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WO2020075994A1 - Appareil de fabrication de cellule solaire - Google Patents

Appareil de fabrication de cellule solaire Download PDF

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Publication number
WO2020075994A1
WO2020075994A1 PCT/KR2019/012481 KR2019012481W WO2020075994A1 WO 2020075994 A1 WO2020075994 A1 WO 2020075994A1 KR 2019012481 W KR2019012481 W KR 2019012481W WO 2020075994 A1 WO2020075994 A1 WO 2020075994A1
Authority
WO
WIPO (PCT)
Prior art keywords
shower
chamber
solar cell
space
chalcogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2019/012481
Other languages
English (en)
Korean (ko)
Inventor
전찬욱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Research Cooperation Foundation of Yeungnam University
Original Assignee
Research Cooperation Foundation of Yeungnam University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020190109817A external-priority patent/KR102332969B1/ko
Application filed by Research Cooperation Foundation of Yeungnam University filed Critical Research Cooperation Foundation of Yeungnam University
Publication of WO2020075994A1 publication Critical patent/WO2020075994A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/12—Active materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a solar cell manufacturing apparatus, and more particularly, to a selenium supply apparatus for manufacturing a thin film solar cell.
  • the solar cell has a p-n junction in which a p-type semiconductor layer and an n-type semiconductor layer are bonded, and sunlight reaches the p-n junction to generate photovoltaic power to generate electrical energy.
  • silicon semiconductor-based solar cells which are first-generation solar cells
  • development of a compound thin-film solar cell which is a second-generation solar cell, has been developed for reasons of light weight reduction, economic efficiency, productivity, and product applicability.
  • a material for use as a light absorbing layer in a compound thin film solar cell there is a chalcopyrite-based compound semiconductor material, for example, CuInSe2.
  • a chalcopyrite-based compound semiconductor material for example, CuInSe2.
  • CIGS quaternary compound containing copper-indium-gallium-selenium
  • CIGSS copper-indium-gallium-selenium-sulfur
  • CIGS or CIGSS is a multi-membered compound, it is very difficult to manufacture a light absorbing layer using such a material.
  • selenization performed during the manufacturing process of the light absorbing layer uses H2Se gas, which is highly toxic and corrosive, so requires caution in use, and has the disadvantage of additional cost due to the installation of a special waste gas treatment device.
  • selenium when forming a selenium layer by vapor deposition or evaporation, tends to form a gas having a high molecular weight, and uneven solidification rapidly occurs even in a small temperature gradient in the chamber, so that the light absorbing layer has an uneven selenium concentration gradient. It may have a, thereby reducing the chalcogenation reactivity and there is a problem of forming a light-repellent layer having a large surface roughness. These problems may reduce the efficiency of the solar cell.
  • the inventor of the present application has revealed that it is possible to supply uniform selenium vapor over a large area by using a porous medium in relation to the "nozzle-free selenium shower" process and apparatus presented in the Korean Registered Patent (Registration No. 10-1326770). .
  • the 4-inch area of NFS has been verified, and in order to utilize it as a device for mass production of CIGS, it must operate in an area of 0.7x1.6 m 2 or more.
  • graphite which is a representative porous medium, is not commercially supplied in a size of 0.7x1.2 m 2 or more, and thus has a limitation in that it is impossible to manufacture NFS required for mass production devices.
  • the present invention aims to solve the problem of providing a solar cell manufacturing apparatus capable of supplying uniform selenium vapor over a large area.
  • the present invention is to solve the problem of providing a solar cell manufacturing apparatus having a shower module having a size of 1.1x1.25 m 2 or more for mass production.
  • the chamber is provided to seat the substrate therein, so that the chalcogen component can be applied in a gaseous state to the substrate seated in the chamber, to accommodate the chalcogen source
  • a shower module including a plurality of shower heads having a space portion, and a first heater provided to heat the shower module in the chamber, each shower head, the pores provided so that the chalcogen source accommodated in the space portion passes through the shower head
  • each shower head is provided on the edge of the bottom member to form the space member and the space portion disposed to face one surface of the substrate seated in the chamber, and at least a part of the side wall having at least one through hole
  • a solar cell manufacturing apparatus is provided.
  • a chamber provided to seat a substrate therein, a plurality of first spaces for receiving a chalcogen source so that a chalcogen component can be applied in a gaseous state to a substrate seated in the chamber
  • the adjacent space is partitioned through a partition wall, and includes a shower module having one or more through-holes formed in the partition wall, and a first heater provided to heat the shower module in the chamber, wherein the shower module includes a first space part
