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WO2020011360A1 - Capteur de particules - Google Patents

Capteur de particules Download PDF

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Publication number
WO2020011360A1
WO2020011360A1 PCT/EP2018/068921 EP2018068921W WO2020011360A1 WO 2020011360 A1 WO2020011360 A1 WO 2020011360A1 EP 2018068921 W EP2018068921 W EP 2018068921W WO 2020011360 A1 WO2020011360 A1 WO 2020011360A1
Authority
WO
WIPO (PCT)
Prior art keywords
particle sensor
optical system
light source
sensor according
focal point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2018/068921
Other languages
German (de)
English (en)
Inventor
Gerald Franz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to PCT/EP2018/068921 priority Critical patent/WO2020011360A1/fr
Publication of WO2020011360A1 publication Critical patent/WO2020011360A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N2015/1452—Adjustment of focus; Alignment

Definitions

  • the invention relates to a particle sensor with a light source, a
  • Light detector and an optical system for generating a focal point the particle sensor being designed to detect particles in this focal point.
  • Scanning particle sensors use a micromirror to move a focused laser beam as a measuring beam through the air surrounding the particle sensor. Typical scan lengths are 8 mm.
  • the object of the invention is to provide a simple and robust optical particle sensor.
  • the invention relates to a particle sensor with a light source, a
  • the particle sensor being designed to detect particles in this focal point.
  • the essence of the invention is that the particle sensor is designed such that the focal point can be displaced relative to the optical system.
  • the particle sensor is very compact. Instead of the scan via a micromirror, which requires both collimating primary optics and focusing secondary optics and is more difficult to implement due to the folded beam path, the invention comes
  • optical system has at least one lens or a mirror.
  • An advantageous embodiment of the invention provides that the particle sensor has an actuator for axially displacing the light source.
  • An advantageous embodiment of the invention provides that the particle sensor has an actuator for the axial displacement of the optical system.
  • An advantageous embodiment of the invention provides that the at least one lens is an aspherical lens or the at least one mirror is an aspherical mirror.
  • the light source is a laser diode, in particular a VCSEL emitter.
  • the light detector is a photodiode, in particular a photodiode integrated with the light source.
  • An advantageous embodiment of the invention provides that the optical system on the object side has a numerical aperture of 0.5 to 0.6.
  • An advantageous embodiment of the invention provides that the optical system has a numerical aperture of at least 0.1, in particular 0.1 to 0.3, on the image side.
  • Figure 1 shows a beam path for three positions.
  • Figure 2 shows an aspherical lens as an example of a suitable optical system.
  • FIG. 3 schematically shows a particle sensor according to the invention. description
  • An imaging optical system maps an object into an image with a lateral magnification beta from the object plane into the image plane.
  • the object If the object is laterally shifted by deltax (transverse to the optical axis and in the object plane), its image shifts in the image plane by beta * delta x. However, if the object is shifted axially (i.e. parallel to the optical axis) by delta z, its image shifts axially by gamma * delta z.
  • an axial displacement of 400 pm is assumed in order to be used in the form of a
  • FIG. 1 shows an example of a beam path for three positions. Such an image can be achieved with a plastic asphere on both sides.
  • FIG. 2 shows an aspherical lens as an example of a suitable optical system. More complex optical systems would be required for larger numerical apertures. Alternatively, an image can also be achieved with an aspherical mirror.
  • FIG. 3 schematically shows a particle sensor according to the invention.
  • the particle sensor has a light source 10, a light detector 20 and an optical system 30 for generating a focal point.
  • the particle sensor is designed to detect particles in this focal point.
  • the light source 10 and the light detector 20 are designed as VCSEL emitters with an integrated photodiode.
  • the VCSEL emitter is arranged on a piezo drive, which is designed to shift the VCSEL emitter along the optical axis 100.
  • the focal point of the optical system on the image side can be displaced relative to the optical system. Because of the opening angle of the light source 10, the acceptance angle 33 of the optical system 30, here an aspherical lens, is selected to be greater than or equal to + -30 °.
  • the particle sensor is arranged in a housing 60, which is a
  • Laser light source emits light via the imaging optics in one
  • Piezo actuator but alternatively can also be generated by a MEMS actuator (piezoresistive or capacitive) or a coil in the gap of a pot magnet as with a small loudspeaker.
  • MEMS actuator pieoresistive or capacitive
  • a coil in the gap of a pot magnet as with a small loudspeaker.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

La présente invention concerne un capteur de particules comprenant une source de lumière (10), un détecteur de lumière (20) et un système optique (30) pour produire un foyer (35), le capteur de particules étant configuré pour détecter des particules dans ce foyer. L'invention consiste en ce que le capteur de particules est configuré pour que le foyer (35) puisse être déplacé par rapport au système optique (30).
PCT/EP2018/068921 2018-07-12 2018-07-12 Capteur de particules Ceased WO2020011360A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/EP2018/068921 WO2020011360A1 (fr) 2018-07-12 2018-07-12 Capteur de particules

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2018/068921 WO2020011360A1 (fr) 2018-07-12 2018-07-12 Capteur de particules

Publications (1)

Publication Number Publication Date
WO2020011360A1 true WO2020011360A1 (fr) 2020-01-16

Family

ID=62981187

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2018/068921 Ceased WO2020011360A1 (fr) 2018-07-12 2018-07-12 Capteur de particules

Country Status (1)

Country Link
WO (1) WO2020011360A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160146732A1 (en) * 2013-06-24 2016-05-26 Siemens Aktiengesellschaft Particle Detector And Method For Detecting Particles
DE102015207289A1 (de) * 2015-04-22 2016-10-27 Robert Bosch Gmbh Partikelsensorvorrichtung
WO2017162677A1 (fr) * 2016-03-21 2017-09-28 Koninklijke Philips N.V. Capteur laser pour détection de taille de particules ultra-fines
US20170307495A1 (en) * 2016-04-21 2017-10-26 Malvern Instruments Ltd. Particle characterization

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160146732A1 (en) * 2013-06-24 2016-05-26 Siemens Aktiengesellschaft Particle Detector And Method For Detecting Particles
DE102015207289A1 (de) * 2015-04-22 2016-10-27 Robert Bosch Gmbh Partikelsensorvorrichtung
WO2017162677A1 (fr) * 2016-03-21 2017-09-28 Koninklijke Philips N.V. Capteur laser pour détection de taille de particules ultra-fines
US20170307495A1 (en) * 2016-04-21 2017-10-26 Malvern Instruments Ltd. Particle characterization

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