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WO2020017017A1 - Dispositif de mesure de lumière et procédé d'observation d'échantillon - Google Patents

Dispositif de mesure de lumière et procédé d'observation d'échantillon Download PDF

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Publication number
WO2020017017A1
WO2020017017A1 PCT/JP2018/027268 JP2018027268W WO2020017017A1 WO 2020017017 A1 WO2020017017 A1 WO 2020017017A1 JP 2018027268 W JP2018027268 W JP 2018027268W WO 2020017017 A1 WO2020017017 A1 WO 2020017017A1
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Prior art keywords
light
measurement
optical
signal
interference
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PCT/JP2018/027268
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English (en)
Japanese (ja)
Inventor
隆之 小原
賢太郎 大澤
智也 桜井
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
Hitachi High Tech Corp
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Priority to PCT/JP2018/027268 priority Critical patent/WO2020017017A1/fr
Priority to JP2020530835A priority patent/JP7175982B2/ja
Publication of WO2020017017A1 publication Critical patent/WO2020017017A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated

Definitions

  • the present disclosure relates to an optical measurement device and a sample observation method using the same.
  • Optical measurement devices are devices that can non-destructively acquire information reflecting the surface structure and internal structure of a measurement target, and are used in a wide range of fields.
  • OCT optical coherence tomography
  • OCT Since OCT has no invasiveness to the human body, it is expected to be applied particularly to the medical field and the biological field.
  • an apparatus for forming an image of a fundus, a cornea, or the like is used.
  • light from a light source is split into two parts, a signal light that irradiates the measurement target and a reference light that is reflected by a reference light mirror without irradiating the measurement target, and the signal light reflected from the measurement target is combined with the reference light.
  • a signal is obtained by wave and interference.
  • An angiographic OCT is an example of an optical measurement device that uses the acquisition of aging information.
  • scanning is performed while simultaneously irradiating light emitted from a light source into two independent polarized beams and simultaneously irradiating the two polarized beams to two different portions on a line along a scanning direction by a galvanometer mirror.
  • the reflected light is separated into a vertical component and a horizontal component, detected by two detectors at the same time, and two tomographic images of the same part at different times are acquired by one scan, and the two tomographic images are obtained.
  • a scanning OCT apparatus that measures the time change amount of the phase of the same region from an image is disclosed. According to this device, it is possible to visualize a blood vessel, which is a portion of a human body tissue having a large amount of temporal change.
  • the predetermined portion is measured a plurality of times at a time ⁇ t, and the obtained plurality of times are measured.
  • the temporal change amount ⁇ S is obtained from the measurement result, and the temporal change information of the predetermined portion is obtained using ⁇ t and ⁇ S.
  • the measurement interval ⁇ t becomes the time resolution of the temporal change information.
  • a scanning optical measurement device including a scanning OCT it is necessary to increase the time resolution in order to obtain a large amount of time-dependent change information.
  • the time resolution depends on the scanning cycle, it is difficult to obtain a time resolution shorter than the scanning cycle. If an expensive scanning mechanism with a short scanning cycle is used, the apparatus becomes expensive and complicated.
  • the angiographic OCT of Patent Document 1 describes an OCT that irradiates a measurement object with two signal light beams in order to obtain temporal change information with a time resolution shorter than a beam scanning cycle.
  • two polarized beams having different polarization states are irradiated to two different parts, and the two beams are separated according to the polarization state in order to separately detect information of the two different parts.
  • the OCT described in Patent Literature 1 requires a beam separation mechanism, and further requires an independent detection mechanism for each beam, which increases the device size.
  • two beams having different polarization states are used to separate beams. Therefore, there is a possibility that a difference occurs due to a difference in the polarization state between the information acquired by the two beams, resulting in a measurement error of the temporal change information.
  • the present disclosure has been made in view of the above points, and provides a technique capable of measuring temporal change information at a low cost and with a temporal resolution shorter than a scanning cycle.
  • a light source for example, a light source, a light branching unit that branches light emitted from the light source into reference light and signal light, and scans the measurement target by irradiating the signal light
  • a scanning unit that combines the signal light and the reference light reflected or scattered by the object to be measured, an optical system that generates interference light, and receives the interference light generated by the optical system.
  • An optical measurement device comprising: a light detection unit that converts an electric signal, and a signal processing unit that calculates the intensity of the signal light based on the electric signal converted by the light detection unit, wherein the light detection unit Detecting the signal light by a plurality of light detection elements associated with each of a plurality of measurement areas overlapping the irradiation area of the signal light, wherein the signal processing unit detects each of the plurality of light detection elements Calculated signal light intensity Then, the scanning unit may be configured to irradiate the irradiation area of the signal light irradiating the measurement object with a part of the plurality of measurement areas at a first time different from the plurality of measurement areas at a second time.
  • an optical measurement device that scans the measurement object by moving the measurement object so as to partially overlap the measurement object.
  • the measurement object is irradiated with signal light, and the reflected or scattered signal light and reference light are combined to generate interference light.
  • temporal change information can be measured at low cost and with a temporal resolution shorter than the scanning period.
