WO2021116380A1 - Verfahren und vorrichtung zum kultivieren biologischer zellen - Google Patents
Verfahren und vorrichtung zum kultivieren biologischer zellen Download PDFInfo
- Publication number
- WO2021116380A1 WO2021116380A1 PCT/EP2020/085717 EP2020085717W WO2021116380A1 WO 2021116380 A1 WO2021116380 A1 WO 2021116380A1 EP 2020085717 W EP2020085717 W EP 2020085717W WO 2021116380 A1 WO2021116380 A1 WO 2021116380A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cultures
- stored
- incubator
- carriers
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
- C12M41/00—Means for regulation, monitoring, measurement or control, e.g. flow regulation
- C12M41/48—Automatic or computerized control
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
- C12M23/00—Constructional details, e.g. recesses, hinges
- C12M23/02—Form or structure of the vessel
- C12M23/12—Well or multiwell plates
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
- C12M41/00—Means for regulation, monitoring, measurement or control, e.g. flow regulation
- C12M41/12—Means for regulation, monitoring, measurement or control, e.g. flow regulation of temperature
- C12M41/14—Incubators; Climatic chambers
Definitions
- the invention relates to a method and a device for cultivating biological cells of different types from one another, in which carriers are stored in an incubator which have one or more storage chambers, with cultures having one or more cells of a common type in each case one of the storage chambers are stored in each case, with cultivation parameters being assigned to the cultures, with data sets containing the organizational coordinates of each storage chamber and the cultivation parameters of the culture stored therein being stored in a data processing device, the carriers being removed from the incubator at predetermined time intervals to treat the cultures according to the respective cultivation parameters.
- Biological cells are stored as cultures (cell cultures) in incubators.
- Such an incubator has a housing in which a plurality of carriers are arranged.
- Each carrier has at least one storage chamber in which a cell culture is stored.
- the cell culture consists of a large number of cells of the same type.
- Microplates or microplates which have a uniform plan of 127.8 x 85.5 mm 2 , are usually used as the carrier.
- the storage chambers of the microplates can be formed by sample wells. Within the Incubator, the temperature and / or the humidity are kept at a given value.
- the cells can be cells of an individual, for example a plant, an animal or a human. However, the cells can also belong to different individuals.
- the cells have different cell types, such as liver cells, muscle cells, brain cells, skin cells, etc. from one another.
- the cells are removed from the incubator at predetermined intervals in order to treat them biologically in particular.
- Nutrients can be added to the individual cultures.
- the cultures can, however, also be divided or reduced in size if they have a number of cells which is above a maximum number.
- cells can also be removed from the cultures at predetermined time intervals in order to treat them otherwise, in particular biologically.
- the culture medium can be exchanged or the cultures can be assigned to other carriers. In order to keep the cell cultures alive, they have to be supplied with nutrients at specified time intervals. This takes place in specified time windows.
- the nutrients are taken from a nutrient container, for example a tab, with a pipetting device.
- the invention is based on the object of further developing the operation of a device for cultivating biological cells in an advantageous manner in terms of use. In particular, it is intended to optimize the operation of a multi-cell system.
- the data set contains organizational coordinates of the storage chamber in which the culture is located.
- the organizational coordinates can contain an identifier of the carrier and an identifier of the storage chamber on the carrier.
- the organizational coordinates With the organizational coordinates, the spatial positions of the cultures can be identified, especially within the incubator.
- the incubator can have a plurality of regularly arranged storage spaces, each of which can carry a carrier, with each carrier being able to be assigned to any storage space.
- the data sets also contain cultivation parameters of the respective cell culture, which can be identified via the organizational coordinates.
- the cultivation parameters can have information about a time window in which the cell culture must be supplied with a nutrient in order to keep it alive.
- the cultivation parameters can contain information about the type or type of cells in the cell culture.
- the cultivation parameters can contain information about the type of nutrient and the nutrient intake.
