co、Nb等)を含んでもよい。但し、必須成分となる元素の合計量は、通常、その磁石粒子全体に対して80原子%以上さらには90原子%以上である。
《Magnet Particles》
NdFeB magnet particles containing Nd, Fe, and B as essential components (basic components) are treated with phosphoric acid. The magnet particles may contain elements (heavy rare earth elements such as Dy and Tb, Cu, Al, Co, Nb, etc.) that enhance coercive force and heat resistance. However, the total amount of the essential elements is usually 80 atomic % or more, preferably 90 atomic % or more, relative to the entire magnet particles.

 磁石粒子は、異方性磁石粒子でも等方性磁石粒子でもよい。異方性磁石粒子(粉末)を配向磁場中成形すれば、高磁気特性なボンド磁石が得られる。 The magnet particles may be anisotropic magnet particles or isotropic magnet particles. A bonded magnet with high magnetic properties can be obtained by molding anisotropic magnet particles (powder) in an oriented magnetic field.

 磁石粒子は、例えば、磁石合金に水素処理を施して得られる。水素処理は、通常、吸水素による不均化反応(Hydrogenation-Disproportionation/単に「HD反応」ともいう。)と、脱水素による再結合反応(Desorption-Recombination/単に「DR反応」ともいう。)を伴う。HD反応とDR反応を併せて単に「HDDR反応」といい、HDDR反応を生じる水素処理を単に「HDDR」という。なお、HDDRには、改良型であるd―HDDR(dynamic-Hydrogenation-Disproportionation-Desorption-Recombination)も含まれる。d―HDDRは、例えば、国際公開公報(WO2004/064085)等で詳述されている。さらに、HDDR前の磁石合金は、高温(425~550℃)の水素雰囲気に曝す水素解砕処理がなされたものでもよい(国際公開公報(WO2020/017529)参照)。 Magnet particles are obtained, for example, by hydrogen-treating a magnet alloy. Hydrogenation usually includes a disproportionation reaction due to hydrogen absorption (Hydrogenation-Disproportionation/simply referred to as "HD reaction") and a recombination reaction due to dehydrogenation (Desorption-Recombination/simply referred to as "DR reaction"). Accompany. The HD reaction and the DR reaction are collectively referred to simply as the "HDDR reaction", and the hydrogen treatment resulting in the HDDR reaction is simply referred to as "HDDR". The HDDR also includes an improved d-HDDR (dynamic-Hydrogenation-Disproportionation-Desorption-Recombination). The d-HDDR is described in detail in, for example, International Publication (WO2004/064085). Furthermore, the magnet alloy before HDDR may be subjected to hydrogen cracking treatment in which it is exposed to a high temperature (425 to 550° C.) hydrogen atmosphere (see International Publication (WO2020/017529)).

 ちなみに、NdFeB系磁石合金は、通常、主相(NdFe14B)を構成する理論組成(Nd:11.8at%、B:5.9at%、Fe:残部)よりも、Ndが多く含まれるNdリッチ組成からなる。理論組成よりリッチなNdの一部は、磁石合金を粉砕して得られる磁石粒子の表面にも現れ、酸化物(「Ndリッチ酸化物」という。)を生成して、磁気特性の劣化要因となる。このような傾向は、磁石合金が急冷凝固したアモルファス薄帯(またはその粉砕粉)からなる場合よりも、鋳塊(またはその粉砕粉)からなる場合に顕著である。本発明によれば、前者の場合は勿論、後者の場合でも、磁石粒子の耐食性の向上を図れる。この点が特に有意義である。 Incidentally, the NdFeB magnet alloy usually contains more Nd than the theoretical composition (Nd: 11.8 at%, B: 5.9 at%, Fe: balance) constituting the main phase (Nd 2 Fe 14 B). It consists of an Nd-rich composition. Some of the Nd richer than the theoretical composition also appears on the surface of the magnet particles obtained by pulverizing the magnet alloy, forms an oxide (referred to as "Nd-rich oxide"), and is a factor in the deterioration of magnetic properties. Become. Such a tendency is more pronounced when the magnet alloy consists of an ingot (or its pulverized powder) than when it consists of a rapidly solidified amorphous ribbon (or its pulverized powder). According to the present invention, the corrosion resistance of magnet particles can be improved not only in the former case but also in the latter case. This point is particularly significant.

 磁石粒子は、上述したリン酸処理とは別に、一種以上の防錆処理がされてもよい。このような防錆処理として、例えば、有機金属化合物層を形成する金属アルコキシオリゴマー処理、カップリング剤層を形成するカップリング処理等がある。磁石粒子の表面に直接形成されるリン酸塩皮膜は、通常、防錆処理の下地層となる。 The magnet particles may be subjected to one or more types of antirust treatment in addition to the phosphoric acid treatment described above. Examples of such antirust treatment include metal alkoxy oligomer treatment for forming an organometallic compound layer, coupling treatment for forming a coupling agent layer, and the like. A phosphate film directly formed on the surface of the magnet particles usually serves as a base layer for antirust treatment.

