WO2019115692A1 - Method and device for transporting substrates - Google Patents

Abstract

The invention relates to a method and to a device for transporting substrates, in particular for producing solar cells, wherein: a process boat (B, B1, B2) is loaded with substrates (2) by means of a robot (4) and/or substrates (2) are unloaded from the process boat (B, B1, B2) by means of a robot (4); the at least one process boat (B, B1, B2) is transported through a loading and/or unloading region (11) of the robot (4) by means of a boat-transporting apparatus (5) during the loading and/or unloading of the process boat (B, B1, B2) by means of the robot (4).

Description

 Method and device for transporting substrates

The invention relates to a method and a device for transporting substrates, in particular for the production of solar cells.

The production of solar cells from substrates usually requires the implementation of several production steps. Such production steps can be carried out in particular in so-called process furnaces. Et al So-called PECVD furnaces are known in which substrates, in particular their surfaces, with a

Antireflection layer are provided. However, there are more

Manufacturing steps in which chemical and / or thermal changes of the substrate take place. These can also be performed in appropriate facilities, especially ovens.

For the production of solar cells, therefore, an antireflection coating of the substrates may be required. For this purpose, substrates can be introduced with a corresponding process boat in a process plant. This process boat is usually made of graphite.

For a longer transport, e.g. However, between two different process plants or for transport from / to a warehouse, this process boat is unsuitable. Therefore, the processed or unprocessed substrates are arranged for transport in so-called transfer carriers.

Therefore, it is necessary to transfer substrates from such a transfer carrier to a process boat or vice versa.

DE 10 2010 026 209 A1 discloses a device for loading a process boat, which is provided for the process of vapor deposition of semiconductor wafers with an anti-reflection layer.

It is therefore the technical problem to provide a method and a device for transporting substrates, in particular for the production of solar cells, which-a period of time for loading, in particular for fully loading a process boat with substrates or for unloading, in particular for the complete Discharge, reduce substrates of the process boat, in particular one

Increase throughput of a process plant.

The solution of the technical problem results from the objects with the features of claims 1 and 13. Further advantageous embodiments of the invention will become apparent from the dependent claims.

In particular, in this disclosure, a substrate refers to a semiconductor blank. Substrates can be used in particular for the production of solar cells and e.g.

be plate-shaped. Furthermore, substrates can have a rectangular, in particular square, base area.

Next, a carrier and a process boat each denote a container in which substrates can be arranged in individual position. The container may in this case be an open container, in particular an upwardly and / or downwardly opened container.

Carrier and process boats are known to the person skilled in the art, for example from DE 10 2010 026 209 A1 explained in the introduction. Such a container can in particular

Receiving means, e.g. Slits for incorporating or forming a single substrate, e.g. at edge sections. Preferably, a receiving means also allows the inclusion of multiple substrates, in particular the inclusion of a pair of substrates. Receiving means may be arranged adjacent to each other along a central axis / longitudinal axis of the container at a predetermined distance.

In contrast to the carrier, the process boat can be used to transport substrates to and / or in facilities for carrying out production or processing steps of the substrate, in particular in process plants. Further, a process boat can accommodate a greater number of substrates or substrate pairs than a carrier. Further, a material of the process boat may be different from the material of a carrier.

The process boat may be formed in particular from graphite. Alternatively, the process boat can also be made of glass, quartz or ceramics. The

Process boat may in particular comprise a plurality of graphite plates, which are arranged parallel to and at a predetermined distance from one another, for example 13 to 27 parallel arranged graphite plates. On surfaces of a graphite plate, for example on a front and a back, holding elements can be arranged, which serve to hold substrates. Spacers may be arranged between two adjacent graphite plates. Each graphite plate may comprise a plurality of sections, wherein a substrate may be arranged in each section on the front and / or rear side. However, in a portion of an outer graphite plate, a substrate may be disposed only on the inward side of the graphite plate.

A process boat can be subdivided into several segments, for example 7 or 8 segments. Such a segment may each comprise a portion of each of the parallel arranged graphite plates. Thus, number of sections of a

Graphite plate the number of segments correspond. If substrates are arranged on the surfaces of the graphite plates, then the maximum number of substrates that can be arranged in a segment can be twice the number of parallel arranged

Graphite plates correspond. For example, a maximum of 24 to 52 substrates can be arranged in one segment.

A boat transport means means by which a process boat can be moved along a predetermined boat trajectory. The boot trajectory can in particular be the trajectory of a linear movement. Preferably, but not necessarily, the boat transport means may comprise a conveyor belt, in particular an endless belt.

A process plant denotes a device for carrying out a

Manufacturing step for producing a desired end product from the substrate and may be in particular a PECVD coating system.

