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WO2019215176A1 - Dispositif de stockage pour sonde de microscope à balayage - Google Patents

Dispositif de stockage pour sonde de microscope à balayage Download PDF

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Publication number
WO2019215176A1
WO2019215176A1 PCT/EP2019/061719 EP2019061719W WO2019215176A1 WO 2019215176 A1 WO2019215176 A1 WO 2019215176A1 EP 2019061719 W EP2019061719 W EP 2019061719W WO 2019215176 A1 WO2019215176 A1 WO 2019215176A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
receiving space
longitudinal direction
measuring
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2019/061719
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German (de)
English (en)
Inventor
Norbert Pinno-Rath
Daniel Koller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anton Paar GmbH
Original Assignee
Anton Paar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anton Paar GmbH filed Critical Anton Paar GmbH
Publication of WO2019215176A1 publication Critical patent/WO2019215176A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders

Definitions

  • the present invention relates to a device for storing one or more probes for a scanning probe microscope, further relates to a probe magazine and further relates to a microscope system, which comprises a scanning probe microscope, in particular atomic force microscope, and a
  • Measuring probe magazine has.
  • One type of scanning probe microscope is e.g. an atomic force microscope, which is used to laterally scan surfaces while determining their topography with high resolution.
  • a measuring probe is guided laterally over the surface to be examined (for example, screened) and one
  • Deflection of the measuring probe which results from the interaction of a measuring tip with the surface to be examined, is e.g. optically determined.
  • the measuring probe comprises e.g. a leaf spring or generally a bending beam (cantilever), which is mounted on a cantilever chip (plate) and having at one end a measuring tip, in particular nanoscopically small needle.
  • the deflection of the measuring tip or the bending beam is e.g. a leaf spring or generally a bending beam (cantilever), which is mounted on a cantilever chip (plate) and having at one end a measuring tip, in particular nanoscopically small needle.
  • the deflection of the bending beam or the measuring tip can be measured capacitively or piezoelectrically or with the aid of optical sensors.
  • the Atomic Force Microscopy can allow a structural analysis of the surface to be examined up to the atomic resolution.
  • the cantilever beam used for the measurement (also called cantilever) together with probe or measuring tip can be mounted on a typically a few mm 2- sized cantilever chip, which is also referred to as a probe body or as a small plate.
  • cantilever chip and cantilever can be formed in one piece.
  • the chip or the cantilever chip must be inserted into a recess of a cantilever holder or probe holder provided for this purpose before the examination by means of the atomic force microscope. This activity is traditionally carried out manually and places high demands on the experience and
  • Measuring probes in particular chips together with cantilevers
  • cantilevers which are provided for manual mounting (in a probe holder of an atomic force microscope)
  • gel transport boxes In this case, the measuring probe, in particular the cantilever chip, lies on a very soft Gel and is protected by this The removal of the probe by hand using tweezers.
  • the measuring probe can be pre-mounted on a (probe) holder. This creates a larger component whose
  • Handling by a user is easier than handling the probe without the probe holder.
  • Probe assemblies which also include a probe holder.
  • a probe is lifted from a corresponding cassette station.
  • US 6,093,930 A discloses an automatic exchange of a measuring probe in a scanning probe microscope.
  • a probe buffer is in one
  • a probe magazine holds a number of probe assemblies, which in turn comprise probe holders.
  • WO 2001/003157 A1 discloses an object inspection system, in particular a scanning probe microscope system, with measuring probes next to one
  • Sample stage are arranged for storage.
  • the probes can be loaded onto a scanhead from the vertical and horizontal probe delivery systems.
  • WO 2015/019090 A1 discloses a probe and sample exchange mechanism for a scanning probe microscope which is adapted to replace the probe carried by the microscope with a new probe.
  • a cassette buffer station is designed to carry probes.
  • the buffer station has a cassette trough with a series of eight cutouts so that up to eight probe cassettes can be carried by the trough.
  • the measuring probe is in the
  • US 7,709,791 B2 discloses a scanning probe microscope with an automatic probe replacement function. A trough is adapted to store a replacement probe attached to the replacement carrier.
  • WO 9708733 A1 discloses a scanning probe microscope with an automatic probe exchange and alignment system.
  • Measuring probe pockets hold measuring probes on the sample table.
  • Probe holder of a scanning probe microscope Several conventional storage systems for probes require one
  • Cantilever chips, a bending beam and a tip can be stored and if necessary by means of a user or by means of a handling or manipulation device, a so-called Exchange tools, in a probe holder (in particular Cantilever holder) are introduced can. Furthermore, it is an object of the present invention to provide a simple and secure replacement of a measuring probe of a
  • an apparatus for storing one or more probe-length measuring probes for a scanning probe microscope wherein the
  • Boundary surfaces each defining a, in particular tunnel-shaped, receiving space with a receiving space longitudinal direction in which a probe is receivable such that the probe longitudinal direction is aligned at least locally parallel to the receiving space longitudinal direction, wherein the boundary surfaces are formed: a displacement of the Allow measuring probe along the probe longitudinal direction at least locally parallel to the receiving space longitudinal direction forward and / or backward and to prevent a displacement transversely to the receiving space longitudinal direction.
  • the storage device may also be referred to as a magazine or cassette or cartridge and may be designed in various ways, as explained below.
  • the device may be a purely mechanical device without electrical or electronic elements or components.
  • the device may be e.g. include one or more electromagnets to operate one or more barriers can.
  • the device may e.g. essentially off
  • the scanning probe microscope can comprise, for example, an atomic force microscope or a scanning tunneling microscope.
