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WO2022240005A1 - Dispositif de tomographie par cohérence optique à haute résolution à foyer multiple pour l'amélioration de la profondeur de foyer - Google Patents

Dispositif de tomographie par cohérence optique à haute résolution à foyer multiple pour l'amélioration de la profondeur de foyer Download PDF

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Publication number
WO2022240005A1
WO2022240005A1 PCT/KR2022/005848 KR2022005848W WO2022240005A1 WO 2022240005 A1 WO2022240005 A1 WO 2022240005A1 KR 2022005848 W KR2022005848 W KR 2022005848W WO 2022240005 A1 WO2022240005 A1 WO 2022240005A1
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Prior art keywords
light
optical splitter
distributed
optical
measurement
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English (en)
Korean (ko)
Inventor
전만식
성대운
이재율
김지현
한상엽
이준수
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Industry Academic Cooperation Foundation of KNU
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Industry Academic Cooperation Foundation of KNU
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/102—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for optical coherence tomography [OCT]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0066—Optical coherence imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02035—Shaping the focal point, e.g. elongated focus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/30—Determination of transform parameters for the alignment of images, i.e. image registration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured
    • G01N2021/1785—Three dimensional
    • G01N2021/1787—Tomographic, i.e. computerised reconstruction from projective measurements

Definitions

  • the present invention relates to a multi-focal high-resolution optical coherence tomography apparatus for improving depth of focus, and more particularly, to a multi-focal high-resolution optical coherence tomography apparatus for improving depth of focus that can improve depth of focus through multiple focal points. It is about.
  • the optical coherence tomography system which has recently been in the limelight in the field of medical optics research and the medical device industry, is a technology that can non-invasively perform tomographic imaging of the internal microstructure of living tissue using light in the near-infrared band. It is a method of obtaining depth information of a sample. It is divided into time domain optical coherence tomography (TD-OCT), spectral domain optical coherence tomography (SD-OCT), and variable wavelength optical coherence tomography (SS-OCT).
  • TD-OCT time domain optical coherence tomography
  • SD-OCT spectral domain optical coherence tomography
  • SS-OCT variable wavelength optical coherence tomography
  • SD-OCT spectral domain optical coherence tomography
  • the light incident on the sample is back-scattered at different depths of the internal structure of the sample, and the light incident on the reference end is reflected by the fixed mirror of the reference end.
  • the light reflected from the sample and reference ends meets again at the optical splitter, and interference occurs when the optical path difference between the two separated lights is smaller than the coherence length of the light source.
  • the generated interference signal is detected as a signal in the frequency domain through a spectrometer, and the depth of the sample can be imaged through inverse Fourier transform.
  • Patent Document 1 Korean Patent Registration No. 10-1258557
  • the present invention has been made to solve the above problems, and an object of the present invention is to improve the depth of focus and obtain high-resolution tomographic imaging for the necessary points at once without changing the position of the focus point even for curved samples.
  • An object of the present invention is to provide a high-resolution optical coherence tomography apparatus based on multi-focus for improving the depth of focus, which can shorten the measurement time through this.
  • a light source for emitting light; an optical splitter that receives the light and adjusts the path of the light; a measurement stage for radiating the light input through the optical splitter toward an object to be photographed, and transmitting measurement reflection light generated by reflection from the object; a reference stage for transmitting standard reflected light generated based on the light input through the optical splitter; a detector configured to receive and analyze interference light formed by the standard reflected light and the measurement reflected light; and an image processing unit generating a tomographic image of the object to be captured based on the interference light analyzed by the detection unit, wherein the light splitter is positioned between the light source, the measurement stage, the reference stage, and the detection unit to move a first light splitter for controlling a path of light and distributing the light emitted from the light source into reference light input to the reference end and measurement light input to the measurement end; and a second optical splitter positioned between the first optical splitter and the measuring
  • the measurement stage may include a first collimator that converts the first distributed light distributed from the second optical splitter into parallel light based on a direction in which the measurement light travels toward the photographing target; a first mirror positioned at a rear end of the first collimator to change a path of the first distributed light; a second collimator converting the second distributed light from the second optical splitter into parallel light; a first lens positioned at a rear end of the second collimator to change a focal position of the second distributed light; a beam splitter matching a path of the first distribution light reflected by the first mirror with a path of the second distribution light passing through the first lens; a galvanometer scanner for reflecting the first distributed light and the second distributed light; and a second lens that collects the first and second distributed light reflected from the galvanometer scanner.
