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WO2022174485A1 - Spectrometer detection device - Google Patents

Spectrometer detection device Download PDF

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Publication number
WO2022174485A1
WO2022174485A1 PCT/CN2021/081722 CN2021081722W WO2022174485A1 WO 2022174485 A1 WO2022174485 A1 WO 2022174485A1 CN 2021081722 W CN2021081722 W CN 2021081722W WO 2022174485 A1 WO2022174485 A1 WO 2022174485A1
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WO
WIPO (PCT)
Prior art keywords
laser
sample stage
ccd detector
detection device
optical lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2021/081722
Other languages
French (fr)
Chinese (zh)
Inventor
林仕伟
符坚
周义龙
陈宝
陈汉德
林正玺
王玲转
林慧媛
符智豪
黄修彩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hainan Unican Science And Technology Innovation Institute CoLtd
Original Assignee
Hainan Unican Science And Technology Innovation Institute CoLtd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hainan Unican Science And Technology Innovation Institute CoLtd filed Critical Hainan Unican Science And Technology Innovation Institute CoLtd
Priority to AU2021232690A priority Critical patent/AU2021232690B2/en
Publication of WO2022174485A1 publication Critical patent/WO2022174485A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N21/658Raman scattering enhancement Raman, e.g. surface plasmons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation

