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WO2022174504A1 - Device and method for detecting vapor concentration using dual lasers - Google Patents

Device and method for detecting vapor concentration using dual lasers Download PDF

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Publication number
WO2022174504A1
WO2022174504A1 PCT/CN2021/085781 CN2021085781W WO2022174504A1 WO 2022174504 A1 WO2022174504 A1 WO 2022174504A1 CN 2021085781 W CN2021085781 W CN 2021085781W WO 2022174504 A1 WO2022174504 A1 WO 2022174504A1
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Prior art keywords
laser
light
transmitting hole
water vapor
vapor concentration
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Ceased
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PCT/CN2021/085781
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French (fr)
Chinese (zh)
Inventor
张可可
刘世萱
裴亮
陈世哲
王波
万晓正
吴玉尚
张继明
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Oceanographic Instrumentation Research Institute Shandong Academy of Sciences
Institute of Oceanographic Instrumentation Shandong Academy of Sciences
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Oceanographic Instrumentation Research Institute Shandong Academy of Sciences
Institute of Oceanographic Instrumentation Shandong Academy of Sciences
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Priority to ZA2022/06389A priority Critical patent/ZA202206389B/en
Publication of WO2022174504A1 publication Critical patent/WO2022174504A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N21/3151—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/354—Hygrometry of gases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