  • the probe can eg a
  • the device has one or more receiving spaces, wherein each receiving space can be dimensioned for exactly one measuring probe (for example, platelet, bending beam and measuring tip).
  • Each receiving space is bounded by boundary surfaces associated therewith (e.g., formed by a housing of one or more parts). Boundary surfaces for each recording room can be the same, so everyone
  • the geometry of the boundary surfaces and thus the geometry of the receiving space is matched to the respective probe.
  • the probe longitudinal direction may e.g. be aligned parallel to a direction of a bending beam (or cantilever).
  • the measuring probe can have a greater extent than transverse to the measuring probe longitudinal direction.
  • the receiving space may have a greater extent parallel to or along the receiving space longitudinal direction than transverse to it.
  • the receiving space longitudinal direction (and thus, for example, the receiving space in plan view) may be rectilinear or curvilinear, e.g. have one or more different curvatures, or e.g. only in sections
  • Probe longitudinal direction at least locally parallel to the receiving space longitudinal direction by a tangent to the curvilinear receiving space longitudinal direction (only) taken at the point where the probe is located, is aligned parallel to the probe longitudinal direction.
  • the measuring probe longitudinal direction can be at least locally parallel to the receiving space longitudinal direction by the rectilinear Receiving space-longitudinal direction is aligned parallel to the probe longitudinal direction.
  • the measuring probe may be positively constrained by means of the limiting surfaces to move only parallel to the receiving space longitudinal direction (i.e., also along the probe longitudinal direction).
  • a movement of the probe parallel to the receiving space longitudinal direction may be due to the boundary surfaces forward or backward (relative to the
  • Measuring probe i. the movement can only take place to one side.
  • Other (e.g., moving) elements may further restrict the movement, e.g. to prevent a possibility of movement parallel to the receiving space longitudinal direction forward and backward during storage.
  • the displacement of the measuring probe is made possible only along its measuring probe longitudinal direction and also at least locally parallel to the receiving space longitudinal direction, so that a displacement transversely thereto
  • the handling of the measuring probe e.g. for insertion or removal from the storage device and / or insertion into a probe holder of a
  • the boundary surfaces would prevent displacement across the receiving space longitudinally as far as possible. This is what the probe can do
  • the storage device may facilitate insertion of the probe into a probe holder for a scanning probe microscope when
  • a probe holder for example, by a further manipulation device, is arranged in a suitable orientation, so that the probe along the probe longitudinal direction and along the receiving space longitudinal direction can be moved out of the storage device to on or in the probe holder to be placed.
  • a safe storage of probes can be achieved as well as easy loading and unloading of probes, without requiring particular skill of a user.
  • the boundary surfaces may, but need not be
  • the boundary surfaces extend in whole or in part (eg, continuous or discontinuous) on all four sides parallel to the receiving space longitudinal direction around the probe, and positively limit the possibility of movement of the probe transverse, in particular perpendicular to the receiving space longitudinal direction.
  • boundary surfaces do not extend circumferentially transversely to the receiving space longitudinal direction. Furthermore, due to the
  • the probe can essentially free of forces in the receiving space within the
  • Storage device can be placed and stored. Damage to the probe can thus be avoided.
  • no preload forces, which are caused by elastic elements, must act during storage within the storage device on the measuring probes, even if in other embodiments elastic elements may be provided, which may allow a (reversible) fixation. If the boundary surfaces partially or completely extend around the probe at least locally parallel to the receiving space longitudinal direction, also falling out of the probe can be effectively prevented.
  • the probe may be subject to influences of a
  • the measuring probe can advantageously by limiting surfaces above / below and laterally at a defined storage space within the
  • the boundary surfaces may be e.g. one or more upper
  • boundary surfaces Contain boundary surfaces, one or more lower boundary surfaces and one or more lateral boundary surfaces.
  • the boundary surfaces may be configured mirror-symmetrically, wherein the mirror plane may extend through a central longitudinal axis, so that the mirror symmetry may exist with respect to a vertically oriented mirror plane.
  • Top, bottom and side is to be understood in this context with respect to the probe to which an upper side, a lower side, a front side and a rear side can be assigned.
  • Boundary surfaces substantially flat (especially continuous, not interrupted) surfaces.
  • Boundary surfaces are made possible or facilitated.
  • Reception room of the storage device can at least parts of flat surface parts, for example, a small plate of the probe along Sliding parts of the (level) boundary surfaces parallel.
  • Movement can be selectively guided along the flat surfaces, so that the movement can only take place parallel to the receiving space longitudinal direction, wherein a movement can be prevented transversely thereto.
  • Boundary surfaces adapted to receive in the receiving space a probe having a small plate, in particular with a greater extent in the probe longitudinal direction than in a direction transverse thereto, on which a along the probe longitudinal direction extending bending beam, in particular on an upper side, in particular over a front edge of the plate overhanging, is attached, at the outer end of a, in particular upwardly facing, measuring tip is provided, the probe is in particular free of a holder for the scanning probe microscope.
  • the wafer may also be referred to as a probe chip and may be e.g. be made of plastic or of a semiconductor material such as silicon.
  • the wafer may comprise an exclusively mechanical element without comprising an electronic circuit.
  • the tile can in
  • the bending beam may be attached to the wafer such that a longitudinal direction of the bending beam in
  • the bending beam may bend due to the interaction of the probe tip with the surface of the sample, thus may be flexible, such as made of a semiconductor material or a metal.
  • the bending beam may bend in a vertical direction perpendicular to the probe longitudinal direction. The bending beam together with the measuring tip can thus both vertically above an upper surface of the wafer and a front end of the wafer in the longitudinal direction of the probe over the
  • the probe can be used to advantage in conventionally available scanning probe microscopes by having the interaction of the tip with the surface of the sample take place vertically and longitudinally spaced from the platelets.
