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WO2023090679A1 - Dispositif d'inspection de fuite de pression numérique - Google Patents

Dispositif d'inspection de fuite de pression numérique Download PDF

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Publication number
WO2023090679A1
WO2023090679A1 PCT/KR2022/016465 KR2022016465W WO2023090679A1 WO 2023090679 A1 WO2023090679 A1 WO 2023090679A1 KR 2022016465 W KR2022016465 W KR 2022016465W WO 2023090679 A1 WO2023090679 A1 WO 2023090679A1
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WO
WIPO (PCT)
Prior art keywords
connection port
unit
gas
gas supply
auxiliary connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2022/016465
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English (en)
Korean (ko)
Inventor
이도연
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Individual
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Individual
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Filing date
Publication date
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Publication of WO2023090679A1 publication Critical patent/WO2023090679A1/fr
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Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration

Definitions

  • the present invention relates to a digital pressure leak tester.
  • a semiconductor device includes a fabrication (FAB) process of forming an electrical circuit on a silicon wafer used as a substrate, an electrical die sorting (EDS) process of inspecting electrical characteristics of semiconductor devices formed in the FAB process, and a semiconductor device. It is manufactured through a package assembly process for encapsulating and individualizing them with epoxy resin.
  • FAB fabrication
  • EDS electrical die sorting
  • various layers such as a silicon oxide layer, a polysilicon layer, an aluminum layer, a copper layer, etc. are formed on a substrate by chemical vapor deposition, physical vapor deposition, thermal oxidation, ion implantation ( It is formed through processes such as ion implantation and ion diffusion.
  • the object of the present invention is a digital pressure leak test device that is provided with a manifold unit to connect a plurality of pipes, detects gas pressure and temperature in the pipe, and enables integrated management. is providing
  • a digital pressure leak test device is located inside a housing having a plurality of pipes connected to one side and having a fixing member at the bottom, and using a change in capacitance to check the inside of the pipe.
  • a sensing unit that detects the gas pressure and detects whether or not there is an abnormality in the pipe using a change in the specific resistance of the conductor according to the temperature change, and stores the values of the gas pressure and temperature measured by the sensing unit and manages the history
  • a manifold unit located inside the control unit and the housing and composed of a connection port to which the plurality of pipes to which the sensing unit is connected are connected, a gas supply unit to which the connection port is connected, and brackets supporting both ends of the gas supply unit can include
  • a plurality of gas supply units are spaced apart at equal intervals between the brackets, and may include a connection unit connected from the outside of the brackets.
  • the manifold unit may further include an acceleration sensor connected to the connection part and detecting a positional movement of the gas supply unit due to an external impact.
  • connection port unit includes a plurality of connection ports, and each of the connection ports adjacent to each other may have different lengths.
  • connection port is connected to the gas supply unit and protrudes toward an upper portion of the housing, a second auxiliary connection port provided on the first auxiliary connection port, and a third auxiliary connection port accommodating the second auxiliary connection port.
  • Auxiliary connection ports may be included.
  • the second auxiliary connection port passes through a connection member connecting the first auxiliary connection port and the third auxiliary connection port, a rotation member disposed inside the connection member, and one side and the other side of the connection member, and the lower surface of the rotation member. It may include a shaft fixed to.
  • the third auxiliary connection port may include a guide portion connected to the shaft to guide rotation of the rotating member.
  • the digital pressure leak test apparatus is provided with a manifold unit to connect a plurality of pipes, detects gas pressure and temperature in the pipes, and can perform integrated management.
  • FIG. 1 is a block diagram schematically showing an example configuration of a digital pressure leak test apparatus according to an embodiment of the present invention.
  • FIG. 2 is a diagram showing a state of use of a digital pressure leak test apparatus according to an embodiment of the present invention.
  • FIG. 3 is a view for explaining an example of the housing shown in FIG. 2 .
  • FIG. 4 is a view for explaining another example of the housing shown in FIG. 2;
  • FIG. 5 is a perspective view showing the manifold unit shown in FIG. 2;
  • FIG. 6 is an exploded perspective view of the connection port shown in FIG. 5;
  • FIG. 7 is a cross-sectional view showing a section I-I' of the connection port shown in FIG. 5;
  • FIG. 8 is a view for explaining the rotational motion of the shaft and the rotating member according to the vertical motion of the third auxiliary connection port shown in FIG. 7 .
  • FIG. 9 is an exemplary view for explaining a shaft and a third auxiliary connection port according to another embodiment of the present invention.
  • FIG. 10 is a view for explaining the rotational motion of the shaft and the rotating member according to the vertical motion of the third auxiliary connection port shown in FIG. 9 .
