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WO2020181643A1 - Détecteur photoélectrique flexible et procédé de fabrication de détecteur photoélectrique flexible - Google Patents

Détecteur photoélectrique flexible et procédé de fabrication de détecteur photoélectrique flexible Download PDF

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Publication number
WO2020181643A1
WO2020181643A1 PCT/CN2019/086346 CN2019086346W WO2020181643A1 WO 2020181643 A1 WO2020181643 A1 WO 2020181643A1 CN 2019086346 W CN2019086346 W CN 2019086346W WO 2020181643 A1 WO2020181643 A1 WO 2020181643A1
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WIPO (PCT)
Prior art keywords
carbon nanotube
walled carbon
nanotube film
film
quantum dots
Prior art date
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Ceased
Application number
PCT/CN2019/086346
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English (en)
Chinese (zh)
Inventor
罗成志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Technology Co Ltd
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Filing date
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Publication of WO2020181643A1 publication Critical patent/WO2020181643A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/50—Photovoltaic [PV] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80—Constructional details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

Definitions

  • This application relates to the field of detection technology, in particular to a flexible photodetector and a method for preparing the flexible photodetector.
  • SWNTs Single-walled carbon nanotube carbornanotubes
  • Single-walled carbon nanotubes to assemble flexible photodetectors need to solve two problems: one is that single-walled carbon nanotubes (single-walled carbornanotubes; SWNTs) themselves have low light absorption rate and lack of light gain mechanism, so the response of the detector is low; The second is that single-walled carbornanotubes (SWNTs) film will change in resistance due to deformation during folding and stretching, thereby changing the performance of the photodetector.
  • the existing flexible photodetectors assembled with single-wall carbon nanotubes have defects and need to be improved.
  • the existing flexible photodetector has the technical problem that the single-wall carbon nanotube film is deformed.
  • the embodiment of the application provides a flexible photodetector, which includes:
  • a single-walled carbon nanotube film is disposed on the polydimethylsiloxane film, and the single-walled carbon nanotube film includes at least one layer of corrugated structure;
  • the gold electrodes are arranged at the two ends of the single-walled carbon nanotube film in the direction of force in which the wrinkles are formed.
  • the single-wall carbon nanotube film is provided with perovskite quantum dots.
  • the single-walled carbon nanotube film includes a wrinkled area and a flat area, and the wrinkled structure is disposed in the wrinkled area.
  • the wrinkle region includes a first wrinkle region and a second wrinkle region.
  • the first wrinkle region and the second wrinkle region are arranged at Flat areas on both sides.
  • the perovskite quantum dots are arranged in the first fold area.
  • the perovskite quantum dots are arranged in the second fold area.
  • the perovskite quantum dots are arranged in a flat area.
  • the perovskite quantum dots are arranged in the flat area and the first fold area.
  • the perovskite quantum dots are arranged in the flat area and the second fold area.
  • the perovskite quantum dots are arranged in the first fold area and the second fold area.
  • the cross-sectional shape of the corrugated structure is rectangular in the state of not being folded or stretched.
  • the cross-sectional shape of the fold structure is trapezoidal in the state of not being folded or stretched.
  • the embodiment of the application provides a method for preparing a flexible photodetector, which includes:
  • a gold electrode is provided, and gold electrodes are arranged at both ends of the force direction in which the single-walled carbon nanotube film forms wrinkles.
  • the step of providing the polydimethylsiloxane film includes: stretching the polydimethylsiloxane film to both sides by 30%-50%, and after stretching Fix it on the glass surface to form a pre-stretched polydimethylsiloxane film.
  • the step of forming the single-walled carbon nanotube film into at least one layer of pleated structure includes: transferring the single-walled carbon nanotube on the pre-stretched polydimethylsiloxane film film.
  • the step of transferring the single-walled carbon nanotube film on the pre-stretched polydimethylsiloxane film includes: The water surface is then lifted up with a pre-stretched polydimethylsiloxane film, and then dried at 60°C for 24 hours.
  • the step of forming the single-walled carbon nanotube film into at least one layer of pleated structure further includes: tearing off the pre-stretched polydimethylsiloxane film from the glass, At this time, the strain is released, and the polydimethylsiloxane film will shrink to its original length due to elasticity.
  • the step of arranging gold electrodes at both ends of the force direction in which the single-walled carbon nanotube film forms wrinkles includes: forming the wrinkle in the single-wall carbon nanotube film in the force direction
