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WO2019220868A1 - Dispositif de décharge - Google Patents

Dispositif de décharge Download PDF

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Publication number
WO2019220868A1
WO2019220868A1 PCT/JP2019/016932 JP2019016932W WO2019220868A1 WO 2019220868 A1 WO2019220868 A1 WO 2019220868A1 JP 2019016932 W JP2019016932 W JP 2019016932W WO 2019220868 A1 WO2019220868 A1 WO 2019220868A1
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WO
WIPO (PCT)
Prior art keywords
switch
pulse
discharge
circuit unit
series
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2019/016932
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English (en)
Japanese (ja)
Inventor
正樹 金▲崎▼
宜久 山口
江　偉華
太一 須貝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Nagaoka University of Technology NUC
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Denso Corp
Nagaoka University of Technology NUC
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Publication date
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Publication of WO2019220868A1 publication Critical patent/WO2019220868A1/fr
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback

Definitions

  • the present disclosure relates to a discharge device.
  • a pulse generator that supplies a pulse voltage to a load using a Marx circuit has been proposed.
  • This pulse generator charges a plurality of capacitors from a power supply in a state where a plurality of capacitors in a Marx circuit are connected in parallel. Thereby, a lot of charges can be charged at a low voltage. And when supplying the charge charged in the Marx circuit to the load, a plurality of capacitors are connected in series connection. Thereby, a high voltage can be supplied to the load.
  • This disclosure intends to provide a discharge device with excellent energy efficiency.
  • One aspect of the present disclosure includes a first discharge electrode and a second discharge electrode, and a dielectric layer disposed on an inner surface of at least one of the first discharge electrode and the second discharge electrode.
  • Pulse discharge load A discharge device having a pulse power power supply circuit unit that periodically outputs a pulse voltage to the pulse discharge load,
  • the pulse power power supply circuit unit has an energy storage unit capable of storing electrical energy,
  • the pulse power power supply circuit unit is in a discharge device configured to reversibly move electrical energy between the energy storage unit and the pulse discharge load.
  • the pulse power power supply circuit unit is configured to reversibly move electrical energy between the energy storage unit and the pulse discharge load. As a result, even when electric charges remain in the dielectric layer after the pulse discharge load performs discharge, the electric energy generated by the electric charges can be recovered and stored in the energy storage unit of the pulse power power supply circuit unit. it can.
  • the electric energy stored in the energy storage unit can be supplied to the pulse discharge load. Therefore, the electrical energy repeatedly supplied to the pulse discharge load can be saved. As a result, a discharge device with excellent energy efficiency can be obtained.
  • the discharge device excellent in energy efficiency can be provided.
  • FIG. 1 is a circuit diagram of a discharge device in Embodiment 1.
  • FIG. 2 is an explanatory diagram of a pulse discharge load in the first embodiment.
  • FIG. 3 is a circuit diagram of the discharge device in a series state according to the first embodiment.
  • FIG. 4 is a circuit diagram of the discharge device in the parallel state according to the first embodiment.
  • FIG. 5 is a diagram showing temporal changes in the interelectrode voltage and current of the pulse discharge load in Embodiment 1.
  • FIG. 6 is a circuit diagram of a discharge device according to the second embodiment.
  • FIG. 7 is a circuit diagram of a discharge device in a parallel state according to the second embodiment.
  • FIG. 8 is a circuit diagram of the discharge device in a state where both electrodes of the pulse discharge load are short-circuited in the second embodiment.
  • FIG. 9 is a circuit diagram of the discharge device in the series state according to the second embodiment.
  • FIG. 10 is a circuit diagram of the discharge device in a series state according to the third embodiment.
  • FIG. 11 is a circuit diagram of a discharge device in a parallel state according to the third embodiment.
  • FIG. 12 is a circuit diagram of the discharge device in the series state after the parallel state in the third embodiment,
  • FIG. 13 is a circuit diagram of the discharge device in a series state in the fourth embodiment.
  • FIG. 14 is a circuit diagram of a discharge device in a parallel state according to the fourth embodiment.
  • FIG. 15 is a circuit diagram of a discharge device in a parallel state according to the fourth embodiment, and shows a state in which charge is collected to a capacitor.
