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WO2021187003A1 - Inspection system, method for displaying inspection method, and display program - Google Patents

Inspection system, method for displaying inspection method, and display program Download PDF

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Publication number
WO2021187003A1
WO2021187003A1 PCT/JP2021/006284 JP2021006284W WO2021187003A1 WO 2021187003 A1 WO2021187003 A1 WO 2021187003A1 JP 2021006284 W JP2021006284 W JP 2021006284W WO 2021187003 A1 WO2021187003 A1 WO 2021187003A1
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Prior art keywords
defect
image
inspection
unit
imaging
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Ceased
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PCT/JP2021/006284
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French (fr)
Japanese (ja)
Inventor
努 作山
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
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Publication date
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/85Investigating moving fluids or granular solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Definitions

  • the present invention relates to an inspection system that inspects the presence or absence of defects in an inspection object based on an image obtained by imaging the inspection object, a display method of inspection results, and a display program.
  • forged parts having a three-dimensional shape used in and around the driving part of automobiles and the like are visually inspected to find defects by a person looking at the forged parts from various angles.
  • This visual inspection can be replaced, for example, with an inspection using an optical instrument including a camera and lighting.
  • an optical device corresponding to an example of the "imaging unit” of the present invention
  • an inspection object also referred to as a "work”
  • a defect inspection device capable of freely imaging a desired portion of the above is considered (for example, Patent Document 1 and the like). According to such a defect inspection device, for example, even a large workpiece that is difficult to handle by visual inspection by a human can be inspected.
  • the present invention has been made in view of the above problems, and provides an inspection system, an inspection result display method, and a display program capable of satisfactorily confirming the content and location of defects occurring in an inspection object. With the goal.
  • the first aspect of the present invention is an inspection system, in which the relative position of the image pickup unit with respect to the inspection object is changed in multiple stages, and the imaged portion of the inspection object imaged by the image pickup unit is different.
  • An imaging device that acquires a plurality of partial images by imaging a part under a plurality of different lighting conditions, and an inspection that inspects the presence or absence of defects in the inspection object based on the plurality of partial images and displays the inspection result on the display unit.
  • the inspection device includes a device, a storage unit that stores position data indicating the positions of a plurality of images to be imaged with respect to an object to be inspected, and a defect inclusion from a plurality of partial images in which an image of the defect is reflected for each defect.
  • the defect extraction unit that selectively extracts the image and the position information of the defect-containing image on the three-dimensional image of the inspection target are obtained based on the position data, and the position information is added to the three-dimensional image of the inspection target as a whole. It is characterized by having a display control unit for displaying an image and a defect-containing image on the display unit.
  • a plurality of images to be imaged are different from each other while changing the relative position of the image pickup unit with respect to the object to be inspected in multiple stages to make the imaged part of the imaged object to be imaged by the image pickup unit different. It is a display method of inspection results in an inspection system that inspects the presence or absence of defects in an inspection object based on a plurality of partial images obtained by imaging under the lighting conditions of the above, and an image of the defects is reflected for each defect.
  • a plurality of images to be imaged are different from each other while changing the relative position of the image pickup unit with respect to the object to be inspected in multiple stages to make the imaged areas of the imaged object to be imaged by the image pickup unit different. It is a display program of inspection results in an inspection system that inspects the presence or absence of defects in an inspection object based on a plurality of partial images obtained by imaging under the lighting conditions of the above, and an image of the defects is reflected for each defect.
  • the defect-containing image is selectively extracted from a plurality of partial images in which the image of the defect is reflected for each defect, and is displayed on the display unit together with the entire image including the position information of the defect-containing image. Therefore, it is possible to satisfactorily confirm the content and location of defects occurring in the inspection object.
  • the plurality of components of each aspect of the present invention described above are not all essential, and may be used to solve some or all of the above-mentioned problems, or part or all of the effects described herein.
  • the technical features included in the above-mentioned aspect of the present invention it is also possible to combine some or all with some or all of the technical features contained in the other aspects of the invention described above to form an independent form of the invention.
  • FIG. 1 It is a figure which shows typically the whole structure of one Embodiment of the inspection system which concerns on this invention. It is a figure which shows typically the structure of the loading device. It is a figure which shows typically the structure of the surface image pickup apparatus. It is a flowchart which shows the inspection method executed by the inspection system shown in FIG. It is a flowchart for demonstrating the surface side inspection. It is a figure which shows typically an example of the partial image acquired in the surface side inspection. It is a flowchart for demonstrating the back side inspection. It is a flowchart which shows the display control of the inspection result by the arithmetic processing part. It is a schematic diagram which shows the display example of the inspection result.
  • FIG. 1 is a diagram schematically showing an overall configuration of an embodiment of an inspection system according to the present invention.
  • the inspection system 1 includes, for example, an input device 2, a front surface imaging device 3, an inversion device 4, a back surface imaging device 5, and an ejection device 6.
  • the input device 2, the front surface imaging device 3, the reversing device 4, the back surface imaging device 5, and the discharging device 6 are arranged in this order in the X direction.
  • an inspection object (hereinafter referred to as “work”) W such as a forged part having a three-dimensional shape is thrown into the loading device 2, each part of the device operates in response to a command from the control device 9 that controls the entire system.
  • FIG. 2 is a diagram schematically showing the configuration of the loading device.
  • the loading device 2 is a device in which the work W is loaded from the outside of the inspection system 1.
  • the loading device 2 is located at the uppermost stream of the inspection system 1 in the transport direction X.
  • the loading device 2 is provided with a loading port (not shown) for loading the work W.
  • a belt conveyor 2Cv is arranged in the vicinity of the loading port, and the work W can be placed on the upper surface of the belt conveyor 2Cv via the loading port by an operator or a loading robot (not shown). That is, the belt conveyor 2Cv corresponds to an example of the "mounting portion" of the present invention.
  • the projection unit 21 is provided at a position above the belt conveyor 2Cv, and an image showing the mounting position of the work W on the belt conveyor 2Cv in response to the video signal from the projection control unit 96 of the control device 9. Project the GW.
  • the operator can place the work W on the belt conveyor 2Cv according to the projected image GW.
  • the placement posture of the work W can be stabilized, and the work W can be inspected in a constant posture at all times.
  • the belt conveyor 2Cv conveys the work W in the above-described posture in the X direction in response to a transfer command from the transfer control unit 94 of the control device 9.
  • the front surface imaging device 3, the reversing device 4, the back surface imaging device 5, and the discharging device 6 are also provided with belt conveyors 3Cv, 4Cv, 5Cv, and 6Cv, respectively, and are provided with each other in response to a transfer command from the transfer control unit 94. It is possible to synchronize between adjacent belt conveyors. By this synchronous operation, the work W is conveyed in the order of the loading device 2, the front surface imaging device 3, the reversing device 4, the back surface imaging device 5, and the discharging device 6.
  • the work is transferred from the loading device 2 to the surface imaging device 3 between the belt conveyors 2Cv and 3Cv, and the work W is conveyed to the surface imaging device 3 in the same mounting posture as when it is mounted on the image GW. NS.
  • the surface imaging device 3 images the exposed surface of the work W in the mounted posture.
  • the surface exposed in the placed posture state is referred to as a "front surface”
  • the surface exposed in the inverted posture state inverted by the next reversing device 4 is referred to as a "back surface”.
  • FIG. 3 is a diagram schematically showing the configuration of the surface imaging device.
  • the surface imaging device 3 has the belt conveyor 3Cv and two imaging robots 31 and 32.
  • the imaging robots 31 and 32 are arranged to face each other with the belt conveyor 3Cv in the Y direction. More specifically, the imaging robots 31 and 32 are arranged on the (+ Y) direction side and the ( ⁇ Y) direction side of the belt conveyor 3Cv, respectively.
  • the imaging robots 31 and 32 basically have the same configuration.
  • the imaging robot 31 is an articulated robot in which a plurality of arms are connected, and an imaging unit 311 and an illumination unit (not shown) are attached to the tip of the tip arm 312.
  • the image pickup unit 311 has, for example, an image pickup element such as a charge-coupled device (CCD) and a lens section as an optical system for forming an optical image of a work W on the image pickup device. ..
  • a planar illumination in which a plurality of light emitting diodes (Light Emitting Diodes: LEDs) are two-dimensionally arranged is applied to the illumination unit. Therefore, the work W can be illuminated with a plurality of illumination patterns over a wide range.
  • the imaging robot 31 is controlled according to an operation command from the robot control unit 95 of the control device 9, and the relative positions of the imaging unit 311 and the lighting unit with respect to the work W on the belt conveyor 3Cv can be changed in multiple stages.
  • the imaging robot 32 is also an articulated robot like the imaging robot 31, and an imaging unit 321 and an illumination unit (not shown) are attached to the tip of the tip arm 322.
  • the imaging robot 32 is controlled according to an operation command from the robot control unit 95 of the control device 9, and the relative positions of the imaging unit 321 and the lighting unit with respect to the work W on the belt conveyor 3Cv can be changed in multiple stages. ..
  • the two imaging robots 31 and 32 configured as described above can move separately with respect to the work W on the belt conveyor 3Cv to image the work W at various imaging positions. Further, even in the same imaging position, it is possible to illuminate the work W under various illumination conditions (illumination pattern of the work W) by changing the illumination pattern of the illumination unit provided in the imaging robots 31 and 32. It has become. That is, in the surface imaging device 3, the relative positions of the imaging units 311 and 321 with respect to the work W to be inspected are changed in multiple stages, and the imaged portions of the work W imaged by the imaging units 311 and 321 are different. It is possible to acquire a plurality of partial images by imaging the imaged portion under a plurality of different lighting conditions.
  • the image data of these partial images is sent to the control device 9 and temporarily stored in the storage unit 92. Then, as will be described in detail later, the presence or absence of defects on the surface of the work W is inspected based on a plurality of partial images.
  • the work W is conveyed from the surface image pickup device 3 to the inversion device 4.
  • the transport at this time is performed between the belt conveyors 3Cv and 4Cv, and the work W is conveyed to the reversing device 4 in the same mounting posture as when it is mounted on the image GW.
  • the reversing device 4 is composed of a reversing robot 41 having a holding mechanism capable of holding the work W and an elevating / reversing mechanism for raising / lowering / reversing the holding mechanism.
  • the reversing robot 41 operates the holding mechanism and the elevating / reversing mechanism as follows in response to a command from the robot control unit 95 of the control device 9. That is, the reversing device 4 picks up the work W in the mounted posture state conveyed from the surface imaging device 3 from the belt conveyor 4Cv, reverses the work W above the belt conveyor 4Cv, and works W in the reversing posture state. Is returned to the belt conveyor 4Cv in this order.
  • the back surface imaging device 5 has the same configuration as the front surface imaging device 3 except that the image pickup target is the exposed surface of the work W in the inverted posture, that is, the back surface of the work W. That is, in the back surface imaging device 5, the relative positions of the imaging units 511 and 521 with respect to the work W, which is the inspection target, are changed in multiple stages so that the imaged portion of the work W imaged by the imaging units 511 and 521 is different. It is possible to acquire a plurality of partial images by imaging the imaged portion under a plurality of different lighting conditions. Then, the image data of these partial images is sent to the control device 9 and temporarily stored in the storage unit 92. Then, as will be described in detail later, it is inspected whether or not a defect exists on the back surface of the work W based on a plurality of partial images.
  • the work W for which the defect inspection on both sides has been completed is conveyed from the back surface imaging device 5 to the discharge device 6.
  • the transfer at this time is performed between the belt conveyors 5 Cv and 6 Cv, and the work W is conveyed to the reversing device 4 in the reversing posture.
  • An opening (not shown) for discharging the inspected work W from the inspection system 1 is provided on the (+ X) side wall of the discharge device 6.
  • the belt conveyor 6Cv that has received the inspection-completed work W operates in response to a transfer command from the transfer control unit 94 to move the work W to the vicinity of the opening and position it.
  • the operator and the discharging robot take out the inspected work W from the opening.
  • a display unit 61 is arranged at a position visible to the operator on the (+ X) side wall of the discharge device 6 arranged at the discharge position of the work W thus inspected.
  • the display unit 61 displays an inspection result (for example, FIG. 9 described later) in which the arithmetic processing unit 91 of the control device 9 inspects the defect based on the plurality of partial images.
  • the control device 9 is provided at an appropriate position inside the inspection system 1, a well-known CPU (Central Processing Unit) that executes logical calculations, a ROM (Read Only Memory) that stores initial settings, and the like, and each device is in operation. It is composed of a RAM (Random Access Memory) that temporarily stores various data. That is, the control device 9 may be a dedicated device equipped with the above-mentioned hardware, or a general-purpose processing device such as a personal computer or a workstation in which an inspection program for realizing a processing function described later is incorporated. It may be present, and a general-purpose computer can be used.
  • a general-purpose processing device such as a personal computer or a workstation in which an inspection program for realizing a processing function described later is incorporated. It may be present, and a general-purpose computer can be used.
  • the control device 9 functionally includes an arithmetic processing unit 91, a storage unit 92, an image processing unit 93, a transport control unit 94, a robot control unit 95, a projection control unit 96, and the like, and is the "inspection device" of the present invention. It corresponds to an example.
  • the storage unit 92 stores the inspection program, the position data of the imaged portion imaged by the imaging units 311, 321, 511, and 521, and the like.
  • the image processing unit 93 takes in image signals from the image capturing units 311, 321, 511, and 521, and performs various image processing on the image of the imaged portion to generate an image suitable for the inspection of the work W.
  • the transport control unit 94 controls the drive of the motors mounted on the belt conveyors 2Cv to 6Cv.
  • the robot control unit 95 refers to the imaging robots 31 and 32 mounted on the front surface imaging device 3, the reversing robot 41 equipped on the reversing device 4, and the imaging robots 51 and 52 equipped on the back surface imaging device 5. An operation command is given to image and invert the work W.