A robot denotes a positioning device for positioning at least one, but preferably of a plurality of substrates. In this case, the robot may comprise a corresponding end effector, for example a gripper, more preferably a suction gripper. The gripper may be a multiple gripper for simultaneously gripping multiple substrates for loading or unloading. A number of the gripper fingers may in particular be the number of substrates that can be arranged in a segment of the process boat or a predetermined proportion, e.g. half of it.

The robot can, for example, the end effector with 6 independent Move degrees of freedom of movement. The robot may preferably be an articulated arm robot. The robot has a working space, wherein the robot can grasp, reposition and place at least one substrate in this working space.

Hereinafter, a loading and / or unloading area of the robot means a partial area of this working space. The loading and / or unloading area may in particular be formed cuboid. The loading and / or unloading area is smaller than the working space of the robot.

A stop element denotes a preferably mechanical element, by which a position of the process boat can be determined. That's how it works

Process boat in an activated state of the stop member are in a desired, predetermined position when the process boat to the

Abuts stop member, so it is in mechanical contact with this.

A centering device denotes a device for aligning a process boat, in particular in a loading and / or unloading position. By aligning the

Process boats may have an alignment of all or a subset of that in the

Process boat arranged substrates. For example, only the substrates can be aligned, which are arranged in segments that are to be unloaded in the corresponding loading and / or unloading position. The alignment here denotes the arrangement of the process boat or the substrates arranged therein in a desired position and / or with a desired orientation. In this case, each loading and / or unloading position can be assigned one or more centering device (s).

The stopper elements and centering device allow the repeated positioning of segments of a process boat B at predetermined positions with a

desired accuracy, for example, an accuracy of +/- 10 pm.

A feeder means hereinafter means by which substrates can be transported into the working space of the robot. A removal device denotes a device with which substrates can be transported out of the working space of the robot. The feeder serves to transport substrates from a carrier into the working space. The removal device is used to transport substrates from the working space to a carrier. In this case, a supply and discharge device can have a movable receiving device for substrates in the working space, in particular a linearly movable one

Receiving device, e.g. a screw jack cassette. In the receiving device, a predetermined number of substrates can be arranged. Preferably, the number of receivable substrates corresponds to the number of in one segment of the

Process boats arranged or arranged substrates. Furthermore, the supply and discharge device may comprise a carrier loading and / or unloading device. Through these substrates can be placed in a carrier or removed from a carrier. Furthermore, the supply and discharge device may comprise a transport device for transporting substrates between the movable receiving device and the carrier loading and / or unloading device. For example, substrates can be transported from the movable receiving device in the working space via a conveyor belt to the loading and / or unloading device.

An evaluation and control device may comprise a computing device or be designed as such. A computing device can, for example, a

Microcontroller include or be designed as such.

Proposed is a method for transporting substrates, which serves in particular for loading and / or unloading a process boat.

In the method, a process boat is loaded with substrates by a robot. Alternatively, but preferably cumulatively, substrates are unloaded by the robot from the process boat. Loading and / or unloading can be done segment by segment. The loading and / or unloading of a segment can take place in one or more

in particular two, steps of the robot take place. For example, in a first unloading operation, a first subset, for example half, of the substrates arranged in the segment can be unloaded from the segment. In a second unloading step, a further subset, for example the remaining substrates, can be unloaded from the segment. Furthermore, for example, in a first loading operation, a first subset, for example half, of the substrates that can be arranged in the segment are arranged in the segment. In a second loading step, a further subset, for example, the

remaining substrates are arranged in the segment. Here, the various loading and unloading steps can be performed alternately. The first subset may comprise, for example, the substrates arranged on a front side of the graphite plates of a segment, the further subset comprising the substrates of the segment arranged on the rear side.

The discharged substrates can be transferred to one or more discharge devices.

When loading, for example, substrates from a feeder,

in particular from a movable receiving device of the feeder, removed and arranged in the segment. Preferably, the first subset of substrates is removed from a first feeder and the second subset of substrates is removed from a second feeder. In each step of the loading and unloading, it may be necessary to carry out a predetermined movement in order to reliably arrange the substrates on the holding elements of the graphite plates or to remove them.

According to the invention, the at least one process vessel is transported by a boot transport device during the loading and / or unloading of the process boat through the loading and / or unloading area of the robot, in particular during the loading and / or unloading of all segments of the process boat.

In other words, the process boat moves in the period required for loading and / or unloading of all segments of the process boat by the robot, in particular along the boot trajectory. For example, the process boat may be in that period, e.g. perform at least two partial movements. This movement is effected by the boot conveyor.

