WO2022183965A1 - Sensor calibration method and system based on lithography machine - Google Patents
Sensor calibration method and system based on lithography machine Download PDFInfo
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- WO2022183965A1 WO2022183965A1 PCT/CN2022/077643 CN2022077643W WO2022183965A1 WO 2022183965 A1 WO2022183965 A1 WO 2022183965A1 CN 2022077643 W CN2022077643 W CN 2022077643W WO 2022183965 A1 WO2022183965 A1 WO 2022183965A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- the invention relates to the technical field of semiconductor equipment, in particular to a sensor calibration method and system based on a lithography machine.
- the eddy current sensor used in the present invention is applied to the double workpiece stage system of the lithography machine, and the system has high precision requirements, so the sensor needs to be calibrated to obtain higher precision.
- the data of the sensor is sampled by AD and then transmitted to the FPGA, and the FPGA directly calibrates the sensor data and processes the critical value, converts it into a voltage value, and performs operations such as threshold judgment. Since the first bit of the count value of the sensor is the sign bit, 0 represents positive voltage, and 1 represents negative voltage, which leads to a segmented correspondence between the count value and the voltage value. At the count value 0x1FFFF to 0x20000, the maximum voltage from the positive voltage will be generated. The jump from the value to the maximum value of the negative voltage will cause abnormal data and seriously affect the performance of the system. However, if the data is segmented and calibrated, two sets of calibration data are required for the same sensor, which is time-consuming.
- the present invention provides a sensor calibration method based on a lithography machine, including:
- a sensor is installed on the workpiece table of the lithography machine, the sensor is used to measure the displacement of the workpiece table, the sensor converts the displacement into a voltage, and converts it into a digital signal through an analog-to-digital converter;
- the sensor Before the sensor measures the displacement of the workpiece table, input the voltage of the set range to the analog-to-digital converter, obtain multiple digital values corresponding to multiple voltage values, and use the curve fitting method to fit the curve of the voltage value and the digital value;
- the sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and translates the digital signal;
- the digital signal is calibrated by the curve
- performing translation transformation on the digital signal is specifically:
- a set value is subtracted from the digital signal to obtain an updated digital signal, and the set value makes the updated digital signal within the range of the digital signal corresponding to the negative voltage maximum value and the positive voltage maximum value.
- the digital signal corresponding to the maximum positive voltage of the sensor is the first voltage
- the digital signal corresponding to the maximum negative voltage is the second voltage
- the set value is the third voltage
- the calibration of the digital signal by the curve is specifically:
- the voltage value corresponding to the updated digital signal is obtained according to the slope and intercept of the straight line fitted before the sensor measures the displacement of the workpiece stage.
- performing overflow value processing on the calibrated digital signal is specifically:
- the voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value is set as the negative voltage maximum value.
- inputting the voltage of the set range to the analog-to-digital converter is specifically: inputting the voltage of the set range to the analog-to-digital converter equidistantly.
- the setting range is the maximum value of the negative voltage of the sensor to the maximum value of the positive voltage.
- the sensor continues to measure the workpiece table displacement.
- a sensor calibration system based on a lithography machine comprising:
- Analog-to-digital converter the sensor converts the measured displacement of the workpiece table into voltage, and converts it into a digital signal through the analog-to-digital converter;
- the processor performs translation transformation and calibration on the digital signal, performs overflow value processing on the calibrated digital signal, and then performs inverse translation transformation into the original signal.
- the processor includes:
- the first calibration module before the sensor measures the displacement of the workpiece table, inputs the voltage of the set range to the analog-to-digital converter, obtains multiple digital values corresponding to multiple voltage values, and uses the curve fitting method to fit the voltage value and the digital value the curve;
- Translation transformation module the sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and translates the digital signal
- the second calibration module calibrates the digital signal through the curve obtained by the first calibration module
- the overflow value processing module performs overflow value processing on the digital signal calibrated by the second calibration module
- the inverse translation transformation module performs inverse translation transformation on the digital signal processed by the overflow value processing module, and the obtained digital signal is used as the original signal.
