WO2022210321A1 - ポリアミド酸組成物、ポリイミド組成物、接着剤および積層体 - Google Patents
ポリアミド酸組成物、ポリイミド組成物、接着剤および積層体 Download PDFInfo
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- WO2022210321A1 WO2022210321A1 PCT/JP2022/014235 JP2022014235W WO2022210321A1 WO 2022210321 A1 WO2022210321 A1 WO 2022210321A1 JP 2022014235 W JP2022014235 W JP 2022014235W WO 2022210321 A1 WO2022210321 A1 WO 2022210321A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1042—Copolyimides derived from at least two different tetracarboxylic compounds or two different diamino compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
- C08G73/105—Polyimides containing oxygen in the form of ether bonds in the main chain with oxygen only in the diamino moiety
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
- C08G73/1053—Polyimides containing oxygen in the form of ether bonds in the main chain with oxygen only in the tetracarboxylic moiety
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1067—Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1067—Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
- C08G73/1071—Wholly aromatic polyimides containing oxygen in the form of ether bonds in the main chain
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J179/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09J161/00 - C09J177/00
- C09J179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C09J179/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2170/00—Compositions for adhesives
Definitions
- the present disclosure relates to polyamic acid compositions, polyimide compositions, adhesives and laminates.
- thermoplastic polyimide has the advantage of having high heat resistance and a relatively short thermosetting reaction. Therefore, the use of varnishes and films containing thermoplastic polyimides has been investigated.
- Patent Document 1 a method using solvent-soluble polyimide varnish has been proposed (see Patent Documents 1 and 2).
- a varnish comprising:
- Patent Document 2 discloses a polyimide resin composition containing a monomer (A) having a benzophenone skeleton as an aromatic monomer and a polyimide resin having a diamine terminal group.
- the manufacturing process of electronic circuit boards, semiconductor devices, etc. involves heating processes such as electrode film formation and rewiring processes, so the thermoplastic polyimide film used in these processes is required to have heat resistance to withstand such high temperatures.
- the polyimide obtained from the polyimide varnish of Patent Document 1 did not have sufficient heat resistance.
- the polyimide obtained from the polyimide varnish of Patent Document 2 has sufficient heat resistance, there is a demand for further improvement in handling of the varnish. That is, the solvent in the polyimide varnish easily absorbs moisture in the atmosphere during coating, and as a result, the polyimide tends to precipitate. A polyimide film obtained from such a precipitated state may have an uneven film surface, which may adversely affect physical properties.
- the present inventors found that white precipitation can be highly suppressed by using a varnish containing polyamic acid.
- they have found a new problem that the solubility (re-solubility) in a solvent of a polyimide film obtained from a polyamic acid varnish is low.
- thermoplastic polyimide film be applied as an adhesive and then peeled off without any adhesive residue.
- a peeling method there are laser lift-off (LLO), mechanical peeling, and a method of dissolving and removing with a solvent, etc., but from the viewpoint of easy peeling at low cost, it can be dissolved and removed with a solvent, that is, re-dissolving the polyimide film. High quality is required.
- the present disclosure has been made in view of such circumstances, and aims to provide a polyamic acid composition capable of imparting a polyimide film having excellent handleability and high heat resistance and re-solubility. do.
- Another object of the present invention is to provide a polyimide composition, an adhesive and a laminate using the polyamic acid composition.
- the polyamic acid composition of the present disclosure is a composition containing a polyamic acid, wherein the monomers constituting the polyamic acid are fatty acids having 3 or more carbon atoms in the main chain with respect to the total monomers constituting the polyamic acid.
- the monomer (A) having a diphenyl ether skeleton contains 20 mol% or more of the monomer (A-1) having 3 or more aromatic rings with respect to the total of the monomers constituting the polyamic acid.
- the polyimide composition of the present disclosure is a composition containing a polyimide, wherein the monomers constituting the polyimide have an aliphatic chain having 3 or more carbon atoms in the main chain with respect to the total monomers constituting the polyimide.
- the aromatic monomer contains 95 mol% or more of an aromatic monomer that does not contain a polyimide, and the aromatic monomer does not have a biphenyl skeleton and a benzophenone skeleton with respect to the total amount of monomers constituting the polyimide, and has general formula (1) or (2) 40 to 95 mol% of the represented monomer (A) having a diphenyl ether skeleton, 0 to 60 mol% of the monomer (B) having a benzophenone skeleton, and 0 to 60 mol% of the monomer (C) having a biphenyl skeleton and the monomer (A) having a diphenyl ether skeleton contains 20 mol% or more of a monomer (A-1) having 3 or more aromatic rings with respect to the total monomers constituting the polyimide, and constitutes the polyimide
- the molar ratio of diamine and tetracarboxylic dianhydride, which are the monomers, is diamine/tetracarbox
- the adhesive of the present disclosure contains the polyimide composition of the present disclosure.
- the laminate of the present disclosure has a substrate and a resin layer containing the polyimide composition of the present disclosure disposed on the substrate.
- a polyamic acid composition capable of imparting a polyimide film having excellent handleability and high heat resistance and re-solubility. It is also possible to provide a polyimide composition, an adhesive and a laminate using the polyamic acid composition.
- FIGS. 1A to 1H are cross-sectional schematic diagrams showing an example of a process of processing a silicon substrate using the polyimide composition of the present disclosure as a temporary fixing adhesive.
- a numerical range represented by " ⁇ " means a range including the numerical values before and after " ⁇ " as the lower and upper limits, respectively.
- the upper limit or lower limit described in a certain numerical range may be replaced with the upper limit or lower limit of another numerical range described stepwise.
- polyimide varnishes have low solubility in polyimide solvents, so they tend to precipitate white during storage and are poor in handleability. This tendency is particularly pronounced in polyimides containing many rigid structures derived from aromatic monomers.
- the molecular end of the polyamic acid is an acid anhydride group (specifically, the tetracarboxylic dianhydride constituting the polyamic acid is more than the diamine), so that the polyamic acid is rigid. Also, it is thought that the interaction within or between the molecular chains of the resulting polyimide is reduced, and the solubility (re-solubility) in a solvent after being formed into a polyimide film can be increased. That is, it is possible to obtain a polyimide film having high heat resistance and excellent re-solubility while suppressing deposition of varnish and improving handleability.
- the configuration of the present invention will be described below.
- polyamic acid composition contains a specific polyamic acid and may optionally further contain other optional ingredients such as a solvent.
- Polyamic Acid Polyamic acid is a polymer obtained by polycondensation of tetracarboxylic dianhydride and diamine. That is, monomers constituting polyamic acid include tetracarboxylic dianhydride and diamine.
- the monomers composing the polyamic acid contain 95 mol% or more of an aromatic monomer having no aliphatic chain with 3 or more carbon atoms in the main chain relative to the total monomers composing the polyamic acid.
- the aromatic monomer By including 95 mol % or more of the aromatic monomer, the heat resistance of the obtained polyimide can be enhanced.
- the monomers constituting the polyamic acid are preferably composed of aromatic monomers.
- Aromatic monomers constituting the polyamic acid include a monomer (A) having a diphenyl ether skeleton (hereinafter also referred to as "monomer (A) having a diphenyl ether skeleton") without having a biphenyl skeleton and a benzophenone skeleton, and optionally may further contain at least one of a monomer (B) having a benzophenone skeleton and a monomer (C) having a biphenyl skeleton.
- A diphenyl ether skeleton
- B monomer having a benzophenone skeleton
- C monomer having a biphenyl skeleton
- the monomer (A) having a diphenyl ether skeleton has a diphenyl ether skeleton represented by general formula (1) or (2), as described above.
