WO2020082678A1 - Wear-resistant self-crosslinking nano coating and preparation method thereof - Google Patents
Wear-resistant self-crosslinking nano coating and preparation method thereof Download PDFInfo
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- WO2020082678A1 WO2020082678A1 PCT/CN2019/079113 CN2019079113W WO2020082678A1 WO 2020082678 A1 WO2020082678 A1 WO 2020082678A1 CN 2019079113 W CN2019079113 W CN 2019079113W WO 2020082678 A1 WO2020082678 A1 WO 2020082678A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D4/00—Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
Definitions
- the invention relates to the technical field of plasma chemical vapor deposition, in particular to a wear-resistant self-crosslinking nano-coating and a preparation method thereof.
- the intrusion of liquid and moisture is one of the most important causes of PCB board corrosion and short circuit in electronic devices.
- Polymer coatings are often used for the protection of material surfaces due to their advantages such as economy, easy coating, wide application range, and good chemical resistance.
- the polymer coating blocks the intrusion of liquids, especially water and steam, thereby improving the adaptability of electronic devices in a humid environment, and making important product indicators such as quality stability and reliability, service life of electronic devices to a great extent improve.
- Liquid phase coating such as three-proof paint
- the construction method can use dipping method, brushing method, spraying method and other processes, the liquid phase raw material is applied on the surface of the substrate and then thermally cured, light cured and other means to form dense, cross-linked Polymer coating.
- the liquid-phase coating method generates a large amount of exhaust gas and waste liquid, and the raw material utilization rate is low.
- the solvent used often causes certain damage to the PCB of the electronic device; in addition, the thickness of the three anti-paint is more than tens of microns The uniformity of the thickness is poor, which has a great impact on the functions of some electronic devices that require heat dissipation and signal transmission.
- the vapor deposition method is a method that uses plasma to activate the reaction gas and perform chemical vapor deposition on the surface of the substrate.
- This method is suitable for the protection requirements of various substrate surfaces: vapor-phase coating can be uniformly deposited on substrates of different shapes; the coating preparation temperature is low, suitable for the protection of temperature-sensitive devices; the coating is thin and the stress is small, Less damage to PCB. Because the plasma coating process can prepare ultra-thin nano-scale coatings, it has almost no effect on the heat dissipation and conductivity of electronic devices.
- the main protective materials used on PCBs are fluorocarbon resins, but the fluorocarbon resins are relatively low in strength, easy to slide and deform under the action of external forces, and are not resistant to friction.
- the intermolecular cross-linking method can increase the force between the fluorocarbon resin layer and the layer, make the coating more dense, and enhance the protection ability of the coating against wear and corrosion.
- CN107058979 "Preparation method of waterproof and electrical breakdown resistant coating" In the fluorocarbon resin monomer, multifunctional unsaturated hydrocarbon derivatives are introduced to improve the product's resistance to corrosion and underwater energization.
- the present invention is to overcome the above shortcomings and provide a method for preparing a wear-resistant self-crosslinking nano-coating.
- the present invention uses plasma chemical vapor deposition technology to introduce self-crosslinks between fluorocarbon resins by introducing rigid benzene rings into the monomers of fluorocarbon resins and introducing functional groups on the benzene rings that can be used to form crosslinking points through chemical reactions
- the body-shaped network structure improves the strength and wear resistance of the nano-coating.
- a method for preparing a wear-resistant self-crosslinking nano-coating characterized in that: the substrate is exposed to a monomer vapor atmosphere, and a chemical vapor deposition reaction is initiated on the surface of the substrate by plasma discharge to form a protective coating;
- the monomer vapor is a monomer having a structure represented by formula (I):
- R 1 , R 2 and R 3 are independently selected from hydrogen, alkyl, aryl, halogen or haloalkyl;
- R 4 is selected from one of a bond, an alkyl subunit, an aryl subunit, and a hydrocarbyl subunit;
- R 5 , R 6 , and R 7 are independently selected from hydrogen, halogen, alkyl, hydroxyl, alkenyl, and diene Group, amino group, aldehyde group, amino group, carboxyl group, acid anhydride or mercapto group,
- R 8 is selected from one of hydroxyl, alkenyl, dienyl, amino, carboxyl group, acid anhydride, mercapto group, halogen.