- the processor further includes:
- the threshold comparison module determines whether the voltage value corresponding to the original signal exceeds the set voltage threshold. If it exceeds the set voltage threshold, it sends a stop signal to the workpiece table; if it does not exceed the set voltage threshold, it sends a signal to the sensor, and the sensor continues. Measure workpiece table displacement
- the above-mentioned sensor calibration method and system based on a lithography machine of the present invention aims at the situation that the sensor calibration data may have abnormal jumps in the double workpiece stage of the lithography machine, and proposes a sensor calibration and threshold value processing method and system, which can quickly identify The sensor data is calibrated, and the critical value is correctly processed, thereby improving the control accuracy and stability of the dual workpiece table control system.
- FIG. 1 is a flowchart of the method for calibrating a sensor based on a lithography machine according to the present invention
- FIG. 2 is a flowchart of a specific embodiment of the method for calibrating a sensor based on a lithography machine according to the present invention
- FIG. 3 is a block diagram showing the structure of the sensor calibration system based on the lithography machine according to the present invention.
- FIG. 1 is a flowchart of the method for calibrating a sensor based on a lithography machine according to the present invention. As shown in FIG. 1 , the method for calibrating a sensor includes:
- Step S1 install a sensor on the workpiece table of the lithography machine, the sensor is used to measure the displacement of the workpiece table, the sensor converts the displacement into a voltage, and converts it into a digital signal through an analog-to-digital converter;
- Step S2 before the sensor measures the displacement of the workpiece table, input the voltage of the set range to the analog-to-digital converter, obtain a plurality of digital values corresponding to the plurality of voltage values, and use a curve fitting method to fit the curve of the voltage value and the digital value ;
- Step S3 the sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and performs translational transformation on the digital signal;
- Step S4 calibrating the digital signal through the curve
- Step S5 performing overflow value processing on the calibrated digital signal
- Step S6 performing inverse translation transformation on the digital signal processed by the overflow value, and the obtained digital signal is used as the original signal.
- step S3 performing translation transformation on the digital signal is specifically:
- a set value is subtracted from the digital signal to obtain an updated digital signal, and the set value makes the updated digital signal within the range of the digital signal corresponding to the negative voltage maximum value and the positive voltage maximum value.
- the digital signal corresponding to the maximum positive voltage of the sensor is a first voltage
- the digital signal corresponding to the maximum negative voltage is a second voltage
- the set value is a third voltage, for example, the first voltage.
- the voltage is 0x1FFFF
- the second voltage is -0x20000
- the third voltage is 0x40000.
- step S4 the described digital signal is calibrated by the curve, specifically:
- the voltage value corresponding to the updated digital signal is obtained according to the slope and intercept of the straight line fitted before the sensor measures the displacement of the workpiece stage.
- step S5 the overflow value processing is performed on the calibrated digital signal, specifically:
- the voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value is set as the negative voltage maximum value.
- inputting the voltage of the set range to the analog-to-digital converter is specifically inputting the voltage of the set range to the analog-to-digital converter equally.
- the set range is a maximum negative voltage to a maximum positive voltage of the sensor.
- the lithography-based sensor calibration method further includes:
- the sensor continues to measure the workpiece table displacement.
- the senor is an eddy current sensor, and the corresponding relationship between the voltage value output by the eddy current sensor and the count value (digital value) sampled by the analog-to-digital converter ADC, optionally , the eddy current sensor outputs a voltage in the range of -10V to +10V, the count value is an 18-bit binary number, 0x00000 to 0x1FFFF corresponds to 0 to 10V, and 0x20000 to 0x3FFFF corresponds to -10V to 0V.
- the workpiece table After the workpiece table is driven by the motor and the control system, it will move in the three directions of X, Y, and Z.
- the analog voltage signal is input to the AI channel of the bottom board, and the analog signal is AD converted by the bottom board (the function of the analog-to-digital converter is realized through the board), and converted into a digital signal A stored in in the registers of the FPGA.
- the calibration method of eddy current sensor based on lithography machine includes:
- the eddy current sensor measures the position of the workpiece table, and transmits the analog signal to the bottom board through the AI port.
- the AD converter analog-to-digital converter
- the AD converter in the bottom board samples the analog signal into an 18-bit original digital signal A and stores it in the register of the FPGA;
- Input the voltages from -10V to +10V to the AI channel in sequence (for example, use a multimeter) to input the voltages from -10V to +10V in sequence to the AI channel, and each voltage corresponds to a count value.
