WO2021107197A1 - Five-axis stage for inspection - Google Patents

Abstract

A five-axis stage for inspection according to the present invention comprises: a base block; a driving block provided above the base block so as to be movable linearly or tiltable; a rotating block provided above the driving block so as to be rotatable horizontally; a rotating unit provided in the driving block to rotate the rotating block; and a coupling block provided between the base block and the driving block so as to facilitate the coupling of the base block and the driving block to each other. The present invention includes: a first linear moving unit for linearly moving the driving block in the X-axis direction; a second linear moving unit for linearly moving the driving block in the Y-axis direction; a first tilting unit for tilting the driving block in the TX direction; and a second tilting unit for tilting the driving block in the TY direction.

Description

5-axis stage for inspection

The present invention relates to a 5-axis stage for inspection of an inspection object, and more particularly, to a 5-axis stage for inspection that can move or rotate an inspection object in various directions and can be miniaturized.

A general test apparatus for a portable terminal includes an interface in which at least one of a serial port, a USB port, and a GPIB port is connected to the terminal performance test device for communication connection, and a basic setting state of the terminal performance test device through the communication port is read and displayed, and test condition setting means for changing the setting state of the terminal performance test device according to a request for changing the settings of the test facilitator, and the performance measurement condition of the mobile communication terminal after connecting to the terminal performance test device through a communication port and includes individual test control means for performing the test by remotely controlling the terminal performance test device according to the test progress request of the test facilitator.

In Korean Patent Laid-Open Patent Publication No. 10-2006-0133657, there is a problem in that the mobile communication terminal performance test unit is directly connected to the mobile communication terminal, so that the port of the mobile communication terminal is damaged.

In addition, since the disclosed patent has a latching coupling between the connection terminals for stable coupling when the mobile communication terminal performance testing unit is directly connected to the mobile communication terminal, it is better to automate the mobile communication terminal performance testing unit and the direct mobile communication terminal one by one. It was not easy, and there was a problem that it had to be connected manually.

Accordingly, an inspection jig was developed to solve the above problems.

However, the inspection jig according to the prior art has a very complicated internal structure, and thus there is a problem that the volume occupied by the equipment is very large, and there is a problem that the precision is relatively low.

And, the inspection jig according to the prior art inevitably causes frequent failures due to its complex internal structure, and thus there is a problem in that costs for maintenance/repair are wasted.

Therefore, a method for solving these problems is required.

The present invention has been devised to solve the problems of the prior art, and it is an object of the present invention to provide a 5-axis stage capable of efficiently performing an inspection process by allowing an inspection object to be precisely moved or rotated in various directions have

In addition, it has an object to provide a 5-axis stage for inspection that can be miniaturized and minimized in volume.

The problems of the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

The 5-axis stage for inspection of the present invention for achieving the above object is a base block, a driving block provided to be linearly movable or tiltable on an upper portion of the base block, a rotation provided to be horizontally rotatable on the upper portion of the driving block A block, a rotating unit provided in the driving block to rotate the rotating block, a coupling block provided between the base block and the driving block to connect the base block and the driving block to each other, the base block and the coupling A first linear movement unit which is provided to connect blocks to each other, and which linearly moves the driving block in the X-axis direction as the coupling block is linearly moved in the X-axis direction by operation, the driving block and the coupling block to each other A second linear movement unit that is provided to connect and linearly moves the driving block in the Y-axis direction as it is linearly moved in the Y-axis direction with respect to the coupling block by operation, is provided in the base block, and is driven by the operation Provided in the base block and the first tilting unit for tilting the driving block in the TX direction by moving one corner of the block up and down, the driving by moving the other corner of the drive block up and down by manipulation and a second tilting unit for tilting the block in the TY direction.

At this time, the first linear movement unit is connected to the base block, the first linear movement unit for linearly moving the coupling block in the X-axis direction by manipulation, the opposite side of the first linear movement unit with respect to the coupling block It may include a first moving part provided on the side and a first compressive elastic member for providing a restoring force in the direction of the first linear moving part to the first moving part.

And the first linear moving part, the first rotating member and one side rotated by operation are engaged with the first rotating member and connected by a screw thread, and are linearly moved in the X-axis direction according to the rotation of the first rotating member, , the other side may include a first fixing member fixed to the coupling block.

