WO2020024404A1 - Mask plate, and manufacturing method for flexible liquid crystal display panel - Google Patents
Mask plate, and manufacturing method for flexible liquid crystal display panel Download PDFInfo
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- WO2020024404A1 WO2020024404A1 PCT/CN2018/107579 CN2018107579W WO2020024404A1 WO 2020024404 A1 WO2020024404 A1 WO 2020024404A1 CN 2018107579 W CN2018107579 W CN 2018107579W WO 2020024404 A1 WO2020024404 A1 WO 2020024404A1
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- region
- liquid crystal
- tft substrate
- flexible
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133753—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
Definitions
- the present application relates to the field of display technology, and in particular, to a method for preparing a mask plate and a flexible liquid crystal display panel.
- the liquid crystal material enables flexible display devices to maintain a fixed liquid crystal cell thickness during repeated and prolonged bending or curling.
- PWLC polymer wall liquid crystal
- a polymer barrier wall of a suitable width can be formed in the middle of the liquid crystal layer, and the barrier wall can maintain the stability of the thickness of the box.
- the liquid crystal flow can also be effectively controlled, and the Mura caused by external forces and gravity is better eliminated (shadow).
- the existing PWLC technology research is mainly based on the IPS (In-Plane Switching) mode or the FFS (Fringe Field Switching) mode, while the important display technology of large-size panels PSVA (Polmer Stabilized Vertivally Aligned) has few examples.
- PSVA Poly Stabilized Vertivally Aligned
- the polymer monomers mostly participate in the reaction, the formation of the polymer retaining wall and the polymer serving as an alignment cannot be effectively distinguished, and it is difficult to form it on the alignment layer.
- the embodiments of the present application provide a method for preparing a mask plate and a flexible liquid crystal display panel, which can ensure that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or curled, and that certain liquid crystal molecules in the liquid crystal display panel can be obtained Pretilt angle.
- an embodiment of the present application provides a method for manufacturing a flexible liquid crystal display panel, including:
- a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
- the mask plate comprising a plurality of first regions arranged in an array, a second region located outside the first region, and an opaque region surrounding the first region, wherein, the first region and the second region are both transparent, but the light transmittances of the first region and the second region are different, and a plurality of the first regions respectively correspond to a plurality of the opaque regions.
- a light region, the opaque region is used to separate the first region and the second region;
- a voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region.
- the opaque area is treated with light, so that there is a gap between the formed particulate polymer and the polymer retaining wall.
- a size of a pixel structure of the mask plate is 50 ⁇ m to 5000 ⁇ m.
- the first region is a semi-transparent region, and the second region is a fully-transmissive region; or the first region is a fully-transmissive region, and the first The two areas are semi-transparent areas;
- granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
- forming the particulate polymer and the polymer retaining wall includes:
- the photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
- the photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
- the CF substrate and the TFT substrate obtained as a pair of boxes include:
- the CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
- the fully transparent area accounts for 10% to 40% of the mask area
- the semi-transparent area accounts for 50% of the mask area. 90%.
- an embodiment of the present application further provides a method for manufacturing a flexible liquid crystal display panel, including:
- a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
- a mask is provided, and the mask includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and the second region are both Light transmission but the light transmittances of the first region and the second region are different;
- a voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region.
- a granular polymer is formed on the surface of the CF substrate and the TFT substrate, so that the liquid crystal molecules obtain a pretilt angle; and a polymer retaining wall is formed between the CF substrate corresponding to the second region / the first region and the TFT substrate.
- a size of a pixel structure of the mask plate is 50 ⁇ m to 5000 ⁇ m.
- the first region is a semi-transparent region, and the second region is a fully-transmissive region; or the first region is a fully-transmissive region, and the first The two areas are semi-transparent areas;
- granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
- forming the particulate polymer and the polymer retaining wall includes:
- the photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
- the photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
- forming the particulate polymer and the polymer retaining wall includes:
- the photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
- the photopolymerizable monomer irradiated by the ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, forming a pillar structure connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
- the CF substrate and the TFT substrate obtained as a pair of boxes include:
- the CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
- the fully transparent area accounts for 10% to 40% of the mask area
- the semi-transparent area accounts for 50% of the mask area. 90%.
- the opaque area occupies 0% to 20% of the area of the mask plate.
- the central wavelength of the ultraviolet light is 260 nm to 380 nm
- the ultraviolet light irradiation time is 10 to 150 min
- the ultraviolet light intensity is 1 to 50 mW / cm 2 .
- the mask plate further includes an opaque area surrounding the first area, and a plurality of the first areas respectively correspond to a plurality of the opaque areas. region.
- an embodiment of the present application further provides a mask plate, which includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and all The second regions are all transparent, but the light transmittances of the first and second regions are different.
- the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region Light transmitting area.
- the mask plate further includes an opaque area surrounding the first area, and a plurality of the first areas respectively correspond to a plurality of the opaque areas.
- the mask plate includes a substrate, a light-shielding film, and a semi-transparent film that are sequentially stacked, and is used to form a semi-transparent region, a fully-transmissive region, and an opaque layer on the mask.
- Light area In the mask plate, the mask plate includes a substrate, a light-shielding film, and a semi-transparent film that are sequentially stacked, and is used to form a semi-transparent region, a fully-transmissive region, and an opaque layer on the mask. Light area.
- a masking plate and a method for manufacturing a flexible liquid crystal display panel of the present application by controlling the ultraviolet light exposure intensity at different positions on the exposure area, make the polymer retaining wall structure and help to form a pretilt angle polymerization
- the simultaneous formation of particles makes the PWLC technology equally applicable to the PSVA technology, which ensures that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or curled, and that the liquid crystal molecules in the liquid crystal display panel can obtain a certain pretilt angle.
- FIG. 1 is a schematic structural diagram of a mask plate provided in Embodiment 1 of the present application.
- FIG. 2 is a schematic side structural view of a middle mask plate provided in Embodiment 1 of the present application;
- FIG. 3 is a schematic structural diagram of another mask plate provided in Embodiment 1 of the present application.
- FIG. 4 is a schematic structural diagram of a liquid crystal layer injected between a CF substrate and a TFT substrate provided in Embodiment 1 of the present application;
- FIG. 5 is a flowchart of a method for manufacturing a flexible liquid crystal display panel provided in Embodiment 1 of the present application;
- Example 6 is a schematic view of a preparation state of the flexible liquid crystal display panel provided in Example 1 of the present application.
- FIG. 7 is a schematic structural diagram of a mask plate provided in Embodiment 2 of the present application.
- the flexible display panel has the characteristics of being bendable, thin, and not easily broken, and has a wide range of potential applications in the fields of portable devices, vehicle displays, the Internet of Things, and commercial displays.
- the production of flexible screens based on the LCD architecture has the characteristics of mature process technology and high product reliability, which is expected to be applied to large-sized displays.
- the difficulty lies in that in addition to changing the glass to transparent plastic and adapting to the TFT process, a suitable liquid crystal material is also required to enable the flexible display device to maintain the fixed liquid crystal cell thickness during repeated and prolonged bending or curling.
- the polymer system liquid crystal is a mixture of polymer monomers in a liquid crystal material.
- the liquid crystal layer is subjected to process conditions such as ultraviolet irradiation or heating, so that the polymer monomers are polymerized and separated from the liquid crystal. In this way, the desired polymer structure can be formed at a specific position.
- the polymer formed by this method has a certain adhesion on the upper and lower substrates, which can better maintain the thickness of the box.
- PWLC polymer wall liquid crystal
- the existing PWLC technology research is mainly based on the IPS (In-Plane Switching) mode or the FFS (Fringe Field Switching) mode, while the important display technology of large-size panels PSVA (Polmer Stabilized Vertivally Aligned) has few examples.
- PSVA Poly Stabilized Vertivally Aligned
- the polymer monomers mostly participate in the reaction, the formation of the polymer retaining wall and the polymer serving as an alignment cannot be effectively distinguished, and it is difficult to form it on the alignment layer.
- the embodiment of the present application proposes a method for preparing a mask plate and a flexible liquid crystal display panel.
- the polymer retaining wall structure and the polymer particles that help to form a pretilt angle are synchronized. It is formed so that the PWLC technology is also applicable to the PSVA technology, which ensures that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or rolled, and the liquid crystal molecules in the liquid crystal display panel can obtain a certain pretilt angle.
- An embodiment of the present application provides a mask plate, which includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and the second region The regions are all transparent but the light transmittances of the first region and the second region are different.
- the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region .
- the method further includes an opaque region surrounding the first region, and a plurality of the first regions respectively correspond to a plurality of the opaque regions.
- the mask plate includes a substrate, a light-shielding film, and a semi-transparent film that are sequentially stacked in order to form a semi-transparent region, a fully-transmissive region, and an opaque region on the mask.
- FIG. 1 is a schematic structural diagram of a mask plate provided in an embodiment of the present application.
