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WO2020085532A1 - Ingot cutting apparatus - Google Patents

Ingot cutting apparatus Download PDF

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Publication number
WO2020085532A1
WO2020085532A1 PCT/KR2018/012708 KR2018012708W WO2020085532A1 WO 2020085532 A1 WO2020085532 A1 WO 2020085532A1 KR 2018012708 W KR2018012708 W KR 2018012708W WO 2020085532 A1 WO2020085532 A1 WO 2020085532A1
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WO
WIPO (PCT)
Prior art keywords
wire
shaft
pair
spindle
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2018/012708
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French (fr)
Korean (ko)
Inventor
백성선
신종진
이승주
장순호
김남기
이동근
이신형
정인준
윤효식
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WOONGJIN ENERGY CO Ltd
Original Assignee
WOONGJIN ENERGY CO Ltd
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Filing date
Publication date
Application filed by WOONGJIN ENERGY CO Ltd filed Critical WOONGJIN ENERGY CO Ltd
Publication of WO2020085532A1 publication Critical patent/WO2020085532A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools

Definitions

  • the present invention relates to an ingot cutting device having an improved structure.
  • Wafers which are widely used as materials for manufacturing semiconductor devices and photovoltaic cells, refer to single crystal or polycrystalline silicon thin plates.
  • the wafer is manufactured by cutting a single crystal silicon ingot and then performing a post-cleaning process.
  • the ingot cutting device of the above-described method may include a wire supply unit, a wire recovery unit, and a pair of wire roller units that are arranged to be spaced apart from each other.
  • the ingot is placed on the upper side of the pair of wire roller parts, and is cut by a wire that is rapidly moved in the forward and reverse rotation of the pair of roller parts.
  • FIG. 1 is a schematic side view of a conventional roller portion.
  • the roller portion of the ingot cutting device is a motor 10, a coupler 20, a fixed spindle 30, a wire roller 40, a moving spindle 50 sequentially on a coaxial line Is placed.
  • the conventional roller portion has a problem in that it is difficult to miniaturize the size of the ingot cutting device itself, since the above-mentioned components must be arranged long on the coaxial line.
  • the conventional roller portion must be precisely matched to the coaxial from the motor 10 to the moving spindle 50 to prevent vibration during rotation and reduce the load on the spindle.
  • the wafer quality may be reduced due to vibration, and since the load of each spindle increases, the life of the roller part itself is reduced, and problems such as breakage and high heat may occur. You can.
  • the rotational speed of the roller part is proportional to the wire speed, and the faster the line speed, the better the cutting speed and the productivity.
  • the increase in the rotational speed of the roller part may occur due to vibration and load. .
  • the present invention has been devised to solve the above problems, and the object of the present invention is to simplify the structure, thereby miniaturizing the roller portion and the ingot cutting device including the same, and at the same time, reducing the vibration and load of the roller portion itself, thereby making it durable. , To provide an ingot cutting device that can improve cutting speed, productivity and product quality.
  • a wire supply unit for providing a wire
  • a wire recovery unit for recovering the supplied wire spaced apart at a predetermined distance from the wire supply unit
  • a pair of roller parts spaced apart from each other at predetermined intervals to be disposed between the wire supply part and the wire recovery part to cut the ingot placed on the upper side, wherein the pair of roller parts includes: a main spindle having a motor; And a bobbin roller on which one of the main spindles is disposed to have a coaxial wire and the wire is wound.
  • the pair of roller parts may further include moving spindles arranged to have coaxiality with the free ends of the bobbin rollers.
  • the main spindle one end is a shaft that is rotatably coupled with the bobbin roller; A rotor disposed on an outer circumferential surface of the shaft; A housing accommodating the shaft such that one end of the shaft is exposed; At least one spindle bearing having an inner circumference disposed on the shaft and an outer circumference disposed on the housing; And a stator disposed on an inner circumferential surface of the shaft corresponding to the rotor.
  • the spindle bearings may be arranged as a pair of at least two spindle bearings are spaced apart from each other by a predetermined distance.
  • the pair of spindle bearings may be disposed in front of the housing adjacent to one end of the shaft and rear of the housing adjacent to the other end of the shaft, respectively.
  • a lubricating oil supply line and a lubricating oil discharge line for supplying lubricating oil to the spindle or spindle bearing may be formed inside the housing.
  • the lubricating oil supply line may supply lubricating oil between the pair of spindle bearings.
  • a fastening bearing disposed between one end of the shaft and the bobbin roller may be further included.
  • the present invention is possible to miniaturize the ingot cutting device itself, including the main spindle with a built-in motor therein, can easily align the concentric axis of the bobbin roller and the main spindle can be improved durability and precision of the wafer cutting.
  • the present invention can reduce the vibration and load of the roller portion itself, it is possible to increase the rotational speed of the roller portion to 4000 rpm or more.
  • FIG. 1 is a schematic side view of a conventional roller portion.
  • Figure 2 is a perspective view of an ingot cutting device according to an embodiment of the present invention.
  • Figure 3 is a side view of the roller portion according to an embodiment of the present invention.
  • Figure 4 is a side cross-sectional view of the main spindle according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of an ingot cutting device according to an embodiment of the present invention
  • FIG. 3 is a side view of a roller part according to an embodiment of the present invention
  • FIG. 4 is a side cross-sectional view of main spindles according to an embodiment of the present invention.
  • the ingot cutting device 1 includes an ingot support part 100, a wire supply part 200, a wire recovery part 300, a pair of roller parts 400, and a coolant It may include an injection unit 500, or an air supply unit 600.
  • the ingot support part 100 may be supported by attaching the ingot (S) during the cutting process of the ingot (S).
  • the ingot support part 100 may include a support plate 110 and a beam 120.
  • the support plate 110 may support the beam 120 and may be attached to one side of the beam 120 using an adhesive member.
  • the adhesive member may use epoxy.
  • the beam 120 may be provided in an elongated shape in one direction, and may be provided in a length longer than the ingot S.
  • An ingot S may be attached to one surface of the beam 120.
  • the beam 120 may have an ingot S attached to a lower surface.
  • the beam 120 may be provided in a beglight or ceramic material.
  • the wire supply unit 200 provides a wire W, and may supply the wire W to a pair of roller units 400 to be described later.
  • the wire supply unit 200 includes a supply bobbin 210, a first tension pulley 220 and a supply pulley 230.
  • the supply bobbin 210 may be disposed spaced apart from the pair of roller parts 400 to be described later, and the wire W may be wound.
  • the supply bobbin 210 may supply the wire W to the first tension pulley 220.
  • the first tension pulley 220 is located below the supply bobbin 210 to impart tension to the wire W to guide the progress of the wire W, and may be installed in plural.
  • the supply pulley 230 may be located under the pair of rollers 400 to be described later.
  • the supply pulley 230 may be positioned spaced apart from the pair of roller parts 400 by a predetermined distance, and may change the entry position of the wire W entering the pair of roller parts 400. have.
  • the wire recovery unit 300 may be spaced apart from the wire supply unit 200 at a predetermined interval to recover the wire W supplied to the pair of main roller units 400 to be described later.