In addition, the second linear movement unit is connected to the driving block, a second linear movement unit for linearly moving the driving block in the Y-axis direction as it is linearly moved in the Y-axis direction with respect to the coupling block by operation, the A second moving part provided on the opposite side of the second linear moving part with respect to the coupling block and a second compressive elastic member providing a restoring force to the second moving part in the direction of the second linear moving part may be included. have.

At this time, the second linear moving part, the second rotating member rotated by operation and one side are meshed with the second rotating member by a screw thread, and the second rotating member is Y according to the rotation of the second rotating member. It may include a second fixing member to be moved linearly in the axial direction, the other side of which is fixed to the coupling block.

And the first tilting unit is provided in the base block, a first vertical movement part exposed to one edge of the driving block and formed to be movable up and down, a first rotating part provided in the base block and rotated by manipulation And one side is coupled to the first rotating part and connected by a screw thread, provided at the lower part of the first vertical moving part, the height of the first vertical moving part as it is linearly moved in the Y-axis direction according to the rotation of the first rotating part It may include a first variable height variable to change the.

In addition, the first variable-height portion is connected to the first screw-coupled portion and the first screw-coupled portion meshed with the first rotating portion by a screw thread, and a first slope whose height is gradually changed in the Y-axis direction around it. The region may include a first inclination forming part for changing the height of the first vertical moving part by the first inclined region as the region is linearly moved in the Y-axis direction.

In addition, the first tilting unit may further include a first vertical restoration part provided on the first rotating part in the base block and exposed to the driving block side to provide an upward restoring force to the driving block. .

In addition, the second tilting unit is provided in the base block, a second vertical movement part exposed to the other edge of the driving block to be vertically movable, a second rotating part provided in the base block and rotated by manipulation And one side is coupled to the second rotating part and connected by a screw thread, is provided under the second vertical moving part, and is linearly moved in the Y-axis direction according to the rotation of the second rotating part, so that the height of the second vertical moving part is It may include a second variable height variable to change the.

In this case, the second variable-height portion is connected to the second screw-coupled portion and the second screw-coupled portion coupled to the second rotating portion by a screw thread, and a second slope whose height is gradually changed in the Y-axis direction around it. The region may include a second inclination forming part for changing the height of the second vertical moving part by the second inclined region as it linearly moves in the Y-axis direction.

In addition, the second tilting unit may further include a second vertical restoration part provided on the second rotating part in the base block and exposed to the driving block side to provide an upward restoring force to the driving block. .

And the rotation unit, a third linear moving part provided to be linearly movable in the X-axis direction by manipulation in the driving block, a lower part is provided in the driving block, and an upper part is formed to be connected to the rotation block, A block rotating unit that is linearly moved in the X-axis direction together by the linear movement of the third linear moving unit and is formed to have a degree of freedom of movement in the Y-axis direction to rotate the rotating block, the third linear movement is based on the block rotating unit A third moving part provided on the opposite side of the eastern part and a third compression elastic member providing a restoring force in the direction of the third linear moving part to the third moving part may be included.

Meanwhile, the present invention may further include a locking unit that is provided in the base block and prevents the tilting driving of the driving block by selectively restraining the driving block by manipulation.

At this time, the locking unit is provided to be movable linearly in the Y-axis direction by manipulation in the base block, and a locking part in which a third inclined region whose height is gradually changed in the Y-axis direction is formed around the end and in the base block. is exposed to the side of the second linear movement unit, and the height is changed by the third inclination region according to the Y-axis direction linear movement of the locking part, and as it selectively contacts the second linear movement unit, the driving block is tilted It may include a locking portion to prevent the.

The five-axis stage for inspection of the present invention for solving the above problems has the advantage of being able to significantly reduce the overall volume and height because the components for linear movement and tilting driving are rationally arranged.

In addition, the present invention has the advantage that the movement or rotation structure of each component is designed very rationally, the displacement of the inspection object can be precisely varied.

In addition, due to such a rational structure, the frequency of failures can be extremely reduced, and accordingly, there is an advantage of reducing the cost and time required for maintenance/repair.

Effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

1 is a view showing a state of a 5-axis stage for inspection according to an embodiment of the present invention;

2 and 3 are views showing the structure of the rotation unit and the rotation block in the 5-axis stage for inspection according to an embodiment of the present invention;

Figure 4 is a view showing the structure of the base block and the coupling block in the 5-axis stage for inspection according to an embodiment of the present invention;

5 is a view showing a coupling relationship between a first linear movement unit, a second linear movement unit, a first tilting unit, and a second tilting unit in a 5-axis stage for inspection according to an embodiment of the present invention;

6 is a view showing the structure of the first linear movement unit in the inspection 5-axis stage according to an embodiment of the present invention;

7 is a view showing a structure of a first tilting unit in a 5-axis stage for inspection according to an embodiment of the present invention;

8 is a view showing a driving form of a driving block and a rotating block in a 5-axis stage for inspection according to an embodiment of the present invention; and

9 is a view showing the structure of the locking unit in the inspection 5-axis stage according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention in which the objects of the present invention can be specifically realized will be described with reference to the accompanying drawings. In describing the present embodiment, the same names and the same reference numerals are used for the same components, and an additional description thereof will be omitted.

1 is a view showing a state of a 5-axis stage for inspection according to an embodiment of the present invention.

Referring to FIG. 4 together with FIG. 1 , a 5-axis stage for inspection according to an embodiment of the present invention includes a base block 300 , a driving block 100 , a rotation block 10 , and a rotation unit 200 . And, the coupling block (B), the first linear movement unit 400, the second linear movement unit 500, the first tilting unit 600, the second tilting unit 700, and the locking unit ( 800).

The base block 300 provides a basic frame in which other components are provided.

And the driving block 100 is provided on the upper portion of the base block 300 to be movable or tilted linearly, so as to implement linear movement and tilting of a stage (not shown) connected to the upper portion of the rotation block 10 . .

The rotating block 10 is a component provided to be horizontally rotatable on the upper portion of the driving block 100 , and the rotating unit 200 is provided in the driving block 100 to rotate the rotating block 10 . It is a component that makes

In addition, the coupling block (B) is provided between the base block 300 and the driving block 100 to serve as a mediator so that the base block 300 and the driving block 100 are connected to each other.

The first linear movement unit 400 is provided to connect the base block 300 and the coupling block (B) to each other, and the driving as the coupling block (B) is linearly moved in the X-axis direction by manipulation. It serves to linearly move the block 100 in the X-axis direction.

The second linear movement unit 500 is provided to connect the driving block 100 and the coupling block (B) to each other, and as it is linearly moved in the Y-axis direction with respect to the coupling block (B) by operation, the driving It serves to linearly move the block 100 in the Y-axis direction.

And the first tilting unit 600 is provided in the base block 300, and tilts the drive block 100 in the TX direction by moving one corner of the drive block 100 up and down by manipulation. .

The second tilting unit 700 is provided in the base block 300 and is provided on the opposite side to the first tilting unit 600, and for moving the other corner portion of the driving block 100 up and down by manipulation. Accordingly, the driving block 100 is tilted in the TY direction.

The locking unit 800 is provided in the base block 300 and serves to prevent the tilting driving of the driving block 100 by selectively restraining the driving block 100 by manipulation.

Hereinafter, each of these components will be described in more detail.

2 and 3 are views showing the structures of the rotation unit 200 and the rotation block 10 in the inspection 5-axis stage according to an embodiment of the present invention.

2 and 3, the rotation block 10 is formed to be coupled to the rotational bearing 110 of the cylindrical shape formed on the upper portion of the driving block 100, by the rotation unit 200 It may be provided to rotate in a horizontal direction.

In this embodiment, the rotation block 100 includes an insertion hole 12 into which the rotation bearing 110 is inserted, and an auxiliary insertion hole 14 into which the block rotation unit 250 of the rotation unit 200 to be described later is inserted. include

And the rotation unit 200 has a shape provided long in the X-axis direction inside the driving block (100).

Specifically, the rotation unit 200 includes a third linear moving part 220 provided to be able to move linearly in the X-axis direction by manipulation within the driving block 100 , and a lower portion 252 of the driving block 100 . ), the upper part 254 is formed to be connected to the rotation block 10, and is linearly moved together in the X-axis direction by the linear movement of the third linear movement unit 220, but the movement in the Y-axis direction A block rotating unit 250 formed to have a degree of freedom to rotate the rotating block 10, and a third moving unit provided on the opposite side of the third linear moving unit 220 with respect to the block rotating unit 250 It includes a 230 and a third compression elastic member 240 that provides a restoring force in the direction of the third linear moving unit 220 to the third moving part 230 .