- the mask plate 400 is a photomask in the form of a half-tone mask (HTM), which includes a plurality of first masks arranged in an array. Region 1, a second region 2 located outside the first region 1, and an opaque region 3 surrounding the first region 1.
- HTM half-tone mask
- FIG. 2 is a schematic side view structure view of a mask plate provided in an embodiment of the present application.
- the first region 1 is a semi-transparent region and is used to cooperate with the pixel region to form a pretilt angle of the liquid crystal molecules.
- the second area 2 is a fully transparent area, which is used to form a polymer retaining wall structure, and an opaque area is used to separate the fully transparent area and the semi-transparent area.
- the mask 400 includes a substrate A (transparent), a light-shielding film C, and a semi-transparent film B stacked in this order to form a semi-transparent region (first region 1) on the mask 400, Totally transparent area 2 (second area 2) and opaque area 3.
- An embodiment of the present application further provides a method for manufacturing a flexible liquid crystal display panel, which includes:
- a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
- a mask is provided, and the mask includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and the second region are both Light transmission but the light transmittances of the first region and the second region are different;
- a voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region.
- a granular polymer is formed on the surface of the CF substrate and the TFT substrate, so that the liquid crystal molecules obtain a pretilt angle; and a polymer retaining wall is formed between the CF substrate corresponding to the second region / the first region and the TFT substrate.
- the size of the pixel structure of the mask is 50 ⁇ m to 5000 ⁇ m.
- the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region ;
- granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
- forming the particulate polymer and the polymer retaining wall includes:
- the photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
- the photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
- forming the particulate polymer and the polymer retaining wall includes:
- the photopolymerizable monomer irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent region, forming a pillar structure that is connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
- the CF substrate and the TFT substrate that obtain the boxed pair include:
- the CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
- the fully transparent area accounts for 10% to 40% of the mask area
- the semi-transparent area accounts for 50% to 90% of the mask area
- the opaque area accounts for 0% to 20% of the area of the mask.
- the central wavelength of the ultraviolet light is 260 nm to 380 nm
- the ultraviolet light irradiation time is 10 to 150 min
- the ultraviolet light intensity is 1 to 50 mW / cm 2 .
- the mask plate further includes an opaque area surrounding the first area, and a plurality of the first areas respectively correspond to a plurality of the opaque areas.
- forming the particulate polymer and the polymer retaining wall includes:
- the photopolymerizable monomer irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent region, forming a pillar structure that is connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
- An embodiment of the present application further provides a method for manufacturing a flexible liquid crystal display panel, which includes:
- a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
- the mask plate comprising a plurality of first regions arranged in an array, a second region located outside the first region, and an opaque region surrounding the first region, wherein, the first region and the second region are both transparent, but the light transmittances of the first region and the second region are different, and a plurality of the first regions respectively correspond to a plurality of the opaque regions.
- a light region, the opaque region is used to separate the first region and the second region;
- a voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region.
- the opaque area is treated with light, so that there is a gap between the formed particulate polymer and the polymer retaining wall.
- the size of the pixel structure of the mask is 50 ⁇ m to 5000 ⁇ m.
- the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region ;
- granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
- forming the particulate polymer and the polymer retaining wall includes:
- the photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
- the photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
- the CF substrate and the TFT substrate that obtain the boxed pair include:
- the CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
- the fully transparent area accounts for 10% to 40% of the mask area
- the semi-transparent area accounts for 50% to 90% of the mask area
- FIG. 5 is a flowchart of a method for manufacturing a flexible liquid crystal display panel according to an embodiment of the present application.
- This embodiment also provides a method for manufacturing a flexible liquid crystal display panel using the mask plate of this embodiment. It includes steps:
- FIG. 4 is a schematic structural diagram of the liquid crystal layer between the CF substrate and the TFT substrate provided in the embodiment of the present application.
- the CF substrate 100 and the TFT substrate 200 obtained in a box pair group specifically include:
- S11 Provide a first flexible substrate, and use the first flexible substrate to fabricate a CF substrate 100;
- the CF substrate 100 and the TFT substrate 200 are grouped into a box pair to obtain the CF substrate 100 and the TFT substrate 200 in a box pair group.
- a PSVA-type liquid crystal doped with a photopolymerizable monomer 302 is provided, and the PSVA-type liquid crystal doped with the photopolymerizable monomer is injected into a CF substrate 100 and a cell pair.
- a liquid crystal layer 300 is formed between the TFT substrates 200.
- the liquid crystal can be injected by means of vacuum crystal filling or ODF.
- FIG. 6 is a schematic diagram of a preparation state of the flexible liquid crystal display panel provided in the embodiment of the present application, and a mask 400 according to the embodiment is provided.
- a voltage is applied to the CF substrate 100 and the TFT 200 substrate, the mask 400 is used as a photomask, and the liquid crystal layer 300 is subjected to ultraviolet light L from the CF substrate 100 side.
- the first region 1 is a semi-transparent region, and a granular polymer 303 is formed on the surfaces of the CF substrate 100 and the TFT substrate 200 corresponding to the first region 1 so that the liquid crystal molecules 301 obtain a pretilt angle;
- a polymer retaining wall 304 is formed between the CF substrate 100 and the TFT substrate 200 corresponding to the second region 2; the opaque region is treated with light to make the granular polymer 303 formed There is a gap from the polymer retaining wall 304.
- forming the granular polymer 303 and the polymer retaining wall 304 includes steps:
- the photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs on both surfaces of the CF substrate 100 and the TFT substrate 200 corresponding to the semi-transmissive area to form a particulate polymer 303, so that the liquid crystal molecules 301 obtain a inclination;
- the photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate 100 and the TFT substrate 200 corresponding to the fully transparent area, and the upper and lower ends are respectively connected to the CF substrate 100 and the TFT substrate.
- the formed polymer retaining wall 304 not only ensures that the flexible liquid crystal display panel maintains a fixed liquid crystal cell thickness during bending or bending, but also the liquid crystal molecules are placed in the space formed by the polymer retaining wall 304, which prevents the flexible liquid crystal display panel Liquid crystals flow when bent.
- the flexible liquid crystal display panel can be subjected to subsequent cutting, peeling and other module manufacturing processes.
- the central wavelength of the ultraviolet light L used is 260 nm to 380 nm, preferably 310 nm to 370 nm.
- the irradiation time of the ultraviolet light is 10 min to 150 min, preferably 30 min to 90 min; the intensity of the ultraviolet light is 1 to 50 mW / cm 2 , and preferably 2 to 20 mW / cm 2 .
- FIG. 3 is a schematic structural diagram of another mask plate provided in an embodiment of the present application, in which a fully transparent area accounts for 10% to 40% of the mask plate area, and preferably 20% to 30%.
- the semi-transparent area occupies 50% to 90% of the area of the mask, and preferably 60% to 80%.
- the opaque area occupies 0% to 20% of the mask area, and preferably 5% to 15%.
- the polymer retaining wall formed by the mask shown in Figure 3 is relatively sparse (the area of full light transmission used to form the polymer retaining wall occupies less area). This design has a slightly poorer control over the thickness of the LCD cell, but it is more A good guarantee of the aperture ratio.
- the size of the pixel structure of the mask may be equivalent to the pixel structure of the color resist, or may be larger than the pixel structure of the color resist layer, and the size (length or width) is from 50 ⁇ m to 5000 ⁇ m, preferably 80-800 ⁇ m.
- FIG. 7 is a schematic structural diagram of a mask plate according to an embodiment of the present application.
- the mask plate 400 ′ includes a plurality of first regions 1 arranged in an array and a second region outside the first region 1. Region 2 and an opaque region 3 surrounding the first region 1.
- Embodiment 1 differs from Embodiment 1 only in that the first area 1 is a fully transparent area for forming a polymer retaining wall structure; the second area 2 is a semi-transparent area for matching the pixel area to make liquid crystal molecules Forms a pretilt angle; opaque areas are used to separate fully transparent and semi-transparent areas.
- the flexible liquid crystal display panel is prepared according to the above-mentioned manufacturing method, and only the mask plate 400 'in this embodiment is used to replace the mask plate 400 in step S3 of Example 1.
- the photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs on both surfaces of the CF substrate 100 and the TFT substrate 200 corresponding to the semi-transmissive area to form a particulate polymer 303, so that the liquid crystal molecules 301 obtain a pretilt angle ;
- the photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate 100 and the TFT substrate 200 corresponding to the fully transparent area, and the upper and lower ends are respectively connected to the CF substrate 100 and the TFT substrate.
- 200-connected pillar structures, and the main structures are independent, which cannot form the wall in Example 1. This design cannot control the flow of liquid crystal but can maintain the cell thickness well, and it can also ensure the aperture ratio.
- a mask plate and a method for preparing a flexible liquid crystal display panel of the present application by controlling the ultraviolet light exposure intensity at different positions on the exposure area, the polymer barrier wall structure and the polymer particles that help to form a pretilt angle are formed simultaneously,
- the PWLC technology is also applicable to the PSVA technology, which ensures that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or curled, and the liquid crystal molecules in the liquid crystal display panel can obtain a certain pretilt angle.
