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WO2021096264A2 - Réseau de sortie laser et dispositif lidar l'utilisant - Google Patents

Réseau de sortie laser et dispositif lidar l'utilisant Download PDF

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Publication number
WO2021096264A2
WO2021096264A2 PCT/KR2020/015923 KR2020015923W WO2021096264A2 WO 2021096264 A2 WO2021096264 A2 WO 2021096264A2 KR 2020015923 W KR2020015923 W KR 2020015923W WO 2021096264 A2 WO2021096264 A2 WO 2021096264A2
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WO
WIPO (PCT)
Prior art keywords
laser
unit
laser output
vcsel
prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2020/015923
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English (en)
Korean (ko)
Other versions
WO2021096264A3 (fr
Inventor
정훈일
임찬묵
임부빈
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SOS Lab Co Ltd
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SOS Lab Co Ltd
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Filing date
Publication date
Application filed by SOS Lab Co Ltd filed Critical SOS Lab Co Ltd
Publication of WO2021096264A2 publication Critical patent/WO2021096264A2/fr
Publication of WO2021096264A3 publication Critical patent/WO2021096264A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4861—Circuits for detection, sampling, integration or read-out
    • G01S7/4863—Detector arrays, e.g. charge-transfer gates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Definitions

  • the present invention relates to a laser output array and a lidar device using the same, and more particularly, to a design of an optic included in a laser output array and a laser output array, and a solid-state LiDAR device using the same. .
  • LiDAR Light Detection and Ranging
  • Lida is a device that acquires surrounding distance information using a laser, and thanks to the advantage of being able to grasp objects in three dimensions with excellent precision and resolution, it is being applied not only to automobiles, but also to various fields such as drones and aircraft.
  • VICSEL Very Cavity Surface Emitting Laser
  • the big cell can be used in the field of short-distance optical communication, the field of lidar that detects a distance to an object using image sensing and a laser.
  • An object of the present invention is to provide a laser output device included in a solid-state LiDAR device.
  • Another object of the present invention is to provide a steering component used in a laser output device included in a solid-state LiDAR device.
  • Another object of the present invention is to provide a solid-state LiDAR device.
  • a laser output device comprising: a first laser output unit including at least one laser output element, a second laser output unit, and a third laser output unit; and the laser output array A prism array for steering a laser output from the prism array, wherein the prism array includes a first prism element for steering a laser output from the first laser output unit and the second laser output unit, and from the third laser output unit.
  • the second prism element for steering the output laser the third prism element for steering the laser output from the first laser output unit and the third laser output unit, and the laser output from the second laser output unit It includes a fourth prism element for, wherein the first laser output from the first laser output unit is irradiated in a first direction by sequentially passing through the first prism element and the third prism element, and the second laser The second laser output from the output unit is irradiated in a second direction by sequentially passing through the first prism element and the fourth prism element, and the third laser output from the third laser output unit is the second prism element.
  • first prism element and the second prism element are formed on the first surface of the prism array so as to be irradiated in a third direction by sequentially passing through the third prism element, and the third prism element and the fourth prism
  • the elements are formed on the second surface of the prism array, the first and second prism elements have different inclinations so that the first direction, the second direction, and the third direction are different from each other, and the third and A laser output device having different inclinations of the fourth prism elements may be provided.
  • a lidar device comprising: a laser output unit for outputting a laser, and a sensor unit for obtaining a laser output from the laser output unit, wherein the laser output unit includes at least one laser output A laser output array including a first laser output unit including elements, a second laser output unit, and a third laser output unit, and a prism array for steering a laser output from the laser output array, the prism array , A first prism element for steering the laser output from the first laser output unit and the second laser output unit, a second prism element for steering the laser output from the third laser output unit, the first laser output A third prism element for steering the laser output from the unit and the third laser output unit, and a fourth prism element for steering the laser output from the second laser output unit, from the first laser output unit
  • the output first laser is irradiated in a first direction by sequentially passing through the first prism element and the third prism element, and the second laser output from the second laser output unit is the first prism element
  • the first prism element and the second prism element are formed on a first surface of the prism array
  • the third prism element and the fourth prism element are formed on a second surface of the prism array, and the first direction
  • the inclinations of the first and second prism elements are different from each other so that the second direction and the third direction are different from each other, and the inclinations of the third and fourth prism elements are different from each other.
  • the following lidar device may be provided.
  • a laser output device used in a solid-state LiDAR device may be provided.
  • a steering component included in a laser output device used in a solid-state LiDAR device may be provided.
  • a solid-state LiDAR device may be provided.
  • FIG. 1 is a diagram for describing a lidar device according to an exemplary embodiment.
  • FIG. 2 is a diagram illustrating a lidar device according to an embodiment.
  • FIG. 3 is a diagram illustrating a lidar device according to another embodiment.
  • FIG. 4 is a view showing a laser output unit according to an embodiment.
  • FIG. 5 is a diagram showing a VCSEL unit according to an embodiment.
  • FIG. 6 is a diagram illustrating a VCSEL array according to an embodiment.
  • FIG. 7 is a side view showing a VCSEL array and a metal contact according to an embodiment.
  • FIG. 8 is a diagram illustrating a VCSEL array according to an embodiment.
  • FIG. 9 is a diagram for describing a lidar device according to an exemplary embodiment.
  • FIG. 10 is a diagram for describing a collimation component according to an embodiment.
  • FIG. 11 is a diagram for describing a collimation component according to an embodiment.
  • FIG. 12 is a diagram for describing a collimation component according to an embodiment.
  • FIG. 13 is a diagram for describing a collimation component according to an embodiment.
  • FIG. 14 is a diagram for describing a steering component according to an exemplary embodiment.
  • 15 and 16 are diagrams for describing a steering component according to an exemplary embodiment.
  • 17 is a diagram for describing a steering component according to an exemplary embodiment.
  • FIG. 18 is a diagram for describing a steering component according to an exemplary embodiment.
  • 19 is a diagram for describing a meta surface according to an exemplary embodiment.
  • 20 is a diagram for describing a metasurface according to an exemplary embodiment.
  • 21 is a diagram for describing a meta surface according to an exemplary embodiment.
  • FIG. 22 is a diagram for describing a rotating faceted mirror according to an exemplary embodiment.
  • FIG. 23 is a top view for explaining a viewing angle of a rotating faceted mirror in which the number of reflective surfaces is three and the upper and lower portions of the body are equilateral triangles.
  • 24 is a top view for explaining the viewing angle of a rotating multi-faceted mirror in which the number of reflective surfaces is four and the upper and lower portions of the body are square.
  • 25 is a top view for explaining the viewing angle of a rotating multi-faceted mirror in which the number of reflective surfaces is 5 and the upper and lower portions of the body are regular pentagons.
  • 26 is a view for explaining an irradiation portion and a light-receiving portion of a multi-faceted rotating mirror according to an exemplary embodiment.
  • 27 is a diagram for describing an optical unit according to an exemplary embodiment.
  • FIG. 28 is a diagram for describing an optical unit according to an exemplary embodiment.
  • 29 is a diagram for describing a meta component according to an embodiment.
  • FIG. 30 is a diagram for describing a meta component according to another embodiment.
  • FIG. 31 is a diagram for describing an SPAD array according to an embodiment.
  • FIG. 32 is a diagram for describing a histogram of SPAD according to an embodiment.
  • 35 is a diagram for describing a semi-flash lidar according to an embodiment.
  • 36 is a diagram for describing a configuration of a semi-flash lidar according to an embodiment.
  • FIG. 37 is a diagram for describing a semi-flash lidar according to another embodiment.
  • 38 is a diagram for describing a configuration of a semi-flash lidar according to another embodiment.
  • 39 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • FIG. 40 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • 41 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • FIG. 42 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • FIG. 43 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • 44 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • 45 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • 46 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • 47 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • FIG. 48 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • 49 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • 50 is a diagram for describing a steering component according to an exemplary embodiment.
  • 51 is a diagram for describing a steering component according to an exemplary embodiment.
  • FIG. 52 is a diagram for describing a steering component according to an exemplary embodiment.
  • 53 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • FIG. 54 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • 55 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • 56 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • 57 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • 58 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • 59 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • 60 is a diagram for describing a laser output unit and an optical unit according to an exemplary embodiment.
  • the laser output device comprises a first laser output unit including at least one laser output element, a second laser output unit, and a laser output array including a third laser output unit, and a laser output from the laser output array.
  • a prism array for steering wherein the prism array is a first prism element for steering a laser output from the first laser output unit and the second laser output unit, and steering the laser output from the third laser output unit
  • the second laser is irradiated in a second direction by sequentially passing through the first prism element and the fourth prism element, and the third laser output from the third laser output unit is the second pris
  • the first prism element and the second prism element are formed on the first surface of the prism array so that the elements are sequentially passed through and irradiated in a third direction, and the third prism element and the fourth prism element are the prism array.
  • the first and second prism elements are formed on the second surface of the and the inclinations of the first and second prism elements are different from each other so that the first direction, the second direction, and the third direction are different from each other, and the third and fourth prism elements have different inclinations.
  • the slopes can be different from each other.
  • first and second laser output units may be disposed along a first axis
  • first and third laser output units may be disposed along a second axis.
  • first and second prism elements are designed such that a length in the first axis direction is longer than a length in the second axis direction
  • the third and fourth prism elements are The length may be designed to be longer than the length in the first axis direction.
  • the first laser passes through the first portion of the third prism element and is irradiated in the first direction
  • the third laser passes through the second portion of the third prism element and irradiates in the third direction.
  • the inclination of the first portion of the third prism element may be the same as the inclination of the second portion of the third prism element.
  • the position on the third prism element to which the first laser is irradiated from the third prism element is different from the position at which the first laser is output from the first laser output unit.
  • the position on the fourth prism element to which the second laser is irradiated from the fourth prism element is different from the position at which the second laser is output from the second laser output unit, and the third laser is the third
  • a position on the third prism element irradiated from the prism element may be different from a position at which the third laser is output from the third laser output unit.
  • the laser output array includes at least one laser output element, further includes a fourth laser output unit for outputting a fourth laser, and the second prism unit comprises the third laser and the fourth laser. It is disposed to steer, and the fourth prism unit may be disposed to steer the second laser and the fourth laser.
  • first and second laser output units are disposed along a first axis
  • first and third laser output units are disposed along a second axis
  • third and fourth laser output units are disposed along the first axis
  • the second and fourth laser output units may be disposed along the second axis.
  • a distance between the first portion and the second portion of the third prism element may be smaller than a distance between the first laser output unit and the third laser output unit.
  • the first position on the third prism element to which the first laser is irradiated from the third prism element is a position at which the first laser is output from the first laser output unit
  • the second position on the fourth prism element to which the second laser is irradiated from the fourth prism element is different from the position to which the second laser is output from the second laser output unit
  • the third laser The third position on the third prism element irradiated from the third prism element is different from the position where the third laser is output from the third laser output unit, and the center of the first position and the third position
  • the distance between the centers may be smaller than the distance between the center of the first laser output unit and the center of the third laser output unit.
  • a lidar device includes a laser output unit for outputting a laser, and a sensor unit for obtaining a laser output from the laser output unit, wherein the laser output unit includes at least one laser output element.
  • the first laser is irradiated in a first direction by sequentially passing through the first prism element and the third prism element
  • the second laser output from the second laser output unit is the first prism element and the fourth prism element
  • the third laser is irradiated in a second direction by sequentially passing through the elements, and the third laser output from the third laser output unit sequentially passes through the second prism element and the third prism element to be irradiated in a third direction.
  • 1 prism element and the second prism element are formed on the first surface of the prism array
  • the third prism element and the fourth prism element are formed on the second surface of the prism array, the first direction
  • the inclinations of the first and second prism elements are different from each other so that the second direction and the third direction are different from each other, and the inclinations of the third and fourth prism elements may be different from each other. have.
  • first and second laser output units may be disposed along a first axis
  • first and third laser output units may be disposed along a second axis.
  • first and second prism elements are designed such that a length in the first axis direction is longer than a length in the second axis direction
  • the third and fourth prism elements are The length may be designed to be longer than the length in the first axis direction.
  • the first laser passes through the first portion of the third prism element and is irradiated in the first direction
  • the third laser passes through the second portion of the third prism element and irradiates in the third direction.
  • the inclination of the first portion of the third prism element may be the same as the inclination of the second portion of the third prism element.
  • the position on the third prism element to which the first laser is irradiated from the third prism element is different from the position at which the first laser is output from the first laser output unit.
  • the position on the fourth prism element to which the second laser is irradiated from the fourth prism element is different from the position at which the second laser is output from the second laser output unit, and the third laser is the third
  • a position on the third prism element irradiated from the prism element may be different from a position at which the third laser is output from the third laser output unit.
  • the laser output array includes at least one laser output element, further includes a fourth laser output unit for outputting a fourth laser, and the second prism unit comprises the third laser and the fourth laser. It is disposed to steer, and the fourth prism unit may be disposed to steer the second laser and the fourth laser.
  • first and second laser output units are disposed along a first axis
  • first and third laser output units are disposed along a second axis
  • third and fourth laser output units are disposed along the first axis
  • the second and fourth laser output units may be disposed along the second axis.
  • a distance between the first portion and the second portion of the third prism element may be smaller than a distance between the first laser output unit and the third laser output unit.
  • the first position on the third prism element to which the first laser is irradiated from the third prism element is a position at which the first laser is output from the first laser output unit
  • the second position on the fourth prism element to which the second laser is irradiated from the fourth prism element is different from the position to which the second laser is output from the second laser output unit
  • the third laser The third position on the third prism element irradiated from the third prism element is different from the position where the third laser is output from the third laser output unit, and the center of the first position and the third position
  • the distance between the centers may be smaller than the distance between the center of the first laser output unit and the center of the third laser output unit.
  • the lidar device is a device for detecting a distance to an object and a position of the object using a laser.
  • the lidar device may output a laser, and when the output laser is reflected from the object, the reflected laser may be received to measure the distance between the object and the lidar device and the position of the object.
  • the distance and position of the object may be expressed through a coordinate system.
  • the distance and position of the object are in the spherical coordinate system (r, , ⁇ ). However, it is not limited thereto, and a Cartesian coordinate system (X, Y, Z) or a cylindrical coordinate system (r, , z), etc.
  • the lidar device may use a laser that is output from the lidar device and reflected from the object in order to measure the distance of the object.
  • the lidar apparatus may use a time of flight (TOF) of the laser until it is sensed after the laser is output in order to measure the distance of the object.
  • TOF time of flight
  • the lidar device may measure the distance of the object by using a difference between a time value based on an output time of an output laser and a time value based on a sensed time of a laser reflected and sensed by the object.
  • the LiDAR device may measure the distance of the object by using a difference between a time value immediately sensed by the output laser without passing through the object and a time value based on the sensed time of the laser reflected and sensed by the object.
  • the actual outgoing timing of the laser beam can be used.
  • an optic is disposed on the laser output element, a laser beam output from the laser output element by the optic may be immediately sensed by a light receiving unit without passing through an object.
  • the optic may be a mirror, a lens, a prism, or a meta surface, but is not limited thereto.
  • the number of optics may be one, but there may be a plurality of optics.
  • a sensor unit is disposed above the laser output device, so that a laser beam output from the laser output device may be immediately sensed by the sensor unit without passing through an object.
  • the sensor unit may be spaced apart from the laser output device by a distance of 1mm, 1um, 1nm, etc., but is not limited thereto.
  • the sensor unit may be disposed adjacent to the laser output device without being spaced apart.
  • An optic may exist between the sensor unit and the laser output device, but is not limited thereto.
  • the LiDAR device may use a triangulation method, an interferometry method, a phase shift measurement, etc., in addition to the flight time. Not limited.
  • the lidar device may be installed in a vehicle.
  • the lidar device may be installed on the roof, hood, headlamp, or bumper of a vehicle.
  • a plurality of lidar devices may be installed in a vehicle.
  • one lidar device may be for observing the front and the other may be for observing the rear, but is not limited thereto.
  • one lidar device may be for observing the left side and the other one for observing the right side, but is not limited thereto.
  • the lidar device according to an embodiment may be installed in a vehicle.
  • the lidar device when the lidar device is installed inside the vehicle, it may be for recognizing a driver's gesture while driving, but is not limited thereto.
  • the lidar device when the lidar device is installed inside the vehicle or outside the vehicle, it may be for recognizing a driver's face, but is not limited thereto.
  • the lidar device may be installed on an unmanned aerial vehicle.
  • the lidar device is an unmanned aerial vehicle system (UAV system), a drone, a remote piloted vehicle (RPV), an unmanned aerial vehicle system (UAVs), an unmanned aircraft system (UAS), a remote piloted air/aerial system (RPAV). Vehicle) or RPAS (Remote Piloted Aircraft System).
  • UAV system unmanned aerial vehicle system
  • RSV remote piloted vehicle
  • UAVs unmanned aerial vehicle system
  • UAS unmanned aircraft system
  • RPAV remote piloted air/aerial system
  • Vehicle Remote piloted air/aerial system
  • RPAS Remote Piloted Aircraft System
  • a plurality of lidar devices may be installed on the unmanned aerial vehicle.
  • one lidar device may be for observing the front and the other may be for observing the rear, but is not limited thereto.
  • one lidar device may be for observing the left side and the other one for observing the right side, but is not limited thereto.
  • the lidar device according to an embodiment may be installed in a robot.
  • the lidar device may be installed in a personal robot, a professional robot, a public service robot, another industrial robot, or a manufacturing robot.
  • a plurality of lidar devices may be installed on the robot.
  • one lidar device may be for observing the front side and the other one for observing the rear side, but is not limited thereto.
  • one lidar device may be for observing the left and the other may be for observing the right, but is not limited thereto.
  • the lidar device according to an embodiment may be installed in the robot.
  • a lidar device when installed in a robot, it may be for recognizing a human face, but is not limited thereto.
  • the lidar device according to an embodiment may be installed for industrial security.
  • LiDAR devices can be installed in smart factories for industrial security.
  • a plurality of lidar devices may be installed in a smart factory for industrial security.
  • one lidar device may be for observing the front and the other may be for observing the rear, but is not limited thereto.
  • one lidar device may be for observing the left and the other may be for observing the right, but is not limited thereto.
  • the lidar device according to an embodiment may be installed for industrial security.
  • the lidar device when installed for industrial security, it may be for recognizing a person's face, but is not limited thereto.
  • FIG. 1 is a diagram for describing a lidar device according to an exemplary embodiment.
  • a lidar device 1000 may include a laser output unit 100.
  • the laser output unit 100 may emit a laser.
  • the laser output unit 100 may include one or more laser output devices.
  • the laser output unit 100 may include a single laser output device, may include a plurality of laser output devices, and in the case of including a plurality of laser output devices, a plurality of laser output devices You can configure an array.
  • the laser output unit 100 is a laser diode (LD), a solid-state laser, a high power laser, a light entitling diode (LED), a vertical cavity surface emitting laser (VCSEL), an external cavity diode laser (ECDL). It may include, but is not limited thereto.
  • LD laser diode
  • LED light entitling diode
  • VCSEL vertical cavity surface emitting laser
  • ECDL external cavity diode laser
  • the laser output unit 100 may output a laser having a predetermined wavelength.
  • the laser output unit 100 may output a laser of a 905 nm band or a laser of a 1550 nm band.
  • the laser output unit 100 may output a laser in a 940 nm band.
  • the laser output unit 100 may output a laser including a plurality of wavelengths between 800 nm and 1000 nm.
  • some of the plurality of laser output devices may output a laser of a 905 nm band, and other parts may output a laser of a 1500 nm band.
  • the lidar apparatus 1000 may include an optical unit 200.
  • the optical unit may be variously expressed as a steering unit and a scan unit, but is not limited thereto.
  • the optical unit 200 may change the flight path of the laser.
  • the optical unit 200 may change the flight path of the laser so that the laser emitted from the laser output unit 100 faces the scan area.
  • the flight path of the laser may be changed so that the laser reflected from the object located in the scan area is directed to the sensor unit.
  • the optical unit 200 may change the flight path of the laser by reflecting the laser.
  • the optical unit 200 may reflect a laser emitted from the laser output unit 100 and change the flight path of the laser so that the laser faces the scan area.
  • the flight path of the laser may be changed so that the laser reflected from the object located in the scan area is directed to the sensor unit.
  • the optical unit 200 may include various optical means to reflect a laser.
  • the optics 200 may include a mirror, a resonance scanner, a MEMS mirror, a Voice Coil Motor (VCM), a polygonal mirror, a rotating mirror, or It may include a galvano mirror or the like, but is not limited thereto.
  • VCM Voice Coil Motor
  • the optical unit 200 may change the flight path of the laser by refracting the laser.
  • the optical unit 200 may refract the laser emitted from the laser output unit 100 to change the flight path of the laser so that the laser is directed toward the scan area.