  • the measuring tip may comprise an electrically conductive measuring tip or an electrically non-conductive measuring tip, depending on the used
  • the wafer of the measuring probe has a trapezoidal or rectangular cross-section and / or a trapezoidal or rectangular longitudinal section and / or a (substantially) rectangular ground plan (i.e., cross-section in plan view). This can also conventionally usable probes in the
  • Such a platelet geometry may facilitate defined guidance during insertion and deployment and defined storage during storage within the storage device. Due to the trapezoidal cross-section, contact edges may be formed, for example, which may at least temporarily be in contact with corresponding parts of boundary surfaces of the receiving space in order to allow a defined guidance or placement within the storage space of the measuring probe.
  • the measuring probe in particular the measuring plate, may be delimited on a lower side by a flat lower plate surface, which has a lower limiting surface, in particular flat Limiting surface of the receiving space of the storage device may be in contact.
  • the contact surfaces may in particular be flat and / or the contact edges of the platelet may in particular be rectilinear.
  • a targeted guidance of the platelet during insertion and / or application can be ensured. If the contact surfaces are even and / or the contact edges are straight, a friction during the application may be reduced, in particular if the corresponding boundary surfaces are likewise at least partially planar.
  • Contact edges may in particular have a low roughness in order to minimize friction. Thus, a quick and easy handling of the probe can be achieved.
  • the device is designed such that an upper boundary surface is formed by two outer flat upper strips and a middle upper, in particular flat, strip which lies above the two outer upper strips, so that below the middle upper strip upper recess is formed, wherein the two outer upper strips are formed for contacting outer portions of the upper side of the plate,
  • lateral expansion and vertical positioning of the central upper strip are selected such that the bending beam and the tip are disposed within the upper recess.
  • the upper recess advantageously wraps around the bending beam together with the measuring tip, without the upper
  • Bounding surfaces in particular flat lateral boundary surfaces, come into contact to force a guide in the longitudinal direction.
  • the device is designed such that the receiving space is open on at least one of the two end faces to the outside and at least one of the following comprises: a storage space in which the probe is storable; a transport space over which the probe from outside in the
  • Storage space can be brought and / or over which the probe from the storage space to the outside, in particular in a probe Holder for the scanning probe microscope, can be brought; and an access space, especially for a tool.
  • the storage space may be provided for storage of the probe over an extended period of time, such as between one week and several years.
  • the transport space can only be passed through for introduction or removal of the measuring probe by the measuring probe, in particular only for a short period of time between 1/10 second and 1 minute.
  • the introduction of the measuring probe into the respective storage space from outside the storage device and the dispensing of the measuring probe located on the storage space can be carried out to the outside of the storage device via the same transport space.
  • it does not need to be provided two different ways for introducing or deploying the probe, which can simplify the device.
  • the measuring probe can first be guided with a front side (on which also the bending beam with the measuring tip overhangs) and then with a back through the transport space on the storage space to bring the probe into the storage device. Another shift along the receiving space longitudinal direction in the
  • Insertion direction can be prevented by boundary surfaces of a housing or one or more further elements. If the probe is to be placed in a probe holder of a scanning probe microscope, the probe can be led out of the storage space by first a back end of the probe, in particular the plate is passed through the transport space, then the front end of the probe through the transport space to the outside to be led. Of the
  • Transport space can thus "behind” (defined with respect to front and back of the probe positioned at the storage place) the
  • Embodiments of the present invention also provide methods for inserting or deploying a probe into or out of
  • the access space may be provided "in front of" the storage location to access the probe, such as access by a user, or tool guided by a user, or by a tool guided by another handling device, such as tweezers, traction device,
  • a tool may (only) from a defined side, in particular the
  • Device further comprises at least one movable element (or for example two or more movable elements), which is provided in the receiving space longitudinally outside the storage space, wherein the movable element in a first positioning a movement possibility of
  • the movable element may also be referred to as a barrier.
  • the prevention of the movement in the receiving space longitudinal direction can be given solely by moving the movable element into parts of the storage space or in a part of the transport space and / or the access space.
  • the movable element may e.g. from a lower boundary surface upwards, from a lateral one
  • An elastic fixation may optionally be e.g. be effected by one or more springs, which e.g. from below and / or above and / or laterally contact parts of the plate elastically and press against opposite parts of boundary surfaces.
  • the movable element in the first positioning, is in contact with a part of a front side of the chip and / or a part of a chip
  • the element is advantageously in contact neither with the bending beam nor with the measuring tip.
  • the device is designed such that the movable element by means of a transversely, in particular perpendicular, acting on the receiving space longitudinal force, in particular a mechanical or magnetic force, transversely, in particular perpendicular to the receiving space longitudinal direction is movable.
  • an elastic fixation is provided without comprising a positive fixation by one or more movable elements, by exerting a sufficient force in the longitudinal direction, the force of the elastic fixation can be overcome without requiring an explicit unlocking by a force transverse or perpendicular to the longitudinal direction .
  • a force acting transversely to the receiving space longitudinal direction may move the movable element out of the transport space to release movement in the receiving space longitudinal direction. This can be done by motor control, magnetic force or otherwise generated force.
  • movable elements there may be two or more movable (or fixed) elements disposed, for example, in front of and behind the probe may be and each formed and arranged or may be characterized by features, as described above for the at least one movable element.
  • a fixed element can be provided.
  • Device further comprises a clamping mechanism which is formed, the measuring probe, in particular a part of the plate, at least when it is arranged in the storage space, against a part of the
  • the clamping mechanism can reduce or even prevent a wobble of the measuring probe within the storage space in order to further protect the measuring probe.