  • the projection control unit 96 gives a video signal of the mounting posture of the work W in the input device 2 to the projection unit 21 to teach the mounting posture of the work W.
  • the arithmetic processing unit 91 reads out the inspection program stored in advance in the storage unit 92, and then controls each unit of the apparatus according to the inspection program as described in detail with reference to FIGS. 4 to 9.
  • a defect extraction process for selectively extracting a defect-containing image from an image (partial image) of the imaged portion and a tertiary in which the position information of the defect-containing image is added to the three-dimensional image of the work W.
  • a display control process for displaying the original image and the defect-containing image on the display unit 61 is executed. That is, the arithmetic processing unit 91 functions as the “defect extraction unit” and the “display control unit” of the present invention.
  • FIG. 4 is a flowchart showing an inspection method executed by the inspection system shown in FIG.
  • the inspection system 1 the video signal of the work W is given to the projection unit 21 before the work W, which is the inspection target, is newly input.
  • the projection unit 21 shows a full-scale image of the work W on the upper surface of the belt conveyor 2Cv, more specifically, a work loading position indicating the work mounting position when the work W is loaded onto the belt conveyor 2Cv in the mounting posture.
  • the image GW is projected (step S1).
  • the operator can place the work W on the belt conveyor 2Cv while looking at the work loading position image GW, and can load the work W into the inspection system 1 in a preset mounting posture state.
  • the image data of the work loading position image GW is stored in the storage unit 92 in advance.
  • the operator places the work W on the belt conveyor 2Cv in the mounting posture while referring to the work loading position image GW, and this is detected by a sensor or the like, or the inspection is started by the operator.
  • the button is pressed (“YES” in step S2)
  • the work W is conveyed from the loading device 2 to the surface imaging device 3 in the mounted posture state (step S3).
  • the surface imaging device 3 executes an inspection (hereinafter referred to as “surface side inspection”) for whether or not defects such as scratches and chips are present on the surface of the work W (step S4).
  • FIG. 5 is a flowchart for explaining the surface side inspection.
  • FIG. 6 is a diagram schematically showing an example of a partial image acquired in the surface side inspection.
  • the surface imaging device 3 changes the relative positions of the imaging units 311 and 321 with respect to the work W, that is, the imaging positions of the imaging units 311 and 321 in multiple stages (in this embodiment, i stages and i are natural numbers of 2 or more). Each imaging position is stored in the storage unit 92 in advance.
  • the robot control unit 95 reads out the imaging positions (reference numerals FP1, FP2, ..., FPi in FIG. 6) and positions the imaging robots 31 and 32 at the mth imaging position (step S41). For example, in the first imaging position FP1, the imaging robots 31 and 32 are positioned at positions where the imaging units 311 and 321 face the imaged portion Wa of the work W as shown in FIG.
  • the lighting pattern by the lighting unit is changed in multiple steps (in this embodiment, j steps and j is a natural number of 2 or more) (step S42).
  • Each illumination pattern is stored in the storage unit 92 in advance.
  • the robot control unit 95 reads out the illumination pattern (see FIG. 6), and the illumination units of the imaging robots 31 and 32 illuminate the imaged portion Wa with the nth illumination pattern. While the imaging robots 31 and 32 are positioned at the first imaging position FP1 in this way, the imaging robot 31 images with the imaging unit 311 while the illumination conditions are switched in the order of illumination pattern 1, illumination pattern 2, ..., Illumination pattern j.
  • the imaged portion Wa is imaged from the direction D1 to acquire the partial image FG1 (1, n), and the imaging robot 32 images the imaged portion Wa from the imaging direction D2 by the imaging unit 321 to obtain the partial image FG2 (2, n). ) Is acquired (step S43).
  • the image data of these partial images FG1 (1, n) and FG2 (1, n) are sent to the control device 9 and stored in the storage unit 92.
  • the arithmetic processing unit 91 inspects whether or not there is a defect such as a scratch or a chip on the imaged portion Wa based on the partial images FG1 (1, n) and FG2 (1, n). For example, when the image Id of the defect is reflected in the partial image FG1 (1, n) or the partial image FG2 (1, n) as shown in the column of "1 (FP1)" in FIG. 6, they are imaged. The arithmetic processing unit 91 determines that there is a defect in the imaged portion Wa imaged at the imaging position FP1.
  • step S42 Regarding the setting of changing the lighting conditions (step S42), the acquisition of the partial image (step S43), the inspection based on the partial image (step S44), and the storage of the inspection result (step S45), the imaging robot 31 is further described in step S41. , 32 are positioned every time the imaging positions FP2, FP3, ..., FPi are positioned. That is, by repeating the steps S41 to S43, the relative positions of the imaging units 311 and 321 with respect to the work W are changed in multiple stages, and the imaged portion of the work W imaged by the imaging units 311 and 321 is different. Is imaged under a plurality of different lighting conditions. As a result, a plurality of partial images FG1 (m, n) and FG2 (m, n) are acquired, and the surface side inspection of the work W is executed based on them.
  • step S5 The work W that has undergone the surface side inspection is conveyed from the surface imaging device 3 to the reversing device 4 in the placed posture state. Then, the work W is lifted upward from the belt conveyor 4Cv by the reversing device 4, inverted 180 degrees around the rotation axis extending in parallel with the direction X as shown in FIG. 1, and then returned to the belt conveyor 4Cv (step S6). ). As a result, the work W is in the inverted posture state.
  • the work W is conveyed from the reversing device 4 to the back surface imaging device 5 in the reversing posture (step S7). Then, the back surface imaging device 5 executes an inspection (hereinafter referred to as “back surface side inspection”) for whether or not defects such as scratches and chips are present on the back surface of the work W (step S8).
  • back surface side inspection an inspection for whether or not defects such as scratches and chips are present on the back surface of the work W
  • FIG. 7 is a flowchart for explaining the back side inspection.
  • the back side inspection is performed in the same manner as the front side inspection except that the surface to be inspected is the back surface. That is, each time the imaging robots 31 and 32 are positioned at different imaging positions in step S81, the lighting condition change setting (step S82), partial image acquisition (step S83), inspection based on the partial image (step S84), and The storage of the inspection result (step S85) is executed.
  • the lighting condition change setting step S82
  • partial image acquisition step S83
  • inspection based on the partial image step S84
  • step S85 The storage of the inspection result
  • the partial image is referred to as BG1 ( They are called m, n) and BG2 (m, n). That is, in “BG1 (m, n)" and "BG2 (m, n)", the illumination conditions are set to the illumination pattern 1, the illumination pattern 2, ... This means a partial image of the back surface of the work acquired by the imaging robots 51 and 52 while being switched in the order of the illumination pattern j.
  • the back side inspection of the work W is executed on the plurality of partial images based on BG1 (m, n) and BG2 (m, n), and when the inspection of the work W is completed, the inspection is performed as shown in FIG.
  • the finished work W is conveyed from the back surface imaging device 5 to the discharge device 6 (step S9).
  • the work W is moved by the discharge device 6 to a position where the work W can be taken out from the inspection system 1 by the operator.
  • the arithmetic processing unit 91 controls the content to be displayed on the display unit 61 so that the operator can easily confirm the inspection result of the work W (step S10).
  • FIG. 8 is a flowchart showing the display control of the inspection result by the arithmetic processing unit.
  • FIG. 9 is a schematic view showing a display example of the inspection result.
  • the arithmetic processing unit 91 reads out the three-dimensional image data of the work W stored in the storage unit 92 in advance, and as shown in FIG. 9, the three-dimensional work image when the work W is viewed from the surface side on the display unit 61. Display Iwf (step S101).
  • step S102 the imaging position determined to have a defect by the surface side inspection is acquired as "surface side defect position information" (step S102).
  • the first imaging position FP1 and the second imaging position FP2 correspond to "defect position information on the surface side”. Therefore, in step S103, the arithmetic processing unit 91 determines that a defect exists on the surface side, and executes the following steps S104 to S107. On the other hand, if it is determined in step S103 that no defect exists on the surface side, the arithmetic processing unit 91 additionally displays "no defect" on the display unit 61 on the surface side of the work W, and proceeds to step S108.
  • the arithmetic processing unit 91 additionally displays the defect position for each defect. Additional display of the thumbnail including the image of the defect is executed.
  • a defect hereinafter referred to as “defect 1” is found in the imaged portion (reference numeral Wa in FIG. 3) imaged at the first imaging position FP1. ) Is included, and a defect (hereinafter referred to as “defect 2”) is included in the imaged portion imaged at the second imaging position FP2, and no defect exists on the other work surface.
  • steps S104 to S107 will be described.
  • the arithmetic processing unit 91 first executes steps S104 to S107 for the defect 1.
  • the storage unit 92 stores in advance position data indicating the position of the imaged portion with respect to the work W.
  • the arithmetic processing unit 91 reads out the position data of the imaged portion Wa imaged by the imaging units 311 and 321 among the position data from the storage unit 92 as the position information of the defect 1.
  • the arithmetic processing unit 91 additionally displays the position DP1 of the defect 1 as the defect position DP (m) on the three-dimensional work image Iwf based on the position data (step S104).
  • the loading device 2 projects an image GW showing the mounting position of the work W, and the work W is loaded in the corresponding mounting posture.
  • the work W is inverted by the reversing device 4 before being transported to the discharging device 6, and the work W is changed to the reversed posture when being transported to the discharging device 6.
  • the posture of the work W has a certain correspondence with the image GW. Therefore, the arithmetic processing unit 91 reverses the work W that has been conveyed to the discharge device 6 based on the image data of the image GW, and the posture when the work W is reversed around the rotation axis and returned to the mounting posture. Can be predicted.
  • the display of the three-dimensional work image Iwf on the display unit 61 is controlled so that the posture of the three-dimensional work image Iwf displayed on the display unit 61 matches the predicted posture.
  • the position DP1 is shown in a blowout format, but the display format is not limited to this, and any display format can be used. The same applies to defect 2 in this respect.
  • the arithmetic processing unit 91 performs partial images FG1 (1,1), FG1 (1,2) ..., FG1 (j), FG2 (1,1), FG2 (1,2) in which the defect 1 is reflected. ) ..., FG2 (j) is read from the storage unit 92 (step S105). Then, the arithmetic processing unit 91 extracts the partial image FG1 (1,1) in which the image Id1 of the defect 1 is clearly reflected among the partial images captured by the imaging unit 311 as the defect-containing image FG1max, and also extracts the partial image FG1 (1,1).
  • the partial image FG2 (1,1) in which the image Id1 of the defect 1 is clearly reflected among the partial images captured by the imaging unit 321 is extracted as the defect-containing image FG2max (step S106).
  • the area values of the image Id1 of the defect 1 are calculated, respectively, and the partial image having the largest defect area value is clearly reflected by the image Id1. It was judged that there was.
  • the determination may be made based on an index value such as the maximum luminance value in addition to the area value.
  • defect-containing images FG1max and FG2max extracted in this way are additionally displayed in thumbnail format side by side with the three-dimensional work image Iwf as shown in FIG. 9 by the arithmetic processing unit 91 (step S107).
  • the arithmetic processing unit 91 reads out the position data of the imaged portion imaged by the imaging units 311 and 321 of the imaging position 2 from the storage unit 92 as the position information of the defect 2, and is based on the position data as shown in FIG.
  • the position DP2 of the defect 2 is additionally displayed on the three-dimensional work image Iwf as the defect position DP (m) (step S104).
  • the partial image FG1 (1, j) in which the image Id2 of the defect 2 is most clearly reflected among the partial images captured by the imaging unit 311 is extracted as the defect-containing image FG1max, and is captured by the imaging unit 321.
  • the partial image FG2 (1, j) in which the image Id2 of the defect 2 is most clearly reflected in the partial image is extracted as the defect-containing image FG2max (step S106).
  • the arithmetic processing unit 91 additionally displays the defect-containing images FG1max and FG2max (step S107).
  • the arithmetic processing unit 91 proceeds to step S108 to execute the display processing on the back side.
  • step S108 the arithmetic processing unit 91 reads out the three-dimensional image data of the work W stored in the storage unit 92 in advance, and as shown in FIG. 9, when the work W is viewed from the back surface side on the display unit 61.
  • the three-dimensional work image Iwb is displayed.
  • the work posture is three-dimensionally matched with the predicted work posture.
  • the posture of the work image Iwb is controlled.
  • the imaging position determined to have a defect by the back surface inspection is acquired as "defect position information on the back surface side" (step S109).
  • a display indicating that there is no defect on the back surface, that is, “no defect” is a three-dimensional work image. It is displayed on the display unit 61 together with Iwb, and a series of display processes is completed.
  • the arithmetic processing unit 91 executes additional display processing in the same manner as on the front surface side (steps S111 to S114).
  • the position information of the defects existing in the work W with respect to the three-dimensional work images Iwb and Iwf of the work W (for example, FIG. 9).
  • the entire image of the work to which the codes DP1 and DP2) are added and the partial image in which each defect is reflected are displayed side by side. Therefore, the operator can satisfactorily confirm the content of the defect occurring in the work W and the location where the defect has occurred by visually recognizing the display content of the display unit 61.
  • the partial image in which the defect image is most clearly reflected is selectively extracted as the defect-containing image from the plurality of partial images in which the defect is reflected, and is displayed on the display unit 61. Therefore, the content of the defect can be confirmed with high accuracy by referring to the defect-containing image.
  • the posture of the work W conveyed to the discharge device 6 is predicted based on the image data of the image GW, and the three-dimensional work images Iwb and Iwf of the work W are displayed on the display unit 61 so as to match the predicted posture. doing. Therefore, the operator can easily compare the actual product (inspected work W) conveyed to the discharge device 6 with the display content of the display unit 61, and can confirm the content of the defect and the location where the defect has occurred in a better and quicker manner. can.
  • the present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention.
  • the present invention is applied to the inspection system 1 that inspects the front and back surfaces of the work W, but the present invention can also be applied to an inspection system that inspects only one of the front surface and the back surface. ..
  • the surface imaging device 3 has two imaging robots 31 and 32, but the number of imaging robots is not limited to this, and one or three or more imaging robots are used. May be good. Further, regarding the back surface imaging device 5, the number of imaging robots is not limited to “2”, and may be one or three or more.
  • control program including the inspection program is stored in the storage unit 92 in advance, but the control device 9 is electrically connected to a disk drive (not shown) to read the installation program.
  • a disk drive not shown
  • the inspection program is incorporated by installing the above-mentioned installation program, and the above-mentioned inspection method and inspection result display method can be upgraded to be executable. You may let me.
  • the program may be read using a recording medium other than a CD-ROM or a DVD-ROM as a recording medium. Further, the program may be read by using a communication means.
  • the present invention can be applied to a general inspection system for inspecting the presence or absence of defects in an inspection object based on an image obtained by imaging the inspection object, and a general inspection result display technology.