  • FIG. 16 is a circuit diagram of a discharge device in a series state according to the fifth embodiment.
  • FIG. 17 is a circuit diagram of the discharge device in the parallel state in the fifth embodiment.
  • FIG. 18 is a circuit diagram of a discharge device in a parallel state according to the fifth embodiment, and shows a state in which charge is collected to a capacitor.
  • FIG. 19 is a circuit diagram of a discharge device in Embodiment 6.
  • FIG. 20 is a circuit diagram of the discharge device in a series state according to the sixth embodiment.
  • FIG. 21 is a circuit diagram of a discharge device in a parallel state according to the sixth embodiment.
  • the discharge device 1 of this embodiment includes a pulse discharge load 2 and a pulse power power supply circuit unit 3.
  • the pulse discharge load 2 includes a first discharge electrode 211, a second discharge electrode 212, and a dielectric layer 22.
  • the dielectric layer 22 is disposed on the inner surface of at least one of the first discharge electrode 211 and the second discharge electrode 212. In this embodiment, the dielectric layer 22 is disposed on the inner side surfaces of both the first discharge electrode 211 and the second discharge electrode 212.
  • the pulse power power supply circuit unit 3 periodically outputs a pulse voltage to the pulse discharge load 2. As shown in FIG. 1, the pulse power power supply circuit unit 3 includes an energy storage unit 31 that can store electrical energy. The pulse power power supply circuit unit 3 is configured to reversibly move electrical energy between the energy storage unit 31 and the pulse discharge load 2.
  • the pulse power power supply circuit unit 3 includes a plurality of capacitors Cm and a plurality of switches SW.
  • the pulse power power supply circuit unit 3 is configured to be able to switch between a serial state and a parallel state by switching on and off the plurality of switches SW.
  • the series state is a state in which a plurality of capacitors Cm are connected in series as shown in FIG.
  • the parallel state is a state in which a plurality of capacitors Cm are connected in parallel as shown in FIG.
  • the pulse power power supply circuit unit 3 forms a Marx circuit. As shown in FIG. 3, a pulse voltage is output to the pulse discharge load 2 in a series state. As shown in FIG. 4, electrical energy is recovered from the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2 to the energy storage unit 31 in a parallel state.
  • a broken line arrow Ip in FIG. 3 and a broken line arrow Ic in FIG. 4 indicate current flows. These current flows Ip and Ic are also positive charge flows. The same applies to broken line arrows Ip and Ic in other figures.
  • the energy storage unit 31 is configured by a plurality of capacitors Cm. That is, electric charge is accumulated in each of the plurality of capacitors Cm, and electric energy is accumulated.
  • the pulse power power supply circuit section 3 includes a plurality of stages of circuit units 4 (4A, 4B, 4Z), a DC power supply 5, and a series switch unit 6.
  • the DC power source 5 has a positive electrode connected to the first stage circuit unit 4A.
  • the series switch unit 6 is connected between the circuit unit 4Z at the final stage and the negative electrode of the DC power supply 5.
  • the pulse power power supply circuit unit 3 includes a first switch SW1 and a second switch SW2 belonging to the circuit unit 4 and a third switch SW3 belonging to the series switch unit 6 as a plurality of switches SW.
  • the circuit unit 4 includes a switch series body 41 and a capacitor Cm.
  • the switch series body 41 is formed by connecting a first switch SW1 and a second switch SW2 in series at an intermediate connection point 41M.
  • the capacitor Cm is connected in parallel to the switch series body 41.
  • the circuit unit 4 includes a first connection part 421 and a second connection part 422 as a connection part between the switch series body 41 and the capacitor Cm.
  • the series switch unit 6 is formed by connecting a plurality of third switches SW3 in series.
  • the first connection part 421 of the circuit unit 4Z at the final stage is connected to the first discharge electrode 211 of the pulse discharge load 2.
  • the negative electrode of the DC power supply 5 and one end of the series switch unit 6 are connected to each other and to the second discharge electrode 212 of the pulse discharge load 2.
  • the positive electrode of the DC power supply 5 is connected to the intermediate connection point 41M of the first-stage circuit unit 4A.