Definitions

  • the invention relates to the technical field of environmental detection, in particular to a device and method for detecting water vapor concentration by using dual lasers.
  • the existing humidity-sensitive capacitive temperature and humidity sensors have problems such as slow dehumidification due to high humidity, large measurement error, and long response time.
  • the composition of matter can be distinguished by the composition of the absorption lines of the gas.
  • the concentration of a gas can be calculated by analyzing the degree of absorption of the wavelength of light by a certain absorption line of the gas.
  • Using tunable laser absorption spectroscopy to measure environmental humidity has the characteristics of high measurement accuracy, fast response speed and good environmental adaptability, which can solve the problems of humidity sensitive capacitive temperature and humidity sensors.
  • the temperature and humidity sensors are required to work in the range of -40 to 60 °C.
  • the water vapor concentration in the air varies greatly.
  • the saturated water vapor concentration is less than 200ppm (relative humidity is 100% RH)
  • the saturated water vapor concentration exceeds 240,000 ppm (when the relative humidity is 100% RH)
  • the saturated water vapor concentration at 60°C is more than 1300 times that at -40°C, which gives the laser humidity sensor the Full-scale measurements present challenges.
  • the water vapor analyzer uses a laser to perform full-scale measurement. This method will encounter serious challenges when performing full-scale measurement in the range of -40 to 60 °C.
  • the low temperature range in order to improve the detection accuracy and detection sensitivity of water vapor concentration, it is necessary to use the strong absorption line of the water vapor spectrum and combine with multiple reflection absorption cells to achieve high-precision measurement of water vapor concentration in the low temperature range.
  • the high temperature range such as 60°C
  • the saturated water vapor concentration reaches more than 200,000 ppm, the water vapor absorption is very strong, and the absorption saturation phenomenon will occur. At this time, it is necessary to reduce the intensity of the absorption spectrum and the length of the absorption path. For a single laser, it is impossible to achieve both the detection accuracy and detection sensitivity of water vapor in the low temperature range and the high temperature range.
  • the present invention provides a device and method for detecting water vapor concentration by using dual lasers.
  • the full-scale applicability of the device can be improved.
  • a device for detecting water vapor concentration using dual lasers comprising a device casing, a hardware circuit board is arranged in the device casing, the upper and lower ends of the device casing are respectively connected to a transmitter casing and a receiving end casing, the A first laser, a second laser, a first lens and a second lens are arranged in the transmitting end casing, a first reflecting mirror is disposed on the surface of the transmitting end casing, and a first light-transmitting hole and a second light-transmitting mirror are provided on the first reflecting mirror a light transmission hole; a first photodetector and a second photodetector are arranged in the receiving end housing, a second reflection mirror is arranged on the surface of the receiving end housing, and a third light transmission hole and The fourth light-transmitting hole, the first reflecting mirror and the second reflecting mirror are facing each other; the first laser, the first lens, the first light-transmitting hole, the third light-transmitting hole and the first photodetector are located in
  • the first light-transmitting hole is located at the center of the first reflector, and the third light-transmitting hole is located at the center of the second reflector.
  • the second light-transmitting hole is located at the edge of the first reflecting mirror, and the fourth light-transmitting hole is located at the edge of the second reflecting mirror.
  • the first laser, the second laser, the first photodetector and the second photodetector are all electrically connected to the hardware circuit board.
  • a cylindrical sintered mesh is connected between the transmitter housing and the receiver housing, and the sintered mesh is located outside the edges of the first reflector and the second reflector.
  • the output from the third light-transmitting hole is received by the first photodetector, and the water vapor concentration in the environment is calculated by the hardware circuit board according to the absorption degree of the water vapor concentration in the environment to the absorption spectrum line; in the low temperature range, when the second laser works, it emits After the laser is converged by the second lens, it enters the open absorption light path from the second light-transmitting hole, and the laser is reflected multiple times between the first reflecting mirror and the second reflecting mirror, and finally exits from the fourth light-transmitting hole, which is detected by the second photoelectric
  • the water vapor concentration in the environment is calculated by the hardware circuit board according to the absorption degree of the water vapor concentration in the environment to the absorption spectrum line; in the transition interval between high temperature and low temperature, the first laser and the second laser work at the same time, using the output water vapor
  • the mean value of the concentration is used as the system output.
  • the high temperature range is a temperature range where the temperature is greater than 5°C
  • the low temperature range is a temperature range where the temperature is less than -5°C
  • the transition range is a temperature range where the temperature is -5°C to 5°C.
  • the device and method for detecting water vapor concentration using dual lasers provided by the present invention have the following beneficial effects:
  • the present invention adopts the mode of dual lasers, and the two lasers share the same optical path system, which can realize the consideration of the water vapor detection range and detection resolution in the low temperature interval and the high temperature interval, and can improve the full-scale applicability of the equipment.
  • the present invention adopts near-infrared laser in high temperature region, which can avoid the problem of water vapor absorption saturation in high temperature environment; in low temperature region, adopts mid-infrared laser, and the optical path is multiple reflections, which can improve the water vapor absorption intensity;
  • the infrared laser and the mid-infrared laser work at the same time, and the average value of the output water vapor concentration is used as the system output, which can improve the measurement accuracy.
  • the present invention enables the transition interval. When the laser is switched, the system does not need a warm-up time, and the high-speed measurement of the laser humidity can be realized.
  • the position setting of the laser, the photodetector and the light-transmitting hole of the present invention can ensure that the laser light of the two lasers will not be disturbed, and the two lasers can share the same optical path system.
  • the present invention is arranged at the position of the device casing and the transmitter casing and the receiver casing on the upper and lower ends of the device casing, which can effectively shorten the length of the cable from the laser, the photodetector to the hardware circuit board, and reduce noise. Introduced to improve the signal-to-noise ratio.
  • a cylindrical sintered mesh is connected between the outer casing of the transmitting end and the outer casing of the receiving end, which can prevent dust from contaminating the reflector, help to improve the measurement accuracy and prolong the service life.
  • FIG. 1 is a schematic diagram of a device for detecting water vapor concentration using dual lasers disclosed in an embodiment of the present invention
  • FIG. 2 is a schematic diagram of a sintered mesh disclosed in an embodiment of the present invention.
  • FIG. 3 is a schematic diagram of a first reflecting mirror disclosed in an embodiment of the present invention.
  • FIG. 4 is a schematic diagram of a second reflecting mirror disclosed in an embodiment of the present invention.
  • the second mirror; 15 the third light-transmitting hole; 16, the fourth light-transmitting hole; 17, the sintered mesh; 18, the cable; 19, the light spot.
  • the present invention provides a device for detecting water vapor concentration by using dual lasers.
  • FIG. 1 it includes a device housing 1, a hardware circuit board 4 is arranged in the device housing 1, and the upper and lower ends of the device housing 1 are respectively connected to transmit
  • the end housing 2 and the receiving end housing 3 the first laser 5, the second laser 6, the first lens 7 and the second lens 8 are arranged in the transmitting end housing 2, and the first reflecting mirror 9 is arranged on the surface of the transmitting end housing 2 , the first reflection mirror 9 is provided with a first light-transmitting hole 10 and a second light-transmitting hole 11;
  • the receiving end housing 3 is provided with a first photodetector 12 and a second photodetector 13, and the receiving end housing 3
  • the second reflecting mirror 14 has a third light-transmitting hole 15 and a fourth light-transmitting hole 16 on the second reflecting mirror 14, and the first reflecting mirror 9 and the second reflecting mirror 14 are facing each other.
  • the first laser 5 , the second laser 6 , the first photodetector 12 and the second photodetector 13 are all electrically connected to the hardware circuit board 4 , and the device casing 1 is connected to a cable 18 .
  • the device housing 1 is a cuboid structure, and the transmitting end housing 2 and the receiving end housing 3 are cylindrical structures. This mechanical structure can effectively shorten the cables from the laser and the photodetector to the hardware circuit board 4 length, reducing the introduction of noise and improving the signal-to-noise ratio.
  • the first light-transmitting hole 10 is located at the center of the first reflector 9
  • the third light-transmitting hole 15 is located at the center of the second reflector 14
  • the first laser 5 , the first lens 7 , the first light-transmitting hole 10, the third light-transmitting hole 15 and the first photodetector 12 are located on a straight line, and the laser light emitted by the first laser 5 passes through the first lens 7, the first light-transmitting hole 10, and directly from the third The light-transmitting hole 15 exits and reaches the first photodetector 12 .
  • the second light-transmitting hole 11 is located at the edge of the first reflecting mirror 9, the fourth light-transmitting hole 16 is located at the edge of the second reflecting mirror 14, and the laser light emitted by the second laser 6 passes through the second lens 8 and the second light-transmitting hole 11, After multiple reflections between the first reflection mirror 9 and the second reflection mirror 14 (the light spot 19 is shown in FIG. 3 and FIG. Near-infrared laser transmission mode, the laser is transmitted at the center of the two mirrors, mid-infrared laser multiple reflection mode, the laser is transmitted near the edge of the two mirrors, the lasers of the two lasers will not produce interference, and the two lasers can be shared the same optical path system.
  • the first laser 5 is a near-infrared band laser
  • the second laser 6 is a mid-infrared band laser
  • a cylindrical sintered mesh 17 can be connected between the transmitter casing and the receiver casing. As shown in FIG. 2 , the sintered mesh 17 is located between the first reflector 9 and the second mirror. The outer edge of the mirror 14 plays the role of preventing dust from contaminating the mirror. In applications that require a high response speed for humidity measurement, the sintered mesh 17 may not be installed, which can quickly respond to changes in humidity in the environment.
  • the first laser 5 near-infrared band laser
  • the laser light emitted by it is converged by the first lens 7.
  • the hole 10 enters the open absorption light path, the laser light is emitted from the third light-transmitting hole 15, received by the first photodetector 12, and the water vapor concentration in the environment is calculated by the hardware circuit board 4 according to the degree of absorption of the absorption spectrum by the water vapor concentration in the environment;
  • the second laser 6 (mid-infrared band laser) works, the laser light emitted by it is converged by the second lens 8, and then enters the open absorption light path from the second light-transmitting hole 11.
  • the water vapor concentration in the environment is calculated by the hardware circuit board 4 according to the absorption degree of the water vapor concentration in the environment to the absorption spectrum line; in the transition range between high temperature and low temperature, the first The first laser 5 and the second laser 6 work simultaneously, and the average value of the output water vapor concentration is used as the system output.
  • the high temperature range is the temperature range where the temperature is greater than 5°C
  • the low temperature range is the temperature range where the temperature is less than -5°C
  • the transition range is the temperature range where the temperature is between -5°C and 5°C.

