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WO2021058261A1 - Appareil de spectromètre et procédé de production d'un appareil de spectromètre - Google Patents

Appareil de spectromètre et procédé de production d'un appareil de spectromètre Download PDF

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Publication number
WO2021058261A1
WO2021058261A1 PCT/EP2020/074719 EP2020074719W WO2021058261A1 WO 2021058261 A1 WO2021058261 A1 WO 2021058261A1 EP 2020074719 W EP2020074719 W EP 2020074719W WO 2021058261 A1 WO2021058261 A1 WO 2021058261A1
Authority
WO
WIPO (PCT)
Prior art keywords
detector
emitter
designed
carrier
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2020/074719
Other languages
German (de)
English (en)
Inventor
Maximilian Busch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of WO2021058261A1 publication Critical patent/WO2021058261A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector

Definitions

  • the present invention relates to a spectrometer device and a method for manufacturing a spectrometer device.
  • Spectral sensors are currently gaining in importance. For example, spectral sensors can be used to examine substances or objects for their material composition. In particular, the progressive miniaturization of sensors results in increasingly interesting areas of application.
  • a spectral filter element in a spectrometer for example, a tunable microelectromechanical system (MEMS) with a Fabry-Perot interferometer represents a promising approach to miniaturizing the overall system.
  • MEMS microelectromechanical system
  • Fabry-Perot interferometer represents a promising approach to miniaturizing the overall system.
  • the publication DE 102018200378 A1 describes an interferometer, for example an ME MS-Fabry-Perot interferometer with two mirrors which are applied to two substrates which are connected to one another.
  • the present invention provides a spectrometer device and a method for producing a spectrometer device having the features of the independent patent claims. Further advantageous embodiments are the subject of the dependent claims.
  • a spectrometer device with a carrier substrate, an emitter, a base element and a detector device.
  • the detector device comprises a Carrier element, a spectral element and a photodetector.
  • the spectral element is arranged on a first side of the carrier element.
  • the photodetector is arranged on a second side of the carrier element.
  • the second side of the carrier element is opposite the first side of the carrier element.
  • the emitter is arranged on an upper side of the carrier substrate.
  • the emitter is designed to emit light in a predetermined spectrum.
  • the predetermined spectrum can include, for example, part or the entire spectrum of visible light.
  • the predetermined spectrum can additionally or alternatively comprise parts of the non-visible spectrum, for example infrared or ultraviolet light.
  • the base element is arranged on the top of the carrier substrate.
  • the base element comprises an emitter opening and a detector cavity.
  • the base element is arranged on the upper side of the carrier substrate in such a way that the emitter arranged on the upper side of the carrier substrate is located within the emitter opening.
  • An inside of the emitter opening is at least partially provided with a reflective coating.
  • the reflective coating on the inside of the emitter opening is designed - in particular when viewed together with the surface of the emitter opening - to radiate the light emitted by the emitter in the direction of a predetermined sample position.
  • the detector device is arranged at an opening in the detector cavity of the base element. The detector device is thus arranged in a light path between the predetermined sample position and the detector cavity.
  • the photodetector of the detector device points in the direction of the detector cavity.
  • the spectral element of the detector device points in the direction of the sample position.
  • the detector device can be attached to the base element, for example glued to the base element.
  • the base element of the spectrometer device comprises a focusing element.
  • the focusing element is arranged in the detector cavity of the base element.
  • the focusing element is designed to
  • a method of making a spectrometer device includes a step of arranging an emitter on top of the Carrier substrate.
  • the emitter can be designed to emit light in a predetermined spectrum.
  • the method further comprises a step of providing a base element.
  • the base element comprises an emitter opening and a detector cavity.
  • An inside of the emitter opening at least partially comprises a reflective coating.
  • the reflective coating on the inside of the emitter opening is designed to radiate the light emitted by the emitter in the direction of a predetermined sample position.
  • the detector cavity of the base element comprises a focusing element.
  • the focusing element is designed to focus the light incident into the detector cavity onto a predetermined detector area.
  • the method comprises a step of arranging the provided base element on the upper side of the carrier substrate.
  • the emitter can be located in the emitter opening of the base element.
  • the method further comprises a step of providing a detector device.
  • the detector device comprises a carrier element, a spectral element and a photodetector.
  • the spectral element is arranged on a first side of the carrier element.
  • the photodetector is arranged on a second side of the carrier element, the second side of the carrier element being located opposite the first side of the carrier element.
  • the method comprises a step of arranging the detector device over an opening in the detector cavity. The photodetector of the detector device points in the direction of the detector cavity.
  • the present invention is based on the knowledge that for the increasing spread of miniaturized spectrometer arrangements it is necessary to be able to provide the spectrometer arrangements in large numbers inexpensively, efficiently and with high quality.