- the invention provides a multiplexer which, on the basis of an order list, treats the cell cultures one after the other, in particular biologically, the biological treatment being a supply of nutrients, a removal of cells, an exchange of the medium in which the cells are stored or a re-embedding of the cells can be.
- the multiplexer can be formed by a program of an electronic controller, which can be part of the data processing device.
- the method according to the invention arranges the data records by dividing the data records into groups with correlating, for example with exactly, regionally or partially matching or similar cultivation parameters.
- the invention also includes those exemplary embodiments in which the data sets or the cultures represented by the data sets are structured according to the time windows and the type of their nutrient, in which only those data sets or cultures are contained within a group that contain the same nutrient within a period of time need to be fed.
- the cultures of this group are treated biologically one after the other.
- the cultivation parameters can indicate a first time from which a treatment can take place and a second time up to which a treatment must have taken place. These two times define a culture-specific time window.
- Each group can have a group-specific time window and be characterized in that the cultures or data sets it contains have a culture-specific time window, the length of which is greater than the length of the group-specific time window, the group-specific time window lying within each culture-specific time window.
- Different groups are treated one after the other in a treatment phase. Within a treatment phase, cultures with cells of different cell types can be treated, which, however, are supplied with the same nutrient within the same time window. However, cells of a uniform type can also be treated. In perennialsbeispie len of the invention it is provided that cultures of different groups are stored on a carrier. This carrier is used when processing the Carrying list taken from the incubator at different times, cultures of different storage chambers of the carrier being subjected to a particular biological treatment.
- the carriers can be stored in a chaotic or dynamic storage system within the incubator.
- a carrier removed from a first storage location with a handling machine can be stored in a second storage location after the particular biological treatment of at least one culture carried by it, which is different from the first storage location.
- the organizational coordinates of the cultures assigned to the carrier are changed accordingly after the carrier has been deposited in the second storage location.
- the method for culturing biological cells has in particular the following steps: providing a multiplicity of cell cultures, where the cell cultures each have only one cell type and / or the cell types of different cell cultures differ from one another.
- the cell types have uniform cultivation parameters, and the cultivation parameters may be specific to the cell type in order to keep a culture of this cell type alive for the long term by means of periodic biological treatments.
- different cell types can have matching or correlating cultivation parameters, so that cultures of different cell types can be treated, in particular biologically, in a common treatment phase.
- the data records are geord net according to groups, the groups being sorted with regard to a point in time of the start of the biological treatment. After the start of the biological act, all cultures belonging to the group are subsequently treated biologically. According to one exemplary embodiment of the invention, this takes place in that, one after the other, all carriers which have a culture of the group to be treated are removed from the incubator. This can automated with the handling machine. The cultures are treated in a treatment module that can be spatially separated from the incubator.
- liquid nutrients can be supplied to the cultures from a nutrient container using a pipetting device. It is provided that in a treatment phase in which the cell cultures of a group are treated, the nutrient container is not changed or is only changed to a nutrient container that contains the same nutrient. Another group of cell cultures is treated biologically in a subsequent treatment phase. This can be done by adding another nutrient from another nutrient container.
- the invention also includes those embodiments in which a cell culture of a first group is stored in a first storage chamber of a carrier and a cell culture of a second group different from the first is stored in a second storage chamber, the carrier for biological treatment of the cell culture of the first Group is taken out of the incubator in a first treatment phase, is returned to the incubator and, for the biological treatment of the cell culture of the second group, is taken out of the incubator in a second treatment phase and is returned to the incubator.
- the carrier can be placed in different locations in the incubator.
- a device has at least one incubator and supports stored therein, at least some of the supports having one or more storage chambers in which biological cells are stored.
- the device has a data processing device which can have a control with which the incubator and in particular a temperature or air humidity in the incubator is regulated to a setpoint value can be. With the control, an automatic handling machine can be activated, which transports a carrier stored therein.