The process boat can be moved by this movement in one or more loading and / or unloading positions in the loading and / or unloading area along the boat trajectory. In such a loading and / or unloading position, the process boat may be immovable for a predetermined period of time, ie not moved by the boat transport means, in particular to be loaded and / or unloaded by the robot. This movement during loading and / or unloading represents the essential

Difference to the previous method for loading and / or unloading is because in this method, the process boat was arranged in a constant spatial position during the loading and / or unloading of all segments, in particular was fixed.

The transport of the process boat through the loading and / or unloading area of the robot results in an advantageous manner in that the distances traveled by the robot for loading and / or unloading can be reduced. This in turn can be achieved in an advantageous manner that the process boat can be loaded and / or unloaded faster. This, in turn, advantageously leads to an increased throughput of process plants, since they can be supplied more quickly to unprocessed substrates or can be removed faster from these already processed substrates.

In this case, the movements of the robot for loading and / or unloading can be adapted to this fixed loading and / or unloading position (s). In particular, the movements can be programmed such that substrates in a desired manner from the segments of the process boat in such a loading and / or

Unloading can be removed or arranged in these segments.

The transport direction can also be referred to as x-direction. A direction transverse, in particular perpendicular, to the x-direction can also be referred to as y-direction. In particular, the x and y directions may span a plane perpendicular to the direction of gravitational force.

In a further embodiment, at least one stop element is activated, wherein the at least one stop element in the activated state defines at least one loading and / or unloading position of the process boat in the loading and / or unloading area.

Preferably, two stop elements can be activated, wherein the loading and / or unloading position is determined by the two activated stop elements. A stop element may for example comprise a movable element, in particular a linearly movable element.

A movement trajectory of the movable element may in particular run parallel to the y-direction. For example, the movable element can be extended be, with a process boat strikes on its movement along the x-direction in the extended state of the movable member of this. Further, the movable element can be retracted, whereby the movement of the process boat along the boot trajectory is released again.

In this case, a plurality of stop elements may be provided which define at least two or more than two loading and / or unloading positions in the loading and / or unloading area.

This results in an advantageous manner a reliable arrangement of

Process boats in positions adapted to the movements of the robot. For example, predetermined movements of the robot can be assigned for loading and / or unloading a predetermined loading and / or unloading position.

In another embodiment, a process boat is at least one

Centering aligned in the loading and / or unloading.

The centering device can also be set to an activated state, wherein the desired alignment is then produced in this activated state. The centering can be carried out with a movement of at least one centering element parallel to the y-direction.

Preferably, the centering device is activated when a process boat is in a loading and / or unloading position. However, it is also conceivable that the

Centering during a transport of the process boat is activated, ie in flow mode. This results in an advantageous adapted to the movement of the robot positioning the process boat.

In a further embodiment, a position and / or orientation (orientation) of the at least one process boat is detected. The position and / or orientation can be detected by at least one corresponding detection device, eg a position sensor or an image detection device. The position and / or orientation can be detected in a global reference coordinate system. The position and / or orientation can be detected during transport through the loading and / or unloading area, in particular in a loading and / or unloading position.

Next loading and / or unloading of the process boat by the robot in

Depending on the detected position and / or orientation performed. In particular, the movement of the robot for loading and / or unloading can be controlled as a function of the detected position and / or orientation. For example, For example, predetermined movements of the robot associated with a predetermined loading and / or unloading position may be changed when the actual position of the process boat deviates from the predetermined desired loading and / or unloading position. The change can then be dependent on the deviation.

This advantageously results in a further improved adaptation of the movement of the robot to the actual position and / or orientation of the robot

Process boots. This is particularly advantageous if the position and / or orientation not only stop elements and / or a centering device is set. But even in the case of such a determination, a further improved adaptation of the movement of the robot can take place.

In a preferred embodiment, the at least one process boat is transported in clocked fashion through the loading and / or unloading area of the robot. In particular, the process boat can be moved clocked in one, preferably several, predetermined loading and / or unloading positions. Clocked means that the process boat is moved in a boot-transfer cycle, the movement being interrupted after reaching the destination for a predetermined period of time, in other words, that

Process boat is resting. Thus, there may be a break between different boot transport cycles. The timing advantageously results in a good tunability between the motion control of the robot and the motion control of the process boat, which in turn leads to a reliable loading and / or unloading by the robot.

In a further embodiment, the process boat is transported in a boot-Tran sport clock by a predetermined distance along a boat trajectory. Further, the distance is greater than or equal to the length of a segment of the process boat and less than the length of the process boat. The length of a segment or the length of the process boat can be measured along a central longitudinal axis of the process boat. In other words, the process boat is moved in a transport cycle by one or more segments, but less than the entire length of the process boat. This can be timed before the transport clock and / or after the time

Transport cycle a loading and / or unloading done.