 磁石粒子のサイズ(磁石粉末の粒径(粒度))は問わない。HDDRで得られるNdFeB系磁石粒子なら、例えば、平均粒径が40~250μmである。本明細書でいう平均粒径は、特に断らない限り、レーザー回折式粒度分布測定装置(株式会社日本レーザー製 HELOS)で測定して定まるボリュームミーディアン径(VMD)である。 The size of the magnet particles (the particle size (particle size) of the magnet powder) does not matter. NdFeB magnet particles obtained by HDDR have, for example, an average particle size of 40 to 250 μm. Unless otherwise specified, the average particle size referred to in this specification is a volume median diameter (VMD) determined by measurement with a laser diffraction particle size distribution analyzer (HELOS manufactured by Japan Laser Co., Ltd.).

 磁石粒子には、平均粒径が相対的に大きな粗粒子の他、平均粒径が小さい微粒子が含まれてもよい。微粒子の平均粒径は、例えば、1~10μmさらには2~6μmである。なお、要求仕様に応じて、本発明の磁石粉末と組成、異方性・等方性、平均粒径等が異なる別な磁石粉末とを混合した複合磁石粉末を、ボンド磁石の製造に用いてもよい。 The magnet particles may include fine particles with a small average particle size as well as coarse particles with a relatively large average particle size. The average particle size of the fine particles is, for example, 1 to 10 μm, further 2 to 6 μm. Composite magnet powder obtained by mixing the magnet powder of the present invention with another magnet powder having different composition, anisotropy, isotropy, average particle size, etc., may be used for manufacturing bonded magnets according to the required specifications. good too.

《皮膜》
(1)組成
 皮膜は、少なくともP、OおよびFeを含むが、具体的な組成、組織、構造は種々あり得る。例えば、皮膜は、その最表域において、Ndの含有量が少ないほどよい。具体的にいうと、皮膜に含まれるNdのFeに対する原子割合である含有比(Nd/Fe)が、最表域において0.5以下、0.4以下さらには0.3以下であるとよい。なお、敢えていうなら、Nd/Feは0.1以上さらには0.2以上となり得る。
《Film》
(1) Composition The film contains at least P, O and Fe, and may have various specific compositions, textures, and structures. For example, the lower the Nd content in the outermost surface area of the film, the better. Specifically, the content ratio (Nd/Fe), which is the atomic ratio of Nd to Fe contained in the coating, is preferably 0.5 or less, 0.4 or less, or 0.3 or less in the outermost region. . It should be noted that Nd/Fe can be 0.1 or more, or even 0.2 or more.

 本明細書でいう最表域は、例えば、皮膜の最表面から深さ10nmまでの範囲である。含有比(Nd/Fe)は、例えば、皮膜の最表面近傍をオージェ電子分光法(AES:Auger Electron Spectroscopy)で分析して得られたNdとFeの原子比から求まる。具体的にいうと、深さ0nm(最表面)、深さ5nmおよび深さ10nmにおける原子比(Nd/Fe)の算術平均値を、含有比(Nd/Fe)として所定値(閾値)と比較するとよい。なお、含有比(Nd/Fe)は、最表域内にある少なくとも3点以上(特異点を除く)の原子比(Nd/Fe)に基づいて算出されれば、その測定位置は必ずしも上述した深さでなくてもよい。 The outermost surface area referred to in this specification is, for example, the range from the outermost surface of the film to a depth of 10 nm. The content ratio (Nd/Fe) can be obtained from the atomic ratio of Nd and Fe obtained by analyzing the vicinity of the outermost surface of the film by Auger Electron Spectroscopy (AES), for example. Specifically, the arithmetic mean value of the atomic ratio (Nd/Fe) at a depth of 0 nm (outermost surface), a depth of 5 nm, and a depth of 10 nm is compared with a predetermined value (threshold) as the content ratio (Nd/Fe). do it. In addition, if the content ratio (Nd/Fe) is calculated based on the atomic ratio (Nd/Fe) of at least three points (excluding the singular point) in the outermost surface area, the measurement position is not necessarily the above-mentioned depth It doesn't have to be.

(2)構造
 皮膜は、耐食性への影響が大きい表面付近において、欠陥が少なく緻密な構造であるとよい。例えば、皮膜に含まれるボイドの最大サイズは、50nm以下、40nm以下さらには30nm以下であるとよい。ボイドの平均サイズでいうなら、例えば、30nm以下、20nm以下さらには15nmであるとよい。
(2) Structure The coating preferably has a dense structure with few defects near the surface where corrosion resistance is greatly affected. For example, the maximum size of voids contained in the film is preferably 50 nm or less, 40 nm or less, or even 30 nm or less. In terms of the average size of voids, for example, it is preferably 30 nm or less, 20 nm or less, or even 15 nm.

 ボイドのサイズは、皮膜断面の観察像上において、抽出されたボイドの外形線上に両端点がある線分の最大長とする。その最大長の測定は、観察像上にスケールバーを設定して目視と手動により行ってもよいし、画像処理ソフトを用いて行ってもよい。ボイドの最大サイズは、その最大長の最大値である。ボイドの平均サイズは、その最大長の算術平均値(Σ(最大長)/個数)である。 The size of the void is the maximum length of the line segment that has both endpoints on the outline of the extracted void on the observation image of the film cross section. The measurement of the maximum length may be performed visually and manually by setting a scale bar on the observation image, or may be performed using image processing software. The maximum size of a void is the maximum of its maximum length. The average size of voids is the arithmetic mean of their maximum lengths (Σ(maximum length)/number).

