WO2023165473A1 - Single-crystal furnace air guide apparatus with reduced power consumption, and single-crystal furnace - Google Patents

Abstract

A single-crystal furnace air guide apparatus with reduced power consumption, and a single-crystal furnace. The single-crystal furnace air guide apparatus with reduced power consumption comprises: an air guide pipe, the air guide pipe comprising a partition plate partitioning the air guide pipe, and the air guide pipe being divided into an upper air guide pipe and a lower air guide pipe connected to the bottom of the upper air guide pipe; and an air guide pipe cover that is disposed at the top of the upper air guide pipe, covers the top of the upper air guide pipe, and forms a closed space together with the upper air guide pipe and the partition plate. The air guide pipe cover forms the closed space together with the upper air guide pipe and the partition plate, and the closed space is filled with graphite felt; these components match to form a heat preservation structure, so that when the heat inside the single-crystal furnace is discharged with air, the heat first passes through the air guide pipe cover, then passes through a heat insulation layer formed by the air guide pipe cover together with the air guide pipe and the graphite felt. Thus, the problem that the air directly carries the heat away, causing loss of thermal energy and the need for additional power compensation is avoided.

Description

A gas guide device for reducing power consumption for a single crystal furnace and a single crystal furnace

This application claims the priority of the Chinese patent application submitted to the China Patent Office on March 1, 2022, with the application number 202220433081.4, and the title of the invention is "A Gas Guidance Device for Power Consumption Reduction for Single Crystal Furnace", the entire content of which is incorporated by reference incorporated in this application.

technical field

The application belongs to the technical field of semiconductor material manufacturing industry, and in particular relates to a gas guide device for reducing power consumption of a single crystal furnace and a single crystal furnace.

Background technique

With the development of the solar photovoltaic industry, Czochralski monocrystalline silicon is a commonly used crystal pulling technology in this technical field. At present, the isometric time of the single crystal pulling process accounts for about 80% of the entire crystal pulling process, and the power consumption is generally high. The most power is consumed in the equal diameter process. Moreover, the single crystal furnace basically runs continuously, and the high power consumption not only causes high electricity bills for enterprises, but also is not conducive to the country's energy consumption policy.

At present, single crystal furnaces of different sizes have the problem of high power consumption. As the size of the thermal field increases, the need for feeding materials increases, and the running time also prolongs. The power consumption of the same diameter will naturally increase accordingly.

technical problem

The problem to be solved in this application is to provide a gas guide device for reducing power consumption for single crystal furnaces and single crystal furnaces, which can effectively solve the problem of high power consumption in current single crystal furnaces of different sizes, and solve the problem of increasing the size of the thermal field. , the feeding needs to increase, the running time will also be extended, and the equal-diameter power consumption will also increase accordingly.

technical solution

In the first aspect, in order to solve the above technical problems, the technical solution adopted in the embodiment of the present application is to provide a gas guide device for reducing power consumption for a single crystal furnace, which includes:

An air guide tube, the air guide tube includes a partition that cuts off the air guide tube, the air guide tube is divided into an upper air guide tube and a lower air guide tube connected to the bottom of the upper air guide tube;

The airway cover is placed on the top of the upper airway, covers the top of the upper airway, and forms a closed space with the upper airway and the partition.

In some embodiments, the side of the lower gas duct far away from the upper gas duct is connected to the exhaust channel of the single crystal furnace, and a groove is provided on the side close to the upper gas duct for gas to pass through. to exhaust the gas in the single crystal furnace.

In some embodiments, the groove is arranged at the connection position between the lower air duct and the partition.

In some embodiments, the radius of the groove is smaller than the radius of the lower airway.

In some embodiments, the surface at the bottom of the airway cover that is in contact with the upper airway tube is set in a stepped shape, and the surface at the top of the upper airway tube that is in contact with the airway tube cover is set as Reverse-stepped to match the airway cap.

In some embodiments, the fit between the airway cover and the upper airway tube is only in contact or with a gap.

In some embodiments, the enclosed space formed by the air duct cover, the upper air duct and the partition is filled with several layers of heat insulating materials.

In some embodiments, the insulating material is graphite felt.

In some embodiments, the graphite felt is PAN-based or viscose-based.

In some embodiments, the number of layers of the thermal insulation material is 3-5 layers.

In some embodiments, the airway cover is made of isostatic graphite.

In some embodiments, the material of the gas guide pipe is isostatic graphite.

In a second aspect, an embodiment of the present application provides a single crystal furnace, which includes the above-mentioned power consumption reducing gas guide device for a single crystal furnace.

