WO2019230040A1 - Prediction data server and x-ray thickness measurement system - Google Patents

Abstract

This X-ray thickness measurement device (12) is connected to a prediction data server (14), and is equipped with an X-ray control power supply, an X-ray generator, and a detection unit. The prediction data server (14) is equipped with an acquisition unit (62), a prediction unit (64) and a storage unit (48). The acquisition unit (62) acquires, from the X-ray thickness measurement device (12), measurement information (56) including at least one of the following: a drive voltage value; a drive current value; a tube voltage value; a tube current value; and a detection signal. The prediction unit (64) generates statistics for measurement information (56) acquired by the acquisition unit (62), as prediction data (68) for diagnosing abnormalities in the X-ray thickness measurement device (12). The storage unit (48) stores prediction data (68) generated by the prediction unit (64).

Description

Predictive data server and X-ray thickness measurement system

Embodiment relates to a precursor data server and an X-ray thickness measurement system.

For example, in a production line of a plate-like product (hereinafter referred to as a measurement target) such as a steel plate, an X-ray thickness measurement device that measures the thickness of the measurement target using X-rays is used.

Japanese Examined Patent Publication No. 58-105008

However, there is no known device that generates data for diagnosing an abnormality in the above-described X-ray thickness measuring device.

The problem described above is solved, and the predictive data server of the embodiment is connected to an X-ray thickness measuring apparatus. The X-ray thickness measurement apparatus includes an X-ray control power source, an X-ray generator, a detection unit, a transformer, a drive detection unit, and a tube detection unit. The X-ray control power supply supplies power. The X-ray generator has a filament that emits electrons by electric power from an X-ray control power source and a target that irradiates an object whose thickness is to be measured by collision of electrons emitted from the filament. The detection unit outputs at least one of a detection voltage and a detection current according to the intensity of the X-ray that has passed through the measurement target as a detection signal. The transformer transforms the electric power from the X-ray control power source and supplies it to the filament. The drive detection unit detects a drive voltage value that is a voltage on the primary side of the transformer and a drive current value that is a current value that flows on the primary side of the transformer. The tube detection unit detects a tube voltage value that is a voltage between the filament and the target and a tube current value that is a current value flowing between the filament and the target. The sign data server includes an acquisition unit, a sign unit, and a storage unit. The acquisition unit acquires measurement information including at least one of a drive voltage value, a drive current value, a tube voltage value, a tube current value, and a detection signal from the X-ray thickness measurement apparatus. The predictor generates the statistics of the measurement information acquired by the acquisition unit as predictor data for diagnosing an abnormality of the X-ray thickness measuring apparatus. The storage unit stores the sign data generated by the sign unit.

FIG. 1 is a schematic diagram illustrating an overall configuration of an X-ray thickness measurement system according to an embodiment. FIG. 2A is a block diagram illustrating a configuration of a control system of the X-ray thickness measurement system of the embodiment. FIG. 2B is a diagram illustrating an example of a data configuration of measurement information transmitted and received in the X-ray thickness measurement system of the embodiment. FIG. 3A is a graph showing an example of the tube voltage value TV of measurement information. FIG. 3B is a graph showing an example of the tube current value TC of the measurement information. FIG. 3C is a graph illustrating an example of the drive voltage value Ep of the measurement information. FIG. 3D is a graph illustrating an example of the drive current value Ip of the measurement information. FIG. 3E is a graph illustrating an example of a detection value Dv of measurement information. FIG. 4A is a diagram illustrating an example of a warning image output by the maintenance device according to the embodiment. FIG. 4B is a diagram illustrating an example of a warning image output by the maintenance device of the embodiment. FIG. 5 is a flowchart of measurement processing executed by the control-side processing unit of the thickness measuring apparatus according to the embodiment. FIG. 6 is a flowchart of the sign process executed by the sign side processing unit of the sign data server according to the embodiment. FIG. 7 is a flowchart of maintenance processing executed by the maintenance-side processing unit of the maintenance apparatus according to the embodiment. FIG. 8A is a graph of the standard deviation of the tube voltage value TV of measurement information. FIG. 8B is a graph of the standard deviation of the tube current value TC of the measurement information. FIG. 8C is a graph of the standard deviation of the drive voltage value Ep of the measurement information. FIG. 8D is a graph of the standard deviation of the drive current value Ip of the measurement information. FIG. 8E is a graph of the standard deviation of the detection value Dv of the measurement information. FIG. 9 is a graph of the product of variance and kurtosis of detected values included in measurement information. FIG. 10 is a diagram illustrating an example of the tube voltage included in the measurement information acquired by the predictive data server according to the fourth embodiment. FIG. 11 is a diagram illustrating an example of an average generation result of tube voltages generated by the predictive data server according to the fourth embodiment. FIG. 12 is a diagram illustrating an example of the generation result of the standard deviation of the tube voltage generated by the predictive data server according to the fourth embodiment. FIG. 13 is a diagram illustrating an example of a generation result of tube voltage distribution generated by the predictive data server according to the fourth embodiment. FIG. 14 is a diagram illustrating an example of a generation result of the skewness of the tube voltage generated by the predictive data server according to the fourth embodiment. FIG. 15 is a diagram illustrating an example of the generation result of the kurtosis of the tube voltage generated by the predictive data server according to the fourth embodiment. FIG. 16 is a diagram for explaining an example of measurement information writing processing in the predictive data server according to the fourth embodiment. FIG. 17 is a diagram for explaining an example of the display process of the predictor data and the measurement information by the maintenance device according to the fourth embodiment. FIG. 18 is a flowchart illustrating an example of the flow of predictive processing executed by the predictive data server according to the fourth embodiment.

The following exemplary embodiments and modifications include similar components. Therefore, below, the same code | symbol is attached | subjected to the same component, and the overlapping description is partially abbreviate | omitted. Portions included in the embodiments and modifications can be configured by replacing corresponding portions in other embodiments and modifications. In addition, the configuration, position, and the like of the parts included in the embodiments and modifications are the same as those in the other embodiments and modifications unless otherwise specified.

<First Embodiment>
FIG. 1 is a schematic diagram illustrating an overall configuration of an X-ray thickness measurement system 10 according to an embodiment. The X-ray thickness measurement system 10 measures the thickness of the measurement object 90 with the X-ray thickness measurement device 12 and generates predictive data 68 (see FIG. 2) necessary for diagnosing the abnormality of the X-ray thickness measurement device 12. Accumulate and diagnose an abnormality of the X-ray thickness measuring apparatus 12.

As shown in FIG. 1, the X-ray thickness measurement system 10 according to the embodiment includes an X-ray thickness measurement device 12, a predictive data server 14, a maintenance device 16, and a network 18. The network 18 may be a LAN (Local Area Network) or the like that connects the X-ray thickness measuring device 12, the predictive data server 14, and the maintenance device 16 so that information can be transmitted and received between them. Further, the X-ray thickness measurement system 10 of the embodiment can communicate with a host device provided outside the X-ray thickness measurement system 10 via a network such as the Internet according to a communication standard such as TCP / IP.

The X-ray thickness measurement apparatus 12 irradiates the measurement object 90 that is the object of thickness measurement with X-rays, and measures the thickness of the measurement object 90 based on the amount of X-rays that have passed through the measurement object 90. The X-ray thickness measurement device 12 includes a measurement unit 20, an X-ray control power source 22, and a plate thickness calculation unit (control device) 24.

The measurement unit 20 irradiates the measurement target 90 with X-rays and outputs at least one of a detection voltage or a detection current for calculating the thickness of the measurement target 90 as a detection value to the plate thickness calculation unit 24. The measurement unit 20 according to the embodiment includes a holding unit 26, a transformer 28, an X-ray generator 30, a detector 32, an output detection unit 34, and a resistor 35.

The holding unit 26 holds a transformer 28, an X-ray generator 30, a detector 32, an output detection unit 34, and a resistor 35.

The transformer 28 transforms (for example, boosts) the electric power output from the X-ray control power supply 22 and supplies it to the filament 38 of the X-ray generator 30 described later.

The X-ray generator 30 generates X-rays by the power supplied from the X-ray control power source 22 and irradiates the measurement object 90. The X-ray generator 30 according to the embodiment includes an X-ray tube 36, a filament 38, and a target 40. The X-ray tube 36 is, for example, a sealed tube that maintains the inside in a vacuum state. The X-ray tube 36 accommodates and holds the filament 38 and the target 40 therein. The filament 38 emits electrons to the target 40 by the electric power supplied from the X-ray control power supply 22 via the transformer 28. The target 40 irradiates the measurement target 90 with X-rays by collision of electrons emitted from the filament 38.

