WO2020039551A1 - Operation fluctuation detection device and abnormality decision system - Google Patents

Abstract

This operation fluctuation detection device (2) extracts a signal in a target frequency range from a detection signal of an acoustic emission wave generated by the rotation of a rotational machine (300), and detects a fluctuation of an operation of the rotational machine (300) on the basis of the difference between a DC value of the extracted frequency band signal and a normal value.

Description

Operation fluctuation detection device and abnormality determination system

The present invention relates to an operation fluctuation detecting device for detecting a fluctuation in the operation of a rotary machine and an abnormality determination system.

2. Description of the Related Art Conventionally, there has been proposed an apparatus that determines an abnormality of a rotary machine based on a change in vibration generated by rotation of the rotary machine.
For example, in the vibration inspection device described in Patent Literature 1, the strength of a vibration wave detected from a rolling component is selected to be any of a displacement amplitude, a velocity amplitude, and an acceleration amplitude, and the vibration wave is detected. The intensity is frequency-analyzed to calculate a statistic of the amplitude spectrum of the selected evaluation amount.
The rolling component is a rotating machine having a rotating mechanism, and the sensor detects vibration generated by rotation of the rolling component. The statistic is a square root of the mean square value of the amplitude spectrum, an arithmetic mean value, a maximum value, and the like, and is an evaluation value for judging the quality of the rolling part.
Patent Literature 2 discloses an apparatus including a device A having a large number of cantilevers and a device B having a signal processing unit. In this device, when the target portion of the rotating machine vibrates, of the cantilevers of the device A, the cantilever having a resonance frequency corresponding to the vibration frequency of the rotating machine resonates and is detected as an electric signal.

JP-A-6-58849 JP-A-8-193778

In the vibration inspection apparatus described in Patent Literature 1, when an abnormality occurring in a rotating machine is determined by converting an output signal of a sensor into a numerical value, it is generally converted to an effective value. A / D conversion is required to determine the effective value. In the A / D conversion, in order to reproduce sampled data with an average accuracy of 90% or more, it is necessary to have 10 or more samples per cycle. For example, when the detection cycle of the sensor is 50 kHz, the sampling frequency is 500 kHz, and there is a problem that high-speed A / D sampling is required.
Note that Patent Document 2 only describes that failure diagnosis is performed using a cantilever, and does not disclose means for solving the above-described problem.

An object of the present invention is to provide an operation fluctuation detecting device and an abnormality judging system for a rotary machine which does not use high-speed A / D sampling, is easy to digitize, and has high sensitivity for vibration detection.

An operation fluctuation detecting device according to the present invention detects an acoustic emission wave generated by rotation of a rotary machine and outputs a sine wave signal, and a full-wave rectifier that performs full-wave rectification of a sine wave signal from the cantilever portion. Unit, a smoothing unit that converts a signal that has been full-wave rectified by the full-wave rectification unit into direct current, and compares the signal that has been converted into direct current by the smoothing unit with a normal value to detect a fluctuation in the operation of the rotating machine. An operation unit.

According to the present invention, a cantilever section that detects an acoustic emission wave generated by rotation of a rotating machine and outputs a sine wave signal, a full-wave rectifier that performs full-wave rectification of a sine wave signal from the cantilever section, A smoothing unit that converts a signal that has been full-wave rectified by the full-wave rectifier into a direct current, and a calculation unit that compares the signal that has been converted into direct current by the smoothing unit with a normal value and detects a change in the operation of the rotating machine. With this arrangement, it is possible to simplify the processing, and it is possible to obtain an inexpensive and simple operation fluctuation detecting device.

FIG. 1 is a block diagram showing a configuration of an entire system according to Embodiment 1 of the present invention. FIG. 2 is a block diagram illustrating a configuration of an abnormality determination system according to Embodiment 1. FIG. 3 is a block diagram illustrating a configuration of a calculation unit according to the first embodiment. FIG. 3 is a block diagram illustrating a configuration of an abnormality determination unit according to Embodiment 1. 5 is a graph illustrating a relationship between an output of a calculation unit and time according to the first embodiment. FIG. 4 is a block diagram showing a configuration of a modification of the overall system according to the first embodiment. FIG. 7 is a block diagram illustrating a configuration of an abnormality determination system included in the overall system of FIG. 6. FIG. 8 is a block diagram illustrating a configuration of an abnormality determination unit included in the abnormality determination system of FIG. 7. FIG. 7 is a block diagram illustrating a configuration of an abnormality determination system according to Embodiment 2 of the present invention. FIG. 9 is a circuit diagram illustrating a configuration of an output combining unit according to a second embodiment. FIG. 13 is a block diagram illustrating a configuration of a modification of the abnormality determination system according to Embodiment 2. FIG. 13 is a block diagram illustrating a configuration of an abnormality determination system according to Embodiment 3 of the present invention. FIG. 14 is a block diagram illustrating a configuration of an abnormality determination system according to Embodiment 4 of the present invention. FIG. 14 is a circuit diagram illustrating a configuration of an abnormality determination unit according to a fourth embodiment.