  • the spectrometer arrangement according to the invention and the corresponding manufacturing method make it possible to manufacture and assemble the required components with the smallest possible number of process steps with a consistently high quality. It is possible to subject the intermediate products, such as the base element and the detector device, to a quality assurance measure in advance. In this way, any defective intermediate products can be quickly identified and sorted out. In this way, the error rate of the assembled spectrometer arrangements can be reduced, since defective intermediate products are not integrated into the further process sequence.
  • the manufacture of the intermediate products and the assembly of the intermediate products each require only a few process steps. This enables the spectrometer devices to be manufactured in large numbers in an efficient, reliable and cost-effective manner.
  • the carrier element of the detector device comprises a first electrically conductive structure.
  • the first electrically conductive structure of the carrier element of the detector device is designed to make electrical contact with the spectral element and the photodetector.
  • the spectral element and the photodetector can be electrically connected to further, possibly external components by means of the first electrical structure.
  • the spectral element comprises a microelectromechanical structure (MEMS).
  • MEMS microelectromechanical structure
  • the spectral element can be set very precisely to a desired frequency or wavelength.
  • the spectral element comprises a Fabry-Perot interferometer.
  • the Fabry-Perot interferometer can be designed to be tunable, that is to say the tuning to a specific wavelength or frequency can be adapted.
  • the distances between mirrors or reflectors of the Fabry-Perot interferometer can be designed to be tunable, that is to say the tuning to a specific wavelength or frequency can be adapted.
  • the spectrometer device comprises a control device.
  • the control device can be designed to control the emitter and / or the spectral element. Additionally or alternatively, the control device can also receive signals from the photodetector.
  • the control device can be any control device that is implemented, for example, by means of discrete components.
  • the control device can also be an application-specific integrated circuit (ASIC). In this way, the application-specific control or evaluation of the signals from the spectrometer device can be implemented efficiently and with little space requirement.
  • ASIC application-specific integrated circuit
  • control device can be arranged on the carrier substrate.
  • control device can be arranged on the upper side, that is to say on the same side on which the base element and the emitter are also arranged. This results in a particularly compact structure.
  • the carrier substrate comprises a second electrically conductive structure.
  • the second electrically conductive structure of the carrier substrate can be designed to make electrical contact with the emitter, the detector device and optionally also the control device.
  • connections of the first conductive structure of the carrier element of the detector device can be connected directly to corresponding connections of the second electrically conductive structure of the carrier substrate. This results in a compact structure for the electrical connections of the spectrometer device.
  • all electrical connections for external components such as, for example, power supply and connections for further components, can be provided on the carrier substrate by means of the second electrically conductive structure.
  • the detector cavity of the base element comprises an at least partially curved surface. Furthermore, the surface of the detector cavity, at least a region of the curved surface, can be provided with a reflective coating. For example, the reflective coating on the curved surface, a concave mirror structure or the like can be realized. In this way, an efficient implementation of the focusing element is possible in order to focus the light on the photodetector of the detector device.
  • the spectrometer device comprises a transparent cover element.
  • the transparent cover element can be arranged on a light exit area of the emitter opening and / or a light entry area of the detector device.
  • the transparent cover element can be fixed by means of a further holding element.
  • the transparent cover element can also be glued directly to the base element and / or the detector device.
  • providing the base element comprises at least partial coating of an inside of the emitter opening and the detector cavity.
  • parts of the emitter opening and the detector cavity can be coated with a light-reflecting material.
  • reflection areas such as, for example, mirror arrangements, can be implemented which deflect and / or focus the light in the desired manner.
  • the production method comprises a step of arranging a control device on the carrier substrate.
  • the control device can be designed to control the emitter and / or the spectral element and / or to receive signals from the photodetector.
  • the additional integration of a control device on the spectrometer device makes it possible to combine all the necessary components including the control in a small space and thus to provide a compact spectrometer device.
  • the carrier element of the detector device comprises a first electrically conductive structure.
  • the first electrically conductive structure can be designed to make electrical contact with the spectral element and the photodetector.
  • the carrier substrate can comprise a second electrically conductive structure.
  • the second electrically conductive The structure can be designed to make electrical contact with the emitter, the control device and the detector device.
  • the production method can also include a step of contacting the first electrically conductive structure of the carrier element with the second electrically conductive structure of the carrier substrate. In this way, all relevant electrical connections can be routed to the electrically conductive structure of the carrier substrate.
  • the provision of the base element comprises an injection molding process for producing a base body. Furthermore, providing the base element can include at least partial coating of the emitter opening and the detector cavity with a reflective material.
  • Figure 1 a schematic representation of a cross section through a
  • Figure 2 a schematic representation of an exploded view of a
  • FIG. 3 a flow chart on the basis of a production method according to an embodiment. Description of embodiments
  • FIG. 1 shows a schematic representation of a cross section of a spectrometer device 1 according to an embodiment.