 皮膜断面の観察像は、被覆処理した磁石粉末から無作為に抽出した粒子の表面付近を、透過型電子顕微鏡(TEM)または走査型透過型電子顕微鏡(STEM)で観察して得られる。ボイドの抽出とそのサイズ測定は、例えば、倍率8000倍程度の2次電子像について、所定の視野内(14μm×14μm)にある皮膜断面に基づいて行うとよい。皮膜の厚さは一定ではないため、その皮膜断面の範囲は、エネルギー分散型X線分析(EDS)から得られる元素マッピング像においてPが検出される領域とする。なお、2次電子像に基づく検出(視認)が困難な極微小なボイド(例えば、5nm以下)についても、そのサイズ測定を敢えて行うときは、元素マッピング像上でNd、OおよびPが検出されない空域をボイドと見做し、その空域について上述した方法によるサイズ測定を行う。 The observed image of the cross section of the film is obtained by observing the vicinity of the surface of particles randomly extracted from the coated magnet powder with a transmission electron microscope (TEM) or scanning transmission electron microscope (STEM). Extraction of voids and measurement of their sizes may be performed, for example, on the basis of a cross section of the film within a predetermined field of view (14 μm×14 μm) with respect to a secondary electron image at a magnification of about 8000 times. Since the thickness of the coating is not constant, the cross-sectional range of the coating is defined as the region where P is detected in the elemental mapping image obtained by energy dispersive X-ray spectroscopy (EDS). In addition, even for very small voids (for example, 5 nm or less) that are difficult to detect (visually recognize) based on secondary electron images, when the size measurement is performed, Nd, O and P are not detected on the elemental mapping image. Consider the airspace to be a void and size it according to the method described above.

《ボンド磁石》
 本発明の希土類磁石粉末は、その用途を問わないが、例えば、水、油、それらのミスト等に曝されるボンド磁石に用いられる。ボンド磁石は、射出成形品でも圧縮成形品でもよい。
《Bond Magnet》
The rare earth magnet powder of the present invention can be used for any application, but for example, it is used for bonded magnets that are exposed to water, oil, their mists, and the like. Bonded magnets may be injection molded or compression molded.

 ボンド磁石は、例えば、電動機やソレノイドの界磁子の界磁源となる。電動機の界磁子は、例えば、回転子(ロータ)または固定子(ステータ)である。ロータは、ロータコアのスロット(キャビティ)にボンド磁石が一体成形された内包磁石型でも、ロータコアの表面側にボンド磁石が配設された表面磁石型でもよい。電動機は、モータのみならず、ジェネレータでもよい。電動機は、直流電動機でも交流電動機でもよい。本発明に係る電動機は、その用途を問わないが、例えば、腐食環境に曝されるウォーターポンプやオイルポンプの駆動源に用いられる。 Bonded magnets, for example, serve as the magnetic field source for the magnetic field elements of electric motors and solenoids. A field element of an electric motor is, for example, a rotor or a stator. The rotor may be an internal magnet type in which bond magnets are integrally formed in slots (cavities) of the rotor core, or a surface magnet type in which bond magnets are arranged on the surface side of the rotor core. The electric motor may be a generator as well as a motor. The motor may be a DC motor or an AC motor. The electric motor according to the present invention can be used for any application, but for example, it is used as a drive source for water pumps and oil pumps exposed to corrosive environments.

 被覆処理時の温度が異なる多数の希土類磁石粉末(試料)を製作し、それらの耐食性(腐食環境への曝露後の減磁率)を評価した。このような具体例に基づいて、本発明を以下に詳しく説明する。 We produced a large number of rare earth magnet powders (samples) with different temperatures during the coating treatment, and evaluated their corrosion resistance (demagnetization rate after exposure to a corrosive environment). The present invention will be described in detail below based on such specific examples.

[第1実施例]
《試料の製作》
(1)原料粉末
 原料粉末として、水素処理(d-HDDR)して製造された市販のNdFeB系異方性磁石粉末(愛知製鋼株式会社製マグファイン:MF-P15(Br:1.3T、iHc:1116kA/m、(BH)max:312kJ/m、平均粒径(VMD):119μm)を用意した。この磁石粉末を試料Sとする。
[First embodiment]
《Production of samples》
(1) Raw material powder As the raw material powder, commercially available NdFeB-based anisotropic magnet powder manufactured by hydrogen treatment (d-HDDR) (manufactured by Aichi Steel Co., Ltd. Magfine: MF-P15 (Br: 1.3 T, iHc : 1116 kA/m, (BH) max: 312 kJ/m 3 , average particle diameter (VMD): 119 μm).

(2)処理工程
 オルトリン酸(関東化学株式会社製):6mLと溶媒(イソプロピルアルコール:IPA、富士フィルム和光純薬株式会社製):40mLを混合・撹拌して処理液を調製した。原料粉末に対するオルトリン酸の質量割合は0.5%とした。
(2) Treatment Process 6 mL of orthophosphoric acid (manufactured by Kanto Chemical Co., Ltd.) and 40 mL of solvent (isopropyl alcohol: IPA, manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.) were mixed and stirred to prepare a treatment liquid. The mass ratio of orthophosphoric acid to the raw material powder was set to 0.5%.