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Abstract

A device and a method for detecting a vapor concentration using dual lasers. Said device comprises a device housing (1), and a hardware circuit board (4) is provided in the device housing (1); a transmitting end housing (2) and a receiving end housing (3) are respectively connected to the side surfaces of upper and lower ends of the device housing (1); the transmitting end housing (2) is provided therein with a first laser (5), a second laser (6), a first lens (7) and a second lens (8), a first reflective mirror (9) is provided on the surface of the transmitting end housing (2), and the first reflective mirror (9) is provided with a first light-transmitting hole (10) and a second light-transmitting hole (11); the receiving end housing (3) is provided therein with a first photodetector (12) and a second photodetector (13), a second reflective mirror (14) is provided on the surface of the receiving end housing (3), and the second reflective mirror (14) is provided with a third light-transmitting hole (15) and a fourth light-transmitting hole (16); and the first laser (5) is a near-infrared laser, and the second laser (6) is a mid-infrared laser. The range and resolution of detecting the vapor concentration in a low temperature range and a high temperature range can be both considered, and the overall range applicability of equipment can be improved.

Description

一种利用双激光器进行水汽浓度检测的装置及方法A device and method for detecting water vapor concentration using dual lasers 技术领域technical field

本发明涉及环境检测技术领域，特别涉及一种利用双激光器进行水汽浓度检测的装置及方法。The invention relates to the technical field of environmental detection, in particular to a device and method for detecting water vapor concentration by using dual lasers.

背景技术Background technique

现有湿敏电容式温湿度传感器存在高湿褪湿慢、测量误差大、响应时间长等问题。在光谱学上，通过气体的吸收谱线的构成，可以分辨物质的组份。可以通过分析某种气体某一吸收谱线对该波长光的吸收程度，来计算该气体的浓度。利用可调谐激光吸收光谱技术测量环境湿度，具有测量准确度高、响应速度快、环境适应性好的特点，可以解决湿敏电容式温湿度传感器存在的问题。The existing humidity-sensitive capacitive temperature and humidity sensors have problems such as slow dehumidification due to high humidity, large measurement error, and long response time. In spectroscopy, the composition of matter can be distinguished by the composition of the absorption lines of the gas. The concentration of a gas can be calculated by analyzing the degree of absorption of the wavelength of light by a certain absorption line of the gas. Using tunable laser absorption spectroscopy to measure environmental humidity has the characteristics of high measurement accuracy, fast response speed and good environmental adaptability, which can solve the problems of humidity sensitive capacitive temperature and humidity sensors.

在气象观测中，要求温湿度传感器的在-40～60℃区间工作，在该温度变化区间内，空气中水汽浓度变化范围极大，在-40℃时，饱和水汽浓度不足200ppm(相对湿度为100％RH时),在60℃时，饱和水汽浓度超过24万ppm(相对湿度为100％RH时),60℃时饱和水汽浓度为-40℃时的1300多倍，这给激光湿度传感器的全量程测量带来了挑战。In meteorological observations, the temperature and humidity sensors are required to work in the range of -40 to 60 °C. In this temperature change range, the water vapor concentration in the air varies greatly. At -40 °C, the saturated water vapor concentration is less than 200ppm (relative humidity is 100% RH), at 60°C, the saturated water vapor concentration exceeds 240,000 ppm (when the relative humidity is 100% RH), and the saturated water vapor concentration at 60°C is more than 1300 times that at -40°C, which gives the laser humidity sensor the Full-scale measurements present challenges.

