WO2020026909A1 - 含フッ素ポリマーを含有する組成物および成形品 - Google Patents
含フッ素ポリマーを含有する組成物および成形品 Download PDFInfo
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- WO2020026909A1 WO2020026909A1 PCT/JP2019/028985 JP2019028985W WO2020026909A1 WO 2020026909 A1 WO2020026909 A1 WO 2020026909A1 JP 2019028985 W JP2019028985 W JP 2019028985W WO 2020026909 A1 WO2020026909 A1 WO 2020026909A1
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/09—Carboxylic acids; Metal salts thereof; Anhydrides thereof
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
- C08F214/18—Monomers containing fluorine
- C08F214/26—Tetrafluoroethene
- C08F214/262—Tetrafluoroethene with fluorinated vinyl ethers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/09—Carboxylic acids; Metal salts thereof; Anhydrides thereof
- C08K5/092—Polycarboxylic acids
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
- C08K5/0025—Crosslinking or vulcanising agents; including accelerators
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/14—Peroxides
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/02—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups
- C08L101/04—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups containing halogen atoms
Definitions
- the present disclosure relates to compositions and molded articles containing a fluoropolymer.
- compositions made of fluorine-containing polymers such as fluorine-containing elastomers are excellent in heat resistance, chemical resistance, solvent resistance, fuel oil resistance, etc., and are used for molding O-rings, hoses, stem seals, shaft seals, diaphragms, etc. It is widely used for manufacturing goods.
- a perfluoroelastomer having a nitrogen-containing cured site and an organic dicarboxylic acid represented by the general formula (1) or (2) per 1 mol of a tertiary amine A perfluoroelastomer composition characterized by containing a catalyst obtained by mixing 0.4 to 2 moles of a perfluoroelastomer.
- HOOC-COOH (1) HOOC-A-COOH (2)
- composition containing a fluorine-containing polymer which can obtain a molded article having a small high-temperature compression set, and which is excellent in releasability from a mold.
- a composition containing at least one compounding agent for crosslinking selected from the following hereinafter, may be referred to as “the first composition of the present disclosure”) is provided.
- a fluorine-containing polymer a carboxylic acid compound generating carbon dioxide at 40 to 230 ° C., and a primary amine compound, a secondary amine compound, an inorganic nitride, an organic tin compound, and a peroxide
- a composition containing at least one crosslinking compound selected from the group consisting of a crosslinking agent, a polyol crosslinking agent, a polyamine crosslinking agent, an oxazole crosslinking agent, an imidazole crosslinking agent, and a thiazole crosslinking agent hereinafter, referred to as “the present disclosure, 2 composition).
- the carboxylic acid compound is oxalic acid, maleic acid, acrylic acid, methacrylic acid, succinic acid, malonic acid, glutaric acid, cyclohexanedicarboxylic acid, salts thereof, and salts thereof. It is preferably at least one selected from the group consisting of esters.
- the content of the carboxylic acid compound is preferably 0.05 to 3.0 parts by mass based on 100 parts by mass of the fluoropolymer.
- the compounding agent for crosslinking is at least one selected from the group consisting of urea, urea derivatives, inorganic nitrides, oxazole crosslinking agents, imidazole crosslinking agents, and thiazole crosslinking agents. It is preferred that In the first and second compositions of the present disclosure, the fluorine-containing polymer is preferably a fluorine-containing elastomer having a cyano group at a main chain terminal and / or a side chain.
- a fluoropolymer having an iodine atom or a bromine atom, a dicarboxylic acid compound represented by the general formula (A), and a monocarboxylic acid compound represented by the general formula (B) A composition containing at least one carboxylic acid compound selected from the following (hereinafter, may be referred to as “third composition of the present disclosure”) is provided.
- composition containing a fluoropolymer having an iodine atom or a bromine atom and a carboxylic acid compound that generates carbon dioxide at 40 to 230 ° C. hereinafter, referred to as a “fourth composition of the present disclosure” Object.
- the carboxylic acid compound is oxalic acid, maleic acid, acrylic acid, methacrylic acid, succinic acid, malonic acid, glutaric acid, cyclohexanedicarboxylic acid, salts thereof, and salts thereof. It is preferably at least one selected from the group consisting of esters.
- the content of the carboxylic acid compound is preferably 0.05 to 3.0 parts by mass based on 100 parts by mass of the fluoropolymer.
- the third and fourth compositions of the present disclosure include a primary amine compound, a secondary amine compound, a tertiary amine compound, an inorganic nitride, an organic tin compound, a peroxide crosslinking agent, a polyol crosslinking agent, and a polyamine crosslinking.
- the composition further contains at least one compounding agent for crosslinking selected from the group consisting of an agent, an oxazole crosslinking agent, an imidazole crosslinking agent, and a thiazole crosslinking agent.
- the crosslinking compounding agent is preferably a peroxide crosslinking agent.
- composition of the present disclosure a molded article obtained from the first, second, third, and fourth compositions of the present disclosure (hereinafter, sometimes collectively referred to as “composition of the present disclosure”) is provided. Provided.
- composition containing a fluorine-containing polymer which is capable of obtaining a molded article having a small high-temperature compression set, and which is excellent in releasability from a mold.
- the first and second compositions of the present disclosure contain a fluorinated polymer, a carboxylic acid compound, and a compounding agent for crosslinking.
- the composition of the present disclosure contains a fluoropolymer.
- a fluorine-containing polymer a fluorine-containing elastomer is preferable because of excellent sealing properties, chemical resistance and heat resistance.
- the fluorine-containing elastomer is an amorphous fluorine-containing polymer.
- amorphous refers to a melting peak (differential scanning calorimetry [DSC] (heating rate 10 ° C./min)) or differential thermal analysis [DTA] (heating rate 10 ° C./min) of a fluorine-containing polymer.
- DSC differential scanning calorimetry
- DTA differential thermal analysis
- ⁇ H is 4.5 J / g or less.
- Fluorine-containing elastomers exhibit elastomer properties when crosslinked. By elastomeric properties is meant the property that allows the polymer to be stretched and retains its original length when the force required to stretch the polymer is no longer applied.
- the fluoroelastomer may be a partially fluorinated elastomer or a perfluoroelastomer, but it is preferable to use a perfluoroelastomer from the viewpoint of more excellent chemical resistance and heat resistance.
- a partially fluorinated elastomer is a fluoropolymer containing a fluoromonomer unit and having a perfluoromonomer unit content of less than 90 mol% based on all polymerized units, and having a glass transition temperature of 20 ° C or lower. And has a melting peak ( ⁇ H) of 4.5 J / g or less.
- a perfluoroelastomer is a fluoropolymer having a perfluoromonomer unit content of 90 mol% or more based on all polymerized units, has a glass transition temperature of 20 ° C or lower, and has a JT of 4.5 J / g. It is a fluoropolymer having the following melting peak ( ⁇ H), and further has a fluorine atom concentration of 71% by mass or more contained in the fluoropolymer.
- the concentration of fluorine atoms contained in the fluoropolymer is obtained by calculating the concentration (% by mass) of the fluorine atoms contained in the fluoropolymer from the type and content of each monomer constituting the fluoropolymer. It is.
- a perfluoromonomer is a monomer having no carbon atom-hydrogen atom bond in the molecule.
- the perfluoromonomer may be a monomer in which some of the fluorine atoms bonded to the carbon atoms have been replaced with chlorine atoms in addition to carbon atoms and fluorine atoms, and in addition to carbon atoms, nitrogen atoms, oxygen atoms And those having a sulfur atom.
- the perfluoromonomer is preferably a monomer in which all hydrogen atoms have been replaced with fluorine atoms.
- the perfluoromonomer does not include a monomer that provides a crosslinking site.
- Examples of the partially fluorinated elastomer include vinylidene fluoride (VdF) fluorine rubber, tetrafluoroethylene (TFE) / propylene (Pr) fluorine rubber, and tetrafluoroethylene (TFE) / propylene / vinylidene fluoride (VdF) fluorine.
- VdF vinylidene fluoride
- TFE tetrafluoroethylene
- Pr propylene
- VdF vinylidene fluoride
- HFP ethylene / hexafluoropropylene
- HFP ethylene / hexafluoropropylene
- VdF vinylidene fluoride
- HFP ethylene / hexafluoropropylene
- TFE tetrafluoroethylene fluorine Rubber and the like.
- it is at least one selected from the group consisting of vinylidene fluoride-based fluororubber and tetrafluoroethylene / propylene-based fluororubber.
- the vinylidene fluoride-based fluororubber is preferably a copolymer comprising 45 to 85 mol% of vinylidenefluoride and 55 to 15 mol% of at least one other monomer copolymerizable with vinylidenefluoride. .
- Preferred is a copolymer comprising 50 to 80 mol% of vinylidene fluoride and 50 to 20 mol% of at least one other monomer copolymerizable with vinylidene fluoride.
- the content of each monomer constituting the fluoropolymer can be calculated by appropriately combining NMR, FT-IR, elemental analysis, and X-ray fluorescence analysis depending on the type of the monomer.
- Examples of the at least one other monomer copolymerizable with the vinylidene fluoride include TFE, HFP, fluoroalkyl vinyl ether, chlorotrifluoroethylene (CTFE), trifluoroethylene, trifluoropropylene, pentafluoropropylene, and trifluorobutene.
- Tetrafluoroisobutene, hexafluoroisobutene, vinyl fluoride general formula (1): represented by CH 2 CFCFRf 1 (where Rf 1 is a linear or branched fluoroalkyl group having 1 to 12 carbon atoms)
- a fluoromonomer represented by the general formula (2): CH 2 CHCH— (CF 2 ) n —X 2 (wherein X 2 is H or F, and n is an integer of 3 to 10).
- Fluoromonomer monomer that provides a crosslinking site; ethylene, propylene, alkyl vinyl ether It includes non-fluorinated monomers like. These can be used alone or in any combination. Among these, it is preferable to use at least one selected from the group consisting of TFE, HFP, fluoroalkyl vinyl ether and CTFE.
- CF 2 CF-ORf 3 (Wherein, Rf 3 represents a C 1-8 perfluoroalkyl group).
- General formula (4): CF 2 CFOCF 2 ORf 4 (In the formula, Rf 4 is a linear or branched perfluoroalkyl group having 1 to 6 carbon atoms, a cyclic perfluoroalkyl group having 5 to 6 carbon atoms, and 2 to 6 carbon atoms containing 1 to 3 oxygen atoms.
- CF 2 CFCFO (CF 2 CF (Y 5 ) O) m (CF 2 ) n F
- Y 5 represents a fluorine atom or a trifluoromethyl group
- m is an integer of 1 to 4
- n is an integer of 1 to 4
- It is preferably at least one kind, and more preferably a fluoromonomer represented by the general formula (3).
- vinylidene fluoride-based fluorororubber examples include VdF / HFP-based rubber, VdF / HFP / TFE-based rubber, VdF / CTFE-based rubber, VdF / CTFE / TFE-based rubber, and VDF / general formula (1).
- the VDF / CH 2 CFCFCF 3 rubber is preferably a copolymer composed of VDF 40 to 99.5 mol% and CH 2 CFCFCF 3 0.5 to 60 mol%, and VDF 50 to 85 mol%. And CH 2 CFCFCF 3 , which is more preferably 15 to 50 mol%.
- the tetrafluoroethylene / propylene-based fluororubber is preferably a copolymer comprising 45 to 70 mol% of tetrafluoroethylene, 55 to 30 mol% of propylene, and 0 to 5 mol% of a fluoromonomer providing a crosslinking site. .
- the fluorine-containing elastomer may be a perfluoroelastomer.