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Abstract
Description
本申请涉及显示技术领域,特别是涉及一种掩膜版及柔性液晶显示面板的制备方法。The present application relates to the field of display technology, and in particular, to a method for preparing a mask plate and a flexible liquid crystal display panel.
柔性显示面板已成为当前显示技术领域的发展趋势,其具备可弯折、轻薄、不易破损的特性,但其困难在于,除了同样要将玻璃换成透明的塑料并适应TFT制程外,还需要合适的液晶材料使得柔性显示设备在反复以及长时间的弯折或者卷曲时能够维持固定液晶盒厚,通过PWLC(polymer wall liquid crystal)技术对液晶和聚合物单体的化学结构和组成比例的调整,使得液晶层中间可以形成合适宽度的聚合物挡墙,挡墙可保持盒厚的稳定性,同时通过适当的设计,也可以有效的控制液晶的流动,较好的消除由外力和重力引起的Mura(暗影)。Flexible display panels have become the current development trend in the display technology field. They have the characteristics of being bendable, thin, and not easy to break. However, the difficulty lies in that besides replacing glass with transparent plastic and adapting to the TFT process, it also needs to be suitable. The liquid crystal material enables flexible display devices to maintain a fixed liquid crystal cell thickness during repeated and prolonged bending or curling. Through the PWLC (polymer wall liquid crystal) technology, the chemical structure and composition ratio of liquid crystal and polymer monomers are adjusted. A polymer barrier wall of a suitable width can be formed in the middle of the liquid crystal layer, and the barrier wall can maintain the stability of the thickness of the box. At the same time, through proper design, the liquid crystal flow can also be effectively controlled, and the Mura caused by external forces and gravity is better eliminated (shadow).
现有的PWLC的技术的研究主要是基于IPS(In-Plane Switching)模式或者FFS(Fringe Field Switching)模式,而大尺寸面板的重要显示技术PSVA(Polmer Stabilized Vertivally Aligned)的实例则几乎没有,这一方面是由于柔性LCD的技术在小尺寸面板上实现起来较为容易,另一方面则是由于普遍采用的PWLC技术使用普通光罩对液晶进行曝光,形成挡墙,但在需要使用PSVA模式的液晶时,在进行过这一曝光过程后,由于聚合物单体大部分参与反应,聚合物挡墙和起配向作用的聚合物的形成无法被有效的区分开来,配向层上就很难再形成帮助液晶形成预倾角的聚合物颗粒。The existing PWLC technology research is mainly based on the IPS (In-Plane Switching) mode or the FFS (Fringe Field Switching) mode, while the important display technology of large-size panels PSVA (Polmer Stabilized Vertivally Aligned) has few examples. On the one hand, it is easier to implement the flexible LCD technology on small-sized panels; on the other hand, it is because the commonly used PWLC technology uses ordinary photomasks to expose the liquid crystal to form a barrier wall. At this time, after this exposure process, because the polymer monomers mostly participate in the reaction, the formation of the polymer retaining wall and the polymer serving as an alignment cannot be effectively distinguished, and it is difficult to form it on the alignment layer. Polymer particles that help the liquid crystal form a pretilt.
本申请实施例提供了一种掩膜版及柔性液晶显示面板的制备方法,可以保障液晶显示面板在弯折或者卷曲时能够维持稳定液晶盒厚,且使得液晶显示面板中的液晶分子可获得一定的预倾角。The embodiments of the present application provide a method for preparing a mask plate and a flexible liquid crystal display panel, which can ensure that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or curled, and that certain liquid crystal molecules in the liquid crystal display panel can be obtained Pretilt angle.
第一方面,本申请实施例提供一种柔性液晶显示面板的制作方法,包括:In a first aspect, an embodiment of the present application provides a method for manufacturing a flexible liquid crystal display panel, including:
获得成盒对组的CF基板和TFT基板;Obtaining a CF substrate and a TFT substrate in a box pair;
提供掺杂有光致聚合单体的PSVA型液晶,并将其注入成盒对组的CF基板和TFT基板之间,形成液晶层;Provide a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
提供一掩膜版,所述掩膜版包括呈阵列排布的多个第一区域、位于所述第一区域之外的第二区域及围设所述第一区域一周的不透光区域,其中,所述第一区域与所述第二区域均透光但所述第一区域与所述第二区域的透光率不等,多个所述第一区域分别对应多个所述不透光区域,所述不透光区域用于分隔所述第一区域和所述第二区域;Providing a mask plate, the mask plate comprising a plurality of first regions arranged in an array, a second region located outside the first region, and an opaque region surrounding the first region, Wherein, the first region and the second region are both transparent, but the light transmittances of the first region and the second region are different, and a plurality of the first regions respectively correspond to a plurality of the opaque regions. A light region, the opaque region is used to separate the first region and the second region;
对所述CF基板和TFT基板施加电压,以所述掩膜版作为光罩,使用紫外光从所述CF基板侧对所述液晶层进行光照处理,在所述第一区域/第二区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;在所述第二区域/第一区域对应的CF基板和TFT基板之间形成聚合物挡墙;A voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region. Forming a granular polymer on the surface of the CF substrate and the TFT substrate, so that the liquid crystal molecules obtain a pretilt angle; forming a polymer retaining wall between the CF substrate corresponding to the second region / the first region and the TFT substrate;
所述不透光区域经光照处理,使得形成的所述颗粒状聚合物和所述聚合物挡墙之间存在间隔。The opaque area is treated with light, so that there is a gap between the formed particulate polymer and the polymer retaining wall.
在所述的柔性液晶显示面板的制作方法中,所述掩膜版的像素结构的大小为50μm到5000μm。In the method for manufacturing a flexible liquid crystal display panel, a size of a pixel structure of the mask plate is 50 μm to 5000 μm.
在所述的柔性液晶显示面板的制作方法中,所述第一区域为半透光区域,所述第二区域为全透光区域;或所述第一区域为全透光区域,所述第二区域为半透光区域;In the method for manufacturing a flexible liquid crystal display panel, the first region is a semi-transparent region, and the second region is a fully-transmissive region; or the first region is a fully-transmissive region, and the first The two areas are semi-transparent areas;
经光照处理后,所述半透光区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;所述全透光区域对应的CF基板和TFT基板之间形成聚合物挡墙。After the light treatment, granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
在所述的柔性液晶显示面板的制作方法中,形成所述颗粒状聚合物和所述聚合物挡墙包括:In the method for manufacturing a flexible liquid crystal display panel, forming the particulate polymer and the polymer retaining wall includes:
对所述CF基板和TFT基板施加电压,使得液晶层中的液晶分子和光致聚合单体沿着一定的方向倾斜;Applying a voltage to the CF substrate and the TFT substrate, so that liquid crystal molecules and photopolymerizable monomers in the liquid crystal layer are inclined along a certain direction;
保持施加电压的状态,以所述掩膜版作为光罩,从所述CF基板侧对所述液晶层进行紫外光照射;Maintaining the applied voltage state, using the mask as a photomask, and irradiating the liquid crystal layer with ultraviolet light from the CF substrate side;
受到紫外光照射的光致聚合单体扩散,在半透光区域对应的CF基板和TFT基板的两表面发生聚合反应,形成颗粒状聚合物,使得液晶分子获得预倾角;The photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
受到紫外光照射的光致聚合单体扩散,在全透光区域对应的CF基板和TFT基板之间发生聚合反应,形成上下两端分别与CF基板和TFT基板相连接的聚合物挡墙。The photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
在所述的柔性液晶显示面板的制作方法中,所述获得成盒对组的CF基板和TFT基板包括:In the method for manufacturing a flexible liquid crystal display panel, the CF substrate and the TFT substrate obtained as a pair of boxes include:
提供第一柔性基板,利用所述第一柔性基板制作得到CF基板;Providing a first flexible substrate, and using the first flexible substrate to fabricate a CF substrate;
提供第二柔性基板,利用所述第二柔性基板制作得到TFT基板;Providing a second flexible substrate, and manufacturing a TFT substrate by using the second flexible substrate;
将所述CF基板和TFT基板成盒对组,获得成盒对组的CF基板和TFT基板。The CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
在所述的柔性液晶显示面板的制作方法中,所述全透光区域占所述掩膜版面积的10%~40%,所述半透光区域占所述掩膜版面积的50%~90%。In the method for manufacturing a flexible liquid crystal display panel, the fully transparent area accounts for 10% to 40% of the mask area, and the semi-transparent area accounts for 50% of the mask area. 90%.
