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WO2023080026A1 - Release film for manufacturing ceramic green sheet - Google Patents

Release film for manufacturing ceramic green sheet Download PDF

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Publication number
WO2023080026A1
WO2023080026A1 PCT/JP2022/039881 JP2022039881W WO2023080026A1 WO 2023080026 A1 WO2023080026 A1 WO 2023080026A1 JP 2022039881 W JP2022039881 W JP 2022039881W WO 2023080026 A1 WO2023080026 A1 WO 2023080026A1
Authority
WO
WIPO (PCT)
Prior art keywords
ceramic green
film
release
green sheet
release layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/039881
Other languages
French (fr)
Japanese (ja)
Inventor
雄一郎 山本
悠介 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyobo Co Ltd filed Critical Toyobo Co Ltd
Priority to CN202280074167.5A priority Critical patent/CN118215579A/en
Priority to JP2023557969A priority patent/JP7727272B2/en
Priority to KR1020247010447A priority patent/KR20240053062A/en
Publication of WO2023080026A1 publication Critical patent/WO2023080026A1/en
Anticipated expiration legal-status Critical
Priority to JP2025129867A priority patent/JP2025156504A/en
Ceased legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/40Adhesives in the form of films or foils characterised by release liners
    • C09J7/401Adhesives in the form of films or foils characterised by release liners characterised by the release coating composition
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00Producing shaped prefabricated articles from the material
    • B28B1/30Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62218Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic films, e.g. by using temporary supports
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/06Non-macromolecular additives organic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J183/00Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
    • C09J183/04Polysiloxanes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/40Adhesives in the form of films or foils characterised by release liners
    • C09J7/405Adhesives in the form of films or foils characterised by release liners characterised by the substrate of the release liner
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2467/00Presence of polyester
    • C09J2467/005Presence of polyester in the release coating
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2483/00Presence of polysiloxane
    • C09J2483/005Presence of polysiloxane in the release coating