  • FIG. 11 is a plan view showing another manifold unit according to another example of the present invention.
  • FIG. 1 is a block diagram schematically showing an example configuration of a digital pressure leak test apparatus according to an embodiment of the present invention.
  • a digital pressure leak test apparatus 1000 includes a detection unit 100, a C/F conversion unit 110, an A/D conversion unit 120, a control unit ( 200), a transmission unit 300, a display unit 400 and an alarm generating unit 500.
  • the sensing unit 100 may detect a gas pressure using a change in capacitance and detect a temperature using a change in a specific resistance value of a conductor according to a change in temperature.
  • the C/F conversion unit 110 may change the value of the detected temperature from Celsius to Fahrenheit or from Fahrenheit to Celsius according to an embodiment.
  • Both the detected gas pressure and temperature obtained by the sensing unit 100 may be analog values, and the A/D conversion unit 120 may convert these analog values into corresponding digital values.
  • the control unit 200 stores the gas pressure and temperature values measured by the sensing unit 100 (or the gas pressure and temperature values converted to digital values by the A/D conversion unit 120) and manages the history.
  • the stored value may be transmitted to a manager for management or to a device used by the manager through the transmission unit 300 .
  • the transmission unit 300 may be a wired or wireless communication network. That is, both wireless transmission and wired transmission may be possible. For example, wireless transmission can be performed using commercial CDMA communication. In addition, wireless short-range communication such as WiFi, or a wireless interface such as Bluetooth or wireless LAN for transmission to equipment such as a smartphone or tablet PC may be used.
  • the display unit 400 may display gas pressure and temperature values.
  • the display unit 400 may include a printer 410 capable of printing and displaying the history and a monitor 420 capable of displaying the history on a screen.
  • the alarm generating unit 500 may generate an alarm when it is determined that the value detected by the sensing unit 100 is not normal.
  • the alarm generating unit 500 may be composed of an alarm lamp 510 that emits red light to blink to inform an alarm when it is determined that the state of the pipe is not normal, or an alarm speaker 520 that generates an alarm. there is. In particular, it may be controlled to display the contents of the alert on the portable terminal 530 through a wireless network.
  • the configuration of the sensing unit 100, the C/F conversion unit 110, and the A/D conversion unit 120 are all implemented as one block (B) to detect gas Values of pressure and temperature may be transmitted to the control unit 200 .
  • the C/F conversion unit 110 and the A/D conversion unit 120 are separately shown in the drawing, these two conversion units may be included in the sensing unit 100 according to an implementation example, or a control unit ( 200) may be included and implemented.
  • the display unit 400 is shown individually in the drawing, it may be included in the function of the control unit 200 and implemented according to an implementation example.
  • a power source for supplying power to enable each component to operate may be further included.
  • it may include a means such as a lithium battery.
  • Such a function for managing battery power may be included in power, or may be implemented within any one of the above functional blocks.
  • FIG. 2 is a diagram showing a state of use of a digital pressure leak test apparatus according to an embodiment of the present invention.
  • the main gas pipe (P) and the semiconductor manufacturing apparatus (M) may be connected to each other via a system box (SB).
  • Numerous pipes are connected to the semiconductor manufacturing apparatus M, most of which are gas pipes.
  • Various types of gas are supplied to the semiconductor manufacturing apparatus M, and the flow of the gas is controlled through the system box SB.
  • the system box (SB) is installed in the opening formed on the floor of the working floor (CF).
  • the floor (F) of the working floor (CF) is generally formed as an access floor, and a plurality of access panels are connected to each other to form a floor surface. In particular, due to the standardized access panel, the size of the opening is fixed.
  • the system box (SB) is inserted into the opening in the working floor (CF) and installed and fixed.
  • the connection between the system box (SB), the main gas pipe (P) and the supply gas pipe (PS) is made in the equipment layer (MF) where the semiconductor manufacturing device (M) is installed.
  • the system box (SB) controls the flow of gas supplied to the semiconductor manufacturing apparatus (M), and gas is supplied due to replacement of the semiconductor manufacturing apparatus (M) when maintenance is required due to gas leakage from the pipe. If it is necessary to change the type and amount of supply, the gas flow is blocked in the system box (SB) and construction is performed.
  • the main gas pipe (P) may be connected to the digital pressure leak test device (1000).
  • the digital pressure leak test device 1000 may include a housing 105, a detection unit (not shown), a control unit (not shown), a display unit 400, an alarm generating unit 500 and a manifold unit 600. can
  • a plurality of pipes may be connected to the housing 105 .