- m is an integer of 0-10
- n is an integer of 0-20
- p is an integer of 1-10.
- X is hydrogen or halogen.
- R 1 , R 2 , and R 3 may be a group connected to an unsaturated carbon-carbon double bond, or may be a group having good hydrophobic properties.
- R 4 is a bridging group between the reactive functional group and the functional group.
- R 5 , R 6 and R 7 are groups connected to the benzene ring.
- R 8 is a group that can undergo further reaction under the action of plasma to form a cross-linked structure between molecules.
- X is hydrogen or a substituent on a hydrophobic carbon chain.
- R 4 is a short bridge group, which is a bond or a methylene group, and the groups R 5 and R 6 on the benzene ring are hydrogen, and R 7 is hydrogen or halogen.
- R 8 is a substituent that can form a reactive group under low power discharge, and is selected from one of vinyl group, 1-butadienyl group, halogen, and hydroxyl group.
- the monomer is a liquid at normal temperature and pressure
- m is 0, 1, 2, or 3
- n is 1, 3, 5, 6, 7, or 8.
- R 8 is a carbon-carbon unsaturated bond, preferably vinyl.
- the substrate is a solid material such as metal, optical instrument, clothing fabric, electronic device or medical device.
- the invention also discloses a method for preparing a wear-resistant self-crosslinking nano coating, which comprises the following steps:
- the plasma source gas is helium gas, and the flow rate is 1-500 sccm.
- step (2) the temperature of the plasma chamber in step (2) is controlled at 30-60 ° C.
- step (2) the vaporization temperature of the monomer is 60 ° C-150 ° C, and the vaporization is under reduced pressure.
- step (2) the monomer is vaporized under a vacuum of 0.1 mtorr to 100 torr.
- the plasma discharge method is radio frequency discharge, microwave discharge, intermediate frequency discharge, Penning discharge or electric spark discharge.
- the plasma discharge is a microwave discharge with a frequency of 500MHz-300KMHz.
- the plasma discharge time is 10s-14400s.
- the present invention introduces a rigid benzene ring into the monomer of the fluorocarbon resin and introduces a functional group on the benzene ring that can be used for chemical reaction to form a cross-linking point, so that the fluorocarbon resin forms a bulk network structure , Increase the density of the coating, improve the hardness and wear resistance of the coating.
- the invention adopts the plasma nano-coating technology to initiate the reaction between different functional groups, avoiding the difficulty of selecting the conventional chemical reaction catalytic path, the coating process is easy to control, and the stability of the coating quality is greatly improved.
- a preparation method of wear-resistant self-crosslinking nano-coating after the following steps:
- the plasma source gas is helium
- the flow rate is 50 sccm
- the temperature of the plasma chamber is controlled at 30 ° C.
- the vaporization temperature of the monomer is 60 ° C.
- the monomer is vaporized under a vacuum of 1 mTorr
- the monomer inflow rate is 250 ⁇ L / min
- the infusion time is 3000 s.
- the plasma discharge is a microwave discharge with a frequency of 500MHz.
- the plasma discharge in this embodiment may be divided into two stages, namely, a pretreatment stage before the monomer is introduced and a deposition stage after the monomer is introduced.
- the discharge power in the pretreatment stage is 2-500W
- the continuous discharge time is 1-3600s.
- the discharge method in the deposition stage can be the same as in the pretreatment stage, or it can be changed. The discharge time continues until the end of the deposition.
- step (1) is evacuated to 100 mtorr; in step (2), monomer S1 is replaced with monomer S2, the vaporization temperature of the monomer is 120 ° C, the vaporization vacuum is 200 mtorr, the monomer The access time is 3500s, and other conditions remain unchanged.