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Abstract

The present invention is an inspection device in which the presence of a defect in an object being inspected is inspected on the basis of a plurality of partial images, and in which the result of inspection is displayed on a display unit, the inspection device having: a storage unit that stores position data indicating the positions of a plurality of sites being inspected relative to the object being inspected; a defect extraction unit that, for each defect, selectively extracts a defect-containing image from among the plurality of partial images in which an image of a defect is reflected; and a display control unit that obtains position information pertaining to the defect-containing image on a three-dimensional image of the object being inspected on the basis of position data, and causes a display unit to display the defect-containing image and an overall image obtained by adding the position information to the three-dimensional image of the object being inspected.

Description

検査システム、検査結果の表示方法および表示プログラムInspection system, inspection result display method and display program

 この発明は、検査対象物を撮像して得られる画像に基づいて検査対象物における欠陥の有無を検査する検査システム、検査結果の表示方法および表示プログラムに関するものである。 The present invention relates to an inspection system that inspects the presence or absence of defects in an inspection object based on an image obtained by imaging the inspection object, a display method of inspection results, and a display program.

 以下に示す日本出願の明細書、図面および特許請求の範囲における開示内容は、参照によりその全内容が本書に組み入れられる:
 特願2020-048597(2020年3月19日出願)。
The specification, drawings and claims of the Japanese application shown below are incorporated herein by reference in their entirety:
Japanese Patent Application No. 2020-048597 (filed on March 19, 2020).

 従来、自動車等の駆動部およびその周辺に用いられている立体形状を有する鍛造部品については、人が様々な角度から鍛造部品を見ることで欠陥を発見する目視検査が行われている。この目視検査は、例えばカメラと照明とを含む光学機器を用いた検査に置き換えることが可能である。 Conventionally, forged parts having a three-dimensional shape used in and around the driving part of automobiles and the like are visually inspected to find defects by a person looking at the forged parts from various angles. This visual inspection can be replaced, for example, with an inspection using an optical instrument including a camera and lighting.

 そして、例えば人間の腕に似た構造を有する産業用のロボットアームの先端に光学機器(本発明の「撮像部」の一例に相当)を取り付けることで、検査対象物(「ワーク」ともいう)の所望部分を自在に撮像可能な欠陥検査装置が考えられている(例えば、特許文献1等)。このような欠陥検査装置によれば、例えば、人による目視検査では対応しにくい大型のワークであっても、検査を行うことが可能となる。 Then, for example, by attaching an optical device (corresponding to an example of the "imaging unit" of the present invention) to the tip of an industrial robot arm having a structure similar to a human arm, an inspection object (also referred to as a "work") is attached. A defect inspection device capable of freely imaging a desired portion of the above is considered (for example, Patent Document 1 and the like). According to such a defect inspection device, for example, even a large workpiece that is difficult to handle by visual inspection by a human can be inspected.

特開2006-208259号公報Japanese Unexamined Patent Publication No. 2006-208259

 特許文献1に記載の装置では、光学機器により撮像された撮像画像と欠陥検出画像とが並列して表示されているのみであり、それらの画像が検査対象物全体のどこに対応するのかを容易に把握することができない。その結果、欠陥が発生した箇所の確認やその欠陥の内容を迅速に確認することができない。 In the apparatus described in Patent Document 1, only the image captured by the optical device and the defect detection image are displayed in parallel, and it is easy to determine where the image corresponds to the entire inspection object. I can't figure it out. As a result, it is not possible to confirm the location where the defect has occurred and the content of the defect quickly.

 この発明は上記課題に鑑みなされたものであり、検査対象物に発生している欠陥の内容および発生箇所を良好に確認することができる検査システム、検査結果の表示方法および表示プログラムを提供することを目的とする。 The present invention has been made in view of the above problems, and provides an inspection system, an inspection result display method, and a display program capable of satisfactorily confirming the content and location of defects occurring in an inspection object. With the goal.

 この発明の第1の態様は、検査システムであって、検査対象物に対する撮像部の相対位置を多段階に変更して撮像部により撮像される検査対象物の被撮像部位を異ならせながら被撮像部位を互いに異なる複数の照明条件で撮像して複数の部分画像を取得する撮像装置と、複数の部分画像に基づいて検査対象物における欠陥の有無を検査して検査結果を表示部に表示する検査装置と、を備え、検査装置は、検査対象物に対する複数の被撮像部位の位置を示す位置データを記憶する記憶部と、欠陥毎に、欠陥の像が映り込んだ複数の部分画像から欠陥含有画像を選択的に抽出する欠陥抽出部と、位置データに基づいて検査対象物の三次元画像上での欠陥含有画像の位置情報を求め、検査対象物の三次元画像に位置情報を加えた全体画像と、欠陥含有画像とを表示部に表示させる表示制御部と、を有することを特徴としている。 The first aspect of the present invention is an inspection system, in which the relative position of the image pickup unit with respect to the inspection object is changed in multiple stages, and the imaged portion of the inspection object imaged by the image pickup unit is different. An imaging device that acquires a plurality of partial images by imaging a part under a plurality of different lighting conditions, and an inspection that inspects the presence or absence of defects in the inspection object based on the plurality of partial images and displays the inspection result on the display unit. The inspection device includes a device, a storage unit that stores position data indicating the positions of a plurality of images to be imaged with respect to an object to be inspected, and a defect inclusion from a plurality of partial images in which an image of the defect is reflected for each defect. The defect extraction unit that selectively extracts the image and the position information of the defect-containing image on the three-dimensional image of the inspection target are obtained based on the position data, and the position information is added to the three-dimensional image of the inspection target as a whole. It is characterized by having a display control unit for displaying an image and a defect-containing image on the display unit.

 また、この発明の第2態様は、検査対象物に対する撮像部の相対位置を多段階に変更して撮像部により撮像される検査対象物の被撮像部位を異ならせながら被撮像部位を互いに異なる複数の照明条件で撮像して取得される複数の部分画像に基づいて検査対象物における欠陥の有無を検査する検査システムにおける検査結果の表示方法であって、欠陥毎に、欠陥の像が映り込んだ複数の部分画像から欠陥含有画像を選択的に抽出する工程と、検査対象物の三次元画像上での欠陥含有画像の位置情報を求め、検査対象物の三次元画像に位置情報を加えた全体画像と、欠陥含有画像と、を表示部に表示させる工程と、を備えることを特徴としている。 Further, in the second aspect of the present invention, a plurality of images to be imaged are different from each other while changing the relative position of the image pickup unit with respect to the object to be inspected in multiple stages to make the imaged part of the imaged object to be imaged by the image pickup unit different. It is a display method of inspection results in an inspection system that inspects the presence or absence of defects in an inspection object based on a plurality of partial images obtained by imaging under the lighting conditions of the above, and an image of the defects is reflected for each defect. The process of selectively extracting the defect-containing image from a plurality of partial images, the position information of the defect-containing image on the three-dimensional image of the inspection object is obtained, and the position information is added to the three-dimensional image of the inspection object as a whole. It is characterized by including a step of displaying an image and a defect-containing image on a display unit.

 さらに、この発明の第3態様は、検査対象物に対する撮像部の相対位置を多段階に変更して撮像部により撮像される検査対象物の被撮像部位を異ならせながら被撮像部位を互いに異なる複数の照明条件で撮像して取得される複数の部分画像に基づいて検査対象物における欠陥の有無を検査する検査システムにおける検査結果の表示プログラムであって、欠陥毎に、欠陥の像が映り込んだ複数の部分画像から欠陥含有画像を選択的に抽出する工程と、検査対象物の三次元画像上での欠陥含有画像の位置情報を求め、検査対象物の三次元画像に位置情報を加えた全体画像と、欠陥含有画像とを表示部に表示させる工程と、をコンピュータに実行させることを特徴としている。 Further, in the third aspect of the present invention, a plurality of images to be imaged are different from each other while changing the relative position of the image pickup unit with respect to the object to be inspected in multiple stages to make the imaged areas of the imaged object to be imaged by the image pickup unit different. It is a display program of inspection results in an inspection system that inspects the presence or absence of defects in an inspection object based on a plurality of partial images obtained by imaging under the lighting conditions of the above, and an image of the defects is reflected for each defect. The process of selectively extracting the defect-containing image from a plurality of partial images, the position information of the defect-containing image on the three-dimensional image of the inspection object is obtained, and the position information is added to the three-dimensional image of the inspection object as a whole. It is characterized in that a computer executes a step of displaying an image and a defect-containing image on a display unit.

 この発明では、欠陥毎に、欠陥の像が映り込んだ複数の部分画像から欠陥含有画像が選択的に抽出され、欠陥含有画像の位置情報を含む全体画像と一緒に表示部に表示される。したがって、検査対象物に発生している欠陥の内容および発生箇所を良好に確認することができる。 In the present invention, the defect-containing image is selectively extracted from a plurality of partial images in which the image of the defect is reflected for each defect, and is displayed on the display unit together with the entire image including the position information of the defect-containing image. Therefore, it is possible to satisfactorily confirm the content and location of defects occurring in the inspection object.

 上述した本発明の各態様の有する複数の構成要素はすべてが必須のものではなく、上述の課題の一部又は全部を解決するため、あるいは、本明細書に記載された効果の一部又は全部を達成するために、適宜、前記複数の構成要素の一部の構成要素について、その変更、削除、新たな他の構成要素との差し替え、限定内容の一部削除を行うことが可能である。また、上述の課題の一部又は全部を解決するため、あるいは、本明細書に記載された効果の一部又は全部を達成するために、上述した本発明の一態様に含まれる技術的特徴の一部又は全部を上述した本発明の他の態様に含まれる技術的特徴の一部又は全部と組み合わせて、本発明の独立した一形態とすることも可能である。 The plurality of components of each aspect of the present invention described above are not all essential, and may be used to solve some or all of the above-mentioned problems, or part or all of the effects described herein. In order to achieve the above, it is possible to change, delete, replace some of the plurality of components with new other components, and partially delete the limited contents, as appropriate. In addition, in order to solve a part or all of the above-mentioned problems, or to achieve a part or all of the effects described in the present specification, the technical features included in the above-mentioned aspect of the present invention. It is also possible to combine some or all with some or all of the technical features contained in the other aspects of the invention described above to form an independent form of the invention.