  • a solar cell manufacturing apparatus is provided that includes pores provided so that the accepted chalcogen source passes through the shower module.
  • the solar cell manufacturing apparatus related to at least one embodiment of the present invention, it is possible to supply uniform selenium vapor over a large area, and it can correspond to a size of 1.1x1.25 m 2 or more for mass production. .
  • FIG. 1 is a schematic view showing a solar cell manufacturing apparatus according to a first embodiment of the present invention.
  • FIG. 2 and 3 are views illustrating the shower module shown in FIG. 1.
  • FIG. 4 is a plan view showing the shower head.
  • FIG. 5 is a schematic view showing a solar cell manufacturing apparatus according to a second embodiment of the present invention.
  • FIG. 6 is a plan view of the shower module illustrated in FIG. 5.
  • FIG. 1 is a schematic view showing a solar cell manufacturing apparatus 100 related to the first embodiment of the present invention
  • FIGS. 2 and 3 are views showing the shower module 200 shown in FIG. 1
  • FIG. 4 is a shower head It is a top view showing 210.
  • the solar cell may include a substrate 101, a lower electrode sequentially positioned on the substrate 101, a light absorbing layer, a buffer layer, and an upper electrode.
  • the substrate 101 is any structure capable of manufacturing a solar cell such as a wafer, chip, quartz substrate, glass substrate, or PCB substrate, and may be any type of substrate or a substrate on which various layers can be formed.
  • a substrate is a structure in which at least one layer including at least one of copper, indium, and gallium is formed on a substrate, or a structure in which a composite layer consisting of a copper layer, an indium layer, and a gallium layer is formed Can be
  • the light absorbing layer may include a material that absorbs sunlight and converts it into an electrical signal, and may include a p-type semiconductor material.
  • the light absorbing layer may include at least one of copper (Cu), indium (In), and gallium (Ga), for example.
  • the light absorbing layer may further include a chalcogenide material, for example, selenium (Se), sulfur (S), or a mixture thereof.
  • the light absorbing layer may include a quaternary material of copper-indium-gallium-selenium (CIGS) or may include a quaternary material of copper-indium-gallium-selenium-sulfur (CIGSS).
  • the solar cell manufacturing apparatus 100 is a device for introducing a chalcogenide material through a shower module 200 having a microporous structure and conducting a chalcogenation reaction, and uses a large area light absorbing layer for mass production. Can form.
  • the shower module 200 means NFS introduced in the background art, and means for mass production means that a light absorbing layer having a size of 1.1x1.25 m 2 or more is formed.
  • the solar cell manufacturing apparatus 100 includes a chamber 110, a shower module 200, and a first heater 130.
  • the solar cell manufacturing apparatus 100 includes a chamber 110 provided to seat the substrate 101 therein.
  • the chamber 110 includes a space portion capable of controlling the atmosphere.
  • the chamber 110 may be made of metal such as aluminum or stainless steel, tempered glass, quartz, or graphite.
  • the chamber 110 is made of a transparent material such as tempered glass or quartz, rapid heat treatment can be easily performed.
  • the solar cell manufacturing apparatus 100 is a space portion 211, 221 for receiving the chalcogen source, so that the chalcogen component is applied (F) to the substrate 101 seated in the chamber 110 in a gaseous state ,
  • a shower module 200 including a plurality of shower heads 210, 220, and 230 having 231.
  • the solar cell manufacturing apparatus 100 includes a first heater 130 arranged to heat the shower module 200 in the chamber 110.
  • the first heater 130 may be disposed inside the chamber or outside the chamber.
  • the solar cell manufacturing apparatus 100 includes a support 120 for supporting the substrate 101 in the chamber 110, and the support 120 includes a second heater for heating the substrate 101. can do.
  • the chalcogen source includes a chalcogen material selenium (Se) or sulfur (S), and may be in a fluid state, for example, gas or liquid.
  • the chalcogen source may be changed into a liquid phase or a gas phase depending on the temperature.
  • Each of the shower heads 210, 220, and 230 includes pores provided so that the chalcogen source accommodated in the space passes through the shower head.
  • the shower modules 200 and 300 may be formed of graphite or quartz having pores.
  • each shower head (210, 220, 230) constituting the shower module 200 may be formed of graphite having a density in the range of 1.75 g / cm 3 to 1.86 g / cm 3, for example.
  • it may be formed of graphite having a porosity in the range of 6% to 11%, and as another example, it may be quartz having fine pores.
  • the shower heads 210, 220, and 230 may be in the form of a block having a space portion with an open top. The block may have a substantially hexahedral (eg, cuboid) shape.
  • the shower module 200, the bottom member of each shower head (210, 220, 230) and one surface (101a) of the substrate 101 inside the chamber 110 may be installed so as to be spaced apart by a first interval, ,