Definitions

  • the present invention relates to a release film for manufacturing ceramic green sheets, which has a polyester film and a release layer, and can be suitably used for manufacturing ultra-thin ceramic green sheets.
  • release film made by laminating a release layer on a polyester film as a base material has been used as a film for various processes.
  • release films for manufacturing ceramic green sheets are also used as process films for manufacturing ceramic green sheets that require high smoothness, such as laminated ceramic capacitors and ceramic substrates.
  • a ceramic green sheet is molded by coating a release film with a slurry containing a ceramic component such as barium titanate and a binder resin and drying the slurry.
  • a laminated ceramic capacitor is manufactured by laminating, pressing, firing, and applying external electrodes to the ceramic green sheets obtained by printing electrodes on molded ceramic green sheets and peeling them from the release film.
  • Patent Document 1 As a measure to make the release layer easy to release, as in Patent Document 1, polydimethylsiloxane having an alkenyl group, polydimethylsiloxane having a hydrosilyl group, and a platinum catalyst are used, and are formed by an addition reaction such as heat. A release film having a silicone film as a release layer has been proposed.
  • Patent Document 2 discloses a radical-curable composition containing a polyorganosiloxane having a reactive functional group such as an acryloyl group and a polyfunctional (meth)acrylic acid ester.
  • a release film having a release layer formed by curing a material has been proposed.
  • Patent Document 1 there is a tendency that it is difficult to achieve both the adhesion of the release layer to the substrate film and the release property of the surface, and the silicone coating falls off from the release layer in the process of manufacturing the ceramic green sheet. However, there was concern that the process would be contaminated.
  • the present inventors have found that, for a release layer cured by further adding an adhesion imparting agent, in particular, the ratio of the hydrogen bond component ⁇ SVh in the surface free energy ⁇ S is set within a predetermined range.
  • the present inventors have found that the above problem can be solved by controlling to , and have completed the present invention.
  • the present invention includes the following contents.
  • a release film for producing a ceramic green sheet having a polyester film and a release layer comprises a polysiloxane A having two or more alkenyl groups in the molecule, a polysiloxane B having two or more hydrosilyl groups in the molecule, and an adhesion imparting agent C.
  • a curable composition containing is a hardened layer of matter, The surface free energy ⁇ S (mJ/m 2 ) of the surface of the release layer and the hydrogen bond component ⁇ SVh (mJ/m 2 ) of ⁇ S satisfy the following formulas (a) and (b). release film for manufacturing ceramic green sheets. 1.0 ⁇ SVh/ ⁇ S*100 ⁇ 6.5 (a) ⁇ S ⁇ 30 (b)
  • adhesion imparting agent C is a silane coupling agent having one or more functional groups selected from the group consisting of vinyl groups, epoxy groups, acrylic groups, and methacrylic groups. Release film for green sheet production.
  • the curable composition contains 1% by mass or more and 10% by mass or less of the adhesion imparting agent C with respect to the total amount of the polysiloxane A and the polysiloxane B, [1] to [ 4]
  • the polyester film has a surface layer A that does not substantially contain inorganic particles,
  • the release layer is laminated on the surface layer A with a thickness of 0.005 ⁇ m or more and 0.1 ⁇ m or less,
  • [7] A method for manufacturing a ceramic green sheet by molding a ceramic green sheet using the release film for manufacturing a ceramic green sheet according to any one of [1] to [6], wherein the molded ceramic green sheet is A method for producing a ceramic green sheet having a thickness of 0.2 ⁇ m to 1.0 ⁇ m.
  • a release film for producing a ceramic green sheet which is excellent in release properties and which is less susceptible to transfer/drop-off of the release layer and poor adhesion.
  • the release film for producing a ceramic green sheet of the present invention (hereinafter sometimes simply referred to as "release film”) has a polyester film and a release layer, and the release layer is provided on at least one side of the polyester film. It is sufficient if it is provided.
  • an easy-adhesion layer, an antistatic layer, a smoothing layer, etc. may be provided between the release layer and the polyester film. Good adhesion is easily obtained. That is, a preferred embodiment is a release film in which a release layer is provided directly on a polyester film.
  • the release layer comprises a polysiloxane A having two or more alkenyl groups in the molecule, a polysiloxane B having two or more hydrosilyl groups in the molecule, and an adhesion imparting agent C.
  • a curable composition containing It is a hardened layer.
  • the release film of the present invention has the surface free energy ⁇ S (mJ/m 2 ) of the surface of the release layer, i.e., the surface opposite to the polyester film of the release layer, and the hydrogen bond component ⁇ SVh (mJ/m 2 ) of ⁇ S. ) satisfies the following formulas (a) and (b). 1.0 ⁇ SVh/ ⁇ S*100 ⁇ 6.5 (a) ⁇ S ⁇ 30 (b) First, the surface properties of the release layer specified by formulas (a) and (b) will be described.
  • the above formulas (a) and (b) include the surface free energy ⁇ S and its hydrogen bond component ⁇ SVh, and how to obtain them will be explained.
  • the surface free energy can be obtained by dropping each solvent such as water, methylene iodide, or ethylene glycol onto the release layer and measuring the angle (contact angle) between the droplet and the release layer after a certain period of time. . From the contact angle of each solvent, the surface free energy ⁇ S of the release layer and its hydrogen bond component ⁇ SVh are calculated using the Kitazaki-Hata equation.
  • a release film is fixed on a flat glass substrate, and 1.9 ⁇ L of water is dropped onto the release film. 60 seconds after the droplet stops, the angle formed by the droplet and the release layer is measured and defined as ⁇ 1 .
  • 0.9 ⁇ L of methylene iodide is dropped onto the release film. 30 seconds after the droplet has stopped, the angle formed by the droplet and the release layer is measured and defined as ⁇ 2 .
  • 0.9 ⁇ L of ethylene glycol is dropped onto the release film. 30 seconds after the droplet has stopped, the angle formed by the droplet and the release layer is measured and defined as ⁇ 3 .
  • the present inventors have found that when the surface free energy obtained by measuring the release layer under the above conditions satisfies the formulas (a) and (b), the ceramic slurry is applied to the release layer and dried.
  • the inventors have found that when the ceramic green sheet formed by the above method is peeled off, an extremely good peelability can be obtained.
  • the curability of the coating film is improved, and as a result, the release layer tends to have sufficient strength, and problems such as falling off of the release layer are less likely to occur. I found out.
  • the excellent releasability from the ceramic green sheet described above is due to the fact that the surface free energy in the release layer has a small amount of hydrogen bonding components. That is, it is considered that the prevention of hydrogen bonding between the hydroxyl group component in the binder contained in the ceramic green sheet and the hydrogen component, which is an unreacted component in the release layer, contributes to the easy peelability of the ceramic green sheet.
  • the ratio of hydrogen bond components contained in the surface free energy of the release layer is preferably 6.5% or less, more preferably 6.0% or less. It is more preferably 0% or less. When this ratio is 6.5% or less, the peel strength is good, and the ceramic green sheet is less likely to be deformed or damaged during peeling.
  • the lower limit of the ratio ( ⁇ SVh/ ⁇ S*100) is preferably 1.0% or more, more preferably 1.2% or more.
  • this ratio is 1.0% or more, the number of unreacted vinyl groups is small, the coating film tends to have sufficient strength, and problems such as detachment of the release layer are less likely to occur.
  • the surface free energy ⁇ s of the release layer is low. This is because when the surface free energy of the release layer is close to the surface free energy of the ceramic green sheet, the energy required to separate the release layer from the ceramic green sheet increases, resulting in poor peelability. Conceivable.
  • the surface free energy ⁇ s is desirably 30 mJ/m 2 or less, more preferably 25 mJ/m 2 or less, still more preferably 20 mJ/m 2 or less.
  • the lower limit of the surface free energy ⁇ s is not particularly limited, but from the viewpoint of ceramic slurry coating properties, the surface free energy ⁇ s is preferably 12 mJ/m 2 or more, more preferably 14 mJ/m 2 or more. preferable.
  • release layer For the material constituting the release layer of the release film, it is preferable to use the curable composition shown below in order to form the release layer that satisfies the physical properties described above. That is, the release layer is preferably formed from a layer obtained by curing the curable composition shown below.
  • the curable composition contains polysiloxane A having two or more alkenyl groups in the molecule, polysiloxane B having two or more hydrosilyl groups in the molecule, and adhesion-imparting agent C.
  • Polysiloxane A may have two or more alkenyl groups in side chains and/or terminals, preferably polyorganosiloxane having alkenyl groups in at least side chains, and polyorganosiloxane having alkenyl groups only in side chains. Siloxane is more preferred. Further, a copolymer containing a siloxane unit having an alkenyl group and a dialkylsiloxane unit or an alkylphenylsiloxane unit is preferable because it is easy to adjust the amount of alkenyl groups in one molecule while exhibiting releasability. .
  • the terminal silicon atom is preferably a trialkylsilane structure such as trimethylsilane.
  • alkenyl groups include alkenyl groups having 2 or more and 10 or less carbon atoms. By having such an alkenyl group, the strength of the release layer is excellent.
  • the alkenyl group is preferably an alkenyl group having 2 to 8 carbon atoms, more preferably an alkenyl group having 2 to 6 carbon atoms, and particularly preferably a vinyl group or a hexenyl group.
  • a plurality of alkenyl groups may be bonded to a silicon atom to which an alkenyl group is bonded, but preferably an alkenyl group and an alkyl group are bonded. As the alkyl group in that case, a methyl group or the like is preferable.
  • dialkylsiloxane units and the like contained in polysiloxane A are preferably exemplified by dimethylsiloxane units, phenylmethylsiloxane units, and the like.
  • polysiloxanes as described above examples include polysiloxanes represented by the following structural formula (1).
  • l, m and n are integers of 0 or more (where m+n is 2 or more). It is preferable because the cross-linking reaction proceeds favorably while exhibiting moldability, and the strength of the release layer is improved. From the same point of view, (m+n)/(l+m+n+2) is preferably 0.006 or more and 0.03 or less, more preferably 0.01 or more and 0.024 or less.
  • the above formula does not mean a block copolymer embodiment, but simply indicates that the total number of each unit is 1, m, and n. Therefore, the polysiloxane in the above formula may be a random copolymer or a block copolymer.
  • polysiloxane A one type of polysiloxane as described above may be used alone, or a polysiloxane having two or more different alkenyl groups in one molecule may be used. Also, two or more polysiloxanes having different structures, such as having different alkenyl groups, may be used in combination.
  • the weight average molecular weight of polysiloxane A is preferably 300,000 or more and 600,000 or less, and particularly preferably 400,000 or more and 550,000 or less.
  • the weight average molecular weight in this specification is the value of standard polystyrene conversion measured by the gel permeation chromatography (GPC) method.
  • the release layer after cross-linking has an appropriate coating film strength, which can more effectively prevent the coating film from coming off. Moreover, when the weight average molecular weight is 600,000 or less, the flatness of the coating film after drying is improved.
  • Polysiloxane B may have two or more hydrosilyl groups (groups in which hydrogen atoms are directly bonded to silicon atoms) in side chains and/or terminals, and is hydrogen polysiloxane having hydrosilyl groups in at least side chains. is preferred, and hydrogenpolysiloxane having hydrosilyl groups only in side chains is more preferred. Further, a copolymer containing a siloxane unit having a hydrosilyl group and a dialkylsiloxane unit or an alkylphenylsiloxane unit is preferable because it is easy to adjust the amount of hydrosilyl groups in one molecule while exhibiting releasability. .
  • a plurality of hydrogen atoms may be directly bonded to the silicon atom to which a hydrogen atom is directly bonded, but preferably a hydrogen atom and an alkyl group are bonded.
  • the alkyl group in that case, a methyl group or the like is preferable.
  • the terminal silicon atom is preferably a trialkylsilane structure such as trimethylsilane.
  • the dialkylsiloxane unit and the like contained in the polysiloxane B are preferably exemplified by a dimethylsiloxane unit, a phenylmethylsiloxane unit, and the like.
  • Examples of such hydrogenpolysiloxanes include polysiloxanes represented by the following structural formula (2).
  • o is an integer of 0 or more and p is an integer of 2 or more. It is preferable because the cross-linking reaction proceeds favorably and the strength of the release layer is improved. From the same point of view, (p)/(o+p+2) is preferably 0.3 or more and 1 or less.
  • the hydrogenpolysiloxane in the above formula may be a random copolymer or a block copolymer.
  • one of the above hydrogenpolysiloxanes may be used alone, or two or more hydrogenpolysiloxanes having different structures such as different numbers of hydrosilyl groups in one molecule may be used. They may be used together.
  • the weight average molecular weight of polysiloxane B is preferably 5,000 or more and 100,000 or less, and particularly preferably 7,000 or more and 20,000 or less.
  • the release layer after cross-linking has an appropriate coating film strength, making it possible to prevent the coating film from coming off.
  • the weight average molecular weight is 100,000 or less, the flatness of the coating film after drying is improved.
  • polysiloxane A and polysiloxane B preferably addition-polymerized in the presence of a platinum-based catalyst or the like, which will be described later, are the main components of the release layer.
  • "-" in the above functional groups indicates that the molecules are further connected.
  • R represents a C1-C8 alkylene group here.
  • the molar ratio between the amount of hydrosilyl groups possessed by the polysiloxane B and the amount of alkenyl groups possessed by the polysiloxane A satisfies the following formula (c) in the curable composition. 1.0 ⁇ Si-H/Si-A ⁇ 3.8 (c) (In the formula, Si—H represents the molar amount of hydrosilyl groups, and Si—A represents the molar amount of alkenyl groups.)
  • the release layer satisfies formula (a), and in order to satisfy this formula, it is preferable to adjust the amount of hydrosilyl groups possessed by polysiloxane B in the curable composition. It is desirable that the amount of hydrosilyl groups possessed by polysiloxane B is equal to the amount of alkenyl groups possessed by polysiloxane A and up to 3.8 times the molar amount. When the amount of hydrosilyl groups possessed by polysiloxane B is equal to or greater than the amount of alkenyl groups possessed by polysiloxane A, the coating film tends to have sufficient strength, and problems such as detachment of the release layer are less likely to occur. From this point of view, the molar ratio is more preferably 1.5 or more, and more preferably more than 2.0.
  • the amount of hydrosilyl groups possessed by polysiloxane B is 3.8 times or less than the amount of alkenyl groups possessed by polysiloxane A, the amount of hydrogen bond components contained in the surface free energy of the release layer becomes appropriate, and the peelability is improved. become good.
  • the molar ratio is more preferably 3.5 or less, and even more preferably 3.0 or less.
  • the mixing mass ratio (B/A) of polysiloxane A and polysiloxane B is preferably 0.5 or more and 5 or less, more preferably 0.9 or more and 3 or less. and preferably satisfies formula (c).
  • the polysiloxane A and the polysiloxane B react appropriately, and it is possible to prevent either component from precipitating on the surface of the release layer.
  • the release layer in the present invention contains adhesion imparting agent C as an essential component.
  • the adhesion-imparting agent tends to migrate between the polyester film and the release layer in the step of forming the release layer, thereby improving the adhesion between the polyester film and the release layer.
  • the adhesion-imparting agent desirably has a functional group that reacts with at least one of polysiloxane A or polysiloxane B in order to have adhesion to the silicone resin that is the release layer.
  • a functional group that reacts with at least one of polysiloxane A or polysiloxane B in order to have adhesion to the silicone resin that is the release layer.
  • it preferably has one or more functional groups selected from the group consisting of vinyl groups, epoxy groups, acrylic groups, and methacrylic groups that react with hydrosilyl groups.
  • the adhesion imparting agent is desirably a silane coupling agent in order to impart adhesion to the polyester film. If it is a silane coupling agent, it becomes possible to impart good adhesiveness (for example, the effect of hydrogen bonding) to a polyester film while maintaining compatibility with polysiloxane.
  • silane coupling agent those represented by the following general formula are preferable.
  • X 1 represents the above functional group, and a represents an integer of 1 or more and 3 or less. In particular, a is preferably 1.
  • R 1 represents a hydrolyzable group selected from an alkoxy group, an acyloxy group, a halogen, or an alkyl group.
  • an alkoxy group and an acyloxy group are preferable.
  • an alkoxy group an alkoxy group having 1 to 10 carbon atoms is preferable, an alkoxy group having 1 to 6 carbon atoms is more preferable, and a methoxy group and an ethoxy group are particularly preferable.
  • the acyloxy group is preferably an acyloxy group having 2 to 11 carbon atoms, more preferably an acyloxy group having 2 to 7 carbon atoms, and particularly preferably an acetoxy group.
  • a chloro group is preferred as the halogen.
  • an alkyl group having 1 to 6 carbon atoms is preferable.
  • (4-a) R 1s are bound to Si, and these R 1s may be of the same type or of different types. may In the present invention, it is preferable that at least one of the (4-a) R 1 's is an alkoxy group or an acyloxy group, and it is more preferable that all R 1 's are an alkoxy group or an acyloxy group.
  • silane coupling agents of the general formula may be used singly or in combination of two or more, and it is also possible to use a reactant obtained by reacting two or more silane coupling agents.
  • acetic acid, p-toluenesulfonic acid, or the like may be added to the silane coupling agent in order to improve the adhesion between the silane coupling agent and the polyester film.
  • the amount of the adhesion promoter added to the curable composition is desirably 1% by mass or more and 10% by mass or less, more preferably 2., based on the total amount of polysiloxane A and polysiloxane B. It is desirable to be 0% by mass or more and 8.0% by mass or less. When it is 1% by mass or more, the adhesion between the release layer and the substrate is good, and when it is 10% by mass or less, excessive adhesion The property-imparting agent is less likely to adversely affect the release layer, resulting in good flatness and releasability.
  • the curable composition for forming the release layer preferably further contains a catalyst D.
  • the catalyst is not particularly limited as long as it can accelerate the curing reaction of the curable composition, but platinum group metal compounds are preferred.
  • platinum group metal compounds include fine particle platinum, fine particle platinum adsorbed on a carbon powder carrier, chloroplatinic acid, alcohol-modified chloroplatinic acid, olefin complexes of chloroplatinic acid, palladium, rhodium, and the like. .
  • the curable composition contains such a catalyst, the curing reaction of the curable composition can proceed more efficiently.
  • the content of the catalyst D in the curable composition according to the present embodiment is about 1 ppm or more and 1000 ppm or less with respect to the total amount of solids other than the catalyst D from the viewpoint of adjusting the curing reaction rate to a suitable range. is preferred.
  • the curable composition may contain a reaction inhibitor, a solvent, a silicone resin having no reactive functional group, an antistatic agent, and the like.
  • the thickness of the release layer is preferably 0.005 ⁇ m or more and 0.1 ⁇ m or less, and more preferably 0.01 ⁇ m or more and 0.05 ⁇ m or less.
  • the thickness of the release layer is 0.005 ⁇ m or more, the thickness is sufficient to exhibit the function as a release layer.
  • the thickness of the release layer is 0.1 ⁇ m or less, the coating film is less likely to come off from the release layer.
  • the surface of the release layer is desirably flat so as not to cause defects in the ceramic green sheet coated and molded thereon. ) is preferably 100 nm or less. More preferably, the average surface roughness of the region is 5 nm or less and the maximum projection height is 80 nm or less. For example, the maximum protrusion height (Sp) may be 45 nm or less.
  • the surface roughness of the region is 7 nm or less and the maximum protrusion height is 100 nm or less, defects such as pinholes do not occur when forming the ceramic green sheet, and the yield is favorable, which is preferable. It can be said that the smaller the region surface average roughness (Sa) is, the more preferable it is. It can be said that the smaller the maximum protrusion height (Sp) is, the more preferable it is, but the maximum protrusion height (Sp) may be 1 nm or more, or 3 nm or more.
  • the polyester film used as the base film (hereinafter sometimes referred to as base film) in the present invention is a film containing polyester as a resin component, and preferably contains the most polyester in the resin component (for example, 90 mass % or more).
  • the polyester that constitutes the polyester film is not particularly limited, and it is possible to use a film formed from polyester that is commonly used as a release film base material.
  • Preferred are crystalline linear saturated polyesters comprising an aromatic dibasic acid component and a diol component, such as polyethylene terephthalate, polyethylene-2,6-naphthalate, polybutylene terephthalate, polytrimethylene terephthalate, or resins thereof. Copolymers based on constituents are more preferred.
  • a polyester film formed from polyethylene terephthalate is particularly suitable.
  • the polyethylene terephthalate preferably contains 90 mol % or more, more preferably 95 mol % or more of repeating units of ethylene terephthalate, and may be copolymerized with other dicarboxylic acid components and diol components in small amounts.
  • dicarboxylic acid components and diol components in small amounts.
  • one produced only from terephthalic acid and ethylene glycol is preferable.
  • known additives such as antioxidants, light stabilizers, ultraviolet absorbers, crystallization agents, etc. may be added within limits that do not impair the effects of the release film of the present invention.
  • the polyester film is preferably a biaxially oriented polyester film because of its high bidirectional elastic modulus.
  • the intrinsic viscosity of the polyethylene terephthalate film is preferably 0.50 dl/g or more and 0.70 dl/g or less, more preferably 0.52 dl/g or more and 0.62 dl/g or less.
  • the intrinsic viscosity is 0.50 dl/g or more, it is preferable because many breakages do not occur in the stretching process.
  • it is 0.70 dl/g or less the cutting performance is good when cutting into a predetermined product width, and dimensional defects do not occur, which is preferable.
  • polyester film may mean a (laminated) polyester film having a surface layer A and a surface layer B.
  • the method for producing the polyester film in the present invention is not particularly limited, and conventionally commonly used methods can be used.
  • the polyester can be melted by an extruder, extruded into a film, cooled by a rotating cooling drum to obtain an unstretched film, and biaxially stretched to obtain the unstretched film.
  • the biaxially stretched film can be obtained by a method of sequentially biaxially stretching a longitudinally or laterally uniaxially stretched film in the lateral direction or longitudinal direction, or by a method of simultaneously biaxially stretching an unstretched film in the longitudinal direction and the lateral direction. I can.
  • the stretching temperature during stretching of the polyester film is preferably at least the secondary transition point (Tg) of the polyester. It is preferable that the film is stretched 1- to 8-fold, particularly 2- to 6-fold, in each of the longitudinal and transverse directions.
  • the thickness of the polyester film is preferably 12 ⁇ m or more and 50 ⁇ m or less, more preferably 15 ⁇ m or more and 38 ⁇ m or less, and still more preferably 19 ⁇ m or more and 33 ⁇ m or less. If the thickness of the film is 12 ⁇ m or more, it is preferable because there is no risk of deformation due to heat during film production, processing, and molding. On the other hand, if the thickness of the film is 50 ⁇ m or less, the amount of the film to be discarded after use is not excessively increased, which is preferable for reducing the environmental load.
  • the above polyester film substrate may be a single layer or a multilayer of two or more layers.
  • the base film may be a polyester film having a surface layer A substantially free of particles with a particle size of 1.0 ⁇ m or more and a surface layer B containing particles.
  • the surface layer A does not substantially contain inorganic particles having a particle size of 1.0 ⁇ m or more.
  • the surface layer A may contain particles with a particle size of less than 1.0 ⁇ m and 1 nm or more.
  • the surface layer A does not substantially contain particles having a particle size of 1.0 ⁇ m or more, such as inorganic particles, it is possible to reduce the occurrence of problems due to transfer of the particle shape in the base material to the resin sheet.
  • the surface layer A does not contain particles with a particle size of less than 1.0 ⁇ m, so that it is possible to more effectively suppress the transfer of the particle shape in the base material to the resin sheet and the occurrence of problems.
  • the polyester film substrate is preferably a laminated film having a surface layer A substantially free of inorganic particles on at least one side.
  • the surface layer A which does not substantially contain particles with a particle size of less than 1.0 ⁇ m, substantially does not contain particles with a particle size of 1.0 ⁇ m or more.
  • substantially free of particles means, for example, in the case of inorganic particles of less than 1.0 ⁇ m, when the inorganic elements are quantified by fluorescence X-ray analysis, it is 50 ppm or less, preferably 10 ppm. Hereinafter, most preferably, it means a content below the detection limit. Even if particles are not actively added to the film, contaminants derived from foreign substances and dirt adhering to the raw material resin or the lines and equipment in the film manufacturing process peel off and enter the film. This is because Further, "substantially free of particles with a particle size of 1.0 ⁇ m or more" means that particles with a particle size of 1.0 ⁇ m or more are intentionally not included.
  • a surface layer B that can contain inorganic particles, etc. on the opposite side of the surface layer A that does not substantially contain inorganic particles.
  • the layer on the side where the release layer is applied is layer A
  • the layer on the opposite side is layer B
  • the core layer other than these is layer C.
  • the layer configuration in the thickness direction is release layer / A / B, or a laminated structure such as release layer/A/C/B.
  • the C layer may have a multi-layer structure.
  • the surface layer B may not contain inorganic particles. In that case, it is preferable to provide a coating layer D containing at least inorganic particles and a binder on the surface layer B in order to impart lubricity for winding the film into a roll.
  • the surface layer B which forms the surface opposite to the surface to which the release layer is applied, preferably contains inorganic particles from the viewpoint of film slipperiness and ease of air release.
  • inorganic particles from the viewpoint of film slipperiness and ease of air release.
  • silica particles and/or calcium carbonate particles are preferably used.
  • the content of the inorganic particles contained in the surface layer B is preferably 5000 ppm or more and 15000 ppm or less in total of the inorganic particles.
  • the area surface average roughness (Sa) of the film of the surface layer B is preferably in the range of 1 nm or more and 40 nm or less. More preferably, it is in the range of 5 nm or more and 35 nm or less.
  • the total amount of silica particles and/or calcium carbonate particles is 5000 ppm or more and Sa is 1 nm or more, when the film is wound into a roll, air can be released uniformly, resulting in a good roll shape and good flatness. , suitable for the production of ultra-thin ceramic green sheets.
  • the total amount of silica particles and/or calcium carbonate particles is 15000 ppm or less and Sa is 40 nm or less, aggregation of the lubricant is difficult to occur and coarse protrusions cannot be formed, so that the quality is stable when manufacturing an ultra-thin ceramic green sheet. and preferred.
  • inactive inorganic particles and/or heat-resistant organic particles can be used in addition to silica and/or calcium carbonate. More preferably, calcium carbonate particles are used. Inorganic particles that can also be used include alumina-silica composite oxide particles, hydroxyapatite particles, and the like. Examples of heat-resistant organic particles include crosslinked polyacrylic particles, crosslinked polystyrene particles, and benzoguanamine particles. When silica particles are used, porous colloidal silica is preferable, and when calcium carbonate particles are used, light calcium carbonate surface-treated with a polyacrylic acid-based polymer compound is preferable from the viewpoint of preventing the lubricant from falling off. .
  • the average particle size of the inorganic particles added to the surface layer B is preferably 0.1 ⁇ m or more and 2.0 ⁇ m or less, and particularly preferably 0.5 ⁇ m or more and 1.0 ⁇ m or less. If the average particle size of the inorganic particles is 0.1 ⁇ m or more, the slipperiness of the release film is good, which is preferable. Further, when the average particle size is 2.0 ⁇ m or less, there is no fear of adversely affecting the smoothness of the surface of the release layer, and thus there is no fear of generating pinholes in the ceramic green sheet, which is preferable.
  • the average particle diameter of the particles is measured by observing the cross section of the film after processing with a scanning electron microscope, observing 100 particles, and taking the average value as the average particle diameter.
  • the shape of the particles is not particularly limited as long as it satisfies the object of the present invention, and spherical particles and irregularly shaped non-spherical particles can be used.
  • the particle diameter of amorphous particles can be calculated as a circle equivalent diameter.
  • the circle-equivalent diameter is a value obtained by dividing the observed particle area by the circular constant ( ⁇ ), calculating the square root, and doubling the result.
  • the surface layer A which is the layer on which the release layer is provided, in order to prevent contamination of inorganic particles such as lubricants.
  • the thickness ratio of the surface layer A which is the layer on which the release layer is provided, is preferably 20% or more and 50% or less of the total layer thickness of the base film. If it is 20% or more, the inside of the film is less likely to be affected by the particles contained in the surface layer B, etc., and it is easy for the region surface average roughness Sa to satisfy the above range, which is preferable.
  • the total thickness of the base film is 50% or less of the total thickness of the base film, the ratio of the recycled raw material used in the surface layer B can be increased, and the environmental load is small, which is preferable.
  • a film before stretching or after uniaxial stretching is applied to the surface of the surface layer A and / or surface layer B in the film forming process.
  • a coating layer D may be provided on the surface, and corona treatment or the like may be applied.
  • the surface layer B does not contain particles
  • the means for providing the main coat layer D is not particularly limited, but it is preferably provided by a so-called in-line coating method in which coating is performed during film formation of the polyester film. Further, in the case of providing a coating layer D that provides slipperiness on the surface of the polyester film on which the release layer is not laminated, the polyester film does not need to have the surface layers A and B, and inorganic particles are not included. It may consist of a single-layer polyester film that does not contain substantially.
  • the area surface average roughness (Sa) of the surface layer B is preferably 40 nm or less, more preferably 35 nm or less, and still more preferably 30 nm or less.
  • the surface Sa is measured on the surface on which the coat layer D is laminated.
  • it is preferably in the same range as the region surface average roughness (Sa) of the surface layer B described above.
  • At least a binder resin and particles are contained in the coat layer D on the side of the polyester film on which the release layer is not laminated.
  • the binder resin constituting the easy-smooth coating layer is not particularly limited, but specific examples of polymers include polyester resins, acrylic resins, urethane resins, polyvinyl resins (polyvinyl alcohol, etc.), polyalkylene glycol, polyalkyleneimine, and methyl cellulose. , hydroxycellulose, starches, and the like.
  • polyester resins, acrylic resins, and urethane resins are preferably used from the viewpoint of particle retention and adhesion.
  • polyester resin is particularly preferable in consideration of compatibility with the polyester film.
  • the binder polyester is preferably a copolymerized polyester.
  • the polyester resin may be modified with polyurethane.
  • Urethane resin is another preferable binder resin that constitutes the easy-slip coating layer on the polyester base film.
  • Urethane resins include polycarbonate polyurethane resins.
  • polyester resins and polyurethane resins may be used in combination, and other binder resins may be used in combination.
  • the slippery coating layer may contain a cross-linking agent to form a crosslinked structure in the slippery coating layer.
  • a cross-linking agent By containing a cross-linking agent, it becomes possible to further improve adhesion under high temperature and high humidity conditions.
  • Specific cross-linking agents include urea-based, epoxy-based, melamine-based, isocyanate-based, oxazoline-based, carbodiimide-based, aziridine and the like.
  • a catalyst or the like can be appropriately used as necessary in order to accelerate the cross-linking reaction.
  • the easy-slip coating layer preferably contains lubricant particles in order to impart slipperiness to the surface.
  • the particles may be inorganic particles or organic particles, and are not particularly limited, and include (1) silica, kaolinite, talc, light calcium carbonate, heavy calcium carbonate, zeolite, alumina, Barium sulfate, carbon black, zinc oxide, zinc sulfate, zinc carbonate, zirconium oxide, titanium dioxide, satin white, aluminum silicate, diatomaceous earth, calcium silicate, aluminum hydroxide, hydrated halloysite, calcium carbonate, magnesium carbonate, calcium phosphate, hydroxide inorganic particles such as magnesium and barium sulfate; Examples include organic particles such as isoprene, methyl methacrylate/butyl methacrylate, melamine, polycarbonate, urea, epoxy, urethane, phenol, diallyl phthalate, and polyester. Silica is particularly preferably used to impart lubric
  • the average particle size of the particles is preferably 10 nm or more, more preferably 20 nm or more, and still more preferably 30 nm or more.
  • the average particle size of the particles is 10 nm or more, it is preferable because the particles are less likely to aggregate and the lubricity can be ensured.
  • the average particle size of the particles is preferably 1000 nm or less, more preferably 800 nm or less, and even more preferably 600 nm or less.
  • the average particle diameter of the particles is 1000 nm or less, the transparency is maintained and the particles do not fall off, which is preferable.
  • a mixture of small particles having an average particle diameter of about 10 nm or more and 270 nm or less and large particles having an average particle diameter of about 300 nm or more and 1000 nm or less can also be used, which will be described later. It is preferable to reduce the average length (RSm) of the roughness curve element while keeping the roughness (RP) small, and to achieve both slipperiness and smoothness, particularly preferably small particles of 30 nm or more and 250 nm or less, It is to use large particles having an average particle size of 350 nm or more and 600 nm or less. When small particles and large particles are mixed, it is preferable that the mass content of small particles is larger than the mass content of large particles with respect to the total solid content of the coating layer.
  • the method for forming the release layer is not particularly limited. is removed by drying and then cured.
  • the drying temperature for solvent drying is preferably 50° C. or higher and 120° C. or lower, and preferably 60° C. or higher and 100° C. or lower. more preferred.
  • the drying time is preferably 30 seconds or less, more preferably 20 seconds or less.
  • the active energy ray used at this time an ultraviolet ray, an electron beam, an X-ray, or the like can be used, but the ultraviolet ray is preferable because it is easy to use.
  • the amount of ultraviolet light to be irradiated is preferably 30 mJ/cm 2 or more and 300 mJ/cm 2 or less, more preferably 30 mJ/cm 2 or more and 200 mJ/cm 2 or less.
  • the curing of the composition proceeds sufficiently, and when it is 300 mJ/cm 2 or less, the processing speed can be improved, so that the release film can be produced economically. preferable.
  • the surface tension of the coating liquid when applying the release layer is not particularly limited, but is preferably 30 mN/m or less.
  • any known coating method can be applied, for example, a roll coating method such as a gravure coating method or a reverse coating method, a bar coating method such as a wire bar method, a die coating method, a spray coating method, and an air knife.
  • a roll coating method such as a gravure coating method or a reverse coating method
  • a bar coating method such as a wire bar method
  • a die coating method such as a die coating method
  • a spray coating method such as a spray coating method
  • an air knife a coating method for example, a coating method for example, a roll coating method such as a gravure coating method or a reverse coating method, a bar coating method such as a wire bar method, a die coating method, a spray coating method, and an air knife.
  • a conventionally known method such as a coating method can be used.
  • the release film for producing ceramic green sheets of the present invention is suitably used for producing ceramic green sheets.
  • the method for producing a ceramic green sheet of the present invention is a method for producing a ceramic green sheet by molding a ceramic green sheet using the release film described above. It is characterized by having a thickness of ⁇ 1.0 ⁇ m.
  • the ceramic green sheet is not particularly limited as long as it contains ceramic.
  • the release film of the present invention is a release film for molding a ceramic green sheet containing an inorganic compound.
  • inorganic compounds include metal particles, metal oxides, and minerals, such as calcium carbonate, silica particles, aluminum particles, and barium titanate particles. Since the present invention has a release layer with high smoothness, even in an embodiment in which these inorganic compounds are included in the ceramic green sheet, defects attributable to the inorganic compound, such as breakage of the ceramic green sheet, from the release layer It is possible to suppress the problem that the separation of the ceramic green sheet becomes difficult.
  • the resin component that forms the ceramic green sheet can be appropriately selected according to the application.
  • the ceramic green sheet containing the inorganic compound is a ceramic green sheet.
  • the ceramic green sheets can contain barium titanate as the inorganic compound.
  • a resin component for example, a polyvinyl butyral-based resin can be included.
  • the ceramic green sheet has a thickness of 0.2 ⁇ m or more and 1.0 ⁇ m or less.
  • the present invention can provide a method for producing a release film for producing a ceramic green sheet containing such an inorganic compound.
  • the method for producing a release film in the present invention may include a step of forming a ceramic green sheet having a thickness of 0.2 ⁇ m or more and 1.0 ⁇ m or less.
  • a multilayer ceramic capacitor has a rectangular parallelepiped ceramic body. Inside the ceramic body, first internal electrodes and second internal electrodes are alternately provided along the thickness direction. The first internal electrode is exposed on the first end face of the ceramic body. A first external electrode is provided on the first end surface. The first internal electrode is electrically connected to the first external electrode at the first end surface. The second internal electrode is exposed on the second end face of the ceramic body. A second external electrode is provided on the second end surface. The second internal electrode is electrically connected to the second external electrode at the second end surface.
  • the release film of the present invention is a release film and is used to produce such a laminated ceramic capacitor.
  • a ceramic green sheet manufacturing method for molding a ceramic green sheet using the release film of the present invention can mold a ceramic green sheet having a thickness of 0.2 ⁇ m or more and 1.0 ⁇ m or less.
  • ceramic green sheets are manufactured as follows. First, using the release film of the present invention as a carrier film, a ceramic slurry for forming a ceramic body is applied and dried. As for the thickness of the ceramic green sheet, an extremely thin product of 0.2 ⁇ m or more and 1.0 ⁇ m or less is required. A conductive layer for forming the first or second internal electrode is printed on the coated and dried ceramic green sheet. Ceramic green sheets, ceramic green sheets printed with conductive layers for forming first internal electrodes, and ceramic green sheets printed with conductive layers for forming second internal electrodes are appropriately laminated and pressed. Thus, a mother laminate is obtained. The mother laminate is divided into a plurality of pieces to produce raw ceramic bodies. A ceramic body is obtained by firing a raw ceramic body. After that, the multilayer ceramic capacitor can be completed by forming the first and second external electrodes.
  • the molar ratio of alkenyl groups to hydrosilyl groups was calculated using the following formula.
  • Molar ratio Si-H/Si-A (In the formula, Si—H represents the molar amount of hydrosilyl groups, and Si—A represents the molar amount of alkenyl groups.)
  • the release film was embedded in a resin and cut into ultrathin slices using an ultramicrotome. After that, cross-sectional observation was performed using a JEOL JEM2100 transmission electron microscope, and the film thickness of the release layer was measured from the observed TEM image. When the thickness was too thin to be evaluated accurately by cross-sectional observation, the Si intensity was measured with a fluorescent X-ray device (ZSX PRIMUS II manufactured by Rigaku), and the coating amount was calculated by the calibration curve method.
  • ⁇ LVnd, ⁇ LVnp, ⁇ LVnh, and ⁇ Ln of water, methylene iodide, and ethylene glycol described in the above ⁇ 1 , ⁇ 2 , ⁇ 3 and Table 2 (where n 1, 2 or 3, water, iodide corresponding to methylene or ethylene glycol), the dispersion component ⁇ SVd, the dipole component ⁇ SVp, and the hydrogen bond component ⁇ SVh of the surface free energy of the release layer are calculated by the following formula, and the total is the surface of the release layer Free energy ⁇ S.
  • the unit of surface free energy and each component is "mJ/m 2 ".
  • slurry composition I consisting of the following materials was stirred and mixed for 10 minutes, and dispersed for 10 minutes with zirconia beads having a diameter of 0.5 mm using a bead mill to obtain a primary dispersion.
  • Si transfer amount to PVB sheet Polyvinyl butyral (S-lec BM-S manufactured by Sekisui Chemical Co., Ltd.) is applied to the release surface of the release film sample using an applicator so that the thickness of the resin after drying is 1.0 ⁇ m, and dried at 60 ° C. for 1 minute. Then, a release film with a PVB sheet was obtained. After the release film with the PVB sheet was allowed to stand in an environment of 23°C and 65RH for 24 hours, the PVB sheet was peeled off from the release film, and the surface of the PVB sheet in contact with the release film was exposed to a fluorescent X-ray device (ZSX PRIMUSII manufactured by Rigaku). ) was used to measure the Si intensity (Kcps).
  • the release film sample was cut into 6 sheets of 5 cm ⁇ 5 cm, 6 sheets were stacked so that the release surface and the surface opposite to the release surface were in contact, and pressure treatment was performed for 10 minutes while a load of 30 MPa was applied. After that, the six release films were peeled off, and the surface opposite to the release surface of the six films was painted red with a red marker pen (MGD-T2 manufactured by Teranishi Kagaku Kogyo Co., Ltd.) to check whether the marker ink repelled.
  • PET polyethylene terephthalate pellets
  • a continuous esterification reactor comprising a three-stage complete mixing tank having a stirrer, a partial condenser, a raw material inlet and a product outlet was used.
  • TPA terephthalic acid
  • EG ethylene glycol
  • antimony trioxide was adjusted to give an amount of Sb atoms of 160 ppm relative to the produced PET. It was continuously supplied to the first esterification reactor of the reaction apparatus and reacted at 255° C. for an average residence time of 4 hours under normal pressure.
  • the reaction product in the first esterification reaction can is continuously taken out of the system and supplied to the second esterification reaction can, and distilled from the first esterification reaction can into the second esterification reaction can.
  • 8 mass % of EG is supplied to the produced PET, and further, an EG solution containing magnesium acetate tetrahydrate in an amount such that the Mg atom is 65 ppm relative to the produced PET, and an EG solution containing 40 ppm of P atom relative to the produced PET.
  • An EG solution containing TMPA (trimethyl phosphate) in an amount corresponding to the above was added and reacted at 260° C. under normal pressure for an average residence time of 1 hour.
  • the reaction product in the second esterification reactor was continuously taken out of the system, supplied to the third esterification reactor, and subjected to 39 MPa (400 kg/cm 2 ) using a high-pressure disperser (manufactured by Nippon Seiki Co., Ltd.).
  • a high-pressure disperser manufactured by Nippon Seiki Co., Ltd.
  • 0.2% by mass of porous colloidal silica having an average particle size of 0.9 ⁇ m which has been subjected to dispersion treatment for an average of 5 passes at a pressure of , and 1% by mass of ammonium salt of polyacrylic acid per calcium carbonate.
  • 0.4% by mass of synthetic calcium carbonate with a diameter of 0.6 ⁇ m as a 10% EG slurry the mixture was reacted at normal pressure at 260° C.
  • the esterification reaction product produced in the third esterification reaction vessel was continuously supplied to a three-stage continuous polycondensation reactor for polycondensation to sinter stainless steel fibers having a 95% cut diameter of 20 ⁇ m. After filtration with a filter, ultrafiltration was performed, the product was extruded into water, and after cooling, it was cut into chips to obtain PET chips having an intrinsic viscosity of 0.60 dl/g (hereinafter abbreviated as PET (I)). .
  • PET (I) intrinsic viscosity of 0.60 dl/g
  • the lubricant content in the PET chip was 0.6% by mass.
  • PET (II) Preparation of polyethylene terephthalate pellets (PET (II))
  • PET(II) a PET chip with an intrinsic viscosity of 0.62 dl/g containing no particles such as calcium carbonate and silica was obtained (hereinafter abbreviated as PET(II)).
  • PET (Production of laminated film X1) After drying these PET chips, they were melted at 285° C. and melted at 290° C. by a separate melt extruder extruder to filter sintered stainless steel fibers with a 95% cut diameter of 15 ⁇ m and Two-stage filtration of sintered 15 ⁇ m stainless steel particles is performed, and they are combined in the feed block to form PET (I) on the surface layer B (anti-releasing surface side layer) and PET (II) on the surface. Laminated so as to form layer A (releasing surface side layer), extruded (cast) into a sheet at a speed of 45 m / min, electrostatically adhered on a casting drum at 30 ° C.
  • a 2.3% relaxation treatment was applied in the transverse direction at 170° C. to obtain a biaxially stretched polyethylene terephthalate film X1 having a thickness of 31 ⁇ m.
  • the Sa of the surface layer A of the obtained film X1 was 1 nm, and the Sa of the surface layer B was 28 nm.
  • both the surface layer A side and the surface layer B side are laminated in the same manner as the laminated film X1 using PET (II), extruded (casting) into a sheet at a speed of 45 m / min, and statically.
  • Electrostatic adhesion was carried out on a casting drum at 30° C. by an electroadhesion method, followed by cooling to obtain an unstretched polyethylene terephthalate sheet having an intrinsic viscosity of 0.59 dl/g. This unstretched PET sheet was heated to 100° C.
  • the film was stretched 4.0 times in the width direction at 150°C with a tenter, heated at 230°C for 0.5 seconds while fixing the length of the film in the width direction, and further heated at 230°C for 10 seconds 3. % in the width direction to obtain an in-line coated polyester film with a thickness of 31 ⁇ m.
  • the Sa of the surface layer A of the obtained film X2 was 1 nm, and the Sa of the surface layer B was 14 nm.
  • a silicone mixture R1 adjusted to 0 was prepared, and the following release layer forming coating solution M1 containing the silicone mixture R1, adhesion imparting agent S1, and catalyst P1 was prepared.
  • the release layer forming coating solution M1 having the composition described above was applied onto the surface layer A of the laminated film X1 using reverse gravure so that the coating amount after drying was 0.020 ⁇ m. After that, the processing speed was adjusted so that the first drying furnace entered after 0.5 seconds, and heat drying was continuously performed at a first drying furnace temperature of 120°C and a second drying furnace temperature of 90°C.
  • an ultraviolet irradiator manufactured by Heraeus, H bulb
  • irradiate ultraviolet light with an integrated light amount of 100 mJ/cm 2 on a cooling roll to cure the release layer, thereby forming a mold for manufacturing a ceramic green sheet. got the film.
  • Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time.
  • Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • a silicone mixture R2 adjusted to 0 was prepared, and the following release layer forming coating solution M2 containing the silicone mixture R2, the adhesion imparting agent S1, and the catalyst P1 was prepared.
  • a release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
  • Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 1 except that a silicone mixture R3 adjusted to be 0 was prepared, and the following release layer-forming coating solution M3 containing the silicone mixture R3, an adhesion imparting agent S1, and a catalyst was prepared.
  • a release film for producing a ceramic green sheet was obtained in the same manner as in .
  • Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 4 A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1, except that the coating liquid M1 for forming a release layer was applied so that the coating amount after drying was 0.050 ⁇ m.
  • Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time.
  • Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 5 A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1, except that the coating liquid M1 for forming a release layer was applied so that the coating amount after drying was 0.080 ⁇ m.
  • Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time.
  • Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 6 Example 1, except that the following release layer-forming coating solution M4 containing the silicone mixture R1, the adhesion imparting agent S2, and the catalyst P1 was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for producing a ceramic green sheet was obtained in the same manner as in .
  • Example 7 Example 1, except that the following release layer-forming coating solution M5 containing the silicone mixture R1, the adhesion imparting agent S3, and the catalyst P1 was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for producing a ceramic green sheet was obtained in the same manner as in .
  • Example 8 Example 1, except that the following release layer-forming coating solution M6 containing the silicone mixture R1, the adhesion imparting agent S4, and the catalyst P1 was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for producing a ceramic green sheet was obtained in the same manner as in .
  • Example 9 In the same manner as in Example 1, except that the release layer forming coating solution M7 having a different content ratio of the adhesion imparting agent S1 was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for manufacturing a ceramic green sheet was obtained.
  • (Release layer forming coating liquid M7) Methyl ethyl ketone 64.4 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts
  • Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 10 In the same manner as in Example 1, except that the following release layer forming coating liquid M8 having a different content ratio of the adhesion imparting agent S1 was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for manufacturing a ceramic green sheet was obtained.
  • (Release layer forming coating liquid M8) Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts
  • Adhesion imparting agent S1 0.125 parts Catalyst P1 0.1 parts The overview of the release layer forming coating liquid and laminated film used at that time is as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 11 In the same manner as in Example 1, except that the release layer forming coating solution M9 having a different content ratio of the adhesion imparting agent S1 was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for manufacturing a ceramic green sheet was obtained.
  • (Release layer forming coating solution M9) Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts
  • Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 12 In the same manner as in Example 1, except that the release layer forming coating solution M10 described below, which has a different content ratio of the adhesion imparting agent S1, was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for manufacturing a ceramic green sheet was obtained.
  • Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 13 A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1, except that the coating solution M1 for forming a release layer was applied to the laminated film X2.
  • Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time.
  • Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • polysiloxane B structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o
  • a release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
  • Catalyst P1 0.1 parts Outlines of the release layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • a release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
  • Catalyst P1 0.1 parts Outlines of the releasing layer forming coating liquid and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • Example 3 (Comparative Example 3) Example 1, except that the release layer forming coating solution M15 described below containing the silicone mixture R1, the adhesion imparting agent S4, and the catalyst P1 was applied so that the coating amount after drying was 0.020 ⁇ m. A release film for producing a ceramic green sheet was obtained in the same manner as in .
  • Example 4 The following coating liquid M16 for forming a release layer containing the silicone mixture R1 and the catalyst P1 and containing no adhesion imparting agent was applied so that the coating amount after drying was 0.020 ⁇ m.
  • a release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
  • (Release layer forming coating liquid M16) Methyl ethyl ketone 64.4 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Catalyst P1 0.1 parts
  • Table 3 shows the overview of the release layer-forming coating solution and laminated film used at that time.
  • Table 4 shows the results of evaluation of various physical properties of the obtained release film.
  • the release layer is a layer obtained by curing a curable composition containing polysiloxane A, polysiloxane B, and adhesion imparting agent C, and the formula (a ) and formula (b) are satisfied, a release film is obtained which is excellent in releasability and is less likely to cause transfer/drop-off of the release layer and poor adhesion.
  • Example 11 since the content ratio of the adhesion imparting agent was too small, the effect of improving adhesion over time was small, and it was found that there is a preferable lower limit for the content ratio of the adhesion imparting agent.
  • Example 12 since the content ratio of the adhesion imparting agent was too large, the peeling force was slightly increased, and it was found that there is a preferred upper limit for the content ratio of the adhesion imparting agent.
  • Example 14 the weight average molecular weight of polysiloxane A was too small, so that the amount of silicone transferred to PVB was slightly high.
  • Example 15 since the molar ratio (amount of hydrosilyl groups/amount of alkenyl groups) was slightly large, the ceramic peeling force was slightly high, and it was found that the molar ratio has a preferable upper limit.
  • Comparative Example 1 which exceeds the upper limit of formula (a) due to the large molar ratio (amount of hydrosilyl groups/amount of alkenyl groups), the peel strength increased.
  • Comparative Example 2 in which the molar ratio (amount of hydrosilyl groups/amount of alkenyl groups) is small and therefore is less than the lower limit of formula (a), the result of set-off is poor, and the release layer is formed on the opposite side of the base material to the release layer. Since it is transferred to the surface, there is a concern that the process of processing the ceramic green sheet will be significantly contaminated, and the amount of Si transferred to the PVB sheet has also increased.
  • Comparative Example 3 In Comparative Example 3, in which the upper limit of formula (a) was exceeded as a result of using an undesirable adhesion-imparting agent, the adhesion-imparting agent inhibited curing, resulting in poor set-off and contamination of the ceramic green sheet processing process. There is an extremely high concern that In Comparative Example 4 in which no adhesion-imparting agent was used, the peeling force increased, the adhesion over time decreased, and the amount of Si transferred to the PVB sheet increased slightly.
  • the present invention by improving the smoothness and releasability of the release layer, it is possible to provide a release film that can form a ceramic green sheet with few defects even in an ultra-thin layer product having a thickness of 1 ⁇ m or less. Sheets can be manufactured without fear of defects.

