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WO2020067157A1 - Élément d'oscillation en quartz et oscillateur à quartz - Google Patents

Élément d'oscillation en quartz et oscillateur à quartz Download PDF

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Publication number
WO2020067157A1
WO2020067157A1 PCT/JP2019/037602 JP2019037602W WO2020067157A1 WO 2020067157 A1 WO2020067157 A1 WO 2020067157A1 JP 2019037602 W JP2019037602 W JP 2019037602W WO 2020067157 A1 WO2020067157 A1 WO 2020067157A1
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Prior art keywords
crystal
center
distance
excitation electrode
electrode
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PCT/JP2019/037602
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English (en)
Japanese (ja)
Inventor
威 鎌田
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Priority to JP2020549287A priority Critical patent/JP7061275B2/ja
Publication of WO2020067157A1 publication Critical patent/WO2020067157A1/fr
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Definitions

  • the present invention relates to a crystal resonator and a crystal resonator.
  • Quartz crystal vibrating elements having thickness shear vibration as main vibration are widely used as signal sources of reference signals used in oscillators and bandpass filters. In such a crystal vibrating element, it is required to reduce an equivalent series resistance value by good vibration characteristics.
  • a crystal blank including a substantially rectangular parallelepiped-shaped vibrating portion, a peripheral portion having a smaller vertical thickness along the edge of the vibrating portion than the vibrating portion, and a vibrating portion.
  • a crystal element which is longer and has an excitation electrode portion provided inside the vibration portion is disclosed.
  • the crystal element disclosed in Patent Document 1 has a cantilever structure in which a lead portion (connection electrode) is provided on one short side of the crystal piece, that is, a bonding portion between the crystal piece and the substrate is provided on one side of the crystal piece. Having. When the crystal element is viewed in plan along the thickness direction, both the vibrating part (central part) and the excitation electrode part are provided on the side far from the bonding location in the longitudinal direction of the crystal piece. Specifically, the center of the vibrating part (central part) is located farther from the bonding point than the center of the crystal blank, and the center of the excitation electrode part is farther from this bonding point than the center of the vibrating part. positioned.
  • the center of the excitation electrode portion is located farther from the bonding portion than the center of the vibration portion, the center of the excitation electrode portion is located farther away from the center of the crystal blank than the center of the vibration portion, The excitation electrode portion is provided at a position deviated from the main surface of the vibrating portion and the outer edge of the crystal blank. Due to the bias of the position of the excitation electrode portion, a problem such as a decrease in symmetry of the vibration distribution occurs.
  • the excitation electrode portion is located on the side farther from the bonding portion with respect to the main surface of the vibration portion, the distance from one side of the excitation electrode portion on the side closer to the bonding portion to one side of the vibration portion on the same side is reduced. In other words, the portion of the vibrating portion on the side close to the bonding portion that is not sandwiched by the excitation electrode portion is widened, and vibration leakage or the like occurs. As described above, problems such as a decrease in symmetry of vibration distribution and an increase in vibration leakage occur.
  • the present invention has been made in view of such circumstances, and an object of the present invention is to provide a crystal resonator element and a crystal resonator that can obtain good vibration characteristics.
  • a crystal resonator element includes a crystal blank having a central portion, a peripheral portion located around the central portion, and having a smaller dimension in the thickness direction than the central portion, and both sides of the central portion in the thickness direction. And a connection electrode provided on the peripheral portion and electrically connected to the excitation electrode, wherein the crystal vibration element When viewed in plan, the center of the center main surface is located farther from the connection electrode than the center of the crystal piece, and the center of the excitation electrode of the excitation electrode is closer to the connection electrode than the center of the center. It is located on the near side.
  • FIG. 2 is an exploded perspective view of the crystal resonator according to the first embodiment.
  • FIG. 2 is a sectional view taken along line II-II of FIG. 1.
  • FIG. 2 is a diagram for explaining a positional relationship between components of the crystal resonator element according to the first embodiment. It is a figure for explaining a physical relationship of each composition of a crystal vibrating element concerning a 2nd embodiment.
  • FIG. 1 is an exploded perspective view of the crystal unit 1
  • FIG. 2 is a sectional view taken along line II-II of FIG. In FIG. 2, illustration of various electrodes of the crystal resonator element 10 is omitted.
  • the quartz resonator 1 includes a quartz resonator (Quartz Crystal Resonator) 10, a cover member 20, and a substrate 30. Further, the crystal unit 1 includes conductive holding members 36a and 36b as an example of a conductive holding member, and a sealing frame 37 and a bonding member 40 as an example of a bonding material.
  • the cover member 20 is bonded to the substrate 30 via the sealing frame 37 and the bonding member 40 so as to cover the crystal resonator element 10. Is done.
  • the quartz vibrating element 10 is housed or enclosed in the internal space 26 of the holder constituted by the lid member 20 and the substrate 30.