The detector 32 is disposed at a position facing the X-ray generator 30 with the measurement object 90 interposed therebetween. The detector 32 according to the embodiment is irradiated from the X-ray generator 30 and at least one of a detection voltage and a detection current corresponding to the intensity of the X-ray that has passed through the measurement object 90 to the output detection unit 34 as a detection signal. Output. The detector 32 may be, for example, an ionization chamber that outputs a detection voltage and a detection current corresponding to incident X-rays.

The output detection unit 34 converts the detection signal output from the detector 32 and outputs the detection signal to the plate thickness calculation unit 24. For example, the output detection unit 34 may include an AD converter and the like, and may output a value obtained by digitally converting an analog detection signal as a detection value for calculating the thickness of the measurement target 90.

The X-ray control power supply 22 is an example of a power supply, and supplies power supplied to the filament 38 of the X-ray generator 30 via the transformer 28 based on a power supply control signal from the plate thickness calculator 24. . The X-ray control power source 22 may be connected to an external power source such as a commercial power source, for example. The X-ray control power source 22 includes a drive detection unit 42 and a tube detection unit 44.

The drive detection unit 42 detects a drive voltage value and a drive current value. The drive voltage value is a voltage value on the primary side of the transformer 28 and is a voltage value of power supplied from the X-ray control power supply 22. The drive current value is a value of a current flowing on the primary side of the transformer 28 and is a value of a current of power supplied from the X-ray control power supply 22. The drive detection unit 42 outputs the detected drive voltage value and drive current value to the plate thickness calculation unit 24. In the embodiment, the drive detection unit 42 acquires time data, which is a time stamp at the time of detection of a drive voltage value and a drive current value, from an RTC (Real Time Clock) (not shown) included in the X-ray control power supply 22. Then, the drive detection unit 42 adds the acquired time data to the detected drive voltage value and drive current value, and outputs them to the plate thickness calculation unit 24. In the embodiment, the drive detection unit 42 detects the drive voltage value and the drive current value at a preset cycle (for example, 100 ms).

The tube detector 44 detects a tube voltage value and a tube current value. The tube voltage value is a voltage value on the secondary side of the transformer 28 and is a voltage value between the filament 38 and the target 40. The tube current value is a value of a current flowing on the secondary side of the X-ray generator 30 and is a value of a current flowing between the filament 38 and the target 40. In the embodiment, the tube detection unit 44 detects the voltage across the resistor 35 as a tube voltage value, and detects the value of the current flowing through the resistor 35 as a tube current value. Then, the tube detection unit 44 outputs the detected (detected) tube voltage value and tube current value to the plate thickness calculation unit 24. In the embodiment, the tube detection unit 44 acquires time data, which is a time stamp when a tube voltage value and a tube current value are detected, from an RTC (not shown) included in the X-ray control power supply 22. The tube detection unit 44 adds the acquired time data to the detected tube voltage value and tube current value, and outputs the result to the plate thickness calculation unit 24. In the embodiment, the tube detection unit 44 detects the tube voltage value and the tube current value at a preset cycle (for example, 100 ms). That is, in the embodiment, the drive detection unit 42 and the tube detection unit 44 detect the drive voltage value, the drive current value, the tube voltage value, and the tube current value in the same cycle.

The plate thickness calculator 24 controls the entire X-ray thickness measuring device 12. The plate thickness calculator 24 may be a computer used by an operator or the like who measures the thickness of the measurement object 90 using the X-ray thickness measurement device 12. The plate thickness calculator 24 calculates the thickness of the measurement object 90 based on the detection value acquired from the output detector 34. The plate thickness calculator 24 outputs to the X-ray control power supply 22 a power supply control signal that indicates a drive voltage value corresponding to the tube voltage value of the power supplied to the X-ray generator 30. The plate thickness calculator 24 may generate a power supply control signal that indicates a drive voltage value set based on the tube voltage value acquired from the tube detector 44. The plate thickness calculator 24 is detected by the detection value output from the output detector 34, the drive voltage value detected by the drive detector 42, the drive current value detected by the drive detector 42, and the tube detector 44. Measurement information 56 (see FIG. 2) including at least one of the tube voltage value and the tube current value detected by the tube detection unit 44 is output to the network 18. The plate thickness calculator 24 may output the measurement information 56 by broadcast, for example. In the embodiment, the plate thickness calculation unit 24 outputs the measurement information 56 including the detection value out of the detection value acquired from the output detection unit 304 and the thickness of the measurement target 90. The present invention is not limited to this as long as the measurement information 56 including at least one of the thicknesses is output. For example, the plate thickness calculator 24 may output the measurement information 56 including both the detection value and the thickness of the measurement object 90, or output the measurement information 56 including the thickness of the measurement object 90 instead of the detection value. You may do it.

The sign data server 14 repeatedly acquires the measurement information 56 from the plate thickness calculator 24 a plurality of times, and generates data 68 (hereinafter, sign data) indicating a sign of abnormality of the X-ray thickness measurement apparatus 12 generated from the plurality of measurement information 56. (See FIG. 2). Here, the predictor data 68 is statistics of the measurement information 56 acquired from the X-ray thickness measurement apparatus 12. The sign data server 14 outputs the sign data 68 in response to a request from the maintenance device 16.

The maintenance device 16 is a computer used by, for example, a maintenance person who maintains the X-ray thickness measuring device 12. The maintenance device 16 diagnoses an abnormality of the X-ray thickness measuring device 12 based on the predictive data 68 acquired from the predictive data server 14 and outputs the diagnosis result as an image or the like.

FIG. 2A is a block diagram illustrating a configuration of a control system of the X-ray thickness measurement system 10 of the embodiment. First, an example of a functional configuration of the plate thickness calculator 24 included in the X-ray thickness measurement apparatus 12 will be described with reference to FIG. 2A. As shown in FIG. 2A, the plate thickness calculation unit 24 includes a control side processing unit 46 and a control side storage unit 48.

The control side processing unit 46 is responsible for overall control of the X-ray thickness measuring apparatus 12. The control-side processing unit 46 may be a hardware processor such as a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit) that execute arithmetic processing and the like. The control processing unit 46 reads the program stored in the control storage unit 48 and develops the read program in the control storage unit 48 to execute various arithmetic processes. For example, the control processing unit 46 reads the measurement program 54 and functions as the reception unit 50 and the calculation unit 52. Part or all of the reception unit 50 and the calculation unit 52 may be configured by hardware such as a circuit including an ASIC (Application Specific Integrated Circuit) or an FPGA (Field-Programmable Gate Array).

The reception unit 50 receives the measurement information 56 and outputs it to the calculation unit 52. The receiving unit 50 is detected by, for example, the detection value output from the output detection unit 34, the drive voltage value detected by the drive detection unit 42, the drive current value detected by the drive detection unit 42, or the tube detection unit 44. The tube voltage value and the tube current value detected by the tube detection unit 44 are received as measurement information 56.

When the measurement unit 56 acquires the measurement information 56 from the reception unit 50, the calculation unit 52 calculates the thickness of the measurement target 90 based on the measurement information 56 and controls the X-ray thickness measurement apparatus 12. For example, the calculation unit 52 calculates the thickness of the measurement target 90 based on the detection value. In the embodiment, the calculation unit 52 acquires a detection value from the output detection unit 34 at a preset period (for example, 5 ms), and calculates the thickness of the measurement object 90 each time the detection value is acquired. . That is, the calculation unit 52 calculates the thickness of the measurement object 90 at a preset period (for example, 5 ms). In the embodiment, the calculation unit 52 acquires time data, which is a time stamp at the time of detection of a detection value, from an RTC (not shown) included in the plate thickness calculation unit 24. Then, the calculation unit 52 adds the acquired time data to the acquired detection value and the calculated thickness of the measurement object 90. In addition, the calculation unit 52 generates and outputs a power supply control signal for instructing the drive voltage value to the X-ray control power supply 22 so that the tube voltage value and the tube current value become preset voltage values. The calculation unit 52 may output the measurement information 56 to the network 18 by broadcasting.

The control-side storage unit 48 includes a main storage device and an auxiliary storage device such as a ROM (Read Only Memory), a RAM (Random Access Memory), and an HDD (Hard Disk Drive). The control-side storage unit 48 stores a measurement program 54 executed by the control-side processing unit 46, measurement information 56 acquired for executing the measurement program 54, and the like. The measurement program 54 may be provided by being stored in a computer-readable storage medium such as a CD-ROM (Compact Disc Read Only Memory) or a DVD-ROM (Digital Versatile Disc Read Only Memory) or a network such as the Internet. It may be provided via.