- step (1) is evacuated to 50 mtorr; in step (2), monomer S1 is replaced with monomer S3, the vaporization temperature of the monomer is 80 ° C, the vaporization vacuum is 70 mtorr, the monomer The access time is 4000s, and other conditions remain unchanged.
- step (1) is evacuated to 60 mtorr; in step (2), monomer S1 is replaced with monomer S4, the vaporization temperature of the monomer is 100 ° C, the vaporization vacuum is 90 mtorr, the monomer The access time is 4000s, and other conditions remain unchanged.
- step (1) is evacuated to 60 mtorr; in step (2), monomer S1 is replaced with monomer S5, the vaporization temperature of the monomer is 100 ° C, the vaporization vacuum is 70 mtorr, the monomer The access time is 7200s, other conditions remain unchanged.
- Example 1 Compared with Example 1, the temperature of the plasma chamber is controlled at 50 ° C, and other conditions remain unchanged.
- Example 2 Compared with Example 2, the microwave discharge frequency is changed to 10 KMHz, and other conditions remain unchanged.
- Example 2 Compared with Example 2, the monomer flow rate was changed to 400 ⁇ L / min, and other conditions remained unchanged.
- Example 2 Compared with Example 2, the flow rate of helium gas was changed to 20 ⁇ L / min, and other conditions remained unchanged.
- Example 2 Compared with Example 2, the monomer S2 was replaced with 2- (perfluorohexyl) ethyl methacrylate.
- Example 2 Compared with Example 2, the monomer S2 was replaced with 2- (perfluorobutyl) ethyl acrylate.
- the substrate after the above examples was plated, and the coating thickness, water contact angle, pencil hardness level, resistance Abrasive test.
- the thickness of the nano-coating is tested using the US Filmetrics-F20-UV-film thickness measuring instrument.
- Nano-coating water contact angle is tested according to GB / T 30447-2013 standard.
- the pencil hardness test method is based on ASTM D3363 pencil hardness.
- the abrasion resistance test is conducted in an alcohol abrasion tester.
- the eraser test fixture is selected for the test.
- the test condition is a load of 100g, a rotation speed of 60cycle / min, and the number of cycles when the coating is damaged.
- the monomer used in this technical solution introduces a rigid group benzene ring and a multifunctional group that can be used for cross-linking, so that the role between the molecular chains during the formation of the coating is stronger, the density of the coating is improved, and then the wear resistance and The hardness level of the coating has been significantly improved.
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Abstract
Description
本发明涉及等离子体化学气相沉积技术领域,具体涉及到一种耐磨自交联的纳米涂层及其制备方法。The invention relates to the technical field of plasma chemical vapor deposition, in particular to a wear-resistant self-crosslinking nano-coating and a preparation method thereof.
液体、湿气的侵入是造成电子器件中PCB板腐蚀、短路等最主要原因之一。聚合物涂层由于经济、易于涂覆、适用范围广、耐化学腐蚀性好等优点,常用于材料表面的防护。聚合物涂层阻隔了液体尤其是水及蒸汽的侵入,从而提高了电子器件在潮湿环境中的适应性,使电子器件的质量稳定性和可靠性、使用寿命等重要产品指标得到很大程度的改善。目前在PCB板上施加防护层的方法,根据材料的状态主要有两种:液相涂覆和气相沉积。液相涂覆,比如三防漆,施工方式可采用浸渍法、刷涂法、喷涂法等工艺,将液相原料施加在基材表面然后利用热固化、光固化等手段,形成致密、交联的聚合物涂层。但液相涂覆的方法产生大量的废气、废液,原料利用率较低,同时使用的溶剂往往会对电子器件PCB板造成一定的损伤;此外,三防漆厚度多为几十微米以上,厚度的均匀性比较差,对一些需要散热和信号传输的电子器件功能影响很大。与之相比,气相沉积的方法,尤其是等离子体化学气相沉积法,是利用等离子体活化反应气体并在基材表面进行化学气相沉积的方法。这 种方法适用于各种基材表面的防护要求:气相镀膜可均匀沉积在不同形貌的基材上;涂层制备温度低,适用于对温度敏感的器件防护;涂层薄、应力小,对PCB损伤小。由于等离子体镀膜工艺可制备出纳米级的超薄涂层,对电子器件的散热、导电性几乎完全不影响。目前在PCB上使用的防护材料主要氟碳树脂,但氟碳树脂强度相对较低,在外力作用下易于滑动和变形,不耐摩擦。通过分子间交联的方法可提高氟碳树脂层与层之间的作用力,使涂层更加致密,增强涂层耐磨、耐腐蚀的防护能力。CN107058979《一种防水耐电击穿涂层的制备方法》在氟碳树脂单体中,引入了多官能度不饱烃类衍生物,提高了产品耐腐蚀和耐水下通电的性能。