  • the gold electrodes are prepared by evaporation or PVD at the two ends of the upper surface.
  • the method for preparing the flexible photodetector provided by the present application, it further includes forming perovskite quantum dots on the single-walled carbon nanotube film.
  • the step of forming perovskite quantum dots on the single-walled carbon nanotube film includes: forming perovskite quantum dots on the single-walled carbon nanotube film by chemical deposition point.
  • the beneficial effects of the present application are: the present application provides a flexible photodetector and a method for preparing a flexible photodetector.
  • the flexible photodetector includes a polydimethylsiloxane film, a single-wall carbon nanotube film, and a gold electrode.
  • the single-walled carbon nanotube film is disposed on the polydimethylsiloxane film, the single-walled carbon nanotube film includes at least one layer of corrugated structure, and the gold electrode is disposed on the single-walled carbon nanotube film to form folds During the folding and stretching of the single-walled carbon nanotube film, the wrinkled structure of the single-walled carbon nanotube film will reduce the deformation, alleviating the existing flexible photodetector of the single-walled carbon nanotube The technical problem of film deformation.
  • FIG. 1 is a first schematic top view of a flexible photodetector provided by an embodiment of this application;
  • FIG. 2 is a first cross-sectional schematic diagram of a flexible photodetector provided by an embodiment of this application;
  • FIG. 3 is a schematic top view of a second type of flexible photodetector provided by an embodiment of the application.
  • FIG. 4 is a third schematic top view of a flexible photodetector provided by an embodiment of the application.
  • FIG. 5 is a schematic top view of a fourth type of flexible photodetector provided by an embodiment of the application.
  • FIG. 6 is a schematic top view of a fifth type of flexible photodetector provided by an embodiment of the application.
  • FIG. 7 is a second cross-sectional schematic diagram of a flexible photodetector provided by an embodiment of the application.
  • FIG. 8 is a schematic top view of a sixth type of flexible photodetector provided by an embodiment of the application.
  • FIG. 9 is a seventh schematic top view of a flexible photodetector provided by an embodiment of the application.
  • the embodiment of the present application can solve this problem.
  • the flexible photodetector provided by this application includes a polydimethylsiloxane film 101, a single-walled carbon nanotube film 102, and a gold electrode 103.
  • the single-walled carbon nanotube film 102 is provided with On the polydimethylsiloxane film 101, the single-walled carbon nanotube film 102 includes at least one layer of corrugated structure 104, and the gold electrode 103 is arranged on the single-walled carbon nanotube film 102 to form a wrinkled force Both ends in the direction.
  • the flexible photodetector includes a polydimethylsiloxane film, a single-wall carbon nanotube film, and a gold electrode.
  • the single-wall carbon nanotube film is disposed on the polydimethylsiloxane.
  • the single-walled carbon nanotube film includes at least one layer of corrugated structure, and the gold electrodes are arranged at both ends of the single-walled carbon nanotube film in the direction of force in which the wrinkles are formed; During the stretching process, the wrinkled structure of the single-walled carbon nanotube film will reduce the deformation, which alleviates the technical problem of the existing flexible photodetector that the single-walled carbon nanotube film is deformed.
  • the single-walled carbon nanotube film 102 includes a corrugated region 202 and a flat region 201, and the corrugated structure 104 is disposed in the corrugated region 202.
  • the single-walled carbon nanotube film 102 is provided with perovskite quantum dots 105.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is arranged in a single layer, and the single-layer arrangement has only one fold, which is easy to operate.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is partially arranged in multiple layers, and the multiple layers are arranged to have at least two folds.
  • the setting can better reduce the deformation during folding and stretching.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is partially arranged in multiple layers, and the multiple layers are arranged to have at least two folds.
  • the setting can better reduce the deformation during folding and stretching, and the shape of each layer of the multi-layer setting is different.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is partially arranged in multiple layers.
  • the multilayer arrangement has at least two folds. The multilayer arrangement can better reduce In the process of folding and stretching, the shape of each layer in the multi-layer setting is the same.
  • the wrinkle area 202 includes a first wrinkle area 2001 and a first wrinkle area 2002.
  • the first wrinkle area 2001 and the first wrinkle area The area 2002 is arranged on both sides of the flat area 201, the left side of the flat area 201 is the first fold area 2001, and the right side of the flat area 201 is the first fold area 2002.