- a perfluoroelastomer containing TFE for example, TFE / fluoromonomer copolymer represented by the general formula (3), (4) or (5), and TFE / general formula (3), At least one selected from the group consisting of a fluoromonomer represented by (4) or (5) / a monomer copolymer providing a crosslinking site is preferable.
- the composition is preferably 45 to 90/10 to 55 (mol%), more preferably 55 to 80/20 to 45, and further preferably 55 to 70 / mol. 30 to 45.
- the ratio is preferably from 45 to 89.9 / 10 to 54.9 / 0.01 to 4 (mol%), more preferably from 50 to 77.9 / 20-49.9 / 0.1-3.5, more preferably 55-69.8 / 30-44.8 / 0.2-3.
- the TFE / fluoromonomer copolymer represented by the general formula (3), (4) or (5) having 4 to 12 carbon atoms it is preferably 50 to 90/10 to 50 (mol%), It is more preferably from 60 to 88/12 to 40, and still more preferably from 65 to 85/15 to 35.
- perfluoroelastomer examples include TFE / fluoromonomer represented by the general formula (5) / monomer copolymer providing a crosslinking site, TFE / fluoromonomer copolymer represented by the general formula (5), TFE / general It is at least one member selected from the group consisting of a fluoromonomer copolymer represented by the formula (3) and a TFE / fluoromonomer represented by the general formula (3) / a monomer copolymer providing a crosslinking site. Is preferred.
- perfluoroelastomer examples include perfluoroelastomers described in WO 97/24381, JP-B-61-57324, JP-B-4-81608, and JP-B-5-13961. Can be.
- the monomer that provides a crosslinking site is a monomer having a crosslinkable group that provides a crosslinking site for forming a crosslinking with a crosslinking agent (a compounding agent for crosslinking) to a fluoropolymer (a cure site monomer).
- Z is a straight or branched chain having 1 to 5 carbon atoms which may have an oxygen atom.
- X 6 is preferably a fluorine atom.
- Rf 6 and Rf 7 are preferably a perfluoroalkylene group having 1 to 5 carbon atoms.
- R 6 is preferably a hydrogen atom.
- X 8 is preferably a cyano group, an alkoxycarbonyl group, an iodine atom, a bromine atom, or —CH 2 I.
- X 9 is preferably a cyano group, an alkoxycarbonyl group, an iodine atom, a bromine atom, or —CH 2 OH.
- the above-mentioned fluorine-containing elastomer preferably has a glass transition temperature of ⁇ 70 ° C. or higher, more preferably ⁇ 60 ° C. or higher, and more preferably ⁇ 50 ° C. or higher, from the viewpoint of excellent compression set resistance at high temperatures. Is more preferred. Further, from the viewpoint of good cold resistance, the temperature is preferably 5 ° C. or lower, more preferably 0 ° C. or lower, and further preferably -3 ° C. or lower.
- a DSC curve was obtained by raising the temperature of a 10 mg sample at 10 ° C./min, and the glass transition temperature was determined before and after the secondary transition of the DSC curve.
- the temperature can be obtained as a temperature indicating the midpoint between two intersections of the extension of the line and the tangent at the inflection point of the DSC curve.
- the fluorine-containing elastomer preferably has a Mooney viscosity ML (1 + 20) at 170 ° C. of 30 or more, more preferably 40 or more, and further preferably 50 or more, from the viewpoint of good heat resistance. Further, from the viewpoint of good workability, it is preferably 150 or less, more preferably 120 or less, and further preferably 110 or less.
- the Mooney viscosity can be measured at 170 ° C. in accordance with JIS K6300 using a Mooney viscometer MV2000E type manufactured by ALPHA TECHNOLOGIES.
- the above-mentioned partially fluorinated elastomer and perfluoroelastomer can be produced by a conventional method, but the molecular weight distribution of the obtained polymer is narrow, the molecular weight can be easily controlled, and an iodine atom or a bromine atom is introduced into a terminal. For this reason, an iodine compound or a bromine compound can be used as a chain transfer agent.
- Examples of the polymerization method using an iodine compound or a bromine compound include, for example, a method of performing emulsion polymerization in an aqueous medium while applying pressure in the presence of an iodine compound or a bromine compound in a substantially oxygen-free state.
- iodine transfer polymerization method Representative examples of the iodine compound or bromine compound used include, for example, a compound represented by the following general formula: R 11 I x Br y (Where x and y are each an integer of 0 to 2 and satisfy 1 ⁇ x + y ⁇ 2, and R 11 is a saturated or unsaturated fluorohydrocarbon group having 1 to 16 carbon atoms or chlorofluoro A hydrocarbon group or a hydrocarbon group having 1 to 3 carbon atoms, which may contain an oxygen atom).
- an iodine compound or a bromine compound an iodine atom or a bromine atom is introduced into the polymer and functions as a crosslinking point.
- Examples of the iodine compound and the bromine compound include 1,3-diiodoperfluoropropane, 2-iodoperfluoropropane, 1,3-diiodo-2-chloroperfluoropropane, 1,4-diiodoperfluorobutane, 1,5-diiodo-2,4-dichloroperfluoropentane, 1,6-diiodoperfluorohexane, 1,8-diiodoperfluorooctane, 1,12-diiodoperfluorododecane, 1,16-diiodo perfluoro hexadecane, diiodomethane, 1,2-diiodoethane, 1,3-diiodo -n- propane, CF 2 Br 2, BrCF 2 CF 2 Br, CF 3 CFBrCF 2 Br, CFClBr 2, BrCF 2 CFCl
- 1,4-diiodoperfluorobutane, 1,6-diiodoperfluorohexane, and 2-iodoperfluoropropane are used in view of polymerization reactivity, crosslinking reactivity, availability, and the like. Is preferred.
- the fluoropolymer is preferably a fluoroelastomer having a cyano group (—CN group) at the terminal and / or side chain of the main chain.
- Fluorine-containing elastomers having a cyano group (—CN group) at the terminal and / or side chain of the main chain can be crosslinked by forming a triazine ring by cyclization and trimerization of a cyano group, and are excellent in molded articles. Compression set and heat resistance.
- fluorine-containing elastomer having a cyano group (—CN group) at the terminal and / or side chain of the main chain include perfluoroelastomers and partially fluorinated elastomers.
- the monomer copolymers providing sites there may be mentioned copolymers in which the monomer providing a crosslinking site is a monomer having a cyano group (—CN group).
- the content of the monomer unit having a cyano group (—CN group) is represented by the TFE unit and the general formulas (3), (4) and (5) from the viewpoint of good crosslinking properties and heat resistance. It may be 0.1 to 5 mol%, or 0.3 to 3 mol%, based on the total amount with the fluoromonomer unit. Further preferred compositions are as described above.
- CF 2 CFCF (OCF 2 CF (CF 3 )) m O (CF 2 ) n —CN (Wherein m is an integer of 0 to 5 and n is an integer of 1 to 8), and more preferably CF 2 CFCFOCF 2 CF (CF 3 ) OCF 2 CF 2 CN.
- perfluoroelastomers can be manufactured by a conventional method.
- perfluoroelastomers include fluorine rubbers described in WO 97/24381, JP-B-61-57324, JP-B-4-81608, JP-B-5-13961 and the like. Is raised.
- Examples of the partially fluorinated elastomer having a cyano group (—CN group) at the terminal and / or side chain of the main chain include vinylidene fluoride (VdF) fluororubber, tetrafluoroethylene (TFE) / propylene fluororubber, and tetrafluoroethylene.
- VdF vinylidene fluoride
- TFE tetrafluoroethylene
- propylene fluorororubber propylene fluororubber
- tetrafluoroethylene tetrafluoroethylene
- TFE propylene / vinylidene fluoride
- HFP ethylene / hexafluoroethylene
- HFP vinylidene fluoride
- VdF vinylidene fluoride
- Examples include fluoropropylene (HFP) / tetrafluoroethylene (TFE) -based fluororubber, fluorosilicone-based fluororubber, and fluorophosphazene-based fluororubber, each of which alone or without impairing the effects of the present disclosure. It can be used in any combination in a range.
- the vinylidene fluoride-based fluororubber is a fluorine-containing copolymer comprising 45 to 85 mol% of vinylidenefluoride and 55 to 15 mol% of at least one other monomer copolymerizable with vinylidenefluoride.
- it refers to a fluorine-containing copolymer comprising 50 to 80 mol% of vinylidene fluoride and 50 to 20 mol% of at least one other monomer copolymerizable with vinylidene fluoride.
- TFE polystyrene fluoride
- CTFE trifluoroethylene
- HFP trifluoropropylene
- tetrafluoropropylene pentafluoropropylene
- trifluorobutene tetrafluoroisobutene
- fluoromonomers such as perfluoro (alkyl vinyl ether) (PAVE) and vinyl fluoride
- non-fluorinated monomers such as ethylene, propylene and alkyl vinyl ether.
- TFE, HFP and perfluoro (alkyl vinyl ether) are preferred.
- Specific rubbers include VdF-HFP rubber, VdF-HFP-TFE rubber, VdF-CTFE rubber, VdF-CTFE-TFE rubber and the like.
- the tetrafluoroethylene / propylene-based fluororubber is composed of 45 to 70 mol% of tetrafluoroethylene and 55 to 30 mol% of propylene. Further, the monomer 0 to 5 which provides a crosslinking site is added to the total amount of tetrafluoroethylene and propylene. It refers to a fluorine-containing copolymer containing mol%.
- Examples of the monomer for providing a crosslinking site include a cyano group-containing monomer described in JP-A-4-505345 and JP-A-5-500070, and a monomer having a cyano group (—CN group) described above. And so on.
- thermoplastic fluorine rubber composed of an elastomeric fluorine-containing polymer chain segment and a non-elastomeric fluorine-containing polymer chain segment may be used.
- the first and second compositions of the present disclosure and the fluorine-containing polymer contained therein are preferably produced as a raw material substantially in the absence of a metal compound.
- the metal content of the first and second compositions of the present disclosure is preferably 100 ppm or less, more preferably 50 ppm or less, and even more preferably 10 ppm or less. It is preferable that the metal content of the composition is extremely small, because a molded article that can be used in a semiconductor manufacturing process or a pharmaceutical manufacturing process in which contamination by a metal component should be avoided is obtained.
- the metal content can be measured by flameless atomic absorption spectrometry or high frequency inductively coupled plasma emission spectroscopy.
- the metal content in the present disclosure is the total metal content of Fe, Cr, Ni, Cu, Al, Na, Mg, Ca, Zn, Ba, and K.
- the sum of the content of these metals and the content of metals other than these metals may be within the above range.
- the first composition of the present disclosure includes at least one carboxylic acid compound selected from the group consisting of a dicarboxylic acid compound represented by the general formula (A) and a monocarboxylic acid compound represented by the general formula (B) It contains.
- the dicarboxylic acid compound is General formula (A): M A1 OOC- (Y A1 ) m -COOM A2 (Wherein, Y A1 is a single bond, a substituted or unsubstituted alkylene group having 1 to 3 carbon atoms, a substituted or unsubstituted alkylene having 2 or more carbon atoms having an oxygen atom or a cyclic structure between carbon and carbon atoms, A group, a substituted or unsubstituted unsaturated aliphatic group, or a substituted or unsubstituted cycloalkylene group having 3 to 10 carbon atoms, M A1 and M A2 are the same or different and each represents a cation or an alkyl group; Represents 0 or 1.)
- Examples of the cations of M A1 and M A2 in the general formula (A) include a hydrogen ion, an alkali metal ion, an alkaline earth metal ion, an ammonium ion, and an organic ammonium ion.
- Examples of the alkali metal ion include a lithium ion, a potassium ion, and a sodium ion.
- Examples of the organic ammonium ion include a cation represented by the general formula: NH 3 R + (wherein, R represents an alkyl group, an alkoxy group, or a hydroxyalkyl group).