  • the first gap may range from approximately 0.1 mm to approximately 3 mm, and inert gases may be filled therebetween.
  • Liquid chalcogenide source 151 may be supplied to the spaces 211, 221, and 231 of the showerhead.
  • the chalcogen source 151 is made of selenium
  • the solidified selenium is heated by heating the solid selenium to a temperature between 220 ° C. or higher, which is the melting point of selenium, and 685 ° C. (211, 221, 231).
  • the chalcogen source 151 in the liquid state can be drawn into the pores in each showerhead.
  • the pores in the shower head (210, 220, 230) is provided to pass only the gaseous chalcogenide gas, rather than directly passing through the liquid chalcogenide source.
  • the gaseous chalcogen (see symbol F) passing through the shower head is uniformly supplied to one surface 101a of the substrate 101.
  • the shower module 200 has a plurality of shower heads 210, 220, 230 arranged in a mosaic It can take the form.
  • the bottom member of the shower head (210, 220, 230) may have a first surface (bottom surface of the bottom member) facing the one surface (101a) of the substrate has a square shape.
  • the cross-sectional area of the first surface of the floor member is smaller than the cross-sectional area of one surface of the substrate 101 to which the chalcogen component is applied.
  • the first surface has a length (v) of one side. Is 0.7 m or more, and the length h of another side may be 0.55 m or more.
  • the thickness of the side wall 213 may be 1 cm or more.
  • the thickness of the side wall 213 and the bottom member 212 may be configured identically.
  • a plurality of through-holes 214, 224, and 234 are formed on the side walls 213, 223, and 233 of the shower heads 210, 220, and 230, and may be used for fastening between adjacent shower heads.
  • the shower module, the two adjacent shower heads (210, 220, 230) are arranged such that the sidewalls (213, 223, 233) of the through holes (214, 224, 234) are formed.
  • the solar cell manufacturing apparatus 100 is fastened to fix the shower heads through the through holes 214, 224, and 234 formed on each side wall of two adjacent shower heads 210, 220, and 230. Means 250.
  • the fastening means 250 may include a conventional screw and nut.
  • each showerhead has two showerheads to perform a function of uniformly maintaining the selenium vapor pressure in the space portion of the showerhead.
  • the spaces of two adjacent showerheads can be left in the form of a through hole to fluidly connect them.
  • fastening means may be provided in some of the through holes of two adjacent shower heads, and fastening means may not be provided in the remaining through holes.
  • the chalcogen component liquid chalcogen source
  • the chalcogen component is the bottom member 212, 222, 232 ) And side walls 213, 223, and 233, respectively.
  • the chalcogen component that has passed through the sidewall of one shower body may be moved to the space portion of the adjacent shower body through the through hole, or may be moved to the space portion of the adjacent shower body through the sidewall.
  • the first heater 130 may be composed of various types of heaters, such as an electric heater or a laser or induction heating heater or other combustion heater having a heating coil or a heating wire.
  • the first heater 130 may be configured in various forms such as a box type, a cylinder type, or a heating wire.
  • the first heater 130 is provided to dissipate heat toward the shower module 200 so that the liquefied selenium contained in the spaces 211, 222, and 232 vaporize.
  • the first heater 130 may be disposed on the open upper side of the spaces 211, 222 and 232 of the shower heads 210, 220 and 230.
  • the solar cell manufacturing apparatus 100 includes a chamber 110 provided to seat a substrate therein, and a chalcogen component applied to a substrate seated in the chamber in a gaseous state
  • the shower module 200 including a plurality of shower heads having a space for accommodating the chalcogen source, the first heater 130 and the chalcogen source 151 arranged to heat the shower module in the chamber It is accommodated, and includes a supply unit 140 provided to supply a chalcogen source to the space portion of each showerhead.
  • each shower head includes pores provided so that the chalcogen source accommodated in the space passes through the shower head, and each shower head is a floor member disposed to face one surface of the substrate seated in the chamber. And it is provided on the edge of the floor member to form the space portion, and includes a side wall having at least one through hole in at least a partial region.
  • the supply unit 140, the one or more accommodation unit 150 is accommodated chalcogen source 151, the third heater 160 provided to heat the accommodation unit 150 and the receiving unit and the space of the shower head fluid movement It may include one or more supply lines 170 provided to connect as possible. Further, the third heater may be provided to maintain the chalcogen source in the receiving portion in a liquid state. That is, the third heater 160 functions to heat the selenium accommodated in the accommodating unit 150 to be liquefied.
