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WO2020195461A1 - Élément sensible à la pression et dispositif de détection de pression - Google Patents

Élément sensible à la pression et dispositif de détection de pression Download PDF

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Publication number
WO2020195461A1
WO2020195461A1 PCT/JP2020/007489 JP2020007489W WO2020195461A1 WO 2020195461 A1 WO2020195461 A1 WO 2020195461A1 JP 2020007489 W JP2020007489 W JP 2020007489W WO 2020195461 A1 WO2020195461 A1 WO 2020195461A1
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WIPO (PCT)
Prior art keywords
pressure
electrode
sensitive
substrate
elastic
Prior art date
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Ceased
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PCT/JP2020/007489
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English (en)
Japanese (ja)
Inventor
義尚 谷口
邦明 鈴木
恭志 北村
広之 管野
渡部　弘也
徳地　直之
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Alps Alpine Co Ltd
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Alps Alpine Co Ltd
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Publication of WO2020195461A1 publication Critical patent/WO2020195461A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress

Definitions

  • the present invention relates to a pressure sensitive member and a pressure detecting device.
  • a detection device including a resistance change detection type pressure sensitive member whose resistance value (electrical resistance value) changes when a pressing force is applied is widely known. Since such a detection device has a simple configuration and a good feel when touched, application to a touch panel of an electronic device such as a tactile sensor of a robot or a mobile information terminal is being studied as a pressure sensor. ..
  • Patent Document 1 As such a resistance change detection type pressure sensitive member, there is a detection device in which an electrode is formed on the surface side of the pressure sensitive conductive rubber (see, for example, Patent Document 1).
  • an electrode substrate provided with a detection voltage on the back surface, a pressure-sensitive resistor composed of a high-resistance rubber layer and a low-resistance rubber layer, and a base material are laminated in the order of the base material from the pressed side.
  • the high-resistance rubber layer and the low-resistance rubber layer constituting the pressure-sensitive resistor are made of rubber in which conductive particles are dispersed, and have conductivity while having flexibility and elasticity.
  • the pressure-sensitive resistor is configured so that at least a part of the high-resistance rubber layer protrudes toward the detection electrode side from the low-resistance rubber layer, and the rate of change of the resistance value according to the load is suitable.
  • the pressure-sensitive resistor may be manufactured by setting the volume resistance value of the high resistance rubber layer to be higher than the volume resistance value of the low resistance rubber layer, or may be formed with the high resistance rubber layer.
  • Manufacture of a pressure-sensitive resistor is complicated, such as adjusting the height to be different from that of the low resistance rubber layer. Therefore, the yield at the time of manufacturing tends to be low, and there is a possibility that the change in resistance value cannot be stably detected over a wide range.
  • One aspect of the present invention is to provide a pressure-sensitive member capable of stably detecting a resistance value over a wide range of pressing force with a simple configuration.
  • One aspect of the pressure-sensitive member according to the present invention includes a plurality of substrates including at least one electrode, and a pressure-sensitive conductive member arranged between the plurality of substrates and in contact with the electrodes.
  • the electrode has a pair of first electrodes formed on one surface side of the substrate and a second electrode formed so as to sandwich the pressure-sensitive conductive member, and at least one of the plurality of substrates is pressed.
  • the pressure-sensitive conductive member has an elastic substrate that is elastically deformed by the action of the above, and the pressure-sensitive conductive member is elastically deformed by the elastic deformation of the elastic substrate, the electric resistance value between the pair of first electrodes changes, and the first The electric resistance value between the electrode and the second electrode changes.
  • One aspect of the pressure sensitive member according to the present invention can stably detect the resistance value over a wide range of pressing force.
  • FIG. 1 is a cross-sectional view taken along the line II of FIG. It is explanatory drawing which shows an example of the state which a pressure sensitive member is pressed. It is explanatory drawing which shows an example of the state which the pressure-sensitive member which arranged the electrode under the pressure-sensitive conductive member is pressed. It is a perspective view of the pressure detection device which applied the pressure sensitive member. It is a perspective view of the pressure detection device which applied the pressure sensitive member.
  • FIG. 7 is a sectional view taken along line II-II of FIG.
  • FIG. 11 is a cross-sectional view taken along the line II-II in which the pressure-sensitive members are laminated. It is a figure explaining the indentation test. It is a figure which shows the relationship between the pressure and resistance of Example 1.
  • FIG. 11 is a cross-sectional view taken along the line II-II in which the pressure-sensitive members are laminated. It is a figure explaining the indentation test. It is a figure which shows the relationship between the pressure and resistance of Example 1.
  • each member in the drawing may differ from the actual scale.
  • a three-dimensional Cartesian coordinate system in three axial directions (X-axis direction, Y-axis direction, Z-axis direction) is used, the length direction of the pressure-sensitive member is the X-axis direction, and the width direction of the pressure-sensitive member is Y.
  • the axial direction is defined, and the height direction of the pressure sensitive member is defined as the Z-axis direction.
  • the elastic substrate side of the pressure sensitive member is the + Z axis direction, and the opposite direction is the ⁇ Z axis direction.
  • the + Z-axis direction may be referred to as up
  • the ⁇ Z-axis direction may be referred to as down.
  • the tilde "-" indicating a numerical range in the present specification means that the numerical values described before and after the tilde are included as the lower limit value and the upper limit value.
  • FIG. 1 is a perspective view showing an example of the configuration of the elastic substrate according to one embodiment
  • FIG. 2 is an exploded perspective view of the elastic substrate according to one embodiment
  • FIG. 3 is an exploded perspective view of FIG. It is a cross-sectional view.
  • the pressure-sensitive member 10A feels like the elastic substrates 11A and 11B, the adhesive layers 12A and 12B, the first electrode 13A and the second electrode 13B, and the adhesive layer 14.
  • a pressure conductive member 15 is provided.
  • each member constituting the pressure sensitive member 10A will be described.
  • the elastic substrates 11A and 11B are plate-shaped members formed in a rectangular shape in a plan view.
  • the elastic substrates 11A and 11B are substrates that can be elastically deformed by pressing force, and are elastic substrates that are deformed by the action of pressing force and recover to the original shape when the pressing force is unloaded.
