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WO2021100792A1 - Dispositif optique de mesure de surface interne et procédé optique de mesure de surface interne - Google Patents

Dispositif optique de mesure de surface interne et procédé optique de mesure de surface interne Download PDF

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Publication number
WO2021100792A1
WO2021100792A1 PCT/JP2020/043111 JP2020043111W WO2021100792A1 WO 2021100792 A1 WO2021100792 A1 WO 2021100792A1 JP 2020043111 W JP2020043111 W JP 2020043111W WO 2021100792 A1 WO2021100792 A1 WO 2021100792A1
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WIPO (PCT)
Prior art keywords
optical
measured
transparent pipe
peripheral surface
inner peripheral
Prior art date
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Ceased
Application number
PCT/JP2020/043111
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English (en)
Japanese (ja)
Inventor
大志 山崎
憲士 成田
拓也 舘山
正人 森本
隆文 淺田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Adamant Namiki Precision Jewel Co Ltd
Original Assignee
Adamant Namiki Precision Jewel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adamant Namiki Precision Jewel Co Ltd filed Critical Adamant Namiki Precision Jewel Co Ltd
Priority to JP2021558435A priority Critical patent/JP7223457B2/ja
Publication of WO2021100792A1 publication Critical patent/WO2021100792A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • an optical probe is inserted into an inner peripheral surface having a cross-sectional shape other than a circle, such as a cocoon-shaped inner peripheral surface of a housing for an automobile rotary engine or an elliptical shape of a gear pump, to be measured. It relates to an optical inner surface measuring device and a measuring method for observing an inner peripheral surface shape by emitting light rays on a surface and taking in reflected light, and measuring dimensional and geometrical accuracy.
  • the finished dimensions of the inner peripheral surface of the housing for automobile rotary engines and the inner peripheral surface of gear pumps and the quality of geometric accuracy greatly affect the performance of each device. It was inspected using a contact-type measuring machine such as a three-dimensional measuring machine. However, in recent years, a non-contact measuring machine such as an interference optical method has been desired for the purpose of performing high-precision measurement at the nanometer level without damaging the object to be measured.
  • Patent Documents 1 and 2 The typical structure of the observation device to which the technique of irradiating the inner peripheral surface of the mechanical device or mechanical part with light rays to observe or measure the inner peripheral surface is as shown in Patent Documents 1 and 2, for example.
  • a light beam is spirally scanned into a tube having a substantially cylindrical cross section, and the inner diameter of the tube is non-contacted and a three-dimensional shape as shown in FIG. 10 in the document. Data is captured and displayed.
  • the rotating shaft causes runout or non-reproduction runout, and the collected cross-sectional shape data of the inner peripheral surface of the object to be measured is noisy or the data True measurements were not obtained due to distortion.
  • the rotating optical system (3) is provided inside the cylindrical pipe-shaped translucent member (21), and the object to be measured (9).
  • a light ray (26) is emitted from the inner peripheral surface of the round hole having a substantially cross section of the above, and the shape of the inner peripheral surface is scanned from the reflected light.
  • the optical probe used is a cylindrical translucent pipe, and a rotating optical system such as a mirror is built in the pipe. Therefore, as shown in FIG.
  • the object to be measured is The inner peripheral surface of (9) is limited to an almost circular cross section or an inner peripheral surface of a cylinder, and when the inner peripheral surface of the object to be measured is an ellipse or a polygon, it is reflected at a portion having a large radial distance from the pipe. Light could not be acquired and measurement could not be performed.
  • the present invention has been made in view of the above-mentioned conventional circumstances, and an object of the present invention is to allow an optical probe to enter an inner peripheral surface having a cross-sectional shape other than a circular shape, such as an inner peripheral surface of a housing for an automobile rotary engine. It is an object of the present invention to provide an optical inner surface measuring device capable of observing an internal shape and measuring dimensions and geometrical accuracy by rotating and radiating a light beam on an inner peripheral surface and taking in reflected light.
  • One means for solving the above problems is to make a transparent pipe having an irregular cross section that fits into a hole of an object to be inspected having a cross section other than a circle, such as an ellipse, a cocoon, or a polygon.
  • a rotational optical measurement unit is built inside the pipe.
  • the radial gap between the transparent pipe and the inner peripheral surface of the object to be measured becomes almost constant, and measurement by interferometry (the most accurate optical interferometry among various optical measurement methods, spectrometric interference method, etc.) becomes possible. ..