 小型ヘンシェルミキサー(日本コークス工業株式会社製FMミキサーFM-3C)の混合槽へ、原料粉末2000gと上記の処理液を投入して混合・攪拌した(処理工程)。このとき、雰囲気:窒素ガスフロー中(0.4mL/分)、混合槽の温度:80℃、ブレード回転数:300rpm、処理時間:60分間とした。こうして処理粉末を得た。  Into the mixing tank of a small Henschel mixer (FM mixer FM-3C manufactured by Nippon Coke Kogyo Co., Ltd.), 2000 g of the raw material powder and the above-described treatment solution were added and mixed and stirred (treatment process). At this time, atmosphere: nitrogen gas flow (0.4 mL/min), temperature of mixing tank: 80° C., blade rotation speed: 300 rpm, treatment time: 60 minutes. A treated powder was thus obtained.

(3)予熱工程
 ヘンシェルミキサーから回収した処理粉末をドライオーブンに入れ、大気雰囲気中で、120℃×2.5時間加熱した。
(3) Preheating Process The treated powder recovered from the Henschel mixer was placed in a dry oven and heated at 120° C. for 2.5 hours in an air atmosphere.

(4)焼成工程
 予熱工程後の処理粉末をラボプラストミル(株式会社東洋精機製作所製)に入れ、大気雰囲気中で加熱した。加熱温度(焼成温度)は200~400℃で調整した。本実施例で示す焼成温度は、実際に測定した試料の温度である。加熱時間はいずれも0.5時間(30分間)とした。こうして表1に示す試料3~9(焼成粉末)を得た。
(4) Firing Step The treated powder after the preheating step was placed in a Labo Plastomill (manufactured by Toyo Seiki Seisakusho Co., Ltd.) and heated in an air atmosphere. The heating temperature (firing temperature) was adjusted between 200 and 400°C. The firing temperature shown in this example is the temperature of the sample actually measured. The heating time was 0.5 hours (30 minutes). Samples 3 to 9 (fired powder) shown in Table 1 were thus obtained.

(5)参考試料(試料1、2および試料C)
 次のような参考試料も用意した。
(5) Reference samples (samples 1, 2 and sample C)
The following reference samples were also prepared.

 試料1は、予熱工程および焼成工程を行わず、上述した処理工程のみを施して製作した粉末である。試料2は、焼成工程を行わず、上述した処理工程および予熱工程を施して製作した粉末である。従って、試料1は粉末の最高加熱温度が80℃、試料2は粉末の最高加熱温度が120℃となる。 Sample 1 is a powder produced by performing only the above-described treatment process without performing the preheating process and the firing process. Sample 2 is a powder produced by performing the treatment and preheating steps described above without performing the firing step. Therefore, sample 1 has a powder maximum heating temperature of 80°C, and sample 2 has a powder maximum heating temperature of 120°C.

 試料Cは、上述した原料粉末に、特許第5499738号(段落[0153])の記載に沿って、次の3段階の処理を順に施して製作した粉末である。第1段階で、上述した処理工程および予熱工程を施した。第2段階で、第1段階後の粉末と金属アルコキシオリゴマー(信越化学工業株式会社製X-40-9246)と既述したオルトリン酸の溶液とを撹拌混合(大気中、80℃×1時間)し、さらに加熱乾燥(大気中、120℃×2.5時間)した。第3段階で、第2段階後の粉末とカップリング剤(信越化学工業株式会社製KBE-903)の溶液とを撹拌混合(大気中、80℃×1時間)し、さらに加熱乾燥(不活性雰囲気中、120℃×2.5時間)した。こうして得られた試料Cの磁石粒子は、リン酸化合物層(第1層)と、ケイ素化合物およびリン酸化合物を含む複合皮膜(第2層および第3層)との三層で被覆されてなる。 Sample C is a powder produced by subjecting the raw material powder described above to the following three stages of treatment in order according to the description of Patent No. 5499738 (paragraph [0153]). In the first stage, the treatment and preheating steps described above were applied. In the second step, the powder after the first step, the metal alkoxy oligomer (X-40-9246 manufactured by Shin-Etsu Chemical Co., Ltd.) and the above-described orthophosphoric acid solution are stirred and mixed (in the air, 80 ° C. x 1 hour). and further dried by heating (120° C.×2.5 hours in air). In the third step, the powder after the second step and a solution of a coupling agent (KBE-903 manufactured by Shin-Etsu Chemical Co., Ltd.) are stirred and mixed (in the atmosphere, 80 ° C. x 1 hour), and further dried by heating (inert 120° C.×2.5 hours in atmosphere). The thus-obtained magnet particles of Sample C are coated with three layers: a phosphate compound layer (first layer) and a composite coating containing a silicon compound and a phosphate compound (second and third layers). .

《耐食性》
(1)耐食試験
 各試料の粉末(焼成粉末と原料粉末)を次のような腐食環境に曝した。耐圧試験容器に各粉末:10gと試験溶液:50mLを入れて、150℃のオーブン中で100時間放置した。試験溶液には、SLLC(トヨタ株式会社製トヨタ純正スーパーロングライフクーララント)をイオン交換水で2倍(体積比)に希釈(水:SLLC=1:1)した水溶液を用いた。
《Corrosion resistance》
(1) Corrosion Resistance Test Powders of each sample (fired powder and raw material powder) were exposed to the following corrosive environment. 10 g of each powder and 50 mL of test solution were placed in a pressure test container and left in an oven at 150° C. for 100 hours. As the test solution, an aqueous solution obtained by diluting SLLC (genuine Toyota Super Long Life Coolant manufactured by Toyota Corporation) with deionized water twice (volume ratio) (water: SLLC = 1:1) was used.