  • FIG. 1 is a schematic diagram illustrating a basic embodiment of an optical measurement device according to the present disclosure.
  • FIG. 3 is a schematic diagram illustrating a correspondence relationship between a beam spot and an arrangement of a differential detection circuit in an operation state of the optical measurement device according to the first embodiment. It is a schematic diagram which shows a mode that the beam spot irradiated on the measurement object moves.
  • FIG. 4 is a schematic diagram illustrating a relationship between a temporal change in a position of a measurement region and a time resolution.
  • FIG. 3 is a schematic diagram illustrating a configuration of a reference optical system for expanding a beam diameter described above.
  • FIG. 9 is a diagram illustrating a basic configuration example of an optical measurement device according to a second embodiment.
  • FIG. 3 is a schematic diagram illustrating a correspondence relationship between a beam spot and an arrangement of a differential detection circuit in an operation state of the optical measurement device according to the first embodiment. It is a schematic diagram which shows a mode that the beam spot irradi
  • FIG. 9 is a schematic diagram illustrating a configuration of an optical measurement device according to a third embodiment.
  • FIG. 13 is a schematic diagram illustrating a configuration of an optical measurement device according to a fourth embodiment.
  • FIG. 3 is a schematic diagram illustrating a state of movement of a beam spot on a measurement object.
  • FIG. 9 is a diagram illustrating a scanning method in which a plurality of measurement regions are defined in both the x direction and the y direction.
  • FIG. 1 is a schematic diagram illustrating a basic embodiment of an optical measurement device 1 according to the present disclosure.
  • the vertical direction in the figure is the z direction
  • the horizontal direction is the x direction
  • the direction perpendicular to the paper is the y direction.
  • the optical measurement device 1 includes a light source unit 190, a polarization beam splitter 106, a reference optical system 191, a scanning unit 159, a sample stage 139, a cover glass 114, an interference optical system 132, a photodiode array (124, 125, 130, and 131), It includes a differential detection circuit (134 and 135), a signal processing unit 136, and a control unit 116.
  • the light source unit 190 includes a light source 101, a collimating lens 102, a beam shaping prism 103, an ND (Neutral Density) filter 104, and a ⁇ / 2 plate 105 whose optical axis direction can be adjusted.
  • Laser light having a single wavelength component emitted from the light source 101 is converted into parallel light by the collimating lens 102.
  • the laser beam converted into parallel light is shaped into an elliptical beam cross-sectional shape by the beam shaping prism 103 so that the y direction is longer than the x direction.
  • the intensity of the laser light is reduced by the ND filter 104, the polarization direction is rotated by the ⁇ / 2 plate 105 whose optical axis direction is adjustable, and then the polarization beam splitter 106 converts the laser light into a signal light and a reference light. Branched.
  • the scanning unit 159 includes the two-dimensional scanner 107, the ⁇ / 4 plate 112, the lens 113, and the lens actuator 117.
  • the signal light enters the optical system provided in the scanning unit 159, passes through the two-dimensional scanner 107, and passes through the ⁇ / 4 plate 112 whose optical axis direction is set to about 22.5 degrees with respect to the xz plane.
  • the transmitted light is converted from s-polarized light to circularly polarized light. After that, the signal light is transmitted through the cover glass 114 while being converged by the lens 113 having a numerical aperture of 0.3 or more, and irradiates the measurement object 115 to form a beam spot 140 at the condensing position.
  • the cross-sectional shape of the beam incident on the lens 113 is an ellipse in the y direction longer than the x direction
  • the numerical aperture at the time of focusing is larger in the y direction than in the x direction. Therefore, the shape of the beam spot 140 on the xy plane is an ellipse in which the x direction is longer than the y direction.
  • the position of the beam spot 140 is moved by the scanning unit 159 in any of the x, y, and z directions.
  • the lens 113 is moved at least in the z direction by the control of the lens actuator 117 by the control unit 116, whereby the focus position (measurement position) of the signal light by the lens 113 is moved.
  • the movement of the condensing position of the signal light in the xy directions is performed by two galvanometer mirrors 108 and 109 and a two-dimensional scanner 107 including lenses 110 and 111 provided in the optical path of the signal light.
  • the scanning of the object to be measured is performed based on the condensing position of the signal light.
  • the signal light reflected or scattered from the measurement object is converted by the lens 113 into parallel light (beam). After that, the polarization state of the signal light is changed from circularly polarized light to p-polarized light by the ⁇ / 4 plate 112, and the polarized light enters the polarization beam splitter 106.
  • the measurement target 115 By moving the measurement target 115 by moving the sample stage 139, the position of the signal light focusing position in the measurement target 115 is roughly moved.
  • the reference light is transmitted through the ⁇ / 4 plate 118, and the polarization state is converted from p-polarized light to circularly-polarized light. After that, the reference light is incident on the mirror 119 whose position is fixed, is reflected, and then passes through the ⁇ / 4 plate 118 again, where the polarization state is changed from circularly polarized light to s-polarized light, and is incident on the polarization beam splitter 106. I do.
  • the signal light and the reference light are multiplexed by the polarization beam splitter 106 to generate a combined light.