  • light rays are rotationally radiated onto an elliptical, cocoon-shaped, or polygonal inner peripheral surface other than a circle, and the reflected light is three-dimensionally captured by a high-precision interference optical method to observe the internal shape and observe the internal shape. Allows measurement of dimensional and geometric accuracy.
  • the figure of the optical probe of the optical inner surface measuring apparatus which concerns on embodiment of this invention.
  • Cross-sectional view of the optical probe part of the optical inner surface measuring device The figure which shows an example of the measurement master which concerns the measurement using the optical inner surface measuring apparatus.
  • System configuration diagram of the optical inner surface measuring device Flow chart of measurement method using the same optical inner surface measuring device Explanatory drawing of measurement principle of the optical inner surface measuring device Explanatory drawing when there is no transparent pipe of the optical inner surface measuring device Characteristic diagram of the optical inner surface measuring device without a transparent pipe Explanatory drawing of the radial gap of the optical inner surface measuring device Repeated measurement accuracy of the same optical inner surface measuring device Explanatory drawing of light beam tilt angle of the optical inner surface measuring device Triangular cross-section measurement example of the same optical inner surface measuring device Example of square cross-section measurement of the same optical inner surface measuring device Radial distance analysis diagram of the optical inner surface measuring device Cross-sectional view of the optical probe of a conventional optical inner surface measuring device Explanatory drawing of measurement principle of conventional optical inner surface measuring device
  • an elliptical object or a polygon to be inspected is used by using an interference optical method that enables highly accurate measurement among non-contact measuring methods. It is possible to observe and measure non-circular inner peripheral surfaces such as polygonal inner peripheral surfaces with high accuracy.
  • the first feature is that, for the optical inner surface measuring device, a rotatable optical measuring system is arranged inside a transparent pipe having a deformed cross section other than a circle.
  • the transparent pipe can be completely inserted into the hole to be measured, and the inner peripheral surface having a cross-sectional shape other than the circular shape can be observed and measured with high accuracy.
  • the absolute dimensional calibration value of the transparent pipe was obtained by the formula of [radius distance to]-[radius gap ( ⁇ Rn)] and stored in the computer. That is, the absolute dimension of the transparent pipe is determined from the result of inserting the transparent pipe into the measurement master having the first measurement reference value and measuring the radial gap between the inner surface of the measured portion and the transparent pipe by the rotating optical unit. This is obtained and stored in a computer as a second reference value.
  • the third feature is that the transparent pipe fits snugly into the hole of the object to be measured, and the radial gap between the inner peripheral surface of the hole of the object to be measured and the transparent pipe is 3 mm or less.
  • the dimensions of the transparent pipe have been set. With this configuration, it becomes possible to generate sufficiently good interference fringes between the inner surface of the part to be measured and the transparent pipe, and stable measurement results can be obtained.
  • the fourth feature is that the object to be measured is fixed, a transparent pipe is inserted into the hole of the object to be measured, the radial gap between the inner peripheral surface of the object to be measured and the transparent pipe is measured by a rotary optical unit, and the object to be measured is measured.
  • Radial distance (rn) (transparent pipe radius second reference value: Rn) + (radial gap: ⁇ rn) stored in the computer to obtain the shape dimension (rn) of the inner peripheral surface of the object to be measured.
  • the optical measurement system of the optical inner surface measuring device is arranged on the tip side of the condensing member and the condensing member integrally provided on the tip side of the non-rotating optical fiber, and is a translucent pipe. It has a rotatable optical path conversion means provided inside the. Further, the optical inner surface measuring device is provided with a motor for rotationally driving the optical path conversion means. According to this configuration, it is possible to accurately control the rotation of the emitted light beam.
  • the sixth feature is the optical inner surface measurement method, from a rotational optical measurement system in which a transparent pipe having a non-circular irregular cross section is inserted into a hole having a non-circular inner peripheral surface and arranged inside the transparent pipe.
  • the purpose is to rotate and radiate light rays toward the inner peripheral surface of the hole and measure the shape, dimensions, and geometric accuracy of the inner peripheral surface with reference to the transparent pipe. According to this configuration, it is possible to observe and measure the inner peripheral surface having a deformed cross-sectional shape other than a circle with high accuracy.
