WO2019112512A1 - Fluid control device and joint for fluid control device - Google Patents

Abstract

The present invention relates to a fluid control device and a joint for the fluid control device. The joint comprises a first unit and a second unit for forming a joint of a specific shape. The first unit has an upper surface and a lower surface. The upper surface comprises: at least one fluid inlet; at least one fluid outlet; and at least one connection passage connecting the fluid inlet and the fluid outlet and extending in a 7K horizontal direction. The second unit is disposed under the first unit, and comprises a positioning block protruding from a portion of the lower surface of the first unit and a first recess part adjacent to another portion of the lower surface and the positioning block.

Description

 \¥0 2019/112512 卩(:17802017/050596

[name of invention]

 Fluid control device and connector for fluid control device

 [Technical Field of the Invention]

 SUMMARY OF THE INVENTION The present invention is directed to a fluid control device and a joint thereof, and more particularly to a fluid control device that can be easily disassembled and assembled, as well as an elasticized module and a highly sealed fluid.

 [Prior Art]

 The fluid control device is a device commonly used in the semiconductor industry for the purpose of supplying the gas required for processes such as diffusion, etching, sputtering, etc. in the semiconductor manufacturing process. At present, the fluid control device mainly includes a plurality of devices, such as a pressure reducing valve, a pressure gauge, a mass flow controller, a gas filter, a manual valve, a first shutoff valve, a second shutoff valve, etc., and includes a connection for controlling the fluids. The various joints of the equipment form a passage for the fluid to circulate smoothly.

 Even though fluid control devices have been widely used in the semiconductor industry, there are still deficiencies to be improved. For example, since the fluid control device includes a variety of devices, the ease of disassembly and assembly of the fluid control device is an issue to be improved. The currently proposed solution includes reducing the number of components used in the fluid control device. Furthermore, the effect of assembly is easy.

For example, the fluid control device of U.S. Patent Publication No. 20 1 5 0 75 6 60 also proposes an improvement in the assembly problem. The apparatus includes an upper layer in which a plurality of fluid control machines are arranged in a line and a lower layer of a passage block for connecting a plurality of fluid control machines of the upper layer, the adjacent passage blocks being inverted by each other Piping connection, not only easy to use multiple columns \¥0 2019/112512 卩(:17802017/050596

Blocks and single-row pass blocks are also easy to increase or decrease the number of rows and columns.

 In addition, some of the fluid flowing through the fluid control device is corrosive. In addition to improving the corrosion resistance of the components of the fluid control device, it is also necessary to consider the difficulty of cleaning and maintenance. Moreover, the leakage of the fluid often occurs in the fluid control device, especially when the flowing gas carries danger or human harm, it is necessary to carefully avoid the problem of fluid leakage.

 In view of this, there is an urgent need to develop a novel fluid control device that can improve the above-mentioned defects to meet the needs of the industry.

 [Content of the invention]

 The main object of the present invention is to solve the problem that conventional fluid control devices are not easily disassembled or assembled.

 Another object of the present invention is to improve the conventional use of a fluid control device in a joint in which the gas passage is susceptible to particle residue and is not easy to clean.

 A further object of the invention is to reduce the risk of bubble leakage during the flow of the fluid control device.

In order to achieve the above object, an embodiment of the present invention provides a joint for a fluid control device including at least two fluid flow holes, comprising: a first unit having an upper surface and a surface opposite to the upper surface a first fluid flow hole disposed on the upper surface, a second fluid flow hole disposed on the upper surface, and a first fluid flow hole and the second fluid flow hole communicating with the first fluid passage hole a first channel in the unit; and a second unit disposed under the first unit, including a positioning block partially protruding from one of the lower surfaces of the first unit and another adjacent to the lower surface A portion is with the first recess of the positioning block. \¥0 2019/112512 卩(:17802017/050596

In order to achieve the above object, another embodiment of the present invention provides a joint for a fluid control device including at least three fluid flow holes, comprising: a first unit having an upper surface opposite to the upper surface a lower surface, a first fluid flow hole disposed on the upper surface, a second fluid flow hole disposed on the upper surface, and a fourth fluid flow hole disposed on the upper surface, the first fluid flow hole and A first passage is disposed between the fourth fluid circulation hole to communicate the first fluid circulation hole and the fourth fluid circulation hole; and an extension unit protruding outward from a side end of the first unit, The extension unit includes a third fluid circulation hole, and a second passage is disposed between the third fluid circulation hole and the second fluid circulation hole to communicate the second fluid circulation hole and the third fluid circulation hole; a second unit, disposed under the first unit, including a positioning block partially protruding from one of the lower surfaces of the first unit, and a It is adjacent to the lower surface of another portion of the first recess portion of the positioning block.

A further embodiment of the present invention provides a joint comprising at least four fluid flow holes, comprising: a first unit having an upper surface, a lower surface opposite the upper surface, and a first fluid disposed on the upper surface a flow hole, a second fluid flow hole disposed on the upper surface, a fourth fluid flow hole disposed on the upper surface, a fifth fluid flow hole disposed on the upper surface, and a first surface disposed on the upper surface a six-fluid circulation hole, wherein a first passage is disposed between the first fluid circulation hole and the fifth fluid circulation hole to communicate the first fluid circulation hole and the fifth fluid circulation hole, and the second fluid circulation hole is a second passage is disposed between the sixth fluid circulation hole to communicate the second fluid circulation hole and the sixth fluid circulation hole; an extension unit, the \¥0 2019/112512 卩(:17802017/050596

The extension unit protrudes outward from a side end of the first unit, the extension unit includes a third fluid circulation hole, and a third passage is disposed between the third fluid circulation hole and the fourth fluid circulation hole to communicate The third fluid circulation hole and the fourth fluid circulation hole; and a second unit disposed under the first unit, including a positioning block protruding from one of the lower surfaces of the first unit and an adjacent portion And another portion of the lower surface and the first recess of the positioning block.

A further embodiment of the present invention provides a joint comprising at least six fluid flow holes, comprising: a first unit having an upper surface, a surface opposite the upper surface, and a first fluid disposed on the upper surface a flow hole, a second fluid flow hole disposed on the upper surface, a fourth fluid flow hole disposed on the upper surface, a fifth fluid flow hole disposed on the upper surface, and a first surface disposed on the upper surface a six-fluid circulation hole, wherein a first passage is disposed between the first fluid circulation hole and the fifth fluid circulation hole to communicate the first fluid circulation hole and the fifth fluid circulation hole, and the second fluid circulation hole is a second passage is disposed between the sixth fluid circulation hole to communicate the second fluid circulation hole and the sixth fluid circulation hole; and an extension unit protruding outward from a side end of the first unit, The extension unit includes a third fluid circulation hole, and a third passage is disposed between the third fluid circulation hole and the fourth fluid circulation hole to communicate the third fluid circulation hole and the fourth flow a flow hole; and a second unit disposed under the first unit, including a positioning block partially protruding from one of the lower surfaces of the first unit and another portion adjacent to the lower surface and the positioning block The first depression. \¥0 2019/112512 卩(:17802017/050596

The invention also provides a joint module for a fluid control device, comprising: a plurality of connecting blocks arranged along an axial direction, the connecting blocks each comprising an upper half and a lower half, the upper half Included at least one fluid inlet, at least one fluid outlet, and at least one connecting passage extending between the fluid inlet and the fluid outlet and extending in a horizontal direction, the lower half having a recess and a distance away from the recess and along the An axially extending protruding tongue, wherein the connecting passage is higher than an upper surface of the tongue; wherein the adjacent connecting blocks are connected to each other through the tongue and received in the recess.

 The invention also provides a joint module for a fluid control device, comprising: a plurality of connecting blocks arranged along an axial direction, the connecting blocks each comprising at least one fluid inlet, at least one fluid outlet, and at least one connection a connecting passage between the fluid inlet and the fluid outlet and extending in a horizontal direction and at a height from a bottom surface of the connecting block, wherein one end of the connecting block forms a protruding first tongue, and the other end forms a The recessed portion, the adjacent connecting blocks are connected to each other through the first tongue portion being received in the recessed portion.

 The invention also provides a fluid control device comprising:

 a pedestal ;

 a joint module disposed on the base and comprising:

 a first joint, including:

a first unit having a first upper surface, a first lower surface opposite the first upper surface, a first fluid flow hole disposed on the first upper surface, and a first upper surface disposed on the first upper surface Second fluid flow hole and one connection \¥0 2019/112512 卩(:17802017/050596

Passing the first fluid flow hole and the second fluid flow hole and penetrating through the first passage in the first unit;

 a second unit disposed under the first unit, including a first positioning block partially protruding from one of the first lower surfaces of the first unit and another portion adjacent to the first lower surface a first recess of the first positioning block;

 A second connector ’ includes:

 a third unit having a second upper surface, a second lower surface opposite the second upper surface, a third fluid flow hole disposed on the second upper surface, and a second upper surface disposed on the second upper surface a fourth fluid circulation hole and a second passage communicating with the third fluid circulation hole and the fourth fluid circulation hole and penetrating through the third unit;

 a fourth unit disposed under the third unit, including a second positioning block partially protruding from one of the second lower surfaces of the third unit, and another portion adjacent to the second lower surface a second recessed portion of the second positioning block and a tongue extending away from the second recessed portion, wherein the first joint receives the tongue portion of the fourth unit by the first recessed portion of the second unit And the second joint abutting each other; and

 A fluid control member is fastened to the base through the joint module, and the fluid control member is bridged between the first joint and the second joint.