(2)測定
 耐食試験前の各試料について、パルスBHトレーサー(OP電子工業株式会社製)を用いて得られたB-H曲線から、最大エネルギー積:(BH)max、残留磁束密度:Brおよび保磁力:iHcを求めた。また、耐食試験後の各試料の保磁力も同様に測定した。いずれの測定も室温下で行った。こうして得られた各試料の磁気特性を表1にまとめて示した。耐食試験前のiHcはiHc、耐食試験後のiHcはiHcと記す。なお、表面処理をしていない基準となる耐食試験前の原料粉末(試料S、後述の試料T)のiHcはiHcとした。
(2) Measurement For each sample before the corrosion resistance test, from the BH curve obtained using a pulse BH tracer (manufactured by OP Electronics Industry Co., Ltd.), the maximum energy product: (BH) max, residual magnetic flux density: Br and Coercive force: iHc was obtained. Also, the coercive force of each sample after the corrosion resistance test was measured in the same manner. All measurements were performed at room temperature. Table 1 summarizes the magnetic properties of each sample thus obtained. The iHc before the corrosion resistance test is denoted as iHc 0 , and the iHc after the corrosion resistance test is denoted as iHc 1 . Note that the iHc 0 of the raw material powder before the corrosion resistance test (Sample S, later described Sample T), which is not surface-treated and serves as a reference, was taken as iHc S.

 また、各試料について、被覆処理前・後の減磁率(保磁力の低下率):ΔiHcS0=(iHc-iHc)/iHc 、耐食試験前・後の減磁率:ΔiHc01=(iHc-iHc)/iHc 、総合的な減磁率:ΔiHcS1=(iHc-iHc)/iHc をそれぞれ求めた。それらの百分率も表1に併せて示した。また、各減磁率(%)と最高加熱温度(焼成工程の有無に拘わらず「焼成温度」という。)の関係を図1A~図1C(各図を併せて単に「図1」という。)にそれぞれ示した。 Further, for each sample, demagnetization rate (decrease rate of coercive force) before and after coating treatment: ΔiHc S0 = (iHc 0 - iHc S )/iHc S , demagnetization rate before and after corrosion resistance test: ΔiHc 01 = (iHc 1 -iHc 0 )/iHc 0 and total demagnetization rate: ΔiHc S1 =(iHc 1 -iHc S )/iHc S were obtained. Their percentages are also shown in Table 1. Also, the relationship between each demagnetization rate (%) and the maximum heating temperature (referred to as "firing temperature" regardless of the presence or absence of the firing process) is shown in FIGS. shown respectively.

 なお、焼成工程を施さなかった試料1、2と、被覆処理をしていない試料S(原料粉末のまま)とについても、磁気特性および減磁率を表1に併せて示した。また試料S、1、2の各減磁率は、図1に示した焼成温度が20℃、80℃、120℃の位置へ順にプロットした。 Table 1 also shows the magnetic properties and demagnetization ratios of Samples 1 and 2, which were not subjected to the firing process, and Sample S, which was not subjected to coating treatment (as raw material powder). The demagnetization ratios of samples S, 1 and 2 are plotted in order from the firing temperatures of 20° C., 80° C. and 120° C. shown in FIG.

 さらに、被覆処理方法が異なる試料Cについても、磁気特性と減磁率を表1に併せて示した。また試料6と試料Cについて、減磁率:ΔiHcS1(%)を比較した棒グラフを図2に示した。 Further, Table 1 also shows the magnetic properties and demagnetization rate of Sample C, which is coated with a different method. FIG. 2 shows a bar graph comparing the demagnetization rate: ΔiHc S1 (%) of sample 6 and sample C. As shown in FIG.

《構造》
(1)観察
 被覆処理時の最高到達温度が異なる試料2、3、6の各粉末(耐食試験前)から無作為に抽出した粒子について、その表面近傍の断面を走査型透過型電子顕微鏡(STEM/株式会社日立ハイテク製HD-2700)とエネルギー分散型X線分析装置(アメテック株式会社製EDAX Octane T Ultra W)で観察した。断面試料の加工には電子ビーム加工観察装置(FIB-SEM/株式会社日立ハイテク社製NB5000)を用いた。その暗視野像と二次電子像を図3Aに、エネルギー分散型X線分析(EDS)に基づく元素マッピング(P、O、Nd)を図3Bにそれぞれ示した。なお、図3Aおよび図3B(両図を併せて単に「図3」という。)に示した観察像の倍率は8万倍である。
"structure"
(1) Observation For particles randomly extracted from each powder of samples 2, 3, and 6 (before the corrosion resistance test), which have different maximum temperatures during coating treatment, a cross section near the surface is examined with a scanning transmission electron microscope (STEM). / HD-2700 manufactured by Hitachi High-Tech Co., Ltd.) and an energy dispersive X-ray analyzer (EDAX Octane T Ultra W manufactured by Ametech Co., Ltd.). An electron beam processing observation device (FIB-SEM/NB5000 manufactured by Hitachi High-Tech Co., Ltd.) was used for processing the cross-sectional sample. Its dark field image and secondary electron image are shown in FIG. 3A, and elemental mapping (P, O, Nd) based on energy dispersive X-ray spectroscopy (EDS) is shown in FIG. 3B. Note that the magnification of the observation image shown in FIGS. 3A and 3B (both figures are simply referred to as "FIG. 3") is 80,000 times.