  • the elastic substrate 11A since the elastic substrate 11A is installed on the upper surface side of the pressure sensitive member 10A, it is used as the first elastic substrate, and the elastic substrate 11B is arranged on the lower surface side of the pressure sensitive member 10A. To do.
  • the elastic substrates 11A and 11B have a pair of main surfaces parallel to each other.
  • the main surface on which the pressing force acts is the acting surface 111A, and the main surface opposite to the acting surface 111A is the transmitting surface 112A that transmits the pressing force.
  • the main surface for transmitting the pressing force is the transmission surface 111B, and the main surface on the side opposite to the transmission surface 111B is the support surface 112B1.
  • the elastic substrates 11A and 11B can be formed by using an elastomer or a synthetic resin.
  • the material for forming the elastomer include natural rubber, silicone rubber, chloroprene rubber, isoprene rubber, butyl rubber, acrylic rubber, nitrile rubber, urethane rubber, polyisobutylene rubber, butadiene rubber, styrene-butadiene rubber, and ethylene-propylene rubber. Chlorosulfonated polyethylene rubber, epichlorohydrin rubber, polyester rubber, fluororubber, and modified products thereof can be used.
  • the synthetic resin a flexible epoxy resin or the like can be used. These may be used individually by 1 type, and may be used in combination of 2 or more type.
  • silicone rubber is preferable.
  • the elastic substrates 11A and 11B have high elasticity, and the adhesiveness with the adhesive layers 12A and 12B can be improved. Further, in the elastic substrate 11A, the elastic substrate 11A is deformed at the point of action of the pressing force, and the pressing force can be received without moving the point of action. Therefore, the pressing force is applied from the transmission surface 112A to the first electrode 13A and the second electrode 13A. It is accurately transmitted to the electrode 13B and the pressure-sensitive conductive member 15.
  • the thickness of the elastic substrates 11A and 11B is preferably 10 ⁇ m to 100 ⁇ m, more preferably 20 ⁇ m to 75 ⁇ m, and even more preferably 25 ⁇ m to 50 ⁇ m. When the thickness of the elastic substrates 11A and 11B is within the range of 10 ⁇ m to 100 ⁇ m, the elastic substrates 11A and 11B can have sufficient strength and elasticity.
  • the adhesive layers 12A and 12B are provided on the transmission surfaces 112A and 111B of the elastic substrates 11A and 11B.
  • the adhesive layer 12A is provided between the elastic substrate 11A and the first electrode 13A
  • the adhesive layer 12B is provided between the elastic substrate 11B and the second electrode 13B.
  • the adhesive layers 12A and 12B have a function of increasing the adhesive force between the elastic substrates 11A and 11B and the first electrode 13A and the second electrode 13B, and fix the first electrode 13A and the second electrode 13B.
  • Adhesive layers 12A and 12B contain triazine compounds.
  • the adhesive layers 12A and 12B are formed by using a molecular adhesive containing a triazine compound.
  • a triazine thiol compound can be used.
  • a triazine thiol compound for example, a triazine ring having a thiol group (-SH group) or an alkali metal salt of a thiol group can be used. Any one of the functional groups may have another structure such as a dibutylamino group or an anirino group.
  • Specific examples of the triazinethiol compound include 6- (3-triethoxysilylpropylamino) -1,3,5-triazine-2,4-dithiol and 2,6-diazide-4- ⁇ 3- (tri).
  • sodium salts examples include 2,4,6-trimercapto-1,3,5-triazine monosodium salt and the like. These may be used alone or in combination of two or more. In addition, 1,3,5-triazine is also referred to as s-triazine.
  • the thickness of the adhesive layers 12A and 12B is preferably about 1 nm to 100 nm.
  • the adhesive layers 12A and 12B may be formed by using a general adhesive. In this case, the thicknesses of the adhesive layers 12A and 12B are preferably 1 ⁇ m to 20 ⁇ m, more preferably 3 ⁇ m to 15 ⁇ m, and even more preferably 5 ⁇ m to 10 ⁇ m.
  • the pair of the first electrode 13A and the second electrode 13B are provided between the elastic substrates 11A and 11B on one side of the elastic substrate 11.
  • the first electrode 13A is provided on the lower surface (the surface in the ⁇ Z axis direction) of the adhesive layer 12A, and is provided on the transmission surface 112A of the elastic substrate 11A via the adhesive layer 12A.
  • the second electrode 13B is provided on the upper surface (plane in the + Z axis direction) of the adhesive layer 12B, and is provided on the transmission surface 111B of the elastic substrate 11B via the adhesive layer 12B.
  • the first electrode 13A is composed of a pair of first electrodes 13A-1 and 13A-2 that are insulated from each other and provided opposite to each other.
  • the pair of first electrodes 13A-1 and 13A-2 are provided so as to face each other in a state of being insulated from each other, and have a comb tooth electrode whose tip is formed in a comb tooth shape.
  • the first electrodes 13A-1 and 13A-2 have a main body portion 131A-1 and 131A-2 formed linearly in the X-axis direction and a tip portion 132A-1 and 132A-2 formed in a comb-teeth shape. It has a comb tooth electrode) and terminal portions 133A-1 and 133A-2 to which external wiring is connected.
  • the main body portions 131A-1 and 131A-2 are formed in an elongated pattern, pass through the middle of the Y-axis direction side of the elastic substrate 11A, and are orthogonal to the X-axis direction side (orthogonal to the Y-axis direction side) of the elastic substrate 11A. It is provided so as to be substantially symmetrical with respect to the center line parallel to the side).
  • the tip portions 132A-1 and 132A-2 and the terminal portions 133A-1 and 133A-2 are electrically connected to each other on both ends thereof.
  • the tip portions 132A-1 and 132A-2 are provided at the position of the pressure-sensitive conductive member 15 on the + X-axis direction side in a plan view, and a plurality of comb teeth of the tip portions 132A-1 and 132A-2 are X. They are arranged alternately along the axial direction so as to be insulated from each other. The gap between the comb teeth is narrow.
  • the terminal portions 133A-1 and 133A-2 are formed in a rectangular shape and are provided at the positions of the ends of the elastic substrate 11A on the ⁇ X axis direction side in a plan view.
  • the terminal portions 133A-1 and 133A-2 are not covered with the adhesive layer 14.