 The invention also provides a fluid control device comprising:

 a pedestal extending along an axis;

a fluid control member disposed above the base, the fluid control member having an outlet and an inlet; \¥0 2019/112512 卩(:17802017/050596

A joint module </ RTI> disposed between the fluid control member and the base includes:

 a plurality of connection blocks arranged along the axial direction, the connection blocks each comprising:

 a fluid passage comprising a first-class body inlet disposed on an upper surface of the connecting block and a fluid outlet, and an II-shaped connecting passage connecting the fluid inlet and the fluid outlet;

 An upper tongue portion is formed at one end of the connecting block, the upper tongue portion having a first fixing hole penetrating a bottom surface of the upper tongue portion;

 a lower tongue protrudingly formed at the other end of the connecting block, the lower tongue having a second fixing hole penetrating a top surface of the lower tongue;

 a fixing member penetrating the first fixing hole of the upper tongue portion of the connecting block and the second fixing hole of the lower tongue portion of the adjacent connecting block;

 Wherein the fluid control member is connected to the two adjacent connecting blocks, and the outlet of the fluid control member is connected to the fluid inlet of one of the connecting blocks, the inlet of the fluid control member and the other connecting block Fluid outlet connection.

 The invention also provides a fluid control device comprising:

 a pedestal extending along an axis;

 a fluid control member disposed above the base, the fluid control member having an outlet and an inlet;

 A joint module </ RTI> disposed between the fluid control member and the base includes:

a plurality of connecting blocks, the connecting blocks are arranged along the axial direction, and the connecting blocks each comprise: \¥0 2019/112512 卩(:17802017/050596

a fluid passage comprising a first-class body inlet disposed on an upper surface of the connecting block and a fluid outlet, and an II-shaped connecting passage connecting the fluid inlet and the fluid outlet;

 An upper tongue portion is formed at one end of the connecting block, the upper tongue portion having a first fixing hole penetrating a bottom surface of the upper tongue portion;

 a lower tongue protrudingly formed at the other end of the connecting block, the lower tongue having a second fixing hole penetrating a top surface of the lower tongue portion and a third fixing hole penetrating a bottom surface of the lower tongue portion ; as well as

 An upper fixing member is disposed through the first fixing hole of the upper tongue portion of the connecting block and the second fixing hole of the lower tongue portion of the adjacent connecting block; and

 a fixing member that passes through the third fixing hole of the lower tongue of the connecting block and the base;

 Wherein the fluid control member is connected to the two adjacent connecting blocks, and the outlet of the fluid control member is connected to the fluid inlet of one of the connecting blocks, the inlet of the fluid control member and the other connecting block Fluid outlet connection.

 Therefore, the effects of the present invention over conventional techniques are:

(1) The fluid control device of the present invention is connected through a joint having a specific shape, and the joint can be simply overlapped with adjacent joints to have the advantages of easy disassembly or assembly, thereby solving the problem that the conventional fluid control device is not easily disassembled or assembled. And based on the above-mentioned joints, the configuration of the fluid control device can be modularized, using a combination of different joints, elastically combined with a plurality of fluid control members.

(2) The joint design of the present invention is such that when fluid is controlled from a fluid \¥0 2019/112512 卩(:17802017/050596

When the fitting flows to the adjacent fluid control member through the joint, the fluid passes through only the fluid passage in the single joint, rather than the fluid passage formed by the plurality of secondary passages being connected to each other; in other words, assembly between adjacent joints There is no design of the fluid channel junction, thereby reducing the fluid channel interface, reducing the possibility of fluid leakage and having a good seal.

 (3) The fluid passage holes of the present invention and/or the passage between the fluid passage holes have a mirror surface which is effective for improving the problem of particle retention when the fluid flows.

 [Embodiment]

 The detailed description and technical contents of the present invention are described below with reference to the following drawings: The fluid control device of the present invention includes a plurality of fluid control members arranged in a row, and a plurality of joints corresponding to the fluid control members, and Each fluid control member is coupled to its joint to allow fluid to flow between the fluid control member in communication and between the joints.

 The fluid control member included in the fluid control device of the present invention is not particularly limited and can be arbitrarily selected as needed. In one embodiment, the fluid control member is selected from the group consisting of a pressure reducing valve, a pressure gauge, a mass flow controller, a filter, a manual valve, a 2 埠 shut-off valve, a 3 埠 shut-off valve, a high-clean pressure regulator, and a pressure sensor. And the group consisting of its combination. More specifically, it may include: manual valve, 2 埠 shut-off valve, 3 埠 shut-off valve, high clean pressure regulator, pressure sensor, filter, 2 埠 shut-off valve, mass flow controller, 3 埠 shut-off valve, and 2 埠Shut-off valve.

And the joint for the fluid control device of the present invention is based on \¥02019/112512 卩(:17802017/050596

Some air circulation ports can be divided into 2 埠 joints, 3 埠 joints, 4 埠 joints, and joints, which will be explained below. Further, in these joints, a plurality of units are included, each of which includes an upper surface, a lower surface, a first side surface, a second side surface, a third side surface, and a fourth side surface, etc. For convenience, the surfaces of the same orientation are described by the same name, but the labels are given different numbers to distinguish them.

 2 埠 connector

 The 2 埠 joint of the present invention means that there are two fluid passage holes in one joint, one of which is a fluid inlet and the other is a fluid outlet.

『Figure 1 person』 to 『图^』 is the first aspect of the 2 埠 joint of the present invention 1&.

 The unit 11 and a second unit 12 are disposed on the second unit 12.

The first unit 11 includes a first positioning block 11 and a first tongue 11 (3), and the first unit 11 further has an upper surface 111, a lower surface 112 opposite to the upper surface 111, and respectively a first side surface 113, a second side surface 114, a third side surface 115, and a fourth side surface 116 connected to the upper surface 111 and the lower surface 112, the first side surface 113 and the first side surface 113 The second side surface 114 is correspondingly disposed, and the second side surface 114 is disposed corresponding to the fourth side surface 116. The second unit 12 includes a second positioning block 128 and a second recessed portion 121), and the second positioning block 128 protruding from a portion of the lower surface 112 of the first unit 11, the first unit 11

Concavating into the second recessed portion 121), the second recessed portion 121) is adjacent to the lower surface \¥02019/112512 卩(:17802017/050596

The other part of 112 is between the second positioning block 123 and the second positioning block 123, as shown in the figure. The second unit 12 has a lower surface 122 and a first side surface 123, a second side surface 124, a third side surface 125, and a fourth side surface 126 respectively connected to the lower surface 122. The side surface 123 is disposed corresponding to the third side surface 125, and the second side surface 124 is disposed corresponding to the fourth side surface 126.

The first unit 11 and the second unit 12 have the same width 1. The length 1 _^ 1 of the first unit 11 is greater than the length 1 _^ 2 of the second unit 12, and the first unit 11 and the second unit 12 is an integrally formed structure, the third side surface 115 of the first unit 11 is aligned with the third side surface 125 of the second unit 12 and is integrally formed as one side. Similarly, the second side surface 114 of the first unit 11 and the second side surface 124 of the second unit 12 are integrally formed with one side, the fourth side surface 116 of the first unit 11 and the second The fourth side surface 126 of the unit 12 is also integrally formed on one side.

11131）、一第三螺紋孔 1113〇 ' 一第四螺紋孔 1113（1、 一第一下螺紋孔 11213、 一第二下螺 紋孔 11211） 、 一 第 一 螺栓孔 11148 以及一 第 二螺栓孔 111413 。 其中 ， 該第一定位銷孔 11118 及該第二定位銷孔 111113設置於該上表面 111 靠近該第一側表面 113 之一侧， 且為一貫穿該上表面 111 以及該下表面 112之貫孔 。 \¥02019/112512 卩（：17802017/050596 11 includes a first positioning pin hole 11113, a second positioning pin hole 111113, a first fluid circulation hole 11123, a second fluid circulation hole 11121), and a first threaded hole 111.

11131), a third threaded hole 1113〇' a fourth threaded hole 1113 (1, a first lower threaded hole 11213, a second lower threaded hole 11211), a first bolt hole 11148 and a second bolt hole 111413 . The first positioning pin hole 11118 and the second positioning pin hole 111113 are disposed on one side of the upper surface 111 adjacent to the first side surface 113, and are a through hole penetrating the upper surface 111 and the lower surface 112. . \¥02019/112512 卩(:17802017/050596

The first fluid flow hole 11123 and the second fluid flow hole 1112 are respectively disposed on the side of the upper surface 111 adjacent to the first side surface 113 and the third side surface 115, wherein the first fluid circulation hole 11123 The second fluid flow hole 1112 is disposed between the first threaded hole 11118 and the second threaded hole 1111). The second fluid flow hole 1112 is disposed between the third threaded hole 1113〇 and the fourth threaded hole 1113 (1). A first channel 11158 is disposed between the first fluid flow hole 1112& and the second fluid flow hole 11121 to communicate the first fluid flow hole 11128 and the second fluid flow hole 11121. In an example, the first channel 11153 extends from an end of the first unit 11 adjacent to the second positioning block 123 to an end of the first unit 11 adjacent to the second recess 121), and may also be regarded as the first unit. An end adjacent to the third side surface 115 extends to an end of the first unit 11 adjacent to the first side surface 113. To prevent fluid from remaining through the first passage 11158, the first passage 11153 can be treated to have a mirrored surface. For example, after the first side surface 113 is provided with an opening that communicates with the first channel 11158 and the first channel 11158 is polished to have a mirror surface, The opening is sealed by welding.

The first threaded hole 11133, the second threaded hole 11131), the third threaded hole 111, the fourth threaded hole 1113 (1, the first lower threaded hole 11218', and the second lower threaded hole 112^ are both a blind hole having a thread, that is, a non-penetrating hole, wherein the first threaded hole 11138 and the second threaded hole 111313 are disposed on a side of the upper surface 111 adjacent to the first side surface 113, the first threaded hole 11133 Adjacent to the first positioning pin hole 1111 ₃ , the second screw \¥02019/112512 卩(:17802017/050596

The hole 1113 is adjacent to the second positioning pin hole 111; and the third threaded hole 1113 (and the fourth threaded hole 11134 is disposed on the side of the upper surface 111 adjacent to the third side surface 115, and the third The threaded hole 1113 is disposed adjacent to the second side surface 114, the fourth threaded hole 1113 (1 is adjacent to the fourth side surface 116; the first lower threaded hole 11218 and the second lower threaded hole 11211) are disposed on the lower surface 112 And close to the first bolt hole 11143 and the second bolt hole 11141).