- the alkyl group of M A1 and M A2 in the general formula (A) is preferably an alkyl group having 1 to 12 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms, and further preferably a methyl group or an ethyl group.
- Carboxylic acid compound represented by the general formula (A), to one of the M A1 and M A2 may be a monoester compound is an alkyl group, with a diester compound both M A1 and M A2 is an alkyl group There may be.
- M A1 and M A2 in the general formula (A) cations are preferable since hydrogen releasability from a mold can be further improved, and hydrogen ions, alkali metal ions, alkaline earth metal ions or ammonium ions are preferable. More preferably, a hydrogen ion or an ammonium ion is further preferable because a metal contamination can be avoided, and a hydrogen ion is particularly preferable.
- Y A1 in the general formula (A) is a single bond, a substituted or unsubstituted alkylene group having 1 to 3 carbon atoms, a substituted or unsubstituted 2 or more carbon atoms having an oxygen atom or a cyclic structure between carbon and carbon atoms.
- Y A1 is preferably a single bond, a substituted or unsubstituted alkylene group having 1 to 3 carbon atoms, a substituted or unsubstituted vinylene group, or a substituted or unsubstituted cycloalkylene group having 3 to 10 carbon atoms.
- substituents include -F and -Cl.
- Examples of the cation of MB1 in the general formula (B) include a hydrogen ion, an alkali metal ion, an alkaline earth metal ion, an ammonium ion, and an organic ammonium ion.
- Examples of the alkali metal ion include a lithium ion, a potassium ion, and a sodium ion.
- Examples of the organic ammonium ion include a cation represented by the general formula: NH 3 R + (wherein, R represents an alkyl group, an alkoxy group, or a hydroxyalkyl group).
- the alkyl group of MB1 in the general formula (B) is preferably an alkyl group having 1 to 12 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms, and further preferably a methyl group or an ethyl group.
- a cation is preferable because a releasability from a mold can be further improved, and a hydrogen ion, an alkali metal ion, an alkaline earth metal ion or an ammonium ion is more preferable. From the viewpoint of avoiding metal contamination, hydrogen ions or ammonium ions are more preferable, and hydrogen ions are particularly preferable.
- X B1 , X B2 and X B3 in the general formula (B) are the same or different and represent H or a substituted or unsubstituted alkyl group.
- the alkyl group a substituted or unsubstituted alkyl group having 1 to 3 carbon atoms is preferable, and an unsubstituted alkyl group having 1 to 3 carbon atoms is more preferable.
- X B1 , X B2 and X B3 H or CH 3 is preferable.
- Examples of the dicarboxylic acid compound represented by the general formula (A) and the monocarboxylic acid compound represented by the general formula (B) include oxalic acid, maleic acid, acrylic acid, methacrylic acid, succinic acid, malonic acid, glutaric acid, At least one selected from the group consisting of cyclohexanedicarboxylic acid, salts thereof and esters thereof is preferred.
- At least one carboxylic acid compound selected from the group consisting of a dicarboxylic acid compound represented by the general formula (A) and a monocarboxylic acid compound represented by the general formula (B) Is preferably from 0.05 to 3.0 parts by mass, more preferably from 0.1 to 2.0 parts by mass, based on 100 parts by mass of the fluoropolymer, since the releasability can be further improved. And more preferably 0.15 to 1.0 part by mass.
- the second composition of the present disclosure contains a carboxylic acid compound that generates carbon dioxide at 40 to 230 ° C.
- a carboxylic acid compound that generates carbon dioxide at 40 to 230 ° C. generates carbon dioxide at a crosslinking temperature of a fluorine-containing polymer such as a fluorine-containing elastomer, thereby improving the releasability of a composition containing the fluorine-containing polymer. be able to.
- the generation temperature of carbon dioxide is preferably from 150 to 200 ° C.
- the carboxylic acid compound that generates carbon dioxide a compound that generates carbon dioxide at the primary crosslinking temperature of the fluoropolymer and decomposes the molecule at the secondary crosslinking temperature of the fluoropolymer is preferable. That is, the decomposition temperature of the carboxylic acid compound that generates carbon dioxide is preferably equal to or lower than the secondary crosslinking temperature of the fluoropolymer. Further, the carboxylic acid compound that generates carbon dioxide may be a compound that does not generate ammonia.
- the carboxylic acid compound generating carbon dioxide is selected from the group consisting of oxalic acid, maleic acid, acrylic acid, methacrylic acid, succinic acid, malonic acid, glutaric acid, cyclohexanedicarboxylic acid, salts thereof and esters thereof. At least one is preferred.
- the content of the carboxylic acid compound that generates carbon dioxide is preferably 0.05 to 3.% based on 100 parts by mass of the fluoropolymer, since the releasability can be further improved. 0 parts by mass, more preferably 0.1 to 2.0 parts by mass, and even more preferably 0.15 to 1.0 parts by mass.
- the first and second compositions of the present disclosure include a primary amine compound, a secondary amine compound, an inorganic nitride, an organic tin compound, a peroxide crosslinking agent, a polyol crosslinking agent, a polyamine crosslinking agent, an oxazole crosslinking agent, It contains at least one crosslinking compound selected from the group consisting of an imidazole crosslinking agent and a thiazole crosslinking agent.
- the compounding agent for crosslinking contained in the first and second compositions of the present disclosure includes at least one selected from the group consisting of urea, urea derivatives, inorganic nitrides, oxazole crosslinking agents, imidazole crosslinking agents, and thiazole crosslinking agents. Species are preferred.
- first and second compositions of the present disclosure contain a fluorine-containing elastomer having a cyano group (—CN group) at a main chain terminal and / or a side chain as a fluorine-containing polymer
- the compounding agent for crosslinking includes compounds that contribute to crosslinking of the fluoropolymer, such as so-called crosslinking agents, crosslinking aids, crosslinking accelerators, and crosslinking catalysts.
- the crosslinking reaction proceeds sufficiently without using a tertiary amine as a compounding agent for crosslinking, and the first and second compositions of the present disclosure can It is preferable that the compounding agent for crosslinking used in the present disclosure does not contain a tertiary amine, because the compound exhibits more excellent scorch resistance.
- a primary amine compound means a compound having —NH 2 and not having —NHR (R represents an organic group) and —NR 2 (R represents an organic group).
- the secondary amine compound means a compound having -NHR (R represents an organic group) and not having -NR 2 (R represents an organic group).
- the secondary amine may have —NH 2 in addition to —NHR.
- the tertiary amine compound means a compound having —NR 2 (R represents an organic group).
- the tertiary amine may have —NH 2 and —NHR in addition to —NR 2 .
- L 1 is a cyclic or acyclic n-valent hydrocarbon group which may have a hetero atom, and n is an integer of 1 to 5).
- the hydrocarbon group for L 1 may be a saturated hydrocarbon group or an unsaturated hydrocarbon group, and a hydrogen atom may be substituted with a substituent.
- Examples of the primary amine compound include urea, urea hydrochloride, thiourea, 4,4′-bis (aminocyclohexyl) methane carbamate, and 2,2-bis (3-amino-4-hydroxyphenyl) hexafluoropropane (generic name) : Bis (aminophenol) AF), 2,2-bis (3-amino-4-mercaptophenyl) hexafluoropropane, tetraaminobenzene, bis-3,4-diaminophenylmethane, bis-3,4-diaminophenyl Ether and 2,2-bis (3,4-diaminophenyl) hexafluoropropane.
- L 2 is a cyclic or acyclic n-valent hydrocarbon group which may have a hetero atom
- n is an integer of 1 to 5
- R is an organic group.
- Hydrocarbon group L 2 can be a saturated hydrocarbon group may be an unsaturated hydrocarbon group, and a hydrogen atom may be substituted by a substituent.
- Examples of the secondary amine compound include biurea, biuret, hexamethylenediamine carbamate, 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino -4- (N-methylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino-4- (N-ethylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino-4 -(N-propylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino-4- (N-perfluorophenylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino-4 -(N-benzylamino) phenyl] hexafluoropropane and the like.
- Urea derivatives include biurea, thiourea, urea hydrochloride, biuret, acylurea such as acetylurea, and the like.
- the inorganic nitride examples include, but are not particularly limited to, silicon nitride (Si 3 N 4 ), lithium nitride, titanium nitride, aluminum nitride, boron nitride, vanadium nitride, and zirconium nitride.
- silicon nitride is preferable because nano-sized fine particles can be supplied.
- organotin compound examples include tetraphenyltin and triphenyltin.
- the peroxide crosslinking agent may be any organic peroxide capable of easily generating a peroxy radical in the presence of heat or an oxidation-reduction system. Specifically, for example, 1,1-bis (t-butylperoxy) ) -3,5,5-trimethylcyclohexane, 2,5-dimethylhexane-2,5-dihydroperoxide, di-tert-butyl peroxide, t-butylcumyl peroxide, dicumyl peroxide, ⁇ , ⁇ - Bis (t-butylperoxy) -p-diisopropylbenzene, 2,5-dimethyl-2,5-di (t-butylperoxy) hexane, 2,5-dimethyl-2,5-di (t-butylperoxy) Oxy) -hexyne-3, benzoyl peroxide, t-butylperoxybenzene, 2,5-dimethyl-2,5-di
- any compound having a reaction activity with respect to a peroxy radical and a polymer radical may be used.
- Examples include a polyfunctional compound having a functional group such as —CH (CF (CF 3 ) (“C 6 H 5 ” in each formula represents a phenyl group).
- triallyl trimellitate dipropargyl terephthalate, diallyl phthalate, triallyl phosphate, triallyl phosphite, 1,6-divinyl dodecafluorohexane, and the like.
- R 11 to R 13 are independently a hydrogen atom, a fluorine atom, an alkyl group, a fluorinated alkyl group, or a substituted or unsubstituted aryl group, and at least one of R 11 to R 13 is ,
- a fluorine atom or a group containing a fluorine atom, m is an integer of 1 to 5.
- m is 2 or more, m R 11 to R 13 are the same or different.
- the hydrogen atom of the benzene ring may be substituted.
- R 14 is a single bond, —SO 2 —, —O—, —S—, —CO—, a heteroatom-containing group, a substituted or unsubstituted group.
- Polyol crosslinking agents include polyhydric alcohol compounds such as bisphenol A and bisphenol AF.
- polyamine crosslinking agent examples include polyamine compounds such as hexamethylenediamine carbamate and 4,4'-bis (aminocyclohexyl) methane carbamate.
- oxazole cross-linking agent imidazole cross-linking agent
- thiazole cross-linking agent examples include, for example, those represented by general formula (30):
- R 31 is —SO 2 —, —O—, —CO—, an alkylene group having 1 to 6 carbon atoms, a perfluoroalkylene group having 1 to 10 carbon atoms or a single bond, or
- R 32 and R 33 is —NH 2 and the other is —NHR 34 , —NH 2 , —OH or —SH, and R 34 is a hydrogen atom, a fluorine atom or a monovalent An organic group, and preferably, R 32 is —NH 2 and R 33 is —NHR 34 .
- R 34 is a hydrogen atom, a fluorine atom or a monovalent An organic group, and preferably, R 32 is —NH 2 and R 33 is —NHR 34 .
- Preferred specific examples of the alkylene group having 1 to 6 carbon atoms include a methylene group, an ethylene group, a propylene group, a butylene group, a pentylene group and a hexylene group. Is
- Bisaminophenol-based crosslinking agent bisaminothiophenol-based crosslinking agent, general formula (31):
- R 31 is, as described above, R 35 is independently the following groups.