- the device can have a treatment module into which the carrier can be brought with the automatic handling device and in which a biological treatment of a cell culture carried by the carrier can take place.
- each cell culture is assigned a data record which is stored in the data processing device, for example in a table.
- the data record contains organizational coordinates with which the storage location of the cell culture can be identified.
- the organizational coordinates can contain information about the location of the storage of the carrier and the position of the storage chamber in which the culture is located. The organizational coordinates serve to identify the associated culture with regard to its whereabouts.
- the data set also contains cultivation parameters that contain the information required for biological treatment. These can contain the type of nutrient and information about the nutrient intake. The information can indicate the earliest possible point in time at which the treatment must begin and the latest possible point in time at which the treatment must end. In addition to qualitative characteristics of the nutrient, the information can also contain quantitative information on the nutrient.
- the cultivation parameters of the data sets or cultures assigned to a common group can correlate with one another in such a way that they match, for example. A match is provided in particular for the cultivation parameters relating to the nutrient.
- Correlation of cultivation parameters is also understood, however, when the cultivation parameters have a common intersection, for example represent a time window limited by two points in time. Correlation of cultivation parameters can also be understood, however, when the cultivation parameters contain a range specification and there is a common range that is within the ranges of all records. Two cultivation parameters can then correlate with one another if a common time window can be represented within their respective time window. Another cultivation parameter can be the period between two treatments. After a treatment, a range specification indicating an absolute time range can be updated by adding the period length to the point in time of the last treatment and the point in time thus obtained defining the position of a time window, for example the middle of the time window.
- the table is arranged in such a way that it is sorted according to the cultivation parameters.
- the table contains groups of data sets which have correlating, for example similar, region-wise coinciding or the same cultivation parameters. These groups are sorted among each other according to the times at which a biological treatment must begin.
- the cultivation parameters can not only have information about the beginning of the biological treatment, that is, the beginning of a nutrient supply. They can also have information about the maximum length of a time interval within which the food supply must be carried out. Within a group there may be data sets that have different values for the time interval but the same value for the start of nutrient intake. The data sets are sorted within the group in such a way that the data sets with the shortest time intervals are treated at the beginning of a treatment phase. The data records can thus be sorted within a group according to the time intervals. In particular, the cultivation parameters each have a tuple of numerical values th on.
- the carriers are preferably the above-mentioned microplates, which have a plurality of sample wells arranged in a grid-like manner, each sample well being able to be a storage chamber for receiving a culture.
- the method according to the invention and the device according to the invention have the advantage that carriers which differ from one another, but each carry a cell culture and which have correlating cultivation parameters, are successively removed from the incubator within a treatment phase and brought to a treatment module. in order to biologically treat the cell culture there in a corresponding manner, and then to bring the carrier back into the incubator, the nutrient stored in a treatment module not being changed within a treatment phase.
- the method according to the invention thus allows an economical biological treatment of the cultures in a system for multiculture.
- FIG. 1 schematically in the form of a table twelve data sets of twelve cultures S, which are stored in six storage chambers K of two carriers C and which, as cultivation parameters, are a time ti at which the treatment can be started at the earliest, a time t2 , by which the treatment must be finished at the latest and have information about the nutrient N,
- Fig. 2 in the form of a table a schedule 9 with four groups G: I, II, III, IV, which are dealt with one after the other,
- Fig. 3 in the form of a table an order list 10, according to which the groups G of cultures S shown in Figure 2 are treated one after the other and
- Fig. 4 schematically shows a treatment device with an incubator 1, arranged therein carriers 2 with storage chambers 3, a handling machine 5 for transporting the carrier 2 to a treatment module 6, where the cultures arranged in the storage chambers 3 by means of a pipetting device 7 in a Bottle 8 stored nutrients are supplied.
- FIG. 4 schematically shows a device with an incubator 1, which is a closed container in which a predetermined temperature and / or a predetermined humidity can be set.