Next, an example of the functional configuration of the predictive data server 14 will be described with reference to FIG. 2A. As shown in FIG. 2A, the sign data server 14 includes a sign side processing unit 58 and a sign side storage unit 60.

The sign side processing unit 58 governs overall control of the sign data server 14. The sign side processing unit 58 may be a hardware processor such as a CPU and a GPU. The sign side processing unit 58 reads the program stored in the sign side storage unit 60 and develops the read program in the sign side storage unit 60 to execute various arithmetic processes. The sign side processing unit 58 reads, for example, the sign program 66 and functions as the acquisition unit 62 and the sign unit 64. Part or all of the acquisition unit 62 and the sign unit 64 may be configured by hardware such as a circuit including an ASIC or FPGA.

The acquisition unit 62 acquires the measurement information 56 from the X-ray thickness measurement device 12. The acquisition unit 62 of the embodiment includes at least one parameter among a drive voltage value, a drive current value, a tube voltage value, a tube current value, and a detection value that flows on the network 18, and the time when the parameter is detected or calculated The measurement information 56 to which the data has been added is acquired a plurality of times and output to the sign unit 64. The acquisition unit 62 according to the embodiment acquires the measurement information 56 from the X-ray thickness measurement apparatus 12 at a period longer than the time required for generating the sign data 68 by the sign unit 64 described later. That is, it is assumed that the period for acquiring the measurement information 56 by the acquisition unit 62 is longer than the time required for the generation of the predictor data 68 by the predictor 64. Thereby, it is possible to prevent the acquisition of the measurement information 56 from the X-ray thickness measuring apparatus 12 due to an increase in the processing load on the sign data server 14 due to the sign data 68 generated by the sign unit 64.

The sign unit 64 writes the measurement information 56 acquired by the acquisition unit 62 in the sign side storage unit 60. In addition, the sign unit 64 generates the statistics of the measurement information 56 acquired by the acquisition unit 62 as the sign data 68. The sign unit 64 then writes the generated sign data 68 into the sign side storage unit 60 (an example of a storage unit). The sign unit 64 of the embodiment generates sign data 68 for diagnosing an abnormality of the X-ray thickness measurement apparatus 12 based on the plurality of measurement information 56 acquired from the network 18 and accumulates the sign data 68 in the sign side storage unit 60. To do. For example, the sign unit 64 may generate, as the sign data 68, a value obtained by statistically processing a result of comparing a plurality of measurement information 56 and a predetermined threshold value. The sign unit 64 accumulates the generated sign data 68 in the sign side storage unit 60. The sign unit 64 outputs the sign data 68 stored in the sign side storage unit 60 in response to a request from the maintenance device 16. The sign unit 64 generates the sign data 68 based on the result of comparing at least one of the drive voltage value, the drive current value, the tube voltage value, the tube current value, and the detection value included in the measurement information 56 with a threshold value. You can do it. In addition, every time a spike occurs in the measurement information 56 acquired by the acquisition unit 62, the predictor 64 notifies the maintenance device 16 that a spike has occurred in the measurement information 56. Furthermore, the sign unit 64 notifies the generated sign data 68 to an external host device according to a communication standard such as analog or TCP / IP.

The sign side storage unit 60 includes a ROM, a RAM, a main storage device such as an HDD, and an auxiliary storage device. The sign side storage unit 60 stores the sign program 66 executed by the sign side processing unit 58, the sign data 68 generated by the execution of the sign program 66, and the like. The predictor program 66 may be provided by being stored in a computer-readable storage medium such as a CD-ROM or DVD-ROM, or may be provided via a network such as the Internet.

Next, an example of the functional configuration of the maintenance device 16 will be described with reference to FIG. 2A. As illustrated in FIG. 2A, the maintenance device 16 includes a maintenance side processing unit 70, a maintenance side storage unit 72, and a display unit 73.

The maintenance-side processing unit 70 is responsible for overall control of the maintenance device 16. The maintenance processing unit 70 may be a hardware processor such as a CPU and a GPU. The maintenance-side processing unit 70 reads the program stored in the maintenance-side storage unit 72 and develops the read program in the maintenance-side storage unit 72, thereby executing various arithmetic processes. For example, the maintenance processing unit 70 reads the maintenance program 76 and functions as the diagnosis unit 74. Part or all of the diagnosis unit 74 may be configured by hardware such as a circuit including an ASIC or FPGA.

The diagnosis unit 74 acquires the sign data 68 output from the sign data server 14 and diagnoses an abnormality of the X-ray thickness measuring apparatus 12 based on the sign data 68. When the X-ray thickness measurement device 12 is abnormal, the diagnosis unit 74 is information indicating that the X-ray thickness measurement device 12 is approaching a failure state (information indicating a warning), for example, the X-ray thickness measurement device 12 is in failure. An indicator (a warning image which is an image indicating a warning) indicating a level approaching the state (hereinafter referred to as an abnormal level) is generated and displayed on the display unit 73. The display unit 73 displays the sign data 68 output from the sign data server 14 and various information such as a warning image. Specifically, the display unit 73 displays an indicator that indicates an abnormal level of the X-ray thickness measuring apparatus 12. And the display part 73 raises the abnormal level which an indicator shows, whenever it is notified from the indication data server 14 that the spike | break generate | occur | produced in the measurement information 56. FIG.

The maintenance-side storage unit 72 includes a ROM, a RAM, a main storage device such as an HDD, and an auxiliary storage device. The maintenance side storage unit 72 stores a maintenance program 76 and the like executed by the maintenance side processing unit 70. The maintenance program 76 may be provided by being stored in a computer-readable storage medium such as a CD-ROM or DVD-ROM, or may be provided via a network such as the Internet.

Here, an example of the data configuration of the measurement information 56 output from the X-ray thickness measurement apparatus 12 will be described with reference to FIG. 2B. FIG. 2B is a diagram illustrating an example of a data configuration of measurement information transmitted and received in the X-ray thickness measurement system according to the embodiment.

As shown in FIG. 2B, the plate thickness calculator 24 is added to the tube voltage value TV, the tube current value TC, the drive voltage value Ep, the drive current value Ip, and the values TV, TC, Ep, and Ip. Measurement information 56 including the time data time1, the detection value Dv, the thickness T of the measurement object 90, and the time data time2 added to the detection value Dv and the thickness T are sent to the predictor data via the network 18. Output to the server 14. In the embodiment, the plate thickness calculator 24 generates the measurement information 56 every time the thickness T of the measurement object 90 is calculated (that is, at a preset period (for example, 5 ms)), and the generated measurement information 56 Is output.

However, in the embodiment, the cycle (for example, 100 ms) for detecting each value TV, TC, Ep, Ip by the drive detection unit 42 and the tube detection unit 44 is the cycle for calculating the thickness T of the measurement object 90 (for example, 5 ms). ), The values TV, TC, Ep, and Ip may not be obtained at the same timing as the timing of calculating the thickness T of the measurement object 90. For this reason, as shown in FIG. 2B, the plate thickness calculation unit 24, when the values TV, TC, Ep, and Ip cannot be obtained at the timing when the thickness T of the measurement object 90 is calculated, The measurement information 56 including null is generated as the tube current value TC, the drive voltage value Ep, the drive current value Ip, and the time data time1 added to each value TV, TC, Ep, Ip. Therefore, the plate | board thickness calculating part 24 of embodiment produces | generates the measurement information 56 with the period when the thickness T of the measuring object 90 is calculated, and outputs the produced | generated measurement information 56 concerned.

In the present embodiment, the plate thickness calculator 24 outputs the measurement information 56 every time the thickness T of the measurement object 90 is calculated. However, the present invention is not limited to this, and a predetermined number of measurements are performed. Each time the information 56 is generated or every time measurement information 56 for a preset period is generated, a predetermined number (predetermined number) of continuous measurement information 56 or a preset period Minutes (every predetermined period) of measurement information 56 may be output together.