  • the flight path of the laser may be changed so that the laser reflected from the object located in the scan area is directed to the sensor unit.
  • the optical unit 200 may include various optical means to refract a laser.
  • the optical unit 200 may include, but is not limited to, a lens, a prism, a micro lens, or a liquid lens.
  • the optical unit 200 may change the flight path of the laser by changing the phase of the laser.
  • the optical unit 200 may change the phase of the laser emitted from the laser output unit 100 to change the flight path of the laser so that the laser faces the scan area.
  • the flight path of the laser may be changed so that the laser reflected from the object located in the scan area is directed to the sensor unit.
  • the optical unit 200 may include various optical means to change the phase of the laser.
  • the optical unit 200 may include an optical phased array (OPA), a meta lens, or a meta surface, but is not limited thereto.
  • OPA optical phased array
  • meta lens a meta lens
  • meta surface a meta surface
  • the optical unit 200 may include one or more optical means.
  • the optical unit 200 may include a plurality of optical means.
  • the lidar device 100 may include a sensor unit 300.
  • the sensor unit may be variously expressed as a light receiving unit and a receiving unit, but is not limited thereto.
  • the sensor unit 300 may detect a laser.
  • the sensor unit may detect a laser reflected from an object located in the scan area.
  • the sensor unit 300 may receive a laser, and may generate an electric signal based on the received laser.
  • the sensor unit 300 may receive a laser reflected from an object positioned within the scan area, and generate an electric signal based on this.
  • the sensor unit 300 may receive a laser reflected from an object located in the scan area through one or more optical means, and may generate an electric signal based on this.
  • the sensor unit 300 may receive a laser reflected from an object located in the scan area through an optical filter, and may generate an electrical signal based on this.
  • the sensor unit 300 may detect a laser based on the generated electrical signal.
  • the sensor unit 300 may detect a laser by comparing a predetermined threshold value with a magnitude of the generated electrical signal, but is not limited thereto.
  • the sensor unit 300 may detect a laser by comparing a predetermined threshold value with a rising edge, a falling edge, or a median value of a rising edge and a falling edge of the generated electrical signal, but is not limited thereto.
  • the sensor unit 300 may detect a laser by comparing a predetermined threshold value with a peak value of the generated electrical signal, but is not limited thereto.
  • the sensor unit 300 may include various sensor elements.
  • the sensor unit 300 includes a PN photodiode, a phototransistor, a PIN photodiode, APD (Avalanche Photodiode), SPAD (Single-photon avalanche diode), SiPM (Silicon Photo Multipliers), TDC (Time to Digital Converter), It may include a comparator, a complementary metal-oxide-semiconductor (CMOS), or a charge coupled device (CCD), but is not limited thereto.
  • CMOS complementary metal-oxide-semiconductor
  • CCD charge coupled device
  • the sensor unit 300 may be a 2D SPAD array, but is not limited thereto.
  • the SPAD array may include a plurality of SPAD units, and the SPAD unit may include a plurality of SPADs (pixels).
  • the sensor unit 300 may stack N histograms using a 2D SPAD array.
  • the sensor unit 300 may detect a light-receiving point of a laser beam reflected from an object and received light using a histogram.
  • the sensor unit 300 may use the histogram to detect a peak point of the histogram as a light-receiving point of a laser beam reflected from an object and received, but is not limited thereto.
  • the sensor unit 300 may use the histogram to detect a point where the histogram is equal to or greater than a predetermined value as a light-receiving point of the laser beam reflected from the object and received, but is not limited thereto.
  • the sensor unit 300 may include one or more sensor elements.
  • the sensor unit 300 may include a single sensor element, or may include a plurality of sensor elements.
  • the sensor unit 300 may include one or more optical elements.
  • the sensor unit 300 may include an aperture, a micro lens, a converging lens, or a diffuser, but is not limited thereto.
  • the sensor unit 300 may include one or more optical filters.
  • the sensor unit 300 may receive the laser reflected from the object through an optical filter.
  • the sensor unit 300 may include, but is not limited to, a band pass filter, a dichroic filter, a guided-mode resonance filter, a polarizer, and a wedge filter.
  • the lidar apparatus 1000 may include a control unit 400.
  • the control unit may be variously expressed as a controller or the like in the description for the present invention, but is not limited thereto.
  • control unit 400 may control the operation of the laser output unit 100, the optics unit 200, or the sensor unit 300.
  • control unit 400 may control the operation of the laser output unit 100.
  • control unit 400 may control the timing of the laser output from the laser output unit 100. Also, the control unit 400 may control the power of the laser output from the laser output unit 100. In addition, the control unit 400 may control a pulse width of a laser output from the laser output unit 100. In addition, the control unit 400 may control the period of the laser output from the laser output unit 100. In addition, when the laser output unit 100 includes a plurality of laser output elements, the control unit 400 may control the laser output unit 100 so that some of the plurality of laser output elements are operated.
  • control unit 400 may control the operation of the optical unit 200.
  • the controller 400 may control the operating speed of the optics 200.
  • the rotational speed of the rotating mirror can be controlled
  • the optical unit 200 includes a MEMS mirror the repetition period of the MEMS mirror can be controlled.
  • control unit 400 may control the degree of operation of the optical unit 200.
  • the optical unit 200 includes a MEMS mirror
  • the operation angle of the MEMS mirror may be controlled, but the present invention is not limited thereto.
  • control unit 400 may control the operation of the sensor unit 300.
  • control unit 400 may control the sensitivity of the sensor unit 300.
  • controller 400 may control the sensitivity of the sensor unit 300 by adjusting a predetermined threshold value, but is not limited thereto.
  • control unit 400 may control the operation of the sensor unit 300.
  • control unit 400 may control On/Off of the sensor unit 300, and when the control unit 300 includes a plurality of sensor elements, the sensor unit may operate some of the plurality of sensor elements. The operation of 300 can be controlled.
  • controller 400 may determine a distance from the lidar device 1000 to an object located in the scan area based on the laser detected by the sensor unit 300.
  • the controller 400 may determine a distance to an object located in the scan area based on a time when the laser is output from the laser output unit 100 and a time when the laser is detected by the sensor unit 300 .
  • the control unit 400 may output a laser from the laser output unit 100 so that the laser is immediately sensed by the sensor unit 300 without passing through the object and the laser reflected from the object is transmitted to the sensor unit 300.
  • the distance to the object located in the scan area may be determined based on the viewpoint detected at.
  • the timing at which the lidar apparatus 1000 transmits the trigger signal for emitting the laser beam by the control unit 400 may be a difference between the timing at which the lidar apparatus 1000 transmits the trigger signal for emitting the laser beam by the control unit 400 and the actual timing at which the laser beam is output from the laser output device. Since the laser beam is not actually output between the timing of the trigger signal and the timing of the actual light emission, accuracy may decrease if included in the flight time of the laser.
  • the actual outgoing timing of the laser beam can be used.
  • the laser beam output from the laser output device must be transmitted to the sensor unit 300 as soon as it is output or without passing through the object.
  • an optic is disposed on the laser output element, a laser beam output from the laser output element by the optic may be sensed by the sensor unit 300 directly without passing through an object.
  • the optic may be a mirror, a lens, a prism, or a meta surface, but is not limited thereto.
  • the number of optics may be one, but there may be a plurality of optics.
  • the laser beam output from the laser output device may be detected by the sensor unit 300 directly without passing through the object.
  • the sensor unit 300 may be spaced apart from the laser output device by a distance such as 1mm, 1um, 1nm, etc., but is not limited thereto.
  • the sensor unit 300 may be disposed adjacent to the laser output device without being spaced apart.
  • An optic may exist between the sensor unit 300 and the laser output element, but is not limited thereto.
  • the laser output unit 100 may output a laser
  • the control unit 400 may obtain a time point at which the laser is output from the laser output unit 100
  • the laser output from the laser output unit 100 When is reflected from an object located in the scan area, the sensor unit 300 may detect a laser reflected from the object, and the control unit 400 may acquire a time point at which the laser is sensed by the sensor unit 300, The controller 400 may determine a distance to an object located in the scan area based on the laser output timing and detection timing.
  • a laser may be output from the laser output unit 100, and the laser output from the laser output unit 100 will be detected by the sensor unit 300 without passing through an object located in the scan area.
  • the controller 400 may acquire a point in time when a laser that has not passed through the object is sensed.
  • the sensor unit 300 may detect the laser reflected from the object, and the controller 400 may detect the laser from the sensor unit 300.
  • a time point at which is sensed may be obtained, and the controller 400 may determine a distance to an object located in the scan area based on a time point when a laser is detected without passing through the object and a time point when a laser reflected from the object is detected.
  • FIG. 2 is a diagram illustrating a lidar device according to an embodiment.
  • a lidar device 1050 may include a laser output unit 100, an optical unit 200, and a sensor unit 300.
  • the laser beam output from the laser output unit 100 may pass through the optical unit 200.
  • the laser beam passing through the optical unit 200 may be irradiated toward the object 500.
  • the laser beam reflected from the object 500 may be received by the sensor unit 300.
  • FIG. 3 is a diagram illustrating a lidar device according to another embodiment.
  • a lidar device 1150 may include a laser output unit 100, an optical unit 200, and a sensor unit 300.
  • the laser beam output from the laser output unit 100 may pass through the optical unit 200.
  • the laser beam passing through the optical unit 200 may be irradiated toward the object 500.
  • the laser beam reflected from the object 500 may pass through the optical unit 200 again.
  • the optical unit through which the laser beam is applied before being irradiated to the object and the optical unit through which the laser beam reflected from the object is applied may be physically the same optical unit, but may be physically different optical units.
  • the laser beam passing through the optical unit 200 may be received by the sensor unit 300.
  • FIG. 4 is a view showing a laser output unit according to an embodiment.
  • the laser output unit 100 may include a VCSEL emitter 110.
  • the VCSEL emitter 110 includes an upper metal contact 10, an upper DBR layer 20, an upper Distributed Bragg reflector, an active layer 40, a quantum well, and a lower DBR layer 30, a lower Distributed Bragg reflector.
  • a substrate 50 and a lower metal contact 60 may be included.
  • the VCSEL emitter 110 may emit a laser beam vertically from the top surface.
  • the VCSEL emitter 110 may emit a laser beam in a direction perpendicular to the surface of the upper metal contact 10.
  • the VCSEL emitter 110 may emit a laser beam perpendicular to the acvite layer 40.
  • the VCSEL emitter 110 may include an upper DBR layer 20 and a lower DBR layer 30.
  • the upper DBR layer 20 and the lower DBR layer 30 may be formed of a plurality of reflective layers.
  • a reflective layer having a high reflectivity and a reflective layer having a low reflectance may be alternately disposed.
  • the thickness of the plurality of reflective layers may be a quarter of the laser wavelength emitted from the VCSEL emitter 110.
  • the upper DBR layer 20 and the lower DBR layer 30 may be doped with p-type and n-type.
  • the upper DBR layer 20 may be doped with a p-type
  • the lower DBR layer 30 may be doped with an n-type.
  • the upper DBR layer 20 may be doped with n-type and the lower DBR layer 30 may be doped with p-type.
  • a substrate 50 may be disposed between the lower DBR layer 30 and the lower metal contact 60.
  • the substrate 50 may also be a p-type substrate, and when the lower DBR layer 30 is doped with an n-type, the substrate 50 may also become an n-type substrate. have.
  • the VCSEL emitter 110 may include an active layer 40.
  • the active layer 40 may be disposed between the upper DBR layer 20 and the lower DBR layer 30.
  • the active layer 40 may include a plurality of quantum wells generating a laser beam.
  • the active layer 40 may emit a laser beam.
  • the VCSEL emitter 110 may include a metal contact for electrical connection with a power source or the like.
  • the VCSEL emitter 110 may include an upper metal contact 10 and a lower metal contact 60.
  • the VCSEL emitter 110 may be electrically connected to the upper DBR layer 20 and the lower DBR layer 30 through a metal contact.
  • the upper DBR layer 20 is doped with p-type and the lower DBR layer 30 is doped with n-type
  • p-type power is supplied to the upper metal contact 10 so that the upper DBR layer 20 and It is electrically connected
  • n-type power is supplied to the lower metal contact 60 to be electrically connected to the lower DBR layer 30.
  • n-type power is supplied to the upper metal contact 10 to provide the upper DBR. It is electrically connected to the layer 20, and p-type power is supplied to the lower metal contact 60 to be electrically connected to the lower DBR layer 30.
  • the VCSEL emitter 110 may include an oxidation area. Oxidation area may be disposed on top of the active layer.
  • the oxidation area may be insulating.
  • electrical flow may be restricted in the oxidation area.
  • electrical connections may be limited in the oxidation area.
  • the oxidation area may serve as an aperture. Specifically, since the oxidation area has insulating properties, the beam generated from the active layer 40 may be emitted only in a portion other than the oxidation area.
  • the laser output unit may include a plurality of VCSEL emitters 110.
  • the laser output unit may turn on a plurality of VCSEL emitters 110 at once or individually.
  • the laser output unit may emit laser beams of various wavelengths.
  • the laser output unit may emit a laser beam having a wavelength of 905 nm.
  • the laser output unit may emit a laser beam having a wavelength of 1550 nm.
  • the wavelength to be output to the laser output unit may be changed according to the surrounding environment.
  • the output wavelength may also increase.
  • the output wavelength may also decrease.
  • the ambient environment may include, but is not limited to, temperature, humidity, pressure, concentration of dust, ambient light amount, altitude, gravity, acceleration, and the like.
  • the laser output unit may emit a laser beam in a direction perpendicular to the support surface.
  • the laser output unit may emit a laser beam in a direction perpendicular to the emission surface.
  • FIG. 5 is a diagram showing a VCSEL unit according to an embodiment.
  • the laser output unit 100 may include a VCSEL unit 130.
  • the VCSEL unit 130 may include a plurality of VCSEL emitters 110.
  • the plurality of VCSEL emitters 110 may be arranged in a honeycomb structure, but the present invention is not limited thereto.
  • one honeycomb structure may include seven VCSEL emitters 110, but is not limited thereto.
  • all VCSEL emitters 110 included in the VCSEL unit 130 may be irradiated in the same direction.
  • all 400 VCSEL emitters 110 included in the VCSEL unit 130 may be irradiated in the same direction.
  • the VCSEL unit 130 may be distinguished by the irradiation direction of the output laser beam. For example, when all of the N VCSEL emitters 110 output a laser beam in a first direction, and all of the M VCSEL emitters 110 output a laser beam in a second direction, the N VCSEL emitters 110 ) May be classified as a first VCSEL unit, and the M VCSEL emitters 110 may be classified as a second VCSEL unit.
  • the VCSEL unit 130 may include a metal contact.
  • the VCSEL unit 130 may include a p-type metal and an n-type metal.
  • a plurality of VCSEL emitters 110 included in the VCSEL unit 130 may share a metal contact.
  • FIG. 6 is a diagram illustrating a VCSEL array according to an embodiment.
  • the laser output unit 100 may include a VCSEL array 150. 6 illustrates an 8X8 VCSEL array, but is not limited thereto.
  • the VCSEL array 150 may include a plurality of VCSEL units 130.
  • the plurality of VCSEL units 130 may be arranged in a matrix structure, but the present invention is not limited thereto.
  • the plurality of VCSEL units 130 may be an N X N matrix, but are not limited thereto. Also, for example, the plurality of VCSEL units 130 may be an N X M matrix, but are not limited thereto.
  • the VCSEL array 150 may include a metal contact.
  • the VCSEL array 150 may include p-type metal and n-type metal.
  • the plurality of VCSEL units 130 may share a metal contact, but they may not share the metal contact and may each have an independent metal contact.
  • FIG. 7 is a side view showing a VCSEL array and a metal contact according to an embodiment.
  • the laser output unit 100 may include a VCSEL array 151.
  • 6 illustrates a 4X4 VCSEL array, but is not limited thereto.
  • the VCSEL array 151 may include a first metal contact 11, a wire 12, a second metal contact 13, and a VCSEL unit 130.
  • the VCSEL array 151 may include a plurality of VCSEL units 130 arranged in a matrix structure.
  • each of the plurality of VCSEL units 130 may be independently connected to a metal contact.
  • the plurality of VCSEL units 130 share the first metal contact 11 and are connected together to the first metal contact, and the second metal contact 13 is not shared, so that they are independently connected to the second metal contact. I can.
  • the plurality of VCSEL units 130 may be directly connected to the first metal contact 11 and connected to the second metal contact through a wire 12.
  • the number of required wires 12 may be the same as the number of a plurality of VCSEL units 130.
  • the number of wires 12 may be N * M.
  • first metal contact 11 and the second metal contact 13 may be different from each other.
  • first metal contact 11 may be an n-type metal
  • second metal contact 13 may be a p-type metal
  • first metal contact 11 may be a p-type metal
  • second metal contact 13 may be an n-type metal.
  • FIG. 8 is a diagram illustrating a VCSEL array according to an embodiment.
  • the laser output unit 100 may include a VCSEL array 153. 7 illustrates a 4X4 VCSEL array, but is not limited thereto.
  • the VCSEL array 153 may include a plurality of VCSEL units 130 arranged in a matrix structure.
  • the plurality of VCSEL units 130 may share metal contacts, but may not share metal contacts and may have independent metal contacts.
  • the plurality of VCSEL units 130 may share the first metal contact 15 in a row unit.
  • the plurality of VCSEL units 130 may share the second metal contact 17 in a column unit.
  • first metal contact 15 and the second metal contact 17 may be different from each other.
  • first metal contact 15 may be an n-type metal
  • second metal contact 17 may be a p-type metal
  • first metal contact 15 may be a p-type metal
  • second metal contact 17 may be an n-type metal.
  • the VCSEL unit 130 may be electrically connected to the first metal contact 15 and the second metal contact 17 through the wire 12.
  • the VCSEL array 153 may operate to be addressable.
  • a plurality of VCSEL units 130 included in the VCSEL array 153 may operate independently of other VCSEL units.
  • the VCSEL units in the first row and the first column may operate.
  • the VCSEL units in the first row and the third columns and the VCSEL units in the first row and the third columns will operate. I can.
  • the VCSEL units 130 included in the VCSEL array 153 may operate with a certain pattern.
  • VCSEL unit in row 1 For example, after the operation of the VCSEL unit in row 1, column 1, VCSEL unit in row 1, column 2, VCSEL unit in row 1, column 3, VCSEL unit in row 1, column 4, VCSEL unit in row 2, column 2, VCSEL unit in column 2, etc. It operates, and can have a certain pattern lasting the VCSEL unit of 4 rows and 4 columns.
  • the VCSEL unit in 1 row 1 column in 2 rows 1 column, 3 rows 1 column VCSEL unit, 4 row 1 column VCSEL unit, 1 row 2 column VCSEL unit, 2 row 2 column VCSEL unit, etc. It operates as it is, and can have a certain pattern with the last VCSEL unit of 4 rows and 4 columns.
  • the VCSEL units 130 included in the VCSEL array 153 may operate with an irregular pattern.
  • the VCSEL units 130 included in the VCSEL array 153 may operate without having a pattern.
  • the VCSEL units 130 may operate at random. When the VCSEL units 130 operate at random, interference between the VCSEL units 130 may be prevented.
  • the flash method is a method in which a laser beam is spread to an object by divergence of the laser beam.
  • a laser beam of high power is required to direct a laser beam to an object existing at a distance.
  • the high power laser beam increases the power because a high voltage must be applied.
  • since it can damage the human eye there is a limit to the distance that can be measured by a lidar using the flash method.
  • the scanning method is a method of directing a laser beam emitted from the laser output unit in a specific direction.
  • Laser power loss can be reduced by directing the scanning method laser beam in a specific direction. Since laser power loss can be reduced, compared to the flash method, even if the same laser power is used, the distance that the lidar can measure is longer in the scanning method. In addition, compared to the flash method, since the scanning method has a lower laser power for measuring the same distance, stability to the human eye may be improved.
  • Laser beam scanning can be accomplished by collimation and steering.
  • laser beam scanning may be performed by performing a steering method after collimating the laser beam.
  • laser beam scanning may be performed in a manner of performing a collimation after steering.
  • FIG. 9 is a diagram for describing a lidar device according to an exemplary embodiment.
  • a lidar device 1200 may include a laser output unit 100 and an optical unit.
  • the optical unit may include the BCSC 250.
  • the BCSC 250 may include a collimation component 210 and a steering component 230.
  • BCSC 250 may be configured as follows.
  • the collimation component 210 first collimates the laser beam, and the collimated laser beam may be steered through the steering component 230.
  • the steering component 230 may first steer the laser beam, and the steered laser beam may be collimated through the collimation component 210.
  • the optical path of the lidar device 1200 is as follows.
  • the laser beam emitted from the laser output unit 100 may be directed to the BCSC 250.
  • the laser beam incident on the BCSC 250 may be collimated by the collimation component 210 and directed to the steering component 230.