Hereinafter, in order to explain this invention in greater detail, the preferred embodiments of the present invention will be described with reference to the accompanying drawings.
Embodiment 1 FIG.
FIG. 1 is a block diagram showing a configuration of an entire system according to Embodiment 1 of the present invention. The abnormality determination system 100a includes a sensor unit 1 and an operation fluctuation detection device 2, and determines abnormality of the rotating machine 300 based on an acoustic emission wave (hereinafter, referred to as an AE wave) generated by rotation of the rotating machine 300. I do. The rotary machine controller 200 is a controller that controls the operation of the rotary machine 300. The abnormality determination system 100a performs a process according to the state of the rotary machine 300 based on the set value information including the rotation speed data of the rotary machine 300 according to the signal input from the rotary machine controller 200. The rotating machine 300 includes a motor, a speed reducer, a cutter, a pump, a turbine, and the like. AE is a phenomenon in which elastic energy stored inside a material is released as an elastic wave when the material is deformed or broken. The AE wave contains a frequency component of several kHz to several MHz.

FIG. 2 is a block diagram illustrating a configuration of the abnormality determination system 100a according to the first embodiment. The abnormality determination system 100a includes a sensor unit 1 and an operation variation detection device 2, and the operation variation detection device 2 determines an abnormality of the rotary machine based on a variation in the operation of the rotary machine detected by the sensor unit 1. . The operation fluctuation detection device 2 extracts a signal in a target frequency range from a detection signal of an AE wave generated by rotation of the rotating machine, and rotates the signal based on a difference between a DC value and a normal value of the extracted signal in the frequency range. Detect fluctuations in machine operation.

(2) The sensor section 1 includes a cantilever section 10, a noise removing dummy wiring 11, and an amplifier section 12, as shown in FIG. The cantilever section 10 includes a first cantilever 10a, a second cantilever 10b, and a third cantilever 10c. The amplifier 12 includes a first amplifier 12a, a second amplifier 12b, a third amplifier 12c, and a fourth amplifier 12d.

The cantilever section 10 is a high Q value cantilever having an oscillation structure for outputting a sine wave based on an AE wave generated by rotation of a rotating machine. For example, the first cantilever 10a, the second cantilever 10b, and the third cantilever 10c are cantilevers having a cantilever oscillation structure formed of a piezoelectric material, and oscillate upon receiving an AE wave.
Although the oscillation structure of the cantilever is shown, a oscillation structure of a cantilever beam may be used as long as the oscillation structure outputs a sine wave by oscillating with the AE wave. In the first embodiment, the first cantilever 10a, the second cantilever 10b, and the third cantilever 10c are cantilevers having the same resonance frequency.

The noise removing dummy wiring 11 is a dummy wiring provided in parallel with the first cantilever 10a, the second cantilever 10b, and the third cantilever 10c. Only high-frequency noise similar to that of the first cantilever 10a, the second cantilever 10b, and the third cantilever 10c is superimposed on the dummy wiring 11 for noise removal.

The first cantilever 10a outputs the detected sine wave signal to the first amplifier 12a. The second cantilever 10b outputs the detected sine wave signal to the second amplifier 12b. The third cantilever 10c outputs the detected sine wave signal to the third amplifier 12c.
The high-frequency noise superimposed on the noise removing dummy wiring 11 is output to the fourth amplifier 12d.

The first amplification unit 12a is an amplification unit that amplifies the output of the first cantilever 10a, and outputs the amplified signal to the operation fluctuation detection device 2. The second amplifying unit 12b is an amplifying unit that amplifies the output of the second cantilever 10b, and outputs the amplified signal to the operation fluctuation detecting device 2. The third amplifying unit 12c is an amplifying unit that amplifies the output of the third cantilever 10c, and outputs the amplified signal to the operation fluctuation detecting device 2. The fourth amplifying unit 12 d is an amplifying unit that amplifies high-frequency noise superimposed on the noise removing dummy wiring 11, and outputs the amplified noise to the operation fluctuation detecting device 2.