  • the first connection portion 421 of the (k ⁇ 1) -th stage circuit unit 4 is connected to the intermediate connection point 41M of the k-th stage circuit unit 4.
  • k is a natural number of 2 or more.
  • the number of stages of the circuit unit 4 included in the pulse power power supply circuit unit 3 is N.
  • k is a natural number of 2 to N.
  • N is a natural number of 2 or more.
  • the third switch SW3 in the series switch unit 6 is interposed. ing.
  • the third switch SW3 in the series switch unit 6 is also interposed between the second connection portion 422 of the first-stage circuit unit 4A and the negative electrode of the DC power supply 5.
  • the pulse power power supply circuit unit 3 includes three circuit units 4. Therefore, in the present embodiment, the N is 3 and the k is 2 or 3.
  • the pulse power power supply circuit unit 3 includes, as a plurality of circuit units 4, from the side close to the DC power supply 5, a first stage circuit unit 4A, a second stage circuit unit 4B, and a third stage circuit unit 4Z. And have.
  • the third-stage circuit unit 4Z becomes the final-stage circuit unit 4Z.
  • the number of stages of the circuit unit 4 is not particularly limited as long as it is a plurality of stages.
  • the series switch unit 6 has three third switches SW3 connected in series with each other. One end of the series switch unit 6 is connected to the second connection part 422 of the circuit unit 4 ⁇ / b> Z at the final stage, and the other end is connected to the negative electrode of the DC power supply 5. Further, one third switch SW3 is interposed between the second connection portion 422 of the k-th stage circuit unit 4 and the second connection portion 422 of the (k ⁇ 1) -th stage circuit unit 4. ing. One third switch SW3 is also interposed between the second connection part 422 of the first-stage circuit unit 4A and the negative electrode of the DC power supply 5.
  • a diode is connected in parallel to each switch SW.
  • the diode connected in parallel to the first switch SW1 is connected in the direction in which the intermediate connection point 41M side becomes the anode.
  • the diode connected in parallel to the second switch SW2 is connected in such a direction that the intermediate connection point 41M side becomes the cathode.
  • the diode connected in parallel to the third switch SW3 is connected in such a direction that the side close to the negative electrode of the DC power supply 5 becomes the anode.
  • the switch SW is made of a power semiconductor element. Then, the switch SW composed of these power semiconductor elements can be appropriately turned on and off by a signal from the drive circuit.
  • the switch SW for example, IGBT (abbreviation of insulated gate bipolar transistor), MOSFET (abbreviation of MOS field effect transistor) or the like can be used.
  • IGBT abbreviation of insulated gate bipolar transistor
  • MOSFET abbreviation of MOS field effect transistor
  • a power semiconductor element what was formed with silicon carbide (SiC) and what was formed with silicon (Si) can be used, for example.
  • the first switch SW1 and the third switch SW3 are turned off (that is, opened) and the second switch SW2 is turned on (that is, short-circuited), thereby forming a series state.
  • the parallel state is formed by turning on the first switch SW1 and the third switch SW3 and turning off the second switch SW2.
  • All the first switches SW1 and all the third switches SW3 can be configured to be turned on / off in synchronization by the same signal from the drive circuit. Further, all the second switches SW2 can be configured to be turned on / off in synchronization by the same signal from the drive circuit. However, the second switch SW2 is turned on / off by a drive signal different from the drive signals of the first switch SW1 and the third switch SW3. More specifically, the second switch SW2 is turned off when the first switch SW1 and the third switch SW3 are on.
  • the pulse power power supply circuit unit 3 is switched to the series state shown in FIG. That is, a plurality of capacitors Cm in which electric charges are accumulated are connected in series, and a series circuit of these capacitors Cm is also connected in series with the DC power source 5. As a result, a voltage of Vin ⁇ (N + 1) is applied to the pulse discharge load 2.
  • the pulse power power supply circuit unit 3 is switched to the parallel state as shown in FIG. Then, the plurality of capacitors Cm connected in parallel to each other are connected to the pulse discharge load 2 and also connected to the DC power supply 5 in parallel. Thereby, a current flows from the pulse discharge load 2 to the pulse power power supply circuit unit 3 until the voltage between the electrodes in the pulse discharge load 2 decreases to the power supply voltage Vin. That is, charges are extracted from the capacitance component C2 of the dielectric layer 22 of the pulse discharge load 2, and the charges are recovered by the capacitors Cm of the Marx circuit.