Definitions

  • the present application relates to the field of detection, in particular to a spectrometer detection device.
  • Raman spectroscopy refers to the analysis and identification of material types by analyzing the scattering spectrum of incident light irradiated on the material.
  • Raman detector is a device that uses Raman spectroscopy to analyze the composition and type of substances.
  • the incident light provided by the Raman detector is used to irradiate the detected substance, so that the detected substance emits scattered light with a frequency different from the incident light. The shift in the Raman spectrum of light to determine the composition and species of the detected substance.
  • the scattered light emitted by the substance to be detected includes both Raman scattered light and Rayleigh scattered light, and the spectral lines of the aforementioned Raman scattered light are very different from those of the Rayleigh scattered light Therefore, it is difficult to accurately detect the spectrum of Raman scattered light, resulting in low precision and low sensitivity of the Raman detector.
  • the purpose of the present application is to provide a spectrometer detection device, which can improve detection accuracy and sensitivity.
  • the present application provides a spectrometer detection device, comprising a laser, a sample stage, a CCD detector and a cooling drier set next to the CCD detector; A first optical lens assembly for transmitting the laser light of the laser to the sample to be tested on the sample stage; between the sample stage and the CCD detector, there is an optical signal used to transmit the sample to be tested a second optical lens assembly delivered to the CCD detector;
  • the surface of the sample stage is provided with a precious metal nano-coating
  • a concave reflective mirror is provided on a side of the sample stage away from the first optical lens assembly and the second optical lens assembly.
  • the sample stage is provided with a temperature sensor and a temperature compensator.
  • the noble metal nano-coating is specifically an Au coating or an Ag coating.
  • the laser is specifically a semiconductor laser for providing laser light with a wavelength of 780 nm.
  • the cooling dryer includes a semiconductor refrigeration sheet and a desiccant.
  • the CCD detector, the desiccant and the cold end of the semiconductor refrigeration sheet are all arranged in the transparent sealed box body, and the hot end of the semiconductor refrigeration sheet is arranged in the
  • the transparent sealing box is outside the body; the desiccant is specifically color-changing silica gel.
  • the first optical lens assembly includes a band-pass filter, a reflector and a plano-convex lens; the surface of the reflector is a total reflection surface; and an anti-reflection film is provided on the surface of the plano-convex lens.
  • the second optical lens assembly includes a fiber collimating lens, a holographic band-stop filter and a beam splitter; the center wavelength of the holographic band-stop filter is equal to the wavelength of the laser light provided by the laser.
  • the spectrometer detection device includes a laser, a CCD detector, a sample stage and a cooling dryer arranged next to the CCD detector; the surface of the sample stage is provided with a precious metal nano-coating, and one side of the sample stage is There is a concave mirror, and the concave mirror is located on the side of the sample stage away from the first optical lens and the second optical lens.
  • the laser can provide laser light with a specific wavelength to the outside world; the sample to be tested is placed on the noble metal nano-coating layer of the sample stage.
  • a first optical lens assembly for transmitting the laser light of the laser to the sample to be tested on the sample stage is arranged between the laser and the sample stage; The light signal emitted by the sample to be tested is transmitted to the second optical lens assembly of the CCD detector.
  • the laser light emitted by the laser is sequentially focused to the sample stage through a plurality of mirrors of the first optical lens assembly, and the sample to be tested on the sample stage is illuminated by the laser to generate Raman scattering light and Rayleigh scattering.
  • the aforementioned optical signal generated by the sample to be tested is processed by the second optical lens assembly and transmitted to the CCD detector, so that the Raman scattered light in the optical signal is analyzed by the CCD detector to analyze the components of the sample to be tested.
  • the spectrometer detection device utilizes the noble metal nano-coating and concave mirror on the surface of the sample stage to enhance the light intensity of the Raman scattered rays transmitted from the sample stage to the second optical lens assembly, while cooling and drying
  • the detector can improve the detection accuracy of the CCD detector by improving the signal-to-noise ratio of the CCD detector.
  • the spectrometer detection device provided by the present application can improve the detection accuracy and sensitivity of the sample to be tested.
  • FIG. 1 is a structural block diagram of a spectrometer detection device provided by an embodiment of the application.
  • FIG. 2 is a schematic structural diagram of a spectrometer detection device provided by an embodiment of the present application.
  • FIG. 1 is a structural block diagram of a spectrometer detection device provided by an embodiment of the present application
  • FIG. 2 is a schematic structural diagram of a spectrometer detection device provided by an embodiment of the present application.
  • the present application provides a spectrometer detection device, including a laser 1, a sample stage 2, a CCD detector 3 and a cooling dryer.
  • the sample to be tested is placed on the sample stage 2, and the laser 1 is used to emit laser light to the sample to be tested on the sample stage 2, so that the sample to be tested can emit light signals such as scattered light under the laser irradiation;
  • the CCD detector 3 is located on the sample stage 2. One side is used to receive and detect the light signal emitted by the sample to be tested.
  • the cooling dryer is disposed adjacent to the CCD detector 3 for cooling and drying the CCD detector 3 .
  • a first optical lens assembly is provided between the laser 1 and the sample stage 2
  • a second optical lens assembly is provided between the sample stage 2 and the CCD detector 3 .
  • the first optical lens assembly is used to transmit the laser light emitted by the laser 1 to the sample to be tested on the sample stage; the second optical lens assembly is used to transmit the light signal emitted by the sample to be tested to the CCD detector 3 .
  • the first optical lens assembly and the second optical lens assembly can be formed by using optical lenses such as lenses and reflective lenses.
  • optical lenses such as lenses and reflective lenses.
  • the setting should be based on The test requirements of the sample to be tested and the structural parameters and relative positional relationship settings of the laser 1 , the sample stage 2 and the CCD detector 3 .
  • the sample stage 2 is a mirror structure.
  • the surface of the sample stage 2 is provided with a noble metal nano-coating, including but not limited to Ag nano-coating.
  • the noble metal nano-coating layer is used to enhance the light signal emitted by the sample to be tested under laser irradiation, especially the Raman scattered light in the light signal.
  • One side of the sample stage 2 is provided with a concave mirror 4 .
  • the concave mirror 4 is provided on the side of the sample stage 2 away from the first optical lens assembly and the second optical lens assembly .
  • the concave mirror 4 can be located on the opposite side of the sample to be tested.
  • the concave mirror 4 can be located at the bottom of the sample stage 2, including but not limited to being located on the sample stage 2.
  • the bottom surface or the bottom surface and the peripheral side of the sample stage 2 are examples of the concave mirror 4 .
  • the CCD detector 3 can be connected with a collection circuit for converting the optical signal collected by the CCD detector 3 into an electrical signal, so as to analyze the composition of the sample to be tested according to the electrical signal.
  • the spectrometer detection device refrigerates and dries the CCD detector 3 through a cooling dryer.
  • the laser light emitted by the laser 1 is sequentially focused to the sample stage 2 through a plurality of mirrors of the first optical lens assembly, and the sample to be tested on the sample stage 2 is pulled under the irradiation of the laser.
  • Light signals such as Mann scattered light and Rayleigh scattered light
  • the light signal generated by the sample to be tested is processed by the second optical lens assembly and transmitted to the CCD detector 3, and then the Raman in the light signal is analyzed by the CCD detector 3. Scatters light to analyze the composition of the sample to be tested.
  • the noble metal nano-coating on the surface of the sample stage 2 enhances the light intensity of the Raman scattered rays transmitted by the sample stage 2 to the second optical lens assembly; the concave mirror 4 can gather the sample to be tested The Raman scattered light and Rayleigh scattered light generated under the laser and scattered around are reflected into the scattered light path where the second optical lens is located to further enhance the intensity of the Raman scattered light; the cooling dryer can reduce the CCD detector by lowering the intensity of the Raman scattered light. 3 ways to improve the signal-to-noise ratio of the CCD detector 3.
  • the precious metal nano-coating, the concave mirror 4 and the cooling dryer can gradually improve the detection quality of the Raman scattered light generated by the CCD detector 3 during the light transmission process of the spectrometer detection device.
  • the detection precision and sensitivity of the sample to be tested by the spectrometer detection device are improved.
  • the sample stage 2 is provided with a temperature sensor for monitoring the temperature of the sample stage 2 in real time and a temperature compensator for adjusting the temperature of the sample stage 2 .
  • the temperature compensator can be a device with a temperature adjustment function in the prior art, can be a device with both heating and cooling functions, or can be specifically set as a heating device according to the temperature change trend of the sample stage 2 during actual use or refrigeration unit.
  • the spectrometer detection device adjusts the temperature of the sample stage 2 and the sample to be tested in real time through a temperature sensor and a temperature compensator, so as to ensure the detection accuracy of the spectrometer detection device of the sample to be tested.
  • the noble metal nano-coating on the surface of the sample stage 2 it can be specifically set as Au coating or Ag coating.
  • the Au coating layer or the Ag coating layer can be disposed on the surface of the sample stage 2 by means of evaporation, so as to enhance the Raman scattered light generated by the sample to be tested under laser irradiation.
  • the laser 1 used in the present application can be specifically configured as a semiconductor laser for providing laser light with a wavelength of 780 nm. Therefore, the wavelength of the laser light emitted by the semiconductor laser is 785nm. After the laser light irradiates the sample to be tested, the wavelength of the Raman scattered light generated by the sample to be tested is 160-3150 nm. The Raman scattered light in this range is beneficial to the second optical lens assembly. The transfer and detection of the CCD detector 3.
  • the semiconductor laser can be driven by a constant current power supply, so that the semiconductor laser can generate laser light with stable light intensity.
  • the semiconductor refrigeration sheet 7 and a desiccant may be included.
  • the semiconductor refrigeration sheet 7 is used to cool the CCD detector 3 ; the desiccant is used to absorb the condensed water produced by the temperature difference between the inside and outside of the CCD detector 3 , so as to prevent the condensed water from interfering with the detection operation of the CCD detector 3 .
  • the spectrometer detection device provided in this application further includes a transparent sealed box 8 .
  • the CCD detector 3, the desiccant and the cold end of the semiconductor refrigeration sheet 7 are all arranged in the transparent sealing box 8; the hot end of the semiconductor refrigeration sheet 7 is arranged outside the transparent sealing box 8; the desiccant Specifically, it is color-changing silica gel 9.
  • the transparent sealing box 8 combined with the color-changing silica gel 9 can not only absorb the moisture in the CCD detector 3 in a timely and effective manner, but also replace the color-changing silica gel 9 according to the color of the color-changing silica gel 9 in time, so as to ensure that the color-changing silica gel 9 can detect the CCD.
  • the drying ability of the CCD detector 3 is improved, so that the CCD detector 3 can always operate in a dry environment, and the detection accuracy of the CCD detector 3 is improved.
  • the transparent sealed box body 8 combined with the semiconductor refrigeration sheet 7 can cool the CCD detector 3 , so that the CCD detector 3 can be stably maintained at a lower temperature such as -20° C., thereby improving the signal-to-noise of the CCD detector 3 ratio, improve the detection accuracy of the CCD detector 3,
  • the color-changing silica gel 9 as a desiccant can be arranged at the bottom of the transparent sealed box body 8; the semiconductor refrigeration sheet 7 can be arranged in the middle of the transparent sealed box body 8, and the cold end of the semiconductor refrigeration sheet 7 can be sealed and fixed to the transparent sealed box body 8, while the hot end of the semiconductor refrigeration sheet 7 passes through the closed box and is located outside the box.
  • the outside of the hot end of the semiconductor refrigeration sheet 7 can be wrapped with a water bag for heat dissipation, and the material of the water bag is a heat-resistant material with strong thermal conductivity.
  • the driving circuit of the CCD detector 3 connected to the CCD detector 3 controls the CCD detector 3 to detect the light intensity of the Raman scattered light in the scattered light. , and convert this optical signal into an analog electrical signal, and then filter, amplify and convert the analog electrical signal into a digital signal, and conduct data analysis by the processing chip of the CCD detector 3 to obtain the composition of the sample to be tested.
  • the CCD detector 3 can also be connected to a transmission module and a storage module for realizing data transmission and storage.
  • the data of the CCD detector 3 and its results are uploaded to the cloud through the Wi-Fi transmission module, so that the mobile terminal such as a mobile phone can obtain the data information in the cloud and view and analyze the data information.
  • the above-mentioned CCD detector 3 cools the CCD detector 3 through the semiconductor refrigeration sheet 7, and dries the CCD detector 3 through the color-changing silica gel 9, so the Raman scattering generated by the sample to be tested by the CCD detector 3 can be greatly improved Light sensitivity to improve detection precision and accuracy.
  • the first optical lens assembly includes a band-pass filter 51, a reflector 52 and a plano-convex lens 53; the surface of the reflector 52 is a total reflection surface.
  • the bandpass filter 51 can filter sideband spectral components or stray light of the laser light emitted by the laser 1 .
  • the diameter of the bandpass filter 51 can be set to 25 mm, and the center wavelength can be set to 780 nm.
  • the reflector 52 is used to change the direction of the laser light emitted by the laser 1 to the bandpass filter 51 , so that the laser light can be irradiated on the sample to be tested on the sample stage 2 .
  • the reflection mirror 52 can be a flat mirror with total reflection.
  • the angle of the reflection mirror 52 can be specifically set according to the angle of the sample stage 2 and the angle of the laser beam irradiated by the laser 1 to the reflection mirror 52 through the bandpass filter 51 .
  • the plano-convex lens 53 is located between the mirror 52 and the sample stage 2 , and the convex surface of the plano-convex lens 53 faces the sample stage 2 .
  • the focal length of the plano-convex lens 53 is equal to the distance between the plano-convex lens 53 and the sample stage 2 .
  • the plano-convex lens 53 accumulates the laser light emitted via the mirror 52 on the sample stage 2 .
  • the surface of the plano-convex lens 53 is provided with an anti-reflection coating, which can effectively reduce the loss of Raman scattered light caused by reflection on the surface of the plano-convex lens 53.
  • the above-mentioned bandpass filter 51 , reflecting mirror 52 and plano-convex lens 53 form a first optical lens assembly, which is used to realize the transmission of laser light between the laser 1 and the sample stage 2 .
  • the path of the laser light passing between the first optical lens assemblies may be referred to as the excitation light path.
  • the bandpass filter is used to filter out the clutter in the laser light provided by the laser 1
  • the mirror 52 is used to change the route of the laser light
  • the plano-convex lens 53 is used to focus the laser light on the sample stage 2 to realize the laser light
  • the sample to be tested on the sample stage 2 is irradiated, so that the sample to be tested generates scattered rays including Raman scattered light and Rayleigh scattered light.
  • the width of the excitation light path can be the diameter of the plano-convex lens 53 , wherein the diameter of the plano-convex lens 53 is any value in the range of 0.5 cm to 5 cm.
  • the second optical lens assembly includes a fiber collimating lens 61 , a holographic band-stop filter 62 and a beam splitter 63 .
  • the fiber collimating lens 61 is a flat lens, and the diameter of the fiber collimating lens 61 can be equal to that of the concave mirror 4 .
  • the fiber collimating lens 61 is located downstream of the sample stage 2 and within the focal length of the concave mirror 4, and is used to disperse the scattering generated by the sample to be tested.
  • the lines pass to the holographic bandstop filter 62 .
  • a holographic band-stop filter can be set behind the fiber collimating lens 61 Light sheet 62.
  • the holographic band-stop filter 62 can use a filter with a center wavelength close to or even equal to the laser wavelength provided by the laser 1, for example, a filter with a center wavelength of 785 nm, to avoid the Raman scattered light caused by a large amount of Rayleigh scattered light in the excitation light path. Interference, play a role in inhibiting Rayleigh scattered light.
  • the beam splitter 63 is located behind the holographic band-stop filter 62, and can be specifically configured as a cable-type beam splitter.
  • the fiber optic beam splitter decomposes the Raman scattered light into light rays of different wavelengths and transmits them to the CCD detector 3 .
  • a cable-type beam splitter may be located at the entrance of the CCD detector 3 , and the scattered light passing through the holographic band-stop filter 62 is decomposed by the cable-type beam splitter and then enters the CCD detector 3 .
  • the above-mentioned optical fiber collimating lens 61, holographic band-stop filter 62 and beam splitter 63 form a second optical lens assembly, which is used to realize the scattered light generated by the sample to be tested between the sample stage 2 and the CCD detector 3. transfer.
  • the path through which the aforementioned scattered light is transmitted between the second optical lens components may be referred to as a scattered light path.
  • the holographic band-stop filter 62 is used to filter the Rayleigh scattering line in the scattered light, and only allows the Raman scattered light to pass through, so as to prevent the Rayleigh scattered light from interfering with the detection operation of the CCD detector 3; the spectroscopic element is used for The Raman scattered light is split, and the Raman scattered light is divided into lights of different wavelengths, which facilitates the detection operation of the CCD detector 3 .
  • the spectrometer detection device may further include a casing disposed on the periphery of the laser 1 , the sample stage 2 , the CCD detector 3 , the first optical lens assembly and the second optical lens assembly.
  • the housing includes a head and a handle, the laser 1 is located at the bottom of the handle of the aforementioned housing, the sample stage 2 is located at the head of the aforementioned housing, and the first optical lens assembly is located in the handle.
  • a laser 1 such as a semiconductor laser generates laser light under the action of a semiconductor laser driving circuit, and the laser light is sequentially transmitted to the first optical lens assembly, the sample stage 2 , the second optical lens assembly and the CCD detector 3 .
  • the operation of the laser 1 , the CCD detector 3 and its refrigeration structure can be controlled by the circuit board 10 in a unified manner.
  • the user can use the mobile terminal and the transmission module to send an instruction to the circuit board 10 to make the circuit board 10 start the laser driving circuit of the laser 1, so that the laser 1 can emit laser light; make the circuit board 10 start the CCD detector driving circuit , to realize the CCD detector 3 to detect and analyze the composition of the sample to be tested; to make the circuit board 10 start the refrigeration drive circuit to realize the cooling of the CCD detector 3 by the semiconductor refrigeration sheet 7 .
  • the circuit board 10 can also be made to activate the temperature sensor and the temperature compensator of the sample stage 2 to realize the temperature compensation of the sample stage 2 .
  • the spectrometer detection device enhances the intensity of the scattered light transmitted by the sample to be tested to the second optical lens assembly through the noble metal nano-coating provided on the sample stage 2 and the concave mirror 4 provided on the outer periphery of the bottom of the sample stage 2.
  • the intensity of the Mann scattered light; the holographic band-stop filter 62 in the second optical lens assembly is used to filter out the Rayleigh scattered light in the scattered light, and the detection of the CCD detector 3 is further improved by combining with the low-temperature drying treatment of the CCD detector 3 Accuracy and Sensitivity.