This results in an advantageous manner that different segments of a

Process boats can be moved sequentially in fixed loading and / or unloading positions. As described above, reliable loading and / or unloading of these segments can take place in these loading and / or unloading positions, but at the same time the movements of the robot necessary for this purpose can be reduced.

In a further embodiment, the distance corresponds to the length of a segment or a multiple of the length of a segment of the process boat. This results in an advantageous manner, a particularly good coordination between the movement of the robot and the movement of the process boat, which leads to a particularly high reduction of loading and / or unloading.

In another embodiment, the distances vary in successive boat-tran sport cycles. Thus, e.g. a process boat are moved by a first distance in a first boot transport cycle. Afterwards, a break in movement can follow. In a second boat-tran sport cycle following this break, the process boat can be moved a second distance. This can be longer or shorter than the first distance.

In this case, the distances traveled can be determined in consecutive boat-tran sports cycles as a route sequence. For example, in four consecutive boot transport cycles, a 2-2 -2 -2 transport sequence may occur

be carried out, wherein the successive transport clocks can be interrupted by a break in movement in each case. In this sequence, the process boat is moved in each of the four consecutive transport cycles by a distance corresponding to the length of two segments. By varying the distances in successive process-boat transport cycles, a further improved matching to the motion control of the robot can take place in an advantageous manner. As a result, in turn, loading and / or unloading can advantageously be further accelerated in terms of time.

In a further embodiment corresponds to a period of time between two immediately consecutive boot-Tran sport clocks, ie a break time, one

Segment-specific loading and / or unloading time of the robot. Alternatively, the time duration corresponds to a multiple of the segment-specific loading and / or unloading period. The multiple may be an integer multiple, but alternatively a non-integer multiple. For example, the time duration may correspond to 2 times or 2.5 times a segment-specific loading and / or unloading period.

In other words, during a (transport) break an integer number of segments, but also a non-integer number of segments can be loaded and / or unloaded. During the (transport) break, the process boat can be arranged in one of the loading and / or unloading positions.

A segment-specific loading and / or unloading period may indicate a period of time that the robot takes to completely load and / or unload the segment. The segment-specific loading and / or unloading period can also be loading and / or unloading position-specific. In fact, it may be possible for the robot in different loading and / or unloading positions to take different lengths of time to completely load and / or unload a segment.

As a result, the coordination between the motion control of the robot and the transport of the process boat to reduce the loading and / or unloading period can be further improved.

In another embodiment, a period of time between two consecutive boot-tran sport clocks varies. In other words, that varies

Pause period. This can also be the vote between the

Movement control of the robot and the transport of the process boat to reduce the loading and / or unloading time can be further improved.

Furthermore, a transport speed of the successive boot transport clocks can also vary. In other words, a transport path, a transport speed and / or a pause time, ie a loading / unloading time, can be variable.

In an alternative embodiment, the at least one process boat can be transported by the boot transport device in flow operation through the loading and / or unloading area of the robot. In such a scenario, no fixed loading and / or unloading positions can be provided, in which the process boat stands still during transport through the loading and / or unloading area. As a result, a throughput can be further increased in an advantageous manner.

In a further embodiment, substrates for loading the process boat by the robot are transported by at least two feeders into the working space of the robot. Alternatively, but preferably cumulatively, substrates discharged from the process boat by the robot become at least two

Abführhre transported from the working space of the robot.

As previously discussed, in a first unloading operation, substrates unloaded from a first segment of the process boat may become a first

Abführrichtung be transported, through which the substrates are transported from the working space of the robot. In a further unloading step, further substrates from this first segment or from a further segment of this

Process boats or transported from a segment of another process boat to a second discharge device by which these substrates are transported from the working space of the robot.

Accordingly, in a first loading operation, substrates can be transported from a first feed device into a first segment of the process boat. In a further loading step, further substrates can be used by a second

Feeding device in this first segment or in a further segment of this

Process boats or transported in a segment of another process boat.

By providing at least two supply and / or discharge devices can advantageously be a throughput during reloading of substrates between carriers and Process boats are increased.

Further proposed is a device for transporting substrates, in particular for the production of solar cells. The device comprises at least one robot for transporting substrates and at least one boot transport device for transporting process boats.

According to the invention, the at least one process boat can be transported by the robot through a loading and / or unloading area of the robot during the loading and / or unloading of the process boat by means of the boot transport device.

By means of the device can advantageously be carried out a method according to an embodiment described in this disclosure. In other words, the device is configured such that such a method can be performed with the device.

In a further embodiment, the device comprises at least one activatable stop element, wherein the at least one stop element in the activated state defines at least one loading and / or unloading position of the process boat in the loading and / or unloading area. This and corresponding advantages have already been explained above.