  • the combined light is guided to an interference optical system 132 including a half beam splitter 120, a ⁇ / 2 plate (121 and 127), a ⁇ / 4 plate 126, a condenser lens (122 and 128), and a polarizing beam splitter (123 and 129).
  • the combined light that has entered the interference optical system 132 is split into two by the half beam splitter 120 into transmitted light and reflected light.
  • the transmitted light passes through the ⁇ / 2 plate 121 whose optical axis is set to about 22.5 degrees with respect to the xz plane, and is then condensed by the condenser lens 122. After that, the transmitted light is split into two by the polarization beam splitter 123, and a first interference light 144 and a second interference light 145 having a phase relationship different from each other by 180 degrees are generated.
  • the first interference light 144 is condensed by the condenser lens 122 and forms an image 153 of the beam spot 140 at the position of the photodiode array 124.
  • the photodiode array 124 is arranged such that a plurality of photodetectors (photodiodes) 148 overlap the image 153 of the beam spot 140.
  • the second interference light 145 is condensed by the condenser lens 122 and forms an image 154 of the beam spot 140 at the position of the photodiode array 125.
  • the photodiode array 125 includes a plurality of light detection elements 149 each functioning as a light detector, and the plurality of light detection elements 149 are arranged so as to overlap the image 154 of the beam spot 140.
  • Each of the first interference light 144 and the second interference light 145 is converted by the photodiode arrays 124 and 125 and the differential detection circuit 134 into a corresponding one of the plurality of light detection elements 148 and the plurality of light detection elements 149.
  • the outputs are combined and current differential detection is performed, and a signal 137 proportional to the difference between the intensities of the two interference lights is output.
  • the mutually corresponding elements of the plurality of light detection elements 148 and the plurality of light detection elements 149 are, for example, in the example shown in FIG. And the leftmost light detection element of the plurality of light detection elements 149 correspond to each other.
  • the reflected light reflected by the half beam splitter 120 passes through the ⁇ / 4 plate 126 whose optical axis is set at about 45 degrees with respect to the xz plane, and then has an optical axis of about 22.5 with respect to the xz plane.
  • the light is transmitted through the ⁇ / 2 plate 127 set at each time, and is condensed by the condenser lens 128. Thereafter, the reflected light is split into two by the polarizing beam splitter 129, and a third interference light and a fourth interference light having a phase relationship different from each other by 180 degrees are generated.
  • Each of the third interference light and the fourth interference light is subjected to current differential detection by the photodiode arrays 131 and 130 and the differential detection circuit 135, and a signal 138 proportional to the difference between the intensities of the two interference lights is output. Is done.
  • the third interference light 146 is condensed by the condenser lens 128 and forms an image 155 of the beam spot 140 at the position of the photodiode array 131.
  • the photodiode array 131 is arranged such that a plurality of photodetectors (photodiodes) 150 overlap the image 155 of the beam spot 140.
  • the fourth interference light 147 is condensed by the condenser lens 128 to form an image 156 of the beam spot 140 at the position of the photodiode array 130.
  • the photodiode array 130 includes a plurality of light detecting elements 151 each functioning as a light detector, and the plurality of light detecting elements 151 are arranged so as to overlap the image 156 of the beam spot 140.
  • Each of the third interference light 146 and the fourth interference light 147 is, by the photodiode arrays 130 and 131 and the differential detection circuit 135, an output of a corresponding one of the plurality of light detection elements 150 and the plurality of light detection elements 151.
  • the outputs are combined and current differential detection is performed, and a signal 138 proportional to the difference between the intensities of the two interference lights is output.
  • the meaning of “elements corresponding to each other” is as described above.
  • the signals 137 and 138 generated as described above are input to the signal processing unit 136 and operated to obtain a signal proportional to the amplitude of the signal light.
  • the amplitude of the signal light component at the time when the combined light enters the interference optical system 132 is E sig
  • the amplitude of the reference light component is E ref
  • the intensity of the signal 137 is I
  • the intensity of the signal 138 is Q.
  • the signal processing unit 136 performs the operation of the following equation 1, thereby obtaining a signal that does not depend on the phase and is proportional to the absolute value of the amplitude of the signal light.
  • ⁇ I 2 + Q 2 ⁇ 1/2 (Equation 1)
  • the signals 137 and 138 are output by the number of photodetectors 148, 149, 150, and 151 of each of the photodiode arrays 124, 125, 130, and 131. Is performed, and a signal proportional to the amplitude of the signal light corresponding to the number is obtained (four in the example shown in FIG. 1). In the present embodiment, since three or more interference light beams having different phase relationships are detected, a stable signal independent of the interference phase can be obtained by performing an operation on these detection signals.
  • FIG. 2 is a schematic diagram illustrating the correspondence between the beam spot 140 and the differential detection circuit 134 in the operation state of the optical measurement device 1 according to the first embodiment.
  • the shape of the beam spot 140 on the measurement object 115 on the xy plane is an ellipse whose x direction is longer than the y direction, as described above.
  • the signal light reflected by the measurement object 115 is multiplexed with the reference light to become interference lights 144, 145, 146, and 147, and the light receiving surfaces of the photodiode arrays 124, 125, 130, and 131 via the optical system of the apparatus.