  • the wire recovery unit 300 includes a recovery bobbin 310, a second tension pulley 320 and a recovery pulley 330.
  • the recovery bobbin 310 may recover the supplied wire W spaced apart at a predetermined distance from the pair of roller parts 400 and the wire supply part 200 to be described later, and the recovered wire W may be wound. You can.
  • the recovery bobbin 310 may be supplied with a wire W from the second tension pulley 320.
  • the second tension pulley 320 may be located under the recovery bobbin 310, and may be installed in plurality.
  • the second tension pulley 320 may provide tension to the wire W to guide the progress of the wire W.
  • the recovery pulley 330 may be located at a predetermined distance apart from the lower portion of the pair of rollers 400. The recovery pulley 330 may change the recovery position of the wire W recovered from the pair of roller units 400.
  • the pair of roller parts 400 may be disposed between the wire supply part 200 and the wire recovery part 300 to cut the ingot S placed on the upper side.
  • the pair of roller parts 400 may include a main spindle 410 and a bobbin roller 420, and further include moving spindles 430 disposed to have coaxiality at a free end of the bobbin roller 420. can do.
  • the motor is built in to enable miniaturization of the roller 400 itself, and at the same time, coaxial alignment for rotation is implemented by itself, so that vibration and noise can be reduced. , Rotational speed, durability and precision of wafer cutting can be improved.
  • the main spindle 410 has a shaft 411, one end of which is rotatably coupled with the bobbin roller 420, a rotor 412 disposed on an outer circumferential surface of the shaft 411, and the shaft ( Housing 413 for receiving the shaft 411 so that one end of 411) is exposed, and at least one spindle bearing 414 having an inner circumference disposed on the shaft 411 and an outer circumference disposed on the housing 413. And, it may include a stator 415 disposed on the inner peripheral surface of the shaft 411 corresponding to the rotor 412.
  • At least two or more spindle bearings 414 may be arranged in pairs spaced apart from each other at a predetermined interval. have.
  • the pair of spindle bearings 414 are respectively in front of the housing 413 adjacent to one end of the shaft 411 and rear of the housing 413 adjacent to the other end of the shaft 411. Can be deployed.
  • a lubricant for supplying lubricant to the shaft 411 or the spindle bearings 414 to the housing 413 may be formed therein.
  • the lubricant supply line 416 may supply lubricant between the pair of spindle bearings 414.
  • a fastening bearing 418 disposed between one end of the shaft 411 and the bobbin roller 420 may be further included.
  • the bobbin roller 420 may be located under the ingot support portion 100, the wire (W) may be wound.
  • At least one pair of bobbin rollers 420 may be provided.
  • the bobbin roller 420 may be provided in a cylindrical shape, and may be rotatably provided in one direction or the other direction. The direction of rotation of the bobbin roller 420 may be changed according to a predetermined time.
  • the bobbin roller 420 may be rotated by receiving rotational driving force from the main spindle 410 connected to the bobbin roller 420.
  • the bobbin roller 420 may rotate clockwise during the cutting process of the ingot S, and then rotate counterclockwise.
  • the direction of rotation of the bobbin roller 420 may be continuously changed during the process time.
  • the wire W may also continuously move.
  • the direction perpendicular to the longitudinal direction of the ingot S can be cut by the movement of the wire W. Wafers may be produced according to the cutting process of the wire W.
  • the pair of bobbin rollers 420 may be positioned spaced apart from each other, and the wire W may be wound.
  • a guide groove and a supporting protrusion may be formed in the bobbin roller 420.
  • particles for cutting may be fixed to the surface.
  • the cutting particles may be provided as diamond particles.
  • diamond particles may be formed in a certain size on the wire W, and may be provided in a form fixed to the surface of the wire W through nickel electrodeposition.
  • the wire W may be wound on a bobbin roller 420, which will be described later.
  • the wire W may be wound diagonally on the upper surface of the pair of bobbin rollers 420.
  • the diagonal direction means a behavior wound at an angle when the vertical line in the horizontal length direction of the pair of bobbin rollers 420 is referenced.
  • the wire W When the wire W is wound diagonally and the ingot S is cut with the wire W, it is possible to improve the efficiency in the cutting process compared to the vertically wound form. That is, the wire W is wound in a diagonal direction, and the dispersion of the force received by the wire W rotating at high speed compared to when it is wound horizontally can be made to improve the durability of the wire W.
  • the wire W may be wound diagonally on the lower surface of the pair of bobbin rollers 420.
  • the wire W may be wound in the same manner as the shape wound on the upper surface.
  • the coolant injection unit 500 may supply a coolant when cutting the ingot S, thereby removing frictional heat of the wire W and generated chips to facilitate cutting of the ingot S.
  • the coolant injection unit 500 includes a coolant injection nozzle 510, a coolant supply unit 520, and a coolant collection unit 530.
  • the coolant spray nozzle 510 may be located on the upper portion of the pair of roller parts 400.
  • the coolant spray nozzle 510 may be formed with a through hole for spraying the coolant, and a plurality of coolant spray nozzles 510 may be provided.
  • the coolant spray nozzle 510 may be provided in a number corresponding to the number of the pair of roller parts 400.
  • the coolant injection nozzle 510 may be connected to the coolant supply unit 520 to supply coolant.
  • the coolant may include abrasive grain.
  • the coolant collection unit 530 may be installed on the lower side of the pair of guide rollers.
  • the coolant collection unit 530 may have a receiving groove opened toward the upper side, and a coolant may be collected through the receiving groove.
  • a portion of the coolant sprayed by the pair of guide rollers from the coolant spray nozzle 510 may be collected off the receiving groove of the coolant collection part 530.
  • the coolant collection unit 530 may be connected to the coolant supply unit 520.
  • the coolant collection unit 530 may move the collected coolant to the coolant supply unit 520, and a filter or the like may be disposed in the flow path.
  • the air supply unit 600 may inject air into the pair of roller units 400.
  • the air supply unit 600 sprays air into the guide groove of the bobbin roller 420 to prevent foreign matter and coolant generated during the process from being settled in the guide groove to prevent wire W from escaping and cleaning the guide groove can do.
  • the air supply unit 600 may include an air pipe 610.
  • the air pipe 610 may be located adjacent to the bobbin roller 420.
  • An air discharge hole 620 may be formed in the air pipe 610.
  • the air pipe 610 may receive air from outside or through a separate supply device to discharge air through the air discharge hole 620.
  • the air tube 610 may be formed in a cylindrical shape.
  • the air pipe 610 may be provided in a form extending in the longitudinal direction of the bobbin roller 420 in the longitudinal direction.
  • the present invention can be miniaturized by including a main spindle 410 with a built-in motor inside, and can easily align the concentric shafts of the bobbin roller 420 and the main spindle 410, resulting in durability and precision of wafer cutting. There is an advantage that can be improved.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The present invention provides an ingot cutting apparatus comprising: a wire supply part for providing a wire; a wire recovery part spaced apart from the wire supply part by a predetermined distance, for recovering the supplied wire; and a pair of roller parts disposed between the wire supply part and the wire recovery part and spaced apart from each other by a predetermined distance, for cutting an ingot placed thereon, wherein the pair of roller parts comprise: a main spindle having a built-in motor; and a bobbin roller disposed on one end of the main spindle so as to be coaxial therewith, and having a wire wound therearound.