  • a plurality of supply parts may be provided for each shower head, and a plurality of supply lines may be provided for each shower head, and through this structure, the amount of selenium supplied in each shower head can be uniformly maintained.
  • FIG. 5 is a schematic view showing a solar cell manufacturing apparatus 200 according to a second embodiment of the present invention
  • FIG. 6 is a plan view of the shower module 300 shown in FIG. 5.
  • the solar cell manufacturing apparatus 200 related to the second embodiment differs from the solar cell manufacturing apparatus 100 related to the first embodiment only in the structure of the shower module 300, and the remaining components are the same.
  • the chalcogen component may be applied in a gaseous state to the chamber 210 provided to seat the substrate 201 therein, and the substrate seated in the chamber 210.
  • Has a plurality of first space portion (S1 to S9) for receiving the chalcogen source the adjacent first space portion (S1 to S9) is partitioned through the partition wall, the partition wall 330 has one or more through holes ( 341, 351 includes a formed shower module 30 and a first heater 230 provided to heat the shower module in the chamber 210.
  • the solar cell manufacturing apparatus 200 includes a support 220 for supporting the substrate 201 in the chamber 210, and the support 220 includes a second heater for heating the substrate 201. can do.
  • the shower module 300 includes pores provided to allow the chalcogen source accommodated in the first space units S1 to S9 to pass through the shower module 300.
  • the shower module 300 may be formed of graphite or quartz having pores.
  • the shower module 300 may be formed of graphite having a density in the range of 1.75 g / cm 3 to 1.86 g / cm 3 , for example.
  • the shower module may include graphite provided to have a predetermined porosity, and may be formed of graphite having a porosity in a range of 6% to 11%, for example, having fine pores. It can be quartz.
  • the shower module 300 includes a floor member 310 and a second space portion disposed to face one surface 201a of the substrate 201 seated in the chamber 210. It includes a side wall 320 provided on the edge of the member 310.
  • the partition wall 300 is located inside the sidewall 320 and includes a first member 340 extending in a first direction and a second member 350 arranged to intersect the first member 340. can do. At this time, the first member 340 and the second member 350 may be disposed to cross at right angles.
  • the first member 340 and the second member 350 are for preventing deformation of the shower module 300.
  • a graphite plate having a size of 1 X 1 m 2 may be bent by its own weight.
  • the first member 340 and the second member 350 function as a reinforcing member to prevent such sagging.
  • each of the first member 340 and the second member 350 may be configured in a continuous shape along a direction transverse to the sidewall 320, and a plurality of bars are intermittently spaced at predetermined intervals. It may be configured in a form arranged apart.
  • the second space portion is divided into a plurality of first space portions S1 to S9 by the first and second members.
  • the chalcogen component accommodated in any one of the first space portions S1 to S9 passes through the partition wall 330 or through holes 341 and 351, and another adjacent first space portion S1. To S9).
  • the bottom member 310, the side wall 320 and the partition wall 330 of the shower module 300 is integrally formed. That is, through the single shower module 300, the product of the horizontal and vertical lengths may constitute the floor member 310 having a size of 1.1x1.25 m 2 or more.
  • the solar cell manufacturing apparatus 200 is provided with a plurality of agents for accommodating the chalcogen source so that the chalcogen component is applied in a gaseous state to the chamber 210 provided inside the substrate, and the substrate mounted in the chamber.
  • a first heater (230) having a space portion, the adjacent space portion is partitioned through the partition wall (330), the shower module (300) having one or more through holes formed in the partition wall (330), and arranged to heat the shower module in the chamber )
  • a supply unit 240 disposed outside the chamber, the chalcogen source is received, and provided to supply the chalcogen source 251 to each first space.
  • the supply unit 240 includes one or more receiving units 250 in which the chalcogen source 251 is accommodated, and a third heater 260 provided to heat the receiving units 250.
  • the supply unit 240 includes one or more supply lines 270 provided to fluidly connect the receiving unit 250 and the first space units S1 to S9 of the shower head 300.
  • the third heater 260 may be provided to maintain the chalcogen source in the receiving portion 250 in a liquid state. That is, the third heater 260 functions to heat the selenium accommodated in the accommodating portion 250 to remain in a liquefied state.
  • a plurality of supply units 240 may be provided for each first space unit in the shower module, and a plurality of supply lines may be provided for each first space unit in the shower module. 1
  • the selenium supply in the space portion can be maintained uniformly.
  • the solar cell manufacturing apparatus it is possible to supply uniform selenium vapor over a large area, and it can correspond to a size of 1.1x1.25 m 2 or more for mass production.