  • the crystal resonator element 10, the cover member 20, and the substrate 30 each have a rectangular shape when the crystal resonator 1 is viewed in plan along the thickness direction of the crystal resonator 1. The directions of the long side and the short side coincide with each other.
  • the crystal resonator element 10 has a plate shape. Further, the crystal resonator element 10 has a crystal blank 11 and a plurality of electrodes provided on the crystal blank 11.
  • the plurality of electrodes include excitation electrodes 14a and 14b, extraction electrodes 15a and 15b, and electrode pads 16a and 16b.
  • the crystal blank 11 is an AT-cut crystal blank, and among the X, Y, and Z axes that are the crystal axes of the crystal, the Y and Z axes are arranged around the X axis from the Y axis. If the axes rotated in the direction of the Z axis by 35 degrees 15 minutes ⁇ 1 minute 30 seconds are the Y ′ axis and the Z ′ axis, respectively, a plane parallel to the plane specified by the X axis and the Z ′ axis (hereinafter, “ XZ ′ plane ”. The same applies to a plane specified by another axis.) As a main surface and is cut out from artificial quartz (Synthetic @ Quartz @ Crystal).
  • the crystal vibrating element 10 employing the AT-cut crystal blank 11 has a thickness-shear vibration mode as a main vibration.
  • the thickness direction is parallel to the Y′-axis direction.
  • the shape of the XZ ′ plane of the crystal blank 11 is rectangular, with the long side parallel to the X-axis direction and the short side parallel to the Z′-axis direction. Parallel to The details of each configuration of the crystal resonator element 10 will be described later.
  • each configuration of the crystal unit 1 will be described with reference to the XY'Z 'axis direction of the AT cut.
  • “view in plan” means that these configurations are viewed in plan along the thickness direction (Y′-axis direction) of the crystal unit 1 (each configuration).
  • the shapes of the crystal vibrating element 10, the lid member 20, and the substrate 30 are referred to as “planar shapes” of these configurations.
  • the state where the crystal unit 10, the cover member 20, and the substrate 30 are assembled to constitute the crystal unit 1 may be referred to as an "assembly state".
  • the lid member 20 has a box shape having an opening formed on the side to be joined to the substrate 30, and has a rectangular shape whose plan view is larger than the crystal resonator element 10 in plan view.
  • the lid member 20 has a top surface portion 21 and a side wall portion 22 formed so as to project from an outer edge of the top surface portion 21. Further, the lid member 20 has a concave inner surface 24 constituted by a top surface portion 21 and a surface inside the side wall portion 22. Each dimension of the inner surface 24 in the XY′Z′-axis direction is formed larger than that of the quartz-crystal vibrating element 10.
  • the material of the lid member 20 is not particularly limited, but is made of, for example, a conductive material such as a metal. According to this, a shielding function can be added by electrically connecting the lid member 20 to the ground potential.
  • the lid member 20 may have an insulating material or a composite structure of a conductive material and an insulating material.
  • the substrate 30 has a flat plate shape, and has a rectangular shape in plan view that is larger than the cover member 20 in plan view.
  • the substrate 30 supports the crystal resonator 10 so that it can be excited, and has a base 31 and a plurality of electrodes provided on the base 31.
  • the plurality of electrodes include connection electrodes 33a and 33b, via electrodes 34a and 34b, and external electrodes 35a to 35d.
  • the substrate 31 is a sintered body obtained by laminating and sintering a plurality of sheets made of an insulating ceramic, for example, alumina.
  • the base 31 may be formed of a glass material, a quartz material, a glass epoxy resin, or the like.
  • the glass material is, for example, silicate glass or a material containing a material other than silicate as a main component, and is a material having a glass transition phenomenon due to an increase in temperature.
  • the quartz material is, for example, AT-cut quartz.
  • the base 31 is preferably made of a heat-resistant material.
  • the base 31 may be a single layer or a plurality of layers, and in the case of a plurality of layers, includes the insulating layer formed on the outermost layer.
  • the base 31 has a first main surface 32a and a second main surface 32b, which are XZ 'planes facing each other, and a base 31 near the short side of the base 31 on the negative side of the X-axis and the base 31 in the Y'-axis direction. And two via holes 32c penetrating therethrough.
  • the first main surface 32a forms an internal space 26 that accommodates the crystal resonator element 10 together with the inner surface 24 toward the inner surface 24 of the lid member 20.
  • the second main surface 32b is configured so as to face a mounting substrate on which the crystal unit 1 (not shown) is mounted.
  • Connection electrodes 33a and 33b are provided near the short side of the first main surface 32a on the negative side in the X-axis direction. External electrodes 35a, 35b, 35c, and 35d are provided at four corners of the second main surface 32b. Via electrodes 34a and 34b are formed in the two via holes 32c. The external electrode 35a is electrically connected to the connection electrode 33a by the via electrode 34a, and the external electrode 35b is electrically connected to the connection electrode 33b by the via electrode 34b. The external electrodes 35a and 35b are provided at positions facing the connection electrodes 33a and 33b in the Y 'direction so that such electrical connection can be achieved.