  • main body portions 131A-1 and 131A-2 are arranged between the elastic substrate 11A and the adhesive layer 14, and the tip portions 132A-1 and 132A-2 are formed by the elastic substrate 11A and the pressure-sensitive conductive member 15. Placed between. That is, most of the main bodies 131A-1 and 131A-2 of the first electrodes 13A-1 and 13A-2 and the tip portions 132A-1 and 132A-2 sandwich the elastic substrate 11A and the adhesive layer 14 so as to sandwich them. Alternatively, it is arranged between the pressure-sensitive conductive member 15.
  • the second electrode 13B has a main body portion 131B formed linearly in the X-axis direction, a tip portion 132B, and a terminal portion 133B to which external wiring is connected.
  • the main body 131B is formed in an elongated pattern, passes through the middle of the Y-axis side of the elastic substrate 11A, and is parallel to the X-axis side (the side orthogonal to the Y-axis side) of the elastic substrate 11A. It is provided so as to pass through the center line.
  • the tip portion 132B and the terminal portion 133B are electrically connected to each other on both ends.
  • the tip portion 132B is provided at the position of the pressure-sensitive conductive member 15 on the + X-axis direction side in a plan view, is substantially rectangular in a plan view, and has a chamfered corner portion.
  • the terminal portion 133B is formed in a rectangular shape and is provided at the position of the end portion of the elastic substrate 11B on the ⁇ X axis direction side in a plan view.
  • the adhesive layer 14 is not coated on the terminal portion 133B.
  • a part of the main body 131B and the terminal 133B are provided on the transmission surface 111B of the elastic substrate 11B via the adhesive layer 12B, and most of the terminal 133B and the tip 132B are pressure-sensitive and conductive with the elastic substrate 11B. It is arranged between the member 15 and the member 15. That is, most of the main body 131B is arranged so as to be sandwiched between the elastic substrate 11B and the adhesive layer 14 by the elastic substrate 11B and the adhesive layer 14. The tip portion 132B is arranged so as to be sandwiched between the adhesive layer 14 and the pressure-sensitive conductive member 15 between the adhesive layer 14 and the pressure-sensitive conductive member 15.
  • Materials for forming the first electrode 13A and the second electrode 13B include gold (Au), silver (Ag), copper (Cu), nickel (Ni), iron (Fe), aluminum (Al), and tin (Sn). , Various metals such as lead (Pb), chromium (Cr) and cobalt (Co); alloys thereof; carbon-based materials such as carbon black, graphite (graphite), carbon nanotubes, carbon fiber (carbon fiber), and fullerene. Can be mentioned. As the materials forming the first electrode 13A and the second electrode 13B, these may be used alone or in combination of two or more.
  • the first electrode 13A and the second electrode 13B may be formed of one metal layer, or may be formed by laminating a plurality of metal layers.
  • the first electrode 13A and the second electrode 13B may be formed of a composite film in which the material forming the first electrode 13A and the second electrode 13B is used as a conductive member and dispersed in a binder such as a synthetic resin. ..
  • a binder such as a synthetic resin.
  • the first electrode 13A and the second electrode 13B having the tip portions 132A-1 and 132A-2 or the tip portions 132B that easily follow the local deformation of the elastic substrates 11A and 11B can be obtained.
  • the thickness of the first electrode 13A and the second electrode 13B is preferably 1 ⁇ m to 50 ⁇ m, more preferably 5 ⁇ m to 30 ⁇ m, and even more preferably 10 ⁇ m to 20 ⁇ m. When the thickness of the first electrode 13A and the second electrode 13B is within the range of 1 ⁇ m to 50 ⁇ m, sufficient conductivity can be ensured.
  • the thickness of the first electrode 13A and the second electrode 13B is determined according to the magnitude of the flowing current, but may be 50 ⁇ m or more.
  • the adhesive layer 14 is provided between the transmission surface 112A of the elastic substrate 11A and the transmission surface 111B of the elastic substrate 11B.
  • the adhesive layer 14 has a through hole 14a through which the pressure-sensitive conductive member 15 can penetrate.
  • the adhesive layer 14 for example, a silicone-based adhesive, an acrylic-based adhesive, a urethane-based adhesive, or the like can be used.
  • a double-sided adhesive sheet formed by using any of the above-mentioned adhesive materials, a double-sided adhesive tape made of any of the above-mentioned adhesive materials and a non-woven fabric, or the like.
  • the pressure-sensitive conductive member 15 is arranged between the first electrode 13A and the second electrode 13B.
  • the pressure-sensitive conductive member 15 is provided between the tip portions 132A-1 and 132A-2 of the first electrodes 13A-1 and 13A-2 and the tip portion 132B of the second electrode 13B, and the resistance value of that portion is determined. Has the function of lowering. Then, the first electrodes 13A-1 and 13A-2 in contact with the pressure-sensitive conductive member 15 are energized, and the first electrode 13A and the second electrode 13B are energized. That is, the resistance value of the pressure-sensitive conductive member 15 changes according to the change in the pressing force, and the contact resistance between the pressure-sensitive conductive member 15 and the first electrode 13A and the second electrode 13B also changes. The change in pressure can be regarded as the change in resistance value.
  • the pressure-sensitive conductive member 15 is elastically deformable and elastically deformed by a change in pressing force, and is between the first electrodes 13A-1 and 13A-2 and between the first electrode 13A and the second electrode 13B.
  • the electrical resistance value between them changes.
  • the pressure-sensitive conductive member 15 has a function of energizing the first electrodes 13A-1 and 13A-2 and energizing the first electrodes 13A and the second electrodes 13B.
  • the pressure-sensitive conductive member 15 is formed in a conical trapezoidal shape (faceted conical shape), and is arranged so that a large surface is in contact with the first electrode 13A and a small surface is in contact with the second electrode 13B. As a result, the area to which the pressing force is applied can be widened, and the load per unit area of the second electrode 13B on the tip portion 132B is increased.
  • the pressure-sensitive conductive member 15 is formed so that the upper surface thereof covers the tip portions 132A-1 and 132A-2 of the first electrodes 13A-1 and 13A-2 in a plan view.
  • the pressing force applied to the elastic substrate 11A is reliably transmitted to the pressure-sensitive conductive member 15.
  • the pressure-sensitive conductive member 15 can be formed by using a conductive elastomer containing a particulate conductive material 151 in the elastomer 152. If the pressure-sensitive conductive member 15 is a conductive elastomer containing the conductive material 151, it is easily deformed and restored by a pressing force in addition to the conduction by the conductive material 151.