(2)測定
  試料
 図4に示した観察像(図3Aに示した2次電子像の低倍率(8千倍)で、広範囲(14μm×14μm)を観察した像)に基づいて、既述した方法により、皮膜断面中に観察された全てのボイド(空孔)について、各サイズ(最大幅)を測定した。その結果を図4に併せて示した。なお、試料6のボイドは、全て極微小であったため8000倍の低倍率では観察できなかった。そこで、他よりも10倍拡大したSTEM像(8万倍)に基づき、EDS像を参照しつつ測定した(図3参照)。
(2) Measurement Sample Based on the observation image shown in FIG. According to the method, each size (maximum width) was measured for all voids (holes) observed in the film cross section. The results are also shown in FIG. All the voids in sample 6 were extremely minute and could not be observed at a low magnification of 8000 times. Therefore, based on an STEM image (80,000 times) magnified 10 times more than others, the measurement was performed while referring to the EDS image (see FIG. 3).

《分析》
 試料2、3、6、Sの各粉末(耐食試験前)から無作為に抽出した各粒子について、表面付近の断面を走査型オージェ電子分光装置(AES/アルバック・ファイ株式会社製PHI700Xi)で分析した。こうして各粒子の表面付近(例えば深さ400nm程度)に存在する元素を定量分析した。その結果を図5に示した。
"analysis"
For each particle randomly extracted from each powder of samples 2, 3, 6, and S (before the corrosion resistance test), the cross section near the surface was analyzed with a scanning Auger electron spectrometer (AES/PHI700Xi manufactured by ULVAC-Phi, Inc.). bottom. Elements existing near the surface of each particle (for example, at a depth of about 400 nm) were quantitatively analyzed. The results are shown in FIG.

 図5に示す分析結果に基づいて、表面近傍域(深さ0~50nm)におけるNdのFeに対する原子割合(Nd/Fe)を算出して図6に示した。 Based on the analysis results shown in FIG. 5, the atomic ratio (Nd/Fe) of Nd to Fe in the near-surface region (0 to 50 nm depth) was calculated and shown in FIG.

《評価》
(1)耐食性
 表1および図1(特に図1C)から明らかなように、特定の焼成温度で被覆処理された磁石粉末は、腐食環境下でも減磁率が顕著に小さく、高い磁気特性を安定して発揮し得ることがわかった。
"evaluation"
(1) Corrosion resistance As is clear from Table 1 and Fig. 1 (especially Fig. 1C), magnet powder coated at a specific firing temperature has a remarkably small demagnetization rate even in a corrosive environment, and maintains high magnetic properties stably. It was found that

 図2から明らかなように、本発明に係る磁石粉末は、リン酸塩皮膜1層でコーティングされているだけにもかかわらず、従来の3層コーティングされた磁石粉末よりも、遙かに減磁率が小さかった。 As is clear from FIG. 2, although the magnet powder according to the present invention is coated with only one phosphate film, the demagnetization rate is much higher than that of the conventional three-layer-coated magnet powder. was small.

(2)組成
 図6からわかるように、皮膜の最表域に含まれる含有比(Nd/Fe)は、試料2、3と試料6では大きく相違した。すなわち、耐食試験前後の減磁率(ΔiHc01やΔiHcS1)が大きかった試料2、3では、皮膜の最表域にNdを多く含んでいた。一方、その減磁率が顕著に小さかった試料6では、皮膜の最表域に含まれるNdがかなり少なかった。従って、最表域におけるリン酸塩皮膜の組成分布が、磁石粒子の耐食性に大きく影響することがわかった。
(2) Composition As can be seen from FIG. 6, the content ratio (Nd/Fe) contained in the outermost surface region of the film was significantly different between Samples 2 and 3 and Sample 6. That is, samples 2 and 3, which had large demagnetization rates (ΔiHc 01 and ΔiHc S1 ) before and after the corrosion resistance test, contained a large amount of Nd in the outermost surface region of the film. On the other hand, in sample 6, whose demagnetization rate was remarkably small, the amount of Nd contained in the outermost surface region of the film was considerably small. Therefore, it was found that the composition distribution of the phosphate coating in the outermost surface region greatly affects the corrosion resistance of the magnet particles.

(3)構造
 図3から明らかなように、焼成温度を300℃とした試料6は、他の試料と異なり、皮膜中に目立つ大きなボイドやNd濃化部等は観られなかった。
(3) Structure As is clear from FIG. 3, Sample 6, which was fired at a temperature of 300° C., did not show conspicuous large voids or Nd-enriched portions in the film, unlike the other samples.