 Referring to FIG. 1A, in an embodiment of the present invention, the second fluid flow hole 11121) includes an enlarged portion 11121, a stepped surface 11122, and a channel portion 11123. The enlarged portion 11121 has an inner diameter larger than the channel portion. 11123, the step surface 11122 is connected between the enlarged portion 11121 and the channel portion 11123 and is a polished mirror surface, so that the second fluid circulation hole 111213 can communicate with other fluid control members to achieve the sealing effect. The fluid flow holes in the remaining embodiments and aspects are the same as above, and will not be described below.

The first bolt hole 1114 and the second bolt hole 1114 are respectively disposed on a side of the upper surface 111 adjacent to the second side surface 114 and adjacent to one side of the fourth side surface 116. More specifically, the first bolt hole 11143 is disposed adjacent to the first threaded hole 11138 and the third threaded hole 1113. The second bolt hole 111413 is disposed adjacent to the second threaded hole 11131) and the fourth threaded hole 1113 (1. The first bolt hole 11143 and the second screw hole 11141) are both a through hole is formed in the through hole of the upper surface 111 and the lower surface 112, and a protruding portion is disposed in the through hole of the first bolt hole 11148 and the second bolt hole 1114, so that the first bolt hole 11143 and the first portion The through hole of the two bolt holes 1114 has different diameters \¥02019/112512 卩(:17802017/050596

， 靠近該上表面 111 之直徑為 、 而靠近該 下表面 112之直徑為 2， 且 尺1 大於 2， 如 『圖 1?』所示 。

The diameter of the upper surface 111 is close to the lower surface 112, and the diameter of the lower surface 112 is 2, and the ruler 1 is larger than 2, as shown in FIG.

 According to the 2 埠 joint of the present invention, as shown in FIG. 2, the 2 埠 joint has a third distance between the third threaded hole 1113 〇 and the fourth threaded hole 1113 (1), which is the third in the first aspect 13 The remaining arrangement and structure are the same as the first aspect 18 described above except that the threaded hole 1113〇 and the fourth threaded hole 1113 (the distance between 1 is shorter).

所示 。 而該第二舌部 12〇 自該第二定位塊 128朝遠離該第二凹陷部 121）的一側延 伸且突出於該第一單元 11 ， 該第二單元 12 具有一上表面 \¥02019/112512 卩（：17802017/050596 『Figure 3 person』 to 『Fig. 3å』 is the third aspect of the 2 埠 joint of the present invention. The 2-inch joint 1 has a first unit 11 and a second unit 12, the first unit 11 includes a first positioning block 118' a first recess 111 and a first tongue 11 (3, and The first unit 11 further has an upper surface 111, a lower surface 112 opposite to the upper surface 111, and a first side surface 113 and a second side surface respectively connected to the upper surface 111 and the lower surface 112. 114, a third side surface 115, and a fourth side surface 116, the first side surface 113 is corresponding to the third side surface 115, and the second side surface 114 is corresponding to the fourth side surface 116; The second unit 12 includes a second positioning block 128, a second recess 1213 and a second tongue 12 (: the second positioning block 128 protrudes from a portion of the lower surface 112 of the first unit 11 The other portion of the lower surface 112 of the first unit 11 is recessed into the second recess portion 121 by the second positioning block 128. The second recess portion 121) is adjacent to the lower surface 112. The other part is between the second positioning block 128, such as

Shown. The second tongue 12 extends from the second positioning block 128 toward a side away from the second recess 121) and protrudes from the first unit 11. The second unit 12 has an upper surface. \¥02019/112512 卩(:17802017/050596

121' is a lower surface 122 opposite the upper surface 121, and a first side surface 123, a second side surface 124, a third side surface 125, and a second side surface 123, respectively, connected to the upper surface 121 and the lower surface 122, and A fourth side surface 126 is disposed corresponding to the third side surface 125, and the second side surface 124 is disposed corresponding to the fourth side surface 126.

In this embodiment, the first unit 11 and the second unit 12 are integrally formed. In detail, the first unit 11 and the second unit 12

 The second side surface 124 of the second unit 12 is formed in a tangential plane, and the fourth side surface 116 of the first unit 11 and the fourth side surface 126 of the second unit 12 are also formed to form a å shaped plane.

 Referring to FIG. 3 (:, FIG. 30), the first unit 11 further includes a first positioning pin hole 11113 ′, a second positioning pin hole 11111 ), a first fluid circulation hole 111 , and a second fluid. a flow hole 111213, a first threaded hole 11138' a second threaded hole 11131), a third threaded hole 1113〇, a fourth threaded hole 1113 (1 'a first lower threaded hole 11218' and a second lower threaded hole 11211), a first bolt hole 11143 and a second bolt hole 111413.

The first positioning pin hole 1111 & the second positioning pin hole 11111) are both through holes of the upper surface 111 and the lower surface 112, and the first positioning pin hole 11118 is interposed between the first threaded hole 11133 and the Between the first side surfaces 113, the second positioning pin hole 1111 is between the second threaded hole 11133b> and the first side surface 113. The first fluid flow hole 11128 and the second fluid flow hole 11121 are respectively disposed on the side of the upper surface 111 adjacent to the first side surface 113 and the third side surface 115. The first fluid circulation \¥02019/112512 卩(:17802017/050596

A first passage 11153 is connected between the hole 11123 and the second fluid circulation hole 11121) to communicate with the first fluid circulation hole 111.

The hole 111213, in this embodiment, the first channel 111

 An end of the second positioning block 12 is adjacent to an end of the first unit 11 adjacent to the second recess 125. To prevent fluid from remaining through the first passage 11158, the passage can be polished to have a mirrored surface as previously described.

11131） 設置在該第一 單元 11 之該上表面 111 靠近該第一侧表面 113 之一側 ； 該 第三螺紋孔 1113（： 設置在該上表面 111 靠近該第二侧表面 114 之一侧 ， 而該第四螺紋孔 1113（1 則靠近該第四侧表面 116，本態樣中 ，該第一螺紋孔 111 、該第二螺紋孔 11131）、 以及該第二流體流通孔 1112 之排列略呈一等腰三角形之 頂點 ； 該第一下螺紋孔 11213 及該第二下螺紋孔 112113 設 置在該下表面 112，且靠近該第一螺栓孔 111

The first threaded hole 11133, the second threaded hole 11131), the third threaded hole 111, the fourth threaded hole 1113 (1, the first lower threaded hole 11218', and the second lower threaded hole 112^ are both a blind hole having a thread, wherein the first threaded hole 111

11131) The upper surface 111 of the first unit 11 is disposed adjacent to one side of the first side surface 113; the third threaded hole 1113 is disposed on a side of the upper surface 111 adjacent to the second side surface 114, The fourth threaded hole 1113 (1 is adjacent to the fourth side surface 116, in this aspect, the first threaded hole 111, the second threaded hole 11131), and the second fluid flow hole 1112 are arranged in a slightly The apex of the isosceles triangle; the first lower threaded hole 11213 and the second lower threaded hole 112113 are disposed on the lower surface 112 and adjacent to the first bolt hole 111

 Bolt hole 11141).

The first bolt hole 11143 and the second bolt hole 11141) are both through the upper surface 111 and the lower surface 112. The through hole is provided with a protrusion, the first bolt hole 11143 and the The through hole of the second bolt hole 111413 has different diameters 1?1 and 1^2: the diameter close to the upper surface 111 is, and the diameter near the lower surface 112 is 1?2, and is large \¥02019/112512 卩(:17802017/050596

At 1?2 (refer to Figure III for the structure of the bolt hole). In this aspect, the first bolt hole 11143 is disposed between the first threaded hole 1113 and the third threaded hole 1113 (:, the second bolt hole 11141» is disposed in the second threaded hole 11131) and the The fourth threaded hole 1113 (between 1.

 The second unit 12 further includes a first positioning pin hole 12113 ′, a second positioning pin hole 121113 , a first through hole 12168 , a second through hole 12161 ) , a fifth threaded hole 12136 , and a sixth threaded hole . 1213!.

 The first positioning pin hole 1211 and the second positioning pin hole 12111 are disposed on a side of the upper surface 121 of the second unit 12 adjacent to the first unit 11 and penetrate the upper surface 121 and the lower surface. 122 through holes. The fifth threaded hole 12136 and the sixth threaded hole 1213 are disposed on a side of the upper surface 121 of the second unit 12 away from the first unit 11, in the aspect, the fifth threaded hole 12136 and the sixth thread The hole 1213 is a through hole penetrating the upper surface 121 and the lower surface 122. The first through hole 12163 and the second through hole 1216 are respectively disposed between the first positioning pin hole 12113 and the fifth threaded hole 12136. And between the second positioning pin hole 121113 and the sixth threaded hole 1213!.

、該第三螺紋孔 111313以及該第一流體流通孔 \¥02019/112512 卩（：17802017/050596 The fourth aspect of the 2-inch joint of the present invention 1 (1, as shown in Fig. 4). The difference between the 2 埠 joint 1 and the 2 埠 joint 1 < 3 is that the 2 埠 joint 1 (1 does not have The first positioning pin hole 11118, the second positioning pin hole 11111), the first lower threaded hole 11213 and the second lower threaded hole 1121 b, and the first threaded hole 11138 and the third threaded hole 11131) are mutually Close to each other, and symmetrically disposed with respect to the first fluid circulation hole 11123, and further, the first threaded hole 111

The third threaded hole 111313 and the first fluid circulation hole \¥02019/112512 卩(:17802017/050596

11123 is arranged on a virtual line. The rest of the configuration and structure are the same as the third aspect above (1).

 3埠 connector

 The 3 埠 joint of the present invention means that there are three flow holes on the joint which can be used as a fluid inlet or a fluid outlet. For example, in actual use, it can be a fluid inlet and a two fluid outlet, two fluid inlets and a fluid outlet, or Only two of the flow holes are used as a fluid inlet and a fluid outlet.