  • the pressure-sensitive conductive member 15 preferably contains the conductive material 151 dispersed substantially uniformly in the elastomer 152.
  • a material having conductivity such as metal particles or a carbon-based material can be used.
  • the metal particles and the carbon-based material the same materials as those of the first electrode 13A and the second electrode 13B described above can be used.
  • the average particle size of the conductive material 151 is preferably 0.05 ⁇ m to 200 ⁇ m, more preferably 0.5 ⁇ m to 60 ⁇ m, and even more preferably 1.0 ⁇ m to 30 ⁇ m.
  • the average particle size of the conductive material 151 is in the range of 0.05 ⁇ m to 200 ⁇ m, the aggregation of the conductive material 151 can be suppressed and the dispersibility in the elastomer 152 can be enhanced.
  • the pressure-sensitive conductive member 15 is elastically deformed, the change in resistance due to the elastic deformation is slowed down by suppressing the movement of the conductive material 151 in the pressure-sensitive conductive member 15 from becoming relatively small. Can be reduced.
  • the average particle size means a volume average particle size based on an effective diameter, and the average particle size is measured by, for example, a laser diffraction / scattering method or a dynamic light scattering method.
  • the same elastomers as the elastic substrates 11A and 11B can be used.
  • the pressure-sensitive conductive member 15 has a small number of conductive materials 151 in contact with each other in a state where the pressing force by the pressing member or the like is not applied, and almost no conductive path is formed ( (See white circles in FIG. 4), so that the pressure-sensitive conductive member 15 has a very large resistance value. Then, when a pressing force acts on the pressure-sensitive conductive member 15, compressive stress is generated on the upper surface side of the pressure-sensitive conductive member 15. Due to this compressive stress, the conductive materials 151 approach each other and the number of the conductive materials 151 in contact with each other increases. Therefore, the conductive paths (black circles in FIG. 4) in the plane direction and the vertical direction of the pressure-sensitive conductive member 15.
  • the pressure-sensitive conductive member 15 preferably has a rubber hardness in the range of 30 to 70, and more preferably in the range of 50 to 60. When the rubber hardness is in the range of 40 to 70, the pressure-sensitive conductive member 15 can have sufficient strength and can exhibit a high restoring force.
  • the rubber hardness is a value defined by Japanese Industrial Standard JIS K6301.
  • the thickness of the pressure-sensitive conductive member 15 is preferably 0.1 mm to 10 mm, more preferably 0.5 mm to 5 mm, and even more preferably 0.7 mm to 3 mm.
  • the pressure-sensitive conductive member 15 can have sufficient strength and elasticity. Further, when the pressure-sensitive conductive member 15 is elastically deformed, conduction can be taken in the thickness direction (Z-axis direction), and conduction can be formed between the first electrode 13A and the second electrode 13B.
  • elastic substrates 11A and 11B cut out to a predetermined size in a plan view are prepared.
  • the surface of the prepared elastic substrate 11A is washed with a cleaning liquid such as water, alcohol, or acetone to remove dirt, foreign substances, and the like adhering to the surface of the elastic substrate 11A.
  • the adhesive layer 12A is formed by applying a molecular adhesive containing a triazine compound to the transmission surface 112A of the elastic substrate 11A and drying it.
  • a coating liquid (paste) containing a conductive material such as Ag particles and Cu particles is applied to the surface of the adhesive layer 12A to form the first electrode 13A.
  • the first electrode 13A is fixed by the adhesive layer 12A.
  • the surface of the prepared elastic substrate 11B is cleaned with a cleaning liquid to remove dirt, foreign substances, etc. adhering to the surface of the elastic substrate 11B.
  • a molecular adhesive containing a triazine compound is applied to the transmission surface 111B of the elastic substrate 11B and dried to form the adhesive layer 12B.
  • a coating liquid (paste) containing a conductive material such as Ag particles and Cu particles is applied to the surface of the adhesive layer 12B to form the second electrode 13B.
  • the second electrode 13B is fixed by the adhesive layer 12B.
  • a method for forming the first electrode 13A and the second electrode 13B in addition to a coating method in which a coating liquid containing a conductive material is applied, a electroless plating method, an electroplating method, a sputtering method, a method using vapor deposition, etc. Therefore, a method of forming a metal plating film or the like may be used.
  • the adhesive layer 14 is provided on the transmission surface 112A of the elastic substrate 11A so as to cover a part of the first electrode 13A.
  • the pressure-sensitive conductive member 15 is housed in the through hole 14a of the adhesive layer 14, and the pressure-sensitive conductive member 15 is brought into contact with the tip portion 132A-1 of the first electrode 13A-1.
  • the elastic substrate 11B is attached to the surface of the adhesive layer 14 (the surface in the ⁇ Z axis direction), the adhesive layer 14 and the pressure-sensitive conductive member 15 are sandwiched between the elastic substrate 11A and the elastic substrate 11B, and the pressure-sensitive conductivity is obtained.
  • the member 15 is brought into contact with the tip portion 132A-2 of the first electrode 13A-2.
  • the pressure sensitive member 10A according to the present embodiment can be obtained.
  • the pressure-sensitive member 10A is arranged between the two elastic substrates 11A and 11B and the pressure-sensitive conductive member 15 which is arranged between the elastic substrates 11A and 11B and comes into contact with the first electrode 13A and the second electrode 13B.
  • the first electrode 13A, the second electrode 13B, and the pressure-sensitive conductive member 15 are laminated in the order of the first electrode 13A, the pressure-sensitive conductive member 15, and the second electrode 13B downward from the transmission surface 112A of the elastic substrate 11A.
  • the pressure-sensitive conductive member 15 is composed of a conductive elastomer containing the conductive material 151 in a dispersed state in the elastomer 152. As shown in FIG.
  • the pressure sensitive member 10A exhibits a high electric resistance value.
  • the pressure-sensitive conductive member 15 When a pressing force acts on the pressure-sensitive member 10A by a pressing member or the like, the pressure-sensitive conductive member 15 is pressed, so that the conductive materials 151 contained in the pressure-sensitive conductive member 15 begin to come close to each other and become conductive.
  • the material 151 becomes dense.