  • the seventh feature is the same optical inner surface measurement method, further, a step of preparing a measurement master as a reference for measuring the absolute value of the non-circular inner peripheral surface, and a transparent pipe using the measurement master. It includes a step of calibrating and a step of measuring a radial gap to the inner peripheral surface with reference to the outer peripheral surface or the inner peripheral surface of the transparent pipe after calibration. According to this configuration, the reproducibility of the measured value becomes extremely good when the measurement is repeated.
  • FIG. 1 to 7 show an embodiment of an optical inner surface measuring device according to the present invention.
  • FIG. 1 is a front sectional view of the optical probe 13 of the optical inner surface measuring device of the present invention.
  • the non-rotating optical fiber 1 is integrally provided with a condensing member such as a lens at the tip thereof, and is inserted into a hole of a hollow rotating shaft 2.
  • a rotor magnet 7 is attached to the hollow rotary shaft 2, and is rotationally supported by the first bearing 8a and the second bearing 8b.
  • the rotor magnet 7 is built in and fixed to the tube 5 and faces the motor coil 6, and an alternating current is supplied from the electric wire 9, and the motor 10 is composed of the hollow rotating shaft 2, the motor coil 6, the rotor magnet 7, and the bearings 8a and 8b. ..
  • An optical path converting means 3 made of a mirror or the like is attached to the hollow rotating shaft 2 and rotates integrally.
  • the light rays sent from the rear of the optical fiber 1 pass through the optical fiber 1 and the condensing member 1a, and the light rays 21 pass through the deformed transparent pipe 4 by the optical path conversion means 3 rotated by the motor 10 and pass through the object to be measured 31. It is rotationally radiated all around 360 degrees on the inner peripheral surface of the hole 32 to be measured.
  • the light ray 21 reflected by the object to be measured passes through the deformed transparent pipe 4, the optical path conversion means 3, and the condensing member 1a again and is returned to the optical fiber 1.
  • FIG. 2 is a lower sectional view of the optical probe.
  • the object to be measured is a rotary engine as an example, and a cocoon-shaped hole 34 is machined in the engine housing 33.
  • the cross-sectional shape of the deformed transparent pipe 4 of the optical probe 13 of the present invention is not circular, but is designed into various shapes such as a cocoon shape, a triangular shape, and a polygonal shape, and is manufactured of a translucent material such as quartz or glass.
  • the cocoon-shaped deformed transparent pipe is processed to a size that fits comfortably in the cocoon-shaped hole 34 of the object to be measured.
  • the radial gap between the inner peripheral surface 4a or the outer peripheral surface 4b of the deformed transparent pipe 4 and the surface of the cocoon-shaped hole 34 is designed and manufactured to be 3 mm or less.
  • the optical path conversion means 3 composed of a mirror or the like shown in FIG. 2 radiates a light ray 21 in rotation, measures the distance to the inner peripheral surface of the cocoon-shaped hole 34 with high accuracy, and acquires shape data of the entire circumference of 360 degrees.
  • FIG. 3 is a diagram showing an example of a measurement master related to the measurement of the deformed inner peripheral surface using the same optical probe.
  • a master reference hole 30 is formed in the measurement master 29, and is used as a reference for measuring the absolute value of the optical inner surface measuring device.
  • FIG. 4 is a diagram showing an example of a transparent pipe 4 that constitutes a part of the optical probe.
  • the transparent pipe 4 is formed so as to fit comfortably in the master reference hole 30 or the measurement hole 32 when the optical probe is inserted into the master reference hole 30 of the measurement master 29 or the measurement hole 32 of the object to be measured 31. .. Therefore, the contours of the inner and outer peripheral cross sections of the transparent pipe 4 have a substantially similar shape smaller than the contours of the inner peripheral cross sections of the master reference hole 30 and the hole 32 to be measured. Further, the transparent pipe 4 does not have to be completely colorless and transparent, as long as it is translucent.
  • FIG. 5 is a system configuration diagram of the device of the present invention.
  • the stand 81 is fixed to the base 80, and the slider 82 moves up and down together with the optical lobe 13 by the slider motor 83.
  • the object to be measured 31 is set in the fixing jig 90, and the optical probe 13 goes in and out of the hole 32 to be measured in the object to be measured 31.
  • the reflected light from the object to be measured 31 that has entered the optical fiber of the optical probe 13 passes through the connection portion 84 of the measuring machine main body 86, enters the optical interference analysis unit 85, is analyzed by the computer 86, and the image is displayed on the monitor 89. indicate. Further, since the slider motor 83 shown in FIG.