  • each of the connection electrodes 33a and 33b and the external electrodes 35a to 35d is a metal film, for example, a structure in which a molybdenum (Mo) layer, a nickel (Ni) layer, and a gold (Au) layer are stacked from the lower layer to the upper layer.
  • the via electrodes 34a and 34b are formed by filling a metal material such as molybdenum in the via hole 32c, for example.
  • connection electrode 33a is a terminal for electrically connecting to the electrode pad 16a of the crystal resonator element 10
  • connection electrode 33b is a terminal for electrically connecting to the electrode pad 16b of the crystal resonator element 10.
  • the external electrodes 35a to 35d are terminals for electrically connecting to a mounting board (not shown).
  • the external electrodes 35a and 35b are input / output electrodes to which input / output signals of the crystal resonator element 10 are supplied, and the external electrodes 35c and 35d are electrodes to which input / output signals of the crystal resonator element 10 are not supplied. It is.
  • input / output signals of other electronic elements on a mounting board are not supplied to the external electrodes 35c and 35d.
  • at least one of the external electrodes 35c and 35d may be a ground electrode to which a ground potential is supplied.
  • the conductive holding member 36a electrically connects the electrode pad 16a of the crystal unit 10 to the connection electrode 33a of the substrate 30.
  • the conductive holding member 36b electrically connects the electrode pad 16b of the crystal unit 10 to the connection electrode 33b of the substrate 30.
  • the conductive holding members 36a and 36b are formed by, for example, thermally hardening a conductive adhesive.
  • the quartz vibrating element 10 is supported on the first main surface 32 a of the substrate 30 so as to be excitable by the conductive holding member 36.
  • the short side end of the crystal blank 11 where the electrode pads 16a and 16 are formed is a fixed end, and the other end is a free end.
  • the conductive holding members 36a and 36b are not distinguished, they are referred to as “conductive holding members 36”.
  • the sealing frame 37 is an example of a joining material, and joins the lid member 20 and the substrate 30 together with the joining member 40. Further, the sealing frame 37 is formed on the first main surface 32a, and has a rectangular frame shape formed outside the connection electrodes 33a, 33b so as to surround the connection electrodes 33a, 33b when viewed in a plan view. ing.
  • the sealing frame 37 is made of a material such as a conductive metal film, for example, a molybdenum (Mo) layer or a laminate of a molybdenum (Mo) layer, a nickel (Ni) layer, and a gold (Au) layer.
  • the joining member 40 is an example of a joining material, and joins the lid member 20 and the substrate 30 together with the sealing frame 37.
  • the joining member 40 is provided on the sealing frame 37.
  • the joining member 40 is, for example, a brazing member, and is made of a gold (Au) -tin (Sn) eutectic alloy or the like.
  • Au gold
  • Sn gold
  • the joining member 40 is not limited to a conductive material, and may be an insulating material such as a glass adhesive material such as a low-melting glass or a resin adhesive. According to this, the influence of oxidation is smaller than that of metal, the heating temperature can be suppressed, and the manufacturing process can be simplified.
  • the crystal resonator 1 by applying an alternating electric field between the pair of excitation electrodes 14 a and 14 b of the crystal resonator element 10 via the external electrodes 35 a and 35 b of the substrate 30, the thickness sliding is performed.
  • the crystal blank 11 (central portion 11a, which will be described later) vibrates in a predetermined vibration mode such as a vibration mode, and resonance characteristics associated with the vibration are obtained.
  • the crystal resonator element 10 includes an AT-cut crystal blank 11, a pair of excitation electrodes 14a and 14b, electrode pads 16a and 16b, and extraction electrodes 15a and 15b formed on the crystal blank 11. Prepare.
  • the crystal blank 11 is a plate-shaped member, and has a mesa structure.
  • the crystal blank 11 has a central portion 11a forming a mesa portion and a peripheral portion 11b having a smaller dimension in the thickness direction than the central portion 11a.
  • the central portion 11a and the peripheral portion 11b are integrated.
  • the crystal blank 11 has a first main surface 12a and a second main surface 12b on both sides in the thickness direction.
  • the first main surface 12a includes a central main surface 111a and a peripheral main surface 112a described below
  • the second main surface 12b includes a central main surface 111b and a peripheral main surface 112b described below.
  • the central portion 11a in the XY ′ plane, has a convex shape protruding from both sides in the thickness direction of the peripheral portion 11b.
  • the thickness of the central portion 11a and the peripheral portion 11b is uniform.
  • the central portion 11a In the XZ 'plane, the central portion 11a is formed substantially at the center side with respect to the outer edge of the crystal blank 11, and the peripheral portion 11b is formed around the central portion 11a so as to surround the central portion 11a.
  • the central portion 11a has a rectangular parallelepiped shape, and has central main surfaces 111a and 111b, which are XZ 'surfaces facing each other, and a side surface 13a formed perpendicular to the central main surface 111.