目前水汽分析仪为采用一个激光器进行全量程测量，这种方式在-40～60℃范围内进行全量程测量时会遇到严重的挑战。在低温区间，为了提高水汽浓度的检测精度和检测灵敏度，需采用水汽光谱的强吸收线，并结合多次反射吸收池才能实现低温区间的水汽浓度高精度测量。在高温区间(比如60℃)，饱和水汽浓度达到二十多万ppm，水汽吸收非常强，会出现吸收饱和现象，此时需降低吸收谱线强度和吸收路径长度。对于单一激光器来说，无法实现低温区间和高温区间水汽检测精度和检测灵敏度的兼顾。At present, the water vapor analyzer uses a laser to perform full-scale measurement. This method will encounter serious challenges when performing full-scale measurement in the range of -40 to 60 °C. In the low temperature range, in order to improve the detection accuracy and detection sensitivity of water vapor concentration, it is necessary to use the strong absorption line of the water vapor spectrum and combine with multiple reflection absorption cells to achieve high-precision measurement of water vapor concentration in the low temperature range. In the high temperature range (such as 60°C), the saturated water vapor concentration reaches more than 200,000 ppm, the water vapor absorption is very strong, and the absorption saturation phenomenon will occur. At this time, it is necessary to reduce the intensity of the absorption spectrum and the length of the absorption path. For a single laser, it is impossible to achieve both the detection accuracy and detection sensitivity of water vapor in the low temperature range and the high temperature range.

发明内容SUMMARY OF THE INVENTION

为解决上述技术问题，本发明提供了一种利用双激光器进行水汽浓度检测的装置及方法，两激光器共用同一套光路系统，可以实现低温区间和高温区间水汽浓度检测量程和检测分辨率的兼顾，可以提高设备的全量程适用性。In order to solve the above-mentioned technical problems, the present invention provides a device and method for detecting water vapor concentration by using dual lasers. The full-scale applicability of the device can be improved.

为达到上述目的，本发明的技术方案如下：For achieving the above object, technical scheme of the present invention is as follows:

一种利用双激光器进行水汽浓度检测的装置，包括装置壳体，所述装置壳体内设置硬件电路板，所述装置壳体上下两端侧面分别连接发射端壳体和接收端壳体，所述发射端壳体内 设置第一激光器、第二激光器、第一透镜和第二透镜，所述发射端壳体表面设置第一反射镜，所述第一反射镜上开设第一透光孔和第二透光孔；所述接收端壳体内设置第一光电探测器和第二光电探测器，所述接收端壳体表面设置第二反射镜，所述第二反射镜上开设第三透光孔和第四透光孔，所述第一反射镜和第二反射镜正对；所述第一激光器、第一透镜、第一透光孔、第三透光孔和第一光电探测器位于一条直线上，所述第一激光器发出的激光经第一透镜、第一透光孔、直接由第三透光孔出射，到达第一光电探测器；所述第二激光器发出的激光经第二透镜、第二透光孔，在第一反射镜和第二反射镜之间多次反射后，由第四透光孔出射，到达第二光电探测器；所述第一激光器为近红外波段激光器，所述第二激光器为中红外波段激光器。A device for detecting water vapor concentration using dual lasers, comprising a device casing, a hardware circuit board is arranged in the device casing, the upper and lower ends of the device casing are respectively connected to a transmitter casing and a receiving end casing, the A first laser, a second laser, a first lens and a second lens are arranged in the transmitting end casing, a first reflecting mirror is disposed on the surface of the transmitting end casing, and a first light-transmitting hole and a second light-transmitting mirror are provided on the first reflecting mirror a light transmission hole; a first photodetector and a second photodetector are arranged in the receiving end housing, a second reflection mirror is arranged on the surface of the receiving end housing, and a third light transmission hole and The fourth light-transmitting hole, the first reflecting mirror and the second reflecting mirror are facing each other; the first laser, the first lens, the first light-transmitting hole, the third light-transmitting hole and the first photodetector are located in a straight line On the other hand, the laser light emitted by the first laser passes through the first lens, the first light-transmitting hole, and directly exits the third light-transmitting hole, and reaches the first photodetector; the laser light emitted by the second laser passes through the second lens, The second light-transmitting hole, after multiple reflections between the first reflecting mirror and the second reflecting mirror, emerges from the fourth light-transmitting hole and reaches the second photodetector; the first laser is a near-infrared band laser, so The second laser is a mid-infrared band laser.

上述方案中，所述第一透光孔位于第一反射镜的中心位置，所述第三透光孔位于第二反射镜的中心位置。In the above solution, the first light-transmitting hole is located at the center of the first reflector, and the third light-transmitting hole is located at the center of the second reflector.

进一步的技术方案中，所述第二透光孔位于第一反射镜的边缘，所述第四透光孔位于第二反射镜的边缘。In a further technical solution, the second light-transmitting hole is located at the edge of the first reflecting mirror, and the fourth light-transmitting hole is located at the edge of the second reflecting mirror.

上述方案中，所述第一激光器、第二激光器、第一光电探测器和第二光电探测器均与硬件电路板电连接。In the above solution, the first laser, the second laser, the first photodetector and the second photodetector are all electrically connected to the hardware circuit board.

上述方案中，所述发射端外壳和接收端外壳之间连接筒状的烧结网，所述烧结网位于第一反射镜和第二反射镜边缘外侧。In the above solution, a cylindrical sintered mesh is connected between the transmitter housing and the receiver housing, and the sintered mesh is located outside the edges of the first reflector and the second reflector.

