WO2020111589A1 - Low-power large-area atmospheric-pressure plasma generation device - Google Patents

Abstract

A low-power large-area atmospheric-pressure plasma generation device according to an embodiment of the present invention comprises: a first electrode having a flat-plate shape and lengthily extending along a first direction; a second electrode which is provided at a position where surfaces of the second electrode and the first electrode face and are spaced apart from each other, the second electrode having a flat-plate shape and lengthily extending along the first direction; and a third electrode which is provided to be spaced apart from each of the first electrode and the second electrode so that a first introduction passage through which gas supplied from the outside flows is maintained between the first electrode and the third electrode, and a second introduction passage through which gas supplied from the outside flows is maintained between the second electrode and the third electrode, the third electrode having a flat-plate shape and lengthily extending along the first direction. At one side, the first to the third electrode are integrally formed to form a closed part for electric connection, and at the other side thereof, the first electrode and the second electrode are spaced an interval apart from each other with reference to the third electrode to form an open part.

Description

Low power large area atmospheric plasma generator

The present invention relates to a low power large area atmospheric pressure plasma generator.

Recently, research on biomedical applications such as sterilization, hemostasis, and tooth whitening using atmospheric plasma has been actively conducted by research institutions at home and abroad. Among the atmospheric plasma discharge methods, in the case of a microwave plasma using a high frequency of 1,000 MHz to 3,000 MHz, there is no thermal damage to the treatment object in its characteristics. And due to the low discharge voltage, the electrical risk is low and the power efficiency is high. And it has a high potential as a plasma equipment for biomedical applications compared to low-frequency plasma equipment, such as the excellence of effects due to high plasma components.

Meanwhile, in the case of the currently developed microwave plasma equipment, the size of the equipment is large due to the matching box used for effective power transmission, and high power must be used for plasma discharge. In addition, a large treatment area is required in fields such as hemostasis, wound healing, and skin care. However, when using high-frequency power, the wavelength of the used power is very short, so it is difficult to make a uniform electric field over a large area and it is difficult to supply a uniform gas.

The embodiment of the present invention can improve the parallel plate-type electrode structure to generate a uniform electric field in a large area with low power at the end of the open portion, and generate a large area plasma in a linear form by supplying a uniform gas. It is to provide a low-power large-area atmospheric plasma generator.

The low-power large-area atmospheric plasma generator according to an embodiment of the present invention is provided in a first shape formed in the first direction in a flat plate shape, and is provided at a position facing each other at a distance from the first electrode. A second electrode formed long along one direction, and a first inflow passage through which gas supplied from the outside flows between the first electrode and a second flow through which gas supplied from the outside flows between the second electrode The first electrode and the second electrode are spaced apart from each other to maintain the inflow passage, and include a third electrode that is formed to be elongated along the first direction in a flat plate shape, and one side of the first electrode to the third electrode is integrally formed. It is formed to form a closed portion that is electrically connected, the other side of the first electrode and the second electrode with respect to the third electrode spaced apart from each other to form an open portion.

The first electrode and the second electrode may include a ground electrode for grounding. In addition, the third electrode may include a power electrode for power supply.

A gas inlet that is provided on one surface of the closing portion and guides gas supply supplied from the outside to the first inlet passage and the second inlet passage may be further included. The gas inlet is provided on one surface of the closed portion, and a gas inlet coupler to which a gas inlet pipe is coupled, a first inlet line provided between the gas inlet coupler and the first inlet passage to connect the gas inlet coupler and the first inlet passage, and gas A second inlet line may be provided between the inlet coupler and the second inlet passage to connect the gas inlet coupler and the second inlet passage.

The gas inlet coupler may be provided in plural at intervals along the second direction on one surface of the closing portion. The gas inlet coupler includes a first inlet and a second inlet, and the first inlet and the second inlet may be identically provided. It may further include a connection portion coupled to the power supply position of the first electrode close to the closing portion.