- the corresponding count value is measured, and a voltage value-count value straight line is fitted by the least squares method.
- the slope is a
- the intercept is b
- the vertical axis is the voltage value
- the horizontal axis is the count value before calibration.
- the part of the voltage value C greater than +10V let it be equal to +10V
- the part of the voltage value C less than -10V let it be equal to -10V.
- the voltage value obtained after calibration and critical value processing is used for voltage threshold judgment. If it exceeds the voltage threshold, it will stop; otherwise, go to the first step and execute the calibration method cyclically.
- FIG. 3 is a schematic diagram of a block diagram of a sensor calibration system based on a lithography machine according to the present invention.
- the sensor calibration system 10 based on a lithography machine includes:
- Analog-to-digital converter 1 the sensor converts the measured displacement of the workpiece table into a voltage, and converts it into a digital signal through the analog-to-digital converter;
- the processor 2 performs translation transformation and calibration on the digital signal, performs overflow value processing on the calibrated digital signal, and then performs inverse translation transformation into the original signal.
- the processor 2 includes:
- the first calibration module 21 before the sensor measures the displacement of the workpiece table, inputs the voltage of the set range to the analog-to-digital converter, obtains a plurality of digital values corresponding to the plurality of voltage values, and uses a curve fitting method to fit the voltage value and the digital value. value curve;
- the translation transformation module 22 the sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and performs translation transformation on the digital signal
- the second calibration module 23 calibrates the digital signal through the curve obtained by the first calibration module
- the overflow value processing module 24 performs overflow value processing on the digital signal calibrated by the second calibration module
- the inverse translation transformation module 25 performs inverse translation transformation on the digital signal processed by the overflow value processing module, and the obtained digital signal is used as the original signal.
- the processor further includes:
- the threshold value comparison module 26 judges whether the voltage value corresponding to the original signal exceeds the set voltage threshold value, if it exceeds the set voltage threshold value, sends a stop signal to the workpiece table; if it does not exceed the set voltage threshold value, sends a signal to the sensor, the sensor Continue to measure the workpiece table displacement.
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Abstract
Description
本发明涉及半导体装备技术领域，特别涉及一种基于光刻机的传感器标定方法及系统。The invention relates to the technical field of semiconductor equipment, in particular to a sensor calibration method and system based on a lithography machine.
光刻机双工件台由于系统复杂，对精度要求高，安装有大量传感器来监测系统各项指标。传感器信号受系统环境与实际使用场景的影响较大，因此需要通过标定来保证传感器的测量精度。Due to the complex system and high precision requirements of the double workpiece stage of the lithography machine, a large number of sensors are installed to monitor various indicators of the system. The sensor signal is greatly affected by the system environment and actual usage scenarios, so calibration is required to ensure the measurement accuracy of the sensor.
本发明所采用的电涡流传感器应用于光刻机双工件台系统中，该系统具有较高的精度要求，因此传感器需要进行标定，以获得更高的精度。传感器的数据经过AD采样后传递给FPGA，FPGA直接对传感器数据进行标定及临界值处理，转化为电压值，并进行阈值判断等操作。由于传感器count值的首位为符号位，0代表正电压，1代表负电压，这导致count值与电压值之间的对应关系是分段的，在count值0x1FFFF到0x20000处会产生从正电压最大值到负电压最大值的跳变，从而产生数据异常，严重影响系统性能。而如果对数据进行分段标定，则对同一传感器需要两套标定数据，比较费时。The eddy current sensor used in the present invention is applied to the double workpiece stage system of the lithography machine, and the system has high precision requirements, so the sensor needs to be calibrated to obtain higher precision. The data of the sensor is sampled by AD and then transmitted to the FPGA, and the FPGA directly calibrates the sensor data and processes the critical value, converts it into a voltage value, and performs operations such as threshold judgment. Since the first bit of the count value of the sensor is the sign bit, 0 represents positive voltage, and 1 represents negative voltage, which leads to a segmented correspondence between the count value and the voltage value. At the count value 0x1FFFF to 0x20000, the maximum voltage from the positive voltage will be generated. The jump from the value to the maximum value of the negative voltage will cause abnormal data and seriously affect the performance of the system. However, if the data is segmented and calibrated, two sets of calibration data are required for the same sensor, which is time-consuming.