 具体的にいうと、試料6の皮膜には、極微小なボイドが4個しか観察されなかった。しかも、そのボイドの最大サイズは20nmであり、平均サイズは13nm以下と極微小であった。さらに試料6の皮膜は、ボイドが殆ど見られず、非常に緻密な構造であることもわかった。 Specifically, only four very small voids were observed in the film of sample 6. Moreover, the voids had a maximum size of 20 nm and an average size of 13 nm or less, which is extremely small. Furthermore, it was found that the film of Sample 6 had a very dense structure with almost no voids.

 一方、耐食性が劣る試料2、3の皮膜は、最大サイズが50nm超さらには100nm以上であるボイドが多く観られた。詳細な機序は明らかではないが、結果的に観て、被覆粒子の耐食性と皮膜構造の間には相関があると考えられる。 On the other hand, many voids with a maximum size of more than 50 nm and even more than 100 nm were observed in the films of samples 2 and 3, which had poor corrosion resistance. Although the detailed mechanism is not clear, it is conceivable that there is a correlation between the corrosion resistance of the coated particles and the film structure.

《考察》
 本発明の希土類磁石粉末が高耐食性を発揮する機序は定かではないが、以上の結果から推察されるその一例を図7に模式的に示した。先ず、未処理な原料粒子(試料S)の表面には、理論組成に対して多く含まれていたリッチなNdまたはその酸化物(「Nd酸化物」という。)が点在していると考えられる。このようなNdやNd酸化物が磁石粒子の磁気特性を低下(つまり腐食)させる大きな要因と考えられる(試料S)。
《Consideration》
Although the mechanism by which the rare-earth magnet powder of the present invention exhibits high corrosion resistance is not clear, one example of the mechanism inferred from the above results is schematically shown in FIG. First, it is thought that the surface of the untreated raw material particles (Sample S) is dotted with rich Nd or its oxide (referred to as "Nd oxide"), which was contained in a large amount relative to the theoretical composition. be done. Such Nd and Nd oxides are considered to be a major factor in degrading (that is, corroding) the magnetic properties of magnet particles (Sample S).

 このような原料粒子の表面にリン酸処理により皮膜(「リン酸塩皮膜」という。)を形成すると、耐食性は向上する。しかし、焼成温度が低いと、最表面付近に残存するNd酸化物が多く、耐食性の向上は不十分である(試料2、3)。 Corrosion resistance is improved by forming a film (referred to as a "phosphate film") on the surface of such raw material particles by phosphating. However, when the firing temperature is low, a large amount of Nd oxide remains near the outermost surface, and the improvement in corrosion resistance is insufficient (Samples 2 and 3).

 ところが、所定温度以上で焼成すると、理由は定かではないが、そのNd酸化物が皮膜の下層側へ移動し、最表面付近に残存するNd酸化物が顕著に減少して、耐食性が大幅に向上し得る(試料6)。下層側へ移動したNdが深い位置で、Nd酸化物として安定的に保持され得ることは、図5に示したNd濃度とO濃度からもわかる。なお、所定温度以下で焼成しているため、加熱による磁気特性の劣化は僅かである。こうして、磁気特性の劣化を顕著に抑止できる高耐食性の磁石粉末が得られたと考えられる。 However, when fired at a predetermined temperature or higher, the Nd oxide migrates to the lower layer side of the film for unknown reasons, and the Nd oxide remaining near the outermost surface is significantly reduced, greatly improving corrosion resistance. (Sample 6). It can be seen from the Nd concentration and O concentration shown in FIG. 5 that the Nd that has migrated to the lower layer side can be stably retained as Nd oxide at a deep position. It should be noted that the deterioration of the magnetic properties due to heating is slight because the magnetic properties are sintered at a predetermined temperature or lower. It is believed that, in this way, a highly corrosion-resistant magnet powder capable of remarkably suppressing deterioration of magnetic properties was obtained.

[第2実施例]
(1)試料の製作と測定
 第1実施例で示した処理工程後の加熱条件を種々変更した試料を製作した。なお、原料粉末には、第1実施例と製造ロットの異なる市販のNdFeB系異方性磁石粉末(愛知製鋼株式会社製マグファイン:MF-P15(Br:1.3T、iHc:1093kA/m、(BH)max:297kJ/m、平均粒径(VMD):119μm)を用いた。この磁石粉末を試料Tとした。
[Second embodiment]
(1) Fabrication and Measurement of Samples Samples were fabricated by variously changing the heating conditions after the treatment process shown in the first embodiment. The raw material powder used was a commercially available NdFeB-based anisotropic magnet powder (manufactured by Aichi Steel Co., Ltd.: MF-P15 (Br: 1.3 T, iHc: 1093 kA/m, (BH) max: 297 kJ/m 3 , average particle size (VMD): 119 μm).

 それらの耐食試験前後の磁気特性を測定し、その測定結果に基づいて減磁率(ΔiHc01やΔiHcS1)も算出した。各試料の加熱条件、磁気特性および減磁率をまとめて表2に示した。また、各試料に係る減磁率(ΔiHcS1)を図8に比較して示した。なお、特に断らない限り、試料の製作や測定は第1実施例(試料6)と同様に行った。 The magnetic properties of these samples were measured before and after the corrosion resistance test, and the demagnetization factors (ΔiHc 01 and ΔiHc S1 ) were calculated based on the measurement results. Table 2 summarizes the heating conditions, magnetic properties and demagnetization rate of each sample. FIG. 8 shows the demagnetization rate (ΔiHc S1 ) of each sample for comparison. Unless otherwise specified, samples were manufactured and measured in the same manner as in the first example (sample 6).