第二方面,本申请实施例还提供一种柔性液晶显示面板的制作方法,包括:In a second aspect, an embodiment of the present application further provides a method for manufacturing a flexible liquid crystal display panel, including:
获得成盒对组的CF基板和TFT基板;Obtaining a CF substrate and a TFT substrate in a box pair;
提供掺杂有光致聚合单体的PSVA型液晶,并将其注入成盒对组的CF基板和TFT基板之间,形成液晶层;Provide a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
提供一掩膜版,所述掩膜版包括呈阵列排布的多个第一区域和位于所述第一区域之外的第二区域,其中,所述第一区域与所述第二区域均透光但所述第一区域与所述第二区域的透光率不等;A mask is provided, and the mask includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and the second region are both Light transmission but the light transmittances of the first region and the second region are different;
对所述CF基板和TFT基板施加电压,以所述掩膜版作为光罩,使用紫外光从所述CF基板侧对所述液晶层进行光照处理,在所述第一区域/第二区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;在所述第二区域/第一区域对应的CF基板和TFT基板之间形成聚合物挡墙。A voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region. A granular polymer is formed on the surface of the CF substrate and the TFT substrate, so that the liquid crystal molecules obtain a pretilt angle; and a polymer retaining wall is formed between the CF substrate corresponding to the second region / the first region and the TFT substrate.
在所述的柔性液晶显示面板的制作方法中,所述掩膜版的像素结构的大小为50μm到5000μm。In the method for manufacturing a flexible liquid crystal display panel, a size of a pixel structure of the mask plate is 50 μm to 5000 μm.
在所述的柔性液晶显示面板的制作方法中,所述第一区域为半透光区域,所述第二区域为全透光区域;或所述第一区域为全透光区域,所述第二区域为半透光区域;In the method for manufacturing a flexible liquid crystal display panel, the first region is a semi-transparent region, and the second region is a fully-transmissive region; or the first region is a fully-transmissive region, and the first The two areas are semi-transparent areas;
经光照处理后,所述半透光区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;所述全透光区域对应的CF基板和TFT基板之间形成聚合物挡墙。After the light treatment, granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
在所述的柔性液晶显示面板的制作方法中,形成所述颗粒状聚合物和所述聚合物挡墙包括:In the method for manufacturing a flexible liquid crystal display panel, forming the particulate polymer and the polymer retaining wall includes:
对所述CF基板和TFT基板施加电压,使得液晶层中的液晶分子和光致聚合单体沿着一定的方向倾斜;Applying a voltage to the CF substrate and the TFT substrate, so that liquid crystal molecules and photopolymerizable monomers in the liquid crystal layer are inclined along a certain direction;
保持施加电压的状态,以所述掩膜版作为光罩,从所述CF基板侧对所述液晶层进行紫外光照射;Maintaining the applied voltage state, using the mask as a photomask, and irradiating the liquid crystal layer with ultraviolet light from the CF substrate side;
受到紫外光照射的光致聚合单体扩散,在半透光区域对应的CF基板和TFT基板的两表面发生聚合反应,形成颗粒状聚合物,使得液晶分子获得预倾角;The photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
受到紫外光照射的光致聚合单体扩散,在全透光区域对应的CF基板和TFT基板之间发生聚合反应,形成上下两端分别与CF基板和TFT基板相连接的聚合物挡墙。The photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
在所述的柔性液晶显示面板的制作方法中,形成所述颗粒状聚合物和所述聚合物挡墙包括:In the method for manufacturing a flexible liquid crystal display panel, forming the particulate polymer and the polymer retaining wall includes:
对所述CF基板和TFT基板施加电压,使得液晶层中的液晶分子和光致聚合单体沿着一定的方向倾斜;Applying a voltage to the CF substrate and the TFT substrate, so that liquid crystal molecules and photopolymerizable monomers in the liquid crystal layer are inclined along a certain direction;
保持施加电压的状态,以所述掩膜版作为光罩,从所述CF基板侧对所述液晶层进行紫外光照射;Maintaining the applied voltage state, using the mask as a photomask, and irradiating the liquid crystal layer with ultraviolet light from the CF substrate side;
受到紫外光照射的光致聚合单体扩散,在半透光区域对应的CF基板和TFT基板的两表面发生聚合反应,形成颗粒状聚合物,使得液晶分子获得预倾角;The photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
受到紫外光照射的光致聚合单体扩散,在全透光区域对应的CF基板和TFT基板之间发生聚合反应,形成上下两端分别与CF基板和TFT基板相连接的柱体结构。The photopolymerizable monomer irradiated by the ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, forming a pillar structure connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
在所述的柔性液晶显示面板的制作方法中,所述获得成盒对组的CF基板和TFT基板包括:In the method for manufacturing a flexible liquid crystal display panel, the CF substrate and the TFT substrate obtained as a pair of boxes include:
提供第一柔性基板,利用所述第一柔性基板制作得到CF基板;Providing a first flexible substrate, and using the first flexible substrate to fabricate a CF substrate;
提供第二柔性基板,利用所述第二柔性基板制作得到TFT基板;Providing a second flexible substrate, and manufacturing a TFT substrate by using the second flexible substrate;
将所述CF基板和TFT基板成盒对组,获得成盒对组的CF基板和TFT基板。The CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
在所述的柔性液晶显示面板的制作方法中,所述全透光区域占所述掩膜版面积的10%~40%,所述半透光区域占所述掩膜版面积的50%~90%。In the method for manufacturing a flexible liquid crystal display panel, the fully transparent area accounts for 10% to 40% of the mask area, and the semi-transparent area accounts for 50% of the mask area. 90%.
在所述的柔性液晶显示面板的制作方法中,所述不透光区域占述掩膜版面积的0%~20%。In the method for manufacturing a flexible liquid crystal display panel, the opaque area occupies 0% to 20% of the area of the mask plate.
在所述的柔性液晶显示面板的制作方法中,所述紫外光中心波长为260nm~380nm,紫外光照射时间为10 ~150 min,紫外光强度为1~50 mW/cm 2。 In the method for manufacturing a flexible liquid crystal display panel, the central wavelength of the ultraviolet light is 260 nm to 380 nm, the ultraviolet light irradiation time is 10 to 150 min, and the ultraviolet light intensity is 1 to 50 mW / cm 2 .
在所述的柔性液晶显示面板的制作方法中,所述掩膜版还包括围设所述第一区域一周的不透光区域,多个所述第一区域分别对应多个所述不透光区域。In the method for manufacturing a flexible liquid crystal display panel, the mask plate further includes an opaque area surrounding the first area, and a plurality of the first areas respectively correspond to a plurality of the opaque areas. region.
第三方面,本申请实施例还提供一种掩膜版,包括呈阵列排布的多个第一区域和位于所述第一区域之外的第二区域,其中,所述第一区域和所述第二区域均透光但所述第一区域与所述第二区域的透光率不等。In a third aspect, an embodiment of the present application further provides a mask plate, which includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and all The second regions are all transparent, but the light transmittances of the first and second regions are different.
在所述的掩膜版中,所述第一区域为半透光区域,所述第二区域为全透光区域;或所述第一区域为全透光区域,所述第二区域为半透光区域。In the mask, the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region Light transmitting area.
在所述的掩膜版中,还包括围设所述第一区域一周的不透光区域,多个所述第一区域分别对应多个所述不透光区域。The mask plate further includes an opaque area surrounding the first area, and a plurality of the first areas respectively correspond to a plurality of the opaque areas.
在所述的掩膜版中,所述掩膜版包括依次层叠设置的基板、遮光膜以及半透膜,用于在所述掩膜版上形成半透光区域、全透光区域以及不透光区域。In the mask plate, the mask plate includes a substrate, a light-shielding film, and a semi-transparent film that are sequentially stacked, and is used to form a semi-transparent region, a fully-transmissive region, and an opaque layer on the mask. Light area.
与现有技术相比,本申请的一种掩膜版及柔性液晶显示面板的制备方法,通过控制曝光区域上不同位置的紫外光曝光强度,使得聚合物挡墙结构和帮助形成预倾角的聚合物颗粒同步形成,使得PWLC技术同样适用于PSVA技术,保障了液晶显示面板在弯折或者卷曲时能够维持稳定液晶盒厚,且使得液晶显示面板中的液晶分子可获得一定的预倾角。Compared with the prior art, a masking plate and a method for manufacturing a flexible liquid crystal display panel of the present application, by controlling the ultraviolet light exposure intensity at different positions on the exposure area, make the polymer retaining wall structure and help to form a pretilt angle polymerization The simultaneous formation of particles makes the PWLC technology equally applicable to the PSVA technology, which ensures that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or curled, and that the liquid crystal molecules in the liquid crystal display panel can obtain a certain pretilt angle.
图1是本申请实施例1提供的掩膜版的结构示意图;FIG. 1 is a schematic structural diagram of a mask plate provided in Embodiment 1 of the present application; FIG.
图2是本申请实施例1提供的中掩膜版的侧视结构示意图;FIG. 2 is a schematic side structural view of a middle mask plate provided in Embodiment 1 of the present application; FIG.