  • a display unit 400 and an alarm generating unit 500 may be provided on one surface of the housing 105 .
  • a manifold unit 600 may be provided inside the housing 105 .
  • a sensing unit may be located inside the housing 105 .
  • the sensing unit may be respectively installed in a plurality of pipes (P) respectively connected to the connection ports of the manifold unit 600 .
  • the sensing unit may detect a gas pressure inside the pipe by using a change in capacitance, and detect whether or not there is an abnormality in the pipe by using a change in a specific resistance value of a conductor according to a change in temperature.
  • a control unit (not shown) may be connected to one side of the housing 105 .
  • the display unit 400 may be exposed to the outside of the housing, store gas pressure and temperature values measured by the sensing unit, and manage history.
  • the manifold unit 600 is located inside the housing 105, and includes a connection port to which a plurality of pipes P connected to each sensing unit are connected, a gas supply unit to which the connection port unit is connected, and a bracket supporting both ends of the gas supply unit.
  • the connection port of the manifold unit 600 may be exposed to one side of the housing 105 and connected to the main gas pipe P.
  • An exhaust valve for venting gas supplied through a regulator and a manifold unit 600 for maintaining a gas pressure to be supplied at a constant set value may be further provided outside the housing 105 according to an example.
  • An embodiment of the present invention is provided with a manifold unit to connect a plurality of pipes, detect gas pressure and temperature in the pipes, and can perform integrated management.
  • This manifold unit will be described in detail with reference to the following drawings.
  • FIG. 3 is a view for explaining an example of the housing shown in FIG. 2 .
  • the housing 105 may further include a plurality of fixing members 106 .
  • wheels 107 may be attached to the bottom surface of the housing 105.
  • a stopper 108 for fixing the housing 105 may be provided on the wheel 107 .
  • the fixing members 106 may be inserted into both sides of the housing 105 to be spaced apart from the wheels 107 .
  • the fixing member 106 may be provided on an inner lower surface of the housing 105 .
  • the housing 105 may be primarily fixed by the stopper 108 after moving to a place where the leak test is performed.
  • the control unit may move the fixing member 106 inserted into the lower inner side of the housing 105 toward the ground.
  • the bottom surface of the fixing member 106 may be formed wide to stably contact the ground.
  • the fixing member 106 may be pulled downward and fixed to the ground according to a control signal from the control unit. Accordingly, the housing 105 can be stably fixed to the ground.
  • the fixing member 106 is provided in one embodiment of the present invention, it is possible to prevent a change in pressure due to an impact from the outside during a leak test, enabling a more accurate leak test.
  • the housing 105 may further include a plurality of safety distance display units 109 .
  • the safety distance display unit 109 may be disposed along the outer circumference of the housing 105 . That is, the safety distance display unit 109 may be disposed along the rectangular circumference of the outer surface of the housing 105 .
  • the safety distance display unit 109 may be a laser or beam projector.
  • the safety distance display unit 109 directs the light source 109a to the ground within a radius of 100 to 200 meters where the housing 105 is fixed by a control signal from the control unit. can be investigated
  • the light source 109a may be in the form of a red laser band having a predetermined thickness.
  • the light source 109a may be a phrase such as “during examination, access prohibited”. Accordingly, it is possible to inform people other than the worker that the work is in progress, and to block the access of outsiders to prevent shock from the outside in advance. Accordingly, a more accurate leak test may be possible.
  • FIG. 4 is a view for explaining another example of the housing shown in FIG. 2;
  • fixing members 106 may be provided on both sides of the housing 105 .
  • the fixing member 106 may be formed to be curved from the side of the housing 105 toward the ground.
  • the fixing member 106 may include a first fixing member 106a and a second fixing member 106b.
  • One end of the first fixing member 106a may be inserted into the side surface of the housing 105, and the second fixing member 106b may be connected to the other end of the first fixing member 106a and fixed to the ground.
  • the control unit may move one end of the first fixing member 106a into which the housing 105 is inserted on the inner side in a lateral direction by a predetermined distance, and then move the second fixing member 106b to the ground.
  • the bottom surface of the second fixing member 106b may be formed wide to stably contact the ground. Accordingly, the housing 105 can be stably fixed to the ground. Accordingly, during the leak test, it is possible to prevent the pressure from being changed due to an impact from the outside, enabling a more accurate leak test.
  • FIG. 5 is a perspective view showing the manifold unit shown in FIG. 2;
  • the manifold unit 600 may be located inside or above the housing.
  • the manifold unit 600 may include a connection port 700 , a gas supply unit 800 , a bracket 900 and an acceleration sensor 950 .