"Figure 5 people" to "Figure 5" is the first aspect of the 3 埠 joint of the present invention 2&,

 An extension unit 13 , the first unit 11 includes a first positioning block 118 ′ a first recess portion 111 and a first tongue portion 11 , the first unit 11 has an upper surface 111 , a surface 111 and an upper surface 111 . a first surface 111 opposite to the upper surface 111 and the lower surface 112, a second side surface 114, a third side surface 115, and a fourth side surface 116, respectively The first side surface 113 is disposed corresponding to the third side surface 115, and the second side surface 114 is disposed corresponding to the fourth side surface 116.

The second unit 12 includes a second positioning block 12&apos;, a second recessed portion 121), and a second tongue portion 12〇 protruding from a portion of the lower surface 112 of the first unit 11 The other portion of the lower surface 112 of the first unit 11 is recessed into the second recess portion 121 by the arrangement of the second positioning block 123, and the second recess portion 121) is adjacent to the lower surface 112.

The second tongue portion 12 extends from the second positioning block 12 toward a side away from the second recess portion 121) to protrude the first unit 11, and the second unit 12 also has \¥02019/112512 卩(:17802017/050596

An upper surface 121, a lower surface 122 opposite the upper surface 121, and a first side surface 123, a second side surface 124, and a third side surface respectively connected to the upper surface 121 and the lower surface 122 And a fourth side surface 126 , the first side surface 123 is disposed corresponding to the third side surface 125 , and the second side surface 124 is disposed corresponding to the fourth side surface 126 .

The extension unit 13 protrudes outward from an end of the first unit 11 and the second unit 12 adjacent to the second side surfaces 114, 124. The extension unit 13 includes an upper surface 131 opposite to the upper surface 131. a lower surface 132, and a first side surface 133, a second side surface 134 and a third side surface 135, respectively, connected to the upper surface 131 and the lower surface 132, the first side surface 133 and the third side The surface 135 is correspondingly disposed, and the extension unit 13

 『Figure 5 people』 is shown. An arc-shaped first recess 21 is formed between the first side surface 133 of the extension unit 13 and the second side surface 114 of the first unit 11; the third side surface 135 and the second portion of the extension unit 13 An arc-shaped second recess 22 is formed between the second side surface 124 of the unit 12, and an arc-shaped third recess 23 is formed between the retaining wall 137 and the third side surface 115.

 In this embodiment, the first unit 11, the second unit 12 and the extension unit 13 are integrally formed, that is, the first unit 11 and the second unit 12 have the same width.

The first unit 11 further includes a first positioning pin hole 11118' and a second positioning pin hole 11111), a first fluid circulation hole 11128, a second fluid circulation hole 111213, and a first threaded hole 11133'. Threaded hole 11131), \¥02019/112512 卩(:17802017/050596

a third threaded hole 1113〇, a fourth threaded hole 1113 (1, a first lower threaded hole 1121, a second lower threaded hole 1121 3⁄4>, a first bolt hole 11148 and a second bolt hole 111413. The extension unit 13 further includes a third fluid circulation hole 1312, a fifth threaded hole 13138, and a sixth threaded hole 131315.

 The first locating pin hole 11118 and the second locating pin hole 11111) are disposed on the side of the upper surface 111 adjacent to the first side surface 113, and are through the upper surface 111 and the lower surface 122. Through hole.

 The first fluid flow hole 11128 and the second fluid flow hole 1112 are respectively disposed on the upper surface 111 near the first side surface 113 and one side of the third side surface 115, and the third fluid circulation hole 1312 is disposed in the first fluid flow hole 1112. The upper surface 131 is adjacent to one side of the second side surface 134. A first passage 11153 is disposed between the first fluid circulation hole 11123 and the second fluid circulation hole 11123b) to connect the first fluid circulation hole 11123 and the second fluid circulation hole 1112; and A second passage 111513 is further disposed between the second fluid passage hole 11121) and the third fluid passage hole 1312 to allow the second fluid passage hole 11121) and the third fluid passage hole 1312 to communicate with each other. The first passage 11153 and the second passage 111513 are in communication with each other and extend in a direction perpendicular to each other. In other words, the first fluid flow hole 11123 communicates with the third fluid flow hole 1312 through the first passage 11158 and the second passage 11155 and the second fluid flow hole 11121). In order to prevent fluid from remaining through the channels, in this aspect, the channels are treated to have a mirrored surface.

The first threaded hole 11133, the second threaded hole 11133⁄4>, the third screw \¥02019/112512 卩(:17802017/050596

1113（1、 該第五螺紋孔 13138 ' 該第六螺紋孔 131313、該第一下螺紋孔 11213及該第二下螺 紋孔 112^ 均為具有螺紋之盲孔 。 其中 ， 該第一螺紋孔 11133及該第二螺紋孔 11131）設置在該第一單元 11 之該上 表面 111 靠近該第一側表面 113 之一侧 ， 且該第一定位銷 孔 11113以及該第二定位銷孔 11111）亦設置在該上表面 111 靠近該第一侧表面 113 之一侧 ； 該第三螺紋孔 1113（： 設置 在該上表面 111 靠近該第二侧表面 114 之一側 ， 而該第四 螺紋孔 1113（1則設置在該上表面 111 靠近該第四侧表面 116

Hole 111

1113 (1, the fifth threaded hole 13138'. The sixth threaded hole 131313, the first lower threaded hole 11213 and the second lower threaded hole 112^ are all blind holes having a thread. wherein the first threaded hole 11133 And the second threaded hole 11131) is disposed on a side of the upper surface 111 of the first unit 11 adjacent to the first side surface 113, and the first positioning pin hole 11113 and the second positioning pin hole 11111) are also disposed. The upper surface 111 is adjacent to one side of the first side surface 113; the third threaded hole 1113 (: is disposed on a side of the upper surface 111 adjacent to the second side surface 114, and the fourth threaded hole 1113 (1) Then disposed on the upper surface 111 adjacent to the fourth side surface 116

 The upper surface 131 of the extension unit 13 is adjacent to one side of the second side surface 134, and the third fluid circulation hole 1312 is disposed between the fifth threaded hole 13133 and the sixth threaded hole 131313. The first lower threaded hole 11213 and the second lower threaded hole 112113 are disposed on the lower surface 112 and adjacent to the first bolt hole 11143 and a second bolt hole 11141).

112之直徑為 尺2,且 大於 2。 本態樣中 ， 該第一螺栓孔 11143 之設置係設置於該第一螺 紋孔 11133 及該第三螺紋孔 1113〇 之間 ， 該第二螺栓孔 111413則設置於該第二螺紋孔 11131）及該第四螺紋孔 1113（1 \¥02019/112512 卩（：17802017/050596 The first bolt hole 11143 and the second bolt hole 11141) are both through holes of the upper surface 111 and the lower surface 112. The same as the bolt hole structure described above (please refer to FIG. 3), the protruding hole is provided with a protruding portion, so that the first bolt hole 11143 and the second bolt hole 111 have different through holes. Diameter and 1^2: close to the upper surface 111

112 has a diameter of 2 and is greater than 2. In this aspect, the first bolt hole 11143 is disposed between the first threaded hole 11133 and the third threaded hole 1113〇, and the second bolt hole 111413 is disposed in the second threaded hole 11131) Fourth threaded hole 1113 (1 \¥02019/112512 卩(:17802017/050596

Between.

The second unit 12 further includes a third positioning pin hole 1211 (:, a fourth positioning pin hole 1211 (1 'one first through hole 12168' and a second through hole 121613,

、以及靠近該第四 定位銷孔 1211（1與該第八螺紋孔 1213 。 The third locating pin hole 1211 〇 and the fourth locating pin hole 1211 (1 is disposed on a side of the upper surface 121 of the second unit 12 adjacent to the first unit 11 and both extend through the upper surface 121 and The through hole of the lower surface 122. The seventh threaded hole 1213^ and the eighth threaded hole 1213 are disposed on a side of the upper surface 121 of the second unit 12 away from the first unit 11, in this aspect, The seventh threaded hole 1213 and the eighth threaded hole 12131 are also through holes of the upper surface 121 and the lower surface 122. The first through hole 12163 and the second through hole 12161) are respectively disposed adjacent to the hole a third positioning pin hole 1211 (: with the seventh threaded hole

And adjacent to the fourth positioning pin hole 1211 (1 and the eighth threaded hole 1213).

 The second aspect of the 3-inch joint of the present invention is as shown in Fig. 6. The 3 埠 joint 21) has the same configuration and structure except that the upper surface 111 of the first unit 11 is different from the first aspect. The first surface of the first unit 11 of the first unit 11 does not include the first positioning pin hole 11113 and the second positioning pin hole 11111), and the first threaded hole 11133 and the second threaded hole The positional movement of 11135 causes the two and the first fluid flow holes 11128 to be aligned on a virtual straight line.

 4埠 and 4埠 joints

The term "four or more joints" as used in the present invention means that there are four or more fluid passage holes on a joint as a fluid inlet or fluid outlet. \¥02019/112512 卩(:17802017/050596

There is no specific direction in the mouth.

11 更包括一第四流體流通孔 1112〇 之外 ， 其餘結構與前述之該 3 埠接頭 28相 同 ， 故下文中僅 針對其流體流通孔之結構進行說明 而不再多 贅述其他結 構 。『图7人』 to 『Fig. 7(:』 is the first state of the joint of 4发明 or more of the present invention

11 further includes a fourth fluid flow hole 1112 ,, and the rest of the structure is the same as the above-described 3 埠 joint 28, so that only the structure of the fluid flow hole will be described hereinafter, and other structures will not be described again.