  • Clamping mechanism a clamping spring, in particular at a lower
  • Bounding surface which exerts an upward elastic force on an underside of the plate.
  • the clamping mechanism on a clamping spring at an upper boundary surface, which exerts a downward elastic force on an upper surface of the plate.
  • the clamping spring can e.g. be designed as a coil spring.
  • the device is designed such that the clamping mechanism has a spring plate at a lower boundary surface, which extends in particular over an entire length of the storage space and at least part of the length of the transport space and / or the access space,
  • the clamping mechanism comprises a spring plate at an upper boundary surface, wherein the spring plate is arranged, a to exert downward elastic force on an upper surface of the plate.
  • the spring plate can cause the probe when placed on the
  • Storage place is pressed with a biasing force against parts of the boundary surfaces to allow movement even in the longitudinal direction only if a sufficiently large force (e.g., push or pull) is applied in the storage space longitudinal direction.
  • a sufficiently large force e.g., push or pull
  • Device further comprises a sliding device, in particular push pin, which is designed to contact a front end of the plate and exert a, in particular applied by a user, sliding pressure from the front of the plate to the measuring probe to the rear,
  • a sliding device in particular push pin, which is designed to contact a front end of the plate and exert a, in particular applied by a user, sliding pressure from the front of the plate to the measuring probe to the rear,
  • the pusher may e.g. be in the form that a contact with neither the measuring tip nor with the bending beam is possible.
  • the pusher may e.g. have two outstanding pins which are laterally spaced from each other so that they are outside the bending beam and the measuring tip at a front end or a leading edge of the
  • Device further comprises a pulling device, in particular having a hook, which is adapted to engage a rear side of the plate, in particular rear edge, to the measuring probe by means of a, in particular applied by a user, train to the front move and, in particular through the transport space, in the
  • the pulling device may also be designed such that it can be introduced from the front side via the access space without touching the tip or the bending beam.
  • the pulling device may (like the pushing device) have elements, such as bars, which allow the pulling device only so through the access space in the
  • the sliding device can also be introduced from the front end into the interior of the storage device via the access space for discharging the measuring probe from the storage device.
  • the pushing device and / or the pulling device can be attached from a front side of the storage space via the access space on the measuring probe.
  • the storage device can be simplified and a removal or introduction of the probes into the device can be simplified.
  • the device is designed as one of: a single magazine in which a single
  • Receiving space is arranged; a rod magazine, in the receiving space - longitudinal directions of all receiving spaces parallel to each other in at least one plane; a carousel in which receiving space longitudinal directions of all the receiving spaces intersect at a central point and are arranged in at least one plane; a stack in which Receiving space longitudinal directions of all receiving spaces parallel to each other in different vertically spaced planes extend; a drum, in the receiving space longitudinal directions of all receiving spaces parallel to each other around a common center, in particular in
  • different receiving spaces connecting material are pivotable to achieve a high packing density of the receiving spaces.
  • Locking elements or screws are connectable to form one or more receiving spaces inside.
  • the boundary surfaces may be partially or entirely formed by the upper part and / or the lower part.
  • a probe magazine having a device according to any of the above-described embodiments and one or more
  • Probes placed in the receiving space or spaces of the device.
  • a microscope system which has a scanning probe microscope, in particular a force microscope, and a probe magazine according to a previously described embodiment, in particular spatially and / or physically separate from the scanning probe microscope, wherein the measuring probes in a measuring probe Holder of the scanning probe microscope can be used.
  • the probe magazine need not be part of the scanning probe microscope, eg does not need to be integrated in it, eg not be arranged on or on a measuring table.
  • a method for storing one or more probes for a scanning probe microscope, the method comprising for each of the one or more probes: receiving the probe in a, in particular tunnel-shaped, bounded by boundary surfaces receiving space having a receiving space longitudinal direction such that a probe longitudinal direction is aligned at least locally parallel to the receiving space longitudinal direction by the probe along the Meßsonden longitudinal direction is displaced at least locally parallel to the receiving space longitudinal direction wherein the displacement is prevented transversely to the receiving space longitudinal direction.
  • a method of loading or unloading a probe into or out of a probe holder in particular using a storage device according to an embodiment of the present invention, wherein the movement of the probe along the probe longitudinal direction takes place parallel to the receiving space longitudinal direction and
  • Fig. 1 illustrates in a perspective view a
  • Fig. 2 illustrates in a perspective view a
  • FIGS. 3A, B respectively illustrate a part of one in a cross-sectional view from the front and a cross-sectional view from above
  • FIGS. 4A and 4B illustrate in a sectional side view and in a sectional front view of a receiving space with a probe of a
  • FIGS. 5A and 5B illustrate, in a schematic cross-sectional longitudinal view and in a schematic plan view, a measuring probe which is suitable for storage in a storage device according to FIGS. 5A and 5B
  • FIG. 6 illustrates in a partially cut away view a
  • Fig. 7 illustrates in a schematic longitudinal sectional view of a
  • Fig. 8 illustrates in a schematic longitudinal sectional view a
  • FIGS. Figures 9 to 14 illustrate in schematic sectional views
  • Fig. 15 illustrates in perspective schematic representation a manipulation device in which a storage device according to an embodiment of the present invention is incorporated.
  • Fig. 1 apparatus 100 for storing a plurality of probes for a
  • Scanning probe microscope is designed as a rod magazine in which
  • Device 100 here comprises an upper part 103 (also called upper shell) and a lower part (also called lower shell) 105, which are manufactured in particular from transparent plastic and by means of screws 107 can be connected, that in the interior of the two shells 103, 105 a plurality of receiving spaces, in particular ten receiving spaces 109 are formed, in each of which a probe for a scanning probe microscope can be recorded.