Beneficial effect

Compared with the prior art, the embodiment of the present application adopts the above-mentioned technical scheme, so that the airway cover, the upper airway and the partition form a closed space, and the closed space is filled with graphite felt, and the cooperation of these parts can form a closed space. A thermal insulation structure, so that when the high temperature in the single crystal furnace is discharged with the gas, it first passes through the gas pipe cover, and passes through the heat insulation layer formed by the gas pipe cover, the gas pipe and the graphite felt, so as to avoid the heat loss caused by the gas directly taking away the heat. The problem of extra power compensation.

On the other hand, due to the adoption of the above-mentioned technical solution, the groove provided on the lower air guide pipe can discharge the gas in the single crystal furnace, as a vent, so that the air and inert gas in the single crystal furnace can be discharged, and the gas can be replaced at the same time. Cooperating with the above-mentioned thermal insulation structure, it can delay heat loss, greatly reduce the heat consumption, save production cost and improve certain work efficiency.

Description of drawings

Fig. 1 is a schematic cross-sectional structure diagram of a power consumption reducing gas guide device for a single crystal furnace according to an embodiment of the present application.

In the picture:
1. Air duct cover 2. Upper air duct 3. Partition
4. Lower air duct 5. Graphite felt 6. Groove.

Embodiments of the present invention

The application provides a gas guiding device for reducing power consumption of a single crystal furnace and a single crystal furnace. Below in conjunction with embodiment and accompanying drawing to this application For further clarification:

In the description of the embodiments of the present application, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the Describe, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and operate in a particular orientation, and thus should not be construed as limiting the application. In the description of this application, it should be noted that, unless otherwise clearly stipulated and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integrated Ground connection; it can be directly connected, or indirectly connected through an intermediary, and can be internally connected between two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application based on specific situations.

As shown in Fig. 1, a schematic cross-sectional structure diagram of a power consumption reduction gas guide device for a single crystal furnace, a power consumption reduction gas guide device for a single crystal furnace includes:

The air guide pipe, the air guide pipe includes a dividing plate 3 that cuts off the air guide pipe, and the air guide pipe is divided into an upper air guide pipe 2 and a lower air guide pipe 4 connected to the bottom of the upper air guide pipe 2; the shape of the partition plate 3 is the same as that of the air guide pipe The cross-sectional shape of the pipe is consistent, connected horizontally inside the air guide pipe, and at the upper middle part of the air guide pipe, near the top position, after the connection, the air guide pipe is divided into an upper air guide pipe 2 and a lower air guide pipe 4. The air duct 2 is connected to the air duct cover 1, and the lower air duct 4 is connected to the exhaust pipe of the single crystal furnace, which is used to connect the single crystal furnace so that the gas in the single crystal furnace enters the gas guide device; the material of the separator 3 is preferably selected Static graphite;

The airway cover 1 is placed on the top of the upper airway 2 , covers the top of the upper airway 2 , and forms a closed space with the upper airway 2 and the partition 3 .

The size of the airway cover 1 matches the size of the top of the upper airway 2, and is generally selected to be consistent with the upper airway 2; the airway cover 1 has a certain height, and is in the shape of a "冂" as a whole, with a certain space inside for The heat insulating material is filled, and the height is not limited, generally set to the height of 2-3 layers of heat insulating material; the material of the air duct cover 1 is consistent with that of the separator 3, preferably isostatic graphite.

The cooperation between the airway cover 1 and the upper airway 2 can be only in contact, or there can be a gap. The surface of the top of the trachea 2 in contact with the airway cover 1 is set in a reverse step shape that matches the airway cover 1. When the airway cover 1 covers the upper airway tube 2, the two contact surfaces fit together to stabilize the airway cover 1 It is placed on the upper airway tube 2, and no external screws or other components are needed to fix the airway tube cover 1.

Specifically, the side of the lower air duct 4 away from the upper air duct 2 is connected to the exhaust passage of the single crystal furnace, and the side close to the upper air duct 2 is provided with a groove 6 for the gas to pass through, which is used to discharge the gas from the single crystal furnace. gas. The material of the lower airway 4 is consistent with that of the upper airway 2, preferably isostatic graphite; the groove 6 can also be regarded as a gap at the top of the lower airway 4, the gap The height is not limited, generally similar to the height of the closed space, the radius of the groove 6 is not limited, preferably smaller than the radius of the lower air guide pipe 4, the smaller the groove 6, the slower the gas in the single crystal furnace is discharged, and the internal heat The smaller the loss, but it is more unfavorable for the renewal of the gas, so the size of the groove 6 needs to be set reasonably.

In some feasible embodiments, the groove 6 is arranged at the connection position between the lower air duct 4 and the partition 3 , that is, the top of the lower air duct 4 .

The closed space formed by the air guide tube cover 1, the upper air guide tube 2 and the partition plate 3 is filled with several layers of heat insulating materials, and the closed space and the internal heat insulating materials form a thermal insulation structure, which can be used for the gas discharged from the single crystal furnace. Blocking part of the gas from being discharged directly can delay the exhaust, so that it can play the role of heat preservation, reduce the internal heat loss, and prevent the gas from directly taking away the heat.