- the monomer (A) having a diphenyl ether skeleton can impart appropriate rigidity to the polyamic acid and impart heat resistance to the resulting polyimide.
- the monomer (A) having a diphenyl ether skeleton preferably contains a monomer (A-1) having 3 or more aromatic rings.
- the aromatic ring of the monomer (A-1) having 3 or more aromatic rings is preferably a benzene ring.
- the monomer (A-1) having 3 or more aromatic rings may be an aromatic tetracarboxylic dianhydride or an aromatic diamine.
- aromatic tetracarboxylic dianhydrides that are monomers (A-1) having 3 or more aromatic rings include 4,4′-(4,4′-isopropylidenediphenoxy)bisphthalic anhydride, 1 , 3-bis(3,4-dicarboxyphenoxy)benzene dianhydride and 1,4-bis(3,4-dicarboxyphenoxy)benzene dianhydride.
- aromatic tetracarboxylic dianhydride which is the monomer (A-1) having 3 or more aromatic rings, also include the following compounds.
- aromatic diamines that are monomers (A-1) having 3 or more aromatic rings include aromatic diamines represented by general formula (3).
- X is an arylene group having 6 to 10 carbon atoms or a group represented by the following formula ( ⁇ ), and n is an integer of 1-3. From the standpoint of availability, n is preferably 1.
- Y is an oxygen atom, a sulfur atom, a sulfone group, a methylene group, a fluorene structure, —CR 1 R 2 — (R 1 and R 2 are substituted or unsubstituted C 1-3 alkyl group or phenyl group).
- alkyl groups having 1 to 3 carbon atoms as R 1 and R 2 include methyl group, ethyl group, propyl group, trifluoropropyl group and the like.
- R 1 and R 2 can be an isopropylidene group or a hexafluoroisopropylidene group.
- R 1 and R 2 may combine with each other to form a ring.
- the ring formed by combining R 1 and R 2 may include a cyclohexane ring and a cyclopentane ring, and these rings may be condensed with an aromatic ring such as a benzene ring. Since such a linking group has a three-dimensionally expanding structure, it is easy to improve the resolubility of the obtained polyimide.
- the compound represented by the general formula (3) has a moderately bulky group and has a structure in which the molecular chains can move freely, so it is presumed that packing between the polyimide molecular chains is easily suppressed. As a result, it is presumed that the re-solubility of the polyimide film in the solvent can be enhanced.
- 1,3-bis(3-aminophenoxy)benzene, 1,3-bis(4-aminophenoxy)benzene, aromatic diamines represented by general formula (3) is more preferred.
- 1,3-bis(3-aminophenoxy)benzene, 1,3-bis(4-aminophenoxy)benzene, and bis[4-(3-aminophenoxy)phenyl]sulfide are more 2,2-bis[4-(4-aminophenoxy)phenyl]propane is preferable from the viewpoint of mechanical properties (elongation).
- aromatic diamine which is the monomer (A-1) having 3 or more aromatic rings
- diamines represented by the following formulas include diamines represented by the following formulas.
- the monomer (A-1) having 3 or more aromatic rings preferably contains the aromatic diamine.
- the lower limit of the content of the monomer (A-1) having 3 or more aromatic rings is 20 mol% or more with respect to the total monomers constituting the polyamic acid from the viewpoint of obtaining a polyimide having good heat resistance. is preferred, 30 mol % or more is more preferred, and 40 mol % or more is even more preferred.
- the upper limit of the content of the monomer (A-1) having 3 or more aromatic rings is preferably 80 mol% or less, preferably 70 mol% or less, from the viewpoint of obtaining a polyimide having good heat resistance. is more preferable, and 60 mol % or less is even more preferable.
- the monomer (A) having a diphenyl ether skeleton may further contain a monomer (A-2) having a diphenyl ether skeleton other than the above.
- Another monomer having a diphenyl ether skeleton (A-2) is an aromatic tetracarboxylic dianhydride (preferably 4,4'-oxydiphthalic dianhydride) having a diphenyl ether skeleton represented by general formula (1).
- aromatic tetracarboxylic dianhydride preferably 4,4'-oxydiphthalic dianhydride
- the aromatic tetracarboxylic dianhydride tends to increase the flexibility of the polyamic acid, and tends to increase the re-solubility of the obtained polyimide.
- the aromatic monomers constituting the polyamic acid may further contain a monomer (B) having a benzophenone skeleton.
- the monomer (B) having a benzophenone skeleton can enhance the heat resistance by using it within a range that does not significantly impair the re-solubility of the polyamic acid (or the resulting polyimide).
- the monomer (B) having a benzophenone skeleton may be an aromatic tetracarboxylic dianhydride having a benzophenone skeleton, or an aromatic diamine having a benzophenone skeleton.
- aromatic tetracarboxylic dianhydrides having a benzophenone skeleton include the following compounds.
- aromatic diamines having a benzophenone skeleton examples include 3,3′-diaminobenzophenone, 3,4′-diaminobenzophenone, 4,4′-diaminobenzophenone, 4,4′-bis[4-(4-amino- ⁇ , ⁇ -dimethylbenzyl)phenoxy]benzophenone and compounds represented by the following formula (4) are included.
- the monomer (B) having a benzophenone skeleton preferably contains an aromatic tetracarboxylic dianhydride having a benzophenone skeleton.
- the aromatic monomers constituting the polyamic acid further contain a monomer (C) having a biphenyl skeleton.
- the monomer (C) having a biphenyl skeleton tends to increase the rigidity of the polyamic acid and the heat resistance of the obtained polyimide.
- the monomer (C) having a biphenyl skeleton may be an aromatic tetracarboxylic dianhydride having a biphenyl skeleton or an aromatic diamine having a biphenyl skeleton.
- aromatic tetracarboxylic dianhydrides having a biphenyl skeleton examples include 3,3′,4,4′-biphenyltetracarboxylic dianhydride, 2,3′,3,4′-biphenyltetracarboxylic dianhydride, Anhydrides, 4,4′-bis(3,4-dicarboxyphenoxy)biphenyl dianhydride, 2,2′,3,3′-biphenyltetracarboxylic dianhydride and the like are included.
- aromatic diamines having a biphenyl skeleton examples include 4,4'-bis(3-aminophenoxy)biphenyl, 4,4'-bis(4-aminophenoxy)biphenyl, 3,3'-bis(4-amino phenoxy)biphenyl, 4,4'-bis(4-aminophenoxy)biphenyl, 2,2'-bis(trifluoromethyl)-1,1'-biphenyl-4,4'-diamine, 3,3'-dimethyl Benzidine, 3,4'-dimethylbenzidine, 4,4'-dimethylbenzidine.
- 4,4′-bis(3-aminophenoxy)biphenyl, 4,4′-bis(4-aminophenoxy)biphenyl, 3,3′-bis(4-aminophenoxy)biphenyl, 2,2′-bis (Trifluoromethyl)-1,1'-biphenyl-4,4'-diamine is preferred.
- the monomer (C) having a biphenyl skeleton preferably contains an aromatic tetracarboxylic dianhydride having a biphenyl skeleton.
- the acid dianhydride which is a monomer that constitutes polyamic acid, is an aromatic tetracarboxylic dianhydride having a biphenyl skeleton (monomer (C) having a biphenyl skeleton) and an aromatic tetracarboxylic dianhydride having a benzophenone skeleton.
- A diphenyl ether skeleton
- the aromatic monomers constituting the polyamic acid are 40 to 95 mol% of the monomer (A) having a diphenyl ether skeleton and 0 to 60 mol% of the monomer (B) having a benzophenone skeleton with respect to the total monomers constituting the polyamic acid.