The opening part may be formed to be different from each other in an open section in which the first electrode and the third electrode, and the opened electrode spacing between the second electrode and the third electrode are set along the first direction toward the other end. The open section is connected to the first open section formed from the parallel start point of the open part contacting the closed part to the parallel end point maintaining a parallel distance from each other, and the electrodes adjacent to each other as it goes to the other end by being connected to the parallel end point of the first open section. A second open section may be included in which the interval between the sections is gradually narrowed. The opening part has a first open end that is inclined and has a predetermined slope at the other side of the first electrode, a second open end that is inclined and has a predetermined slope at the other side of the second electrode, and a predetermined slope at the other side of the third electrode It may include a third open end provided with an inclined. The first open end has a first inclined surface inclined upward toward the third open end, the second open end has a second inclined surface inclined downward toward the third open end, and the third open end comprises A third inclined surface corresponding to each of the first inclined surface and the second inclined surface may be provided, and the third inclined surface may include a lower inclined surface facing the first inclined surface and an upper inclined surface facing the third inclined surface.

In the coupling structure of the first electrode, the third electrode, and the second electrode, an open side portion formed along the first direction is provided, and the open side portion may include a first open side portion and a second open side portion. The cover portion may further include a cover portion coupled to the open side portion to close the open side portion, and the cover portion may include a first cover portion coupled to the first open side portion, and a second cover portion coupled to the second open side portion.

By using the parallel plate transmission line structure, effective power supply is possible without the need for an additional matching device, and a small size is held in hand and plasma is generated at low power, and a large area plasma in the form of a line is formed to cover a large area. It has a plasma effect at once, and has an effect that can be excellent for plasma treatment of a wide area such as skin treatment.

1 is a view showing a low-power large-area atmospheric plasma generator according to an embodiment of the present invention.

FIG. 2 is a view showing the rear surface of FIG. 1.

3 is a cross-sectional view showing the internal structure of FIG. 1.

4 is a view showing a state in which the cover portion is coupled to the open side in FIG.

5 is a view showing the electric field strength of the low-power large-area atmospheric plasma generator according to an embodiment of the present invention.

The terminology used herein is for the purpose of referring only to specific embodiments and is not intended to limit the invention. The singular forms used herein include plural forms unless the phrases clearly indicate the opposite. As used herein, the meaning of “comprising” embodies certain properties, regions, integers, steps, actions, elements and/or components, and other specific properties, regions, integers, steps, actions, elements, components and/or groups It does not exclude the existence or addition of.

Although not defined differently, all terms including technical terms and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which the present invention pertains. Commonly used dictionary-defined terms are further interpreted as having meanings consistent with the related technical literature and the presently disclosed contents, and are not interpreted in an ideal or very formal meaning unless defined.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily practice. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein.

1 is a view showing a low-power large-area atmospheric pressure plasma generator according to an embodiment of the present invention, and FIG. 2 is a view showing the rear surface of FIG. 1. And Figure 3 is a cross-sectional view showing the internal structure of Figure 1, Figure 4 is a view showing a state in which the cover portion is coupled to the open side in FIG. In addition, Figure 5 is a view showing the electric field strength of the low-power large-area atmospheric plasma generator according to an embodiment of the present invention.

1 to 5, the low-power large-area atmospheric plasma generator according to an embodiment of the present invention includes a first electrode 10, a second electrode 20, a third electrode 30, a gas inlet, and a connecting portion (104), a cover portion. The first electrode 10 to the third electrode 30 have one side integrally formed to form a closed portion 40 that is electrically connected, and the other side of the first electrode 10 based on the third electrode 30. And the second electrode 20 are spaced apart from each other to form an opening. The first electrode 10 to the third electrode 30 may be electrically connected to one side processed with a conductive conductor to function as a parallel plate transmission line. The first electrode 10 to the third electrode 30 may be formed of a plate having a width of 10 mm to 40 mm, and may operate as a resonator of a micro signal. In addition, the length of the closing portion 40 based on the first direction may be formed in a range of 10 mm to 30 mm in consideration of gas supply. The end portion of the closing portion 40 to the opening portion may have a length corresponding to 1/4 of a high-frequency wavelength operating. Due to the electrical characteristics of the resonator, a high electric field is concentrated at the end of the opening. The gap between the electrodes at the end of the opening can be maintained between 0.1 mm and 1 mm to create a high electric field.