  • the spectrometer device 1 comprises a carrier substrate 10, a base element 20, an emitter 30 and a detector device 40. Furthermore, the spectrometer device 1 can comprise a transparent cover element 50.
  • the base element 20 is arranged on the carrier substrate 10.
  • the base element 20 has an emitter opening 21 and a detector cavity 25.
  • the emitter 30 is arranged on the carrier substrate 10.
  • the emitter opening 21 is designed such that by at least partially coating the inside of the emitter opening 21 with a light-reflecting material 22, light is emitted by the emitter 30 in the direction of a predetermined position at which a sample 100 can be provided.
  • the carrier substrate 10 can be any suitable substrate which is suitable for fixing the required components, in particular the emitter 30 and the base element 20. Furthermore, the carrier substrate 10 can have suitable electrical conductor track structures. For example, electrical contact can be made with the emitter 30 through the conductor track structures of the carrier substrate 10. In addition, further support structures can also be provided which, for example, provide connection elements for the detector device 40 and a control device that may also be present. Furthermore, the electrically conductive structure of the carrier substrate 10 can also have connection elements for external components such as a voltage supply and signal lines.
  • the emitter 30 can be an emitter which emits light in a predetermined spectrum.
  • the light spectrum emitted by the emitter 30 can be light in the visible or also in the invisible wavelength range.
  • the emitter 30 can accordingly emit, for example, light in the infrared wavelength range, in the visible wavelength range or optionally also in the ultraviolet wavelength range.
  • the emitter 30 can be, for example, a light emitting diode (LED).
  • LED light emitting diode
  • any others are also possible suitable components are possible which can emit light in the desired spectrum and with the required intensity.
  • the light emitted by the emitter 30 is focused and deflected by a corresponding configuration of the emitter opening 21 in the base element 20 in such a way that it strikes a sample 100 at a predetermined position.
  • the inner area of the emitter opening 21 can be coated at least partially with a material which reflects the light in the required spectrum.
  • a metallic coating or the like can be applied to the corresponding inner regions of the emitter opening 21 for this purpose.
  • the base element 20 also has a detector cavity 25.
  • the detector cavity 25 has an opening in the direction of the position at which the sample 100 can be located.
  • the detector device 40 is arranged above this opening and in the beam path between the sample 100 and the detector cavity 25.
  • the detector device 40 comprises a carrier element 21.
  • a spectral element 42 is arranged on a first side of the carrier element 21.
  • a photodetector 43 is arranged on the opposite side of the carrier element 41.
  • the beam path of the light runs from the emitter 30 via the emitter opening 21 to the sample 100.
  • the sample 100 will scatter the light and part of the light will pass through the spectral element 42 and openings 41a in the carrier element 41 into the detector cavity 25.
  • the detector cavity 25 can have a focusing element 26 which focuses the light onto the photodetector 43 of the detector device 40.
  • the focusing element 26 can be a reflective coating which is applied to a curved surface of the detector cavity 25.
  • a transparent cover element 50 can be provided above the emitter opening 21 and the spectral element 42 of the detector device 40.
  • the emitter 30 emits light in a predetermined spectrum. As mentioned above, this can be light in the visible wavelength range.
  • the light emitted by the emitter 30 can, however, also be wholly or at least partially in the non-visible wavelength range, for example in the infrared wavelength range or else in the ultraviolet wavelength range.
  • the light emitted by the emitter 30 is reflected and focused inside the emission opening 21 in such a way that a light beam is generated which radiates from the emission opening 21 in the direction of a predetermined sample position.
  • An object 100 for example, which partially absorbs and partially reflects or scatters the light from the emission opening 21, can be positioned at this predetermined sample position.
  • the portion of the light scattered by the object 100 arrives at least partially in the direction of the detector device 40.
  • the light first arrives at the spectral element 42.
  • This spectral element 42 can be adjusted to one or, if necessary, several specific wavelengths by suitable control.
  • the spectral element 42 can be a configurable Fabry-Perot interferometer.
  • the specific wavelength can be set.
  • the distance between the two mirrors can be adjusted by means of a microelectromechanical system (MEMS).
  • MEMS microelectromechanical system
  • the light exits the spectral element 42 and passes through openings 41a in the carrier element 41 into the detector cavity 25 of the base element 20.
  • the focusing element 26, for example a concave mirror or the like, focuses the light on the photodetector 43 in the further course.
  • the photodetector 43 then outputs an electrical signal which corresponds to the intensity of the light on the photodetector 43. This electrical signal can be evaluated together with the respective setting of the spectral element 42 in order to determine a light intensity for a specific wavelength corresponding to the corresponding setting of the spectral element 42.
  • FIG. 2 shows a schematic exploded view of a spectrometer device 1 according to an embodiment.
  • the carrier substrate 10 is located in the lower region.
  • the carrier substrate 10 can have an electrically conductive structure around which provide necessary electrical connections and contacts.
  • the carrier substrate 10 can be any material that has the required mechanical properties. In particular, it can be an electrically non-conductive material to which the required electrically conductive structures can be applied.
  • the emitter 30 can first be applied to the carrier structure 10.