本発明に係る検査システムの一実施形態の全体構成を模式的に示す図である。It is a figure which shows typically the whole structure of one Embodiment of the inspection system which concerns on this invention. 投入装置の構成を模式的に示す図である。It is a figure which shows typically the structure of the loading device. 表面撮像装置の構成を模式的に示す図である。It is a figure which shows typically the structure of the surface image pickup apparatus. 図1に示す検査システムにより実行される検査方法を示すフローチャートである。It is a flowchart which shows the inspection method executed by the inspection system shown in FIG. 表面側検査を説明するためのフローチャートである。It is a flowchart for demonstrating the surface side inspection. 表面側検査において取得される部分画像の一例を模式的に示す図である。It is a figure which shows typically an example of the partial image acquired in the surface side inspection. 裏面側検査を説明するためのフローチャートである。It is a flowchart for demonstrating the back side inspection. 演算処理部による検査結果の表示制御を示すフローチャートである。It is a flowchart which shows the display control of the inspection result by the arithmetic processing part. 検査結果の表示例を示す模式図である。It is a schematic diagram which shows the display example of the inspection result.

 図1は本発明に係る検査システムの一実施形態の全体構成を模式的に示す図である。この検査システム1は、例えば投入装置2と、表面撮像装置3と、反転装置4と、裏面撮像装置5と、排出装置6とを備えている。検査システム1では、投入装置2、表面撮像装置3、反転装置4、裏面撮像装置5および排出装置6がこの順序でX方向に配列されている。そして、三次元形状を有する鍛造部品などの検査対象物(以下「ワーク」という)Wが投入装置2に投入されると、システム全体を制御する制御装置9からの指令に応じて装置各部が作動してワークWをX方向に搬送しつつワークWの検査を行う。なお、図1ならびに次に説明する図2および図3において装置各部の配置関係を明確にするために、ワークWの搬送方向Xと直交する水平方向Yのうち、装置の正面側を「-Y方向」と称するとともに、装置の背面側を「+Y方向」と称する。さらに、鉛直方向Zにおける上方向および下方向をそれぞれ「+Z方向」および「-Z方向」と称する。 FIG. 1 is a diagram schematically showing an overall configuration of an embodiment of an inspection system according to the present invention. The inspection system 1 includes, for example, an input device 2, a front surface imaging device 3, an inversion device 4, a back surface imaging device 5, and an ejection device 6. In the inspection system 1, the input device 2, the front surface imaging device 3, the reversing device 4, the back surface imaging device 5, and the discharging device 6 are arranged in this order in the X direction. Then, when an inspection object (hereinafter referred to as “work”) W such as a forged part having a three-dimensional shape is thrown into the loading device 2, each part of the device operates in response to a command from the control device 9 that controls the entire system. Then, the work W is inspected while being conveyed in the X direction. In addition, in order to clarify the arrangement relationship of each part of the apparatus in FIG. 1 and FIGS. In addition to being referred to as "direction", the back side of the device is referred to as "+ Y direction". Further, the upward direction and the downward direction in the vertical direction Z are referred to as "+ Z direction" and "-Z direction", respectively.

 図2は投入装置の構成を模式的に示す図である。投入装置2は、検査システム1の外部からワークWが投入される装置である。この投入装置2は、搬送方向Xにおいて検査システム1の最上流に位置している。投入装置2には、図2への図示を省略しているが、ワークWを投入するための投入口(図示省略)が設けられている。また、投入口の近傍にベルトコンベア2Cvが配設されており、オペレータまたは投入ロボット(図示省略)などにより投入口を介してワークWがベルトコンベア2Cvの上面に載置可能となっている。つまり、ベルトコンベア2Cvは本発明の「載置部」の一例に相当している。 FIG. 2 is a diagram schematically showing the configuration of the loading device. The loading device 2 is a device in which the work W is loaded from the outside of the inspection system 1. The loading device 2 is located at the uppermost stream of the inspection system 1 in the transport direction X. Although not shown in FIG. 2, the loading device 2 is provided with a loading port (not shown) for loading the work W. Further, a belt conveyor 2Cv is arranged in the vicinity of the loading port, and the work W can be placed on the upper surface of the belt conveyor 2Cv via the loading port by an operator or a loading robot (not shown). That is, the belt conveyor 2Cv corresponds to an example of the "mounting portion" of the present invention.

 ここで、ワークWの投入を投入ロボットで行う場合には、予め投入ロボットにプログラムした一定の載置姿勢でワークWはベルトコンベア2Cv上に載置されるが、当該載置動作をオペレータにより行う場合に載置姿勢を一定に保つことは必ずしも容易ではない。そこで、本実施形態では、ベルトコンベア2Cvの上方位置に投影部21が設けられ、制御装置9の投影制御部96からの映像信号を受けてベルトコンベア2CvでのワークWの載置位置を示す画像GWを投影する。これにより、映し出された画像GWにしたがってオペレータはワークWをベルトコンベア2Cvの上に載置することができる。これにより、ワークWの載置姿勢を安定化することができ、常に一定の姿勢でワークWを検査することが可能となっている。 Here, when the work W is loaded by the loading robot, the work W is mounted on the belt conveyor 2Cv in a constant mounting posture programmed in the loading robot in advance, and the loading operation is performed by the operator. In some cases, it is not always easy to keep the placement posture constant. Therefore, in the present embodiment, the projection unit 21 is provided at a position above the belt conveyor 2Cv, and an image showing the mounting position of the work W on the belt conveyor 2Cv in response to the video signal from the projection control unit 96 of the control device 9. Project the GW. Thereby, the operator can place the work W on the belt conveyor 2Cv according to the projected image GW. As a result, the placement posture of the work W can be stabilized, and the work W can be inspected in a constant posture at all times.

 ベルトコンベア2Cvは制御装置9の搬送制御部94からの搬送指令に応じて上記載置姿勢のワークWをX方向に搬送する。なお、表面撮像装置3、反転装置4、裏面撮像装置5および排出装置6にも、ベルトコンベア3Cv、4Cv、5Cv、6Cvがそれぞれ設けられており、搬送制御部94からの搬送指令に応じて互いに隣接するベルトコンベア間で同期可能となっている。この同期動作によりワークWは投入装置2、表面撮像装置3、反転装置4、裏面撮像装置5および排出装置6の順序で搬送される。 The belt conveyor 2Cv conveys the work W in the above-described posture in the X direction in response to a transfer command from the transfer control unit 94 of the control device 9. The front surface imaging device 3, the reversing device 4, the back surface imaging device 5, and the discharging device 6 are also provided with belt conveyors 3Cv, 4Cv, 5Cv, and 6Cv, respectively, and are provided with each other in response to a transfer command from the transfer control unit 94. It is possible to synchronize between adjacent belt conveyors. By this synchronous operation, the work W is conveyed in the order of the loading device 2, the front surface imaging device 3, the reversing device 4, the back surface imaging device 5, and the discharging device 6.

 投入装置2から表面撮像装置3へのワーク搬送はベルトコンベア2Cv、3Cvの間で行われ、ワークWは上記画像GW上に載置された時の載置姿勢のまま表面撮像装置3に搬送される。表面撮像装置3は載置姿勢状態のワークWの露出面を撮像するものである。本明細書では、載置姿勢状態で露出している面を「表面」と称し、次の反転装置4により反転された反転姿勢状態で露出している面を「裏面」と称する。 The work is transferred from the loading device 2 to the surface imaging device 3 between the belt conveyors 2Cv and 3Cv, and the work W is conveyed to the surface imaging device 3 in the same mounting posture as when it is mounted on the image GW. NS. The surface imaging device 3 images the exposed surface of the work W in the mounted posture. In the present specification, the surface exposed in the placed posture state is referred to as a "front surface", and the surface exposed in the inverted posture state inverted by the next reversing device 4 is referred to as a "back surface".

 図3は表面撮像装置の構成を模式的に示す図である。表面撮像装置3は上記ベルトコンベア3Cvと2つの撮像ロボット31、32とを有している。撮像ロボット31、32はY方向においてベルトコンベア3Cvを挟んで対向配置されている。より詳しくは、撮像ロボット31、32はそれぞれベルトコンベア3Cvの(+Y)方向側と(-Y)方向側に配置されている。撮像ロボット31、32は基本的に同一構成を有している。 FIG. 3 is a diagram schematically showing the configuration of the surface imaging device. The surface imaging device 3 has the belt conveyor 3Cv and two imaging robots 31 and 32. The imaging robots 31 and 32 are arranged to face each other with the belt conveyor 3Cv in the Y direction. More specifically, the imaging robots 31 and 32 are arranged on the (+ Y) direction side and the (−Y) direction side of the belt conveyor 3Cv, respectively. The imaging robots 31 and 32 basically have the same configuration.

 撮像ロボット31は複数のアームが連結された多関節ロボットであり、先端アーム312の先端には撮像部311および照明部(図示省略)が取り付けられている。この撮像部311は、例えば電荷結合素子(Charge Coupled Device:CCD)等の撮像素子と、この撮像素子にワークWの光像を結像させるための光学系としてのレンズ部とを有している。一方、照明部には、例えば複数の発光ダイオード(Light Emitting Diode:LED)が2次元的に配列された面状の照明等が適用される。このため、ワークWを広範囲にわたって複数の照明パターンで照明することができる。撮像ロボット31は制御装置9のロボット制御部95からの動作指令にしたがって制御され、ベルトコンベア3Cv上のワークWに対する撮像部311および照明部の相対位置を多段階に変更可能となっている。 The imaging robot 31 is an articulated robot in which a plurality of arms are connected, and an imaging unit 311 and an illumination unit (not shown) are attached to the tip of the tip arm 312. The image pickup unit 311 has, for example, an image pickup element such as a charge-coupled device (CCD) and a lens section as an optical system for forming an optical image of a work W on the image pickup device. .. On the other hand, for example, a planar illumination in which a plurality of light emitting diodes (Light Emitting Diodes: LEDs) are two-dimensionally arranged is applied to the illumination unit. Therefore, the work W can be illuminated with a plurality of illumination patterns over a wide range. The imaging robot 31 is controlled according to an operation command from the robot control unit 95 of the control device 9, and the relative positions of the imaging unit 311 and the lighting unit with respect to the work W on the belt conveyor 3Cv can be changed in multiple stages.

 また、撮像ロボット32も、撮像ロボット31と同様に多関節ロボットであり、先端アーム322の先端に撮像部321および照明部(図示省略)が取り付けられている。そして、制御装置9のロボット制御部95からの動作指令にしたがって撮像ロボット32は制御され、ベルトコンベア3Cv上のワークWに対する撮像部321および照明部の相対位置を多段階に変更可能となっている。 Further, the imaging robot 32 is also an articulated robot like the imaging robot 31, and an imaging unit 321 and an illumination unit (not shown) are attached to the tip of the tip arm 322. The imaging robot 32 is controlled according to an operation command from the robot control unit 95 of the control device 9, and the relative positions of the imaging unit 321 and the lighting unit with respect to the work W on the belt conveyor 3Cv can be changed in multiple stages. ..

 上記のように構成された2台の撮像ロボット31、32は、ベルトコンベア3Cv上のワークWに対して別々に移動して種々の撮像ポジションでワークWを撮像可能となっている。また、同一の撮像ポジションであっても、撮像ロボット31、32に設けた照明部の照明パターンを変更することによって種々の照明条件(ワークWの照明パターン)でワークWを照明することが可能となっている。つまり、表面撮像装置3では、検査対象物であるワークWに対する撮像部311、321の相対位置を多段階に変更して撮像部311、321により撮像されるワークWの被撮像部位を異ならせながら当該被撮像部位を互いに異なる複数の照明条件で撮像して複数の部分画像を取得することが可能となっている。そして、これらの部分画像の画像データは制御装置9に送られて記憶部92に一時的に記憶される。そして、後で詳述するように複数の部分画像に基づいてワークWの表面上の欠陥の有無が検査される。 The two imaging robots 31 and 32 configured as described above can move separately with respect to the work W on the belt conveyor 3Cv to image the work W at various imaging positions. Further, even in the same imaging position, it is possible to illuminate the work W under various illumination conditions (illumination pattern of the work W) by changing the illumination pattern of the illumination unit provided in the imaging robots 31 and 32. It has become. That is, in the surface imaging device 3, the relative positions of the imaging units 311 and 321 with respect to the work W to be inspected are changed in multiple stages, and the imaged portions of the work W imaged by the imaging units 311 and 321 are different. It is possible to acquire a plurality of partial images by imaging the imaged portion under a plurality of different lighting conditions. Then, the image data of these partial images is sent to the control device 9 and temporarily stored in the storage unit 92. Then, as will be described in detail later, the presence or absence of defects on the surface of the work W is inspected based on a plurality of partial images.