Next, an example of the predictive data 68 generated in the predictive data server 14 will be described with reference to FIGS. 3A to 3E. 3A, 3B, 3C, 3D, and 3E are graphs showing examples of the values TV, TC, Ep, Ip, and Dv of the measurement information 56, respectively. The horizontal axis of each graph in FIGS. 3A, 3B, 3C, 3D, and 3E indicates time. The vertical axis of the graph in FIG. 3A indicates the tube voltage value TV. The vertical axis of the graph in FIG. 3B indicates the tube current value TC. The vertical axis of the graph in FIG. 3C represents the drive voltage value Ep. The vertical axis of the graph in FIG. 3D represents the drive current value Ip. The vertical axis of the graph in FIG. 3E indicates the detection value Dv. The values TV, TC, Ep, Ip, and Dv in FIGS. 3A, 3B, 3C, 3D, and 3E are values when the drive voltage value Ep is controlled to maintain the tube voltage value TV at 100 kV. is there. The acquisition unit 62 acquires the values TV, TC, Ep, Ip, and Dv shown in FIGS. 3A, 3B, 3C, 3D, and 3E output from the plate thickness calculation unit 24 from the network 18, and provides an indication unit. Output to 64. When the predictor 64 acquires each value TV, TC, Ep, Ip, Dv, the threshold value set in advance in association with each value TV, TC, Ep, Ip, Dv and each value TV, TC, Ep, Ip , Dv, and predictive data 68 are generated. Here, the preset threshold values are the respective values TV, TC, Ep, Ip, Dv at the time of the shipping test of the X-ray thickness measuring apparatus 12, and the values TV, TC, Ep at the time of the shipping test are normal values. , Ip, Dv are set based on a value obtained by adding a margin to the fluctuation range.

As shown in FIG. 3A, the predictor 64 determines whether, for example, the tube voltage value TV is equal to or higher than the first threshold Th1 + a or equal to or lower than the second threshold Th1-a. For example, when the tube voltage value TV is equal to or greater than the first threshold Th1 + a or equal to or less than the second threshold Th1-a, the predictor 64 increments the tube voltage abnormal value by one. In the example shown in FIG. 3A, since the tube voltage value TV is not equal to or higher than the first threshold Th1 + a or equal to or lower than the second threshold Th1-a, the tube voltage abnormal value is not incremented.

As shown in FIG. 3B, the predictor 64 determines whether, for example, the tube current value TC is greater than or equal to the third threshold Th2 + b or less than or equal to the fourth threshold Th2-b. For example, when the tube current value TC is equal to or greater than the third threshold Th2 + b or equal to or less than the fourth threshold Th2-b, the predictor 64 increments the tube current abnormal value by one. For example, in the example shown in FIGS. 3A, 3B, 3C, 3D, and 3E, the predictor 64 has the tube current value TC in the region surrounded by the broken line equal to or greater than the third threshold Th2 + b or the fourth threshold Th2- Since it is 7 times below b, the tube current abnormal value is incremented by 7.

As shown in FIG. 3C, the predictor 64 determines whether, for example, the drive voltage value Ep is equal to or higher than the fifth threshold Th3 + c or equal to or lower than the sixth threshold Th3-c. For example, if the drive voltage value Ep is not less than the fifth threshold Th3 + c or not more than the sixth threshold Th3-c, the predictor 64 increments the drive voltage abnormal value by one. In the example shown in FIG. 3C, the drive voltage value Ep is not equal to or greater than the fifth threshold Th3 + c or equal to or less than the sixth threshold Th3-c, so that the drive voltage abnormal value is not incremented.

As shown in FIG. 3D, the predictor 64 determines whether, for example, the drive current value Ip is greater than or equal to the seventh threshold Th4 + d or less than or equal to the eighth threshold Th4-d. For example, if the drive current value Ip is not less than the seventh threshold Th4 + d or not more than the eighth threshold Th4-d, the predictor 64 increments the drive current abnormal value by one. In the example shown in FIG. 3D, since the drive current value Ip is not equal to or greater than the seventh threshold Th4 + d or equal to or less than the eighth threshold Th4-d, the drive current abnormal value is not incremented.

As shown in FIG. 3E, for example, the predictor 64 determines whether or not the detection value Dv is equal to or greater than the ninth threshold Th5 + e or equal to or less than the tenth threshold Th5-e. For example, when the detected value Dv is equal to or greater than the ninth threshold Th5 + e or equal to or smaller than the tenth threshold Th5-e, the predictor 64 increments the detected abnormal value by one. In the example shown in FIG. 3E, since the detection value Dv is not equal to or greater than the ninth threshold Th5 + e or equal to or less than the tenth threshold Th5-e, the detected abnormal value is not incremented.

The predictor 64 generates predictive data 68 including abnormal values such as a tube voltage abnormal value, a tube current abnormal value, a drive voltage abnormal value, a drive current abnormal value, and a detected abnormal value. Each initial value of abnormal values such as a tube voltage abnormal value, a tube current abnormal value, a drive voltage abnormal value, a drive current abnormal value, and a detected abnormal value may be zero. Therefore, if the values TV, TC, Ep, Ip, and Dv are within the corresponding threshold ranges, the abnormal value corresponding to the values TV, TC, Ep, Ip, and Dv is zero. The above threshold value is an example, and the threshold value may be changed according to the tube voltage value TV, for example. In this case, the threshold value may be stored in the sign side storage unit 60 in association with the tube voltage TV.

Next, an example of a warning image displayed on the maintenance device 16 will be described with reference to FIGS. 4A and 4B. 4A and 4B are diagrams illustrating an example of the warning image 92 output from the maintenance device 16. The diagnosis unit 74 of the maintenance device 16 may display the warning image 92 on the display unit 73 based on the predictive data 68 acquired from the predictive data server 14. Specifically, the diagnosis unit 74 diagnoses the abnormal level based on the tube voltage abnormal value, the tube current abnormal value, the drive voltage abnormal value, the drive current abnormal value, and the detected abnormal value included in the predictive data 68. . For example, the diagnosis unit 74 may set the number of abnormal values other than 0 among the abnormal tube voltage value, the abnormal tube current value, the abnormal drive voltage value, the abnormal drive current value, and the detected abnormal value as an abnormal level. In this case, the diagnosis unit 74 sets an abnormal level in a range from 0 level to 5 level. The diagnosis unit 74 may set an abnormality level based on a predetermined abnormality determination threshold. In this case, the diagnosis unit 74 sets the number of abnormal values equal to or higher than the abnormality determination threshold among the abnormal tube voltage value, abnormal tube current value, abnormal drive voltage value, abnormal drive current value, and detected abnormal value as an abnormal level. May be set. In the present embodiment, the diagnosis unit 74 sets 0 to 5 as the abnormal level, but is not limited to this, and it is possible to set 6 or more as the abnormal level. The diagnosis unit 74 may increase the abnormal level indicated by the warning image 92 displayed on the display unit 73 every time the indication data server 14 notifies the measurement information 56 that a spike has occurred. For example, the diagnosis unit 74 may increase the abnormal level by one each time the predictive data server 14 is notified that a spike has occurred in the measurement information 56 within a range from 0 level to 5 level. Moreover, the diagnosis part 74 may raise an abnormal level, when the spike generate | occur | produces more than the preset frequency in the predictive data 68 within the preset period. Thereby, it is possible to temporarily prevent an abnormal level from increasing when a spike occurs in the predictive data 68, and to increase the abnormal level when there is a high possibility that an abnormality has occurred in the X-ray thickness measuring apparatus 12. it can. As a result, the reliability of the abnormal level set by the diagnosis unit 74 can be increased.

The diagnosis unit 74 may generate a warning image 92 according to the abnormal level. Specifically, the diagnosis unit 74 generates a warning image 92 indicating the set abnormality level. Then, the display unit 73 displays the generated warning image 92. For example, when the abnormal level is 1, the diagnosis unit 74 generates a warning image 92 in which the bottom square among the five squares arranged in the warning image 92 is colored, as shown in FIG. 4A. The generated warning image 92 may be displayed on the display unit 73. If the abnormal level is 4, the diagnosis unit 74, as shown in FIG. 4B, the warning image 92 in which the four squares from the bottom are colored out of the five squares arranged in the warning image 92. And the generated warning image 92 may be displayed on the display unit 73. The diagnosis unit 74 may change the color to be colored for each square in the warning image 92. Thus, the diagnosis unit 74 causes the display unit 73 to display the warning image 92 generated according to the abnormality level.

Next, an example of the flow of measurement processing executed by the control-side processing unit 46 of the X-ray thickness measuring apparatus 12 will be described with reference to FIG. FIG. 5 is a flowchart of measurement processing executed by the control-side processing unit 46 of the X-ray thickness measuring apparatus 12. The control processing unit 46 executes the measurement process by reading the measurement program 54.