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Abstract

A spectrometer detection device, comprising a laser (1), a sample stage (2), a CCD detector (3), and a cooling dryer. A first optical lens assembly is provided between the laser (1) and the sample stage (2). A second optical lens assembly is arranged between the sample stage (2) and the CCD detector (3). The surface of the sample stage (2) is provided with a noble metal nano coating. One side of the sample stage (2) is provided with a concave mirror (4). When the device is used, the laser light of the laser (1) is irradiated to the sample stage (2) through the first optical lens assembly, so that a sample to be tested on the sample stage (2) generates an optical signal comprising scattered light, and the optical signal is transmitted to the CCD detector (3) through the second optical lens assembly, thereby achieving component detection and analysis of said sample. The noble metal nano coating and the concave mirror (4) improve the light intensity of the scattered light transmitted to the second optical lens assembly, the cooling dryer improves the signal-to-noise ratio of the CCD detector (3), and therefore, the detection precision and sensitivity of the sample to be tested by the spectrometer detection device is improved.

Description

一种光谱仪检测装置A spectrometer detection device

本申请要求于2021年02月20日提交中国专利局、申请号为202110192731.0、发明名称为“一种光谱仪检测装置”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application filed on February 20, 2021 with the application number 202110192731.0 and the invention titled "A Spectrometer Detection Device", the entire contents of which are incorporated into this application by reference.

技术领域technical field

本申请涉及检测领域,尤其涉及一种光谱仪检测装置。The present application relates to the field of detection, in particular to a spectrometer detection device.

背景技术Background technique

拉曼光谱技术是指通过分析入射光照射在物质上的散射光谱,来进行物质种类的分析和鉴定。Raman spectroscopy refers to the analysis and identification of material types by analyzing the scattering spectrum of incident light irradiated on the material.

拉曼检测仪是一种应用拉曼光谱技术分析物质成分和种类的装置。采用拉曼检测仪检测物质的成分和种类时,利用拉曼检测仪提供的入射光照射被检测的物质,令被检测的物质发出频率不同于入射光的散射光,通过检测和分析这一散射光中拉曼光谱的位移来确定被检测的物质的成分和种类。Raman detector is a device that uses Raman spectroscopy to analyze the composition and type of substances. When the Raman detector is used to detect the composition and type of the substance, the incident light provided by the Raman detector is used to irradiate the detected substance, so that the detected substance emits scattered light with a frequency different from the incident light. The shift in the Raman spectrum of light to determine the composition and species of the detected substance.

然而,由于被检测的物质所发出的散射光中,既包括拉曼散射光,也包括瑞丽散射光,而且,前述拉曼散射光的谱线相较于对于瑞丽散射光的谱线而言很弱,因此难以精确检测拉曼散射光的光谱,导致该拉曼检测仪的精度低、灵敏度低。However, since the scattered light emitted by the substance to be detected includes both Raman scattered light and Rayleigh scattered light, and the spectral lines of the aforementioned Raman scattered light are very different from those of the Rayleigh scattered light Therefore, it is difficult to accurately detect the spectrum of Raman scattered light, resulting in low precision and low sensitivity of the Raman detector.

发明内容SUMMARY OF THE INVENTION

本申请的目的是提供一种光谱仪检测装置,可以提高检测精度和灵敏度。The purpose of the present application is to provide a spectrometer detection device, which can improve detection accuracy and sensitivity.

为实现上述目的,本申请提供一种光谱仪检测装置,包括激光器、样品台、CCD检测器和紧邻所述CCD检测器设置的冷却干燥器;所述激光器与所述样品台二者之间设有用以将所述激光器的激光传递至所述样品台上的待测样本的第一光学镜片组件;所述样品台和所述CCD检测器二者之间设有用以将待测样本发出的光信号传递至所述CCD检测器的第二光学 镜片组件;In order to achieve the above purpose, the present application provides a spectrometer detection device, comprising a laser, a sample stage, a CCD detector and a cooling drier set next to the CCD detector; A first optical lens assembly for transmitting the laser light of the laser to the sample to be tested on the sample stage; between the sample stage and the CCD detector, there is an optical signal used to transmit the sample to be tested a second optical lens assembly delivered to the CCD detector;

所述样品台的表面设有贵金属纳米镀层;The surface of the sample stage is provided with a precious metal nano-coating;

所述样品台远离所述第一光学镜片组件和所述第二光学镜片组件的一侧设有凹面反光镜。A concave reflective mirror is provided on a side of the sample stage away from the first optical lens assembly and the second optical lens assembly.