但由于氟碳树脂单体为脂肪链,刚性较差,耐磨性仍难以达到使用要求。因此如何通过分子结构的设计,调控分子的刚性,进一步提高纳米涂层的强度和耐磨性,是纳米涂层优化和改进的重要方向。The intrusion of liquid and moisture is one of the most important causes of PCB board corrosion and short circuit in electronic devices. Polymer coatings are often used for the protection of material surfaces due to their advantages such as economy, easy coating, wide application range, and good chemical resistance. The polymer coating blocks the intrusion of liquids, especially water and steam, thereby improving the adaptability of electronic devices in a humid environment, and making important product indicators such as quality stability and reliability, service life of electronic devices to a great extent improve. At present, there are two main methods for applying a protective layer on the PCB board: depending on the state of the material: liquid phase coating and vapor deposition. Liquid phase coating, such as three-proof paint, the construction method can use dipping method, brushing method, spraying method and other processes, the liquid phase raw material is applied on the surface of the substrate and then thermally cured, light cured and other means to form dense, cross-linked Polymer coating. However, the liquid-phase coating method generates a large amount of exhaust gas and waste liquid, and the raw material utilization rate is low. At the same time, the solvent used often causes certain damage to the PCB of the electronic device; in addition, the thickness of the three anti-paint is more than tens of microns The uniformity of the thickness is poor, which has a great impact on the functions of some electronic devices that require heat dissipation and signal transmission. In contrast, the vapor deposition method, especially the plasma chemical vapor deposition method, is a method that uses plasma to activate the reaction gas and perform chemical vapor deposition on the surface of the substrate. This method is suitable for the protection requirements of various substrate surfaces: vapor-phase coating can be uniformly deposited on substrates of different shapes; the coating preparation temperature is low, suitable for the protection of temperature-sensitive devices; the coating is thin and the stress is small, Less damage to PCB. Because the plasma coating process can prepare ultra-thin nano-scale coatings, it has almost no effect on the heat dissipation and conductivity of electronic devices. At present, the main protective materials used on PCBs are fluorocarbon resins, but the fluorocarbon resins are relatively low in strength, easy to slide and deform under the action of external forces, and are not resistant to friction. The intermolecular cross-linking method can increase the force between the fluorocarbon resin layer and the layer, make the coating more dense, and enhance the protection ability of the coating against wear and corrosion. CN107058979 "Preparation method of waterproof and electrical breakdown resistant coating" In the fluorocarbon resin monomer, multifunctional unsaturated hydrocarbon derivatives are introduced to improve the product's resistance to corrosion and underwater energization. However, because the fluorocarbon resin monomer is a fatty chain, the rigidity is poor, and the wear resistance is still difficult to meet the requirements for use. Therefore, how to control the rigidity of molecules through the design of molecular structure to further improve the strength and wear resistance of nano-coatings is an important direction for the optimization and improvement of nano-coatings.