As shown in FIG. 5, in the measurement process, the reception unit 50 of the control side processing unit 46 acquires the tube voltage value TV and the tube current value TC from the tube detection unit 44 and outputs them to the calculation unit 52 (S102). . The receiving unit 50 acquires the drive voltage value Ep and the drive current value Ip from the drive detection unit 42 and outputs them to the calculation unit 52 (S104). The calculation unit 52 compares the tube voltage value TV with the set voltage value and controls the drive voltage value Ep (S106). For example, if the tube voltage value TV is lower than the set voltage value, the calculating unit 52 outputs a power control signal indicating a voltage value higher than the acquired drive voltage value Ep to the X-ray control power source 22. On the other hand, if the tube voltage value TV is higher than the set voltage value, the calculation unit 52 outputs a power supply control signal indicating a voltage value lower than the acquired drive voltage value Ep to the X-ray control power supply 22. The X-ray control power supply 22 changes the drive voltage value Ep to the voltage value indicated by the acquired power supply control signal, and supplies power to the X-ray generator 30.

The reception unit 50 acquires the detection value Dv from the output detection unit 34 and outputs it to the calculation unit 52 (S108). The calculation unit 52 calculates the thickness of the measurement target 90 based on the detection value Dv (S110). The calculation unit 52 outputs measurement information 56 including the drive voltage value Ep, the drive current value Ip, the tube voltage value TV, the tube current value TC, and the detection value Dv to the network 18 (S112). Thereafter, the control-side processing unit 46 repeats step S102 and subsequent steps.

Next, an example of the flow of predictive processing executed by the predictive side processing unit 58 of the predictive data server 14 will be described with reference to FIG. FIG. 6 is a flowchart of the sign process executed by the sign side processing unit 58 of the sign data server 14. The sign side processing unit 58 executes the sign process by reading the sign program 66.

As shown in FIG. 6, in the sign process, the acquisition unit 62 acquires the measurement information 56 from the network 18 and outputs the measurement information 56 to the sign unit 64 (S132). The sign unit 64 generates the sign data 68 (S134). The predictor 64 compares, for example, each value TV, TC, Ep, Ip, Dv included in the measurement information 56 with a threshold value to determine whether each value TV, TC, Ep, Ip, Dv is an abnormal value. The prediction data 68 including the number of abnormal values is generated. The sign unit 64 stores the generated sign data 68 in the sign side storage unit 60 (S136). The sign unit 64 determines whether a request for the sign data 68 has been acquired (S138). When the sign unit 64 determines that the request for the sign data 68 has not been acquired (S138: No), the sign side processing unit 58 repeats step S132 and subsequent steps. When the predictor 64 determines that the request for the predictor data 68 has been acquired (S138: Yes), the predictor 64 outputs the predictor data 68 to the network 18 (S140). After this, the sign side processing unit 58 repeats step S132 and subsequent steps.

Next, an example of the flow of maintenance processing executed by the maintenance-side processing unit 70 of the maintenance device 16 will be described with reference to FIG. FIG. 7 is a flowchart of maintenance processing executed by the maintenance-side processing unit 70 of the maintenance device 16. The maintenance processing unit 70 executes the maintenance process by reading the maintenance program 76.

As shown in FIG. 7, in the maintenance process, the diagnosis unit 74 outputs a request for the predictive data 68 to the network 18 (S152). The diagnosis unit 74 determines whether or not the predictive data 68 has been acquired (S154). The diagnosis unit 74 is in a standby state until the sign data 68 is acquired (S154: No). When the diagnosis unit 74 acquires the sign data 68 (S154: Yes), the diagnosis unit 74 diagnoses an abnormality of the X-ray thickness measurement apparatus 12 based on the number of abnormal values included in the sign data 68 and calculates an abnormality level ( S156). The diagnosis unit 74 outputs information indicating a warning corresponding to the calculated abnormality level (for example, the warning image 92 shown in FIGS. 4A and 4B) to the display unit 73 (S158). Thereafter, the maintenance-side processing unit 70 repeats step S152 and subsequent steps.

As described above, the predictive data server 14 according to the first embodiment can generate and store the predictive data 68 for diagnosing an abnormality such as a failure of the X-ray thickness measuring apparatus 12. Thereby, the predictive data server 14 can diagnose the abnormality of the X-ray thickness measuring device 12 and can reduce the processing load of the plate thickness calculation unit 24 of the X-ray thickness measuring device 12 and the storage capacity necessary for the diagnosis. .

Further, the predictive data server 14 of the first embodiment provides the accumulated predictive data 68 to the maintenance device 16 in response to a request from the maintenance device 16. Thereby, the predictive data server 14 can realize diagnosis of abnormality of the X-ray thickness measuring device 12 in the maintenance device 16.

Second Embodiment
Next, a second embodiment in which the method for generating the predictive data 68 of the first embodiment is changed will be described.

The sign unit 64 of the second embodiment generates the sign data 68 based on the result of comparing the standard deviation of each value TV, TC, Ep, Ip, and Dv with a threshold value. That is, the predictor 64 generates predictor data 68 including a comparison result between the standard deviation of each value TV, TC, Ep, Ip, and Dv and a threshold value. 8A, 8B, 8C, 8, 8D, and 8E are graphs of standard deviations of the values TV, TC, Ep, Ip, and Dv included in the measurement information 56, respectively. The horizontal axis of FIG. 8A, FIG. 8B, FIG. 8C, FIG. 8D, and FIG. The vertical axis of the graph in FIG. 8A indicates the standard deviation of the tube voltage value TV. The vertical axis of the graph in FIG. 8B indicates the standard deviation of the tube current value TC. The vertical axis of the graph in FIG. 8C indicates the standard deviation of the drive voltage value Ep. The vertical axis of the graph in FIG. 8D indicates the standard deviation of the drive current value Ip. The vertical axis of the graph in FIG. 8E indicates the standard deviation of the detection value Dv. The standard deviation of each value TV, TC, Ep, Ip, and Dv in FIGS. 8A, 8B, 8C, 8D, and 8E is when the drive voltage value Ep is controlled to maintain the tube voltage value TV at 100 kV. Is the value of

The acquisition unit 62 acquires the values TV, TC, Ep, Ip, and Dv shown in FIGS. 8A, 8B, 8C, 8D, and 8E output from the plate thickness calculation unit (control device) 24 from the network 18. And output to the predictor 64. When the predictor 64 acquires each value TV, TC, Ep, Ip, and Dv, it calculates a standard deviation of each value TV, TC, Ep, Ip, and Dv. The sign unit 64 generates the sign data 68 based on a result of comparing a standard threshold with a preset threshold value associated with the standard deviation. The predictor 64 compares the threshold with the standard deviation of at least one of the drive voltage value Ep, the drive current value Ip, the tube voltage value TV, the tube current value TC, and the detection value Dv included in the measurement information 56. Based on the above, the predictive data 68 may be generated. Here, the preset threshold value is a normal value of the standard deviation of each value TV, TC, Ep, Ip, Dv at the time of the shipping test of the X-ray thickness measuring apparatus 12, and each value TV, It is set based on a value obtained by adding a margin to the fluctuation range of the standard deviation of TC, Ep, Ip, and Dv.

As shown in FIG. 8A, the predictor 64 determines whether, for example, the standard deviation of the tube voltage value TV is not less than the first threshold Th1 + a or not more than the second threshold Th1-a. For example, if the standard deviation of the tube voltage value TV is not less than the first threshold Th1 + a or not more than the second threshold Th1-a, the predictor 64 increments the tube voltage abnormal value by 1. In the example shown in FIG. 8A, since the tube voltage value TV is not equal to or higher than the first threshold Th1 + a or equal to or lower than the second threshold Th1-a, the tube voltage abnormal value is not incremented.

As shown in FIG. 8B, the predictor 64 determines whether, for example, the standard deviation of the tube current value TC is greater than or equal to the third threshold Th2 + b or less than the fourth threshold Th2-b. For example, if the standard deviation of the tube current value TC is not less than the third threshold Th2 + b or not more than the fourth threshold Th2-b, the predictor 64 increments the tube current abnormal value by one. For example, in the example shown in FIGS. 8A, 8B, 8C, 8D, and 8E, the predictor 64 has a standard deviation of the tube current value TC in the region surrounded by the broken line equal to or greater than the third threshold Th2 + b, or the fourth Since it is twice below the threshold value Th2-b, the tube current abnormal value is incremented by 2.

As shown in FIG. 8C, the predictor 64 determines whether, for example, the standard deviation of the drive voltage value Ep is greater than or equal to the fifth threshold Th3 + c or less than or equal to the sixth threshold Th3-c. For example, if the standard deviation of the drive voltage value Ep is not less than the fifth threshold Th3 + c or not more than the sixth threshold Th3-c, the predictor 64 increments the drive voltage abnormal value by one. In the example shown in FIG. 8C, the drive voltage value Ep is not greater than or equal to the fifth threshold value Th + c or less than or equal to the sixth threshold value Th−c. Therefore, the drive voltage abnormal value is not incremented.