The second fluid flow holes 11121 are respectively disposed on the upper surface 111 adjacent to the first side surface 113 and one side of the third side surface 115, and the fourth fluid circulation hole 1112 (3 is disposed in the first fluid circulation hole) 11123 and the second fluid circulation hole 11121) are adjacent to the second fluid circulation hole 11121). In an embodiment, the first fluid circulation hole 111

 111213, and the fourth fluid circulation hole 1112 (the upper surface 111 is arranged on a virtual straight line. The third fluid circulation hole 1312 is disposed on the upper surface 131 of the extension unit 13 near the second side surface 134. One side, and the third fluid circulation hole 1312 is disposed between the fifth threaded hole 13138 and the sixth threaded hole 131313.

於該第二流體流通孔 1112 與該第三流體流通孔 1312 之間亦設置有一第二通道 11155 以連通該第二流體流通孔 1112 及該第三流體流通 孔 1312 。 不 同於 3 埠接頭之通道設計 ， 本態樣中 ， 該第一 通道 11158 與該第二通道 111513 彼此不連通 ， 故形成 4 璋 \¥02019/112512 卩（：17802017/050596 A first passage 11158 is disposed between the first fluid circulation hole 11128 and the fourth fluid circulation hole 1112 以 to communicate the first fluid circulation hole 11123 and the fourth fluid circulation hole 111.

A second passage 11155 is also disposed between the second fluid circulation hole 1112 and the third fluid circulation hole 1312 to communicate the second fluid circulation hole 1112 and the third fluid circulation hole 1312. Different from the channel design of the 3-inch joint, in this aspect, the first passage 11158 and the second passage 111513 are not in communication with each other, thus forming 4 璋 \¥02019/112512 卩(:17802017/050596

The structure of the first channel 11153 and the second channel 11151) are perpendicular to each other. In order to prevent fluid from remaining through the channels, in this aspect, the channels are treated to have a mirrored surface.

 The second aspect of the joint of the present invention of 4 埠 or more 31) is as shown in Fig. 8. In the joint 31) or more, except that the upper surface 111 of the first unit 11 is different from the first aspect, the rest of the configuration and structure are the same. In the second aspect, the first positioning pin hole 11118 and the second positioning pin hole 11111 are not disposed on the upper surface 111 of the first unit 11, and the first threaded hole 11133 and the second threaded hole are The positional movement of 1113 causes the two and the first fluid flow holes 11128 to be aligned on a virtual straight line.

，如『圖 9 』至『圖 9 』 所示 。於該 4埠以上接頭 3。 中具有一第一單元 11 、 一 第二單元 12 以及一延伸單元 13。 該第一單元 11 具有一上 表面 111 、 一與該上表面 111 相對之下表面 112、 以及分別 與該上表面 111 及該下表面 112連接之一第一側表面 113、 一第二側表面 114、 一第三侧表面 115 、 及一第四側表面 116， 該第一侧表面 113與該第三侧表面 115對應設置 ， 而 該第二侧表面 114 與該第四侧表面 116 對應設置 。 本態樣 中 ， 該第二單元 12 包括一第二定位塊 128以及一第二凹陷 部 121），該第二定位塊 128 自該第一單元 11 的該下表面 112 之一部分突出 ， 該第一單元 11 的該下表面 112之另一部分 則 因該第二定位塊 128 的設置而 內 凹成該第 二凹 陷部 121）， 該第二凹陷部 121）相鄰於該下表面 112之另一部分與

\¥02019/112512 卩（：17802017/050596 this invention

, as shown in Figure 9 to Figure 9. Above the 4 接头 joint 3 . There is a first unit 11, a second unit 12 and an extension unit 13. The first unit 11 has an upper surface 111, a lower surface 112 opposite to the upper surface 111, and a first side surface 113 and a second side surface 114 connected to the upper surface 111 and the lower surface 112, respectively. A third side surface 115 and a fourth side surface 116 are disposed corresponding to the third side surface 115, and the second side surface 114 is disposed corresponding to the fourth side surface 116. In this aspect, the second unit 12 includes a second positioning block 128 and a second recess 121. The second positioning block 128 protrudes from a portion of the lower surface 112 of the first unit 11, the first unit Another portion of the lower surface 112 of the 11 is recessed into the second recess 121 by the arrangement of the second positioning block 128, and the second recess 121 is adjacent to another portion of the lower surface 112.

\¥02019/112512 卩(:17802017/050596

The element 12 has a lower surface 122 and a first side surface 123, a second side surface 124, a third side surface 125, and a fourth side surface 126 connected to the lower surface 122. The first side surface 123 The second side surface 124 is disposed corresponding to the third side surface 125, and the second side surface 124 is disposed corresponding to the fourth side surface 126.

 The extension unit 13 protrudes outward from the side of the first unit 11 and the second unit 12 adjacent to the second side surfaces 114, 124. In this embodiment, the side end system and the first positioning block 11 The protrusion portion of the second positioning block 128 is different. The extension unit 13 includes an upper surface 131, a lower surface 132 opposite to the upper surface 131, and a top surface 131 and a lower surface 132, respectively. A first side surface 133, a second side surface 134 and a third side surface 135 are disposed corresponding to the third side surface 135. An arc-shaped first recess 21 is formed between the first side surface 133 of the extension unit 13 and the second side surface 114 of the first unit 11; the third side surface 135 of the extension unit 13 and the first A second recess 22 is formed between the second side surface 114 of the unit 11 and an arc is formed. The third side surface 135 and the second side surface 124 of the second unit 12 form an arc. The third recess 23 is provided.

 In this embodiment, the first unit 11, the second unit 12 and the extension unit 13 are integrally formed. In this embodiment, the second unit 12 has a smaller area than the first unit 11, so that the third side surface 115 of the first unit 11 and the third side surface 125 of the second unit 12 are aligned to form a flat surface. surface.

The first unit 11 further includes a first positioning pin hole 11113 'one second \¥02019/112512 卩(:17802017/050596

一第十螺紋孔 1113 、 一第一下螺紋孔 11213 ' 一第二下螺紋孔 11211）、 一第一螺栓孔 11143 以及 一第二螺栓孔 111 。 該延伸單元 13 還包括一第三流體流 通孔 1312、一第五螺紋孔 13133 以及一第六螺紋孔 13131）。 其中 ， 該第一定位銷孔 11118 以及該第二定位銷孔 1111 b 均設置於該上表面 111 靠近該第一側表面 113 之一侧 ， 且 為一貫穿該上表面 111 以及該下表面 112之貫孔 。 a positioning pin hole 11111), a first fluid circulation hole 11123, a second fluid circulation hole 111213, a fourth fluid circulation hole 1112, a fifth fluid circulation hole 1112 (1, a sixth fluid circulation hole 1112, a a first threaded hole 11138', a second threaded hole 11131), a third threaded hole 1113〇, a fourth threaded hole 1113 (1, a seventh threaded hole 11136, an eighth threaded hole 1113, a ninth threaded hole) 111

a tenth threaded hole 1113, a first lower threaded hole 11213' and a second lower threaded hole 11211), a first bolt hole 11143 and a second bolt hole 111. The extension unit 13 further includes a third fluid circulation hole 1312, a fifth screw hole 13133, and a sixth screw hole 13131). The first locating pin hole 11118 and the second locating pin hole 1111 b are disposed on the side of the upper surface 111 adjacent to the first side surface 113 and are through the upper surface 111 and the lower surface 112. Through hole.

1112（1、 以及該第六流 體流通孔 11126排列在一虛擬直線上 。 \¥02019/112512 卩（：17802017/050596 The first fluid circulation hole 1112 and the second fluid circulation hole 11125 are respectively disposed on the upper surface 111 near the first side surface 113 and one side of the third side surface, and the third fluid circulation hole 1312 is disposed at the extension. The upper surface 131 of the unit 13 is adjacent to one side of the second side surface 134, and the fourth fluid circulation hole 1112 is disposed between the first fluid circulation hole 11123 and the second fluid circulation hole 11121). a fifth fluid circulation hole 1112 (1 is disposed in the first fluid circulation hole 11128 and the fourth fluid circulation hole 111, and the sixth fluid circulation hole 11126 is disposed in the fourth fluid circulation hole 1112 (3 and the second Between the fluid circulation holes 11121), the first fluid circulation hole 11123, the second fluid circulation hole 11121), and the fourth fluid circulation hole 111

1112 (1, and the sixth fluid flow hole 11126 are arranged on a virtual straight line. \¥02019/112512 卩(:17802017/050596

1115〇 以連通該第三流 體流通孔 1312 及該第四流體流通孔 1112（3。 本態樣中 ， 該 第一通道 11153、該第二通道 11151）、以及該第三通道 1115〇 彼此不連通 ， 故形成 6埠的結構 ， 此外 ， 該第一通道 11158 與該第二通道 1115 延伸之方向彼此平行 ， 而該第一通道 11153與該第三通道 1115〇延伸之方向彼此垂直。且為了避 免流體流經該些通道時殘存其中 ， 於本態樣中 ， 該些通道 均經處理而具有一鏡面表面 。 A first passage 11153 is disposed between the first fluid circulation hole 11123 and the fifth fluid circulation hole 1112 (1) to communicate the first fluid circulation hole 11128 and the fifth fluid circulation hole 1112 (1; in the second fluid A second passage 11155 is disposed between the circulation hole 11125 and the sixth fluid circulation hole 11126 to communicate the second fluid circulation hole 1112 and the sixth fluid circulation hole 1112 ₆ ; further, the third fluid circulation hole 1312 and the first Four fluid circulation hole 111

1115〇 to communicate the third fluid circulation hole 1312 and the fourth fluid circulation hole 1112 (3. In this aspect, the first passage 11153, the second passage 11151), and the third passage 1115〇 are not in communication with each other, Therefore, a 6-inch structure is formed. Further, the direction in which the first channel 11158 and the second channel 1115 extend are parallel to each other, and the direction in which the first channel 11153 and the third channel 1115 extend are perpendicular to each other. And in order to avoid fluids remaining through the channels, in this aspect, the channels are treated to have a mirrored surface.