图3是本申请实施例1提供的另一种掩膜版的结构示意图;3 is a schematic structural diagram of another mask plate provided in Embodiment 1 of the present application;
图4是本申请实施例1提供的CF基板和TFT基板之间注入液晶层后的结构示意图;4 is a schematic structural diagram of a liquid crystal layer injected between a CF substrate and a TFT substrate provided in Embodiment 1 of the present application;
图5是本申请实施例1提供的柔性液晶显示面板的制备方法的流程图;5 is a flowchart of a method for manufacturing a flexible liquid crystal display panel provided in Embodiment 1 of the present application;
图6是本申请实施例1提供的柔性液晶显示面板的一个制备状态示意图;6 is a schematic view of a preparation state of the flexible liquid crystal display panel provided in Example 1 of the present application;
图7是本申请实施例2提供的掩膜版的结构示意图。FIG. 7 is a schematic structural diagram of a mask plate provided in Embodiment 2 of the present application.
以下将参照附图来详细描述本申请的实施例。然而,可以以许多不同的形式来实施本申请,并且本申请不应该被解释为限制于这里阐述的具体实施例。相反,提供这些实施例是为了解释本申请的原理及其实际应用,从而使本领域的其他技术人员能够理解本申请的各种实施例和适合于特定预期应用的各种修改。在附图中,为了清楚起见,可以夸大元件的形状和尺寸,并且相同的标号将始终被用于表示相同或相似的元件。Hereinafter, embodiments of the present application will be described in detail with reference to the drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. Rather, these embodiments are provided to explain the principles of the application and its practical applications, thereby enabling others skilled in the art to understand the various embodiments of the application and the various modifications that are suited to the particular intended application. In the drawings, the shapes and sizes of elements may be exaggerated for clarity, and the same reference numerals will always be used to represent the same or similar elements.
柔性显示面板具备可弯折、轻薄、不易破损的特性,在便携式设备、车载显示、物联网、商业显示等领域具有广泛的潜在应用。相比于OLED的架构,以LCD的架构进行柔性屏的生产具备制程路线技术成熟、产品信耐性高等特点,有希望应用于大尺寸的显示屏上。但其困难在于,除了同样要将玻璃换成透明的塑料并适应TFT制程外,还需要合适的液晶材料使得柔性显示设备在反复以及长时间的弯折或者卷曲时能够维持固定液晶盒厚。The flexible display panel has the characteristics of being bendable, thin, and not easily broken, and has a wide range of potential applications in the fields of portable devices, vehicle displays, the Internet of Things, and commercial displays. Compared with the OLED architecture, the production of flexible screens based on the LCD architecture has the characteristics of mature process technology and high product reliability, which is expected to be applied to large-sized displays. However, the difficulty lies in that in addition to changing the glass to transparent plastic and adapting to the TFT process, a suitable liquid crystal material is also required to enable the flexible display device to maintain the fixed liquid crystal cell thickness during repeated and prolonged bending or curling.
聚合物体系液晶是将聚合物单体混合在液晶材料中,在液晶成盒制程结束后,对液晶层进行紫外光照射或者加热等制程条件,使得聚合物单体进行聚合,同时与液晶分相,这样就可以在特定的位置形成需要的聚合物结构。这种方法形成的聚合物在上下基板上都有一定的黏附作用,能够较好的起到维持盒厚的作用。其中PWLC(polymer wall liquid crystal)是指通过对液晶和聚合物单体的化学结构和组成比例的调整,使得液晶层在进行准直性紫外光曝光后,中间可以形成合适宽度的聚合物挡墙,此挡墙的位置与紫外光照射到的区域相关,而紫外光照射的区域又可以通过光罩的设计来进行控制。由于有了聚合物挡墙的存在,盒厚可以被稳定的维持,同时通过适当的设计,也可以有效的控制液晶的流动,较好的消除由外力和重力引起的Mura(暗影)。The polymer system liquid crystal is a mixture of polymer monomers in a liquid crystal material. After the liquid crystal forming process is completed, the liquid crystal layer is subjected to process conditions such as ultraviolet irradiation or heating, so that the polymer monomers are polymerized and separated from the liquid crystal. In this way, the desired polymer structure can be formed at a specific position. The polymer formed by this method has a certain adhesion on the upper and lower substrates, which can better maintain the thickness of the box. Among them, PWLC (polymer wall liquid crystal) refers to the adjustment of the chemical structure and composition ratio of liquid crystal and polymer monomers, so that after the collimated ultraviolet light exposure of the liquid crystal layer, a polymer barrier wall of a suitable width can be formed in the middle The position of this retaining wall is related to the area irradiated by the ultraviolet light, and the area irradiated by the ultraviolet light can be controlled by the design of the photomask. Due to the existence of the polymer retaining wall, the cell thickness can be stably maintained. At the same time, through proper design, the liquid crystal flow can also be effectively controlled, and the Mura (darkness) caused by external forces and gravity can be better eliminated.
现有的PWLC的技术的研究主要是基于IPS(In-Plane Switching)模式或者FFS(Fringe Field Switching)模式,而大尺寸面板的重要显示技术PSVA(Polmer Stabilized Vertivally Aligned)的实例则几乎没有,这一方面是由于柔性LCD的技术在小尺寸面板上实现起来较为容易,另一方面则是由于普遍采用的PWLC技术使用普通光罩对液晶进行曝光,形成挡墙,但在需要使用PSVA模式的液晶时,在进行过这一曝光过程后,由于聚合物单体大部分参与反应,聚合物挡墙和起配向作用的聚合物的形成无法被有效的区分开来,配向层上就很难再形成帮助液晶形成预倾角的聚合物颗粒。The existing PWLC technology research is mainly based on the IPS (In-Plane Switching) mode or the FFS (Fringe Field Switching) mode, while the important display technology of large-size panels PSVA (Polmer Stabilized Vertivally Aligned) has few examples. On the one hand, it is easier to implement the flexible LCD technology on small-sized panels; on the other hand, it is because the commonly used PWLC technology uses ordinary photomasks to expose the liquid crystal to form a barrier wall. At this time, after this exposure process, because the polymer monomers mostly participate in the reaction, the formation of the polymer retaining wall and the polymer serving as an alignment cannot be effectively distinguished, and it is difficult to form it on the alignment layer. Polymer particles that help the liquid crystal form a pretilt.
因此,本申请实施例提出一种掩膜版及柔性液晶显示面板的制备方法,通过控制曝光区域上不同位置的紫外光曝光强度,使得聚合物挡墙结构和帮助形成预倾角的聚合物颗粒同步形成,使得PWLC技术同样适用于PSVA技术,保障了液晶显示面板在弯折或者卷曲时能够维持稳定液晶盒厚,且使得液晶显示面板中的液晶分子可获得一定的预倾角。Therefore, the embodiment of the present application proposes a method for preparing a mask plate and a flexible liquid crystal display panel. By controlling the ultraviolet light exposure intensity at different positions on the exposure area, the polymer retaining wall structure and the polymer particles that help to form a pretilt angle are synchronized. It is formed so that the PWLC technology is also applicable to the PSVA technology, which ensures that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or rolled, and the liquid crystal molecules in the liquid crystal display panel can obtain a certain pretilt angle.
实施例1Example 1
本申请实施例提供一种掩膜版,其中,包括呈阵列排布的多个第一区域和位于所述第一区域之外的第二区域,其中,所述第一区域和所述第二区域均透光但所述第一区域与所述第二区域的透光率不等。An embodiment of the present application provides a mask plate, which includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and the second region The regions are all transparent but the light transmittances of the first region and the second region are different.
在一些实施例中,所述第一区域为半透光区域,所述第二区域为全透光区域;或所述第一区域为全透光区域,所述第二区域为半透光区域。In some embodiments, the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region .
在一些实施例中,还包括围设所述第一区域一周的不透光区域,多个所述第一区域分别对应多个所述不透光区域。In some embodiments, the method further includes an opaque region surrounding the first region, and a plurality of the first regions respectively correspond to a plurality of the opaque regions.
在一些实施例中,所述掩膜版包括依次层叠设置的基板、遮光膜以及半透膜,用于在所述掩膜版上形成半透光区域、全透光区域以及不透光区域。In some embodiments, the mask plate includes a substrate, a light-shielding film, and a semi-transparent film that are sequentially stacked in order to form a semi-transparent region, a fully-transmissive region, and an opaque region on the mask.
参照图1,图1为本申请实施例提供的掩膜版的结构示意图,所述掩膜版400为HTM(Half-Tone Mask)形式的光罩,其包括呈阵列排布的多个第一区域1、位于第一区域1之外的第二区域2及围设所述第一区域1一周的不透光区域3。Referring to FIG. 1, FIG. 1 is a schematic structural diagram of a mask plate provided in an embodiment of the present application. The mask plate 400 is a photomask in the form of a half-tone mask (HTM), which includes a plurality of first masks arranged in an array. Region 1, a second region 2 located outside the first region 1, and an opaque region 3 surrounding the first region 1.