In some feasible embodiments, the thermal insulation material is graphite felt 5, wherein the graphite felt 5 can be PAN-based or viscose-based.

In some feasible embodiments, the number of layers of thermal insulation material is 3-5 layers. In fact, the number of layers can be selected according to the closed space formed by the air duct cover 1, the upper air duct 2 and the partition plate 3, preferably 3-5 layers. 5th floor.

In some feasible embodiments, the airway cover 1 is made of isostatic graphite.

In some feasible embodiments, the material of the air guide pipe is the same as that of the air guide tube cover 1, and is configured as isostatic graphite.

Enumerate two specific embodiments below:

Example 1

A gas guide device for reducing power consumption for a single crystal furnace, comprising:

The air guide pipe, the air guide pipe includes a partition 3 that cuts off the air guide pipe, and the air guide pipe is divided into an upper air guide pipe 2 and a lower air guide pipe 4 connected to the bottom of the upper air guide pipe 2;

The shape of the separator 3 is consistent with the cross-sectional shape of the air guide pipe, and it is horizontally connected to the inside of the air guide pipe, and in the upper part of the air guide pipe, after the connection, the air guide pipe is divided into an upper air guide pipe 2 and a lower air guide pipe 4, The upper air guide pipe 2 is connected to the air guide pipe cover 1, and the lower air guide pipe 4 is connected to the exhaust pipe of the single crystal furnace, which is used to connect the single crystal furnace so that the gas in the single crystal furnace enters the gas guide device; the material of the separator 3 is selected Static graphite;

The airway cover 1 is placed on the top of the upper airway 2, covers the top of the upper airway 2, and forms a closed space with the upper airway 2 and the partition 3;

The size of the airway cover 1 matches the size of the top of the upper airway 2; the airway cover 1 has a certain height, and the overall shape is a "冂" font, and there is a certain space inside, which is used to fill the heat insulation material, and the height is set to 2 The height of the first layer of heat insulating material; the material of the air duct cover 1 is consistent with that of the separator 3, which is isostatic graphite;

The cooperation between the airway cover 1 and the upper airway tube 2 is only in contact.

Specifically, the side of the lower air duct 4 away from the upper air duct 2 is connected to the exhaust passage of the single crystal furnace, and the side close to the upper air duct 2 is provided with a groove 6 for the gas to pass through, which is used to discharge the gas from the single crystal furnace. gas. The material of the lower airway 4 is consistent with that of the upper airway 2, which is isostatic graphite; the groove 6 can also be regarded as a gap at the top of the lower airway 4, and the height of the gap is consistent with the height of the closed space. The radius is smaller than the radius of the lower airway tube 4 .

The groove 6 is arranged at the connection position between the lower air duct 4 and the partition plate 3 , that is, the top of the lower air duct 4 .

The closed space formed by the air guide tube cover 1, the upper air guide tube 2 and the partition plate 3 is filled with several layers of heat insulating materials, and the closed space and the internal heat insulating materials form a thermal insulation structure, which can be used for the gas discharged from the single crystal furnace. Blocking part of the gas from being discharged directly can delay the exhaust, so that it can play the role of heat preservation, reduce the internal heat loss, and prevent the gas from directly taking away the heat.

The heat insulating material is graphite felt 5, wherein graphite felt 5 is PAN base.

The number of layers of heat insulation material is 4 layers.

Example 2

A gas guide device for reducing power consumption for a single crystal furnace, comprising:

The air guide pipe, the air guide pipe includes a partition 3 that cuts off the air guide pipe, and the air guide pipe is divided into an upper air guide pipe 2 and a lower air guide pipe 4 connected to the bottom of the upper air guide pipe 2;

The shape of the partition plate 3 is consistent with the cross-sectional shape of the air guide pipe, and it is horizontally connected to the inside of the air guide pipe, and at the middle and upper part of the air guide pipe, near the top position, the air guide pipe is divided into upper guide pipe after connection. The air pipe 2 and the lower air pipe 4, the upper air pipe 2 is connected to the air pipe cover 1, and the lower air pipe 4 is connected to the exhaust pipe of the single crystal furnace, which is used to connect the single crystal furnace so that the gas in the single crystal furnace enters the gas guide device Middle; the material of the separator 3 is static pressure graphite;

The airway cover 1 is placed on the top of the upper airway 2, covers the top of the upper airway 2, and forms a closed space with the upper airway 2 and the partition 3;

The size of the airway cover 1 matches the size of the top of the upper airway 2; the airway cover 1 has a certain height, and the overall shape is a "冂" font, and there is a certain space inside, which is used to fill the heat insulation material, and the height is not limited. It is generally set to the height of three layers of heat insulation materials; the material of the air duct cover 1 is the same as that of the partition 3, which is isostatic graphite;

The cooperation between the airway cover 1 and the upper airway tube 2 is set as a step on the surface where the bottom end of the airway cover 1 is in contact with the upper airway tube 2, and on the surface where the top of the upper airway tube 2 is in contact with the airway cover 1 It is set in a reverse step shape that matches the airway cover 1. When the airway cover 1 covers the upper airway tube 2, the two contact surfaces fit each other, and the airway cover 1 is placed on the upper airway tube 2 stably. Carry out external screws or other parts to fix the air duct cover 1 again.