As shown in FIG. 8D, the predictor 64 determines whether, for example, the standard deviation of the drive current value Ip is greater than or equal to the seventh threshold Th4 + d or less than or equal to the eighth threshold Th4-d. For example, if the standard deviation of the drive current value Ip is greater than or equal to the seventh threshold Th4 + d or less than or equal to the eighth threshold Th4-d, the predictor 64 increments the drive current abnormal value by one. In the example shown in FIG. 8D, the drive current value Ip is not equal to or greater than the seventh threshold Th4 + d or equal to or less than the eighth threshold Th4-d, and thus the drive current abnormal value is not incremented.

As shown in FIG. 8E, the predictor 64 determines whether, for example, the standard deviation of the detection value Dv is equal to or greater than a ninth threshold Th5 + e or equal to or less than a tenth threshold Th5-e. For example, if the standard deviation of the detection value Dv is equal to or larger than the ninth threshold Th5 + e or equal to or smaller than the tenth threshold Th5-e, the predictor 64 increments the detected abnormal value by one. In the example shown in FIG. 8E, since the detection value Dv is not equal to or greater than the ninth threshold Th + e or equal to or less than the tenth threshold Th5-e, the detected abnormal value is not incremented.

The predictor 64 generates predictive data 68 including abnormal values such as a tube voltage abnormal value, a tube current abnormal value, a drive voltage abnormal value, a drive current abnormal value, and a detected abnormal value. Each initial value of abnormal values such as a tube voltage abnormal value, a tube current abnormal value, a drive voltage abnormal value, a drive current abnormal value, and a detected abnormal value may be zero. Therefore, if the standard deviation of the values TV, TC, Ep, Ip, and Dv is within the corresponding threshold range, the abnormal value corresponding to the standard deviation of the values TV, TC, Ep, Ip, and Dv is 0.

As described above, the predictive data server 14 of the second embodiment generates the predictive data 68 based on the standard deviations of the values TV, TC, Ep, Ip, and Dv included in the measurement information 56. Thereby, the sign data server 14 can generate the sign data 68 that can reduce misdiagnosis of the abnormality of the X-ray thickness measurement device 12 based on the short time error of the measurement information 56 and is necessary for storing the sign data 68. The storage capacity can be reduced.

<Third Embodiment>
Next, a description will be given of a third embodiment in which the method for generating the predictive data 68 according to the above-described embodiment is changed.

The sign unit 64 of the third embodiment generates the sign data 68 based on the result of comparison between the product of the variance of the detected value Dv and the kurtosis and a preset threshold value. The sign unit 64 calculates the product of the variance and the kurtosis of the detection value Dv included in the measurement information 56. The sign unit 64 may generate the sign data 68 based on a result of comparing the product of the calculated variance and the kurtosis and a preset threshold value. That is, the sign unit 64 generates the sign data 68 including a comparison result between the product of the variance of the detected value Dv and the kurtosis and the threshold value. Here, the preset threshold value is a normal value of the product of the variance and kurtosis of the detection value Dv at the time of the shipping test of the X-ray thickness measuring apparatus 12, and the variance and the peak of the detection value Dv at the time of the shipping test are set. It is set based on the value obtained by adding a margin to the fluctuation range of the product of degrees. FIG. 9 is a graph of the product of the variance of the detected value Dv included in the measurement information 56 and the kurtosis.

The statistical error with respect to the thickness of the measuring object 90 has a Poisson distribution. Using this statistical error, the nature of the noise is detected. When the statistical error follows a Poisson distribution, the variance and the kurtosis can be expressed by the following equation using the average value m.
Variance = m
Kurtosis = 1 / m

Therefore, the product of the variance and the kurtosis of the detected value Dv according to the Poisson distribution is a constant value (that is, 1) regardless of the average value m. Accordingly, the product of the variance of the detected value Dv and the kurtosis is approximately 1 if there is no abnormality in the filament 38 or the like. On the other hand, if it is just before the filament 38 is cut, the product of the variance and the kurtosis of the detection value Dv shows a high value as shown by the area surrounded by the broken-line square in FIG. Therefore, the predictor 64 can detect an abnormality in the filament 38 and the like by comparing the product of the dispersion of the detection value Dv and the kurtosis and the predetermined threshold Th6. The sign unit 64 may generate the sign data 68 by incrementing the detected abnormal value by 1 when the product of the variance of the detected value Dv and the kurtosis is equal to or greater than the threshold Th6.

As described above, the sign data server 14 according to the third embodiment generates the sign data 68 based on the product of the variance of the detected value Dv included in the measurement information 56 and the kurtosis. Thereby, the sign data server 14 can generate the sign data 68 that can reduce misdiagnosis of the abnormality of the X-ray thickness measurement device 12 based on the short time error of the measurement information 56 and is necessary for storing the sign data 68. The storage capacity can be reduced.

In the third embodiment, the sign unit 64 generates the sign data 68 based on the result of comparing the product of the variance of the detection value Dv and the kurtosis and a preset threshold value. The result of comparing the standard deviation of each value TV, TC, Ep, Ip, Dv and a preset threshold value, the product of the variance of the detected value Dv and the kurtosis, and a preset threshold value, As long as the predictive data 68 is generated based on at least one of the comparison results, the present invention is not limited to this. For example, the sign unit 64 compares the standard deviation of each value TV, TC, Ep, Ip, and Dv with a preset threshold value, and the product of the variance and kurtosis of the detected value Dv. The sign data 68 may be generated based on both the result of comparing the preset threshold value.

<Fourth embodiment>
In the present embodiment, the sign data server 14 stores measurement information 56 acquired from the X-ray thickness measurement apparatus 12, and statistics of a predetermined number of measurement information 56 or measurement information 56 for each predetermined period are used as the sign data 68. This is an example of generation. In the following description, description of the same configuration as that of the above-described embodiment is omitted.

First, an example of a functional configuration of the predictive data server 14 of the present embodiment will be described.

The acquisition unit 62 writes the measurement information 56 acquired from the X-ray thickness measurement device 12 in the sign side storage unit 60.

The sign unit 64 generates, as the sign data 68, statistics of a predetermined number of continuous measurement information 56 or measurement information 56 for a predetermined period of the measurement information 56 stored in the sign side storage unit 60. Here, the continuous measurement information 56 is measurement information 56 continuously generated by the X-ray thickness measurement apparatus 12 (calculation unit 52). The predetermined number is a preset number, for example, 60,000 on each day. Further, the predetermined period is a period set in advance, for example, 5 minutes for each day.

The sign unit 64 writes the generated sign data 68 in the sign side storage unit 60 in association with the time data added to the measurement information 56 used to generate the sign data 68.

By the way, when an abnormality such as a failure occurs in the X-ray generator 30, the thickness of the measurement target 90 cannot be calculated, and the thickness of the measurement target 90 in the steel plate production line cannot be controlled and monitored. Therefore, before an abnormality occurs in the X-ray generator 30 (for example, during regular inspection of the steel sheet production line), if maintenance such as replacement of an abnormal portion of the X-ray generator 30 can be performed, the X-ray generator 30 The influence on the steel sheet production line due to the abnormality can be reduced.

However, the number of predictor data 68 generated using the measurement information 56 is enormous, and it is difficult to find the necessary predictor data 68 from the enormous number of predictor data 68. Therefore, in the present embodiment, the sign unit 64 writes the generated sign data 68 in the sign side storage unit 60 in association with the time data added to the measurement information 56 used to generate the sign data 68. This makes it possible to search for necessary predictor data 68 with reference to time data associated with the predictor data 68 stored in the predictor-side storage unit 60. As a result, the necessary predictor data 68 can be easily found from the enormous number of predictor data 68 stored in the predictor-side storage unit 60.

In the embodiment, the sign unit 64 uses the generated sign data 68 to include the time data added to the measurement information 56 acquired first among the measurement information 56 used to generate the sign data 68 and the measurement acquired last. In association with the time data added to the information 56, it is written in the predictor-side storage unit 60.

The sign unit 64 deletes the measurement information 56 used to generate the sign data 68 from the sign side storage unit 60 among the measurement information 56 stored in the sign side storage unit 60 after the sign data 68 is generated. To do. Thereby, the storage capacity required for storing the measurement information 56 in the predictive data server 14 can be reduced. However, when a spike occurs in the measurement information 56, the predictor 64 stops the deletion of the measurement information 56 from the predictor-side storage unit 60 using the occurrence of the spike in the measurement information 56 as a trigger. As a result, when there is a possibility that a spike has occurred in the measurement information 56 and an abnormality has occurred in the X-ray thickness measurement apparatus 12, the X-ray thickness measurement apparatus 12 is used using not only the predictive data 68 but also the measurement information 56. Can be analyzed.

