WO2021203765A1 - Cavity wall structure for gas-phase reaction-based powder surface coating machine - Google Patents

Abstract

A cavity wall structure for a gas-phase reaction-based powder surface coating machine, relating to the technical field of powder surface coating. The cavity wall structure is used for accommodating an inner barrel (9) capable of containing powder, is connected to a gas supply device (12) and a gas suction device (2), and is further connected to a driving device (10) used for driving the inner barrel (9) to rotate. The cavity wall structure comprises: an inner wall (5) having a cavity (8) used for accommodating the inner barrel (9); an outer wall (4) provided outside the inner wall (5) and used for surrounding the inner wall (5); a heating element (7) provided on the inner wall (5) to heat a substance in the cavity (8); a gas inlet pipe (11) provided on the inner wall (5) to make the cavity (8) in communication with the gas supply device (12); and a gas suction pipe (1) provided on the inner wall (5) to make the cavity (8) in communication with the gas suction device (2). A reaction gas output by the gas supply device (12) can pass through the gas inlet pipe (11) and enter the cavity (8) to react on the surface of the powder, and the gas suction device (2) can suction the reaction gas from the cavity (8) by means of the gas suction pipe (1) to form a vacuum in the cavity (8).

Description

Cavity wall structure of gas-phase reaction powder surface coating machine Technical field

The utility model relates to the field of powder surface coating, in particular to a cavity wall structure of a gas-phase reaction powder surface coating machine.

Background technique

The powder surface coating is realized by surface chemical reaction, generally there are three methods: mechanical stirring and fusion method, chemical solution reaction method, and gas phase reaction method. The gas phase reaction methods mainly include atomic layer deposition (ALD), chemical vapor deposition (CVD), and molecular layer deposition (MLD). The powder surface coating machine is a common equipment to realize the powder surface coating by the gas phase reaction method. At present, the surface coating machine generally uses a fixed cavity wall structure and an inner barrel rotatably arranged inside the cavity wall structure as the reaction device, and the air supply device and the air extraction device are connected to the cavity of the cavity wall structure to transport and extract the reaction. Gas, after entering the inner cavity, the gas diffuses freely into the reaction cavity of the inner barrel, and reacts on the surface of the powder to form a coating layer. However, the existing cavity wall structure is generally simple in structure, which is not conducive to equipment upgrade, and cannot guarantee the effect of powder surface coating. Understandably, in addition to the powder body, the surface coating machine can also be applied to other "parts to be coated", such as parts, bearings, screws and other workpieces, or pharmaceutical particles, or other 3D objects. In view of this, the inventor specially submits this application after studying the existing technology.

Utility model content

The utility model provides a cavity wall structure of a gas-phase reaction powder surface coating machine, which aims to improve the problem that the function of the existing cavity wall is relatively simple, and the powder surface coating effect cannot be well guaranteed.

In order to solve the above technical problems, the present invention provides a cavity wall structure of a gas-phase reaction powder surface coating machine, which is used to house an inner barrel capable of containing powder, and is connected to the air supply device and the air extraction device, and Connected to a driving device for driving the inner barrel to rotate, which includes:

The inner wall has a cavity for accommodating the inner barrel;

An outer wall, which is arranged on the outside of the inner wall to wrap the inner wall;

The heating element is arranged on the inner wall to control the temperature of the cavity;

An air inlet pipe, which is arranged on the inner wall and used to communicate the cavity and the air supply device;

An air extraction pipeline, which is arranged on the inner wall, and is used to communicate the cavity and the air extraction device

The reaction gas output by the gas supply device can pass through the gas inlet pipeline and enter the cavity to react on the surface of the powder. The gas extraction device can extract the reaction gas from the cavity through the gas extraction pipeline, And a vacuum is formed in the cavity.

As a further optimization, the air intake pipeline and the air extraction pipeline are arranged between the inner wall and the outer wall or on the inner surface of the inner wall.

As a further optimization, a vacuum layer for heat insulation is provided between the outer wall and the inner wall.

As a further optimization, when the intake pipe and the suction pipe are arranged between the inner wall and the outer wall, they are located in the vacuum layer, and one end passes through the inner wall to communicate with the cavity, and the other end passes through The outer wall is respectively connected to the air supply device and the air extraction device.

As a further optimization, a valve is respectively provided at one end of the air inlet pipeline and the air extraction pipeline passing through the outer wall.

As a further optimization, the heating element is a resistance wire heater or an infrared heater, and is arranged on the inner surface of the inner wall.