That is, the block rotating part 250 may be moved in the X-axis direction by the movement of the third linear moving part 220 in the X-axis direction and the contraction and extension of the third compression elastic member 240 , and accordingly, the The rotation block 10 may be rotated.

Here, the driving block 100 may have an exposure hole 250 through which the block rotation part 250 protrudes upward, and the exposure hole 250 is wider than the Y-axis direction width of the block rotation part 250 . It is formed to have a large width so that the block rotating part 250 can be moved somewhat in the Y-axis direction. Accordingly, the rotation block 10 may be rotated with respect to the central axis by the block rotation unit 250 .

In this embodiment, the rotating unit 200 may further include a first plate 210 provided on one side of the driving block 100, and the user inserts a tool into the first plate to insert the third linear A first manipulation hole 212 for manipulating the moving unit 220 is formed.

4 is a view showing the structure of the base block 300 and the coupling block (B) in the 5-axis stage for inspection according to an embodiment of the present invention, Figure 5 is for inspection according to an embodiment of the present invention In the 5-axis stage, it is a view showing the coupling relationship of the first linear movement unit 400, the second linear movement unit 500, the first tilting unit 600, and the second tilting unit 700.

First, as shown in Figure 4. The base block 300 is spaced apart in the X-axis direction and includes a pair of coupling parts 310 and 320 protruding upward, and the pair of coupling parts 310 and 320 has a first linear movement unit 400 . ) can be combined through it.

And the coupling block (B) is positioned between the pair of coupling parts (310, 320), and the coupling block (B) is slightly floating on the base block (300) and the first linear movement unit (400) ) is combined with Also, the second linear movement unit 400 has a form coupled to the base block 300 , and the second linear movement unit 400 may be combined with the above-described driving block 100 .

As such, the coupling block (B) is provided between the base block 300 and the driving block 100 to serve as a mediator so that the base block 300 and the driving block 100 are connected to each other.

6 is a view showing the structure of the first linear movement unit 400 in the inspection 5-axis stage according to an embodiment of the present invention.

Referring to FIG. 6 together with FIG. 5 , the first linear movement unit 400 is connected to the base block 300 and linearly moves the coupling block B in the X-axis direction by operation. The linear moving parts 420 and 430, the first moving part 450 provided on the opposite side of the first linear moving parts 420 and 430 with respect to the coupling block (B), and the first moving part A first compression elastic member 460 for providing a restoring force in the direction of the first linear moving parts 420 and 430 is included in the 450 .

At this time, the first linear moving parts 420 and 430 are connected to a first rotating member 420 that is rotated by manipulation, and one side is engaged with the first rotating member 420 by a screw thread to connect the first rotation. It linearly moves in the X-axis direction according to the rotation of the member 420 and includes a first fixing member 430 having the other side fixed to the coupling block (B).

That is, when the first rotating member 420 is rotated clockwise or counterclockwise, the coupling block (B) can be moved along the X-axis direction, and the driving block is indirectly coupled to the coupling block (B). The block 100 is also moved in the X-axis direction together.

In this embodiment, the first linear movement unit 400 includes a 2-1 plate 410 provided on one side of the base block 300 and a base block 300 on the opposite side of the 2-1 plate 410 . ) may include a 2-2 plate 440 provided on the other side, and the 2-1 plate 410 fixes the first linear moving parts 420 and 430, and the 2-2 plate 410 is fixed. The plate 440 fixes the first compression elastic member 460 .

Like the first linear movement unit 400 described above, the second linear movement unit 500 may also have the same structure.

As shown in FIG. 5 , the second linear movement unit 500 is connected to the driving block 100, and the driving block 100 is linearly moved in the Y-axis direction with respect to the coupling block B by operation. A second linear moving part (520, 530) for linearly moving in the Y-axis direction, and a second moving part provided on the opposite side of the second linear moving part (520, 530) with respect to the coupling block (B). It includes a 550 and a second compression elastic member 560 that provides a restoring force to the second moving part 550 in the direction of the second linear moving parts 520 and 530 .