  • the electric energy remaining in the pulse discharge load 2 is recovered and stored in the energy storage unit 31 of the pulse power power supply circuit unit 3. At the same time, the voltage between the electrodes of the pulse discharge load 2 is reduced.
  • the collected electrical energy is used for the next discharge in the discharge device 1.
  • a voltage is output from the pulse power power supply circuit unit 3 to the pulse discharge load 2. That is, similarly to the above, as shown in FIG. 3, the pulse power power supply circuit unit 3 is put in series. As a result, a voltage of Vin ⁇ (N + 1) is applied to the pulse discharge load 2.
  • the pulse discharge load 2 has a structure that generates a dielectric barrier discharge. As shown in FIG. 2, the pulse discharge load 2 includes a first discharge electrode 211 and a second discharge electrode 212 that are arranged to face each other. The dielectric layers 22 are provided on the inner surface of the first discharge electrode 211 and the inner surface of the second discharge electrode 212, respectively. A discharge gap 23 is formed between the pair of dielectric layers 22. By generating a discharge in the discharge gap 23, for example, plasma can be generated. Further, for example, ozone can be generated by generating plasma in the discharge gap 23 while supplying a gas containing oxygen to the discharge gap 23.
  • the pulse power power supply circuit unit 3 is configured to reversibly move electrical energy between the energy storage unit 31 and the pulse discharge load 2. Thereby, even after the pulse discharge load 2 performs the discharge, even when the electric charge remains in the dielectric layer 22, the electric energy due to this electric charge is recovered in the energy storage unit 31 of the pulse power power supply circuit unit 3, Can be accumulated.
  • the electrical energy stored in the energy storage unit 31 can be supplied to the pulse discharge load 2 at the time of the next discharge after the discharge in the pulse discharge load 2. Therefore, the electrical energy repeatedly supplied to the pulse discharge load 2 can be saved. As a result, the discharge device 1 excellent in energy efficiency can be obtained.
  • the pulse power power supply circuit unit 3 includes a plurality of capacitors Cm and a plurality of switches SW. By switching on / off of the plurality of switches SW, the serial state and the parallel state can be switched. The pulse voltage is output to the pulse discharge load 2 in the series state, and the electric energy is recovered from the capacitance component C2 of the dielectric layer 22 of the pulse discharge load 2 to the energy storage unit 31 in the parallel state. That is, the pulse power power supply circuit unit 3 forms a Marx circuit, and by repeatedly switching between the serial state and the parallel state, the pulse voltage output to the pulse discharge load 2 and the pulse discharge load 2 The recovery of electrical energy can be repeated alternately. Therefore, it is possible to efficiently output the pulse voltage and recover the electric energy.
  • the pulse power power supply circuit unit 3 includes a multi-stage circuit unit 4 and a series switch unit 6, and forms a Marx circuit as shown in FIG. Thereby, the series state and the parallel state can be realized easily and efficiently by appropriately turning on and off the plurality of switches SW. As a result, the discharge device 1 excellent in energy efficiency can be easily obtained.
  • FIG. 5 is a diagram showing temporal changes in the current in the pulse discharge load 2 and the interelectrode voltage (that is, the output voltage from the pulse power power supply circuit unit 3 to the pulse discharge load 2).
  • the output current from the pulse power supply circuit unit 3 to the first discharge electrode 211 of the pulse discharge load 2 is positive (that is, above the current 0 in the graph), and the flow in the opposite direction is negative (that is, the graph). The current is lower than 0).
  • a large amount of charges can be extracted from the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2 in a short time. Therefore, for example, when the discharge device 1 is applied to an ozonizer, the period during which ions existing between the discharge electrodes move to the electrodes can be shortened, so that heat generation of ions can be suppressed, and radical generation in the discharge gap 23 The rate can be improved.
  • the present embodiment is a discharge device 1 in which an attached switch series body 43 is connected in parallel to the circuit unit 4Z at the final stage.