The operation fluctuation detection device 2 includes a full-wave rectification unit 21, a smoothing unit 22, an A / D conversion unit 23, a calculation unit 24, an abnormality determination unit 25, and an external I / F 26, as shown in FIG. The full-wave rectifier 21 includes a first full-wave rectifier 21a, a second full-wave rectifier 21b, a third full-wave rectifier 21c, and a fourth full-wave rectifier 21d. The smoothing unit 22 includes a first smoothing unit 22a, a second smoothing unit 22b, a third smoothing unit 22c, and a fourth smoothing unit 22d.

The first full-wave rectifier 21a performs full-wave rectification on the sine wave signal extracted by the first amplifying unit 12a of the sensor unit 1, and outputs the sine wave signal to the first smoothing unit 22a. The second full-wave rectifier 21b performs full-wave rectification on the sine wave signal extracted by the second amplifying unit 12b of the sensor unit 1, and outputs the sine wave signal to the second smoothing unit 22b. The third full-wave rectifier 21c performs full-wave rectification on the sine wave signal extracted by the third amplifier 12c of the sensor unit 1, and outputs the sine wave signal to the third smoothing unit 22c. The fourth full-wave rectifier 21d performs full-wave rectification on the signal extracted by the fourth amplifier 12d of the sensor unit 1, and outputs the signal to the fourth smoothing unit 22d.

The first smoothing unit 22a smoothes the signal that has been full-wave rectified by the first full-wave rectification unit 21a with a capacitor, converts the signal into a DC signal, and outputs the DC signal to the A / D conversion unit 23. The second smoothing unit 22b smoothes the signal that has been full-wave rectified by the second full-wave rectification unit 21b, converts the signal into a DC signal, and outputs the DC signal to the A / D conversion unit 23. The third smoothing unit 22c smoothes the signal that has been full-wave rectified by the third full-wave rectification unit 21c, converts the signal into a DC signal, and outputs the DC signal to the A / D conversion unit 23. The fourth smoothing unit 22d smoothes the signal that has been full-wave rectified by the fourth full-wave rectification unit 21d, converts the signal into a DC signal, and outputs the DC signal to the A / D conversion unit 23.

The A / D converter 23 converts the AE wave analog signal output from the smoothing unit 22 into a digital signal. The period of the A / D conversion may be equal to or greater than the resonance frequency. The calculation unit 24 detects a change in the operation according to the rotation speed of the rotary machine 300 based on the difference between the AE wave digital signal A / D converted by the A / D conversion unit 23 and the normal value. The detection result is output from the calculation unit 24 to the abnormality determination unit 25. The normal value is, for example, a signal actually measured when the rotating machine 300 is in an initial state, and will be described later in detail.

The abnormality determination unit 25 determines an abnormality that has occurred in the rotating machine based on the fluctuation of the operation of the rotating machine detected by the calculation unit 24.
The external I / F 26 is an interface that is connected to the rotary machine controller 200 shown in FIG. 1 and exchanges data. For example, information indicating a determination result of the abnormality determination unit 25 via the external I / F 26 is used for rotation. Output to the machine controller 200.

FIG. 3 is a block diagram showing a configuration of the arithmetic unit 24 according to the first embodiment. As illustrated in FIG. 3, the calculation unit 24 includes an averaging processing unit 240, a storage unit 241, and a change amount calculation unit 242. The averaging unit 240 sets an averaging time from the rotary machine controller 200 via the external I / F 26. The averaging processing unit 240 inputs the AE wave digital signal within the averaging time from the A / D conversion unit 23, and averages the value of the input digital signal. The averaged digital signal of the AE wave is output to abnormality determination unit 25 and storage unit 241. The AE wave of the rotating machine 300 varies widely, and an averaging process is required to stabilize a signal for each type or operation of the rotating machine 300.

The storage unit 241 stores the digital signal averaged by the averaging processing unit 240. The value stored in the storage unit 241 is an averaged digital signal in a normal state. The normal state is an initial state of the rotary machine 300. The initial state of the rotating machine 300 may be, for example, a state when the rotating machine 300 is first introduced, or a state of the rotating machine 300 immediately after maintenance is performed.