Description

잉곳절단장치Ingot cutting device

본 발명은 구조가 개선된 잉곳절단장치에 관한 것이다.The present invention relates to an ingot cutting device having an improved structure.

반도체 소자 및 태양광 셀 제조용 재료로서 광범위하게 사용되고 있는 웨이퍼는 단결정 또는 다결정 실리콘 박판을 지칭한다. 이러한 웨이퍼(wafer)는 단결정 실리콘 잉곳을 절단한 후, 후세정 공정을 거쳐서 제조된다.Wafers, which are widely used as materials for manufacturing semiconductor devices and photovoltaic cells, refer to single crystal or polycrystalline silicon thin plates. The wafer is manufactured by cutting a single crystal silicon ingot and then performing a post-cleaning process.

상기 잉곳을 절단하는 공정의 일태양으로서, 다이아몬드 와이어를 빠른 속도로 주행시키면서 그 위에 계면활성제 용액을 분사시켜 와이어에 코팅되어 있는 다이아몬드와 잉곳의 마찰에 의해 절단하는 와이어 쏘잉(Wire Saw) 방식이 있다.As an aspect of the process of cutting the ingot, there is a wire saw method of cutting by friction between the diamond and the ingot coated on the wire by spraying a surfactant solution thereon while driving the diamond wire at a high speed. .

상기한 방식의 잉곳절단장치는 와이어공급부, 와이어회수부 및 상호 소정간격 이격되어 배치되는 한 쌍의 와이어롤러부를 포함할 수 있다.The ingot cutting device of the above-described method may include a wire supply unit, a wire recovery unit, and a pair of wire roller units that are arranged to be spaced apart from each other.

간략하게 설명하자면, 잉곳은 상기 한 쌍의 와이어롤러부 상측에 안치되며, 상기 한 쌍의 롤러부의 정, 역회전으로 빠르게 이동되는 와이어로써 절단된다.Briefly, the ingot is placed on the upper side of the pair of wire roller parts, and is cut by a wire that is rapidly moved in the forward and reverse rotation of the pair of roller parts.

도 1은 종래에 따른 롤러부의 개략적인 측면도이다.1 is a schematic side view of a conventional roller portion.

도 1을 참조하면, 종래에 따른 잉곳절단장치의 롤러부는 구동원인 모터(10), 커플러(20), 고정스핀들(30), 와이어롤러(40), 이동스핀들(50)이 순차적으로 동축 선상에 배치된다.Referring to Figure 1, the roller portion of the ingot cutting device according to the prior art is a motor 10, a coupler 20, a fixed spindle 30, a wire roller 40, a moving spindle 50 sequentially on a coaxial line Is placed.

이러한 종래의 롤러부는 상기 구성요소들이 동축 선상에 길게 배치되어야 하므로 잉곳절단장치 자체의 크기를 소형화하기 어려운 문제가 있다.The conventional roller portion has a problem in that it is difficult to miniaturize the size of the ingot cutting device itself, since the above-mentioned components must be arranged long on the coaxial line.

또한, 종래의 롤러부는 상기 모터(10)에서 이동스핀들(50)까지 동축이 정밀하게 일치하여야 회전 시 진동이 발생하지 않고 스핀들의 부하가 감소된다. In addition, the conventional roller portion must be precisely matched to the coaxial from the motor 10 to the moving spindle 50 to prevent vibration during rotation and reduce the load on the spindle.

만약, 상기 롤러부 각 구성요소 간의 동축이 맞지 않으면 진동으로 인한 웨이퍼 품질이 하락될 수 있으며, 각 스핀들의 부하가 상승하기 때문에 롤러부 자체의 수명이 감소되고, 파손, 고열 발생 등의 문제가 발생할 수 있다.If the coaxial between each component of the roller part does not match, the wafer quality may be reduced due to vibration, and since the load of each spindle increases, the life of the roller part itself is reduced, and problems such as breakage and high heat may occur. You can.

또한, 롤러부의 회전속도는 와이어의 선속과 비례하며 선속이 빠를수록 절단속도 향상 및 생산성 향상의 효과가 있는데, 종래의 잉곳절단장치는 진동과 부하로 인하여 롤러부의 회전속도 상승에 제한이 발생할 수 있다.In addition, the rotational speed of the roller part is proportional to the wire speed, and the faster the line speed, the better the cutting speed and the productivity. However, in the conventional ingot cutting device, the increase in the rotational speed of the roller part may occur due to vibration and load. .

본 발명은 상기와 같은 문제점을 해결하기 위해 안출한 것으로서, 본 발명의 목적은 구조를 단순히 함으로써 롤러부 및 이를 포함하는 잉곳절단장치의 소형화가 가능함과 동시에 롤러부 자체의 진동 및 부하가 감소되어 내구성, 절단속도, 생산성 및 제품 품질이 향상될 수 있는 잉곳절단장치를 제공함에 있다.The present invention has been devised to solve the above problems, and the object of the present invention is to simplify the structure, thereby miniaturizing the roller portion and the ingot cutting device including the same, and at the same time, reducing the vibration and load of the roller portion itself, thereby making it durable. , To provide an ingot cutting device that can improve cutting speed, productivity and product quality.

상기 목적을 달성하기 위해서 본 발명은, 와이어를 제공하는 와이어공급부; 상기 와이어공급부로부터 소정 간격 이격되어 공급된 와이어를 회수하는 와이어회수부; 및 상기 와이어공급부와 와이어회수부 사이에 배치되어 상측에 안치된 잉곳을 절단하는 상호 소정 간격 이격된 한 쌍의 롤러부;를 포함하며, 상기 한 쌍의 롤러부는, 모터가 내장된 메인스핀들; 및 상기 메인스핀들의 일단에 동축을 갖도록 배치되어 와이어가 권선되는 보빈롤러;를 포함하는 잉곳절단장치를 제공한다.In order to achieve the above object, the present invention, a wire supply unit for providing a wire; A wire recovery unit for recovering the supplied wire spaced apart at a predetermined distance from the wire supply unit; And a pair of roller parts spaced apart from each other at predetermined intervals to be disposed between the wire supply part and the wire recovery part to cut the ingot placed on the upper side, wherein the pair of roller parts includes: a main spindle having a motor; And a bobbin roller on which one of the main spindles is disposed to have a coaxial wire and the wire is wound.