  • the linearity accuracy in which the slider 82 is moved by the slide motor 83 shown in FIG. 5 is maintained at an accuracy of 0.1 micrometer ( ⁇ m) or less.
  • FIG. 6 shows the measurement flow of the optical inner surface measuring device.
  • [1] providing a measuring master 29 as a reference for measuring the absolute value of the measuring machine
  • [2] calibrating the dimensions of the deformed pipe 4 using the measuring master 29,
  • the deformed pipe 4 that has always been calibrated in each measurement is inserted into the hole 34 of the object to be measured 33, and the radial gap to the inner peripheral surface of the hole 34 to be measured is set to the inner peripheral surface 4a or the outer peripheral surface of the deformed transparent pipe 4. It is characterized by measuring with reference to 4b, and this flow enables highly accurate measurement of the inner peripheral surface of the deformed measuring hole 32.
  • the object to be measured 31 can be inserted into the deformed measurement hole 32, and the radial gap of the measurement hole 32 with the inner peripheral surface is 3.0 mm or less.
  • the transparent pipe 4 of the above is manufactured, and an optical path conversion means 3 composed of a rotating mirror or the like is built in the transparent pipe 4.
  • Optical probe setting As shown in FIG. 2, the deformed transparent pipe 4 of the optical probe 13 is inserted into the deformed hole 32 of the object to be measured 31. At this time, the deformed transparent pipe 4 and the hole 32 to be measured need not be in contact with each other. If they come into contact with each other, the outer peripheral surface of the deformed transparent pipe may be scratched or soiled, and the reflected light may be attenuated, making measurement impossible.
  • Computers can display the required measured values (inner peripheral curve shape diagram, inner diameter, roundness, etc.) from the cross-sectional digital data of the "measured values (radius)" at each 360-degree acquired position. Calculate and display with.
  • the slider 82 shown in FIG. 5 is intermittently slid up and down by the slider motor 83, for example, at a pitch height of 100 micrometers, and the cross section of the hole 32 to be measured is measured by the optical probe 13 as a whole. , Three-dimensional shape data of the inner peripheral surface of the hole 32 to be measured can be collected, and numerical values such as cylindricity and straightness can be calculated.
  • the inner peripheral surface of the non-measurement hole 32 is measured by using the measurement master 32 and the deformed transparent pipe 4 of the optical probe 13, so that the cross-sectional shape is a deformed cross section other than a circle.
  • the dimensions and shape of the inner peripheral surface can be measured with high accuracy with reproducibility of several nanometers (nm).
  • the material of the deformed transparent pipe 4 is quartz, glass, etc., but quartz is advantageous in terms of low coefficient of linear expansion, high surface hardness, and the like.
  • the fixed-side optical fiber 1 shown in FIG. 1 is a flexible glass fiber having a diameter of about 0.1 to 0.4 mm (mm).
  • the first optical path converting means 3 shown in FIG. 1 is composed of a mirror or a prism having a smooth reflecting surface, and in order to increase the reflectance, its surface roughness and flatness are polished to an accuracy equal to or higher than that of general optical components. There is.
  • the surface of the inner peripheral surface 4a or the outer peripheral surface 4b of the deformed pipe is coated with a translucent metal coating having a thickness of several nanometers as necessary to improve the contour of the collected waveform from the surface. It can be designed for reliable detection.
  • optical path conversion means 3 a rotating mirror, a rotating prism, a rotating lens, or the like is appropriately used.
  • FIG. 7 is an explanatory diagram of the measurement principle of the optical inner surface measuring device of the present invention.
  • the horizontal axis represents the angle of rotation (degrees) and the vertical axis represents the radial distance (millimeters).
  • the "second master numerical value" in the figure stored in the computer on the inner peripheral surface 11a of the transparent pipe is substantially a sine wave, and the "gap" measured at this time is a light beam.
  • the radiation rotation angle of is almost constant from 0 degrees to 360 degrees.
  • FIG. 8 is an explanatory diagram when it is assumed that the optical inner surface measuring device does not have the deformed transparent pipe 4, and FIG. 9 is a characteristic diagram when it is assumed that the optical inner surface measuring device does not have the deformed transparent pipe 4.
  • the light ray 21 is radiated from a conversion means such as a mirror and is rotationally irradiated to the hole 32 to be measured without passing through a deformed transparent pipe to measure the radial distance. Therefore, in this case, since there is no irregularly shaped transparent pipe as a measurement reference, the amount of rotational runout of the optical path conversion means 3 changes due to the influence of temperature and vibration.