As a further optimization, the driving device includes a rotating shaft provided with a first airway along an axis, the cavity wall structure includes a sleeve disposed on the inner wall and the outer wall and sleeved on the rotating shaft, and a configuration A seal between the rotating shaft and the sleeve; the sleeve is provided with a second air passage to sleeve the shaft, and the shaft is provided with a second air passage to communicate the first air passage and the first air passage The stomata of the second airway.

As a further optimization, the air inlet pipe is arranged between the inner wall and the outer wall, and one end is connected to the air supply device, and the other end is connected to the second air passage.

As a further optimization, the inner wall and the outer wall are provided at corresponding positions with openings for access to the inner tub, and the cavity wall structure further includes a door panel arranged at the opening and used to seal the opening.

As a further optimization, the material of the inner wall (5) and the outer wall (4) is one of stainless steel, nickel, aluminum, tungsten, molybdenum, silicon carbide, and aluminum oxide.

By adopting the above technical scheme, the present utility model can achieve the following technical effects:

The cavity wall structure of the utility model adopts a double-layer cavity wall structure, and the air inlet pipe can be installed between the inner wall and the outer wall, or can be installed inside the inner wall, which can ensure the cleanliness of the cavity and greatly facilitate the powder The installation and maintenance of the body surface coating machine, while a vacuum layer is built in or the outer layer is set as an insulation layer, can well prevent the temperature inside the cavity wall structure from transferring to the outside, reducing heat loss and also making the cavity wall structure internal The temperature control is more accurate, which greatly improves the effect of powder surface coating, which has very good practical significance.

Description of the drawings

In order to explain the technical solutions of the embodiments of the present utility model more clearly, the following will briefly introduce the drawings that need to be used in the embodiments. It should be understood that the following drawings only show certain embodiments of the present utility model. Therefore, it should not be regarded as a limitation of the scope. For those of ordinary skill in the art, without creative work, other related drawings can be obtained based on these drawings.

Figure 1 is a schematic diagram of an embodiment of the present utility model, the cavity wall structure and its external device matching structure;

Figure 2 is a schematic structural diagram of the cavity wall structure of an embodiment of the utility model (the air inlet pipe and the air suction pipe are arranged on the inner surface of the inner wall);

Figure 3 is a schematic structural diagram of the cavity wall structure of an embodiment of the present utility model (the intake pipe and the suction pipe are arranged between the inner wall and the outer wall);

Fig. 4 is a schematic structural diagram of the cavity wall structure of an embodiment of the present invention (the air inlet pipe is arranged between the inner wall and the outer wall, and is connected to the first air passage in the rotating shaft).

Marks in the figure: 1-Air extraction pipeline; 2-Air extraction device; 3-valve; 4-outer wall; 5-inner wall; 6-vacuum layer; 7-heating element; 8-cavity; 9-inner barrel; 10-drive Device; 11-intake pipeline; 12-air supply device; 13-sleeve; 14-first airway; 15-air hole; 16-second airway; 17-seal; 18-rotation shaft.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be described clearly and completely in conjunction with the drawings in the embodiments of the present utility model. Obviously, the description The embodiments of the utility model are part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the scope of protection of the present utility model. Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the scope of protection of the present utility model.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other directions indicated Or the positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and Operation, therefore cannot be understood as a limitation of the present utility model.

In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "multiple" means two or more than two, unless otherwise specifically defined.

In the present invention, unless otherwise clearly defined and defined, the terms "installation", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediary, and it can be a connection between two elements or an interaction relationship between two elements. For those of ordinary skill in the art, the specific meaning of the above-mentioned terms in the present utility model can be understood according to specific circumstances.

In the present invention, unless otherwise clearly defined and defined, the "on" or "under" of the first feature of the second feature may include the first and second features in direct contact, or may include the first and second features. The features are not in direct contact but through other features between them. Moreover, the "above", "above" and "above" of the first feature on the second feature include the first feature directly above and obliquely above the second feature, or it simply means that the first feature is higher in level than the second feature. The "below", "below" and "beneath" the first feature of the second feature include the first feature directly below and obliquely below the second feature, or it simply means that the level of the first feature is smaller than the second feature.

The following describes the utility model in further detail with reference to the drawings and specific embodiments:

As shown in Figures 1 to 4, in this embodiment, a cavity wall structure of a gas-phase reaction powder surface coating machine is used to accommodate the inner barrel 9 containing the powder and is connected to The air supply device 12 and the air suction device 2 are also connected to a driving device 10 for driving the inner tub 9 to rotate. The driving device 10 includes a rotating shaft 18 arranged on the cavity wall structure, and a driving assembly located outside the cavity wall structure for driving the rotating shaft 18 to rotate. The rotating shaft 18 passes through the cavity wall structure and is rotatably arranged on the cavity wall of the cavity wall structure. The inner barrel 9 is arranged at the end of the rotating shaft 18 and arranged coaxially with the rotating shaft 1B.