  • connection port unit 700 may be connected to a plurality of pipes to which each sensing unit is connected.
  • the connection port part 700 is connected to the gas supply part 800 and may protrude toward the outside of the housing.
  • the connection port unit 700 may include 10 to 15 connection ports, and each of the 10 to 15 connection ports may be installed in a row on the upper surface of the gas supply unit 800 .
  • the lengths of one connection port and another connection port adjacent to each other may be formed to be different from each other. That is, each of the connection ports adjacent to each other may have different lengths.
  • the length of one connection port may be formed shorter than the length of another adjacent connection port. Accordingly, it is possible to prevent a collision between gases introduced into and discharged from the gas supply unit 800 .
  • the 10 to 15 connection ports may be formed of an upper connection port installed in a row on the upper surface of the gas supply unit 800 and a side connection port installed in a row on one side of the gas supply unit 800 .
  • the upper connection port and the side connection port may be arranged to have a zigzag shape. Accordingly, it is possible to further prevent collisions between gases introduced into and discharged from the gas supply unit 800 .
  • the gas supply unit 800 may be connected to the connection port unit 700 .
  • a plurality of gas supply units 800 are spaced apart at regular intervals between the brackets 900 and may include a connection unit 850 connected from the outside of the brackets 900 .
  • the gas supply unit 800 may be a cylindrical pipe.
  • Brackets 900 may be provided at both ends of the gas supply unit 800 .
  • the bracket 900 may support and fix both ends of the gas supply unit 800 .
  • the bracket 900 may include an upper bracket and a lower bracket.
  • the upper bracket and the lower bracket may include through-holes recessed into the inside so that the gas supply unit 800 can stably pass therethrough.
  • the through holes provided in the upper bracket and the lower bracket are connected to form one through hole, and the gas supply unit 800 passes through the through hole formed by the combination of the upper bracket and the lower bracket, and is provided by the bracket 900. It can be supported and fixed.
  • the upper bracket and the lower bracket may be bolted together.
  • the acceleration sensor 950 may be connected to the connection unit 850 .
  • the acceleration sensor 950 may detect a positional movement of the gas supply unit 800 due to an external impact. That is, the acceleration sensor 950 can sense that the gas supply unit 800 is shaken or its position is changed by an external impact. For example, when the location of the gas supply unit 800 is changed, an imbalance may occur in the pressure of the test gas flowing into the main gas pipe through the manifold unit 600 . According to an embodiment of the present invention, since the acceleration sensor 950 is provided, a test gas having a constant pressure can be injected, thereby improving the reliability of the test.
  • Figure 6 is an exploded perspective view of the connection port shown in Figure 5
  • Figure 7 is a cross-sectional view showing the I-I 'section of the connection port shown in Figure 5
  • Figure 8 is a third auxiliary connection port shown in Figure 7 It is a drawing for explaining the rotational motion of the shaft and the rotating member according to the vertical motion.
  • connection port 700 includes a first auxiliary connection port 710, a second auxiliary connection port 720, and a third auxiliary connection port 730.
  • the first auxiliary connection port 710 is connected to the gas supply unit and may protrude toward the top of the housing.
  • the first auxiliary connection port 710 may have a cylindrical shape.
  • An upper end of the first auxiliary connection port 710 may have a rectangular cross section connected to a cylinder, and may be connected to the second auxiliary connection port 720 .
  • the lower end of the first auxiliary connection port 710 may be in the shape of a square pillar having a rectangular cross section connected to a cylinder, and both sides of the lower end may be connected to a gas supply unit.
  • a first additional connection member 741 may be provided between the upper end of the first auxiliary connection port 710 and the second auxiliary connection port 720 .
  • first auxiliary connection port 710 and the second auxiliary connection port 720 can be more firmly fixed.
  • a hole having the same shape as the first auxiliary connection port 710 is formed in the center of the first additional connection member 741 so that the test gas can be transferred through the hole.
  • the second auxiliary connection port 720 may include a connection member 721 , a rotation member 722 , a rubber packing 723 , a shaft 725 and a bushing 726 .
  • the connecting member 721 may be provided on the first additional connecting member 741 .
  • the connection member 721 may be provided between the first auxiliary connection port 710 and the third auxiliary connection port 730 to connect the first auxiliary connection port 710 and the third auxiliary connection port 730 .
  • the connection member 721 may have a square cross-section in the form of a square pillar, and may include an upper connection member 721a and a lower connection member 721b.
  • the connection member 721 may form a hole in the center by a method such as MCT processing. Due to this, a hole may be formed close to a perfect circle.