发明内容SUMMARY OF THE INVENTION
为了解决现有技术中存在的问题和满足本领域未来的发展需求，本发明 提供了一种基于光刻机的传感器标定方法，包括：In order to solve the problems existing in the prior art and meet the future development needs of this field, the present invention provides a sensor calibration method based on a lithography machine, including:
安装传感器于光刻机的工件台，所述传感器用于测量工件台的位移，传感器将位移转换为电压，通过模数转换器转换成数字信号；A sensor is installed on the workpiece table of the lithography machine, the sensor is used to measure the displacement of the workpiece table, the sensor converts the displacement into a voltage, and converts it into a digital signal through an analog-to-digital converter;
在传感器测量工件台的位移之前，向模数转换器输入设定范围的电压，获得多个电压值对应的多个数字值，采用曲线拟合方法拟合电压值和数字值的曲线；Before the sensor measures the displacement of the workpiece table, input the voltage of the set range to the analog-to-digital converter, obtain multiple digital values corresponding to multiple voltage values, and use the curve fitting method to fit the curve of the voltage value and the digital value;
传感器测量工件台的位移，通过模数转换器转换成数字信号，将数字信号进行平移变换；The sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and translates the digital signal;
通过所述曲线对所述数字信号进行标定；The digital signal is calibrated by the curve;
对标定后的数字信号进行溢出值处理；Perform overflow value processing on the calibrated digital signal;
将溢出值处理后的数字信号进行反平移变换，获得的数字信号作为原始信号。Perform inverse translation transformation on the digital signal processed by the overflow value, and the obtained digital signal is taken as the original signal.
可选地，所述将数字信号进行平移变换，具体为：Optionally, performing translation transformation on the digital signal is specifically:
将数字信号减去设定值，获得更新后的数字信号，所述设定值使得更新后的数字信号在负电压最大值和正电压最大值对应的数字信号范围内。A set value is subtracted from the digital signal to obtain an updated digital signal, and the set value makes the updated digital signal within the range of the digital signal corresponding to the negative voltage maximum value and the positive voltage maximum value.
可选地，所述传感器的正电压最大值对应的数字信号为第一电压，所述负电压最大值对应的数字信号为第二电压，所述设定值为第三电压。Optionally, the digital signal corresponding to the maximum positive voltage of the sensor is the first voltage, the digital signal corresponding to the maximum negative voltage is the second voltage, and the set value is the third voltage.
可选地，所述通过所述曲线对所述数字信号进行标定，具体为：Optionally, the calibration of the digital signal by the curve is specifically:
采用曲线拟合方法拟合电压值和数字值的直线；Use the curve fitting method to fit the straight line of the voltage value and the digital value;
根据传感器测量工件台的位移之前拟合的直线的斜率和截距获得更新后的数字信号对应的电压值。The voltage value corresponding to the updated digital signal is obtained according to the slope and intercept of the straight line fitted before the sensor measures the displacement of the workpiece stage.
可选地，所述对标定后的数字信号进行溢出值处理，具体为：Optionally, performing overflow value processing on the calibrated digital signal is specifically:
将超过正电压最大值的更新后的数字信号对应的电压值设定为正电压最大值；Set the voltage value corresponding to the updated digital signal that exceeds the positive voltage maximum value as the positive voltage maximum value;
将小于负电压最大值的更新后的数字信号对应的电压值设定为负电压最大值。The voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value is set as the negative voltage maximum value.
可选地，所述在传感器测量工件台的位移之前，向模数转换器输入设定范围的电压具体为：向模数转换器等差输入设定范围的电压。Optionally, before the sensor measures the displacement of the workpiece table, inputting the voltage of the set range to the analog-to-digital converter is specifically: inputting the voltage of the set range to the analog-to-digital converter equidistantly.
可选地，所述设定范围为传感器的负电压最大值到正电压最大值。Optionally, the setting range is the maximum value of the negative voltage of the sensor to the maximum value of the positive voltage.
