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WO2019136731A1 - Procédé de fabrication pour microstructure - Google Patents

Procédé de fabrication pour microstructure Download PDF

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Publication number
WO2019136731A1
WO2019136731A1 PCT/CN2018/072535 CN2018072535W WO2019136731A1 WO 2019136731 A1 WO2019136731 A1 WO 2019136731A1 CN 2018072535 W CN2018072535 W CN 2018072535W WO 2019136731 A1 WO2019136731 A1 WO 2019136731A1
Authority
WO
WIPO (PCT)
Prior art keywords
microstructure
fine structure
manufacturing
precision
initial state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2018/072535
Other languages
English (en)
Chinese (zh)
Inventor
郭江
朱祥龙
董志刚
郭晓光
康仁科
郭东明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dalian University of Technology
Original Assignee
Dalian University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalian University of Technology filed Critical Dalian University of Technology
Priority to PCT/CN2018/072535 priority Critical patent/WO2019136731A1/fr
Publication of WO2019136731A1 publication Critical patent/WO2019136731A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/105—Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the invention belongs to the technical field of manufacturing technology, relates to a manufacturing method combining additive manufacturing (3D printing) and precision processing technology, and particularly relates to a manufacturing method of a fine structure.
  • Microstructured surfaces have been widely used in optical, microfluidic devices, and surface engineering applications such as optical collection and aggregation systems, microfluidic channels, and superhydrophobic surface preparation due to their unmatched functions and characteristics.
  • fine structures can be fabricated using MEMS manufacturing processes.
  • the mold for manufacturing microfluidic devices [G. Bissacco, H.N. Hansen, P.T. Tang, J. Fugl, "Precision manufacturing methods of Inserts for injection molding of microfluidic Systems,” In Proceedings of the ASPE Spring Topical meeting, 57-63, (2005) ⁇ .
  • the manufacturing process has disadvantages such as a large number of design equipment, complicated processes, long production cycle, and high cost.
  • the precision machining technology such as cutting and grinding is mainly used to manufacture fine structures of several tens to hundreds of micrometers.
  • the tool wear due to the large amount of material removed during the manufacturing process, the tool wear is severe and affects the surface quality.
  • the invention proposes to solve the problems in the above micro-structure manufacturing process by combining additive manufacturing (3D printing) and precision processing technology, that is, adding and reducing material composite manufacturing technology.
  • the present invention provides a method for manufacturing a fine structure, which mainly uses a combination of additive manufacturing (3D printing) and precision processing technology to manufacture a device having a fine structure.
  • a manufacturing method of a fine structure which combines 3D printing and precision processing technology to manufacture a device having a fine structure, which is realized on a machine for manufacturing a composite material of a reduced or decreased material, and reduces an error introduced by the knife. Specifically, the following steps are included:
  • the first step is to produce a sample that needs to be produced into a fine structure and process the surface thereof;
  • Processing the surface of the sample piece that needs to generate the fine structure including cutting, milling, polishing, etc., and the roughness and flatness are determined according to the application requirements; the fine structure generated according to the need is cut out on the surface of the processed device.
  • the need to generate a fine structure mainly refers to a fine structure having a scale of potential technical application in the range of tens to hundreds of micrometers, and the scale requirement is not less than 10 micrometers, including the fineness of the optical microstructure, the microfluidic chip or the chip mold flow path. structure.
  • the optical fine structure includes a V-shaped groove and a Fresnel structure.
  • the roughness of the optical microstructure is generally required to be nanoscale or sub-nanometer; the microstructure roughness of the microfluidic chip or chip mold flow path is generally required to be submicron.
  • the second step is to fabricate the microstructure on the processed surface using 3D printing technology
  • the metal powder is printed on the milling path cut in the first step by using 3D printing technology to obtain a fine structure in an initial state.
  • the 3D printing technology includes a powder feeding and dusting printing method, including a laser assisted additive manufacturing method (LAM), a selective laser melting method (SLM), an electron beam melting method (EBM), and the like.
  • LAM laser assisted additive manufacturing method
  • SLM selective laser melting method
  • EBM electron beam melting method
  • the metal powder is copper, aluminum, die steel or the like.
  • the microstructure obtained in the second step is processed, and the fine structure generated in the initial state is ground or cut according to the fine structure generated to obtain a fine structure satisfying the precision requirement, wherein the surface precision requirement of the optical microstructure is required.
  • the surface precision of the microstructure of the microfluidic chip or chip mold flow path is generally micron; and it is polished to remove burrs and knife marks, reduce roughness and improve surface quality. . It is required to improve the surface quality while maintaining the accuracy of the surface.
  • the invention has the beneficial effects that the invention can overcome the defects of complicated MEMS manufacturing process, long production cycle, high cost and serious machining wear caused by a large amount of material removal, improve processing precision and efficiency, improve processing surface quality, and reduce production. cost.
  • FIG. 6 are schematic diagrams of a manufacturing process for a microfluidic chip mold provided by the present invention. wherein:
  • Figure 1 is a surface view of a polishing mold using a mirror polishing tool
  • Figure 2 (a) shows the use of a milling cutter to cut rough passages on the surface of the microfluidic chip mold
  • Figure 2 (b) shows a microfluidic chip mold that has cut rough passages on the surface