  • FIG. 2 shows the positional relationship between the photodiode arrays 124 and 125 and the images 153 and 154 corresponding to the first interference light and the second interference light.
  • the positional relationship between the photodiode arrays 130 and 131 corresponding to the third interference light and the fourth interference light and the images 155 and 156 is the same as that of the first interference light and the second interference light.
  • the image 153 formed by the interference light 144 has an elliptical shape that is long in the direction 301 in which the four light detection elements 148 (D 11 , D 12 , D 13 , and D 14 ) of the photodiode array 124 are arranged.
  • the image 153 extends over the four photodetectors 148, and each photodetector outputs a current proportional to the intensity of the component of the interference light 144 applied to each detector.
  • the direction 301 in which the four photodetectors 148 are arranged is drawn on the image 153 so as to match the direction corresponding to the x direction on the measurement target 115.
  • the image 154 formed by the interference light 145 has an elliptical shape that is long in the direction 302 in which the four light detection elements 149 (D 21 , D 22 , D 23 , and D 24 ) of the photodiode array 125 are arranged.
  • the image 154 extends over the four light detection elements 149, and each light detection element outputs a current proportional to the intensity of the component of the interference light 145 irradiated to each detection element.
  • the direction 302 in which the four light detection elements 149 are arranged is drawn on the image 154 so as to match the direction corresponding to the x direction on the measurement target 115.
  • the relative positional relationship between the image 153 and the four light detecting elements 148 matches the relative positional relationship between the image 154 and the four light detecting elements 149, and the four light detecting elements 148 (D 11 , D 12 , D 13 , and D 14 ) and the four photodetectors 149 (D 21 , D 22 , D 23 , and D 24 ) together form four measurement regions 303 (A 1 , A 2 ) on the measurement target 115. , A 3 , A 4 ).
  • the interval between the respective photodetectors is ⁇ x and the magnification of the optical system is M
  • the current outputs of the four light detecting elements 148 (D 11 , D 12 , D 13 , D 14 ) and the four light detecting elements 149 (D 21 , D 22 , D 23 , D 24 ) correspond to the corresponding light detecting elements.
  • (D 11 and D 21 , D 12 and D 22 , D 13 and D 23 , and D 14 and D 24 ) are input to the differential detection circuits 304, 305, 306, and 307, respectively.
  • the signals are differentially detected and input to the signal processing unit 136 as a signal 137 as a set of four signals.
  • the four light detection elements 150 and the four light detection elements 151 are both measured objects 115.
  • the position is optically conjugate with the upper four measurement regions 303 (A 1 , A 2 , A 3 , A 4 ).
  • the outputs of the corresponding photodetectors are combined, and four sets of signals are respectively input to four differential detection circuits and differentially detected.
  • a signal 138 that is a set of four signals is input to the signal processing unit 136.
  • the signal processing unit 136 performs the calculation of the above equation 1 four times with the signal 137 and the signal 138 as inputs, and the signal light reflected by the four measurement areas 303 (A 1 , A 2 , A 3 , A 4 ).
  • Four signals (S 1 , S 2 , S 3 , S 4 ) proportional to the amplitude of each component are calculated.
  • the measurement of signals for the four measurement areas 303 can be performed simultaneously.
  • FIG. 3 is a schematic diagram showing a state in which the beam spots 140, 157, and 158 irradiated on the measurement target 115 move.
  • Figure 3 is the position at time t 1 of the beam spot 140 moving at a uniform scanning speed v in a scanning direction 152, the time of the four measurement regions 303 (A 1, A 2, A 3, A 4) The position of is shown.
  • the distance between the four measurement areas 303 (A 1 , A 2 , A 3 , A 4 ) is a value ( ⁇ x ′) determined by the distance between the photodetectors and the characteristics of the optical system as described above.
  • FIG. 4 is a schematic diagram showing the relationship between the temporal change in the position of the measurement area and the time resolution (that is, the sampling interval).
  • the horizontal axis indicates time t
  • the vertical axis indicates the position of the measurement region 303 in the x direction.
  • the positions of the four measurement areas 303 (A 1 , A 2 , A 3 , A 4 ) are shown as traces 401, 402, 403, and 404, respectively.
  • the solid line portion of each trace indicates a measurement period, and the broken line portion indicates a period in which the trace is simply moving without measurement.
  • measurement is performed only while the measurement area 303 is moving in the positive x direction
  • measurement is performed while the measurement area 303 is moving in the negative x direction (returning to the scan start position).
  • the horizontal axis indicates time t
  • the vertical axis indicates the position of the measurement region 303 in the x direction.
  • the positions of the four measurement areas 303 (A 1 , A 2 , A 3 ,
  • Position of one A 1 of the measurement region 303 at time t 1 is x 1, each of the other position of the three A 2, A 3, A 4 , x 1 - ⁇ x ', x 1 -2 ⁇ x', x 1 ⁇ 3 ⁇ x ′. Thereafter, since the measurement region 303 to move at a speed v, the time each measurement region 303 reaches the position x 1 is made as follows, respectively.