  • the pulse power power supply circuit unit 3 in the discharge device 1 of the present embodiment further includes a fourth switch SW4 and a fifth switch SW5 connected in series as the switch SW.
  • the attached switch series body 43 is connected in parallel to the switch series body 41 and the capacitor Cm.
  • the attached switch series body 43 is a series body of the fourth switch SW4 and the fifth switch SW5.
  • connection point 43M between the fourth switch SW4 and the fifth switch SW5 in the attached switch series body 43 is connected to the first discharge electrode 211 of the pulse discharge load 2.
  • each switch SW is controlled as shown in FIG. That is, the first switch SW1, the third switch SW3, and the fourth switch SW4 are turned on, and the second switch SW2 and the fifth switch SW5 are turned off to form a parallel state. Thereby, the voltage between the electrodes of the pulse discharge load 2 decreases.
  • each switch SW is controlled as shown in FIG. That is, the fourth switch SW4 is switched off and the fifth switch SW5 is switched on. The other switches SW are not switched. As a result, the first discharge electrode 211 and the second discharge electrode 212 of the pulse discharge load 2 are short-circuited.
  • the pulse power power supply circuit unit 3 is switched to the serial state, and the fourth switch SW4 is turned on and the fifth switch SW5 is turned off in the attached switch series body 43. Switch. As a result, a high voltage of Vin ⁇ (N + 1) is applied from the pulse power power supply circuit unit 3 to the pulse discharge load 2, and discharge can be generated again.
  • the charge remaining in the capacitive component C2 of the pulse discharge load 2 can be extracted even after recovery to the energy storage unit 31, and the voltage between the electrodes of the pulse discharge load 2 can be reduced to substantially zero. That is, before the next discharge, the voltage between the electrodes of the pulse discharge load 2 can be sufficiently reduced, and the voltage difference from the output voltage of the pulse power power supply circuit unit 3 can be increased. As a result, it becomes easier to cause discharge in the pulse discharge load 2. In addition, the same effects as those of the first embodiment are obtained.
  • the pulse power power supply circuit unit 3 has an inductive component L connected in series with the pulse discharge load 2.
  • the inductive component L is configured to resonate with the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2.
  • the induction component L constitutes at least a part of the energy storage unit 31.
  • the capacitor Cm in each circuit unit 4 also constitutes a part of the energy storage unit 31.
  • the inductive component L may be provided with an inductor as a component, or may be a parasitic inductance that is parasitic on wiring or other components.
  • the pulse power power supply circuit unit 3 transfers electric energy from the energy storage unit 31 to the pulse discharge load 2 and transfers electric energy from the pulse discharge load 2 to the energy storage unit 31 (that is, the inductive component L and the capacitor Cm). Is executed during the resonance period of the inductive component L and the capacitive component C2.
  • the pulse power power supply circuit unit 3 is switched between the series state and the parallel state at a frequency close to the resonance frequency of the series resonance circuit.
  • the switching frequency is a frequency when the interval of the switching timing from the serial state to the parallel state or the interval of the switching timing from the parallel state to the serial state is one cycle.
  • the switching frequency f1 is set to, for example, 0.8 ⁇ f0 ⁇ f1 ⁇ 1.2 ⁇ f0 with respect to the resonance frequency f0.
  • Cm represents the value of the capacitance of the capacitor Cm.
  • the capacitance may be the same or different among the plurality of capacitors Cm.
  • the capacitance Cm is required to be a level that can hold a sufficient amount of charge with respect to the discharge charge in the pulse discharge load 2.
  • the state is switched from the state where charges are accumulated in each part to the serial state again at a predetermined timing.
  • the electric charge accumulated in the capacitors Cm of the plurality of stages of circuit units 4 is supplied to the first discharge electrode 211 of the pulse discharge load 2 (see broken line arrow Ip).
  • the positive charge accumulated on the second discharge electrode 212 side of the capacitive component C2 also flows into the first discharge electrode 211 side due to the resonance phenomenon (see the broken arrow Irp).
  • the output voltage due to the flow of the former charge is Vin ⁇ (N + 1) as in the first embodiment.
  • a voltage due to a resonance phenomenon is applied to the pulse discharge load 2 so as to be superimposed on the output voltage.