  • FIG. 3(a) is a micro-structure in which an initial state is printed on a rough channel of a surface of a microfluidic chip mold using a 3D print head; and FIG. 3(b) is a microfluidic chip mold in which an initial state microstructure is printed;
  • FIG. 4(a) is a micro-structure in which an initial state is processed by a precision milling cutter on a microfluidic chip mold
  • FIG. 4(b) is a microfluidic chip mold containing a microstructure in an initial state
  • Figure 5 is a micro-fluid chip mold processed with a grinding tool to obtain the final microstructure
  • Figure 6 is a microfluidic chip mold having a fine structure.
  • FIG. 12 are schematic diagrams showing the manufacturing process of the V-groove structure provided by the present invention. wherein:
  • Figure 7 is a diagram showing the surface of a workpiece cut by a diamond cutter
  • Fig. 8(a) shows the use of a milling cutter to cut a rough passage on the surface of a workpiece to be provided with a V-groove structure
  • Fig. 8(b) shows a workpiece having a rough passage cut on the surface
  • Fig. 9(a) is a micro-structure in which an initial state is printed on a rough surface of a workpiece surface on which a V-groove structure is required by using a 3D print head; and Fig. 9(b) is a mold in which an initial state microstructure is printed;
  • Figure 10 (a) is a microstructure in which an initial state is processed by a precision milling cutter on a workpiece to be provided with a V-groove structure; and Figure 10 (b) is a workpiece having a microstructure of an initial state;
  • Figure 11 is a rough microstructure prepared by using a grinding tool on a workpiece to be provided with a V-groove structure
  • Figure 12 is a workpiece having a V-shaped groove microstructure
  • 1 mirror polishing tool 1 microfluidic chip mold; 3 milling cutter; 4 3D print head; 5 fine structure in initial state; 6 precision milling cutter; 7 fine structure after preliminary treatment; 8 grinding and polishing tool; Material; 10 magnets; 11 microstructures; 12 diamond cutters.
  • FIG. 1-6 there is shown a process diagram for preparing a microstructure on a microfluidic chip.
  • the steps of the method include:
  • the surface of the microfluidic chip mold 2 which needs to generate the fine structure is processed and polished by the mirror polishing tool 1.
  • the roughness and the flatness are determined according to the application requirements, and the roughness of the fine structure of the flow path in the microfluidic chip mold 2 is Submicron level; a rough channel with a depth of about 2 ⁇ m and a width of about 200 ⁇ m is cut by the milling cutter 3 on the surface of the processed microfluidic chip mold 2 as a milling path.
  • the metal powder is printed on the milling path cut in the first step using a 3D print head with a height of 200. About ⁇ m, the microstructure 5 in the initial state is obtained.
  • the microstructure of the initial state obtained in the second step is processed.
  • the fine structure 5 of the initial state is cut by the precision cutter 6 to obtain the preliminary microstructure 7 which is a cross section of 100 ⁇ m ⁇ 100 ⁇ m; and the abrasive polishing tool 8 is used to pass the abrasive material at the bottom thereof.
  • 9 and the magnet 10 is used to treat the above-mentioned fine structure 7, to remove burrs and knife marks, to reduce roughness, to improve surface quality, and to obtain a fine structure 11 which satisfies the requirements.
  • the surface accuracy of the microstructure of the microfluidic chip mold flow path is required to be on the order of micrometers.
  • the abrasive polishing tool 8 is a magnetic tool.
  • a method for preparing an optical microstructure V-groove includes the following steps:
  • the surface of the workpiece 2 that needs to generate the fine structure is processed by the diamond cutter 12, and the roughness and flatness are determined according to the application requirements, and the fine structure roughness of the optical micro-structure V-groove flow passage in the workpiece is required to be nanometer-scale.
  • a roughing channel with a depth of about 2 ⁇ m and a width of about 800 ⁇ m is cut by the milling cutter 3 as a milling path.
  • the metal powder is printed by the 3D print head 4 in the first step of cutting out the milling path, and the height is about 800 ⁇ m, and the microstructure 5 in the initial state is obtained.
  • the microstructure of the initial state obtained in the second step is processed.
  • the fine structure 5 of the initial state is cut by the precision cutter 6, and the preliminary microstructure 7 is obtained, that is, a V-shaped structure having a width of 740 ⁇ m and a height of 340 ⁇ m, and a V-shaped structure is polished and polished.
  • the burr and the blade mark are removed, the roughness is lowered, the surface quality is improved, and the fine structure 11 which satisfies the requirements is obtained, and the surface precision of the optical microstructure is required to be micron or submicron.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un procédé de fabrication pour une microstructure. Une technologie de fabrication additive (impression 3D) et une technologie d'usinage de précision sont combinées pour fabriquer un dispositif doté d'une microstructure. Le procédé comprend les étapes consistant à : (1) préparer une pièce d'échantillon et usiner une surface sur laquelle une microstructure doit être générée ; (2) imprimer, par l'adoption d'une technologie d'impression 3D, une poudre métallique sur une trajectoire de broyage découpée dans la première étape de manière à obtenir une microstructure (5) dans un état initial ; et (3) usiner la structure imprimée en 3D pour obtenir une microstructure satisfaisant aux exigences de précision et polir en outre cette dernière pour améliorer la qualité de surface. Le procédé de fabrication peut pallier les défauts d'un processus de fabrication de MEMS et des procédures d'usinage classiques, ce qui permet d'améliorer la précision et l'efficacité d'usinage et la qualité d'une surface usinée et de réduire les coûts de production.
PCT/CN2018/072535 2018-01-15 2018-01-15 Procédé de fabrication pour microstructure Ceased WO2019136731A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/072535 WO2019136731A1 (fr) 2018-01-15 2018-01-15 Procédé de fabrication pour microstructure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/072535 WO2019136731A1 (fr) 2018-01-15 2018-01-15 Procédé de fabrication pour microstructure