优选地,所述样品台设有温度传感器和温度补偿器。Preferably, the sample stage is provided with a temperature sensor and a temperature compensator.

优选地,所述贵金属纳米镀层具体为Au镀层或Ag镀层。Preferably, the noble metal nano-coating is specifically an Au coating or an Ag coating.

优选地,所述激光器具体为用以提供波长为780nm的激光的半导体激光器。Preferably, the laser is specifically a semiconductor laser for providing laser light with a wavelength of 780 nm.

优选地,所述冷却干燥器包括半导体制冷片和干燥剂。Preferably, the cooling dryer includes a semiconductor refrigeration sheet and a desiccant.

优选地,还包括透明密封盒体;所述CCD检测器、所述干燥剂和所述半导体制冷片的冷端均设于所述透明密封盒体内,所述半导体制冷片的热端设于所述透明密封盒体外;所述干燥剂具体为变色硅胶。Preferably, it also includes a transparent sealed box body; the CCD detector, the desiccant and the cold end of the semiconductor refrigeration sheet are all arranged in the transparent sealed box body, and the hot end of the semiconductor refrigeration sheet is arranged in the The transparent sealing box is outside the body; the desiccant is specifically color-changing silica gel.

优选地,所述第一光学镜片组件包括带通滤光片、反光镜和平凸透镜;所述反光镜的表面为全反光面;所述平凸透镜的表面设有增透膜。Preferably, the first optical lens assembly includes a band-pass filter, a reflector and a plano-convex lens; the surface of the reflector is a total reflection surface; and an anti-reflection film is provided on the surface of the plano-convex lens.

优选地,所述第二光学镜片组件包括光纤准直透镜、全息带阻滤光片和分光镜;所述全息带阻滤光片的中心波长等于所述激光器提供的激光的波长。Preferably, the second optical lens assembly includes a fiber collimating lens, a holographic band-stop filter and a beam splitter; the center wavelength of the holographic band-stop filter is equal to the wavelength of the laser light provided by the laser.

相对于上述背景技术,本申请所提供的光谱仪检测装置包括激光器、CCD检测器、样品台和紧邻CCD检测器设置的冷却干燥器;样品台的表面设有贵金属纳米镀层,样品台的一侧设有凹面反光镜,该凹面反光镜位于样品台远离第一光学镜片和第二光学镜片的一侧。With respect to the above-mentioned background technology, the spectrometer detection device provided by the present application includes a laser, a CCD detector, a sample stage and a cooling dryer arranged next to the CCD detector; the surface of the sample stage is provided with a precious metal nano-coating, and one side of the sample stage is There is a concave mirror, and the concave mirror is located on the side of the sample stage away from the first optical lens and the second optical lens.

针对该光谱仪检测装置而言,激光器可向外界提供具有特定波长的激光;样品台的贵金属纳米镀层上放置有待测样本。该光谱仪检测装置中,激光器与样品台二者之间设有用以将激光器的激光传递至样品台上的待测样本的第一光学镜片组件;样品台和CCD检测器二者之间用以将待测样本发出的光信号传递至CCD检测器的第二光学镜片组件。For the spectrometer detection device, the laser can provide laser light with a specific wavelength to the outside world; the sample to be tested is placed on the noble metal nano-coating layer of the sample stage. In the spectrometer detection device, a first optical lens assembly for transmitting the laser light of the laser to the sample to be tested on the sample stage is arranged between the laser and the sample stage; The light signal emitted by the sample to be tested is transmitted to the second optical lens assembly of the CCD detector.

使用该光谱仪检测装置时,激光器发出的激光依次经过第一光学镜片组件的多个镜体聚焦至样品台,样品台上的待测样本在该激光的照射下产生包括拉曼散射光和瑞丽散射光在内的光信号。待测样本产生的前述光信 号经第二光学镜片组件处理并传递至CCD检测器内,以便借助CCD检测器分析此光信号中的拉曼散射光,实现分析待测样本的成分。When using the spectrometer detection device, the laser light emitted by the laser is sequentially focused to the sample stage through a plurality of mirrors of the first optical lens assembly, and the sample to be tested on the sample stage is illuminated by the laser to generate Raman scattering light and Rayleigh scattering. Light signal inside. The aforementioned optical signal generated by the sample to be tested is processed by the second optical lens assembly and transmitted to the CCD detector, so that the Raman scattered light in the optical signal is analyzed by the CCD detector to analyze the components of the sample to be tested.

可见,相比于现有装置而言,该光谱仪检测装置利用样品台表面的贵金属纳米镀层和凹面反光镜增强了样品台传递至第二光学镜片组件的拉曼散射线的光强,而冷却干燥器则可通过提高CCD检测器的信噪比的方式提高了CCD检测器的检测精度。综上,相比于现有技术而言,本申请所提供的光谱仪检测装置能够提高对待测样本的检测精度和灵敏度。It can be seen that, compared with the existing device, the spectrometer detection device utilizes the noble metal nano-coating and concave mirror on the surface of the sample stage to enhance the light intensity of the Raman scattered rays transmitted from the sample stage to the second optical lens assembly, while cooling and drying The detector can improve the detection accuracy of the CCD detector by improving the signal-to-noise ratio of the CCD detector. In conclusion, compared with the prior art, the spectrometer detection device provided by the present application can improve the detection accuracy and sensitivity of the sample to be tested.

附图说明Description of drawings

为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据提供的附图获得其他的附图。In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only It is an embodiment of the present application. For those of ordinary skill in the art, other drawings can also be obtained according to the provided drawings without any creative effort.

图1为本申请实施例所提供的光谱仪检测装置的结构框图;1 is a structural block diagram of a spectrometer detection device provided by an embodiment of the application;

图2为本申请实施例所提供的光谱仪检测装置的结构示意图。FIG. 2 is a schematic structural diagram of a spectrometer detection device provided by an embodiment of the present application.

其中,1-激光器、2-样品台、3-CCD检测器、4-凹面反光镜、51-带通滤光片、52-反光镜、53-平凸透镜、61-光纤准直透镜、62-全息带阻滤光片、63-分光镜、7-半导体制冷片、8-透明密封盒体、9-变色硅胶、10-电路板。Among them, 1-laser, 2-sample stage, 3-CCD detector, 4-concave mirror, 51-bandpass filter, 52-reflector, 53-plano-convex lens, 61-fiber collimating lens, 62- Holographic bandstop filter, 63-beamsplitter, 7-semiconductor refrigeration sheet, 8-transparent sealed box, 9-color-changing silica gel, 10-circuit board.

具体实施方式Detailed ways

下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

为了使本技术领域的技术人员更好地理解本申请方案,下面结合附图和具体实施方式对本申请作进一步的详细说明。In order to make those skilled in the art better understand the solution of the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

请参考图1和2,图1为本申请实施例所提供的光谱仪检测装置的结构框图;图2为本申请实施例所提供的光谱仪检测装置的结构示意图。Please refer to FIGS. 1 and 2. FIG. 1 is a structural block diagram of a spectrometer detection device provided by an embodiment of the present application; and FIG. 2 is a schematic structural diagram of a spectrometer detection device provided by an embodiment of the present application.

本申请提供一种光谱仪检测装置,包括激光器1、样品台2和CCD检测器3和冷却干燥器。The present application provides a spectrometer detection device, including a laser 1, a sample stage 2, a CCD detector 3 and a cooling dryer.

样品台2上放置有待测样本,激光器1用于向样品台2上的待测样本发射激光,实现待测样本在激光照射下发出光信号例如散射光;CCD检测器3位于样品台2的一侧,用于接收并检测待测样本发出的光信号。冷却干燥器紧邻CCD检测器3设置,用于对CCD检测器3进行冷却和干燥处理。The sample to be tested is placed on the sample stage 2, and the laser 1 is used to emit laser light to the sample to be tested on the sample stage 2, so that the sample to be tested can emit light signals such as scattered light under the laser irradiation; the CCD detector 3 is located on the sample stage 2. One side is used to receive and detect the light signal emitted by the sample to be tested. The cooling dryer is disposed adjacent to the CCD detector 3 for cooling and drying the CCD detector 3 .