  • the fold region 202 includes a first fold region 2001 and a first fold region 2002, and the first fold region 2001 and the first fold region 2002 are arranged next to each other.
  • the perovskite quantum dot 105 is disposed in the first fold area 2001.
  • the first fold area 2001 is fully covered with perovskite quantum dots 105, a part of the first fold area 2002 is provided with perovskite quantum dots 105, and the fully covered area is set at The entire area is covered in this area, and the flat area 201 is not provided with perovskite quantum dots 105.
  • the perovskite quantum dots 105 are fully covered in the first fold area 2002, a part of the first fold area 2001 is provided with perovskite quantum dots 105, and the flat area 201 is not provided with perovskite quantum dots 105 .
  • a part of the first fold region 2001 is provided with perovskite quantum dots 105
  • a part of the first fold region 2002 is provided with perovskite quantum dots 105
  • the flat region 201 is not provided with perovskite quantum dots.
  • the first fold area 2001 is fully covered with perovskite quantum dots 105
  • the first fold area 2002 is fully covered with perovskite quantum dots 105
  • the flat area 201 is not provided with perovskite quantum dots 105.
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2001 is fully covered with perovskite quantum dots 105
  • a part of the first fold area 2002 is provided with perovskite Quantum dot 105.
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2002 is fully covered with perovskite quantum dots 105
  • a part of the first fold area 2001 is provided with perovskite.
  • Quantum dot 105 is provided.
  • a portion of the flat area 201 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2001 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2002 is provided with calcium. Titanium ore quantum dot 105.
  • a part of the flat region 201 is provided with perovskite quantum dots 105
  • a part of the first fold region 2002 is provided with perovskite quantum dots 105
  • a part of the first fold region 2001 is provided with calcium. Titanium ore quantum dot 105.
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2001 is fully covered with perovskite quantum dots 105
  • the first fold area 2002 is not provided with perovskite quantum dots 105 .
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2002 is fully covered with perovskite quantum dots 105
  • the first fold area 2001 is not provided with perovskite quantum dots 105 .
  • a portion of the flat area 201 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2001 is provided with perovskite quantum dots 105
  • the first fold area 2002 The perovskite quantum dot 105 is not provided.
  • a portion of the flat area 201 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2002 is provided with perovskite quantum dots 105
  • the first fold area 2001 is not provided with perovskite quantum dots.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2001 is fully covered with the perovskite quantum dots 105, and the first fold area 2002 is partially covered with perovskite quantum dots. Point 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2002 is fully covered with the perovskite quantum dots 105, and a part of the first fold area 2001 is provided with perovskite quantum dots. Point 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, a part of the first fold area 2001 is provided with perovskite quantum dots 105, and a part of the first fold area 2002 is provided with perovskite. Ore quantum dots 105.
  • the perovskite quantum dots 105 in the flat area 201 are completely covered, a part of the first fold area 2001 is provided with perovskite quantum dots 105, and the first fold area 2002 is not provided with perovskite quantum dots. 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, a part of the first fold area 2002 is provided with perovskite quantum dots 105, and the first fold area 2001 is not provided with perovskite quantum dots. 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2001 is fully covered with the perovskite quantum dots 105, and the first fold area 2002 is not provided with the perovskite quantum dots 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2002 is fully covered by the perovskite quantum dots 105, and the first fold area 2001 is not provided with the perovskite quantum dots 105.
  • the perovskite quantum dots 105 are arranged in the flat area 201 and the first fold area 2001.
  • the perovskite quantum dots 105 are arranged in the flat area 201 and the first corrugated area 2002.
  • the perovskite quantum dots 105 are disposed in the first fold region 2001 and the first fold region 2002.
  • the perovskite quantum dots 105 are arranged in the first fold area 2001 and the first fold area 2002 and the flat area 201.
  • the cross-sectional shape of the corrugated structure 104 is rectangular, and the appearance is more beautiful.
  • the cross-sectional shape of the corrugated structure 104 is a trapezoid in the state of not being folded or stretched.
  • the cross-sectional shape of the fold structure 104 is a semi-circular arc shape. This shape is the most natural and does not require excessive operations to change the contraction after stretching.
  • the cross-sectional shape of the fold structure 104 of the first fold region 2001 is a semicircular arc shape
  • the cross-sectional shape of the fold structure 104 of the first fold region 2002 is a rectangle.