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Abstract

Provided is a release film for manufacturing a ceramic green sheet, the release film exhibiting excellent releasability, wherein transfer and omission of a release layer and adherence defects do not easily occur. The present invention pertains to a release film for manufacturing a ceramic green sheet, the release film comprising a polyester film and a release layer. The release layer is obtained by curing a curable composition comprising: a polysiloxane A having two or more intramolecular alkenyl groups; a polysiloxane B having two or more intramolecular hydrosilyl groups; and an adherence-imparting agent C, and is characterized in that the surface free energy γS (mJ/m2) at the surface of the release layer and a hydrogen bond component γSVh (mJ/m2) of γS satisfy expression (a) and expression (b). (a): 1.0 ≤ γSVh/γS*100 ≤ 6.5; (b): γS ≤ 30

Description

セラミックグリーンシート製造用離型フィルムRelease film for manufacturing ceramic green sheets

 本発明は、ポリエステルフィルムと離型層とを有するセラミックグリーンシート製造用離型フィルムに関し、超薄層のセラミックグリーンシートなどの製造に好適に用いることができる。 The present invention relates to a release film for manufacturing ceramic green sheets, which has a polyester film and a release layer, and can be suitably used for manufacturing ultra-thin ceramic green sheets.

 従来、ポリエステルフィルムを基材とし、その上に離型層を積層した離型フィルムは、各種の工程フィルムとして使用されている。なかでも、セラミックグリーンシート製造用離型フィルムは、積層セラミックコンデンサ、セラミック基板等の高い平滑性が求められるセラミックグリーンシート製造用の工程フィルムとしても使用されている。 Conventionally, a release film made by laminating a release layer on a polyester film as a base material has been used as a film for various processes. Among others, release films for manufacturing ceramic green sheets are also used as process films for manufacturing ceramic green sheets that require high smoothness, such as laminated ceramic capacitors and ceramic substrates.

 近年、積層セラミックコンデンサの小型化・大容量化に伴い、セラミックグリーンシートの厚みも薄膜化する傾向にある。セラミックグリーンシートは、チタン酸バリウムなどのセラミック成分とバインダー樹脂を含有したスラリーを離型フィルム上に塗工し乾燥することで成型される。成型したセラミックグリーンシートに電極を印刷し離型フィルムから剥離することで得られたセラミックグリーンシートを、積層、プレス、焼成、外部電極塗布することで積層セラミックコンデンサが製造される。 In recent years, along with the miniaturization and increase in capacity of multilayer ceramic capacitors, the thickness of ceramic green sheets tends to be thinner. A ceramic green sheet is molded by coating a release film with a slurry containing a ceramic component such as barium titanate and a binder resin and drying the slurry. A laminated ceramic capacitor is manufactured by laminating, pressing, firing, and applying external electrodes to the ceramic green sheets obtained by printing electrodes on molded ceramic green sheets and peeling them from the release film.

 近年セラミックグリーンシートの薄膜化が進み、離型フィルムからセラミックグリーンシートを剥離する時の剥離性がより重要になっている。剥離力が大きく、不均一であると剥離工程においてセラミックグリーンシートにダメージが加わり、シート欠陥、厚みムラなどが発生し、ピンホールの発生、シート割れなどの不具合が発生する問題がある。そのため、セラミックグリーンシートをより低く均一な力で剥離することが求められている。 In recent years, ceramic green sheets have become thinner, and the releasability of the ceramic green sheets from the release film has become more important. If the peel force is large and non-uniform, the ceramic green sheet will be damaged in the peeling process, causing problems such as sheet defects, thickness unevenness, pinholes, sheet cracks, and the like. Therefore, it is required to peel off the ceramic green sheet with a lower and more uniform force.

 離型層を軽剥離化する方策としては、特許文献1等のように、アルケニル基を有するポリジメチルシロキサン、ヒドロシリル基を有するポリジメチルシロキサンおよび白金触媒を用い、熱等による付加反応によって形成されたシリコーン皮膜を離型層とした離型フィルムが提案されている。 As a measure to make the release layer easy to release, as in Patent Document 1, polydimethylsiloxane having an alkenyl group, polydimethylsiloxane having a hydrosilyl group, and a platinum catalyst are used, and are formed by an addition reaction such as heat. A release film having a silicone film as a release layer has been proposed.

 また、離型層の硬化性を高める方策として、特許文献2では、アクリロイル基等の反応性官能基を有するポリオルガノシロキサンと、多官能の(メタ)アクリル酸エステルとを含むラジカル硬化型の組成物を硬化させてなる離型層を有する離型フィルムが提案されている。 In addition, as a measure to improve the curability of the release layer, Patent Document 2 discloses a radical-curable composition containing a polyorganosiloxane having a reactive functional group such as an acryloyl group and a polyfunctional (meth)acrylic acid ester. A release film having a release layer formed by curing a material has been proposed.

特許第6619200号公報Japanese Patent No. 6619200 特許第5492352号公報Japanese Patent No. 5492352

 しかしながら、特許文献1の発明では、基材フィルムに対する離型層の密着性と表面の離型性とを両立させ難い傾向があり、セラミックグリーンシートを製造する工程で離型層からシリコーン皮膜が脱落し、工程を汚染するという懸念があった。 However, in the invention of Patent Document 1, there is a tendency that it is difficult to achieve both the adhesion of the release layer to the substrate film and the release property of the surface, and the silicone coating falls off from the release layer in the process of manufacturing the ceramic green sheet. However, there was concern that the process would be contaminated.

 また、特許文献2の発明では、離型層の転写等が防止できる程度に硬化性を高めると、セラミックを剥離する際に十分な離型性が得られないという問題があった。 In addition, in the invention of Patent Document 2, if the curability is increased to the extent that transfer of the release layer can be prevented, there is a problem that sufficient releasability cannot be obtained when peeling the ceramic.

 そこで、本発明の目的は、離型性に優れると共に、離型層の転写・脱落や密着性不良が生じにくいセラミックグリーンシート製造用離型フィルムを提供することにある。また、本発明の目的は、当該離型フィルムを用いたセラミックグリーンシートの製造方法を提供することにある。 Accordingly, an object of the present invention is to provide a release film for producing a ceramic green sheet which is excellent in release properties and which is less susceptible to transfer/drop-off of the release layer and poor adhesion. Another object of the present invention is to provide a method for producing a ceramic green sheet using the release film.

 本発明者らは、上記課題を解決すべく鋭意研究した結果、密着性付与剤を更に添加して硬化させた離型層について、特に表面自由エネルギーγS中の水素結合成分γSVhの比率を所定範囲に制御することで、上記課題が解決できることを見出し、本発明を完成するに至った。 As a result of intensive research to solve the above problems, the present inventors have found that, for a release layer cured by further adding an adhesion imparting agent, in particular, the ratio of the hydrogen bond component γSVh in the surface free energy γS is set within a predetermined range. The present inventors have found that the above problem can be solved by controlling to , and have completed the present invention.

 即ち、本発明には以下の内容が含まれる。 That is, the present invention includes the following contents.

 [1] ポリエステルフィルムと離型層とを有するセラミックグリーンシート製造用離型フィルムであって、
 前記離型層は、分子中に2つ以上のアルケニル基を有するポリシロキサンAと、分子中に2つ以上のヒドロシリル基を有するポリシロキサンBと、密着性付与剤Cと、を含む硬化性組成物が硬化した層であり、
 前記離型層の表面の表面自由エネルギーγS(mJ/m)とγSの水素結合成分γSVh(mJ/m)とが、以下の式(a)及び式(b)を満たすことを特徴とするセラミックグリーンシート製造用離型フィルム。
 1.0≦γSVh/γS*100≦6.5 (a)
 γS≦30 (b)
[1] A release film for producing a ceramic green sheet having a polyester film and a release layer,
The release layer comprises a polysiloxane A having two or more alkenyl groups in the molecule, a polysiloxane B having two or more hydrosilyl groups in the molecule, and an adhesion imparting agent C. A curable composition containing is a hardened layer of matter,
The surface free energy γS (mJ/m 2 ) of the surface of the release layer and the hydrogen bond component γSVh (mJ/m 2 ) of γS satisfy the following formulas (a) and (b). release film for manufacturing ceramic green sheets.
1.0≤γSVh/γS*100≤6.5 (a)
γS≦30 (b)

 [2] 密着性付与剤Cが、ビニル基、エポキシ基、アクリル基、及びメタクリル基からなる群から選ばれる1つ以上の官能基を有するシランカップリング剤である、[1]に記載のセラミックグリーンシート製造用離型フィルム。 [2] The ceramic according to [1], wherein the adhesion imparting agent C is a silane coupling agent having one or more functional groups selected from the group consisting of vinyl groups, epoxy groups, acrylic groups, and methacrylic groups. Release film for green sheet production.

 [3] 前記ポリシロキサンAの重量平均分子量が、300000以上600000以下である、[1]又は[2]に記載のセラミックグリーンシート製造用離型フィルム。 [3] The release film for producing a ceramic green sheet according to [1] or [2], wherein the polysiloxane A has a weight average molecular weight of 300,000 or more and 600,000 or less.

 [4] 前記硬化性組成物中における前記ポリシロキサンBの有するヒドロシリル基量と、前記ポリシロキサンAの有するアルケニル基量とのモル比が、以下の式(c)を満たす、[1]~[3]いずれかに記載のセラミックグリーンシート製造用離型フィルム。
 1.0≦Si-H/Si-A≦3.8 (c)
(式中、Si-Hはヒドロシリル基のモル量を、Si-Aはアルケニル基のモル量を示す。)
[4] The molar ratio between the amount of hydrosilyl groups possessed by the polysiloxane B and the amount of alkenyl groups possessed by the polysiloxane A in the curable composition satisfies the following formula (c), [1] to [ 3] The release film for producing a ceramic green sheet according to any one of the above.
1.0≤Si-H/Si-A≤3.8 (c)
(In the formula, Si—H represents the molar amount of hydrosilyl groups, and Si—A represents the molar amount of alkenyl groups.)

 [5] 前記硬化性組成物中において、前記ポリシロキサンAと前記ポリシロキサンBとの合計量に対して、前記密着性付与剤Cを1質量%以上10質量%以下含む、[1]~[4]いずれかに記載のセラミックグリーンシート製造用離型フィルム。 [5] The curable composition contains 1% by mass or more and 10% by mass or less of the adhesion imparting agent C with respect to the total amount of the polysiloxane A and the polysiloxane B, [1] to [ 4] The release film for producing a ceramic green sheet according to any one of the above.

 [6] 前記ポリエステルフィルムが無機粒子を実質的に含有していない表面層Aを有し、
 前記離型層が、その表面層Aに厚み0.005μm以上0.1μm以下で積層されており、
 前記離型層の表面の最大突起高さ(Sp)が100nm以下である、[1]~[5]いずれかに記載のセラミックグリーンシート製造用離型フィルム。
[6] The polyester film has a surface layer A that does not substantially contain inorganic particles,
The release layer is laminated on the surface layer A with a thickness of 0.005 μm or more and 0.1 μm or less,
The release film for producing a ceramic green sheet according to any one of [1] to [5], wherein the maximum projection height (Sp) on the surface of the release layer is 100 nm or less.

 [7] [1]~[6]いずれかに記載のセラミックグリーンシート製造用離型フィルムを用いて、セラミックグリーンシートを成型するセラミックグリーンシートの製造方法であって、成型されたセラミックグリーンシートが0.2μm~1.0μmの厚みを有するセラミックグリーンシートの製造方法。 [7] A method for manufacturing a ceramic green sheet by molding a ceramic green sheet using the release film for manufacturing a ceramic green sheet according to any one of [1] to [6], wherein the molded ceramic green sheet is A method for producing a ceramic green sheet having a thickness of 0.2 μm to 1.0 μm.

 本発明によれば、離型性に優れると共に、離型層の転写・脱落や密着性不良が生じにくいセラミックグリーンシート製造用離型フィルムを提供することができる。 According to the present invention, it is possible to provide a release film for producing a ceramic green sheet which is excellent in release properties and which is less susceptible to transfer/drop-off of the release layer and poor adhesion.

 [セラミックグリーンシート製造用離型フィルム]
 本発明のセラミックグリーンシート製造用離型フィルム(以下、単に「離型フィルム」という場合がある)は、ポリエステルフィルムと離型層とを有するものであり、離型層はポリエステルフィルムの少なくとも片面に設けられていればよい。
[Release film for manufacturing ceramic green sheets]
The release film for producing a ceramic green sheet of the present invention (hereinafter sometimes simply referred to as "release film") has a polyester film and a release layer, and the release layer is provided on at least one side of the polyester film. It is sufficient if it is provided.

 また、離型層とポリエステルフィルムとの間には、易接着層、帯電防止層、平滑化層等が設けられていてもよいが、本発明では、易接着層等が介在しなくても、良好な密着性が得られ易い。つまり、好ましい態様として、ポリエステルフィルムに直接、離型層が設けられた離型フィルムが例示される。 In addition, an easy-adhesion layer, an antistatic layer, a smoothing layer, etc. may be provided between the release layer and the polyester film. Good adhesion is easily obtained. That is, a preferred embodiment is a release film in which a release layer is provided directly on a polyester film.

 前記離型層は、分子中に2つ以上のアルケニル基を有するポリシロキサンAと、分子中に2つ以上のヒドロシリル基を有するポリシロキサンBと、密着性付与剤Cと、を含む硬化性組成物が硬化した層である。 The release layer comprises a polysiloxane A having two or more alkenyl groups in the molecule, a polysiloxane B having two or more hydrosilyl groups in the molecule, and an adhesion imparting agent C. A curable composition containing It is a hardened layer.

 本発明の離型フィルムは、前記離型層の表面、即ち離型層のポリエステルフィルムの反対側の面の表面自由エネルギーγS(mJ/m)とγSの水素結合成分γSVh(mJ/m)とが、以下の式(a)及び式(b)を満たすことを特徴とする。
 1.0≦γSVh/γS*100≦6.5 (a)
 γS≦30 (b)
 まず、式(a)及び式(b)で特定される離型層の表面特性について説明する。
The release film of the present invention has the surface free energy γS (mJ/m 2 ) of the surface of the release layer, i.e., the surface opposite to the polyester film of the release layer, and the hydrogen bond component γSVh (mJ/m 2 ) of γS. ) satisfies the following formulas (a) and (b).
1.0≤γSVh/γS*100≤6.5 (a)
γS≦30 (b)
First, the surface properties of the release layer specified by formulas (a) and (b) will be described.

 (離型層の表面特性)
 前記の式(a)及び式(b)は、表面自由エネルギーγSとその水素結合成分γSVhとを含むものであるが、これらの求め方について説明する。表面自由エネルギーは、水、ヨウ化メチレン、エチレングリコールの各溶剤を離型層に滴下し、一定時間後の液滴と離型層からなる角度(接触角)を測定することで求めることができる。各溶剤の接触角から、Kitazaki-Hata式を用いて離型層の表面自由エネルギーγSおよびその水素結合成分γSVhを計算により算出する。
(Surface properties of release layer)
The above formulas (a) and (b) include the surface free energy γS and its hydrogen bond component γSVh, and how to obtain them will be explained. The surface free energy can be obtained by dropping each solvent such as water, methylene iodide, or ethylene glycol onto the release layer and measuring the angle (contact angle) between the droplet and the release layer after a certain period of time. . From the contact angle of each solvent, the surface free energy γS of the release layer and its hydrogen bond component γSVh are calculated using the Kitazaki-Hata equation.

 より具体的には平坦なガラス基板上に離型フィルムを固定し、離型フィルム上に水1.9μLを滴下する。液滴が静止した60秒後に液滴と離型層からなる角度を測定しθとする。同様に離型フィルム上にヨウ化メチレン0.9μLを滴下する。液滴が静止した30秒後に液滴と離型層からなる角度を測定しθとする。さらに離型フィルム上にエチレングリコール0.9μLを滴下する。液滴が静止した30秒後に液滴と離型層からなる角度を測定しθとする。 More specifically, a release film is fixed on a flat glass substrate, and 1.9 μL of water is dropped onto the release film. 60 seconds after the droplet stops, the angle formed by the droplet and the release layer is measured and defined as θ1 . Similarly, 0.9 μL of methylene iodide is dropped onto the release film. 30 seconds after the droplet has stopped, the angle formed by the droplet and the release layer is measured and defined as θ2 . Furthermore, 0.9 μL of ethylene glycol is dropped onto the release film. 30 seconds after the droplet has stopped, the angle formed by the droplet and the release layer is measured and defined as θ3 .

 上記のθ、θ、θおよび表1に記載される水、ヨウ化メチレン、エチレングリコールのγLVnd、γLVnp、γLVnh、γLn(但し、n=1、2、又は3であり、水、ヨウ化メチレン、又はエチレングリコールに対応する)から、下記のKitazaki-Hata式により離型層の表面自由エネルギーの分散成分γSVd、双極子成分γSVp、水素結合成分γSVhを計算により算出し、その合計を離型層の表面自由エネルギーγsとした。即ち、γSVd+γSVp+γSVh=γsとなる。なお、表面自由エネルギー及び各成分の単位は「mJ/m」である。 γLVnd, γLVnp, γLVnh, and γLn of water, methylene iodide, and ethylene glycol described in the above θ 1 , θ 2 , θ 3 and Table 1 (where n = 1, 2, or 3; (corresponding to methylene chloride or ethylene glycol), the dispersion component γSVd, the dipole component γSVp, and the hydrogen bond component γSVh of the surface free energy of the release layer are calculated by the following Kitazaki-Hata formula, and the total is separated. It was defined as the surface free energy γs of the mold layer. That is, γSVd+γSVp+γSVh=γs. The unit of surface free energy and each component is "mJ/m 2 ".

Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001

Figure JPOXMLDOC01-appb-M000002
Figure JPOXMLDOC01-appb-M000002

 本発明者らは、上記の条件で離型層を測定して得られた表面自由エネルギーについて、式(a)及び式(b)を満たす場合に、該離型層にセラミックスラリーを塗布・乾燥して形成したセラミックグリーンシートを剥離する際に極めて良好な剥離性が得られることを見出した。また、式(a)の下限値側の不等式を満たすことで、塗膜の硬化性が良好になる結果、離型層が十分な強度となり易く、離型層の脱落等の問題が生じにくくなることを見出した。 The present inventors have found that when the surface free energy obtained by measuring the release layer under the above conditions satisfies the formulas (a) and (b), the ceramic slurry is applied to the release layer and dried. The inventors have found that when the ceramic green sheet formed by the above method is peeled off, an extremely good peelability can be obtained. In addition, by satisfying the inequality on the lower limit side of the formula (a), the curability of the coating film is improved, and as a result, the release layer tends to have sufficient strength, and problems such as falling off of the release layer are less likely to occur. I found out.

 上記のセラミックグリーンシートに対する優れた剥離性は、上記の離型層中の表面自由エネルギーの水素結合成分が少ないことが寄与するものと考えられる。すなわち、セラミックグリーンシートに含まれるバインダー中の水酸基成分が離型層の未反応成分である水素成分と水素結合を生じることを防ぐことがセラミックグリーンシートの軽剥離性に寄与するものと考えられる。 It is believed that the excellent releasability from the ceramic green sheet described above is due to the fact that the surface free energy in the release layer has a small amount of hydrogen bonding components. That is, it is considered that the prevention of hydrogen bonding between the hydroxyl group component in the binder contained in the ceramic green sheet and the hydrogen component, which is an unreacted component in the release layer, contributes to the easy peelability of the ceramic green sheet.

 離型層の表面自由エネルギーに含まれる水素結合成分の比率(γSVh/γS*100)については、6.5%以下であることが好ましく、6.0%以下であることがより好ましく、5.0%以下であることが更に好ましい。この比率が6.5%以下の場合、剥離力が良好になり、剥離の際にセラミックグリーンシートに変形や破損が生じにくくなる。 4. The ratio of hydrogen bond components contained in the surface free energy of the release layer (γSVh/γS*100) is preferably 6.5% or less, more preferably 6.0% or less. It is more preferably 0% or less. When this ratio is 6.5% or less, the peel strength is good, and the ceramic green sheet is less likely to be deformed or damaged during peeling.

 一方、比率(γSVh/γS*100)の下限としては、1.0%以上が好ましく、1.2%以上がより好ましい。この比率が1.0%以上の場合、未反応のビニル基が少ない状態となり、塗膜が十分な強度となり易く、離型層の脱落等の問題が生じにくくなる。 On the other hand, the lower limit of the ratio (γSVh/γS*100) is preferably 1.0% or more, more preferably 1.2% or more. When this ratio is 1.0% or more, the number of unreacted vinyl groups is small, the coating film tends to have sufficient strength, and problems such as detachment of the release layer are less likely to occur.

 また、離型層の表面自由エネルギーγsも低いことが望ましい。これは離型層の表面自由エネルギーがセラミックグリーンシートの表面自由エネルギーと近い場合、セラミックグリーンシートと離型層を剥離するために必要となるエネルギーが大きくなり、結果として剥離性が悪化するためと考えられる。表面自由エネルギーγsは30mJ/m以下であることが望ましく、より好ましくは25mJ/m以下であり、更に好ましくは20mJ/m以下である。 It is also desirable that the surface free energy γs of the release layer is low. This is because when the surface free energy of the release layer is close to the surface free energy of the ceramic green sheet, the energy required to separate the release layer from the ceramic green sheet increases, resulting in poor peelability. Conceivable. The surface free energy γs is desirably 30 mJ/m 2 or less, more preferably 25 mJ/m 2 or less, still more preferably 20 mJ/m 2 or less.

 表面自由エネルギーγsの下限値は、特に限定されないが、セラミックスラリーの塗布性等の観点から、表面自由エネルギーγsが12mJ/m以上であることが好ましく、14mJ/m以上であることがより好ましい。 The lower limit of the surface free energy γs is not particularly limited, but from the viewpoint of ceramic slurry coating properties, the surface free energy γs is preferably 12 mJ/m 2 or more, more preferably 14 mJ/m 2 or more. preferable.

 [離型層]
 離型フィルムの離型層を構成する材料は、前述した物性を満たす離型層を形成する上で、以下に示す硬化性組成物を用いることが好ましい。つまり、前記離型層は、以下に示す硬化性組成物が硬化してなる層から形成されることが好ましい。
[Release layer]
For the material constituting the release layer of the release film, it is preferable to use the curable composition shown below in order to form the release layer that satisfies the physical properties described above. That is, the release layer is preferably formed from a layer obtained by curing the curable composition shown below.