  • the receiving spaces 109 are open at the ends to the outside, so that a measuring probe can be inserted and re-deployed.
  • An upper surface of the lower part 105 forms part of a lower boundary surface of a respective receiving space 109.
  • the upper part 103 forms in its interior lateral boundary surfaces and upper
  • FIGS. 3A, B respectively illustrate a part of one in a cross-sectional view from the front and a cross-sectional view from above
  • Storage device 200 or 300 according to an embodiment of the present invention.
  • the boundary surfaces 215, 217 do not completely enclose the probe 219, but prevent movement transverse to the receiving space longitudinal direction 221.
  • the receiving space 209 is partially open up and down.
  • Receiving space 309 curved in plan view, and the receiving space longitudinal direction 321 is curvilinear.
  • the tangent 321 ' is in the (curved) receiving space longitudinal direction 321 parallel to the probe longitudinal direction 353.
  • the receiving space longitudinal direction 321 is therefore locally parallel to the measuring probe longitudinal direction 353.
  • Embodiment of the present invention is illustrated in a schematic longitudinal sectional view in Fig. 4A and in a schematic end sectional view in Fig. 4B.
  • Fig. 4A a schematic longitudinal sectional view
  • Fig. 4B a schematic end sectional view
  • the several e.g., between 5 and 30
  • Measuring probes is provided such a receiving space.
  • the receiving space 409 is bounded by lower and upper boundary surfaces 411, 413 and lateral boundary surfaces 415 and 417.
  • the lower boundary surface 411 is formed by the lower shell 405 and the upper boundary surface 413 and the lateral boundary surfaces 415 and 417 are formed by the upper shell 403.
  • the boundary surfaces 411, 413, 415 and 417 limit the freedom of movement of the probe 419 such that the probe 419 can move only along the receiving space longitudinal direction 421.
  • the boundary surfaces 411, 415, 413, 417 extend around the probe 419 parallel to the receiving space longitudinal direction 421 and provide a positive restriction on the possibility of movement of the probe 419.
  • the boundary surfaces are substantially planar surfaces ,
  • a chip 423 of the measuring probe 419 has both a trapezoidal cross-section and a trapezoidal longitudinal section. Further, a bending beam 425 is mounted on the plate 423, at the outer end of a measuring tip 427 is provided.
  • the upper boundary surface 413 is formed by two outer flat upper strips 413b and a middle upper, in particular, flat strip 413a, which lies above the two outer upper strips 413b, so that an upper recess 429 is formed below the middle upper strip 413a.
  • the two outer upper strips 413b are configured to contact outer portions of the upper surface of the wafer 423, and the lateral extent and vertical positioning of the middle upper one Strip 413a is selected such that the bending beam 425 and the
  • Measuring tip 427 of the measuring probe 419 are disposed within the upper recess 429.
  • the receiving space 409 includes a portion 431 a
  • the receiving space 409 comprises a transport space 433, via which the measuring probe from the outside into the storage space, in particular
  • Storage space 430 can be moved and over which the probe from the storage space 430 can be brought to the outside. Furthermore, the
  • Recording room on an access room 435 to e.g. by means of a tool to gain access to the measuring probe 419 and this e.g. to move or generally manipulate.
  • the device 400 further comprises, per receiving space, two movable elements 437a, 437b which are located on a rear side or on the front side of the measuring probe 419
  • the movable elements 437a, 437b are movable within recesses 439a, 439b (in the lower shell 405) in the vertical direction 441 in order to be able to move the measuring probe 419 into a first positioning, which is illustrated in FIGS. 4A and 4B the receiving space longitudinal direction 421 by partially positive contact to prevent.
  • a second not illustrated
  • the movable elements 437a, 437b are moved vertically downwards into the recess 439a, 439b (e.g., by electromagnets or other actuators) to allow for movement of the measuring probe in
  • Embodiments only one element is movable, the other is fixed.
  • the movable members 437a, 437b bevels 443 to allow a positive contact and thus to ensure that at any movement of the probe the Barrier always touches the chip first and never touches the cantilever.
  • the movable members 437a, 437b may be in contact with a part of a front side of the chip and a part of the back side of the chip 423.
  • the embodiment illustrated in FIG. 4A further comprises a
  • Clamping mechanism 445 which is the measuring probe 419
  • the clamping mechanism 445 is implemented in the illustrated embodiment in Fig. 4A by a clamping spring (e.g., coil spring) 447 which is located in a recess (in the lower shell 405) at the lower one
  • a clamping spring e.g., coil spring
  • Limiting surface 411 is received and a vertical, i. in the vertical direction 441, upward elastic force on a
  • FIGS. 5A and 5B illustrate in a schematic longitudinal sectional view and in a plan view, respectively, a measuring probe 519 which is located in a receiving space 430 of a storage device according to an embodiment of the present invention
  • the measuring probe 519 comprises a plate 523 with a surface 524 on the underside and a surface 526 on the upper side and with a rear side 528 and a front side 532. On the surface 526 of the upper side, a bending beam 525 is attached, at the outer end of which a measuring tip 527 is provided.
  • the chip 523 further has a side surface 551.
  • Probe longitudinal direction 553 is aligned parallel to the extension direction of the bending beam 525.
  • a probe magazine in which the wafer (also referred to as a chip) of the measuring probe is mounted in a defined manner and can be guided in a defined manner, ie in particular along the probe longitudinal direction, which coincides with the receiving space longitudinal direction or at least in parallel.