  • electric energy can be recovered by accumulating magnetic energy in the inductive component L in the resonance circuit in addition to collecting charge in the capacitor Cm of the Marx circuit. That is, more electrical energy can be recovered before the next discharge. Therefore, the power supplied from the DC power supply 5 can be further saved. In addition, the voltage between the electrodes of the pulse discharge load 2 can be further reduced before the next discharge. In addition, the same effects as those of the first embodiment are obtained.
  • the present embodiment is a form of the discharge device 1 in which the inductive component L shown in the third embodiment is provided in the discharge device of the second embodiment.
  • the attached switch series body 43 is provided in the circuit unit 4Z at the final stage in the pulse power power supply circuit unit 3.
  • the pulse power power supply circuit unit 3 has an inductive component L connected in series with the pulse discharge load 2.
  • the inductive component L can resonate with the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2.
  • this embodiment is a combination of the second embodiment and the third embodiment. Other configurations are the same as those of the first embodiment.
  • the induction component L constitutes at least a part of the energy storage unit 31.
  • the series state shown in FIG. 13 and the parallel state shown in FIG. 14 are repeated.
  • This switching frequency is set to a frequency close to the resonance frequency of the resonance circuit of the induction component L and the capacitance component C2.
  • the fourth switch SW4 is turned off and the fifth switch SW5 is turned on.
  • the other switches SW are the same as in the parallel state (see FIG. 11) in the third embodiment.
  • a closed circuit is formed in which the fifth switch SW5, the series switch unit 6, the capacitance component C2, and the induction component L are connected in series.
  • the electric charge charged on the first discharge electrode 211 side of the capacitive component C2 is extracted, and the capacitive component C2 of the capacitive component C2 is passed through the fifth switch SW5 and the series switch unit 6. It moves to the two-discharge electrode 212 side (see broken line arrow Irc).
  • the charge charged on the first discharge electrode 211 side of the capacitive component C2 without passing through the capacitor Cm of the Marx circuit is used for the second discharge of the capacitive component C2. Move to the electrode 212 side. Therefore, most of the charge charged on the first discharge electrode 211 side of the capacitive component C2 can be transferred to the second discharge electrode 212 side of the capacitive component C2. At this time, electric energy is converted into magnetic energy in the inductive component L and accumulated.
  • the DC power supply 5 is connected to capacitors Cm connected in parallel to each other. Therefore, current flows from the DC power source 5 to each capacitor Cm as indicated by the broken arrow Ib. As a result, a charge of Cm ⁇ Vin is accumulated in each of the plurality of capacitors Cm.
  • Cm represents the value of the capacitance of the capacitor Cm.
  • the electric charge accumulated in the capacitors Cm of the multiple-stage circuit unit 4 is supplied to the first discharge electrode 211 of the pulse discharge load 2 (broken arrow) Ip).
  • the positive charge accumulated on the second discharge electrode 212 side of the capacitive component C2 also flows into the first discharge electrode 211 side due to the resonance phenomenon (see the broken arrow Irp).
  • the output voltage due to the flow of the former charge is Vin ⁇ (N + 1) as in the first embodiment.
  • a voltage due to a resonance phenomenon is applied to the pulse discharge load 2 so as to be superimposed on the output voltage.
  • the state is switched from the series state shown in FIG. 13 to the state shown in FIG.
  • the state shown in FIG. 15 is a state in which the fifth switch SW5 is opened while the Marx circuit is in a parallel state. Thereby, a circuit equivalent to the parallel state of the third embodiment (see FIG. 11) is obtained. Then, charges are collected in the capacitors Cm of the plurality of stages of circuit units 4 and some positive charges are charged on the second discharge electrode 212 side of the dielectric layer 22.
  • the positive charge charged on the second discharge electrode 212 side can be increased, and the discharge power at the next discharge can be increased.
  • the same effects as those of the third embodiment are obtained.
  • the pulse power power supply circuit unit 3 includes a transformer 32.
  • the discharge device 1 of this embodiment has a circuit configuration in which a transformer 32 is connected between the Marx circuit and the pulse discharge load 2 in the discharge device of Embodiment 4.