In the embodiment, the predicting unit 64 is configured to detect a spike when at least one of a tube voltage value, a tube current value, a drive voltage value, a drive current value, a detected value, and a thickness included in the measurement information 56 occurs. The deletion of the measurement information 56 from the storage unit 60 is stopped. In the embodiment, the sign unit 64 includes the measurement information to which time data after the time data added to the measurement information 56 in which the spike has occurred is added to the measurement information 56 stored in the sign side storage unit 60. 56 is not deleted.

When the sign unit 64 cancels the deletion of the measurement information 56 from the sign side storage unit 60 and no spike occurs again in the measurement information 56 for a preset period (for example, 24 hours). Then, the deletion of the measurement information 56 from the sign side storage unit 60 is resumed. If a spike occurs in the measurement information 56 temporarily due to the entry of dust or the like into the X-ray thickness measurement device 12, there is a high possibility that an abnormality has occurred in the X-ray thickness measurement device 12, and the measurement information 56 is stored in the measurement information 56. Since the necessity of analyzing the abnormality of the X-ray thickness measurement device 12 is low, the deletion of the measurement information 56 from the sign side storage unit 60 is resumed. Thereby, the storage capacity required for storing the measurement information 56 in the predictive data server 14 can be reduced. The sign unit 64 of the embodiment, when a spike has occurred in the measurement information 56, when no spike has occurred in the measurement information 56 for a preset period, time data added to the measurement information 56 in which the spike has occurred. The measurement information 56 to which time data after a preset period has been added is deleted from the sign side storage unit 60.

Also, every time a spike occurs in the measurement information 56, the predictor 64 notifies the maintenance device 16 via the network 18 that a spy has occurred in the measurement information 56. Furthermore, the predictor 64 has spikes in the detected value included in the measurement information 56 and the thickness of the measurement target 90, but the drive voltage value, drive current value, tube voltage value, and tube current value included in the measurement information 56 In the case where no spikes and fluctuations occur in the X-ray thickness measuring device 12, it is detected that there is an abnormality in a portion other than the X-ray tube 36. Then, the sign unit 64 notifies the maintenance device 16 via the network 18 that there is an abnormality in the X-ray thickness measurement device 12 other than the X-ray tube 36.

Next, an example of a functional configuration of the maintenance device 16 of the present embodiment will be described.

The diagnosis unit 74 causes the display unit 73 to display a graph (hereinafter referred to as a predictive data graph) in which the predictive data 68 acquired from the predictive data server 14 is the X axis and the time axis is the Y axis. The diagnosis unit 74 causes the display unit 73 to display time zone measurement information 56 on the time axis of the predictive data graph, which is instructed via an operation unit (not shown) included in the maintenance device 16.

Thereby, when the operator of the maintenance device 16 recognizes that there is an abnormality in the X-ray thickness measuring device 12 by looking at the predictive data 68 displayed on the display unit 73, the measurement information 56 is easily confirmed. Therefore, the analysis of the abnormality of the X-ray thickness measuring apparatus 12 using the measurement information 56 can be facilitated. In the embodiment, the diagnosis unit 74 acquires the measurement information 56 output from the X-ray thickness measurement device 12 in advance, and among the acquired measurement information 56, the time data in the designated time zone is added. Information 56 is displayed on the display unit 73.

In addition, the diagnosis unit 74 causes the display unit 73 to display a notification image notifying that the spike has occurred in the measurement information 56 when the indication data server 14 is notified that the spike has occurred in the measurement information 56. . Thereby, the operator of the maintenance apparatus 16 can easily recognize that some abnormality has occurred in the X-ray thickness measurement apparatus 12.

Next, an example of a process for generating the predictor data 68 that is the statistics of the tube voltage TV included in the measurement information 56 will be described with reference to FIGS. Here, an example of generating the tube voltage predictor data 68 included in the measurement information 56 will be described. However, other parameters included in the measurement information 56 (for example, the tube current value TC, the drive voltage value Ep, the drive current value Ip, and the detection Similarly, the predictive data 68 is generated for the value Dv and the thickness T.

FIG. 10 is a diagram illustrating an example of the tube voltage included in the measurement information acquired by the predictive data server according to the fourth embodiment. In FIG. 10, the vertical axis represents the tube voltage TV (kV), and the horizontal axis represents the time axis (ms). As shown in FIG. 10, the predictor 64 acquires measurement information 56 including a detection result of the tube voltage TV of about 130 kV. Based on the detection result of the tube voltage TV shown in FIG. 10, the predictor 64 indicates the predictor data 68 (for example, average, standard deviation, variance, skewness) of the tube voltage TV every predetermined period (here, 100 s). , And kurtosis).

FIG. 11 is a diagram illustrating an example of an average generation result of tube voltages generated by the predictive data server according to the fourth embodiment. In FIG. 11, the vertical axis represents the average (kV) of the tube voltage TV, and the horizontal axis represents the time axis (ms). As shown in FIG. 11, the sign unit 64 generates an average of the tube voltage TV for each predetermined period (here, 100 s) as the sign data 68.

FIG. 12 is a diagram illustrating an example of the generation result of the standard deviation of the tube voltage generated by the predictive data server according to the fourth embodiment. In FIG. 12, the vertical axis represents the standard deviation (kV) of the tube voltage TV, and the horizontal axis represents the time axis (ms). As shown in FIG. 12, the predictor 64 generates the standard deviation σ of the tube voltage TV for each predetermined period (here, 100 s) as the predictor data 68.

FIG. 13 is a diagram illustrating an example of a generation result of tube voltage dispersion generated by the predictive data server according to the fourth embodiment. In FIG. 13, the vertical axis represents the dispersion of the tube voltage TV, and the horizontal axis represents the time axis (ms). As shown in FIG. 13, the predictor 64 generates a distribution of the tube voltage TV for each predetermined period (here, 100 s) as the predictor data 68.

FIG. 14 is a diagram illustrating an example of the generation result of the skewness of the tube voltage generated by the predictive data server according to the fourth embodiment. In FIG. 14, the vertical axis represents the skewness of the tube voltage TV, and the horizontal axis represents the time axis (ms). As shown in FIG. 14, the predictor 64 generates the skewness of the tube voltage TV every predetermined period (here, 100 s) as the predictor data 68.

FIG. 15 is a diagram illustrating an example of a generation result of the kurtosis of the tube voltage generated by the predictive data server according to the fourth embodiment. In FIG. 15, the vertical axis represents the kurtosis of the tube voltage TV, and the horizontal axis represents the time axis (ms). As shown in FIG. 15, the sign unit 64 generates the kurtosis of the tube voltage TV for each predetermined period (here, 100 s) as the sign data 68.

Next, an example of a writing process of the measurement information 56 by the predictive data server 14 according to the present embodiment will be described with reference to FIG. Here, the writing process of the measurement information 56 when a spike occurs in the tube voltage TV will be described. However, other parameters included in the measurement information 56 (for example, the tube current value TC, the drive voltage value Ep, the drive current value Ip) are described. , The detection value Dv, and the thickness T), the writing process of the measurement information 56 is executed in the same manner.

FIG. 16 is a diagram for explaining an example of the measurement information writing process in the predictive data server according to the fourth embodiment. In FIG. 16, the vertical axis represents the tube voltage TV (kV), and the horizontal axis represents the time axis (ms). The sign unit 64 deletes the measurement information 56 used to generate the sign data 68 from the sign side storage unit 60 among the measurement information 56 stored in the sign side storage unit 60 after generating the sign data 68.

However, as shown in FIG. 16, when a spike occurs in the tube voltage TV at time t <b> 1, the predictor 64 stops deleting the measurement information 56. Then, as shown in FIG. 16, after the deletion of the measurement information 56 from the sign side storage unit 60 is stopped, the tube voltage TV is spiked again until time t2 when a preset period (for example, 830 s) has elapsed. In the case where no occurrence has occurred, the deletion of the measurement information 56 from the sign side storage unit 60 is resumed.

Next, an example of display processing of the predictive data 68 and the measurement information 56 by the maintenance device 16 according to the present embodiment will be described with reference to FIG. Here, an example of displaying the standard deviation σ, which is an example of the predictive data 68 of the tube voltage TV included in the measurement information 56, will be described, but the predictor data 68 of other parameters included in the measurement information 56 is displayed in the same manner. .