  • the second optical splitter redistributes the light distributed from the first optical splitter into the first and second distributed light, the ratio of the first divided light is greater than the ratio of the second divided light. can be set higher.
  • the measurement reflection light is a combination of a first measurement reflection light generated by the first distribution light and a second measurement reflection light generated by the second distribution light
  • the image processing unit determines the focus position of the photographing target.
  • a final tomography image may be generated by merging a plurality of tomographic images generated by correcting a difference in optical path length based on or averaging interference signals.
  • the light source a first light source for emitting a first light
  • a second light source that emits second light
  • the light splitter may further include a third light splitter that transfers the light emitted from the first light source and the second light source to the first light splitter.
  • the first light source and the second light source may emit light having different optical powers or different center wavelengths.
  • FIG. 1 is a block diagram for explaining an optical coherence tomography apparatus according to an embodiment of the present invention
  • FIG. 2 is a schematic diagram for explaining an optical coherence tomography apparatus according to an embodiment of the present invention
  • FIG. 3 is a conceptual diagram for explaining multi-focus by an optical coherence tomography apparatus according to an embodiment of the present invention
  • FIG. 4 is a view for explaining a state in which optical coherence tomography according to an embodiment of the present invention is applied to a 3D print-based dental crown manufacturing sample;
  • FIG. 5 is a schematic diagram for explaining an optical coherence tomography apparatus according to another embodiment of the present invention.
  • FIG. 1 is a block diagram for explaining an optical coherence tomography apparatus according to an embodiment of the present invention
  • FIG. 2 is a schematic diagram for explaining an optical coherence tomography apparatus according to an embodiment of the present invention
  • FIG. It is a conceptual diagram for explaining multi-focus by an optical coherence tomography apparatus according to an embodiment of the present invention
  • FIG. 4 shows a state in which optical coherence tomography according to an embodiment of the present invention is applied to a 3D print-based dental crown manufacturing sample. It is a drawing for explanation.
  • the optical coherence tomography apparatus is intended to improve the depth-of-focus of the conventional optical coherence tomography apparatus by 2 to 3 times compared to that of the conventional apparatus, and the depth-of-focus has been insufficient in the past. Thus, it is possible to solve the problem of repeatedly photographing a subject.
  • Such an optical coherence tomography apparatus includes a light source 100, an optical splitter 200, a reference stage 300, a measurement stage 400, a detection unit 500, and an image processing unit 600.
  • the light source 100 in this embodiment generates and emits light as a broadband light source (BLS).
  • the light source 100 is a light source that outputs light with a wide spectral radiation spectrum including the near-infrared region, and a super luminescent diode, a titanium sapphire laser, or a femtosecond laser may be used.
  • a super luminescent diode, a titanium sapphire laser, or a femtosecond laser may be used.
  • the optical splitter 200 is provided to adjust the path of light, and is located at the rear end of the light source 100 based on the path along which the light travels.
  • the optical splitter 200 is a fiber coupler. FC), it is possible to achieve a stable and constant light distribution and output regardless of the incident angle of light, and to achieve a simple and compact configuration.
  • the optical splitter according to the present embodiment ( 200) includes a first light splitter 210 and a second light splitter 220 so that the light emitted from the light source 100 has multiple focal points in the depth direction.
  • the first optical splitter 210 is located between the light source 100, the reference stage 300, the measurement stage 400, and the detection unit 500, and the light emitted from the light source 100 is the measurement stage ( 400) and the reference stage 300, the optical path is adjusted to be distributed.
  • the light distributed by the first optical splitter 210 and moved to the reference stage 300 is referred to as the reference light
  • the light moved to the measurement stage 400 is referred to as the reference light. It is desirable to set the distribution ratio to 50:50.