  • the Magazine can have a linear shape, the shape of a circle segment or a drum (“revolver”) or other embodiments, as will be explained in detail later
  • a storage device accommodates one or more atomic force microscope (AFM) probes in a magazine capable of receiving and holding the cantilever chips (i.e., platelets) together with the cantilever and probe tip without an additional support body.
  • the shape of the magazine can be chosen so that the chip can be safely guided and there is never the risk that the bending beam or the tip touch a boundary of the magazine. This can apply both during transport of the cantilever (or the entire measuring probe) in the magazine and during removal from the magazine.
  • the probe can be removed without a previously
  • the cantilever chip (or the entire probe) can be moved along the cantilever longitudinal direction (i.e.
  • Probe longitudinal direction are pushed out of the magazine.
  • the cantilever chip in this direction has the largest length and the smallest cross-section, which is advantageous for a sliding guide.
  • such a guide can touch neither bending beam nor tip.
  • the cantilever or the cantilever (or the cantilever
  • Measuring probe thus permanently determined in its position positively.
  • the measuring probe In the ejection direction (ie in the receiving space-longitudinal direction, which is parallel to the probe longitudinal direction), the measuring probe can be limited in their movement by a resilient, movable barrier, which automatically evades when pushing out the probe.
  • the probe In the ejection direction, the probe can be held by a movable barrier, which must be removed by an external force before pushing out the probe.
  • the movable barrier can be designed as a specially shaped spring plate. If the magazine is made of plastic, in particular in die-cast plastic, made, the movable barrier can be formed directly from the magazine.
  • the movable barrier or the movable barriers can be designed so that they do not pinch the cantilever chip but restrict its freedom of movement to a safe level.
  • the movable barrier can be shaped so that it safely limits the freedom of movement of the cantilever chip or the measuring probe without being able to touch the bending beam or the tip.
  • a magazine can be made from a variety of
  • the plate of the measuring probe can be 1.6 mm x 3.4 mm in size.
  • Storage device may also be used to facilitate insertion into a handling device, which in turn may facilitate insertion of the probe into a probe holder for a scanning probe microscope.
  • the storage device (also referred to as a carrier system) can consist of any number of identical individual stations and form a magazine. Each single place (also as
  • Storage location 430 may form a positive, "channel-shaped" boundary for the probe due to the boundary surfaces, which ensures that only the platelet, but not the bending beam or tip can be touched during storage or during transport.
  • the movement of the measuring probe 419 is limited by means of movable barriers 437a, 437b.
  • the measuring probe 419 is sufficiently determined in its position that it can neither fall out of the carrier system nor be displaced in a manner which endangers the bending beam or tip.
  • a spring 447 may be provided which clamps the probe 419. The clamp does not replace the
  • the spring clamp can protect the bending beam and the measuring tip from damage.
  • a movable barrier 437a or 437b can be moved out of the way of the measuring probe, in particular vertically downwards into the recess 439a or 439b.
  • the probe 419 can be pushed out of the storage device 400 along the receiving space longitudinal direction 421 (or pulled). Due to the geometry of the channel damage is prevented here.
  • the elements with which the probe is pushed out of or into the carrier are preferably not part of the magazine, but may belong to an external manipulation device.
  • the removal of one of the barriers 437a, 437b can either be done explicitly by an external force or implicitly by the measuring probe in the course of the movement.
  • the barrier 437a, 437b may be removed from the path by an external excitation (e.g., unlocking pin, magnetic field, etc.)
  • the probe can be pushed against the barrier and push it out of the way.
  • the barrier can be designed such that on the one hand holds the probe securely in the carrier, but you only withstand the minimum necessary resistance when removing.
  • the in Fign. 1 and 2 illustrate apparatus 100 for storing
  • Measuring probes is a rod magazine with 10 individual places or
  • the upper shell 103 is made of a transparent plastic and forms the largest part of the boundary surfaces of the channel-shaped
  • Containment spaces 109 Containment spaces 109.
  • a lower boundary surface is formed by the lower shell 105. 6 illustrates, in a schematic perspective illustration, a part of a storage device 600 according to an embodiment of the present invention in a partially cutaway view. The
  • Storage device 600 includes the upper shell 603 and the lower shell 605, which form in their interior measuring probe receiving spaces 609, one of which is shown in Fig. 6.
  • the measuring probe 619 with the chip 623 and the unillustrated bending beam with the measuring tip is accommodated.
  • a spring plate 655 is further provided at a lower limit surface 611 that extends over an entire length of the storage space 630 and at least part of the length of the transport space 633 and part of the access space 635.
  • the spring plate 655 is adapted to exert an upward elastic force on an underside (eg, 524 in FIG. 5A) of the probe 619 to push against an upper boundary surface (eg, 413b in FIG. 4B) of the receiving space 609 and simultaneously to form a movable barrier.
  • the access space 635 is at a front of the
  • Measuring probe 619 and the transport space 633 is at a rear side of the
  • Measuring probe 619 arranged when the probe 619 on the
  • Receiving space 609d is not formed by a surface of the lower part 605 but by the upper boundary surface of the spring plate 655th
  • FIGS. FIGS. 7 and 8 illustrate the apparatus 600 of FIG.
  • Pusher 657 is inserted along the receiving space longitudinal direction 621 until pins or protrusions of the pusher have a front edge or front surface (eg, the front surface 532 of FIG. 5A). contact the probe 619. While pressure is applied to the pusher 657, the spring plate 655 deforms along the path of the measuring probe 619 through the transport path 633 along a
  • Pusher 657 in particular designed as a sliding needle, first one of the tongues of the spring plate 655 to this releases the way to the probe and then begins to slide the plate 623 from the magazine 600. As a result, the measuring probe is pressed against the second tongue of the spring plate 655 and deforms it until it allows the measuring probe to pass. Thereafter, the probe can be transported without resistance from the magazine.