 硬化性組成物は、分子中に2つ以上のアルケニル基を有するポリシロキサンAと、分子中に2つ以上のヒドロシリル基を有するポリシロキサンBと、密着性付与剤Cと、を含むものである。 The curable composition contains polysiloxane A having two or more alkenyl groups in the molecule, polysiloxane B having two or more hydrosilyl groups in the molecule, and adhesion-imparting agent C.

 (ポリシロキサンA)
 ポリシロキサンAは、側鎖及び/又は末端に2つ以上のアルケニル基を有していればよく、少なくとも側鎖にアルケニル基を有するポリオルガノシロキサンが好ましく、側鎖のみにアルケニル基を有するポリオルガノシロキサンがより好ましい。また、アルケニル基を有するシロキサン単位と、ジアルキルシロキサン単位又はアルキルフェニルシロキサン単位とを含む共重合体であることが、離型性を発現させつつ、1分子中のアルケニル基量を調整し易いため好ましい。末端の硅素原子は、トリメチルシラン等のトリアルキルシラン構造であることが好ましい。
(Polysiloxane A)
Polysiloxane A may have two or more alkenyl groups in side chains and/or terminals, preferably polyorganosiloxane having alkenyl groups in at least side chains, and polyorganosiloxane having alkenyl groups only in side chains. Siloxane is more preferred. Further, a copolymer containing a siloxane unit having an alkenyl group and a dialkylsiloxane unit or an alkylphenylsiloxane unit is preferable because it is easy to adjust the amount of alkenyl groups in one molecule while exhibiting releasability. . The terminal silicon atom is preferably a trialkylsilane structure such as trimethylsilane.

 アルケニル基としては、炭素数2以上10以下のアルケニル基が挙げられる。このようなアルケニル基を有することによって、離型層の強度に優れるものとなる。アルケニル基は、好ましくは炭素数2以上8以下のアルケニル基であり、さらに好ましくは炭素数2以上6以下のアルケニル基であり、特に好ましくはビニル基、ヘキセニル基である。アルケニル基が結合する珪素原子には、複数のアルケニル基が結合していてもよいが、アルケニル基とアルキル基とが結合していることが好ましい。その場合のアルキル基としては、メチル基等が好ましい。 Examples of alkenyl groups include alkenyl groups having 2 or more and 10 or less carbon atoms. By having such an alkenyl group, the strength of the release layer is excellent. The alkenyl group is preferably an alkenyl group having 2 to 8 carbon atoms, more preferably an alkenyl group having 2 to 6 carbon atoms, and particularly preferably a vinyl group or a hexenyl group. A plurality of alkenyl groups may be bonded to a silicon atom to which an alkenyl group is bonded, but preferably an alkenyl group and an alkyl group are bonded. As the alkyl group in that case, a methyl group or the like is preferable.

 アルケニル基を有するシロキサン単位の他に、ポリシロキサンAに含まれるジアルキルシロキサン単位等としては、ジメチルシロキサン単位、フェニルメチルシロキサン単位などが、好ましいものとして例示される。 In addition to the alkenyl group-containing siloxane units, the dialkylsiloxane units and the like contained in polysiloxane A are preferably exemplified by dimethylsiloxane units, phenylmethylsiloxane units, and the like.

 上記のようなポリシロキサンとしては、例えば下記の構造式(1)で示すようなポリシロキサンを例示することができる。 Examples of polysiloxanes as described above include polysiloxanes represented by the following structural formula (1).

Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003

 上記式(1)中、l、mおよびnは0以上の整数(但しm+nは2以上)であるが、lが1000以上10000以下、m+nが2以上100以下の範囲であると、十分な離型性を発現させつつ、架橋反応が好適に進行し、離型層の強度が向上するため好ましい。また、同様の観点から、(m+n)/(l+m+n+2)が0.006以上0.03以下であることが好ましく、0.01以上0.024以下であることがより好ましい。 In the above formula (1), l, m and n are integers of 0 or more (where m+n is 2 or more). It is preferable because the cross-linking reaction proceeds favorably while exhibiting moldability, and the strength of the release layer is improved. From the same point of view, (m+n)/(l+m+n+2) is preferably 0.006 or more and 0.03 or less, more preferably 0.01 or more and 0.024 or less.

 なお、上記式は、ブロック共重合体である態様を意味しているのではなく、これらは単にそれぞれの単位の合計数がl、m、nであることを示しているにすぎない。したがって、上記式におけるポリシロキサンは、ランダム共重合体であってもよく、またブロック共重合体であってもよい。 It should be noted that the above formula does not mean a block copolymer embodiment, but simply indicates that the total number of each unit is 1, m, and n. Therefore, the polysiloxane in the above formula may be a random copolymer or a block copolymer.

 本発明においては、ポリシロキサンAとしては、上記のようなポリシロキサンの1種類を単独で用いてもよいし、1分子中に異なる2種類以上のアルケニル基を有するポリシロキサンを用いてもよいし、また、それぞれ異なるアルケニル基を有する等、構造の異なる2種類以上のポリシロキサンを併用してもよい。 In the present invention, as the polysiloxane A, one type of polysiloxane as described above may be used alone, or a polysiloxane having two or more different alkenyl groups in one molecule may be used. Also, two or more polysiloxanes having different structures, such as having different alkenyl groups, may be used in combination.

 ポリシロキサンAの重量平均分子量は300,000以上600,000以下であることが好ましく、特に400,000以上550,000以下であることが好ましい。なお、本明細書における重量平均分子量は、ゲルパーミエーションクロマトグラフィー(GPC)法により測定した標準ポリスチレン換算の値である。 The weight average molecular weight of polysiloxane A is preferably 300,000 or more and 600,000 or less, and particularly preferably 400,000 or more and 550,000 or less. In addition, the weight average molecular weight in this specification is the value of standard polystyrene conversion measured by the gel permeation chromatography (GPC) method.

 ポリシロキサンAの重量平均分子量が、300000以上の場合、架橋後の離型層が適度な塗膜強度を有するようになり、塗膜の脱落をより効果的に防止することができる。また、重量平均分子量が600000以下の場合、乾燥後の塗膜の平面性が良好になる。 When the weight-average molecular weight of polysiloxane A is 300,000 or more, the release layer after cross-linking has an appropriate coating film strength, which can more effectively prevent the coating film from coming off. Moreover, when the weight average molecular weight is 600,000 or less, the flatness of the coating film after drying is improved.

 (ポリシロキサンB)
 ポリシロキサンBは、側鎖及び/又は末端に2つ以上のヒドロシリル基(珪素原子に水素原子が直接結合した基)を有していればよく、少なくとも側鎖にヒドロシリル基を有するハイドロジェンポリシロキサンが好ましく、側鎖のみにヒドロシリル基を有するハイドロジェンポリシロキサンがより好ましい。また、ヒドロシリル基を有するシロキサン単位と、ジアルキルシロキサン単位又はアルキルフェニルシロキサン単位とを含む共重合体であることが、離型性を発現させつつ、1分子中のヒドロシリル基量を調整し易いため好ましい。水素原子が直接結合する珪素原子には、複数の水素原子が直接結合していてもよいが、水素原子とアルキル基とが結合していることが好ましい。その場合のアルキル基としては、メチル基等が好ましい。末端の硅素原子は、トリメチルシラン等のトリアルキルシラン構造であることが好ましい。
(Polysiloxane B)
Polysiloxane B may have two or more hydrosilyl groups (groups in which hydrogen atoms are directly bonded to silicon atoms) in side chains and/or terminals, and is hydrogen polysiloxane having hydrosilyl groups in at least side chains. is preferred, and hydrogenpolysiloxane having hydrosilyl groups only in side chains is more preferred. Further, a copolymer containing a siloxane unit having a hydrosilyl group and a dialkylsiloxane unit or an alkylphenylsiloxane unit is preferable because it is easy to adjust the amount of hydrosilyl groups in one molecule while exhibiting releasability. . A plurality of hydrogen atoms may be directly bonded to the silicon atom to which a hydrogen atom is directly bonded, but preferably a hydrogen atom and an alkyl group are bonded. As the alkyl group in that case, a methyl group or the like is preferable. The terminal silicon atom is preferably a trialkylsilane structure such as trimethylsilane.

 ヒドロシリル基を有するシロキサン単位の他に、ポリシロキサンBに含まれるジアルキルシロキサン単位等としては、ジメチルシロキサン単位、フェニルメチルシロキサン単位などが、好ましいものとして例示される。 In addition to the siloxane unit having a hydrosilyl group, the dialkylsiloxane unit and the like contained in the polysiloxane B are preferably exemplified by a dimethylsiloxane unit, a phenylmethylsiloxane unit, and the like.

 かかるハイドロジェンポリシロキサンとしては、例えば下記の構造式(2)で示すようなポリシロキサンが例示できる。 Examples of such hydrogenpolysiloxanes include polysiloxanes represented by the following structural formula (2).

Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004

 上記式(2)中、oは0以上の整数、pは2以上の整数であるが、oが0以上120以下、pが2以上120以下、o+pが2以上240以下の範囲であると、架橋反応が好適に進行し、離型層の強度が向上するため好ましい。また、同様の観点から、(p)/(o+p+2)が0.3以上1以下であることが好ましい。 In the above formula (2), o is an integer of 0 or more and p is an integer of 2 or more. It is preferable because the cross-linking reaction proceeds favorably and the strength of the release layer is improved. From the same point of view, (p)/(o+p+2) is preferably 0.3 or more and 1 or less.

 なお、上記式は、ブロック共重合体である態様を意味しているのではなく、これらは単にそれぞれの単位の合計数がo、pであることを示しているにすぎない。したがって、上記式におけるハイドロジェンポリシロキサンは、ランダム共重合体であってもよく、またブロック共重合体であってもよい。 It should be noted that the above formula does not mean a block copolymer embodiment, but simply indicates that the total number of respective units is o and p. Therefore, the hydrogenpolysiloxane in the above formula may be a random copolymer or a block copolymer.

 ポリシロキサンBとしては、上記のようなハイドロジェンポリシロキサンの1種類を単独で用いてもよいし、1分子中におけるヒドロシリル基の数が異なる等、構造の異なる2種類以上のハイドロジェンポリシロキサンを併用してもよい。 As the polysiloxane B, one of the above hydrogenpolysiloxanes may be used alone, or two or more hydrogenpolysiloxanes having different structures such as different numbers of hydrosilyl groups in one molecule may be used. They may be used together.

 ポリシロキサンBの重量平均分子量は、5000以上100000以下であることが好ましく、特に7000以上20000以下であることが好ましい。ポリシロキサンBの重量平均分子量が、5000以上の場合、架橋後の離型層が適度な塗膜強度を有するようになり、塗膜の脱落を防止することが可能となる。また、重量平均分子量が100000以下の場合、乾燥後の塗膜の平面性が良好になる。 The weight average molecular weight of polysiloxane B is preferably 5,000 or more and 100,000 or less, and particularly preferably 7,000 or more and 20,000 or less. When the weight-average molecular weight of polysiloxane B is 5000 or more, the release layer after cross-linking has an appropriate coating film strength, making it possible to prevent the coating film from coming off. Moreover, when the weight average molecular weight is 100,000 or less, the flatness of the coating film after drying is improved.

 本発明においては、上記ポリシロキサンAとポリシロキサンBとが、好ましくは後述する白金系触媒等の存在下において付加重合したものが、離型層の主たる成分となる。ここでいう付加重合とは、~Si-CH=CHあるいは~Si-R-CH=CHで表されるポリシロキサンAにおける分子末端または分子側鎖中の官能基と、H-Si~で示されるポリシロキサンBにおける分子末端または分子側鎖中の官能基とが、~Si-CHCH-Si~あるいは~Si-R-CHCH-Si~となる反応のことである。ただし、上記官能基中の「~」は、分子がさらに接続していることを示す。この際の反応を反応式として表すと、下記式のように示される。なお、ここでRは、炭素数1以上8以下のアルキレン基を表す。 In the present invention, polysiloxane A and polysiloxane B, preferably addition-polymerized in the presence of a platinum-based catalyst or the like, which will be described later, are the main components of the release layer. The addition polymerization here means that a functional group in a molecular terminal or a molecular side chain in polysiloxane A represented by ~Si-CH= CH2 or ~Si-R-CH= CH2 and H-Si~ It is a reaction in which the functional group in the molecular terminal or the molecular side chain in the polysiloxane B shown becomes -Si-CH 2 CH 2 -Si- or -Si-R-CH 2 CH 2 -Si-. However, "-" in the above functional groups indicates that the molecules are further connected. When the reaction at this time is expressed as a reaction formula, it is shown as the following formula. In addition, R represents a C1-C8 alkylene group here.

Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005

 (ポリシロキサンの含有量)
 前記ポリシロキサンBの有するヒドロシリル基量と、前記ポリシロキサンAの有するアルケニル基量とのモル比が、前記硬化性組成物中において以下の式(c)を満たすことが好ましい。
 1.0≦Si-H/Si-A≦3.8 (c)
(式中、Si-Hはヒドロシリル基のモル量を、Si-Aはアルケニル基のモル量を示す。)
(Content of polysiloxane)
It is preferable that the molar ratio between the amount of hydrosilyl groups possessed by the polysiloxane B and the amount of alkenyl groups possessed by the polysiloxane A satisfies the following formula (c) in the curable composition.
1.0≤Si-H/Si-A≤3.8 (c)
(In the formula, Si—H represents the molar amount of hydrosilyl groups, and Si—A represents the molar amount of alkenyl groups.)

 つまり、離型層は式(a)を満たすものであり、この式を満たすためには、硬化性組成物中のポリシロキサンBの有するヒドロシリル基量を調整するのが好ましい。ポリシロキサンBの有するヒドロシリル基量がポリシロキサンAの有するアルケニル基量と同等から3.8倍までのモル量であることが望ましい。ポリシロキサンBの有するヒドロシリル基量がポリシロキサンAの有するアルケニル基量と同等以上であると、塗膜が十分な強度となり易く、離型層の脱落等の問題が生じにくくなる。このような観点から、上記モル比が1.5以上であることがより好ましく、2.0を超えることが更に好ましい。 In other words, the release layer satisfies formula (a), and in order to satisfy this formula, it is preferable to adjust the amount of hydrosilyl groups possessed by polysiloxane B in the curable composition. It is desirable that the amount of hydrosilyl groups possessed by polysiloxane B is equal to the amount of alkenyl groups possessed by polysiloxane A and up to 3.8 times the molar amount. When the amount of hydrosilyl groups possessed by polysiloxane B is equal to or greater than the amount of alkenyl groups possessed by polysiloxane A, the coating film tends to have sufficient strength, and problems such as detachment of the release layer are less likely to occur. From this point of view, the molar ratio is more preferably 1.5 or more, and more preferably more than 2.0.

 一方、ポリシロキサンBの有するヒドロシリル基量がポリシロキサンAの有するアルケニル基より3.8倍以下であると、離型層の表面自由エネルギーに含まれる水素結合成分量が適度になり、剥離性が良好となる。このような観点から、上記モル比が3.5以下であることがより好ましく、3.0以下であることが更に好ましい。 On the other hand, when the amount of hydrosilyl groups possessed by polysiloxane B is 3.8 times or less than the amount of alkenyl groups possessed by polysiloxane A, the amount of hydrogen bond components contained in the surface free energy of the release layer becomes appropriate, and the peelability is improved. become good. From this point of view, the molar ratio is more preferably 3.5 or less, and even more preferably 3.0 or less.

 本発明では硬化性組成物中において、ポリシロキサンAとポリシロキサンBとの混合質量比(B/A)を、好ましくは0.5以上5以下、より好ましくは0.9以上3以下とすることで、式(c)を満たすことが好ましい。このような混合質量比(B/A)とすることで、ポリシロキサンAとポリシロキサンBが適度に反応し、いずれかの成分が離型層表面に析出することを防ぐことができる。 In the curable composition of the present invention, the mixing mass ratio (B/A) of polysiloxane A and polysiloxane B is preferably 0.5 or more and 5 or less, more preferably 0.9 or more and 3 or less. and preferably satisfies formula (c). By setting such a mixing mass ratio (B/A), the polysiloxane A and the polysiloxane B react appropriately, and it is possible to prevent either component from precipitating on the surface of the release layer.

 (密着性付与剤C)
 本発明における離型層は、必須成分として密着性付与剤Cを含む。密着性付与剤は離型層を形成する段階においてポリエステルフィルムと離型層の間に移動する傾向があり、ポリエステルフィルムと離型層との密着性を向上させる。これにより該離型フィルムを用いてセラミックグリーンシートを加工するプロセスにおいてポリエステルフィルムから離型層が脱落することを防止でき、結果としてセラミックグリーンシート製造における不良率の低減につながる。
(Adhesion imparting agent C)
The release layer in the present invention contains adhesion imparting agent C as an essential component. The adhesion-imparting agent tends to migrate between the polyester film and the release layer in the step of forming the release layer, thereby improving the adhesion between the polyester film and the release layer. As a result, it is possible to prevent the release layer from coming off from the polyester film in the process of processing the ceramic green sheet using the release film, resulting in a reduction in the defect rate in the production of the ceramic green sheet.

 密着性付与剤には、離型層であるシリコーン樹脂との密着性を有するために、ポリシロキサンA、又はポリシロキサンBの少なくとも一方と反応する官能基を有することが望ましい。具体的にはヒドロシリル基と反応する、ビニル基、エポキシ基、アクリル基、及びメタクリル基からなる群から選ばれる1つ以上の官能基を有することが好ましい。 The adhesion-imparting agent desirably has a functional group that reacts with at least one of polysiloxane A or polysiloxane B in order to have adhesion to the silicone resin that is the release layer. Specifically, it preferably has one or more functional groups selected from the group consisting of vinyl groups, epoxy groups, acrylic groups, and methacrylic groups that react with hydrosilyl groups.

 また、密着性付与剤は、ポリエステルフィルムとの密着性を付与するために、シランカップリング剤であることが望ましい。シランカップリング剤であれば、ポリシロキサンとの相溶性を有しつつ、ポリエステルフィルムとの密着性(例えば水素結合による効果)を良好に付与することが可能になる。 In addition, the adhesion imparting agent is desirably a silane coupling agent in order to impart adhesion to the polyester film. If it is a silane coupling agent, it becomes possible to impart good adhesiveness (for example, the effect of hydrogen bonding) to a polyester film while maintaining compatibility with polysiloxane.

 シランカップリング剤としては、下記の一般式で示されるものが好ましい。 As the silane coupling agent, those represented by the following general formula are preferable.

Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006

 上記一般式中、Xは上記の官能基を表し、aは、1以上3以下の整数を表す。特に、aは1であることが好ましい。 In the above general formula, X 1 represents the above functional group, and a represents an integer of 1 or more and 3 or less. In particular, a is preferably 1.

 Rは、アルコキシ基、アシルオキシ基、ハロゲンから選ばれた加水分解可能な基、またはアルキル基を表す。中でもアルコキシ基、アシルオキシ基が好ましい。アルコキシ基としては、炭素数1~10のアルコキシ基が好ましく、炭素数1~6のアルコキシ基がさらに好ましく、メトキシ基、エトキシ基が特に好ましい。アシルオキシ基としては、炭素数2~11のアシルオキシ基が好ましく、炭素数2~7のアシルオキシ基がさらに好ましく、アセトキシ基が特に好ましい。ハロゲンとしては、クロロ基が好ましい。アルキル基としては、炭素数1以上6以下のアルキル基が好ましい。 R 1 represents a hydrolyzable group selected from an alkoxy group, an acyloxy group, a halogen, or an alkyl group. Among them, an alkoxy group and an acyloxy group are preferable. As the alkoxy group, an alkoxy group having 1 to 10 carbon atoms is preferable, an alkoxy group having 1 to 6 carbon atoms is more preferable, and a methoxy group and an ethoxy group are particularly preferable. The acyloxy group is preferably an acyloxy group having 2 to 11 carbon atoms, more preferably an acyloxy group having 2 to 7 carbon atoms, and particularly preferably an acetoxy group. A chloro group is preferred as the halogen. As the alkyl group, an alkyl group having 1 to 6 carbon atoms is preferable.

 Rが上記のような態様であることによって、基材フィルムと離型層との密着性に優れたものとなる。 When R 1 is in the above aspect, the adhesiveness between the base film and the release layer is excellent.

 上記一般式においては、(4-a)個のRがSiに結合していることを表すが、これらのRはそれぞれ同じ種類のものであってもよいし、異なる種類のものであってもよい。本発明においては、(4-a)個のRのうち、その少なくとも1つがアルコキシ基またはアシルオキシ基である態様が好ましく、全てのRがアルコキシ基またはアシルオキシ基である態様がさらに好ましい。 In the above general formula, (4-a) R 1s are bound to Si, and these R 1s may be of the same type or of different types. may In the present invention, it is preferable that at least one of the (4-a) R 1 's is an alkoxy group or an acyloxy group, and it is more preferable that all R 1 's are an alkoxy group or an acyloxy group.

 一般式のようなシランカップリング剤は、1種又は2種以上を併用してもよく、2種以上のシランカップリング剤を反応させて得られる反応物を使用することも可能である。 The silane coupling agents of the general formula may be used singly or in combination of two or more, and it is also possible to use a reactant obtained by reacting two or more silane coupling agents.

 また、シランカップリング剤とポリエステルフィルムとの密着性を向上させるために、シランカップリング剤に酢酸やパラトルエンスルホン酸等を添加してもよい。 In addition, acetic acid, p-toluenesulfonic acid, or the like may be added to the silane coupling agent in order to improve the adhesion between the silane coupling agent and the polyester film.

 前記硬化性組成物中における密着性付与剤の添加量は、ポリシロキサンAとポリシロキサンBとの合計量に対して、1質量%以上10質量%以下であることが望ましく、より好ましくは2.0質量%以上8.0質量%以下であることが望ましい、1質量%以上であると、離型層と基材の密着性が良好になり、また、10質量%以下であると余分な密着性付与剤が離型層に悪影響を与えにくく、平面性や剥離性が良好になる。 The amount of the adhesion promoter added to the curable composition is desirably 1% by mass or more and 10% by mass or less, more preferably 2., based on the total amount of polysiloxane A and polysiloxane B. It is desirable to be 0% by mass or more and 8.0% by mass or less. When it is 1% by mass or more, the adhesion between the release layer and the substrate is good, and when it is 10% by mass or less, excessive adhesion The property-imparting agent is less likely to adversely affect the release layer, resulting in good flatness and releasability.

 (触媒D)
 離型層を形成するための硬化性組成物は、さらに触媒Dを含有することが好ましい。触媒としては、硬化性組成物の硬化反応を促進させることができるものであれば特に限定されないが、中でも白金族金属系化合物が好ましい。
(Catalyst D)
The curable composition for forming the release layer preferably further contains a catalyst D. The catalyst is not particularly limited as long as it can accelerate the curing reaction of the curable composition, but platinum group metal compounds are preferred.

 白金族金属系化合物としては、例えば、微粒子状白金、炭素粉末担体上に吸着された微粒子状白金、塩化白金酸、アルコール変性塩化白金酸、塩化白金酸のオレフィン錯体、パラジウム、ロジウム等が挙げられる。硬化性組成物がかかる触媒を含有することで、当該硬化性組成物の硬化反応をより効率良く進行させることができる。 Examples of platinum group metal compounds include fine particle platinum, fine particle platinum adsorbed on a carbon powder carrier, chloroplatinic acid, alcohol-modified chloroplatinic acid, olefin complexes of chloroplatinic acid, palladium, rhodium, and the like. . When the curable composition contains such a catalyst, the curing reaction of the curable composition can proceed more efficiently.

 本実施形態に係る硬化性組成物中における触媒Dの含有量は、硬化反応速度を好適な範囲に調整する観点から、触媒D以外の固形分の合計量に対し、1ppm以上1000ppm以下程度であることが好ましい。 The content of the catalyst D in the curable composition according to the present embodiment is about 1 ppm or more and 1000 ppm or less with respect to the total amount of solids other than the catalyst D from the viewpoint of adjusting the curing reaction rate to a suitable range. is preferred.

 (任意成分)
 硬化性組成物は、上記成分の他、反応抑制剤、溶媒、反応性官能基を有さないシリコーン樹脂、帯電防止剤等を含有していてもよい。
(Optional component)
In addition to the above components, the curable composition may contain a reaction inhibitor, a solvent, a silicone resin having no reactive functional group, an antistatic agent, and the like.

 (離型層の物性)
 離型層の厚さは、0.005μm以上0.1μm以下であることが好ましく、特に0.01μm以上0.05μm以下であることが好ましい。離型層の厚さが0.005μm以上であると、離型層としての機能を発揮するのに十分な厚みとなる。一方、離型層の厚さが0.1μm以下の場合、離型層からの塗膜の脱落が発生し難くなる。
(Physical properties of release layer)
The thickness of the release layer is preferably 0.005 μm or more and 0.1 μm or less, and more preferably 0.01 μm or more and 0.05 μm or less. When the thickness of the release layer is 0.005 μm or more, the thickness is sufficient to exhibit the function as a release layer. On the other hand, when the thickness of the release layer is 0.1 μm or less, the coating film is less likely to come off from the release layer.