  • a control device 60 can be provided which controls the electrical components of the spectrometer device 1, such as, for example, the emitter 30 and the spectral element 42. Furthermore, the control device 60 can also receive and process the signals from the photodetector 43.
  • control device 60 can be implemented as a circuit with discrete components.
  • control device 60 it is also possible to implement the control device 60 as an application-specific integrated circuit (ASIC) or the like.
  • ASIC application-specific integrated circuit
  • the control device 60 can be applied to the carrier substrate 10 at a suitable position in a manner analogous to the emitter 30. Any suitable connection options, such as gluing, bonding or the like, are possible for this purpose.
  • the base element 20 can be applied to the carrier substrate 10.
  • the base element 20 can be produced by means of any suitable process, for example by means of an injection molding process or the like.
  • the required reflective surfaces can be introduced into the base element 20. The reflective surfaces can either be attached to the suitable locations in the emitter opening 21 and the detector cavity 25 after the base element 20 has been manufactured.
  • the base element 20 can be attached to the carrier substrate 10 by means of any desired connection process, for example gluing or the like.
  • the detector device 40 is applied over the detector cavity 25.
  • the detector device 40 comprises the carrier element 41, to which the spectral element 42 is applied on one side and on the opposite side the photodetector 43 is applied.
  • the carrier element 21 has in particular openings 41a through which the light emerging from the spectral element 42 can reach the detector cavity 25.
  • the carrier element 41 can also have a further electrically conductive structure. This electrically conductive structure can provide the necessary electrical contacts for the spectral element 42 and the photodetector 43.
  • the further electrically conductive structure of the carrier element 41 can, for example, be connected to the electrically conductive structure of the carrier substrate 10.
  • a transparent cover element 50 for example a cover glass or the like, can be applied above the base element 20 with the detector device 40.
  • a suitable holder 51 can be provided to fix the transparent cover element 50.
  • FIG. 3 shows a flow chart on the basis of a method for producing a spectrometer device 1 according to an embodiment.
  • the method can in particular also include steps which have already been described above in connection with the construction of the spectrometer device 1.
  • the spectrometer device 1 described above can also have components that are described in connection with the manufacturing method.
  • an emitter 30 is first arranged on an upper side of a carrier substrate 10.
  • the emitter 30 is designed in particular to emit light in a predetermined spectrum.
  • a base element 20 is provided.
  • the base element 20 comprises an emitter opening 21 and a detector cavity 25.
  • An inside of the emitter opening 21 can be at least partially provided with a reflective coating 22.
  • the emitter opening 21 with the reflective coating 22 can be designed to radiate the light emitted by the emitter 30 in the direction of a predetermined sample position.
  • the detector cavity 25 of the provided base element 20 can comprise a focusing element 26.
  • the focusing element 26 can be designed to focus light which falls into the detector cavity 25 onto a predetermined detector area.
  • the base element 20 is arranged on the upper side of the carrier substrate 10. In particular, after the base element 20 has been arranged on the carrier substrate 10, the emitter 30 can be located in the emitter opening 21 of the base element 20.
  • a detector device 40 is provided.
  • the detector device 40 can comprise a carrier element 41, a spectral element 42 and a photodetector 43.
  • the spectral element 42 can be arranged on a first side of the carrier element 41.
  • the photodetector 43 can be arranged on a second side of the carrier element 41, which is opposite the first side with the spectral element 42.
  • step S5 the detector device 40 is arranged over an opening in the detector cavity 25.
  • the detector device 40 is arranged above the detector cavity 25 in such a way that the photodetector 43 points in the direction of the detector cavity 25.
  • the step S4 for providing the base element 20 can include a step for at least partially coating an inner side of the emitter opening 21 and the detector cavity 25 with a light-reflecting material. In this way, reflection elements can be formed which reflect and / or focus the light in a suitable manner.
  • the method can further comprise a step of arranging a control device 60 on the carrier substrate 10.
  • the control device 60 can in particular be designed to control the emitter 30 and / or the spectral element 42. Furthermore, the control device 60 can be designed to receive signals from the photodetector 43.
  • the carrier element 41 of the detector device 40 can comprise a first electrically conductive structure.
  • the first electrically conductive structure can in particular be designed to make electrical contact with the spectral element 42 and the photodetector 43.
  • the carrier substrate 10 can comprise a second electrically conductive structure.
  • the second electrically conductive structure can be designed to make electrical contact with the emitter 30, an optionally present control device 60 and the detector device 40.
  • the manufacturing process can in this case be a step for Contacting the first electrically conductive structure of the carrier element 41 with the second electrically conductive structure of the carrier substrate 10.
  • the step of providing the base element 20 can include an injection molding process for producing a base body. Furthermore, the step of providing the base element can include at least partial coating of the emitter opening and the detector cavity with a light-reflecting material.
  • the present invention relates to a
  • Spectrometer device and a manufacturing method for a spectrometer device wherein the spectrometer device can be manufactured efficiently and with a few process steps.
  • the light paths from a light source to the sample and from the sample via an interferometer to a photodetector can be structured in a targeted manner by means of a simple base element.
  • the base element can be produced in a simple manner.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