  • FIG. 8 shows the apparatus illustrated in FIG. 6 while a measuring probe 619 is being transported to the storage location.
  • a pulling device 663 in particular as a hook 663, is introduced from the access space 635 into the receiving space 609, specifically in the upper recess 629.
  • the pulling device 661 has at its outer end a hook 633 which extends beyond the measuring probe is passed through the receiving space, at a rear edge 667 of the plate 623 attacks and train exerts.
  • the plate 623 deforms a first tongue of the spring plate 655 and arrives in the storage space 630 along the pulling direction 667 as the pulling device 661 is pulled.
  • the hook 663 of the pulling device 661 is first guided from the front, ie from the access space 635, along the receiving space longitudinal direction 621 into the receiving space 609 above the measuring probe 619 and lowered after passing the rear edge 665 of the plate 623 to the at rear edge 665 to intervene. Thereafter, by applying tension to the pulling device 661, the measuring probe 619 in the Receiving space 609, in particular in the storage space 630, are transported. Subsequently, the hook 663 is lifted and completely pulled out of the receiving space 609 of the storage device 600. As with reference to Figs. 4A and 4B, the upper shell 603 is provided with the upper recess 629, which gives the hook 663 the required clearance.
  • the storage device 600 may be part of a separate handling device, into which the storage device 600 can be inserted, whereupon the pushing device and / or the pulling device can be actuated, in particular by elements of the handling device.
  • the upper shell can preferably be made transparent in order to be able to check which individual sites are occupied by measuring probes. Furthermore, an optical lens can be provided within the upper shell above each storage space, so that the condition of the bending beam and / or the measuring tip can also be visually checked in detail. Both upper shell and lower shell can be made of plastic. They can also be color-coded depending on the content contained therein
  • the device can also be provided with a marking which can be automatically read out or damaged by another handling device when the measuring probe is first removed. So it can be recognized which probes were already in use. In a further embodiment everyone can
  • Storage space with an electronically readable and / or unique mark (barcode, QR tag, RFID tag, etc.) be provided.
  • additional or auxiliary device and AFMs the complete history of use and the current location of each probe can be tracked.
  • Several storage devices, such as magazines, can be assembled into larger total magazines.
  • movable elements in particular movable barriers can also be formed directly from parts of the upper shell or lower shell. At the front of the storage space no movable barrier needs to be provided, since the loading and unloading of the
  • Microprobe from the other side i. Can be done alone via the transport route.
  • the barrier thus needs at a front end of the
  • Storage place not be mobile, but can fix, i.
  • the measuring probe can only be secured by a clamping spring, without including any barriers.
  • a movable barrier When a movable barrier is moved by an external force, it may involve a mechanical electromagnetic or pneumatic force.
  • FIGS. FIGS. 9 to 15 schematically illustrate other storage devices according to embodiments of the invention without showing details of the receiving spaces. These may be similar or the same as those explained with reference to FIGS. 1 to 8. In this case, elements which are structurally or functionally identical or similar are denoted by reference symbols which are identical in the last two digits.
  • the storage device 900 illustrated in FIG. 9 is designed as a rod magazine, wherein receiving space longitudinal directions 921 all run parallel to one another in a plane.
  • Each receiving space 909 holds a measuring probe 919 with a small plate 921, a bending beam 925 and a needle 927.
  • Lateral limiting surfaces 915, 917 define the
  • the storage device 1000 illustrated in FIG. 10 is configured as a carousel, wherein receiving space longitudinal directions 1021 of FIG
  • Receiving spaces 1009 intersect at a common center 1010 and are arranged in at least one plane.
  • the carousel magazine 1000 includes receiving spaces which lie in the same plane.
  • the carousel may be formed as a full circle or as a circle segment.
  • the apparatus 1111 illustrated in FIG. 11 is formed as a drum, wherein receiving space longitudinal directions 1121 of all the receiving spaces 1109 extend parallel to each other about a common center or central axis 1104 and are equally spaced in the circumferential direction 1150.
  • the drum magazine 1100 may have a circular shape and may be formed as a complete circle or as a ring segment.
  • the storage device 1200 illustrated in FIG. 12 is as a
  • Chain magazine formed with chain links 1260, wherein the chain links 1260 each have a receiving space 1209 and about an axis 1270 parallel to the receiving space longitudinal direction 1221 are pivotable.
  • the chain magazine 1200 may be characterized in that the relative position of the different storage spaces to each other is not or only partially fixed.
  • the storage device 1300 illustrated in FIG. 13 is designed as a "tape and reel” magazine, wherein a flexible carrier 1380 allows elements 1390, which each have a receiving space 1309, to be pivoted or unrolled, in particular an axis which is parallel or nearly parallel to a receiving space longitudinal direction 1321.
  • the "Tape and Reel" magazine may be a particularly inexpensive construction.
  • the storage device 1400 illustrated in FIG. 14 is formed as a stack in which receiving spaces 1409 are provided, the receiving space longitudinal directions 1421 of which are all parallel but vertically stacked on floors 1410.
  • Fig. 15 illustrates a handling device 1592 in which a
  • Storage device 600 is added to e.g. to remove a measuring probe or to load a measuring probe.