As shown in Figures 1 to 2, in this embodiment, the cavity wall structure includes:

An inner wall 5 provided with a cavity 8, an outer wall 4 arranged on the outside of the inner wall 5 and used to wrap the inner wall 5, a heating element 7 arranged on the inner wall 5 and used to control the temperature in the cavity 8, arranged on the inner wall 5 to communicate with the cavity The air inlet pipe 11 of the body 8 and the air supply device 12, and the air suction pipe 1 arranged on the inner wall 5 to communicate the cavity 8 and the air suction device 2. The material of the inner wall 5 is one of stainless steel, nickel, aluminum, tungsten, molybdenum, silicon carbide, and aluminum oxide. The cavity 8 is used to accommodate the inner barrel 9 to create a space for the inner barrel 9 to be used for the powder surface coating process. The rotating shaft 18 extends from the outside of the cavity wall structure through the inner wall 5 and the outer wall 4 and extends into the cavity 8. The inner tub 9 is coaxially arranged at the end of the rotating shaft 18 and rotates with the rotating shaft 18.

Specifically, the gas supply device 12 outputs the first reaction gas, and the first reaction gas is input into the cavity 8 through the gas inlet pipe 11, and chemical adsorption or reaction occurs on the surface of the powder. Then the second gas supply device 12 outputs inert gas to discharge the first reaction gas and the first reaction by-products out of the cavity 8 through the gas extraction line 1, and/or use the gas extraction device 2 to separate the first reaction gas and the first reaction gas The reaction by-products are drawn out of the cavity 8 through the air extraction pipe 1 and the cavity 8 has a certain degree of vacuum. Then the gas supply device 12 outputs the second reaction gas, and the second reaction gas is fed into the cavity 8 through the gas inlet pipe 11, and reacts with the first reaction gas on the surface of the powder to form a coating layer. The second reaction gas and the second reaction by-products are drawn out of the cavity 8. During this process, the rotating shaft 1B drives the inner barrel 9 to rotate, which can disperse the powders, and ensure that the surfaces of all powders can contact the two reaction gases to ensure the packaging. The coating is uniform and stable. At the same time, the heating element 7 can well control the temperature in the cavity 8 so that the first reaction gas and the second reaction gas can react at the most suitable temperature, which greatly improves the reaction efficiency and reaction quality. In other embodiments, the first reaction gas and the second reaction gas may also be liquid vapor.

As shown in FIG. 2, in this embodiment, the air supply pipe and the air suction pipe are both arranged on the inner surface of the inner wall 5. As shown in FIG. 3, in another embodiment, the air supply pipe and the suction pipe are both arranged between the inner wall 5 and the outer wall 4. One end of the intake pipe 11 and the suction pipe 1 passes through the inner wall 5 and communicates with the cavity 8, and the other end passes through the outer wall 4 to respectively communicate with the air supply device 12 and the air extraction device 2, and one end passing through the outer wall 4 is respectively provided with Valve 3. The cavity wall structure adopts a double-layer cavity wall mechanism. The air inlet pipe 11 can be installed between the inner wall 5 and the outer wall 4, or can be installed inside the inner wall 5, which can ensure the cleanliness of the cavity 8 and greatly facilitates Installation and maintenance of powder coating machine,

As shown in FIG. 4, in another embodiment, the driving device 10 includes a rotating shaft 18 provided with a first airway 14 along the axis. The sleeve 13 and the seal 17 arranged between the rotating shaft 1B and the sleeve 13; the sleeve 13 is provided with a second air passage 16 for covering the rotating shaft 18, and the rotating shaft 18 is provided with a second air passage 16 for connecting the first air passage 14 and the first air passage 14 The stomata 15 of the second airway 16. The air inlet pipe 11 is arranged between the inner wall 5 and the outer wall 4, and one end is connected to the air supply device 12, and the other end is connected to the second air passage 16. While connecting the air inlet pipe 11 to the reaction chamber in the inner barrel 9, the interior of the cavity 8 is kept clean and tidy, which greatly facilitates the disassembly and assembly of the inner barrel 9 during use, which has good practical significance.