激光器1与样品台2二者之间设有第一光学镜片组件,样品台2和CCD检测器3二者之间设有第二光学镜片组件。第一光学镜片组件用于将激光器1发出的激光传递至样品台上的待测样本;第二光学镜片组件用于将待测样本发出的光信号传递至CCD检测器3。A first optical lens assembly is provided between the laser 1 and the sample stage 2 , and a second optical lens assembly is provided between the sample stage 2 and the CCD detector 3 . The first optical lens assembly is used to transmit the laser light emitted by the laser 1 to the sample to be tested on the sample stage; the second optical lens assembly is used to transmit the light signal emitted by the sample to be tested to the CCD detector 3 .

第一光学镜片组件和第二光学镜片组件可采用透镜、反光镜片等光学镜片形成,至于透镜、反光镜片等光学镜片的具体类型和结构参数、多个光学镜片之间的相对位置关系设置应根据待测样本的测试需求以及激光器1、样品台2和CCD检测器3三者的结构参数以及相对位置关系设置。The first optical lens assembly and the second optical lens assembly can be formed by using optical lenses such as lenses and reflective lenses. As for the specific types and structural parameters of optical lenses such as lenses and reflective lenses, and the relative positional relationship between multiple optical lenses, the setting should be based on The test requirements of the sample to be tested and the structural parameters and relative positional relationship settings of the laser 1 , the sample stage 2 and the CCD detector 3 .

该光谱仪检测装置中,样品台2为镜面结构。样品台2的表面设有贵金属纳米镀层,包括且不限于Ag纳米镀层。该贵金属纳米镀层用于增强待测样本在激光照射下发出光信号,尤其是此光信号中的拉曼散射光。样品台2的一侧设有凹面反光镜4。显然,为了满足光线在第一光学镜片组件、样品台2和第二光学镜片组件之间的传递,凹面反光镜4设于样品台2远离第一光学镜片组件和第二光学镜片组件的一侧。In the spectrometer detection device, the sample stage 2 is a mirror structure. The surface of the sample stage 2 is provided with a noble metal nano-coating, including but not limited to Ag nano-coating. The noble metal nano-coating layer is used to enhance the light signal emitted by the sample to be tested under laser irradiation, especially the Raman scattered light in the light signal. One side of the sample stage 2 is provided with a concave mirror 4 . Obviously, in order to satisfy the transmission of light between the first optical lens assembly, the sample stage 2 and the second optical lens assembly, the concave mirror 4 is provided on the side of the sample stage 2 away from the first optical lens assembly and the second optical lens assembly .

例如,凹面反光镜4可位于待测样本的对侧,例如,待测样本放置于样品台2的上表面,则凹面反光镜4可位于样品台2的底部,包括且不限于位于样品台2的底面或者位于样品台2的底面和周侧。For example, the concave mirror 4 can be located on the opposite side of the sample to be tested. For example, if the sample to be tested is placed on the upper surface of the sample stage 2, the concave mirror 4 can be located at the bottom of the sample stage 2, including but not limited to being located on the sample stage 2. The bottom surface or the bottom surface and the peripheral side of the sample stage 2 .

CCD检测器3可连接有用以将CCD检测器3采集到的光信号转换为电信号的采集电路,方便根据这一电信号分析待测样本的成分。The CCD detector 3 can be connected with a collection circuit for converting the optical signal collected by the CCD detector 3 into an electrical signal, so as to analyze the composition of the sample to be tested according to the electrical signal.

由于CCD检测器3的温度每降低6~7℃,CCD检测器3的暗电流会 下降一倍,当CCD检测器3的温度下降到-50℃时,CCD检测器3的暗电流噪声就可以忽略不计。因此,为了提高CCD检测器3的信噪比,本申请所提供的光谱仪检测装置通过冷却干燥器对CCD检测器3进行制冷和干燥。Since the temperature of the CCD detector 3 decreases by 6-7°C, the dark current of the CCD detector 3 will be doubled. When the temperature of the CCD detector 3 drops to -50°C, the dark current noise of the CCD detector 3 can be reduced to can be ignored. Therefore, in order to improve the signal-to-noise ratio of the CCD detector 3, the spectrometer detection device provided by the present application refrigerates and dries the CCD detector 3 through a cooling dryer.

使用本申请所提供的光谱仪检测装置时,激光器1发出的激光依次经过第一光学镜片组件的多个镜体聚焦至样品台2,样品台2上的待测样本在该激光的照射下产生拉曼散射光和瑞丽散射光等光信号,待测样本产生的这一光信号经第二光学镜片组件处理并传递至CCD检测器3内,进而借助CCD检测器3分析此光信号中的拉曼散射光以分析待测样本的成分。When using the spectrometer detection device provided in this application, the laser light emitted by the laser 1 is sequentially focused to the sample stage 2 through a plurality of mirrors of the first optical lens assembly, and the sample to be tested on the sample stage 2 is pulled under the irradiation of the laser. Light signals such as Mann scattered light and Rayleigh scattered light, the light signal generated by the sample to be tested is processed by the second optical lens assembly and transmitted to the CCD detector 3, and then the Raman in the light signal is analyzed by the CCD detector 3. Scatters light to analyze the composition of the sample to be tested.

针对本申请所提供的光谱仪检测装置而言,样品台2表面的贵金属纳米镀层增强了样品台2传递至第二光学镜片组件的拉曼散射线的光强;凹面反光镜4能够聚集待测样本在激光下产生并向四周散射的拉曼散射光和瑞丽散射光,令其反射到第二光学镜片所在的散射光路中,进一步增强拉曼散射光的强度;冷却干燥器可以通过降低CCD检测器3的方式提高CCD检测器3信噪比。综上,贵金属纳米镀层、凹面反光镜4和冷却干燥器三者能够在该光谱仪检测装置的光线传递过程中逐步改善CCD检测器3对待测样本所产生的拉曼散射光的检测质量,由此提高该光谱仪检测装置对待测样本的检测精度和灵敏度。For the spectrometer detection device provided in this application, the noble metal nano-coating on the surface of the sample stage 2 enhances the light intensity of the Raman scattered rays transmitted by the sample stage 2 to the second optical lens assembly; the concave mirror 4 can gather the sample to be tested The Raman scattered light and Rayleigh scattered light generated under the laser and scattered around are reflected into the scattered light path where the second optical lens is located to further enhance the intensity of the Raman scattered light; the cooling dryer can reduce the CCD detector by lowering the intensity of the Raman scattered light. 3 ways to improve the signal-to-noise ratio of the CCD detector 3. In summary, the precious metal nano-coating, the concave mirror 4 and the cooling dryer can gradually improve the detection quality of the Raman scattered light generated by the CCD detector 3 during the light transmission process of the spectrometer detection device. The detection precision and sensitivity of the sample to be tested by the spectrometer detection device are improved.

下面结合附图和实施方式,对本申请所提供的光谱仪检测装置做更进一步的说明。The spectrometer detection device provided by the present application will be further described below with reference to the accompanying drawings and embodiments.

在上述实施例的基础上,本申请所提供的光谱仪检测装置中,样品台2设有用以实时监测样品台2的温度的温度传感器和用以调节样品台2温度的温度补偿器。On the basis of the above embodiment, in the spectrometer detection device provided by the present application, the sample stage 2 is provided with a temperature sensor for monitoring the temperature of the sample stage 2 in real time and a temperature compensator for adjusting the temperature of the sample stage 2 .

该温度补偿器可采用现有技术中的具有温度调节功能的装置,可以是兼具加热和制冷功能的装置,也可以根据样品台2在实际使用过程中的温度变化趋势,具体设置为加热装置或制冷装置。该光谱仪检测装置通过温度传感器和温度补偿器实时调节样品台2及其待测样本的温度,保障该光谱仪检测装置对待测样本的检测精度。The temperature compensator can be a device with a temperature adjustment function in the prior art, can be a device with both heating and cooling functions, or can be specifically set as a heating device according to the temperature change trend of the sample stage 2 during actual use or refrigeration unit. The spectrometer detection device adjusts the temperature of the sample stage 2 and the sample to be tested in real time through a temperature sensor and a temperature compensator, so as to ensure the detection accuracy of the spectrometer detection device of the sample to be tested.