- Rf 31 is a perfluoroalkylene group having 1 to 10 carbon atoms
- Rf 31 is a perfluoroalkylene group having 1 to 10 carbon atoms
- These bisaminophenol-based crosslinking agents, bisaminothiophenol-based crosslinking agents, bisdiaminophenyl-based crosslinking agents, and the like have been conventionally used in crosslinking systems having a cyano group as a crosslinking point. It also reacts with the group to form an oxazole ring, thiazole ring, imidazole ring to give a crosslinked product.
- crosslinking agents include compounds having a plurality of 3-amino-4-hydroxyphenyl groups or 3-amino-4-mercaptophenyl groups, or a compound represented by the general formula (34):
- R 31 , R 32 and R 33 are as described above), and specifically, for example, 2,2-bis (3-amino-4-hydroxyphenyl) hexafluoropropane (Generic name: bis (aminophenol) AF), 2,2-bis (3-amino-4-mercaptophenyl) hexafluoropropane, tetraaminobenzene, bis-3,4-diaminophenylmethane, bis-3,4 -Diaminophenyl ether, 2,2-bis (3,4-diaminophenyl) hexafluoropropane, 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane, 2,2- Bis [3-amino-4- (N-methylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino-4- (N-ethyl Amino)
- 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane is preferred as a crosslinking agent from the viewpoint of heat resistance, steam resistance, amine resistance, and good crosslinking property. Is preferred.
- the content of the crosslinking compound is preferably 0.05 to 10 parts by mass, more preferably 0.1 to 5 parts by mass, based on 100 parts by mass of the fluoropolymer.
- the first and second compositions of the present disclosure do not include a tertiary amine.
- the first and second compositions of the present disclosure have a sufficient cross-linking reaction and sufficient scorch resistance even when they do not contain a tertiary amine.
- the third and fourth compositions of the present disclosure include a fluoropolymer having an iodine atom or a bromine atom, and a carboxylic acid compound.
- the monomer composition of the fluorine-containing polymer contained in the third and fourth compositions of the present disclosure is the same as that of the fluorine-containing polymer contained in the first and second compositions of the present disclosure except that the monomer composition always has an iodine atom or a bromine atom.
- the same monomer composition as that of the polymer can be used.
- a fluorine-containing elastomer is preferable because of excellent sealing properties, chemical resistance and heat resistance.
- the content of the iodine atom and the bromine atom in the fluoropolymer is preferably 0.001 to 10% by mass, more preferably 0.01% by mass or more, and more preferably 0.1% by mass or more. Is still more preferable, and it is more preferable that it is 5 mass% or less.
- the above-mentioned fluorine-containing polymer is preferably a fluorine-containing elastomer having an iodine atom or a bromine atom at the terminal and / or the side chain of the main chain.
- a fluorine-containing elastomer having an iodine atom (-I) or a bromine atom (-Br) at the terminal and / or side chain of the main chain can be crosslinked by peroxide crosslinking, and is a molded article having excellent sticking resistance. Can be obtained.
- the fluorine-containing elastomer contained in the first and second compositions of the present disclosure except that the monomer composition always has an iodine atom or a bromine atom
- the same monomer composition as the elastomer can be used.
- the fluorine-containing elastomer having an iodine atom or a bromine atom at the terminal and / or side chain of the main chain can be produced by a conventional method, but the obtained polymer has a narrow molecular weight distribution and is easily controlled in molecular weight. Since an iodine atom or a bromine atom can be introduced into the terminal, an iodine compound or a bromine compound can also be used as a chain transfer agent.
- Examples of the polymerization method using an iodine compound or a bromine compound include, for example, a method of performing emulsion polymerization in an aqueous medium while applying pressure in the presence of an iodine compound or a bromine compound in a substantially oxygen-free state. (Iodine transfer polymerization method).
- iodine compound or bromine compound used include, for example, a compound represented by the following general formula: R 11 I x Br y (Where x and y are each an integer of 0 to 2 and satisfy 1 ⁇ x + y ⁇ 2, and R 11 is a saturated or unsaturated fluorohydrocarbon group having 1 to 16 carbon atoms or chlorofluoro A hydrocarbon group or a hydrocarbon group having 1 to 3 carbon atoms, which may contain an oxygen atom).
- an iodine compound or a bromine compound an iodine atom or a bromine atom is introduced into the polymer and functions as a crosslinking point.
- Examples of the iodine compound and the bromine compound include 1,3-diiodoperfluoropropane, 2-iodoperfluoropropane, 1,3-diiodo-2-chloroperfluoropropane, 1,4-diiodoperfluorobutane, 1,5-diiodo-2,4-dichloroperfluoropentane, 1,6-diiodoperfluorohexane, 1,8-diiodoperfluorooctane, 1,12-diiodoperfluorododecane, 1,16-diiodo perfluoro hexadecane, diiodomethane, 1,2-diiodoethane, 1,3-diiodo -n- propane, CF 2 Br 2, BrCF 2 CF 2 Br, CF 3 CFBrCF 2 Br, CFClBr 2, BrCF 2 CFCl
- 1,4-diiodoperfluorobutane, 1,6-diiodoperfluorohexane, and 2-iodoperfluoropropane are used in view of polymerization reactivity, crosslinking reactivity, availability, and the like. Is preferred.
- fluorine-containing elastomer having an iodine atom or a bromine atom at the terminal and / or the side chain of the main chain examples include perfluoroelastomers and partially fluorinated elastomers, but are more excellent in chemical resistance and heat resistance. Perfluoroelastomers are preferred.
- the above-mentioned TFE / fluoromonomer represented by the general formula (3), (4) or (5) / crosslinking site As the perfluoroelastomer having an iodine atom or a bromine atom at the terminal of the main chain and / or the side chain, the above-mentioned TFE / fluoromonomer represented by the general formula (3), (4) or (5) / crosslinking site Among the monomer copolymers to be provided, copolymers in which the monomer that provides a crosslinking site is a monomer having an iodine atom (-I) or a bromine atom (-Br).
- the content of the monomer unit having an iodine atom (-I) or a bromine atom (-Br) is determined so that the content of the monomer unit having the TFE unit and the general formulas (3), (4) and ( It may be from 0.1 to 5 mol%, or from 0.3 to 3 mol%, based on the total amount of the fluoromonomer unit represented by 5).
- CF 2 CF (OCF 2 CF (CF 3 )) m O (CF 2 ) n -Y 3 (Wherein, m is an integer of 0 to 5, n is an integer of 1 to 8, and Y 3 represents —I, —Br, —CH 2 I, or —CH 2 Br). Is preferred.
- perfluoroelastomers can be manufactured by a conventional method.
- perfluoroelastomers include fluorine rubbers described in WO 97/24381, JP-B-61-57324, JP-B-4-81608, JP-B-5-13961 and the like. Is raised.
- Examples of the partially fluorinated elastomer having an iodine atom or a bromine atom at the terminal and / or side chain of the main chain include vinylidene fluoride (VdF) fluororubber, tetrafluoroethylene (TFE) / propylene fluororubber, and tetrafluoroethylene (TFE).
- VdF vinylidene fluoride
- TFE tetrafluoroethylene
- TFE tetrafluoroethylene
- TFE tetrafluoroethylene
- VdF Propylene / vinylidene fluoride fluorine rubber, ethylene / hexafluoroethylene (HFP) fluorine rubber, ethylene / hexafluoropropylene (HFP) / vinylidene fluoride (VdF) fluorine rubber, ethylene / hexafluoropropylene (HFP) / tetrafluoroethylene (TFE) -based fluororubber, fluorosilicone-based fluororubber, or fluorophosphazene-based fluororubber, each of which alone or impairs the effects of the present disclosure. It can be used in any combination in a range not.
- the vinylidene fluoride-based fluororubber is a fluorine-containing copolymer comprising 45 to 85 mol% of vinylidenefluoride and 55 to 15 mol% of at least one other monomer copolymerizable with vinylidenefluoride.
- it refers to a fluorine-containing copolymer comprising 50 to 80 mol% of vinylidene fluoride and 50 to 20 mol% of at least one other monomer copolymerizable with vinylidene fluoride.
- TFE polystyrene fluoride
- CTFE trifluoroethylene
- HFP trifluoropropylene
- tetrafluoropropylene pentafluoropropylene
- trifluorobutene tetrafluoroisobutene
- fluoromonomers such as perfluoro (alkyl vinyl ether) (PAVE) and vinyl fluoride
- non-fluorinated monomers such as ethylene, propylene and alkyl vinyl ether.
- TFE, HFP and perfluoro (alkyl vinyl ether) are preferred.
- Specific rubbers include VdF-HFP rubber, VdF-HFP-TFE rubber, VdF-CTFE rubber, VdF-CTFE-TFE rubber and the like.
- the tetrafluoroethylene / propylene-based fluororubber is a monomer having 45 to 70 mol% of tetrafluoroethylene and 55 to 30 mol% of propylene, and further having an iodine atom or a bromine atom with respect to the total amount of tetrafluoroethylene and propylene. Refers to a fluorine-containing copolymer containing 0 to 5 mol%.
- thermoplastic fluorine rubber composed of an elastomeric fluorine-containing polymer chain segment and a non-elastomeric fluorine-containing polymer chain segment may be used.
- the third and fourth compositions of the present disclosure and the fluorine-containing polymers contained therein are preferably produced as raw materials substantially in the absence of metal compounds.
- the metal content of the third and fourth compositions of the present disclosure is preferably 100 ppm or less, more preferably 50 ppm or less, and even more preferably 10 ppm or less. It is preferable that the metal content of the composition is extremely small, because a molded article that can be used in a semiconductor manufacturing process or a pharmaceutical manufacturing process in which contamination by a metal component should be avoided is obtained.
- the metal content can be measured by flameless atomic absorption spectrometry or high frequency inductively coupled plasma emission spectroscopy.
- the metal content in the present disclosure is the total metal content of Fe, Cr, Ni, Cu, Al, Na, Mg, Ca, Zn, Ba, and K.
- the sum of the content of these metals and the content of metals other than these metals may be within the above range.
- the carboxylic acid compound contained in the third composition of the present disclosure is at least selected from the group consisting of a dicarboxylic acid compound represented by the general formula (A) and a monocarboxylic acid compound represented by the general formula (B).
- a dicarboxylic acid compound represented by the general formula (A) and a monocarboxylic acid compound represented by the general formula (B).
- One kind As the carboxylic acid compound contained in the third composition of the present disclosure, those similar to the carboxylic acid compound contained in the first composition of the present disclosure can be mentioned, and for the third composition of the present disclosure.
- Suitable carboxylic acid compounds are the same as the suitable carboxylic acid compounds for the first composition of the present disclosure.
- At least one carboxylic acid compound selected from the group consisting of a dicarboxylic acid compound represented by the general formula (A) and a monocarboxylic acid compound represented by the general formula (B) Is preferably from 0.05 to 3.0 parts by mass, more preferably from 0.1 to 2.0 parts by mass, based on 100 parts by mass of the fluoropolymer, since the releasability can be further improved. And more preferably 0.15 to 1.0 part by mass.
- the carboxylic acid compound contained in the fourth composition of the present disclosure is a carboxylic acid compound that generates carbon dioxide at 40 to 230 ° C.
- the carboxylic acid compound contained in the fourth composition of the present disclosure those similar to the carboxylic acid compound contained in the second composition of the present disclosure can be mentioned, and for the fourth composition of the present disclosure, Suitable carboxylic acid compounds are the same as the suitable carboxylic acid compounds for the second composition of the present disclosure.
- the content of the carboxylic acid compound that generates carbon dioxide is preferably 0.05 to 3% with respect to 100 parts by mass of the fluoropolymer since the releasability can be further improved. 0 parts by mass, more preferably 0.1 to 2.0 parts by mass, and even more preferably 0.15 to 1.0 parts by mass.
