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WO2021007004A3 - Borophene-based two-dimensional heterostructures, fabricating methods and applications of same - Google Patents

Borophene-based two-dimensional heterostructures, fabricating methods and applications of same Download PDF

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Publication number
WO2021007004A3
WO2021007004A3 PCT/US2020/038075 US2020038075W WO2021007004A3 WO 2021007004 A3 WO2021007004 A3 WO 2021007004A3 US 2020038075 W US2020038075 W US 2020038075W WO 2021007004 A3 WO2021007004 A3 WO 2021007004A3
Authority
WO
WIPO (PCT)
Prior art keywords
borophene
same
applications
heterostructures
fabricating methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2020/038075
Other languages
French (fr)
Other versions
WO2021007004A2 (en
Inventor
Mark C. Hersam
Xiaolong Liu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northwestern University
Original Assignee
Northwestern University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northwestern University filed Critical Northwestern University
Priority to US17/617,367 priority Critical patent/US12202733B2/en
Publication of WO2021007004A2 publication Critical patent/WO2021007004A2/en
Publication of WO2021007004A3 publication Critical patent/WO2021007004A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/194—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)

Abstract

The invention relates to two dimensional (2D) heterostructures and methods of fabricating the same. The 2D hetero structures are integration of borophene with graphene and 2D lateral and vertical hetero structures with sharp and rotationally commensurate interfaces. The rich bonding configurations of boron indicate that borophene can be integrated into a diverse range of 2D heterostructures.
PCT/US2020/038075 2017-02-08 2020-06-17 Borophene-based two-dimensional heterostructures, fabricating methods and applications of same Ceased WO2021007004A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US17/617,367 US12202733B2 (en) 2017-02-08 2020-06-17 Borophene-based two-dimensional heterostructures, fabricating methods and applications of same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201962866768P 2019-06-26 2019-06-26
US62/866,768 2019-06-26

Publications (2)

Publication Number Publication Date
WO2021007004A2 WO2021007004A2 (en) 2021-01-14
WO2021007004A3 true WO2021007004A3 (en) 2021-03-18

Family

ID=74113806

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2020/038075 Ceased WO2021007004A2 (en) 2017-02-08 2020-06-17 Borophene-based two-dimensional heterostructures, fabricating methods and applications of same

Country Status (1)

Country Link
WO (1) WO2021007004A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022159309A1 (en) * 2021-01-20 2022-07-28 Northwestern University Borophane polymorphs and synthesis methods of same
US20240150185A1 (en) * 2021-03-30 2024-05-09 Northwestern University Multi-layer borophene and method of synthesizing same
CN115138854B (en) * 2021-03-30 2024-02-13 中国科学院大连化学物理研究所 Preparation of metal nano-particles and metal nano-particles loaded on boron-graphene
CN114512656B (en) * 2021-12-29 2024-08-27 清华大学 Preparation method and preparation container of borane and graphene composite aerogel electrode sheet
CN114974439A (en) * 2022-05-23 2022-08-30 电子科技大学 Method for calculating and designing accurate boron-doped graphene based on first principle
CN115747698B (en) * 2022-10-28 2024-09-10 深圳市深科达智能装备股份有限公司 Wear-resistant corrosion-resistant self-lubricating coating and linear guide rail pair applying same
CN119943893B (en) * 2024-12-17 2025-10-28 绍兴羽能新材料有限公司 A boron-coated sodium ion battery positive electrode material and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018011651A1 (en) * 2016-07-15 2018-01-18 Sabic Global Technologies B.V. Multi-atomic layered materials
US9991122B2 (en) * 2016-08-31 2018-06-05 Micron Technology, Inc. Methods of forming semiconductor device structures including two-dimensional material structures
US20190056654A1 (en) * 2015-10-22 2019-02-21 Asml Netherlands B.V. Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190056654A1 (en) * 2015-10-22 2019-02-21 Asml Netherlands B.V. Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
WO2018011651A1 (en) * 2016-07-15 2018-01-18 Sabic Global Technologies B.V. Multi-atomic layered materials
US9991122B2 (en) * 2016-08-31 2018-06-05 Micron Technology, Inc. Methods of forming semiconductor device structures including two-dimensional material structures

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
YANG JIE, QUHE RUGE, FENG SHENYAN, ZHANG QIAOXUAN, LEI MING, LU JING: "Interfacial properties of borophene contacts with two-dimensional semiconductors", PHYSICAL CHEMISTRY CHEMICAL PHYSICS, vol. 19, no. 35, 1 January 2017 (2017-01-01), pages 23982 - 23989, XP055790546, ISSN: 1463-9076, DOI: 10.1039/C7CP04570K *
ZAHRA JALALI, SEYED AKBAR JAFARI: "Kinked plasmon dispersion in borophene-borophene and borophene-graphene double layers", PHYSICAL REVIEW B, vol. 98, no. 23, 1 December 2018 (2018-12-01), pages 235430 - 235430-10, XP055790549, ISSN: 2469-9950 *

Also Published As

Publication number Publication date
WO2021007004A2 (en) 2021-01-14

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