In this embodiment, the material of the outer wall 4 is one of stainless steel, nickel, aluminum, tungsten, molybdenum, silicon carbide, and alumina, and a vacuum layer 6 for heat insulation is provided between the outer wall 4 and the inner wall 5. The vacuum layer 6 not only meets the requirements of the process, but also can achieve heat insulation. The design of the double-layer cavity wall can reduce the heat transfer from the cavity wall structure to the outside, which not only saves energy, but also ensures that the heating element 7 can more accurately control the temperature in the cavity 8. In another embodiment, the vacuum layer 6 is not provided between the inner wall 5 and the outer wall 4, and the material of the outer wall 4 is a heat insulating material. Specifically, the heating element 7 is a resistance wire heater or an infrared heater. When the heating element 7 is an infrared heater, it is disposed on the inner surface of the inner wall 5. When the heating element 7 is a resistance wire, it can be arranged on the inner surface of the inner wall 5, or on the outer surface of the inner wall 5, or arranged in the middle of the inner wall 5.

In this embodiment, the inner wall 5 and the outer wall 4 are provided at corresponding positions with openings for access to the inner tub 9, and the cavity wall structure further includes a door panel arranged at the opening and used to seal the opening.

Those skilled in the art usually refer to solid vapor, reaction gas or reaction liquid vapor as the precursor.

The above descriptions are only the preferred embodiments of the present utility model, and are not used to limit the present utility model. For those skilled in the art, the present utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims (10)

A cavity wall structure of a gas-phase reaction powder surface coating machine, which is used to house an inner barrel (9) capable of containing powder, and is connected to the air supply device (12) and the air extraction device (2), and is also connected to the The driving device (10) for driving the inner barrel (9) to rotate is characterized in that it comprises: The inner wall (5) has a cavity (8) for accommodating the inner barrel (9); The outer wall (4) is arranged on the outside of the inner wall (5) to wrap the inner wall (5); The heating element (7) is arranged on the inner wall (5) to control the temperature of the cavity (8); An air inlet pipe (11), which is arranged on the inner wall (5), for connecting the cavity (8) and the air supply device (12); An air extraction pipeline (1), which is arranged on the inner wall (5), to communicate with the cavity (8) and the air extraction device (2); The reaction gas output by the gas supply device (12) can pass through the gas inlet pipe (11) and enter the cavity (8) to react on the surface of the powder. The gas extraction device (2) can pass through the pump The gas pipeline (1) extracts the reaction gas from the cavity (8) so that a vacuum is formed in the cavity (8). The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 1, wherein the air inlet pipe (11) and the air suction pipe (1) are arranged on the inner wall (5). ) And the outer wall (4) or the inner surface of the inner wall (5). The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 2, wherein a vacuum layer ( 6). The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 3, wherein the air inlet pipe (11) and the air suction pipe (1) are arranged on the inner wall (5). ) And the outer wall (4), it is located in the vacuum layer (6), and one end passes through the inner wall (5) to communicate with the cavity (8), and the other end passes through the outer wall (4) They are respectively connected to the air supply device (12) and the air extraction device (2). The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 4, characterized in that the inlet pipe (11) and the suction pipe (1) pass through the outer wall (4). One end of) is respectively provided with a valve (3). The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 1, wherein the heating element (7) is a resistance wire heater or an infrared heater, and is arranged on the inner wall (5). ) Of the inner surface. The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 1, wherein the driving device (10) includes a rotating shaft ( 18), the cavity wall structure includes a sleeve (13) arranged on the inner wall (5) and the outer wall (4) and sleeved on the rotating shaft (18), and arranged on the rotating shaft (18) The seal (17) between the sleeve (13) and the sleeve (13); the sleeve (13) is provided with a second airway (16) to sleeve the rotating shaft (18), the rotating shaft (18) An air hole (15) is provided to connect the first air passage (14) and the second air passage (16). The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 7, wherein the air inlet pipe (11) is arranged between the inner wall (5) and the outer wall (4) One end is connected to the air supply device (12), and the other end is connected to the second air passage (16). The cavity wall structure of a gas-phase reaction powder surface coating machine according to claim 1, wherein the inner wall (5) and the outer wall (4) are arranged in corresponding positions to take and place the For the opening of the inner barrel (9), the cavity wall structure further includes a door panel arranged at the opening and used for sealing the opening. The cavity wall structure of a gas-phase reaction powder surface coating machine according to any one of claims 1-9, wherein the material of the inner wall (5) and the outer wall (4) is stainless steel, nickel , Aluminum, tungsten, molybdenum, silicon carbide, aluminum oxide.

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