- mol % and 0 to 60 mol % of the monomer (C) having a biphenyl skeleton are preferably 5 to 60 mol % relative to the total monomers constituting the polyamic acid.
- the aromatic monomers constituting the polyamic acid preferably contain 40 to 70 mol% of the monomer (A) having a diphenyl ether skeleton and benzophenone with respect to the total of the monomers constituting the polyamic acid. It contains 5 to 30 mol % of the monomer (B) having a skeleton and 25 to 45 mol % of the monomer (C) having a biphenyl skeleton.
- the aromatic monomer constituting the polyamic acid is, with respect to the total monomers constituting the polyamic acid, It contains 40 to 60 mol % of the monomer (A) having a diphenyl ether skeleton, 0 to 5 mol % of the monomer (B) having a benzophenone skeleton, and 40 to 45 mol % of the monomer (C) having a biphenyl skeleton.
- the ratio (B)/((B)+(C)) of the monomer (B) having a benzophenone skeleton to the sum of the monomer (B) having a benzophenone skeleton and the monomer (C) having a biphenyl skeleton is For example, it can be 0.3 or less, preferably 0.2 or less.
- the heat resistance, particularly the glass transition temperature (Tg) of the resulting polyimide can be further increased (while ensuring re-solubility).
- the monomer composition of polyamic acid can be confirmed by hydrolyzing with a strong base, such as sodium hydroxide or potassium hydroxide, and analyzing the separated components by NMR analysis.
- a strong base such as sodium hydroxide or potassium hydroxide
- Monomers constituting polyamic acid may further contain monomers other than aromatic monomers, such as aliphatic monomers and alicyclic monomers, if necessary.
- the tetracarboxylic dianhydride component (a mol) to be reacted should be larger than the diamine component (b mol).
- b/a When b/a is 0.999 or less, the obtained polyimide tends to have an acid anhydride group at its molecular terminal, so that re-solubility can be easily obtained.
- b/a can also be specified as a charging ratio of the tetracarboxylic dianhydride component (a mol) and the diamine component (b mol) to be reacted.
- Polyamic acid may be a random polymer or a block polymer.
- the intrinsic viscosity ( ⁇ ) of polyamic acid is preferably 0.4 to 1.5 dL/g, more preferably 0.5 to 1.5 dL/g.
- the intrinsic viscosity ( ⁇ ) of polyamic acid is determined by Ubbelohde viscosity tube at 25° C. when polyamic acid is dissolved in N-methyl-2-pyrrolidone (NMP) to a concentration of 0.5 g/dL. It is the measured value.
- NMP N-methyl-2-pyrrolidone
- the intrinsic viscosity ( ⁇ ) of the polyamic acid When the intrinsic viscosity ( ⁇ ) of the polyamic acid is 1.5 dL/g or less, it can be formed into a film while maintaining a solid content concentration to some extent, which facilitates handling.
- the intrinsic viscosity ( ⁇ ) of polyamic acid is determined by Ubbelohde viscosity tube at 25° C. when polyamic acid is dissolved in N-methyl-2-pyrrolidone (NMP) to a concentration of 0.5 g/dL. It is an average value measured three times.
- the intrinsic viscosity ( ⁇ ) of polyamic acid can be adjusted by changing the ratio of diamine and acid dianhydride, which are the monomers that make up polyamic acid.
- Polyamic acid can exhibit heat resistance (Tg, T d5 ) and re-solubility, which will be described later, when imidized to form a polyimide (film).
- the polyamic acid composition of the present disclosure may, if necessary, further contain components other than the polyamic acid described above.
- the polyamic acid composition may further contain a solvent.
- the solvent may be a solvent used for preparing polyamic acid, and is not particularly limited as long as it can dissolve the diamine component and the tetracarboxylic dianhydride component described above.
- an aprotic solvent, an alcoholic solvent, or the like can be used.
- aprotic solvents include N-methyl-2-pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, dimethylsulfoxide, hexamethylphosphoramide, 1,3-dimethyl-2-imidazolide non, 3-methoxy-N,N-dimethylpropanamide, etc.; ether compounds such as 2-methoxyethanol, 2-ethoxyethanol, 2-(methoxymethoxy)ethoxyethanol, 2-isopropoxyethanol, 2-butoxyethanol , tetrahydrofurfuryl alcohol, diethylene glycol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, triethylene glycol, triethylene glycol monoethyl ether, tetraethylene glycol, 1-methoxy-2-propanol, 1-ethoxy-2- propanol, dipropylene glycol, dipropylene glycol monomethyl ether, dipropylene glycol mono
- alcoholic solvents include methanol, ethanol, 1-propanol, 2-propanol, tert-butyl alcohol, ethylene glycol, 1,2-propanediol, 1,3-propanediol, 1,3-butanediol, 1 ,4-butanediol, 2,3-butanediol, 1,5-pentanediol, 2-butene-1,4-diol, 2-methyl-2,4-pentanediol, 1,2,6-hexanetriol, Diacetone alcohol and the like are included.
- solvents may contain only one type, or may be a combination of two or more types.
- N,N-dimethylacetamide, N-methyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone, 3-methoxy-N,N-dimethylpropanamide or a mixed solvent thereof is preferred.
- the concentration of the resin solid content in the polyamic acid composition (varnish) is preferably 5 to 50% by weight, more preferably 10 to 30% by weight, from the viewpoint of improving coatability.
- the polyamic acid composition can be obtained by blending a tetracarboxylic dianhydride component and a diamine component in a solvent and subjecting them to a dehydration reaction.
- the types of solvent, tetracarboxylic dianhydride component, and diamine component to be used and their quantitative ratios are as described above.
- the reaction for obtaining the amic acid composition is preferably carried out by heating the above-described tetracarboxylic dianhydride and diamine in a solvent at a relatively low temperature (a temperature at which imidization does not occur). .
- the temperature at which imidization does not occur can be specifically 5 to 120°C. More preferably, it can be 25 to 80°C.
- the reaction is preferably carried out in an environment in which an imidization catalyst (for example, triethylamine, etc.) is substantially absent.
- the polyimide composition of the present disclosure includes a specific polyimide obtained by imidating the polyamic acid contained in the polyamic acid composition described above.
- a polyimide composition containing such a specific polyimide is obtained by heating the aforementioned polyamic acid composition to imidize the polyamic acid.
- the polyimide composition of the present disclosure may be a film.
- the temperature at which the polyamic acid composition is imidized can be, for example, 150 to 300°C. Therefore, if the temperature of the coating film is rapidly raised to over 300° C., the polyamic acid on the surface of the coating film is imidized before the solvent volatilizes from the coating film. As a result, the solvent remaining in the coating film causes air bubbles or irregularities on the surface of the coating film. Therefore, it is preferable to gradually raise the temperature of the coating film in the temperature range of 50 to 300°C.
- the heating rate in the temperature range of 50 to 300° C. is preferably 0.25 to 50° C./min, more preferably 1 to 40° C./min, and 2 to 30° C./min.
- Heating is preferably carried out in a temperature range of 50 to 300° C. for 30 minutes.
- a preferable imidization condition is to raise the temperature from 50° C. to 250° C. at a rate of 5° C./min in an air atmosphere and heat at 250° C. for 30 minutes.
- the temperature may be raised continuously or stepwise (sequentially), but it is preferable to raise the temperature continuously from the viewpoint of suppressing appearance defects of the resulting polyimide film.
- the rate of temperature increase may be constant over the entire temperature range described above, or may be changed in the middle.