  • the second optical splitter 220 is located between the first optical splitter 210 and the measuring end 400, and among the light distributed by the first optical splitter 210, the measurement light is divided into the first and second splitters. redistribute light As shown in FIG. 2, this is to improve the depth of focus by differentiating positions F1 and F2 at which the measurement light is focused.
  • the second optical splitter sets the distribution ratio of the first distribution light to the second distribution light to 60:40 so that the ratio of the first distribution light is higher. This is adjusted based on the position at which the light is focused. In this embodiment, when the focal position F1 of the first distributed light is focused relatively deeper than the focal position F2 of the second distributed light among multiple focal points in the depth direction, efficient efficiency is achieved.
  • the optical power of the first distribution light is set higher for focusing, it may be changed as needed in order to obtain more accurate image information.
  • the reference end 300 is provided to transmit the reference reflected light generated based on the light input through the optical splitter 200, and as shown, the third collimator 310 and the third lens 320 and A second mirror 330 is included.
  • the reference light may refer to light input to the reference stage 300 through the first optical splitter 210 among the optical splitters 200 .
  • the third collimator 310 is located at the rear end of the first optical splitter 210 based on the direction in which the reference light input through the first optical splitter 210 travels, and can convert the reference light into parallel light. The light is transmitted to the third lens 320 .
  • the third lens 320 may be located at the rear end of the third collimator 310 and transmit the received reference light to the second mirror 330 .
  • the second mirror 330 reflects the reference light transmitted from the third lens 320 to generate reference reflected light, and the reference reflected light thus generated proceeds in the reverse direction of the reference light incident path to the first optical splitter 210. can be forwarded to
  • the measuring stage 400 irradiates the light input through the optical splitter 200 toward the object to be photographed, and transmits the reflected light generated by reflection from the object to be photographed.
  • GS galvanometer scanner
  • the position of each component will be described based on the direction in which the light output from the second optical splitter 220 moves toward the subject S to be photographed.
  • the first collimator 410 is located at the rear end of the second optical splitter 220 to convert the first distributed light distributed from the second optical splitter 220 into parallel light, and convert the collimated light into a first mirror ( 415).
  • the first mirror 415 may be positioned at the rear end of the first collimator 410 to change the path of the first distribution light and transmit it to the beam splitter 423 .
  • the second collimator 420 is located at the rear end of the second optical splitter 220 in parallel with the first collimator 410 to convert the second distributed light distributed by the second optical splitter 220 into parallel light. , parallel light may be transferred to the first lens 421 .
  • the first lens 421 may be positioned at the rear end of the second collimator 420 to change the focal position of the second distributed light and transmit the second distributed light having the changed focal position to the beam splitter 423 .
  • the focal point F2 of the second distributed light is located above the focal position F1 of the first distributed light based on the depth direction.
  • a plurality of light splitters 200 are provided and some of the light distributed therethrough is multiplexed through the first lens 421 to create several focal points in the depth direction (Depth-directional multi- focusing) It is possible to improve the existing focus depth of about 150 ⁇ m to 300 ⁇ 450 ⁇ m, which is 2 ⁇ 3 times more.
  • the beam splitter 423 is located at the rear end of the first mirror 415 and the first lens 421, and passes through the path of the first distribution light reflected by the first mirror 415 and the first lens 421. Match the paths of the second distribution light.
  • the beam splitter 423 transfers the first and second distributed light to the galvanometer scanner 425 .
  • the galvanometer scanner 425 is located at the rear end of the beam splitter 423 and can continuously reflect incident light by changing an angle.
  • the galvanometer scanner 425 transfers the first distributed light and the second distributed light received from the beam splitter 423 to the second lens 427 .
  • the second lens 427 is located at the rear end of the galvanometer scanner 425, and collects the first and second distributed light transmitted from the galvanometer scanner 425 and radiates them toward the photographing target S. have.
  • the first and second distributed lights are radiated toward the target S through the above configuration, and the first and second distributed lights are reflected and generated from the target S.