And the second linear moving parts 520 and 530 are connected to a second rotating member 520 rotated by manipulation, and one side of the second rotating member 520 and the second rotating member 520 is engaged with and connected by a screw thread to the second rotation. The second rotating member 520 is linearly moved in the Y-axis direction according to the rotation of the member 520 and includes a second fixing member 530 having the other side fixed to the coupling block (B).

That is, in the case of the first linear moving unit 400, it has a form of moving the coupling block (B) in a state where it is fixed to the base block 300, but the second linear moving unit 400 is in the coupling block (B). It has a difference that it moves with respect to itself and linearly moves the driving block 300 in the Y-axis direction.

In this embodiment, the second linear moving unit 500 includes a 3-1 plate 510 provided on another side of the base block 300 and a base block opposite to the 3-1 plate 510 . A 3-2 plate 540 provided on the other side of the 300 may be included, and the 3-1 plate 510 fixes the second linear moving parts 520 and 530, and the The 3-2 plate 540 fixes the second compression elastic member 560 .

7 is a view showing the structure of the first tilting unit 600 in the inspection 5-axis stage according to an embodiment of the present invention.

5 and 7 , the first tilting unit 600 is provided in the base block 300 and is exposed to one edge of the driving block 100 so as to be movable up and down. The eastern part 640 and the first rotating part 620 provided in the base block 300 and rotated by manipulation, and one side of the first rotating part 620 and the first rotating part 620 are engaged and connected by a screw thread, and the first A first height variable part 630 provided under the vertical moving part 640 and configured to change the height of the first vertical moving part 640 as it is linearly moved in the Y-axis direction according to the rotation of the first rotating part 620 . ) is included.

At this time, the first variable height part 630 is connected to the first rotating part 620 and the first screw coupling part 632 connected by a screw thread, and the first screw coupling part 632, A first inclined region 635 having a gradually varying height in the Y-axis direction is formed around the periphery, and as it is linearly moved in the Y-axis direction, the height of the first vertical movement unit 640 is caused by the first inclined region 635. It has a form including a first slope forming part 634 for changing the .

And the first up-and-down moving part 640, the n-th 1-1 ball member 644 that moves up and down by the first inclined region 635, and the 1-1-th ball member 644 on the upper portion of the and a first-first contact plate 642 which is provided and is in direct contact with the driving block 100 .

Meanwhile, the first tilting unit 600 is provided on the first rotating part 620 in the base block 300 , is exposed toward the driving block 100 , and is upwardly disposed on the driving block 100 . It may further include a first upper and lower restoration unit 650 to provide the restoring force.

Such a first vertical restoration unit 650 is a component for providing a restoring force to the driving block 100 when the driving block 100 is tilted in the TX direction by a second tilting unit 700 to be described later.

In the present embodiment, the first upper and lower restoration part 650 includes a 1-2 contact plate 652 that is in direct contact with the driving block 100 and a second contact plate 652 provided under the 1-2 contact plate 652 . It includes a 1-2 ball member 644 and a third compression elastic member 656 .

Like the first tilting unit 600 described above, the second tilting unit 700 may also have the same structure.

As shown in FIG. 5 , the second tilting unit 700 is provided in the base block 300 and is exposed toward the other edge of the driving block 300 to be movable up and down. , is provided in the base block 300 and is connected to a second rotating part 720 that is rotated by manipulation, and one side is engaged with the second rotating part 720 by a screw thread, and the second vertical moving part 740 . and a second height variable part 730 for changing the height of the second vertical movement part 740 as it is provided in the lower part of the second rotation part 720 and is linearly moved in the Y-axis direction according to the rotation of the second rotation part 720 .

At this time, the second variable height part 730 is connected to the second screw coupling part and the second screw coupling part meshed with and connected to the second rotation part 720 by a screw thread, and is connected to the periphery in the Y-axis direction. A second inclined region whose height is gradually variable is formed, and includes a second inclined forming portion for varying the height of the second vertical moving part 740 by the second inclined region as it is linearly moved in the Y-axis direction.

In addition, the second vertical movement unit 740 is provided on the n-th 2-1 ball member 744 and the 2-1-th ball member 744 that move up and down by the second inclined region, and the and a second-first contact plate 742 in direct contact with the driving block 100 .