- compositions of the present disclosure preferably contain a compounding agent for crosslinking.
- Compounding agents for crosslinking include primary amine compounds, secondary amine compounds, tertiary amine compounds, inorganic nitrides, organic tin compounds, peroxide crosslinking agents, polyol crosslinking agents, polyamine crosslinking agents, oxazole crosslinking agents, At least one selected from the group consisting of an imidazole cross-linking agent and a thiazole cross-linking agent is preferable, and a peroxide cross-linking agent is more preferable because a fluorine-containing polymer having an iodine atom or a bromine atom can be cross-linked smoothly.
- the primary and secondary amine compounds that can be included in the third and fourth compositions of the present disclosure include those similar to those included in the first and second compositions of the present disclosure. Can be.
- the third and fourth compositions of the present disclosure include, as a compounding agent for crosslinking, 8-benzyl-1,8-diazabicyclo [5.4.0] -7-undecene, triisocyanurate (TAIC) and the like. Tertiary amines can be included.
- the peroxide crosslinking agent may be any organic peroxide capable of easily generating a peroxy radical in the presence of heat or an oxidation-reduction system. Specifically, for example, 1,1-bis (t-butylperoxy) ) -3,5,5-trimethylcyclohexane, 2,5-dimethylhexane-2,5-dihydroperoxide, di-tert-butyl peroxide, t-butylcumyl peroxide, dicumyl peroxide, ⁇ , ⁇ - Bis (t-butylperoxy) -p-diisopropylbenzene, 2,5-dimethyl-2,5-di (t-butylperoxy) hexane, 2,5-dimethyl-2,5-di (t-butylperoxy) Oxy) -hexyne-3, benzoyl peroxide, t-butylperoxybenzene, 2,5-dimethyl-2,5-di
- the crosslinking assistant that can be used may be a compound having a reaction activity for a peroxy radical and a polymer radical.
- triallyl cyanurate triallyl isocyanurate (TAIC), triacrylformal, triallyl trimellitate, N, N'-n-phenylenebismaleimide, dipropagyl terephthalate, diallyl phthalate, tetraallyl Terephthalate amide, triallyl phosphate, bismaleimide, fluorinated triallyl isocyanurate (1,3,5-tris (2,3,3-trifluoro-2-propenyl) -1,3,5-triazine 2,4, 6-trione), tris (diallylamine) -S-triazine, triallyl phosphite, N, N-diallylacrylamide, 1,6-divinyldodecafluorohexane and the like.
- TAIC triallyl cyanurate
- TAIC triallyl isocyanurate
- triacrylformal triallyl trimellitate
- N N'-n-phenylenebismaleimide
- R 11 to R 13 are independently a hydrogen atom, a fluorine atom, an alkyl group, a fluorinated alkyl group, or a substituted or unsubstituted aryl group, and at least one of R 11 to R 13 is ,
- a fluorine atom or a group containing a fluorine atom, m is an integer of 1 to 5.
- m is 2 or more, m R 11 to R 13 are the same or different.
- the hydrogen atom of the benzene ring may be substituted.
- R 14 is a single bond, —SO 2 —, —O—, —S—, —CO—, a heteroatom-containing group, a substituted or unsubstituted group.
- Polyol crosslinking agents include polyhydric alcohol compounds such as bisphenol A and bisphenol AF.
- Polyamine crosslinking agents include polyamine compounds such as hexamethylenediaminecarbamate, N, N'-dicinnamylidene-1,6-hexanediamine, and 4,4'-bis (aminocyclohexyl) methanecarbamate.
- organotin compound examples include tetraphenyltin and triphenyltin.
- oxazole crosslinking agent imidazole crosslinking agent
- thiazole crosslinking agent examples include, for example, those represented by the general formula (40):
- R 41 is —SO 2 —, —O—, —CO—, an alkylene group having 1 to 6 carbon atoms, a perfluoroalkylene group having 1 to 10 carbon atoms or a single bond, or
- R 42 and R 43 are —NH 2 and the other is —NHR 44 , —NH 2 , —OH or —SH, and R 44 is a hydrogen atom, a fluorine atom or a monovalent R 42 is —NH 2 and R 43 is —NHR 44 .
- R 44 is a hydrogen atom, a fluorine atom or a monovalent R 42 is —NH 2 and R 43 is —NHR 44 .
- Preferred specific examples of the alkylene group having 1 to 6 carbon atoms include a methylene group, an ethylene group, a propylene group, a butylene group, a pentylene group and a hexylene group. Is
- Bisaminophenol-based crosslinking agent bisaminothiophenol-based crosslinking agent, general formula (41):
- R 41 is, as described above, R 45 is independently any of the following groups.
- Rf 41 is a perfluoroalkylene group having 1 to 10 carbon atoms), or a general formula (43):
- n is an integer of 1 to 10).
- crosslinking agents include compounds having a plurality of 3-amino-4-hydroxyphenyl groups or 3-amino-4-mercaptophenyl groups, or a compound represented by the general formula (44):
- R 41 , R 42 and R 43 are as described above), and specifically, for example, 2,2-bis (3-amino-4-hydroxyphenyl) hexafluoropropane (Generic name: bis (aminophenol) AF), 2,2-bis (3-amino-4-mercaptophenyl) hexafluoropropane, tetraaminobenzene, bis-3,4-diaminophenylmethane, bis-3,4 -Diaminophenyl ether, 2,2-bis (3,4-diaminophenyl) hexafluoropropane, 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane, 2,2- Bis [3-amino-4- (N-methylamino) phenyl] hexafluoropropane, 2,2-bis [3-amino-4- (N-ethyl Amino)
- 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane is preferred as a crosslinking agent from the viewpoint of heat resistance, steam resistance, amine resistance, and good crosslinking property. Is preferred.
- the content of the crosslinking compound is preferably 0.05 to 10 parts by mass, more preferably 0.1 to 5 parts by mass, based on 100 parts by mass of the fluoropolymer.
- the third and fourth compositions of the present disclosure contain a polyol crosslinking agent
- the crosslinking accelerator promotes generation of an intramolecular double bond in the dehydrofluorination reaction of the fluororubber main chain and addition of a polyol crosslinking agent to the generated double bond.
- crosslinking accelerator examples include onium compounds.
- onium compounds ammonium compounds such as quaternary ammonium salts, phosphonium compounds such as quaternary phosphonium salts, oxonium compounds, sulfonium compounds, cyclic amines and monofunctional compounds It is preferably at least one selected from the group consisting of amine compounds, and more preferably at least one selected from the group consisting of quaternary ammonium salts and quaternary phosphonium salts.
- the quaternary ammonium salt is not particularly limited.
- the quaternary phosphonium salt is not particularly limited, and examples thereof include tetrabutylphosphonium chloride, benzyltriphenylphosphonium chloride (hereinafter referred to as BTPPC), benzyltrimethylphosphonium chloride, benzyltributylphosphonium chloride, tributylallylphosphonium chloride, and tributyl. Examples thereof include -2-methoxypropylphosphonium chloride and benzylphenyl (dimethylamino) phosphonium chloride. Among them, benzyltriphenylphosphonium chloride (BTPPC) is preferred because of its excellent crosslinkability and physical properties of a fluororubber molded article. preferable.
- BTPPC benzyltriphenylphosphonium chloride
- the content of the crosslinking accelerator is preferably from 0.05 to 5 parts by mass, more preferably from 0.05 to 5 parts by mass, based on 100 parts by mass of the fluoropolymer, since a molded article having more excellent compression set and elongation resistance can be obtained. Is 0.10 to 3 parts by mass.
- composition of the present disclosure may contain a common filler.
- Examples of the general filler include imide-based fillers having an imide structure such as polyimide, polyamideimide, and polyetherimide, polyarylate, polysulfone, polyethersulfone, polyphenylene sulfide, polyetheretherketone, polyetherketone, and polyoxyimide.
- Organic fillers made of engineering plastics such as benzoate; metal oxide fillers such as aluminum oxide, silicon oxide and yttrium oxide; metal carbides such as silicon carbide and aluminum carbide; metal nitride fillers such as silicon nitride and aluminum nitride; and aluminum fluoride And inorganic fillers such as carbon fluoride, barium sulfate, carbon black, silica, clay and talc.
- carbon black, aluminum oxide, yttrium oxide, silicon oxide, polyimide, and carbon fluoride are preferred from the viewpoint of the shielding effect of various plasmas.
- inorganic filler and organic filler may be used alone or in combination of two or more.
- the amount of the general filler is preferably 0.5 to 100 parts by mass, more preferably 5 to 50 parts by mass, based on 100 parts by mass of the fluoropolymer.
- the composition of the present disclosure can be prepared by mixing the above-mentioned components using a general polymer processing machine, for example, an open roll, a Banbury mixer, a kneader, or the like. In addition, it can also be prepared by a method using an internal mixer.
- the above composition can be suitably used as a molding material for obtaining a molded article by molding, and also can be suitably used as a molding material for obtaining a molded article by cross-linking molding.
- the method of obtaining a preformed body using the composition of the present disclosure as a molding material may be a conventional method, and a known method such as a method of heating and compressing with a mold, a method of pressing into a heated mold, and a method of extruding with an extruder is known. Can be done in any way.
- a molded product can be obtained by performing heat crosslinking with steam or the like after extrusion.
- a method for obtaining a molded article from the above composition may be an ordinary method. After obtaining a preformed article, a molded article can be obtained in the order of primary crosslinking and finally secondary crosslinking.
- the primary crosslinking is preferably performed at 150 to 200 ° C. for 5 to 120 minutes, more preferably at 170 to 190 ° C. for 5 to 60 minutes.
- Any known crosslinking means may be used as the crosslinking means, and examples thereof include press crosslinking.
- the secondary crosslinking is preferably performed at 180 to 320 ° C. for 2 to 24 hours, more preferably at 200 to 310 ° C. for 5 to 20 hours.
- the crosslinking means a known crosslinking means may be used, and examples thereof include oven crosslinking.
- the molded article of the present disclosure is obtained from the above composition.
- the molded product of the present disclosure can be suitably used as a sealing material of a semiconductor manufacturing apparatus that requires particularly heat resistance, particularly a semiconductor manufacturing apparatus that performs high-density plasma irradiation.
- the sealing material include an O-ring, a square-ring, a gasket, a packing, an oil seal, a bearing seal, and a lip seal.
- it can be used as various polymer products used in semiconductor manufacturing equipment, for example, diaphragms, tubes, hoses, various rubber rolls, belts and the like. It can also be used as a coating material and a lining material.
- the semiconductor manufacturing apparatus referred to in the present disclosure is not particularly limited to an apparatus for manufacturing a semiconductor, and is widely used for a semiconductor that requires a high degree of cleanliness, such as an apparatus for manufacturing a liquid crystal panel or a plasma panel. This includes all manufacturing apparatuses used in the field, and examples thereof include the following.
- etching apparatus Dry etching equipment Plasma etching machine Reactive ion etching machine Reactive ion beam etching machine Sputter etching machine Ion beam etching machine Wet etching equipment Ashing equipment (2) Cleaning system Dry etching cleaning equipment UV / O 3 cleaning machine Ion Beam cleaning device Laser beam cleaning device Plasma cleaning device Gas etching cleaning device Extraction cleaning device Soxhlet extraction cleaning device High-temperature high-pressure extraction cleaning device Microwave extraction cleaning device Supercritical extraction cleaning device (3) Exposure device Stepper coater / developer (4) Polishing device CMP equipment (5) Film formation equipment CVD equipment Sputtering equipment (6) Diffusion / ion implantation equipment Oxidation diffusion equipment Ion implantation equipment
- the molded product of the present disclosure exhibits excellent performance as a sealing material for, for example, a CVD device, a plasma etching device, a reactive ion etching device, an ashing device, or an excimer laser exposure machine.