 離型層の表面は、その上で塗布・成型するセラミックグリーンシートに欠陥を発生させないために、平坦であることが望ましく、領域表面平均粗さ(Sa)が7nm以下かつ最大突起高さ(Sp)が100nm以下であることが好ましい。さらには領域表面平均粗さ5nm以下かつ最大突起高さ80nm以下であることがより好ましい。例えば、最大突起高さ(Sp)は45nm以下であってもよい。 The surface of the release layer is desirably flat so as not to cause defects in the ceramic green sheet coated and molded thereon. ) is preferably 100 nm or less. More preferably, the average surface roughness of the region is 5 nm or less and the maximum projection height is 80 nm or less. For example, the maximum protrusion height (Sp) may be 45 nm or less.

 領域表面粗さが7nm以下、且つ、最大突起高さが100nm以下であれば、セラミックグリーンシート形成時に、ピンホールなどの欠点の発生がなく、歩留まりが良好で好ましい。領域表面平均粗さ(Sa)は小さいほど好ましいと言えるが、0.1nm以上であっても構わず、0.3nm以上であっても構わない。最大突起高さ(Sp)も小さいほど好ましいと言えるが、1nm以上でも構わず、3nm以上であっても構わない。 If the surface roughness of the region is 7 nm or less and the maximum protrusion height is 100 nm or less, defects such as pinholes do not occur when forming the ceramic green sheet, and the yield is favorable, which is preferable. It can be said that the smaller the region surface average roughness (Sa) is, the more preferable it is. It can be said that the smaller the maximum protrusion height (Sp) is, the more preferable it is, but the maximum protrusion height (Sp) may be 1 nm or more, or 3 nm or more.

 [ポリエステルフィルム]
 本発明における基材フィルム(以下、基材と記載することがある)として用いるポリエステルフィルムは、ポリエステルを樹脂成分として含むフィルムであり、好ましくは、樹脂成分中にポリエステルを最も多く含有(例えば90質量%以上)するフィルムである。
[Polyester film]
The polyester film used as the base film (hereinafter sometimes referred to as base film) in the present invention is a film containing polyester as a resin component, and preferably contains the most polyester in the resin component (for example, 90 mass % or more).

 ポリエステルフィルムを構成するポリエステルは、特に限定されず、離型フィルム用基材として通常一般に使用されているポリエステルをフィルム成形したものを使用することが出来る。好ましくは、芳香族二塩基酸成分とジオール成分からなる結晶性の線状飽和ポリエステルであり、例えば、ポリエチレンテレフタレート、ポリエチレン-2,6-ナフタレート、ポリブチレンテレフタレート、ポリトリメチレンテレフタレート又はこれらの樹脂の構成成分を主成分とする共重合体がさらに好適である。 The polyester that constitutes the polyester film is not particularly limited, and it is possible to use a film formed from polyester that is commonly used as a release film base material. Preferred are crystalline linear saturated polyesters comprising an aromatic dibasic acid component and a diol component, such as polyethylene terephthalate, polyethylene-2,6-naphthalate, polybutylene terephthalate, polytrimethylene terephthalate, or resins thereof. Copolymers based on constituents are more preferred.

 とりわけ、ポリエチレンテレフタレートから形成されたポリエステルフィルムが特に好適である。ポリエチレンテレフタレートは、エチレンテレフタレートの繰り返し単位が好ましくは90モル%以上、より好ましくは95モル%以上であり、他のジカルボン酸成分、ジオール成分が少量共重合されていてもよい。例えば、コストの点から、テレフタル酸とエチレングリコールのみから製造されたものが好ましい。また、本発明の離型フィルムの効果を阻害しない範囲内で、公知の添加剤、例えば、酸化防止剤、光安定剤、紫外線吸収剤、結晶化剤などを添加してもよい。ポリエステルフィルムは双方向の弾性率の高さ等の理由から二軸配向ポリエステルフィルムであることが好ましい。 A polyester film formed from polyethylene terephthalate is particularly suitable. The polyethylene terephthalate preferably contains 90 mol % or more, more preferably 95 mol % or more of repeating units of ethylene terephthalate, and may be copolymerized with other dicarboxylic acid components and diol components in small amounts. For example, from the viewpoint of cost, one produced only from terephthalic acid and ethylene glycol is preferable. In addition, known additives such as antioxidants, light stabilizers, ultraviolet absorbers, crystallization agents, etc. may be added within limits that do not impair the effects of the release film of the present invention. The polyester film is preferably a biaxially oriented polyester film because of its high bidirectional elastic modulus.

 上記ポリエチレンテレフタレートフィルムの固有粘度は0.50dl/g以上0.70dl/g以下が好ましく、0.52dl/g以上0.62dl/g以下がより好ましい。固有粘度が0.50dl/g以上の場合、延伸工程で破断が多く発生することがなく好ましい。逆に、0.70dl/g以下の場合、所定の製品幅に裁断するときの裁断性が良く、寸法不良が発生しないので好ましい。また、原料ペレットは十分に真空乾燥することが好ましい。 The intrinsic viscosity of the polyethylene terephthalate film is preferably 0.50 dl/g or more and 0.70 dl/g or less, more preferably 0.52 dl/g or more and 0.62 dl/g or less. When the intrinsic viscosity is 0.50 dl/g or more, it is preferable because many breakages do not occur in the stretching process. Conversely, when it is 0.70 dl/g or less, the cutting performance is good when cutting into a predetermined product width, and dimensional defects do not occur, which is preferable. Moreover, it is preferable to sufficiently vacuum-dry the raw material pellets.

 なお、本明細書において、単に「ポリエステルフィルム」と記載する場合、表面層Aと表面層Bを有する(積層した)ポリエステルフィルムを意味する場合がある。 In the present specification, the term "polyester film" may mean a (laminated) polyester film having a surface layer A and a surface layer B.

 本発明におけるポリエステルフィルムの製造方法は特に限定されず、従来一般に用いられている方法を用いることが出来る。例えば、前記ポリエステルを押出機にて溶融して、フィルム状に押出し、回転冷却ドラムにて冷却することにより未延伸フィルムを得て、該未延伸フィルムを二軸延伸することにより得ることが出来る。二軸延伸フィルムは、縦方向あるいは横方向の一軸延伸フィルムを横方向または縦方向に逐次二軸延伸する方法、或いは未延伸フィルムを縦方向と横方向に同時二軸延伸する方法で得ることが出来る。 The method for producing the polyester film in the present invention is not particularly limited, and conventionally commonly used methods can be used. For example, the polyester can be melted by an extruder, extruded into a film, cooled by a rotating cooling drum to obtain an unstretched film, and biaxially stretched to obtain the unstretched film. The biaxially stretched film can be obtained by a method of sequentially biaxially stretching a longitudinally or laterally uniaxially stretched film in the lateral direction or longitudinal direction, or by a method of simultaneously biaxially stretching an unstretched film in the longitudinal direction and the lateral direction. I can.

 本発明において、ポリエステルフィルム延伸時の延伸温度はポリエステルの二次転移点(Tg)以上とすることが好ましい。縦、横おのおのの方向に1倍以上8倍以下、特に2倍以上6倍以下の延伸をすることが好ましい。 In the present invention, the stretching temperature during stretching of the polyester film is preferably at least the secondary transition point (Tg) of the polyester. It is preferable that the film is stretched 1- to 8-fold, particularly 2- to 6-fold, in each of the longitudinal and transverse directions.

 上記ポリエステルフィルムは、厚みが12μm以上50μm以下であることが好ましく、さらに好ましくは15μm以上38μm以下であり、より好ましくは、19μm以上33μm以下である。フィルムの厚みが12μm以上であれば、フィルム生産時や加工工程、成型の時に、熱により変形するおそれがなく好ましい。一方、フィルムの厚みが50μm以下であれば、使用後に廃棄するフィルムの量が極度に多くならず、環境負荷を小さくする上で好ましい。 The thickness of the polyester film is preferably 12 µm or more and 50 µm or less, more preferably 15 µm or more and 38 µm or less, and still more preferably 19 µm or more and 33 µm or less. If the thickness of the film is 12 μm or more, it is preferable because there is no risk of deformation due to heat during film production, processing, and molding. On the other hand, if the thickness of the film is 50 μm or less, the amount of the film to be discarded after use is not excessively increased, which is preferable for reducing the environmental load.

 上記ポリエステルフィルム基材は、単層であっても2層以上の多層であっても構わない。例えば、基材フィルムは、粒径1.0μm以上の粒子を実質的に含まない表面層Aと、粒子を含む表面層Bとを有するポリエステルフィルムであってもよい。好ましくは、表面層Aは、粒径1.0μm以上の無機粒子を実質的に含まない。 The above polyester film substrate may be a single layer or a multilayer of two or more layers. For example, the base film may be a polyester film having a surface layer A substantially free of particles with a particle size of 1.0 μm or more and a surface layer B containing particles. Preferably, the surface layer A does not substantially contain inorganic particles having a particle size of 1.0 μm or more.

 この態様において、表面層Aに、粒径1.0μm未満1nm以上の粒子は存在してもよい。表面層Aが、粒径1.0μm以上の粒子、例えば無機粒子を実質的に含まないことにより、樹脂シートに基材中の粒子形状が転写して不具合が生じることを低減できる。 In this aspect, the surface layer A may contain particles with a particle size of less than 1.0 μm and 1 nm or more. When the surface layer A does not substantially contain particles having a particle size of 1.0 μm or more, such as inorganic particles, it is possible to reduce the occurrence of problems due to transfer of the particle shape in the base material to the resin sheet.

 一態様において、表面層Aは、粒径1.0μm未満の粒子についても含有しないことで、樹脂シートに基材中の粒子形状が転写して不具合が生じることを、より効果的に抑制できる。 In one aspect, the surface layer A does not contain particles with a particle size of less than 1.0 μm, so that it is possible to more effectively suppress the transfer of the particle shape in the base material to the resin sheet and the occurrence of problems.

 一態様において、上記ポリエステルフィルム基材は、少なくとも片面には実質的に無機粒子を含まない表面層Aを有する積層フィルムであることが好ましい。これにより、更に効果的に、樹脂シートに基材中の粒子形状が転写して不具合が生じることを抑制できる。 In one aspect, the polyester film substrate is preferably a laminated film having a surface layer A substantially free of inorganic particles on at least one side. As a result, it is possible to more effectively suppress the transfer of the particle shapes in the base material to the resin sheet and the occurrence of problems.

 例えば、粒径1.0μm未満の粒子を実質的に含有しない表面層Aは、粒径1.0μm以上の粒子についても実質的に含まない態様が好ましい。 For example, it is preferable that the surface layer A, which does not substantially contain particles with a particle size of less than 1.0 μm, substantially does not contain particles with a particle size of 1.0 μm or more.

 ここで、本発明において、「粒子を実質的に含有しない」とは、例えば、1.0μm未満の無機粒子の場合、ケイ光X線分析で無機元素を定量した場合に50ppm以下、好ましくは10ppm以下、最も好ましくは検出限界以下となる含有量を意味する。これは積極的に粒子をフィルム中に添加させなくても、外来異物由来のコンタミ成分や、原料樹脂あるいはフィルムの製造工程におけるラインや装置に付着した汚れが剥離して、フィルム中に混入する場合があるためである。また、「粒径1.0μm以上の粒子を実質的に含まない」とは、積極的に粒径1.0μm以上の粒子を含まないことを意味する。 Here, in the present invention, “substantially free of particles” means, for example, in the case of inorganic particles of less than 1.0 μm, when the inorganic elements are quantified by fluorescence X-ray analysis, it is 50 ppm or less, preferably 10 ppm. Hereinafter, most preferably, it means a content below the detection limit. Even if particles are not actively added to the film, contaminants derived from foreign substances and dirt adhering to the raw material resin or the lines and equipment in the film manufacturing process peel off and enter the film. This is because Further, "substantially free of particles with a particle size of 1.0 μm or more" means that particles with a particle size of 1.0 μm or more are intentionally not included.

 2層以上の多層構成からなる積層ポリエステルフィルムの場合は、実質的に無機粒子を含有しない表面層Aの反対面には、無機粒子などを含有することができる表面層Bを有することが好ましい。 In the case of a laminated polyester film having a multilayer structure of two or more layers, it is preferable to have a surface layer B that can contain inorganic particles, etc. on the opposite side of the surface layer A that does not substantially contain inorganic particles.

 積層構成としては、離型層を塗布する側の層をA層、その反対面の層をB層、これら以外の芯層をC層とすると、厚み方向の層構成は離型層/A/B、あるいは離型層/A/C/B等の積層構造が挙げられる。当然ながらC層は複数の層構成であっても構わない。また、表面層Bには無機粒子を含まないこともできる。その場合、フィルムをロール状に巻き取るための滑り性付与するため、表面層B上には少なくとも無機粒子とバインダーを含んだコート層Dを設けることが好ましい。 As a laminated structure, the layer on the side where the release layer is applied is layer A, the layer on the opposite side is layer B, and the core layer other than these is layer C. The layer configuration in the thickness direction is release layer / A / B, or a laminated structure such as release layer/A/C/B. Of course, the C layer may have a multi-layer structure. In addition, the surface layer B may not contain inorganic particles. In that case, it is preferable to provide a coating layer D containing at least inorganic particles and a binder on the surface layer B in order to impart lubricity for winding the film into a roll.

 本発明におけるポリエステルフィルム基材において、離型層を塗布する面の反対面を形成する表面層Bは、フィルムの滑り性や空気の抜けやすさの観点から、無機粒子を含有することが好ましく、特にシリカ粒子及び/又は炭酸カルシウム粒子を用いることが好ましい。含有される無機粒子含有量は、表面層B中に無機粒子の合計で5000ppm以上15000ppm以下含有することが好ましい。 In the polyester film substrate of the present invention, the surface layer B, which forms the surface opposite to the surface to which the release layer is applied, preferably contains inorganic particles from the viewpoint of film slipperiness and ease of air release. In particular, silica particles and/or calcium carbonate particles are preferably used. The content of the inorganic particles contained in the surface layer B is preferably 5000 ppm or more and 15000 ppm or less in total of the inorganic particles.

 このとき、表面層Bのフィルムの領域表面平均粗さ(Sa)は、1nm以上40nm以下の範囲であることが好ましい。より好ましくは、5nm以上35nm以下の範囲である。シリカ粒子及び/又は炭酸カルシウム粒子の合計が5000ppm以上、Saが1nm以上の場合には、フィルムをロール状に巻き上げるときに、空気を均一に逃がすことができ、巻き姿が良好で平面性良好により、超薄層セラミックグリーンシートの製造に好適なものとなる。また、シリカ粒子及び/又は炭酸カルシウム粒子の合計が15000ppm以下、Saが40nm以下の場合には、滑剤の凝集が生じにくく、粗大突起ができないため、超薄層のセラミックグリーンシート製造時に品質が安定し好ましい。 At this time, the area surface average roughness (Sa) of the film of the surface layer B is preferably in the range of 1 nm or more and 40 nm or less. More preferably, it is in the range of 5 nm or more and 35 nm or less. When the total amount of silica particles and/or calcium carbonate particles is 5000 ppm or more and Sa is 1 nm or more, when the film is wound into a roll, air can be released uniformly, resulting in a good roll shape and good flatness. , suitable for the production of ultra-thin ceramic green sheets. In addition, when the total amount of silica particles and/or calcium carbonate particles is 15000 ppm or less and Sa is 40 nm or less, aggregation of the lubricant is difficult to occur and coarse protrusions cannot be formed, so that the quality is stable when manufacturing an ultra-thin ceramic green sheet. and preferred.

 上記B層に含有する粒子としては、シリカ及び/又は炭酸カルシウム以外に不活性な無機粒子及び/又は耐熱性有機粒子なども用いることができるが、透明性やコストの観点からシリカ粒子及び/又は炭酸カルシウム粒子を用いることがより好ましい。また、他に使用できる無機粒子としては、アルミナ-シリカ複合酸化物粒子、ヒドロキシアパタイト粒子などが挙げられる。また、耐熱性有機粒子としては、架橋ポリアクリル系粒子、架橋ポリスチレン粒子、ベンゾグアナミン系粒子などが挙げられる。またシリカ粒子を用いる場合、多孔質のコロイダルシリカが好ましく、炭酸カルシウム粒子を用いる場合は、ポリアクリル酸系の高分子化合物で表面処理を施した軽質炭酸カルシウムが、滑剤の脱落防止の観点から好ましい。 As the particles contained in the B layer, inactive inorganic particles and/or heat-resistant organic particles can be used in addition to silica and/or calcium carbonate. More preferably, calcium carbonate particles are used. Inorganic particles that can also be used include alumina-silica composite oxide particles, hydroxyapatite particles, and the like. Examples of heat-resistant organic particles include crosslinked polyacrylic particles, crosslinked polystyrene particles, and benzoguanamine particles. When silica particles are used, porous colloidal silica is preferable, and when calcium carbonate particles are used, light calcium carbonate surface-treated with a polyacrylic acid-based polymer compound is preferable from the viewpoint of preventing the lubricant from falling off. .

 上記表面層Bに添加する無機粒子の平均粒子径は、0.1μm以上2.0μm以下が好ましく、0.5μm以上1.0μm以下が特に好ましい。無機粒子の平均粒子径が0.1μm以上であれば、離型フィルムの滑り性が良好であり好ましい。また、平均粒子径が2.0μm以下であれば、離型層表面の平滑性に悪影響を与える恐れがないため、セラミックグリーンシートにピンホールが発生するおそれがなく好ましい。なお、粒子の平均粒子径の測定方法は、加工後のフィルムの断面の粒子を走査型電子顕微鏡で観察を行い、粒子100個を観察し、その平均値をもって平均粒子径とする方法で行うことができる。本発明の目的を満たすものであれば、粒子の形状は特に限定されるものでなく、球状粒子、不定形の球状でない粒子を使用できる。不定形の粒子の粒子径は円相当径として計算することができる。円相当径は、観察された粒子の面積を円周率(π)で除し、平方根を算出し2倍した値である。 The average particle size of the inorganic particles added to the surface layer B is preferably 0.1 µm or more and 2.0 µm or less, and particularly preferably 0.5 µm or more and 1.0 µm or less. If the average particle size of the inorganic particles is 0.1 μm or more, the slipperiness of the release film is good, which is preferable. Further, when the average particle size is 2.0 μm or less, there is no fear of adversely affecting the smoothness of the surface of the release layer, and thus there is no fear of generating pinholes in the ceramic green sheet, which is preferable. The average particle diameter of the particles is measured by observing the cross section of the film after processing with a scanning electron microscope, observing 100 particles, and taking the average value as the average particle diameter. can be done. The shape of the particles is not particularly limited as long as it satisfies the object of the present invention, and spherical particles and irregularly shaped non-spherical particles can be used. The particle diameter of amorphous particles can be calculated as a circle equivalent diameter. The circle-equivalent diameter is a value obtained by dividing the observed particle area by the circular constant (π), calculating the square root, and doubling the result.

 上記離型層を設ける側の層である表面層Aには、ピンホール低減の観点から、滑剤などの無機粒子の混入を防ぐため、再生原料などを使用しないことが好ましい。 From the viewpoint of reducing pinholes, it is preferable not to use recycled raw materials for the surface layer A, which is the layer on which the release layer is provided, in order to prevent contamination of inorganic particles such as lubricants.

 上記離型層を設ける側の層である表面層Aの厚み比率は、基材フィルムの全層厚みの20%以上50%以下であることが好ましい。20%以上であれば、表面層Bなどに含まれる粒子の影響をフィルム内部から受けづらく、領域表面平均粗さSaが上記の範囲を満足することが容易であり好ましい。基材フィルムの全層の厚みの50%以下であると、表面層Bにおける再生原料の使用比率を増やすことができ、環境負荷が小さく好ましい。 The thickness ratio of the surface layer A, which is the layer on which the release layer is provided, is preferably 20% or more and 50% or less of the total layer thickness of the base film. If it is 20% or more, the inside of the film is less likely to be affected by the particles contained in the surface layer B, etc., and it is easy for the region surface average roughness Sa to satisfy the above range, which is preferable. When the total thickness of the base film is 50% or less of the total thickness of the base film, the ratio of the recycled raw material used in the surface layer B can be increased, and the environmental load is small, which is preferable.

 また、経済性の観点から上記表面層A以外の層(表面層Bもしくは前述の中間層C)には、50質量%以上90質量%以下のフィルム屑やペットボトルの再生原料を使用することができる。この場合でも、B層に含まれる滑剤の種類や量、粒径ならびに領域表面平均粗さ(Sa)は、上記の範囲を満足することが好ましい。 In addition, from the viewpoint of economy, it is possible to use 50% by mass or more and 90% by mass or less of recycled film scraps or PET bottle raw materials for layers other than the surface layer A (surface layer B or intermediate layer C). can. Even in this case, the type and amount of the lubricant contained in the B layer, the particle size, and the area surface average roughness (Sa) preferably satisfy the above ranges.

 また、後に塗布する離型層などの密着性を向上させたり、帯電を防止するなどのために表面層A及び/または表面層Bの表面に製膜工程内の延伸前または一軸延伸後のフィルムにコート層Dを設けてもよく、コロナ処理などを施すこともできる。 In addition, in order to improve the adhesion of a release layer to be applied later, or to prevent electrification, a film before stretching or after uniaxial stretching is applied to the surface of the surface layer A and / or surface layer B in the film forming process. A coating layer D may be provided on the surface, and corona treatment or the like may be applied.

 表面層Bに粒子を含まない場合は、表面層B上に粒子を含んだコート層Dで易滑性を持たせることも好ましい。本コート層Dを設ける手段は、特に限定されないが、ポリエステルフィルムの製膜中に塗工する所謂インラインコート法で設けることが好ましい。また、ポリエステルフィルムの離型層を積層しない側の表面に易滑性を持たせるコート層Dを設ける場合には、ポリエステルフィルムは表面層A及びBを有している必要はなく、無機粒子を実質的に含有しない単層のポリエステルフィルムからなっていてもよい。 When the surface layer B does not contain particles, it is also preferable that the surface layer B is coated with a coating layer D containing particles to provide lubricity. The means for providing the main coat layer D is not particularly limited, but it is preferably provided by a so-called in-line coating method in which coating is performed during film formation of the polyester film. Further, in the case of providing a coating layer D that provides slipperiness on the surface of the polyester film on which the release layer is not laminated, the polyester film does not need to have the surface layers A and B, and inorganic particles are not included. It may consist of a single-layer polyester film that does not contain substantially.

 表面層Bの領域表面平均粗さ(Sa)は、40nm以下が好ましく、35nm以下がより好ましく、さらに好ましくは30nm以下である。また、表面層Bあるいは単層ポリエステルフィルムの離型層を積層しない側の表面にコート層Dで易滑性を持たせる場合は、その表面のSaは、コート層Dを積層した表面を測定するものとし、前記の表面層Bの領域表面平均粗さ(Sa)と同等範囲であることが好ましい。 The area surface average roughness (Sa) of the surface layer B is preferably 40 nm or less, more preferably 35 nm or less, and still more preferably 30 nm or less. In addition, when the surface layer B or the surface of the single-layer polyester film on which the release layer is not laminated is provided with a coat layer D to give slipperiness, the surface Sa is measured on the surface on which the coat layer D is laminated. However, it is preferably in the same range as the region surface average roughness (Sa) of the surface layer B described above.

 前記のポリエステルフィルムについて離型層を積層しない側の表面のコート層D中には、少なくともバインダー樹脂及び粒子が含まれていることが好ましい。 It is preferable that at least a binder resin and particles are contained in the coat layer D on the side of the polyester film on which the release layer is not laminated.

 (コート層Dのバインダー樹脂)
 易滑塗布層を構成するバインダー樹脂としては特に限定されないが、ポリマーの具体例としては、ポリエステル樹脂、アクリル樹脂、ウレタン樹脂、ポリビニル系樹脂(ポリビニルアルコール等)、ポリアルキレングリコール、ポリアルキレンイミン、メチルセルロース、ヒドロキシセルロース、でんぷん類等が挙げられる。これらの中でも粒子の保持、密着性の観点から、ポリエステル樹脂、アクリル樹脂、ウレタン樹脂を使用することが好ましい。また、ポリエステルフィルムとのなじみを考慮した場合、ポリエステル樹脂が特に好ましい。溶剤への溶解性、分散性、さらには基材フィルムや他の層との接着性を達成させるため、バインダーのポリエステルは共重合ポリエステルであることが好ましい。なお、ポリエステル樹脂はポリウレタン変性されていても良い。また、ポリエステル基材フィルム上の易滑塗布層を構成する他の好ましいバインダー樹脂としてはウレタン樹脂が挙げられる。ウレタン樹脂としてはポリカーボネートポリウレタン樹脂が挙げられる。さらに、ポリエステル樹脂、ポリウレタン樹脂は併用しても良く、上記の他のバインダー樹脂を併用してもよい。
(Binder resin for coat layer D)
The binder resin constituting the easy-smooth coating layer is not particularly limited, but specific examples of polymers include polyester resins, acrylic resins, urethane resins, polyvinyl resins (polyvinyl alcohol, etc.), polyalkylene glycol, polyalkyleneimine, and methyl cellulose. , hydroxycellulose, starches, and the like. Among these resins, polyester resins, acrylic resins, and urethane resins are preferably used from the viewpoint of particle retention and adhesion. In addition, polyester resin is particularly preferable in consideration of compatibility with the polyester film. In order to achieve solubility in solvents, dispersibility, and adhesiveness to the substrate film and other layers, the binder polyester is preferably a copolymerized polyester. Incidentally, the polyester resin may be modified with polyurethane. Urethane resin is another preferable binder resin that constitutes the easy-slip coating layer on the polyester base film. Urethane resins include polycarbonate polyurethane resins. Furthermore, polyester resins and polyurethane resins may be used in combination, and other binder resins may be used in combination.