또한, 상기 한 쌍의 롤러부는 상기 보빈롤러의 자유단에 동축을 갖도록 배치되는 이동스핀들을 더 포함할 수 있다.In addition, the pair of roller parts may further include moving spindles arranged to have coaxiality with the free ends of the bobbin rollers.

또한, 상기 메인스핀들은, 일단이 상기 보빈롤러와 동회전 가능하게 결합되는 샤프트; 상기 샤프트의 외주면에 배치되는 로터; 상기 샤프트의 일단이 노출되도록 상기 샤프트를 수용하는 하우징; 내주가 상기 샤프트에 배치되며 외주가 상기 하우징에 배치되는 적어도 한 개 이상의 스핀들베어링; 및 상기 로터에 대응되는 상기 샤프트의 내주면에 배치되는 스테이터;를 포함할 수 있다.In addition, the main spindle, one end is a shaft that is rotatably coupled with the bobbin roller; A rotor disposed on an outer circumferential surface of the shaft; A housing accommodating the shaft such that one end of the shaft is exposed; At least one spindle bearing having an inner circumference disposed on the shaft and an outer circumference disposed on the housing; And a stator disposed on an inner circumferential surface of the shaft corresponding to the rotor.

또한, 상기 스핀들베어링은 적어도 두 개 이상의 스핀들베어링이 상호 소정 간격 이격되어 한 쌍으로 배치될 수 있다.In addition, the spindle bearings may be arranged as a pair of at least two spindle bearings are spaced apart from each other by a predetermined distance.

또한, 상기 한 쌍의 스핀들베어링은 상기 샤프트의 일단과 인접한 상기 하우징의 전방과, 상기 샤프트의 타단과 인접한 상기 하우징의 후방에 각각 배치될 수 있다.In addition, the pair of spindle bearings may be disposed in front of the housing adjacent to one end of the shaft and rear of the housing adjacent to the other end of the shaft, respectively.

또한, 상기 하우징에는 상기 스핀들 또는 스핀들베어링에 윤활유를 공급하기 위한 윤활유 공급라인과 윤활유 배출라인이 내부에 형성될 수 있다.In addition, a lubricating oil supply line and a lubricating oil discharge line for supplying lubricating oil to the spindle or spindle bearing may be formed inside the housing.

또한, 상기 윤활유 공급라인은 상기 한 쌍의 스핀들베어링 사이에 윤활유를 공급할 수 있다.In addition, the lubricating oil supply line may supply lubricating oil between the pair of spindle bearings.

또한, 상기 샤프트의 일단과 보빈롤러 사이에 배치되는 체결베어링을 더 포함할 수 있다.In addition, a fastening bearing disposed between one end of the shaft and the bobbin roller may be further included.

본 발명은 내부에 모터가 내장된 메인스핀들을 포함하여 잉곳절단장치 자체의 소형화가 가능하며, 보빈롤러와 메인스핀들의 동심축을 용이하게 정렬시킬 수 있어 내구성과 웨이퍼 절단의 정밀성이 향상될 수 있다.The present invention is possible to miniaturize the ingot cutting device itself, including the main spindle with a built-in motor therein, can easily align the concentric axis of the bobbin roller and the main spindle can be improved durability and precision of the wafer cutting.

또한, 본 발명은 롤러부 자체의 진동 및 부하가 감소되어 롤러부 회전속도를 4000rpm 이상으로 상향할 수 있다.In addition, the present invention can reduce the vibration and load of the roller portion itself, it is possible to increase the rotational speed of the roller portion to 4000 rpm or more.

도 1은 종래에 따른 롤러부의 개략적인 측면도.1 is a schematic side view of a conventional roller portion.

도 2는 본 발명의 실시예예 따른 잉곳절단장치의 사시도.Figure 2 is a perspective view of an ingot cutting device according to an embodiment of the present invention.

도 3은 본 발명의 실시예에 따른 롤러부의 측면도.Figure 3 is a side view of the roller portion according to an embodiment of the present invention.

도 4는 본 발명의 실시예에 따른 메인스핀들의 측단면도.Figure 4 is a side cross-sectional view of the main spindle according to an embodiment of the present invention.

이하, 본 발명의 바람직한 실시예는 첨부된 도면을 참조하여 상세하게 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

특별한 정의가 없는 한 본 명세서의 모든 용어는 당업자가 이해하는 용어의 일반적인 의미와 동일하고, 만약 본 명세서에서 사용된 용어가 당해 용어의 일반적인 의미와 충돌하는 경우에는 본 명세서에 사용된 정의에 따른다.Unless otherwise specified, all terms in this specification are the same as the general meaning of terms understood by those skilled in the art, and if the terms used in this specification conflict with the general meanings of the terms, the definitions used in the present specification follow.

다만, 이하에 기술될 발명은 본 발명의 실시예를 설명하기 위한 것일 뿐 본 발명의 권리범위를 한정하기 위한 것을 아니며, 명세서 전반에 걸쳐서 동일하게 사용된 참조번호들은 동일한 구성요소들을 나타낸다.However, the invention to be described below is only for describing the embodiments of the present invention and is not intended to limit the scope of the present invention, and the same reference numerals are used throughout the specification.

도 2는 본 발명의 실시예예 따른 잉곳절단장치의 사시도, 도 3은 본 발명의 실시예에 따른 롤러부의 측면도이며, 도 4는 본 발명의 실시예에 따른 메인스핀들의 측단면도이다.2 is a perspective view of an ingot cutting device according to an embodiment of the present invention, FIG. 3 is a side view of a roller part according to an embodiment of the present invention, and FIG. 4 is a side cross-sectional view of main spindles according to an embodiment of the present invention.

도 2를 참조하면, 본 발명의 실시예에 따른 잉곳절단장치(1)는 잉곳 지지부(100), 와이어공급부(200), 와이어회수부(300), 한 쌍의 롤러부(400), 쿨런트 분사부(500), 또는 에어 공급부(600)를 포함할 수 있다.Referring to FIG. 2, the ingot cutting device 1 according to the embodiment of the present invention includes an ingot support part 100, a wire supply part 200, a wire recovery part 300, a pair of roller parts 400, and a coolant It may include an injection unit 500, or an air supply unit 600.

상기 잉곳 지지부(100)는 잉곳(S)의 절단 공정 시 잉곳(S)을 부착하여 지지할 수 있다. 이러한 잉곳 지지부(100)는 지지 플레이트(110) 및 빔(120)을 포함할 수 있다.The ingot support part 100 may be supported by attaching the ingot (S) during the cutting process of the ingot (S). The ingot support part 100 may include a support plate 110 and a beam 120.