  • the laser beam incident on the steering component 230 may be steered and directed toward the object.
  • the laser beam incident on the object 500 may be reflected by the object 500 and directed to the sensor unit.
  • the laser beam emitted from the laser output unit has directivity, there may be some degree of divergence as the laser beam travels straight. Due to such divergence, the laser beam emitted from the laser output unit may not be incident on the object, or the amount may be very small even if it is incident.
  • the degree of divergence of the laser beam When the degree of divergence of the laser beam is large, the amount of the laser beam incident on the object is reduced, and the amount of the laser beam reflected from the object and directed to the sensor unit is also very small due to the divergence, so that a desired measurement result may not be obtained.
  • the degree of divergence of the laser beam when the degree of divergence of the laser beam is large, the distance that can be measured by the LiDAR device decreases, so that a distant object may not be able to measure.
  • the efficiency of the lidar device may be improved as the degree of divergence of the laser beam emitted from the laser output unit is reduced.
  • the collimation component of the present invention can reduce the degree of divergence of the laser beam.
  • the laser beam that has passed through the collimation component can be parallel light.
  • the laser beam passing through the collimation component may have a divergence of 0.4 degrees to 1 degree.
  • the amount of light incident on the object may be increased.
  • the amount of light reflected from the object is also increased, so that the laser beam can be efficiently received.
  • the amount of light incident on the object is increased, compared to before collimating the laser beam, it is possible to measure an object at a greater distance with the same laser beam power.
  • FIG. 10 is a diagram for describing a collimation component according to an embodiment.
  • the collimation component 210 may be disposed in a direction in which a laser beam emitted from the laser output unit 100 is directed.
  • the collimation component 210 may adjust the degree of divergence of the laser beam.
  • the collimation component 210 may reduce the degree of divergence of the laser beam.
  • the divergence angle of the laser beam emitted from the laser output unit 100 may be 16 degrees to 30 degrees. In this case, after the laser beam emitted from the laser output unit 100 passes through the collimation component 210, the divergence angle of the laser beam may be 0.4 degrees to 1 degree.
  • FIG. 11 is a diagram for describing a collimation component according to an embodiment.
  • the collimation component 210 may include a plurality of micro lenses 211 and a substrate 213.
  • the microlens may have a diameter of millimeters (mm), micrometers (um), nanometers (nm), picometers (pm), etc., but is not limited thereto.
  • a plurality of micro lenses 211 may be disposed on the substrate 213.
  • the plurality of micro lenses 211 and the substrate 213 may be disposed on the plurality of VCSEL emitters 110.
  • one of the plurality of micro lenses 211 may be disposed to correspond to one of the plurality of VCSEL emitters 110, but is not limited thereto.
  • the plurality of micro lenses 211 may collimate laser beams emitted from the plurality of VCSEL emitters 110.
  • the laser beam emitted from one of the plurality of VCSEL emitters 110 may be collimated by one of the plurality of micro lenses 211.
  • the divergence angle of the laser beam emitted from one of the plurality of VCSEL emitters 110 may be decreased after passing through one of the plurality of micro lenses 211.
  • the plurality of microlenses may be a refractive index distribution lens, a micro-curved lens, an array lens, a Fresnel lens, or the like.
  • a plurality of microlenses according to an exemplary embodiment may be manufactured by molding, ion exchange, diffusion polymerization, sputtering, and etching.
  • the plurality of micro lenses according to an embodiment may have a diameter of 130um to 150um.
  • the diameter of the plurality of micro lenses may be 140 ⁇ m.
  • the plurality of micro lenses may have a thickness of 400um to 600um.
  • the thickness of the plurality of micro lenses may be 500 ⁇ m.
  • FIG. 12 is a diagram for describing a collimation component according to an embodiment.
  • the collimation component 210 may include a plurality of micro lenses 211 and a substrate 213.
  • a plurality of micro lenses 211 may be disposed on the substrate 213.
  • the plurality of micro lenses 211 may be disposed on the front and rear surfaces of the substrate 213.
  • an optical axis of the microlens 211 disposed on the surface of the substrate 213 and the microlens 211 disposed on the rear surface of the substrate 213 may be coincident.
  • FIG. 13 is a diagram for describing a collimation component according to an embodiment.
  • a collimation component may include a metasurface 220.
  • the metasurface 220 may include a plurality of nanopillars 221.
  • the plurality of nanopillars 221 may be disposed on one side of the meta surface 220.
  • the plurality of nanopillars 221 may be disposed on both sides of the meta surface 220.
  • the plurality of nanopillars 221 may have a sub-wavelength dimension.
  • the spacing between the plurality of nanopillars 221 may be smaller than the wavelength of the laser beam emitted from the laser output unit 100.
  • the width, diameter, and height of the nanopillars 221 may be smaller than the length of the wavelength of the laser beam.
  • the meta surface 220 may refract the laser beam by adjusting the phase of the laser beam emitted from the laser output unit 100.
  • the meta surface 220 may refract laser beams output from the laser output unit 100 in various directions.
  • the meta surface 220 may collimate a laser beam emitted from the laser output unit 100.
  • the meta-surface 220 may reduce the divergence angle of the laser beam emitted from the laser output unit 100.
  • a divergence angle of a laser beam emitted from the laser output unit 100 may be 15 to 30 degrees, and a divergence angle of the laser beam after passing through the meta surface 220 may be 0.4 to 1.8 degrees.
  • the meta surface 220 may be disposed on the laser output unit 100.
  • the meta surface 220 may be disposed on the emission surface side of the laser output unit 100.
  • the meta surface 220 may be deposited on the laser output unit 100.
  • the plurality of nanopillars 221 may be formed on the laser output unit 100.
  • the plurality of nanopillars 221 may form various nanopatterns on the laser output unit 100.
  • the nanopillars 221 may have various shapes.
  • the nanopillar 221 may have a shape such as a cylinder, a polygonal column, a cone, and a polygonal pyramid.
  • the nanopillars 221 may have an irregular shape.
  • FIG. 14 is a diagram for describing a steering component according to an exemplary embodiment.
  • the steering component 230 may be disposed in a direction in which a laser beam emitted from the laser output unit 100 is directed.
  • the steering component 230 may adjust the direction in which the laser beam is directed.
  • the steering component 230 may adjust an angle between the optical axis of the laser light source and the laser beam.
  • the steering component 230 may steer the laser beam such that an angle between the optical axis of the laser light source and the laser beam is 0 to 30 degrees.
  • the steering component 230 may steer the laser beam such that an angle between the optical axis of the laser light source and the laser beam is -30 degrees to 0 degrees.
  • 15 and 16 are diagrams for describing a steering component according to an exemplary embodiment.
  • the steering component 231 may include a plurality of micro lenses 231 and a substrate 233.
  • the plurality of micro lenses 232 may be disposed on the substrate 233.
  • the plurality of micro lenses 232 and the substrate 233 may be disposed on the plurality of VCSEL emitters 110.
  • one of the plurality of micro lenses 232 may be disposed to correspond to one of the plurality of VCSEL emitters 110, but is not limited thereto.
  • the plurality of micro lenses 232 may steer the laser beams emitted from the plurality of VCSEL emitters 110.
  • the laser beam emitted from one of the plurality of VCSEL emitters 110 may be steered by one of the plurality of micro lenses 232.
  • the optical axis of the micro lens 232 and the optical axis of the VCSEL emitter 110 may not coincide.
  • the laser beam emitted from the VCSEL emitter 110 and passed through the micro lens 232 is left Can be headed to.
  • the laser beam emitted from the VCSEL emitter 110 and passed through the micro lens 232 Can face to the right.
  • the degree of steering of the laser beam may increase.
  • the angle formed by the optical axis of the laser light source and the laser beam may be larger than when the distance between the optical axis of the VCSEL emitter 110 is 1 ⁇ m.
  • 17 is a diagram for describing a steering component according to an exemplary embodiment.
  • the steering component 234 may include a plurality of micro prisms 235 and a substrate 236.
  • a plurality of micro prisms 235 may be disposed on the substrate 236.
  • the plurality of micro prisms 235 and the substrate 236 may be disposed on the plurality of VCSEL emitters 110.
  • the plurality of micro prisms 235 may be disposed to correspond to one of the plurality of VCSEL emitters 110, but is not limited thereto.
  • the plurality of micro prisms 235 may steer the laser beams emitted from the plurality of VCSEL emitters 110.
  • the plurality of micro prisms 235 may change an angle between the optical axis of the laser light source and the laser beam.
  • the angle formed by the optical axis of the laser light source and the laser beam increases.
  • the angle of the micro prism 235 is 0.05 degrees
  • the laser beam is steered by 35 degrees
  • the angle of the micro prism 235 is 0.25 degrees
  • the laser beam is steered by 15 degrees.
  • the plurality of micro prism 235 may be a Porro prism, Amici roof prism, Pentaprism, Dove prism, Retroreflector prism, or the like.
  • the plurality of micro prisms 235 may be made of glass, plastic, or fluorspar.
  • the plurality of micro prisms 235 may be manufactured by molding, etching, or the like.
  • the micro prism 235 may be disposed on both sides of the substrate 236.
  • a micro prism disposed on the first side of the substrate 236 steers the laser beam to the first axis
  • the micro prism disposed on the second side of the substrate 236 steers the laser beam to the second axis. I can make it.
  • FIG. 18 is a diagram for describing a steering component according to an exemplary embodiment.
  • the steering component may include a meta surface 240.
  • the metasurface 240 may include a plurality of nanopillars 241.
  • the plurality of nanopillars 241 may be disposed on one side of the meta surface 240.
  • the plurality of nanopillars 241 may be disposed on both sides of the meta surface 240.
  • the meta surface 240 may refract the laser beam by adjusting the phase of the laser beam emitted from the laser output unit 100.
  • the meta surface 240 may be disposed on the laser output unit 100.
  • the meta surface 240 may be disposed on the emission surface side of the laser output unit 100.
  • the meta surface 240 may be deposited on the laser output unit 100.
  • the plurality of nanopillars 241 may be formed on the laser output unit 100.
  • the plurality of nanopillars 241 may form various nanopatterns on the laser output unit 100.
  • the nanopillars 241 may have various shapes.
  • the nanopillar 241 may have a shape such as a cylinder, a polygonal column, a cone, and a polygonal pyramid.
  • the nanopillars 241 may have an irregular shape.
  • the plurality of nanopillars 241 may form various nanopatterns.
  • the meta surface 240 may steer a laser beam emitted from the laser output unit 100 based on the nano pattern.
  • the nanopillars 241 may form nanopatterns based on various characteristics.
  • the characteristics may include a width (Width, hereinafter W), a pitch (hereinafter P), a height (Height, hereinafter H), and the number per unit length of the nanopillars 241.
  • nanopatterns formed based on various characteristics and steering of a laser beam according to the nanopatterns will be described.
  • 19 is a diagram for describing a meta surface according to an exemplary embodiment.
  • the metasurface 240 may include a plurality of nanopillars 241 having different widths (W).
  • the plurality of nanopillars 241 may form a nanopattern based on the width W.
  • the plurality of nanopillars 241 may be arranged such that the widths W1, W2, and W3 increase in one direction.
  • the laser beam emitted from the laser output unit 100 may be steered in a direction in which the width W of the nanopillars 241 increases.
  • the meta surface 240 has a first nanopillar 243 having a first width W1, a second nanopillar 245 having a second width W2, and a third width W3.
  • a third nanopillar 247 may be included.
  • the first width W1 may be larger than the second width W2 and the third width W3.
  • the second width W2 may be larger than the third width W3. That is, the width W of the nanopillars 241 may decrease from the first nanopillar 243 toward the third nanopillar 247.
  • the first nanopillars 243 from the first direction and the third nanopillars 247 emitted from the laser output unit 100 It may be steered in a direction between the second direction, which is a direction toward ).
  • the steering angle of the laser beam ( ) May vary according to the increase/decrease rate of the width W of the nanopillars 241.
  • the increase/decrease rate of the width W of the nano-pillars 241 may mean a value representing an average increase/decrease of the width W of the plurality of adjacent nano-pillars 241.
  • the increase/decrease rate of the width W of the nanopillars 241 will be calculated. I can.
  • the difference between the first width W1 and the second width W2 may be different from the difference between the second width W2 and the third width W3.
  • the steering angle of the laser beam ( ) May vary according to the width (W) of the nanopillars 241.
  • the steering angle ( ) May increase as the increase/decrease rate of the width W of the nanopillars 241 increases.
  • the nanopillars 241 may form a first pattern having a first increase/decrease rate based on the width W.
  • the nanopillars 241 may form a second pattern having a second increase/decrease rate smaller than the first increase/decrease rate based on the width W.
  • the first steering angle according to the first pattern may be greater than the second steering angle according to the second pattern.
  • the steering angle ( ) Can range from -90 degrees to 90 degrees.
  • 20 is a diagram for describing a metasurface according to an exemplary embodiment.
  • the metasurface 240 may include a plurality of nanopillars 241 having different spacings P between adjacent nanopillars 241.
  • the plurality of nanopillars 241 may form a nanopattern based on a change in the gap P between adjacent nanopillars 241.
  • the meta surface 240 may steer a laser beam emitted from the laser output unit 100 based on a nano pattern formed based on a change in the gap P between the nano pillars 241.
  • the distance P between the nanopillars 241 may decrease in one direction.
  • the interval P may mean a distance between the centers of two adjacent nanopillars 241.
  • the first interval P1 may be defined as a distance between the center of the first nanopillar 243 and the center of the second nanopillar 245.
  • the first interval P1 may be defined as the shortest distance between the first nanopillars 243 and the second nanopillars 245.
  • the laser beam emitted from the laser output unit 100 may be steered in a direction in which the spacing P between the nanopillars 241 decreases.
  • the metasurface 240 may include a first nanopillar 243, a second nanopillar 245, and a third nanopillar 247.
  • the first interval P1 may be obtained based on the distance between the first nanopillars 243 and the second nanopillars 245.
  • the second interval P2 may be obtained based on the distance between the second nanopillars 245 and the third nanopillars 247.
  • the first interval P1 may be smaller than the second interval P2. That is, the distance P may increase from the first nanopillar 243 toward the third nanopillar 247.
  • the laser beam emitted from the laser output unit 100 passes through the meta surface 240, the laser beam is emitted from the first direction and the third nanopillar 247 from the laser output unit 100. It may be steered in a direction between the first direction, which is a direction toward the 1 nanopillar 243.
  • the steering angle of the laser beam ( ) May vary according to the spacing P between the nanopillars 241.
  • the steering angle of the laser beam ( ) May vary according to the increase/decrease rate of the gap P between the nanopillars 241.
  • the increase/decrease rate of the interval P between the nanopillars 241 may mean a value representing the degree of change of the interval P between adjacent nanopillars 241 on average.
  • the steering angle of the laser beam ( ) May increase as the increase/decrease rate of the gap P between the nanopillars 241 increases.
  • the nanopillars 241 may form a first pattern having a first increase/decrease rate based on the gap P.
  • the nanopillars 241 may form a second pattern having a second increase/decrease rate based on the interval P.
  • the first steering angle according to the first pattern may be larger than the second steering angle according to the second pattern.
  • the principle of steering a laser beam according to a change in the spacing P of the nanopillars 241 described above can be similarly applied even when the number of nanopillars 241 per unit length changes.
  • the laser beam emitted from the laser output unit 100 is a first direction emitted from the laser output unit 100 and nanopillars per unit length ( It may be steered in a direction between the second direction in which the number of 241) increases.
  • 21 is a diagram for describing a meta surface according to an exemplary embodiment.
  • the metasurface 240 may include a plurality of nanopillars 241 having different heights H of the nanopillars 241.
  • the plurality of nanopillars 241 may form a nanopattern based on a change in the height H of the nanopillars 241.
  • the heights H1, H2, and H3 of the plurality of nanopillars 241 may increase in one direction.
  • the laser beam emitted from the laser output unit 100 may be steered in a direction in which the height H of the nanopillars 241 increases.
  • the meta surface 240 has a first nanopillar 243 having a first height H1, a second nanopillar 245 having a second height H2, and a third height H3.
  • a third nanopillar 247 may be included.
  • the third height H3 may be greater than the first height H1 and the second height H2.
  • the second height H2 may be greater than the first height H1. That is, the height H of the nanopillars 241 may increase from the first nanopillar 243 toward the third nanopillar 247.
  • the laser beam is a first direction emitted from the laser output unit 100 and a third from the first nanopillar 243 It may be steered in a direction between the nanopillars 247 in the second direction.
  • the steering angle of the laser beam ( ) May vary depending on the height H of the nanopillars 241.
  • the steering angle of the laser beam ( ) May vary according to the increase/decrease rate of the height H of the nanopillars 241.
  • the increase/decrease rate of the height (H) of the nano-pillars 241 may mean a numerical value representing an average degree of change in the height (H) of the adjacent nano-pillars 241.
  • the increase/decrease rate of the height (H) of the nanopillar 241 will be calculated. I can.
  • the difference between the first height H1 and the second height H2 may be different from the difference between the second height H3 and the third height H3.
  • the steering angle of the laser beam ( ) May increase as the increase/decrease rate of the height H of the nanopillars 241 increases.
  • the nanopillars 241 may form a first pattern having a first increase/decrease rate based on the height H.
  • the nanopillars 241 may form a second pattern having a second increase/decrease rate based on the height H.
  • the first steering angle according to the first pattern may be larger than the second steering angle according to the second pattern.
  • the steering component 230 may include a mirror that reflects the laser beam.
  • the steering component 230 may include a planar mirror, a multifaceted mirror, a resonant mirror, a MEMS mirror, and a galvano mirror.
  • the steering component 230 may include a polygonal mirror that rotates 360 degrees along one axis and a nodding mirror that is repeatedly driven in a preset range along one axis.
  • FIG. 22 is a diagram for describing a multi-faceted mirror that is a steering component according to an exemplary embodiment.
  • a rotating multi-faceted mirror 600 may include a reflective surface 620 and a body, and vertically penetrates the center of the upper 615 and the lower 610 of the body. It can be rotated around the rotating shaft 630.
  • the rotating multi-faceted mirror 600 may be configured with only some of the above-described configurations, and may include more components.
  • the rotating multi-faceted mirror 600 may include a reflective surface 620 and a body, and the body may be composed of only the lower portion 610. In this case, the reflective surface 620 may be supported on the lower portion 610 of the body.
  • the reflective surface 620 is a surface for reflecting the received laser, and may include a reflective mirror, reflective plastic, etc., but is not limited thereto.
  • the reflective surface 620 may be installed on a side surface other than the upper portion 610 and the lower portion 615 of the body, and may be installed so that the rotation shaft 630 and the normal line of each reflective surface 620 are orthogonal. have. This may be for repetitively scanning the same scan area by making the same scan area of the laser irradiated from each of the reflective surfaces 620.
  • the reflective surface 620 may be installed on a side surface other than the upper portion 610 and the lower portion 615 of the body, and the normal line of each reflective surface 620 has a different angle from the rotation axis 630, respectively. Can be installed This may be for expanding the scan area of the lidar device by making the scan area of the laser irradiated from each reflective surface 620 different.
  • the reflective surface 620 may have a rectangular shape, but is not limited thereto, and may have various shapes such as a triangle and a trapezoid.
  • the body is for supporting the reflective surface 620 and may include an upper portion 615, a lower portion 610, and a pillar 612 connecting the upper portion 615 and the lower portion 610.
  • the pillar 612 may be installed to connect the center of the upper portion 615 and the lower portion 610 of the body, and installed to connect each vertex of the upper portion 615 and the lower portion 610 of the body It may be, or it may be installed to connect each corner of the upper portion 615 and lower portion 610 of the body, but there is no limitation on the structure for connecting and supporting the upper portion 615 and the lower portion 610 of the body. .
  • the body may be fastened to the driving unit 640 to receive the driving force for rotation, and may be fastened to the driving unit 640 through the lower portion 610 of the body, or through the upper portion 615 of the body. It may be fastened to the driving unit 640.
  • the upper portion 615 and the lower portion 610 of the body may have a polygonal shape.
  • the shape of the upper portion 615 of the body and the lower portion 610 of the body may be the same, but are not limited thereto, and the shapes of the upper portion 615 of the body and the lower portion 610 of the body are different from each other. You may.
  • the upper portion 615 and the lower portion 610 of the body may have the same size.
  • the present invention is not limited thereto, and sizes of the upper portion 615 of the body and the lower portion 610 of the body may be different from each other.
  • the upper portion 615 and/or the lower portion 610 of the body may include an empty space through which air can pass.
  • the rotating multi-faceted mirror 600 is described as a hexahedron in the form of a quadrilateral column including four reflective surfaces 620, but the reflective surfaces 620 of the rotating multi-faceted mirror 600 are necessarily four. It is not, and it is not necessarily a six-sided structure in the form of a quadrilateral column.