  • a 3 t 1 + 2 ⁇ t
  • a 4 t 1 + 3 ⁇ t
  • the four signals obtained by the four measurement regions 303 (S 1, S 2, S 3, S 4), the signal value at time t of the n-th measurement region when put out and S n (t), S 1 (t 1 ), S 2 (t 1 + ⁇ t), S 3 (t 1 + 2 ⁇ t), and S 4 (t 1 + 3 ⁇ t) are time-series measured values of the position x 1 obtained at time ⁇ t from time t 1.
  • a time-series measurement value Y (x 0 , n) at a position x 0 at which the m-th measurement area passes at a certain time t 0 is obtained as S m + n (t 0 + n ⁇ ⁇ t).
  • the position x 0 from the positive direction to the 'time series measurements of position apart Y (x 0+ x' x, n) is obtained as S m + n (t 0 + x '/ v + n ⁇ ⁇ t).
  • the measured value at the intended time can be obtained.
  • the time resolution AD conversion frequency or response frequency
  • the time resolution it is possible to satisfy the sampling theorem and obtain information at the intended time resolution.
  • the time resolution it becomes possible to perform measurement without being affected by the state of the measurement object 115 at the time point adjacent to the measurement, and it is possible to accurately detect temporal change information.
  • a plurality of detectors provided in a direction corresponding to a scanning direction can measure a predetermined portion of a measurement target at different times, and the plurality of measurement results can be used to determine the predetermined portion.
  • Time-dependent change information of the site can be obtained. That is, the optical measurement device 1 of the present disclosure can measure temporal change information with a time resolution shorter than the scanning period without using two signal light beams.
  • the number of photodetectors on each array is two or more, thereby acquiring a signal between two or more time points. Then, the amount of change with time can be calculated. More preferably, the number of photodetectors on each photodiode array is three or more.
  • the time resolution can be made variable, or information with a plurality of time resolutions can be obtained at once. Specifically, among the three signals S 1 , S 2 , and S 3 obtained using a photodiode array having three photodetectors, information on the time resolution ⁇ t can be obtained by using S 1 and S 2. Then, if S 1 and S 3 are used, information with a time resolution of 2 ⁇ t can be obtained.
  • the minimum value ⁇ x min for the photodiode arrays 148, 149, 150, and 151, the minimum value ⁇ x min , the maximum value ⁇ x max of the interval between arbitrary photodetectors on each photodiode array, and the optical system Assuming that the magnification is M and the scanning speed of the beam spot 140 is v, time-dependent change information can be acquired with a time resolution ⁇ t in the range of ( ⁇ x min / M) / v ⁇ ⁇ t ⁇ ( ⁇ x max / M) / v. It is possible.
  • the minimum value ⁇ x min is, for example, an interval between adjacent light detection elements
  • the maximum value ⁇ x max is, for example, (the number of light detection elements ⁇ 1) ⁇ ⁇ x min .
  • the shape of the beam spot 140 has been described as being large enough to fit in the plurality of measurement areas 303.
  • the shape (irradiation area) of the beam spot 140 may be a shape including the measurement area 303. By doing so, the intensity of the signal light applied to each of the measurement areas (A 1 , A 2 , A 3 , A 4 ) can be made uniform, and the accuracy of the temporal change information can be improved.
  • the signal light irradiation amount may differ between both ends and the center of the plurality of measurement regions 303.
  • the difference in the irradiation amount (difference in signal intensity) between both ends and the center of the plurality of measurement regions 303 is measured in advance, and the signal processing unit 136 determines the intensity of the signal light corresponding to each of the plurality of measurement regions 303. It may be calculated by calibration. By doing so, the measurement accuracy of the temporal change information of the measurement object 115 is improved.
  • a scanning method for obtaining a two-dimensional image and a three-dimensional image of the measurement target 115 will be described.
  • a two-dimensional image (zx image) of the measurement target 115 is obtained by scanning the two-dimensional region of the measurement target 115 with the beam spot 140.
  • the two-dimensional scanner 107 constituting the scanning unit 159 is controlled by the control unit 116, and the galvanomirror 108 (first scanning unit) is moved to scan repeatedly in the x direction, and the galvanomirror 108 reaches the turn-back position.
  • the lens actuator 117 is operated by the control unit 116 to move the lens 113 (second scanning unit) by a predetermined amount (about the diameter of the focused beam spot 140 in the z direction) in the z direction.
  • a two-dimensional image can be obtained. Note that, for example, scanning in the x direction moves the beam spot 140 (irradiation area) faster than scanning in the z direction.
  • the three-dimensional image of the measurement target is obtained by repeating a procedure of moving the lens 113 by a predetermined amount (about the spot diameter of the condensed signal light) in the y direction after obtaining the zx image by the above-described scanning method.
  • a procedure of acquiring the zx image by scanning the galvanometer mirror 108 and the lens 113 and then moving the measurement object 115 or the entire optical measurement device 1 in the y direction by using an electric stage or the like may be repeated.
  • the z-scan is performed by scanning the lens 113.
  • at least one lens is further inserted in front of the lens 113, and the condensing position is scanned by scanning the lens.
  • the movement in the y-direction may be performed by the two-dimensional scanner 107.