- the polyimide composition obtained by heating the polyamic acid composition of the present invention under the above conditions and imidizing it preferably satisfies the following physical properties.
- the glass transition temperature of the polyimide film is preferably 130°C or higher and lower than 260°C, more preferably 160 to 220°C.
- a polyimide having a glass transition temperature within the above range has good heat resistance, and is therefore suitable as an adhesive for use in electronic circuit boards, semiconductor devices, and the like.
- the glass transition temperature of the polyimide film can be measured by the following method.
- the obtained polyimide film is cut into a size of 5 mm in width and 22 mm in length.
- the glass transition temperature (Tg) of the obtained sample is measured with a thermal analyzer (eg, TMA-50 manufactured by Shimadzu Corporation).
- TMA-50 manufactured by Shimadzu Corporation
- the TMA curve was obtained by measuring under the conditions of a temperature increase rate of 5 ° C./min and a tensile mode (100 mN) in an air atmosphere, and the inflection point of the TMA curve due to the glass transition
- the value of the glass transition temperature (Tg) can be determined by extrapolating the curve of .
- the 5% weight loss temperature (T d5 ) of the polyimide film in an air atmosphere is preferably 450° C. or higher, more preferably 500° C. or higher, from the same viewpoint as above.
- the upper limit of T d5 of polyimide is not particularly limited, but can be set to 600° C., for example.
- the 5% weight loss temperature (T d5 ) of the polyimide film can be measured using a thermogravimetric analyzer. Specifically, the sample is sampled, the scanning temperature is set to 30 to 900 ° C., and the temperature is the temperature at which the mass of the sample decreases by 5% by heating in an air atmosphere at a temperature increase rate of 10 ° C./min. can be measured as
- the Tg and Td5 of the polyimide film can be adjusted by the monomer composition of polyamic acid. For example, the content of the monomer (A) having a diphenyl ether skeleton (preferably an aromatic diamine having a diphenyl ether skeleton) constituting the polyamic acid is increased, or the monomer (C) having a biphenyl skeleton (preferably an aromatic diamine having a biphenyl skeleton) is increased.
- the Tg and Td5 of the resulting polyimide film can be increased by increasing the content of the group tetracarboxylic acid dianhydride).
- the polyimide film obtained by imidating the polyamic acid composition preferably has high solubility in the solvent, for example, when used as an adhesive, from the viewpoint of dissolving it in the solvent and making it easy to peel off. .
- a polyimide film having a thickness of 20 ⁇ m obtained by imidating a polyamic acid composition was immersed in N-methyl-2-pyrrolidone (NMP) at 80° C. for 20 minutes under the conditions described later, and then filtered with filter paper. is preferably 60% or more, more preferably 80% or more, and even more preferably 95% or more.
- NMP N-methyl-2-pyrrolidone
- dissolution rate (%) [1 - [(weight of filter paper after filtration and drying) - (weight of filter paper before use)]/(weight of film before immersion)] x 100
- Redissolubility can be measured by the following procedure. 1) A polyimide film obtained by imidating the polyamic acid composition described above was cut into a sample having a thickness of 20 ⁇ m and a size of 2.0 cm ⁇ 2.0 cm, and the weight (the weight of the film before immersion) was measured. Measure.
- the heating rate in the temperature range of 50 to 300° C. is preferably 0.25 to 50° C./min, preferably 1 to 40° C./min, in an air atmosphere. More preferably, it is 2 to 30° C./min. Heating may be in the temperature range of 50-300° C. for 30 minutes.
- a preferable imidization condition is heating from 50° C. to 250° C.
- the sample was added to N-methyl-2-pyrrolidone (NMP) to give a concentration of 1% by mass as a sample solution, and the resulting sample solution was placed in an oven heated to 80°C for 20 minutes. Let stand for 1 minute. Thereafter, the sample solution is taken out from the oven, filtered through filter paper, and dried at 100° C. under reduced pressure. Then, the weight of the filter paper after filtration and drying is measured.
- NMP N-methyl-2-pyrrolidone
- the resolubility of the polyimide film can be adjusted by the type and composition of the polyamic acid molecular end group, which is the precursor of the polyimide film. For example, by using an acid anhydride group as the molecular terminal group of the polyamic acid, the re-solubility of the obtained polyimide tends to be enhanced. Further, as a monomer constituting the polyamic acid, increasing the content of the monomer (A) having a diphenyl ether skeleton (preferably aromatic tetracarboxylic dianhydride having a diphenyl ether skeleton) increases the re-solubility of the resulting polyimide. Cheap.
- the actually produced polyimide film (that is, the polyimide film when the thickness is used) may also satisfy the above dissolution rate.
- the polyamic acid composition of the present disclosure can provide a polyimide having high heat resistance and resolubility while having good handleability. Therefore, the polyimide composition obtained from the polyamic acid composition of the present disclosure is particularly suitable for applications that require heat resistance and resolubility; for example, adhesives and sealing materials in electronic circuit board members, semiconductor devices, surge parts, It can be an insulating material, a substrate material or a protective material.
- the substrate can be a laminate having a substrate and a resin layer containing the polyimide composition of the present disclosure disposed thereon.
- it can be a laminate having a substrate and a resin layer containing the polyimide composition of the present disclosure disposed on the substrate in contact with the substrate.
- the material constituting the substrate is not particularly limited as long as it is commonly used. That is, the material that constitutes the base material may be, for example, silicon, ceramics, metal, or resin, depending on the application. Examples of metals include silicon, copper, aluminum, SUS, iron, magnesium, nickel, alumina, and the like.
- the substrate more preferably contains at least one element selected from the group consisting of Si, Ga, Ge and As, and is a semiconductor containing at least one element selected from the group consisting of Si, Ga, Ge and As. A substrate is more preferable.
- the laminate can be produced, for example, through a step of applying the polyamic acid composition of the present disclosure onto a base material and then imidating it by heating to form a resin layer made of the polyimide composition.
- the heating temperature of the coating film can be a temperature suitable for imidization, as described above.
- the polyimide compositions of the present disclosure can be used as insulating substrates or adhesives in circuit boards; particularly flexible circuit boards.
- a flexible circuit board can have a metal foil (substrate) and an insulating layer of the polyimide composition of the present disclosure (obtained from the polyamic acid composition of the present disclosure) disposed thereon.
- the flexible circuit board can have an insulating resin film (base material), an adhesive layer made of the polyimide composition of the present disclosure, and a metal foil.
- the polyimide composition of the present disclosure is an adhesive that bonds semiconductor chips together, an adhesive that bonds a semiconductor chip to a substrate, a protective material that protects the circuit of a semiconductor chip, an embedding material that embeds a semiconductor chip (sealing material ) and so on.
- the semiconductor member of the present disclosure includes a semiconductor chip (base material) and a resin layer made of the polyimide composition of the present disclosure (obtained from the polyamic acid composition of the present disclosure) disposed on at least one surface thereof.
- Semiconductor chips include diodes, transistors, integrated circuits (ICs), and power devices.
- the resin layer made of the polyimide composition may be arranged on the surface of the semiconductor chip on which terminals are formed (terminal forming surface), or may be arranged on a surface different from the terminal forming surface.
- the thickness of the layer made of the polyimide composition is preferably about 1 to 100 ⁇ m when the polyimide composition is used as an adhesive layer, for example.
- the thickness is preferably about 2 to 200 ⁇ m.
- Adhesive for surge parts The polyimide composition of the present disclosure is used to protect surge parts (surge absorber), or a sealant for surge components. By using the polyimide composition of the present disclosure as an adhesive or a sealing material, it is possible to bond or seal the surge component at a low temperature, and the withstand voltage and heat resistance are sufficient.