发明内容Summary of the invention
本发明是为了克服以上缺点,提供一种耐磨自交联的纳米涂层制备方法。本发明利用等离子体化学气相沉积技术,通过在氟碳树脂的单体中引入刚性苯环以及在苯环上引入可用于化学反应形成交联点的官能团,使氟碳树脂之间形成自交联的体型网状结构,从而提高纳米涂层的强度和耐磨性。The present invention is to overcome the above shortcomings and provide a method for preparing a wear-resistant self-crosslinking nano-coating. The present invention uses plasma chemical vapor deposition technology to introduce self-crosslinks between fluorocarbon resins by introducing rigid benzene rings into the monomers of fluorocarbon resins and introducing functional groups on the benzene rings that can be used to form crosslinking points through chemical reactions The body-shaped network structure improves the strength and wear resistance of the nano-coating.
本发明是通过以下技术方案实现的:The present invention is achieved through the following technical solutions:
一种耐磨自交联的纳米涂层制备方法,其特征在于:将基材暴露于单体蒸汽氛围中,通过等离子体放电在基材表面引发化学气相沉积反应而形成保护涂层;A method for preparing a wear-resistant self-crosslinking nano-coating, characterized in that: the substrate is exposed to a monomer vapor atmosphere, and a chemical vapor deposition reaction is initiated on the surface of the substrate by plasma discharge to form a protective coating;
所述单体蒸汽为具有式(I)所示结构的单体:The monomer vapor is a monomer having a structure represented by formula (I):
在式(I)中,R 1、R 2、R 3独立地选自氢、烷基、芳基、卤素或卤代烷基; In formula (I), R 1 , R 2 and R 3 are independently selected from hydrogen, alkyl, aryl, halogen or haloalkyl;
R 4选自键、烷基亚基、芳基亚基、烃基亚基中的一种;R 5、R 6、R 7独立地选自氢、卤素、烷基、羟基、烯基、二烯基、氨基、醛基、氨基、羧基、酸酐或巯基,R 8选自羟基、烯基、二烯基、氨基、羧基、酸酐、巯基、卤素中的一种。m为0-10的整数,n为0-20的整数,p为1-10的整数。X是氢或卤素。 R 4 is selected from one of a bond, an alkyl subunit, an aryl subunit, and a hydrocarbyl subunit; R 5 , R 6 , and R 7 are independently selected from hydrogen, halogen, alkyl, hydroxyl, alkenyl, and diene Group, amino group, aldehyde group, amino group, carboxyl group, acid anhydride or mercapto group, R 8 is selected from one of hydroxyl, alkenyl, dienyl, amino, carboxyl group, acid anhydride, mercapto group, halogen. m is an integer of 0-10, n is an integer of 0-20, and p is an integer of 1-10. X is hydrogen or halogen.
需要说明的是:在本发明中,R 1、R 2、R 3可以是与不饱和碳碳双键相连的基团,可以是具有良好疏水性能的基团。R 4是反应官能团与功能基团的桥联基团。R 5、R 6、R 7是与苯环相连的基团。R 8是在等离子体作用下可发生进一步反应、使分子之间形成交联网状结构的基团。X是氢或者疏水碳链上的取代基。 It should be noted that in the present invention, R 1 , R 2 , and R 3 may be a group connected to an unsaturated carbon-carbon double bond, or may be a group having good hydrophobic properties. R 4 is a bridging group between the reactive functional group and the functional group. R 5 , R 6 and R 7 are groups connected to the benzene ring. R 8 is a group that can undergo further reaction under the action of plasma to form a cross-linked structure between molecules. X is hydrogen or a substituent on a hydrophobic carbon chain.
进一步地,R 4是短桥联基团,是键或者亚甲基,苯环上的基团R 5、R 6为氢,R 7为氢或者卤素。 Further, R 4 is a short bridge group, which is a bond or a methylene group, and the groups R 5 and R 6 on the benzene ring are hydrogen, and R 7 is hydrogen or halogen.
进一步地,R 8是在低功率放电下即可形成反应活性基团的取代基,选自乙烯基、1-丁二烯基、卤素、羟基中的一种。 Further, R 8 is a substituent that can form a reactive group under low power discharge, and is selected from one of vinyl group, 1-butadienyl group, halogen, and hydroxyl group.
进一步地,单体在常温常压下是一种液体,m为0、1、2或3,n为1、3、5、6、7或8。Further, the monomer is a liquid at normal temperature and pressure, m is 0, 1, 2, or 3, and n is 1, 3, 5, 6, 7, or 8.