  • the central main surface 111 has a rectangular shape, with long sides parallel to the X-axis direction and short sides parallel to the Z'-axis direction. That is, the long side of the central main surface 111 is parallel to the long side of the crystal blank 11, and the short side of the central main surface 111 is parallel to the short side of the crystal blank 11.
  • the central main surfaces 111a and 111b are not distinguished, they are referred to as “central main surface 111”.
  • the peripheral portion 11b has a plate shape and has peripheral main surfaces 112a and 112b, which are XZ 'surfaces facing each other, and side surfaces 13b formed perpendicular to the peripheral main surface 112.
  • peripheral main surfaces 112a and 112b which are XZ 'surfaces facing each other, and side surfaces 13b formed perpendicular to the peripheral main surface 112.
  • the outer edge of the peripheral portion main surface 112 is the outer edge of the crystal blank 11, and the inner edge of the peripheral portion main surface 112 overlaps the outer edge of the central portion main surface 111. That is, the inner edge of the peripheral main surface 112 is connected to the side surface 13a of the central portion 11a.
  • peripheral main surfaces 112a and 112b are not distinguished, they are referred to as "peripheral main surfaces 112".
  • the pair of excitation electrodes 14a and 14b are electrodes for causing the central portion 11a to undergo shear vibration by applying a voltage, and the respective excitation electrodes 14a and 14b have the same configuration.
  • the excitation electrodes 14a and 14b are provided on the central main surfaces 111a and 111b so as to face each other with the central portion 11a interposed therebetween. In other words, the excitation electrodes 14a and 14b are arranged so as to substantially overlap when viewed in a plan view. Therefore, in the following description, the excitation electrode 14 (the excitation electrode 14a) provided on the central main surface 111a will be mainly described, and the description of the excitation electrode 14b provided on the central main surface 111b will be omitted. . When the pair of excitation electrodes 14a and 14b are not distinguished, they are referred to as “excitation electrodes 14”.
  • the excitation electrode 14 when viewed in a plan view, has a rectangular shape that is smaller than the shape of the central main surface 111 in a plan view, and has a long side parallel to the X-axis direction and a short side Z ′. Parallel to the axial direction. That is, the long side of the excitation electrode 14 is parallel to the long side of the crystal piece 11 (or the long side of the central main surface 111), and the short side of the excitation electrode 14 is (Short side of the main surface 111).
  • the excitation electrode 14 is disposed inside the central main surface 111, that is, with a gap from each side of the central main surface 111.
  • the electrode pads 16a and 16b are examples of connection electrodes, and are terminals for electrically connecting the crystal unit 10 to the substrate 30 (connection electrodes 33a and 33b).
  • the electrode pads 16a and the electrode pads 16b are arranged along the shorter side of the peripheral main surface 112b of the crystal blank 11 (peripheral portion 11b) on the negative side in the X-axis direction.
  • the short side end of the crystal blank 11 where the electrode pads 16a and 16b are provided is a fixed end, and the other end is a free end. That is, the crystal resonator element 10 (crystal piece 11) has a cantilever configuration.
  • electrode pads 16a and 16b are not distinguished from each other, they may be referred to as “electrode pads 16” and the position where the electrode pads 16a and 16b are provided may be referred to as a “holding position”.
  • the extraction electrode 15a is an electrode for electrically connecting the excitation electrode 14a to the electrode pad 16a
  • the extraction electrode 15b is an electrode for electrically connecting the excitation electrode 14b to the electrode pad 16b.
  • the extraction electrode 15a is formed so as to connect the excitation electrode 14a on the first main surface 12a and the electrode pad 16a on the second main surface 12b
  • the extraction electrode 15b is connected to the second main surface 12b. Is formed to connect the excitation electrode 14b and the electrode pad 16b.
  • the extraction electrodes 15a and 15b are not distinguished, they are referred to as “extraction electrodes 15”.
  • the materials of the excitation electrode 14, the extraction electrode 15, and the electrode pad 16 are not particularly limited.
  • a chromium (Cr) layer is provided as a base, and a gold (Au) layer is further provided on the surface of the chromium layer. May be provided.
  • FIG. 3 is a diagram for explaining the positional relationship between the components of the crystal resonator element 10 according to the first embodiment.
  • the vibration due to the holding is required. It is conceivable to reduce the inhibition.
  • the central portion 11a and the excitation electrode 14 are both located far from the electrode pad 16 (holding position), that is, the central portion 11a is held at the holding position with respect to the outer edge of the crystal blank 11.
  • the excitation electrode 14 may be provided on the central main surface 111 on the side far from the holding position.
  • the center of the excitation electrode 14 when viewed in plan, is located farther away from the center of the outer edge of the crystal blank 11 than the center of the central main surface 111, and the excitation electrode 14 is It is located at a position more deviated from the center of the outer edge of the crystal piece 111 and the crystal piece 11.
  • the bias of the position of the excitation electrode 14 causes a problem that the symmetry of the vibration distribution is reduced.