In a further embodiment, the device comprises at least one activatable centering device, wherein the at least one centering device in the activated state aligns a process boat corresponding to a predetermined position. This and corresponding advantages have already been explained above.

In a further embodiment, the device comprises at least two

Feeding devices, wherein the substrates for loading the process boat by the robot through these at least two feeders are transportable into the working space of the robot. Alternatively or cumulatively, the device comprises at least two discharge devices, wherein substrates discharged from the process boat by the robot are removed from the process by the at least two discharge devices

Working space of the robot are transportable. This and corresponding advantages have already been explained above. In this case, an apparatus for transporting substrates with two supply and / or two discharge devices may be an independent of the transport of the process boat during loading and / or unloading by a boat transport device invention. Thus, a method and a device for transporting substrates, in particular for the production of solar cells, described, wherein a process boat is loaded by a robot with substrates and / or wherein substrates are unloaded by a robot from the process boat. Furthermore, substrates for loading the process boat are transported by at least two feeders into the working space of the robot. Alternatively or cumulatively, substrates discharged from the process boat by the robot are transported out of the working space of the robot by at least two discharge devices. As a result, a throughput in the transport of substrates between carriers and process boats can be increased in an advantageous manner.

The invention will be explained in more detail with reference to an embodiment. The figures show:

1 is a schematic plan view of a process boat,

Fig. 2 is a schematic plan view of an inventive device for

 Transport of substrates in a first transport state,

3 shows a schematic plan view of the device shown in FIG. 2 in a second transport state, FIG.

Fig. 4 is a schematic plan view of a device according to the invention in a further embodiment and

Fig. 5 is a schematic flow diagram of a method according to the invention.

Hereinafter, like reference numerals designate elements having the same or similar technical features. 1 shows a schematic plan view of a process boat B according to the invention. The process boat B is made of graphite and comprises a plurality of graphite plates 1, which are arranged parallel to one another and at a predetermined distance from one another. By way of example, four graphite plates 1 are shown in FIG. On surfaces of a graphite plate 1, in particular both on a front and on a back, substrates 2 are arranged, wherein for the sake of clarity, only a substrate 2 with a

Reference number is provided. For this purpose, the graphite plates 1 holding elements (not shown) for holding the substrates 2 have. It is shown that in external graphite plates 1, a substrate 2 is arranged only on an inwardly oriented side of the graphite plate 1.

Each of the graphite plates 1 comprises a plurality of sections, with four sections shown by way of example in FIG. In each of the sections, exactly one substrate 2 is respectively arranged on the front and / or rear side of the graphite plate 1. The process boat B includes a plurality of segments S, with a segment S each comprising a portion of each of the four parallel graphite plates 1. Thus, the process boat B comprises four segments S. It is shown that in each segment S six substrates 2 are arranged. The sections and thus also the segments S are arranged consecutively along a central longitudinal axis of the process boat B.

Also shown is a length L_B of the process boat B, this length L_B being detected along the longitudinal axis of the process boat B. Also shown are a length L_S of each segment S, whereby this length L_S along the central longitudinal axis of the process boat B is also detected.

FIG. 2 shows a schematic plan view of a device 3 according to the invention for transporting substrates 2 (see FIG. 1). It is shown that the device 3 comprises a robot 4 designed as an articulated-arm robot. A boat transport device 5 designed as a conveyor belt, in particular an endless conveyor belt, is also shown. By means of the boat transport device 5, process boats B1, B2 can be moved along a linear boat trajectory, which is symbolized by an arrow 6. FIG. 2 shows, by way of example, a first process boat B1 and a second process boat B2, each with four segments S. Further, the device 3 comprises a first pair of activatable stop members 7a, a second pair of activatable stop members 7b, a third pair of activatable stop members 7c and a fourth pair of activatable ones

Stop elements 7d. These activatable stop elements 7a, 7b each comprise a movable element 8, which is set in an activated state of the stop element 7a, ..., 7d in an extended state and in a deactivated state in a retracted state. In the extended state, the movable element 8 is arranged such that a process boat B1, B2 can strike against the movable element 8 during transport by the boot transport device 5. If the process boat B1, B2 hits, further movement of this process boat B1, B2 along the boot trajectory is prevented by the activated stop element 7a,..., 7d.

FIG. 2 shows that the pairs of different stop elements 7a,..., 7d define different, in particular four, positions along the boot trajectory. The number and positions of the stop elements 7a, ..., 7d is purely exemplary in this case. In particular, more or fewer stop elements 7a,..., 7d can also be arranged at other positions along the boot trajectory.

FIG. 2 shows a first pair of stop elements 7a in the activated state, wherein the first process boat B1 is in a first loading and / or unloading position when it abuts against movable elements 8 of the stop elements 7a.