 こうして表面撮像装置3によりワークWの表面について複数の部分画像が取得されると、当該ワークWは表面撮像装置3から反転装置4に搬送される。このときの搬送はベルトコンベア3Cv、4Cvの間で行われ、ワークWは上記画像GW上に載置された時の載置姿勢のまま反転装置4に搬送される。 When a plurality of partial images of the surface of the work W are acquired by the surface image pickup device 3, the work W is conveyed from the surface image pickup device 3 to the inversion device 4. The transport at this time is performed between the belt conveyors 3Cv and 4Cv, and the work W is conveyed to the reversing device 4 in the same mounting posture as when it is mounted on the image GW.

 反転装置4は、ワークWを保持可能な保持機構と、保持機構の昇降と反転を行う昇降反転機構とを有する反転ロボット41で構成されている。反転ロボット41は、制御装置9のロボット制御部95からの指令に応じて保持機構および昇降反転機構を以下のように動作させる。つまり、反転装置4は、表面撮像装置3から搬送された載置姿勢状態のワークWをベルトコンベア4Cvからピックアップする動作、ベルトコンベア4Cvの上方でワークWを反転させる動作および反転姿勢状態のワークWをベルトコンベア4Cv上に戻す動作をこの順序で実行する。 The reversing device 4 is composed of a reversing robot 41 having a holding mechanism capable of holding the work W and an elevating / reversing mechanism for raising / lowering / reversing the holding mechanism. The reversing robot 41 operates the holding mechanism and the elevating / reversing mechanism as follows in response to a command from the robot control unit 95 of the control device 9. That is, the reversing device 4 picks up the work W in the mounted posture state conveyed from the surface imaging device 3 from the belt conveyor 4Cv, reverses the work W above the belt conveyor 4Cv, and works W in the reversing posture state. Is returned to the belt conveyor 4Cv in this order.

 こうして反転姿勢状態でワークWがベルトコンベア4Cv上に戻されると、当該ワークWはベルトコンベア4Cv、5Cvにより反転姿勢のまま反転装置4から裏面撮像装置5に搬送される。 When the work W is returned onto the belt conveyor 4Cv in the inverted posture state in this way, the work W is conveyed from the reversing device 4 to the back surface imaging device 5 in the inverted posture by the belt conveyor 4Cv and 5Cv.

 裏面撮像装置5は、撮像対象が反転姿勢となったワークWの露出面、つまりワークWの裏面である点を除き、表面撮像装置3と同一の構成を有している。すなわち、裏面撮像装置5では、検査対象物であるワークWに対する撮像部511、521の相対位置を多段階に変更して撮像部511、521により撮像されるワークWの被撮像部位を異ならせながら当該被撮像部位を互いに異なる複数の照明条件で撮像して複数の部分画像を取得することが可能となっている。そして、これらの部分画像の画像データは制御装置9に送られて記憶部92に一時的に記憶される。そして、後で詳述するように複数の部分画像に基づいてワークWの裏面上に欠陥が存在するか否かが検査される。 The back surface imaging device 5 has the same configuration as the front surface imaging device 3 except that the image pickup target is the exposed surface of the work W in the inverted posture, that is, the back surface of the work W. That is, in the back surface imaging device 5, the relative positions of the imaging units 511 and 521 with respect to the work W, which is the inspection target, are changed in multiple stages so that the imaged portion of the work W imaged by the imaging units 511 and 521 is different. It is possible to acquire a plurality of partial images by imaging the imaged portion under a plurality of different lighting conditions. Then, the image data of these partial images is sent to the control device 9 and temporarily stored in the storage unit 92. Then, as will be described in detail later, it is inspected whether or not a defect exists on the back surface of the work W based on a plurality of partial images.

 こうして両面の欠陥検査が完了したワークWは裏面撮像装置5から排出装置6に搬送される。このときの搬送はベルトコンベア5Cv、6Cvの間で行われ、ワークWは反転姿勢のまま反転装置4に搬送される。排出装置6の(+X)側壁には検査済のワークWを検査システム1から排出するための開口部(図示省略)が設けられている。そして、検査完了のワークWを受け取ったベルトコンベア6Cvは搬送制御部94からの搬送指令に応じて作動して当該ワークWを上記開口部の近傍まで移動させて位置決めする。一方、オペレータや排出ロボット(図示省略)は検査済のワークWを上記開口部から取り出す。 The work W for which the defect inspection on both sides has been completed is conveyed from the back surface imaging device 5 to the discharge device 6. The transfer at this time is performed between the belt conveyors 5 Cv and 6 Cv, and the work W is conveyed to the reversing device 4 in the reversing posture. An opening (not shown) for discharging the inspected work W from the inspection system 1 is provided on the (+ X) side wall of the discharge device 6. Then, the belt conveyor 6Cv that has received the inspection-completed work W operates in response to a transfer command from the transfer control unit 94 to move the work W to the vicinity of the opening and position it. On the other hand, the operator and the discharging robot (not shown) take out the inspected work W from the opening.

 こうして検査済のワークWの排出位置に配設された排出装置6の(+X)側壁には、図1に示すように、オペレータが視認可能な位置に表示部61が配設されている。この表示部61は、制御装置9の演算処理部91が複数の部分画像に基づいて欠陥の検査を行った検査結果(例えば後で説明する図9)を表示する。 As shown in FIG. 1, a display unit 61 is arranged at a position visible to the operator on the (+ X) side wall of the discharge device 6 arranged at the discharge position of the work W thus inspected. The display unit 61 displays an inspection result (for example, FIG. 9 described later) in which the arithmetic processing unit 91 of the control device 9 inspects the defect based on the plurality of partial images.

 制御装置9は、検査システム1の内部の適所に設けられ、論理演算を実行する周知のCPU(Central Processing Unit)、初期設定等を記憶しているROM(Read Only Memory)、各装置動作中の様々なデータを一時的に記憶するRAM(Random Access Memory)等から構成されている。すなわち、制御装置9は上記したハードウェアを備えた専用装置であってもよく、またパーソナルコンピュータやワークステーション等の汎用処理装置に、後述する処理機能を実現するための検査プログラムを組み込んだものであってもよく、汎用のコンピュータを利用することが可能である。 The control device 9 is provided at an appropriate position inside the inspection system 1, a well-known CPU (Central Processing Unit) that executes logical calculations, a ROM (Read Only Memory) that stores initial settings, and the like, and each device is in operation. It is composed of a RAM (Random Access Memory) that temporarily stores various data. That is, the control device 9 may be a dedicated device equipped with the above-mentioned hardware, or a general-purpose processing device such as a personal computer or a workstation in which an inspection program for realizing a processing function described later is incorporated. It may be present, and a general-purpose computer can be used.

 制御装置9は、機能的には、演算処理部91、記憶部92、画像処理部93、搬送制御部94、ロボット制御部95および投影制御部96などを備え、本発明の「検査装置」の一例に相当している。これらのうち記憶部92は検査プログラムや撮像部311、321、511、521により撮像される被撮像部位の位置データなどを記憶する。また、画像処理部93は撮像部311、321、511、521から画像信号を取り込み、被撮像部位の画像に対して種々の画像処理を施してワークWの検査に好適な画像を生成する。また、搬送制御部94はベルトコンベア2Cv~6Cvに装備されたモータの駆動を制御する。ロボット制御部95は、表面撮像装置3に装備される撮像ロボット31、32と、反転装置4に装備される反転ロボット41と、裏面撮像装置5に装備される撮像ロボット51、52とに対して動作指令を与えてワークWの撮像および反転などを行う。また、投影制御部96は投入装置2でのワークWの載置姿勢の映像信号を投影部21に与えてワークWの載置姿勢を教示する。 The control device 9 functionally includes an arithmetic processing unit 91, a storage unit 92, an image processing unit 93, a transport control unit 94, a robot control unit 95, a projection control unit 96, and the like, and is the "inspection device" of the present invention. It corresponds to an example. Of these, the storage unit 92 stores the inspection program, the position data of the imaged portion imaged by the imaging units 311, 321, 511, and 521, and the like. Further, the image processing unit 93 takes in image signals from the image capturing units 311, 321, 511, and 521, and performs various image processing on the image of the imaged portion to generate an image suitable for the inspection of the work W. Further, the transport control unit 94 controls the drive of the motors mounted on the belt conveyors 2Cv to 6Cv. The robot control unit 95 refers to the imaging robots 31 and 32 mounted on the front surface imaging device 3, the reversing robot 41 equipped on the reversing device 4, and the imaging robots 51 and 52 equipped on the back surface imaging device 5. An operation command is given to image and invert the work W. Further, the projection control unit 96 gives a video signal of the mounting posture of the work W in the input device 2 to the projection unit 21 to teach the mounting posture of the work W.

 さらに、演算処理部91は記憶部92に予め記憶されている検査プログラムを読み出し、次に図4ないし図9を参照しつつ詳述するように検査プログラムにしたがって装置各部を制御する。これによって、後で詳述するように被撮像部位の画像(部分画像)から欠陥含有画像を選択的に抽出する欠陥抽出処理やワークWの三次元画像に欠陥含有画像の位置情報を加えた三次元画像と欠陥含有画像とを表示部61に表示させる表示制御処理とが実行される。すなわち、演算処理部91は本発明の「欠陥抽出部」および「表示制御部」として機能する。 Further, the arithmetic processing unit 91 reads out the inspection program stored in advance in the storage unit 92, and then controls each unit of the apparatus according to the inspection program as described in detail with reference to FIGS. 4 to 9. As a result, as will be described in detail later, a defect extraction process for selectively extracting a defect-containing image from an image (partial image) of the imaged portion and a tertiary in which the position information of the defect-containing image is added to the three-dimensional image of the work W. A display control process for displaying the original image and the defect-containing image on the display unit 61 is executed. That is, the arithmetic processing unit 91 functions as the “defect extraction unit” and the “display control unit” of the present invention.

 図4は図1に示す検査システムにより実行される検査方法を示すフローチャートである。ここで、1つのワークWに着目し、当該ワークWの搬送、撮像、検査ならびに検査結果の表示について説明する。検査システム1では、検査対象物であるワークWの新規投入の前に、当該ワークWの映像信号が投影部21に与えられる。これにより、投影部21はベルトコンベア2Cvの上面にワークWの原寸大の像、より具体的には載置姿勢状態でワークWをベルトコンベア2Cvに投入する際のワーク搭載位置を示すワーク投入位置画像GWを投影する(ステップS1)。したがって、オペレータはワーク投入位置画像GWを見ながらワークWをベルトコンベア2Cv上に載置することができ、ワークWを予め設定された載置姿勢状態で検査システム1に投入することができる。なお、ワーク投入位置画像GWの画像データは予め記憶部92に記憶させている。 FIG. 4 is a flowchart showing an inspection method executed by the inspection system shown in FIG. Here, focusing on one work W, transporting, imaging, inspection, and display of inspection results of the work W will be described. In the inspection system 1, the video signal of the work W is given to the projection unit 21 before the work W, which is the inspection target, is newly input. As a result, the projection unit 21 shows a full-scale image of the work W on the upper surface of the belt conveyor 2Cv, more specifically, a work loading position indicating the work mounting position when the work W is loaded onto the belt conveyor 2Cv in the mounting posture. The image GW is projected (step S1). Therefore, the operator can place the work W on the belt conveyor 2Cv while looking at the work loading position image GW, and can load the work W into the inspection system 1 in a preset mounting posture state. The image data of the work loading position image GW is stored in the storage unit 92 in advance.

 そして、図1に示すようにオペレータがワーク投入位置画像GWを参照しながらベルトコンベア2Cv上にワークWを載置姿勢状態で載置し、それがセンサなどにより検知される、あるいはオペレータにより検査開始ボタンが押される(ステップS2で「YES」)と、ワークWは載置姿勢状態のまま投入装置2から表面撮像装置3に搬送される(ステップS3)。そして、表面撮像装置3によりワークWの表面に傷や欠けなどの欠陥が存在するか否かの検査(以下「表面側検査」という)が実行される(ステップS4)。 Then, as shown in FIG. 1, the operator places the work W on the belt conveyor 2Cv in the mounting posture while referring to the work loading position image GW, and this is detected by a sensor or the like, or the inspection is started by the operator. When the button is pressed (“YES” in step S2), the work W is conveyed from the loading device 2 to the surface imaging device 3 in the mounted posture state (step S3). Then, the surface imaging device 3 executes an inspection (hereinafter referred to as “surface side inspection”) for whether or not defects such as scratches and chips are present on the surface of the work W (step S4).