  • the leakage inductance of the transformer 32 is used as the inductive component Le. That is, the inductive component Le composed of this leakage inductance and the capacitance component C2 of the dielectric layer 22 of the pulse discharge load 2 constitute a resonance circuit.
  • the switching between the serial state and the parallel state of the pulse power power supply circuit unit 3 is performed at a frequency at which the resonant circuit of the inductive component Le and the capacitive component C2 resonates, that is, near the resonant frequency.
  • the transformer 32 has a primary winding 321 on the Marx circuit side and a secondary winding 322 on the pulse discharge load 2 side.
  • the output voltage from the Marx circuit can be boosted and supplied to the pulse discharge load 2 by adjusting the turns ratio of the primary winding 321 and the secondary winding 322.
  • the transformer 32 can further boost the output voltage of the Marx circuit. Therefore, a high voltage can be easily applied to the pulse discharge load 2. It is also possible to reduce the number of Marx circuit stages while maintaining the output voltage to the pulse discharge load 2. In addition, the same effects as those of the fourth embodiment are obtained.
  • the present embodiment is a form of the discharge device 1 in which the pulse power power supply circuit unit 3 further includes a power supply protection unit 40. That is, as shown in FIG. 19, the pulse power power supply circuit unit 3 further includes a power supply protection unit 40 interposed between the first-stage circuit unit 4 ⁇ / b> A and the positive electrode of the DC power supply 5.
  • the power supply protection unit 40 includes a protection diode 401, a sixth switch SW6, a capacitor Cm, a third connection portion 423, and a fourth connection portion 424.
  • the sixth switch SW6 is a switch SW connected to the anode of the protection diode 401.
  • the capacitor Cm is connected in parallel to the protective series body 44, which is a serial body of the protective diode 401 and the sixth switch SW6.
  • the third connection portion 423 and the fourth connection portion 424 are connection portions between the protective series body 44 and the capacitor Cm.
  • the third connection portion 423 is connected to the intermediate connection point 41M of the first-stage circuit unit 4A.
  • a third switch SW3 of the series switch unit 6 is interposed between the fourth connection portion 424 and the negative electrode of the DC power supply 5.
  • the third switch SW3 of the series switch unit 6 is also interposed between the fourth connection portion 424 and the second connection portion 422 of the first-stage circuit unit 4A.
  • the discharge device 1 of the present embodiment has a configuration in which the first-stage circuit unit 4A in the discharge device 1 (see FIG. 1) of the first embodiment is replaced with a power protection unit 40.
  • the first switch SW1 in the first-stage circuit unit 4A in the discharge device 1 (see FIG. 1) of the first embodiment is replaced with the protective diode 401.
  • the second-stage circuit unit 4B in the discharge device 1 (see FIG. 1) of the first embodiment is replaced with the first-stage circuit unit 4A.
  • the circuit unit 4 has two stages. That is, the stage number N of the circuit unit 4 of the pulse power power supply circuit unit 3 is two.
  • the number of stages (N + 1) of the Marx circuit including the circuit unit 4 and the power supply protection unit 40 is 3.
  • the number of stages is not particularly limited as in the first embodiment.
  • the pulse power power supply circuit unit 3 In outputting the pulse voltage to the pulse discharge load 2, the pulse power power supply circuit unit 3 is switched to the serial state shown in FIG. As a result, the DC power supply 5 and (N + 1) capacitors Cm are connected in series, and a voltage of Vin ⁇ (N + 2) is applied to the pulse discharge load 2.
  • the pulse power power supply circuit unit 3 When recovering charges from the capacitive component of the dielectric layer 22 of the pulse discharge load 2, the pulse power power supply circuit unit 3 is placed in parallel as shown in FIG. Thereby, a current flows from the pulse discharge load 2 to the pulse power power supply circuit unit 3 until the voltage between the electrodes in the pulse discharge load 2 drops to the power supply voltage Vin (see the broken line arrow Ic).
  • a ripple current may flow from the pulse discharge load 2 to the pulse power power supply circuit unit 3. Even in this case, the ripple current is blocked by the protection diode 401 of the power supply protection unit 40. Therefore, the inflow of the ripple current to the DC power source 5 is prevented.