进一步地,R 8为碳碳不饱和键,优选乙烯基。 Further, R 8 is a carbon-carbon unsaturated bond, preferably vinyl.
进一步地,所述基材为金属、光学仪器、衣服织物、电子器件或医疗器械等固体材料。Further, the substrate is a solid material such as metal, optical instrument, clothing fabric, electronic device or medical device.
本发明还公开了一种耐磨自交联的纳米涂层制备方法,包括以下步骤:The invention also discloses a method for preparing a wear-resistant self-crosslinking nano coating, which comprises the following steps:
(1)将基材等离子体室的反应腔体内,将反应腔体抽真空至1毫托-100托;(1) Inside the reaction chamber of the substrate plasma chamber, evacuate the reaction chamber to 1 mtorr-100 torr;
(2)通入等离子体源气体,开启等离子体放电,将单体经汽化后导入反应腔体进行化学气相沉积反应;(2) Into the plasma source gas, start the plasma discharge, the monomer after vaporization into the reaction chamber for chemical vapor deposition reaction;
(3)关闭等离子体放电,通入洁净的压缩空气或者惰性气体,腔体恢复至常压,打开真空腔体,取出基材。(3) Turn off the plasma discharge, pass clean compressed air or inert gas, the cavity returns to normal pressure, open the vacuum cavity, and take out the substrate.
进一步地,所述等离子体源气体为氦气,流量为1-500sccm。Further, the plasma source gas is helium gas, and the flow rate is 1-500 sccm.
进一步地,步骤(2)中等离子体室的温度控制在30-60℃。Further, the temperature of the plasma chamber in step (2) is controlled at 30-60 ° C.
进一步地,步骤(2)单体汽化温度为60℃-150℃,且是减压汽化。Further, in step (2), the vaporization temperature of the monomer is 60 ° C-150 ° C, and the vaporization is under reduced pressure.
进一步地,步骤(2)中单体是在真空度为0.1毫托-100托的条件下进行汽化。Further, in step (2), the monomer is vaporized under a vacuum of 0.1 mtorr to 100 torr.
进一步地,所述等离子体放电方式为射频放电、微波放电、中频放电、潘宁放电或电火花放电。Further, the plasma discharge method is radio frequency discharge, microwave discharge, intermediate frequency discharge, Penning discharge or electric spark discharge.
进一步地,所述等离子体放电为微波放电,频率为500MHz-300KMHz。Further, the plasma discharge is a microwave discharge with a frequency of 500MHz-300KMHz.
进一步地,等离子体放电时间为10s-14400s。Further, the plasma discharge time is 10s-14400s.
与现有技术相比,本发明通过在氟碳树脂的单体中引入刚性苯环以及在苯环上引入可用于化学反应形成交联点的官能团,使氟碳树脂之间形成体型网状结构,增加涂层的致密性,提高了涂层的硬度、耐磨性。本发明采用等离子体纳米镀膜技术引发不同官能团之间的反应,避免了常规化学反应催化路径选择的难题,镀膜工艺过程控制容易,大大提高了涂层质量的稳定性。Compared with the prior art, the present invention introduces a rigid benzene ring into the monomer of the fluorocarbon resin and introduces a functional group on the benzene ring that can be used for chemical reaction to form a cross-linking point, so that the fluorocarbon resin forms a bulk network structure , Increase the density of the coating, improve the hardness and wear resistance of the coating. The invention adopts the plasma nano-coating technology to initiate the reaction between different functional groups, avoiding the difficulty of selecting the conventional chemical reaction catalytic path, the coating process is easy to control, and the stability of the coating quality is greatly improved.