  • the optical measurement device 1 of the present disclosure can scan a two-dimensional region or a three-dimensional region, and acquire temporal change information of the region. It is also possible to output a two-dimensional or three-dimensional image having the acquired temporal change amount as the luminance value of each pixel.
  • the numerical aperture of the lens 113 that condenses the signal light and forms the beam spot 140 in the measurement object 115 is preferably 0.3.
  • a high Z-direction resolution can be obtained.
  • the numerical aperture of the lens 113 is set to 0.3 to 0.4, the depth of focus of the lens can be made deep, so that the range of the measurable depth in the measurement object 115 can be widened.
  • a laser light source in which the coherence length of the emitted laser light is longer than the change in the optical path length of the signal light generated by scanning the lens 113 in the optical axis direction.
  • the shape of the beam spot 140 may be circular, elliptical, linear, rectangular, or the like.
  • a normal optical system configuration can be used, so that the configuration of the optical measurement device 1 can be simply constructed.
  • a linear or rectangular beam spot can be realized using a cylindrical lens or the like, and the signal light intensity in the beam spot 140 hardly changes in the x direction, so that a stable signal can be easily obtained during scanning.
  • the size of the beam spot 140 in the x direction is such that, in an image formed on the photodiode arrays 148, 149, 150, and 151 by the optical system, the size in the direction corresponding to the x direction is at least two or more. And a size including the photodetector of FIG. That is, the magnification of the optical system M, the distance L max between the farthest element of the light detecting element used for the detection, in the x-direction of the beam spot 140 magnitude as D x in each photodiode array, D x ⁇ L max / M.
  • the size of the beam spot 140 in the y direction may be smaller than the size in the x direction.
  • the size in the y direction is such that, in an image formed on the photodiode arrays 148, 149, 150, and 151 by the optical system, the size in the direction corresponding to the y direction fits on the light receiving surface of the photodetector. It is size. That is, the magnification of the optical system M, the direction of the width corresponding to the y-direction of the light detecting element L y, in the y direction of the beam spot 140 magnitude as D y, a D y ⁇ L y / M. In this case, since the information on the intensity of the signal light contributes to the detected signal, the signal having a high SN ratio can be obtained.
  • Such an elliptical beam spot 140 is obtained by irradiating a signal light into the lens 113 as a beam having an elliptical cross section. If the cross-sectional shape of the beam incident on the lens 113 is an elliptical shape in which the y direction is longer than the x direction, the numerical aperture at the time of condensing is larger in the y direction than in the x direction, and the shape of the beam spot 140 on the xy plane is The ellipse is longer in the x direction than in the y direction.
  • the diameter in the x direction and the diameter in the y direction of the elliptical shape of the beam spot 140 can also be changed.
  • the adjustment of the elliptical beam shape is made possible by the beam shaping prism 103 inserted in the optical path of the signal light.
  • the beam shaping prism 103 can be omitted.
  • the elliptical beam spot 140 is formed by this method, even if the x direction of the beam spot 140 is increased, the defocus of the beam spot in the z direction can be suppressed, and the beam spot can be enlarged. The deterioration of the spatial resolution at the time of measurement caused by this can be minimized.
  • the signal light incident on and reflected by the measurement target 115 ideally becomes a beam having the same diameter as the signal light at the time of the incidence, but actually, due to optical nonuniformity of the measurement target 115, etc.
  • the beam will have a larger diameter than that at the time of incidence.
  • FIG. 5 is a schematic diagram showing the configuration of the reference optical system 500 for expanding the beam diameter described above.
  • the vertical direction is the z direction
  • the horizontal direction is the x direction
  • the direction perpendicular to the paper is the y direction.
  • the laser light emitted from the light source 101 is split into two by the polarization beam splitter 501 into s-polarized signal light and p-polarized reference light.
  • the reference light is expanded in beam diameter by a beam expander 506 including two lenses 502 and 503, is reflected by mirrors 504 and 505, changes its direction, and is converted from p-polarized light to s-polarized light by a ⁇ / 2 plate 507.
  • the signal light After passing through the polarization beam splitter 106, the signal light returns through the same optical system as in FIG. 1 and is combined with the reference light by the polarization beam splitter 106 to generate a combined light. Subsequent operations are the same as those in FIG.
  • FIG. 6 is a diagram illustrating a basic configuration example of the optical measurement device 2 according to the second embodiment.
  • the vertical direction in the figure is the z direction
  • the horizontal direction is the x direction
  • the direction perpendicular to the paper is the y direction.
  • the optical measurement device 2 according to the second embodiment is different from the optical measurement device 1 according to the first embodiment in that a current that is proportional to the intensity of the interference light is output using a photodiode array 607 in which a plurality of light detection elements are arranged in a line. different.
  • the generated combined light is first branched into ⁇ 1st-order diffracted light by the diffraction grating 602, and a first branched combined light and a second branched combined light are generated. .
  • These combined lights are arranged such that the phase difference between the s-polarized light component and the p-polarized light component of the first branched combined light differs from the phase difference between the s-polarized light component and the p-polarized light component of the second branched combined light by 90 degrees.