  • the first electrode 13A and the second electrode 13B come into contact with the conductive material 151 to form a conduction path, so that the first electrodes 13A-1 and 13A-2 and the first electrode 13A and the second electrode 13B are connected to each other.
  • a current flows between the pressure-sensitive conductive members 15 and the resistance value of the pressure-sensitive conductive members 15 becomes low. Since the conduction path formed becomes three-dimensionally larger or smaller depending on the magnitude of the pressing force acting on the pressure-sensitive member, the magnitude of the pressing force can be detected by the resistance value.
  • the pressure-sensitive conductive member 15 when the pressing force acts on the working surface 111A of the elastic substrate 11A on which the pressing force acts, the pressure-sensitive conductive member 15 is pressed and the first electrode 13A of the pressure-sensitive conductive member 15 is pressed. -1 and 13A-2 are deformed so that the vicinity area on the installation surface side is crushed.
  • a conduction path is formed in the pressure-sensitive conductive member 15 in the height direction, so that the first electrode 13A and the elastic substrate 11B provided on the elastic substrate 11A are provided.
  • a current (first current) perpendicular to the installation surface of the first electrode 13A can be generated between the second electrode 13B and the second electrode 13B.
  • the first electrode 13A and the second electrode 13B between the elastic substrates 11A and 11B can be electrically connected, and the resistance (first resistance) between the first electrode 13A and the second electrode 13B is reduced.
  • the pressure-sensitive conductive member 15 when the pressure-sensitive conductive member 15 is pressed, compressive stress is generated on the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15. Due to the action of this compressive stress, the conductive materials 151 contained in the pressure-sensitive conductive member 15 come into close contact with each other. As a result, a large number of conductive paths are formed in the pressure-sensitive conductive member 15, particularly in the vicinity of the first electrode 13A of the pressure-sensitive conductive member 15 on the installation surface side, and energization can be performed.
  • a current (second current) parallel to the installation surface of the first electrode 13A can be generated between the pair of first electrodes 13A-1 and 13A-2 of the elastic substrate 11A.
  • the pair of first electrodes 13A-1 and 13A-2 of the elastic substrate 11A can be electrically connected, and the resistance (second resistance) between the pair of first electrodes 13A-1 and 13A-2 decreases. To do.
  • the change in the first resistance between the first electrode 13A and the second electrode 13B is in a state where the pressing force is lower than the change in the second resistance between the pair of first electrodes 13A-1 and 13A-2. There is a tendency for stable measurement. On the other hand, the change in the second resistance tends to be measured more stably in a state where the pressing force is higher than the change in the first resistance.
  • a low pressing force means that the pressing force applied to the working surface 111A of the elastic substrate 11A is, for example, in the range of 1 kPa or less
  • a high pressing force means that the pressing force applied to the acting surface 111A of the elastic substrate 11A. For example, it means a range exceeding 1 kPa.
  • the first resistor is preferable to the second resistor.
  • the pressing force applied to the pressure-sensitive conductive member 15 becomes large, the amount of change in the pressure-sensitive conductive member 15 in the height direction is limited to some extent, so that the pressure-sensitive conductive member 15 is formed in the height direction.
  • the conduction path does not increase so much, and the resistance value is less likely to change.
  • the pressure sensitive member 10A uses the first resistance between the two elastic substrates 11A and 11B when the pressing force is low, and when the pressing force is high, the elastic substrate 11A By using the second resistance between the pair of first electrodes 13A-1 and 13A-2, the resistance value can be stably detected over a wide range of pressing force with a simple configuration.
  • the pressure-sensitive member 10A can be provided with the first electrode 13A on the transmission surface 112A of the elastic substrate 11A provided with the acting surface 111A on which the pressing force acts among the elastic substrates 11A and 11B.
  • the first electrode 13A provided on the elastic substrate 11A can be provided on the pressed surface side of the pressure-sensitive conductive member 15.
  • FIG. 5 when a pressing force acts on the working surface 111A of the elastic substrate 11A, the pressing force applied to the working surface 111A can be applied to the pressure-sensitive conductive member 15 from the transmission surface 112A before being attenuated. ..
  • the pressing force acting on the pressure-sensitive conductive member 15 deforms the pressure-sensitive conductive member 15 so that the vicinity region on the installation surface side of the first electrode 13A is crushed.
  • Compressive stress acts on the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15, and energizes the inside of the pressure-sensitive conductive member 15, particularly the region near the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15.
  • a second current can be easily generated between the pair of first electrodes 13A-1 and 13A-2, and the rate of change of the second resistor can be increased.
  • the pressure-sensitive member laminates the adhesive layer 14, the first electrode 13A, and the elastic substrate 11B in this order from the transmission surface 112A side of the elastic substrate 11A in order of adhesion.
  • the first electrode 13A is arranged under the pressure-sensitive conductive member 15 provided in the layer 14.
  • the pressing force is attenuated by the pressure-sensitive conductive member 15 and transmitted to the first electrode 13A, and a current flows. Therefore, the sensitivity to the pressing force applied to the working surface 111A of the elastic substrate 11A tends to be difficult to increase.
  • the distance between the conductive materials 151 in the pressure-sensitive conductive member 15 is difficult to be narrowed, and there is a possibility that conduction is difficult to be obtained.
  • the pressure-sensitive member 10A maintains the pressing force applied to the working surface 111A of the elastic substrate 11A as much as possible on the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15. Since it can be transmitted in a state, it is possible to increase the detection sensitivity of the second current and suppress the variation in the magnitude of the pressing force. In particular, since the second current can stably measure the change in the current when the pressing force is relatively high, the second resistance can be detected more stably with high sensitivity when the pressing force is high.
  • the pressure-sensitive member 10A can include adhesive layers 12A and 12B containing a triazine-based compound between the elastic substrate 11A and the first electrode 13A and between the elastic substrate 11B and the second electrode 13B.
  • the pressure-sensitive member 10A can increase the adhesive force between the elastic substrate 11A and the first electrode 13A and between the elastic substrate 11B and the second electrode 13B. Therefore, the pressure-sensitive member 10A is peeled off between the elastic substrate 11A and the first electrode 13A and between the elastic substrate 11B and the second electrode 13B even if the elastic substrate 11A is repeatedly deformed. Can be suppressed.
  • the pressure sensitive member 10A preferably has an adhesive layer 14 between the two elastic substrates 11A and 11B.
