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WO2022029967A1 - Guide de câble et appareil de commande pour têtes de plasma - Google Patents

Guide de câble et appareil de commande pour têtes de plasma Download PDF

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Publication number
WO2022029967A1
WO2022029967A1 PCT/JP2020/030242 JP2020030242W WO2022029967A1 WO 2022029967 A1 WO2022029967 A1 WO 2022029967A1 JP 2020030242 W JP2020030242 W JP 2020030242W WO 2022029967 A1 WO2022029967 A1 WO 2022029967A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
cable
surface portion
power
plasma head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/030242
Other languages
English (en)
Japanese (ja)
Inventor
紘佑 土田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Corp filed Critical Fuji Corp
Priority to JP2022541052A priority Critical patent/JP7503636B2/ja
Priority to CN202080102105.1A priority patent/CN115715486A/zh
Priority to DE112020007489.7T priority patent/DE112020007489T5/de
Priority to PCT/JP2020/030242 priority patent/WO2022029967A1/fr
Publication of WO2022029967A1 publication Critical patent/WO2022029967A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K5/00—Casings, cabinets or drawers for electric apparatus
    • H05K5/02—Details
    • H05K5/0247—Electrical details of casings, e.g. terminals, passages for cables or wiring
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators

Definitions

  • This specification discloses technology relating to a cable guide and a control device for a plasma head.
  • the atmospheric pressure plasma device described in Patent Document 1 includes a guide member.
  • the guide member forms an air flow from an opening communicating inside and outside the device to an intake portion for sucking air. Further, the guide member also serves as a passage for a feeding line for energizing the electrode that generates plasma.
  • the plasma generator power is supplied from the power supply device provided inside the housing of the control device to the plasma head provided outside the housing by an external cable.
  • One end of the external cable is connected to the plasma head.
  • the other end of the external cable is drawn into the housing and routed inside the housing. Therefore, there is a possibility that the external cable routed inside the housing and the member provided inside the housing interfere with each other.
  • the present specification provides an external cable for supplying power from the power supply device provided inside the housing of the control device to the plasma head provided outside the housing, and an external cable provided inside the housing.
  • the present specification is used for a control device for a plasma head including a housing and a power supply device provided inside the housing and supplying electric power to a plasma head provided outside the housing by an external cable.
  • the cable guide includes a partition wall portion that separates the first region and the second region when installed inside the housing.
  • the first region is a region in which the external cable drawn into the inside of the housing from the first suction port provided in the housing is routed inside the housing.
  • the second region is a region in which an interference member provided inside the housing that may interfere with the external cable is arranged.
  • a housing, a power supply device, an internal cable to which power is supplied from the power supply device, a first inlet provided in the housing, an external cable, a terminal block, and the outside are described.
  • a control device for a plasma head including the cable guide that guides the cable inside the housing.
  • the power supply device supplies electric power to a plasma head provided inside the housing and provided outside the housing.
  • One end side of the external cable is connected to the plasma head, and the other end side is drawn into the inside of the housing from the first suction port and routed inside the housing.
  • the terminal block is provided on an insulating member that insulates from the housing, and one end side of the internal cable and the other end side of the external cable are connected to the terminal block.
  • a partition wall is provided. Therefore, when the cable guide is installed inside the housing, a region (first region) around which the external cable is routed inside the housing and an interference member provided inside the housing are arranged. It can be separated from the area (second area). The same applies to the control device for the plasma head provided with the cable guide as described above for the cable guide.
  • FIG. 2 is a perspective view showing a state in which the first frame and the second frame are removed in FIG. 2.
  • FIG. 2 is a perspective view showing a state in which the first frame and the second frame are removed in FIG. 2.
  • It is a top view which shows an example of the routing state of an internal cable and an external cable in a connection part.
  • It is a perspective view which shows an example of a cable guide.
  • It is a top view which shows an example of the routing state of an internal cable and an external cable in relation to the comparative form.
  • Embodiment 1-1 Configuration example of plasma generator 100
  • the plasma generator 100 generates plasma by discharging it in a raw material gas.
  • the plasma generator 100 is used, for example, for surface processing, cleaning, adhesion, sterilization, air purification, and the like of members.
  • the plasma generator 100 includes a control device 80 for the plasma head 90 and a plasma head 90.
  • the plasma head 90 generates plasma by using the electric power supplied from the control device 80 for the plasma head 90.
  • the plasma head 90 includes a main body portion 91, a pair of electrodes 92 and 92, and a replacement portion 93.