  • the lidar device may further include an encoder.
  • the lidar device may control the operation of the multi-faceted rotating mirror 600 by using the detected rotation angle.
  • the encoder unit may be included in the multi-faceted rotating mirror 600 or disposed to be spaced apart from the multi-faceted rotating mirror 600.
  • the required field of view (FOV) of the lidar device may be different depending on the application. For example, in the case of a fixed lidar device for 3D mapping, the widest possible viewing angle in the vertical and horizontal directions may be required, and in the case of a lidar device disposed in a vehicle, a relatively wide viewing angle in the horizontal direction. Compared to that, it may require a relatively narrow viewing angle in the vertical direction. In addition, in the case of a lidar disposed on a drone, the widest viewing angle in the vertical and horizontal directions may be required.
  • the scan area of the lidar device may be determined based on the number of reflective surfaces of the rotating multi-faceted mirror, and accordingly, the viewing angle of the lidar device may be determined. Therefore, it is possible to determine the number of reflective surfaces of the rotating multi-faceted mirror based on the required viewing angle of the lidar device.
  • 23 to 25 are views for explaining the relationship between the number of reflective surfaces and the viewing angle.
  • FIGS. 23 to 25 three, four, and five reflective surfaces are described, but the number of reflective surfaces is not determined, and when the number of reflective surfaces is different, the following description may be inferred and calculated easily.
  • FIGS. 22 to 24 a case in which the upper and lower portions of the body are regular polygons will be described, but even when the upper and lower portions of the body are not regular polygons, the following description can be inferred and calculated easily.
  • FIG. 23 is a top view for explaining the viewing angle of the rotating faceted mirror 650 in which the number of reflective surfaces is three and the upper and lower portions of the body are equilateral triangles.
  • the laser 653 may be incident in a direction coincident with the rotation axis 651 of the multi-faceted rotating mirror 650.
  • an angle formed by the three reflective surfaces may be 60 degrees.
  • the rotating facet mirror 650 rotates slightly in a clockwise direction, the laser is reflected upwards in the drawing, and the rotating facet mirror is positioned slightly rotated counterclockwise. The laser may be reflected downward on the drawing. Therefore, when the path of the reflected laser is calculated with reference to FIG. 23, the maximum viewing angle of the rotating facet mirror can be known.
  • the reflected laser when reflected through the No. 1 reflective surface of the rotating multi-faceted mirror 650, the reflected laser may be reflected upwards with the incident laser 653 at an angle of 120 degrees. In addition, when reflected through the third reflective surface of the rotating multi-faceted mirror, the reflected laser may be reflected at an angle of 120 degrees downward to the incident laser.
  • the maximum viewing angle of the rotating multi-faceted mirror may be 240 degrees.
  • 24 is a top view for explaining a viewing angle of a rotating multi-faceted mirror in which the number of reflective surfaces is four and the upper and lower portions of the body are square.
  • the laser 663 may be incident in a direction coincident with the rotation axis 661 of the multi-faceted rotating mirror 660.
  • an angle formed by the four reflective surfaces may be 90 degrees.
  • the rotating facet mirror 660 rotates slightly in the clockwise direction, the laser is reflected upwards in the drawing, and the rotating facet mirror 660 rotates slightly counterclockwise to the position. In this case, the laser may be reflected downward on the drawing. Therefore, when the path of the reflected laser is calculated with reference to FIG. 24, the maximum viewing angle of the rotating faceted mirror 660 can be known.
  • the reflected laser when reflected through the No. 1 reflective surface of the rotating multi-faceted mirror 660, the reflected laser may be reflected upwards with the incident laser 663 at an angle of 90 degrees. In addition, when reflected through the fourth reflective surface of the rotating multi-faceted mirror 660, the reflected laser may be reflected downward to the incident laser 663 at an angle of 90 degrees.
  • the maximum viewing angle of the rotating multi-faceted mirror 660 may be 180 degrees.
  • 24 is a top view for explaining a viewing angle of a rotating multi-faceted mirror in which the number of reflective surfaces is 5 and the upper and lower portions of the body are regular pentagons.
  • the laser 673 may be incident in a direction coincident with the rotation axis 671 of the multi-faceted rotating mirror 670.
  • an angle formed by the five reflective surfaces may be 108 degrees each.
  • the rotating mirror 670 rotates slightly in the clockwise direction, the laser is reflected upwards in the drawing, and the rotating mirror 670 rotates slightly counterclockwise. When positioned, the laser can be reflected downwards in the drawing. Therefore, if the path of the reflected laser is calculated with reference to FIG. 24, the maximum viewing angle of the rotating multi-faceted mirror can be known.
  • the reflected laser when reflected through the No. 1 reflective surface of the rotating multi-faceted mirror 670, the reflected laser may be reflected upwardly to the incident laser 673 at an angle of 72 degrees. In addition, when reflected through the 5th reflective surface of the rotating multi-faceted mirror 670, the reflected laser may be reflected downwards from the incident laser 673 at an angle of 72 degrees.
  • the maximum viewing angle of the rotating multi-faceted mirror may be 144 degrees.
  • the rotating multi-faceted mirror when the number of reflective surfaces of the rotating multi-faceted mirror is N, and the upper and lower portions of the body are N-shaped, if the inner angle of the N-shaped is theta, the rotating surface
  • the maximum viewing angle of the mirror can be 360 degrees -2 theta.
  • the viewing angle determined by the rotating multi-faceted mirror in the lidar device may be smaller than the calculated maximum value.
  • the lidar device may use only a portion of each reflective surface of the rotating multi-faceted mirror for scanning.
  • the rotating multi-faceted mirror can be used to irradiate the laser emitted from the laser output unit toward the scan area of the lidar device, and is reflected from an object existing in the scan area. It can be used to receive the laser light to the sensor unit.
  • each reflective surface of the rotating multi-faceted mirror used to irradiate the emitted laser into the scan area of the lidar device will be referred to as an irradiation part.
  • a portion of each reflective surface of the rotating multi-faceted mirror for receiving the laser reflected from the object present on the scan area to the sensor unit will be referred to as a light receiving portion.
  • 26 is a view for explaining an irradiation portion and a light-receiving portion of a multi-faceted rotating mirror according to an exemplary embodiment.
  • a laser emitted from the laser output unit 100 may have a dot-shaped irradiation area and may be incident on a reflective surface of the mirror 700 if it is rotated.
  • the laser emitted from the laser output unit 100 may have an irradiation area in the form of a line or a surface.
  • the irradiation portion 720 in the rotating multi-faceted mirror 700 rotates the point where the emitted laser meets the rotating multi-faceted mirror. If it is, it can be in the form of a line connected in the direction of rotation of the mirror. Accordingly, in this case, the irradiated portion 720 of the multi-faceted rotating mirror 700 may be positioned on each reflective surface in a line shape in a direction perpendicular to the rotating shaft 710 of the multi-faceted rotating mirror 700.
  • the laser irradiated from the irradiated portion 720 of the rotating multi-faceted mirror 700 and irradiated to the scan area 510 of the lidar device 1000 is transferred to the object 500 on the scan area 510.
  • the laser 735 reflected from the object 500 may be reflected in a larger range than the irradiated laser 725. Accordingly, the laser 735 reflected from the object 500 is parallel to the irradiated laser, and may be received by the lidar device 1000 in a wider range.
  • the laser 735 reflected from the object 500 may be transmitted larger than the size of the reflective surface of the rotating mirror 700.
  • the light-receiving part 730 of the rotating multi-faceted mirror 700 is a part for receiving the laser 735 reflected from the object 500 by the sensor unit 300, and is a part of the reflective surface of the rotating multi-faceted mirror 700. It may be a portion of the reflective surface that is smaller than the size.
  • the rotating multi-faceted mirror 700 A portion of the reflective surface of which is reflected so as to be transmitted toward the sensor unit 300 may be the light receiving portion 730. Therefore, the light-receiving part 730 of the multi-faceted rotating mirror 700 may be a part of the reflective surface extending in the direction of rotation of the multi-faceted mirror 700 to be reflected so as to be transmitted toward the sensor unit 300. have.
  • the light-receiving portion 730 of the rotating multi-faceted mirror 700 is transmitted toward the condensing lens among the reflective surfaces. If the part to be reflected is rotated, it may be a part extending in the rotation direction of the mirror 700.
  • the irradiation portion 720 and the light-receiving portion 730 of the rotating facet mirror 700 are described as being spaced apart, but the irradiation portion 720 and the light-receiving portion 730 of the rotating facet mirror 1550 Some of the silver may overlap, and the irradiation part 720 may be included in the light receiving part 730.
  • the steering component 230 may include an optical phased array (OPA) or the like to change the phase of the emitted laser and change the irradiation direction through it, but is not limited thereto.
  • OPA optical phased array
  • the lidar device may include an optical unit that directs a laser beam emitted from a laser output unit to an object.
  • the optical unit may include a beam collimation and steering component (BCSC) for collimating and steering a laser beam emitted from the laser output unit.
  • BCSC beam collimation and steering component
  • the BCSC may be composed of one component or may be composed of a plurality of components.
  • 27 is a diagram for describing an optical unit according to an exemplary embodiment.
  • the optical unit may include a plurality of components.
  • it may include a collimation component 210 and a steering component 230.
  • the collimation component 210 may perform a role of collimating the beam emitted from the laser output unit 100, and the steering component 230 may perform a collimation of the collimation component 210. It can play a role of steering the formed beam. As a result, the laser beam emitted from the optic may be directed in a predetermined direction.
  • the collimation component 210 may be a micro lens or a meta surface.
  • a micro lens array may be disposed on one side of the substrate, or a micro lens array may be disposed on both sides of the substrate.
  • the laser beam may be collimated by a nano pattern formed by a plurality of nano pillars included in the meta surface.
  • the steering component 230 may be a micro lens, a micro prism, or a meta surface.
  • a micro lens array may be disposed on one side of the substrate, or a micro lens array may be disposed on both sides of the substrate.
  • the steering component 230 When the steering component 230 is a micro prism, it can be steered by the angle of the micro prism.
  • the laser beam may be steered by a nano pattern formed by a plurality of nano pillars included in the meta surface.
  • the optical unit when the optical unit includes a plurality of components, correct placement may be required between the plurality of components.
  • the collimation component and the steering component can be correctly arranged through an alignment mark.
  • a printed circuit board (PCB), a VCSEL array, a collimation component, and a steering component can be correctly arranged through an alignment mark.
  • the VCSEL array and the collimation component can be correctly arranged.
  • the collimation component and the steering component can be correctly positioned.
  • FIG. 28 is a diagram for describing an optical unit according to an exemplary embodiment.
  • the optical unit may include one single component.
  • it may include a meta component 270.
  • the meta component 270 may collimate or steer a laser beam emitted from the laser output unit 100.
  • the meta component 270 includes a plurality of meta-surfaces, collimating a laser beam emitted from the laser output unit 100 in one meta-surface, and collimating a laser beam in the other meta-surface. Can be steered. It will be described in detail in FIG. 29 below.
  • the meta component 270 may collimate and steer a laser beam emitted from the laser output unit 100 including one meta surface. It will be described in detail in FIG. 24 below.
  • 29 is a diagram for describing a meta component according to an embodiment.
  • the meta component 270 may include a plurality of meta surfaces 271 and 273.
  • it may include a first meta surface 271 and a second meta surface 273.
  • the first meta surface 271 may be disposed in a direction in which the laser beam is emitted from the laser output unit 100.
  • the first metasurface 271 may include a plurality of nanopillars.
  • the first metasurface may form a nanopattern by a plurality of nanopillars.
  • the first meta-surface 271 may collimate the laser beam emitted from the laser output unit 100 by the formed nanopatterns.
  • the second meta-surface 273 may be disposed in a direction in which the laser beam is output from the first meta-surface 271.
  • the second metasurface 273 may include a plurality of nanopillars.
  • the second meta-surface 273 may form a nano pattern by a plurality of nano-pillars.
  • the second meta-surface 273 may steer the laser beam emitted from the laser output unit 100 by the formed nanopatterns. For example, as shown in FIG. 24, the laser beam can be steered in a specific direction by the increase/decrease rate of the width W of the plurality of nanopillars.
  • the laser beam may be steered in a specific direction by the distance P, the height H, and the number per unit length of the plurality of nanopillars.
  • FIG. 30 is a diagram for describing a meta component according to another embodiment.
  • the meta component 270 may include one meta surface 274.
  • the meta surface 275 may include a plurality of nanopillars on both sides.
  • the meta-surface 275 may include a first nano-pillar set 276 on a first surface and a second nano-pillar set 278 on a second surface.
  • the meta-surface 275 may be steered after collimating the laser beam emitted from the laser output unit 100 by a plurality of nano-pillars forming respective nano patterns on both sides.
  • the first set of nanopillars 276 disposed on one side of the metasurface 275 may form a nanopattern.
  • the laser beam emitted from the laser output unit 100 may be collimated by the nano pattern formed by the first nano-pillar set 276.
  • the second nano-pillar set 278 disposed on the other side of the meta-surface 275 may form a nano pattern.
  • the laser beam passing through the first nanopillar 276 may be steered in a specific direction by the nanopattern formed by the second nanopillar set 278.
  • FIG. 31 is a diagram for describing an SPAD array according to an embodiment.
  • the sensor unit 300 may include a SPAD array 750.
  • 31 illustrates an 8X8 SPAD array, but is not limited thereto, and may be 10X10, 12X12, 24X24, 64X64, or the like.
  • the SPAD array 750 may include a plurality of SPADs 751.
  • the plurality of SPADs 751 may be disposed in a matrix structure, but are not limited thereto, and may be disposed in a circular, elliptical, honeycomb structure, or the like.
  • a laser beam When a laser beam is incident on the SPAD array 750, photons may be detected by an avalanche phenomenon. According to an embodiment, a result of the SPAD array 750 may be accumulated in the form of a histogram.
  • FIG. 32 is a diagram for describing a histogram of SPAD according to an embodiment.
  • the SPAD 751 may detect photons.
  • signals 766 and 767 may be generated.
  • the SPAD 751 After the SPAD 751 detects a photon, it may take a recovery time to return to a state capable of detecting the photon again. If the recovery time has not elapsed after the SPAD 751 detects the photon, even if the photon enters the SPAD 751 at this time, the SPAD 751 cannot detect the photon. Thus, the resolution of the SPAD 751 may be determined by the recovery time.
  • the SPAD 751 may detect photons for a predetermined time after the laser beam is output from the laser output unit. At this time, the SPAD 751 may detect photons during a cycle of a predetermined period. For example, SPAD 751 may detect photons multiple times during a cycle according to the time resolution of SPAD 751. At this time, the time resolution of the SPAD 751 may be determined by the recovery time of the SPAD 751.
  • the SPAD 751 may detect photons reflected from the object and other photons. For example, the SPAD 751 may generate a signal 767 when detecting a photon reflected from an object.
  • the signal 766 may be generated.
  • photons other than photons reflected from the object may include sunlight or a laser beam reflected from a window.
  • the SPAD 751 may detect photons for a predetermined period of time after outputting a laser beam from the laser output unit.
  • the SPAD 751 may detect photons during a first cycle after outputting a first laser beam from the laser output unit. In this case, the SPAD 751 may generate a first detecting signal 761 after detecting a photon.
  • the SPAD 751 may detect photons during a second cycle after outputting a second laser beam from the laser output unit. In this case, the SPAD 751 may generate a second detecting signal 762 after detecting a photon.
  • the SPAD 751 may detect photons during a third cycle after outputting a third laser beam from the laser output unit. In this case, the SPAD 751 may generate a third detecting signal 763 after detecting a photon.
  • the SPAD 751 may detect photons during the Nth cycle after outputting the Nth laser beam from the laser output unit. In this case, the SPAD 751 may generate an Nth detecting signal 764 after detecting a photon.
  • the first detecting signal 761, the second detecting signal 762, the third detecting signal 763, the N-th detecting signal 764, a signal 767 by photons reflected from the object or A signal 766 generated by photons other than the photons reflected from the object may be included.
  • the Nth detecting signal 764 may be a photon detecting signal during the Nth cycle after outputting the Nth laser beam.
  • N may be 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 200, 300, etc.
  • Signals by the SPAD 751 may be accumulated in the form of a histogram.
  • the histogram may have a plurality of histogram bins.
  • the signals generated by the SPAD 751 correspond to each histogram bin and may be accumulated in the form of a histogram.
  • the histogram may be formed by accumulating signals by one SPAD 751 or by accumulating signals by a plurality of SPADs 751.
  • a histogram 765 may be created by accumulating the first detecting signal 761, the second detecting signal 762, and the third detecting signal 763 and the N-th detecting signals 764.
  • the histogram 765 may include a signal due to photons reflected from the object or a signal due to other photons.
  • the signal by photons reflected from the object may be more positive and more regular than signals by other photons.
  • a signal due to photons reflected from the object within a cycle may be regularly present at a specific time.
  • the amount of signal caused by sunlight is small and may exist irregularly.
  • a signal with a large amount of histogram accumulated at a specific time is a signal caused by a photon reflected from the object. Accordingly, a signal having a large amount of accumulation among the accumulated histogram 765 may be extracted as a signal by photons reflected from the object.
  • a signal having the highest value among the histogram 765 may be extracted as a signal by photons reflected from the object.
  • a signal of a certain amount 768 or more of the histogram 765 may be extracted as a signal by photons reflected from the object.
  • distance information of the object may be calculated based on the generation time of the corresponding signal or the reception time of the photon.
  • the signal extracted from the histogram 765 may be a signal at one scan point.
  • one scan point may correspond to one SPAD.
  • signals extracted from a plurality of histograms may be signals at one scan point.
  • one scan point may correspond to a plurality of SPADs.
  • a weight is applied to signals extracted from a plurality of histograms to calculate a signal at one scan point.
  • the weight may be determined by the distance between SPADs.
  • the signal at the first scan point has a weight of 0.8 for the signal by the first SPAD, a weight of 0.6 for the signal by the second SPAD, a weight of 0.4 for the signal by the third SPAD, and a weight of 0.4 for the signal by the third SPAD. It can be calculated by putting a weight of 0.2 on the signal.
  • the effect of accumulating the histogram several times with one histogram accumulation can be obtained. Accordingly, the effect of reducing the scan time and reducing the time to obtain the entire image can be derived.
  • the laser output unit may output a laser beam in an addressable manner.
  • the laser output unit may output a laser beam addressably for each big cell unit.
  • the laser output unit outputs the laser beam of the BIXEL unit in 1 row and 1 column once, then outputs the laser beam of the BIXEL unit in 1 row and 3 columns once, and then outputs the laser beam of the BIXEL unit in 2 rows and 4 columns once. Can be printed.
  • the laser output unit may output the laser beam of the big cell unit in row A and column B N times, and then output the laser beam of the big cell unit in column C and column D M times.
  • the SPAD array may receive a laser beam reflected from the object and returned from among the laser beams output from the corresponding big cell unit.
  • the SPAD unit in the first row and one column corresponding to the first row and one column is reflected on the object. Can be received up to N times.
  • the M big cell units can be operated N times at once.
  • one M big cell unit may be operated M*N times, or M big cell units may be operated 5 times M*N/5 times.
  • the sensor unit 300 may include a SiPM 780.
  • the SiPM 780 may include a plurality of microcells 781 and a plurality of microcell units 782.
  • the microcell may be SPAD.
  • the microcell unit 782 may be an SPAD array that is a set of a plurality of SPADs.
  • the SiPM 780 may include a plurality of microcell units 782.
  • FIG. 33 shows the SiPM 780 in which the microcell units 782 are arranged in a 4X6 matrix, but is not limited thereto, and may be a 10X10, 12X12, 24X24, 64X64 matrix, or the like.
  • the microcell unit 782 may be disposed in a matrix structure, but is not limited thereto, and may be disposed in a circular, elliptical, honeycomb structure, or the like.
  • a laser beam When a laser beam is incident on the SiPM 780, photons may be detected by the avalanche phenomenon. According to an embodiment, a result of the SiPM 780 may be accumulated in the form of a histogram.
  • the histogram by the SPAD 751 may be accumulated as N detecting signals formed by receiving the N-th laser beam of one SPAD 751.
  • the histogram of the SPAD 751 may be accumulated as X*Y detecting signals formed by receiving the Y-numbered laser beam of the X SPADs 751.
  • the histogram by the SiPM 780 may be formed by accumulating signals by one microcell unit 782 or by accumulating signals by a plurality of microcell units 782.
  • one microcell unit 782 may output the first laser beam from the laser output unit and then detect photons reflected from the object to form a histogram.
  • the histogram of the SiPM 780 may be formed by accumulating a signal generated by detecting photons reflected from an object by a plurality of microcells included in one microcell unit 782.
  • the plurality of microcell units 782 may generate a histogram by detecting photons reflected from the object after outputting the first laser beam from the laser output unit.