 表2に示した各試料の詳細は次の通りである。試料20では、予熱工程を行わなかった。試料21は試料6と同一である。試料22~24では、焼成工程の加熱時間を変更した。試料25では、焼成工程の雰囲気を酸化防止雰囲気(Arガス雰囲気)とした。 The details of each sample shown in Table 2 are as follows. Sample 20 was not preheated. Sample 21 is identical to Sample 6. For Samples 22 to 24, the heating time in the firing process was changed. In sample 25, the atmosphere in the firing process was an anti-oxidation atmosphere (Ar gas atmosphere).

(2)評価
 表2および図8から明らかなように、焼成温度が特定範囲内であれば、予熱工程の有無、焼成工程の時間や雰囲気等は、磁石粉末の耐食性(減磁率)に殆ど影響しないことがわかった。
(2) Evaluation As is clear from Table 2 and Fig. 8, if the firing temperature is within a specific range, the presence or absence of a preheating process, the time and atmosphere of the firing process, etc. have almost no effect on the corrosion resistance (demagnetization rate) of the magnet powder. I found out not to.

 以上から、リン酸処理後に本発明で示した温度域で加熱すれば、磁気特性の低下を抑制しつつ、耐食性に優れた希土類磁石粉末が得られることがわかった。 From the above, it was found that if the powder is heated in the temperature range specified in the present invention after the phosphoric acid treatment, it is possible to obtain a rare earth magnet powder that is excellent in corrosion resistance while suppressing deterioration in magnetic properties.

Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001

Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002

Claims (7)

 Nd、FeおよびBを含む磁石粒子とリン酸イオンを含む処理液とを接触させる処理工程と、
 該処理工程後の磁石粒子を250~350℃の焼成温度で加熱する焼成工程とを備え、
 P、OおよびFeを含む皮膜を有する磁石粒子からなる希土類磁石粉末の製造方法。
a treatment step of contacting magnet particles containing Nd, Fe and B with a treatment liquid containing phosphate ions;
a firing step of heating the magnet particles after the treatment step at a firing temperature of 250 to 350 ° C.,
A method for producing rare earth magnet powder comprising magnet particles having a film containing P, O and Fe.
 前記焼成工程は、酸化雰囲気下でなされる請求項1に記載の希土類磁石粉末の製造方法。 The method for producing rare earth magnet powder according to claim 1, wherein the firing step is performed in an oxidizing atmosphere.  前記焼成工程前に、前記焼成温度よりも低温で加熱する予熱工程をさらに備える請求項1または2に記載の希土類磁石粉末の製造方法。 The method for producing rare earth magnet powder according to claim 1 or 2, further comprising a preheating step of heating at a temperature lower than the firing temperature before the firing step.  皮膜を有する磁石粒子からなる希土類磁石粉末であって、
 該磁石粒子は、Nd、FeおよびBを含み、
 該皮膜は、P、OおよびFeを含み、
 該皮膜に含まれるNdのFeに対する原子割合である含有比(Nd/Fe)が、該皮膜の最表面から深さ10nmまでの最表域で0.5以下である希土類磁石粉末。
A rare earth magnet powder comprising magnet particles having a coating,
the magnet particles comprise Nd, Fe and B;
The coating contains P, O and Fe,
A rare earth magnet powder, wherein the content ratio (Nd/Fe), which is the atomic ratio of Nd to Fe contained in the coating, is 0.5 or less in the outermost region of the coating from the outermost surface to a depth of 10 nm.
 皮膜を有する磁石粒子からなる希土類磁石粉末であって、
 該磁石粒子は、Nd、FeおよびBを含み、
 該皮膜は、P、OおよびFeを含み、
 該皮膜に含まれるボイドの最大サイズは50nm以下である希土類磁石粉末。
A rare earth magnet powder comprising magnet particles having a coating,
the magnet particles comprise Nd, Fe and B;
The coating contains P, O and Fe,
A rare earth magnet powder, wherein the maximum size of voids contained in the film is 50 nm or less.
 前記磁石粒子は、磁石合金に水素処理して得られた異方性磁石粒子である請求項4または5に記載の希土類磁石粉末。 The rare earth magnet powder according to claim 4 or 5, wherein the magnet particles are anisotropic magnet particles obtained by hydrogen-treating a magnet alloy.  湿潤環境または油環境に曝されるボンド磁石に用いられる請求項4~6のいずれかに記載の希土類磁石粉末。 The rare earth magnet powder according to any one of claims 4 to 6, which is used for bonded magnets exposed to a wet environment or an oil environment.
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JP2011052277A (en) * 2009-09-02 2011-03-17 Sumitomo Metal Mining Co Ltd Rare-earth-iron-based magnet powder for bond magnet and production method therefor
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JP3882545B2 (en) * 2000-11-13 2007-02-21 住友金属鉱山株式会社 High weather-resistant magnet powder and magnet using the same
WO2008146368A1 (en) * 2007-05-30 2008-12-04 Shin-Etsu Chemical Co., Ltd. Process for producing highly anticorrosive rare earth permanent magnet and method of using the same
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