FIG. 3 shows that the first process boat B1 is in a second loading and / or unloading position when it strikes against movable elements 8 of the second pair of activatable stop elements 7b.

In other words, several loading and / or unloading positions for process boats B1, B2 along the boat trajectory can be determined by the stop elements 7a, ..., 7d.

It is further shown that the device 3 comprises centering devices 9. Each centering device 9 comprises two centering jaws, which can be moved towards each other for centering. By means of the centering devices 9, the graphite plates 1 of a process boat B1, B2 and thus also the substrates 2 arranged therein can be set in a specific, desired orientation. In this case, a process boat B1, B2 are centered in each loading and / or unloading position by one or more centering devices 9 when it is in the first loading and / or unloading position.

Next, a working area 10 of the robot 4 is shown in FIG. Substrates 2 can be removed from the process boats B1, B2 or arranged in the segments S of the process boats B1, B2 by the robot 4. The substrates 2 can be arranged by means of the robot 4 within the working space 10 or through the

Work space 10 are transported.

Furthermore, a loading and / or unloading area 11 of the robot 4 is shown schematically. This loading and / or unloading area 1 1 is a partial area of the working space 10 of the robot 4. It is shown that the loading and / or unloading area can comprise a predetermined number of segments S of one or more process boats B1, B2, if the process boats B1 , B2 are transported by the transport device 5, in particular when the process boats B1, B2 are in a loading and / or unloading position. Preferably, there is at least one segment S, several, but not all, segments S or all segments S of a process boat B1, B2 in the loading and / or unloading 11, when the process boat B1, B2 in a loading and / or

Unloading position is located.

The loading and / or unloading area 11 of the robot 4 here denotes a region in which substrates 2 are removed by the robot 4 from the process boats B1, B2 or in the substrate 2 in the segments S of the process boats B1, B2 by the robot 4 to be ordered.

In FIG. 2, the process boats B1, B2 are shown here in the first transport state. It is shown that only three out of four segments S of the process boat B1 can be loaded and / or unloaded in this first transport state.

FIG. 3 shows a schematic plan view of the device 3 shown in FIG. 2 in a second transport state of the process boats. In particular, it is shown that the first process boat B1 was transported by the boot transport device 5 along the linear trajectory symbolized by an arrow 6 about a first predetermined distance. The arrow 6 also indicates an x-direction x, whereby the transport of the process boats B1, B2 takes place along the x-direction. The length of this first distance corresponds to the length of two segments S of the process boats B1, B2. Here it is shown that the first process boat B1 follows this

Transporting movement is in a second loading and / or unloading position defined by the second pair of stop elements 7b. Also shown is a y-direction y, which is oriented perpendicular to the x-direction. The direction of movement of the movable elements 8 of the stop elements 7a, ..., 7d can be oriented parallel to the y-direction. Also, the direction of movement of the centering of the

Centering devices 9a, 9b can hereby be oriented parallel to the y-direction.

In this second loading and / or unloading position, a third and a fourth segment S of the first process boat B1 are located along the transport direction in a position of the first and second segments S of the first process boat B1 arranged in the first loading and / or unloading position, ie before this transport movement.

Accordingly, the first and the second segment S of the second

Process boat B2 in the position of the third and fourth segment S of the first process boat B1 arranged in the first loading and / or unloading position.

It is further shown that the process boats B1, B2 respectively abut on movable elements 8 of different stop elements 7b, 7d and thus not on each other.

The transport of the process boats B1, B2 can be clocked here. This may mean that after a transport by the predetermined distance a

Transport break takes place. After the transport break, a new transport movement can take place in a new transport cycle. In this subsequent transport movement, the process boats B1, B2 can in turn be moved by a second predetermined distance along the symbolized by an arrow 6 trajectory. This second path can be the same as or different from the first path.

During the transport break substrates 2 from a segment S of a

Process boat B1, B2 or from several segments S of a process boat B1, B2 or segments S of different process boats B1, B2 are unloaded. Likewise, a segment S of a process boat B1, B2, different segments S of a process boat B1, B2 or different segments of different process boats B1, B2 can be loaded with substrates 2. Here, the one or more process boat (s) B1, B2 is in a loading and / or unloading position. In a transport break so exactly one segment S can be loaded and / or unloaded. Alternatively, a whole number or a non-integer number of segments S of process boats B1, B2 in the loading and / or unloading area 11 can be loaded and / or unloaded during a transport break. It is possible for different numbers of segments S to be loaded and / or unloaded in different transport breaks.