  • the main body 91 accommodates a pair of electrodes 92, 92 and a replacement 93, and isolates them from the outside.
  • the pair of electrodes 92, 92 are arranged to face each other inside the main body 91.
  • the above power is supplied to the pair of electrodes 92 and 92 to generate plasma. That is, a plasma generation region 94 is generated between the pair of electrodes 92 and 92.
  • the replacement unit 93 introduces the raw material gas at atmospheric pressure into the generation region 94 and moves the plasma generated in the generation region 94.
  • the plasma may be used inside the main body 91, or may be moved from the main body 91 and used.
  • the raw material gas is not limited as long as it can generate plasma. For example, oxygen gas and air are included in the raw material gas.
  • the control device 80 for the plasma head 90 includes a housing 10, a power supply device 20, an internal cable 30, and a lead-in port 40.
  • the external cable 50, the terminal block 60, and the cable guide 70 are provided.
  • the housing 10 includes a base plate 10a, a first frame 10b, and a second frame 10c.
  • the base plate 10a is formed in a plate shape.
  • the base plate 10a partitions the inside of the housing 10 into a power supply unit PU0 provided with the power supply device 20 and a connection unit JT0 to which the external cable 50 is connected.
  • the first frame 10b and the second frame 10c are formed in a box shape in which the base plate 10a side opens.
  • a connecting portion JT0 is provided in a region surrounded by the base plate 10a, the first frame 10b and the second frame 10c.
  • the power supply device 20 supplies electric power to the plasma head 90 provided inside the housing 10 and provided outside the housing 10. Power is supplied by the external cable 50.
  • the power supply device 20 includes a DC power supply 21, a power converter 22, a smoother 23, and a booster 24.
  • the DC power supply 21 supplies DC power.
  • the power converter 22 converts the DC power output from the DC power supply 21 into AC power.
  • the smoother 23 smoothes the AC power output from the power converter 22.
  • the booster 24 boosts the AC power smoothed by the smoother 23 to generate electric power (power supplied to the plasma head 90).
  • the plasma head 90 can supply electric power capable of generating plasma, and a known device can be used.
  • a smoother 23 a smoother including a coil and a capacitor can be used.
  • the booster 24 can use a transformer. As shown in FIG. 1, the transformer includes a primary winding 24a and a secondary winding 24b.
  • the transformer boosts the AC power (AC power smoothed by the smoother 23) input to the primary winding 24a, and outputs the boosted AC power from the secondary winding 24b.
  • the output voltage of the AC power output from the secondary winding 24b is about 15 kV at the maximum.
  • the output voltage of the AC power output from the secondary winding 24b is about 8 to 9 kV.
  • the voltage level corresponding to the above output voltage is referred to as high voltage.
  • Power is supplied to the internal cable 30 from the power supply device 20.
  • one end side of the internal cable 30 is connected to the terminal block 60.
  • the other end side of the internal cable 30 is connected to the output side of the booster 24.
  • the other end of the internal cable 30 is connected to the secondary winding 24b of the transformer.
  • the internal cable 30 a known cable to which a high voltage can be applied can be used.
  • the internal cable 30, for example, a cabtire cable or the like can be used.
  • the lead-in port 40 includes a first lead-in port 41 and two second lead-in ports 42, 42.
  • the entrance 40 is provided in the housing 10.
  • the first lead-in port 41 is formed in the first frame 10b of the housing 10.
  • the first lead-in port 41 is formed in a circular shape having a diameter larger than the diameter of the two external cables 50 so that the two external cables 50 can be drawn in.
  • the two second inlets 42, 42 are formed in the base plate 10a of the housing 10. Each of the two second inlets 42, 42 is formed in a circular shape having a diameter larger than the diameter of the internal cable 30 so that the internal cable 30 can be retracted. As shown in FIGS. 2 and 3, each of the two internal cables 30 is drawn in from the second lead-in port 42, and one end side thereof is connected to the terminal block 60.
  • One end of the external cable 50 is connected to the plasma head 90. As shown in FIG. 1, one end side of the external cable 50 is connected to the electrode 92 of the plasma head 90. Further, as shown in FIG. 4, the other end side of the external cable 50 is drawn into the inside of the housing 10 from the first lead-in port 41 and routed inside the housing 10.
  • the external cable 50 a known cable to which a high voltage can be applied can be used. Further, since the external cable 50 is moved with the movement of the plasma head 90, for example, a cabtire cable or the like may be used.
  • the cost of the connector may increase from the viewpoint of ensuring insulation against high voltage. Therefore, in the present embodiment, the connection between the internal cable 30 and the external cable 50 is performed by the terminal block 60.
  • the terminal block 60 is provided on the insulating member IS0 that insulates from the housing 10, and one end side of the internal cable 30 and the other end side of the external cable 50 are connected. As shown in FIGS. 2 and 3, the insulating member IS0 is formed in a columnar shape. The terminal block 60 is provided on the upper surface of the insulating member IS0. As a result, one end side of the internal cable 30 and the other end side of the external cable 50 are separated from the base plate 10a of the housing 10 by a predetermined distance when connected to the terminal block 60.