结合图1和图2所示,图2为本申请实施例提供的掩膜版的侧视结构示意图,第一区域1为半透光区域,用于配合像素区使得液晶分子形成预倾角;第二区域2为全透光区域,用于形成聚合物挡墙结构,不透光区域用于分隔全透光区域和半透光区域。With reference to FIG. 1 and FIG. 2, FIG. 2 is a schematic side view structure view of a mask plate provided in an embodiment of the present application. The first region 1 is a semi-transparent region and is used to cooperate with the pixel region to form a pretilt angle of the liquid crystal molecules. The second area 2 is a fully transparent area, which is used to form a polymer retaining wall structure, and an opaque area is used to separate the fully transparent area and the semi-transparent area.
参照图2所示,掩膜版400包括依次层叠设置的基板A(全透)、遮光膜C和半透膜B,以在掩膜版400上形成半透光区域(第一区域1)、全透光区域2(第二区域2)和不透光区域3。As shown in FIG. 2, the mask 400 includes a substrate A (transparent), a light-shielding film C, and a semi-transparent film B stacked in this order to form a semi-transparent region (first region 1) on the mask 400, Totally transparent area 2 (second area 2) and opaque area 3.
本申请实施例还提供一种柔性液晶显示面板的制作方法,其包括:An embodiment of the present application further provides a method for manufacturing a flexible liquid crystal display panel, which includes:
获得成盒对组的CF基板和TFT基板;Obtaining a CF substrate and a TFT substrate in a box pair;
提供掺杂有光致聚合单体的PSVA型液晶,并将其注入成盒对组的CF基板和TFT基板之间,形成液晶层;Provide a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
提供一掩膜版,所述掩膜版包括呈阵列排布的多个第一区域和位于所述第一区域之外的第二区域,其中,所述第一区域与所述第二区域均透光但所述第一区域与所述第二区域的透光率不等;A mask is provided, and the mask includes a plurality of first regions arranged in an array and a second region outside the first region, wherein the first region and the second region are both Light transmission but the light transmittances of the first region and the second region are different;
对所述CF基板和TFT基板施加电压,以所述掩膜版作为光罩,使用紫外光从所述CF基板侧对所述液晶层进行光照处理,在所述第一区域/第二区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;在所述第二区域/第一区域对应的CF基板和TFT基板之间形成聚合物挡墙。A voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region. A granular polymer is formed on the surface of the CF substrate and the TFT substrate, so that the liquid crystal molecules obtain a pretilt angle; and a polymer retaining wall is formed between the CF substrate corresponding to the second region / the first region and the TFT substrate.
在一些实施例中,所述掩膜版的像素结构的大小为50μm到5000μm。In some embodiments, the size of the pixel structure of the mask is 50 μm to 5000 μm.
在一些实施例中,所述第一区域为半透光区域,所述第二区域为全透光区域;或所述第一区域为全透光区域,所述第二区域为半透光区域;In some embodiments, the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region ;
经光照处理后,所述半透光区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;所述全透光区域对应的CF基板和TFT基板之间形成聚合物挡墙。After the light treatment, granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
在一些实施例中,形成所述颗粒状聚合物和所述聚合物挡墙包括:In some embodiments, forming the particulate polymer and the polymer retaining wall includes:
对所述CF基板和TFT基板施加电压,使得液晶层中的液晶分子和光致聚合单体沿着一定的方向倾斜;Applying a voltage to the CF substrate and the TFT substrate, so that liquid crystal molecules and photopolymerizable monomers in the liquid crystal layer are inclined along a certain direction;
保持施加电压的状态,以所述掩膜版作为光罩,从所述CF基板侧对所述液晶层进行紫外光照射;Maintaining the applied voltage state, using the mask as a photomask, and irradiating the liquid crystal layer with ultraviolet light from the CF substrate side;
受到紫外光照射的光致聚合单体扩散,在半透光区域对应的CF基板和TFT基板的两表面发生聚合反应,形成颗粒状聚合物,使得液晶分子获得预倾角;The photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
受到紫外光照射的光致聚合单体扩散,在全透光区域对应的CF基板和TFT基板之间发生聚合反应,形成上下两端分别与CF基板和TFT基板相连接的聚合物挡墙。The photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
在一些实施例中,形成所述颗粒状聚合物和所述聚合物挡墙包括:In some embodiments, forming the particulate polymer and the polymer retaining wall includes:
对所述CF基板和TFT基板施加电压,使得液晶层中的液晶分子和光致聚合单体沿着一定的方向倾斜;Applying a voltage to the CF substrate and the TFT substrate, so that liquid crystal molecules and photopolymerizable monomers in the liquid crystal layer are inclined along a certain direction;
保持施加电压的状态,以所述掩膜版作为光罩,从所述CF基板侧对所述液晶层进行紫外光照射;Maintaining the applied voltage state, using the mask as a photomask, and irradiating the liquid crystal layer with ultraviolet light from the CF substrate side;
受到紫外光L照射的光致聚合单体扩散,在全透光区域对应的CF基板和TFT基板之间发生聚合反应,形成上下两端分别与CF基板和TFT基板相连接的柱体结构。The photopolymerizable monomer irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent region, forming a pillar structure that is connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
在一些实施例中,所述获得成盒对组的CF基板和TFT基板包括:In some embodiments, the CF substrate and the TFT substrate that obtain the boxed pair include:
提供第一柔性基板,利用所述第一柔性基板制作得到CF基板;Providing a first flexible substrate, and using the first flexible substrate to fabricate a CF substrate;
提供第二柔性基板,利用所述第二柔性基板制作得到TFT基板;Providing a second flexible substrate, and manufacturing a TFT substrate by using the second flexible substrate;
将所述CF基板和TFT基板成盒对组,获得成盒对组的CF基板和TFT基板。The CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
在一些实施例中,所述全透光区域占所述掩膜版面积的10%~40%,所述半透光区域占所述掩膜版面积的50%~90%。In some embodiments, the fully transparent area accounts for 10% to 40% of the mask area, and the semi-transparent area accounts for 50% to 90% of the mask area.
在一些实施例中,所述不透光区域占述掩膜版面积的0%~20%。In some embodiments, the opaque area accounts for 0% to 20% of the area of the mask.
在一些实施例中,所述紫外光中心波长为260nm~380nm,紫外光照射时间为10 ~150 min,紫外光强度为1~50 mW/cm 2。 In some embodiments, the central wavelength of the ultraviolet light is 260 nm to 380 nm, the ultraviolet light irradiation time is 10 to 150 min, and the ultraviolet light intensity is 1 to 50 mW / cm 2 .
在一些实施例中,所述掩膜版还包括围设所述第一区域一周的不透光区域,多个所述第一区域分别对应多个所述不透光区域。In some embodiments, the mask plate further includes an opaque area surrounding the first area, and a plurality of the first areas respectively correspond to a plurality of the opaque areas.
在一些实施例中,形成所述颗粒状聚合物和所述聚合物挡墙包括:In some embodiments, forming the particulate polymer and the polymer retaining wall includes:
对所述CF基板和TFT基板施加电压,使得液晶层中的液晶分子和光致聚合单体沿着一定的方向倾斜;Applying a voltage to the CF substrate and the TFT substrate, so that liquid crystal molecules and photopolymerizable monomers in the liquid crystal layer are inclined along a certain direction;
保持施加电压的状态,以所述掩膜版作为光罩,从所述CF基板侧对所述液晶层进行紫外光照射;Maintaining the applied voltage state, using the mask as a photomask, and irradiating the liquid crystal layer with ultraviolet light from the CF substrate side;
受到紫外光L照射的光致聚合单体扩散,在全透光区域对应的CF基板和TFT基板之间发生聚合反应,形成上下两端分别与CF基板和TFT基板相连接的柱体结构。The photopolymerizable monomer irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent region, forming a pillar structure that is connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
本申请实施例还提供一种柔性液晶显示面板的制作方法,其包括:An embodiment of the present application further provides a method for manufacturing a flexible liquid crystal display panel, which includes:
获得成盒对组的CF基板和TFT基板;Obtaining a CF substrate and a TFT substrate in a box pair;
提供掺杂有光致聚合单体的PSVA型液晶,并将其注入成盒对组的CF基板和TFT基板之间,形成液晶层;Provide a PSVA type liquid crystal doped with a photopolymerizable monomer and inject it between a CF substrate and a TFT substrate in a box pair to form a liquid crystal layer;
提供一掩膜版,所述掩膜版包括呈阵列排布的多个第一区域、位于所述第一区域之外的第二区域及围设所述第一区域一周的不透光区域,其中,所述第一区域与所述第二区域均透光但所述第一区域与所述第二区域的透光率不等,多个所述第一区域分别对应多个所述不透光区域,所述不透光区域用于分隔所述第一区域和所述第二区域;Providing a mask plate, the mask plate comprising a plurality of first regions arranged in an array, a second region located outside the first region, and an opaque region surrounding the first region, Wherein, the first region and the second region are both transparent, but the light transmittances of the first region and the second region are different, and a plurality of the first regions respectively correspond to a plurality of the opaque regions. A light region, the opaque region is used to separate the first region and the second region;
对所述CF基板和TFT基板施加电压,以所述掩膜版作为光罩,使用紫外光从所述CF基板侧对所述液晶层进行光照处理,在所述第一区域/第二区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;在所述第二区域/第一区域对应的CF基板和TFT基板之间形成聚合物挡墙;A voltage is applied to the CF substrate and the TFT substrate, the mask is used as a photomask, and the liquid crystal layer is illuminated with ultraviolet light from the CF substrate side, corresponding to the first region / second region. Forming a granular polymer on the surface of the CF substrate and the TFT substrate, so that the liquid crystal molecules obtain a pretilt angle; forming a polymer retaining wall between the CF substrate corresponding to the second region / the first region and the TFT substrate;
所述不透光区域经光照处理,使得形成的所述颗粒状聚合物和所述聚合物挡墙之间存在间隔。The opaque area is treated with light, so that there is a gap between the formed particulate polymer and the polymer retaining wall.