 (コート層Dの架橋剤)
 本発明において、易滑塗布層中に架橋構造を形成させるために、易滑塗布層は架橋剤が含まれて形成されていてもよい。架橋剤を含有させることにより、高温高湿下での密着性を更に向上させることが可能になる。具体的な架橋剤としては、尿素系、エポキシ系、メラミン系、イソシアネート系、オキサゾリン系、カルボジイミド系、アジリジン等が挙げられる。また、架橋反応を促進させるため、触媒等を必要に応じて適宜使用することができる。
(Crosslinking agent for coat layer D)
In the present invention, the slippery coating layer may contain a cross-linking agent to form a crosslinked structure in the slippery coating layer. By containing a cross-linking agent, it becomes possible to further improve adhesion under high temperature and high humidity conditions. Specific cross-linking agents include urea-based, epoxy-based, melamine-based, isocyanate-based, oxazoline-based, carbodiimide-based, aziridine and the like. In addition, a catalyst or the like can be appropriately used as necessary in order to accelerate the cross-linking reaction.

 (コート層D中の粒子)
 易滑塗布層は、表面にすべり性を付与するために、滑剤粒子を含むことが好ましい。粒子は、無機粒子であっても、有機粒子であってもよく、特に限定されるものではないが、(1)シリカ、カオリナイト、タルク、軽質炭酸カルシウム、重質炭酸カルシウム、ゼオライト、アルミナ、硫酸バリウム、カーボンブラック、酸化亜鉛、硫酸亜鉛、炭酸亜鉛、酸化ジルコニウム、二酸化チタン、サチンホワイト、珪酸アルミニウム、ケイソウ土、珪酸カルシウム、水酸化アルミニウム、加水ハロイサイト、炭酸カルシウム、炭酸マグネシウム、リン酸カルシウム、水酸化マグネシウム、硫酸バリウム等の無機粒子、(2)アクリルあるいはメタアクリル系、塩化ビニル系、酢酸ビニル系、ナイロン、スチレン/アクリル系、スチレン/ブタジエン系、ポリスチレン/アクリル系、ポリスチレン/イソプレン系、ポリスチレン/イソプレン系、メチルメタアクリレート/ブチルメタアクリレート系、メラミン系、ポリカーボネート系、尿素系、エポキシ系、ウレタン系、フェノール系、ジアリルフタレート系、ポリエステル系等の有機粒子が挙げられるが、塗布層に適度な滑り性を与えるために、シリカが特に好ましく使用される。
(Particles in Coat Layer D)
The easy-slip coating layer preferably contains lubricant particles in order to impart slipperiness to the surface. The particles may be inorganic particles or organic particles, and are not particularly limited, and include (1) silica, kaolinite, talc, light calcium carbonate, heavy calcium carbonate, zeolite, alumina, Barium sulfate, carbon black, zinc oxide, zinc sulfate, zinc carbonate, zirconium oxide, titanium dioxide, satin white, aluminum silicate, diatomaceous earth, calcium silicate, aluminum hydroxide, hydrated halloysite, calcium carbonate, magnesium carbonate, calcium phosphate, hydroxide inorganic particles such as magnesium and barium sulfate; Examples include organic particles such as isoprene, methyl methacrylate/butyl methacrylate, melamine, polycarbonate, urea, epoxy, urethane, phenol, diallyl phthalate, and polyester. Silica is particularly preferably used to impart lubricity.

 粒子の平均粒径は10nm以上であることが好ましく、より好ましくは20nm以上であり、さらに好ましくは30nm以上である。粒子の平均粒径は10nm以上であると、凝集しにくく、滑り性が確保できて好ましい。 The average particle size of the particles is preferably 10 nm or more, more preferably 20 nm or more, and still more preferably 30 nm or more. When the average particle size of the particles is 10 nm or more, it is preferable because the particles are less likely to aggregate and the lubricity can be ensured.

 粒子の平均粒径は1000nm以下であることが好ましく、より好ましくは800nm以下であり、さらに好ましくは600nm以下である。粒子の平均粒径が1000nm以下であると、透明性が保たれ、また、粒子が脱落することがなく好ましい。 The average particle size of the particles is preferably 1000 nm or less, more preferably 800 nm or less, and even more preferably 600 nm or less. When the average particle diameter of the particles is 1000 nm or less, the transparency is maintained and the particles do not fall off, which is preferable.

 また、例えば、平均粒径が10nm以上270nm以下程度の小さい粒子と、平均粒径が300nm以上1000nm以下程度の大きい粒子を混用することも、後述の領域表面平均粗さ(Sa)、最大突起高さ(RP)を小さく保ちながら、粗さ曲線要素の平均長さ(RSm)を小さくして、すべり性と平滑性を両立させる上で好ましく、特に好ましくは、30nm以上250nm以下の小さい粒子と、平均粒径が350nm以上600nm以下の大きい粒子を併用することである。小さい粒子と大きい粒子を混用する場合、塗布層固形分全体に対して、小さい粒子の質量含有率を大きい粒子の質量含有率より大きくしておくことが好ましい。 Further, for example, a mixture of small particles having an average particle diameter of about 10 nm or more and 270 nm or less and large particles having an average particle diameter of about 300 nm or more and 1000 nm or less can also be used, which will be described later. It is preferable to reduce the average length (RSm) of the roughness curve element while keeping the roughness (RP) small, and to achieve both slipperiness and smoothness, particularly preferably small particles of 30 nm or more and 250 nm or less, It is to use large particles having an average particle size of 350 nm or more and 600 nm or less. When small particles and large particles are mixed, it is preferable that the mass content of small particles is larger than the mass content of large particles with respect to the total solid content of the coating layer.

 [離型層の形成]
 本発明において、離型層の形成方法は、特に限定されず、離型性の化合物を溶解もしくは分散させた塗液を、基材のポリエステルフィルムの一方の面に塗布等により展開し、溶媒等を乾燥により除去後、硬化させる方法が用いられる。
[Formation of release layer]
In the present invention, the method for forming the release layer is not particularly limited. is removed by drying and then cured.

 本発明の離型層を基材フィルム上に溶液塗布により塗布する場合の溶媒乾燥の乾燥温度は、50℃以上、120℃以下であることが好ましく、60℃以上、100℃以下であることがより好ましい。その乾燥時間は、30秒以下が好ましく、20秒以下がより好ましい。さらに溶剤乾燥後、活性エネルギー線を照射し硬化反応を進行させることが好ましい。この時用いる活性エネルギー線としては、紫外線、電子線、X線などを使用することができるが、紫外線が使用しやすく好ましい。照射する紫外線量としては光量で30mJ/cm以上300mJ/cm以下が好ましく、より好ましくは、30mJ/cm以上200mJ/cm以下である。30mJ/cm以上とすることで組成物の硬化が十分進行し、300mJ/cm以下とすることで加工時の速度を向上させることができるため経済的に離型フィルムを作成することができ好ましい。 When the release layer of the present invention is applied onto a substrate film by solution coating, the drying temperature for solvent drying is preferably 50° C. or higher and 120° C. or lower, and preferably 60° C. or higher and 100° C. or lower. more preferred. The drying time is preferably 30 seconds or less, more preferably 20 seconds or less. Furthermore, after drying the solvent, it is preferable to irradiate the active energy ray to advance the curing reaction. As the active energy ray used at this time, an ultraviolet ray, an electron beam, an X-ray, or the like can be used, but the ultraviolet ray is preferable because it is easy to use. The amount of ultraviolet light to be irradiated is preferably 30 mJ/cm 2 or more and 300 mJ/cm 2 or less, more preferably 30 mJ/cm 2 or more and 200 mJ/cm 2 or less. When it is 30 mJ/cm 2 or more, the curing of the composition proceeds sufficiently, and when it is 300 mJ/cm 2 or less, the processing speed can be improved, so that the release film can be produced economically. preferable.

 本発明において、離型層を塗布するときの塗液の表面張力は、特に限定されないが30mN/m以下であることが好ましい。表面張力を前記のようにすることで、塗工後の塗れ性が向上し、乾燥後の塗膜表面の凹凸を低減することができる。 In the present invention, the surface tension of the coating liquid when applying the release layer is not particularly limited, but is preferably 30 mN/m or less. By adjusting the surface tension as described above, the wettability after coating can be improved, and the unevenness of the coating film surface after drying can be reduced.

 上記塗液の塗布法としては、公知の任意の塗布法が適用出来、例えばグラビアコート法やリバースコート法などのロールコート法、ワイヤーバーなどのバーコート法、ダイコート法、スプレーコート法、エアーナイフコート法、等の従来から知られている方法が利用できる。 As a method for applying the coating liquid, any known coating method can be applied, for example, a roll coating method such as a gravure coating method or a reverse coating method, a bar coating method such as a wire bar method, a die coating method, a spray coating method, and an air knife. A conventionally known method such as a coating method can be used.

 [セラミックグリーンシート]
 本発明のセラミックグリーンシート製造用離型フィルムは、セラミックグリーンシートの製造に好適に使用されるものである。また、本発明のセラミックグリーンシートの製造方法は、以上で説明した離型フィルムを用いて、セラミックグリーンシートを成型するセラミックグリーンシートの製造方法であって、成型されたセラミックグリーンシートが0.2μm~1.0μmの厚みを有することを特徴とするものである。
[Ceramic green sheet]
The release film for producing ceramic green sheets of the present invention is suitably used for producing ceramic green sheets. Further, the method for producing a ceramic green sheet of the present invention is a method for producing a ceramic green sheet by molding a ceramic green sheet using the release film described above. It is characterized by having a thickness of ˜1.0 μm.

 当該セラミックグリーンシートは、セラミックを含むシートであれば、特に限定されない。一態様において、本発明の離型フィルムは、無機化合物を含むセラミックグリーンシートを成型するための離型フィルムである。無機化合物としては、金属粒子、金属酸化物、鉱物などを例示でき、例えば、炭酸カルシウム、シリカ粒子、アルミ粒子、チタン酸バリウム粒子等を例示できる。本発明は、平滑性の高い離型層を有するため、これら無機化合物をセラミックグリーンシートに含む態様であっても、無機化合物に起因し得る欠点、例えば、セラミックグリーンシートの破損、離型層からセラミックグリーンシートの剥離が困難になる問題を抑制できる。 The ceramic green sheet is not particularly limited as long as it contains ceramic. In one aspect, the release film of the present invention is a release film for molding a ceramic green sheet containing an inorganic compound. Examples of inorganic compounds include metal particles, metal oxides, and minerals, such as calcium carbonate, silica particles, aluminum particles, and barium titanate particles. Since the present invention has a release layer with high smoothness, even in an embodiment in which these inorganic compounds are included in the ceramic green sheet, defects attributable to the inorganic compound, such as breakage of the ceramic green sheet, from the release layer It is possible to suppress the problem that the separation of the ceramic green sheet becomes difficult.

 セラミックグリーンシートを形成する樹脂成分は、用途に応じて適宜選択できる。一態様において、無機化合物を含むセラミックグリーンシートは、セラミックグリーンシートである。例えば、セラミックグリーンシートは、無機化合物として、チタン酸バリウムを含むことができる。また、樹脂成分として、例えば、ポリビニルブチラール系樹脂を含むことができる。 The resin component that forms the ceramic green sheet can be appropriately selected according to the application. In one aspect, the ceramic green sheet containing the inorganic compound is a ceramic green sheet. For example, the ceramic green sheets can contain barium titanate as the inorganic compound. Moreover, as a resin component, for example, a polyvinyl butyral-based resin can be included.

 一態様において、セラミックグリーンシートは厚さが、0.2μm以上1.0μm以下である。 In one aspect, the ceramic green sheet has a thickness of 0.2 μm or more and 1.0 μm or less.

 例えば、本発明は、このような無機化合物を含むセラミックグリーンシートを製造するための離型フィルムを製造する方法を、提供できる。また、本発明における、離型フィルムの製造方法は、厚さが0.2μm以上1.0μm以下のセラミックグリーンシートを成型する工程を含んでもよい。 For example, the present invention can provide a method for producing a release film for producing a ceramic green sheet containing such an inorganic compound. In addition, the method for producing a release film in the present invention may include a step of forming a ceramic green sheet having a thickness of 0.2 μm or more and 1.0 μm or less.

 [セラミックグリーンシートとセラミックコンデンサ]
 一般に、積層セラミックコンデンサは、直方体状のセラミック素体を有する。セラミック素体の内部には、第1の内部電極と第2の内部電極とが厚み方向に沿って交互に設けられている。第1の内部電極は、セラミック素体の第1の端面に露出している。第1の端面の上には第1の外部電極が設けられている。第1の内部電極は、第1の端面において第1の外部電極と電気的に接続されている。第2の内部電極は、セラミック素体の第2の端面に露出している。第2の端面の上には第2の外部電極が設けられている。第2の内部電極は、第2の端面において第2の外部電極と電気的に接続されている。
[Ceramic green sheets and ceramic capacitors]
Generally, a multilayer ceramic capacitor has a rectangular parallelepiped ceramic body. Inside the ceramic body, first internal electrodes and second internal electrodes are alternately provided along the thickness direction. The first internal electrode is exposed on the first end face of the ceramic body. A first external electrode is provided on the first end surface. The first internal electrode is electrically connected to the first external electrode at the first end surface. The second internal electrode is exposed on the second end face of the ceramic body. A second external electrode is provided on the second end surface. The second internal electrode is electrically connected to the second external electrode at the second end surface.

 一態様において、本発明の離型フィルムは、離型フィルムであり、このような積層セラミックコンデンサを製造するために用いられる。 In one aspect, the release film of the present invention is a release film and is used to produce such a laminated ceramic capacitor.

 例えば、本発明の離型フィルムを用いてセラミックグリーンシートを成型するセラミックグリーンシートの製造方法は、0.2μm以上1.0μm以下の厚みを有するセラミックグリーンシートを成型できる。 For example, a ceramic green sheet manufacturing method for molding a ceramic green sheet using the release film of the present invention can mold a ceramic green sheet having a thickness of 0.2 μm or more and 1.0 μm or less.

 より詳細には、例えば、以下のようにしてセラミックグリーンシートは製造される。まず、本発明の離型フィルムをキャリアフィルムとして用い、セラミック素体を構成するためのセラミックスラリーを塗布、乾燥させる。セラミックグリーンシートの厚みは、0.2μm以上1.0μm以下の極薄品が求められてきている。塗布、乾燥したセラミックグリーンシートの上に、第1又は第2の内部電極を構成するための導電層を印刷する。セラミックグリーンシート、第1の内部電極を構成するための導電層が印刷されたセラミックグリーンシート及び第2の内部電極を構成するための導電層が印刷されたセラミックグリーンシートを適宜積層し、プレスすることにより、マザー積層体を得る。マザー積層体を複数に分断し、生のセラミック素体を作製する。生のセラミック素体を焼成することによりセラミック素体を得る。その後、第1及び第2の外部電極を形成することにより積層セラミックコンデンサを完成させることができる。 More specifically, for example, ceramic green sheets are manufactured as follows. First, using the release film of the present invention as a carrier film, a ceramic slurry for forming a ceramic body is applied and dried. As for the thickness of the ceramic green sheet, an extremely thin product of 0.2 μm or more and 1.0 μm or less is required. A conductive layer for forming the first or second internal electrode is printed on the coated and dried ceramic green sheet. Ceramic green sheets, ceramic green sheets printed with conductive layers for forming first internal electrodes, and ceramic green sheets printed with conductive layers for forming second internal electrodes are appropriately laminated and pressed. Thus, a mother laminate is obtained. The mother laminate is divided into a plurality of pieces to produce raw ceramic bodies. A ceramic body is obtained by firing a raw ceramic body. After that, the multilayer ceramic capacitor can be completed by forming the first and second external electrodes.

 以下に実施例及び比較例を挙げ、本発明をより具体的に説明する。なお、本発明では、以下の方法により、物性等を測定し、又は評価した。以下、特に断りのない限り、「部」とあるのは「質量部」を、「%」とあるのは「質量%」を意味する。 The present invention will be described more specifically below with examples and comparative examples. In addition, in the present invention, physical properties were measured or evaluated by the following methods. Hereinafter, "parts" means "parts by mass" and "%" means "% by mass" unless otherwise specified.

 (ポリシロキサンの混合物の官能基量)
 使用するポリシロキサンA及びBと同じ混合比率のシリコーン混合物に、固形分10質量%となるように重クロロホルムを加えて溶解し、得られた混合液をNMR管に入れた。NMR管に入れた試料について、核磁気共鳴装置(BRUKER社製,NMR AVANCE NEO 600)を用いてNMR測定を行い、アルケニル基およびヒドロシリル基の各官能基量(mmol)を定量した。
(Functional group content of polysiloxane mixture)
Deuterated chloroform was added to a silicone mixture having the same mixing ratio as the polysiloxanes A and B to be used and dissolved so that the solid content was 10% by mass, and the resulting mixture was placed in an NMR tube. The sample placed in the NMR tube was subjected to NMR measurement using a nuclear magnetic resonance apparatus (manufactured by BRUKER, NMR AVANCE NEO 600) to quantify the amount (mmol) of each functional group of alkenyl groups and hydrosilyl groups.

 上記の測定結果から、以下の式を用いてアルケニル基とヒドロシリル基のモル比を計算した。
モル比=Si-H/Si-A
(式中、Si-Hはヒドロシリル基のモル量を、Si-Aはアルケニル基のモル量を示す。)
From the above measurement results, the molar ratio of alkenyl groups to hydrosilyl groups was calculated using the following formula.
Molar ratio = Si-H/Si-A
(In the formula, Si—H represents the molar amount of hydrosilyl groups, and Si—A represents the molar amount of alkenyl groups.)

 (重量平均分子量)
 試料濃度を0.2%に調整した試料溶液を、0.2μmのメンブランフィルターでろ過し、下記条件にてゲルパーミエーションクロマトグラフィー(GPC)分析を行い、重量平均分子量を求めた。分子量は標準ポリスチレン換算で算出した。
装置:TOSOH HLC-8320GPC
カラム:TSKgel SuperHM-H×2 +TSKgel SuperH2000(TOSOH)
溶媒:クロロホルム100%
流速:0.6ml/min
濃度:0.2%
注入量:20μl
温度:40℃
検出器:RI
(Weight average molecular weight)
A sample solution adjusted to a sample concentration of 0.2% was filtered through a 0.2 μm membrane filter and subjected to gel permeation chromatography (GPC) analysis under the following conditions to determine the weight average molecular weight. The molecular weight was calculated in terms of standard polystyrene.
Apparatus: TOSOH HLC-8320GPC
Column: TSKgel SuperHM-H×2 + TSKgel SuperH2000 (TOSOH)
Solvent: 100% chloroform
Flow rate: 0.6ml/min
Concentration: 0.2%
Injection volume: 20 μl
Temperature: 40°C
Detector: RI

 (離型層厚み)
 離型フィルムを樹脂包埋し、ウルトラミクロトームを用いて超薄切片化した。その後、日本電子製JEM2100透過電子顕微鏡を用いて、断面観察を行い、観察したTEM画像から離型層の膜厚を測定した。厚みが薄すぎて断面観察で正確に評価できない場合は、蛍光X線装置(Rigaku製ZSX PRIMUSII)によりSi強度を測定し、検量線法によりコート量を計算した。
(Release layer thickness)
The release film was embedded in a resin and cut into ultrathin slices using an ultramicrotome. After that, cross-sectional observation was performed using a JEOL JEM2100 transmission electron microscope, and the film thickness of the release layer was measured from the observed TEM image. When the thickness was too thin to be evaluated accurately by cross-sectional observation, the Si intensity was measured with a fluorescent X-ray device (ZSX PRIMUS II manufactured by Rigaku), and the coating amount was calculated by the calibration curve method.

 (離型層の領域表面平均粗さSa、最大突起高さSp)
 非接触表面形状計測システム(VertScan R550H-M100)を用いて、下記の条件で測定した。領域表面平均粗さ(Sa)は、5回測定の平均値を採用し、最大突起高さ(Sp)は7回測定し最大値と最小値を除いた5回の測定結果における、最大の値のものを採用した。
(Release layer region surface average roughness Sa, maximum protrusion height Sp)
Using a non-contact surface profile measurement system (VertScan R550H-M100), measurements were made under the following conditions. The area surface average roughness (Sa) adopts the average value of 5 measurements, and the maximum protrusion height (Sp) is measured 7 times, and the maximum value among the 5 measurement results excluding the maximum and minimum values adopted the one of

 (測定条件)
  ・測定モード:WAVEモード
  ・対物レンズ:50倍
  ・0.5×Tubeレンズ
  ・測定面積 187μm×139μm
 (解析条件)
  ・面補正:  4次補正
  ・補間処理: 完全補間
(Measurement condition)
・Measurement mode: WAVE mode ・Objective lens: 50x ・0.5×Tube lens ・Measurement area: 187 μm×139 μm
(analysis conditions)
・Surface correction: Quaternary correction ・Interpolation processing: Complete interpolation

 (離型層の表面自由エネルギー)
 平坦なガラス基板上に離型フィルムを固定し、接触角計(協和界面化学製DM-501)を用いて離型フィルム上に水1.9μLを滴下し、液滴が静止した60秒後に液滴と離型層からなる角度を測定し、5回の測定の平均値をθとした。同様に離型フィルム上にヨウ化メチレン0.9μLを滴下し、液滴が静止した30秒後に液滴と離型層からなる角度を測定し、5回の測定の平均値をθとした。さらに離型フィルム上にエチレングリコール0.9μLを滴下し、液滴が静止した30秒後に液滴と離型層からなる角度を測定し、5回の測定の平均値をθとした。
(Surface free energy of release layer)
Fix the release film on a flat glass substrate, drop 1.9 μL of water on the release film using a contact angle meter (Kyowa Interface Chemical DM-501), and after 60 seconds when the droplet has stopped, the liquid The angle formed by the droplet and the release layer was measured, and the average value of 5 measurements was taken as θ 1 . Similarly, 0.9 μL of methylene iodide was dropped on the release film, and 30 seconds after the droplet stopped, the angle formed by the droplet and the release layer was measured, and the average value of 5 measurements was taken as θ2 . . Further, 0.9 μL of ethylene glycol was dropped on the release film, and 30 seconds after the droplet stopped standing , the angle formed by the droplet and the release layer was measured.

 上記のθ、θ、θおよび表2に記載される水、ヨウ化メチレン、エチレングリコールのγLVnd、γLVnp、γLVnh、γLn(但し、n=1、2又は3であり、水、ヨウ化メチレン、又はエチレングリコールに対応する)から、以下の式により離型層の表面自由エネルギーの分散成分γSVd、双極子成分γSVp、水素結合成分γSVhを計算により算出し、その合計を離型層の表面自由エネルギーγSとした。なお、表面自由エネルギー及び各成分の単位は「mJ/m」である。 γLVnd, γLVnp, γLVnh, and γLn of water, methylene iodide, and ethylene glycol described in the above θ 1 , θ 2 , θ 3 and Table 2 (where n = 1, 2 or 3, water, iodide corresponding to methylene or ethylene glycol), the dispersion component γSVd, the dipole component γSVp, and the hydrogen bond component γSVh of the surface free energy of the release layer are calculated by the following formula, and the total is the surface of the release layer Free energy γS. The unit of surface free energy and each component is "mJ/m 2 ".

Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000007

Figure JPOXMLDOC01-appb-M000008
Figure JPOXMLDOC01-appb-M000008

γSVd+γSVp+γSVh=γS
 (セラミックシートの剥離力)
 下記、材料からなるスラリー組成物Iを10分間攪拌混合し、ビーズミルを用いて直径0.5mmのジルコニアビーズで10分間分散し1次分散体を得た。その後下記材料からなるスラリー組成物IIを(スラリー組成物I):(スラリー組成物II)=3.4:1.0の比率になるように1次分散体に加え、ビーズミルを用いて直径0.5mmのジルコニアビーズで10分間2次分散し、セラミックスラリーを得た。
 (スラリー組成物I)
トルエン                          22.3質量部
エタノール                         18.3質量部
チタン酸バリウム(平均粒径100nm)           57.5質量部
ホモゲノールL-18(花王社製)               1.9質量部
 (スラリー組成物II)
トルエン                          39.6質量部
エタノール                         39.6質量部
フタル酸ジオクチル                      3.3質量部
ポリビニルブチラール(積水化学社製、エスレックBM-S)  16.3質量部
1-エチル-3-メチルイミダゾリウムエチルサルフェート    0.5質量部
 次いで得られた離型フィルムサンプルの離型面にアプリケーターを用いて乾燥後のスラリーが1.0μmになるように塗工し60℃で1分乾燥して、セラミックグリーンシート付き離型フィルムを得た。得られたセラミックグリーンシート付き離型フィルムを除電機(キーエンス社製、SJ-F020)を用いて除電した後に剥離試験機(協和界面科学社製、VPA-3、ロードセル荷重0.1N)を用いて、剥離角度90度、剥離温度25℃、剥離速度10m/minで剥離した。剥離する向きとしては、剥離試験機付属のSUS板上に両面接着テープ(日東電工社製、No.535A)を貼りつけ、その上にセラミックグリーンシート側を両面テープと接着する形で離型フィルムを固定し、離型フィルム側を引っ張る形で剥離した。得られた測定値のうち、剥離距離20mm以上70mm以下の剥離力の平均値を算出し、その値を剥離力とした。測定は計5回実施し、その剥離力の平均値の値を採用した。
γSVd + γSVp + γSVh = γS
(Peel force of ceramic sheet)
A slurry composition I consisting of the following materials was stirred and mixed for 10 minutes, and dispersed for 10 minutes with zirconia beads having a diameter of 0.5 mm using a bead mill to obtain a primary dispersion. After that, a slurry composition II consisting of the following materials was added to the primary dispersion at a ratio of (slurry composition I): (slurry composition II) = 3.4: 1.0, and a bead mill was used to prepare a slurry having a diameter of 0. Secondary dispersion was carried out for 10 minutes with 0.5 mm zirconia beads to obtain a ceramic slurry.
(Slurry composition I)
Toluene 22.3 parts by mass Ethanol 18.3 parts by mass Barium titanate (average particle diameter 100 nm) 57.5 parts by mass Homogenol L-18 (manufactured by Kao Corporation) 1.9 parts by mass (Slurry composition II)
Toluene 39.6 parts by mass Ethanol 39.6 parts by mass Dioctyl phthalate 3.3 parts by mass Polyvinyl butyral (S-Lec BM-S, manufactured by Sekisui Chemical Co., Ltd.) 16.3 parts by mass 1-Ethyl-3-methylimidazolium ethyl sulfate 0 .5 parts by mass Next, the release surface of the release film sample obtained was coated with an applicator so that the slurry after drying was 1.0 μm, dried at 60 ° C. for 1 minute, and the release film with the ceramic green sheet was applied. A mold film was obtained. After the release film with the resulting ceramic green sheet was statically eliminated using a static eliminator (manufactured by Keyence Corporation, SJ-F020), a peel tester (manufactured by Kyowa Interface Science Co., Ltd., VPA-3, load cell load 0.1N) was used. It was peeled at a peeling angle of 90 degrees, a peeling temperature of 25°C, and a peeling speed of 10 m/min. As for the peeling direction, a double-sided adhesive tape (manufactured by Nitto Denko Co., Ltd., No. 535A) was attached to the SUS plate attached to the peel tester, and the ceramic green sheet side was adhered to the double-sided tape on the release film. was fixed and peeled off by pulling the release film side. Among the obtained measured values, the average value of the peel force at the peel distance of 20 mm or more and 70 mm or less was calculated, and the value was defined as the peel force. The measurement was performed a total of 5 times, and the average value of the peel strength was adopted.

(セラミックグリーンシートのピンホール評価)
 前記セラミックシートの剥離力の評価と同様にして離型フィルムの離型面に厚さ1μmのセラミックグリーンシートを成型した。次いで、成型したセラミックグリーンシート付き離型フィルムから離型フィルムを剥離し、セラミックグリーンシートを得た。得られたセラミックグリーンシートのフィルム幅方向の中央領域において25cmの範囲でセラミックスラリーの塗布面の反対面から光を当て、光が透過して見えるピンホールの発生状況を観察し、下記基準で目視判定した。
○:ピンホールの発生なし
×:ピンホールの発生が1個以上
(Evaluation of pinholes in ceramic green sheets)
A ceramic green sheet having a thickness of 1 μm was formed on the release surface of the release film in the same manner as in the evaluation of the peel strength of the ceramic sheet. Next, the release film was peeled off from the molded release film with the ceramic green sheet to obtain a ceramic green sheet. In the central region of the obtained ceramic green sheet in the film width direction, light was applied from the opposite side of the ceramic slurry-coated surface in a range of 25 cm 2 , and the occurrence of pinholes that can be seen through light transmission was observed. judged visually.
○: No pinholes ×: One or more pinholes

 (PVBシートへのSi転写量)
 離型フィルムサンプルの離型面にアプリケーターを用いてポリビニルブチラール(積水化学社製 エスレックBM-S)を乾燥後の樹脂の厚さが1.0μmになるように塗工し60℃で1分乾燥して、PVBシート付き離型フィルムを得た。PVBシート付き離型フィルムを23℃65RHの環境下で24時間静置後、離型フィルムからPVBシートを剥離し、PVBシートの離型フィルムと接触した面を蛍光X線装置(Rigaku製ZSX PRIMUSII)によりSi強度(Kcps)を測定した。
(Si transfer amount to PVB sheet)
Polyvinyl butyral (S-lec BM-S manufactured by Sekisui Chemical Co., Ltd.) is applied to the release surface of the release film sample using an applicator so that the thickness of the resin after drying is 1.0 μm, and dried at 60 ° C. for 1 minute. Then, a release film with a PVB sheet was obtained. After the release film with the PVB sheet was allowed to stand in an environment of 23°C and 65RH for 24 hours, the PVB sheet was peeled off from the release film, and the surface of the PVB sheet in contact with the release film was exposed to a fluorescent X-ray device (ZSX PRIMUSII manufactured by Rigaku). ) was used to measure the Si intensity (Kcps).

 (離型層のポリエステル基材への裏移り)
 離型フィルムサンプルを5cm×5cmに6枚カットしたうえで離型面と離型面と反対の面が接触するように6枚重ね、30MPaの荷重をかけた状態で10分間加圧処理した。その後、6枚の離型フィルムを剥離し、6枚について離型面と反対の面を赤色のマジックペン(寺西化学工業製MGD-T2)で赤く塗り、マジックインキがはじくかどうかを確認した。
〇: 6枚の全てでハジキ箇所が0箇所
×: 6枚の何れかでハジキ箇所が1箇所以上
(Set-off of release layer to polyester substrate)
The release film sample was cut into 6 sheets of 5 cm×5 cm, 6 sheets were stacked so that the release surface and the surface opposite to the release surface were in contact, and pressure treatment was performed for 10 minutes while a load of 30 MPa was applied. After that, the six release films were peeled off, and the surface opposite to the release surface of the six films was painted red with a red marker pen (MGD-T2 manufactured by Teranishi Kagaku Kogyo Co., Ltd.) to check whether the marker ink repelled.
○: 0 cissing points on all 6 sheets ×: 1 or more cissing points on any of the 6 sheets

 (離型層の経時での密着性)
 離型フィルムサンプルを60℃90%RHの環境で3日間保管したのち、離型層を学振式摩擦試験器(山口科学産業社製)で荷重ヘッド部とフィルムの接触部にガーゼ(白十字株式会社製ハクジュウジガーゼ)を介してパール紙(東洋紡株式会社製東洋紡エステルフィルム P4255-35)を用い、ヘッド部の荷重を200gf/25mm(5mm×5mm)[0.0785MPa]とし、フィルムを10往復させて荷重ヘッド部と擦った後、離型面を赤色のマジックペン(寺西化学工業製MGD-T2)で赤く塗り、マジックインキがはじくかどうかを確認した。
〇: マジックインキがはじく
△: マジックインキがはじかない部位がある
×: マジックインキがはじかない
(Adhesion of release layer over time)
After storing the release film sample in an environment of 60°C and 90% RH for 3 days, gauze (white cross Pearl paper (Toyobo Ester Film P4255-35 manufactured by Toyobo Co., Ltd.) is used through Hakujuji Gauze Co., Ltd.), the load on the head is 200 gf / 25 mm 2 (5 mm × 5 mm) [0.0785 MPa], and the film was reciprocated 10 times to rub against the load head, and then the release surface was painted red with a red marker pen (MGD-T2 manufactured by Teranishi Kagaku Kogyo Co., Ltd.) to confirm whether the marker ink was repelled.
〇: Magic ink repels △: There are parts where magic ink does not repel ×: Magic ink does not repel

 (ポリエチレンテレフタレートペレット(PET(I))の調製)
 エステル化反応装置として、攪拌装置、分縮器、原料仕込口及び生成物取出口を有する3段の完全混合槽よりなる連続エステル化反応装置を用いた。TPA(テレフタル酸)を2トン/時とし、EG(エチレングリコール)をTPA1モルに対して2モルとし、三酸化アンチモンを生成PETに対してSb原子が160ppmとなる量とし、これらのスラリーをエステル化反応装置の第1エステル化反応缶に連続供給し、常圧にて平均滞留時間4時間、255℃で反応させた。次いで、第1エステル化反応缶内の反応生成物を連続的に系外に取り出して第2エステル化反応缶に供給し、第2エステル化反応缶内に第1エステル化反応缶から留去されるEGを生成PETに対して8質量%供給し、さらに、生成PETに対してMg原子が65ppmとなる量の酢酸マグネシウム四水塩を含むEG溶液と、生成PETに対してP原子が40ppmのとなる量のTMPA(リン酸トリメチル)を含むEG溶液を添加し、常圧にて平均滞留時間1時間、260℃で反応させた。次いで、第2エステル化反応缶の反応生成物を連続的に系外に取り出して第3エステル化反応缶に供給し、高圧分散機(日本精機社製)を用いて39MPa(400kg/cm)の圧力で平均処理回数5パスの分散処理をした平均粒径が0.9μmの多孔質コロイダルシリカ0.2質量%と、ポリアクリル酸のアンモニウム塩を炭酸カルシウムあたり1質量%付着させた平均粒径が0.6μmの合成炭酸カルシウム0.4質量%とを、それぞれ10%のEGスラリーとして添加しながら、常圧にて平均滞留時間0.5時間、260℃で反応させた。第3エステル化反応缶内で生成したエステル化反応生成物を3段の連続重縮合反応装置に連続的に供給して重縮合を行い、95%カット径が20μmのステンレススチール繊維を焼結したフィルターで濾過を行ってから、限外濾過を行って水中に押出し、冷却後にチップ状にカットして、固有粘度0.60dl/gのPETチップを得た(以後、PET(I)と略す)。PETチップ中の滑剤含有量は0.6質量%であった。
(Preparation of polyethylene terephthalate pellets (PET (I)))
As the esterification reactor, a continuous esterification reactor comprising a three-stage complete mixing tank having a stirrer, a partial condenser, a raw material inlet and a product outlet was used. TPA (terephthalic acid) was adjusted to 2 tons/hour, EG (ethylene glycol) was adjusted to 2 mol per 1 mol of TPA, and antimony trioxide was adjusted to give an amount of Sb atoms of 160 ppm relative to the produced PET. It was continuously supplied to the first esterification reactor of the reaction apparatus and reacted at 255° C. for an average residence time of 4 hours under normal pressure. Next, the reaction product in the first esterification reaction can is continuously taken out of the system and supplied to the second esterification reaction can, and distilled from the first esterification reaction can into the second esterification reaction can. 8 mass % of EG is supplied to the produced PET, and further, an EG solution containing magnesium acetate tetrahydrate in an amount such that the Mg atom is 65 ppm relative to the produced PET, and an EG solution containing 40 ppm of P atom relative to the produced PET. An EG solution containing TMPA (trimethyl phosphate) in an amount corresponding to the above was added and reacted at 260° C. under normal pressure for an average residence time of 1 hour. Next, the reaction product in the second esterification reactor was continuously taken out of the system, supplied to the third esterification reactor, and subjected to 39 MPa (400 kg/cm 2 ) using a high-pressure disperser (manufactured by Nippon Seiki Co., Ltd.). 0.2% by mass of porous colloidal silica having an average particle size of 0.9 μm, which has been subjected to dispersion treatment for an average of 5 passes at a pressure of , and 1% by mass of ammonium salt of polyacrylic acid per calcium carbonate. While adding 0.4% by mass of synthetic calcium carbonate with a diameter of 0.6 μm as a 10% EG slurry, the mixture was reacted at normal pressure at 260° C. for an average residence time of 0.5 hours. The esterification reaction product produced in the third esterification reaction vessel was continuously supplied to a three-stage continuous polycondensation reactor for polycondensation to sinter stainless steel fibers having a 95% cut diameter of 20 μm. After filtration with a filter, ultrafiltration was performed, the product was extruded into water, and after cooling, it was cut into chips to obtain PET chips having an intrinsic viscosity of 0.60 dl/g (hereinafter abbreviated as PET (I)). . The lubricant content in the PET chip was 0.6% by mass.

 (ポリエチレンテレフタレートペレット(PET(II))の調製)
 一方、上記PET(I)チップの製造において、炭酸カルシウム、シリカ等の粒子を全く含有しない固有粘度0.62dl/gのPETチップを得た(以後、PET(II)と略す。)。
(Preparation of polyethylene terephthalate pellets (PET (II)))
On the other hand, in the production of the PET(I) chip, a PET chip with an intrinsic viscosity of 0.62 dl/g containing no particles such as calcium carbonate and silica was obtained (hereinafter abbreviated as PET(II)).

 (積層フィルムX1の製造)
 これらのPETチップを乾燥後、285℃で溶融し、別個の溶融押出し機押出機により290℃で溶融し、95%カット径が15μmのステンレススチール繊維を焼結したフィルターと、95%カット径が15μmのステンレススチール粒子を焼結したフィルターの2段の濾過を行って、フィードブロック内で合流して、PET(I)を表面層B(反離型面側層)、PET(II)を表面層A(離型面側層)となるように積層し、シート状に45m/分のスピードで押出(キャスティング)し、静電密着法により30℃のキャスティングドラム上に静電密着・冷却させ、固有粘度が0.59dl/gの未延伸ポリエチレンテレフタレートシートを得た。層比率は各押出機の吐出量計算でPET(I)/(II)=60質量%/40質量%となるように調整した。次いで、この未延伸シートを赤外線ヒーターで加熱した後、ロール温度80℃でロール間のスピード差により縦方向に3.5倍延伸した。その後、テンターに導き、140℃で横方向に4.2倍の延伸を行なった。次いで、熱固定ゾーンにおいて、210℃で熱処理した。その後、横方向に170℃で2.3%の緩和処理をして、厚さ31μmの二軸延伸ポリエチレンテレフタレートフィルムX1を得た。得られたフィルムX1の表面層AのSaは1nm、表面層BのSaは28nmであった。
(Production of laminated film X1)
After drying these PET chips, they were melted at 285° C. and melted at 290° C. by a separate melt extruder extruder to filter sintered stainless steel fibers with a 95% cut diameter of 15 μm and Two-stage filtration of sintered 15 μm stainless steel particles is performed, and they are combined in the feed block to form PET (I) on the surface layer B (anti-releasing surface side layer) and PET (II) on the surface. Laminated so as to form layer A (releasing surface side layer), extruded (cast) into a sheet at a speed of 45 m / min, electrostatically adhered on a casting drum at 30 ° C. by an electrostatic adhesion method, cooled, An unstretched polyethylene terephthalate sheet having an intrinsic viscosity of 0.59 dl/g was obtained. The layer ratio was adjusted so that PET (I)/(II)=60% by mass/40% by mass in calculating the discharge amount of each extruder. Then, the unstretched sheet was heated with an infrared heater and then stretched 3.5 times in the machine direction at a roll temperature of 80° C. due to the speed difference between the rolls. After that, it was led to a tenter and stretched 4.2 times in the transverse direction at 140°C. It was then heat treated at 210° C. in a heat setting zone. After that, a 2.3% relaxation treatment was applied in the transverse direction at 170° C. to obtain a biaxially stretched polyethylene terephthalate film X1 having a thickness of 31 μm. The Sa of the surface layer A of the obtained film X1 was 1 nm, and the Sa of the surface layer B was 28 nm.

 (積層フィルムX2の製造)
 積層フィルムX2としては、表面層A側、表面層B側にいずれもPET(II)を用いて積層フィルムX1と同様に積層し、シート状に45m/分のスピードで押出(キャスティング)し、静電密着法により30℃のキャスティングドラム上に静電密着・冷却させ、固有粘度が0.59dl/gの未延伸ポリエチレンテレフタレートシートを得た。この未延伸PETシートを加熱されたロール群及び赤外線ヒーターで100℃に加熱し、その後周速差のあるロール群で長手方向に3.5倍延伸して、一軸延伸PETフィルムを得た。次いで、下記易滑塗布液をバーコーターでPETフィルムの片面に塗布した後、80℃で15秒間乾燥した。なお、最終延伸、乾燥後の塗布量が0.1μmになるように調整した。引続いてテンターで、150℃で幅方向に4.0倍に延伸し、フィルムの幅方向の長さを固定した状態で、230℃で0.5秒間加熱し、さらに230℃で10秒間3%の幅方向の弛緩処理を行ない、厚さ31μmのインラインコーティングポリエステルフィルムを得た。得られたフィルムX2の表面層AのSaは1nm、表面層BのSaは14nmであった。
(Production of laminated film X2)
As the laminated film X2, both the surface layer A side and the surface layer B side are laminated in the same manner as the laminated film X1 using PET (II), extruded (casting) into a sheet at a speed of 45 m / min, and statically. Electrostatic adhesion was carried out on a casting drum at 30° C. by an electroadhesion method, followed by cooling to obtain an unstretched polyethylene terephthalate sheet having an intrinsic viscosity of 0.59 dl/g. This unstretched PET sheet was heated to 100° C. by a heated roll group and an infrared heater, and then stretched 3.5 times in the longitudinal direction by a roll group with a peripheral speed difference to obtain a uniaxially stretched PET film. Next, after coating the following slippery coating liquid on one side of the PET film with a bar coater, it was dried at 80° C. for 15 seconds. The coating amount after the final stretching and drying was adjusted to 0.1 μm. Subsequently, the film was stretched 4.0 times in the width direction at 150°C with a tenter, heated at 230°C for 0.5 seconds while fixing the length of the film in the width direction, and further heated at 230°C for 10 seconds 3. % in the width direction to obtain an in-line coated polyester film with a thickness of 31 μm. The Sa of the surface layer A of the obtained film X2 was 1 nm, and the Sa of the surface layer B was 14 nm.

 (易滑塗布液)
 水                         45.82質量部
 イソプロピルアルコール               35.00質量部
 アクリルポリオール樹脂               10.36質量部
  (DSM Coating Resins社製 NeoCryl A-614、Tg74℃、酸価55%、固形分濃度32質量%)
 オキサゾリン系架橋剤D-1             5.68質量部
  (固形分濃度25質量%)
 アクリル粒子水分散体                2.37質量部
  (日本触媒製、商品名MX200W、平均粒径350nm、固形分濃度10質量%)
 アクリル粒子水分散体                0.47質量部
(日本触媒製、商品名MX300W、平均粒径450nm、固形分濃度10質量%)
 界面活性剤H-1(フッ素系、固形分濃度10質量%) 0.30質量部
(Smooth coating liquid)
Water 45.82 parts by mass Isopropyl alcohol 35.00 parts by mass Acrylic polyol resin 10.36 parts by mass (DSM Coating Resins NeoCryl A-614, Tg 74°C, acid value 55%, solid content concentration 32% by mass)
Oxazoline-based cross-linking agent D-1 5.68 parts by mass (solid content concentration 25% by mass)
Acrylic particle water dispersion 2.37 parts by mass (manufactured by Nippon Shokubai, trade name MX200W, average particle size 350 nm, solid content concentration 10% by mass)
Acrylic particle water dispersion 0.47 parts by mass (manufactured by Nippon Shokubai, trade name MX300W, average particle size 450 nm, solid content concentration 10% by mass)
Surfactant H-1 (fluorine-based, solid content concentration 10% by mass) 0.30 parts by mass

