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WO2022078198A1 - Grille de balayage push-pull - Google Patents

Grille de balayage push-pull Download PDF

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Publication number
WO2022078198A1
WO2022078198A1 PCT/CN2021/120934 CN2021120934W WO2022078198A1 WO 2022078198 A1 WO2022078198 A1 WO 2022078198A1 CN 2021120934 W CN2021120934 W CN 2021120934W WO 2022078198 A1 WO2022078198 A1 WO 2022078198A1
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WO
WIPO (PCT)
Prior art keywords
grating
piezoresistive
push
reflection
reflection grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2021/120934
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English (en)
Chinese (zh)
Inventor
姜森林
何文馨
漆锐
冯科
杨玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CISDI Research and Development Co Ltd
Original Assignee
CISDI Research and Development Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CISDI Research and Development Co Ltd filed Critical CISDI Research and Development Co Ltd
Publication of WO2022078198A1 publication Critical patent/WO2022078198A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/106—Scanning systems having diffraction gratings as scanning elements, e.g. holographic scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements

Definitions

  • the invention relates to the technical field of micro-optical electromechanical systems, in particular to a push-pull scanning grating.
  • MOEMS micro-optical electromechanical systems
  • the basic principle is: process the grating mirror surface that meets the ultraviolet requirements through MEMS process, accurately control the driving force of the grating rotation, and combine the angle feedback of the angle sensor to accurately control the rotation angle of the grating mirror surface, so as to achieve precise control of the grating scan.
  • Electrostatic driving can only apply attractive driving force, so it is usually only possible to make unipolar driving mode.
  • this scheme is not easy to achieve precise angle control with the precise driving force.
  • the grating is prone to unstable state in unipolar driving, and it cannot recover the state quickly.
  • the driver response is relatively slow, limiting the scanning speed.
  • the thermal driving method will also cause relatively large power consumption, which cannot meet the long-life requirements of portable and mobile devices; piezoelectric driving requires the use of special piezoelectric materials.
  • the use of special materials in MOEMS devices will add additional processes, which increases the difficulty of process-compatible design, is not conducive to process integration, and increases manufacturing costs.
  • the electromagnetic drive has fast response speed, low power consumption and large driving force, which is an ideal driving scheme.
  • the traditional electromagnetic MOEMS scanning micromirror generally only has a unipolar drive, and in the case of obtaining the same deflection angle, the device is often bulky and power consumption is high.
  • the traditional scanning grating also needs an additional set of measurement system to measure its rotation angle, and the non-MOEMS measurement device needs additional preparation, which cannot be integrated with the grating preparation in the process. It is impossible to reduce the grating volume and reduce the system cost.
  • the present invention proposes a push-pull scanning grating, which mainly solves the problems of high power consumption and large volume of the existing unipolar driving mode.
  • a push-pull scanning grating comprising: a support frame, a reflection grating, a torsion beam, an electromagnetic push-pull driver for driving the reflection grating to twist, and an angle sensor for detecting the grating twist angle;
  • the reflection grating is connected to the support frame through two torsion beams distributed on both sides and positioned symmetrically; the axes of the two torsion beams coincide with the center line of the side of the reflection grating; the angle sensor is provided At the connection between one of the torsion beams and the support frame; the electromagnetic push-pull driver includes a drive coil and two drive electrodes; a drive signal is input through the drive electrodes to control the center line of the reflection grating.
  • the drive coils on the sides form currents flowing in opposite directions, driving the reflection grating to twist.
  • the driving coils are respectively drawn from two driving electrodes, and looped coils are respectively formed on both sides of the midline of the side of the reflection grating; connecting electrodes are respectively provided on both sides of the midline of the side of the grating. , the loop coils on both sides are conducted through the connection electrodes, and the drive electrodes and the drive coils form a drive signal loop through the connection electrodes.
  • the positions of the looped coils on both sides are symmetrical along the midline of the side edge of the grating.
  • connection electrodes on both sides are respectively arranged at the center positions corresponding to the two sides of the reflection grating.
  • the maximum twist angle and the working frequency of the reflection grating are changed by changing the number of winding turns of the looped coil.
  • the angle sensor detects the torsional stress of the torsion beam at the corresponding position, and obtains a signal corresponding to the torsion angle of the reflection grating according to the torsional stress.
  • the angle sensor includes a piezoresistive unit and a piezoresistive electrode, the piezoresistive unit is connected to the piezoresistive electrode; the piezoresistive unit detects the torsional stress of the torsion beam at the corresponding position, and passes the The piezoresistive electrode outputs a piezoresistive signal.
  • the piezoresistive unit includes two piezoresistive sensors arranged symmetrically along the axis of the torsion beam;
  • the piezoresistive electrode includes a first electrode and a second electrode arranged symmetrically along the axis of the torsion beam, The first electrode and the second electrode are respectively connected to one of the piezoresistive sensors; a differential piezoresistive signal is formed by the two piezoresistive sensors.
  • the grating constant of the reflection grating is not greater than 0.4 microns.
  • the reflection grating includes a silicon structure layer and an optical reflection layer, and the optical reflection layer is fabricated on the silicon structure layer by a MEMS process; one end of the torsion beam communicates with the reflection through the silicon structure layer.
  • the grating is connected, and the other end is connected through the silicon structure layer and the support frame.
  • a push-pull scanning grating of the present invention has the following beneficial effects.
  • the push-pull structure is formed by the driving coils on both sides of the grating to drive the grating to twist, which can reduce the driving voltage and increase the twist angle of the grating; using the stress after twisting of the grating can realize the rapid recovery of the grating after twisting, reduce the working power consumption, the structure is simple, and the process is complex low, which is beneficial to improve production efficiency.
  • FIG. 1 is a schematic structural diagram of a push-pull scanning grating according to an embodiment of the present invention.
  • FIG. 2 is a schematic cross-sectional view of the push-pull scanning grating along the A-A' direction according to an embodiment of the present invention.
  • Figure 3 is a schematic diagram of the push-pull scanning grating along the B-B' direction.
  • FIG. 4 is a flow chart of a manufacturing process of a push-pull scanning grating according to an embodiment of the present invention.