  • Other configurations are the same as those of the first embodiment.
  • the protection diode 401 of the power protection unit 40 supplies the DC power source 5. Current backflow can be prevented. Thereby, the DC power supply 5 can be protected. In addition, it is possible to prevent the ripple current from flowing into other devices connected to the DC power source 5 and to protect other devices. In addition, the same effects as those of the first embodiment are obtained.

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  • Generation Of Surge Voltage And Current (AREA)

Abstract

L'invention concerne un dispositif de décharge (1) qui comprend : une charge de décharge impulsionnelle (2) qui est pourvue d'une première électrode de décharge (211), d'une deuxième électrode de décharge (212) et d'une couche diélectrique (22) ; et une partie de circuit d'alimentation en énergie impulsionnelle (3) qui délivre périodiquement une tension impulsionnelle à la charge de décharge impulsionnelle (2). La partie de circuit d'alimentation en énergie impulsionnelle (3) comprend une partie de stockage d'énergie (31) dans laquelle peut être stockée de l'énergie électrique. La partie de circuit d'alimentation en énergie impulsionnelle (3) est conçue de telle sorte que l'énergie électrique peut être transférée de manière réversible entre la partie de stockage d'énergie (31) et la charge de décharge impulsionnelle (2).
PCT/JP2019/016932 2018-05-18 2019-04-22 Dispositif de décharge Ceased WO2019220868A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-095887 2018-05-18
JP2018095887A JP7075046B2 (ja) 2018-05-18 2018-05-18 放電装置

Publications (1)

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WO2019220868A1 true WO2019220868A1 (fr) 2019-11-21

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PCT/JP2019/016932 Ceased WO2019220868A1 (fr) 2018-05-18 2019-04-22 Dispositif de décharge

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JP (1) JP7075046B2 (fr)
WO (1) WO2019220868A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7444369B2 (ja) * 2020-04-28 2024-03-06 株式会社デンソー 放電装置及びその制御方法
EP4235741A1 (fr) * 2022-02-28 2023-08-30 TRUMPF Huettinger Sp. Z o. o. Générateur haute puissance et procédé de fourniture d'impulsions haute puissance

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60251105A (ja) * 1984-05-29 1985-12-11 Mitsubishi Electric Corp 無声放電形オゾン発生装置
JPH118043A (ja) * 1997-06-19 1999-01-12 Takuma Co Ltd 自己放電型スパークギャップスイッチ及びパルス電源装置
JP2002158386A (ja) * 2000-11-20 2002-05-31 Nichicon Corp パルス電源装置
JP2005237147A (ja) * 2004-02-20 2005-09-02 Rikogaku Shinkokai 回生磁気エネルギーを利用した高電圧パルス発生装置
WO2006057365A1 (fr) * 2004-11-26 2006-06-01 Ngk Insulators, Ltd. Circuit de génération d’impulsions haute tension
JP2008011595A (ja) * 2006-06-27 2008-01-17 Toshiba Mitsubishi-Electric Industrial System Corp 高電圧パルス発生装置
JP2012104399A (ja) * 2010-11-11 2012-05-31 Fujifilm Corp プラズマ処理方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60251105A (ja) * 1984-05-29 1985-12-11 Mitsubishi Electric Corp 無声放電形オゾン発生装置
JPH118043A (ja) * 1997-06-19 1999-01-12 Takuma Co Ltd 自己放電型スパークギャップスイッチ及びパルス電源装置
JP2002158386A (ja) * 2000-11-20 2002-05-31 Nichicon Corp パルス電源装置
JP2005237147A (ja) * 2004-02-20 2005-09-02 Rikogaku Shinkokai 回生磁気エネルギーを利用した高電圧パルス発生装置
WO2006057365A1 (fr) * 2004-11-26 2006-06-01 Ngk Insulators, Ltd. Circuit de génération d’impulsions haute tension
JP2008011595A (ja) * 2006-06-27 2008-01-17 Toshiba Mitsubishi-Electric Industrial System Corp 高電圧パルス発生装置
JP2012104399A (ja) * 2010-11-11 2012-05-31 Fujifilm Corp プラズマ処理方法

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