- the O-rings after the secondary crosslinking obtained in the examples and the comparative examples were measured according to JIS-K6262. Specifically, the O-rings after the secondary crosslinking obtained in Examples and Comparative Examples were held at 300 ° C. for 72 hours or 300 ° C. for 168 hours under 25% pressure compression, and then opened. The sample left for 30 minutes in a constant temperature room at 25 ° C. was measured.
- the boiling point was defined as the temperature at which carbon dioxide was generated.
- the substance whose boiling point is unclear was measured by using thermogravimetric analysis (Hitachi High-Tech Science TG / DTA7200) at 25 ° C. in a N 2 atmosphere at 10 ° C./min.
- CF 2 CFOCF 2 CF (CF 3 ) OCF 2 CF 2 CN (CNVE) was injected under nitrogen pressure.
- APS ammonium persulfate
- 3110 g of this aqueous dispersion was diluted with 3730 g of water, and slowly added to 3450 g of a 4.8 mass% nitric acid aqueous solution while stirring. After stirring for 30 minutes after the addition, the coagulated product was separated by filtration, and the obtained polymer was washed with water and dried under vacuum to obtain 680 g of a fluorine-containing elastomer.
- the metal content of the obtained fluoroelastomer was measured using the measuring method described in WO 94/28394. Specifically, a predetermined amount of a sample containing the metal to be quantified is ashed in a cuvette at an ashing temperature of about 1000 ° C. under an incineration condition including an ashing time of about 240 seconds, and then flameless atomic absorption spectrometry is performed. The absorbance was measured with a spectrophotometer. The metal content of the obtained fluorine-containing elastomer was 10 ppm or less.
- Example 1 Fluorine-containing elastomer having a cyano group obtained in Production Example 1, carbon black (average particle diameter 0.3 ⁇ m), silicon nitride (Si 3 N 4 , average particle diameter 30 nm), and oxalic acid (decomposition temperature 189 ° C.) , Carbon dioxide generation temperature of 40 to 195 ° C) at a mass ratio of 100/23 / 0.25 / 0.25, and kneaded with an open roll to prepare a composition.
- Die release properties were evaluated as follows.
- the obtained composition was molded using a mold having a cavity capable of forming 65 small-hole-sized O-rings (inner diameter 6.5 mm, wire diameter 1.5 mm) at a time, and at 180 ° C. for 20 minutes.
- Primary cross-linking was performed under the following conditions. After opening the mold, the O-rings are taken out of the mold cavity by grasping burrs, and the number of O-rings remaining in the cavity (total of the numbers remaining in the upper mold and the lower mold) is counted, and the ratio to 65 ( Mold residual ratio) was calculated. Table 1 shows the results.
- a low mold residual ratio means that the composition has excellent releasability after primary crosslinking and that the O-ring was easily removed from the mold.
- a high mold residual ratio means that the composition was inferior in releasability after primary crosslinking, and the O-ring adhered to the mold and was difficult to remove.
- the obtained composition was molded and subjected to primary crosslinking at 180 ° C. for 20 minutes, then taken out of the mold and placed in an oven at 200 ° C.
- Step cross-linking (secondary cross-linking) was performed for 12 hours at 250 ° C. ⁇ 3 hours and 290 ° C. ⁇ 3 hours to prepare an O-ring for measuring compression set.
- the compression set of the obtained O-ring was measured by the method described above. Table 1 shows the results.
- Example 2 A composition was prepared in the same manner as in Example 1 except that the amount of oxalic acid was changed to 0.5 part by mass, the mold releasability was evaluated, and the compression set was measured. Table 1 shows the results.
- Example 3 A composition was prepared in the same manner as in Example 1 except that maleic acid (carbon dioxide generation temperature: 140 to 180 ° C.) was used instead of oxalic acid, the mold releasability was evaluated, and the compression set was measured. did. Table 1 shows the results.
- maleic acid carbon dioxide generation temperature: 140 to 180 ° C.
- Example 4 A composition was prepared in the same manner as in Example 1 except that acrylic acid (carbon dioxide generation temperature: 141 ° C.) was used instead of oxalic acid, the mold releasability was evaluated, and the compression set was measured. Table 1 shows the results.
- Example 5 A composition was prepared in the same manner as in Example 1 except that methacrylic acid (carbon dioxide generation temperature: 159 ° C.) was used instead of oxalic acid, and the mold releasability was evaluated, and the compression set was measured. Table 1 shows the results.
- methacrylic acid carbon dioxide generation temperature: 159 ° C.
- Example 6 A composition was prepared in the same manner as in Example 1 except that malonic acid (carbon dioxide generation temperature: 155 ° C.) was used instead of oxalic acid, the mold releasability was evaluated, and the compression set was measured. Table 1 shows the results.
- malonic acid carbon dioxide generation temperature: 155 ° C.
- Example 7 A composition was prepared in the same manner as in Example 1 except that glutaric acid (carbon dioxide generation temperature: 170 ° C.) was used instead of oxalic acid, and the mold releasability was evaluated, and the compression set was measured. Table 1 shows the results.
- glutaric acid carbon dioxide generation temperature: 170 ° C.
- Comparative Example 1 The fluorine-containing elastomer having a cyano group obtained in Production Example 1, carbon black (average particle diameter: 0.3 ⁇ m), and silicon nitride (Si 3 N 4 , average particle diameter: 30 nm) are in a mass ratio of 100/23/0. The mixture was mixed at 25 and kneaded with an open roll to prepare a composition, the mold releasability was evaluated, and the compression set was measured. Table 2 shows the results.
- Comparative Example 2 The composition was prepared by kneading with an open roll in the same manner as in Comparative Example 1 except that 0.5 parts by mass of Carnauba (vegetable oil / fat) No. 1 (melting point: 80 ° C.) was added, and a mold release property was obtained. Was evaluated, and compression set was measured. Table 2 shows the results.
- Comparative Example 3 A composition was prepared in the same manner as in Comparative Example 1 except that urea was used instead of silicon nitride, the mold releasability was evaluated, and the compression set was measured. Table 2 shows the results.
- Comparative Example 4 A composition was prepared in the same manner as in Comparative Example 1 except that 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane (NphAF) was used instead of silicon nitride. The mold releasability was evaluated, and the compression set was measured. Table 2 shows the results. However, the secondary crosslinking conditions for preparing an O-ring for measuring compression set were changed to 290 ° C. ⁇ 18 hours in an oven.