상기 지지 플레이트(110)는 상기 빔(120)을 지지할 수 있으며, 접착 부재를 이용하여 빔(120)의 일측면에 부착될 수 있다. 일 예로 접착 부재는 에폭시를 사용할 수 있다. The support plate 110 may support the beam 120 and may be attached to one side of the beam 120 using an adhesive member. As an example, the adhesive member may use epoxy.

상기 빔(120)은 일 방향으로 길게 연장된 형태로 제공될 수 있으며, 잉곳(S)보다 긴 길이로 제공될 수 있다. The beam 120 may be provided in an elongated shape in one direction, and may be provided in a length longer than the ingot S.

이러한 빔(120)의 일면에는 잉곳(S)이 부착될 수 있다. 일 예로 상기 빔(120)은 하면에 잉곳(S)이 부착될 수 있다. An ingot S may be attached to one surface of the beam 120. For example, the beam 120 may have an ingot S attached to a lower surface.

또한, 상기 빔(120)은 벡그라이트 또는 세라믹 재질로 제공될 수 있다. In addition, the beam 120 may be provided in a beglight or ceramic material.

와이어공급부(200)는 와이어(W)를 제공하며, 후술할 한 쌍의 롤러부(400)에 와이어(W)를 공급할 수 있다. The wire supply unit 200 provides a wire W, and may supply the wire W to a pair of roller units 400 to be described later.

구체적으로, 상기 와이어공급부(200)는 공급보빈(210), 제1 텐션풀리(220) 및 공급풀리(230)를 포함한다. Specifically, the wire supply unit 200 includes a supply bobbin 210, a first tension pulley 220 and a supply pulley 230.

상기 공급보빈(210)은 후술할 한 쌍의 롤러부(400)와 이격되어 배치될 수 있으며, 와이어(W)가 감겨져 있을 수 있다. The supply bobbin 210 may be disposed spaced apart from the pair of roller parts 400 to be described later, and the wire W may be wound.

이러한 공급보빈(210)은 제1 텐션풀리(220)로 와이어(W)를 공급할 수 있다. The supply bobbin 210 may supply the wire W to the first tension pulley 220.

상기 제1 텐션풀리(220)는 공급보빈(210)의 하부에 위치하여 와이어(W)에 장력을 부여하여 와이어(W)의 진행을 안내할 수 있으며, 복수 개 설치될 수 있다. The first tension pulley 220 is located below the supply bobbin 210 to impart tension to the wire W to guide the progress of the wire W, and may be installed in plural.

상기 공급풀리(230)는 후술할 한 쌍의 롤러부(400)의 하부에 위치할 수 있다. The supply pulley 230 may be located under the pair of rollers 400 to be described later.

또한, 상기 공급풀리(230)는 상기 한 쌍의 롤러부(400)와 일정 거리 이격되어 위치할 수 있으며, 상기 한 쌍의 롤러부(400)로 진입되는 와이어(W)의 진입 위치를 변경할 수 있다. In addition, the supply pulley 230 may be positioned spaced apart from the pair of roller parts 400 by a predetermined distance, and may change the entry position of the wire W entering the pair of roller parts 400. have.

와이어회수부(300)는 상기 와이어공급부(200)로부터 소정 간격 이격되어 후술할 한 쌍의 메인롤러부(400)에 공급된 와이어(W)를 회수할 수 있다.The wire recovery unit 300 may be spaced apart from the wire supply unit 200 at a predetermined interval to recover the wire W supplied to the pair of main roller units 400 to be described later.

구체적으로, 상기 와이어회수부(300)는 회수보빈(310), 제2 텐션풀리(320) 및 회수풀리(330)를 포함한다. Specifically, the wire recovery unit 300 includes a recovery bobbin 310, a second tension pulley 320 and a recovery pulley 330.

상기 회수보빈(310)은 후술할 한 쌍의 롤러부(400) 및 상기 와이어공급부(200)로부터 소정 간격 이격되어 공급된 와이어(W)를 회수할 수 있으며, 회수된 와이어(W)가 감겨져 있을 수 있다. The recovery bobbin 310 may recover the supplied wire W spaced apart at a predetermined distance from the pair of roller parts 400 and the wire supply part 200 to be described later, and the recovered wire W may be wound. You can.

이러한 회수보빈(310)은 제2 텐션풀리(320)로부터 와이어(W)를 공급받을 수 있다. The recovery bobbin 310 may be supplied with a wire W from the second tension pulley 320.

상기 제2 텐션풀리(320)는 회수보빈(310)의 하부에 위치할 수 있으며, 복수 개 설치될 수 있다. 상기 제2 텐션풀리(320)는 와이어(W)에 장력을 부여하여 와이어(W)의 진행을 안내할 수 있다. The second tension pulley 320 may be located under the recovery bobbin 310, and may be installed in plurality. The second tension pulley 320 may provide tension to the wire W to guide the progress of the wire W.

또한, 상기 회수풀리(330)는 상기 한 쌍의 롤러부(400)의 하부에 일정 거리 이격되어 위치할 수 있다. 상기 회수풀리(330)는 한 쌍의 롤러부(400)로부터 회수되는 와이어(W)의 회수 위치를 변경할 수 있다. In addition, the recovery pulley 330 may be located at a predetermined distance apart from the lower portion of the pair of rollers 400. The recovery pulley 330 may change the recovery position of the wire W recovered from the pair of roller units 400.

한 쌍의 롤러부(400)는 상기 와이어공급부(200)와 와이어회수부(300) 사이에 배치되어 상측에 안치된 잉곳(S)을 절단할 수 있다. The pair of roller parts 400 may be disposed between the wire supply part 200 and the wire recovery part 300 to cut the ingot S placed on the upper side.

이러한 한 쌍의 롤러부(400)는 메인스핀들(410)과 보빈롤러(420)를 포함할 수 있으며, 상기 보빈롤러(420)의 자유단에 동축을 갖도록 배치되는 이동스핀들(430)을 더 포함할 수 있다. The pair of roller parts 400 may include a main spindle 410 and a bobbin roller 420, and further include moving spindles 430 disposed to have coaxiality at a free end of the bobbin roller 420. can do.

본 발명의 실시예에 따른 메인스핀들(410)은 모터가 내부에 내장되어 롤러부(400) 자체의 소형화를 가능케 함과 동시에 회전을 위한 동축 정렬이 자체적으로 구현되어 진동과 소음이 감소될 수 있으며, 회전속도, 내구성 및 웨이퍼 절단의 정밀도가 향상될 수 있다.In the main spindle 410 according to the embodiment of the present invention, the motor is built in to enable miniaturization of the roller 400 itself, and at the same time, coaxial alignment for rotation is implemented by itself, so that vibration and noise can be reduced. , Rotational speed, durability and precision of wafer cutting can be improved.