  • the two elastic substrates 11A and 11B can be stably connected to each other, so that the pressure-sensitive member 10A can be improved in ease of handling.
  • a conductive elastomer containing the conductive material 151 in the elastomer 152 can be used as the pressure-sensitive member 10A. If the pressure-sensitive conductive member 15 is a conductive elastomer, in addition to being conducted by the conductive material 151, it is easily deformed and restored by a pressing force, so that pressure-sensitive conductivity is provided between the elastic substrates 11A and 11B. It can be conducted through the member 15 and the responsiveness to the pressing force can be improved. Further, it is possible to easily energize between the first electrode 13A and the second electrode 13B.
  • the pressure-sensitive member 10A can form the first electrodes 13A-1 and 13A-2 in a comb-teeth shape at the tips 132A-1 and 132A-2 located at the position of the pressure-sensitive conductive member 15 in a plan view. ..
  • the tips of the first electrodes 13A-1 and 13A-2 are formed by forming the shapes of the tip portions 132A-1 and 132A-2 in a comb-like shape and arranging a plurality of comb teeth alternately along the X-axis direction. It is possible to maintain a state in which the intervals between the portions 132A-1 and 132A-2 are substantially evenly narrow.
  • the first electrodes 13A-1 and 13A-2 are formed at the portion where the pressure-sensitive conductive member 15 is conductive. It becomes easier for each other to energize. Therefore, when the pressing force is applied to the working surface 111A of the elastic substrate 11A, it becomes easy to establish conduction between the first electrodes 13A-1 and 13A-2.
  • the pressure-sensitive member 10A can stably detect the resistance value over a wide range of pressing force when the pressing force is applied to the working surface 111A of the elastic substrate 11A from the outside. With a simple configuration, the feel when touched can be improved. Therefore, the pressure-sensitive member 10A can be suitably used as a pressure detection device (pressure-sensitive sensor) for a tactile sensor of a robot, a touch panel of an electronic device, or the like.
  • a pressure detection device pressure-sensitive sensor
  • Examples of electronic devices include devices equipped with touch panels such as information mobile terminals, mobile phones, personal computers, digital cameras, video cameras, car navigation systems, electronic organizers, calculators, and videophones.
  • FIG. 7 is a perspective view of a pressure detecting device to which the pressure sensitive member 10A is applied
  • FIG. 8 is a sectional view taken along line II-II of FIG.
  • the pressure detecting device 30 includes a pressure sensitive member 10A, a connecting portion 31, and a detecting portion 32.
  • the connecting portion 31 sandwiches the elastic substrates 11A and 11B of the pressure sensitive member 10A, the adhesive layers 12A and 12B, and one end portions (-Y-axis direction) of the first electrode 13A and the second electrode 13B, and is the first.
  • Each of the electrode 13A and the second electrode 13B is electrically connectably connected.
  • the connecting portion 31 has two insertion ports 311A and 311B in the vertical direction (Z-axis direction).
  • One end (-Y-axis direction) of the elastic substrate 11A, the adhesive layer 12A, and the first electrode 13A is inserted into one insertion port (insertion port on the + Z-axis direction) 311A, and the other insertion port (-Z-axis direction).
  • One end (-Y-axis direction) of the adhesive layer 12B, the second electrode 13B, and the elastic substrate 11B is inserted into the insertion port (311B on the direction side).
  • One insertion port 311A connects the first electrodes 13A-1 and 13A-2, and the other insertion port 311B connects the first electrode 13A and the second electrode 13B, so that the first electrodes 13A-1 and 13A are connected.
  • -It has a function of passing a current flowing through each other and a current flowing through the first electrode 13A and the second electrode 13B to the detection unit 32 via the wiring 34.
  • the detection unit 32 is connected to the pressure sensitive member 10 via the connection unit 31 and the wiring 34.
  • the detection unit 32 detects a change in the resistance value of the pressure-sensitive member 10A by detecting the current sent from the connection unit 31 as an electric signal.
  • the pressure detecting device 30 includes the pressure sensitive member 10A, when the pressure sensitive member 10A is pressed from the outside, the resistance value can be stably detected over a wide range of pressing force.
  • the elastic substrate 11B that does not have an action surface that receives the pressing force does not have to be elastically deformed, and therefore may be a rigid substrate that is the first substrate.
  • FIG. 9 shows an example of another configuration of the pressure sensitive member 10A.
  • the pressure-sensitive member 10A can include a rigid substrate 16 which is a first substrate instead of the elastic substrate 11B. That is, the pressure-sensitive member 10A has an elastic substrate 11A and a rigid base material 16 arranged so as to face the elastic substrate 11A, and the pressure-sensitive conductive member is located between the elastic substrate 11A and the rigid base material 16. 15 is arranged, the first electrode 13A is provided on the transmission surface 112A of the elastic substrate 11A, and the second electrode 13B is provided on the upper surface (+ Z axis direction) of the rigid base material 16.
  • the pressure-sensitive member 10A can be arranged in a state where the adhesive layer 14 and the pressure-sensitive conductive member 15 are sandwiched between the elastic substrate 11A and the rigid base material 16, the pressing force is received by the rigid base material 16 and is pressure-sensitive conductive. It can be reliably transmitted to the sex member 15. Therefore, the pressure-sensitive member 10A can stably transmit the pressing force to the pressure-sensitive conductive member 15. Further, since the pressure-sensitive member 10A is provided with the rigid base material 16, the strength is improved and the shape is easily maintained, so that the ease of handling of the pressure-sensitive member 10A can be improved.
  • the rigid base material 16 is provided so as to sandwich the adhesive layer 14 with the elastic substrate 11A, and has a function of reliably receiving the pressing force and reliably deforming the pressure-sensitive conductive member 15. ..
  • the rigid base material 16 is, for example, a plate-shaped one.
  • the pressure-sensitive member 10A includes the rigid base material 16, but for example, when the pressure-sensitive member 10A is used by being attached to some housing, the pressure-sensitive member 10A uses the rigid base material 16. It does not have to be prepared.
  • Examples of the material for forming the rigid base material 16 include polyamide (PA), polyimide (PI), polybutylene terephthalate (PET), polyethylene naphthalate (PEN), polyetherimide (PEI), and polyethersulfone (PES).