  • the cross-sectional shape of the fold structure 104 of the first fold region 2001 is a semicircular arc shape
  • the cross-sectional shape of the fold structure 104 of the first fold region 2002 is a trapezoid.
  • the cross-sectional shape of the corrugated structure 104 in the first corrugated region 2002 is a semi-circular arc shape
  • the cross-sectional shape of the corrugated structure 104 in the first corrugated region 2001 is a rectangle.
  • the cross-sectional shape of the fold structure 104 of the first fold region 2002 is a semicircular arc shape, and the cross-sectional shape of the fold structure 104 of the first fold region 2001 is a trapezoid.
  • the principle of thermal expansion and contraction can be used to heat the polydimethylsiloxane film 101 and fix it on a glass plate, and then lay the single-walled carbon nanotube film 102 on the glass plate. Then use the pre-stretched polydimethylsiloxane film 101 to lift it up. After drying, tear off the polydimethylsiloxane film 101 from the glass at a low temperature. The siloxane-based film 101 is stretched after heat treatment, and the same effect can be achieved. The single-walled carbon nanotube film 102 forms folds.
  • a single-walled carbon nanotube film 102 with a corrugated structure 104 is prepared on a flexible polydimethylsiloxane film 101, and then calcium is coated on the single-walled carbon nanotube film 102 with a corrugated structure 104 Titanite quantum dots 105 and perovskite quantum dots 105 have high photoelectric responsivity.
  • the single-walled carbon nanotube film 102 of the pleated structure 104 will not change its resistance when deformed greatly.
  • the photoelectric detection has both flexibility and light response. Degree and stability.
  • the preparation method of the flexible photodetector provided by this application includes:
  • a gold electrode 103 is provided, and the gold electrode 103 is provided at both ends of the single-walled carbon nanotube film 102 in the force direction where the wrinkles are formed.
  • the step of providing the polydimethylsiloxane film 101 includes: stretching the polydimethylsiloxane film 101 laterally by 30%-50%, and fixing it on both sides after stretching. On the glass surface, a pre-stretched polydimethylsiloxane film 101 is formed.
  • the step of forming the single-walled carbon nanotube film 102 into at least one layer of pleated structure 104 includes: transferring the single-walled carbon nanotube film 102 on the pre-stretched polydimethylsiloxane film 101.
  • the step of transferring the single-walled carbon nanotube film 102 on the pre-stretched polydimethylsiloxane film 101 includes: firstly lay the single-walled carbon nanotube film 102 on the water surface, and then The pre-stretched polydimethylsiloxane film 101 was used to lift it up, and then dried at 60°C for 24 hours.
  • the pre-stretched polydimethylsiloxane film 101 is torn off from the glass. At this time, the strain is released. Due to the elastic effect, the polydimethylsiloxane film 101 will shrink to its original length. . During the shrinking process of the polydimethylsiloxane film 101, the single-walled carbon nanotube film 102 on the surface will form a wrinkle structure 104.
  • the step of forming the single-walled carbon nanotube film 102 into at least one layer of pleated structure 104 further includes: tearing off the pre-stretched polydimethylsiloxane film 101 from the glass, and the strain Release, due to the elastic effect, the polydimethylsiloxane film 101 will shrink to its original length.
  • the single-walled carbon nanotube film 102 on the surface will form a wrinkled structure 104, and the deformation of the single-walled carbon nanotube film 102 during the folding and stretching process will not cause a large resistance change, thus Make the performance of the flexible photodetector stable.
  • the step of arranging gold electrodes 103 at both ends of the single-walled carbon nanotube film 102 in the force direction where the wrinkles are formed includes:
  • the gold electrode 103 is prepared by evaporation or PVD at the end.
  • it further includes perovskite quantum dots 105 formed on the single-walled carbon nanotube film 102.
  • the single-walled carbon nanotube film 102 itself is flexible due to its low light absorption rate and lack of light gain mechanism. The responsivity of the photodetector is low. By adding perovskite quantum dots, the optical gain mechanism is increased, thereby improving the responsivity of the flexible photodetector.
  • the step of forming perovskite quantum dots 105 on the single-walled carbon nanotube film 102 includes: forming perovskite quantum dots 105 on the single-walled carbon nanotube film 102 by chemical deposition.
  • the flexible photodetector includes a polydimethylsiloxane film, a single-wall carbon nanotube film, and a gold electrode.
  • the single-wall carbon nanotube film Is disposed on the polydimethylsiloxane film, the single-walled carbon nanotube film includes at least one layer of corrugated structure, and the gold electrodes are disposed on two directions in which the single-walled carbon nanotube film forms wrinkles.
  • the wrinkled structure of the single-walled carbon nanotube film will reduce the deformation, which alleviates the technical problem of the existing flexible photodetector that the single-walled carbon nanotube film is deformed.