- NphAF 2,2-bis [3-amino-4- (N-phenylamino) phenyl] hexafluoropropane
- Comparative Example 5 A composition was prepared in the same manner as in Comparative Example 4 except that 0.5 parts by mass of Carnauba (vegetable oil / fat) No. 1 (melting point: 80 ° C.) was added, the mold releasability was evaluated, and the compression set was measured. did. Table 2 shows the results.
- Comparative Example 6 A composition was prepared in the same manner as in Comparative Example 4 except that 0.5 part by mass of erucic acid amide (melting point: 80 ° C.) was added, the mold releasability was evaluated, and the compression set was measured. Table 2 shows the results.
- Comparative Example 7 A composition was prepared in the same manner as in Comparative Example 4 except that 0.5 part by mass of stearylamine (melting point: 53 ° C.) was added, the mold releasability was evaluated, and the compression set was measured. Table 2 shows the results.
- Comparative Example 8 A composition was prepared in the same manner as in Comparative Example 4, except that 1.0 part by mass of diethylene glycol monomethyl ether (boiling point: 212 ° C.) was added, the mold releasability was evaluated, and the compression set was measured. Table 2 shows the results.
- Comparative Example 9 A composition was prepared in the same manner as in Comparative Example 4 except that peroxide (Perhexa 25B manufactured by NOF CORPORATION) was added in an amount of 1.0 part by mass, mold releasability was evaluated, and compression set was measured. Table 2 shows the results.
- peroxide Perhexa 25B manufactured by NOF CORPORATION
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Abstract
Description
HOOC-COOH (1)
HOOC-A-COOH (2)
(式中、YA1は、単結合、置換もしくは非置換の炭素数1~3のアルキレン基、炭素-炭素原子間に酸素原子もしくは環状構造を有する、置換もしくは非置換の炭素数2以上のアルキレン基、置換もしくは非置換の不飽和脂肪族基、または、置換もしくは非置換の炭素数3~10のシクロアルキレン基、MA1およびMA2は、同一または異なって、カチオンまたはアルキル基を表し、mは0または1を表す。)
一般式(B):CXB1XB2=CXB3-(CH2)n-COOMB1
(式中、XB1、XB2およびXB3は、同一または異なって、H、または、置換もしくは非置換のアルキル基、MB1は、同一または異なって、カチオンまたはアルキル基を表し、nは0~5の整数を表す。)
本開示の第1および第2の組成物において、前記カルボン酸化合物の含有量が、前記含フッ素ポリマー100質量部に対して、0.05~3.0質量部であることが好ましい。
本開示の第1および第2の組成物において、前記架橋用配合剤が、尿素、尿素誘導体、無機窒化物、オキサゾール架橋剤、イミダゾール架橋剤およびチアゾール架橋剤からなる群より選択される少なくとも1種であることが好ましい。
本開示の第1および第2の組成物において、前記含フッ素ポリマーが、主鎖末端および/または側鎖にシアノ基を有する含フッ素エラストマーであることが好ましい。
(式中、YA1は、単結合、置換もしくは非置換の炭素数1~3のアルキレン基、炭素-炭素原子間に酸素原子もしくは環状構造を有する、置換もしくは非置換の炭素数2以上のアルキレン基、置換もしくは非置換の不飽和脂肪族基、または、置換もしくは非置換の炭素数3~10のシクロアルキレン基、MA1およびMA2は、同一または異なって、カチオンまたはアルキル基を表し、mは0または1を表す。)
一般式(B):CXB1XB2=CXB3-(CH2)n-COOMB1
(式中、XB1、XB2およびXB3は、同一または異なって、H、または、置換もしくは非置換のアルキル基、MB1は、同一または異なって、カチオンまたはアルキル基を表し、nは0~5の整数を表す。)
本開示の第3および第4の組成物において、前記カルボン酸化合物の含有量が、前記含フッ素ポリマー100質量部に対して、0.05~3.0質量部であることが好ましい。
本開示の第3および第4の組成物は、第1級アミン化合物、第2級アミン化合物、第3級アミン化合物、無機窒化物、有機スズ化合物、パーオキサイド架橋剤、ポリオール架橋剤、ポリアミン架橋剤、オキサゾール架橋剤、イミダゾール架橋剤およびチアゾール架橋剤からなる群より選択される少なくとも1種の架橋用配合剤をさらに含有することが好ましい。
本開示の第3および第4の組成物において、前記架橋用配合剤が、パーオキサイド架橋剤であることが好ましい。
本開示の第1および第2の組成物は、含フッ素ポリマー、カルボン酸化合物、および、架橋用配合剤を含有する。
一般式(3):CF2=CF-ORf3
(式中、Rf3は、炭素数1~8のパーフルオロアルキル基を表す。)で表されるフルオロモノマー、
一般式(4):CF2=CFOCF2ORf4
(式中、Rf4は炭素数1~6の直鎖または分岐状パーフルオロアルキル基、炭素数5~6の環式パーフルオロアルキル基、1~3個の酸素原子を含む炭素数2~6の直鎖または分岐状パーフルオロオキシアルキル基である)で表されるフルオロモノマー、および、
一般式(5):CF2=CFO(CF2CF(Y5)O)m(CF2)nF
(式中、Y5はフッ素原子またはトリフルオロメチル基を表す。mは1~4の整数である。nは1~4の整数である。)で表されるフルオロモノマー
からなる群より選択される少なくとも1種であることが好ましく、一般式(3)で表されるフルオロモノマーがより好ましい。
これらの組成の範囲を外れると、ゴム弾性体としての性質が失われ、樹脂に近い性質となる傾向がある。
一般式(6):CX6 2=CX6-Rf6CHR6X7
(式中、X6は、同一または異なって、水素原子、フッ素原子またはCH3、Rf6は、フルオロアルキレン基、パーフルオロアルキレン基、フルオロ(ポリ)オキシアルキレン基またはパーフルオロ(ポリ)オキシアルキレン基、R6は、水素原子またはCH3、X7は、ヨウ素原子または臭素原子である)で表されるフルオロモノマー、
一般式(7):CX6 2=CX6-Rf7X7
(式中、X6は、同一または異なって、水素原子、フッ素原子またはCH3、Rf7は、フルオロアルキレン基、パーフルオロアルキレン基、フルオロ(ポリ)オキシアルキレン基またはパーフルオロ(ポリ)オキシアルキレン基、X7は、ヨウ素原子または臭素原子である)で表されるフルオロモノマー、
一般式(8):CF2=CFO(CF2CF(CF3)O)m(CF2)n-X8
(式中、mは0~5の整数、nは1~3の整数、X8は、シアノ基、カルボキシル基、アルコキシカルボニル基、ヨウ素原子、臭素原子、または、-CH2Iである)で表されるフルオロモノマー、
一般式(9):CH2=CFCF2O(CF(CF3)CF2O)m(CF(CF3))n-X9
(式中、mは0~5の整数、nは1~3の整数、X9は、シアノ基、カルボキシル基、アルコキシカルボニル基、ヨウ素原子、臭素原子、またはCH2OHである)で表されるフルオロモノマー、および、
一般式(10):CR10 2=CR10-Z-CR10=CR10 2
(式中、R10は、同一または異なって、水素原子または炭素数1~5のアルキル基である。Zは、直鎖または分岐状で酸素原子を有していてもよい、炭素数1~18のアルキレン基、炭素数3~18のシクロアルキレン基、少なくとも部分的にフッ素化している炭素数1~10のアルキレン基もしくはオキシアルキレン基、または、
-(Q)p-CF2O-(CF2CF2O)m(CF2O)n-CF2-(Q)p-
(式中、Qはアルキレン基またはオキシアルキレン基である。pは0または1である。m/nが0.2~5である。)で表され、分子量が500~10000である(パー)フルオロポリオキシアルキレン基である。)で表されるモノマーからなる群より選択される少なくとも1種であることが好ましい。
R11IxBry
(式中、xおよびyはそれぞれ0~2の整数であり、かつ1≦x+y≦2を満たすものであり、R11は炭素数1~16の飽和もしくは不飽和のフルオロ炭化水素基またはクロロフルオロ炭化水素基、または炭素数1~3の炭化水素基であり、酸素原子を含んでいてもよい)で表される化合物が挙げられる。ヨウ素化合物または臭素化合物を使用することによって、ヨウ素原子または臭素原子が重合体に導入され、架橋点として機能する。
式:CY1 2=CY1(CF2)n-CN
(式中、Y1は、同一または異なって、水素原子またはフッ素原子、nは1~8の整数である)
式:CF2=CFCF2Rf8-CN
(式中、Rf8は-(OCF2)n-または-(OCF(CF3))n-であり、nは0~5の整数である)
式:CF2=CFCF2(OCF(CF3)CF2)m(OCH2CF2CF2)nOCH2CF2-CN
(式中、mは0~5の整数、nは0~5の整数である)
式:CF2=CFCF2(OCH2CF2CF2)m(OCF(CF3)CF2)nOCF(CF3)-CN
(式中、mは0~5の整数、nは0~5の整数である)
式:CF2=CF(OCF2CF(CF3))mO(CF2)n-CN
(式中、mは0~5の整数、nは1~8の整数である)
式:CF2=CF(OCF2CF(CF3))m-CN
(式中、mは1~5の整数)
式:CF2=CFOCF2(CF(CF3)OCF2)nCF(-CN)CF3
(式中、nは1~4の整数)
式:CF2=CFO(CF2)nOCF(CF3)-CN
(式中、nは2~5の整数)
式:CF2=CFO(CF2)n-(C6H4)-CN
(式中、nは1~6の整数)
式:CF2=CF(OCF2CF(CF3))nOCF2CF(CF3)-CN
(式中、nは1~2の整数)
式:CH2=CFCF2O(CF(CF3)CF2O)nCF(CF3)-CN
(式中、nは0~5の整数)、
式:CF2=CFO(CF2CF(CF3)O)m(CF2)n-CN
(式中、mは0~5の整数、nは1~3の整数である)
式:CH2=CFCF2OCF(CF3)OCF(CF3)-CN
式:CH2=CFCF2OCH2CF2-CN
式:CF2=CFO(CF2CF(CF3)O)mCF2CF(CF3)-CN
(式中、mは0以上の整数である)
式:CF2=CFOCF(CF3)CF2O(CF2)n-CN
(式中、nは1以上の整数)
式:CF2=CFOCF2OCF2CF(CF3)OCF2-CN
で表されるモノマーなどがあげられ、これらをそれぞれ単独で、または任意に組み合わせて用いることができる。
式:CF2=CF(OCF2CF(CF3))mO(CF2)n-CN
(式中、mは0~5の整数、nは1~8の整数である)で表されるモノマーが好ましく、CF2=CFOCF2CF(CF3)OCF2CF2CNがより好ましい。
一般式(A):MA1OOC-(YA1)m-COOMA2
(式中、YA1は、単結合、置換もしくは非置換の炭素数1~3のアルキレン基、炭素-炭素原子間に酸素原子もしくは環状構造を有する、置換もしくは非置換の炭素数2以上のアルキレン基、置換もしくは非置換の不飽和脂肪族基、または、置換もしくは非置換の炭素数3~10のシクロアルキレン基、MA1およびMA2は、同一または異なって、カチオンまたはアルキル基を表し、mは0または1を表す。)で示される。
一般式(B):CXB1XB2=CXB3-(CH2)n-COOMB1
(式中、XB1、XB2およびXB3は、同一または異なって、H、または、置換もしくは非置換のアルキル基、MB1は、同一または異なって、カチオンまたはアルキル基を表し、nは0~5の整数を表す。)で示される。
一般式:L1-(NH2)n
(式中、L1は、ヘテロ原子を有していてもよい、環式もしくは非環式のn価の炭化水素基、nは1~5の整数である)で表される化合物が挙げられる。L1の炭化水素基は、飽和炭化水素基であっても、不飽和炭化水素基であってもよく、また、水素原子が置換基により置換されていてもよい。
一般式:L2-(NHR)n
(式中、L2は、ヘテロ原子を有していてもよい、環式もしくは非環式のn価の炭化水素基、nは1~5の整数、Rは、有機基である)で表される化合物が挙げられる。L2の炭化水素基は、飽和炭化水素基であっても、不飽和炭化水素基であってもよく、また、水素原子が置換基により置換されていてもよい。
本開示の第3および第4の組成物は、ヨウ素原子または臭素原子を有する含フッ素ポリマー、および、カルボン酸化合物を含有する。
R11IxBry
(式中、xおよびyはそれぞれ0~2の整数であり、かつ1≦x+y≦2を満たすものであり、R11は炭素数1~16の飽和もしくは不飽和のフルオロ炭化水素基またはクロロフルオロ炭化水素基、または炭素数1~3の炭化水素基であり、酸素原子を含んでいてもよい)で表される化合物が挙げられる。ヨウ素化合物または臭素化合物を使用することによって、ヨウ素原子または臭素原子が重合体に導入され、架橋点として機能する。
式:CY1 2=CY1(CF2)n-Y3
(式中、Y1は、同一または異なって、水素原子またはフッ素原子、nは1~8の整数である)
式:CF2=CFCF2Rf8-Y3
(式中、Rf8は-(OCF2)n-または-(OCF(CF3))n-Y3であり、nは0~5の整数である)
式:CF2=CFCF2(OCF(CF3)CF2)m(OCH2CF2CF2)nOCH2CF2-Y3
(式中、mは0~5の整数、nは0~5の整数である)
式:CF2=CFCF2(OCH2CF2CF2)m(OCF(CF3)CF2)nOCF(CF3)-Y3
(式中、mは0~5の整数、nは0~5の整数である)
式:CF2=CF(OCF2CF(CF3))mO(CF2)n-Y3
(式中、mは0~5の整数、nは1~8の整数である)
式:CF2=CF(OCF2CF(CF3))m-Y3
(式中、mは1~5の整数)
式:CF2=CFOCF2(CF(CF3)OCF2)nCF(-Y3)CF3
(式中、nは1~4の整数)
式:CF2=CFO(CF2)nOCF(CF3)-Y3
(式中、nは2~5の整数)
式:CF2=CFO(CF2)n-(C6H4)-Y3
(式中、nは1~6の整数)
式:CF2=CF(OCF2CF(CF3))nOCF2CF(CF3)-Y3
(式中、nは1~2の整数)
式:CH2=CFCF2O(CF(CF3)CF2O)nCF(CF3)-Y3