一种利用双激光器进行水汽浓度检测的方法，采用上述的装置，在高温区间，第一激光器工作，其发出的激光由第一透镜汇聚后，从第一透光孔进入开放吸收光路，激光由第三透光孔出射，由第一光电探测器接收，由硬件电路板根据环境中水汽浓度对吸收谱线的吸收程度计算环境中的水汽浓度；在低温区间，第二激光器工作，其发出的激光由第二透镜汇聚后，从第二透光孔进入开放吸收光路，激光在第一反射镜和第二反射镜之间多次反射，最终由第四透光孔出射，由第二光电探测器接收，由硬件电路板根据环境中水汽浓度对吸收谱线的吸收程度计算环境中的水汽浓度；在高温和低温之间的过渡区间，第一激光器和第二激光器同时工作，利用输出的水汽浓度的均值作为系统输出。A method for detecting water vapor concentration using dual lasers, using the above-mentioned device, in a high temperature range, the first laser works, the laser light emitted by the first laser is converged by the first lens, and then enters the open absorption light path from the first light-transmitting hole, and the laser light is emitted by the first light transmission hole. The output from the third light-transmitting hole is received by the first photodetector, and the water vapor concentration in the environment is calculated by the hardware circuit board according to the absorption degree of the water vapor concentration in the environment to the absorption spectrum line; in the low temperature range, when the second laser works, it emits After the laser is converged by the second lens, it enters the open absorption light path from the second light-transmitting hole, and the laser is reflected multiple times between the first reflecting mirror and the second reflecting mirror, and finally exits from the fourth light-transmitting hole, which is detected by the second photoelectric The water vapor concentration in the environment is calculated by the hardware circuit board according to the absorption degree of the water vapor concentration in the environment to the absorption spectrum line; in the transition interval between high temperature and low temperature, the first laser and the second laser work at the same time, using the output water vapor The mean value of the concentration is used as the system output.

上述方案中，所述高温区间为温度大于5℃的温度区间，所述低温区间为温度小于-5℃的温度区间，所述过渡区间为温度在-5～5℃的温度区间。In the above solution, the high temperature range is a temperature range where the temperature is greater than 5°C, the low temperature range is a temperature range where the temperature is less than -5°C, and the transition range is a temperature range where the temperature is -5°C to 5°C.

通过上述技术方案，本发明提供的利用双激光器进行水汽浓度检测的装置及方法具有如下有益效果：Through the above technical solutions, the device and method for detecting water vapor concentration using dual lasers provided by the present invention have the following beneficial effects:

1、本发明采用双激光器的方式，两激光器共用同一套光路系统，可以实现低温区间和高 温区间水汽检测量程和检测分辨率的兼顾，可以提高设备的全量程适用性。1. The present invention adopts the mode of dual lasers, and the two lasers share the same optical path system, which can realize the consideration of the water vapor detection range and detection resolution in the low temperature interval and the high temperature interval, and can improve the full-scale applicability of the equipment.

2、本发明在高温区，采用近红外激光器，可以避免出现高温环境水汽吸收饱和的问题；在低温区，采用中红外激光器，且光路为多次反射，可以提高水汽吸收强度；在过渡区间近红外激光器和中红外激光器同时工作，利用输出的水汽浓度的均值做系统输出，可以提高测量精度。2. The present invention adopts near-infrared laser in high temperature region, which can avoid the problem of water vapor absorption saturation in high temperature environment; in low temperature region, adopts mid-infrared laser, and the optical path is multiple reflections, which can improve the water vapor absorption intensity; The infrared laser and the mid-infrared laser work at the same time, and the average value of the output water vapor concentration is used as the system output, which can improve the measurement accuracy.

3、本发明启用过渡区间，激光器切换时，系统不需要预热时间，可以实现激光湿度的高速测量。3. The present invention enables the transition interval. When the laser is switched, the system does not need a warm-up time, and the high-speed measurement of the laser humidity can be realized.

4、本发明的激光器、光电探测器以及透光孔的位置设置，可以保证两激光器的激光不会产生混扰，两激光器可共用同一光路系统。4. The position setting of the laser, the photodetector and the light-transmitting hole of the present invention can ensure that the laser light of the two lasers will not be disturbed, and the two lasers can share the same optical path system.

5、本发明在装置壳体以及装置壳体上下两端侧面的发射端壳体和接收端壳体的位置设置，可以有效缩短激光器、光电探测器到硬件电路板线缆的长度，减少噪声的引入，可提高信噪比。5. The present invention is arranged at the position of the device casing and the transmitter casing and the receiver casing on the upper and lower ends of the device casing, which can effectively shorten the length of the cable from the laser, the photodetector to the hardware circuit board, and reduce noise. Introduced to improve the signal-to-noise ratio.

6、本发明在发射端外壳和接收端外壳之间连接筒状的烧结网，能够起到阻止灰尘污染反射镜的作用，有助于提高测量精度，延长使用寿命。6. In the present invention, a cylindrical sintered mesh is connected between the outer casing of the transmitting end and the outer casing of the receiving end, which can prevent dust from contaminating the reflector, help to improve the measurement accuracy and prolong the service life.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍。In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that are required in the description of the embodiments or the prior art.

图1为本发明实施例所公开的一种利用双激光器进行水汽浓度检测的装置示意图；1 is a schematic diagram of a device for detecting water vapor concentration using dual lasers disclosed in an embodiment of the present invention;

图2为本发明实施例所公开的烧结网示意图；2 is a schematic diagram of a sintered mesh disclosed in an embodiment of the present invention;

图3为本发明实施例所公开的第一反射镜示意图；3 is a schematic diagram of a first reflecting mirror disclosed in an embodiment of the present invention;

图4为本发明实施例所公开的第二反射镜示意图。FIG. 4 is a schematic diagram of a second reflecting mirror disclosed in an embodiment of the present invention.