 図5は表面側検査を説明するためのフローチャートである。図6は表面側検査において取得される部分画像の一例を模式的に示す図である。表面撮像装置3は、ワークWに対する撮像部311、321の相対位置、つまり撮像部311、321の撮像ポジションを多段階(本実施形態では、i段階、iは2以上の自然数)に変更する。各撮像ポジションは予め記憶部92に記憶されている。そして、ロボット制御部95が撮像ポジション(図6中の符号FP1、FP2、…、FPi)を読み出して撮像ロボット31、32を第m番目の撮像ポジションに位置決めする(ステップS41)。例えば最初の撮像ポジションFP1では、撮像ロボット31、32は、図3に示すように撮像部311、321がワークWの被撮像部位Waを向いた位置に位置決めされる。 FIG. 5 is a flowchart for explaining the surface side inspection. FIG. 6 is a diagram schematically showing an example of a partial image acquired in the surface side inspection. The surface imaging device 3 changes the relative positions of the imaging units 311 and 321 with respect to the work W, that is, the imaging positions of the imaging units 311 and 321 in multiple stages (in this embodiment, i stages and i are natural numbers of 2 or more). Each imaging position is stored in the storage unit 92 in advance. Then, the robot control unit 95 reads out the imaging positions (reference numerals FP1, FP2, ..., FPi in FIG. 6) and positions the imaging robots 31 and 32 at the mth imaging position (step S41). For example, in the first imaging position FP1, the imaging robots 31 and 32 are positioned at positions where the imaging units 311 and 321 face the imaged portion Wa of the work W as shown in FIG.

 また、照明部による照明パターンを多段階(本実施形態では、j段階、jは2以上の自然数)で変更する(ステップS42)。各照明パターンは予め記憶部92に記憶されている。そして、ロボット制御部95が照明パターン(図6参照)を読み出して撮像ロボット31、32の照明部により第n番目の照明パターンで被撮像部位Waを照明する。このように撮像ロボット31、32を第1番目の撮像ポジションFP1に位置決めしたまま照明条件が照明パターン1、照明パターン2、…、照明パターンjの順に切り替えられながら撮像ロボット31は撮像部311により撮像方向D1より被撮像部位Waを撮像して部分画像FG1(1、n)を取得するとともに撮像ロボット32は撮像部321により撮像方向D2より被撮像部位Waを撮像して部分画像FG2(2、n)を取得する(ステップS43)。これらの部分画像FG1(1、n)、FG2(1、n)の画像データは制御装置9に送られて記憶部92に記憶される。 Further, the lighting pattern by the lighting unit is changed in multiple steps (in this embodiment, j steps and j is a natural number of 2 or more) (step S42). Each illumination pattern is stored in the storage unit 92 in advance. Then, the robot control unit 95 reads out the illumination pattern (see FIG. 6), and the illumination units of the imaging robots 31 and 32 illuminate the imaged portion Wa with the nth illumination pattern. While the imaging robots 31 and 32 are positioned at the first imaging position FP1 in this way, the imaging robot 31 images with the imaging unit 311 while the illumination conditions are switched in the order of illumination pattern 1, illumination pattern 2, ..., Illumination pattern j. The imaged portion Wa is imaged from the direction D1 to acquire the partial image FG1 (1, n), and the imaging robot 32 images the imaged portion Wa from the imaging direction D2 by the imaging unit 321 to obtain the partial image FG2 (2, n). ) Is acquired (step S43). The image data of these partial images FG1 (1, n) and FG2 (1, n) are sent to the control device 9 and stored in the storage unit 92.

 次のステップS44では、演算処理部91が部分画像FG1(1,n)、FG2(1,n)に基づいて被撮像部位Waに傷や欠けなどの欠陥が存在するか否かを検査する。例えば図6中の「1(FP1)」の欄に示すように部分画像FG1(1,n)や部分画像FG2(1,n)に欠陥の像Idが映り込んでいる場合、それらを撮像した際の撮像ポジションFP1で撮像した被撮像部位Waに欠陥が存在していると演算処理部91は判定する。一方、部分画像FG1(1,n)や部分画像FG2(1,n)に欠陥の像Idが映り込んでいない場合には、被撮像部位Waについては欠陥が存在していないと演算処理部91は判定する。このような画像に基づく欠陥の検査方法については従来より周知のものを用いることができ、ここでは検査方法自体については説明を省略する。こうしてワークWの表面のうち被撮像部位Waについて検査が実行され、その検査結果が記憶部92に記憶される(ステップS45)。 In the next step S44, the arithmetic processing unit 91 inspects whether or not there is a defect such as a scratch or a chip on the imaged portion Wa based on the partial images FG1 (1, n) and FG2 (1, n). For example, when the image Id of the defect is reflected in the partial image FG1 (1, n) or the partial image FG2 (1, n) as shown in the column of "1 (FP1)" in FIG. 6, they are imaged. The arithmetic processing unit 91 determines that there is a defect in the imaged portion Wa imaged at the imaging position FP1. On the other hand, when the image Id of the defect is not reflected in the partial image FG1 (1, n) or the partial image FG2 (1, n), it is determined that there is no defect in the imaged portion Wa. Judges. As a method for inspecting defects based on such an image, a conventionally well-known method can be used, and the description of the inspection method itself will be omitted here. In this way, an inspection is performed on the imaged portion Wa on the surface of the work W, and the inspection result is stored in the storage unit 92 (step S45).

 このような照明条件の変更設定(ステップS42)、部分画像の取得(ステップS43)、部分画像に基づく検査(ステップS44)および検査結果の記憶(ステップS45)については、さらにステップS41で撮像ロボット31、32を撮像ポジションFP2、FP3、…、FPiに位置決めする毎に実行される。すなわち、上記ステップS41~S43の繰り返しによりワークWに対する撮像部311、321の相対位置を多段階に変更して撮像部311、321により撮像されるワークWの被撮像部位を異ならせながら被撮像部位を互いに異なる複数の照明条件で撮像する。これらのよって複数の部分画像FG1(m,n)、FG2(m,n)が取得され、さらにそれらに基づいてワークWの表面側検査が実行される。 Regarding the setting of changing the lighting conditions (step S42), the acquisition of the partial image (step S43), the inspection based on the partial image (step S44), and the storage of the inspection result (step S45), the imaging robot 31 is further described in step S41. , 32 are positioned every time the imaging positions FP2, FP3, ..., FPi are positioned. That is, by repeating the steps S41 to S43, the relative positions of the imaging units 311 and 321 with respect to the work W are changed in multiple stages, and the imaged portion of the work W imaged by the imaging units 311 and 321 is different. Is imaged under a plurality of different lighting conditions. As a result, a plurality of partial images FG1 (m, n) and FG2 (m, n) are acquired, and the surface side inspection of the work W is executed based on them.

 図4に戻って検査システム1の動作説明を続ける。表面側検査を受けたワークWは載置姿勢状態のまま表面撮像装置3から反転装置4に搬送される(ステップS5)。そして、反転装置4によりワークWはベルトコンベア4Cvから上方に持ち上げられ、図1に示すように方向Xと平行に伸びる回転軸まわりに180度反転された後、ベルトコンベア4Cvに戻される(ステップS6)。これによって、ワークWは反転姿勢状態となる。 Returning to FIG. 4, the operation explanation of the inspection system 1 is continued. The work W that has undergone the surface side inspection is conveyed from the surface imaging device 3 to the reversing device 4 in the placed posture state (step S5). Then, the work W is lifted upward from the belt conveyor 4Cv by the reversing device 4, inverted 180 degrees around the rotation axis extending in parallel with the direction X as shown in FIG. 1, and then returned to the belt conveyor 4Cv (step S6). ). As a result, the work W is in the inverted posture state.

 これに続いて、ワークWは反転姿勢のまま反転装置4から裏面撮像装置5に搬送される(ステップS7)。そして、裏面撮像装置5によりワークWの裏面に傷や欠けなどの欠陥が存在するか否かの検査(以下「裏面側検査」という)が実行される(ステップS8)。 Following this, the work W is conveyed from the reversing device 4 to the back surface imaging device 5 in the reversing posture (step S7). Then, the back surface imaging device 5 executes an inspection (hereinafter referred to as “back surface side inspection”) for whether or not defects such as scratches and chips are present on the back surface of the work W (step S8).

 図7は裏面側検査を説明するためのフローチャートである。裏面側検査は、検査対象面が裏面である点を除き表面側検査と同様にして実行される。すなわち、ステップS81で撮像ロボット31、32を互いに異なる撮像ポジションに位置決めする毎に、照明条件の変更設定(ステップS82)、部分画像の取得(ステップS83)、部分画像に基づく検査(ステップS84)および検査結果の記憶(ステップS85)が実行される。なお、図7中において、ステップS83により取得される部分画像を表面側検査で取得される部分画像FG1(m,n)、FG2(m,n)と区別するために、当該部分画像をBG1(m,n)、BG2(m,n)と称している。つまり、「BG1(m,n)」および「BG2(m,n)」は、それぞれ撮像ロボット51、52を第m番目の撮像ポジションに位置決めしたまま照明条件を照明パターン1、照明パターン2、…、照明パターンjの順に切り替えられながら撮像ロボット51、52により取得されるワーク裏面の部分画像を意味している。 FIG. 7 is a flowchart for explaining the back side inspection. The back side inspection is performed in the same manner as the front side inspection except that the surface to be inspected is the back surface. That is, each time the imaging robots 31 and 32 are positioned at different imaging positions in step S81, the lighting condition change setting (step S82), partial image acquisition (step S83), inspection based on the partial image (step S84), and The storage of the inspection result (step S85) is executed. In addition, in FIG. 7, in order to distinguish the partial image acquired by step S83 from the partial images FG1 (m, n) and FG2 (m, n) acquired by the surface side inspection, the partial image is referred to as BG1 ( They are called m, n) and BG2 (m, n). That is, in "BG1 (m, n)" and "BG2 (m, n)", the illumination conditions are set to the illumination pattern 1, the illumination pattern 2, ... This means a partial image of the back surface of the work acquired by the imaging robots 51 and 52 while being switched in the order of the illumination pattern j.

 このように複数の部分画像をBG1(m,n)、BG2(m,n)に基づいてワークWの裏面側検査が実行され、ワークWの検査が完了すると、図4に示すように、検査済のワークWは裏面撮像装置5から排出装置6に搬送される(ステップS9)。そして、排出装置6によりワークWは、オペレータによる検査システム1からの持出可能位置に移動される。このとき、オペレータが当該ワークWの検査結果を容易に確認することができるように、演算処理部91は表示部61に表示する内容を制御する(ステップS10)。 In this way, the back side inspection of the work W is executed on the plurality of partial images based on BG1 (m, n) and BG2 (m, n), and when the inspection of the work W is completed, the inspection is performed as shown in FIG. The finished work W is conveyed from the back surface imaging device 5 to the discharge device 6 (step S9). Then, the work W is moved by the discharge device 6 to a position where the work W can be taken out from the inspection system 1 by the operator. At this time, the arithmetic processing unit 91 controls the content to be displayed on the display unit 61 so that the operator can easily confirm the inspection result of the work W (step S10).

 図8は演算処理部による検査結果の表示制御を示すフローチャートである。また、図9は検査結果の表示例を示す模式図である。演算処理部91は、予め記憶部92に記憶されていたワークWの三次元画像データを読み出し、図9に示すように、表示部61にワークWを表面側から見たときの三次元ワーク像Iwfを表示する(ステップS101)。 FIG. 8 is a flowchart showing the display control of the inspection result by the arithmetic processing unit. Further, FIG. 9 is a schematic view showing a display example of the inspection result. The arithmetic processing unit 91 reads out the three-dimensional image data of the work W stored in the storage unit 92 in advance, and as shown in FIG. 9, the three-dimensional work image when the work W is viewed from the surface side on the display unit 61. Display Iwf (step S101).

 次に、表面側検査により欠陥が存在すると判定された撮像ポジションを「表面側の欠陥位置情報」として取得する(ステップS102)。例えば図6に示す検査結果の一例では、第1番目の撮像ポジションFP1および第2番目の撮像ポジションFP2が「表面側の欠陥位置情報」に相当する。このため、ステップS103で表面側に欠陥が存在していると演算処理部91は判定し、以下のステップS104~S107を実行する。一方、ステップS103で表面側に欠陥が存在していないと判定すると、演算処理部91はワークWの表面側について表示部61に「欠陥なし」と追加表示してステップS108に進む。 Next, the imaging position determined to have a defect by the surface side inspection is acquired as "surface side defect position information" (step S102). For example, in an example of the inspection result shown in FIG. 6, the first imaging position FP1 and the second imaging position FP2 correspond to "defect position information on the surface side". Therefore, in step S103, the arithmetic processing unit 91 determines that a defect exists on the surface side, and executes the following steps S104 to S107. On the other hand, if it is determined in step S103 that no defect exists on the surface side, the arithmetic processing unit 91 additionally displays "no defect" on the display unit 61 on the surface side of the work W, and proceeds to step S108.