The first electrode 10 may be formed to be elongated along the first direction in a flat plate shape. The first electrode 10 may include a ground electrode for grounding. In addition, the first electrode 10 may be provided below the third electrode 30.

The second electrode 20 is provided at a position facing each other at a distance from the first electrode 10, and may be formed to be long along the first direction in a flat plate shape. The second electrode 20 may include a ground electrode for grounding. In addition, the second electrode 20 may be provided above the third electrode 30.

The third electrode 30 maintains a first inflow passage 14 through which gas supplied from the outside flows between the first electrode 10, and a gas supplied from the outside between the second electrode 20 The first electrode 10 and the second electrode 20 are spaced apart from each other so as to maintain the second inflow passage 24 through which they flow, and may be formed to be long along the first direction in a flat plate shape. The third electrode 30 may include a power electrode for power supply.

The first electrode 10 and the second electrode 20 surround the third electrode 30 and limit external exposure of the third electrode 30. That is, the coupling structure of the first electrode 10, the second electrode 20, and the third electrode 30 may be provided in a form surrounding the power surface as a ground surface. Since the power surfaces of the third electrode 30 located in the center are wrapped with the ground surfaces of the first electrode 10 and the second electrode 20, contamination and oxidation from the outside can be prevented. In addition, by protecting the third electrode 30 through which power directly flows, electrical safety can be secured, and hand contact is possible even while power is on.

The gas inlet may be provided on one surface of the closed portion 40 to guide the supply of gas supplied from the outside to the first inlet passage 14 and the second inlet passage 24. Here, the gas may include one or more of helium gas, argon gas, nitrogen gas, oxygen, and composite gas. The gas inlet may include a gas inlet coupler, a first inlet line 103a, and a second inlet line 103b. The gas inlet may have a plurality of inlet lines as needed. Here, the diameter of the inlet line through which the gas is supplied can be formed to be 0.1 mm to 1 mm.

The gas inlet coupling port is provided on one surface of the closing portion 40 and is a portion where the gas inlet pipe is coupled. The gas inlet coupler may be provided in a plurality at intervals along the second direction on one surface of the closing portion 40. The gas inlet coupler includes a first inlet 101a and a second inlet 101b, and the first inlet 101a and the second inlet 101b may be identically provided.

The first inlet line 103a is provided between the gas inlet coupler and the first inlet passage 14 to connect the gas inlet coupler and the first inlet passage 14.

The second inlet line 103b is provided between the gas inlet coupler and the second inlet passage 24 to connect the gas inlet coupler and the second inlet passage 24.

Referring to FIG. 3, the connection part 104 may be coupled to the power supply position of the first electrode 10 close to the closing part 40. A connection hole 105 for connection with the connection portion 104 may be provided. The connecting portion 104 and the connecting hole 105 may be located where the input impedance 50 Ω is satisfied according to the frequency used from the closing portion 40. Here, the power supply location may include a location that satisfies the input impedance 50 Ω according to the frequency used from the closing unit 40. In addition, high-frequency power in the band of 1,000 MHz to 3,000 MHz is supplied through the connection portion 104 and through the connection hole 105 of the third electrode 30.

As the opening part goes to the other end, the open electrode spacing between the first electrode 10 and the third electrode 30 and the second electrode 20 and the third electrode 30 is set to each other in an open section set along the first direction. It can be formed differently. Here, the open section may include a first open section (A) and a second open section (B).