  • the excitation electrode 14 is located farther from the holding position with respect to the central main surface 111, the short side of the central electrode main surface 111 located on the same side as the excitation electrode 14 closer to the holding position from the short side thereof. The distance to the side becomes large, and vibration leakage or the like occurs.
  • the quartz vibrating element 10 uses a simple configuration as described below to reduce vibration inhibition due to holding, improve the symmetry of vibration distribution, and reduce vibration leakage. This realizes good vibration characteristics.
  • the outer edge of the crystal blank 11, the central main surface 111, and the short side on one side of the excitation electrode 14, which are closer to the electrode pad 16, will be referred to as “quartz short side S1", respectively.
  • “Central short side S3” and “excitation electrode short side S5" the outer edge of the crystal blank 11, the central main surface 111, and the short side on the other side of the excitation electrode 14 on the far side from the electrode pad 16 are referred to as “quartz short side S 2” and “central short side, respectively”.
  • S4 "and" excitation electrode short side S6 are referred to as “quartz short side S 2” and “central short side, respectively.
  • the short side S1 of the quartz piece is an example of the first side of the quartz piece
  • the short side S2 of the quartz piece is an example of the second side of the quartz piece.
  • the central short side S3 is an example of a first central side
  • the central short side S4 is an example of a second central side.
  • the excitation electrode short side S5 is an example of a first excitation electrode side
  • the excitation electrode short side S6 is an example of a second excitation electrode side.
  • the center (center) is defined as “center C2”, and the center (centroid) of the excitation electrode 14 in plan view is defined as “center C3 of excitation electrode”.
  • the center C1, the center C2 and the center C3 of the excitation electrode may be collectively referred to as "centers C1 to C3".
  • an imaginary line connecting the midpoint of the crystal piece short side S1 and the midpoint of the crystal piece short side S2 is referred to as a “virtual line S12”, and an imaginary line connecting the opposing midpoints of the pair of long sides of the crystal piece 11.
  • the line is referred to as “virtual line S21”.
  • the intersection between the virtual line S12 and the virtual line S21 is the crystal blank center C1.
  • the crystal resonator element 10 here, the second main surface 12 b of the crystal blank 11
  • the outer edge of the crystal blank 11 and the central main surface 111 ( The central portion 11a) and the excitation electrode 14 each have a rectangular shape in plan view, and are arranged such that long sides (short sides) are parallel to each other. Further, in the plan view shapes of these configurations, the excitation electrode 14 is formed inside the central main surface 111 (central portion 11a), and the central main surface 111 (central portion 11a) is It is formed inside.
  • the outer edge of the crystal blank 11, the central main surface 111 (central portion 11a), and the excitation electrode 14 are planarly symmetric with respect to the virtual line S12.
  • the center C1, the center C2, and the center C3 of the excitation electrode are formed on the imaginary line S12.
  • the outer edges of the crystal blank 11, the central main surface 111 (central portion 11a), and the excitation electrode 14 in plan view are not line-symmetric with respect to the virtual line S21.
  • the crystal element center C1, the center part center C2, and the excitation electrode center C3 are not formed on the virtual line S21, that is, are not formed so that the centers C1 to C3 overlap.
  • the center C2 of the central portion is closer to the electrode pad 16 (holding position) than the center C1 of the crystal piece in the direction of the imaginary line S12 (the direction parallel to the long side).
  • the excitation electrode center C3 is located closer to the electrode pad 16 (holding position) than the center C2. According to such a configuration, the center C3 of the excitation electrode can be closer to the center C1 of the crystal blank, and the distance between the short side S5 of the excitation electrode and the short side S3 of the center can be reduced accordingly. . As a result, it is possible to improve the symmetry of the vibration distribution and reduce the vibration leakage.
  • the excitation electrode center C3 is located in a region between the center C2 and the center C1 of the crystal blank.
  • the “region between the center C2 and the center C1 of the crystal piece” is an imaginary line that passes through the center C2 of the center and is parallel to the short side S2 of the crystal piece when the crystal resonator element 10 is viewed in plan.
  • the virtual line S13 and the virtual line S21 overlap.
  • the “region between the center C2 and the center C1 of the crystal piece” does not include the imaginary line 23 passing through the center C2 of the center, but includes the imaginary line S13 (S21) passing through the center C1 of the crystal piece. .
  • the excitation electrode center C3 is located on a connecting line connecting the center C2 and the crystal piece center C1 (part of the imaginary line S12, except for the position of the center C2, except for the position of the center C2). (Including the position of the one-sided center C1).
  • the excitation electrode center C3 can be located at a position where both the center C2 and the crystal piece center C1 are close to each other, or at a position near the center C2 and overlapping with the crystal piece center C1. Accordingly, the distance between the excitation electrode short side S5 and the central short side S3 can be reduced. As a result, it is possible to improve the symmetry of the vibration distribution and reduce the vibration leakage.
  • the excitation characteristics of the excitation electrode 14 are improved, and the symmetry of vibration distribution is further improved.