  • the first auxiliary connection port 710 and the third auxiliary connection port 730 may be cylindrical pipes, and such pipes may be manufactured by injection molding, so that the circles are finely distorted and formed. gas may leak.
  • the connection member 721 may be manufactured by drilling a hole in a rectangular pillar and may be rounder than the first auxiliary connection port 710 and the third auxiliary connection port 730, which may be pipes. Through this, when the rotating member 722 is vertically disposed on the connection member 721 close to the perfect circle to move the gas, the gas can be easily moved. In addition, when the rotating member 722 is disposed horizontally to block the movement of gas, it is possible to prevent gas from leaking.
  • a through hole 721c may be formed between the upper connection member 721a and the lower connection member 721b, and the bushing 726 and the shaft 725 may be provided through the through hole 721c.
  • the diameter of the upper connection member 721a may be smaller than that of the lower connection member 721b. Accordingly, a bent portion may be formed by a step between the upper connection member 721a and the lower connection member 721b. Due to this, when the gas rises, it can pass through the bent part and rise flexibly, and a change in speed can occur, so that the gas can rise easily.
  • the upper end of the upper connection member 721a may protrude upward and be inserted into the third auxiliary connection port 730 . Accordingly, when the third auxiliary connection port 730 moves up and down, leakage of the test gas to the outside can be prevented.
  • the rotating member 722 may be disposed inside the connecting member 721 .
  • the rotating member 722 may be disposed at an inner lower end of the upper connecting member 721a.
  • the rotating member 722 may be disposed above the shaft 725.
  • the rotation member 722 may be a circular plate, and a coupling hole 722b spaced apart from the center may be formed.
  • the coupling hole 722b may coincide with the screw hole 725b of the shaft 725 located on the lower side of the rotating member 722 .
  • a screw inserted into the coupling hole 722b is inserted into the screw hole 725b so that the shaft 725 and the rotating member 722 can be coupled.
  • a curved portion 722a may be formed on an outer surface of the rotating member 722 so as to be curved inward.
  • the rubber packing 723 may be inserted and coupled to the curved portion 722a. That is, a rubber packing 723 may be inserted and coupled between the inner surface of the lower end of the upper connecting member 721a and the curved portion 722a.
  • the shaft 725 may pass through one side and the other side of the connecting member 721 and be fixed to the lower surface of the rotating member 722 .
  • the shaft 725 may be located at the center of the lower end of the rotating member 722, spaced apart from the center of the shaft 725, and may have a screw hole 725b formed therein.
  • a plurality of protrusions 725a may be provided on both end sides of the shaft 725 .
  • Two protrusions 725a may be provided at both ends of the shaft 725 according to an example. In this case, each of the two protrusions 725a may be spaced apart at 90° intervals in the circumferential direction of the shaft 725 with respect to the center of the shaft 725 .
  • one protrusion 725a may be provided on the upper side of the end side of the shaft based on the center of the shaft 725, and the other protrusion 725a may be provided on the upper side of the end side of the shaft based on the center of the shaft 725. It may be provided at a position 90 ° apart from.
  • a guide ball 733b may be connected to each end of the protrusion 725a.
  • the guide ball 733b connects the protrusion 725a and the third auxiliary connection port 730, and the guide ball 733b is connected to the guide groove 733a, thereby contributing to the vertical movement of the third auxiliary connection port 730. It is possible to guide the rotational motion of the shaft 725 by the Accordingly, the opening and closing of the rotating member 722 can be controlled by rotating the rotating member 722 fixed to the shaft 725 by the vertical movement of the third auxiliary connection port 730 .
  • the shaft 725 may be inserted into the through hole 721c formed on the outer surface of the connecting member 721, and the bushing 726 may be coupled to the outer surface of the shaft 725.
  • the upper and lower ends of the shaft 725 may be planar, and side surfaces may be circular. Due to this, it is easy to couple the rotating member 721 to the top of the shaft 725, and the shaft 725 can be smaller than the size of the hole formed in the bushing 726, so that there is a gap between the shaft 725 and the bushing 726. Since this is formed, rotation of the shaft 725 may be facilitated.
  • the bushing 726 may have a circular or quadrangular shape, and a hole may be formed in the center thereof.
  • the bushing 726 may be inserted into the through hole 721c, and the shaft 725 may be inserted into the bushing 726. Due to this, the shaft 725 and the connecting member 721 may be firmly coupled, and the shaft 725 may be rotatable.
  • the third auxiliary connection port 730 may receive the second auxiliary connection port 720 .
  • the third auxiliary connection port 730 may guide the rotational motion of the second auxiliary connection port 720 .