至于样品台2表面的贵金属纳米镀层,具体可设置为Au镀层或Ag 镀层。Au镀层或Ag镀层可采用蒸镀的方式设置于样品台2的表面,用于增强待测样本在激光照射下产生的拉曼散射光。As for the noble metal nano-coating on the surface of the sample stage 2, it can be specifically set as Au coating or Ag coating. The Au coating layer or the Ag coating layer can be disposed on the surface of the sample stage 2 by means of evaporation, so as to enhance the Raman scattered light generated by the sample to be tested under laser irradiation.

针对本申请所采用的激光器1,具体可设置为用以提供波长为780nm的激光的半导体激光器。因此半导体激光器发出的激光的波长为785nm,该激光照射待测样本后,待测样本产生的拉曼散射光的波长为160~3150nm,这一范围的拉曼散射光有利于第二光学镜片组件的传递和CCD检测器3的检测。The laser 1 used in the present application can be specifically configured as a semiconductor laser for providing laser light with a wavelength of 780 nm. Therefore, the wavelength of the laser light emitted by the semiconductor laser is 785nm. After the laser light irradiates the sample to be tested, the wavelength of the Raman scattered light generated by the sample to be tested is 160-3150 nm. The Raman scattered light in this range is beneficial to the second optical lens assembly. The transfer and detection of the CCD detector 3.

此外,该半导体激光器可采用恒流电源实现驱动,以实现该半导体激光器产生具有稳定光强的激光。In addition, the semiconductor laser can be driven by a constant current power supply, so that the semiconductor laser can generate laser light with stable light intensity.

针对本申请所采用的冷却干燥器,可包括半导体制冷片7和干燥剂。For the cooling dryer used in the present application, the semiconductor refrigeration sheet 7 and a desiccant may be included.

半导体制冷片7用于对CCD检测器3制冷;干燥剂用于吸收因CCD检测器3内外温差而产生的冷凝水,避免冷凝水干扰CCD检测器3的检测作业。The semiconductor refrigeration sheet 7 is used to cool the CCD detector 3 ; the desiccant is used to absorb the condensed water produced by the temperature difference between the inside and outside of the CCD detector 3 , so as to prevent the condensed water from interfering with the detection operation of the CCD detector 3 .

示例性的,本申请所提供的光谱仪检测装置还包括透明密封盒体8。在该光谱仪检测装置中,CCD检测器3、干燥剂和半导体制冷片7的冷端均设于透明密封盒体8内;半导体制冷片7的热端设于透明密封盒体8外;干燥剂具体为变色硅胶9。Exemplarily, the spectrometer detection device provided in this application further includes a transparent sealed box 8 . In the spectrometer detection device, the CCD detector 3, the desiccant and the cold end of the semiconductor refrigeration sheet 7 are all arranged in the transparent sealing box 8; the hot end of the semiconductor refrigeration sheet 7 is arranged outside the transparent sealing box 8; the desiccant Specifically, it is color-changing silica gel 9.

该实施例中,透明密封盒体8结合变色硅胶9既可以及时、有效地吸收CCD检测器3内的水分,也可以及时根据变色硅胶9的颜色更换变色硅胶9,保障变色硅胶9对CCD检测器3的干燥能力,实现该CCD检测器3始终在干燥环境下作业,提高CCD检测器3的检测精度。In this embodiment, the transparent sealing box 8 combined with the color-changing silica gel 9 can not only absorb the moisture in the CCD detector 3 in a timely and effective manner, but also replace the color-changing silica gel 9 according to the color of the color-changing silica gel 9 in time, so as to ensure that the color-changing silica gel 9 can detect the CCD. The drying ability of the CCD detector 3 is improved, so that the CCD detector 3 can always operate in a dry environment, and the detection accuracy of the CCD detector 3 is improved.

该实施例中,透明密封盒体8结合半导体制冷片7能够对CCD检测器3进行制冷,令CCD检测器3稳定维持在较低的温度例如-20℃,从而提高CCD检测器3的信噪比,提高CCD检测器3的检测精度,In this embodiment, the transparent sealed box body 8 combined with the semiconductor refrigeration sheet 7 can cool the CCD detector 3 , so that the CCD detector 3 can be stably maintained at a lower temperature such as -20° C., thereby improving the signal-to-noise of the CCD detector 3 ratio, improve the detection accuracy of the CCD detector 3,

其中,作为干燥剂的变色硅胶9可设于透明密封盒体8的底部;半导体制冷片7可设于透明密封盒体8的中部,且半导体制冷片7的冷端密封固定于透明密封盒体8内,而半导体制冷片7的热端贯通密闭盒子位于盒子外部。Among them, the color-changing silica gel 9 as a desiccant can be arranged at the bottom of the transparent sealed box body 8; the semiconductor refrigeration sheet 7 can be arranged in the middle of the transparent sealed box body 8, and the cold end of the semiconductor refrigeration sheet 7 can be sealed and fixed to the transparent sealed box body 8, while the hot end of the semiconductor refrigeration sheet 7 passes through the closed box and is located outside the box.

此外,半导体制冷片7的热端外部可包裹一圈散热的水袋,水袋的材 质为耐热的导热性强的材料。In addition, the outside of the hot end of the semiconductor refrigeration sheet 7 can be wrapped with a water bag for heat dissipation, and the material of the water bag is a heat-resistant material with strong thermal conductivity.

该实施例中,待测样本产生的散射光进入CCD检测器3后,CCD检测器3所连接的CCD检测器3驱动电路控制CCD检测器3检测前述散射光中的拉曼散射光的光强,并将此光信号转化成模拟电信号,再将模拟电信号经滤波、放大和转换后处理为数字信号,并经CCD检测器3的处理芯片进行数据分析,以获取待测样本的成分。In this embodiment, after the scattered light generated by the sample to be tested enters the CCD detector 3, the driving circuit of the CCD detector 3 connected to the CCD detector 3 controls the CCD detector 3 to detect the light intensity of the Raman scattered light in the scattered light. , and convert this optical signal into an analog electrical signal, and then filter, amplify and convert the analog electrical signal into a digital signal, and conduct data analysis by the processing chip of the CCD detector 3 to obtain the composition of the sample to be tested.

CCD检测器3还可连接传输模块和存储模块,用于实现数据传输和存储。例如,将CCD检测器3的数据及其结果通过Wi-Fi传输模块上传到云端,方便移动端例如手机获取云端的数据信息并对数据信息进行查看和分析。The CCD detector 3 can also be connected to a transmission module and a storage module for realizing data transmission and storage. For example, the data of the CCD detector 3 and its results are uploaded to the cloud through the Wi-Fi transmission module, so that the mobile terminal such as a mobile phone can obtain the data information in the cloud and view and analyze the data information.

可见,上述CCD检测器3通过半导体制冷片7对CCD检测器3进行制冷,通过变色硅胶9对CCD检测器3进行干燥,因此能够大幅度提高CCD检测器3对待测样本所产生的拉曼散射光的敏感度,提高检测精度和准确度。It can be seen that the above-mentioned CCD detector 3 cools the CCD detector 3 through the semiconductor refrigeration sheet 7, and dries the CCD detector 3 through the color-changing silica gel 9, so the Raman scattering generated by the sample to be tested by the CCD detector 3 can be greatly improved Light sensitivity to improve detection precision and accuracy.

在上述任一实施例的基础上,本申请所提供的光谱仪检测装置中,第一光学镜片组件包括带通滤光片51、反光镜52和平凸透镜53;反光镜52的表面为全反光面。On the basis of any of the above embodiments, in the spectrometer detection device provided by the present application, the first optical lens assembly includes a band-pass filter 51, a reflector 52 and a plano-convex lens 53; the surface of the reflector 52 is a total reflection surface.