(式中、nは0~5の整数)、
式:CF2=CFO(CF2CF(CF3)O)m(CF2)n-Y3
(式中、mは0~5の整数、nは1~3の整数である)
式:CH2=CFCF2OCF(CF3)OCF(CF3)-Y3
式:CH2=CFCF2OCH2CF2-Y3
式:CF2=CFO(CF2CF(CF3)O)mCF2CF(CF3)-Y3
(式中、mは0以上の整数である)
式:CF2=CFOCF(CF3)CF2O(CF2)n-Y3
(式中、nは1以上の整数)
式:CF2=CFOCF2OCF2CF(CF3)OCF2-Y3
で表されるモノマーなどがあげられ、これらをそれぞれ単独で、または任意に組み合わせて用いることができる。なお、上記の各式におけるY3は、-I、-Br、-CH2Iまたは-CH2Brを表す。
式:CF2=CF(OCF2CF(CF3))mO(CF2)n-Y3
(式中、mは0~5の整数、nは1~8の整数であり、Y3は、-I、-Br、-CH2Iまたは-CH2Brを表す。)で表されるモノマーが好ましい。
本開示の成形品は、特に耐熱性が要求される半導体製造装置、特に高密度プラズマ照射が行なわれる半導体製造装置のシール材として好適に使用できる。上記シール材としては、O-リング、角-リング、ガスケット、パッキン、オイルシール、ベアリングシール、リップシール等が挙げられる。
そのほか、半導体製造装置に使用される各種のポリマー製品、例えばダイヤフラム、チューブ、ホース、各種ゴムロール、ベルト等としても使用できる。また、コーティング用材料、ライニング用材料としても使用できる。
ドライエッチング装置
プラズマエッチング装置
反応性イオンエッチング装置
反応性イオンビームエッチング装置
スパッタエッチング装置
イオンビームエッチング装置
ウェットエッチング装置
アッシング装置
(2)洗浄装置乾式エッチング洗浄装置
UV/O3洗浄装置
イオンビーム洗浄装置
レーザービーム洗浄装置
プラズマ洗浄装置
ガスエッチング洗浄装置
抽出洗浄装置
ソックスレー抽出洗浄装置
高温高圧抽出洗浄装置
マイクロウェーブ抽出洗浄装置
超臨界抽出洗浄装置
(3)露光装置
ステッパー
コータ・デベロッパー
(4)研磨装置
CMP装置
(5)成膜装置
CVD装置
スパッタリング装置
(6)拡散・イオン注入装置
酸化拡散装置
イオン注入装置
実施例および比較例で行った圧縮永久歪の測定は、実施例および比較例で得られた二次架橋後のO-リングを、JIS-K6262に準じて測定した。具体的には、実施例および比較例で得られた二次架橋後のO-リングを、25%加圧圧縮下に、300℃で72時間、または、300℃で168時間保持したのち開放し、25℃の恒温室内に30分間放置した試料を測定した。
二酸化炭素の発生温度として、沸点を二酸化炭素の発生温度とした。沸点が不明確な物質は、熱重量分析(株式会社日立ハイテクサイエンス TG/DTA7200)を用いて、N2雰囲気中、25℃から10℃/minにて昇温し測定した。
着火源をもたない内容積6リットルのステンレススチール製オートクレーブに、純水2.3リットル、乳化剤(C3F7OCF(CF3)CF2OCF(CF3)COONH4)23g、pH調整剤として炭酸アンモニウム0.2gを仕込み、系内を窒素ガスで充分に置換し脱気したのち、600rpmで撹拌しながら、50℃に昇温し、内圧が0.8MPaになるようにテトラフルオロエチレン(TFE)とパーフルオロ(メチルビニルエーテル)(PMVE)をTFE/PMVE=24/76(モル比)で仕込んだ。ついで、CF2=CFOCF2CF(CF3)OCF2CF2CN(CNVE)0.8gを窒素圧にて圧入した。過硫酸アンモニウム(APS)の1.2g/mLの濃度の水溶液10mLを窒素圧で圧入して反応を開始した。
製造例1で得られたシアノ基を有する含フッ素エラストマーと、カーボンブラック(平均粒子径0.3μm)と、窒化珪素(Si3N4、平均粒子径30nm)と、シュウ酸(分解温度189℃、二酸化炭素の発生温度40~195℃)を質量比100/23/0.25/0.25で混合し、オープンロールにて混練して、組成物を調製した。
シュウ酸量を0.5質量部に変更した以外は実施例1と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表1に示す。
シュウ酸の代わりにマレイン酸(二酸化炭素の発生温度140~180℃)を用いた以外は実施例1と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表1に示す。
シュウ酸の代わりにアクリル酸(二酸化炭素の発生温度141℃)を用いた以外は実施例1と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表1に示す。
シュウ酸の代わりにメタクリル酸(二酸化炭素の発生温度159℃)を用いた以外は実施例1同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表1に示す。
シュウ酸の代わりにマロン酸(二酸化炭素の発生温度155℃)を用いた以外は実施例1同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表1に示す。
シュウ酸の代わりにグルタル酸(二酸化炭素の発生温度170℃)を用いた以外は実施例1同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表1に示す。
製造例1で得られたシアノ基を有する含フッ素エラストマーと、カーボンブラック(平均粒子径0.3μm)と、窒化珪素(Si3N4、平均粒子径30nm)を質量比100/23/0.25で混合し、オープンロールにて混練して、組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
カルナバ(植物性油脂)1号(融点80℃)を0.5質量部添加した以外は比較例1と同様にして、オープンロールにて混練して、組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
窒化珪素の代わりに尿素を用いた以外は比較例1と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
窒化珪素の代わりに、2,2-ビス[3-アミノ-4-(N-フェニルアミノ)フェニル]ヘキサフルオロプロパン(NphAF)を用いた以外は比較例1と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
ただし、圧縮永久歪み測定用のO-リングを作成する際の二次架橋条件を、オーブン中290℃×18時間に変更した。
カルナバ(植物性油脂)1号(融点80℃)を0.5質量部添加した以外は比較例4と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
エルカ酸アマイド(融点80℃)を0.5質量部添加した以外は比較例4と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
ステアリルアミン(融点53℃)を0.5質量部添加した以外は比較例4と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
ジエチレングリコールモノメチルエーテル(沸点212℃)を1.0質量部添加した以外は比較例4と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
パーオキサイド(パーヘキサ25B 日油社製)を1.0質量部添加した以外は比較例4と同じ方法で組成物を調製し、金型離型性を評価し、圧縮永久歪みを測定した。結果を表2に示す。
Claims (13)
- 含フッ素ポリマー、
一般式(A)で示されるジカルボン酸化合物、および、一般式(B)で示されるモノカルボン酸化合物からなる群より選択される少なくとも1種のカルボン酸化合物、ならびに、
第1級アミン化合物、第2級アミン化合物、無機窒化物、有機スズ化合物、パーオキサイド架橋剤、ポリオール架橋剤、ポリアミン架橋剤、オキサゾール架橋剤、イミダゾール架橋剤およびチアゾール架橋剤からなる群より選択される少なくとも1種の架橋用配合剤
を含有する組成物。
一般式(A):MA1OOC-(YA1)m-COOMA2
(式中、YA1は、単結合、置換もしくは非置換の炭素数1~3のアルキレン基、炭素-炭素原子間に酸素原子もしくは環状構造を有する、置換もしくは非置換の炭素数2以上のアルキレン基、置換もしくは非置換の不飽和脂肪族基、または、置換もしくは非置換の炭素数3~10のシクロアルキレン基、MA1およびMA2は、同一または異なって、カチオンまたはアルキル基を表し、mは0または1を表す。)
一般式(B):CXB1XB2=CXB3-(CH2)n-COOMB1
(式中、XB1、XB2およびXB3は、同一または異なって、H、または、置換もしくは非置換のアルキル基、MB1は、同一または異なって、カチオンまたはアルキル基を表し、nは0~5の整数を表す。) - 含フッ素ポリマー、
40~230℃で二酸化炭素を発生させるカルボン酸化合物、ならびに、
第1級アミン化合物、第2級アミン化合物、無機窒化物、有機スズ化合物、パーオキサイド架橋剤、ポリオール架橋剤、ポリアミン架橋剤、オキサゾール架橋剤、イミダゾール架橋剤およびチアゾール架橋剤からなる群より選択される少なくとも1種の架橋用配合剤
を含有する組成物。 - 前記カルボン酸化合物が、シュウ酸、マレイン酸、アクリル酸、メタクリル酸、コハク酸、マロン酸、グルタル酸、シクロヘキサンジカルボン酸、これらの塩およびこれらのエステルからなる群より選択される少なくとも1種である請求項1または2に記載の組成物。
- 前記カルボン酸化合物の含有量が、前記含フッ素ポリマー100質量部に対して、0.05~3.0質量部である請求項1~3のいずれかに記載の組成物。
- 前記架橋用配合剤が、尿素、尿素誘導体、無機窒化物、オキサゾール架橋剤、イミダゾール架橋剤およびチアゾール架橋剤からなる群より選択される少なくとも1種である請求項1~4のいずれかに記載の組成物。
- 前記含フッ素ポリマーが、主鎖末端および/または側鎖にシアノ基を有する含フッ素エラストマーである請求項1~5のいずれかに記載の組成物。
- ヨウ素原子または臭素原子を有する含フッ素ポリマー、ならびに、
一般式(A)で示されるジカルボン酸化合物、および、一般式(B)で示されるモノカルボン酸化合物からなる群より選択される少なくとも1種のカルボン酸化合物
を含有する組成物。
一般式(A):MA1OOC-(YA1)m-COOMA2
(式中、YA1は、単結合、置換もしくは非置換の炭素数1~3のアルキレン基、炭素-炭素原子間に酸素原子もしくは環状構造を有する、置換もしくは非置換の炭素数2以上のアルキレン基、置換もしくは非置換の不飽和脂肪族基、または、置換もしくは非置換の炭素数3~10のシクロアルキレン基、MA1およびMA2は、同一または異なって、カチオンまたはアルキル基を表し、mは0または1を表す。)
一般式(B):CXB1XB2=CXB3-(CH2)n-COOMB1
(式中、XB1、XB2およびXB3は、同一または異なって、H、または、置換もしくは非置換のアルキル基、MB1は、同一または異なって、カチオンまたはアルキル基を表し、nは0~5の整数を表す。) - ヨウ素原子または臭素原子を有する含フッ素ポリマー、および、
40~230℃で二酸化炭素を発生させるカルボン酸化合物
を含有する組成物。 - 前記カルボン酸化合物が、シュウ酸、マレイン酸、アクリル酸、メタクリル酸、コハク酸、マロン酸、グルタル酸、シクロヘキサンジカルボン酸、これらの塩およびこれらのエステルからなる群より選択される少なくとも1種である請求項7または8に記載の組成物。
- 前記カルボン酸化合物の含有量が、前記含フッ素ポリマー100質量部に対して、0.05~3.0質量部である請求項7~9のいずれかに記載の組成物。
- 第1級アミン化合物、第2級アミン化合物、第3級アミン化合物、無機窒化物、有機スズ化合物、パーオキサイド架橋剤、ポリオール架橋剤、ポリアミン架橋剤、オキサゾール架橋剤、イミダゾール架橋剤およびチアゾール架橋剤からなる群より選択される少なくとも1種の架橋用配合剤をさらに含有する請求項7~10のいずれかに記載の組成物。
- 前記架橋用配合剤が、パーオキサイド架橋剤である請求項11に記載の組成物。
- 請求項1~12のいずれかに記載の組成物から得られる成形品。
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| WO2021161620A1 (ja) * | 2020-02-13 | 2021-08-19 | 住友電気工業株式会社 | 熱収縮チューブ |
| WO2022230706A1 (ja) | 2021-04-27 | 2022-11-03 | ダイキン工業株式会社 | ビスジアミノフェニル化合物、架橋剤、組成物及び成形品 |
| WO2023112897A1 (ja) * | 2021-12-13 | 2023-06-22 | ダイキン工業株式会社 | パーフルオロエラストマー組成物およびパーフルオロエラストマー架橋物 |
| JP2023087675A (ja) * | 2021-12-13 | 2023-06-23 | ダイキン工業株式会社 | パーフルオロエラストマー組成物およびパーフルオロエラストマー架橋物 |
| JP7323842B2 (ja) | 2021-12-13 | 2023-08-09 | ダイキン工業株式会社 | パーフルオロエラストマー組成物およびパーフルオロエラストマー架橋物 |
| WO2023189547A1 (ja) * | 2022-03-31 | 2023-10-05 | ダイキン工業株式会社 | 組成物、架橋物およびシール材 |
| JPWO2023189547A1 (ja) * | 2022-03-31 | 2023-10-05 | ||
| WO2025013936A1 (ja) * | 2023-07-13 | 2025-01-16 | ダイキン工業株式会社 | フッ素ゴム組成物および成形品 |
| JP2025013297A (ja) * | 2023-07-13 | 2025-01-24 | ダイキン工業株式会社 | フッ素ゴム組成物および成形品 |
| JP7662973B2 (ja) | 2023-07-13 | 2025-04-16 | ダイキン工業株式会社 | フッ素ゴム組成物および成形品 |
| WO2025197709A1 (ja) * | 2024-03-22 | 2025-09-25 | Agc株式会社 | 含フッ素共重合体組成物及びその製造方法、並びに架橋ゴム物品及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112543788A (zh) | 2021-03-23 |
| JP2022010304A (ja) | 2022-01-14 |
| CN112543788B (zh) | 2023-10-24 |
| JPWO2020026909A1 (ja) | 2021-06-03 |
| EP3831877A4 (en) | 2022-04-27 |
| JP7206519B2 (ja) | 2023-01-18 |
| JP6985633B2 (ja) | 2021-12-22 |
| KR102830613B1 (ko) | 2025-07-08 |
| TW202016194A (zh) | 2020-05-01 |
| TWI778283B (zh) | 2022-09-21 |
| EP3831877A1 (en) | 2021-06-09 |
| KR102482329B1 (ko) | 2022-12-29 |
| KR20210024137A (ko) | 2021-03-04 |
| KR20230008884A (ko) | 2023-01-16 |
| US20210292451A1 (en) | 2021-09-23 |
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