  • the measurement reflected light obtained by combining the first measurement reflected light and the second measurement reflected light may be transmitted to the first optical splitter 210 by proceeding in a direction opposite to the direction in which the measurement light is transmitted.
  • the measurement reflected light and the reference reflected light generated by the measurement end 400 and the reference end 300 may be combined in the first optical splitter 210, and as a result, interference light is formed in the first optical splitter 210.
  • the interfering light thus interfered may be transmitted to the detector 500 to obtain a tomographic image of the subject S to be photographed.
  • the detection unit 500 receives coherent light through the first optical splitter 210, detects a spectrum of the coherent light, obtains an interference spectrum image through analysis of the spectrum, and transmits the interference spectrum image to the image processing unit 600.
  • a fourth collimator 510, a third mirror 520, a diffraction grating 530, a fourth lens 540, and a line scan camera (LSC) 550 may be included.
  • LSC line scan camera
  • the fourth collimator 510 converts the input coherent light into parallel light and transmits the collimated light to the third mirror 520, the third mirror 520 being located at the rear end of the fourth collimator 510, The coherent light transmitted from the fourth collimator 510 is transferred to the diffraction grating 530 .
  • the diffraction grating 530 diffracts the incident interference light.
  • the diffraction grating 530 can be selected in various ways according to specifications, and the light diffracted by the diffraction grating 530 passes through the fourth lens 540. It is transmitted to the linescanner camera 550 through the
  • the image processing unit 600 measures the depth information of the imaging target S through Fourier transformation of each pixel of the interference spectrum image received from the detection unit 500, thereby determining the tomographic image of the imaging target S. image can be created.
  • the image processing unit 600 in the present embodiment captures the object to be photographed using multiple focal points, and as shown in FIG. 4, as two images are generated according to the focal position, the optical path length (optical path length)
  • One image can be finally obtained through post-processing, such as combining images to match the depth of focus (DOF) part that is in focus by correcting the difference in length) or averaging the interference signal generated by the detection unit 500. have.
  • DOE depth of focus
  • the optical coherence tomography device of this embodiment can be used for eardrum inspection, tooth sample (crown, implant, etc.) evaluation and 3D scanning, industrial lens and display inspection technology, as well as It is possible to compensate for the disadvantage that it is difficult to accurately analyze the part.
  • FIG. 5 is a schematic diagram for explaining an optical coherence tomography device according to another embodiment of the present invention.
  • a plurality of light sources 1000 are provided to output a plurality of light sources 1100 and 1200, an optical splitter 2000, a reference stage 3000, and a measurement stage ( 4000), a detection unit 5000, and an image processing unit 600.
  • a light source 1000 includes a first light source 1100 emitting a first light and a second light source 1200 emitting a second light.
  • the first light source 1100 and the second light source 1200 may emit light having different optical powers or different center wavelengths.
  • the first light source 1100 includes the first light source collimator 1150 to convert the emitted light into parallel light and transmits it to the third light splitter 2300
  • the second light source 2200 includes the second light source collimator ( 125), light having a different light output or a different central wavelength from that emitted from the first light source 1100 may be converted into parallel light and transmitted to the third light splitter 2300.
  • the optical splitter 200 is provided to adjust the paths of the first light and the second light transmitted from the first light source collimator 1150 and the second light source collimator 1250, and the first light splitter ( 2100), a second optical splitter 2200 and a third optical splitter 2300. Also, unlike the optical splitter 200 according to one embodiment implemented as a fiber coupler (FC), the optical splitter 2000 according to another embodiment is implemented as a beam splitter (Beam).
  • Beam beam splitter
  • the first optical splitter 2100 is located at the rear end of the third optical splitter 2300, and converts the light received from the third optical splitter 2300 into the reference light. And the measurement light is distributed and transmitted to the reference end 3000 and the measurement end 4000.
  • the second optical splitter 2200 is located at the rear end of the first optical splitter 2100, and as described above, among the light distributed by the first optical splitter 2100, the measurement light is divided into the first and second distribution lights. It is redistributed and transmitted to the measurement stage 4000.