  • Synthetic resins such as polystyrene (PS), polymethylmethacrylate (PMMA), polyethylenenitrile, polyetheretherketone (PEEk), polyphenylene sulfide (PPS), phenol, epoxy (with glass filler) and polycarbonate (PC) can be used. It can. These may be used alone or in combination of two or more. Among these, it is preferable to use polyimide, polyethylene terephthalate, or the like from the viewpoint of heat resistance and the like.
  • the material for forming the rigid base material 16 includes metals such as Al, Mg, Cu, Ni, Co, Cr, Fe, Zn, Pb, and Ti, and alloys thereof; Al, Mg. , Si, Ge, and metal oxides such as be; silicon nitride (Si 3 N 4), boron nitride (BN), and metal nitrides such as silicon carbide (SiC); it is also possible to use a glass material or the like.
  • the thickness of the rigid base material 16 can be appropriately designed and depends on the type of material, but if it is a synthetic resin material having low rigidity, it is preferably 0.5 mm to 1.5 mm, and a metal having high rigidity. If it is a material, it is preferably 0.1 mm to 0.5 mm. Within this range, the rigid base material 16 can have sufficient strength.
  • the first electrode 13A and the second electrode 13B may be provided only on either the elastic substrate 11A or the elastic substrate 11B.
  • the pressure-sensitive member 10A may be provided with the first electrode 13A and the second electrode 13B on the transmission surface 112A of the elastic substrate 11A.
  • the elastic substrate 11B may be made of cloth or the like.
  • the pressure sensitive member 10A attaches the adhesive layer 12A or 12B when the first electrode 13A and the second electrode 13B can be fixed to the transmission surface 112A or 111B. You don't have to prepare.
  • first electrode 13A and the second electrode 13B can be fixed to the adhesive layers 12A and 12B, at least a part of the transmission surfaces 112A and 111B in contact with the first electrode 13A and the second electrode 13B. It may be formed in.
  • the number of electrodes may be four or more.
  • the pressure-sensitive member 10A may be provided with four or more electrodes on the elastic substrates 11A or 11B, or may be provided on elastic substrates other than the elastic substrates 11A and 11B.
  • the first electrodes 13A-1 and 13A-2 have the tip portions 132A-1 and 132A-2 as comb tooth electrodes and face each other, but the present invention is not limited to this.
  • the first electrodes 13A-1 and 13A-2 may have the tip portions 132A-1 and 132A-2 formed in a spiral shape in a plan view and may be arranged so as to face each other while maintaining insulation.
  • the electrodes formed in the shape may be arranged to face each other while maintaining the insulating property.
  • the pressure sensitive member 10B according to the second embodiment will be described.
  • the pressure-sensitive member 10B according to the present embodiment is provided with a second substrate on the pressure-sensitive member 10A according to the first embodiment shown in FIGS. 1 to 3 above, and a second substrate is provided between the elastic substrate 11B and the second substrate. Further, a pressure-sensitive conductive member is provided.
  • FIG. 11 is an exploded perspective view showing an example of the configuration of the pressure-sensitive member according to the second embodiment
  • FIG. 12 is a sectional view taken along line II-II of the pressure-sensitive member in a laminated state in FIG. Is.
  • the pressure-sensitive member 10B has a second substrate 41 arranged below the elastic substrate 11B so as to face the elastic substrate 11B, and a third electrode provided on the second substrate 41. It has 13C and two pressure-sensitive conductive members 15A and 15B.
  • the pressure-sensitive member 10B arranges the elastic substrates 11A and 11B and the second substrate 41 at positions rotated by 90 ° C. around the installation positions of the pressure-sensitive conductive members 15A and 15B in a plan view. ..
  • the second substrate 41 can be formed by using the same materials as the elastic substrates 11A and 11B and the second substrate 41.
  • the adhesive layers 12A to 12C are provided on the elastic substrates 11A and 11B and the second substrate 41, respectively.
  • the adhesive layer 12A is provided on the transmission surface 112A of the elastic substrate 11A
  • the adhesive layer 12B is provided on the transmission surface 111B of the elastic substrate 11B
  • the adhesive layer 12C is provided on the transmission surface 411 of the second substrate 41.
  • the first electrode 13A, the second electrode 13B, and the third electrode 13C are provided on the surfaces of the adhesive layers 12A to 12C of the elastic substrates 11A and 11B and the second substrate 41, respectively.
  • the first electrode 13A is provided on the adhesive layer 12A of the elastic substrate 11A.
  • the second electrode 13B is provided between the elastic substrate 11B and the second substrate 41, and is provided on the adhesive layer 12B of the elastic substrate 11B.
  • the third electrode 13C is provided between the elastic substrate 11B and the second substrate 41, and is provided on the adhesive layer 12C formed on the transmission surface 411 of the second substrate 41.
  • the adhesive layers 14A and 14B are provided between the elastic substrates 11A and 11B and the second substrate 41.
  • the adhesive layer 14A is provided between the transmission surface 112A of the elastic substrate 11A and the transmission surface 111B of the elastic substrate 11B, and has a through hole 14a through which the pressure-sensitive conductive member 15A can penetrate.
  • the adhesive layer 14B is provided between the transmission surface 112B2 of the elastic substrate 11B and the transmission surface 411 of the second substrate 41, and has a through hole 14a through which the pressure-sensitive conductive member 15B can penetrate.
  • the pressure-sensitive conductive members 15A and 15B are provided between any of the first electrode 13A to the third electrode 13C.
  • the pressure-sensitive conductive member 15A is provided between the elastic substrates 11A and 11B, and is formed of the tip portions 132A-1 and 132A-2 of the first electrodes 13A-1 and 13A-2 and the tip portions 132C of the third electrode 13C. It is provided in between.
  • the pressure-sensitive conductive member 15B is provided between the elastic substrate 11B and the second substrate 41, and is provided between the tip portion 132B of the second electrode 13B and the tip portion 132C of the third electrode 13C.
  • the pressure-sensitive member 10B has two elastic substrates 11A and 11B, a second substrate 41, and two pressure-sensitive conductive members 15A and 15B, and transmits the first electrode 13A to the elastic substrate 11A.
  • the second electrode 13B is provided on the surface 112A, and the second electrode 13B is provided on the transmission surface 411 of the second substrate 41.