 The first threaded hole 11133, the second threaded hole 11131), the third threaded hole 1113〇' the fourth threaded hole 1113 (1 'the fifth threaded hole 13138', the sixth threaded hole 131313, the seventh thread The hole 11136, the eighth threaded hole 1113, the ninth threaded hole 1113, the tenth threaded hole 1113, the first lower threaded hole 11213 and the second lower threaded hole 112 are all blind holes with threads.

11131） 設 置在該第一單元 11 之該上表面 111 靠近該第一側表面 113 之一側 ， 且該第一螺紋孔 11138 及該第二螺紋孔 11131） 與 該上表面 111 靠近該第一側表面 113 之一侧之間分別設置 \¥02019/112512 卩（：17802017/050596 Wherein the first threaded hole 111

11131) The upper surface 111 of the first unit 11 is disposed on a side of the first side surface 113, and the first threaded hole 11138 and the second threaded hole 11131) are adjacent to the first surface 111 One side of the surface 113 is set separately \¥02019/112512 卩(:17802017/050596

The first positioning pin hole 11118 and the second positioning pin hole 111113.

The third threaded hole 1113 (: and the ninth threaded hole 11138 are disposed on a side of the upper surface 111 adjacent to the second side surface 114, the fifth screw

 The upper surface 131 is adjacent to the second side surface 134. More specifically, the third threaded hole 1113 is disposed adjacent to the first recess 21, and the ninth threaded hole 1113 is disposed adjacent to the second recess 22. The third fluid flow hole 1312 is disposed between the fifth threaded hole 13138 and the sixth threaded hole 13135.

 The seventh threaded hole 11136 and the eighth threaded hole 1113f are disposed on a side of the first unit 11 adjacent to the third side surface 115, and the second fluid circulation hole 11121 is disposed in the seventh threaded hole 11136 and the Between the eighth threaded holes 1113!.

， 其中 ， 該第四螺紋孔 1113（1 靠近 該第二螺紋孔 111313 設置 ， 而該第十螺紋孔 1113 靠近該 第八螺紋孔 111

。 該第一下螺紋孔 1121& 及該第二 下螺紋孔 11211）設置在該下表面 112,且靠近該第一螺栓孔 11143 以及一第二螺栓孔 11141）。 The fourth threaded hole 1113 (1 and the tenth threaded hole 1113}1 are adjacent to the fourth side surface 116, and are disposed on the second threaded hole 11131) and the eighth threaded hole 111.

The fourth threaded hole 1113 (1 is disposed adjacent to the second threaded hole 111313, and the tenth threaded hole 1113 is adjacent to the eighth threaded hole 111

. The first lower threaded hole 1121&apos; and the second lower threaded hole 11211) are disposed on the lower surface 112 and adjacent to the first bolt hole 11143 and a second bolt hole 11141).

The first bolt hole 11143 and the second bolt hole 11141) are both through the upper surface 111 and the lower surface 112. The through hole is provided with a protrusion, the first bolt hole 11143 and the The through hole of the second bolt hole 111413 has a different diameter and 1^2: close to the upper surface 111 \¥02019/112512 卩(:17802017/050596

而靠近該下表面 112 之直徑為 1?2 , 且 大 於 2（請參考圖 III）。 本態樣中 ， 該第一螺栓孔 11143之設 置係設置於該第一螺紋孔 111 1113（： 之 間 ， 該第二螺栓孔 11141） 則設置於該第二螺紋孔 11131） 及 該第四螺紋孔 1113（1之間 。 The diameter is

The diameter of the lower surface 112 is 1?2 and is greater than 2 (refer to Fig. III). In this aspect, the first bolt hole 11143 is disposed in the first threaded hole 111. 1113 (: between the second bolt hole 11141) is disposed between the second threaded hole 11131) and the fourth threaded hole 1113 (1).

 Connector

 The connecting member is used as a joint for connecting the above 2, 3, and 4 joints and a pipe body. In the present invention, the following two aspects are exemplified.

 Please refer to Figure 10 (8) to Figure 10 (:), which is the first aspect of the connector of the present invention 48. The connector 48 has a first unit and a second unit.

 The first unit has an upper surface 111, a lower surface (not shown) opposite the upper surface 111, and a first side surface 113 and a second side respectively connected to the upper surface 111 and the lower surface. a surface 114, a third side surface 115, and a fourth side surface (not shown), the first side surface 113 is disposed corresponding to the third side surface 115, and the second side surface 114 and the fourth side The surface (not shown) corresponds to the setting.

 The upper surface 111 of the first unit includes a first through hole 11168' - a second through hole 111613, and a first fluid flow hole 11128. The first fluid flow hole 11128 is disposed in the first through hole 11168. Between the second through holes 1116b.

In this aspect, the first through hole 11168 and the second through hole 1116 respectively penetrate the upper surface 111 and the lower surface (not shown), and the first fluid circulation hole 1112 _3⁄4 has one located at the second Opening of side surface 114 \¥02019/112512 卩(:17802017/050596

Oral end 1141.

 The second unit is an element having a hollow tubular structure including an inner surface 127 and an outer surface 128' and one end of the second unit communicates with the open end 1141 of the first fluid flow hole 11123.

 The second aspect of the connector of the present invention 41) is shown in Fig. 11 to Fig. 1; The connector 4 includes only a first unit having an upper surface 111 and a lower surface 112 opposite the upper surface 111. The upper surface 111 of the first unit 11 includes a first through hole 11168' and a second through hole 11161, and a groove 1117. The groove 1117 is disposed in the first through hole 11168 and the second through hole. Between holes 1116b.

 In this aspect, the first through hole 11168 and the second through hole 1116 are respectively through holes penetrating the upper surface 111 and the lower surface 112, and the groove 1117 has a protrusion to make the groove 1117 different. Diameter: The diameter of the upper surface 111 is larger than the diameter of the lower surface 112.

 Fluid control device

 In the present invention, the fluid control device mainly includes a base, a plurality of connecting blocks, and a plurality of fluid control members, and the connecting block is selected from at least the two 埠 joints, the third 埠 joint, and the fourth joint or more. Adjacent to each other. Next, the fluid control device of the present invention will be constructed by combining the joints with the apparatus through specific embodiments. It should be noted that the above-mentioned 2 埠 joint, 3 埠 joint, 4 埠 joint and the joint of the joint are not in a specific order, and those skilled in the art can select an appropriate combination according to actual needs.

For example, a filter is to be assembled in the present invention via the joints. \¥0 2019/112512 卩(:17802017/050596

In the case of the fluid control device, the filter may be connected to two identical or different types of 2 埠 joints, or the filter may be connected to a 2 璋 joint and a 3 埠 joint; in another embodiment, If a 2 埠 shut-off valve is to be assembled to the fluid control device of the present invention via the joints, one of the two joints may use the 2 埠 joint, the other may be a 2 埠 joint, 3 埠 joint, 4 The above joints, or the joints; in another embodiment, if a 3 埠 shut-off valve is to be assembled to the fluid control device of the present invention via the joints, one of the two joints may use the 3 埠 joint The other can be a 2 埠 connector, a 3 埠 connector, a 4 埠 connector or a connector. Or in an embodiment, the fourth aspect of the 2 埠 joint 1 (1 is suitable for use in the end of the plurality of joints, that is, the fourth aspect of the 2 埠 joint 1 (one side of 1 and the other The joint is connected, but the other side is not.

 Referring to FIG. 1 2 to FIG. 1 2 (:), an embodiment of a fluid control device according to the present invention, the fluid control device includes a base 20, a plurality of connecting blocks, and a plurality of fluid control members. The connecting block comprises a 2 埠 joint 1 (1, a 2 埠 joint 1 〇 and a joint 33 33), the fluid control member comprises an air inlet member 1 〇 3 , a manual valve 1 04 and a first 2 璋 cutoff a valve 1 0 5 , the connecting block is disposed on the base 20 , the connecting blocks are laterally assembled to each other, and the fluid control member is disposed on the connecting block, and further, the fluid control device further comprises a plurality of sealing plates 30. The sealing plate 30 is placed between the fluid control member and the connecting block. The sealing plate 30 has a plurality of fluid passage holes 3 1 , a plurality of positioning holes 32 , and a gasket disposed in the fluid passage hole 3 1 . 33.

The base 20 is made of metal and includes a plurality of positioning slots 21. Have \¥02019/112512 卩(:17802017/050596

和該 2 璋接頭 1（1 來說明 ， 該 2 埠接頭 1（： 的該第二單元 12 的該第二舌部 12（： 設置於 2 埠接頭 1（1 的該第二單元 12 的 該第二凹陷部 121），使將 2 埠接頭 1（1 的該第二單元 12 的該 第三側表面 125 抵頂於該 2 埠接頭 1〇 的該第二單元 12 的 該第一侧表面 123 。 該 2 璋接頭 1（1 的該第一定位銷孔 12113 、 該第二定位銷孔 12111） 、 該第一貫孔

For the assembly of the connection block, please refer to Figure 12 (:), and the 2 埠 connector

And the 2 璋 joint 1 (1), the 2 埠 joint 1 (: the second tongue 12 of the second unit 12:: the second unit 12 of the second unit 12 The second recessed portion 121) causes the third side surface 125 of the second unit 12 of the 2 埠 joint 1 (1) to abut the first side surface 123 of the second unit 12 of the 2 埠 joint 1 。. The 2 璋 joint 1 (the first locating pin hole 12113 of the 1 , the second locating pin hole 12111 ), the first through hole

11118 ' 該第二定位銷孔 11111）、 該第一下螺紋孔 11213、 該第二下 螺紋孔 11211） 、 該第 一螺栓孔 11148 以及該第二螺栓孔 111413。 Two through holes 12161), the fifth threaded holes 12136 and the sixth threaded holes 1213 [aligned with the 2 埠 joints respectively

11118' the second positioning pin hole 11111), the first lower threaded hole 11213, the second lower threaded hole 11211), the first bolt hole 11148 and the second bolt hole 111413.