Meanwhile, the second tilting unit 700 is provided on the second rotating part 720 within the base block 300 , is exposed toward the driving block 100 , and is upwardly positioned on the driving block 100 . It may further include a second upper and lower restoration unit 750 to provide the restoring force.

The second vertical restoration unit 750 is a component for providing a restoring force to the driving block 100 when the driving block 100 is tilted in the TY direction by the above-described first tilting unit 600 .

In this embodiment, the second upper and lower restoration unit 750 includes a 2-2 contact plate 752 that is in direct contact with the driving block 100, and a second contact plate 752 provided under the 2-2 contact plate 752. It includes a 2-2 ball member 744 and a fourth compression elastic member 756 .

And in the present embodiment, the base block 300 may include a first tilting unit 600 and a fourth plate 330 provided on one side of the second tilting unit 700 .

As described above, the present invention is driven by the first linear moving unit 400, the second linear moving unit 500, the first tilting unit 600, and the second tilting unit 700 as shown in FIG. X-axis linear movement, Y-axis linear movement, TX-direction tilting, and TY-direction tilting of the block 100 can all be implemented.

On the other hand, the first linear moving unit 400 and the base unit 300, and the second linear moving unit 500 and the driving unit 100 form a certain tolerance in the coupling portion of each other arbitrarily, the driving block 100 ) of TX direction tilting and TY direction tilting can be implemented without difficulty.

9 is a view showing the structure of the locking unit 800 in the inspection 5-axis stage according to an embodiment of the present invention.

The locking unit 800 shown in FIG. 9 is provided in the base block 300 and is configured to prevent the tilting driving of the driving block 100 by selectively restraining the driving block 100 by manipulation. is an element

In the present embodiment, the locking unit 800 is provided to be movable in the Y-axis direction by manipulation in the base block 300, and a third inclined region in which the height is gradually changed in the Y-axis direction around the end portion. The locking part 810 having 812 formed therein and exposed to the second linear movement unit 500 side within the base block 300, according to the Y-axis direction linear movement of the locking part 810, the third It includes a locking part 820 for preventing the tilting driving of the driving block 100 as the height is varied by the inclined region 812 and selectively brought into contact with the second linear movement unit 500 .

That is, when the locking part 820 is moved upward by the locking part 810, it is in contact with the second linear movement unit 500 to prevent the corresponding part of the driving block 100 from being tilted downward. can do.

As described above, the preferred embodiments according to the present invention have been described, and the fact that the present invention can be embodied in other specific forms without departing from the spirit or scope of the present invention other than the above-described embodiments is a fact of It is obvious to them. Therefore, the above-described embodiments are to be regarded as illustrative rather than restrictive, and accordingly, the present invention is not limited to the above description but may be modified within the scope of the appended claims and their equivalents.

Claims (14)