- the polyimide composition of the present disclosure has high heat resistance and re-solubility, so it is used as an adhesive for semiconductor members, electronic circuit board members, surge components, etc.; It is preferably used as an adhesive, an adhesive for coverlay films, or an adhesive for bonding sheets.
- an electronic device such as an electronic circuit board or a semiconductor member includes, for example, a process of preparing a laminate having a base material, a resin layer, and a handling board, a process of processing the base material, and a process of dissolving the resin layer in a solvent. and separating the processed base material (processed product) from the handling substrate.
- the laminate can be obtained, for example, by applying the polyamic acid composition of the present disclosure to one of the substrate and the handling substrate, imidizing it to form a layer containing the polyimide composition, and then bonding the other. can.
- FIG. 1 is a cross-sectional schematic diagram showing an example of the process of processing a silicon substrate using the polyimide composition of the present disclosure as an adhesive for temporary fixing.
- the polyamic acid resin composition of the present disclosure is applied onto a silicon substrate 10 (base material), and then heated and imidized to form a resin layer 20 containing the polyimide resin composition. (See FIG. 1A).
- a handling substrate 30 for example, a glass substrate
- a heat press 40 to obtain a laminate
- the back surface of the silicon substrate 10 is polished to a predetermined thickness (see FIG. 1C).
- a resist 50 is placed on the polished silicon substrate 10 to form a resist pattern 50' (see FIG. 1E), and the silicon substrate 10 is etched and patterned along the resist pattern 50' (see FIG. 1F).
- the handling substrate 30 is then peeled off from the resin layer 20 by laser or machining (see FIG. 1G). Then, by dissolving the resin layer 20 in a solvent, the patterned silicon substrate 10' can be separated and obtained (see FIG. 1H).
- the silicon substrate 10 is exposed to high temperatures of 200° C. or higher.
- the base material fixed on the handling board via the upper resin layer is processed (for example, polishing process, etching / heat treatment process, electrode film formation and rewiring process). ), the adhesive may be peeled off from the processed product without leaving any adhesive residue.
- the polyimide composition of the present disclosure obtained from the polyamic acid composition of the present disclosure
- the polyimide composition of the present disclosure is suitable as an adhesive for electronic circuit boards, semiconductor members, and the like, and is particularly suitable as a temporary fixing adhesive (adhesive that is peeled off after bonding once).
- ODPA 4,4'-oxydiphthalic dianhydride and aromatic tetracarboxylic dianhydride having a benzophenone skeleton (monomer (B))
- BTDA 3,3',4,4'-benzophenonetetracarboxylic dianhydride and aromatic tetracarboxylic dianhydride having a biphenyl skeleton (monomer (C)) s-BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride (manufactured by JFE Chemical)
- Example 1 Preparation of polyamic acid varnish (polyamic acid composition)
- a solvent prepared with NMP N-methylpyrrolidone
- two kinds of acid dianhydrides s-BPDA, BTDA
- APB-N acid dianhydrides
- s-BPDA:BTDA:APB-N diamine
- the resulting mixture was stirred for 4 hours or longer in a flask into which dry nitrogen gas could be introduced to obtain a polyamic acid varnish having a resin solid content of 20 to 25% by mass and an intrinsic viscosity ( ⁇ ) of 0.56 dL/g. .
- the resulting polyamic acid varnish was applied onto a glass plate at a rate of 10 mm/sec, then heated from 50°C to 250°C at a rate of 5°C/min, and heated at 250°C for 30 minutes. Imidization was carried out while removing the solvent. The resulting polyimide film was peeled off from the glass plate to obtain a 20 ⁇ m-thick polyimide film (polyimide composition).
- polyimide varnish obtained was coated on a glass plate at a rate of 10 mm / sec, then heated from 50 ° C. to 250 ° C. at a rate of 5 ° C. / min, heated at 250 ° C. for 30 minutes, and solvent A polyimide film (polyimide composition) having a thickness of 20 ⁇ m was obtained in the same manner as in Example 1 except that the was removed.
- Examples 2-6, Comparative Examples 2-3 A polyamic acid varnish was prepared in the same manner as in Example 1 except that the types and amount ratios of the acid dianhydride and the diamine and the molar ratio of the diamine/acid dianhydride were changed as shown in Table 1, and a polyimide film was prepared. got
- dissolution rate (%) [1-[(weight of filter paper after filtration and drying) - (weight of filter paper before use)]/(weight of film before immersion)] x 100
- Thermophysical properties (glass transition temperature (Tg))
- the obtained polyimide film was cut into a size of 5 mm in width and 22 mm in length.
- the glass transition temperature (Tg) of the sample was measured with a thermal analyzer (TMA-50) manufactured by Shimadzu Corporation. Specifically, the measurement was performed under the conditions of an air atmosphere (50 mL/min of air gas), a heating rate of 5°C/min, and a tensile mode (100 mN) to obtain a TMA curve.
- the value of the glass transition temperature (Tg) was obtained by extrapolating the curve before and after the point of inflection.
- the 5% weight loss temperature (T d5 ) of the obtained polyimide film was measured using a thermogravimetric analyzer (TGA-60, manufactured by Shimadzu Corporation). Specifically, the obtained polyimide film (approximate amount of about 5 mg) is accurately weighed on the device, the scanning temperature is set to 30 to 900 ° C., and air gas is flowed at 50 mL / min in an atmospheric atmosphere. , and the temperature at which the mass of the sample decreased by 5% was defined as Td5 .
- Table 1 shows the evaluation results of Examples 1-6 and Comparative Examples 1-3.
- the molar ratio (b/a) of the diamine and the tetracarboxylic dianhydride was calculated from the charged amount (mol) of the diamine and the tetracarboxylic dianhydride.
- the polyamic acid varnishes of Examples 1 to 6 having a diamine/tetracarboxylic dianhydride molar ratio of less than 1 had good handleability, and the resulting polyimide had good resolubility. It turns out that it is good.
- the polyamic acids of Examples 1 to 6 contain a certain amount or more of units derived from APB-N, which is a monomer (A-1) having 3 or more aromatic rings, the obtained polyimides have high heat resistance. Recognize.
- the polyimide varnish of Comparative Example 1 tends to cause white precipitation, indicating poor handleability.
- the polyamic acid varnishes of Comparative Examples 2 and 3 have improved handleability, but since the molar ratio of diamine/tetracarboxylic dianhydride exceeds 1, it can be seen that the resulting polyimide has low resolubility. .
- the polyamic acid composition of the present disclosure can provide a polyimide film that is excellent in handleability and has high heat resistance and re-solubility. Therefore, the resulting polyimide film is suitable for various fields requiring high heat resistance and re-solubility; for example, it is suitable as an adhesive for electronic circuit board members, semiconductor devices, and the like.