可选地，还包括：Optionally, also include:
判断原始信号对应的电压值是否超过设定的电压阈值；Determine whether the voltage value corresponding to the original signal exceeds the set voltage threshold;
如果超过设定的电压阈值，工件台停机；If the set voltage threshold is exceeded, the workpiece table stops;
如果不超过设定的电压阈值，传感器继续测量工件台位移。If the set voltage threshold is not exceeded, the sensor continues to measure the workpiece table displacement.
根据本发明的另一个方面，提供一种基于光刻机的传感器标定系统，包括：According to another aspect of the present invention, a sensor calibration system based on a lithography machine is provided, comprising:
模数转换器，传感器将测量的工件台的位移转换为电压，通过模数转换器转换成数字信号；Analog-to-digital converter, the sensor converts the measured displacement of the workpiece table into voltage, and converts it into a digital signal through the analog-to-digital converter;
处理器，对数字信号进行平移变换与标定，对标定后的数字信号进行溢出值处理，再进行反平移变换转化为原始信号，The processor performs translation transformation and calibration on the digital signal, performs overflow value processing on the calibrated digital signal, and then performs inverse translation transformation into the original signal.
其中，所述处理器包括：Wherein, the processor includes:
第一标定模块，在传感器测量工件台的位移之前，向模数转换器输入设定范围的电压，获得多个电压值对应的多个数字值，采用曲线拟合方法拟合电压值和数字值的曲线；The first calibration module, before the sensor measures the displacement of the workpiece table, inputs the voltage of the set range to the analog-to-digital converter, obtains multiple digital values corresponding to multiple voltage values, and uses the curve fitting method to fit the voltage value and the digital value the curve;
平移变换模块，传感器测量工件台的位移，通过模数转换器转换成数字 信号，将数字信号进行平移变换Translation transformation module, the sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and translates the digital signal
第二标定模块，通过第一标定模块获得的曲线对数字信号进行标定；The second calibration module calibrates the digital signal through the curve obtained by the first calibration module;
溢出值处理模块，对第二标定模块标定后的数字信号进行溢出值处理；The overflow value processing module performs overflow value processing on the digital signal calibrated by the second calibration module;
反平移变换模块，将溢出值处理模块处理后的数字信号进行反平移变换，获得的数字信号作为原始信号。The inverse translation transformation module performs inverse translation transformation on the digital signal processed by the overflow value processing module, and the obtained digital signal is used as the original signal.
可选地，所述处理器还包括：Optionally, the processor further includes:
阈值比较模块，判断原始信号对应的电压值是否超过设定的电压阈值，如果超过设定的电压阈值，发送停机信号给工件台；如果不超过设定的电压阈值，发送信号给传感器，传感器继续测量工件台位移The threshold comparison module determines whether the voltage value corresponding to the original signal exceeds the set voltage threshold. If it exceeds the set voltage threshold, it sends a stop signal to the workpiece table; if it does not exceed the set voltage threshold, it sends a signal to the sensor, and the sensor continues. Measure workpiece table displacement
本发明上述基于光刻机的传感器标定方法及系统针对在光刻机双工件台中，传感器标定数据可能产生跳变异常的情况，提出一种传感器标定与临界值处理方法及系统，能够快速对传感器数据进行标定，并正确处理临界值，从而提高双工件台控制系统的控制精度与稳定性。The above-mentioned sensor calibration method and system based on a lithography machine of the present invention aims at the situation that the sensor calibration data may have abnormal jumps in the double workpiece stage of the lithography machine, and proposes a sensor calibration and threshold value processing method and system, which can quickly identify The sensor data is calibrated, and the critical value is correctly processed, thereby improving the control accuracy and stability of the dual workpiece table control system.
图1为本发明所述基于光刻机的传感器标定方法的流程图；1 is a flowchart of the method for calibrating a sensor based on a lithography machine according to the present invention;
图2为本发明所述基于光刻机的传感器标定方法的一个具体实施例的流程图；2 is a flowchart of a specific embodiment of the method for calibrating a sensor based on a lithography machine according to the present invention;
图3为本发明所述基于光刻机的传感器标定系统的构成框图。FIG. 3 is a block diagram showing the structure of the sensor calibration system based on the lithography machine according to the present invention.
下面将结合附图对本发明的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中 的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work, all belong to the protection scope of the present invention.