  • the polarization directions of the first split combined light and the second split combined light are rotated by the ⁇ / 2 plate 604 set at about 22.5 degrees with respect to the xz plane, and are polarized by the Wollaston prism 605.
  • the condensing lens 606 By being separated, four interference light beams whose interference phases are different from each other by approximately 90 degrees are generated.
  • These interference lights are condensed by the condensing lens 606, and form an image of the beam spot 140 on four regions 608, 609, 610, and 611 on the photodiode array 607, each of which includes a plurality of photodetectors.
  • each of the interference lights is converted into a current by each photodetector, and a pair of currents from the regions corresponding to the interference lights having a phase relationship different by 180 degrees are differentially detected by the differential detection circuits 134 and 135.
  • the detection signal is calculated by the signal processing unit 136, and a signal independent of the phase and proportional to the absolute value of the amplitude of the signal light is obtained. Since the function of the interference optical system 601 is the same as that of the interference optical system 132 of the first embodiment, the description is omitted here. As described above, by employing a configuration in which a plurality of interference light beams having different interference phases are received and detected by one photodiode array 607, the number of components can be reduced.
  • the optical measurement device 2 of the second embodiment since the optical measurement device 2 of the second embodiment has a smaller number of components of the interference optical system and is smaller than the optical measurement device 1 of the first embodiment, the entire device is smaller than the optical measurement device 1 of the first embodiment. Become.
  • FIG. 7 is a schematic diagram illustrating a configuration of the optical measurement device 3 according to the third embodiment.
  • the vertical direction is the z direction
  • the horizontal direction is the x direction
  • the direction perpendicular to the paper is the y direction.
  • the same members as those shown in FIG. 2 are denoted by the same reference numerals, and description thereof will be omitted.
  • the optical measurement device 3 of the third embodiment is different from the OCT device of the first embodiment in that the technology of the present disclosure is applied to an OCT device of a type using a low coherence light source.
  • a light source 701 which is a low coherence light source such as SLD (Super Luminescence Diode)
  • SLD Super Luminescence Diode
  • the beam shaping prism 703 changes the beam cross-sectional shape to an elliptical shape in which the y direction is longer than the x direction.
  • the beam is split into a signal light and a reference light by a beam splitter 706.
  • the signal light is condensed by the lens 713 and forms an elliptical beam spot 740 at a condensing position on the measurement object 115 held by the sample stage 739.
  • the cross-sectional shape of the beam incident on the lens 713 is an elliptical shape in which the y direction is longer than the x direction
  • the numerical aperture at the time of condensing becomes larger in the y direction than in the x direction.
  • the signal light reflected or diffused by the measurement object 715 is converted into a beam by the lens 713 and returns to the beam splitter 706.
  • the reference light is reflected by the mirror 719 and returns to the beam splitter 706, and is combined with the signal light and interferes to generate a combined light.
  • the combined light is condensed by the condenser lens 722 and forms an image 753 of the beam spot 740 on the photodiode array 724.
  • the image 753 is detected by the plurality of light detection elements 748 of the photodiode array 724, and the detected signals 737 are sent to the signal processing unit 736.
  • a low coherence light source is used, and among components included in the signal light, only a component having the same optical path length as the reference light interferes to give the signal 737, so that the measurement target 715 is specified. Can be obtained using the z position of the measurement point as a measurement point.
  • the optical measurement device 3 scans the mirror 719 by driving the actuator 760 by the control unit 716 during measurement, thereby performing z scanning of the measurement point.
  • the optical measurement device 3 performs xy scanning by the two-dimensional scanner 759 controlled by the control unit 716.
  • the scanning in the x direction is performed by the two-dimensional scanner 759 at the time of measurement, and signals from a plurality of photodetectors are compared as in the first embodiment.
  • Temporal change information can be acquired with a temporal resolution shorter than the period.
  • the optical measurement device 3 of the third embodiment can achieve the same function as that of the first embodiment with a smaller number of components than the optical measurement device 1 of the first embodiment, and can provide a smaller device. .
  • FIG. 8 is a schematic diagram illustrating a configuration of the optical measurement device 4 according to the fourth embodiment. 8, the vertical direction in the figure is the z direction, the horizontal direction is the x direction, and the direction perpendicular to the paper is the y direction.
  • the same members as those shown in FIG. 2 are denoted by the same reference numerals, and description thereof will be omitted.
  • the optical measurement device 4 of the fourth embodiment is different from the first embodiment in that the light observation unit 801 and the light detection unit 804 are connected by a polarization-maintaining optical fiber bundle 803. Different from the measuring device 1.
  • the polarization maintaining optical fiber bundle 803 is detachably fixed to a fiber connection part 807 of the light observation unit 801 and a fiber connection part 808 of the light detection unit 804.
  • the optical measuring device 4 has the same configuration and functions as the first embodiment in which the laser light emitted from the light source 101 is branched into two and then combined again to generate a combined light.
  • the generated combined light forms an image 809 at the incident end of the polarization maintaining optical fiber bundle 803 by the condenser lens 802, and is coupled to the polarization maintaining optical fiber bundle 803.
  • the spatial distribution information of the image 809 of the combined light is transmitted to the light detection unit 804 by the polarization maintaining optical fiber bundle 803, and is presented as an image 810 at the emission end of the polarization maintaining optical fiber bundle 803.