Publications (1)

Publication Number Publication Date
WO2019136731A1 true WO2019136731A1 (fr) 2019-07-18

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PCT/CN2018/072535 Ceased WO2019136731A1 (fr) 2018-01-15 2018-01-15 Procédé de fabrication pour microstructure

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WO (1) WO2019136731A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204524788U (zh) * 2014-12-30 2015-08-05 深圳市圆梦精密技术研究院 多轴铣削加工及激光熔融复合3d打印设备
CN104999080A (zh) * 2015-08-03 2015-10-28 北京理工大学 一种用于精密微细复杂结构件的复合增材制造方法
CN105397494A (zh) * 2015-12-03 2016-03-16 大连理工大学 一种激光同轴送粉复合制造机床及工件复合制造方法
US20170225363A1 (en) * 2014-08-29 2017-08-10 Bio-Rad Laboratories, Inc. Epoxy mold making and micromilling for microfluidics
CN107243633A (zh) * 2017-05-26 2017-10-13 苏州菲镭泰克激光技术有限公司 激光增减材复合制造装置及方法
CN108393654A (zh) * 2018-01-15 2018-08-14 大连理工大学 一种微细结构的制造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170225363A1 (en) * 2014-08-29 2017-08-10 Bio-Rad Laboratories, Inc. Epoxy mold making and micromilling for microfluidics
CN204524788U (zh) * 2014-12-30 2015-08-05 深圳市圆梦精密技术研究院 多轴铣削加工及激光熔融复合3d打印设备
CN104999080A (zh) * 2015-08-03 2015-10-28 北京理工大学 一种用于精密微细复杂结构件的复合增材制造方法
CN105397494A (zh) * 2015-12-03 2016-03-16 大连理工大学 一种激光同轴送粉复合制造机床及工件复合制造方法
CN107243633A (zh) * 2017-05-26 2017-10-13 苏州菲镭泰克激光技术有限公司 激光增减材复合制造装置及方法
CN108393654A (zh) * 2018-01-15 2018-08-14 大连理工大学 一种微细结构的制造方法

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