The first opening section A may be formed from a parallel starting point of the opening portion in contact with the closing part 40 to a parallel ending point maintaining a parallel distance from each other.

The second open section B may include a point connected to a parallel end point of the first open section A, and the distance between electrodes adjacent to each other gradually narrows toward the other end. Referring to FIG. 3, the distance between the electrodes in the second open section B is narrower than the first open section A. Also, in the second open section B, the front side becomes sharper toward the other end, so that the concentration of electrons can be realized high. In the second open section (B), the adjacent structures of the electrodes can be improved to a structure capable of sharpening and narrowing the mutual spacing so that the electric field can be strengthened. Plasma can be easily generated and stability can be increased according to an increase in electrical concentration. The surface of the power part of the existing electrode is easily exposed, so there is a disadvantage that deformation and plasma are generated unstable due to external impact and contact. And the electric field strength was up to 550 V/m.

On the other hand, in the coupling structure of the first electrode 10, the second electrode 20, and the third electrode 30, the open portion may include a first open end, a second open end, and a third open end. The first open end may be provided to be inclined with a predetermined slope at the other side of the first electrode 10. The first open end may have a first inclined surface 12 inclined upward toward the third open end.

The third open end may be provided to be inclined with a preset slope at the other side of the third electrode 30. The third open end may have a third inclined surface 32 corresponding to the first inclined surface 12 and the second inclined surface 22, respectively. The third inclined surface 32 may include a lower inclined surface 32a facing the first inclined surface 12 and an upper inclined surface 32b facing the second inclined surface 22. As the lower inclined surface 32a and the upper inclined surface 32b are provided, the distance between the electrodes at the end of the opening can be more precisely managed, and the electric field can be implemented to be more concentrated at the end of the opening.

The second open end may be provided to be inclined with a predetermined slope at the other side of the second electrode 20. The second open end may have a second inclined surface 22 inclined downward toward the third open end. Strong between the end portion 12a of the first inclined surface 12 and the end portion of the third inclined surface 32, and between the end portion 22a of the second inclined surface 22 and the end portion of the third inclined surface 32 The gas supplied to the electric field is discharged to generate a linear large area plasma.

In an embodiment of the present invention, the first electrode 10 having a ground surface and the third electrode 30 having a power portion surface are wrapped with a first electrode 10 having a ground surface in a plate-shaped electrode structure, and external contact of the third electrode 30 is achieved. The basic structure is to prevent and protect. In addition, the third electrode 30 is formed by wrapping the upper and lower electrodes so that it is possible to generate stable plasma by protecting it from external impact and contact. In addition, a gas flow guide function is implemented in the coupling structure of the plate-shaped electrode in order to control the gas flow necessary for plasma generation, and additional equipment is unnecessary. Self-matching is possible by using a high frequency band of 1,000MHz to 3,000MHz and constructing a resonator using a parallel plate transmission line. In addition, the gas supplied from the outside can be stably supplied through the parallel plate electrode structure and the cover portion surrounding the side surface, and a large area plasma in the form of a line of 10 mm to 40 mm can be generated at the open end of the parallel plate electrode structure. And the electric field strength can be realized up to 2000 V/m.

1 to 4, in the coupling structure of the first electrode 10, the second electrode 20, and the third electrode 30, an open side portion formed long in the first direction may be provided. The open side portion can include a first open side portion and a second open side portion. The cover portion may be coupled to the open side portion to close the open side. The cover portion may be formed of an insulator. The cover portion may include a first cover portion 60a coupled to the first open side portion, and a second cover portion 60b coupled to the second open side portion. As the cover portion is coupled to the open side portion, external exposure of the third electrode 30 can be minimized.

As described above, the low-power large-area atmospheric pressure plasma generating apparatus according to an embodiment of the present invention covers a side surface through a parallel plate-shaped electrode structure and a cover portion. In addition, a space between the first electrode 10 and the third electrode 30 and between the second electrode 20 and the third electrode 30 may be used as a gas passage. And the gas supplied from the outside is supplied to the inside through the gas inlet and is discharged through the inlet passage between the electrodes into the gap formed at the end of the opening. In addition, the gas supplied to the strong electric field at the end of the opening is discharged to generate a large area plasma in the form of a line.