구체적으로, 상기 메인스핀들(410)은 일단이 상기 보빈롤러(420)와 동회전 가능하게 결합되는 샤프트(411)와, 상기 샤프트(411)의 외주면에 배치되는 로터(412)와, 상기 샤프트(411)의 일단이 노출되도록 상기 샤프트(411)를 수용하는 하우징(413)과, 내주가 상기 샤프트(411)에 배치되며 외주가 상기 하우징(413)에 배치되는 적어도 한 개 이상의 스핀들베어링(414)과, 상기 로터(412)에 대응되는 상기 샤프트(411)의 내주면에 배치되는 스테이터(415)를 포함할 수 있다.Specifically, the main spindle 410 has a shaft 411, one end of which is rotatably coupled with the bobbin roller 420, a rotor 412 disposed on an outer circumferential surface of the shaft 411, and the shaft ( Housing 413 for receiving the shaft 411 so that one end of 411) is exposed, and at least one spindle bearing 414 having an inner circumference disposed on the shaft 411 and an outer circumference disposed on the housing 413. And, it may include a stator 415 disposed on the inner peripheral surface of the shaft 411 corresponding to the rotor 412.

또한, 자체 하중 및 상기 샤프트(411)에 결합되는 이동스핀들(430)의 하중에 따른 휨모멘트를 방지하기 위해, 적어도 두 개 이상의 스핀들베어링(414)이 상호 소정 간격 이격되어 한 쌍으로 배치될 수 있다.In addition, in order to prevent the bending moment according to the load of the mobile spindle 430 coupled to the self-load and the shaft 411, at least two or more spindle bearings 414 may be arranged in pairs spaced apart from each other at a predetermined interval. have.

예를 들어, 상기 한 쌍의 스핀들베어링(414)은 상기 샤프트(411)의 일단과 인접한 상기 하우징(413)의 전방과, 상기 샤프트(411)의 타단과 인접한 상기 하우징(413)의 후방에 각각 배치될 수 있다.For example, the pair of spindle bearings 414 are respectively in front of the housing 413 adjacent to one end of the shaft 411 and rear of the housing 413 adjacent to the other end of the shaft 411. Can be deployed.

또한, 샤프트(411)의 회전시 상기 한 쌍의 스핀들베어링(414)과의 마찰열을 감소시키기 위해, 상기 하우징(413)에는 상기 샤프트(411) 또는 스핀들베어링(414)에 윤활유를 공급하기 위한 윤활유 공급라인(416)과 윤활유 배출라인(417)이 내부에 형성될 수 있다.In addition, in order to reduce frictional heat with the pair of spindle bearings 414 when the shaft 411 is rotated, a lubricant for supplying lubricant to the shaft 411 or the spindle bearings 414 to the housing 413 The supply line 416 and the lubricant discharge line 417 may be formed therein.

이 경우, 가장 많은 열이 발생하는 곳이 베어링 부분임을 고려하여, 상기 윤활유 공급라인(416)은 상기 한 쌍의 스핀들베어링(414) 사이에 윤활유를 공급할 수 있다.In this case, considering that the place where the most heat is generated is the bearing part, the lubricant supply line 416 may supply lubricant between the pair of spindle bearings 414.

또한, 상기 샤프트(411)와 보빈롤러(420)의 동회전시 마찰을 최소화하기 위해, 상기 샤프트(411)의 일단과 보빈롤러(420) 사이에 배치되는 체결베어링(418)을 더 포함할 수 있다.In addition, in order to minimize friction when the shaft 411 and the bobbin roller 420 are rotated at the same time, a fastening bearing 418 disposed between one end of the shaft 411 and the bobbin roller 420 may be further included. have.

상기 보빈롤러(420)는 잉곳 지지부(100)의 하부에 위치할 수 있으며, 와이어(W)가 감겨질 수 있다. The bobbin roller 420 may be located under the ingot support portion 100, the wire (W) may be wound.

또한, 상기 보빈롤러(420)는 적어도 한 쌍이 제공될 수 있다. In addition, at least one pair of bobbin rollers 420 may be provided.

또한, 상기 보빈롤러(420)는 원통 형상으로 제공될 수 있으며, 일방향 또는 타방향으로 회전 가능하게 제공될 수 있다. 상기 보빈롤러(420)의 회전 방향은 일정 시간에 따라 바뀔 수 있다.Further, the bobbin roller 420 may be provided in a cylindrical shape, and may be rotatably provided in one direction or the other direction. The direction of rotation of the bobbin roller 420 may be changed according to a predetermined time.

일 예로, 상기 보빈롤러(420)는 보빈롤러(420)와 연결된 메인스핀들(410)에서 회전 구동력을 전달받아 회전할 수 있다. For example, the bobbin roller 420 may be rotated by receiving rotational driving force from the main spindle 410 connected to the bobbin roller 420.

다른 예로, 상기 보빈롤러(420)는 잉곳(S) 절단 공정 시 시계방향으로 회전하다가 반시계방향으로 회전할 수 있다. 상기 보빈롤러(420)의 회전 방향은 공정 시간 동안 계속적으로 바뀔 수 있다. As another example, the bobbin roller 420 may rotate clockwise during the cutting process of the ingot S, and then rotate counterclockwise. The direction of rotation of the bobbin roller 420 may be continuously changed during the process time.

상기 보빈롤러(420)가 계속적을 방향을 바꾸면서 고속 회전함에 따라 와이어(W) 역시 계속적으로 이동할 수 있다. 와이어(W)의 이동에 의해 잉곳(S)의 길이방향에 수직한 방향을 절단할 수 있다. 와이어(W)의 절단 공정에 따라서 웨이퍼들이 생산될 수 있다. As the bobbin roller 420 continuously rotates and rotates at a high speed, the wire W may also continuously move. The direction perpendicular to the longitudinal direction of the ingot S can be cut by the movement of the wire W. Wafers may be produced according to the cutting process of the wire W.

한 쌍의 상기 보빈롤러(420)는 서로 일정거리 이격되어 위치할 수 있으며, 와이어(W)가 감겨질 수 있다. 또한, 상기 보빈롤러(420)에는 가이드 홈 및 지지 돌기가 형성될 수 있다. The pair of bobbin rollers 420 may be positioned spaced apart from each other, and the wire W may be wound. In addition, a guide groove and a supporting protrusion may be formed in the bobbin roller 420.

와이어(W)에는 절삭용 입자가 표면에 고정될 수 있다. 일 예로 절삭용 입자는 다이아몬드 입자로 제공될 수 있다. 일 예로 와이어(W)에는 다이아몬드 입자들이 일정한 크기로 형성되어, 니켈 전착 고정을 거쳐서 와이어(W) 표면에 고정된 형태로 제공될 수 있다. In the wire W, particles for cutting may be fixed to the surface. For example, the cutting particles may be provided as diamond particles. For example, diamond particles may be formed in a certain size on the wire W, and may be provided in a form fixed to the surface of the wire W through nickel electrodeposition.