- the incubator 1 has a large number of storage spaces which can be equipped with carriers 2 of the same configuration, which according to the invention have the shape of microplates.
- Each carrier 2 has a plurality of storage chambers 3, which are preferably sample wells.
- the carriers 2 are removed from the incubator 1 at predetermined time intervals. This is done with the automatic handling unit 5.
- the carriers 2 are transported to a treatment module 6, where a pipetting device 7 with one or more pipettes is provided. With Liquid nutrient N is removed from a bottle 8 from the one or more pipettes and placed in the storage chambers 3.
- the reference number 4 denotes a data processing device which can also have a controller.
- the cultures are treated in groups. From the total amount of cultures, those that need to be supplied with the same nutrient N for a short time are combined into a first group. For this purpose, a data record is assigned to each culture.
- the cultures S carry the numbers 1 to 12.
- two carriers C are provided, each of which has six storage chambers K.
- Each data record thus has two organizational coordinates C, K with which a culture S can be assigned to a location.
- the table shown in Figure 1 also contains cultivation parameters tl and t2, which indicate the points in time from which the treatment can take place and up to which the treatment must be carried out.
- the cultivation parameters also contain information about the nutrient N to be used; two nutrients A, B are provided in the exemplary embodiment.
- the cultures S can be assigned to four different groups G on the basis of the cultivation parameters. For the sake of simplicity, only two cultivation parameters are given here. More cultivation parameters can also be provided, for example the type of cells, the length of time between two treatments, etc.
- FIG. 2 shows the four groups G: I, II, III and IV.
- the groups G each have different group-specific time windows At during which the cultures S can be treated.
- each group G has a group-specific nutrient N.
- FIG. 2 shows a time schedule 9 consisting of four successive treatment phases.
- All cultures S that are assigned to one of the four groups G are characterized in that the group-specific time window is in each culture-specific time window t1, t2.
- Groups G with correlating cultivation parameters ti, t2, N can be subdivided.
- a method which is characterized in that by means of a handling machine 5 according to the order list 10 in a treatment phase in which only cultures S of a group G are treated, only those carriers 2 are removed from the incubator 1 one after the other, which store at least one culture S, the cultivation parameters of which have a time window ti, tz in which a group-specific time window DT lies and which are treated in the same way and / or which store at least one culture S, the same nutrient N within a common Time window DT is supplied.
- a device which is characterized in that the data sets are divided into groups G with correlating cultivation parameters and the data processing device 4 is programmed in such a way that in each treatment phase in which only cultures S of a group G are treated, only those carriers 2 are removed from the incubator 1 one after the other that store at least one culture S that is within a time window DT this group are biologically treated in the same way and / or which store at least one culture S to which the same nutrient N is supplied.
- a device or a method which is characterized in that the carrier 2 microplates and the storage chambers 3 are sample wells of the microplates and / or that the carrier 2 have a uniform rectangular plan that is 127.8 mm wide and has a depth of 85.5 mm and / or that in a treatment phase only one common nutrient N is fed from a nutrient container 8 by means of a pipetting device 7 to the cultures S and / or that a pipetting device 7 controlled by a program of a controller is used and / or that the carriers 2 are stored in a chaotic or dynamic storage facility in the incubator 1 and / or that the cultivation parameters contain information about an earliest treatment time ti and a latest treatment time b, the cell type and / or the maximum number of cells in the culture S. .