实施例1Example 1
一种耐磨自交联的纳米涂层制备方法,经过以下几个步骤:A preparation method of wear-resistant self-crosslinking nano-coating, after the following steps:
(1)将汽车后视镜片放置于等离子体室的反应腔体内,对反应腔体连续抽真空至1毫托,通入等离子体源气体,开启等离子体放电;(1) Place the rear-view lens of the car in the reaction chamber of the plasma chamber, continuously evacuate the reaction chamber to 1 mtorr, pass the plasma source gas, and start the plasma discharge;
(2)将单体S1经汽化后导入反应腔体进行化学气相沉积反应;(2) The monomer S1 is vaporized and then introduced into the reaction chamber for chemical vapor deposition reaction;
(3)放电结束后通入压缩空气,腔体恢复至常压,打开真空腔体,取出基材。(3) After the discharge is completed, compressed air is introduced to return the chamber to normal pressure, the vacuum chamber is opened, and the substrate is taken out.
其中,等离子体源气体为氦气,流量为50sccm,等离子体室的温度控制在30℃。单体汽化温度为60℃。单体是在真空度为1毫托条件下进行汽化,单体通入流量为250μL/min,通入时间为3000s。等离子体放电为微波放电,频率为500MHz。Among them, the plasma source gas is helium, the flow rate is 50 sccm, and the temperature of the plasma chamber is controlled at 30 ° C. The vaporization temperature of the monomer is 60 ° C. The monomer is vaporized under a vacuum of 1 mTorr, the monomer inflow rate is 250 μL / min, and the infusion time is 3000 s. The plasma discharge is a microwave discharge with a frequency of 500MHz.
其中,更为优选地,本实施例等离子体放电可以分为两个阶段,即在单体通入之前的预处理阶段和单体通入之后的沉积阶段。所述的预处理阶段放电功率为2-500W,持续放电时间为1-3600s。沉积阶段的的放电方式可与预处理阶段相同,也可以改变,放电时间持续到沉积结束。Among them, more preferably, the plasma discharge in this embodiment may be divided into two stages, namely, a pretreatment stage before the monomer is introduced and a deposition stage after the monomer is introduced. The discharge power in the pretreatment stage is 2-500W, and the continuous discharge time is 1-3600s. The discharge method in the deposition stage can be the same as in the pretreatment stage, or it can be changed. The discharge time continues until the end of the deposition.
实施例2Example 2
与实施例1相比,步骤(1)抽真空至100毫托;步骤(2)中 单体S1更换为单体S2,单体汽化温度为120℃,汽化真空度为200毫托,单体通入时间为3500s,其他条件不变。Compared with Example 1, step (1) is evacuated to 100 mtorr; in step (2), monomer S1 is replaced with monomer S2, the vaporization temperature of the monomer is 120 ° C, the vaporization vacuum is 200 mtorr, the monomer The access time is 3500s, and other conditions remain unchanged.
实施例3Example 3
与实施例1相比,步骤(1)抽真空至50毫托;步骤(2)中单体S1更换为单体S3,单体汽化温度为80℃,汽化真空度为70毫托,单体通入时间为4000s,其他条件不变。Compared with Example 1, step (1) is evacuated to 50 mtorr; in step (2), monomer S1 is replaced with monomer S3, the vaporization temperature of the monomer is 80 ° C, the vaporization vacuum is 70 mtorr, the monomer The access time is 4000s, and other conditions remain unchanged.
实施例4Example 4
与实施例1相比,步骤(1)抽真空至60毫托;步骤(2)中单体S1更换为单体S4,单体汽化温度为100℃,汽化真空度为90毫托,单体通入时间为4000s,其他条件不变。Compared with Example 1, step (1) is evacuated to 60 mtorr; in step (2), monomer S1 is replaced with monomer S4, the vaporization temperature of the monomer is 100 ° C, the vaporization vacuum is 90 mtorr, the monomer The access time is 4000s, and other conditions remain unchanged.
实施例5Example 5
与实施例1相比,步骤(1)抽真空至60毫托;步骤(2)中 单体S1更换为单体S5,单体汽化温度为100℃,汽化真空度为70毫托,单体通入时间为7200s,其他条件不变。Compared with Example 1, step (1) is evacuated to 60 mtorr; in step (2), monomer S1 is replaced with monomer S5, the vaporization temperature of the monomer is 100 ° C, the vaporization vacuum is 70 mtorr, the monomer The access time is 7200s, other conditions remain unchanged.