  • the terminal block 60 includes an input side terminal portion 61 and an output side terminal portion 62.
  • One end side of the internal cable 30 is connected to the input side terminal portion 61.
  • the other end side of the external cable 50 is connected to the output side terminal portion 62.
  • the input side terminal portion 61 is closer to the cable guide 70 than the output side terminal portion 62.
  • the cable guide 70 guides the external cable 50 inside the housing 10. As shown in FIG. 4, the cable guide 70 guides the external cable 50 drawn into the housing 10 from the first lead-in port 41 toward the side of the terminal block 60. The external cable 50 is routed so as to bypass the terminal block 60 and is connected to the output side terminal portion 62 provided farther than the input side terminal portion 61.
  • the cable guide 70 includes a partition wall portion 71.
  • the cable guide 70 may also include an introduction portion 72.
  • the cable guide 70 of the present embodiment includes a partition wall portion 71 and an introduction portion 72.
  • the cable guide 70 is supported by the support member 73 on the base plate 10a of the housing 10.
  • the partition wall portion 71 is separated into the first region AR1 and the second region AR2 when installed inside the housing 10.
  • the first region AR1 is an region in which the external cable 50 drawn into the housing 10 from the first lead-in port 41 provided in the housing 10 is routed inside the housing 10.
  • the second region AR2 is an region in which the interference member IF0 provided inside the housing 10 that may interfere with the external cable 50 is arranged. Thereby, when the cable guide 70 is installed inside the housing 10, it is possible to suppress the interference between the external cable 50 and the interference member IF0.
  • the interference member IF0 is not limited as long as it is a member provided inside the housing 10 that may interfere with the external cable 50.
  • a building material such as a pillar member or a wall member inside the housing 10 can be an interference member IF0.
  • an article installed inside the housing 10 such as an electric device or a cable can be an interference member IF0.
  • the interference member IF0 includes an internal cable 30.
  • the cable guide 70 of the present embodiment When the cable guide 70 of the present embodiment is installed inside the housing 10, the region (first region AR1) around which the external cable 50 is routed inside the housing 10 and the inside of the interference member IF0. It can be separated from the area where the cable 30 is arranged (second area AR2). That is, the cable guide 70 of the present embodiment can at least suppress interference between the external cable 50 and the internal cable 30 when installed inside the housing 10.
  • the introduction unit 72 When the introduction unit 72 is installed inside the housing 10, the introduction unit 72 guides the external cable 50 from the first inlet 41 toward the inside of the housing 10. As shown in FIGS. 2 to 4, in the first frame 10b, the portion where the first lead-in port 41 is provided is referred to as the first surface portion 11. As shown in FIG. 4, the introduction portion 72 is arranged perpendicular to the first surface portion 11. Therefore, the external cable 50 drawn into the housing 10 from the first lead-in port 41 is routed so as to go straight along the introduction portion 72.
  • the cable guide 70 is supported by the support member 73 on the base plate 10a of the housing 10.
  • the support member 73 of the present embodiment is formed in an L shape.
  • the cable guide 70 is formed with a plurality of holes 70a through which a fixing member such as a bolt can be inserted.
  • the cable guide 70 and the support member 73 are fixed to the base plate 10a by using the fixing member. Specifically, one surface of the L-shaped support member 73 is fixed to the partition wall portion 71 or the introduction portion 72, and the other surface of the support member 73 is fixed to the base plate 10a of the housing 10.
  • a high voltage is applied to the internal cable 30 and the external cable 50. Therefore, for example, if the cable guide 70 is made of metal, a partial discharge may occur between the internal cable 30 or the external cable 50 and the cable guide 70, and ozone may be generated. Partial discharge and ozone generation are likely to occur in the partition wall 71 where the separation distance from the internal cable 30 or the external cable 50 tends to be short.
  • the partition wall portion 71 is made of resin. This makes it possible to suppress the generation of partial discharge and ozone generated between the internal cable 30 or the external cable 50 and the cable guide 70.
  • the partition wall portion 71 and the introduction portion 72 are made of resin.
  • the support member 73 is made of metal because it is separated from the internal cable 30 and the external cable 50 as compared with the partition wall portion 71.
  • the housing 10 includes a first surface portion 11, a second surface portion 12, a third surface portion 13, and a fourth surface portion 14.
  • the first surface portion 11 is provided with a first lead-in port 41.
  • the second surface portion 12 faces the first surface portion 11.
  • the third surface portion 13 is provided perpendicular to the first surface portion 11 and the second surface portion 12, and is provided on the side opposite to the side on which the internal cable 30 is routed.
  • the fourth surface portion 14 is provided perpendicular to the first surface portion 11 and the second surface portion 12, and is provided on the side on which the internal cable 30 is routed.