  • the histogram of the SiPM 780 may be formed by accumulating a signal generated by detecting photons reflected from an object by a plurality of microcells included in the plurality of microcell units 782.
  • one SPAD 751 or a plurality of SPADs 751 may require the N-th laser beam output of the laser output unit.
  • the histogram by the SiPM 780 may require only one laser beam output from one microcell unit 782 or a plurality of microcell units 782.
  • the histogram of the SPAD 751 may take a longer time to accumulate the histogram than the histogram of the SiPM 780.
  • the histogram by the SiPM 780 has the advantage that it is possible to quickly form a histogram with only one laser beam output.
  • the SiPM 780 may detect photons.
  • the microcell unit 782 may detect photons.
  • signals 787 and 788 may be generated.
  • a recovery time may be required before returning to a state capable of detecting the photons again.
  • the recovery time has not elapsed after the microcell unit 782 detects the photons, even if the photons are incident on the microcell unit 782 at this time, the microcell unit 782 cannot detect the photons. Accordingly, the resolution of the microcell unit 782 may be determined by the recovery time.
  • the microcell unit 782 may detect photons for a predetermined time after the laser beam is output from the laser output unit. At this time, the microcell unit 782 may detect photons during a cycle of a predetermined period. For example, the microcell unit 782 may detect a photon multiple times during a cycle according to the time resolution of the microcell unit 782. In this case, the time resolution of the microcell unit 782 may be determined by the recovery time of the microcell unit 782.
  • the microcell unit 782 may detect photons reflected from an object and other photons. For example, when the microcell unit 782 detects a photon reflected from an object, it may generate a signal 787.
  • the microcell unit 782 when the microcell unit 782 detects photons other than the photons reflected from the object, the microcell unit 782 may generate a signal 788.
  • photons other than photons reflected from the object may include sunlight or a laser beam reflected from a window.
  • the microcell unit 782 may detect photons for a predetermined period of time after outputting a laser beam from the laser output unit.
  • the first microcell 783 included in the microcell unit 782 may detect photons during a first cycle after outputting a laser beam from the laser output unit.
  • the first microcell 783 may generate a first detecting signal 791 after detecting a photon.
  • the second microcell 784 included in the microcell unit 782 may detect photons during a first cycle after outputting a laser beam from the laser output unit.
  • the second microcell 784 may generate a first detecting signal 792 after detecting a photon.
  • the third microcell 785 included in the microcell unit 782 may detect photons during a first cycle after outputting a laser beam from the laser output unit.
  • the third microcell 785 may detect a photon and then generate a third detecting signal 793.
  • the Nth microcell 786 included in the microcell unit 782 may detect photons during a first cycle after outputting a laser beam from the laser output unit.
  • the Nth microcell 786 may generate an Nth detecting signal 794 after detecting a photon.
  • the first detecting signal 791, the second detecting signal 792, the third detecting signal 793, the N-th detecting signal 794, a signal 787 by photons reflected from the object or A signal 788 generated by photons other than the photons reflected from the object may be included.
  • the Nth detecting signal 764 may be a photon detecting signal of the Nth microcell included in the microcell unit 782.
  • N may be 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 200, 300, etc.
  • Signals from microcells can be accumulated in the form of a histogram.
  • the histogram can have multiple histogram bins. Signals from the microcells correspond to histogram bins, respectively, and may be accumulated in the form of a histogram.
  • the histogram may be formed by accumulating signals by one microcell unit 782 or by accumulating signals by a plurality of microcell units 782.
  • the histogram 795 may be created by accumulating the first detecting signal 791, the second detecting signal 792, and the third detecting signal 793, the N-th detecting signals 794. .
  • the histogram 795 may include a signal due to photons reflected from the object or a signal due to other photons.
  • the signal by photons reflected from the object may be more positive and more regular than signals by other photons.
  • a signal due to photons reflected from the object within a cycle may be regularly present at a specific time.
  • the amount of signal caused by sunlight is small and may exist irregularly.
  • a signal with a large amount of histogram accumulated at a specific time is a signal caused by a photon reflected from the object. Accordingly, a signal having a large amount of accumulation among the accumulated histogram 795 may be extracted as a signal by photons reflected from the object.
  • a signal having the highest value among the histogram 795 may be extracted as a signal caused by photons reflected from the object.
  • a signal of a certain amount 797 or more of the histogram 795 may be extracted as a signal by photons reflected from the object.
  • distance information of the object may be calculated based on the generation time of the corresponding signal or the reception time of the photon.
  • the laser output unit may output a laser beam in an addressable manner.
  • the laser output unit may output a laser beam addressably for each big cell unit.
  • the laser output unit outputs the laser beam of the BIXEL unit in 1 row and 1 column once, then outputs the laser beam of the BIXEL unit in 1 row and 3 columns once, and then outputs the laser beam of the BIXEL unit in 2 rows and 4 columns once. Can be printed.
  • the laser output unit may output the laser beam of the big cell unit in row A and column B N times, and then output the laser beam of the big cell unit in column C and column D M times.
  • the SiPM may receive a laser beam reflected from the object and returned from among the laser beams output from the corresponding big cell unit.
  • the microcell unit in the 1st row and 1st column corresponding to the 1st row and 1st column is reflected on the object.
  • the beam can be received up to N times.
  • the M big cell units can be operated N times at once.
  • one M big cell unit may be operated M*N times, or M big cell units may be operated 5 times M*N/5 times.
  • Lida can be implemented in several ways. For example, there may be a flash method and a scanning method for lidar.
  • the flash method is a method in which a laser beam is spread to an object by the divergence of the laser beam. Since the flash method collects distance information of an object by illuminating a single laser pulse to the FOV, the resolution of the flash type lidar may be determined by a sensor unit or a receiver.
  • the scanning method is a method of directing a laser beam emitted from the laser output unit in a specific direction. Since the scanning method illuminates the laser beam to the FOV using a scanner or a steering unit, the resolution of the scanning type lidar may be determined by the scanner or the steering unit.
  • the lidar may be implemented in a mixed method of a flash method and a scanning method.
  • the combination of the flash method and the scanning method may be a semi-flash method or a semi-scanning method.
  • a mixed method of a flash method and a scanning method may be a quasi-flash method or a quasi-scanning method.
  • the semi-flash type lidar or the quasi-flash type lidar may mean a semi-flash type lidar rather than a complete flash type.
  • one unit of the laser output unit and one unit of the receiving unit may be a flash type lidar, but a plurality of units of the laser output unit and a plurality of units of the reception unit are gathered, so that the semi-flash type is not a complete flash type lidar. It can be is.
  • the laser beam output from the laser output unit of the semi-flash type lidar or the quasi flash type lidar may pass through the steering unit, it may be a semi-flash type lidar instead of a complete flash type lidar.
  • the semi-flash type lidar or the quasi-flash type lidar may overcome the disadvantages of the flash type lidar.
  • a flash type radar may be vulnerable to interference between laser beams, a strong flash is required to detect an object, and there is a problem that the detection range cannot be limited.
  • the semi-flash type lidar or the quasi-flash type lidar allows laser beams to pass through a steering unit to overcome interference between laser beams, and control each laser output unit, thereby controlling the detection range. You can, and you may not need a strong flash.
  • 35 is a diagram for describing a semi-flash lidar according to an embodiment.
  • a semi-flash lidar 800 includes a laser output unit 810, a beam collimation & steering component (BCSC) 820, a scanning unit 830, and a receiving unit 840. I can.
  • BCSC beam collimation & steering component
  • the semi-flash lidar 800 may include a laser output unit 810.
  • the laser output unit 810 may include a big cell array.
  • the laser output unit 810 may include a big cell array in which units including a plurality of big cell emitters are gathered.
  • the semi-flash lidar 800 may include a BCSC 820.
  • BCSC 820 may include a collimation component 210 and a steering component 230.
  • the laser beam output from the laser output unit 810 is collimated by the collimation component 210 of the BCSC 820, and the collimated laser beam is the steering component 230 of the BCSC 820. ) Can be steered.
  • a laser beam output from a first bixel unit included in the laser output unit 810 may be collimated by a first collimation component and steered in a first direction by a first steering component.
  • the laser beam output from the second big cell unit included in the laser output unit 810 may be collimated by the second collimation component and steered in the second direction by the second steering component.
  • the big cell units included in the laser output unit 810 may be steered in different directions. Therefore, unlike the flash method by diffusion of a single pulse, the laser beam of the laser output unit of the semi-flash method LiDAR can be steered in a specific direction by the BCSC. Therefore, the laser beam output from the laser output unit of the semi-flash type lidar can be directional by BCSC.
  • the semi-flash lidar 800 may include a scanning unit 830.
  • the scanning unit 830 may include an optical unit 200.
  • the scanning unit 830 may include a mirror that reflects the laser beam.
  • the scanning unit 830 may include a planar mirror, a multifaceted mirror, a resonant mirror, a MEMS mirror, and a galvano mirror.
  • the scanning unit 830 may include a multifaceted mirror rotating 360 degrees along one axis and a noding mirror repeatedly driven in a preset range along one axis.
  • the semi-flash type radar may include a scanning unit. Therefore, unlike a flash method in which an entire image is acquired at once by spreading a single pulse, a semi-flash radar can scan an image of an object by a scanning unit.
  • the object may be randomly scanned by laser output from the laser output unit of the semi-flash type lidar. Therefore, the semi-flash type radar can intensively scan only a desired region of interest among the entire FOV.
  • the semi-flash lidar 800 may include a receiver 840.
  • the receiving unit 840 may include a sensor unit 300.
  • the receiving unit 840 may be a SPAD array 750.
  • the receiving unit 840 may be a SiPM 780.
  • the receiving unit 850 may include various sensor elements.
  • the receiving unit 840 may include a PN photodiode, a phototransistor, a PIN photodiode, an APD, SPAD, SiPM, TDC, CMOS, or CCD, but is not limited thereto.
  • the receiving unit 840 may stack a histogram.
  • the receiving unit 840 may detect a light-receiving point of a laser beam reflected from the object 850 and received by using a histogram.
  • the receiving unit 840 may include one or more optical elements.
  • the receiving unit 840 may include an aperture, a micro lens, a converging lens, or a diffuser, but is not limited thereto.
  • the receiving unit 840 may include one or more optical filters.
  • the receiver 840 may receive the laser reflected from the object through an optical filter.
  • the receiving unit 840 may include a band pass filter, a dichroic filter, a guided-mode resonance filter, a polarizer, and a wedge filter, but is not limited thereto.
  • the semi-flash type lidar 800 may have a constant optical path between components.
  • light output from the laser output unit 810 may be incident on the scanning unit 830 through the BCSC 820.
  • light incident on the scanning unit 830 may be reflected and incident on the object 850.
  • light incident on the object 850 may be reflected and again incident on the scanning unit 830.
  • light incident on the scanning unit 830 may be reflected and received by the receiving unit 840.
  • a lens for increasing transmission and reception efficiency may be additionally inserted into the above optical path.
  • 36 is a diagram for describing a configuration of a semi-flash lidar according to an embodiment.
  • a semi-flash lidar 800 may include a laser output unit 810, a scanning unit 830, and a receiving unit 840.
  • the laser output unit 810 may include a big cell array 811. Although only the big cell array 811 in one column is shown in FIG. 36, the big cell array 811 is not limited thereto, and the big cell array 811 may have an N X M matrix structure.
  • the big cell array 811 may include a plurality of big cell units 812.
  • the big cell unit 812 may include a plurality of big cell emitters.
  • the big cell array 811 may include 25 big cell units 812.
  • the 25 big cell units 812 may be arranged in one row, but the present invention is not limited thereto.
  • the big cell unit 812 may have a diverging angle.
  • the big cell unit 812 may have a horizontal diffusion angle 813 and a vertical diffusion angle 814.
  • the big cell unit 812 may have a horizontal diffusion angle 813 of 1.2 degrees and a vertical diffusion angle 814 of 1.2 degrees, but the present invention is not limited thereto.
  • the scanning unit 830 may receive a laser beam output from the laser output unit 810. In this case, the scanning unit 830 may reflect the laser beam toward the object. Also, the scanning unit 830 may receive a laser beam reflected from an object. In this case, the scanning unit 830 may transmit the laser beam reflected from the object to the receiving unit 840.
  • the area reflecting the laser beam toward the object and the area receiving the laser beam reflected from the object may be the same or different.
  • an area reflecting a laser beam toward the object and an area receiving the laser beam reflected from the object may be in the same reflective surface.
  • the areas may be divided up and down or left and right within the same reflective surface.
  • an area reflecting a laser beam toward the object and an area receiving the laser beam reflected from the object may be different reflective surfaces.
  • an area reflecting a laser beam toward an object may be a first reflective surface of the scanning unit 830, and an area receiving a laser beam reflected from the object may be a second reflective surface of the scanning unit 830 .
  • the scanning unit 830 may reflect the 2D laser beam output from the laser output unit 810 toward the object.
  • the lidar device may scan the object in 3D due to rotation or scanning of the scanning unit 830.
  • the receiving unit 840 may include a SPAD array 841. Although only one column of SPAD array 841 is shown in FIG. 36, the present invention is not limited thereto, and the SPAD array 841 may have an N X M matrix structure.
  • the SPAD array 841 may include a plurality of SPAD units 842.
  • the SPAD unit 842 may include a plurality of SPAD pixels 847.
  • the SPAD unit 842 may include a 12 X 12 SPAD pixel 847.
  • the SPAD pixel 847 may mean one SPAD element, but is not limited thereto.
  • the SPAD array 841 may include 25 SPAD units 842.
  • the 25 SPAD units 842 may be arranged in one row, but the present invention is not limited thereto.
  • the arrangement of the SPAD unit 842 may correspond to the arrangement of the big cell unit 812.
  • the SPAD unit 842 may have a FOV capable of receiving light.
  • the SPAD unit 842 may have a horizontal FOV 843 and a vertical FOV 844.
  • the SPAD unit 842 may have a horizontal FOV 843 of 1.2 degrees and a vertical FOV 844 of 1.2 degrees.
  • the FOV of the SPAD unit 842 may be proportional to the number of SPAD pixels 847 included in the SPAD unit 842.
  • the FOV of each SPAD pixel 847 included in the SPAD unit 842 may be determined by the FOV of the SPAD unit 842.
  • the SPAD unit 842 when the horizontal FOV 845 and the vertical FOV 846 of the individual SPAD pixel 847 is 0.1 degrees, if the SPAD unit 842 includes the SPAD pixel 847 of NXM, the SPAD unit 842 The horizontal FOV 843 may be 0.1*N, and the vertical FOV 844 may be 0.1*M.
  • the SPAD unit 842 when the horizontal FOV 843 and the vertical FOV 844 of the SPAD unit 842 are 1.2 degrees, and the SPAD unit 842 includes a 12 X 12 SPAD pixel 847, individual SPAD pixels
  • the horizontal FOV 845 and the vertical FOV 846 of 847 may be 0.1 degrees (1.2/12).
  • the receiving unit 840 may include a SiPM array 841. Although only one column of SiPM array 841 is shown in FIG. 36, the present invention is not limited thereto, and the SiPM array 841 may have an N X M matrix structure.
  • the SiPM array 841 may include a plurality of microcell units 842.
  • the microcell unit 842 may include a plurality of microcells 847.
  • the microcell unit 842 may include a 12 X 12 microcell 847.
  • the SiPM array 841 may include 25 microcell units 842.
  • the 25 microcell units 842 may be arranged in one row, but the present invention is not limited thereto.
  • the arrangement of the microcell units 842 may correspond to the arrangement of the big cell units 812.
  • the microcell unit 842 may have a FOV capable of receiving light.
  • the microcell unit 842 may have a horizontal FOV 843 and a vertical FOV 844.
  • the microcell unit 842 may have a horizontal FOV 843 of 1.2 degrees and a vertical FOV 844 of 1.2 degrees.
  • the FOV of the microcell unit 842 may be proportional to the number of microcells included in the microcell unit 842.
  • the FOV of the individual microcells 847 included in the microcell unit 842 may be determined by the FOV of the microcell unit 842.
  • the horizontal FOV 845 and the vertical FOV 846 of the individual microcells 847 are 0.1 degrees
  • the microcell unit 842 includes the microcells 847 of the NXM, the microcell unit 842 )
  • the horizontal FOV 843 may be 0.1*N
  • the vertical FOV 844 may be 0.1*M.
  • the individual The horizontal FOV 845 and the vertical FOV 846 of the microcell 847 may be 0.1 degrees (1.2/12).
  • one big cell unit 812 and a plurality of SPAD units or microcell units 842 may correspond.
  • the laser beam output from the BIXEL unit 812 in one row and one column is reflected by the scanning unit 830 and the object 850, so that the SPAD unit or microcell unit 842 in the first row and the first row and the second row is reflected. ) Can be received.
  • a plurality of big cell units 812 and one SPAD unit or microcell unit 842 may correspond.
  • the laser beam output from the BIXEL unit 812 in one row and one column may be reflected by the scanning unit 830 and the object 850 and received by the SPAD unit or the microcell unit 842 in one row and one column. have.
  • the big cell unit 812 of the laser output unit 810 and the SPAD unit or the microcell unit 842 of the receiving unit 840 may correspond to each other.
  • the horizontal diffusion angle and the vertical diffusion angle of the big cell unit 812 may be the same as the horizontal FOV 845 and the vertical FOV 846 of the SPAD unit or microcell unit 842.
  • the laser beam output from the BIXEL unit 812 in one row and one column may be reflected by the scanning unit 830 and the object 850 and received by the SPAD unit or the microcell unit 842 in one row and one column. have.
  • the laser beam output from the BIXEL unit 812 in N rows and M columns is reflected by the scanning unit 830 and the object 850 to be received by the SPAD unit or microcell unit 842 in the N rows and M columns. I can.
  • the laser beam output from the big cell unit 812 in N rows and M columns and reflected by the scanning unit 830 and the object 850 is received by the SPAD unit or microcell unit 842 in the N rows and M columns, and is a lidar.
  • Device 800 may have resolution by means of a SPAD unit or microcell unit 842.
  • the FOV to which the big cell unit 812 is irradiated is divided into the NXM area to determine the distance information of the object. I can.
  • one big cell unit 812 and a plurality of SPAD units or microcell units 842 may correspond.
  • the laser beam output from the BIXEL unit 812 in one row and one column is reflected by the scanning unit 830 and the object 850, so that the SPAD unit or microcell unit 842 in the first row and the first row and the second row is reflected. ) Can be received.
  • a plurality of big cell units 812 and one SPAD unit or microcell unit 842 may correspond.
  • the laser beam output from the BIXEL unit 812 in one row and one column may be reflected by the scanning unit 830 and the object 850 and received by the SPAD unit or the microcell unit 842 in one row and one column. have.
  • the plurality of big cell units 812 included in the laser output unit 810 may operate according to a certain sequence or may operate randomly.
  • the SPAD unit or the microcell unit 842 of the receiving unit 840 may also operate in response to the operation of the big cell unit 812.
  • a third row big cell unit may operate. Then, the fifth big cell unit may operate, and then the seventh big cell unit may operate.
  • the third row SPAD unit or microcell unit 842 may operate. Then, the fifth SPAD unit or microcell unit 842 may operate, and then the seventh SPAD unit or microcell unit 842 may operate.
  • the big cell unit of the big cell array 811 may operate randomly.
  • the SPAD unit or the microcell unit 842 of the receiver existing at a position corresponding to the position of the randomly operated big cell unit 812 may operate.
  • FIG. 37 is a diagram for describing a semi-flash lidar according to another embodiment.
  • a semi-flash lidar 900 may include a laser output unit 910, a BCSC 920, and a reception unit 940.
  • the semi-flash lidar 900 may include a laser output unit 910. Since the description of the laser output unit 910 may be duplicated with the laser output unit 810 of FIG. 35, a detailed description will be omitted.
  • the semi-flash lidar 900 may include a BCSC 920.
  • the description of the BCSC 920 may be duplicated with the BCSC 820 of FIG. 35, and a detailed description thereof will be omitted.
  • the semi-flash lidar 900 may include a receiver 940. Since the description of the receiving unit 940 may be duplicated with the receiving unit 840 of FIG. 35, a detailed description will be omitted.
  • the semi-flash type lidar 900 may have a constant optical path between components.
  • light output from the laser output unit 910 may be incident on the object 950 through the BCSC 920.
  • light incident on the object 950 may be reflected and received by the receiving unit 940.
  • a lens for increasing transmission and reception efficiency may be additionally inserted into the above optical path.
  • the semi-flash lidar 900 of FIG. 37 may not include a scanning unit.
  • the scanning role of the scanning unit may be performed by the laser output unit 910 and the BCSC 920.
  • the laser output unit 910 may include an addressable big cell array and may partially output a laser beam to an ROI by an addressable operation.
  • the BCSC 920 may include a collimation component and a steering component to provide a specific direction to the laser beam to irradiate the laser beam to a desired region of interest.