  • the excitation electrode center C3 is arranged such that the distance from the excitation electrode short side S5 to the central short side S3 belongs to a range of 12 ⁇ m or more and 21 ⁇ m or less.
  • FIG. 4 is a diagram for explaining a positional relationship between components of the crystal resonator element 10 according to the second embodiment.
  • the second embodiment differs from the first embodiment in that the positional relationship between the centers C1 to C3 is not focused on, and the positional relationship at the outer edge of each component of the crystal resonator element 10 is focused on, and the respective components of the crystal resonator element 10 are focused on. This is an embodiment for capturing a positional relationship.
  • first distance L1 the distance from the central short side S3 to the quartz piece short side S1
  • the central short side S4 Is the second distance L2
  • the distance from the excitation electrode short side S5 to the crystal piece short side S1 is "third distance L3”
  • the distance from the excitation electrode short side S6 to the crystal piece short side is S2.
  • the distance to the side S2 is referred to as “fourth distance L4”.
  • the difference between the third distance L3 and the first distance L1, that is, the distance from the excitation electrode short side S5 to the center short side S3 is referred to as "fifth distance L5", and the fourth distance L4 and the second distance L2
  • the difference, that is, the distance from the excitation electrode short side S6 to the center short side S4 is defined as “sixth distance L6”.
  • the central portion 11 a (the central main surface 111) is With respect to the outer edge of the piece 11, the side opposite to the holding position at the center position of the outer edge of the crystal piece 11, that is, the side (the upper side above the center in FIG. 3) by the short side S 2 of the crystal piece at the center position. Is provided.
  • the central portion 11a (the central main surface 111) is provided such that the first distance L1 relating to the central main surface 111 is larger than the second distance L2.
  • the excitation electrode 14 is located on the side of the central main surface 111 at the holding position of the central position on the central main surface 111, that is, on the side of the quartz piece short side S1 (central short side S3) at the central position. (The lower side of the center in FIG. 3).
  • the excitation electrode 14 is provided such that the third distance L3 related to the excitation electrode 14 is greater than the fourth distance L4 and equal to the fourth distance L4.
  • the excitation electrode 14 is located at the center position or near the center position with respect to the outer edge of the crystal blank 11 and near the center position of the central main surface 111. Position.
  • the fifth distance L5 can be reduced. As a result, it is possible to improve the symmetry of the vibration distribution and reduce the vibration leakage.
  • the excitation electrodes 14 are arranged with a gap from each side of the central main surface 111. That is, the excitation electrode 14 is provided such that the third distance L3 related to the excitation electrode 14 is larger than the first distance L1 and the fourth distance L4 related to the excitation electrode 14 is larger than the second distance L2. Have been.
  • the fifth distance L5 from the excitation electrode short side S5 to the center short side S3, that is, the difference between the third distance L3 and the first distance L1 is 12 ⁇ m or more and 21 ⁇ m or less.
  • a crystal blank 11 having a central portion 11a, a peripheral portion 11b having a smaller dimension in the thickness direction than the central portion 11a, and a central portion 11a on both sides in the thickness direction.
  • the quartz-crystal vibrating element 10 includes an excitation electrode 14 provided on each of a certain central main surface 111 and an electrode pad 16 provided on the peripheral portion 11b and electrically connected to the excitation electrode 14.
  • the center C2 of the center main surface 111 is located farther from the electrode pad 16 than the center C1 of the crystal piece 11 of the crystal piece 11.
  • the excitation electrode center C3 is located closer to the electrode pad 16 than the center C2. According to the above configuration, even if a crystal resonator having a simple configuration is used, vibration inhibition due to holding is reduced, symmetry of the vibration distribution is improved, and vibration leakage is reduced, and good vibration characteristics are obtained. be able to.
  • the excitation electrode center C3 is located in a region between the center C2 and the center C1 of the crystal piece when the crystal resonator element 10 is viewed in plan. According to the above configuration, good vibration characteristics can be obtained by improving the symmetry of the vibration distribution.
  • the excitation electrode 14 is configured such that at least a part of the excitation electrode short side S5 which is an outer edge on the side closer to the electrode pad 16 is located inside the central main surface 111 when the crystal resonator element 10 is viewed in plan. Are located. According to the above configuration, it is possible to suppress excitation of a portion other than the central main surface.
  • the minimum distance between the outer edge of the excitation electrode and the outer edge of the central main surface formed on the side close to the electrode pad 16 is 12 ⁇ m or more and 21 ⁇ m or less when the crystal resonator element 10 is viewed in a plan view. is there.
  • the excitation characteristics can be improved, and the symmetry of the vibration distribution can be further improved and the vibration leakage can be further reduced.
  • the crystal blank 11 when the crystal resonator element 10 is viewed in a plan view, the crystal blank 11, the central main surface 111, and the excitation electrode 14 are all rectangular. According to the above configuration, the symmetry of the vibration distribution can be improved.
  • the crystal piece center C1, the excitation electrode center C3, and the center part center C2 are formed on a virtual line S12 which is straight. According to the above configuration, the symmetry of the vibration distribution in the short side direction can be improved.