  • the combined light emitted from the image 810 is converted into parallel light by the collimator lens 805 and then enters the interference optical system 132. Subsequent configurations and functions are the same as those in the first embodiment, and a description thereof will not be repeated.
  • the light detection unit 804 and the light observation unit 801 are connected by the polarization maintaining fiber bundle 803. Therefore, when measuring a large measurement target such as a human body, the measurement is facilitated by bringing only the light observation unit 801 close to the measurement target 115. Further, the polarization maintaining optical fiber bundle 803 is easily detachable. Therefore, for example, when the light detection unit 804 fails, only the light detection unit 804 can be replaced, and there is no need to replace the entire device. Therefore, the running cost of the optical measurement device 4 decreases.
  • FIG. 9 is a schematic diagram showing the movement of the beam spots 940, 957, 958 on the measurement object.
  • the same components as those shown in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted.
  • the optical measurement device of the fifth embodiment is realized with the same member configuration as the optical measurement device 1 of the first embodiment, but differs from the first embodiment in that the installation angle of the beam shaping prism 103 is rotated by 90 degrees.
  • the cross-sectional shape of the beam incident on the lens 113 is an ellipse in which the x direction is longer than the y direction. Therefore, the numerical aperture at the time of light collection is larger in the x direction than in the y direction, and as shown in FIG. 9, the shape of the beam spot 940 in the measurement object 115 on the xy plane is such that the y direction is the x direction. It becomes a longer ellipse.
  • the beam spot 940 scans a two-dimensional area of the measurement target 115, and acquires a two-dimensional image (xy image) of the measurement target 115.
  • Uniform scanning speed v in a scanning direction 152 while repeatedly scanned with a scanning period T x, and reaches the return position 901 in the scanning direction 152, the sub-scanning direction 952, wherein the scanning line width ⁇ y a beam spot 940 in the y-direction Just move.
  • the beam spot 940 follows the trajectory 902.
  • a solid line portion of the trajectory 902 indicates a section for scanning while measuring, and a broken line indicates a section for scanning without measuring.
  • Beam spot 940 at time t 1 is in the position of the hatched portion, the time t 1 + T x scheduled position 957, at time t 1 + 2T x located predetermined position 958.
  • the scanning method of Example 5 returns to the same x-position for each scanning period T x (x 1 in this case).
  • scanning is performed so that the scanning line width ⁇ y and the interval ⁇ x ′ between the four measurement regions 903 match.
  • the position where A 1 is measured in the measurement region at a time t 1, the time t 1 + T x A 2 of the measurement region in the, the time t 1 + 2T x A 3 of the measurement region in, measuring respectively next, time resolution can be obtained changes with time information equal to the scanning period T x.
  • the measurement result of A 1 in the measurement area at time t 1 the measurement results of A 3 in the measurement region at time t 1 + 2T x, equal time to n times the scan period T x Change information can also be obtained.
  • ⁇ y can be increased to m times, the time required to scan and measure a predetermined area can be shortened.
  • the scanning cycle T Information with a time resolution longer than x can be obtained.
  • FIG. 10 is a diagram illustrating a scanning method in which a plurality of measurement regions are defined in both the x direction and the y direction.
  • FIG. 10 shows a measurement area 1003 (A 11 , A 12 , A 13 , A 14 , A 21 , and A 21 ) when a plurality of detectors are provided in directions corresponding to both the x direction and the y direction of the beam spot 1040.
  • a 22 , A 23 , A 24 are shown.

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Abstract

L'invention concerne un dispositif de mesure de lumière, comprenant : une source de lumière ; une partie de division de lumière permettant de diviser une lumière émise par la source de lumière en lumière de référence et en lumière de signal ; une unité de balayage permettant d'irradier la lumière de signal de façon à balayer un objet de mesure ; un système optique permettant de générer une lumière d'interférence par la combinaison d'une lumière de signal réfléchie ou diffusée par l'objet de mesure avec la lumière de référence ; une unité de photodétection permettant de recevoir la lumière d'interférence générée par le système optique et de convertir cette dernière en un signal électrique ; et une unité de traitement de signal permettant de calculer l'intensité de la lumière de signal en fonction du signal électrique produit par la conversion par l'unité de photodétection. L'unité de photodétection détecte la lumière de signal à l'aide d'une pluralité d'éléments de photodétection associés à une pluralité de zones de mesure chevauchant une zone d'irradiation de lumière de signal. L'unité de traitement de signal calcule les intensités de la lumière de signal détectée par chaque élément de photodétection de la pluralité d'éléments de photodétection. L'unité de balayage balaye l'objet de mesure en déplaçant la zone d'irradiation de la lumière de signal irradiée sur l'objet de mesure de telle sorte que certaines zones de la pluralité de zones de mesure à un premier instant se chevauchent avec d'autres zones de mesure parmi la pluralité de zones de mesure à un second instant.
PCT/JP2018/027268 2018-07-20 2018-07-20 Dispositif de mesure de lumière et procédé d'observation d'échantillon Ceased WO2020017017A1 (fr)

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