  • a first current is generated between the two elastic substrates 11B and the second substrate 41, and the pressure sensitive member 10B can generate a second current in the elastic substrate 11A when a pressing force is applied. Therefore, when the pressing force is applied, the pressure-sensitive member 10B uses the first resistance between the elastic substrate 11B and the second substrate 41 when the pressing force is low, and the elastic substrate 11A when the pressing force is high.
  • the second resistance of the above the resistance value can be stably detected over a wide range of pressing force with a simple configuration.
  • the pressure sensitive member 10B generates a first current between the transmission surface 112B2 of the set of elastic substrates 11A and the transmission surface 411 of the second substrate 41, and a pair of first currents are generated on the transmission surface 112A of the elastic substrate 11A. Electrodes 13A-1 and 13A-2 are provided to generate a second current. Therefore, the pressure-sensitive member 10B can be separated into a set of substrates that generate a first current and a substrate that includes a pair of electrodes that generate a second current. Therefore, the pressure-sensitive member 10B can arbitrarily design a position where the first current is generated and the first resistance is measured and a position where the second current is generated and the second resistance is measured.
  • Example 1 [Manufacturing of pressure sensitive member] Two elastic substrates 11A and 11B (see FIG. 1) cut out to a predetermined size from silicone rubber (“ultra-thin SR sheet”, manufactured by AS ONE Corporation, thickness 0.1 mm) were prepared. One of the prepared elastic substrates 11A is immersed in an ethanol solution, washed for 30 seconds, subjected to corona discharge for 20 seconds, and then a molecular adhesive is applied to one main surface of the elastic substrate 11A and dried. , An adhesive layer 12A (see FIG. 3) was formed.
  • Ag ink (“SSP2801”, manufactured by Toyobo Co., Ltd.) is applied to the surface of the adhesive layer 12A to form a pair of first electrodes 13A (see FIG. 1) arranged so that the tips are comb-shaped. did.
  • a part of the double-sided adhesive tape (“No.7082”, manufactured by Teraoka Seisakusho Co., Ltd.) was hollowed out as the adhesive layer 14 (see FIG. 1) to form a through hole 14a (see FIG. 1), and then the through hole 14a was formed.
  • a double-sided adhesive tape was attached onto the elastic substrate 11A on which the pair of first electrodes 13A was formed so that the portion of the first electrode 13A was located at the tip portion of the pair of first electrodes 13A.
  • the resistance between the first electrode and the second electrode had a high rate of change in the resistance in the low pressure region where the pressure was about 1 kPa or less, but the pressure was about 1 kPa.
  • the rate of change in resistance was low, and it was difficult to measure the change in resistance value.
  • the resistance between the pair of first electrodes was lower in the low voltage region where the pressure was about 1 kPa or less than the resistance between the first electrode and the second electrode, but the pressure was higher.
  • the resistance value stably decreased at a constant rate, and the change in the resistance value could be measured.
  • the resistance value between the first electrode and the second electrode is measured in the low pressure region where the pressure is about 1 kPa or less, and the pair of first electrodes are paired in the high pressure region where the pressure exceeds about 1 kPa.
  • the pressure-sensitive member of one embodiment can stably detect the pressing force over a wide range.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

Cet élément sensible à la pression comprend : une pluralité de substrats comprenant au moins une électrode; et un élément électroconducteur sensible à la pression qui est disposé entre la pluralité de substrats et qui est en contact avec les électrodes. Les électrodes comprennent une paire de premières électrodes formées sur un côté surface du substrat, et une seconde électrode formée de manière à prendre en sandwich l'élément électroconducteur sensible à la pression. Au moins un substrat parmi la pluralité de substrats comporte un substrat élastique qui se déforme élastiquement en raison de l'action d'une force de pression. L'élément électroconducteur sensible à la pression se déforme élastiquement en raison de la déformation élastique du substrat élastique, et une telle déformation modifie la résistance électrique entre la paire de premières électrodes, et modifie la résistance électrique entre les premières électrodes et la seconde électrode.
PCT/JP2020/007489 2019-03-25 2020-02-25 Élément sensible à la pression et dispositif de détection de pression Ceased WO2020195461A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113143206A (zh) * 2021-02-23 2021-07-23 添可智能科技有限公司 护理设备、弹性检测设备及检测方法
CN115439895A (zh) * 2022-09-16 2022-12-06 维沃移动通信有限公司 指纹压感模组及电子设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007107523A1 (fr) * 2006-03-17 2007-09-27 Iee International Electronics & Engineering S.A. Capteur de pression pour mesurer une caractéristique d'une pression appliquée sur le capteur
JP2009503867A (ja) * 2005-07-29 2009-01-29 スリーエム イノベイティブ プロパティズ カンパニー 櫛歯状の力スイッチ及びセンサー
JP2009298063A (ja) * 2008-06-16 2009-12-24 Nippon Zeon Co Ltd 積層体及び配線基板
JP2012159463A (ja) * 2011-02-02 2012-08-23 Canon Chemicals Inc 感圧センサ体

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009503867A (ja) * 2005-07-29 2009-01-29 スリーエム イノベイティブ プロパティズ カンパニー 櫛歯状の力スイッチ及びセンサー
WO2007107523A1 (fr) * 2006-03-17 2007-09-27 Iee International Electronics & Engineering S.A. Capteur de pression pour mesurer une caractéristique d'une pression appliquée sur le capteur
WO2007107522A1 (fr) * 2006-03-17 2007-09-27 Iee International Electronics & Engineering S.A. Dispositifs avec une couche sensible à la pression comprenant un matériau organique intrinsèquement sensible à la pression
WO2007107525A1 (fr) * 2006-03-17 2007-09-27 Iee International Electronics & Engineering S.A. Capteur de pression
JP2009298063A (ja) * 2008-06-16 2009-12-24 Nippon Zeon Co Ltd 積層体及び配線基板
JP2012159463A (ja) * 2011-02-02 2012-08-23 Canon Chemicals Inc 感圧センサ体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113143206A (zh) * 2021-02-23 2021-07-23 添可智能科技有限公司 护理设备、弹性检测设备及检测方法
CN113143206B (zh) * 2021-02-23 2023-08-01 添可智能科技有限公司 护理设备、弹性检测设备及检测方法
CN115439895A (zh) * 2022-09-16 2022-12-06 维沃移动通信有限公司 指纹压感模组及电子设备

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