  • the external cable 50 is connected to the plasma head 90, and may be removed from the terminal block 60 for maintenance of the plasma head 90, for example. Therefore, on the second surface portion 12, the other end side of the external cable 50 drawn into the inside of the housing 10 from the first suction port 41 and routed inside the housing 10 and the terminal block 60 are attached / detached by an operator. It is preferable that the opening 12a on which the work is possible is formed.
  • the opening 12a is formed on the second surface portion 12.
  • the opening 12a is formed by the ends of the second frame 10c on the side opposite to the side in contact with the first frame 10b. Therefore, the operator can attach / detach the other end side of the external cable 50 and the terminal block 60 via the opening 12a. That is, the operator can easily attach / detach the terminal block 60 to the other end side of the external cable 50 as compared with the case where the opening 12a is not provided in the second surface portion 12.
  • the cable guide 70 includes an introduction portion 72 that guides the external cable 50 from the first inlet 41 toward the inside of the housing 10 when the cable guide 70 is installed inside the housing 10. .. Further, as shown in FIGS. 2 to 4, the partition wall portion 71 is inclined with respect to the introduction portion 72 along the routing direction of the internal cable 30 which is the interference member IF0.
  • the internal cable 30 on the side of the two internal cables 30 and 30 near the partition wall 71 is routed from the second inlet 42 toward the terminal block 60.
  • the routing direction is parallel to the partition wall portion 71. This makes it easier to maintain the separation distance between the internal cable 30 which is the interference member IF0 and the partition wall portion 71.
  • the angle formed by the partition wall portion 71 and the introduction portion 72 is set to 135 °. The inclination angle of the partition wall portion 71 with respect to the introduction portion 72 can be appropriately changed according to the arrangement of the interference member IF0.
  • the inclination direction of the partition wall portion 71 with respect to the introduction portion 72 can also be expressed as follows. As shown in FIG. 4, the partition wall portion 71 is formed so as to bring at least a part of the external cable 50 closer to the side of the third surface portion 13. As a result, the external cable 50 is easily separated from the internal cable 30 which is the interference member IF0. Further, the external cable 50 is easily guided along the third surface portion 13.
  • the first lead-in port 41, the cable guide 70, the second lead-in port 42 into which the internal cable 30 is drawn, and the terminal block 60 are arranged in the housing 10 in this order. .. Further, in the terminal block 60, the input side terminal portion 61 to which one end side of the internal cable 30 is connected is closer to the cable guide 70 than the output side terminal portion 62 to which the other end side of the external cable 50 is connected.
  • the second lead-in port 42 is arranged between the cable guide 70 and the terminal block 60, and the input side terminal portion 61 is closer to the cable guide 70 than the output side terminal portion 62. Therefore, it is easy to connect the internal cable 30 drawn from the second lead-in port 42 to the input side terminal portion 61 of the terminal block 60. Further, the external cable 50 drawn into the housing 10 from the first lead-in port 41 can be easily routed by the cable guide 70 so as to bypass the terminal block 60.
  • the first lead-in port 41, the terminal block 60, and the second lead-in port 42 are arranged in the housing 10 in this order.
  • the output side terminal portion 62 is closer to the first lead-in port 41 than the input side terminal portion 61. Therefore, as shown in the figure, the external cable 50 is unlikely to interfere with the internal cable 30. Therefore, the comparative mode shown in FIG. 6 does not include the cable guide 70.
  • the arrangement of the first lead-in port 41, the second lead-in port 42, and the terminal block 60 may be restricted due to the arrangement of the equipment provided inside the housing 10.
  • the interference member IF0 is likely to occur. Therefore, it is preferable to provide the cable guide 70 of the present embodiment.
  • the partition wall portion 71 is provided. Therefore, when the cable guide 70 is installed inside the housing 10, the cable guide 70 is provided in a region (first region AR1) around which the external cable 50 is routed inside the housing 10 and inside the housing 10. It can be separated from the region where the interference member IF0 is arranged (second region AR2). That is, when the cable guide 70 is installed inside the housing 10, it is possible to suppress interference between the external cable 50 and the interference member IF0.
  • the above-mentioned thing about the cable guide 70 can be said similarly for the control device 80 for the plasma head 90 provided with the cable guide 70.
  • 10 Housing, 11: First surface, 12: Second surface, 12a: Opening, 13: Third surface, 20: Power supply, 21: DC power supply, 22: Power converter, 23: Smoother, 24: Booster, 30: Internal cable, 41: 1st lead-in port, 42: 2nd lead-in port, 50: external cable, 60: Terminal block, 61: Input side terminal part, 62: Output side terminal part, 70: Cable guide, 71: Bulkhead, 72: Introduction, 80: Control device, 90: Plasma head, AR1: 1st region, AR2: 2nd region, IF0: Interference member, IS0: Insulation member.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Plasma Technology (AREA)
  • Insertion, Bundling And Securing Of Wires For Electric Apparatuses (AREA)