  • the optical path of the semi-flash lidar 900 of FIG. 37 may be simplified. By simplifying the optical path, light loss during light reception can be minimized, and the possibility of occurrence of crosstalk can be reduced.
  • 38 is a diagram for describing a configuration of a semi-flash lidar according to another embodiment.
  • a semi-flash lidar 900 may include a laser output unit 910 and a reception unit 940.
  • the laser output unit 910 may include a big cell array 911.
  • the big cell array 99110 may have an N X M matrix structure.
  • the big cell array 911 may include a plurality of big cell units 914.
  • the big cell unit 914 may include a plurality of big cell emitters.
  • the big cell array 811 may include 1250 big cell units 914 having a 50 X 25 matrix structure, but is not limited thereto.
  • the big cell unit 914 may have a diverging angle.
  • the big cell unit 914 may have a horizontal diffusion angle 915 and a vertical diffusion angle 916.
  • the big cell unit 914 may have a horizontal diffusion angle 813 of 1.2 degrees and a vertical diffusion angle 814 of 1.2 degrees, but are not limited thereto.
  • the receiving unit 940 may include a SPAD array 941.
  • the SPAD array 841 may have an N X M matrix structure.
  • the SPAD array 941 may include a plurality of SPAD units 944.
  • the SPAD unit 944 may include a plurality of SPAD pixels 947.
  • the SPAD unit 944 may include a 12 X 12 SPAD pixel 947.
  • the SPAD array 941 may include 1250 SPAD units 944 in a 50 X 25 matrix structure.
  • the arrangement of the SPAD unit 944 may correspond to the arrangement of the big cell unit 914.
  • the SPAD unit 944 may have a FOV capable of receiving light.
  • the SPAD unit 944 may have a horizontal FOV 945 and a vertical FOV 946.
  • the SPAD unit 944 may have a horizontal FOV 945 of 1.2 degrees and a vertical FOV 946 of 1.2 degrees.
  • the FOV of the SPAD unit 944 may be proportional to the number of SPAD pixels 947 included in the SPAD unit 944.
  • the FOV of the individual SPAD pixel 947 included in the SPAD unit 944 may be determined by the FOV of the SPAD unit 944.
  • the SPAD unit 944 includes the SPAD pixel 947 of NXM, the SPAD unit 944
  • the horizontal FOV 945 can be 0.1*N, and the vertical FOV 946 can be 0.1*M.
  • the horizontal FOV 945 and the vertical FOV 946 of the SPAD unit 944 is 1.2 degrees
  • the SPAD unit 944 includes a 12 X 12 SPAD pixel 947
  • the individual SPAD pixel may be 0.1 degrees (1.2/12).
  • the receiving unit 840 may include a SiPM array 941.
  • the SiPM array 841 may have an N X M matrix structure.
  • the SiPM array 941 may include a plurality of microcell units 944.
  • the microcell unit 944 may include a plurality of microcells 947.
  • the microcell unit 944 may include a 12 X 12 microcell 947.
  • the SiPM array 941 may include 1250 microcell units 944 of a 50 X 25 matrix structure.
  • the arrangement of the microcell units 944 may correspond to the arrangement of the big cell units 914.
  • the microcell unit 944 may have a FOV capable of receiving light.
  • the microcell unit 944 may have a horizontal FOV 945 and a vertical FOV 946.
  • the microcell unit 944 may have a horizontal FOV 945 of 1.2 degrees and a vertical FOV 946 of 1.2 degrees.
  • the FOV of the microcell unit 944 may be proportional to the number of microcells 947 included in the microcell unit 944.
  • the FOV of the individual microcells 947 included in the microcell unit 944 may be determined by the FOV of the microcell unit 944.
  • the horizontal FOV 948 and the vertical FOV 949 of the individual microcells 947 are 0.1 degrees
  • the microcell unit 944 includes the microcells 947 of NXM, the microcell unit 944 )
  • the horizontal FOV 945 may be 0.1*N
  • the vertical FOV 946 may be 0.1*M.
  • the individual The horizontal FOV 948 and the vertical FOV 949 of the microcell 947 may be 0.1 degrees (1.2/12).
  • the big cell unit 914 of the laser output unit 910 and the SPAD unit or the microcell unit 944 of the receiving unit 940 may correspond to each other.
  • the horizontal diffusion angle and the vertical diffusion angle of the big cell unit 914 may be the same as the horizontal FOV 945 and the vertical FOV 946 of the SPAD unit or microcell unit 944.
  • a laser beam output from the big cell unit 914 in one row and one column may be reflected by the object 850 and received by the SPAD unit or the microcell unit 944 in one row and one column.
  • a laser beam output from the big cell unit 914 in N rows and M columns may be reflected by the object 850 and received by the SPAD unit or microcell unit 944 in the N rows and M columns.
  • the laser beam output from the big cell unit 914 in N rows and M columns and reflected by the object 850 is received by the SPAD unit or microcell unit 944 in the N rows and M columns, and the lidar device 900 is SPAD. It may have resolution by unit or microcell unit 944.
  • the FOV to which the big cell unit 914 is irradiated is divided into the NXM area to determine the distance information of the object. I can.
  • one big cell unit 914 and a plurality of SPAD units or microcell units 944 may correspond.
  • a laser beam output from the bixel unit 914 in one row and one column may be reflected by the object 850 and received by the SPAD unit or microcell unit 944 in the first row and the first row and the second row. .
  • a plurality of big cell units 914 and one SPAD unit or microcell unit 944 may correspond.
  • a laser beam output from the big cell unit 914 in one row and one column may be reflected by the object 850 and received by the SPAD unit or the microcell unit 944 in one row and one column.
  • the plurality of big cell units 914 included in the laser output unit 910 may operate according to a certain sequence or may operate randomly.
  • the SPAD unit or the microcell unit 944 of the receiving unit 940 may also operate in response to the operation of the big cell unit 914.
  • the bigcell units of the 1st row and 1st column of the bigcell array 911 may operate. Then, the big cell units in the 1st row and 5th columns may operate, and then the bigcell units in the 1st row and 7th columns may operate.
  • the SPAD unit or the microcell unit 944 in the first row and the first column of the receiving unit 940 operates, the SPAD unit or the microcell unit 944 in the first row and the third column may operate. Then, the SPAD unit or microcell unit 944 in the first row and five columns may operate, and then the SPAD unit or the microcell unit 944 in the first row and seven columns may operate.
  • the big cell unit of the big cell array 911 may operate randomly.
  • the SPAD unit or the microcell unit 944 of the receiver existing at a position corresponding to the position of the randomly operated big cell unit 914 may operate.
  • 39 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • the laser output unit 6000 may include at least some of a VCSEL array 6010, a collimation component 6020, and a steering component 6030, but is not limited thereto.
  • the VCSEL array 6010 may include at least one or more VCSEL emitters, and may include at least one or more VCSEL units composed of at least one or more VCSEL emitters.
  • the VCSEL array 6010 may output a laser.
  • a laser may be output from a VCSEL emitter included in the VCSEL array 6010, and a laser may be output from a VCSEL unit including at least one VCSEL emitter, but is not limited thereto.
  • the collimation component 6020 may collimate the laser output from the VCSEL array 6010.
  • the collimation component 6020 may collimate a laser output from a VCSEL emitter included in the VCSEL array 6010, but is not limited thereto, and a VCSEL unit included in the VCSEL array 6010 It is also possible to collimate the laser output from.
  • the divergence angle of the laser output from the VCSEL array 6010 may be reduced.
  • the laser output from the VCSEL emitter included in the VCSEL array 6010 is collimated from the collimation component 6020, and accordingly, the laser output from the VCSEL emitter included in the VCSEL array 6010
  • the divergence angle may be reduced to 1.2 degrees or less, but is not limited thereto.
  • the laser output from the VCSEL unit included in the VCSEL array 6010 is collimated from the collimation component 6020, and accordingly, output from the VCSEL unit included in the VCSEL array 6010
  • the divergence angle of the laser may be reduced to 1.2 degrees or less, but is not limited thereto.
  • the reduced divergence angles are 0 degrees, 0.1 degrees, 0.2 degrees, 0.3 degrees, 0.4 degrees, 0.5 degrees, 0.6 degrees, 0.7 degrees, 0.8 degrees, 0.9 degrees, 1.0 degrees, 1.2 degrees, 1.3 degrees, 1.4 degrees, and 1.5 degrees.
  • Various angles such as degrees, 1.6 degrees, 1.7 degrees, 1.8 degrees, 1.9 degrees, and 2.0 degrees may be used, but are not limited thereto.
  • collimation component 6020 may be implemented as an array.
  • the collimation component 6020 may include at least one or more collimation elements, and may be implemented in a form in which the at least one or more collimation elements are arranged in an array, but is not limited thereto.
  • the collimation component 6020 may include at least one or more collimation units including at least one or more collimation elements, and the at least one or more collimation units are arranged in an array. It may be, but is not limited thereto.
  • the collimation component 6020 may be formed to correspond to the VCSEL array 6010.
  • the collimation component 6020 may be arranged in an array to correspond to the VCSEL array 6010, but is not limited thereto.
  • the collimation component 6020 may include a collimation element corresponding to a VCSEL emitter included in the VCSEL array 6010, but is not limited thereto.
  • the collimation component 6020 may include a collimation unit corresponding to a VCSEL unit included in the VCSEL array 6010, but is not limited thereto.
  • the collimation component 6020 may include a collimation element corresponding to a VCSEL unit included in the VCSEL array 6010, but is not limited thereto.
  • the steering component 6030 may steer the laser collimated from the collimation component 6020.
  • the steering component 6030 is output from the VCSEL emitter and the collimation component
  • the laser collimated from 6020 may be steered at a predetermined angle, but is not limited thereto.
  • the steering component 6030 is a VCSEL unit including the VCSEL emitter.
  • the lasers output from and collimated from the collimation component 6020 may be steered at a predetermined angle, but the present invention is not limited thereto.
  • the steering component 6030 is output from the VCSEL unit and
  • the laser collimated from the alignment component 6020 may be steered at a predetermined angle, but is not limited thereto.
  • the predetermined angle to be steered is 0 degrees, 1 degree, 2 degrees, 3 degrees, 4 degrees, 5 degrees, 6 degrees, 7 degrees, 8 degrees, 9 degrees, 10 degrees, 20 degrees, 30 degrees, 40 degrees, Various angles such as 50 degrees, 60 degrees, 70 degrees, 80 degrees, 90 degrees, 100 degrees, 110 degrees, 120 degrees, 130 degrees, 140 degrees, 150 degrees, 160 degrees, 170 degrees, 180 degrees, etc. Not limited.
  • the steering component 6030 may be implemented as an array.
  • the steering component 6030 may include at least one or more steering elements, and the at least one or more steering elements may be arranged in an array, but is not limited thereto.
  • the steering component 6030 may include at least one or more steering units including at least one or more steering elements, and may be implemented in a form in which the at least one or more steering units are arranged in an array. It is not limited to this.
  • the steering component 6030 may be formed to correspond to the VCSEL array 6010.
  • the steering component 6030 may be arranged in an array to correspond to the VCSEL array 6010, but is not limited thereto.
  • the steering component 6030 may include a steering element corresponding to a VCSEL emitter included in the VCSEL array 6010, but is not limited thereto.
  • the steering component 6030 may include a steering unit corresponding to a VCSEL unit included in the VCSEL array 6010, but is not limited thereto.
  • the steering component 6030 may include a steering element corresponding to a VCSEL unit included in the VCSEL array 6010, but is not limited thereto.
  • the steering component 6030 may be formed corresponding to the collimation component 6020.
  • the steering component 6030 may be arranged in an array to correspond to the collimation component 6020, but is not limited thereto.
  • the steering component 6030 may include a steering element corresponding to the collimation element, but is not limited thereto.
  • the steering component 6030 may include a steering element corresponding to the collimation unit, but is not limited thereto.
  • the steering component 6030 may include a steering unit corresponding to the collimation unit, but is not limited thereto.
  • the steering component 6030 may steer the laser output from the VCSEL array 6010 in various directions.
  • the steering component 6030 may steer the first laser 6001 in the first direction, the second laser 6002 may be steered in the second direction, and the third laser 6003 may be You can steer in the third direction.
  • the first laser 6001 may be a laser output from the upper right portion of the VCSEL array 6010, and the second laser 6002 is the VCSEL array 6010 ), and the third laser 6003 may be a laser output from a lower right portion of the VCSEL array 6010, but is not limited thereto.
  • the first direction in which the first laser 6001 is steered may mean a direction in the upper right of the field of view (FOV), and the second laser 6002 is steered in the first direction.
  • the second direction may mean a right direction of the field of view (FOV)
  • the third direction in which the third laser 6003 is steered may mean a direction to the lower right of the field of view (FOV), but is not limited thereto. .
  • the laser output unit 6000 may be formed so that the position at which the laser is output and the direction in which the laser is steered correspond.
  • the laser output unit 6000 when the laser output unit 6000 is formed to correspond to the position of the laser to be output and the direction in which the laser is steered, the laser output unit 6000 is formed with an extension line of the laser to be steered. It can have a focus area.
  • the focus area may be used as an origin for distance measurement.
  • FIG. 40 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • the laser output unit 6050 may include at least some of a VCSEL array 6060, a collimation component 6070, and a steering component 6080, but is not limited thereto.
  • the steering component 6080 may steer the laser output from the VCSEL array 6060 in various directions.
  • the steering component 6080 may steer the first laser 6051 in the first direction, the second laser 6052 may be steered in the second direction, and the third laser 6053 may be You can steer in the third direction.
  • the first laser 6051 may be a laser output from an upper portion of the VCSEL array 6060
  • the second laser 6052 is the VCSEL array 6060
  • the laser may be output from the central portion of the
  • the third laser 6053 may be a laser output from the lower portion of the VCSEL array 6060, but is not limited thereto.
  • the first direction in which the first laser 6051 is steered may mean a downward direction of the field of view (FOV), and the second direction in which the second laser 6052 is steered.
  • the second direction may refer to a center direction of the viewing angle (FOV)
  • the third direction in which the third laser (6053) is steered may refer to an upward direction of the viewing angle (FOV), but is not limited thereto.
  • the laser output unit 6050 may be formed such that a position at which the laser is output and a direction in which the laser is steered are opposite.
  • the laser output unit 6050 when the laser output unit 6050 is formed so that the position of the laser to be output and the direction in which the laser is steered are opposite to each other, the laser output unit 6050 is a focus area where the steering laser is collected. Can have.
  • the focus area may be used as an origin for distance measurement.
  • 41 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • the laser output unit 6100 may include at least some of a VCSEL array 6110, a collimation component 6120, and a steering component 6130, but is not limited thereto.
  • the VCSEL array 6110 may operate only a part of at least one or more VCSEL emitters included in the VCSEL array 6110.
  • the VCSEL array 6110 may operate according to a predetermined group, and more specifically, the VCSEL emitters included in the VCSEL array 6110 may operate individually, including at least one VCSEL emitter.
  • the VCSEl unit may operate as one group, but is not limited thereto.
  • the VCSEL array 6110 may operate at different times for each predetermined group, and more specifically, the second VCSEL emitter after the first VCSEL emitter among the VCSEL emitters included in the VCSEL array 6110 operates.
  • the second VCSEL unit may be operated, or after the first VCSEL unit among the VCSEL units included in the VCSEL array 6110 operates, but is not limited thereto.
  • a first laser 6101 may be output at a first time point
  • a second laser 6102 may be output at a second time point
  • the first laser Reference numeral 6101 may be a laser output from a first VCSEL emitter or a first VCSEL unit
  • the second laser 6102 may be a laser output from a second VCSEL emitter or a second VCSEL unit, but is not limited thereto. .
  • the steering component 6130 may steer the laser output from the VCSEL array 6110 in various directions.
  • the steering component 6130 may steer the first laser 6101 in the first direction and the second laser 6102 in the second direction.
  • the first laser 6101 may be a laser output from a first group positioned at the upper right portion of the VCSEL array 6110
  • the second laser 6102 is
  • the VCSEL array 6110 may be a laser output from the second group positioned at the lower right portion of the VCSEL array 6110, but is not limited thereto.
  • first and second groups may mean one VCSEL emitter, and may mean a VCSEL unit including at least one VCSEL emitter, but are not limited thereto.
  • the timing at which the first laser 6101 and the second laser 6102 are output may be different.
  • the first laser 6101 may be output from the first group at a first time point
  • the second laser 6102 may be output from the second group at a second time point. It doesn't work.
  • the irradiation direction of the laser output from the laser output unit 6100 may change over time.
  • the first laser 6101 output at the first viewpoint may be irradiated in the upper right direction of the viewing angle
  • the second laser 6102 output at the second viewpoint may be irradiated in the lower right direction of the viewing angle. have.
  • designing the laser output unit 6100 so that the irradiation direction changes over time can extend the scannable range without mechanical driving, which is a lidar device in which the laser output unit 6100 is disposed.
  • the laser output array may be described as a VCSEL array
  • the collimation component may be described as a micro lens, but the present invention is not limited thereto, and various laser output arrays and collimation components may be used.
  • FIG. 42 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 6200 may include a VCSEL array 6210 and a collimation component 6220, but is not limited thereto.
  • the VCSEL array 6210 may include at least one or more VCSEL emitters.
  • the VCSEL array 6210 may include a first VCSEL emitter 6211.
  • the collimation component 6220 may include a micro lens array, and the micro lens array may include at least one micro lens element, and at least one micro lens element. It may include a micro lens unit.
  • the collimation component 6220 may collimate the laser output from the VCSEL array 6210.
  • the overlapping description will be omitted.
  • the collimation component 6220 may be formed to correspond to the VCSEL array 6210.
  • the micro lens element included in the collimation component 6220 may be formed to correspond to the VCSEL emitter included in the VCSEL array 6210, but is not limited thereto.
  • the VCSEL array 6210 and the collimation component 6220 may be arranged in a predetermined relationship.
  • the first VCSEL emitter 6211 included in the VCSEL array 6210 may be formed to have a first diameter 6230, and in this case, the first diameter ( 6230 denotes the size of the first VCSEL emitter 6211, and may be for expressing the size of the first VCSEL emitter 6211, such as the length and diameter of one side, in one dimension.
  • the first VCSEL emitter 6211 and the second VCSEL emitter 6212 included in the VCSEL array 6210 may be arranged to have a first interval 6250.
  • the first interval 6250 may be for expressing a distance between the first VCSEL emitter 6211 and the second VCSEL emitter 6212 in one dimension.
  • the first microlens element 6221 included in the collimation component 6220 may be formed to have a second diameter 6240, and in this case, 2
  • the diameter 6240 refers to the size of the first microlens element 6221, and may be for expressing the size of the first microlens element 6221, such as the length and diameter of one side, in one dimension.
  • the first micro-lens element 6221 corresponds to the first VCSEL emitter 6211 in order to collimate the laser output from the first VCSEL emitter 6211. Can be placed.
  • the second diameter 6240 of the first microlens element 6221 is the first of the first VCSEL emitter 6211 It may be larger than the diameter 6230.
  • the first diameter 6230 of the first VCSEL emitter 6211 may be 14 ⁇ m
  • the second diameter 6240 of the first micro lens element 6221 may be 140 ⁇ m, but is not limited thereto. Does not.
  • the second diameter 6240 of the first microlens element 6221 may correspond to the first gap 6250.
  • the first gap 6250 may be 140 ⁇ m
  • the second diameter 6240 may be 140 ⁇ m, but is not limited thereto.
  • the first interval 6250 may be larger than the first diameter 6230 of the first VCSEL emitter 6211.
  • the first diameter 6230 of the first VCSEL emitter 6211 may be 14 ⁇ m
  • the first gap 6250 may be 140 ⁇ m, but is not limited thereto.
  • the first interval 6250 is the first diameter 6230 of the first VCSEL emitter 6211 It can be larger than a certain amount.
  • the first gap 6250 may be 5 times or more larger than the first diameter 6230 of the first VCSEL emitter 6211, but is not limited thereto.
  • FIG. 43 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 6300 may include a VCSEL array 6310 and a collimation component 6320, but is not limited thereto.
  • the VCSEL array 6310 may include at least one or more VCSEL emitters.
  • the VCSEL array 6310 includes a first VCSEL emitter 6311, a second VCSEL emitter 6312, and a third It may include a VCSEL emitter 6313.
  • the collimation component 6320 may include a micro lens array, and the micro lens array may include at least one micro lens element, and at least one micro lens element. It may include a micro lens unit.
  • the collimation component 6320 may collimate a laser output from the VCSEL array 6310.
  • the above-described contents may be applied, the overlapping description will be omitted.
  • the collimation component 6320 may be formed to correspond to the VCSEL array 6210.
  • the micro lens element included in the collimation component 6320 may be formed to correspond to the VCSEL unit included in the VCSEL array 6310, but is not limited thereto.