  • the present invention provides a push-pull scanning grating, including a support frame, a reflection grating, a torsion beam, an electromagnetic push-pull driver and an angle sensor.
  • the reflection grating is connected to the support frame through two torsion beams distributed on both sides and positioned symmetrically; the axes of the two torsion beams coincide with the centerline of the side of the reflection grating; the angle sensor is arranged on one of the torsion beams.
  • the connection between the beam and the support frame; the electromagnetic push-pull driver includes a driving coil and two driving electrodes; the driving signal is input through the driving electrodes to control the driving coils arranged on both sides of the center line of the reflection grating to form currents flowing in opposite directions, and drive the reflection grating twist.
  • the driving coils are respectively drawn out from the two driving electrodes, and looped coils are respectively formed on both sides of the midline of the side of the reflection grating; When the connection electrodes are turned on, the drive electrodes and the drive coil form a drive signal loop through the connection electrodes.
  • the reflection grating includes a silicon structure layer and an optical reflection layer, and the optical reflection layer is fabricated on the silicon structure layer by MEMS technology; one end of the torsion beam is connected to the reflection grating through the silicon structure layer, and the other end is connected to the silicon structure layer and the reflection grating. Support frame connection.
  • the angle sensor includes a piezoresistive unit and a piezoresistive electrode, the piezoresistive unit is connected to the piezoresistive electrode; the piezoresistive unit detects the torsional stress of the torsion beam at the corresponding position, and outputs a piezoresistive signal through the piezoresistive electrode.
  • the piezoresistive unit includes two piezoresistive sensors arranged symmetrically along the axis of the torsion beam; the piezoresistive electrodes include a first electrode and a second electrode arranged symmetrically along the axis of the torsion beam. The electrodes are respectively connected to one of the piezoresistive sensors; a differential piezoresistive signal is formed through the two piezoresistive sensors.
  • the reflection grating (2) and the driving coil are located inside the structure of the support frame (6), and are connected with the driving electrodes through the torsion beam (1).
  • the torsion beam (1) is located in the middle of the upper and lower sides of the reflection grating (2), and is symmetrical to each other.
  • the driving coil coil includes a loopback coil I (41) and a loopback coil II (42), which are symmetrically arranged on the left and right sides of the reflection grating (2) along the longitudinal centerline of the reflection grating (2).
  • the starting end of the loop coil I (41) is provided with a connecting electrode I (c), and the final winding end is provided with a driving electrode I (b); the starting end of the loop coil II (42) is provided with a connecting electrode I (c).
  • the terminal winding is provided with a drive electrode I(b'); the connection electrode I(c) and the connection electrode I(c') are structurally interconnected; the drive signal passes through the drive electrode I(b) or the drive electrode I( b') Input, through the loop coils on both sides and connecting electrodes to form a driving signal circulation loop, so that the driving current flows from one loop loop and flows out from the other loop loop, ensuring that the currents of the loop coils on both sides are equal, In the opposite direction.
  • the angle sensor (3) includes a piezoresistive sensor I (31) and a piezoresistive sensor II (32), which are symmetrically arranged along the longitudinal centerline of the reflection grating (2) at the connection between the torsion beam (1) and the support frame (6), The differential piezoresistive signal is read out through the piezoresistive sensor I(a) and the piezoresistive sensor II(a');
  • the piezoresistive sensor I (31) and the piezoresistive sensor II (32) located at the connection between the torsion beam (1) and the support frame (6) and symmetrically arranged along the longitudinal centerline of the reflection grating (2) constitute an angle sensor (3).
  • the piezoresistive performance parameters can be accurately obtained by process control, and the torsion angle signal can be derived by combining the stress model of the torsion beam. Using this information, the current of the drive coil can be feedback controlled and the angle of the grating can be precisely controlled. Compared with conventional scanning gratings, it has outstanding performance.
  • the grating constant proposed by the present invention is not greater than 0.4 ⁇ m, and all structures can be completely manufactured by using the MEMS process.
  • the process precision is high, the compatibility is good, and a high device yield can be achieved. Has a prominent price advantage.
  • the manufacturing process flow is shown in Figure 4, and the specific embodiments are as follows:
  • the SiO2 layer is grown on both sides of the double-polished polarized silicon wafer, and the SiO2 layer is removed after the backside photolithography is patterned and phosphorous is diffused to form the connection electrode of the coil driver, as shown in Figure 4(a);
  • the grating pattern is patterned on the front side, and a precise grating is formed by wet etching in the monocrystalline direction, as shown in Fig. 4(c).
  • the backside is patterned by photolithography, the backside Si3N4 layer is removed by RIE etching, the SiO2 layer is removed by wet method, and the backside is etched by RIE to achieve structure release, as shown in Figure 4(e);
  • a metal layer is sputtered on the front side as a micro-mirror reflection layer, as shown in Figure 4(f).
  • the invention has great versatility. Under a certain working voltage, the rotation angle and working frequency of the micromirror can be adjusted by changing the number of turns of the electromagnetic microdrive coil to meet the requirements of different optical systems.
  • a push-pull scanning grating of the present invention can realize a larger torsional drive under a smaller driving voltage by introducing a push-pull electromagnetic drive.
  • the electromagnetic effect can achieve the effect of attracting and repelling two directions, the twisted grating can quickly return to the equilibrium position through the twisting effect of the direction. Speeds up the efficiency of angle scanning.
  • the symmetrical driving electrodes are arranged on both sides of the torsion beam, the rotation of the grating in the grating plane is effectively eliminated, the stability of the grating mirror is enhanced, and the stability of the scanning process is facilitated.
  • a grating with a period of 0.4 ⁇ m is prepared on the surface of bulk silicon, which realizes the practicability and resolution in the ultraviolet band; by using Symmetric push-pull micro-actuator structure can realize symmetrical torsional drive and increase the stability of the grating; by using two driving coils, the driving voltage is reduced, and the torsion angle of the grating is increased; by using electromagnetic drive, the response speed of the device is improved and shortened The grating recovery time reduces the working power consumption; by using the piezoresistive angle sensor to feedback the angle information, the electromagnetic driver can be combined to realize the precise control of the grating torsion angle; the structure is simple, the process complexity is low, the compatibility of all processes is complete, and there is no special process , has the advantages of high yield and mass production, and has wide application prospects in the field of MOEMS scanning gratings. Therefore, the present invention