  • the third light splitter 2300 is located between the first light source collimator 1150, the second light source collimator 1250, the first light splitter 2100, and the detection unit 5000, and transmits from the first light splitter 2100.
  • the received interference light is transferred to the detector 5000.
  • the reference end 3000 is provided to transmit reference reflected light generated based on light input through the optical splitter 2000, and as shown, the third mirror 3100 and the third lens 3200 and A fourth mirror 3300 is included.
  • the reference light may refer to light input to the reference stage 3000 through the first optical splitter 2100 among the optical splitters 2000 .
  • the third mirror 3100 is located at the rear end of the first optical splitter 2100 based on the direction in which the reference light input through the first optical splitter 2100 travels, and transmits the reference light to the third lens 3200.
  • the third lens 3200 may be located at the rear end of the third mirror 3100 and transfer the received reference light to the fourth mirror 3300 .
  • the fourth mirror 3300 reflects the reference light transmitted from the third lens 3200 to generate reference reflected light, and the reference reflected light generated in this way proceeds in the reverse direction of the reference light incident path to the first optical splitter 2100. can be forwarded to
  • the measuring end 4000 is to improve the depth of focus by differentiating the positions F1 and F2 at which the measurement light is focused. 4200, a first lens 4210, a beam splitter 4230, a galvanometer scanner 4250, and a second lens 4270.
  • the configuration of the collimator may be omitted.
  • the first mirror 4100 receives the first distribution light from the second optical splitter 2200 and transfers it to the beam splitter 4230, and the second mirror 4200 receives the second distribution light from the second optical splitter 2200. is received and transmitted to the first lens path 4210.
  • the first lens 4210 may be positioned at the rear end of the second mirror 4200 to change the focal position of the second distributed light and transmit the second distributed light having the changed focal position to the beam splitter 4230 .
  • the focal point F2 of the second distributed light is located above the focal position F1 of the first distributed light based on the depth direction.
  • the beam splitter 4230 sets the paths of the first and second distributed lights transmitted from the first mirror 4100 and the first lens 4210 to be the same and transmits the same paths to the galvanometer scanner 4250 .
  • the galvanometer scanner 4250 is located at the rear end of the beam splitter 4230 and can continuously change the angle of the incident light and reflect it.
  • the galvanometer scanner 4250 transfers the first distributed light and the second distributed light received from the beam splitter 4230 to the second lens 4270 .
  • the second lens 4270 is located at the rear end of the galvanometer scanner 4250, and collects the first and second distributed light transmitted from the galvanometer scanner 4250 and radiates them toward the photographing target S. have.
  • the first and second distributed lights are radiated toward the target S through the above configuration, and the first and second distributed lights are reflected and generated from the target S.
  • the measurement reflected light obtained by combining the first measurement reflected light and the second measurement reflected light may be transmitted to the first optical splitter 2100 by proceeding in a direction opposite to the direction in which the measurement light is transmitted.
  • the reference reflected light and the measurement reflected light generated by the above-described reference stage 2000 and measurement stage 3000 may be combined in the first optical splitter 2100, and as a result, interference light may be formed in the first optical splitter 2100.
  • the interfering light thus interfered may be transferred to the detector 5000 to obtain a tomographic image of the subject S to be photographed.
  • the detection unit 5000 detects the spectrum, obtains an interference spectrum image through analysis of the spectrum, and transmits the interference spectrum image to the image processing unit 600.
  • a fifth mirror 5200, a diffraction grating 5300, a fourth lens 5400, a beam splitter 5600, and line scanner cameras 5510 and 5520 may be included.
  • the fifth mirror 5200 is located at the rear end of the third optical splitter 2300 and transfers coherent light input from the third optical splitter 2300 to the diffraction grating 5300 .
  • the diffraction grating 5300 diffracts the incident coherent light, and the diffracted light is transmitted to the beam splitter 5600 through the fourth lens 5400.
  • the beam splitter 5600 transmits the diffracted light based on the first measured reflected light among the diffracted lights received through the fourth lens 5400 to the second line scanner camera 5510, and based on the second measured reflected light.