  • a crystal blank 11 having a central portion 11a, a peripheral portion 11b whose dimension in the thickness direction is smaller than the central portion 11a, and a thickness direction of the central portion 11a.
  • the crystal vibrating element 10 includes an excitation electrode 14 provided on each of the central main surfaces 111 on both sides of the crystal element 10 and an electrode pad 16 formed on the peripheral portion 11b and electrically connected to the excitation electrode 14.
  • the crystal blank 11, the central main surface 111, and the excitation electrode 14 are all rectangular, and the central main surface 111 is located at the center near the electrode pad 16.
  • a central short side S4 provided on the side farther from the electrode pad 16 so as to face the central short side S3, and a portion closer to the electrode pad 16 from the central short side S3.
  • a piece of crystal The first distance L1 to the side S1 is set to be greater than the second distance L2 from the central short side S4 to the short side S2 of the crystal piece facing the short side S1 of the crystal piece.
  • An excitation electrode short side S5 provided on the side close to the excitation electrode 16 and an excitation electrode short side S6 provided on the side far from the electrode pad 16 so as to face the excitation electrode short side S5.
  • the third distance L3 of the crystal piece short side S1 is greater than or equal to the fourth distance L4 from the excitation electrode short side S6 to the crystal piece short side S2.
  • the third distance L3 is larger than the first distance L1.
  • the excitation electrode is formed inside the central main surface, and it is possible to suppress excitation of a portion other than the central main surface.
  • the fifth distance L5 which is the difference between the third distance L3 and the first distance L1, is 12 ⁇ m or more and 21 ⁇ m or less. According to the above configuration, the excitation characteristics can be improved, and the symmetry of the vibration distribution can be further improved and the vibration leakage can be further reduced.
  • the fourth distance L4 is larger than the second distance L2. According to the above configuration, it is possible to suppress excitation of a portion other than the central main surface.
  • the fifth distance L5, which is the difference between the third distance L3 and the first distance L1 is smaller than the sixth distance L6, which is the difference between the fourth distance L4 and the second distance L2. According to the above configuration, it is possible to reduce the leakage of the vibration and improve the symmetry of the vibration distribution.
  • the cut angle of the crystal blank 11 is an AT cut. According to the above configuration, extremely high frequency stability can be obtained in a wide temperature range.
  • the crystal resonator 1 includes any one of the above-described crystal resonators 10 and a substrate 30 that supports the crystal resonator 10 so that the crystal resonator 10 can be excited. It is supported on the base 30 via a conductive holding member 36 so as to be excitable. According to the above configuration, even if a crystal resonator having a simple configuration is used, vibration inhibition due to holding is reduced, symmetry of the vibration distribution is improved, and vibration leakage is reduced, and good vibration characteristics are obtained. be able to.
  • the crystal resonator 1 further includes a lid member 20 bonded to the substrate 30 via a sealing frame 37 as an example of a bonding material and a bonding member 40, and the crystal resonator element 10 includes the substrate 30 and the lid member 20. Is provided in the internal space 26. According to the above configuration, even if a crystal resonator having a simple configuration is used, vibration inhibition due to holding is reduced, symmetry of the vibration distribution is improved, and vibration leakage is reduced, and good vibration characteristics are obtained. be able to. [Modification]
  • the present invention can be applied in various modifications without being limited to the above embodiment. Hereinafter, a modified example according to the present invention will be described.
  • the crystal blank 11 is described as an AT-cut crystal blank whose long side is parallel to the X axis and whose short side is parallel to the Z ′ axis.
  • the present invention is not limited to the above configuration.
  • An AT-cut crystal piece whose side is parallel to the Z ′ axis and whose short side is parallel to the X axis may be applied.
  • the main vibration is the thickness-shear vibration mode, for example, a crystal piece having a different cut other than the AT cut such as a BT cut may be used.
  • an AT-cut crystal blank that can obtain extremely high frequency stability over a wide temperature range is most preferable.
  • the quartz crystal element 11, the central main surface 111, and the excitation electrode 14 are all described as rectangular structures having long sides and short sides, when the crystal resonator element 10 is viewed in plan.
  • the central main surface 111 and the excitation electrode 14 may have a rectangular configuration in which all four sides have the same length, that is, a square configuration.
  • the crystal blank 11, the central main surface 111, and the excitation electrode 14 may have a substantially rectangular configuration.
  • the “substantially rectangular shape” means the outer edge of the crystal blank 11, the central main surface 111, and the shape of the excitation electrode 14 in a plan view. , And all sides are curved.
  • the crystal blank 11, the central main surface 111, and the excitation electrode 14 may have a substantially circular shape, a substantially elliptical shape, or the like.
  • the crystal resonator element 10 is viewed in plan, and the crystal piece center C1, the center C2, and the excitation electrode center C3 are described as being formed on the imaginary line S12, but the centers C1 to C3 are straight. It may be a configuration that is not formed.