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un réseau de balayage push-pull, comprenant : un cadre de support (6), un réseau de réflexion (2), des poutres de torsion (1), un dispositif d'entraînement push-pull électromagnétique pour entraîner la torsion du réseau de réflexion (2), et un capteur d'angle (3) pour mesurer l'angle de torsion du réseau de réflexion (2), le réseau de réflexion (2) étant relié au cadre de support (6) au moyen des deux poutres de torsion (1) répartis sur ses deux côtés et disposés symétriquement ; les axes des deux poutres de torsion (1) coïncident avec la ligne centrale du côté du réseau de réflexion (2) ; le capteur d'angle (3) est disposé au niveau de l'articulation de l'un des poutres de torsion (1) et du cadre de support (6) ; et le circuit d'entraînement push-pull électromagnétique comprend des bobines d'entraînement (41, 42) et deux électrodes d'excitation (b, b'). Au moyen de signaux d'entraînement qui sont entrés à travers les électrodes d'entraînement (b, b'), les bobines d'entraînement (41, 42) agencés sur les deux côtés de la ligne centrale du réseau de réflexion (2) sont commandés pour former des courants ayant des directions d'écoulement opposées, de façon à entraîner la torsion du réseau de réflexion (2). La structure est simple, la consommation d'énergie peut être efficacement réduite, et la stabilité du réseau de balayage est améliorée.
PCT/CN2021/120934 2020-10-14 2021-09-27 Grille de balayage push-pull Ceased WO2022078198A1 (fr)