Abstract

L'invention concerne un guide de câble qui est utilisé pour un appareil de commande qui est destiné à des têtes de plasma et qui est pourvu d'un boîtier et d'un dispositif d'alimentation électrique qui est disposé à l'intérieur du boîtier et qui est destiné à fournir de l'énergie à travers un câble externe à une tête de plasma disposée à l'extérieur du boîtier. Le guide de câble est pourvu d'une paroi de séparation qui, lorsqu'elle est installée à l'intérieur du boîtier, partitionne l'intérieur du boîtier en des première et seconde régions. La première région est une région où le câble externe tiré dans le boîtier par l'intermédiaire d'un premier orifice d'entrée disposé sur le boîtier est aspiré et disposé à l'intérieur du boîtier. La seconde région est une région où un élément d'interférence qui est disposé à l'intérieur du boîtier et qui est susceptible d'interférer avec le câble externe est disposé.
PCT/JP2020/030242 2020-08-06 2020-08-06 Guide de câble et appareil de commande pour têtes de plasma Ceased WO2022029967A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022541052A JP7503636B2 (ja) 2020-08-06 2020-08-06 プラズマヘッド用の制御装置
CN202080102105.1A CN115715486A (zh) 2020-08-06 2020-08-06 电缆引导件及等离子体头用的控制装置
DE112020007489.7T DE112020007489T5 (de) 2020-08-06 2020-08-06 Kabelführung und Steuervorrichtung für Plasmaköpfe
PCT/JP2020/030242 WO2022029967A1 (fr) 2020-08-06 2020-08-06 Guide de câble et appareil de commande pour têtes de plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/030242 WO2022029967A1 (fr) 2020-08-06 2020-08-06 Guide de câble et appareil de commande pour têtes de plasma

Publications (1)

Publication Number Publication Date
WO2022029967A1 true WO2022029967A1 (fr) 2022-02-10

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PCT/JP2020/030242 Ceased WO2022029967A1 (fr) 2020-08-06 2020-08-06 Guide de câble et appareil de commande pour têtes de plasma

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JP (1) JP7503636B2 (fr)
CN (1) CN115715486A (fr)
DE (1) DE112020007489T5 (fr)
WO (1) WO2022029967A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11470711B2 (en) * 2017-05-16 2022-10-11 Fuji Corporation Plasma generator with connector-cable detector

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008047292A (ja) * 2006-08-10 2008-02-28 Nippon Reliance Kk アーク放電抑止装置および方法
US20140083734A1 (en) * 2012-09-21 2014-03-27 Thomas & Belts International, Inc. Electrical box with drip point compartments
EP3043628A1 (fr) * 2015-01-08 2016-07-13 Tantec Holding ApS Système de regulation du debit gazeux automatique pour un traitement par plasma

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6936441B2 (ja) 2017-08-10 2021-09-15 秀一 宮原 大気圧プラズマ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008047292A (ja) * 2006-08-10 2008-02-28 Nippon Reliance Kk アーク放電抑止装置および方法
US20140083734A1 (en) * 2012-09-21 2014-03-27 Thomas & Belts International, Inc. Electrical box with drip point compartments
EP3043628A1 (fr) * 2015-01-08 2016-07-13 Tantec Holding ApS Système de regulation du debit gazeux automatique pour un traitement par plasma

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11470711B2 (en) * 2017-05-16 2022-10-11 Fuji Corporation Plasma generator with connector-cable detector

Also Published As

Publication number Publication date
DE112020007489T5 (de) 2023-05-17
JP7503636B2 (ja) 2024-06-20
JPWO2022029967A1 (fr) 2022-02-10
CN115715486A (zh) 2023-02-24

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