와이어(W)는 후술하는 보빈롤러(420)에 감겨질 수 있다. 일 예로 와이어(W)는 한 쌍의 보빈롤러(420)의 상면에 대각선 방향으로 감겨질 수 있다. 여기서 대각선 방향이란, 한 쌍의 보빈롤러(420)의 수평한 길이방향의 수직선을 기준으로 했을 때 비스듬하게 감겨진 행태를 의미한다. The wire W may be wound on a bobbin roller 420, which will be described later. For example, the wire W may be wound diagonally on the upper surface of the pair of bobbin rollers 420. Here, the diagonal direction means a behavior wound at an angle when the vertical line in the horizontal length direction of the pair of bobbin rollers 420 is referenced.

와이어(W)가 대각선 방향으로 감겨져 와이어(W)로 잉곳(S)을 절단 시 수직으로 감겨진 형태와 비교하여 절단 공정에 효율을 향상시킬 수 있다. 즉, 와이어(W)가 대각선 방향으로 감겨져, 수평으로 감겨질 때와 비교하여 고속으로 회전하는 와이어(W)가 받는 힘의 분산이 이루어져 와이어(W)의 내구성을 향상시킬 수 있다. When the wire W is wound diagonally and the ingot S is cut with the wire W, it is possible to improve the efficiency in the cutting process compared to the vertically wound form. That is, the wire W is wound in a diagonal direction, and the dispersion of the force received by the wire W rotating at high speed compared to when it is wound horizontally can be made to improve the durability of the wire W.

와이어(W)는 한 쌍의 보빈롤러(420)의 하면에 대각선 방향으로 감겨질 수 있다. 와이어(W)는 상면에 감겨진 형태와 동일하게 감겨질 수 있다. The wire W may be wound diagonally on the lower surface of the pair of bobbin rollers 420. The wire W may be wound in the same manner as the shape wound on the upper surface.

쿨런트 분사부(500)는 잉곳(S) 절단 시 쿨런트를 공급하여, 와이어(W)의 마찰열 및 생성된 칩을 제거하여 잉곳(S)의 절단이 용이하도록 할 수 있다. The coolant injection unit 500 may supply a coolant when cutting the ingot S, thereby removing frictional heat of the wire W and generated chips to facilitate cutting of the ingot S.

상기 쿨런트 분사부(500)는 쿨런트 분사노즐(510), 쿨런트 공급부(520) 그리고 쿨런트 수집부(530)를 포함한다. The coolant injection unit 500 includes a coolant injection nozzle 510, a coolant supply unit 520, and a coolant collection unit 530.

상기 쿨런트 분사노즐(510)은 상기 한 쌍의 롤러부(400)의 상부에 위치할 수 있다. The coolant spray nozzle 510 may be located on the upper portion of the pair of roller parts 400.

또한, 상기 쿨런트 분사노즐(510)은 쿨런트를 분사하기 위한 통공이 형성될 수 있으며, 복수 개가 제공될 수 있다. In addition, the coolant spray nozzle 510 may be formed with a through hole for spraying the coolant, and a plurality of coolant spray nozzles 510 may be provided.

예를 들어, 상기 쿨런트 분사노즐(510)은 상기 한 쌍의 롤러부(400)의 개수와 대응되는 개수로 제공될 수 있다.For example, the coolant spray nozzle 510 may be provided in a number corresponding to the number of the pair of roller parts 400.

상기 쿨런트 분사노즐(510)은 쿨런트 공급부(520)와 연결되어 쿨런트를 공급할 수 있다. 쿨런트에는 연마 그레인이 포함될 수 있다. The coolant injection nozzle 510 may be connected to the coolant supply unit 520 to supply coolant. The coolant may include abrasive grain.

상기 쿨런트 수집부(530)는 상기 한 쌍의 가이드 롤러의 하부측에 설치될 수 있다. 이러한 쿨런트 수집부(530)는 상부측으로 개방된 수용홈이 형성될 수 으며, 상기 수용홈을 통해서 쿨런트가 수집될 수 있다. The coolant collection unit 530 may be installed on the lower side of the pair of guide rollers. The coolant collection unit 530 may have a receiving groove opened toward the upper side, and a coolant may be collected through the receiving groove.

즉, 상기 쿨런트 분사노즐(510)에서 한 쌍의 가이드 롤러로 분사된 쿨런트의 일부가 쿨런트 수집부(530)의 수용홈에 떨어져 수집될 수 있다.That is, a portion of the coolant sprayed by the pair of guide rollers from the coolant spray nozzle 510 may be collected off the receiving groove of the coolant collection part 530.

상기 쿨런트 수집부(530)는 쿨런트 공급부(520)와 연결될 수 있다. 쿨런트 수집부(530)는 수집된 쿨런트를 쿨런트 공급부(520)로 이동시킬 수 있으며, 유동 경로에 필터 등이 배치될 수도 있다.The coolant collection unit 530 may be connected to the coolant supply unit 520. The coolant collection unit 530 may move the collected coolant to the coolant supply unit 520, and a filter or the like may be disposed in the flow path.

에어 공급부(600)는 상기 한 쌍의 롤러부(400)에 에어를 분사할 수 있다. The air supply unit 600 may inject air into the pair of roller units 400.

상기 에어 공급부(600)는 보빈롤러(420)의 가이드 홈에 에어를 분사하여, 공정 시 생기는 이물질 및 쿨런트가 상기 가이드 홈에 안착되어 와이어(W)가 이탈되는 것을 방지하고, 가이드 홈을 세정할 수 있다.The air supply unit 600 sprays air into the guide groove of the bobbin roller 420 to prevent foreign matter and coolant generated during the process from being settled in the guide groove to prevent wire W from escaping and cleaning the guide groove can do.

에어 공급부(600)는 에어관(610)을 포함할 수 있다.The air supply unit 600 may include an air pipe 610.

에어관(610)은 보빈롤러(420)와 인접하는 곳에 위치할 수 있다. 상기 에어관(610)에는 에어 배출공(620)이 형성될 수 있다. 상기 에어관(610)은 외부로부터 또는 별도의 공급 장치에서 에어를 공급 받아 에어 배출공(620)을 통해서 에어를 배출 할 수 있다. The air pipe 610 may be located adjacent to the bobbin roller 420. An air discharge hole 620 may be formed in the air pipe 610. The air pipe 610 may receive air from outside or through a separate supply device to discharge air through the air discharge hole 620.

이러한 에어관(610)은 원기둥 형상으로 형성될 수 있다. 상기 에어관(610)은 길이 방향의 보빈롤러(420)의 길이방향으로 연장된 형태로 제공될 수 있다. The air tube 610 may be formed in a cylindrical shape. The air pipe 610 may be provided in a form extending in the longitudinal direction of the bobbin roller 420 in the longitudinal direction.