The change amount calculation unit 242 calculates a difference between the current digital signal value averaged by the averaging processing unit 240 and the normal averaged digital signal value stored in the storage unit 241. . The change amount calculation unit 242 calculates the rotation machine based on the difference between the current digital signal value averaged by the averaging processing unit 240 and the normal averaged digital signal value stored in the storage unit 241. A change amount corresponding to the state of 300 is calculated. The amount of change in the digital value may be, for example, a difference value between the two digital values, or may be a% value indicating a change from the initial value.

FIG. 4 is a block diagram illustrating a configuration of the abnormality determination unit 25 according to the first embodiment. As illustrated in FIG. 4, the abnormality determination unit 25 inputs the digital signal averaged by the calculation unit 24 as a sensor value a, and inputs the amount of change calculated by the calculation unit 24 as a sensor value b. The abnormality determination unit 25 includes a comparison unit 250 and a comparison unit 251. The comparison unit 250 compares the sensor value a with the determination value c, and the comparison unit 251 compares the sensor value b with the determination value d.

FIG. 5 is a graph showing the relationship between the output of the calculation unit 24 and time in the first embodiment. The sensor value a and the determination value c are values corresponding to the life of the rotating machine 300 (deterioration over time). The rotating part of the rotating machine 300 has an average AE wave generated by the rotation of the rotating machine 300 due to the roughening of the contact surface with the external member over time, the deterioration of the lubricating oil and the increase of foreign substances over time. Digital signal increases. Therefore, it is not appropriate to simply make a determination based on the maximum value of the AE wave digital signal. Therefore, the operation fluctuation detecting device 2 according to the first embodiment determines the life of the rotary machine 300 by comparing the current averaged digital signal of the AE wave and the digital signal of the AE wave in a normal state. ing.

The sensor value b and the determination value d are values corresponding to the amount of change at the time of failure of the rotating machine 300. For example, when a failure occurs in the rotating machine 300 such as a damage to the bearing of the bearing, the value of the AE wave signal generated by the rotation of the rotating machine 300 is determined as shown in FIG. May be lower than the determination value c. Further, there are various timings at which a failure occurs in the rotating machine 300. Therefore, the operation fluctuation detecting device 2 according to the first embodiment determines the failure of the rotating machine 300 based on the amount of change between the current averaged digital signal of the AE wave and the digital signal in the normal state of the AE wave. .

The determination value c is a life determination value set in the comparison unit 250 from the rotary machine controller 200 via the external I / F 26. The life determination value is rewritten by the rotating machine controller 200 according to the state of the rotating operation of the rotating machine 300.
The determination value d is a failure determination value set in the comparison unit 251 from the rotary machine controller 200 via the external I / F 26. The failure determination value is also rewritten by the rotating machine controller 200 according to the state of the rotating operation of the rotating machine 300.

The comparison unit 250 and the comparison unit 251 output the comparison result to the rotary machine controller 200 via the external I / F 26, and the start and end of the comparison are controlled by the response from the rotary machine controller 200. For example, when the rotating machine 300 is not operating, or when the operation of the rotating machine 300 is rising or falling, the comparison is not performed, and the comparison is started when the operation of the rotating machine 300 is stabilized. Whether or not the comparison is possible is controlled according to the operation of 300.

FIG. 6 is a block diagram showing a configuration of a modification of the overall system according to the first embodiment.
Up to now, the configuration has been described in which the operation fluctuation detecting device 2 receives various setting and control signals from the rotary machine controller 200 via the external I / F 26. However, the operation fluctuation detecting device 2A shown in FIG. The user A can perform various settings and controls.

FIG. 7 is a block diagram showing the configuration of the abnormality determination system 100b provided in the entire system of FIG. 7, the same components as those in FIG. 2 are denoted by the same reference numerals as those in FIG. 2, and description thereof will be omitted. The abnormality determination system 100b includes a sensor unit 1 and an operation fluctuation detection device 2A. The operation fluctuation detection device 2A includes a full-wave rectification unit 21, a smoothing unit 22, an A / D conversion unit 23, a calculation unit 24, and an abnormality determination unit 25A, and further includes a display unit 27 and an operation unit instead of the external I / F 26. A section 28 is provided.