FIG. 17 is a diagram for explaining an example of display processing of predictive data and measurement information by the maintenance device according to the fourth embodiment. As shown in FIG. 17, the diagnosis unit 74 of the maintenance device 16 displays a window W1 including a predictive data graph 1701 in which the vertical axis represents the standard deviation σ of the tube voltage TV and the horizontal axis represents the time axis (ms). Display on the unit 73.

The diagnosis unit 74 is instructed through the operation unit (not shown) of the maintenance device 16 of the time zone for displaying the measurement information 56 on the time axis of the predictive data graph 1701 in the window W1 displayed on the display unit 73. Then, a window W2 including a graph of the tube voltage TV in the designated time zone is displayed on the display unit 73. Here, in the graph of the tube voltage TV, the vertical axis represents the tube voltage TV (kV), and the horizontal axis represents the time axis (ms).

As a result, when the operator of the maintenance device 16 recognizes that there is an abnormality in the X-ray thickness measurement device 12 by looking at the predictor data graph 1701 displayed in the window W1, the graph of the tube voltage TV is easily displayed. Since it can be confirmed, the analysis of the abnormality of the X-ray thickness measuring apparatus 12 using the measurement information 56 can be facilitated.

Next, an example of the flow of predictive processing executed by the predictive side processing unit 58 of the predictive data server 14 according to the present embodiment will be described with reference to FIG.

FIG. 18 is a flowchart showing an example of the flow of predictive processing executed by the predictive data server according to the fourth embodiment.

As illustrated in FIG. 18, in the sign processing of the present embodiment, the acquisition unit 62 acquires the measurement information 56 from the X-ray thickness measurement device 12 via the network 18 and writes the measurement information 56 in the sign side storage unit 60 ( S1801). The predictor 64 determines whether a predetermined number of continuous measurement information 56 has been acquired (S1802). When the predetermined number of continuous measurement information 56 has not been acquired (S1802: No), the process returns to S1801, and the acquisition unit 62 acquires new measurement information 56.

On the other hand, when the predetermined number of continuous measurement information 56 is acquired (S1802: Yes), the predictor 64 generates the predictor data 68 based on the predetermined number of continuous measurement information 56 (S1803). The predictor 64 compares, for example, each value TV, TC, Ep, Ip, Dv included in the measurement information 56 with a threshold value to determine whether each value TV, TC, Ep, Ip, Dv is an abnormal value. The prediction data 68 including the number of abnormal values is generated. The sign unit 64 stores the generated sign data 68 in the sign side storage unit 60 (S1804).

Further, the predictor 64 may detect that a spike has occurred in the acquired measurement information 56 or that a preset period has elapsed since a spike has occurred in the measurement information 56 at the end, and no new spike has occurred. It is determined whether or not (S1805). When no spike has occurred in the acquired measurement information 56, or when a preset period has elapsed since the last occurrence of the spike in the measurement information 56 (S1805: No), the sign unit 64 displays the sign. The acquired measurement information 56 is deleted from the side storage unit 60 (S1806). On the other hand, if a spike has occurred in the acquired measurement information 56, or if a preset period has not elapsed since the last spike in the measurement information 56 (S1805: Yes), the predictor 64 The measurement information 56 from the sign side storage unit 60 is not deleted.

Next, the sign unit 64 determines whether or not a request for the sign data 68 has been acquired from the maintenance device 16 (S1807). When the sign unit 64 determines that the request for the sign data 68 has not been acquired (S1807: No), the sign side processing unit 58 repeats step S1801 and subsequent steps. When the predictor 64 determines that the request for the predictor data 68 has been acquired (S1807: Yes), the predictor 64 outputs the predictor data 68 to the network 18 (S1808). Thereafter, the sign side processing unit 58 repeats Step S1801 and the subsequent steps.

As described above, according to the predictor data server 14 according to the fourth embodiment, the necessary predictor data 68 is searched with reference to the time data associated with the predictor data 68 stored in the predictor-side storage unit 60. Is possible. As a result, the necessary predictor data 68 can be easily found from the enormous number of predictor data 68 stored in the predictor-side storage unit 60.

Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

In the above-described embodiment, the example in which the diagnosis unit 74 is provided in the maintenance device 16 different from the predictive data server 14 has been described. However, the diagnosis unit 74 may be provided in the predictive data server 14.

Claims (13)

An X-ray control power source that supplies power; a filament that emits electrons by the power from the X-ray control power source; and a target that irradiates a target whose thickness is to be measured by collision of electrons emitted from the filament A line generator, a detection unit that outputs at least one of a detection voltage and a detection current as a detection signal in accordance with the intensity of the X-ray that has passed through the measurement target, and power from the X-ray control power source is transformed. A transformer to be supplied to the filament; a drive detection unit that detects a drive voltage value that is a voltage on a primary side of the transformer and a drive current value that is a current value that flows on a primary side of the transformer; the filament; A tube detector that detects a tube voltage value that is a voltage between targets and a tube current value that is a current value flowing between the filament and the target; From X-ray thickness measuring device and a said drive voltage, the drive current value, the tube voltage value, the tube current value, and the acquisition unit for acquiring measurement information including at least one of said detection signal,
A statistic unit that generates statistics of the measurement information acquired by the acquisition unit as predictive data for diagnosing an abnormality of the X-ray thickness measurement apparatus;
A storage unit for storing the precursor data generated by the precursor unit;
Predictive data server. The X-ray thickness measurement apparatus further includes a plate thickness calculation unit that calculates the thickness of the measurement target based on the detection signal output from the detection unit,
The acquisition unit includes at least one of thicknesses calculated by the drive voltage value, the drive current value, the tube voltage value, the tube current value, the detection signal, and the plate thickness calculation unit from the X-ray thickness measurement device. Obtaining the measurement information including one parameter and added with time data at the time of detection or calculation of the parameter;
The sign section generates a predetermined number of continuous measurement information or statistics of the measurement information for each predetermined period as the sign data, and the sign data is added to the measurement information used to generate the sign data. The predictor data server according to claim 1, wherein the predictor data server is written in the storage unit in association with the time data. The said sign part writes the said measurement information acquired by the said acquisition part to the said memory | storage part, The said measurement information used for the production | generation of the said sign data is deleted from the said memory | storage part after the said sign data are produced | generated. Predictive data server described in. When the predictor stops the deletion of the measurement information from the storage unit triggered by the occurrence of the spike of the measurement information, and the spike of the measurement information does not occur again for a preset time The sign data server according to claim 3, wherein deletion of the measurement information from the storage unit is resumed. The sign data server according to any one of claims 1 to 4, wherein a period of obtaining the measurement information by the obtaining unit is longer than a time required for generating the sign data. The predictor has spikes and fluctuations in the thickness calculated by the detection signal and the plate thickness calculator, but the drive voltage value, the drive current value, the tube voltage value, and the tube current value When no spike or fluctuation occurs in the X-ray thickness measurement apparatus, the maintenance apparatus is notified that there is an abnormality in a location other than the X-ray tube in which the filament and the target are accommodated. Item 6. The predictive data server according to any one of Items 1 to 5. The predictor includes a comparison result between a standard deviation of the measurement information and a first threshold value, a product of variance and kurtosis of the detection signal included in the measurement information, and a second threshold value. The sign data server according to claim 1, wherein the sign data including the sign data is generated. The predictive data server according to any one of claims 1 to 7,
The X-ray thickness measuring device;
A maintenance device,
The sign unit outputs the sign data stored in the storage unit to the maintenance device in response to a request from the maintenance device,
The maintenance device includes a display unit that displays the predictor data.
X-ray thickness measurement system. The predictor notifies the maintenance device that a spike has occurred in the measurement information every time a spike occurs in the measurement information,
The said display part displays the indicator which shows the abnormal level of the said X-ray thickness measuring apparatus, and raises the said abnormal level whenever it is notified from the said predictive data server that the said measurement information generate | occur | produced the spike. The X-ray thickness measurement system according to 8. The display unit displays an indicator indicating an abnormal level of the X-ray thickness measuring apparatus, and the spike is generated in the predictive data within a preset period when the spike occurs more than a preset number of times. The X-ray thickness measurement system according to claim 8. The display unit displays a graph with the predictive data as an X-axis and a time axis as a Y-axis, and displays the measurement information of the time zone on the Y-axis instructed via an operation unit. To X-ray thickness measurement system according to any one of 10. The X-ray thickness measurement system according to claim 9, wherein the display unit displays an image notifying that a spike has occurred in the measurement information. The X-ray thickness measurement system according to any one of claims 8 to 12, wherein the sign unit includes a notification unit that notifies the sign data to an external host device.

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