  • the third auxiliary connection port 730 may include a guide part 733 .
  • the guide part 733 may be connected to the shaft 725 to guide rotation of the rotating member 722 .
  • the guide part 733 may include a guide groove 733a and a guide ball 733b.
  • the guide groove 733a may be provided concavely on the inner surface of the third auxiliary connection port 730 .
  • the guide groove 733a may be connected to the guide ball 733b to guide the movement path of the plurality of protrusions 725a provided at both ends of the shaft 725.
  • the guide groove 733a is provided in an area corresponding to the protrusion 725a and may be concave in the circumferential direction of the shaft 725 to facilitate rotation of the protrusion 725a.
  • the guide groove 733a may be provided in a concave half ring shape so that the maximum rotation angle of the protrusion 725a is maintained at 90°. Accordingly, by controlling the rotation angle of the shaft 725 and the rotation member 722 to 90 °, it is possible to stably arrange the rotation member 722 horizontally or vertically.
  • the guide ball (733b) is connected to the projection (725a) and the guide groove (733a), as the third auxiliary connection port 730 is vertically moved, rotates the inside of the guide groove (733a), the projection (725a) ) can guide the rotation.
  • the shaft 725 coupled with the rotating member 722 may be connected to the third auxiliary connection port 730 through a protrusion 725a formed at one end.
  • the third auxiliary connection port 730 may include a guide part 733 for guiding rotational motion of the shaft 725 .
  • the protruding part 725a is connected to the guide part 733, and the opening and closing of the gas can be controlled by rotating the rotating member 722 fixed to the shaft 725 by the vertical movement of the third auxiliary connection port 730. That is, when the third auxiliary connection port 730 rises, the protruding portion 725a may move along the guide groove 733a provided concavely in the circumferential direction of the shaft 725 to correspond to the protruding portion 725a.
  • the shaft 725 can rotate, and the rotating member 722 can be vertically disposed by the rotation of the shaft 725.
  • the protrusion 725a may rotate in a direction opposite to the ascending direction along the guide groove 733a. Accordingly, the shaft 725 can rotate in the opposite direction, and the rotating member 722 is horizontally disposed by the rotation of the shaft 725 to block the inflow of gas.
  • one embodiment of the present invention is provided with a manifold unit to connect a plurality of pipes, detect gas pressure and temperature in the pipes, and perform integrated management.
  • the rotation member 722 is provided in each connection port 700 to block the flow of gas, it is possible to selectively inspect the pipe for leaks. Accordingly, the accuracy of the leak test can be improved and time can be shortened.
  • first auxiliary connection port 710 and the third auxiliary connection port 730 are connected by the second auxiliary connection port 720, opening and closing of the gas can be controlled, and a pipe that can be finely distorted can be controlled.
  • second auxiliary connection port 720 having a hole formed as gas is prevented from leaking to the outside, and the test gas can be discharged or blocked as rotation is controlled through the rotating member 722 .
  • FIG. 9 is an exemplary view for explaining a shaft and a third auxiliary connection port according to another embodiment of the present invention
  • FIG. 10 is a rotation of the shaft and the rotating member according to the vertical movement of the third auxiliary connection port shown in FIG. It is a drawing to explain movement.
  • the third auxiliary connection port 730 may include a shaft insertion portion 735 .
  • the shaft insertion portion 735 may be provided concavely from the inner surface to the outer surface of the third auxiliary connection port 730 .
  • a shaft 725 may be inserted into the shaft insertion portion 735 .
  • the shaft insertion part 735 may include a first insertion part 735a and a second insertion part 735b. Cross sections of the first insertion portion 735a and the second insertion portion 735b may have a rectangular shape.
  • the horizontal length of the first insertion portion 735a may be greater than the horizontal length of the second insertion portion 735b. Accordingly, the shaft insertion portion 735 may have a T-shape.
  • Rotation springs 727 may be provided on outer circumferential surfaces of both ends of the shaft 725 .
  • the rotation spring 727 is spaced apart from the rotation member 722 by a predetermined distance, and may be formed to surround outer circumferential surfaces of both ends of the shaft 725 .
  • one end of the rotation spring 727 may be fixed to the upper or lower surface of the shaft 725, and the other end may be fixed to the first fixing part 735c of the third auxiliary connection port 730.
  • the rotation spring 727 may be compressed. Accordingly, the shaft 725 may rotate and be inserted into the second insertion portion 735b. Accordingly, the rotation member 722 rotates together with the shaft 725 and is vertically disposed, and test gas may be introduced. In addition, when the third auxiliary connection port 730 descends, the shaft may be inserted into the first insertion portion 735a due to the nature of the condensed rotary spring 727 returning to its original shape. Accordingly, the rotating member 722 rotates together with the shaft 725 and is disposed horizontally, and the inflow of the test gas can be blocked.