在一些实施例中,所述掩膜版的像素结构的大小为50μm到5000μm。In some embodiments, the size of the pixel structure of the mask is 50 μm to 5000 μm.
在一些实施例中,所述第一区域为半透光区域,所述第二区域为全透光区域;或所述第一区域为全透光区域,所述第二区域为半透光区域;In some embodiments, the first region is a semi-transparent region and the second region is a fully-transmissive region; or the first region is a fully-transmissive region and the second region is a semi-transmissive region ;
经光照处理后,所述半透光区域对应的CF基板和TFT基板表面形成颗粒状聚合物,使液晶分子获得预倾角;所述全透光区域对应的CF基板和TFT基板之间形成聚合物挡墙。After the light treatment, granular polymers are formed on the surfaces of the CF substrate and the TFT substrate corresponding to the semi-transparent region, so that the liquid crystal molecules obtain a pretilt angle; a polymer is formed between the CF substrate and the TFT substrate corresponding to the fully-transmissive region. Retaining wall.
在一些实施例中,形成所述颗粒状聚合物和所述聚合物挡墙包括:In some embodiments, forming the particulate polymer and the polymer retaining wall includes:
对所述CF基板和TFT基板施加电压,使得液晶层中的液晶分子和光致聚合单体沿着一定的方向倾斜;Applying a voltage to the CF substrate and the TFT substrate, so that liquid crystal molecules and photopolymerizable monomers in the liquid crystal layer are inclined along a certain direction;
保持施加电压的状态,以所述掩膜版作为光罩,从所述CF基板侧对所述液晶层进行紫外光照射;Maintaining the applied voltage state, using the mask as a photomask, and irradiating the liquid crystal layer with ultraviolet light from the CF substrate side;
受到紫外光照射的光致聚合单体扩散,在半透光区域对应的CF基板和TFT基板的两表面发生聚合反应,形成颗粒状聚合物,使得液晶分子获得预倾角;The photopolymerizable monomers irradiated with ultraviolet light diffuse, and a polymerization reaction occurs on both surfaces of the CF substrate and the TFT substrate corresponding to the semi-transmissive area to form a particulate polymer, so that the liquid crystal molecules obtain a pretilt angle;
受到紫外光照射的光致聚合单体扩散,在全透光区域对应的CF基板和TFT基板之间发生聚合反应,形成上下两端分别与CF基板和TFT基板相连接的聚合物挡墙。The photopolymerizable monomer irradiated with ultraviolet light diffuses, and a polymerization reaction occurs between the CF substrate and the TFT substrate corresponding to the fully transparent area, thereby forming a polymer retaining wall connected to the CF substrate and the TFT substrate at the upper and lower ends, respectively.
在一些实施例中,所述获得成盒对组的CF基板和TFT基板包括:In some embodiments, the CF substrate and the TFT substrate that obtain the boxed pair include:
提供第一柔性基板,利用所述第一柔性基板制作得到CF基板;Providing a first flexible substrate, and using the first flexible substrate to fabricate a CF substrate;
提供第二柔性基板,利用所述第二柔性基板制作得到TFT基板;Providing a second flexible substrate, and manufacturing a TFT substrate by using the second flexible substrate;
将所述CF基板和TFT基板成盒对组,获得成盒对组的CF基板和TFT基板。The CF substrate and the TFT substrate are grouped into a box pair group to obtain a CF substrate and a TFT substrate in a box pair group.
在一些实施例中,所述全透光区域占所述掩膜版面积的10%~40%,所述半透光区域占所述掩膜版面积的50%~90%。In some embodiments, the fully transparent area accounts for 10% to 40% of the mask area, and the semi-transparent area accounts for 50% to 90% of the mask area.
参照图5所示,图5为本申请实施例提供的柔性液晶显示面板的制备方法的流程图,本实施例还提供一种利用本实施例的掩膜版制备柔性液晶显示面板的制作方法,其包括步骤:Referring to FIG. 5, FIG. 5 is a flowchart of a method for manufacturing a flexible liquid crystal display panel according to an embodiment of the present application. This embodiment also provides a method for manufacturing a flexible liquid crystal display panel using the mask plate of this embodiment. It includes steps:
S1、获得成盒对组的CF基板和TFT基板;S1. Obtain a CF substrate and a TFT substrate in a box pair group;
结合图4和图5所示,图4为本申请实施例提供的CF基板和TFT基板之间注入液晶层后的结构示意图,获得成盒对组的CF基板100和TFT基板200具体包括:4 and FIG. 5, FIG. 4 is a schematic structural diagram of the liquid crystal layer between the CF substrate and the TFT substrate provided in the embodiment of the present application. The CF substrate 100 and the TFT substrate 200 obtained in a box pair group specifically include:
S11、提供第一柔性基板,利用所述第一柔性基板制作得到CF基板100;S11. Provide a first flexible substrate, and use the first flexible substrate to fabricate a CF substrate 100;
S11、提供第二柔性基板,利用所述第二柔性基板制作得到TFT基板200;S11. Provide a second flexible substrate, and use the second flexible substrate to obtain a TFT substrate 200.
S13、将所述CF基板100和TFT基板200成盒对组,获得成盒对组的CF基板100和TFT基板200。S13. The CF substrate 100 and the TFT substrate 200 are grouped into a box pair to obtain the CF substrate 100 and the TFT substrate 200 in a box pair group.
S2、结合图4和图5,提供掺杂有光致聚合单体302的PSVA型液晶,并将所述掺杂有光致聚合单体的PSVA型液晶注入成盒对组的CF基板100和TFT基板200之间,形成液晶层300。其中可通过真空灌晶或者ODF的方式注入液晶。S2. In conjunction with FIG. 4 and FIG. 5, a PSVA-type liquid crystal doped with a photopolymerizable monomer 302 is provided, and the PSVA-type liquid crystal doped with the photopolymerizable monomer is injected into a CF substrate 100 and a cell pair. A liquid crystal layer 300 is formed between the TFT substrates 200. The liquid crystal can be injected by means of vacuum crystal filling or ODF.
S3、参照图5和图6,图6为本申请实施例提供的柔性液晶显示面板的一个制备状态示意图,提供本实施例所述的掩膜版400。S3. Referring to FIG. 5 and FIG. 6, FIG. 6 is a schematic diagram of a preparation state of the flexible liquid crystal display panel provided in the embodiment of the present application, and a mask 400 according to the embodiment is provided.
S4、参照图5和图6,对所述CF基板100和TFT200基板施加电压,以所述掩膜版400作为光罩,使用紫外光L从所述CF基板100侧对所述液晶层300进行光照处理,第一区域1为半透光区域,在所述第一区域1对应的CF基板100和TFT基板200表面形成颗粒状聚合物303,使液晶分子301获得预倾角;第二区域2为全透光区域,在所述第二区域2对应的CF基板100和TFT基板200之间形成聚合物挡墙304;所述不透光区域经光照处理,使得形成的所述颗粒状聚合物303和所述聚合物挡墙304之间存在间隔。S4. Referring to FIG. 5 and FIG. 6, a voltage is applied to the CF substrate 100 and the TFT 200 substrate, the mask 400 is used as a photomask, and the liquid crystal layer 300 is subjected to ultraviolet light L from the CF substrate 100 side. In light treatment, the first region 1 is a semi-transparent region, and a granular polymer 303 is formed on the surfaces of the CF substrate 100 and the TFT substrate 200 corresponding to the first region 1 so that the liquid crystal molecules 301 obtain a pretilt angle; In a fully transparent region, a polymer retaining wall 304 is formed between the CF substrate 100 and the TFT substrate 200 corresponding to the second region 2; the opaque region is treated with light to make the granular polymer 303 formed There is a gap from the polymer retaining wall 304.