图1为本发明所述基于光刻机的传感器标定方法的流程图，如图1所示，所述传感器标定方法包括：FIG. 1 is a flowchart of the method for calibrating a sensor based on a lithography machine according to the present invention. As shown in FIG. 1 , the method for calibrating a sensor includes:
步骤S1，安装传感器于光刻机的工件台，所述传感器用于测量工件台的位移，传感器将位移转换为电压，通过模数转换器转换成数字信号；Step S1, install a sensor on the workpiece table of the lithography machine, the sensor is used to measure the displacement of the workpiece table, the sensor converts the displacement into a voltage, and converts it into a digital signal through an analog-to-digital converter;
步骤S2，在传感器测量工件台的位移之前，向模数转换器输入设定范围的电压，获得多个电压值对应的多个数字值，采用曲线拟合方法拟合电压值和数字值的曲线；Step S2, before the sensor measures the displacement of the workpiece table, input the voltage of the set range to the analog-to-digital converter, obtain a plurality of digital values corresponding to the plurality of voltage values, and use a curve fitting method to fit the curve of the voltage value and the digital value ;
步骤S3，传感器测量工件台的位移，通过模数转换器转换成数字信号，将数字信号进行平移变换；Step S3, the sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and performs translational transformation on the digital signal;
步骤S4，通过所述曲线对所述数字信号进行标定；Step S4, calibrating the digital signal through the curve;
步骤S5，对标定后的数字信号进行溢出值处理；Step S5, performing overflow value processing on the calibrated digital signal;
步骤S6，将溢出值处理后的数字信号进行反平移变换，获得的数字信号作为原始信号。Step S6, performing inverse translation transformation on the digital signal processed by the overflow value, and the obtained digital signal is used as the original signal.
在一个实施例中，在步骤S3中，所述将数字信号进行平移变换，具体为：In one embodiment, in step S3, performing translation transformation on the digital signal is specifically:
将数字信号减去设定值，获得更新后的数字信号，所述设定值使得更新后的数字信号在负电压最大值和正电压最大值对应的数字信号范围内。A set value is subtracted from the digital signal to obtain an updated digital signal, and the set value makes the updated digital signal within the range of the digital signal corresponding to the negative voltage maximum value and the positive voltage maximum value.
可选地，所述传感器的正电压最大值对应的数字信号为第一电压，所述负电压最大值对应的数字信号为第二电压，所述设定值为第三电压，例如，第一电压为0x1FFFF，第二电压为-0x20000，第三电压为0x40000。Optionally, the digital signal corresponding to the maximum positive voltage of the sensor is a first voltage, the digital signal corresponding to the maximum negative voltage is a second voltage, and the set value is a third voltage, for example, the first voltage. The voltage is 0x1FFFF, the second voltage is -0x20000, and the third voltage is 0x40000.
在一个实施例中，在步骤S4中，所述通过所述曲线对所述数字信号进行 标定，具体为：In one embodiment, in step S4, the described digital signal is calibrated by the curve, specifically:
采用曲线拟合方法拟合电压值和数字值的直线；Use the curve fitting method to fit the straight line of the voltage value and the digital value;
根据传感器测量工件台的位移之前拟合的直线的斜率和截距获得更新后的数字信号对应的电压值。The voltage value corresponding to the updated digital signal is obtained according to the slope and intercept of the straight line fitted before the sensor measures the displacement of the workpiece stage.
在一个实施例中，在步骤S5中，所述对标定后的数字信号进行溢出值处理，具体为：In one embodiment, in step S5, the overflow value processing is performed on the calibrated digital signal, specifically:
将超过正电压最大值的更新后的数字信号对应的电压值设定为正电压最大值；Set the voltage value corresponding to the updated digital signal that exceeds the positive voltage maximum value as the positive voltage maximum value;
将小于负电压最大值的更新后的数字信号对应的电压值设定为负电压最大值。The voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value is set as the negative voltage maximum value.
在一个实施例中，所述在传感器测量工件台的位移之前，向模数转换器输入设定范围的电压具体为向模数转换器等差输入设定范围的电压。In one embodiment, before the sensor measures the displacement of the workpiece table, inputting the voltage of the set range to the analog-to-digital converter is specifically inputting the voltage of the set range to the analog-to-digital converter equally.