  • the diffracted light is transferred to the first line scanner camera 5520.
  • the image processing unit 600 measures the depth information of the imaging target S through Fourier transformation of each pixel of the interference spectrum image received from the detection unit 5000, thereby determining the tomographic image of the imaging target S. image can be created.
  • second light source 1150 first light source collimator
  • first optical splitter 220, 2200 second optical splitter

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biophysics (AREA)
  • Public Health (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Theoretical Computer Science (AREA)
  • Ophthalmology & Optometry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Un dispositif de tomographie par cohérence optique selon un mode de réalisation comprend : une source de lumière ; un distributeur optique permettant de régler un trajet de lumière ; un terminal de mesure permettant d'émettre une lumière, ayant été introduite à travers le distributeur optique, vers un objet devant être photographié et de transférer la lumière de réflexion de mesure générée par la réflexion de la lumière émise par l'objet ; un terminal de référence permettant de transférer la lumière de réflexion de référence générée en fonction de la lumière ayant été introduite à travers le distributeur optique ; une partie détection permettant de recevoir et d'analyser la lumière de cohérence générée par la lumière de réflexion de référence et la lumière de réflexion de mesure ; et une partie traitement d'image permettant de générer une image de tomographie de l'objet à photographier en fonction de la lumière de cohérence ayant été analysée par la partie détection. Ainsi, une image de tomographie à haute résolution d'un point requis peut être obtenue à un moment sans altération d'une position de foyer même pour un échantillon incurvé par l'amélioration de la profondeur de foyer.
PCT/KR2022/005848 2021-05-11 2022-04-25 Dispositif de tomographie par cohérence optique à haute résolution à foyer multiple pour l'amélioration de la profondeur de foyer Ceased WO2022240005A1 (fr)

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KR1020210060966A KR102498742B1 (ko) 2021-05-11 2021-05-11 초점 심도 향상을 위한 다중 초점 기반 고해상도 광간섭 단층 촬영 장치
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120018359A (ko) * 2009-05-22 2012-03-02 캐논 가부시끼가이샤 촬상 장치 및 촬상 방법
WO2013168149A1 (fr) * 2012-05-09 2013-11-14 Technion Research & Development Foundation Limited Système et procédé de tomographie à cohérence optique
US8690328B1 (en) * 2013-01-30 2014-04-08 Santec Corporation Methods and devices for ophthalmic optical tomographic image display
JP2018525046A (ja) * 2015-06-01 2018-09-06 サンテック株式会社 ２つの波長を合成する光コヒーレンストモグラフィーシステム
KR102118081B1 (ko) * 2017-12-29 2020-06-10 경북대학교 산학협력단 카메라 렌즈 모듈 검사용 스웹트 소스 광간섭 단층 촬영기기

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100073703A (ko) * 2008-12-23 2010-07-01 광주과학기술원 광 간섭계 및 이를 이용한 시료 측정방법
KR101242315B1 (ko) * 2011-02-01 2013-03-11 고려대학교 산학협력단 듀얼 포커싱 광 결맞음 영상 장치
KR101258557B1 (ko) 2011-11-24 2013-05-02 고려대학교 산학협력단 주파수 영역 광간섭 단층촬영 정보처리 장치 및 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120018359A (ko) * 2009-05-22 2012-03-02 캐논 가부시끼가이샤 촬상 장치 및 촬상 방법
WO2013168149A1 (fr) * 2012-05-09 2013-11-14 Technion Research & Development Foundation Limited Système et procédé de tomographie à cohérence optique
US8690328B1 (en) * 2013-01-30 2014-04-08 Santec Corporation Methods and devices for ophthalmic optical tomographic image display
JP2018525046A (ja) * 2015-06-01 2018-09-06 サンテック株式会社 ２つの波長を合成する光コヒーレンストモグラフィーシステム
KR102118081B1 (ko) * 2017-12-29 2020-06-10 경북대학교 산학협력단 카메라 렌즈 모듈 검사용 스웹트 소스 광간섭 단층 촬영기기

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