具体的,形成所述颗粒状聚合物303和所述聚合物挡墙304包括步骤:Specifically, forming the granular polymer 303 and the polymer retaining wall 304 includes steps:
S41、对所述CF基板100和TFT基板200施加电压,使得液晶层300中的液晶分子301和光致聚合单体302沿着一定的方向倾斜;S41. Apply a voltage to the CF substrate 100 and the TFT substrate 200, so that the liquid crystal molecules 301 and the photopolymerizable monomer 302 in the liquid crystal layer 300 are inclined along a certain direction;
S42、保持施加电压的状态,以所述掩膜版400作为光罩,从所述CF基板100侧对所述液晶层300进行紫外光照射;S42. Keep the applied voltage state, and use the mask 400 as a photomask to irradiate the liquid crystal layer 300 with ultraviolet light from the CF substrate 100 side;
S43、受到紫外光L照射的光致聚合单体302扩散,在半透光区域对应的CF基板100和TFT基板200的两表面发生聚合反应,形成颗粒状聚合物303,使得液晶分子301获得预倾角;S43. The photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs on both surfaces of the CF substrate 100 and the TFT substrate 200 corresponding to the semi-transmissive area to form a particulate polymer 303, so that the liquid crystal molecules 301 obtain a inclination;
与此同时,受到紫外光L照射的光致聚合单体302扩散,在全透光区域对应的CF基板100和TFT基板200之间发生聚合反应,形成上下两端分别与CF基板100和TFT基板200相连接的聚合物挡墙304。形成的聚合物挡墙304不仅保证了柔性液晶显示面板在弯折或弯曲过程中维持固定的液晶盒厚,且液晶分子被置于聚合物挡墙304形成的空间内,防止了柔性液晶显示面板弯曲时液晶发生流动。At the same time, the photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate 100 and the TFT substrate 200 corresponding to the fully transparent area, and the upper and lower ends are respectively connected to the CF substrate 100 and the TFT substrate. 200 phase connected polymer retaining wall 304. The formed polymer retaining wall 304 not only ensures that the flexible liquid crystal display panel maintains a fixed liquid crystal cell thickness during bending or bending, but also the liquid crystal molecules are placed in the space formed by the polymer retaining wall 304, which prevents the flexible liquid crystal display panel Liquid crystals flow when bent.
对液晶层进行紫外固化结束后,可将柔性液晶显示面板进行后续的切割,剥离等模组制程。After the UV curing of the liquid crystal layer is completed, the flexible liquid crystal display panel can be subjected to subsequent cutting, peeling and other module manufacturing processes.
其中,所用紫外光L的中心波长为260nm~380nm,优选为310nm~370nm。紫外光照射的时间为10 min~150 min,优选为30min~90min;紫外光的强度为1~50 mW/cm 2,优选为2~20 mW/cm 2。 The central wavelength of the ultraviolet light L used is 260 nm to 380 nm, preferably 310 nm to 370 nm. The irradiation time of the ultraviolet light is 10 min to 150 min, preferably 30 min to 90 min; the intensity of the ultraviolet light is 1 to 50 mW / cm 2 , and preferably 2 to 20 mW / cm 2 .
结合图1和图3所示,图3为本申请实施例提供的另一种掩膜版的结构示意图,其中全透光区域占掩膜版面积的10%~40%,优选为20%~30%。半透光区域占占掩膜版面积的50%~90%,优选为60%~80%。不透光区域占掩膜版面积的0%~20%,优选为5%~15%。With reference to FIG. 1 and FIG. 3, FIG. 3 is a schematic structural diagram of another mask plate provided in an embodiment of the present application, in which a fully transparent area accounts for 10% to 40% of the mask plate area, and preferably 20% to 30%. The semi-transparent area occupies 50% to 90% of the area of the mask, and preferably 60% to 80%. The opaque area occupies 0% to 20% of the mask area, and preferably 5% to 15%.
通过图3所示的掩膜版形成的聚合物挡墙较为稀疏(用于形成聚合物挡墙的全透光区域所占面积较少),这种设计对液晶盒厚控制稍差,但更好的保证了开口率。The polymer retaining wall formed by the mask shown in Figure 3 is relatively sparse (the area of full light transmission used to form the polymer retaining wall occupies less area). This design has a slightly poorer control over the thickness of the LCD cell, but it is more A good guarantee of the aperture ratio.
优选的,掩膜版的像素结构的大小可以与色阻的像素结构相当,也可以大于色阻层的像素结构,大小(长或宽)从50μm到5000μm,优选为80-800μm。Preferably, the size of the pixel structure of the mask may be equivalent to the pixel structure of the color resist, or may be larger than the pixel structure of the color resist layer, and the size (length or width) is from 50 μm to 5000 μm, preferably 80-800 μm.
实施例2Example 2
参照图7,图7为本申请实施例提供的掩膜版的结构示意图,所述掩膜版400’包括呈阵列排布的多个第一区域1、位于第一区域1之外的第二区域2及围设所述第一区域1一周的不透光区域3。Referring to FIG. 7, FIG. 7 is a schematic structural diagram of a mask plate according to an embodiment of the present application. The mask plate 400 ′ includes a plurality of first regions 1 arranged in an array and a second region outside the first region 1. Region 2 and an opaque region 3 surrounding the first region 1.
本实施例与实施例1的区别仅在于,其中第一区域1为全透光区域,用于形成聚合物挡墙结构;第二区域2为半透光区域,用于配合像素区使得液晶分子形成预倾角;不透光区域用于分隔全透光区域和半透光区域。This embodiment differs from Embodiment 1 only in that the first area 1 is a fully transparent area for forming a polymer retaining wall structure; the second area 2 is a semi-transparent area for matching the pixel area to make liquid crystal molecules Forms a pretilt angle; opaque areas are used to separate fully transparent and semi-transparent areas.
同样按照上述的制备方法制备柔性液晶显示面板,仅用本实施例的掩膜版400’替换实施例1步骤S3中的掩膜版400。Similarly, the flexible liquid crystal display panel is prepared according to the above-mentioned manufacturing method, and only the mask plate 400 'in this embodiment is used to replace the mask plate 400 in step S3 of Example 1.
那么受到紫外光L照射的光致聚合单体302扩散,在半透光区域对应的CF基板100和TFT基板200的两表面发生聚合反应,形成颗粒状聚合物303,使得液晶分子301获得预倾角;Then, the photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs on both surfaces of the CF substrate 100 and the TFT substrate 200 corresponding to the semi-transmissive area to form a particulate polymer 303, so that the liquid crystal molecules 301 obtain a pretilt angle ;
与此同时,受到紫外光L照射的光致聚合单体302扩散,在全透光区域对应的CF基板100和TFT基板200之间发生聚合反应,形成上下两端分别与CF基板100和TFT基板200相连接的柱体结构,且该主体结构分别独立,而不能形成实施例1中的墙体,这种设计不能控制液晶的流动但能很好的维持盒厚,同样可以保证开口率。At the same time, the photopolymerizable monomer 302 irradiated by the ultraviolet light L diffuses, and a polymerization reaction occurs between the CF substrate 100 and the TFT substrate 200 corresponding to the fully transparent area, and the upper and lower ends are respectively connected to the CF substrate 100 and the TFT substrate. 200-connected pillar structures, and the main structures are independent, which cannot form the wall in Example 1. This design cannot control the flow of liquid crystal but can maintain the cell thickness well, and it can also ensure the aperture ratio.
本申请的一种掩膜版及一种柔性液晶显示面板的制备方法,通过控制曝光区域上不同位置的紫外光曝光强度,使得聚合物挡墙结构和帮助形成预倾角的聚合物颗粒同步形成,使得PWLC技术同样适用于PSVA技术,保障了液晶显示面板在弯折或者卷曲时能够维持稳定液晶盒厚,且使得液晶显示面板中的液晶分子可获得一定的预倾角。A mask plate and a method for preparing a flexible liquid crystal display panel of the present application, by controlling the ultraviolet light exposure intensity at different positions on the exposure area, the polymer barrier wall structure and the polymer particles that help to form a pretilt angle are formed simultaneously, The PWLC technology is also applicable to the PSVA technology, which ensures that the liquid crystal display panel can maintain a stable liquid crystal cell thickness when it is bent or curled, and the liquid crystal molecules in the liquid crystal display panel can obtain a certain pretilt angle.
虽然已经参照特定实施例示出并描述了本申请,但是本领域的技术人员将理解:在不脱离由权利要求及其等同物限定的本申请的精神和范围的情况下,可在此进行形式和细节上的各种变化。Although the present application has been shown and described with reference to specific embodiments, those skilled in the art will understand that the form and form may be made herein without departing from the spirit and scope of the application as defined by the claims and their equivalents. Various changes in details.
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| CN113871864B (en) * | 2020-06-30 | 2024-09-17 | 成都天马微电子有限公司 | Liquid crystal antenna and manufacturing method thereof |
| CN112549562A (en) * | 2020-12-14 | 2021-03-26 | 安徽阿瑞斯科技有限公司 | Flexible LCD special-shaped display screen and production process thereof |
| CN113655663B (en) * | 2021-08-19 | 2022-09-27 | 深圳市华星光电半导体显示技术有限公司 | Liquid crystal alignment method, liquid crystal display panel and mobile terminal |
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