图中，1、装置壳体；2、发射端壳体；3、接收端壳体；4、硬件电路板；5、第一激光器；6、第二激光器；7、第一透镜；8、第二透镜；9、第一反射镜；10、第一透光孔；11、第二透光孔；12、第一光电探测器；13、第二光电探测器；14、第二反射镜；15、第三透光孔；16、第四透光孔；17、烧结网；18、电缆；19、光斑。In the figure, 1, the device housing; 2, the transmitter housing; 3, the receiver housing; 4, the hardware circuit board; 5, the first laser; 6, the second laser; 7, the first lens; 8, the first Two lenses; 9. The first reflector; 10. The first light-transmitting hole; 11. The second light-transmitting hole; 12. The first photodetector; 13. The second photodetector; 14. The second mirror; 15 , the third light-transmitting hole; 16, the fourth light-transmitting hole; 17, the sintered mesh; 18, the cable; 19, the light spot.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

本发明提供了一种利用双激光器进行水汽浓度检测的装置，如图1所示，包括装置壳体1，装置壳体1内设置硬件电路板4，装置壳体1上下两端侧面分别连接发射端壳体2和接收端壳体3，发射端壳体2内设置第一激光器5、第二激光器6、第一透镜7和第二透镜8，发射端壳体2表面设置第一反射镜9，第一反射镜9上开设第一透光孔10和第二透光孔11；接收端壳体3内设置第一光电探测器12和第二光电探测器13，接收端壳体3表面设置第二反射镜14，第二反射镜14上开设第三透光孔15和第四透光孔16，第一反射镜9和第二反射镜14正对。The present invention provides a device for detecting water vapor concentration by using dual lasers. As shown in FIG. 1 , it includes a device housing 1, a hardware circuit board 4 is arranged in the device housing 1, and the upper and lower ends of the device housing 1 are respectively connected to transmit The end housing 2 and the receiving end housing 3, the first laser 5, the second laser 6, the first lens 7 and the second lens 8 are arranged in the transmitting end housing 2, and the first reflecting mirror 9 is arranged on the surface of the transmitting end housing 2 , the first reflection mirror 9 is provided with a first light-transmitting hole 10 and a second light-transmitting hole 11; the receiving end housing 3 is provided with a first photodetector 12 and a second photodetector 13, and the receiving end housing 3 The second reflecting mirror 14 has a third light-transmitting hole 15 and a fourth light-transmitting hole 16 on the second reflecting mirror 14, and the first reflecting mirror 9 and the second reflecting mirror 14 are facing each other.

第一激光器5、第二激光器6、第一光电探测器12和第二光电探测器13均与硬件电路板4电连接，装置壳体1外接电缆18。本实施例中，装置壳体1为长方体结构，发射端壳体2和接收端壳体3为圆柱形结构，该种机械结构，能够有效缩短激光器、光电探测器到硬件电路板4的线缆长度，减少噪声的引入，可提高信噪比。The first laser 5 , the second laser 6 , the first photodetector 12 and the second photodetector 13 are all electrically connected to the hardware circuit board 4 , and the device casing 1 is connected to a cable 18 . In this embodiment, the device housing 1 is a cuboid structure, and the transmitting end housing 2 and the receiving end housing 3 are cylindrical structures. This mechanical structure can effectively shorten the cables from the laser and the photodetector to the hardware circuit board 4 length, reducing the introduction of noise and improving the signal-to-noise ratio.

如图3和图4所示，第一透光孔10位于第一反射镜9的中心位置，第三透光孔15位于第二反射镜14的中心位置，第一激光器5、第一透镜7、第一透光孔10、第三透光孔15和第一光电探测器12位于一条直线上，第一激光器5发出的激光经第一透镜7、第一透光孔10、直接由第三透光孔15出射，到达第一光电探测器12。第二透光孔11位于第一反射镜9的边缘，第四透光孔16位于第二反射镜14的边缘，第二激光器6发出的激光经过第二透镜8、第二透光孔11，在第一反射镜9和第二反射镜14之间多次反射(光斑19如图3和图4所示)后，由第四透光孔16出射，到达第二光电探测器13。近红外激光器透射方式，激光传输在两个反射镜的中心位置，中红外激光器多次反射方式，激光在两个反射镜的边缘附近传输，两激光器的激光不会产生混扰，两激光器可共用同一光路系统。As shown in FIG. 3 and FIG. 4 , the first light-transmitting hole 10 is located at the center of the first reflector 9 , the third light-transmitting hole 15 is located at the center of the second reflector 14 , the first laser 5 , the first lens 7 , the first light-transmitting hole 10, the third light-transmitting hole 15 and the first photodetector 12 are located on a straight line, and the laser light emitted by the first laser 5 passes through the first lens 7, the first light-transmitting hole 10, and directly from the third The light-transmitting hole 15 exits and reaches the first photodetector 12 . The second light-transmitting hole 11 is located at the edge of the first reflecting mirror 9, the fourth light-transmitting hole 16 is located at the edge of the second reflecting mirror 14, and the laser light emitted by the second laser 6 passes through the second lens 8 and the second light-transmitting hole 11, After multiple reflections between the first reflection mirror 9 and the second reflection mirror 14 (the light spot 19 is shown in FIG. 3 and FIG. Near-infrared laser transmission mode, the laser is transmitted at the center of the two mirrors, mid-infrared laser multiple reflection mode, the laser is transmitted near the edge of the two mirrors, the lasers of the two lasers will not produce interference, and the two lasers can be shared the same optical path system.