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Abstract

La présente invention concerne un détecteur photoélectrique flexible et un procédé de fabrication du détecteur photoélectrique flexible. Le détecteur photoélectrique flexible comprend un film mince de polydiméthylsiloxane, un film mince de nanotubes de carbone à paroi unique et des électrodes en or, le film mince de nanotubes de carbone à paroi unique étant disposé sur le film mince de polydiméthylsiloxane, le film mince de nanotubes de carbone à paroi unique comprenant au moins une couche de structure ondulée, les électrodes en or étant disposées au niveau de deux extrémités du film mince de nanotubes de carbone à paroi unique dans une direction de force dans laquelle une ondulation est formée ; et pendant un processus de pliage et d'étirement du film mince de nanotubes de carbone à paroi unique, la déformation de la structure ondulée du film mince de nanotubes de carbone à paroi unique peut être réduite, ce qui permet d'atténuer le problème technique de déformation du film mince de nanotubes de carbone à paroi unique du photodétecteur flexible existant.
PCT/CN2019/086346 2019-03-14 2019-05-10 Détecteur photoélectrique flexible et procédé de fabrication de détecteur photoélectrique flexible Ceased WO2020181643A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910195371.2A CN109950400A (zh) 2019-03-14 2019-03-14 柔性光电探测器和柔性光电探测器制备方法
CN201910195371.2 2019-03-14

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WO2020181643A1 true WO2020181643A1 (fr) 2020-09-17

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CN112683156B (zh) * 2020-12-04 2024-01-23 陕西电器研究所 一种柔性双向大应变传感器及其应用方法

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CN106927448A (zh) * 2017-03-17 2017-07-07 武汉大学 一种单壁碳纳米管/金属薄膜传感器及其制备方法与应用
CN108963079A (zh) * 2017-05-17 2018-12-07 清华大学 光电探测元件以及光电探测器

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