在一个实施例中，所述设定范围为传感器的负电压最大值到正电压最大值。In one embodiment, the set range is a maximum negative voltage to a maximum positive voltage of the sensor.
在一个实施例中，基于光刻机的传感器标定方法还包括：In one embodiment, the lithography-based sensor calibration method further includes:
判断原始信号对应的电压值是否超过设定的电压阈值；Determine whether the voltage value corresponding to the original signal exceeds the set voltage threshold;
如果超过设定的电压阈值，工件台停机；If the set voltage threshold is exceeded, the workpiece table stops;
如果不超过设定的电压阈值，传感器继续测量工件台位移。If the set voltage threshold is not exceeded, the sensor continues to measure the workpiece table displacement.
在本发明的一个实施例中，如图2所示，传感器为电涡流传感器，电涡流传感器输出的电压值与模数转换器ADC采样得到的count值(数字值)的对应关系，可选地，电涡流传感器输出-10V到+10V范围内的电压，count值为18位二进制数，0x00000到0x1FFFF对应0到10V，0x20000到0x3FFFF 对应-10V到0V。In an embodiment of the present invention, as shown in FIG. 2 , the sensor is an eddy current sensor, and the corresponding relationship between the voltage value output by the eddy current sensor and the count value (digital value) sampled by the analog-to-digital converter ADC, optionally , the eddy current sensor outputs a voltage in the range of -10V to +10V, the count value is an 18-bit binary number, 0x00000 to 0x1FFFF corresponds to 0 to 10V, and 0x20000 to 0x3FFFF corresponds to -10V to 0V.
工件台在电机和控制系统驱动下执行运动后，在X、Y、Z三个方向会产生位移。电涡流传感器测量位移量后，将模拟电压信号输入到底层板卡AI通道，由底层板卡对模拟信号进行AD转换(通过板卡实现模数转换器的功能)，转换为数字信号A存放于FPGA的寄存器中。首先对初始数字信号A进行平移变换与标定，然后对标定后的数据进行溢出值处理，最后再做反平移变换将信号转化为原始信号。After the workpiece table is driven by the motor and the control system, it will move in the three directions of X, Y, and Z. After the eddy current sensor measures the displacement, the analog voltage signal is input to the AI channel of the bottom board, and the analog signal is AD converted by the bottom board (the function of the analog-to-digital converter is realized through the board), and converted into a digital signal A stored in in the registers of the FPGA. First, perform translation transformation and calibration on the initial digital signal A, then perform overflow value processing on the calibrated data, and finally do inverse translation transformation to convert the signal into the original signal.
基于光刻机的电涡流传感器的标定方法包括：The calibration method of eddy current sensor based on lithography machine includes:
电涡流传感器测量工件台位置，并将模拟信号通过AI口传递给底层板卡。底层板卡中的AD转换器(模数转换器)将模拟信号采样为18位原始数字信号A，存入FPGA的寄存器中；The eddy current sensor measures the position of the workpiece table, and transmits the analog signal to the bottom board through the AI port. The AD converter (analog-to-digital converter) in the bottom board samples the analog signal into an 18-bit original digital signal A and stores it in the register of the FPGA;
判断原始数字信号A是否大于0x1FFFF；Determine whether the original digital signal A is greater than 0x1FFFF;
将原始数字信号A中大于0x1FFFF的数据全部减去0x40000，得到一组新的数字信号B，B取值范围为-0x20000到+0x1FFFF。Subtract all data greater than 0x1FFFF in the original digital signal A by 0x40000 to obtain a new set of digital signals B. The value of B ranges from -0x20000 to +0x1FFFF.
向AI通道依次等差输入-10V到+10V中的电压(例如利用万用表向)向AI通道依次等差输入-10V到+10V中的电压，每个电压对应一个count值。测得对应的count值，通过最小二乘法拟合出一条电压值-count值直线，设斜率为a，截距为b，纵轴为电压值，横轴为标定前count值。Input the voltages from -10V to +10V to the AI channel in sequence (for example, use a multimeter) to input the voltages from -10V to +10V in sequence to the AI channel, and each voltage corresponds to a count value. The corresponding count value is measured, and a voltage value-count value straight line is fitted by the least squares method. The slope is a, the intercept is b, the vertical axis is the voltage value, and the horizontal axis is the count value before calibration.