Although the preferred embodiment of the present invention has been described through the above, the present invention is not limited to this, and it is possible to carry out various modifications within the scope of the claims and detailed description of the invention and the accompanying drawings. Naturally, it is within the scope of the present invention.

Claims (13)

A first electrode formed in a flat shape along the first direction, The second electrode is provided at a position facing each other at a distance from the first electrode, and the second electrode is formed to be elongated in the first direction in a flat plate shape, The first electrode to maintain a first inflow passage through which gas supplied from the outside flows between the first electrode, and to maintain a second inflow passage through which gas supplied from the outside flows between the first electrode, And the third electrode is provided at a distance from each other, the third electrode is formed in a long plate shape in the first direction It includes, In the first electrode to the third electrode, one side is integrally formed to form an electrically connected closed portion, and the other side is spaced apart from the first electrode and the second electrode based on the third electrode. Low-power large-area atmospheric pressure plasma generator forming an opening. In claim 1, The first electrode and the second electrode are low-power large-area atmospheric plasma generators that are ground electrodes for grounding. In claim 2, The third electrode is a low-power large-area atmospheric pressure plasma generator that is a power electrode for power supply. In claim 1, A low-power large-area atmospheric pressure plasma generating apparatus further comprising a gas inlet portion provided on one surface of the closing portion to guide the gas supply supplied from the outside to the first inlet passage and the second inlet passage. In claim 4, The gas inlet Gas inlet coupling port is provided on one surface of the closing portion is coupled to the gas inlet pipe, A first inlet line provided between the gas inlet coupler and the first inlet passage to connect the gas inlet coupler and the first inlet passage, and A second inlet line provided between the gas inlet coupler and the second inlet passage to connect the gas inlet coupler and the second inlet passage Low power large area atmospheric pressure plasma generator comprising a. In claim 5, The gas inlet coupler is a low-power large-area atmospheric pressure plasma generating device provided at a plurality of intervals along a second direction from one surface of the closing portion. In claim 6, The gas inlet coupling port includes a first inlet port and a second inlet port, and the first inlet port and the second inlet port are provided with the same low-power large-area atmospheric plasma generator. In claim 1, A low-power large-area atmospheric plasma generator further comprising a connection portion coupled to the power supply position of the first electrode close to the closing portion. In claim 1, The open portion is a low-power large area in which an open electrode gap between the first electrode and the third electrode, and the second electrode and the third electrode is formed differently in an open section set along the first direction toward the other end. Atmospheric pressure plasma generator. In claim 9, The open section A first opening section formed from a parallel starting point of the opening contacting the closing part to a parallel ending point maintaining a parallel distance from each other, and A low-power large-area atmospheric pressure plasma generator comprising a second opening section connected to a parallel end point of the first opening section and gradually narrowing a gap between adjacent electrodes as it goes to the other end. In claim 9, The opening part A first open end having a first inclined surface inclined upward with a predetermined inclination at the other side of the first electrode, A second open end having a second inclined surface inclined downward with a predetermined inclination at the other side of the second electrode, and A low-power large-area atmospheric pressure plasma generator including a third open end having a predetermined slope at the other side of the third electrode and having a third slope corresponding to the first slope and the second slope respectively. In claim 1, In the coupling structure of the first electrode, the third electrode, and the second electrode, and having an open side portion formed long in the first direction, The open side portion comprises a first open side portion and a second open side portion low power large area atmospheric plasma generator. In claim 12, Further comprising a cover portion coupled to the open side portion to close the open side, The cover portion A first cover portion coupled to the first open side portion, and A low-power large-area atmospheric plasma generator comprising a second cover portion coupled to a second open side portion.

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