요컨대, 본 발명은 내부에 모터가 내장된 메인스핀들(410)을 포함하여 소형화가 가능하며, 보빈롤러(420)와 메인스핀들(410)의 동심축을 용이하게 정렬시킬 수 있어 내구성 및 웨이퍼 절단의 정밀성이 향상될 수 있는 이점이 있다.In short, the present invention can be miniaturized by including a main spindle 410 with a built-in motor inside, and can easily align the concentric shafts of the bobbin roller 420 and the main spindle 410, resulting in durability and precision of wafer cutting. There is an advantage that can be improved.

이상, 상기 설명에 의해 당업자라면 본 발명의 기술적 사상을 일탈하지 아니하는 범위에서 다양한 변경 및 수정이 가능함을 알 수 있을 것이며, 본 발명의 기술적 범위는 실시예에 기재된 내용으로 한정되는 것이 아니라 특허청구범위 및 그와 균등한 범위에 의하여 정해져야 한다.As described above, those skilled in the art from the above description will be able to see that various changes and modifications can be made without departing from the technical spirit of the present invention, and the technical scope of the present invention is not limited to the contents described in the Examples, but claims It should be determined by the scope and its equivalent.

Claims (8)

와이어를 제공하는 와이어공급부;A wire supply unit providing a wire; 상기 와이어공급부로부터 소정 간격 이격되어 공급된 와이어를 회수하는 와이어회수부; 및A wire recovery unit for recovering the supplied wire spaced apart at a predetermined distance from the wire supply unit; And 상기 와이어공급부와 와이어회수부 사이에 배치되어 상측에 안치된 잉곳을 절단하는 상호 소정 간격 이격된 한 쌍의 롤러부;를 포함하며,It includes; a pair of rollers spaced apart from each other at a predetermined interval to be disposed between the wire supply unit and the wire recovery unit to cut the ingot placed on the upper side; 상기 한 쌍의 롤러부는,The pair of roller parts, 모터가 내장된 메인스핀들; 및Main spindle with built-in motor; And 상기 메인스핀들의 일단에 동축을 갖도록 배치되어 와이어가 권선되는 보빈롤러;를 포함하는 잉곳절단장치.Ingot cutting device comprising a; bobbin roller that is disposed to have a coaxial at one end of the main spindle is wound wire. 제1항에 있어서,According to claim 1, 상기 한 쌍의 롤러부는 상기 보빈롤러의 자유단에 동축을 갖도록 배치되는 이동스핀들을 더 포함하는 잉곳절단장치.The pair of roller portion ingot cutting device further comprises a moving spindle disposed to have a coaxial with the free end of the bobbin roller. 제1항에 있어서,According to claim 1, 상기 메인스핀들은,The main spindle, 일단이 상기 보빈롤러와 동회전 가능하게 결합되는 샤프트;A shaft having one end rotatably coupled with the bobbin roller; 상기 샤프트의 외주면에 배치되는 로터;A rotor disposed on an outer circumferential surface of the shaft; 상기 샤프트의 일단이 노출되도록 상기 샤프트를 수용하는 하우징;A housing accommodating the shaft such that one end of the shaft is exposed; 내주가 상기 샤프트에 배치되며 외주가 상기 하우징에 배치되는 적어도 한 개 이상의 스핀들베어링; 및At least one spindle bearing having an inner circumference disposed on the shaft and an outer circumference disposed on the housing; And 상기 로터에 대응되는 상기 샤프트의 내주면에 배치되는 스테이터;를 포함하는 잉곳절단장치.Stator disposed on the inner peripheral surface of the shaft corresponding to the rotor; Ingot cutting device comprising a. 제3항에 있어서,According to claim 3, 상기 스핀들베어링은 적어도 두 개 이상의 스핀들베어링이 상호 소정 간격 이격되어 한 쌍으로 배치되는 잉곳절단장치.The spindle bearing is an ingot cutting device in which at least two or more spindle bearings are spaced apart from each other and arranged in a pair. 제4항에 있어서,According to claim 4, 상기 한 쌍의 스핀들베어링은 상기 샤프트의 일단과 인접한 상기 하우징의 전방과, 상기 샤프트의 타단과 인접한 상기 하우징의 후방에 각각 배치되는 잉곳절단장치.The pair of spindle bearings are disposed in front of the housing adjacent to one end of the shaft and rear of the housing adjacent to the other end of the shaft, respectively. 제4항에 있어서,According to claim 4, 상기 하우징에는 상기 스핀들 또는 스핀들베어링에 윤활유를 공급하기 위한 윤활유 공급라인과 윤활유 배출라인이 내부에 형성되는 잉곳절단장치.An ingot cutting device in which the lubricating oil supply line and lubricating oil discharge line for supplying lubricating oil to the spindle or spindle bearing are formed in the housing. 제6항에 있어서,The method of claim 6, 상기 윤활유 공급라인은 상기 한 쌍의 스핀들베어링 사이에 윤활유를 공급하는 잉곳절단장치.The lubricating oil supply line is an ingot cutting device that supplies lubricating oil between the pair of spindle bearings. 제2항에 있어서,According to claim 2, 상기 샤프트의 일단과 보빈롤러 사이에 배치되는 체결베어링을 더 포함하는 잉곳절단장치.An ingot cutting device further comprising a fastening bearing disposed between one end of the shaft and the bobbin roller.
PCT/KR2018/012708 2018-10-22 2018-10-25 Ingot cutting apparatus Ceased WO2020085532A1 (en)

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KR10-2018-0126020 2018-10-22

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847852A (en) * 1994-05-16 1996-02-20 Tokyo Seimitsu Co Ltd Wire saw
JPH1142549A (en) * 1997-07-28 1999-02-16 Tokyo Seimitsu Co Ltd Grooved roller support device for wire saw
WO2013011451A2 (en) * 2011-07-15 2013-01-24 Meyer Burger Ag Apparatus for driving a wire or wire-like objects
JP2015216838A (en) * 2014-04-25 2015-12-03 アプライド マテリアルズ スウィッツァーランド エス アー エール エル Motor unit for wire saw device and wire saw device employing the same
CN106042202A (en) * 2016-06-22 2016-10-26 广州市昊志机电股份有限公司 Wafer cutting machine

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847852A (en) * 1994-05-16 1996-02-20 Tokyo Seimitsu Co Ltd Wire saw
JPH1142549A (en) * 1997-07-28 1999-02-16 Tokyo Seimitsu Co Ltd Grooved roller support device for wire saw
WO2013011451A2 (en) * 2011-07-15 2013-01-24 Meyer Burger Ag Apparatus for driving a wire or wire-like objects
JP2015216838A (en) * 2014-04-25 2015-12-03 アプライド マテリアルズ スウィッツァーランド エス アー エール エル Motor unit for wire saw device and wire saw device employing the same
CN106042202A (en) * 2016-06-22 2016-10-26 广州市昊志机电股份有限公司 Wafer cutting machine

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