2 埠接頭 1（1和 該基座 20 彼此固定 ； 兩第三固定件 40〇 分別貫穿該第一螺 栓孔 111

12136 之間 ， 以及該第二螺栓 孔 1114 和該第六螺紋孔 1213! 之間 ， 使該 2 埠接頭

該 2 埠接頭 1 彼此鎖固 。 四個第四固定件 40（1 穿過該手動 閥 104 的穿孔 、 該密封板 30 的該定位孔 32 而鎖固於該 2 \¥02019/112512 卩（：17802017/050596 The two first fixing members 4()3 respectively extend between the first positioning pin hole 12118 and the first positioning pin hole 11118, and between the second positioning pin hole 121113 and the second positioning pin hole 1111. And the 2 埠 joint 1 (1 and the 2 埠 joint 1 〇 are positioned relative to each other; the two second fixing members 401) are respectively disposed from the positioning groove 21 of the base 20, and are disposed through the first through hole 12163 and Between the first lower threaded holes 1121 & Between the second through holes 12161) and the second lower threaded holes 11211), the 2 埠 joint

2 埠 joint 1 (1 and the base 20 are fixed to each other; two third fixing members 40 贯穿 respectively penetrate the first bolt hole 111

Between 12136, and between the second bolt hole 1114 and the sixth threaded hole 1213!, the 2 埠 joint

The 2 埠 joints 1 are locked to each other. Four fourth fixing members 40 (1 pass through the perforations of the manual valve 104, the positioning holes 32 of the sealing plate 30, and are locked to the 2 \¥02019/112512 卩(:17802017/050596

The third threaded hole 1113'' of the first joint and the third threaded hole 1113 of the second joint 1 and the fourth threaded hole 1113 (1. In the present embodiment, The first fixing member 4 is a second fixing member 40 (the second fixing member 401), the third fixing member 40''. The fourth fixing member 40 (1 is a bolt. Further, the plurality of fifth fixing members 406 Locking through the through hole of the air inlet member 103 to the first threaded hole 111 of the 2 璋 joint 1

 The second threaded hole 11131).

 Referring to FIG. 13 again, a schematic diagram of a fluid control device according to an embodiment of the present invention.

 The fluid control device includes a base 20, a joint module 1, and a fluid control module 100. The fluid control module 100 includes a plurality of fluid control members, and the fluid control member to be disposed in the fluid control device in the embodiment, the direction in which the gas enters is in the direction in which the gas exits, in order: a member 103, a manual valve 104, a first 2 淳 shutoff valve 105, a first 3 埠 shutoff valve 1063, a high clean pressure regulating valve 107, a pressure sensor 108, a filter 109, and a second 2 埠 cutoff The valve 1051), a mass flow controller 110', a second 3 bank shutoff valve 10613, and a third 2 埠 shutoff valve 105A.

Referring to FIG. 13 , the joint module 1 includes a plurality of connecting blocks arranged along an axial direction. The connecting blocks each include an upper half II and a lower half [the upper half 11 includes at least a fluid inlet, at least one fluid outlet, and at least one connecting passage between the fluid inlet and the fluid outlet and extending in a horizontal direction (:, the lower half)

a tongue extending away from the recess and extending along the axial direction, in this embodiment, \¥0 2019/112512 卩(:17802017/050596

Is the connecting channel 0 higher than an upper surface of the tongue? And the connecting channel 0 and a bottom surface of the connecting block are at a height, and the adjacent connecting blocks are connected to each other through the tongue and received in the recess. The upper half 11 has a

 And the lower fixing hole corresponding to the upper fixing hole, the adjacent connecting block is fixed to the upper fixing hole and the lower fixing hole through at least one fixing member, for example, in FIG. 1 2 (: The third fixing member 40 (: respectively penetrates between the first bolt hole 1 1 1 43 and the fifth screw hole 1 2 1 36. In the embodiment, the fluid inlet, the fluid outlet, and the connecting channel 0 are Forming a II-shaped channel that is consistently disposed within a single connecting block.

Alternatively, the joint module 1 includes a plurality of connecting blocks arranged in an axial direction, the connecting blocks each including at least one fluid inlet, at least one fluid outlet, and at least one communicating with the fluid inlet and the fluid outlet. And a connecting passage extending in a horizontal direction and a height from a bottom surface of the connecting block, wherein one end of the connecting block forms a protruding first tongue portion, and the other end forms a recessed portion, and the connecting block is adjacent The first tongue is received in the recess through the first tongue, and in the embodiment, the protruding direction of the tongue is parallel to the axial direction. The first tongue has a longitudinally penetrating first fixing hole, the other end of the connecting block further forms a protruding second tongue, and the second tongue has a longitudinally penetrating second fixing hole adjacent to The connecting block is fixed to each other through a fixing member penetrating the first fixing hole and the second fixing hole. In the present embodiment, the fluid inlet, the fluid outlet, and the connecting passage 0 form a II-shaped passage that is consistently disposed in a single connecting block. The fluid control member is disposed on the base 20 and the joint module 1 \¥0 2019/112512 卩(:17802017/050596

Above, the fluid control member has an outlet 0 and an inlet I, the outlet 0 and the inlet I being respectively connected to the fluid inlet of the connection block and the fluid outlet of the adjacent connection block.

 Refer to Figure 1-8 to Figure 9 ? for structural features such as the fixing hole, the fixing member, the fluid inlet, the fluid outlet, the recess, and the tongue.

 The joint module 1 secures the fluid control member to the base 20, which includes a plurality of joints. The joint used in Figure 1 2, the direction in which the gas enters, the direction in which the gas leaves, in the order: the 2 埠 joint 1 (1, the 2 埠 joint 1 <3, the 4 埠 joint 38, The 2 埠 joint 1 , the 2 埠 joint 1 (1, the 2 埠 joint 1 (1, the 2 埠 joint 1 (1, the 2 埠 joint 1 8 , the 2 埠 joint 1 8 , the 4 埠 joint or more 3 And the above-mentioned joints 313 and above, in the present invention, the joints are superposed on each other through the first unit and the second unit of the adjacent joints, thereby achieving the purpose of simple assembly and disassembly. Flow between the joints and the fluid control member to reduce the risk of gas leakage.

 The present invention has been described in detail above, but the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the scope of the invention. That is, the equivalent changes and modifications made by the scope of the present application should remain within the scope of the patent of the present invention.

 [Simple description of the diagram] The specified representative diagram is: Figure 1 3 .

 『图1人』 is a perspective view of the first aspect of the 2 埠 joint of the present invention.

『图』 is the left side view of the first aspect of the 2 埠 joint of the present invention.

Figure 1 (:) is a bottom view of the first aspect of the 2 埠 joint of the present invention. \¥0 2019/112512 卩(:17802017/050596

Fig. 10 is a plan view showing a first aspect of the 2-inch joint of the present invention.

 "Fig. 1" is a 1^-13 cross-sectional view of "Figure 1 person".

 Fig. 2 is a perspective view showing a second aspect of the 2-inch joint of the present invention.

 Fig. 3 is a perspective view of a third aspect of the 2-inch joint of the present invention. Fig. 38 is a left side view showing the third aspect of the 2-inch joint of the present invention. Fig. 3 (:) is a bottom view of the third aspect of the joint of the present invention. Fig. 31 is a plan view showing a third aspect of the joint of the present invention. "Fig. 3" is the 0 (: cross-sectional view of "Figure 3 people".

 Fig. 4 is a perspective view showing a fourth aspect of the 2-inch joint of the present invention.

 『图五人』 is a perspective view of the first aspect of the 3-inch joint of the present invention. Fig. 56 is another perspective view of the first aspect of the 3-inch joint of the present invention.

Figure 5 (:), left side view of the first aspect of the 3 埠 joint of the present invention. Fig. 5 I is a bottom view of the first aspect of the 3 埠 joint of the present invention. Fig. 5å is a plan view showing the first aspect of the 3-inch joint of the present invention.

 Fig. 6 is a perspective view of a second aspect of the 3-inch joint of the present invention.

Fig. 7 is a perspective view of the first aspect of the joint of 4 埠 or more of the present invention.

Fig. 8 is a perspective view showing a second aspect of the joint of 4 or more in the present invention. \¥02019/112512 卩(:17802017/050596

Fig. 9 is a perspective view of a third aspect of the joint of 4 埠 or more of the present invention.

 Fig. 96 is a left side view showing the third aspect of the joint of 4 or more in the present invention.

 『Fig. 9(:』, a bottom view of the third aspect of the joint of 4 埠 or more of the present invention.

 Fig. 90 is a plan view showing a third aspect of the joint of 4 庳 or more of the present invention.

 『Fig. 9å』 is a sectional view of 11-11 of Figure 9 person.

 『Fig. 9F』 is a sectional view of I - 1 of "Figure 9 person".

 Figure 10 is a perspective view of the first aspect of the connector of the present invention.

 『Fig. 10(:』, for the figure of Fig. 10) (-]{Profile view.

 『图11人』 is a perspective view of the second aspect of the connector of the present invention.

『Fig. 11:8』 is a 1 _^ -: 1 section view of Figure 11 .

 Fig. 12 is a perspective view of a fluid control device according to an embodiment of the present invention.

 Fig. 126 is a perspective view showing another view of the fluid control device according to an embodiment of the present invention.

 Fig. 12 (:) is an exploded view of a fluid control device according to an embodiment of the present invention.

 Fig. 13 is a schematic view of a fluid control device according to another embodiment of the present invention.