  • the VCSEL array 6310 and the collimation component 6320 may be arranged in a predetermined relationship.
  • the first VCSEL emitter 6311 included in the VCSEL array 6310 may be formed to have a first diameter 6330, and in this case, the first diameter ( 6330 denotes the size of the first VCSEL emitter 6311, and may be for expressing the size of the first VCSEL emitter 6311 in one dimension, such as the length and diameter of one side.
  • the first VCSEL unit may be formed to have a second diameter 6350, in which case, the second diameter 6350 means the size of the first VCSEL unit, and the first VCSEL unit It may be for expressing the size of 1 VCSEL unit in one dimension.
  • the first microlens element 6321 included in the collimation component 6320 may be formed to have a third diameter 6240.
  • the 3 The diameter 6340 means the size of the first microlens element 6321, and may be for expressing the size of the first microlens element 6321 in one dimension, such as the length and diameter of one side.
  • the first microlens element 6321 may be disposed to correspond to the first VCSEL unit in order to collimate the laser output from the first VCSEL unit.
  • the third diameter 6340 of the first microlens element 6321 is the second diameter 6350 of the first VCSEL unit.
  • the second diameter 6350 of the first VCSEL unit may be 1.3 mm
  • the third diameter 6340 of the first micro lens element 6321 may be 1.4 mm, but is not limited thereto. .
  • 44 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 6400 may include a VCSEL array 6410 and a collimation component 6420, but is not limited thereto.
  • the VCSEL array 6410 may include at least one or more VCSEL emitters.
  • the VCSEL array 6410 includes a first VCSEL emitter 6411, a second VCSEL emitter 6412, and a third It may include a VCSEL emitter (6413).
  • the VCSEL array 6410 may include a VCSEL unit including at least one VCSEL emitter, for example, the first VCSEL emitter 6411, the second VCSEL emitter 6412, and the third It may include a first VCSEL unit including a VCSEL emitter 6413.
  • the collimation component 6420 may include a micro lens array, and the micro lens array may include at least one or more micro lens elements.
  • the collimation component ( The 6420 may include a first micro lens element 6421, a second micro lens element 6422, and a third micro lens element 6423.
  • the collimation component 6420 may include a micro lens unit including at least one micro lens element, for example, the first micro lens element 6421 and the second micro lens element 6422 And a first micro lens unit including a third micro lens element 6423.
  • the collimation component 6420 may collimate a laser output from the VCSEL array 6410.
  • the collimation component 6420 may collimate a laser output from the VCSEL array 6410.
  • a laser output from the VCSEL array 6410 and collimated through the collimation component 6420 may have a divergence angle greater than or equal to a predetermined angle.
  • a laser output from the VCSEL array 6410 and collimated through the collimation component 6420 may have a divergence angle of 1.2 degrees, but is not limited thereto.
  • At least one laser output from at least one or more VCSEL emitters included in the VCSEL unit may form one beam profile.
  • the first, second, and third lasers output from the first, second, and third VCSEL emitters 6411, 6412, 6413 are the first, second, and third microlens elements 6421, 6422 and 6423) may be collimated, respectively, and one beam profile may be formed, but is not limited thereto.
  • At least two or more lasers output from at least two or more VCSEL emitters included in the VCSEL unit may at least partially overlap, and one beam profile may be formed based on the overlapped regions.
  • the first, second, and third lasers may be collimated to have a predetermined divergence angle through the first, second, and third microlens elements 6421, 6422 and 6423, and the divergence At least part of the overlap may be made due to the angle, and one beam profile may be formed based on the overlapped area, but the present invention is not limited thereto.
  • 45 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 6500 may include a VCSEL array 6510, a collimation component 6520, and a steering component 6530, but is not limited thereto.
  • the VCSEL array 6510 may include at least one or more VCSEL emitters.
  • the VCSEL array 6510 includes a first VCSEL emitter 6511, a second VCSEL emitter 6512, and a third It may include a VCSEL emitter (6513).
  • the VCSEL array 6510 may include a VCSEL unit including at least one VCSEL emitter.
  • the VCSEL array 6510 includes a first VCSEL unit including a first VCSEL emitter 6511, a second VCSEL unit including a second VCSEL emitter 6512, and a third VCSEL emitter 6513. It may include a third VCSEL unit.
  • the collimation component 6520 may include a micro lens array, and the micro lens array may include at least one or more micro lens elements.
  • the collimation component 6520 may include a first micro lens element 6251, a second micro lens element 6252, and a third micro lens element 6523.
  • the collimation component 6520 may include a micro lens unit including at least one micro lens element.
  • the collimation component 6520 includes a first micro lens unit including the first micro lens element 6251, a second micro lens unit including the second micro lens element 6252, and the second micro lens unit 6520.
  • a third micro lens unit including 3 micro lens elements 6523 may be included.
  • the steering component 6530 may include a prism array, and the prism array may include at least one prism element.
  • the steering component 6530 may include a first prism element 6531, a second prism element 6532, and a third prism element 6533.
  • the collimation component 6520 may collimate the laser output from the VCSEL array 6510. However, since the above-described contents may be applied, the overlapping description will be omitted.
  • the steering component 6530 may be output from the VCSEL array 6510 to steer the collimated laser through the collimation component 6520.
  • the overlapping description will be omitted.
  • the steering component 6530 may steer a laser output from a VCSEL emitter included in the VCSEL array 6510.
  • the first prism element 6531 included in the steering component 6530 may steer the laser output from the first VCSEL emitter, but is not limited thereto.
  • the steering component 6530 may steer the laser output from the VCSEL unit included in the VCSEL array 6510.
  • the first prism element 6531 included in the steering component 6530 may steer the laser output from the first VCSEL unit including the first VCSEL emitter 6511, but is not limited thereto. Does not.
  • the steering component 6530 may steer a laser group including at least one laser output from the VCSEL unit included in the VCSEL array 6510 at the same angle.
  • the first prism element 6531 included in the steering component 6530 includes a first laser group 6541 output from a first VCSEL unit including the first VCSEL emitter 6511. Steering can be performed at an angle, but is not limited thereto.
  • the steering component 6530 may steer at least two or more laser groups output from at least two or more VCSEL units included in the VCSEL array 6510 at different angles.
  • the first prism element 6531 steers the first laser group 641 output from the first VCSEL unit including the first VCSEL emitter 6511 at a first angle
  • the second prism steers the second laser group 6542 output from the second VCSEL unit including the second VCSEL emitter 6512 at a second angle
  • the third prism element 6533 is the third
  • the third laser group 6543 output from the third VCSEL unit including the VCSEL emitter 6513 may be steered at a third angle, but is not limited thereto.
  • the VCSEL array 6510, the collimation component 6520, and the steering component 6530 may be arranged to have a predetermined relationship.
  • the first VCSEL unit including the first VCSEL emitter 6511 included in the VCSEL array 6510 may be formed to have a first diameter 6550,
  • the first diameter 6550 refers to the size of the first VCSEL unit, and may be for expressing the size of the first VCSEL unit, such as the length and diameter of one side, in one dimension.
  • the first micro lens unit including the first micro lens element 6251 included in the collimation component 6520 is formed to have a second diameter 6560
  • the second diameter 6560 means the size of the first microlens unit, and is for expressing the size of the first microlens unit, such as the length and diameter of one side, in one dimension. I can.
  • the first prism element 6531 included in the steering component 6530 may be formed to have a third diameter 6570, and in this case, the third The diameter 6570 refers to the size of the first prism element 6531, and may be for expressing the size of the first prism element 6531, such as the length and diameter of one side, in one dimension.
  • the first prism element 6531 may be disposed to correspond to the first VCSEL unit in order to steer the first laser group output from the first VCSEL unit.
  • the third diameter 6570 of the first prism element 6531 is larger than the first diameter 6550 of the first VCSEL unit.
  • the first diameter 6550 of the first VCSEL unit may be 1.3 mm
  • the third diameter 6570 of the first prism element 6531 may be 1.4 mm, but is not limited thereto.
  • the first prism element 6531 is output from the first VCSEL unit to steer the first laser group collimated through the first microlens unit. It may be disposed to correspond to the first micro lens unit.
  • the third diameter 6570 of the first prism element 6531 is greater than the second diameter 6560 of the first microlens unit.
  • the second diameter 6560 of the first micro lens unit may be 1.4 mm
  • the third diameter 6570 of the first prism element 6531 may be 1.41 mm, but is not limited thereto. .
  • 46 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 6600 may include a VCSEL array 6610, a collimation component 6620, and a steering component 6630, but is not limited thereto.
  • the VCSEL array 6610 may include at least one or more VCSEL emitters.
  • the VCSEL array 6610 includes a first VCSEL emitter 6611, a second VCSEL emitter 6612, and a third VCSEL emitter. It may include a VCSEL emitter (6613).
  • the VCSEL array 6610 may include a VCSEL unit including at least one VCSEL emitter.
  • the VCSEL array 6610 includes a first VCSEL unit including a first VCSEL emitter 6611, a second VCSEL unit including a second VCSEL emitter 6612, and a third VCSEL emitter 6613. It may include a third VCSEL unit.
  • the collimation component 6620 may include a micro lens array, and the micro lens array may include at least one or more micro lens elements.
  • the collimation component 6620 may include a first micro lens element 6621, a second micro lens element 6622, and a third micro lens element 6623.
  • the collimation component 6620 may include a micro lens unit including at least one micro lens element.
  • the collimation component 6620 includes a first micro lens unit including the first micro lens element 6621, a second micro lens unit including the second micro lens element 6622, and the second A third micro lens unit including 3 micro lens elements 6623 may be included.
  • the steering component 6630 may include a prism array, and the prism array may include at least one prism element.
  • the steering component 6630 may include a first prism element 6633, a second prism element 6632, and a third prism element 6633.
  • the steering component 6630 may include a prism unit including at least one prism element.
  • the steering component 6630 may include a first prism unit including the first prism element 6631, a second prism unit including the second prism element 6632, and the third prism element 6633. It may include a third prism unit including ).
  • the collimation component 6620 may collimate the laser output from the VCSEL array 6610. However, since the above-described contents may be applied, the overlapping description will be omitted.
  • the steering component 6630 may be output from the VCSEL array 6610 to steer the collimated laser through the collimation component 6620.
  • the overlapping description will be omitted.
  • the steering component 6530 may steer a laser output from a VCSEL emitter included in the VCSEL array 6610.
  • the first prism element 663 included in the steering component 6630 may steer the laser output from the first VCSEL emitter, but is not limited thereto.
  • the steering component 6630 may steer the laser output from the VCSEL unit included in the VCSEL array 6610.
  • the first prism unit including the first prism element (6631) included in the steering component (6630) is a laser output from the first VCSEL unit including the first VCSEL emitter (6611) It can be steered, but is not limited thereto.
  • the steering component 6630 may steer a laser group including at least one laser output from the VCSEL unit included in the VCSEL array 6610 at the same angle.
  • the first prism unit including the first prism element (6631) included in the steering component (6630) is the first VCSEL unit that includes the first VCSEL emitter (6611). 1
  • the laser group 6641 may be steered at the first angle, but is not limited thereto.
  • the steering component 6630 may steer at least two or more laser groups output from at least two or more VCSEL units included in the VCSEL array 6610 at different angles.
  • the first prism unit including the first prism element (6631) includes the first laser group (6641) output from the first VCSEL unit including the first VCSEL emitter (6611).
  • the second prism unit including the second prism element (6632) is a second laser group (6642) output from the second VCSEL unit including the second VCSEL emitter (6612) Steering at a second angle
  • the third prism unit including the third prism element (6633) is a third laser group (6643) output from the third VCSEL unit including the third VCSEL emitter (6613) ) Can be steered at a third angle, but is not limited thereto.
  • the VCSEL array 6610, the collimation component 6620, and the steering component 6630 may be arranged to have a predetermined relationship.
  • the first VCSEL emitter 6611 included in the VCSEL array 6610 may be formed to have a first diameter 6650, and in this case, the first diameter ( 6650 denotes the size of the first VCSEL emitter 6611, and may be for expressing the size of the first VCSEL unit, such as the length and diameter of one side, in one dimension.
  • the first microlens element 6621 included in the collimation component 6620 may be formed to have a second diameter 6660, in which case, The second diameter 6660 means the size of the first microlens element 6621, and may be for expressing the size of the first microlens element 6621 in one dimension, such as a length and a diameter of one side. have.
  • the first prism element 663 included in the steering component 6630 may be formed to have a third diameter 6670, and in this case, the third The diameter 6670 refers to the size of the first prism element 6631, and may be for expressing the size of the first prism element 663, such as the length and diameter of one side, in one dimension.
  • the first prism element (6631) is arranged to correspond to the first VCSEL emitter (6611) to steer the laser output from the first VCSEL emitter (6611). I can.
  • the third diameter 6670 of the first prism element 6631 is the first diameter 6670 of the first VCSEL emitter 6611. Can be greater than ).
  • the first diameter 6650 of the first VCSEL emitter 6611 may be 14 ⁇ m
  • the third diameter 6670 of the first prism element 6670 may be 140 ⁇ m, but is not limited thereto. .
  • the first prism element 663 is output from the first VCSEL emitter 6611 to steer the collimated laser through the first microlens element 6261.
  • it may be disposed to correspond to the first micro lens element 6261.
  • the third diameter 6670 of the first prism element 663 is the second diameter 6670 of the first microlens element 6261 ( 6660).
  • the second diameter 6660 of the first microlens element 6621 may be 140 ⁇ m
  • the third diameter 6670 of the first prism element 663 may be 141 ⁇ m, but is not limited thereto. Does not.
  • 47 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • the laser output unit 6700 may include a VCSEL array 6730.
  • the VCSEL array 6730 may include at least one or more VCSEL emitters, for example, the VCSEL array 6730 may include a first VCSEL emitter 6711 and a second VCSEL emitter 6712. However, it is not limited thereto.
  • the VCSEL array 6730 may include a VCSEL unit including at least one VCSEL emitter.
  • the VCSEL array 6730 includes a first VCSEL unit 6721 including the first VCSEL emitter 6711 and a second VCSEL unit 6722 including the second VCSEL emitter 6712 It can be, but is not limited thereto.
  • At least one or more VCSEL emitters included in the VCSEL array 6730 may operate independently and output lasers independently.
  • the first VCSEL emitter 6711 and the second VCSEL emitter 6712 included in the VCSEL array 6730 may operate independently of each other to independently output a laser, but are not limited thereto.
  • At least one or more VCSEL units included in the VCSEL array 6730 may operate independently and output lasers independently.
  • the first VCSEL unit 6721 and the second VCSEL unit 6722 included in the VCSEL array 6730 may operate independently of each other to independently output a laser, but are not limited thereto.
  • individual VCSEL emitters included in the VCSEL unit are connected to each other to operate, so that lasers can be output at the same time.
  • at least one VCSEL emitter excluding the first VCSEL emitter 6711 and the first VCSEL emitter 6711 included in the first VCSEL unit 6721 are connected to each other to operate, and simultaneously output a laser. It can be, but is not limited thereto.
  • lasers output from individual VCSEL emitters included in the VCSEL unit may form a laser group.
  • lasers output from at least one VCSEL emitter excluding the first VCSEL emitter 6711 and the first VCSEL emitter 6711 included in the first VCSEL unit 6721 form a first laser group
  • the laser output from at least one VCSEL emitter excluding the second VCSEL emitter 6712 and the second VCSEL emitter 6712 included in the second VCSEL unit 6721 forms a second laser group. It can be, but is not limited thereto.
  • the spacing between the VCSEL units included in the VCSEL array 6730 is the spacing between the VCSEL emitters included in the VCSEL unit.
  • the distance between the first VCSEL unit 6721 and the second VCSEL unit 6722 may be larger than the distance between adjacent VCSEL emitters included in the first VCSEL unit 6721, but limited thereto. It doesn't work.
  • the VCSEL array 6730, the collimation component, and the steering component may have a predetermined arrangement relationship, and this will be described in detail below. I will do it.
  • FIG. 48 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 6800 may include a VCSEL array 6810 and a collimation component 6820, but is not limited thereto.
  • the VCSEL array 6810 may include at least one VCSEL emitter.
  • the VCSEL array 6810 may include a first VCSEL emitter 6811, a second VCSEL emitter 6812, and a third VCSEL emitter 6813.
  • the VCSEL array 6810 may include a VCSEL unit including at least one VCSEL emitter.
  • the VCSEL array 6810 includes a first VCSEL unit including the first VCSEL emitter 6811 and the second VCSEL emitter 6812 and a second VCSEL including the third VCSEL emitter 6813 May contain units.
  • the collimation component 6820 may include a micro lens array, and the micro lens array may include at least one or more micro lens elements.
  • the collimation component 6820 may include a first micro lens element 6821, a second micro lens element 6822 and a third micro lens element 6822.
  • the collimation component 6820 may include a micro lens unit including at least one micro lens element.
  • the collimation component 6820 includes a first micro lens unit and a third micro lens element 6822 including the first micro lens element 6821 and the second micro lens element 6822 It may include a second micro lens unit.
  • the first VCSEL emitter 6811 and the second VCSEL emitter 6812 may be disposed to have a first gap 6830, in which case, the first gap 6830 May be for expressing a distance between the first VCSEL emitter 6811 and the second VCSEL emitter 6812 in one dimension.
  • the first VCSEL unit may be formed to have a first diameter 6840, in which case, the first diameter 6840 means the size of the first VCSEL unit. , May be for expressing the size of the first VCSEL unit, such as the length and diameter of one side, in one dimension.
  • the first VCSEL unit and the second VCSEL unit may be arranged to have a second interval 6850, in which case, the second interval 6850 is the first VCSEL unit. It may be for expressing the distance between the and the second VCSEL unit in one dimension.
  • the first micro lens unit may be formed to have a second diameter 6860, in which case, the second diameter 6860 means the size of the first micro lens unit.
  • the size of the first microlens unit such as the length and diameter of one side, may be expressed in one dimension.
  • the first microlens unit and the second microlens unit may be disposed to have a third spacing 6870, wherein the third spacing 6870 is the first
  • the distance between the micro lens unit and the second micro lens unit may be expressed in one dimension.
  • the second interval 6850 may be greater than or equal to the first interval 6830.
  • the second interval 6850 may be greater than or equal to the third interval 6870.
  • the third interval 6870 may be greater than or equal to the first interval 6830.
  • the second interval 6850 may be smaller than or equal to the first diameter 6840.
  • the third interval 6870 may be smaller than or equal to the second diameter 6860.
  • 49 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 6900 may include a VCSEL array 6910, a collimation component 6920, and a steering component 6930, but is not limited thereto.
  • the VCSEL array 6910 may include a first VCSEL emitter 6911, a second VCSEL emitter 6912 and a third VCSEL emitter 6913, and the first and second VCSEL emitters 6911,
  • the first VCSEL unit including 6912) and the second VCSEL unit including the third VCSEL emitter 6913 may be included, and the above-described information may be applied, so a redundant description will be omitted.
  • the collimation component 6920 may include a first micro lens element 6921, a second micro lens element 6922, and a third micro lens element 6923, and the first and second micro lenses
  • a first micro lens unit including elements 6921 and 6922, and a second micro lens unit including the third micro lens element 6923 may be included. The description will be omitted.
  • the steering component 6930 may include a prism array, and the prism array may include at least one prism element.
  • the steering component 6930 may include a first prism element 6931 and a second prism element 6932.
  • a first gap 6930 that is a gap between the first VCSEL emitter 6911 and the second VCSEL emitter 6912, a first diameter 6940 that is a diameter of the first VCSEL unit, and the first VCSEL unit
  • a second gap 6950 that is a gap between the second VCSEL unit, a second diameter 6960 that is a diameter of the first micro lens unit, and a third gap that is a gap between the first and second micro lens units ( 6970) may be applied to the above description, and therefore, a redundant description will be omitted.
  • the first prism element 6931 may be formed to have a third diameter 6980, in which case, the third diameter 6980 means the size of the first prism element 6931. , It may be for expressing the size of the first prism element 6931 in one dimension, such as the length and diameter of one side.
  • first prism element 6931 and the second prism element 6932 may be disposed to have a fourth gap 6990, in which case, the fourth gap 6990 is the first prism element It may be for expressing the distance between the second prism element 6931 and the second prism element 6932 in one dimension.
  • the second interval 6950 may be greater than or equal to the fourth interval 6990.
  • the third interval 6970 may be greater than or equal to the fourth interval 6990.
  • the fourth interval 6990 may be smaller than or equal to the first diameter 6940.
  • the fourth interval 6990 may be smaller than or equal to the second diameter 6960.
  • the fourth interval 6990 may be smaller than or equal to the third diameter 6980.
  • the first diameter 6940 may be smaller than or equal to the second diameter 6960, and the second diameter 6960 is the third It may be less than or equal to diameter 6980.
  • distances between the prism elements may be different from each other, but are not limited thereto.