  • the handling device 1592 may be e.g. the pulling device and / or the sliding device, which with reference to FIGS. 7 and 8 have been described.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L'invention concerne un dispositif (100-1400) de stockage d'une ou de plusieurs sondes de mesure (419) pour une sonde de microscope à balayage, le dispositif comprenant : pour chacune des une ou plusieurs sondes de mesure (419), des surfaces limites (413, 411, 415, 417) délimitant chacune un espace de réception (109, 409), en particulier un espace de réception en forme de tunnel, ayant une direction longitudinale (421) de l'espace de réception, une sonde de mesure (419) pouvant être reçue, de telle sorte que la direction longitudinale (553) de la sonde de mesure soit orientée au moins localement de manière parallèle à la direction longitudinale (421) de l'espace de réception. Les surfaces limites (413, 411, 415, 417) sont formées : pour permettre un déplacement de la sonde de mesure (419) le long de la direction longitudinale (553) de la sonde de mesure au moins localement de manière parallèle à la direction longitudinale (421) de l'espace de réception vers l'avant et/ou vers l'arrière et pour empêcher un déplacement transversal à la direction longitudinale (421) de l'espace de réception.
PCT/EP2019/061719 2018-05-09 2019-05-07 Dispositif de stockage pour sonde de microscope à balayage Ceased WO2019215176A1 (fr)

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ATA50390/2018A AT521439A1 (de) 2018-05-09 2018-05-09 Aufbewahrungsvorrichtung für Rastermikroskop-Messsonden
ATA50390/2018 2018-05-09

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WO2019215176A1 true WO2019215176A1 (fr) 2019-11-14

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Citations (13)

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WO1997008733A1 (fr) 1995-08-30 1997-03-06 Digital Instruments, Inc. Microscope a sonde de balayage permettant d'effectuer automatiquement un echange et un alignement de la sonde
JP2000171472A (ja) * 1998-12-03 2000-06-23 Shimadzu Corp 走査型プローブ顕微鏡及びプローブホルダ
US6093930A (en) 1998-04-02 2000-07-25 International Business Machnines Corporation Automatic probe replacement in a scanning probe microscope
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JP2001235416A (ja) * 2000-02-24 2001-08-31 Matsushita Electric Ind Co Ltd 走査型プローブ顕微鏡および試料・プローブ交換方法
WO2008002922A2 (fr) * 2006-06-26 2008-01-03 Veeco Instruments, Inc. Appareil et procédé de transport et de chargement de sondes d'un instrument de métrologie
US7692138B1 (en) 2006-10-23 2010-04-06 David James Ray Integrated scanning probe microscope and confocal microscope
US7709791B2 (en) 2006-12-21 2010-05-04 Park Systems Corp. Scanning probe microscope with automatic probe replacement function
EP2237050A1 (fr) * 2009-03-31 2010-10-06 Centro de Investigación Cooperativa En Biomateriales ( CIC biomaGUNE) Appareil et procédé pour la fonctionnalisation de sondes de microscopie atomique
US8635711B1 (en) * 2012-09-13 2014-01-21 Ut-Battelle, Llc High throughput reproducible cantilever functionalization
WO2015019090A1 (fr) 2013-08-09 2015-02-12 Infinitesima Limited Sonde et mécanisme d'échange d'échantillon pour microscope-sonde à balayage
DE102015210159A1 (de) * 2015-06-02 2016-12-08 Carl Zeiss Smt Gmbh Sondensystem und Verfahren zum Aufnehmen einer Sonde eines Rastersondenmikroskops

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US5157256A (en) * 1991-08-08 1992-10-20 Burleigh Instruments Inc. System for exchanging samples and electrode tip units in a surface probe microscope
EP0746857A4 (fr) * 1992-03-13 2001-01-03 Thermomicroscopes Corp Microscope a sonde de balayage

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05133738A (ja) * 1991-11-12 1993-05-28 Nikon Corp プローブ、プローブホルダ、プローブとプローブホルダとの組み合わせおよび走査型顕微鏡
WO1997008733A1 (fr) 1995-08-30 1997-03-06 Digital Instruments, Inc. Microscope a sonde de balayage permettant d'effectuer automatiquement un echange et un alignement de la sonde
US6093930A (en) 1998-04-02 2000-07-25 International Business Machnines Corporation Automatic probe replacement in a scanning probe microscope
JP2000171472A (ja) * 1998-12-03 2000-06-23 Shimadzu Corp 走査型プローブ顕微鏡及びプローブホルダ
WO2001003157A1 (fr) 1999-07-01 2001-01-11 General Nanotechnology, Llc Systeme et procede servant a inspecter et/ou modifier un objet
JP2001235416A (ja) * 2000-02-24 2001-08-31 Matsushita Electric Ind Co Ltd 走査型プローブ顕微鏡および試料・プローブ交換方法
WO2008002922A2 (fr) * 2006-06-26 2008-01-03 Veeco Instruments, Inc. Appareil et procédé de transport et de chargement de sondes d'un instrument de métrologie
US7692138B1 (en) 2006-10-23 2010-04-06 David James Ray Integrated scanning probe microscope and confocal microscope
US7709791B2 (en) 2006-12-21 2010-05-04 Park Systems Corp. Scanning probe microscope with automatic probe replacement function
EP2237050A1 (fr) * 2009-03-31 2010-10-06 Centro de Investigación Cooperativa En Biomateriales ( CIC biomaGUNE) Appareil et procédé pour la fonctionnalisation de sondes de microscopie atomique
US8635711B1 (en) * 2012-09-13 2014-01-21 Ut-Battelle, Llc High throughput reproducible cantilever functionalization
WO2015019090A1 (fr) 2013-08-09 2015-02-12 Infinitesima Limited Sonde et mécanisme d'échange d'échantillon pour microscope-sonde à balayage
DE102015210159A1 (de) * 2015-06-02 2016-12-08 Carl Zeiss Smt Gmbh Sondensystem und Verfahren zum Aufnehmen einer Sonde eines Rastersondenmikroskops

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