带通滤光片51能够过滤激光器1发出的激光的边带谱成分或杂散光。针对能够发出780nm波长的激光的激光器1而言,带通滤光片51的直径可设置为25mm、中心波长可设置为780nm。The bandpass filter 51 can filter sideband spectral components or stray light of the laser light emitted by the laser 1 . For the laser 1 capable of emitting laser light with a wavelength of 780 nm, the diameter of the bandpass filter 51 can be set to 25 mm, and the center wavelength can be set to 780 nm.

反光镜52用于改变激光器1向带通滤光片51发出的激光的方向,实现此激光照射至样品台2的待测样本上。反光镜52可采用全反光的平面镜。反光镜52的角度可以根据样品台2的角度与激光器1经带通滤光片51照射到反光镜52的激光的角度具体设置。The reflector 52 is used to change the direction of the laser light emitted by the laser 1 to the bandpass filter 51 , so that the laser light can be irradiated on the sample to be tested on the sample stage 2 . The reflection mirror 52 can be a flat mirror with total reflection. The angle of the reflection mirror 52 can be specifically set according to the angle of the sample stage 2 and the angle of the laser beam irradiated by the laser 1 to the reflection mirror 52 through the bandpass filter 51 .

平凸透镜53位于反光镜52和样品台2之间,平凸透镜53的凸面朝样品台2。平凸透镜53的焦距等于平凸透镜53与样品台2的距离,例如平凸透镜53的焦距可设置为25mm,则平凸透镜53与样品台2的距离为25mm。平凸透镜53将经由反光镜52发射的激光积聚于样品台2。The plano-convex lens 53 is located between the mirror 52 and the sample stage 2 , and the convex surface of the plano-convex lens 53 faces the sample stage 2 . The focal length of the plano-convex lens 53 is equal to the distance between the plano-convex lens 53 and the sample stage 2 . The plano-convex lens 53 accumulates the laser light emitted via the mirror 52 on the sample stage 2 .

该实施例中,平凸透镜53的表面设有增透膜,可有效减少拉曼散射光 因在平凸透镜53的表面反射而带来的损失。In this embodiment, the surface of the plano-convex lens 53 is provided with an anti-reflection coating, which can effectively reduce the loss of Raman scattered light caused by reflection on the surface of the plano-convex lens 53.

可见,上述带通滤光片51、反光镜52和平凸透镜53形成第一光学镜片组件,用于实现激光在激光器1和样品台2之间的传递。激光在第一光学镜片组件之间传递的路径可称为激发光路。此激发光路中,带通滤波片用于滤掉激光器1所提供的激光中的杂波,反光镜52用于改变激光的路线,平凸透镜53用于将激光聚集于样品台2上,实现激光照射样品台2上的待测样本,令待测样本产生包括拉曼散射光和瑞丽散射光在内的散射线。It can be seen that the above-mentioned bandpass filter 51 , reflecting mirror 52 and plano-convex lens 53 form a first optical lens assembly, which is used to realize the transmission of laser light between the laser 1 and the sample stage 2 . The path of the laser light passing between the first optical lens assemblies may be referred to as the excitation light path. In this excitation light path, the bandpass filter is used to filter out the clutter in the laser light provided by the laser 1, the mirror 52 is used to change the route of the laser light, and the plano-convex lens 53 is used to focus the laser light on the sample stage 2 to realize the laser light The sample to be tested on the sample stage 2 is irradiated, so that the sample to be tested generates scattered rays including Raman scattered light and Rayleigh scattered light.

上述激发光路的宽度可为平凸透镜53的直径;其中,平凸透镜53的直径大小为0.5cm~5cm中的任意数值。The width of the excitation light path can be the diameter of the plano-convex lens 53 , wherein the diameter of the plano-convex lens 53 is any value in the range of 0.5 cm to 5 cm.

在上述任一实施例的基础上,第二光学镜片组件包括光纤准直透镜61、全息带阻滤光片62和分光镜63。On the basis of any of the above embodiments, the second optical lens assembly includes a fiber collimating lens 61 , a holographic band-stop filter 62 and a beam splitter 63 .

光纤准直透镜61属于平透镜,该光纤准直透镜61的直径可与凹面反光镜4的直径相等。以第一光学镜片组件的平凸透镜53位于样品台2的上游为例,光纤准直透镜61位于样品台2的下游且位于凹面反光镜4的焦距范围内,用于将待测样本产生的散射线传递至全息带阻滤光片62。The fiber collimating lens 61 is a flat lens, and the diameter of the fiber collimating lens 61 can be equal to that of the concave mirror 4 . Taking the plano-convex lens 53 of the first optical lens assembly located upstream of the sample stage 2 as an example, the fiber collimating lens 61 is located downstream of the sample stage 2 and within the focal length of the concave mirror 4, and is used to disperse the scattering generated by the sample to be tested. The lines pass to the holographic bandstop filter 62 .

考虑到通过光纤准直透镜61的拉曼散射光是瑞丽散线的10-3~10-6倍,明显弱于瑞丽散射光,为此,可在光纤准直透镜61后设置全息带阻滤光片62。该全息带阻滤光片62可采用中心波长接近甚至等于激光器1提供的激光波长的滤波片,例如采用中心波长为785nm的滤波片,避免激发光路内的大量瑞丽散射光对拉曼散射光造成干扰,起到抑制瑞丽散射光的作用。Considering that the Raman scattered light passing through the fiber collimating lens 61 is 10-3 to 10-6 times that of the Rayleigh scattering line, which is obviously weaker than the Rayleigh scattering light, for this reason, a holographic band-stop filter can be set behind the fiber collimating lens 61 Light sheet 62. The holographic band-stop filter 62 can use a filter with a center wavelength close to or even equal to the laser wavelength provided by the laser 1, for example, a filter with a center wavelength of 785 nm, to avoid the Raman scattered light caused by a large amount of Rayleigh scattered light in the excitation light path. Interference, play a role in inhibiting Rayleigh scattered light.

分光镜63位于全息带阻滤光片62之后,具体可设置为光缆式分光镜。光缆式分光镜将拉曼散射光分解为不同波长的光线并传递至CCD检测器3内。例如,光缆式分光镜可位于CCD检测器3的入口处,经过全息带阻滤光片62的散射光由光缆式分光镜分解后进入CCD检测器3。The beam splitter 63 is located behind the holographic band-stop filter 62, and can be specifically configured as a cable-type beam splitter. The fiber optic beam splitter decomposes the Raman scattered light into light rays of different wavelengths and transmits them to the CCD detector 3 . For example, a cable-type beam splitter may be located at the entrance of the CCD detector 3 , and the scattered light passing through the holographic band-stop filter 62 is decomposed by the cable-type beam splitter and then enters the CCD detector 3 .

可见,上述光纤准直透镜61、全息带阻滤光片62和分光镜63形成第二光学镜片组件,用于实现待测样本所产生的散射光在样品台2和CCD检测器3之间的传递。前述散射光在第二光学镜片组件之间传递的路径可称为散射光路。此散射光路中,全息带阻滤光片62用于过滤散射光中的瑞 丽散线,只令拉曼散射光透过,避免瑞丽散射光干扰CCD检测器3的检测检测作业;分光元件用于拉曼散射光进行分光,将拉曼散射光分成不同波长的光,方便CCD检测器3的检测作业。It can be seen that the above-mentioned optical fiber collimating lens 61, holographic band-stop filter 62 and beam splitter 63 form a second optical lens assembly, which is used to realize the scattered light generated by the sample to be tested between the sample stage 2 and the CCD detector 3. transfer. The path through which the aforementioned scattered light is transmitted between the second optical lens components may be referred to as a scattered light path. In this scattered light path, the holographic band-stop filter 62 is used to filter the Rayleigh scattering line in the scattered light, and only allows the Raman scattered light to pass through, so as to prevent the Rayleigh scattered light from interfering with the detection operation of the CCD detector 3; the spectroscopic element is used for The Raman scattered light is split, and the Raman scattered light is divided into lights of different wavelengths, which facilitates the detection operation of the CCD detector 3 .