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Abstract
Description
本開示のポリアミド酸組成物は、特定のポリアミド酸を含み、必要に応じて溶媒などの他の任意成分をさらに含んでもよい。
ポリアミド酸は、テトラカルボン酸二無水物とジアミンを重縮合させて得られる重合体である。すなわち、ポリアミド酸を構成するモノマーは、テトラカルボン酸二無水物とジアミンとを含む。
ポリアミド酸を構成する芳香族モノマーは、ビフェニル骨格およびベンゾフェノン骨格を有さず、ジフェニルエーテル骨格を有するモノマー(A)(以下、「ジフェニルエーテル骨格を有するモノマー(A)」ともいう)を含み、必要に応じてベンゾフェノン骨格を有するモノマー(B)およびビフェニル骨格を有するモノマー(C)の少なくとも一方をさらに含んでもよい。
ジフェニルエーテル骨格を有するモノマー(A)は、上記の通り、一般式(1)または(2)で表されるジフェニルエーテル骨格を有する。ジフェニルエーテル骨格を有するモノマー(A)は、ポリアミド酸に適度な剛直性を付与し、得られるポリイミドに耐熱性を付与しうる。
ポリアミド酸を構成する芳香族モノマーは、ベンゾフェノン骨格を有するモノマー(B)をさらに含んでもよい。ベンゾフェノン骨格を有するモノマー(B)は、ポリアミド酸(または得られるポリイミド)の再溶解性を顕著に損なわない範囲で用いることで、耐熱性を高めうる。ベンゾフェノン骨格を有するモノマー(B)は、ベンゾフェノン骨格を有する芳香族テトラカルボン酸二無水物であってもよいし、ベンゾフェノン骨格を有する芳香族ジアミンであってもよい。
ポリアミド酸を構成する芳香族モノマーは、ビフェニル骨格を有するモノマー(C)をさらに含むことが好ましい。ビフェニル骨格を有するモノマー(C)は、ポリアミド酸の剛直性を高めやすく、得られるポリイミドの耐熱性を高めやすい。ビフェニル骨格を有するモノマー(C)は、ビフェニル骨格を有する芳香族テトラカルボン酸二無水物であってもよいし、ビフェニル骨格を有する芳香族ジアミンであってもよい。
ポリアミド酸を構成する芳香族モノマーは、ポリアミド酸を構成するモノマーの合計に対して、ジフェニルエーテル骨格を有するモノマー(A)を40~95モル%と、ベンゾフェノン骨格を有するモノマー(B)を0~60モル%と、ビフェニル骨格を有するモノマー(C)を0~60モル%とを含むことが好ましい。ベンゾフェノン骨格を有するモノマー(B)とビフェニル骨格を有するモノマー(C)の合計量は、ポリアミド酸を構成するモノマーの合計に対して5~60モル%であることがより好ましい。
ポリアミド酸を構成するモノマーは、必要に応じて脂肪族モノマーや脂環式モノマーなどの、芳香族モノマー以外の他のモノマーをさらに含んでもよい。
ポリアミド酸の分子末端を酸無水物基とするためには、反応させるテトラカルボン酸二無水物成分(aモル)を、ジアミン成分(bモル)よりも多くすればよい。具体的には、ポリアミド酸を構成するジアミン(bモル)とテトラカルボン酸二無水物(aモル)のモル比は、b/a=0.90~0.999であることが好ましく、0.950~0.995であることがより好ましく、0.970~0.995であることがさらに好ましい。b/aが0.999以下であると、得られるポリイミドの分子末端を酸無水物基としやすいため、再溶解性が得られやすい。b/aは、反応させるテトラカルボン酸二無水物成分(aモル)とジアミン成分(bモル)の仕込み比として特定することもできる。
本開示のポリアミド酸組成物は、必要に応じて、前述のポリアミド酸以外の他の成分をさらに含んでいてもよい。
ポリアミド酸組成物は、ハンドリング性に優れる。具体的には、一定期間保存した際に、ポリアミド酸の析出に起因するワニスの白化を生じにくい。ハンドリング性は、恒温恒湿室(室温:23~24℃、相対湿度58~60%)の中で、ガラス上に、2.5mLのワニスを垂らし、所定の時間ごとに観察したときに、ワニスの周辺部からの白化が確認されるまでの時間が例えば20分を超えることをいう。
ポリアミド酸組成物は、溶媒中に、テトラカルボン酸二無水物成分とジアミン成分とを配合して、これらを脱水反応させて得ることができる。使用する溶媒やテトラカルボン酸二無水物成分、ジアミン成分の種類およびそれらの量比は、前述の通りである。
本開示のポリイミド組成物は、前述のポリアミド酸組成物に含まれるポリアミド酸をイミド化させて得られる特定のポリイミドを含む。そのような特定のポリイミドを含むポリイミド組成物は、前述のポリアミド酸組成物を加熱して、ポリアミド酸をイミド化させることにより得られる。本開示のポリイミド組成物は、フィルムであってもよい。
(ガラス転移温度(Tg))
ポリイミドフィルムのガラス転移温度は、130℃以上260℃未満であることが好ましく、160~220℃であることがより好ましい。ガラス転移温度が上記範囲にあるポリイミドは、良好な耐熱性を有するため、例えば電子回路基板や半導体デバイスなどに用いられる接着剤として好適である。
ポリイミドフィルムの大気雰囲気下での5%重量減少温度(Td5)は、上記と同様の観点から、450℃以上であることが好ましく、500℃以上であることがより好ましい。ポリイミドのTd5の上限は、特に制限されないが、例えば、600℃とすることができる。
ポリアミド酸組成物をイミド化させて得られるポリイミドフィルムは、例えば接着剤として用いる際に、溶媒により溶解させて剥離しやすくする観点では、溶媒に対する溶解性が高いことが好ましい。具体的には、ポリアミド酸組成物をイミド化させて得られる厚み20μmのポリイミドフィルムを、後述する条件でN-メチル-2-ピロリドン(NMP)に80℃で20分間浸漬した後、ろ紙でろ過して測定される、下記式(1)で表される溶解率が、60%以上であることが好ましく、80%以上であることがより好ましく、95%以上であることがさらに好ましい。
式(1):溶解率(%)=[1-[(ろ過・乾燥後のろ紙の重量)―(使用前のろ紙の重量)]/(浸漬前のフィルムの重量)]×100
1)前述のポリアミド酸組成物をイミド化させて得られるポリイミドフィルムを、厚さ20μm、2.0cm×2.0cmの大きさに切り出してサンプルとし、その重量(浸漬前のフィルムの重量)を測定する。イミド化条件は、上記の通り、大気雰囲気下で、50~300℃の温度領域における昇温速度を0.25~50℃/分とすることが好ましく、1~40℃/分とすることがより好ましく、2~30℃/分とすることがさらに好ましい。加熱は、50~300℃の温度領域で30分間としうる。好ましいイミド化条件は、大気雰囲気下で50℃から250℃まで5℃/分で昇温し、250℃で30分間加熱する。また、使用前のろ紙の重量も予め測定しておく。
2)次いで、当該サンプルを、濃度1質量%となるようにN-メチル-2-ピロリドン(NMP)に加えてサンプル液とし、得られたサンプル液を、80℃に加熱したオーブンの中に20分間静置する。その後、サンプル液をオーブンから取り出し、ろ紙でろ過した後、100℃で減圧乾燥させる。そして、ろ過・乾燥後のろ紙の重量を測定する。
3)上記1)と2)の測定値を上記式(1)に当てはめて、溶解率を算出する。これらの操作(上記1)~3)の操作)をn=2で行い、その平均値を溶解率(%)とする。なお、サンプルのサイズ(厚さなど)は、上記記載のサイズが好ましいが、多少異なるサイズとなることを妨げない。
本開示のポリアミド酸組成物は、良好なハンドリング性を有しつつ、高い耐熱性と再溶解性を有するポリイミドを付与しうる。そのため、本開示のポリアミド酸組成物から得られるポリイミド組成物は、特に耐熱性と再溶解性が要求される用途;例えば電子回路基板部材、半導体デバイス、サージ部品などにおける接着剤や封止材、絶縁材料、基板材料または保護材料としうる。