  • 50 is a diagram for describing a steering component according to an exemplary embodiment.
  • the steering component 7000 may include a prism.
  • the prism has a first angle ( ) May be formed, but is not limited thereto.
  • the prism may acquire the laser 7001 and steer the acquired laser 7001 at a predetermined angle.
  • the laser 7001 obtained from the prism has a second angle ( ).
  • the second angle ( ) Is the first angle ( ) Can be the same.
  • the laser 7001 is at a third angle ( ) Can be steered.
  • the third angle ( ) Can be determined by the law of refraction.
  • the third angle ( ) May be determined by Equation 1 below.
  • 51 is a diagram for describing a steering component according to an exemplary embodiment.
  • the steering component 7010 may include a prism.
  • the prism has a first angle ( ) May be formed, but is not limited thereto.
  • the prism may acquire the laser 70101 and steer the acquired laser 70101 at a predetermined angle.
  • the laser 7011 has a constant divergence angle ( ), but is not limited thereto.
  • the laser 7011 obtained from the prism may be incident on one surface of the prism at a second angle, and the divergence angle ( ) By at least a part of the laser 7011 is at a third angle ( ) May be incident on one surface of the prism, and at least another part of the laser 7011 may have a fourth angle ( ) May be incident on one surface of the prism, but is not limited thereto.
  • At least a portion of the laser 7011 is at a fifth angle from the normal to one surface of the prism ( ) Can be steered.
  • the fifth angle ( ) Can be determined by the law of refraction.
  • the fifth angle ( ) May be determined by Equation 3 below.
  • the steering laser is irradiated to the outside, and the first angle ( ) May satisfy Equation 4 below.
  • FIG. 52 is a diagram for describing a steering component according to an exemplary embodiment.
  • the steering component 7020 may include a prism.
  • the prism may acquire the laser 7021 and steer the acquired laser 7021 at a predetermined angle.
  • the laser 7021 when the laser 7021 passes through the interface, at least a portion of the laser 7021 may be reflected.
  • the degree of reflection of the S-polarized portion of the laser 7021 may be determined according to Equation 5
  • the degree of reflection of the P-polarized portion of the laser 7021 may be determined according to Equation 6.
  • n may mean n2/n1.
  • the laser 7021 steered through the prism may pass through at least two interfaces.
  • the first interface may mean an interface incident on the prism from air, and the angle incident on the prism is a first angle ( ) And the refractive index of the prism is n1, the degree of reflection at the first interface may be determined by Equations 7 and 8.
  • the second interface may mean an interface incident on the air from the prism, and the angle incident on the air is a second angle ( ), and when the refractive index of the prism is n1, the degree of reflection at the second interface may be determined by Equations 9 and 10.
  • a third angle ( ) May be determined by Equation 11 when the refractive index of the prism is n1.
  • 52(b) shows the third angle ( It is a graph showing the relationship between) and reflectance.
  • the prism according to an embodiment includes the third angle (When) is 15 degrees or less, the reflectance may be less than 5%, but is not limited thereto.
  • the third angle ( ) May be 15 degrees or less when the reflectance is less than 5%, and may be 25 degrees or less when the reflectance is less than 10%, but is not limited thereto.
  • 53 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 7100 may include a VCSEL array 7110, a collimation component 7120, and a steering component 7130, but is not limited thereto.
  • the VCSEL array 7110 may include at least one or more VCSEL emitters.
  • the VCSEL array 7110 includes a first VCSEL emitter 7111, a second VCSEL emitter 7112, and a third It may include a VCSEL emitter (7113).
  • the VCSEL array 7110 may include a VCSEL unit including at least one VCSEL emitter.
  • the VCSEL array 7110 includes a first VCSEL unit including a first VCSEL emitter 7111, a second VCSEL unit including a second VCSEL emitter 7112, and a third VCSEL emitter 7113 It may include a third VCSEL unit.
  • the collimation component 7120 may include a micro lens array, and the micro lens array may include at least one or more micro lens elements.
  • the collimation component 7120 may include a first micro lens element 7121, a second micro lens element 7122, and a third micro lens element 7123.
  • the collimation component 7120 may include a micro lens unit including at least one micro lens element.
  • the collimation component 7120 includes a first micro lens unit including the first micro lens element 7121, a second micro lens unit including the second micro lens element 7122, and the second micro lens unit 7120.
  • a third micro lens unit including 3 micro lens elements 7123 may be included.
  • the steering component 7130 may include a prism array, and the prism array may include at least one prism element.
  • the steering component 7130 may include a first prism element 7131, a second prism element 7132, and a third prism element 7133.
  • the collimation component 7120 may collimate the laser output from the VCSEL array 7110.
  • the collimation component 7120 may collimate the laser output from the VCSEL array 7110.
  • the steering component 7130 may be output from the VCSEL array 7110 and steer the collimated laser through the collimation component 7120.
  • the above-described contents may be applied, the overlapping description will be omitted.
  • each VCSEL emitter included in the VCSEL array 7110 may be connected to an independent electrical contact in order to be independently controlled.
  • the first VCSEL emitter 7111 may be connected to a first contact 7141 and a second contact 7151
  • the second VCSEL emitter 7112 may be a third contact 7142 and a fourth contact.
  • the third VCSEL emitter 7113 may be connected to the fifth contact 7143 and the sixth contact 7153, but is not limited thereto.
  • first, third, and fifth contacts 7141,7142,7143 may mean a P-contact
  • second, fourth, and sixth contacts 7151,7152,7153 are N-contacts. It may mean, but is not limited thereto.
  • each VCSEL emitter included in the VCSEL array 7110 may operate at different times.
  • the first VCSEL emitter 7111 may be operated through the first contact 7141 and the second contact 7151 at a first time point to output a first laser
  • the The second VCSEL emitter 7112 may be operated through the third contact 7142 and the fourth contact 7152 to output a second laser.
  • the third VCSEL emitter 7113 may be operated through the contact 7153 to output a third laser, but is not limited thereto.
  • FIG. 54 is a diagram for describing a configuration of a laser output unit according to an exemplary embodiment.
  • the laser output unit 7200 may include a VCSEL array 7210, a collimation component 7220, and a steering component 7230, but is not limited thereto.
  • the VCSEL array 7210 may include at least one or more VCSEL emitters.
  • the VCSEL array 7210 includes a first VCSEL emitter 7211, a second VCSEL emitter 7212, and a third It may include a VCSEL emitter (7213).
  • the VCSEL array 7210 may include a VCSEL unit including at least one VCSEL emitter.
  • the VCSEL array 7210 includes a first VCSEL unit including a first VCSEL emitter 7211, a second VCSEL unit including a second VCSEL emitter 7212, and a third VCSEL emitter 7213. It may include a third VCSEL unit.
  • the collimation component 7220 may include a micro lens array, and the micro lens array may include at least one or more micro lens elements.
  • the collimation component 7220 may include a first micro lens element 7201, a second micro lens element 7222 and a third micro lens element 7223.
  • the collimation component 7220 may include a micro lens unit including at least one micro lens element.
  • the collimation component 7220 includes a first microlens unit including the first microlens element 7221, a second microlens unit including the second microlens element 7222, and the second microlens unit 7220.
  • a third micro lens unit including 3 micro lens elements 7223 may be included.
  • the steering component 7230 may include a prism array, and the prism array may include at least one prism element.
  • the steering component 7230 may include a first prism element 7231, a second prism element 7232, and a third prism element 7233.
  • the collimation component 7220 may collimate the laser output from the VCSEL array 7210.
  • the collimation component 7220 may collimate the laser output from the VCSEL array 7210.
  • the steering component 7230 may be output from the VCSEL array 7210 and steer the collimated laser through the collimation component 7220.
  • the above-described contents may be applied, the overlapping description will be omitted.
  • each VCSEL unit included in the VCSEL array 7210 may be connected to an independent electrical contact in order to be independently controlled.
  • the first VCSEL emitter 7211 may be connected to a first contact 7241 and a second contact 7251
  • the second VCSEL emitter 7212 may be a third contact 7242 and a fourth contact.
  • the third VCSEL emitter 7213 may be connected to the fifth contact 723 and the sixth contact 7253, but is not limited thereto.
  • each VCSEL unit included in the VCSEL array 7210 may share electrical contact between VCSEL emitters included in the VCSEL unit in order to be controlled for each VCSEL unit.
  • each VCSEL emitter included in the first VCSEL unit may share the first contact 7241 and the second contact 7251, and each VCSEL emitter included in the second VCSEL unit They may share the third contact 7242 and the fourth contact 7252, and each VCSEL emitter included in the third VCSEL unit includes the fifth contact 723 and the sixth contact 7253 Can be shared, but is not limited thereto.
  • each VCSEL emitter included in the VCSEL array 7210 may operate at different times.
  • the first VCSEL emitter 7211 may be operated through the first contact 7241 and the second contact 7231 at a first time point to output a first laser.
  • the second VCSEL emitter 7212 may be operated through the third contact 7242 and the fourth contact 7252 to output a second laser.
  • the third VCSEL emitter 7213 may be operated through the contact 7253 to output a third laser, but is not limited thereto.
  • each VCSEL unit included in the VCSEL array 7210 may operate at different times.
  • the first VCSEL unit may be operated through the first contact 7241 and the second contact 7251 at a first time point to output a first laser group, and at a second time point, the third The second VCSEL unit may be operated through the contact 7242 and the fourth contact 7252 to output a second laser group, and at a third time point, the fifth contact 723 and the sixth contact 7253 ), the third VCSEL unit may be operated to output a third laser group, but is not limited thereto.
  • 55 is a diagram for describing a laser output unit according to an exemplary embodiment.
  • the laser output unit 8000 may include a laser output element array 8010, a first prism array 8020, and a third prism array 8030. , Is not limited thereto.
  • FIG. 55 may be a view of the laser output unit 8000 according to an exemplary embodiment viewed along at least one axial direction, but is not limited thereto.
  • the laser output element array 8010 includes a first laser output element 8011, a second laser output element 8012, a third laser output element 8013, a fourth laser output element 8014, and a fifth laser output element. (8015) and a sixth laser output device (8016) may be included.
  • the first to sixth laser output devices 8011 to 8016 may include at least one VCSEL and a VCSEL unit including at least one VCSEL, but for convenience of description, it will be described as a laser output device. do.
  • first to sixth laser output devices 8011 to 8016 may respectively output a first laser, a second laser, a third laser, a fourth laser, a fifth laser, and a sixth laser.
  • first to sixth laser output devices 8011 to 8016 may each include optics for collimation, but may be omitted and described for convenience of description.
  • the first prism array 8020 includes a first prism element 8021, a second prism element 8022, a third prism element 8023, a fourth prism element 8024, and a fifth prism element 8025. And a sixth prism element 8026.
  • first to sixth prism elements 8021 to 8026 may mean a prism unit including at least one prism element, but will be described as a prism element for convenience of description.
  • first to sixth prism elements 8021 to 8026 may steer lasers output from the first to sixth laser output elements 8011 to 8016.
  • the first prism element 8021 may steer the first laser output from the first laser output element 8011 in a first direction
  • the second prism element 8022 may be 2
  • the second laser output from the laser output element 8012 can be steered in a second direction
  • the third prism element 8023 is configured to control the third laser output from the third laser output element 8013.
  • Steering may be performed in a third direction
  • the fourth prism element 8024 may steer the fourth laser output from the fourth laser output element 8014 in a fourth direction
  • the fifth prism element The 8025 can steer the fifth laser output from the fifth laser output element 8015 in a fifth direction
  • the sixth prism element 8026 is output from the sixth laser output element 8016.
  • the sixth laser may be steered in the sixth direction, but is not limited thereto.
  • the first to sixth directions may be different directions along at least one axial direction.
  • the first to sixth directions may be different directions in a range of -10 degrees to +10 degrees along the y-axis direction, but are not limited thereto.
  • the second prism array 8030 may include a seventh prism element 8031.
  • the seventh prism element 8031 may mean a prism unit including at least one prism element, but will be described as a prism element for convenience of description.
  • the seventh prism element 8031 may steer the laser output from the first to sixth laser output elements 8011 to 8016.
  • the seventh prism element 8031 is output from the first laser output element 8011 and the first laser steered in the first direction through the first prism element 8021 is transmitted to the seventh. It can be steered in a direction, and the second laser output from the second laser output element 8012 and steered in the second direction through the second prism element 8022 can be steered in an eighth direction,
  • the third laser output from the third laser output element 8013 and steered in the third direction through the third prism element 8023 may be steered in a ninth direction, and the fourth laser output element (
  • the fourth laser output from 8014 and steered in the fourth direction through the fourth prism element 8024 may be steered in a tenth direction, and output from the fifth laser output element 8015
  • the fifth laser steered in the fifth direction can be steered in the eleventh direction through the 5 prism element 8025, and the sixth prism element 8026 is output from the sixth laser output element 8016.
  • the sixth laser steered in the sixth direction may be ste
  • the seventh to twelfth directions may be the same direction according to the shape of the seventh prism element 8031, but are not limited thereto.
  • first to sixth lasers may be steered through different portions of the seventh prism element 8031.
  • the first laser is output from the first laser output element 8011, it is steered in the first direction through the first prism element 8021 to be the first of the seventh prism element 8031. It may be steered in the seventh direction through the portion.
  • the second laser is output from the second laser output element 8012, it is steered in the second direction through the second prism element 8022 so that the seventh prism element 8031 is It may be steered in the eighth direction through the second part.
  • the third laser is output from the third laser output element 8013, it is steered in the third direction through the third prism element 8023, and the seventh prism element 8031 is It may be steered in the ninth direction through the third part.
  • the fourth laser is output from the fourth laser output element 8014, it is steered in the fourth direction through the fourth prism element 8024, and the seventh prism element 8031 is It may be steered in the tenth direction through the fourth part.
  • the fifth laser is output from the fifth laser output element 8015, it is steered in the fifth direction through the fifth prism element 8025, and the seventh prism element 8031 is It may be steered in the eleventh direction through the fifth part.
  • the sixth laser is output from the sixth laser output element 8016, it is steered in the sixth direction through the sixth prism element 8026, and the seventh prism element 8031 is It may be steered in the twelfth direction through the sixth part.
  • inclinations of the first to sixth portions of the seventh prism element 8031 may be the same, but are not limited thereto.
  • first to sixth prism elements 8021 to 8026 are configured to reduce the distance between the first to sixth portions of the seventh prism element 8031 for steering the first to sixth lasers. Can be designed.
  • first to sixth prism elements 8021 to 8026 have a tilt of the first prism element 8023 so that the first to sixth lasers are steered in a focused shape.
  • the inclination of the first to sixth prism elements 8021 to 8026 may be designed to steer each of the first to sixth lasers in the center direction, but is not limited thereto. .
  • first to sixth lasers may be irradiated in different directions by selectively passing through the first to seventh prism elements 8021,8022,8023,8024,8025,8026,8031, respectively.
  • the first laser is output from the first laser output device 8011, it is steered in the first direction through the first prism element 8021, and through the seventh prism element 8031. Steering in the seventh direction may be irradiated in the thirteenth direction.
  • the second laser is output from the second laser output element 8012, it is steered in the second direction through the second prism element 8022, and the seventh prism element 8031 Through the steering in the eighth direction may be irradiated in the 14th direction.
  • the third laser is output from the third laser output element 8013, it is steered in the third direction through the third prism element 8023, and the seventh prism element 8031 Through the steering in the ninth direction may be irradiated in the fifteenth direction.
  • the fourth laser is output from the fourth laser output element 8014, it is steered in the fourth direction through the fourth prism element 8024, and the seventh prism element 8031 Through the steering in the tenth direction may be irradiated in the sixteenth direction.
  • the fifth laser is output from the fifth laser output element 8015, it is steered in the fifth direction through the fifth prism element 8025, and the seventh prism element 8031 Through the steering in the eleventh direction may be irradiated in the seventeenth direction.
  • the sixth laser is output from the sixth laser output element 8016, it is steered in the sixth direction through the sixth prism element 8026, and the seventh prism element 8031 Through the steering in the 12th direction may be irradiated in the 18th direction.
  • the thirteenth to eighteenth directions may be different directions, but are not limited thereto.
  • 56 is a diagram for describing a laser output unit according to an exemplary embodiment.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

La présente invention concerne un dispositif lidar dans lequel la distance entre le centre d'une première position et le centre d'une troisième position est inférieure à la distance entre le centre d'une première unité de sortie laser et le centre d'une troisième unité de sortie laser.
PCT/KR2020/015923 2019-11-13 2020-11-12 Réseau de sortie laser et dispositif lidar l'utilisant Ceased WO2021096264A2 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115453496A (zh) * 2022-10-19 2022-12-09 烟台艾睿光电科技有限公司 谐振式mems激光雷达

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11788891B2 (en) * 2021-06-11 2023-10-17 The United States Of America, As Represented By The Secretary Of Agriculture Method and system for active line scan imaging
WO2022270879A1 (fr) * 2021-06-21 2022-12-29 주식회사 에스오에스랩 Procédé pour fabrication de dispositif lidar et dispositif d'alignement actif pour mise en œuvre de procédé pour fabrication de dispositif lidar
CN120233370A (zh) * 2021-09-15 2025-07-01 上海禾赛科技有限公司 光发射装置、光探测装置、及激光雷达
WO2023085466A1 (fr) * 2021-11-12 2023-05-19 주식회사 에스오에스랩 Procédé de traitement de données lidar
CN116359885A (zh) * 2021-12-28 2023-06-30 上海禾赛科技有限公司 激光雷达的探测方法以及激光雷达
KR102606969B1 (ko) * 2022-10-14 2023-11-30 주식회사 인포웍스 FMCW LiDAR 다채널 송수신을 위한 MLA+Prism 일체형 광학 장치 및 이를 이용한 FMCW LiDAR 시스템
KR102597480B1 (ko) * 2022-12-15 2023-11-02 주식회사 에스오에스랩 라이다 데이터 생성 방법 및 이를 이용하는 라이다 장치
KR20240105605A (ko) * 2022-12-28 2024-07-08 주식회사 에스오에스랩 근거리 측정 성능이 향상된 라이다 장치

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2510389B1 (fr) * 2009-12-08 2017-07-12 3M Innovative Properties Company Constructions optiques comportant un guide de lumière et des films à faible indice de réfraction
US9594159B2 (en) * 2013-07-15 2017-03-14 Texas Instruments Incorporated 2-D object detection in radar applications
JP6563022B2 (ja) * 2015-01-29 2019-08-21 ヘプタゴン・マイクロ・オプティクス・プライベート・リミテッドＨｅｐｔａｇｏｎ Ｍｉｃｒｏ Ｏｐｔｉｃｓ Ｐｔｅ． Ｌｔｄ． パターン化された照射を生成するための装置
KR102474708B1 (ko) * 2015-11-27 2022-12-06 삼성전자주식회사 빔 스티어링 소자 및 이를 포함하는 시스템
KR102407344B1 (ko) * 2016-04-01 2022-06-13 한국전자기술연구원 확장된 수평 시야각을 가지는 스캐닝 라이다 장치
US10761195B2 (en) * 2016-04-22 2020-09-01 OPSYS Tech Ltd. Multi-wavelength LIDAR system
US10274599B2 (en) 2016-06-01 2019-04-30 Toyota Motor Engineering & Manufacturing North America, Inc. LIDAR systems with expanded fields of view on a planar substrate
EP3859396A1 (fr) * 2016-09-20 2021-08-04 Innoviz Technologies Ltd. Systèmes et procédés lidar
WO2019010320A1 (fr) * 2017-07-05 2019-01-10 Ouster, Inc. Dispositif de télémétrie de lumière à réseau d'émetteurs à balayage électronique et réseau de capteurs synchronisés
JP6865492B2 (ja) * 2017-07-28 2021-04-28 オプシス テック リミテッド 小角度発散を伴うｖｃｓｅｌアレイｌｉｄａｒ送信機
KR102404742B1 (ko) * 2017-11-13 2022-06-07 엘지이노텍 주식회사 광 제어 부재 및 이를 포함하는 표시 장치
US20190146067A1 (en) * 2017-11-14 2019-05-16 Continental Automotive Systems, Inc. Flash lidar sensor assembly
DE102017222969A1 (de) * 2017-12-15 2019-06-19 Ibeo Automotive Systems GmbH Verfahren zur verbesserten Nah- und Ferndetektion einer LIDAR Empfangseinheit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115453496A (zh) * 2022-10-19 2022-12-09 烟台艾睿光电科技有限公司 谐振式mems激光雷达

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KR20210059591A (ko) 2021-05-25
KR102816316B1 (ko) 2025-06-05
WO2021096266A2 (fr) 2021-05-20
KR20210059645A (ko) 2021-05-25
KR20210058718A (ko) 2021-05-24
KR102709362B1 (ko) 2024-09-24
WO2021096266A3 (fr) 2021-07-08

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