  • the data that can be acquired when the deformed transparent pipe 4 is not present has large variations in the radius distance data as shown in the work inner peripheral surface radius diagram (original waveform) in the figure, and even if they are averaged. It may be different from the true value.
  • the optical probe 13 is used to measure the gap radius to the inner peripheral surface of the hole 32 to be measured based on the “second master value” of the deformed transparent pipe 4 every time.
  • the effect of the rotational runout of the optical path conversion means 3 is completely eliminated, and the measurement accuracy is not affected at all, so that high-precision measurement can be performed.
  • the influence of fluctuations in the amount of light and the wavelength of the light source built in the optical interference analysis unit 86 is completely eliminated by the measurement method according to the present invention, and highly accurate measurement is possible.
  • FIG. 10 is an explanatory view of a radial gap of the optical inner surface measuring device of the present invention.
  • the horizontal axis is the radial gap (millimeter) between the inner peripheral surface of the hole 32 to be measured and the deformed transparent pipe in FIG. 2, and the vertical axis is shown in FIG.
  • It is an optical output (%) obtained by the optical interference analysis unit 85 shown.
  • the optical interference type measuring machine of the present invention can measure with high accuracy up to a radius gap of 3 mm between the inner peripheral surface of the hole 32 to be measured and the deformed transparent pipe, but the output is lowered and the measurement accuracy is higher than that. Turned out to get worse.
  • a radius distance analysis diagram as shown in FIG. 15 can be obtained.
  • the three output points are the transparent pipe inner surface output, the transparent pipe outer peripheral surface output, and the right is the inner peripheral surface output of the object to be measured, respectively, from the left.
  • the radial gap distance between the deformed transparent pipe 4 and the hole 32 to be measured shown in the present invention is either A or B in the drawing.
  • FIG. 16 and 17 supplement the conventional example in order to clarify the characteristics of the optical inner surface measuring device.
  • FIG. 16 is a cross-sectional view of the optical probe portion of the conventional optical inner surface measuring device, and FIG. It is a measurement principle explanatory drawing of the conventional optical inner surface measuring apparatus.
  • the transparent pipe is a circular transparent pipe 39.
  • the radial gap distance between the circular transparent pipe 39 and the hole 32 to be measured often exceeds 3 mm in a large portion as shown by ⁇ R1 to ⁇ R8 in the figure.
  • FIG. 11 shows the repetitive measurement accuracy of the optical inner surface measuring device of the present invention.
  • a numerical value of 0.01 micrometer or less is obtained.
  • the hole to be measured has a shape other than the circular shape and the circular shape 39 is used for the transparent pipe, only reproducibility of about 0.50 micrometer can be obtained.
  • FIG. 12 is an explanatory view of a light beam inclination angle of the optical inner surface measuring device of the present invention
  • FIG. 13 is an example of measuring a triangular cross section of the optical inner surface measuring device.
  • a triangular hole 36 corresponding to the hole to be measured is machined in the pump housing 35.
  • 36a is a large radius and 36b is a small radius.
  • An optical path conversion means 3 made of a mirror or the like is provided inside the triangular transparent pipe 11.
  • FIG. 13 as shown by ⁇ 1 in the figure, the light ray 21 is irradiated with an inclination of ⁇ 1 with respect to the inner peripheral surface of the object to be measured 31, so that sufficient return light may not be detected.
  • the horizontal axis of FIG. 12 shows the inclination angle ⁇ (deg) when the light beam 21 is inclined with respect to the inner peripheral surface of the object to be measured 31, and the vertical axis is the optical interference analysis unit shown in FIG.
  • FIG. 14 is an example of measuring a square cross section of the optical inner surface measuring device.
  • a square hole 38 is machined in the mold housing 37, and a quadrangular transparent pipe 12 having an optical path converting means 3 including a rotating mirror or the like is inserted therein.
  • Other operations are the same as the triangular cross-section measurement example of FIG.
  • a transparent pipe having an irregular cross section is provided in a hole having an elliptical or polygonal cross section, and a rotational optical measurement diameter is built in the transparent pipe, and between the inner surface of the object to be measured and the transparent pipe.
  • An optical probe for measuring the radial gap by the interference optical method and calculating the shape dimension of the inner peripheral surface of the object to be measured by the formula of radial distance to the object to be measured (radial dimension of transparent pipe + radial gap).