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Abstract
Description
Claims
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/783,588 US20230028667A1 (en) | 2019-12-11 | 2020-12-11 | Method and device for cultivating biological cells |
| JP2022534835A JP7734669B2 (ja) | 2019-12-11 | 2020-12-11 | 生物細胞を培養する方法及び装置 |
| CN202080085995.XA CN114901798A (zh) | 2019-12-11 | 2020-12-11 | 用于培养生物细胞的方法和设备 |
| EP20830104.4A EP4073225A1 (de) | 2019-12-11 | 2020-12-11 | Verfahren und vorrichtung zum kultivieren biologischer zellen |
| KR1020227022885A KR20220113443A (ko) | 2019-12-11 | 2020-12-11 | 생물학적 세포들을 배양하기 위한 방법 및 디바이스 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019134003.9 | 2019-12-11 | ||
| DE102019134003.9A DE102019134003A1 (de) | 2019-12-11 | 2019-12-11 | Verfahren und Vorrichtung zum Kultivieren biologischer Zellen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2021116380A1 true WO2021116380A1 (de) | 2021-06-17 |
Family
ID=74104046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2020/085717 Ceased WO2021116380A1 (de) | 2019-12-11 | 2020-12-11 | Verfahren und vorrichtung zum kultivieren biologischer zellen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20230028667A1 (de) |
| EP (1) | EP4073225A1 (de) |
| JP (1) | JP7734669B2 (de) |
| KR (1) | KR20220113443A (de) |
| CN (1) | CN114901798A (de) |
| DE (1) | DE102019134003A1 (de) |
| WO (1) | WO2021116380A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021102487A1 (de) | 2021-02-03 | 2022-08-04 | Aixinno Limited | Verfahren zum Handhaben biologischer Zellkulturen |
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| JPS5854418B2 (ja) | 1978-04-21 | 1983-12-05 | 富士通株式会社 | デ−タ処理装置 |
| US5106584A (en) | 1984-09-18 | 1992-04-21 | Sumitomo Electric Industries, Ltd. | Cell selecting apparatus |
| US6146592A (en) | 1996-08-21 | 2000-11-14 | Jeol Ltd. | Automatic biochemical analyzer |
| EP1900806A1 (de) | 2005-06-29 | 2008-03-19 | Nikon Corporation | Übertragungsvorrichtung für kulturgefäss, kulturvorrichtung und halter für kulturgefäss |
| US7546210B2 (en) | 2000-06-08 | 2009-06-09 | The Regents Of The University Of California | Visual-servoing optical microscopy |
| DE102009018325A1 (de) * | 2009-04-22 | 2010-11-25 | Pan-Systech Gmbh | Vorrichtung zur automatisierten, parallelisierten Kultivierung von Zellen |
| US20120034596A1 (en) * | 2009-04-22 | 2012-02-09 | Pan-Systech Gmbh | Device for automatically cultivating cells in parallel |
| US8318492B2 (en) | 2005-08-26 | 2012-11-27 | Plasticell Limited | Method for determining the cell culture history of a cell unit labeled with more than one type of tag |
| CN105675864A (zh) | 2016-02-29 | 2016-06-15 | 董玉俊 | 一种基于免疫方法的细菌自动分选标记装置 |
| US9574174B2 (en) | 2002-10-03 | 2017-02-21 | Plasticell Limited | Cell culture |
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| WO2018193612A1 (ja) * | 2017-04-21 | 2018-10-25 | 株式会社ニコン | 相関算出装置、相関算出方法及び相関算出プログラム |
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| DE50211264D1 (de) * | 2002-09-16 | 2008-01-03 | Pan Biotech Gmbh | Einrichtung zur kultivierung von zellen, insbesondere menschlicher oder tierischer zellen |
| DE102005021034B4 (de) * | 2005-05-06 | 2012-09-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Kultivierung einer Zellkultur in einem automatisierten Zellkultursystem sowie automatisiertes Zellkultursystem |