本实施例中，第一激光器5为近红外波段激光器，第二激光器6为中红外波段激光器。In this embodiment, the first laser 5 is a near-infrared band laser, and the second laser 6 is a mid-infrared band laser.

在对湿度测量响应速度要求不高的应用场合，可以在发射端外壳和接收端外壳之间连接筒状的烧结网17，如图2所示，烧结网17位于第一反射镜9和第二反射镜14边缘外侧，起到阻止灰尘污染反射镜的作用。在对湿度测量响应速度要求较高的应用场合，可以不安装烧结网17，能够快速响应环境中的湿度变化。In applications that do not require high response speed for humidity measurement, a cylindrical sintered mesh 17 can be connected between the transmitter casing and the receiver casing. As shown in FIG. 2 , the sintered mesh 17 is located between the first reflector 9 and the second mirror. The outer edge of the mirror 14 plays the role of preventing dust from contaminating the mirror. In applications that require a high response speed for humidity measurement, the sintered mesh 17 may not be installed, which can quickly respond to changes in humidity in the environment.

一种利用双激光器进行水汽浓度检测的方法，采用上述的装置，在高温区间，第一激光器5(近红外波段激光器)工作，其发出的激光由第一透镜7汇聚后，从第一透光孔10进入开放吸收光路，激光由第三透光孔15出射，由第一光电探测器12接收，由硬件电路板4根据环境中水汽浓度对吸收谱线的吸收程度计算环境中的水汽浓度；在低温区间，第二激光器6(中红外波段激光器)工作，其发出的激光由第二透镜8汇聚后，从第二透光孔11进入开 放吸收光路，激光在第一反射镜9和第二反射镜14之间多次反射，最终由第四透光孔16出射，由第二光电探测器13接收(激光在第一反射镜9和第二反射镜14之间的反射次数，可以通过改变入射角度和调整两反射镜之间的距离来改变)，由硬件电路板4根据环境中水汽浓度对吸收谱线的吸收程度计算环境中的水汽浓度；在高温和低温之间的过渡区间，第一激光器5和第二激光器6同时工作，利用输出的水汽浓度的均值作为系统输出。A method for detecting water vapor concentration using dual lasers, using the above-mentioned device, in the high temperature range, the first laser 5 (near-infrared band laser) works, and the laser light emitted by it is converged by the first lens 7. The hole 10 enters the open absorption light path, the laser light is emitted from the third light-transmitting hole 15, received by the first photodetector 12, and the water vapor concentration in the environment is calculated by the hardware circuit board 4 according to the degree of absorption of the absorption spectrum by the water vapor concentration in the environment; In the low temperature range, the second laser 6 (mid-infrared band laser) works, the laser light emitted by it is converged by the second lens 8, and then enters the open absorption light path from the second light-transmitting hole 11. After multiple reflections between the mirrors 14, it is finally emitted by the fourth light-transmitting hole 16 and received by the second photodetector 13 (the number of reflections of the laser light between the first mirror 9 and the second mirror 14 can be changed by changing the Incident angle and adjusting the distance between the two mirrors), the water vapor concentration in the environment is calculated by the hardware circuit board 4 according to the absorption degree of the water vapor concentration in the environment to the absorption spectrum line; in the transition range between high temperature and low temperature, the first The first laser 5 and the second laser 6 work simultaneously, and the average value of the output water vapor concentration is used as the system output.

其中，高温区间为温度大于5℃的温度区间，低温区间为温度小于-5℃的温度区间，过渡区间为温度在-5～5℃的温度区间。启用过渡区间，激光器在切换时，系统不需要预热时间，可以实现激光湿度的高速测量。Among them, the high temperature range is the temperature range where the temperature is greater than 5°C, the low temperature range is the temperature range where the temperature is less than -5°C, and the transition range is the temperature range where the temperature is between -5°C and 5°C. When the transition interval is enabled, when the laser is switched, the system does not need warm-up time, which can realize high-speed measurement of laser humidity.

对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments enables any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (7)