  • the cross section of the high-precision measurement is that the influence of the rotational fluctuation of the optical path conversion means 3 of 13 is completely eliminated, and the influence of the fluctuation of the light amount and the wavelength of the light source built in the optical interference analysis unit 86 is completely eliminated. This can also be performed on an object to be measured having a deformed cross section other than a circular shape.
  • the optical inner diameter measuring device that observes and measures the object to be inspected by using the interference optical method of the present invention can measure the inner peripheral surface of many industrial products having holes having an irregular cross-sectional shape with high accuracy. It is also possible to perform three-dimensional observation of deep holes, which was not possible in the past, and it is expected to be widely used.
  • Optical fiber (non-rotating) 1a Condensing member (lens) 2 Hollow rotating shaft 3 Optical path conversion means (mirror) 4 Deformed transparent pipe 4a Transparent pipe inner peripheral surface 4b Transparent pipe outer peripheral surface 5 Tube 6 Motor coil 7 Rotor magnet 8a First bearing 8b Second bearing 9 Electric wire 10 Motor 11 Triangular transparent pipe 11a Transparent pipe inner peripheral surface 12 Square transparent pipe 12a Transparent pipe inner peripheral surface 13 Optical probe 21 Ray 29 Measurement master (master gauge) 30 Measurement master reference hole 31 Measured object 32 Measured hole 33 Engine housing 34 Cocoon hole 34a Large radius 34b Small radius 35 Pump housing 36 Triangular hole 36a Large radius 36b Small radius 37 Mold housing 38 Square hole 38a Large radius 38b Small radius 39 Circular transparent pipe 80 Base 81 Stand 82 Slider 83 Slider motor 84 Connection 85 Optical interference analysis unit 86 Computer path 87 Motor driver circuit 88 Measuring machine body 89 Monitor 90 Fixing jig

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Abstract

L'invention a pour objet de permettre l'observation d'une forme interne et la mesure des dimensions et d'une précision géométrique de cette dernière par : l'insertion d'une sonde optique le long de la surface périphérique interne d'un objet mesuré, la surface périphérique interne présentant une forme de section transversale non circulaire telle qu'une forme elliptique ou polygonale ; l'exposition de la surface périphérique interne à un faisceau de lumière d'une manière rotative ; et la capture tridimensionnelle de la lumière réfléchie. La solution selon l'invention porte sur un tuyau transparent présentant une forme de section transversale irrégulière qui s'ajuste complètement à l'intérieur d'un trou présentant une forme de section transversale elliptique ou polygonale disposé dans le trou. Un système de mesure optique rotatif est disposé à l'intérieur du tuyau transparent, et un espace radial entre la surface interne de l'objet mesuré et le tuyau transparent est mesuré par un procédé optique interférométrique. Les dimensions et la forme de la surface périphérique interne de l'objet mesuré sont calculées à l'aide d'un ordinateur conformément à la formule : distance radiale à l'objet mesuré = (dimension radiale du tuyau transparent + espace radial). Ceci permet une mesure de haute précision.
PCT/JP2020/043111 2019-11-21 2020-11-19 Dispositif optique de mesure de surface interne et procédé optique de mesure de surface interne Ceased WO2021100792A1 (fr)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000321034A (ja) * 1999-05-14 2000-11-24 Olympus Optical Co Ltd 光イメージング装置
US20140260590A1 (en) * 2013-03-14 2014-09-18 DGI Geoscience Inc. Borehole profiling and imaging
JP2015232539A (ja) * 2014-05-12 2015-12-24 並木精密宝石株式会社 光学式内面測定装置
WO2017168628A1 (fr) * 2016-03-30 2017-10-05 株式会社日立製作所 Dispositif de mesure de forme tridimensionnelle et sonde de mesure de forme tridimensionnelle

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000321034A (ja) * 1999-05-14 2000-11-24 Olympus Optical Co Ltd 光イメージング装置
US20140260590A1 (en) * 2013-03-14 2014-09-18 DGI Geoscience Inc. Borehole profiling and imaging
JP2015232539A (ja) * 2014-05-12 2015-12-24 並木精密宝石株式会社 光学式内面測定装置
WO2017168628A1 (fr) * 2016-03-30 2017-10-05 株式会社日立製作所 Dispositif de mesure de forme tridimensionnelle et sonde de mesure de forme tridimensionnelle

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