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  • Photovoltaic Devices (AREA)

Abstract

La présente invention concerne un appareil de fabrication d'une cellule solaire, l'appareil comprenant un module de douche comprenant une pluralité de pommes de douche, chacune ayant un espace pour recevoir une source de chalcogène, pour permettre une alimentation uniforme de vapeur de sélénium sur une grande surface et pour permettre à un composant chalcogène d'être appliqué dans un état gazeux à un substrat placé de façon stable dans une chambre. Chacune des pommes de douche comprend : des pores formés pour permettre à la source de chalcogène contenue dans l'espace dans la chambre de passer à travers la pomme de douche ; un élément inférieur disposé de façon à faire face à une surface du substrat placée de façon stable dans la chambre ; et des parois latérales formées sur les bords de l'élément inférieur pour définir l'espace et ayant au moins un trou traversant formé à travers au moins une région partielle de celui-ci.
PCT/KR2019/012481 2018-10-12 2019-09-26 Appareil de fabrication de cellule solaire Ceased WO2020075994A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2018-0121490 2018-10-12
KR20180121490 2018-10-12
KR10-2019-0109817 2019-09-05
KR1020190109817A KR102332969B1 (ko) 2018-10-12 2019-09-05 태양전지 제조장치

Publications (1)

Publication Number Publication Date
WO2020075994A1 true WO2020075994A1 (fr) 2020-04-16

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PCT/KR2019/012481 Ceased WO2020075994A1 (fr) 2018-10-12 2019-09-26 Appareil de fabrication de cellule solaire

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WO (1) WO2020075994A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113512701A (zh) * 2021-06-29 2021-10-19 浙江尚越新能源开发有限公司 一种cigs柔性太阳能电池片硒源的线性源装置
KR20250120968A (ko) 2022-12-06 2025-08-11 미쯔비시 케미컬 주식회사 감광성 착색 수지 조성물, 경화물, 격벽, 유기 전계 발광 소자, 컬러 필터 및 화상 표시 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214528B2 (fr) * 1974-03-29 1977-04-22
KR101326770B1 (ko) * 2012-02-24 2013-11-20 영남대학교 산학협력단 태양 전지 제조 방법
KR101466835B1 (ko) * 2013-09-12 2014-11-28 송웅섭 샤워헤드 조립체
US20160225933A1 (en) * 2015-02-03 2016-08-04 Lg Electronics Inc. Metal organic chemical vapor deposition apparatus for solar cell
KR101855654B1 (ko) * 2016-12-23 2018-05-08 주식회사 테스 대면적 샤워헤드 어셈블리

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214528B2 (fr) * 1974-03-29 1977-04-22
KR101326770B1 (ko) * 2012-02-24 2013-11-20 영남대학교 산학협력단 태양 전지 제조 방법
KR101466835B1 (ko) * 2013-09-12 2014-11-28 송웅섭 샤워헤드 조립체
US20160225933A1 (en) * 2015-02-03 2016-08-04 Lg Electronics Inc. Metal organic chemical vapor deposition apparatus for solar cell
KR101855654B1 (ko) * 2016-12-23 2018-05-08 주식회사 테스 대면적 샤워헤드 어셈블리

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113512701A (zh) * 2021-06-29 2021-10-19 浙江尚越新能源开发有限公司 一种cigs柔性太阳能电池片硒源的线性源装置
KR20250120968A (ko) 2022-12-06 2025-08-11 미쯔비시 케미컬 주식회사 감광성 착색 수지 조성물, 경화물, 격벽, 유기 전계 발광 소자, 컬러 필터 및 화상 표시 장치

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