Claims

\¥0 2019/112512 卩(:17802017/050596 [Scope of application]  1 . A joint for a fluid control device, comprising:  a first unit having an upper surface, a lower surface opposite the upper surface, a first fluid flow hole disposed on the upper surface, a second fluid flow hole disposed on the upper surface, and a communication body a fluid flow hole and the second fluid flow hole and penetrating through the first passage disposed in the first unit;  a second unit disposed under the first unit, including a positioning block partially protruding from one of the lower surfaces of the first unit and a first recess adjacent to the lower surface and the first recess of the positioning block unit. 2. The joint of claim 1, wherein the first passage has a mirrored surface.  3. The joint of claim 1, wherein the first unit has at least one upper fixing hole extending longitudinally through the upper surface and the lower surface, the second unit having at least one longitudinally extending through the second unit A lower fixing hole on the upper surface.  4. The joint of claim 1, further comprising an extension unit protruding outwardly from a side end of the first unit, the extension unit including a third fluid flow hole, and A second passage is disposed between the third fluid circulation hole and the second fluid circulation hole to communicate the second fluid circulation hole and the third fluid circulation hole.  5. A joint for a fluid control device, comprising: a first unit having an upper surface, a lower surface opposite the upper surface, a first fluid flow hole disposed on the upper surface, a second fluid flow hole disposed on the upper surface, and a second The upper surface \¥0 2019/112512 卩(:17802017/050596 a fourth fluid flow hole, a first passage is disposed between the first fluid flow hole and the fourth fluid flow hole to communicate the first fluid flow hole and the fourth fluid flow hole;  An extension unit protruding outwardly from a side end of the first unit, the extension unit includes a third fluid circulation hole, and a third fluid circulation hole and the second fluid circulation hole are disposed between the extension unit a second passage for communicating the second fluid flow hole and the third fluid flow hole; and a second unit disposed under the first unit, including a portion protruding from a portion of the lower surface of the first unit And a block and a first recess adjacent to the lower surface and the first recess of the positioning block. 6. The joint of claim 5, wherein the first passage and the second passage are independent of each other.  7. The joint of claim 5, wherein the first unit has at least one upper fixing hole extending longitudinally through the upper surface and the lower surface, the second unit having at least one longitudinally extending through the second unit A lower fixing hole on the upper surface.  8. A connector for a fluid control device, comprising: a first unit having an upper surface, a lower surface opposite the upper surface, a first fluid flow hole disposed on the upper surface, and a second fluid flow hole disposed on the upper surface, a fourth fluid circulation hole on the upper surface, a fifth fluid circulation hole disposed on the upper surface, and a sixth fluid circulation hole disposed on the upper surface, wherein the first fluid circulation hole and the fifth fluid circulation hole a first passage is disposed to communicate the first fluid circulation hole and the fifth fluid circulation hole, and a second space is disposed between the second fluid circulation hole and the sixth fluid circulation hole \¥0 2019/112512 卩(:17802017/050596 a passage for communicating the second fluid flow hole and the sixth fluid flow hole; an extension unit protruding outward from a side end of the first unit, the extension unit including a third fluid circulation hole, and a third passage is disposed between the third fluid circulation hole and the fourth fluid circulation hole to communicate the third fluid circulation hole and the fourth fluid circulation hole; and a second unit is disposed under the first unit And a positioning block protruding from one of the lower surfaces of the first unit and a first recess adjacent to the lower surface and the first recess of the positioning block. 9. The joint of claim 8, wherein the first passage, the second passage, and the third passage are independent of each other.  The joint of claim 8, wherein the first unit has at least one upper fixing hole extending longitudinally through the upper surface and the lower surface, the second unit having at least one longitudinally extending through the second unit a lower fixing hole on the upper surface.  1 1. A joint module for a fluid control device, comprising:  a plurality of connecting blocks, the connecting blocks being arranged in an axial direction, the connecting blocks each comprising an upper half and a lower half, the upper half comprising at least one fluid inlet, at least one fluid outlet, and at least one communicating with the fluid a connecting passage extending between the inlet and the fluid outlet and extending in a horizontal direction, the lower half having a recessed portion and a tongue extending away from the recessed portion and extending along the axial direction, wherein the connecting passage is higher than the An upper surface of the tongue;  The adjacent connecting blocks are connected to each other through the tongue and received in the recess. 1 2. The joint module described in claim 1 of the patent application, wherein, \¥0 2019/112512 卩(:17802017/050596 The upper half has a longitudinally extending upper fixing hole, and the lower half has a lower fixing hole extending longitudinally through the tongue and corresponding to the upper fixing hole, and the adjacent connecting block is penetrated through the at least one fixing member The upper fixing holes and the lower fixing holes are fixed to each other.  1 . The joint module of claim 1 , wherein the fluid inlet, the fluid outlet, and the connecting passage form an II-shaped passage that is consistently disposed in a single one of the connecting blocks.  1 4. A joint module for a fluid control device, comprising:  a plurality of connecting blocks, the connecting blocks are arranged along an axial direction, the connecting blocks each including at least one fluid inlet, at least one fluid outlet, and at least one communicating between the fluid inlet and the fluid outlet and extending in a horizontal direction One end of the connecting block is separated from the bottom by a height connecting passage, wherein one end of the connecting block forms a protruding first tongue portion, and the other end forms a recessed portion, and the adjacent connecting block passes through the first tongue portion They are disposed in the recess and are connected to each other.  1 . The joint module of claim 14 , wherein the first tongue has a longitudinally penetrating first fixing hole, and the other end of the connecting block further forms a protruding second tongue And the second tongue portion has a second fixing hole extending longitudinally, and the adjacent connecting block is fixed to the first fixing hole and the second fixing hole through a fixing member. 1 6. The joint module of claim 1, wherein the fluid inlet, the fluid outlet, and the connecting passage form an II-shaped passage that is consistently disposed in a single one of the connecting blocks.  1 7. A fluid control device comprising: a pedestal \¥0 2019/112512 卩(:17802017/050596 a joint module disposed on the base and comprising:  a first joint, including:  a first unit having a first upper surface, a first lower surface opposite the first upper surface, a first fluid flow hole disposed on the first upper surface, and a first upper surface disposed on the first upper surface a second fluid circulation hole and a first passage communicating with the first fluid circulation hole and the second fluid circulation hole and penetrating through the first unit;  a second unit disposed under the first unit, including a first positioning block partially protruding from one of the first lower surfaces of the first unit and another portion adjacent to the first lower surface a first recess of the first positioning block;  a second joint comprising:  a third unit having a second upper surface, a second lower surface opposite the second upper surface, a third fluid flow hole disposed on the second upper surface, and a second upper surface disposed on the second upper surface a fourth fluid circulation hole and a second passage communicating with the third fluid circulation hole and the fourth fluid circulation hole and penetrating through the third unit; a fourth unit disposed under the third unit, including a second positioning block partially protruding from one of the second lower surfaces of the third unit, and another portion adjacent to the second lower surface a second recessed portion of the second positioning block and a tongue extending away from the second recessed portion, wherein the first joint receives the tongue portion of the fourth unit by the first recessed portion of the second unit And the second joint abutting each other; and a fluid control member fastened to the base through the joint module' and the fluid control member is bridged between the first joint and the second joint \¥0 2019/112512 卩(:17802017/050596 Head.  The fluid control device of claim 17, wherein the fluid control member is selected from the group consisting of a pressure reducing valve, a pressure gauge, a mass flow controller, a filter, a manual valve, a 2 璋 shut-off valve, 3 Group of shut-off valves, high clean pressure regulators, pressure sensors and combinations thereof.  The fluid control device of claim 17, wherein the first unit has at least one upper fixing hole extending longitudinally through the upper surface and the lower surface, the fourth unit having at least one longitudinally extending through the a lower fixing hole of an upper surface of the second unit, the first joint and the second joint passing through the at least one fixing member and the upper fixing hole of the first unit and the lower fixing hole of the fourth unit And fixed to each other.  20. A fluid control device comprising:  a pedestal extending along an axis;  a fluid control member disposed above the base, the fluid control member having an outlet and an inlet;  A joint module disposed between the fluid control member and the base includes:  a plurality of connection blocks arranged along the axial direction, the connection blocks each comprising:  a fluid passage comprising a fluid inlet disposed on an upper surface of the connecting block and a fluid outlet, and an II-shaped connecting passage connecting the fluid inlet and the fluid outlet; An upper tongue portion is formed at one end of the connecting block, the upper tongue portion has a first fixing hole penetrating a bottom surface of the upper tongue portion; and a lower tongue portion is formed at the other end of the connecting block , the \¥0 2019/112512 卩(:17802017/050596 The lower tongue has a second fixing hole penetrating a top surface of the lower tongue; and  a fixing member penetrating the first fixing hole of the upper tongue portion of the connecting block and the second fixing hole of the lower tongue portion of the adjacent connecting block;  Wherein the fluid control member is connected to the two adjacent connecting blocks, and the outlet of the fluid control member is connected to the fluid inlet of one of the connecting blocks, the inlet of the fluid control member and the other connecting block Fluid outlet connection.  2 1 . A fluid control device comprising:  a pedestal extending along an axis;  a fluid control member disposed above the base, the fluid control member having an outlet and an inlet;  a joint module disposed between the fluid control member and the base, comprising:  a plurality of connecting blocks arranged along the axial direction, the connecting blocks each comprising:  a fluid passage comprising a first-class body inlet disposed on an upper surface of the connecting block and a fluid outlet, and an II-shaped connecting passage connecting the fluid inlet and the fluid outlet;  An upper tongue portion is formed at one end of the connecting block, the upper tongue portion having a first fixing hole penetrating a bottom surface of the upper tongue portion; a lower tongue protrudingly formed at the other end of the connecting block, the lower tongue having a second fixing hole penetrating a top surface of the lower tongue portion and a third fixing hole penetrating a bottom surface of the lower tongue portion ; as well as \¥0 2019/112512 卩(:17802017/050596 An upper fixing member is disposed through the first fixing hole of the upper tongue portion of the connecting block and the second fixing hole of the lower tongue portion of the connecting block; and  a fixing member, the third fixing hole disposed in the lower tongue of the connecting block and the base;  Wherein the fluid control member is connected to the two adjacent connecting blocks, and the outlet of the fluid control member is connected to the fluid inlet of one of the connecting blocks, the inlet of the fluid control member and the other connecting block Fluid outlet connection.