  • the horizontal length of the first insertion portion 735a may be smaller than the horizontal length of the second insertion portion 735 . Accordingly, the shaft insertion portion 735 may have a ' ⁇ ' shape.
  • the rotation spring 727 may be compressed. Accordingly, the shaft 725 is rotated and inserted into the first insertion portion 735a, and the rotating member is vertically disposed to introduce test gas.
  • the third auxiliary connection port 730 rises, the shaft is inserted into the second insertion part 735b due to the nature of the condensed rotary spring 727 returning to its original form, and the rotary member is horizontally Arranged to block the inflow of the test gas.
  • Another embodiment of the present invention may further include an LED unit 780.
  • the LED unit 780 is fixed to the outer surface of the third auxiliary connection port 730, and the light emitting switch 781 may be connected to the inside of the third auxiliary connection port 730.
  • the light emitting switch 781 is connected to the LED unit 780 and may be provided above and below the first housing unit 735a.
  • the light emitting switch 781 may be made of conductive metal.
  • the light emitting switch 781 provided under the first accommodating part 735a is connected to the first fixing part 735c and may be connected to the end of the rotation spring 727.
  • the light emitting switch 781 provided above the first accommodating portion 735a will come into contact with the rotation spring 727 located above the shaft 725. can Accordingly, when the shaft 725 is inserted into the first insertion part 735a, since the rotation spring 727 connects the upper and lower parts of the light emitting switch 781, the LED part 780 can emit light. there is.
  • the rotation spring 727 and the first and second fixing parts may be conductive metal.
  • a power supply unit (not shown) for supplying power to the LED unit 780 may be additionally provided on the outer surface of the third auxiliary connection port 730 .
  • the power supply unit (not shown) may be a battery that is connected to the LED unit 780 and supplies and cuts power by the light emitting switch 781 . Accordingly, in another embodiment of the present invention, whether the rotating member 722 is opened or closed can be confirmed once again according to whether the LED unit 780 emits light.
  • Another embodiment of the present invention is provided with a manifold unit to connect a plurality of pipes, detect gas pressure and temperature in the pipes, and can perform integrated management.
  • the rotation member 722 is provided in each connection port 700 to block the flow of gas, it is possible to selectively inspect the pipe for leaks. Accordingly, the accuracy of the leak test can be improved and time can be shortened.
  • FIG. 11 is a plan view showing a manifold unit according to another example of the present invention.
  • a manifold unit 600 may include a plurality of gas supply units 800 .
  • the gas supply unit 800 may include a first gas supply unit 810 , a second gas supply unit 820 and a third gas supply unit 830 .
  • the first gas supply unit 810 , the second gas supply unit 820 , and the third gas supply unit 830 are spaced apart at equal intervals and may include a connection unit 850 connected from the outside of the bracket 900 .
  • Each of the first gas supply unit 810, the second gas supply unit 820, and the third gas supply unit 830 may be connected to a gas injection unit disposed at one end.
  • the first gas supply unit 810 may be connected to the first gas injection unit 811 and the second gas injection unit 812 with the first three-way valve 961 therebetween.
  • the first gas injection unit 811 and the second gas injection unit 812 may inject different types of gas.
  • the first auxiliary valve 961a and the third auxiliary valve 961c of the first three-way valve 961 are opened to supply the first gas. may flow into the first gas supply unit 810 .
  • the second auxiliary valve 961c may be maintained in a closed state.
  • the second auxiliary valve 961b and the third auxiliary valve 961c of the first three-way valve 961 are opened to supply the second gas. It may flow into the first gas supply unit 810 .
  • the first auxiliary valve 961a may be maintained in a closed state.
  • the first gas may be nitrogen gas and the second gas may be argon gas.
  • the leak test can be performed by injecting different types of gas
  • the leak test can be performed regardless of the material supplied to the pipe. That is, in the case of a pipe supplied with water, the pipe leak test is performed with nitrogen gas, and in the case of an acidic or basic solution other than water, the pipe leak test is performed with argon gas. Since it is possible to perform a leak test by injecting different gases by the configuration as described above, a more efficient leak test may be possible with one equipment.
  • each of the second gas supply unit 820 and the third gas supply unit 830 may be connected to the gas injection units 821 , 822 , 831 , and 832 disposed at one end.