 ステップS103でYESと判定された場合、演算処理部91は欠陥毎に欠陥位置の追加表示欠陥の像を含むサムネイルの追加表示を実行する。ここでは、発明内容の理解を容易とするために、図6に示すように第1番目の撮像ポジションFP1で撮像した被撮像部位(図3中の符号Wa)に欠陥(以下「欠陥1」という)が含まれるとともに第2番目の撮像ポジションFP2で撮像した被撮像部位に欠陥(以下「欠陥2」という)が含まれ、それ以外のワーク表面には欠陥が存在していないケースを例示してステップS104~S107の内容を説明する。 If YES is determined in step S103, the arithmetic processing unit 91 additionally displays the defect position for each defect. Additional display of the thumbnail including the image of the defect is executed. Here, in order to facilitate understanding of the content of the invention, as shown in FIG. 6, a defect (hereinafter referred to as “defect 1”) is found in the imaged portion (reference numeral Wa in FIG. 3) imaged at the first imaging position FP1. ) Is included, and a defect (hereinafter referred to as “defect 2”) is included in the imaged portion imaged at the second imaging position FP2, and no defect exists on the other work surface. The contents of steps S104 to S107 will be described.

 本ケースでは、ワークWの表面に2つの欠陥1、欠陥2が含まれているため、まず欠陥1に対して演算処理部91はステップS104~S107を実行する。記憶部92には、予めワークWに対する被撮像部位の位置を示す位置データが記憶されている。演算処理部91はそれらの位置データのうち撮像部311、321により撮像された被撮像部位Waの位置データを欠陥1の位置情報として記憶部92から読み出す。そして、図9に示すように演算処理部91は当該位置データに基づいて欠陥1の位置DP1を欠陥位置DP(m)として三次元ワーク像Iwfに追加表示する(ステップS104)。 In this case, since the surface of the work W contains two defects 1 and 2, the arithmetic processing unit 91 first executes steps S104 to S107 for the defect 1. The storage unit 92 stores in advance position data indicating the position of the imaged portion with respect to the work W. The arithmetic processing unit 91 reads out the position data of the imaged portion Wa imaged by the imaging units 311 and 321 among the position data from the storage unit 92 as the position information of the defect 1. Then, as shown in FIG. 9, the arithmetic processing unit 91 additionally displays the position DP1 of the defect 1 as the defect position DP (m) on the three-dimensional work image Iwf based on the position data (step S104).

 また、本実施形態では、投入装置2においてワークWの載置位置を示す画像GWを投影し、それに対応した載置姿勢でワークWは投入される。しかしながら、排出装置6に搬送されるまでに反転装置4により反転され、排出装置6に搬送されてきた時点ではワークWは反転姿勢に変化している。ただし、ワークWの姿勢は画像GWと一定の対応関係を有している。そこで、演算処理部91は、画像GWの画像データに基づいて排出装置6に搬送されてきたワークWの反転姿勢ならびにワークWを上記回転軸まわりに反転させて載置姿勢に戻したときの姿勢を予測することができる。そこで、表示部61に表示される三次元ワーク像Iwfの姿勢が上記予測姿勢と一致するように、表示部61での三次元ワーク像Iwfの表示を制御する。また、本実施形態では、位置DP1を吹出形式で示しているが、表示形式はこれに限定されるものではなく、任意の表示形式を用いることができる。この点については欠陥2についても同様である。 Further, in the present embodiment, the loading device 2 projects an image GW showing the mounting position of the work W, and the work W is loaded in the corresponding mounting posture. However, the work W is inverted by the reversing device 4 before being transported to the discharging device 6, and the work W is changed to the reversed posture when being transported to the discharging device 6. However, the posture of the work W has a certain correspondence with the image GW. Therefore, the arithmetic processing unit 91 reverses the work W that has been conveyed to the discharge device 6 based on the image data of the image GW, and the posture when the work W is reversed around the rotation axis and returned to the mounting posture. Can be predicted. Therefore, the display of the three-dimensional work image Iwf on the display unit 61 is controlled so that the posture of the three-dimensional work image Iwf displayed on the display unit 61 matches the predicted posture. Further, in the present embodiment, the position DP1 is shown in a blowout format, but the display format is not limited to this, and any display format can be used. The same applies to defect 2 in this respect.

 次に、演算処理部91は、欠陥1が映り込んでいる部分画像FG1(1,1)、FG1(1,2)…、FG1(j)、FG2(1,1)、FG2(1,2)…、FG2(j)を記憶部92から読み出す(ステップS105)。そして、演算処理部91は、撮像部311により撮像された部分画像のうち最も欠陥1の像Id1が明瞭に映り込んでいる部分画像FG1(1,1)を欠陥含有画像FG1maxとして抽出するとともに、撮像部321により撮像された部分画像のうち最も欠陥1の像Id1が明瞭に映り込んでいる部分画像FG2(1,1)を欠陥含有画像FG2maxとして抽出する(ステップS106)。なお、本実施形態では、欠陥含有画像FG1max、FG2maxの抽出にあたって、欠陥1の像Id1の面積値をそれぞれ算出し、それらのうち欠陥面積値が最も大きい部分画像を像Id1が明瞭に映り込んでいると判定した。もちろん、当該判定は面積値以外に最大輝度値などの指標値に基づいて行ってもよい。 Next, the arithmetic processing unit 91 performs partial images FG1 (1,1), FG1 (1,2) ..., FG1 (j), FG2 (1,1), FG2 (1,2) in which the defect 1 is reflected. ) ..., FG2 (j) is read from the storage unit 92 (step S105). Then, the arithmetic processing unit 91 extracts the partial image FG1 (1,1) in which the image Id1 of the defect 1 is clearly reflected among the partial images captured by the imaging unit 311 as the defect-containing image FG1max, and also extracts the partial image FG1 (1,1). The partial image FG2 (1,1) in which the image Id1 of the defect 1 is clearly reflected among the partial images captured by the imaging unit 321 is extracted as the defect-containing image FG2max (step S106). In the present embodiment, when extracting the defect-containing images FG1max and FG2max, the area values of the image Id1 of the defect 1 are calculated, respectively, and the partial image having the largest defect area value is clearly reflected by the image Id1. It was judged that there was. Of course, the determination may be made based on an index value such as the maximum luminance value in addition to the area value.

 こうして抽出された欠陥含有画像FG1max、FG2maxを演算処理部91は図9に示すように三次元ワーク像Iwfと並べてサムネイル形式で追加表示する(ステップS107)。 The defect-containing images FG1max and FG2max extracted in this way are additionally displayed in thumbnail format side by side with the three-dimensional work image Iwf as shown in FIG. 9 by the arithmetic processing unit 91 (step S107).

 また、欠陥1に対する追加表示処理が完了すると、もう一方の欠陥2について上記ステップS104~S107を繰り返す。すなわち、演算処理部91は撮像ポジション2の撮像部311、321により撮像された被撮像部位の位置データを欠陥2の位置情報として記憶部92から読み出し、図9に示すように当該位置データに基づいて欠陥2の位置DP2を欠陥位置DP(m)として三次元ワーク像Iwfに追加表示する(ステップS104)。また、撮像部311により撮像された部分画像のうち最も欠陥2の像Id2が明瞭に映り込んでいる部分画像FG1(1,j)を欠陥含有画像FG1maxとして抽出するとともに、撮像部321により撮像された部分画像のうち欠陥2の像Id2が最も明瞭に映り込んでいる部分画像FG2(1,j)を欠陥含有画像FG2maxとして抽出する(ステップS106)。そして、欠陥含有画像FG1max、FG2maxを演算処理部91はさらに追加表示する(ステップS107)。 Further, when the additional display process for the defect 1 is completed, the above steps S104 to S107 are repeated for the other defect 2. That is, the arithmetic processing unit 91 reads out the position data of the imaged portion imaged by the imaging units 311 and 321 of the imaging position 2 from the storage unit 92 as the position information of the defect 2, and is based on the position data as shown in FIG. The position DP2 of the defect 2 is additionally displayed on the three-dimensional work image Iwf as the defect position DP (m) (step S104). Further, the partial image FG1 (1, j) in which the image Id2 of the defect 2 is most clearly reflected among the partial images captured by the imaging unit 311 is extracted as the defect-containing image FG1max, and is captured by the imaging unit 321. The partial image FG2 (1, j) in which the image Id2 of the defect 2 is most clearly reflected in the partial image is extracted as the defect-containing image FG2max (step S106). Then, the arithmetic processing unit 91 additionally displays the defect-containing images FG1max and FG2max (step S107).

 ここでは、ワークWの表面に2つの欠陥1、欠陥2が存在するケースを例示して説明したが、1つあるいは3つ以上の場合も同様にして欠陥の追加表示処理が実行される。そして、表面側での追加表示処理が完了すると、演算処理部91はステップS108に進んで裏面側の表示処理を実行する。 Here, the case where two defects 1 and 2 are present on the surface of the work W has been described as an example, but in the case of one or three or more defects, the additional display process of the defects is executed in the same manner. Then, when the additional display processing on the front side is completed, the arithmetic processing unit 91 proceeds to step S108 to execute the display processing on the back side.

 ステップS108では、演算処理部91は、予め記憶部92に記憶されていたワークWの三次元画像データを読み出し、図9に示すように、表示部61にワークWを裏面側から見たときの三次元ワーク像Iwbを表示する。ここで、画像GWの画像データに基づいて排出装置6に搬送されてきたワークWの反転姿勢を高い精度で予測できるため、本実施形態では、その予測されるワーク姿勢と一致するように三次元ワーク像Iwbの姿勢が制御している。 In step S108, the arithmetic processing unit 91 reads out the three-dimensional image data of the work W stored in the storage unit 92 in advance, and as shown in FIG. 9, when the work W is viewed from the back surface side on the display unit 61. The three-dimensional work image Iwb is displayed. Here, since the inverted posture of the work W conveyed to the discharge device 6 can be predicted with high accuracy based on the image data of the image GW, in the present embodiment, the work posture is three-dimensionally matched with the predicted work posture. The posture of the work image Iwb is controlled.

 そして、裏面側検査により欠陥が存在すると判定された撮像ポジションを「裏面側の欠陥位置情報」として取得する(ステップS109)。ここで、ワーク裏面に欠陥が含まれない場合(ステップS110で「NO」)には、例えば図9に示すように裏面には欠陥がない旨の表示、つまり「欠陥なし」が三次元ワーク像Iwbと一緒に表示部61に表示されて一連の表示処理を終了する。一方、ワーク裏面に欠陥が1つ以上含まれている場合(ステップS110で「YES」)には、演算処理部91は表面側と同様にして追加表示処理を実行する(ステップS111~S114)。 Then, the imaging position determined to have a defect by the back surface inspection is acquired as "defect position information on the back surface side" (step S109). Here, when there is no defect on the back surface of the work (“NO” in step S110), for example, as shown in FIG. 9, a display indicating that there is no defect on the back surface, that is, “no defect” is a three-dimensional work image. It is displayed on the display unit 61 together with Iwb, and a series of display processes is completed. On the other hand, when one or more defects are included on the back surface of the work (“YES” in step S110), the arithmetic processing unit 91 executes additional display processing in the same manner as on the front surface side (steps S111 to S114).

 以上のように、本実施形態では、ワークWの検査結果を表示部61に表示するにあたって、ワークWの三次元ワーク像Iwb、Iwfに対してワークWに存在する欠陥の位置情報(例えば図9中の符号DP1、DP2)を加えたワーク全体像と、各欠陥が映り込んだ部分画像とを並べて一緒に表示している。したがって、オペレータは、表示部61の表示内容を視認することで、ワークWに発生している欠陥の内容および発生箇所を良好に確認することができる。 As described above, in the present embodiment, when displaying the inspection result of the work W on the display unit 61, the position information of the defects existing in the work W with respect to the three-dimensional work images Iwb and Iwf of the work W (for example, FIG. 9). The entire image of the work to which the codes DP1 and DP2) are added and the partial image in which each defect is reflected are displayed side by side. Therefore, the operator can satisfactorily confirm the content of the defect occurring in the work W and the location where the defect has occurred by visually recognizing the display content of the display unit 61.

 また、欠陥が映り込んだ複数の部分画像のうち欠陥の像が最も明瞭に映り込んでいる部分画像を欠陥含有画像として選択的に抽出し、表示部61に表示している。このため、欠陥含有画像を参照することで欠陥の内容を高精度で確認することができる。 Further, the partial image in which the defect image is most clearly reflected is selectively extracted as the defect-containing image from the plurality of partial images in which the defect is reflected, and is displayed on the display unit 61. Therefore, the content of the defect can be confirmed with high accuracy by referring to the defect-containing image.