 (実施例1)
 ポリシロキサンAとして、構造式(1)で示すビニル変性シリコーン樹脂(重量平均分子量:466000、構造式(1)中、l=3120,m=46,n=0)と、ポリシロキサンBとして、構造式(2)で示すポリメチルハイドロジェンシロキサン(重量平均分子量:8400、構造式(2)中、o=3,p=65)と、をモル比(ヒドロシリル基量/アルケニル基量)が2.0になるように調整したシリコーン混合物R1を用意し、シリコーン混合物R1と密着性付与剤S1と触媒P1とを含む下記の離型層形成用コート液M1を調液した。
(離型層形成用コート液M1)
  メチルエチルケトン     64.3部
  トルエン          34.0部
  シリコーン混合物R1     1.5部
  密着性付与剤S1     0.083部
(ダウ・東レ株式会社製SD7200(ビニルトリアセトキシシランとグリシドキシプロピルトリメトキシシランの反応物 固形物濃度90%))
  触媒P1           0.1部
(ダウ・東レ株式会社製 SRX212(1,1,3,3-テトラメチル-1,3-ジビニルジシロキサンの白金錯体、固形分濃度5%))
 積層フィルムX1の表面層A上に上記組成の離型層形成用コート液M1を、リバースグラビアを用いて乾燥後の塗布量が0.020μmになるように塗工した。その後、0.5秒後に第1の乾燥炉に入るように加工速度を調整し、第1の乾燥炉温度120℃、第2の乾燥炉温度90℃で連続的に加熱乾燥した。乾燥工程後、冷却ロール上で紫外線照射機(へレウス社製、Hバルブ)を用いて積算光量100mJ/cmの紫外線を照射し、離型層を硬化させることでセラミックグリーンシート製造用離型フィルムを得た。その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 1)
As polysiloxane A, a vinyl-modified silicone resin represented by structural formula (1) (weight average molecular weight: 466000, l = 3120, m = 46, n = 0 in structural formula (1)) and polysiloxane B, structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o = 3, p = 65 in structural formula (2)) at a molar ratio (hydrosilyl group weight/alkenyl group weight) of 2. A silicone mixture R1 adjusted to 0 was prepared, and the following release layer forming coating solution M1 containing the silicone mixture R1, adhesion imparting agent S1, and catalyst P1 was prepared.
(Release layer forming coating liquid M1)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion imparting agent S1 0.083 parts (SD7200 manufactured by Dow Toray Industries, Inc. (reaction product of vinyltriacetoxysilane and glycidoxypropyltrimethoxysilane Solid concentration 90%))
Catalyst P1 0.1 parts (SRX212 manufactured by Dow Toray Industries, Inc. (platinum complex of 1,1,3,3-tetramethyl-1,3-divinyldisiloxane, solid content concentration 5%))
The release layer forming coating solution M1 having the composition described above was applied onto the surface layer A of the laminated film X1 using reverse gravure so that the coating amount after drying was 0.020 μm. After that, the processing speed was adjusted so that the first drying furnace entered after 0.5 seconds, and heat drying was continuously performed at a first drying furnace temperature of 120°C and a second drying furnace temperature of 90°C. After the drying process, an ultraviolet irradiator (manufactured by Heraeus, H bulb) is used to irradiate ultraviolet light with an integrated light amount of 100 mJ/cm 2 on a cooling roll to cure the release layer, thereby forming a mold for manufacturing a ceramic green sheet. got the film. Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例2)
 ポリシロキサンAとして、構造式(1)で示すビニル変性シリコーン樹脂(重量平均分子量:495000、構造式(1)中、l=2820,m=60,n=0)と、ポリシロキサンBとして、構造式(2)で示すポリメチルハイドロジェンシロキサン(重量平均分子量:8400、構造式(2)中、o=3,p=65)と、をモル比(ヒドロシリル基量/アルケニル基量)が1.0になるように調整したシリコーン混合物R2を用意し、シリコーン混合物R2と密着性付与剤S1と触媒P1とを含む下記の離型層形成用コート液M2を調液したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M2)
  メチルエチルケトン     64.3部
  トルエン          34.0部
  シリコーン混合物R2     1.5部
  密着性付与剤S1     0.083部
  触媒P1           0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 2)
As polysiloxane A, a vinyl-modified silicone resin represented by structural formula (1) (weight average molecular weight: 495000, l = 2820, m = 60, n = 0 in structural formula (1)), and as polysiloxane B, the structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o = 3, p = 65 in structural formula (2)) at a molar ratio (hydrosilyl group weight/alkenyl group weight) of 1. A silicone mixture R2 adjusted to 0 was prepared, and the following release layer forming coating solution M2 containing the silicone mixture R2, the adhesion imparting agent S1, and the catalyst P1 was prepared. A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
(Release layer forming coating liquid M2)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R2 1.5 parts Adhesion imparting agent S1 0.083 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例3)
 ポリシロキサンAとして、構造式(1)で示すビニル変性シリコーン樹脂(重量平均分子量:520000、構造式(1)中、l=3700,m=40,n=0)と、ポリシロキサンBとして、構造式(2)で示すポリメチルハイドロジェンシロキサン(重量平均分子量:8400、構造式(2)中、o=3,p=65)と、をモル比(ヒドロシリル基量/アルケニル基量)が3.0になるように調整したシリコーン混合物R3を用意し、シリコーン混合物R3と密着性付与剤S1と触媒とを含む下記の離型層形成用コート液M3を調液したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M3)
  メチルエチルケトン     64.3部
  トルエン          34.0部
  シリコーン混合物R3     1.5部
  密着性付与剤S1     0.083部
  触媒P1           0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 3)
As polysiloxane A, a vinyl-modified silicone resin represented by structural formula (1) (weight average molecular weight: 520000, l = 3700, m = 40, n = 0 in structural formula (1)), and polysiloxane B, structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o = 3, p = 65 in structural formula (2)) at a molar ratio (hydrosilyl group weight/alkenyl group weight) of 3. Example 1, except that a silicone mixture R3 adjusted to be 0 was prepared, and the following release layer-forming coating solution M3 containing the silicone mixture R3, an adhesion imparting agent S1, and a catalyst was prepared. A release film for producing a ceramic green sheet was obtained in the same manner as in .
(Release layer forming coating solution M3)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R3 1.5 parts Adhesion imparting agent S1 0.083 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例4)
 離型層形成用コート液M1を乾燥後の塗布量が0.050μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 4)
A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1, except that the coating liquid M1 for forming a release layer was applied so that the coating amount after drying was 0.050 μm. Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例5)
 離型層形成用コート液M1を乾燥後の塗布量が0.080μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 5)
A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1, except that the coating liquid M1 for forming a release layer was applied so that the coating amount after drying was 0.080 μm. Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例6)
 シリコーン混合物R1と密着性付与剤S2と触媒P1とを含む下記の離型層形成用コート液M4を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M4)
  メチルエチルケトン      64.3部
  トルエン           34.0部
  シリコーン混合物R1      1.5部
  密着性付与剤S2      0.075部
(信越化学工業株式会社製、KBM503(3-メタクリロキシプロピルトリメトキシシラン、固形物濃度100%))
p-トルエンスルホン酸     0.008部
  触媒P1            0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 6)
Example 1, except that the following release layer-forming coating solution M4 containing the silicone mixture R1, the adhesion imparting agent S2, and the catalyst P1 was applied so that the coating amount after drying was 0.020 μm. A release film for producing a ceramic green sheet was obtained in the same manner as in .
(Release layer forming coating solution M4)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion imparting agent S2 0.075 parts (manufactured by Shin-Etsu Chemical Co., Ltd., KBM503 (3-methacryloxypropyltrimethoxysilane, solid concentration 100% ))
p-Toluenesulfonic acid 0.008 part Catalyst P1 0.1 part Table 3 shows the summary of the releasing layer-forming coating solution and laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例7)
 シリコーン混合物R1と密着性付与剤S3と触媒P1とを含む下記の離型層形成用コート液M5を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M5)
  メチルエチルケトン       64.3部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  密着性付与剤S3       0.075部
(信越化学工業株式会社製、KBM403(3-グリシドキシプロピルトリメトキシシラン、固形物濃度100%))
p-トルエンスルホン酸      0.008部
  触媒P1             0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 7)
Example 1, except that the following release layer-forming coating solution M5 containing the silicone mixture R1, the adhesion imparting agent S3, and the catalyst P1 was applied so that the coating amount after drying was 0.020 μm. A release film for producing a ceramic green sheet was obtained in the same manner as in .
(Release layer forming coating liquid M5)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion agent S3 0.075 parts (manufactured by Shin-Etsu Chemical Co., Ltd., KBM403 (3-glycidoxypropyltrimethoxysilane, solid concentration 100 %))
p-Toluenesulfonic acid 0.008 part Catalyst P1 0.1 part Table 3 shows the summary of the releasing layer-forming coating solution and laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例8)
 シリコーン混合物R1と密着性付与剤S4と触媒P1とを含む下記の離型層形成用コート液M6を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M6)
  メチルエチルケトン       64.3部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  密着性付与剤S4       0.075部
(信越化学工業株式会社製、KBM1003(ビニルトリメトキシシラン、固形物濃度100%))
 p-トルエンスルホン酸     0.008部
触媒P1               0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 8)
Example 1, except that the following release layer-forming coating solution M6 containing the silicone mixture R1, the adhesion imparting agent S4, and the catalyst P1 was applied so that the coating amount after drying was 0.020 μm. A release film for producing a ceramic green sheet was obtained in the same manner as in .
(Release layer forming coating solution M6)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion agent S4 0.075 parts (manufactured by Shin-Etsu Chemical Co., Ltd., KBM1003 (vinyltrimethoxysilane, solid concentration 100%))
p-Toluenesulfonic acid 0.008 part Catalyst P1 0.1 part Table 3 shows the summary of the releasing layer-forming coating solution and laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例9)
 密着性付与剤S1の含有比率が異なる下記の離型層形成用コート液M7を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M7)
  メチルエチルケトン       64.4部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  密着性付与剤S1       0.042部
  触媒P1             0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 9)
In the same manner as in Example 1, except that the release layer forming coating solution M7 having a different content ratio of the adhesion imparting agent S1 was applied so that the coating amount after drying was 0.020 μm. A release film for manufacturing a ceramic green sheet was obtained.
(Release layer forming coating liquid M7)
Methyl ethyl ketone 64.4 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion imparting agent S1 0.042 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例10)
 密着性付与剤S1の含有比率が異なる下記の離型層形成用コート液M8を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M8)
  メチルエチルケトン       64.3部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  密着性付与剤S1       0.125部
  触媒P1             0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 10)
In the same manner as in Example 1, except that the following release layer forming coating liquid M8 having a different content ratio of the adhesion imparting agent S1 was applied so that the coating amount after drying was 0.020 μm. A release film for manufacturing a ceramic green sheet was obtained.
(Release layer forming coating liquid M8)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion imparting agent S1 0.125 parts Catalyst P1 0.1 parts The overview of the release layer forming coating liquid and laminated film used at that time is as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例11)
 密着性付与剤S1の含有比率が異なる下記の離型層形成用コート液M9を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M9)
  メチルエチルケトン       64.3部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  密着性付与剤S1       0.008部
  触媒P1             0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 11)
In the same manner as in Example 1, except that the release layer forming coating solution M9 having a different content ratio of the adhesion imparting agent S1 was applied so that the coating amount after drying was 0.020 μm. A release film for manufacturing a ceramic green sheet was obtained.
(Release layer forming coating solution M9)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion imparting agent S1 0.008 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例12)
 密着性付与剤S1の含有比率が異なる下記の離型層形成用コート液M10を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M10)
  メチルエチルケトン       64.1部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  密着性付与剤S1       0.250部
  触媒P1             0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 12)
In the same manner as in Example 1, except that the release layer forming coating solution M10 described below, which has a different content ratio of the adhesion imparting agent S1, was applied so that the coating amount after drying was 0.020 μm. A release film for manufacturing a ceramic green sheet was obtained.
(Release layer forming coating liquid M10)
Methyl ethyl ketone 64.1 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion imparting agent S1 0.250 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例13)
離型層形成用コート液M1を積層フィルムX2に塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 13)
A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1, except that the coating solution M1 for forming a release layer was applied to the laminated film X2. Table 3 shows an overview of the release layer-forming coating solution and the laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例14)
 ポリシロキサンAとして、構造式(1)で示すビニル変性シリコーン樹脂(重量平均分子量:18000、構造式(1)中、l=110,m=3,n=1)と、ポリシロキサンBとして、構造式(2)で示すポリメチルハイドロジェンシロキサン(重量平均分子量:8400、構造式(2)中、o=3,p=65)と、をモル比(ヒドロシリル基量/アルケニル基量)が1.6になるように調整したシリコーン混合物R4を用意し、シリコーン混合物R4と密着性付与剤S1と触媒P1とを含む下記の離型層形成用コート液M11を調液したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M11)
  メチルエチルケトン     64.3部
  トルエン          34.0部
  シリコーン混合物R4     1.5部
  密着性付与剤 S1    0.083部
  触媒P1           0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 14)
As polysiloxane A, a vinyl-modified silicone resin represented by structural formula (1) (weight average molecular weight: 18000, l = 110, m = 3, n = 1 in structural formula (1)), and as polysiloxane B, the structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o = 3, p = 65 in structural formula (2)) at a molar ratio (hydrosilyl group weight/alkenyl group weight) of 1. 6 was prepared, and the following release layer-forming coating liquid M11 containing the silicone mixture R4, the adhesion imparting agent S1, and the catalyst P1 was prepared. A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
(Release layer forming coating solution M11)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R4 1.5 parts Adhesion imparting agent S1 0.083 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (実施例15)
 ポリシロキサンAとして、構造式(1)で示すビニル変性シリコーン樹脂(重量平均分子量:500000、構造式(1)中、l=3460,m=25,n=4)と、ポリシロキサンBとして、構造式(2)で示すポリメチルハイドロジェンシロキサン(重量平均分子量:8400、構造式(2)中、o=3,p=65)と、をモル比(ヒドロシリル基量/アルケニル基量)が3.5になるように調整したシリコーン混合物R5を用意し、シリコーン混合物R5と密着性付与剤S1と触媒P1とを含む下記の離型層形成用コート液M12を調液したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M12)
  メチルエチルケトン     64.3部
  トルエン          34.0部
  シリコーン混合物R5     1.5部
  密着性付与剤 S1    0.083部
  触媒P1           0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Example 15)
As polysiloxane A, a vinyl-modified silicone resin represented by structural formula (1) (weight average molecular weight: 500000, l = 3460, m = 25, n = 4 in structural formula (1)), and polysiloxane B, structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o = 3, p = 65 in structural formula (2)) at a molar ratio (hydrosilyl group weight/alkenyl group weight) of 3. 5 was prepared, and the following release layer-forming coating solution M12 containing the silicone mixture R5, the adhesion imparting agent S1, and the catalyst P1 was prepared. A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
(Release layer forming coating liquid M12)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R5 1.5 parts Adhesion imparting agent S1 0.083 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (比較例1)
 ポリシロキサンAとして、構造式(1)で示すビニル変性シリコーン樹脂(重量平均分子量:480000、構造式(1)中、l=3220,m=13,n=7)と、ポリシロキサンBとして、構造式(2)で示すポリメチルハイドロジェンシロキサン(重量平均分子量:8400、構造式(2)中、o=3,p=65)と、をモル比(ヒドロシリル基量/アルケニル基量)が4.0になるように調整したシリコーン混合物R6を用意し、シリコーン混合物R6と密着性付与剤S1と触媒P1とを含む下記の離型層形成用コート液M13を調液したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M13)
  メチルエチルケトン     64.3部
  トルエン          34.0部
  シリコーン混合物R6     1.5部
  密着性付与剤S1     0.083部
  触媒P1           0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Comparative example 1)
As polysiloxane A, a vinyl-modified silicone resin represented by structural formula (1) (weight average molecular weight: 480000, l = 3220, m = 13, n = 7 in structural formula (1)), and as polysiloxane B, the structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o = 3, p = 65 in structural formula (2)) at a molar ratio (hydrosilyl group weight/alkenyl group weight) of 4. A silicone mixture R6 adjusted to 0 was prepared, and the following release layer forming coating solution M13 containing the silicone mixture R6, the adhesion imparting agent S1, and the catalyst P1 was prepared. A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
(Release layer forming coating solution M13)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R6 1.5 parts Adhesion imparting agent S1 0.083 parts Catalyst P1 0.1 parts Outlines of the release layer forming coating solution and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (比較例2)
 ポリシロキサンAとして、構造式(1)で示すビニル変性シリコーン樹脂(重量平均分子量:462000、構造式(1)中、l=2820,m=60,n=0)と、ポリシロキサンBとして、構造式(2)で示すポリメチルハイドロジェンシロキサン(重量平均分子量:8400、構造式(2)中、o=3,p=65)と、をモル比(ヒドロシリル基量/アルケニル基量)が0.8になるように調整したシリコーン混合物R7を用意し、シリコーン混合物R7と密着性付与剤S1と触媒P1とを含む下記の離型層形成用コート液M14を調液したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M14)
  メチルエチルケトン     64.3部
  トルエン          34.0部
  シリコーン混合物R7     1.5部
  密着性付与剤S1     0.083部
  触媒P1           0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Comparative example 2)
As polysiloxane A, a vinyl-modified silicone resin represented by structural formula (1) (weight average molecular weight: 462000, l = 2820, m = 60, n = 0 in structural formula (1)), and as polysiloxane B, structure Polymethylhydrogensiloxane represented by formula (2) (weight average molecular weight: 8400, o = 3, p = 65 in structural formula (2)) at a molar ratio (hydrosilyl group weight/alkenyl group weight) of 0. Example except that a silicone mixture R7 adjusted to be 8 was prepared, and the following release layer forming coating solution M14 containing the silicone mixture R7, the adhesion imparting agent S1, and the catalyst P1 was prepared. A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
(Release layer forming coating liquid M14)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R7 1.5 parts Adhesion imparting agent S1 0.083 parts Catalyst P1 0.1 parts Outlines of the releasing layer forming coating liquid and laminated film used at that time are as follows. Table 3 shows. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (比較例3)
 シリコーン混合物R1と密着性付与剤S4と触媒P1とを含む下記の離型層形成用コート液M15を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M15)
  メチルエチルケトン       64.3部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  密着性付与剤S4       0.075部
(信越化学工業株式会社製、KBM503(N-2-(アミノエチル)-3-アミノプロピルトリメトキシシラン、固形物濃度100%)) 
p-トルエンスルホン酸      0.008部
  触媒P1             0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Comparative Example 3)
Example 1, except that the release layer forming coating solution M15 described below containing the silicone mixture R1, the adhesion imparting agent S4, and the catalyst P1 was applied so that the coating amount after drying was 0.020 μm. A release film for producing a ceramic green sheet was obtained in the same manner as in .
(Release layer forming coating liquid M15)
Methyl ethyl ketone 64.3 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Adhesion agent S4 0.075 parts (manufactured by Shin-Etsu Chemical Co., Ltd., KBM503 (N-2-(aminoethyl)-3-aminopropyltri Methoxysilane, solids concentration 100%))
p-Toluenesulfonic acid 0.008 part Catalyst P1 0.1 part Table 3 shows the summary of the releasing layer-forming coating solution and laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

 (比較例4)
 シリコーン混合物R1と触媒P1とを含み、密着性付与剤を含まない下記の離型層形成用コート液M16を乾燥後の塗布量が0.020μmになるように塗工したことを除いては実施例1と同様の方法でセラミックグリーンシート製造用離型フィルムを得た。
(離型層形成用コート液M16)
  メチルエチルケトン       64.4部
  トルエン            34.0部
  シリコーン混合物R1       1.5部
  触媒P1             0.1部
 その際に使用した離型層形成用コート液と積層フィルムの概要を表3に示す。また、得られた離型フィルムの各種物性の評価を行った結果を表4に示す。
(Comparative Example 4)
The following coating liquid M16 for forming a release layer containing the silicone mixture R1 and the catalyst P1 and containing no adhesion imparting agent was applied so that the coating amount after drying was 0.020 μm. A release film for producing a ceramic green sheet was obtained in the same manner as in Example 1.
(Release layer forming coating liquid M16)
Methyl ethyl ketone 64.4 parts Toluene 34.0 parts Silicone mixture R1 1.5 parts Catalyst P1 0.1 parts Table 3 shows the overview of the release layer-forming coating solution and laminated film used at that time. Table 4 shows the results of evaluation of various physical properties of the obtained release film.

Figure JPOXMLDOC01-appb-T000009
Figure JPOXMLDOC01-appb-T000009

Figure JPOXMLDOC01-appb-T000010
Figure JPOXMLDOC01-appb-T000010

 表4の結果が示すように、実施例1~15では、離型層がポリシロキサンAとポリシロキサンBと密着性付与剤Cとを含む硬化性組成物が硬化した層であり、式(a)及び式(b)を満たすため、離型性に優れると共に、離型層の転写・脱落や密着性不良が生じにくい離型フィルムが得られた。 As the results in Table 4 show, in Examples 1 to 15, the release layer is a layer obtained by curing a curable composition containing polysiloxane A, polysiloxane B, and adhesion imparting agent C, and the formula (a ) and formula (b) are satisfied, a release film is obtained which is excellent in releasability and is less likely to cause transfer/drop-off of the release layer and poor adhesion.

 なお、実施例11では、密着性付与剤の含有比率が小さ過ぎるため、経時での密着性の改善効果が小さくなり、密着性付与剤の含有比率に好ましい下限値が存在することが分かった。実施例12では、密着性付与剤の含有比率が大き過ぎるため、剥離力が若干高くなり、密着性付与剤の含有比率に好ましい上限値が存在することが分かった。実施例14では、ポリシロキサンAの重量平均分子量が小さ過ぎるため、シリコーンのPVBへの転写量がやや高くなり、ポリシロキサンAの重量平均分子量に好ましい下限値が存在することが分かった。実施例15では、モル比(ヒドロシリル基量/アルケニル基量)がやや大きいため、セラミック剥離力がやや高く、モル比に好ましい上限値が存在することが分かった。 In addition, in Example 11, since the content ratio of the adhesion imparting agent was too small, the effect of improving adhesion over time was small, and it was found that there is a preferable lower limit for the content ratio of the adhesion imparting agent. In Example 12, since the content ratio of the adhesion imparting agent was too large, the peeling force was slightly increased, and it was found that there is a preferred upper limit for the content ratio of the adhesion imparting agent. In Example 14, the weight average molecular weight of polysiloxane A was too small, so that the amount of silicone transferred to PVB was slightly high. In Example 15, since the molar ratio (amount of hydrosilyl groups/amount of alkenyl groups) was slightly large, the ceramic peeling force was slightly high, and it was found that the molar ratio has a preferable upper limit.

 これに対して、モル比(ヒドロシリル基量/アルケニル基量)が大きいため式(a)の上限値を超える比較例1では、剥離力が増大した。モル比(ヒドロシリル基量/アルケニル基量)が小さいため式(a)の下限値未満となる比較例2では、裏移りの結果が悪く、離型層が基材の離型層と反対側の面に転写するため、セラミックグリーンシート加工工程を著しく汚染する懸念があり、PVBシートへのSi転写量も多くなった。望ましくない密着性付与剤を使用した結果、式(a)の上限値を超える比較例3では、密着性付与剤が硬化を阻害する結果、裏移りの結果が悪く、セラミックグリーンシート加工工程を汚染する懸念が極めて高い。密着性付与剤を使用しない比較例4では、剥離力が大きくなり、経時密着性が低下すると共に、PVBシートへのSi転写量もやや多くなった。 On the other hand, in Comparative Example 1, which exceeds the upper limit of formula (a) due to the large molar ratio (amount of hydrosilyl groups/amount of alkenyl groups), the peel strength increased. In Comparative Example 2, in which the molar ratio (amount of hydrosilyl groups/amount of alkenyl groups) is small and therefore is less than the lower limit of formula (a), the result of set-off is poor, and the release layer is formed on the opposite side of the base material to the release layer. Since it is transferred to the surface, there is a concern that the process of processing the ceramic green sheet will be significantly contaminated, and the amount of Si transferred to the PVB sheet has also increased. In Comparative Example 3, in which the upper limit of formula (a) was exceeded as a result of using an undesirable adhesion-imparting agent, the adhesion-imparting agent inhibited curing, resulting in poor set-off and contamination of the ceramic green sheet processing process. There is an extremely high concern that In Comparative Example 4 in which no adhesion-imparting agent was used, the peeling force increased, the adhesion over time decreased, and the amount of Si transferred to the PVB sheet increased slightly.

 本発明によれば、離型層の平滑性と剥離性を高めることで、厚みが1μm以下の超薄層品でも欠陥が少ないセラミックグリーンシートを成型できる離型フィルムを提供することで、セラミックグリーンシートを不良が生じる恐れなく製造することができる。
 
According to the present invention, by improving the smoothness and releasability of the release layer, it is possible to provide a release film that can form a ceramic green sheet with few defects even in an ultra-thin layer product having a thickness of 1 μm or less. Sheets can be manufactured without fear of defects.

Claims (7)

 ポリエステルフィルムと離型層とを有するセラミックグリーンシート製造用離型フィルムであって、
 前記離型層は、分子中に2つ以上のアルケニル基を有するポリシロキサンAと、分子中に2つ以上のヒドロシリル基を有するポリシロキサンBと、密着性付与剤Cと、を含む硬化性組成物が硬化した層であり、
 前記離型層の表面の表面自由エネルギーγS(mJ/m)とγSの水素結合成分γSVh(mJ/m)とが、以下の式(a)及び式(b)を満たすことを特徴とするセラミックグリーンシート製造用離型フィルム。
 1.0≦γSVh/γS*100≦6.5 (a)
 γS≦30 (b)
A release film for producing a ceramic green sheet having a polyester film and a release layer,
The release layer comprises a polysiloxane A having two or more alkenyl groups in the molecule, a polysiloxane B having two or more hydrosilyl groups in the molecule, and an adhesion imparting agent C. A curable composition containing is a hardened layer of matter,
The surface free energy γS (mJ/m 2 ) of the surface of the release layer and the hydrogen bond component γSVh (mJ/m 2 ) of γS satisfy the following formulas (a) and (b). release film for manufacturing ceramic green sheets.
1.0≤γSVh/γS*100≤6.5 (a)
γS≦30 (b)
 密着性付与剤Cが、ビニル基、エポキシ基、アクリル基、及びメタクリル基からなる群から選ばれる1つ以上の官能基を有するシランカップリング剤である、請求項1に記載のセラミックグリーンシート製造用離型フィルム。 The ceramic green sheet production according to claim 1, wherein the adhesion imparting agent C is a silane coupling agent having one or more functional groups selected from the group consisting of vinyl groups, epoxy groups, acrylic groups, and methacrylic groups. release film.  前記ポリシロキサンAの重量平均分子量が、300000以上600000以下である、請求項1又は2に記載のセラミックグリーンシート製造用離型フィルム。 The release film for producing a ceramic green sheet according to claim 1 or 2, wherein the polysiloxane A has a weight average molecular weight of 300,000 or more and 600,000 or less.  前記硬化性組成物中における前記ポリシロキサンBの有するヒドロシリル基量と、前記ポリシロキサンAの有するアルケニル基量とのモル比が、以下の式(c)を満たす、請求項1~3いずれか1項に記載のセラミックグリーンシート製造用離型フィルム。
 1.0≦Si-H/Si-A≦3.8 (c)
(式中、Si-Hはヒドロシリル基のモル量を、Si-Aはアルケニル基のモル量を示す。)
Any one of claims 1 to 3, wherein the molar ratio between the amount of hydrosilyl groups possessed by the polysiloxane B and the amount of alkenyl groups possessed by the polysiloxane A in the curable composition satisfies the following formula (c): A release film for producing a ceramic green sheet according to the above item.
1.0≤Si-H/Si-A≤3.8 (c)
(In the formula, Si—H represents the molar amount of hydrosilyl groups, and Si—A represents the molar amount of alkenyl groups.)
 前記硬化性組成物中において、前記ポリシロキサンAと前記ポリシロキサンBとの合計量に対して、前記密着性付与剤Cを1質量%以上10質量%以下含む、請求項1~4いずれか1項に記載のセラミックグリーンシート製造用離型フィルム。 Any one of claims 1 to 4, wherein the curable composition contains 1% by mass or more and 10% by mass or less of the adhesion imparting agent C with respect to the total amount of the polysiloxane A and the polysiloxane B. A release film for producing a ceramic green sheet according to the above item.  前記ポリエステルフィルムが無機粒子を実質的に含有していない表面層Aを有し、
 前記離型層が、その表面層Aに厚み0.005μm以上0.1μm以下で積層されており、
 前記離型層の表面の最大突起高さ(Sp)が100nm以下である、請求項1~5いずれか1項に記載のセラミックグリーンシート製造用離型フィルム。
The polyester film has a surface layer A that does not substantially contain inorganic particles,
The release layer is laminated on the surface layer A with a thickness of 0.005 μm or more and 0.1 μm or less,
The release film for producing a ceramic green sheet according to any one of claims 1 to 5, wherein the maximum projection height (Sp) on the surface of the release layer is 100 nm or less.
 請求項1~6いずれか1項に記載のセラミックグリーンシート製造用離型フィルムを用いて、セラミックグリーンシートを成型するセラミックグリーンシートの製造方法であって、成型されたセラミックグリーンシートが0.2μm~1.0μmの厚みを有するセラミックグリーンシートの製造方法。
 
A method for producing a ceramic green sheet by molding a ceramic green sheet using the release film for producing a ceramic green sheet according to any one of claims 1 to 6, wherein the molded ceramic green sheet has a thickness of 0.2 μm. A method for producing ceramic green sheets having a thickness of ~1.0 μm.
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