实施例6Example 6
与实施例1相比,将等离子体室的温度控制在50℃,其他条件不变。Compared with Example 1, the temperature of the plasma chamber is controlled at 50 ° C, and other conditions remain unchanged.
实施例7Example 7
与实施例2相比,将微波放电频率改为10KMHz,其他条件不变。Compared with Example 2, the microwave discharge frequency is changed to 10 KMHz, and other conditions remain unchanged.
实施例8Example 8
与实施例2相比,将单体通入流量改为400μL/min,其他条件不变。Compared with Example 2, the monomer flow rate was changed to 400 μL / min, and other conditions remained unchanged.
实施例9Example 9
与实施例2相比,将氦气流量改为20μL/min,其他条件不变。Compared with Example 2, the flow rate of helium gas was changed to 20 μL / min, and other conditions remained unchanged.
对比实施例1Comparative Example 1
与实施例2相比,将单体S2更换为2-(全氟己基)乙基甲基丙烯酸酯。Compared with Example 2, the monomer S2 was replaced with 2- (perfluorohexyl) ethyl methacrylate.
对比实施例2Comparative Example 2
与实施例2相比,将单体S2更换为2-(全氟丁基)丙烯酸乙酯将上述各实施例施镀后的基材,进行涂层厚度、水接触角、铅 笔硬度等级、耐磨性的测试。Compared with Example 2, the monomer S2 was replaced with 2- (perfluorobutyl) ethyl acrylate. The substrate after the above examples was plated, and the coating thickness, water contact angle, pencil hardness level, resistance Abrasive test.
纳米涂层厚度,使用美国Filmetrics-F20-UV-薄膜厚度测量仪进行检测。The thickness of the nano-coating is tested using the US Filmetrics-F20-UV-film thickness measuring instrument.
纳米涂层水接触角,根据GB/T 30447-2013标准进行测试。Nano-coating water contact angle is tested according to GB / T 30447-2013 standard.
铅笔硬度等级测试方法,根据ASTM D3363铅笔硬度进行测试。The pencil hardness test method is based on ASTM D3363 pencil hardness.
耐磨性测试,在酒精耐磨试验机进行,选择橡皮擦测试夹具进行测试,测试条件为载荷100g,转速为60cycle/min,测试涂层破坏时的循环次数。The abrasion resistance test is conducted in an alcohol abrasion tester. The eraser test fixture is selected for the test. The test condition is a load of 100g, a rotation speed of 60cycle / min, and the number of cycles when the coating is damaged.
表1Table 1
本技术方案采用的单体引入了刚性基团苯环以及可用于交联的多官能团,使涂层形成过程中分子链之间的作用更强,涂层致密性得到提高,进而耐磨性和涂层的硬度等级均有显著的改善。The monomer used in this technical solution introduces a rigid group benzene ring and a multifunctional group that can be used for cross-linking, so that the role between the molecular chains during the formation of the coating is stronger, the density of the coating is improved, and then the wear resistance and The hardness level of the coating has been significantly improved.
最后应说明的是:以上各实施例仅用以说明本发明的技术方案, 而非对其限制;尽管参照前述各实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, rather than limiting it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: The technical solutions described in the foregoing embodiments can still be modified, or some or all of the technical features can be equivalently replaced; and these modifications or replacements do not deviate from the essence of the corresponding technical solutions of the technical solutions of the embodiments of the present invention. range.
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| GB2579871B (en) * | 2019-02-22 | 2021-07-14 | P2I Ltd | Coatings |
| CN111289733A (en) * | 2020-03-29 | 2020-06-16 | 深圳天溯计量检测股份有限公司 | Calibration method for rotor-free vulcanizer torque calibrator |
| CN115400930A (en) * | 2021-05-26 | 2022-11-29 | 江苏菲沃泰纳米科技股份有限公司 | Plasma polymerization coating, preparation method and device |
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