FIG. 8 is a block diagram illustrating a configuration of the abnormality determination unit 25A included in the abnormality determination system 100b. Similar to the abnormality determination unit 25, the abnormality determination unit 25A inputs the digital signal averaged by the calculation unit 24 as the sensor value a, and inputs the amount of change calculated by the calculation unit 24 as the sensor value b. The abnormality determination unit 25A includes a comparison unit 250, a comparison unit 251, a life determination value selection unit 252, an internal storage unit 253, a failure determination value selection unit 254, and an internal storage unit 255. The comparison unit 251 compares the determination value c and the determination value d.

The sensor value a and the determination value c are values corresponding to the life of the rotating machine 300, and the sensor value b and the determination value d are values corresponding to the amount of change at the time of failure of the rotating machine 300.
The life determination value selection unit 252 selects a storage value from the storage values c1 to c4 stored in the internal storage unit 253 according to the selection operation of the worker A received by the operation unit 28. The internal storage unit 253 stores stored values c1 to c4 serving as life determination values, and a life determination value is selected from the stored values c1 to c4 by a selection operation using the operation unit. If the selected storage value is different from the determination value c, the determination value c is rewritten with the selected storage value.

The failure determination value selection unit 254 selects a storage value from the storage values d1 to d4 stored in the internal storage unit 255 in accordance with the selection operation of the worker A received by the operation unit 28. The internal storage unit 255 stores stored values d1 to d4 serving as failure determination values, and a failure determination value is selected from the stored values d1 to d4 by a selection operation using the operation unit. When the selected storage value is different from the determination value d, the determination value d is rewritten with the selected storage value.
As described above, the determination value c and the determination value d may be fixed values stored in advance in the abnormality determination unit 25A.

The comparison unit 250 and the comparison unit 251 are controlled to start and end the comparison by the operation of the worker A received by the operation unit 28. The worker A may control whether or not the comparison can be performed according to the operation of the rotating machine 300 by a control operation using the operation unit 28.
The comparison result by the comparison unit 250 and the comparison unit 251 is displayed on the display unit 27 as a determination result.

As described above, the abnormality determination systems 100a and 100b according to the first embodiment provide the difference between the DC value and the normal value of the signal in the target frequency range extracted from the detection signal of the AE wave generated by the rotation of the rotary machine 300. , The fluctuation of the operation of the rotating machine can be detected. By converting the sine wave output of the cantilever into a DC waveform and then performing A / D conversion, one sample can be one cycle, and the frequency of A / D sampling can be reduced rather than sampling an AC waveform signal to obtain an effective value. Can be reduced and the number of memories can be reduced. Further, it is possible to omit arithmetic processing such as effective value arithmetic. The operation fluctuation detecting device 2 can perform various settings and controls from the rotating machine controller 200 via the external I / F 26.
In the operation fluctuation detecting device 2A including the display unit 27 and the operation unit 28 instead of the external I / F 26, the worker A can perform various settings and controls using the operation unit 28.

In the first embodiment, the configuration including three cantilevers is described, but the number of cantilevers may be one or more. In addition, by providing the dummy wiring 11 for noise removal in the sensor unit 1, it is possible to realize an operation fluctuation detecting device for a rotary machine that is not affected by external noise.

Embodiment 2 FIG.
FIG. 9 is a block diagram showing a configuration of an abnormality determination system 100c according to Embodiment 2 of the present invention. 9, the same components as those in FIG. 2 are denoted by the same reference numerals as those in FIG. 2, and description thereof will be omitted. The abnormality determination system 100c includes three sensor units 1A and an operation fluctuation detection device 2B. The operation fluctuation detecting device 2B determines an abnormality of the rotating machine 300 based on the fluctuation of the operation of the rotating machine 300 detected by each of the three sensor units 1A.

The sensor section 1A includes a cantilever section 10, a noise removing dummy wiring 11, and an amplifier section 12 similar to the sensor section 1 shown in FIG. 2, and further includes a full-wave rectifying section 21, a smoothing section 22, and an output combining section 13. Is provided. The output synthesizing unit 13 synthesizes the outputs of the first smoothing unit 22a, the second smoothing unit 22b, the third smoothing unit 22c, and the fourth smoothing unit 22d in the smoothing unit 22.

For example, when the number of cantilevers in the cantilever unit 10 is three, the output of the first smoothing unit 22a, the second smoothing unit 22b, the third smoothing unit 22c, and the fourth The noise superimposed on the output signals of the three cantilevers can be removed by synthesizing a value obtained by multiplying the noise output of the high frequency noise of the smoothing unit 22d by -3 times.