 また、画像GWの画像データに基づいて排出装置6に搬送されてきたワークWの姿勢を予測し、その予測姿勢と一致するようにワークWの三次元ワーク像Iwb、Iwfを表示部61に表示している。したがって、オペレータは排出装置6に搬送されてきた現物(検査済のワークW)と表示部61の表示内容との対比が容易となり、欠陥の内容および発生箇所をさらに良好かつ迅速に確認することができる。 Further, the posture of the work W conveyed to the discharge device 6 is predicted based on the image data of the image GW, and the three-dimensional work images Iwb and Iwf of the work W are displayed on the display unit 61 so as to match the predicted posture. doing. Therefore, the operator can easily compare the actual product (inspected work W) conveyed to the discharge device 6 with the display content of the display unit 61, and can confirm the content of the defect and the location where the defect has occurred in a better and quicker manner. can.

 なお、本発明は上記した実施形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて上述したもの以外に種々の変更を行うことが可能である。例えば上記実施形態では、ワークWの表裏面を検査する検査システム1に本発明を適用しているが、表面および裏面のいずれか一方のみを検査する検査システムにも本発明を適用することができる。 The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the present invention is applied to the inspection system 1 that inspects the front and back surfaces of the work W, but the present invention can also be applied to an inspection system that inspects only one of the front surface and the back surface. ..

 また、上記実施形態では、表面撮像装置3は2台の撮像ロボット31、32を有しているが、撮像ロボットの台数はこれに限定されるものではなく、1台あるいは3台以上であってもよい。また、裏面撮像装置5についても、撮像ロボットの台数は「2」に限定されるものではなく、1台あるいは3台以上であってもよい。 Further, in the above embodiment, the surface imaging device 3 has two imaging robots 31 and 32, but the number of imaging robots is not limited to this, and one or three or more imaging robots are used. May be good. Further, regarding the back surface imaging device 5, the number of imaging robots is not limited to “2”, and may be one or three or more.

 また、上記実施形態では、検査プログラムを含む制御プログラムは記憶部92に予め記憶されているが、制御装置9をディスクドライブ(図示省略)と電気的に接続してインストールプログラムを読取るように構成してもよい。つまり、当該ディスクドライブに挿入されるCD-ROM(=Compact Disc - Read Only Memory)やDVD-ROM(=Digital Versatile Disk - Read Only Memory)などの外部記録媒体に記録されている上記検査プログラムを読み取り可能に構成し、ディスクドライブを読取部として機能させてもよい。つまり、上記した検査結果の表示方法を実行不能な検査システム1であっても、上記インストールプログラムをインストールすることで検査プログラムを組み込んで上記した検査方法および検査結果の表示方法を実行可能にバージョンアップさせてもよい。なお、記録媒体としてCD-ROMやDVD-ROM以外の記録媒体を用いて上記プログラムの読み取りを行うようにしてもよい。また、通信手段を利用して上記プログラムを読取るように構成してもよい。 Further, in the above embodiment, the control program including the inspection program is stored in the storage unit 92 in advance, but the control device 9 is electrically connected to a disk drive (not shown) to read the installation program. You may. That is, the above inspection program recorded on an external recording medium such as a CD-ROM (= Compact Disc-Read Only Memory) or a DVD-ROM (= Digital Versatile Disk-Read Only Memory) inserted into the disc drive is read. It may be configured to be possible and the disk drive may function as a reader. That is, even in the inspection system 1 in which the above-mentioned inspection result display method cannot be executed, the inspection program is incorporated by installing the above-mentioned installation program, and the above-mentioned inspection method and inspection result display method can be upgraded to be executable. You may let me. The program may be read using a recording medium other than a CD-ROM or a DVD-ROM as a recording medium. Further, the program may be read by using a communication means.

 以上、特定の実施例に沿って発明を説明したが、この説明は限定的な意味で解釈されることを意図したものではない。発明の説明を参照すれば、本発明のその他の実施形態と同様に、開示された実施形態の様々な変形例が、この技術に精通した者に明らかとなるであろう。故に、添付の特許請求の範囲は、発明の真の範囲を逸脱しない範囲内で、当該変形例または実施形態を含むものと考えられる。 The invention has been described above according to a specific embodiment, but this description is not intended to be interpreted in a limited sense. With reference to the description of the invention, various variations of the disclosed embodiments, as well as other embodiments of the present invention, will be apparent to those familiar with the art. Therefore, the appended claims are considered to include such modifications or embodiments within a range that does not deviate from the true scope of the invention.

 この発明は、検査対象物を撮像して得られる画像に基づいて検査対象物における欠陥の有無を検査する検査システム全般、ならびに検査結果の表示技術全般に適用することができる。 The present invention can be applied to a general inspection system for inspecting the presence or absence of defects in an inspection object based on an image obtained by imaging the inspection object, and a general inspection result display technology.

 1…検査システム
 2…投入装置
 2Cv…ベルトコンベア(載置部)
 3…表面撮像装置
 5…裏面撮像装置
 6…排出装置
 9…制御装置(検査装置)
 21…投影部
 31,32,51,52…撮像ロボット
 41…反転ロボット
 61…表示部
 91…演算処理部(欠陥抽出部、表示制御部)
 92…記憶部
 96…投影制御部
 311,321,511,521…撮像部
 D1,D2…撮像方向
 DP…欠陥位置
 FG1,FG2…部分画像
 FG1max,FG2max…欠陥含有画像
 Iwb,Iwf…三次元ワーク像
 W…ワーク(検査対象物)
 Wa…被撮像部位
1 ... Inspection system 2 ... Input device 2Cv ... Belt conveyor (mounting part)
3 ... Front surface imaging device 5 ... Back surface imaging device 6 ... Discharge device 9 ... Control device (inspection device)
21 ... Projection unit 31, 32, 51, 52 ... Imaging robot 41 ... Inversion robot 61 ... Display unit 91 ... Arithmetic processing unit (defect extraction unit, display control unit)
92 ... Storage unit 96 ... Projection control unit 311, 321, 511,521 ... Imaging unit D1, D2 ... Imaging direction DP ... Defect position FG1, FG2 ... Partial image FG1max, FG2max ... Defect-containing image Iwb, Iwf ... Three-dimensional work image W ... Work (object to be inspected)
Wa ... Area to be imaged

Claims (7)

 検査対象物に対する撮像部の相対位置を多段階に変更して前記撮像部により撮像される前記検査対象物の被撮像部位を異ならせながら前記被撮像部位を互いに異なる複数の照明条件で撮像して複数の部分画像を取得する撮像装置と、
 前記複数の部分画像に基づいて前記検査対象物における欠陥の有無を検査して検査結果を表示部に表示する検査装置と、を備え、
 前記検査装置は、
 前記検査対象物に対する前記複数の被撮像部位の位置を示す位置データを記憶する記憶部と、
 前記欠陥毎に、前記欠陥の像が映り込んだ複数の部分画像から欠陥含有画像を選択的に抽出する欠陥抽出部と、
 前記位置データに基づいて前記検査対象物の三次元画像上での前記欠陥含有画像の位置情報を求め、前記検査対象物の三次元画像に前記位置情報を加えた全体画像と、前記欠陥含有画像とを前記表示部に表示させる表示制御部と、
を有することを特徴とする検査システム。
The relative position of the imaging unit with respect to the inspection object is changed in multiple stages, and the imaged portion is imaged under a plurality of different lighting conditions while the imaged portion of the inspection object to be imaged by the imaging unit is different. An imaging device that acquires multiple partial images and
An inspection device for inspecting the presence or absence of defects in the inspection object based on the plurality of partial images and displaying the inspection result on the display unit is provided.
The inspection device is
A storage unit that stores position data indicating the positions of the plurality of images to be imaged with respect to the inspection object, and a storage unit.
For each defect, a defect extraction unit that selectively extracts a defect-containing image from a plurality of partial images in which an image of the defect is reflected, and a defect extraction unit.
Based on the position data, the position information of the defect-containing image on the three-dimensional image of the inspection object is obtained, and the whole image obtained by adding the position information to the three-dimensional image of the inspection object and the defect-containing image. A display control unit that displays and on the display unit, and
An inspection system characterized by having.
 請求項1に記載の検査システムであって、
 前記撮像装置は、前記撮像部を複数台有し、前記複数の撮像部により前記被撮像部位を互いに異なる撮像方向から撮像し、
 前記表示制御部は、前記撮像方向毎に前記欠陥含有画像を前記表示部に表示させる検査システム。
The inspection system according to claim 1.
The imaging device has a plurality of the imaging units, and the plurality of imaging units image the imaged portion from different imaging directions.
The display control unit is an inspection system that displays the defect-containing image on the display unit for each imaging direction.
 請求項1または2に記載の検査システムであって、
 前記表示制御部は、前記欠陥毎に、前記欠陥抽出部により抽出された前記欠陥含有画像のうち前記欠陥の像が明瞭に映し込まれた前記欠陥含有画像を選択して前記表示部に表示させる検査システム。
The inspection system according to claim 1 or 2.
The display control unit selects, for each of the defects, the defect-containing image in which the image of the defect is clearly projected from the defect-containing images extracted by the defect extraction unit and displays it on the display unit. Inspection system.
 請求項1ないし3のいずれか一項に記載の検査システムであって、
 載置部に投入される前記検査対象物を前記撮像装置に搬送する投入装置を備え、
 前記投入装置は、前記載置部への前記検査対象物の載置姿勢を示す画像を前記載置部上に投影する投影部を有し、
 前記表示制御部は、前記載置姿勢に対応する姿勢で前記全体画像を前記表示部に表示する検査システム。
The inspection system according to any one of claims 1 to 3.
A loading device for transporting the inspection object to be loaded into the mounting unit to the imaging device is provided.
The loading device has a projection unit that projects an image showing the placement posture of the inspection object on the pre-described installation unit on the pre-described installation unit.
The display control unit is an inspection system that displays the entire image on the display unit in a posture corresponding to the above-described posture.
 請求項4に記載の検査システムであって、
 前記検査装置により検査された前記検査対象物をオペレータに排出する排出装置を備え、
 前記表示部は前記排出装置において前記オペレータが視認可能な位置に設けられる検査システム。
The inspection system according to claim 4.
A discharge device for discharging the inspection object inspected by the inspection device to the operator is provided.
The display unit is an inspection system provided at a position visible to the operator in the discharge device.
 検査対象物に対する撮像部の相対位置を多段階に変更して前記撮像部により撮像される前記検査対象物の被撮像部位を異ならせながら前記被撮像部位を互いに異なる複数の照明条件で撮像して取得される複数の部分画像に基づいて前記検査対象物における欠陥の有無を検査する検査システムにおける検査結果の表示方法であって、
 前記欠陥毎に、前記欠陥の像が映り込んだ複数の部分画像から欠陥含有画像を選択的に抽出する工程と、
 前記検査対象物の三次元画像上での前記欠陥含有画像の位置情報を求め、前記検査対象物の三次元画像に前記位置情報を加えた全体画像と、前記欠陥含有画像とを表示部に表示させる工程と、
を備えることを特徴とする検査結果の表示方法。
The relative position of the imaging unit with respect to the inspection object is changed in multiple stages, and the imaged portion is imaged under a plurality of different lighting conditions while the imaged portion of the inspection object to be imaged by the imaging unit is different. It is a method of displaying inspection results in an inspection system that inspects the presence or absence of defects in the inspection object based on a plurality of acquired partial images.
A step of selectively extracting a defect-containing image from a plurality of partial images in which an image of the defect is reflected for each defect, and a step of selectively extracting the defect-containing image.
The position information of the defect-containing image on the three-dimensional image of the inspection object is obtained, and the entire image obtained by adding the position information to the three-dimensional image of the inspection object and the defect-containing image are displayed on the display unit. And the process of making
A method of displaying an inspection result, which comprises.
 検査対象物に対する撮像部の相対位置を多段階に変更して前記撮像部により撮像される前記検査対象物の被撮像部位を異ならせながら前記被撮像部位を互いに異なる複数の照明条件で撮像して取得される複数の部分画像に基づいて前記検査対象物における欠陥の有無を検査する検査システムにおける検査結果の表示プログラムであって、
 前記欠陥毎に、前記欠陥の像が映り込んだ複数の部分画像から欠陥含有画像を選択的に抽出する工程と、
 前記検査対象物の三次元画像上での前記欠陥含有画像の位置情報を求め、前記検査対象物の三次元画像に前記位置情報を加えた全体画像と、前記欠陥含有画像とを表示部に表示させる工程と、
をコンピュータに実行させることを特徴とする検査結果の表示プログラム。
The relative position of the imaging unit with respect to the inspection object is changed in multiple stages, and the imaged portion is imaged under a plurality of different lighting conditions while the imaged portion of the inspection object to be imaged by the imaging unit is different. It is a display program of inspection results in an inspection system that inspects the presence or absence of defects in the inspection object based on a plurality of acquired partial images.
A step of selectively extracting a defect-containing image from a plurality of partial images in which an image of the defect is reflected for each defect, and a step of selectively extracting the defect-containing image.
The position information of the defect-containing image on the three-dimensional image of the inspection object is obtained, and the entire image obtained by adding the position information to the three-dimensional image of the inspection object and the defect-containing image are displayed on the display unit. And the process of making
A test result display program characterized by having a computer execute.
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