Applications Claiming Priority (2)

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CN202011096674.8 2020-10-14
CN202011096674.8A CN112083567A (zh) 2020-10-14 2020-10-14 一种推挽式扫描光栅

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WO2022078198A1 true WO2022078198A1 (fr) 2022-04-21

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Cited By (1)

* Cited by examiner, † Cited by third party
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CN115841945A (zh) * 2022-12-05 2023-03-24 杭州中欣晶圆半导体股份有限公司 改善退火片表面彩色雾的方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112083567A (zh) * 2020-10-14 2020-12-15 中冶赛迪技术研究中心有限公司 一种推挽式扫描光栅

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US20020050744A1 (en) * 2000-08-27 2002-05-02 Jonathan Bernstein Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
WO2011095231A1 (fr) * 2010-02-08 2011-08-11 Lemoptix Sa Procédé et appareil permettant de commander un dispositif à micro-miroir de système micro-électromécanique (mems)
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CN112083567A (zh) * 2020-10-14 2020-12-15 中冶赛迪技术研究中心有限公司 一种推挽式扫描光栅

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CN101852917B (zh) * 2010-03-31 2012-02-22 重庆大学 大转角压电扫描微镜
CN102692705B (zh) * 2011-06-16 2014-05-14 重庆大学 基于moems工艺集成角度传感器的微扫描光栅
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020050744A1 (en) * 2000-08-27 2002-05-02 Jonathan Bernstein Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
WO2011095231A1 (fr) * 2010-02-08 2011-08-11 Lemoptix Sa Procédé et appareil permettant de commander un dispositif à micro-miroir de système micro-électromécanique (mems)
CN102707435A (zh) * 2012-05-29 2012-10-03 重庆大学 双极型电磁式扫描微镜
CN105242396A (zh) * 2015-11-20 2016-01-13 重庆大学 集成角度传感器的高衍射效率mems扫描光栅
CN112083567A (zh) * 2020-10-14 2020-12-15 中冶赛迪技术研究中心有限公司 一种推挽式扫描光栅

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115841945A (zh) * 2022-12-05 2023-03-24 杭州中欣晶圆半导体股份有限公司 改善退火片表面彩色雾的方法

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