La présente invention développe un appareil de spectromètre et un procédé de production pour un appareil de spectromètre, l'appareil de spectromètre pouvant être produit de manière efficace et en quelques étapes de procédé. En particulier, il est possible de structurer de manière ciblée les trajets de lumière d'une source de lumière vers l'échantillon et de l'échantillon vers un photodétecteur par l'intermédiaire d'un interféromètre au moyen d'un élément de base simple. Ici, l'élément de base peut être fabriqué de manière simple.
PCT/EP2020/074719 2019-09-26 2020-09-04 Appareil de spectromètre et procédé de production d'un appareil de spectromètre Ceased WO2021058261A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019126038.8 2019-09-26
DE102019126038.8A DE102019126038A1 (de) 2019-09-26 2019-09-26 Spektrometervorrichtung und Verfahren zur Herstellung einer Spektrometervorrichtung

Publications (1)

Publication Number Publication Date
WO2021058261A1 true WO2021058261A1 (fr) 2021-04-01

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DE (1) DE102019126038A1 (fr)
WO (1) WO2021058261A1 (fr)

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WO2023009840A1 (fr) * 2021-07-29 2023-02-02 Si-Ware Systems Analyseur spectral compact
WO2023237615A1 (fr) * 2022-06-08 2023-12-14 Trinamix Gmbh Boîtier de guidage de lumière pour micro-spectromètre
US12061116B2 (en) 2021-07-29 2024-08-13 Si-Ware Systems Compact spectral analyzer

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WO2025087898A1 (fr) 2023-10-23 2025-05-01 Trinamix Gmbh Dispositif spectromètre pour obtenir des informations spectroscopiques sur au moins un objet, le plan d'imagerie du système d'imagerie étant positionné à distance du plan d'éclairage

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