将数字信号B代入直线表达式，可得电压值C＝a·B+b。对于电压值C中大于+10V的部分，令其等于+10V；对于电压值C中小于-10V的部分，令其等于-10V。Substituting the digital signal B into the linear expression, the voltage value C=a·B+b can be obtained. For the part of the voltage value C greater than +10V, let it be equal to +10V; for the part of the voltage value C less than -10V, let it be equal to -10V.
将标定与临界值处理后得到的电压值进行电压阈值判断。若超出电压阈 值，则停机；否则转到第一步，循环执行标定方法。The voltage value obtained after calibration and critical value processing is used for voltage threshold judgment. If it exceeds the voltage threshold, it will stop; otherwise, go to the first step and execute the calibration method cyclically.
图3是本发明所述基于光刻机的传感器标定系统的构成框图的示意图，如图3所示，所述基于光刻机的传感器标定系统10包括：FIG. 3 is a schematic diagram of a block diagram of a sensor calibration system based on a lithography machine according to the present invention. As shown in FIG. 3 , the sensor calibration system 10 based on a lithography machine includes:
模数转换器1，传感器将测量的工件台的位移转换为电压，通过模数转换器转换成数字信号；Analog-to-digital converter 1, the sensor converts the measured displacement of the workpiece table into a voltage, and converts it into a digital signal through the analog-to-digital converter;
处理器2，对数字信号进行平移变换与标定，对标定后的数字信号进行溢出值处理，再进行反平移变换转化为原始信号，The processor 2 performs translation transformation and calibration on the digital signal, performs overflow value processing on the calibrated digital signal, and then performs inverse translation transformation into the original signal.
其中，所述处理器2包括：Wherein, the processor 2 includes:
第一标定模块21，在传感器测量工件台的位移之前，向模数转换器输入设定范围的电压，获得多个电压值对应的多个数字值，采用曲线拟合方法拟合电压值和数字值的曲线；The first calibration module 21, before the sensor measures the displacement of the workpiece table, inputs the voltage of the set range to the analog-to-digital converter, obtains a plurality of digital values corresponding to the plurality of voltage values, and uses a curve fitting method to fit the voltage value and the digital value. value curve;
平移变换模块22，传感器测量工件台的位移，通过模数转换器转换成数字信号，将数字信号进行平移变换The translation transformation module 22, the sensor measures the displacement of the workpiece table, converts it into a digital signal through an analog-to-digital converter, and performs translation transformation on the digital signal
第二标定模块23，通过第一标定模块获得的曲线对数字信号进行标定；The second calibration module 23 calibrates the digital signal through the curve obtained by the first calibration module;
溢出值处理模块24，对第二标定模块标定后的数字信号进行溢出值处理；The overflow value processing module 24 performs overflow value processing on the digital signal calibrated by the second calibration module;
反平移变换模块25，将溢出值处理模块处理后的数字信号进行反平移变换，获得的数字信号作为原始信号。The inverse translation transformation module 25 performs inverse translation transformation on the digital signal processed by the overflow value processing module, and the obtained digital signal is used as the original signal.
在一个实施例中，所述处理器还包括：In one embodiment, the processor further includes:
阈值比较模块26，判断原始信号对应的电压值是否超过设定的电压阈值，如果超过设定的电压阈值，发送停机信号给工件台；如果不超过设定的电压阈值，发送信号给传感器，传感器继续测量工件台位移。The threshold value comparison module 26 judges whether the voltage value corresponding to the original signal exceeds the set voltage threshold value, if it exceeds the set voltage threshold value, sends a stop signal to the workpiece table; if it does not exceed the set voltage threshold value, sends a signal to the sensor, the sensor Continue to measure the workpiece table displacement.
当然，本发明还可有其它多种实施例，在不背离本发明精神及其实质的情况下，本领域技术人员可根据本发明做出各种相应的改变和变形，但这些相应的改变和变形都属于本发明的权利要求的保护范围。Of course, the present invention can also have other various embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding changes and The deformations all belong to the protection scope of the claims of the present invention.
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