一种利用双激光器进行水汽浓度检测的装置，其特征在于，包括装置壳体，所述装置壳体内设置硬件电路板，所述装置壳体上下两端侧面分别连接发射端壳体和接收端壳体，所述发射端壳体内设置第一激光器、第二激光器、第一透镜和第二透镜，所述发射端壳体表面设置第一反射镜，所述第一反射镜上开设第一透光孔和第二透光孔；所述接收端壳体内设置第一光电探测器和第二光电探测器，所述接收端壳体表面设置第二反射镜，所述第二反射镜上开设第三透光孔和第四透光孔，所述第一反射镜和第二反射镜正对；所述第一激光器、第一透镜、第一透光孔、第三透光孔和第一光电探测器位于一条直线上，所述第一激光器发出的激光经第一透镜、第一透光孔、直接由第三透光孔出射，到达第一光电探测器；所述第二激光器发出的激光经第二透镜、第二透光孔，在第一反射镜和第二反射镜之间多次反射后，由第四透光孔出射，到达第二光电探测器；所述第一激光器为近红外波段激光器，所述第二激光器为中红外波段激光器。A device for detecting water vapor concentration using dual lasers is characterized in that it includes a device casing, a hardware circuit board is arranged in the device casing, and the upper and lower ends of the device casing are respectively connected to the transmitting end casing and the receiving end casing. A first laser, a second laser, a first lens and a second lens are arranged in the transmitting end casing, a first reflecting mirror is disposed on the surface of the transmitting end casing, and a first light-transmitting mirror is provided on the first reflecting mirror A first photodetector and a second photodetector are arranged in the receiving end housing, a second reflection mirror is arranged on the surface of the receiving end housing, and a third reflection mirror is provided on the second reflection mirror. a light-transmitting hole and a fourth light-transmitting hole, the first reflecting mirror and the second reflecting mirror are facing each other; the first laser, the first lens, the first light-transmitting hole, the third light-transmitting hole and the first photodetector The detector is located on a straight line, and the laser light emitted by the first laser is emitted through the first lens, the first light-transmitting hole, and the third light-transmitting hole directly, and reaches the first photodetector; the laser light emitted by the second laser is The second lens and the second light-transmitting hole, after multiple reflections between the first reflecting mirror and the second reflecting mirror, are emitted from the fourth light-transmitting hole and reach the second photodetector; the first laser is near-infrared band laser, the second laser is a mid-infrared band laser. 根据权利要求1所述的一种利用双激光器进行水汽浓度检测的装置，其特征在于，所述第一透光孔位于第一反射镜的中心位置，所述第三透光孔位于第二反射镜的中心位置。A device for detecting water vapor concentration using dual lasers according to claim 1, wherein the first light-transmitting hole is located at the center of the first reflector, and the third light-transmitting hole is located at the second reflector the center of the mirror. 根据权利要求1或2所述的一种利用双激光器进行水汽浓度检测的装置，其特征在于，所述第二透光孔位于第一反射镜的边缘，所述第四透光孔位于第二反射镜的边缘。A device for detecting water vapor concentration using dual lasers according to claim 1 or 2, wherein the second light-transmitting hole is located at the edge of the first reflector, and the fourth light-transmitting hole is located at the second edge of the mirror. 根据权利要求1所述的一种利用双激光器进行水汽浓度检测的装置，其特征在于，所述第一激光器、第二激光器、第一光电探测器和第二光电探测器均与硬件电路板电连接。A device for detecting water vapor concentration using dual lasers according to claim 1, wherein the first laser, the second laser, the first photodetector and the second photodetector are all electrically connected to the hardware circuit board. connect. 根据权利要求1所述的一种利用双激光器进行水汽浓度检测的装置，其特征在于，所述发射端外壳和接收端外壳之间连接筒状的烧结网，所述烧结网位于第一反射镜和第二反射镜边缘外侧。A device for detecting water vapor concentration using dual lasers according to claim 1, wherein a cylindrical sintered mesh is connected between the transmitter housing and the receiver housing, and the sintered mesh is located on the first reflecting mirror. and outside the edge of the second mirror. 一种利用双激光器进行水汽浓度检测的方法，采用如权利要求1所述的装置，其特征在于，在高温区间，第一激光器工作，其发出的激光由第一透镜汇聚后，从第一透光孔进入开放吸收光路，激光由第三透光孔出射，由第一光电探测器接收，由硬件电路板根据环境中水汽浓度对吸收谱线的吸收程度计算环境中的水汽浓度；在低温区间，第二激光器工作，其发出的激光由第二透镜汇聚后，从第二透光孔进入开放吸收光路，激光在第一反射镜和第二反射镜之间多次反射，最终由第四透光孔出射，由第二光电探测器接收，由硬件电路板根据环境中水汽浓度对吸收谱线的吸收程度计算环境中的水汽浓度；在高温和低温之间的过渡区间，第一激光器和第二激光器同时工作，利用输出的水汽浓度的均值作为系统输出。A method for detecting water vapor concentration using dual lasers, using the device as claimed in claim 1, characterized in that, in a high temperature range, the first laser works, and after the laser light emitted by the first laser is converged by the first lens, it is transmitted from the first transparent The light hole enters the open absorption light path, and the laser light is emitted from the third light-transmitting hole and received by the first photodetector. , the second laser works, the laser light emitted by it is converged by the second lens, enters the open absorption light path from the second light-transmitting hole, and the laser is reflected multiple times between the first reflecting mirror and the second reflecting mirror, and is finally transmitted by the fourth reflecting mirror. The light hole exits and is received by the second photodetector, and the water vapor concentration in the environment is calculated by the hardware circuit board according to the absorption degree of the water vapor concentration in the environment to the absorption spectrum; The two lasers work at the same time, and the average value of the output water vapor concentration is used as the system output. 根据权利要求6所述的一种利用双激光器进行水汽浓度检测的方法，其特征在于，所 述高温区间为温度大于5℃的温度区间，所述低温区间为温度小于-5℃的温度区间，所述过渡区间为温度在-5～5℃的温度区间。The method for detecting water vapor concentration using dual lasers according to claim 6, wherein the high temperature range is a temperature range with a temperature greater than 5°C, and the low temperature range is a temperature range with a temperature less than -5°C, The transition interval is a temperature interval in which the temperature is between -5°C and 5°C.
PCT/CN2021/085781 2021-02-22 2021-04-07 Device and method for detecting vapor concentration using dual lasers Ceased WO2022174504A1 (en)

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