  • the gas injection units 821, 822, 831, and 832 each have a second gas supply unit 820 and a third gas supply unit 830 and second and third three-way valves 962 and 963 ) can be connected.
  • each of the gas injection units 821 , 822 , 831 , and 832 may inject different gases into the second gas supply unit 820 and the third gas supply unit 830 , similarly to the first gas supply unit 810 . .
  • gas can be sequentially supplied to each of the first gas supply unit 810, the second gas supply unit 820, and the third gas supply unit 830.
  • the pipe connected to the first gas supply unit 810 is first tested for leakage by injecting gas into the first gas supply unit 810, and the pipe connected to the first gas supply unit 810 is leak-tested. Gas may be injected into the second gas supplier 820 while the test is being performed.
  • gas may be injected into the third gas supply unit 830 while a leak test is performed on a pipe connected to the second gas supply unit 820 .
  • a first gas blocker 971 is provided between the second gas supply unit 820 and the connection unit 850
  • a second gas blocker 972 is provided between the third gas supply unit 830 and the connection unit 850.
  • the first gas blocking unit 971 is disposed between the first gas supply unit 810 and the second gas supply unit 820, and the second gas is injected into the first gas supply unit 810 and the leak test is performed. It is possible to prevent gas from leaking into the supply unit 820 .
  • the second gas blocking unit 972 is disposed between the second gas supply unit 820 and the third gas supply unit 830, while gas is injected into the second gas supply unit 810 and the leak test is in progress.
  • 3 Gas supply unit 830 can prevent gas from leaking.
  • a leak test can be performed on a plurality of pipes simultaneously or sequentially, and a more efficient leak test can be performed by reducing the time required for gas to be supplied to the pipes.

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  • General Physics & Mathematics (AREA)
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Abstract

Un dispositif d'inspection de fuite de pression numérique, selon un mode de réalisation de la présente invention, peut comprendre : un boîtier comportant une pluralité de tuyaux raccordés à un de ses côtés et un élément de fixation disposé sur son extrémité inférieure; une unité de détection située à l'intérieur du boîtier, qui détecte la pression de gaz à l'intérieur des tuyaux à l'aide d'un changement de capacité, et détecte s'il existe une anomalie dans les tuyaux à l'aide d'un changement de la valeur de résistance spécifique d'un conducteur en fonction d'un changement de température; une unité de commande qui stocke les valeurs de pression de gaz et de température mesurées par l'unité de détection et gère son historique; et une unité de collecteur située à l'intérieur du boîtier et comprenant une unité d'orifice de raccordement à laquelle la pluralité de tuyaux, auxquels l'unité de détection est raccordée, sont raccordés, une unité d'alimentation en gaz à laquelle l'unité d'orifice de raccordement est raccordée, et des supports permettant de supporter les extrémités respectives de l'unité d'alimentation en gaz.
PCT/KR2022/016465 2021-11-18 2022-10-26 Dispositif d'inspection de fuite de pression numérique Ceased WO2023090679A1 (fr)

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KR10-2021-0159525 2021-11-18
KR1020210159525A KR102522525B1 (ko) 2021-11-18 2021-11-18 디지털 압력 리크 검사장치

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KR102831415B1 (ko) * 2024-09-20 2025-07-08 최승남 Plc를 포함하는 리크 테스터

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05203100A (ja) * 1992-01-29 1993-08-10 Toshiba Corp ガス供給装置
KR101262187B1 (ko) * 2011-12-27 2013-05-14 최경택 방수커넥터용 리크테스터의 누설시험 방법
KR101483755B1 (ko) * 2013-07-10 2015-01-16 코원에너지서비스 주식회사 가스 배관 내 가스 압력 및 온도 정보 측정 장치
KR101901152B1 (ko) * 2018-02-09 2018-09-21 이도연 디지털 압력 리크 검사장치
KR20180128134A (ko) * 2017-05-23 2018-12-03 (주)진솔루션 지진 감지센서를 구비한 가스 서플라이 시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05203100A (ja) * 1992-01-29 1993-08-10 Toshiba Corp ガス供給装置
KR101262187B1 (ko) * 2011-12-27 2013-05-14 최경택 방수커넥터용 리크테스터의 누설시험 방법
KR101483755B1 (ko) * 2013-07-10 2015-01-16 코원에너지서비스 주식회사 가스 배관 내 가스 압력 및 온도 정보 측정 장치
KR20180128134A (ko) * 2017-05-23 2018-12-03 (주)진솔루션 지진 감지센서를 구비한 가스 서플라이 시스템
KR101901152B1 (ko) * 2018-02-09 2018-09-21 이도연 디지털 압력 리크 검사장치

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