base block; a driving block provided on an upper portion of the base block to be linearly movable or tiltable; a rotation block provided to be horizontally rotatable on an upper portion of the driving block; a rotation unit provided in the driving block to rotate the rotation block; a coupling block provided between the base block and the driving block to mediate the base block and the driving block to be connected to each other; a first linear movement unit provided to connect the base block and the coupling block to each other, and linearly moving the driving block in the X-axis direction as the coupling block is linearly moved in the X-axis direction by manipulation; a second linear movement unit provided to connect the driving block and the coupling block to each other, and linearly moving the driving block in the Y-axis direction as it is linearly moved in the Y-axis direction with respect to the coupling block by manipulation; a first tilting unit provided in the base block and tilting the drive block in the TX direction by moving up and down a corner portion of one side of the drive block by manipulation; and a second tilting unit provided in the base block and tilting the drive block in the TY direction as the other corner portion of the drive block is moved up and down by manipulation; 5-axis stage for inspection including a. According to claim 1, The first linear movement unit, a first linear moving part connected to the base block and linearly moving the coupling block in the X-axis direction by manipulation; a first moving part provided on the opposite side of the first linear moving part with respect to the coupling block; and a first compressive elastic member providing a restoring force in the direction of the first linear moving part to the first moving part; 5-axis stage for inspection including a. 3. The method of claim 2, The first linear moving part, a first rotating member rotated by manipulation; and a first fixing member having one side engaged with the first rotating member and connected by a screw thread and linearly moved in the X-axis direction according to the rotation of the first rotating member, the other side being fixed to the coupling block; 5-axis stage for inspection including a. According to claim 1, The second linear movement unit, a second linear moving part connected to the driving block and linearly moving the driving block in the Y-axis direction as it is linearly moved in the Y-axis direction with respect to the coupling block by manipulation; a second moving part provided on the opposite side of the second linear moving part with respect to the coupling block; and a second compressive elastic member providing a restoring force in the direction of the second linear moving part to the second moving part; 5-axis stage for inspection including a. 5. The method of claim 4, The second linear moving part, a second rotating member rotated by manipulation; and One side is engaged with the second rotating member and connected by a screw thread so that the second rotating member is linearly moved in the Y-axis direction according to the rotation of the second rotating member, and the other side is fixed to the coupling block. absence; 5-axis stage for inspection including a. According to claim 1, The first tilting unit, a first vertical movement unit provided in the base block and exposed to one edge of the driving block to be movable up and down; a first rotation unit provided in the base block and rotated by manipulation; and One side is meshed with the first rotating part and connected by a screw thread, provided at the lower part of the first vertical moving part, and linearly moving in the Y-axis direction according to the rotation of the first rotating part, the height of the first vertical moving part a first variable height variable; 5-axis stage for inspection including a. 7. The method of claim 6, The first variable height portion, a first screw coupling unit coupled to the first rotating unit by a screw thread; and A first inclined region that is connected to the first screw-coupled part and whose height is gradually changed in the Y-axis direction is formed around it, and the first up-and-down moving part is formed by the first inclined region as it is linearly moved in the Y-axis direction. a first inclined forming part for varying the height; 5-axis stage for inspection including a. 7. The method of claim 6, The first tilting unit, A 5-axis stage for inspection that is provided on the upper portion of the first rotating part in the base block, and further comprises a first upper and lower restoration part exposed to the driving block side to provide an upward restoring force to the driving block. According to claim 1, The second tilting unit, a second vertical movement unit provided in the base block and exposed to the other edge of the driving block to be vertically movable; a second rotation unit provided in the base block and rotated by manipulation; and One side is meshed with the second rotating part and connected by a screw thread, provided at the lower part of the second vertical moving part, and linearly moving in the Y-axis direction according to the rotation of the second rotating part, the height of the second vertical moving part is increased a second variable height variable; 5-axis stage for inspection including a. 10. The method of claim 9, The second variable height portion, a second screw coupling part coupled to and connected to the second rotating part by a screw thread; and A second inclined region that is connected to the second screw-coupled part and whose height is gradually changed in the Y-axis direction is formed around it, and the second inclined region is moved by the second inclined region as it is linearly moved in the Y-axis direction. a second inclination forming part for varying the height; 5-axis stage for inspection including a. 10. The method of claim 9, The second tilting unit, A 5-axis stage for inspection that is provided on the second rotating part in the base block, and is exposed to the driving block side and further comprises a second vertical restoration part that provides an upward restoring force to the driving block. According to claim 1, The rotating unit is a third linear moving part provided to be able to move linearly in the X-axis direction by manipulation in the driving block; The lower part is provided in the driving block, the upper part is formed to be connected to the rotation block, and the third linear moving part is linearly moved in the X-axis direction together by the linear movement of the third linear moving part so as to have freedom of movement in the Y-axis direction. a block rotating unit for rotating the rotating block; a third moving part provided on the opposite side of the third linear moving part with respect to the block rotating part; and a third compression elastic member providing a restoring force in the direction of the third linear moving part to the third moving part; 5-axis stage for inspection including a. According to claim 1, 5-axis stage for inspection provided in the base block, further comprising a locking unit for preventing the tilting driving of the driving block by selectively constraining the driving block by manipulation. 14. The method of claim 13, The locking unit is a locking part provided to be movable in a Y-axis direction by manipulation in the base block and having a third inclined region whose height is gradually changed in the Y-axis direction around the end of the locking part; and The drive is exposed to the side of the second linear movement unit in the base block, and the height is varied by the third inclined region according to the linear movement of the locking unit in the Y-axis direction and selectively contacts the second linear movement unit. a locking part to prevent tilting of the block; 5-axis stage for inspection including a.

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