The operation fluctuation detection device 2B includes an A / D conversion unit 23A, a calculation unit 24A, an abnormality determination unit 25B, and an external I / F 26. The A / D conversion unit 23A converts an AE wave analog signal output from the output synthesis unit 13 included in each of the three sensor units 1A into a digital signal. The period of the A / D conversion may be equal to or greater than the resonance frequency.

The operation unit 24A detects a change in operation according to the rotation speed of the rotary machine 300 based on a difference between each of the three digital signals A / D converted by the A / D conversion unit 23A and a normal value. The detection result is output from the calculation unit 24A to the abnormality determination unit 25A. The abnormality determination unit 25B determines an abnormality that has occurred in the rotating machine based on the fluctuation of the operation of the rotating machine detected by the calculation unit 24A. Although the configuration having three cantilevers is shown, the number of cantilevers may be two or four or more.

FIG. 10 is a circuit diagram showing a configuration of the output synthesizing unit 13 according to the second embodiment. As shown in FIG. 10, the output combining unit 13 includes an inverting amplifier circuit 130, an inverting adding circuit 131, and an inverting amplifier circuit 132. The inverting amplifier circuit 130 doubles the signal output from the fourth smoothing unit 22d by the number of cantilevers, and inverts the polarity of the output. This is a value for removing noise superimposed on each cantilever. The inverting and adding circuit 131 combines the outputs of the first smoothing unit 22a, the second smoothing unit 22b, the third smoothing unit 22c, and the inverting amplifier 130. The inverting amplifier circuit 132 receives the signal from the inverting and adding circuit 131, inverts the polarity of the output, and outputs the inverted signal as an output composite signal. Thereby, the sensitivity can be increased as compared with the configuration having only one cantilever.

For example, if the output value of each of the first smoothing unit 22a, the second smoothing unit 22b, and the third smoothing unit 22c is 2.5V, and if the noise component is 0.5V, the inversion and addition circuit 132 The output value is 2.5 + 2.5 + 2.5- (3 × 0.5) = 6V, and the output can be tripled. Further, the provision of the noise removing dummy wiring 11 makes it possible to remove a noise component superimposed on this wiring.

FIG. 11 is a block diagram showing a configuration of a modification of the abnormality determination system 100d according to the second embodiment. As illustrated in FIG. 11, the abnormality determination system 100d includes three sensor units 1A and an operation fluctuation detection device 2C. In the abnormality determination system 100d, the sensor unit 1A includes a voltage / current conversion unit 29, and the operation variation detection device 2C includes a current / voltage conversion unit 29A in addition to the configuration of the operation variation detection device 2B.

The voltage / current converter 29 converts the AE wave DC signal output from the output combiner 13 included in each of the three sensor units 1A into a current signal. The current / voltage converter 29A converts the current signal input from the voltage / current converter 29 into a voltage signal. With these configurations, the noise immunity can be further improved.

As described above, in the abnormality determination system 100c or 100d according to the second embodiment, the output combining unit 13 combines the outputs of a plurality of cantilevers, so that the sensitivity of the sensor unit 1A can be increased. Furthermore, since the number of connections between the sensor unit 1A and the operation fluctuation detecting device 2B or 2C can be reduced, a large number of sensor units can be easily connected to the operation fluctuation detecting device 2B or 2C. Further, since the A / D conversion is performed after the DC value is synthesized by the output synthesizing unit 13, even if a plurality of cantilevers are provided, the calculation can be performed without changing the sampling speed. Thus, high-sensitivity detection is possible without narrowing the vibration detection range. Further, in the sensor section 1A, the output of the output synthesizing section 13 is converted into a current output, and the current signal is output to the operation fluctuation detecting device 2B or 2C, so that noise immunity can be improved.

Embodiment 3 FIG.
FIG. 12 is a block diagram showing a configuration of an abnormality determination system 100e according to Embodiment 3 of the present invention. 12, the same components as those in FIG. 2 are denoted by the same reference numerals as those in FIG. 2, and description thereof will be omitted. As illustrated in FIG. 12, the abnormality determination system 100e includes a sensor unit 1B and an operation fluctuation detection device 2D. The operation fluctuation detecting device 2D determines an abnormality of the rotating machine 300 based on the fluctuation of the operation of the rotating machine 300 detected by the sensor unit 1B.