本開示のポリイミド組成物は、回路基板;特にフレキシブル回路基板における絶縁性基板または接着材としうる。例えば、フレキシブル回路基板は、金属箔(基材)と、その上に配置された、(本開示のポリアミド酸組成物から得られる)本開示のポリイミド組成物からなる絶縁層とを有しうる。また、フレキシブル回路基板は、絶縁樹脂フィルム(基材)と、本開示のポリイミド組成物からなる接着層と、金属箔とを有しうる。
本開示のポリイミド組成物は、半導体チップ同士の接着や、半導体チップと基板との接着を行う接着材、半導体チップの回路を保護する保護材、半導体チップを埋め込む埋め込み材(封止材)などとしうる。
本開示のポリイミド組成物は、家電、パソコン、自動車などの輸送機器、携帯機器、電源、サーバー、電話などへ影響を及ぼす異常電流・電圧から保護するためのサージ部品(サージアブソーバー)用接着剤、またはサージ部品用封止材としうる。本開示のポリイミド組成物を接着剤または封止材とすることで、サージ部品を低温で接着もしくは封止が可能であり、かつ耐電圧および耐熱性も十分である。
・ジフェニルエーテル骨格を有する芳香族テトラカルボン酸二無水物(モノマー(A))
ODPA:4,4'-オキシジフタル酸二無水物
・ベンゾフェノン骨格を有する芳香族テトラカルボン酸二無水物(モノマー(B))
BTDA:3,3',4,4’-ベンゾフェノンテトラカルボン酸二無水物
・ビフェニル骨格を有する芳香族テトラカルボン酸二無水物(モノマー(C))
s-BPDA:3,3',4,4’-ビフェニルテトラカルボン酸二無水物(JFEケミカル社製)
・ジフェニルエーテル骨格を有する芳香族ジアミン(モノマー(A))
p-BAPP:2,2-ビス(4-(4-アミノフェノキシ)フェニル)プロパン
APB-N:1,3-ビス(3-アミノフェノキシ)ベンゼン(三井化学社製)
ポリアミド酸ワニス(ポリアミド酸組成物)の調製
NMP(N-メチルピロリドン)で調製した溶媒中に、2種類の酸二無水物(s-BPDA、BTDA)と、ジアミン(APB-N)とを、s-BPDA:BTDA:APB-N=0.7:0.3:0.97のモル比で配合した。得られた混合物を、乾燥窒素ガスを導入できるフラスコ内で4時間以上攪拌し、樹脂固形分が20~25質量%、固有粘度(η)が0.56dL/gであるポリアミド酸ワニスを得た。
得られたポリアミド酸ワニスを、ガラス板上に10mm/秒の速度で塗工した後、50℃から250℃まで5℃/分で昇温し、250℃で30分間加熱して、溶媒を除去しつつ、イミド化させた。得られたポリイミドフィルムを、ガラス板から剥離して、厚み20μmのポリイミドフィルム(ポリイミド組成物)を得た。
ポリイミドワニス(ポリイミド組成物)の調製
NMPで調製した溶媒中に、2種類の酸二無水物(s-BPDA、BTDA)と、ジアミン(APB-N)とを、s-BPDA:BTDA:APB-N=0.67:0.3:1.0のモル比で配合した。得られた混合物を、乾燥窒素ガスを導入できるディーンスタークとコンデンサーを備えたフラスコ内で40℃で5時間以上攪拌し、ポリアミド酸ワニスを得た。続けて、溶液温度を上げて、内温190℃で8時間以上撹拌させた。この時、留出した縮合水、および、一部揮発したNMPをディーンスタークで捕集した。反応終了後、NMPを追加し、濃度を調整し、淡黄色の粘稠なポリイミドワニスを得た。
得られたポリイミドワニスを、ガラス板上に10mm/秒の速度で塗工した後、50℃から250℃まで5℃/分で昇温し、250℃で30分間加熱して、溶媒を除去した以外は実施例1と同様にして、厚み20μmのポリイミドフィルム(ポリイミド組成物)を得た。
酸二無水物とジアミンの種類および量比、ジアミン/酸二無水物のモル比を表1に示されるように変更した以外は実施例1と同様にして、ポリアミド酸ワニスを作製し、ポリイミドフィルムを得た。
実施例1~6および比較例2~3で使用したポリアミド酸ワニス、ならびに比較例1で使用したポリイミドワニスの(1)固有粘度η、(2)ハンドリング性、および、得られたポリイミドフィルムの(3)再溶解性および(4)熱物性(Tg、Td5)を、以下の方法で評価した。
得られたポリアミド酸ワニスを、ポリアミド酸の濃度が0.5g/dLとなるようにNMPで希釈した溶液の固有粘度ηを、JIS K7367-1:2002に準じて、25℃でウベローデ粘度管(サイズ番号1)にて3回測定した平均値とした。
恒温恒湿室(室温:23~24℃、相対湿度58~60%)の中で、ガラス上に、2.5mLずつのポリアミド酸ワニスを垂らし、所定の時間ごとに観察を行った。ワニスの周辺部からの白化が確認されるまでの時間(白化耐性)を求めた。白化が確認されるまでの時間が短いほど、白化しやすく、実用時のハンドリング性が低いと判断した。
1)得られたポリイミドフィルムを、2.0cm×2.0cmの大きさに切り出してサンプルとし、その重量(浸漬前のフィルムの重量)を測定した。また、使用前のろ紙の重量も予め測定した。
2)次いで、当該サンプルを、濃度1質量%となるようにN-メチル-2-ピロリドン(NMP)に加えてサンプル液とし、得られたサンプル液を、80℃に加熱したオーブンの中に20分間静置した。その後、サンプル液をオーブンから取り出し、溶解状態を目視観察した。また、取り出したサンプル液をろ紙(目の粗さ:5B)でろ過した後、100℃で減圧乾燥させた。そして、そして、ろ過・乾燥後のろ紙の重量を測定した。
3)上記1)と2)の測定値を、下記式(1)に当てはめて、溶解率を算出した。この操作(上記1)~3)の操作)をn=2で行い、その平均値を溶解率(%)とした。
式(1):溶解率(%)=[1-[(ろ過・乾燥後のろ紙の重量)―(使用前のろ紙の重量)]/(浸漬前のフィルムの重量)]×100
○:溶剤との均一系となっている
△:一部、溶け残りのようなものが観察される
×:フィルム状を保持している
(ガラス転移温度(Tg))
得られたポリイミドフィルムを幅5mm、長さ22mmの大きさに裁断した。当該サンプルのガラス転移温度(Tg)を、島津製作所社製 熱分析装置(TMA-50)により測定した。具体的には、大気雰囲気下(空気ガス50mL/min)、昇温速度5℃/分、引張りモード(100mN)の条件において測定を行ってTMA曲線を求め、ガラス転移に起因するTMA曲線の変曲点に対し、その前後の曲線を外挿することにより、ガラス転移温度(Tg)の値を求めた。
得られたポリイミドフィルムの5%重量減少温度(Td5)を、島津製作所社製 熱重量分析装置(TGA-60)を用いて測定した。具体的には、得られたポリイミドフィルム(目安量約5mg)を当該装置上で正確に秤り、走査温度を30~900℃に設定し、大気雰囲気下、空気ガスを50mL/minで流しながら、昇温速度10℃/分の条件で加熱して、試料の質量が5%減少した時の温度をTd5とした。
Claims (18)
- ポリアミド酸を含む組成物であって、
前記ポリアミド酸を構成するモノマーは、前記ポリアミド酸を構成するモノマーの合計に対して、主鎖に炭素数3以上の脂肪族鎖を有さない芳香族モノマーを95モル%以上含み、
前記芳香族モノマーは、
前記ポリアミド酸を構成するモノマーの合計に対して、
ビフェニル骨格およびベンゾフェノン骨格を有さず、一般式(1)または(2)で表されるジフェニルエーテル骨格を有するモノマー(A)を40~95モル%と、
ベンゾフェノン骨格を有するモノマー(B)を0~60モル%と、
ビフェニル骨格を有するモノマー(C)を0~60モル%と
を含み、かつ
前記ジフェニルエーテル骨格を有するモノマー(A)は、前記ポリアミド酸を構成するモノマーの合計に対して芳香環を3個以上有するモノマー(A-1)を20モル%以上含み、