Specifically, the side of the lower air duct 4 away from the upper air duct 2 is connected to the exhaust passage of the single crystal furnace, and the side close to the upper air duct 2 is provided with a groove 6 for the gas to pass through, which is used to discharge the gas from the single crystal furnace. gas. The material of the lower airway 4 and the upper guide The trachea 2 is consistent and is isostatic graphite; the groove 6 can actually be regarded as a gap at the top of the lower airway 4, the height of the gap is slightly greater than the height of the closed space, and the radius of the groove 6 is smaller than the radius of the lower airway 4 .

The groove 6 is arranged at the connection position between the lower air duct 4 and the partition plate 3 , that is, the top of the lower air duct 4 .

The closed space formed by the air guide tube cover 1, the upper air guide tube 2 and the partition plate 3 is filled with several layers of heat insulating materials, and the closed space and the internal heat insulating materials form a thermal insulation structure, which can be used for the gas discharged from the single crystal furnace. Blocking part of the gas from being discharged directly can delay the exhaust, so that it can play the role of heat preservation, reduce the internal heat loss, and prevent the gas from directly taking away the heat.

The heat insulating material is graphite felt 5, wherein graphite felt 5 is viscose base.

The number of layers of thermal insulation material is 5 layers.

The embodiments of the present application have been described in detail above, but the content described is only a preferred embodiment of the present application, and cannot be considered as limiting the implementation scope of the present application. All equal changes and improvements made according to the scope of application of this application should still belong to the scope of patent coverage of this application.

Claims (13)

A gas guide device for reducing power consumption for a single crystal furnace, characterized in that it includes: An air guide tube, the air guide tube includes a partition that cuts off the air guide tube, the air guide tube is divided into an upper air guide tube and a lower air guide tube connected to the bottom of the upper air guide tube; The airway cover is placed on the top of the upper airway, covers the top of the upper airway, and forms a closed space with the upper airway and the partition. According to claim 1, a gas guide device for reducing power consumption of a single crystal furnace is characterized in that: the side of the lower air guide pipe far away from the upper air guide pipe is connected to the exhaust channel of the single crystal furnace, close to One side of the upper gas duct is provided with a groove for gas to pass through, and is used to discharge the gas in the single crystal furnace. The gas guide device for reducing power consumption of a single crystal furnace according to claim 2, wherein the groove is arranged at a connection position between the lower air guide pipe and the partition plate. The power consumption reducing gas guide device for single crystal furnace according to claim 2 or 3, characterized in that: the radius of the groove is smaller than the radius of the lower gas guide pipe. According to any one of claims 1 to 4, a gas guiding device for reducing power consumption for a single crystal furnace, characterized in that: the surface at the bottom of the gas guiding tube cover that is in contact with the upper gas guiding tube is set as a step shape, and the surface on the top of the upper airway tube that is in contact with the airway tube cover is set in a reverse step shape that matches the airway tube cover. According to any one of claims 1 to 5, a gas guide device for reducing power consumption for a single crystal furnace is characterized in that: the cooperation between the air guide tube cover and the upper air guide tube is only in contact or there is a gap . According to any one of claims 1 to 6, a gas guiding device for reducing power consumption for a single crystal furnace is characterized in that: the air guiding tube cover, the upper gas guiding tube and the partition form a closed space Filled with several layers of insulating material. The gas guide device for reducing power consumption of a single crystal furnace according to claim 7, wherein the heat insulating material is graphite felt. The gas guide device for reducing power consumption of a single crystal furnace according to claim 8, wherein the graphite felt is PAN-based or viscose-based. The gas guide device for reducing power consumption of a single crystal furnace according to claim 7, characterized in that: the number of layers of the heat insulating material is 3-5 layers. The gas guide device for reducing power consumption of a single crystal furnace according to any one of claims 1 to 10, characterized in that: the material of the air guide tube cover is isostatic graphite. According to any one of claims 1 to 10, a gas guide device for reducing power consumption for a single crystal furnace is characterized in that: The material of the air guiding pipeline is isostatic graphite. A single crystal furnace, characterized in that it comprises the gas guide device for reducing power consumption of a single crystal furnace according to any one of claims 1-12.