The sensor section 1B includes a cantilever section 10, a noise removing dummy wiring 11, a full-wave rectifying section 21, and a smoothing section 22 similar to the sensor section 1A shown in FIG. A D conversion unit 23 is provided. The operation fluctuation detection device 2D includes a calculation unit 24B, an abnormality determination unit 25, and an external I / F 26.

The calculation unit 24B detects a change in the operation according to the rotation speed of the rotary machine 300 based on the difference between the digital signal A / D converted by the A / D conversion unit 23 included in the sensor unit 1B and the normal value. . The abnormality determination unit 25 determines an abnormality that has occurred in the rotating machine based on the fluctuation of the operation of the rotating machine detected by the calculation unit 24B.

As described above, in the abnormality determination system 100e according to the third embodiment, when the sensor unit 1B performs A / D conversion, the interface between the A / D conversion unit 23 and the calculation unit 24 becomes a digital signal interface. Become. Thereby, the influence of noise can be reduced. Further, since all the analog circuits are mounted on the sensor unit 1B, the influence of noise can be reduced.

Embodiment 4 FIG.
FIG. 13 is a block diagram showing a configuration of an abnormality determination system 100f according to Embodiment 4 of the present invention. 13, the same components as those in FIGS. 2 and 7 are denoted by the same reference numerals as those in FIGS. 2 and 7, and description thereof is omitted. As shown in FIG. 13, the abnormality determination system 100f includes a sensor unit 1C and an operation fluctuation detecting device 2E. The operation fluctuation detecting device 2E determines an abnormality of the rotating machine 300 based on the fluctuation of the operation of the rotating machine 300 detected by the sensor unit 1C.

The sensor unit 1C includes a cantilever unit 10, a noise removing dummy wiring 11, a full-wave rectifying unit 21, a smoothing unit 22, and an output combining unit 13, similarly to the sensor unit 1A shown in FIG. The operation fluctuation detection device 2E includes an abnormality determination unit 25C, a display unit 27, and an operation unit 28. The abnormality determining unit 25C determines an abnormality that has occurred in the rotating machine 300 based on the DC value output from the output combining unit 13.

FIG. 14 is a circuit diagram showing a configuration of an abnormality determination unit 25C according to the fourth embodiment. As shown in FIG. 14, the abnormality determination unit 25C includes a sample and hold circuit 2510, a timing generation circuit 2511, a life comparison circuit 2512, a failure comparison circuit 2513, and volume resistors RAa and RAb. The life comparison circuit 2512 and the volume resistor RAa constitute a circuit for detecting a value corresponding to the life of the rotating machine 300, and the failure comparison circuit 2513 and the volume resistor RAb correspond to the amount of change at the time of failure of the rotating machine 300. A circuit for detecting a value to be performed is configured.

The combined signal output from the output combining unit 13 is input to the life comparison circuit 2512 and the sample hold circuit 2510. Further, the composite signal input to the sample hold circuit 2510 is output to the failure comparison circuit 2513. The sample hold circuit 2510 samples and holds the value of the timing set by the timing generation circuit 2511 from the combined signal. For example, when the timing is set at one-second intervals, the value one second before and the current value are held, so that the amount of change in these values can be calculated and compared with the determination value. It is also possible to change the judgment value at the set timing.

抵抗 The respective resistance values of the volume resistor RAa and the volume resistor RAb are adjusted using the operation unit 28. In the life comparison circuit 2512, the determination value is determined according to the resistance value of the volume resistor RAa adjusted using the operation unit 28. The life comparison circuit 2512 compares the determined determination value with the combined signal, and outputs the comparison result to the display unit 27.

Also in the failure comparison circuit 2513, the determination value is determined according to the resistance value of the volume resistor RAb adjusted using the operation unit 28. The failure comparison circuit 2513 compares the signal input from the sample hold circuit 2510 with the determined determination value, and outputs the comparison result to the display unit 27.

As described above, in the abnormality determination system 100f according to Embodiment 4, the operation variation detection device 2E includes the abnormality determination unit 25C that outputs a comparison result between the AE wave output signal and the determination value. For example, when the rotating machine operates at a constant speed and a constant load like a pump, the result of simply comparing a predetermined determination value with a signal output from the output synthesizing unit 13 is a result of the rotating machine. Since the information indicates the presence / absence of an abnormality, the process of digitizing the determination result is unnecessary.