4 shows a schematic plan view of a device 3 according to the invention in a further embodiment. In this case, the device 3 shown in FIG. 4 is designed substantially like the device 3 shown in FIGS. 2 and 3. Therefore, reference can be made to the corresponding statements. FIG. 4 shows a third pair of stop elements 7c which define a third loading and / or unloading position for process boats B1, B2 along the boat trajectory. Compared to the positioning of the first process boat B1 in the second loading and / or unloading position shown in FIG. 3, in the state shown in FIG. 4 the first process boat B1 is a third distance along the boot trajectory symbolized by the arrow 6 has been moved, which corresponds to the length of two segments S, and is in the third loading and / or unloading position. The second process boat B2 has also been moved around two segments, with its position corresponding to the first loading and / or

Discharge position of the first process boat B1 corresponds, is determined by the stop elements 7a.

In at least two of the three loading and / or illustrated in FIGS. 2 to 4

Unloading positions can here by the robot 4 an integer number or a non-integer number of segments S of a process boat B1, B2 loading and / or unloaded.

Further shown are two feeders 12a, 12b and two discharge devices 13a, 13b. Each of the supply and discharge devices 12a, 12b, 13a, 13b comprises a movable receiving device 14 for substrates which have been unloaded from process boats B1, B2 or loaded into the process boats B1, B2. The moving ones

Receiving devices 14 for substrates 2 of the supply and discharge devices 12a, 12b, 13a, 13b are arranged in the working space 10 of the robot 4. Furthermore, each feed device 12a, 12b comprises a carrier unloading device 15, through which substrates 2 can be removed from carriers C. Next includes each

Feeding device 12a, 12b designed as a conveyor belt 16 transport device for the transport of substrates 2 between the carrier unloading device 15 and the movable receiving device 14th

Each discharge device 13a, 13b comprises a carrier loading device 17 with which carriers C can be loaded with substrates 2. Next includes each

Abführeinrichtung 13a, 13b also a conveyor belt 16 for the transport of substrates 2 between the carrier-loading device 17 and the receiving device 14 of the discharge device 13a, 13b.

Also shown is a transport device 18 designed as a conveyor belt for Carrier C.

It is possible that, in a first unloading operation, a subset of the substrates 2 unloaded from a first segment S of one of the process boats B1, B2 are transported by the robot 4 to the first discharge device 13a and into the latter

Receiving device 14 are arranged. In a first loading step following this first unloading step, substrates 2 removed by the robot 4 from the receiving device 14 of the first feeding device 12a can be arranged in this segment S. In a subsequent, second unloading operation, a further subset of the remaining substrates 2 can be unloaded from this segment and transferred to the movable receiving device 14 of the second

Abführvorrichtung 13 b transported and arranged in this. In a subsequent, second loading operation, a further subset of substrates 2 can be removed from the movable receiving device 14 of the second supply device 12b by the robot 4 and arranged in this segment S.

This sequence of unloading and Beladearbeitsschritten or a different sequence can be performed in a transport break for one or more segments S of one or more process boats B1, B2. FIG. 5 shows a schematic flow diagram of a method according to the invention for transporting substrates 2. In a first step S1, a first

Process vessel B1 (see FIG. 2) is transported by means of a boot transport device 4 into a first loading and / or unloading position in a loading and / or unloading area 11 of a robot 4. For this purpose, the boat transport device 5 can be controlled accordingly. Furthermore, a stop element, e.g. a first stopper member 7a, are set in an activated state 7a.

In a second step S2, this is in the first loading and unloading position

located process boat B1, B2 centered, in particular by activating a

Centering device 9a.

In a third step S3 loading and / or unloading takes place of at least one segment S, but not of all segments S, in the first loading and / or

Unloading position arranged first process boat B1. In this case, an integer or non-integer number of segments S can be loaded and / or unloaded. This loading and / or unloading is done by the robot 4.

If further process boats B2 are likewise in loading and / or unloading positions or in the loading and / or unloading area 11 of the robot 4, then in the third step S3 an integer or non-integer number of segments S of these further process boats B2 can also be loaded and unloaded / or unloaded.

In a fourth step S4, the first process boat B1 is transported by means of the boot transport device 4 to a second loading and / or unloading position. In a fifth step S5, in turn, centering of the first process boat B1 can take place in these second loading and / or unloading positions.

In a sixth step S6, an integer or non-integer number of segments S of the first process boat B1 can again be loaded and / or unloaded. If further process boats B2 are likewise located in loading and / or unloading positions or in the loading and / or unloading area 11 of the robot 4, in the sixth step S6 an integer or non-integer number of segments S of these further can also be provided

Process boats B2 loading and / or unloaded. In this case, the second and the third step S2, S3 can be carried out in a transport break between the transport carried out in the first step S1 and in the fourth step S4. Accordingly, the fifth and the sixth step S5, S6 in a

Transport break after transport in the fourth step S4 are performed.