  • the crystal resonator element 10 is viewed from above, and the excitation electrode 14 has a configuration in which the planar shape of the excitation electrode 14 is smaller than the planar shape of the central main surface 111.
  • the configuration in which the visual shape is the same as the planar shape of the central main surface 111 or larger than the planar shape of the central main surface 111 may be employed.
  • the side face 13a of the central portion 11a of the crystal blank 11 has been described as a plane whose angle with the XZ 'plane is a right angle.
  • this angle is not particularly limited. May be inclined at a predetermined angle depending on the crystal orientation of the quartz crystal. Such an inclination angle can be formed by, for example, wet etching.
  • the thickness of the peripheral portion 11b in the Y'-axis direction is the same.
  • the crystal blank 11 is described as having a mesa configuration, but may be a crystal blank having a bevel configuration. Even in such a bevel structure, leakage of vibration can be reduced.
  • the peripheral portion 11b is described as having a uniform thickness, but may have a non-uniform thickness.
  • a stepped configuration or a slope configuration in which the thickness dimension gradually decreases from the central portion to the outer edge portion may be employed.
  • connection electrodes 33a and 33b, the via electrodes 34a and 34b, and the external electrodes 35a to 35d of the substrate 30 has been described, but the connection electrodes 33a and 33b of the substrate 30 and the via electrodes 34a and 34b and The configuration of each of the external electrodes 35a to 35d is not limited to the above example, and can be variously modified and applied.
  • the number of external electrodes is not limited to four, and may be, for example, two arranged diagonally.
  • the external electrodes are not limited to those arranged at the corners, and may be formed on any side surface of the substrate 30 excluding the corners.
  • the cutout side surface may be formed by cutting a part of the side surface into a cylindrical curved shape, and the external electrode may be formed on the side surface excluding the corner portion. Further, the other external electrodes 35c and 35d, which are dummy electrodes, need not be formed. Further, an extraction electrode may be formed on the substrate 30 from the first main surface 32a to the second main surface 32b to achieve electrical conduction between the two.
  • the substrate 30 is described as a flat plate and the lid member 20 is concave.
  • the shapes of the substrate 30 and the lid member 20 are not particularly limited as long as the crystal resonator element can be accommodated in the internal space. Instead, for example, the substrate 30 may be concave, and the lid member 20 may be flat.
  • the crystal vibrating element 10 has been described as a configuration in which one end is fixed by the conductive holding members 36a and 36b and the other end is free. Both ends in either direction of the side and the short side may be fixed to the substrate 30.
  • SYMBOLS 1 Crystal resonator, 10 ... Crystal resonator element, 11 ... Crystal piece, 11a ... Central part, 11b ... Peripheral part, 12a ... First principal surface, 12b ... Second principal surface, 14, 14a, 14b ... Excitation electrode, 16, 16a, 16b: electrode pad, 20: cover member, 30: substrate, 111, 111a, 111b: central main surface, C1: center of crystal piece, C2: center of center, C3: center of excitation electrode

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Un élément d'oscillateur à quartz 10 est pourvu : d'une pièce de quartz 11 qui comprend une partie centrale 11a et une partie périphérique 11b qui est positionnée autour de la partie centrale 11a et qui a une dimension plus petite dans la direction de l'épaisseur que la partie centrale 11a ; une électrode d'excitation 14 qui est disposée sur chacune des surfaces principales 111 de partie centrale sur les deux côtés de la partie centrale 11a dans la direction de l'épaisseur ; et une électrode de connexion 16 qui est disposée dans la partie périphérique 11b et est électriquement connectée à l'électrode d'excitation 14. Lorsque l'élément d'oscillateur à quartz est vu en plan, un centre C2 de la surface principale 111 de partie centrale est positionné sur le côté plus éloigné de l'électrode de connexion 16 que le centre de la pièce de quartz C1 de la pièce de quartz 11, et un centre d'électrode d'excitation C3 de l'électrode d'excitation 14 est positionné sur le côté plus proche de l'électrode de connexion 16 que le centre de partie centrale C2.
PCT/JP2019/037602 2018-09-27 2019-09-25 Élément d'oscillation en quartz et oscillateur à quartz Ceased WO2020067157A1 (fr)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013172222A (ja) * 2012-02-20 2013-09-02 Nippon Dempa Kogyo Co Ltd 圧電振動素子及び圧電デバイス
JP2014030116A (ja) * 2012-07-31 2014-02-13 Kyocera Crystal Device Corp 水晶振動素子
JP2017153010A (ja) * 2016-02-26 2017-08-31 京セラ株式会社 水晶素子および水晶デバイス

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013172222A (ja) * 2012-02-20 2013-09-02 Nippon Dempa Kogyo Co Ltd 圧電振動素子及び圧電デバイス
JP2014030116A (ja) * 2012-07-31 2014-02-13 Kyocera Crystal Device Corp 水晶振動素子
JP2017153010A (ja) * 2016-02-26 2017-08-31 京セラ株式会社 水晶素子および水晶デバイス

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