Note that the present invention is not limited to the above-described embodiment, and within the scope of the present invention, each free combination of the embodiments or the modification of any of the constituent elements of the embodiments or the embodiments. In each of the above, arbitrary components can be omitted.

The operation fluctuation detection device according to the present invention can detect fluctuations in the operation of a rotary machine, and thus can be used in various rotary machine abnormality determination systems.

1,1A, 1B, 1C sensor part, 2,2A, 2B, 2C, 2D, 2E operation fluctuation detecting device, 10 cantilever part, 10a first cantilever, 10b second cantilever, 10c third cantilever, 11 noise Removal dummy wiring, 12 # amplifying section, 12a >> first amplifying section, 12b >> second amplifying section, 12c >> third amplifying section, 12d {fourth amplifying section, 13} output combining section, 21 # full-wave rectifying section, 21a # first 1, a full-wave rectifier, 21b second full-wave rectifier, 21c third full-wave rectifier, 21d fourth full-wave rectifier, 22 smoothing, 22a first smoothing, 22b second smoothing Unit, 22c {third smoothing unit, 22d} fourth smoothing unit, 23, 23A {A / D conversion unit, 24, 24A, 24B} calculation unit, 25, 25A, 25B, 25C} abnormality determination unit, 6 external I / F, 27 display unit, 28 operation unit, 29 voltage / current conversion unit, 29A current / voltage conversion unit, 100a, 100b, 100c, 100d, 100e, 100f abnormality determination system, 130 inversion amplifier circuit, 131 inversion Adder circuit, 132 ° inverting amplifier circuit, 200 ° rotating machine controller, 240 ° averaging processing unit, 241 ° storage unit, 242 ° change amount calculation unit, 250, 251 ° comparison unit, 252 ° life determination value selection unit, 253, 255 internal storage unit, 254 Failure judgment value selection unit, 300 rotation machine, 2510 sample hold circuit, 2511 timing generation circuit, 2512 life comparison circuit, 2513 failure comparison circuit.

Claims (8)

A cantilever section that detects an acoustic emission wave generated by rotation of the rotating machine and outputs a sine wave signal,
A full-wave rectifier that performs full-wave rectification on the sine wave signal from the cantilever unit;
A smoothing unit that converts a signal that has been full-wave rectified by the full-wave rectifier into a direct current,
An operation variation detection device, comprising: a calculation unit that compares a signal converted into direct current by the smoothing unit with a normal value and detects a variation in the operation of the rotating machine. The motion fluctuation detecting device according to claim 1, wherein the cantilever section includes a plurality of cantilevers that output a sine wave signal in the same frequency range. An output combining unit that combines outputs of the smoothing unit;
And dummy wiring on which noise is superimposed.
The operation fluctuation detecting device according to claim 2, wherein a noise synthesized by the output synthesizing unit is subtracted based on noise superimposed on the dummy wiring. The operation fluctuation detecting device according to any one of claims 1 to 3, wherein the normal value is a value actually measured in an initial state of the rotating machine. The operation fluctuation detecting device according to any one of claims 1 to 3, wherein the normal value is a fixed value. A voltage / current converter for converting an output of the output synthesizer into a current signal;
The operation fluctuation detecting device according to claim 3, further comprising: a current / voltage converter that converts a current signal input from the voltage / current converter into a voltage signal. A cantilever section that detects an acoustic emission wave generated by rotation of the rotating machine and outputs a sine wave signal, a full-wave rectifier that performs full-wave rectification of the sine wave signal from the cantilever section, and a full-wave rectifier that performs full-wave rectification. A sensor unit having a smoothing unit that converts a wave-rectified signal into a direct current, and an A / D converter that converts an output of the smoothing unit into a digital signal;
An abnormality determination system, comprising: an operation variation detection device having a calculation unit that compares a digital signal input from the A / D conversion unit with a normal value and detects a variation in the operation of the rotating machine. A cantilever section that detects an acoustic emission wave generated by rotation of the rotating machine and outputs a sine wave signal, a full-wave rectifier that performs full-wave rectification of the sine wave signal from the cantilever section, and a full-wave rectifier that performs full-wave rectification. A smoothing unit that converts the wave-rectified signal into direct current, and a sensor unit that has an output combining unit that combines the outputs of the smoothing unit.
An abnormality determination system comprising: an operation variation detection device including an abnormality determination unit that compares a signal input from the output synthesis unit with a normal value and outputs a comparison result.

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