LIST OF REFERENCE NUMBERS

1 graphite plate

 2 substrate

 3 Device for transporting substrates

4 robots

 5 boat transport equipment

 6 arrow

 7a, ..., 7d stop elements

 8 movable element

 9 centering devices

 10 working space

1 1 loading and / or unloading area

 12a, 12b feeder

13a, 13b discharge devices

 14 movable receiving device for substrates

15 carrier unloading device

 16 conveyor belt

 17 Carrier loading device

 18 conveyor belt for carriers

x x direction

Y y direction

 B, B1, B2 process boat

S segment

 L_S length of a segment

 L_B Length of the process boat

 C carrier

 51 first step

 52 second step

 53 third step

 54 fourth step

 55 fifth step

 56 sixth step

Claims

claims 1. Process for the transport of substrates (2), in particular for the production of Solar cells, wherein a process boat (B, B1, B2) by a robot (4) with substrates (2) is loaded and / or wherein substrates (2) by a robot (4) discharged from the process boat (B, B1, B2) become,  characterized in that  the at least one process boat (B, B1, B2) by a boot transport device (5) during the loading and / or unloading of the process boat (B, B1, B2) by the robot (4) through a loading and / or unloading (11) of the robot (4) is transported. 2. The method according to claim 1, characterized in that at least one  Stop element (7a, 7b, 7c, 7d) is activated, wherein the at least one stop element (7a, 7b, 7c, 7d) in the activated state, at least one loading and / or unloading position of the process boat (B, B1, B2) in Be - and / or unloading area (1 1) determines. 3. The method according to any one of the preceding claims, characterized in that a process boat (B, B1, B2) by at least one centering device (9) in the loading and / or unloading area (11) is aligned. 4. The method according to any one of the preceding claims, characterized in that a position and / or orientation of the at least one process boat (B, B1, B2) is detected, wherein the loading and / or unloading of the process boat (B, B1, B2) is performed by the robot (4) in dependence on the detected position and / or orientation. 5. The method according to any one of the preceding claims, characterized in that the at least one process boat (B, B1, B2) clocked by the loading and / or unloading area (1 1) of the robot (4) is transported. 6. The method according to claim 5, characterized in that the process boat (B, B1, B2) is transported in a boot-Tran sport cycle by a predetermined distance along a boat trajectory, wherein the distance greater than or equal to the length (L_S) of a segment (L) of the process boat (B, B1, B2 ) and smaller than the length (L_B) of the process boat (B, B1, B2). 7. The method according to claim 6, characterized in that the distance of the Length (L_S) of a segment (S) or a multiple of the length (L_S) of a segment (S) of the process boat (B, B1, B2) corresponds. 8. The method according to claim 6 or 7, characterized in that the  Routes in successive boat transport cycles vary. 9. The method according to any one of claims 5 to 8, characterized in that a Time duration between two immediately consecutive boot transport cycles a segment-specific loading and / or unloading period or a multiple of the segment-specific loading and / or unloading period corresponds. 10. The method according to any one of claims 5 to 9, characterized in that a time period between two immediately consecutive boot transport clocks varies. 1 1. A method according to any one of claims 1 to 4, characterized in that the at least one process boat (B, B1, B2) by means of the boot transport device (5) in flow operation through the loading and / or unloading (1 1) of the Robot (4) is transported. 12. The method according to any one of the preceding claims, characterized  characterized in that substrates (2) for loading the process boat (B, B1, B2) are transported by the robot (4) through at least two feed devices (12a, 12b) into the working space (10) of the robot (4) and / or from the process boat (B, B1, B2) by the robot (4) discharged substrates (2) by at least two discharge devices (13a, 13b) from the working space (10) of the robot (4) are transported. 13. Device for transporting substrates (2), in particular for the production of solar cells, wherein the device (3) at least one robot (4) for  Transport of substrates (2) and at least one boat transport device (5) for transporting process boats (B, B1, B2),  characterized in that the at least one process boat (B, B1, B2) by means of the boot transport device (5) during the loading and / or unloading of the process boat (B, B1, B2) by the robot (4) through a loading and / or unloading (1 1) of the robot (4) is transportable. 14. The device according to claim 13, characterized in that the device (3) comprises at least one activatable stop element (7a, 7b, 7c, 7d), wherein the at least one stop element (7a, 7b, 7c, 7d) in the activated state, at least one Loading and / or unloading position of the process boat (B, B1, B2) in the loading and / or unloading area (1 1) determines. 15. Device according to one of claims 13 or 14, characterized in that the device (3) comprises at least one activatable centering device (9), wherein the at least one centering device (9) in the activated state, a process boat (B, B1, B2) accordingly aligns with a predetermined orientation.