此外,该光谱仪检测装置还可包括设于激光器1、样品台2、CCD检测器3、第一光学镜片组件和第二光学镜片组件外周的壳体。壳体包括头部和手柄,激光器1位于前述壳体的手柄的底部,样品台2位于前述壳体的头部,第一光学镜片组件位于手柄内。激光器1例如半导体激光器在半导体激光器驱动电路的作用下产生激光,这一激光依次向第一光学镜片组件、样品台2、第二光学镜片组件和CCD检测器3传递。In addition, the spectrometer detection device may further include a casing disposed on the periphery of the laser 1 , the sample stage 2 , the CCD detector 3 , the first optical lens assembly and the second optical lens assembly. The housing includes a head and a handle, the laser 1 is located at the bottom of the handle of the aforementioned housing, the sample stage 2 is located at the head of the aforementioned housing, and the first optical lens assembly is located in the handle. A laser 1 such as a semiconductor laser generates laser light under the action of a semiconductor laser driving circuit, and the laser light is sequentially transmitted to the first optical lens assembly, the sample stage 2 , the second optical lens assembly and the CCD detector 3 .

该光谱仪检测装置可由电路板10统一控制激光器1、CCD检测器3及其制冷结构的作业。如图1所示,使用者可利用移动端和传输模块向电路板10发出指令,令电路板10启动激光器1的激光器驱动电路,实现激光器1发出激光;令电路板10启动CCD检测器驱动电路,实现CCD检测器3检测和分析待测样本的成分;令电路板10启动制冷驱动电路,实现半导体制冷片7对CCD检测器3的冷却。此外,还可令电路板10启动样品台2的温度传感器和温度补偿器,实现对样品台2的温度补偿。In the spectrometer detection device, the operation of the laser 1 , the CCD detector 3 and its refrigeration structure can be controlled by the circuit board 10 in a unified manner. As shown in FIG. 1, the user can use the mobile terminal and the transmission module to send an instruction to the circuit board 10 to make the circuit board 10 start the laser driving circuit of the laser 1, so that the laser 1 can emit laser light; make the circuit board 10 start the CCD detector driving circuit , to realize the CCD detector 3 to detect and analyze the composition of the sample to be tested; to make the circuit board 10 start the refrigeration drive circuit to realize the cooling of the CCD detector 3 by the semiconductor refrigeration sheet 7 . In addition, the circuit board 10 can also be made to activate the temperature sensor and the temperature compensator of the sample stage 2 to realize the temperature compensation of the sample stage 2 .

综上,该光谱仪检测装置通过设于样品台2的贵金属纳米镀层和设于样品台2底部外周的凹面反光镜4增强待测样本向第二光学镜片组件传递的散射光的强度,尤其是拉曼散射光的强度;利用第二光学镜片组件中的全息带阻滤光片62滤除前述散射光中的瑞丽散射光,进一步结合对CCD检测器3的低温干燥处理提高CCD检测器3的检测精度和灵敏度。To sum up, the spectrometer detection device enhances the intensity of the scattered light transmitted by the sample to be tested to the second optical lens assembly through the noble metal nano-coating provided on the sample stage 2 and the concave mirror 4 provided on the outer periphery of the bottom of the sample stage 2. The intensity of the Mann scattered light; the holographic band-stop filter 62 in the second optical lens assembly is used to filter out the Rayleigh scattered light in the scattered light, and the detection of the CCD detector 3 is further improved by combining with the low-temperature drying treatment of the CCD detector 3 Accuracy and Sensitivity.

以上对本申请所提供的光谱仪检测装置进行了详细介绍。本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以对本申请进行若干改进和修饰,这些改进和修饰也落入本申请权利要求的保护范围内。The spectrometer detection device provided by the present application has been introduced in detail above. Specific examples are used herein to illustrate the principles and implementations of the present application, and the descriptions of the above embodiments are only used to help understand the methods and core ideas of the present application. It should be pointed out that for those of ordinary skill in the art, without departing from the principles of the present application, several improvements and modifications can also be made to the present application, and these improvements and modifications also fall within the protection scope of the claims of the present application.

Claims (8)

一种光谱仪检测装置,其特征在于,包括激光器(1)、样品台(2)、CCD检测器(3)和紧邻所述CCD检测器(3)设置的冷却干燥器;所述激光器(1)与所述样品台(2)二者之间设有用以将所述激光器(1)的激光传递至所述样品台(2)上的待测样本的第一光学镜片组件;所述样品台(2)和所述CCD检测器(3)二者之间设有用以将待测样本发出的光信号传递至所述CCD检测器(3)的第二光学镜片组件;A spectrometer detection device, characterized in that it comprises a laser (1), a sample stage (2), a CCD detector (3), and a cooling drier provided next to the CCD detector (3); the laser (1) A first optical lens assembly for transmitting the laser light of the laser (1) to the sample to be tested on the sample stage (2) is arranged between the sample stage (2) and the sample stage (2). 2) and the CCD detector (3) is provided with a second optical lens assembly for transmitting the light signal emitted by the sample to be tested to the CCD detector (3); 所述样品台(2)的表面设有贵金属纳米镀层;The surface of the sample stage (2) is provided with a noble metal nano-coating; 所述样品台(2)远离所述第一光学镜片组件和所述第二光学镜片组件的一侧设有凹面反光镜(4)。A concave reflective mirror (4) is provided on the side of the sample stage (2) away from the first optical lens assembly and the second optical lens assembly. 根据权利要求1所述的光谱仪检测装置,其特征在于,所述样品台(2)设有温度传感器和温度补偿器。The spectrometer detection device according to claim 1, characterized in that, the sample stage (2) is provided with a temperature sensor and a temperature compensator. 根据权利要求1所述的光谱仪检测装置,其特征在于,所述贵金属纳米镀层具体为Au镀层或Ag镀层。The spectrometer detection device according to claim 1, wherein the noble metal nano-coating is specifically an Au coating or an Ag coating. 根据权利要求1所述的光谱仪检测装置,其特征在于,所述激光器(1)具体为用以提供波长为780nm的激光的半导体激光器。The spectrometer detection device according to claim 1, wherein the laser (1) is specifically a semiconductor laser for providing laser light with a wavelength of 780 nm. 根据权利要求1所述的光谱仪检测装置,其特征在于,所述冷却干燥器包括半导体制冷片(7)和干燥剂。The spectrometer detection device according to claim 1, characterized in that, the cooling dryer comprises a semiconductor refrigeration sheet (7) and a desiccant. 根据权利要求5所述的光谱仪检测装置,其特征在于,还包括透明密封盒体(8);所述CCD检测器、所述干燥剂和所述半导体制冷片(7)的冷端均设于所述透明密封盒体(8)内,所述半导体制冷片(7)的热端设于所述透明密封盒体(8)外;所述干燥剂具体为变色硅胶(9)。The spectrometer detection device according to claim 5, characterized in that it further comprises a transparent sealed box body (8); the cold ends of the CCD detector, the desiccant and the semiconductor refrigeration sheet (7) are all arranged in the Inside the transparent sealing box body (8), the hot end of the semiconductor refrigeration sheet (7) is arranged outside the transparent sealing box body (8); the desiccant is specifically color-changing silica gel (9). 根据权利要求1至6任一项所述的光谱仪检测装置,其特征在于, 所述第一光学镜片组件包括带通滤光片(51)、反光镜(52)和平凸透镜(53);所述反光镜(52)的表面为全反光面;所述平凸透镜(53)的表面设有增透膜。The spectrometer detection device according to any one of claims 1 to 6, characterized in that, the first optical lens assembly comprises a band-pass filter (51), a reflector (52) and a plano-convex lens (53); the The surface of the reflector (52) is a total reflection surface; the surface of the plano-convex lens (53) is provided with an anti-reflection film. 根据权利要求1至6任一项所述的光谱仪检测装置,其特征在于,所述第二光学镜片组件包括光纤准直透镜(61)、全息带阻滤光片(62)和分光镜(63);所述全息带阻滤光片(62)的中心波长等于所述激光器(1)提供的激光的波长。The spectrometer detection device according to any one of claims 1 to 6, wherein the second optical lens assembly comprises a fiber collimating lens (61), a holographic band-stop filter (62) and a beam splitter (63) ); the center wavelength of the holographic band-stop filter (62) is equal to the wavelength of the laser light provided by the laser (1).
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