| JP5768432B2 (ja) * | 2011-03-24 | 2015-08-26 | 株式会社ニコン | 培養装置、培養管理方法およびプログラム |
| EP3377981B1 (de) * | 2015-11-18 | 2023-10-11 | Thrive Bioscience, Inc. | Inkubator für zellkulturen |
| US10774302B2 (en) * | 2016-03-29 | 2020-09-15 | Biosyntagma, Llc | Device and method for dissecting and analyzing individual cell samples |
| EP3404090A1 (de) * | 2017-05-15 | 2018-11-21 | Eppendorf AG | Inkubator, system und verfahren für das überwachte zellwachstum |
| WO2019059936A1 (en) * | 2017-09-23 | 2019-03-28 | Hewlett-Packard Development Company, L.P. | ELECTROPORATION |
| CA3088169A1 (en) * | 2018-01-12 | 2019-07-18 | SeLux Diagnostics, Inc. | Systems and methods for scheduling and sequencing automated testing procedures |
| EP3575800A1 (de) * | 2018-06-01 | 2019-12-04 | The Charles Stark Draper Laboratory, Inc. | Vorrichtung zur automatisierten bakterienidentifizierung und zur profilierung von antibiotischer suszeptibilität |
-
2019
- 2019-12-11 DE DE102019134003.9A patent/DE102019134003A1/de active Pending
-
2020
- 2020-12-11 US US17/783,588 patent/US20230028667A1/en active Pending
- 2020-12-11 CN CN202080085995.XA patent/CN114901798A/zh active Pending
- 2020-12-11 WO PCT/EP2020/085717 patent/WO2021116380A1/de not_active Ceased
- 2020-12-11 EP EP20830104.4A patent/EP4073225A1/de active Pending
- 2020-12-11 KR KR1020227022885A patent/KR20220113443A/ko active Pending
- 2020-12-11 JP JP2022534835A patent/JP7734669B2/ja active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5854418B2 (ja) | 1978-04-21 | 1983-12-05 | 富士通株式会社 | デ−タ処理装置 |
| US5106584A (en) | 1984-09-18 | 1992-04-21 | Sumitomo Electric Industries, Ltd. | Cell selecting apparatus |
| US6146592A (en) | 1996-08-21 | 2000-11-14 | Jeol Ltd. | Automatic biochemical analyzer |
| US7546210B2 (en) | 2000-06-08 | 2009-06-09 | The Regents Of The University Of California | Visual-servoing optical microscopy |
| US9574174B2 (en) | 2002-10-03 | 2017-02-21 | Plasticell Limited | Cell culture |
| EP1900806A1 (de) | 2005-06-29 | 2008-03-19 | Nikon Corporation | Übertragungsvorrichtung für kulturgefäss, kulturvorrichtung und halter für kulturgefäss |
| US8318492B2 (en) | 2005-08-26 | 2012-11-27 | Plasticell Limited | Method for determining the cell culture history of a cell unit labeled with more than one type of tag |
| US20120034596A1 (en) * | 2009-04-22 | 2012-02-09 | Pan-Systech Gmbh | Device for automatically cultivating cells in parallel |
| DE102009018325A1 (de) * | 2009-04-22 | 2010-11-25 | Pan-Systech Gmbh | Vorrichtung zur automatisierten, parallelisierten Kultivierung von Zellen |
| US9946834B2 (en) | 2009-09-21 | 2018-04-17 | Plasticell Limited | Apparatus and method for processing cell culture data |
| WO2017143155A2 (en) | 2016-02-18 | 2017-08-24 | President And Fellows Of Harvard College | Multiplex alteration of cells using a pooled nucleic acid library and analysis thereof |
| CN105675864A (zh) | 2016-02-29 | 2016-06-15 | 董玉俊 | 一种基于免疫方法的细菌自动分选标记装置 |
| WO2018193612A1 (ja) * | 2017-04-21 | 2018-10-25 | 株式会社ニコン | 相関算出装置、相関算出方法及び相関算出プログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102019134003A1 (de) | 2021-06-17 |
| EP4073225A1 (de) | 2022-10-19 |
| KR20220113443A (ko) | 2022-08-12 |
| US20230028667A1 (en) | 2023-01-26 |
| JP7734669B2 (ja) | 2025-09-05 |
| JP2023507288A (ja) | 2023-02-22 |
| CN114901798A (zh) | 2022-08-12 |
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