前記ポリアミド酸を構成するモノマーであるジアミンとテトラカルボン酸二無水物のモル比は、ジアミン/テトラカルボン酸二無水物=0.90~0.999である、
ポリアミド酸組成物。
- 前記ポリアミド酸を構成するモノマーの合計に対して、
前記ベンゾフェノン骨格を有するモノマー(B)と前記ビフェニル骨格を有するモノマー(C)の合計量は、5~60モル%である、
請求項1に記載のポリアミド酸組成物。 - 前記芳香環を3個以上有するモノマー(A-1)における芳香環は、ベンゼン環である、
請求項1または2に記載のポリアミド酸組成物。 - 前記芳香環を3個以上有するモノマー(A-1)は、
1,3-ビス(3-アミノフェノキシ)ベンゼン、1,3-ビス(4-アミノフェノキシ)ベンゼン、2,2-ビス[4-(4-アミノフェノキシ)フェニル]プロパンからなる群より選ばれる芳香族ジアミンを含む、
請求項4に記載のポリアミド酸組成物。 - 前記ビフェニル骨格を有するモノマー(C)は、
4,4'-ビス(3,4-ジカルボキシフェノキシ)ビフェニル酸二無水物、2,2',3,3'-ビフェニルテトラカルボン酸二無水物、3,3',4,4'-ビフェニルテトラカルボン酸二無水物からなる群より選ばれる芳香族テトラカルボン酸二無水物、または
4,4'-ビス(3-アミノフェノキシ)ビフェニル、4,4'-ビス(4-アミノフェノキシ)ビフェニル、3,3'-ビス(4-アミノフェノキシ)ビフェニル、2,2'-ビス(トリフルオロメチル)-1,1'-ビフェニル-4,4'-ジアミンからなる群より選ばれる芳香族ジアミン
を含む、
請求項1~6のいずれか一項に記載のポリアミド酸組成物。 - 前記芳香族モノマーは、
前記ポリアミド酸を構成するモノマーの合計に対して、
前記ビフェニル骨格およびベンゾフェノン骨格を有さず、一般式(1)または(2)で表されるジフェニルエーテル骨格を有するモノマー(A)を40~70モル%と、
前記ベンゾフェノン骨格を有するモノマー(B)を5~30モル%と、
前記ビフェニル骨格を有するモノマー(C)を25~45モル%と
を含む、
請求項1~7のいずれか一項に記載のポリアミド酸組成物。 - 前記ポリアミド酸を、濃度が0.5g/dLとなるようにN-メチル-2-ピロリドン(NMP)に溶解させた溶液の、25℃でウベローデ粘度管にて測定される固有粘度(η)は、0.4~1.5dL/gである、
請求項1~8のいずれか一項に記載のポリアミド酸組成物。 - 溶媒をさらに含む、
請求項1~9のいずれか一項に記載のポリアミド酸組成物。 - 前記溶媒は、非プロトン性溶剤およびアルコール系溶剤からなる群より選ばれる一以上を含む、
請求項10に記載のポリアミド酸組成物。 - 前記ポリアミド酸組成物をイミド化させて得られるポリイミドフィルムのガラス転移温度は、130℃以上260℃未満である、
請求項1~11のいずれか一項に記載のポリアミド酸組成物。 - 前記ポリアミド酸組成物をイミド化させて得られるポリイミドフィルムの大気雰囲気下での5%重量減少温度は、300℃以上である、
請求項1~12のいずれか一項に記載のポリアミド酸組成物。 - 前記ポリアミド酸組成物をイミド化させて、2.0cm×2.0cm×厚み20μmのフィルムとしたときに、前記フィルムをN-メチル-2-ピロリドンに80℃で20分間浸漬させた後、ろ紙でろ過して測定される下記式(1)で表される溶解率が60%以上である、
請求項1~13のいずれか一項に記載のポリアミド酸組成物。
式(1):溶解率(%)=[1-[(ろ過・乾燥後のろ紙の重量)―(使用前のろ紙の重量)]/(浸漬前のフィルムの重量)]×100
- ポリイミドを含む組成物であって、
前記ポリイミドを構成するモノマーは、前記ポリイミドを構成するモノマーの合計に対して、主鎖に炭素数3以上の脂肪族鎖を有さない芳香族モノマーを95モル%以上含み、
前記芳香族モノマーは、
前記ポリイミドを構成するモノマーの合計に対して、
ビフェニル骨格およびベンゾフェノン骨格を有さず、一般式(1)または(2)で表されるジフェニルエーテル骨格を有するモノマー(A)を40~95モル%と、
ベンゾフェノン骨格を有するモノマー(B)を0~60モル%と、
ビフェニル骨格を有するモノマー(C)を0~60モル%と
を含み、かつ
前記ジフェニルエーテル骨格を有するモノマー(A)は、前記ポリイミドを構成するモノマーの合計に対して芳香環を3個以上有するモノマー(A-1)を20モル%以上含み、
前記ポリイミドを構成するモノマーであるジアミンとテトラカルボン酸二無水物のモル比は、ジアミン/テトラカルボン酸二無水物=0.90~0.999である、
ポリイミド組成物。
- 請求項15に記載のポリイミド組成物を含む、
接着剤。 - 前記接着剤は、半導体部材用接着剤、フレキシブルプリント基板用接着剤、カバーレイフィルム用接着材、またはボンディングシート用接着剤である、
請求項16に記載の接着剤。 - 基材と、
前記基材の上に配置された請求項15に記載のポリイミド組成物を含む樹脂層と、を有する、
積層体。
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- 2022-03-25 WO PCT/JP2022/014235 patent/WO2022210321A1/ja not_active Ceased
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- 2022-03-28 TW TW111111663A patent/TW202300563A/zh unknown
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| JPH08231714A (ja) * | 1996-01-24 | 1996-09-10 | Mitsui Toatsu Chem Inc | 熱安定性の良好なポリイミド |
| JP2001198523A (ja) * | 2000-01-18 | 2001-07-24 | Mitsui Chemicals Inc | ポリイミド金属箔積層板の製造方法 |
| JP2002216542A (ja) * | 2001-01-22 | 2002-08-02 | Mitsui Chemicals Inc | 透明導電性フィルム |
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| JP2020055147A (ja) * | 2018-09-28 | 2020-04-09 | 日鉄ケミカル&マテリアル株式会社 | ポリイミドフィルムの製造方法及び金属張積層板の製造方法 |
| JP2020072198A (ja) * | 2018-10-31 | 2020-05-07 | 日鉄ケミカル&マテリアル株式会社 | 金属張積層板、回路基板、多層回路基板及びその製造方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2025183008A1 (ja) * | 2024-02-29 | 2025-09-04 | 三井化学株式会社 | 仮固定材用組成物、積層体及び半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20240182645A1 (en) | 2024-06-06 |
| JPWO2022210321A1 (ja) | 2022-10-06 |
| KR20230147686A (ko) | 2023-10-23 |
| TW202300563A (zh) | 2023-01-01 |
| CN117120511A (zh) | 2023-11-24 |
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