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WO2019111982A1 - Pompe - Google Patents

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Publication number
WO2019111982A1
WO2019111982A1 PCT/JP2018/044817 JP2018044817W WO2019111982A1 WO 2019111982 A1 WO2019111982 A1 WO 2019111982A1 JP 2018044817 W JP2018044817 W JP 2018044817W WO 2019111982 A1 WO2019111982 A1 WO 2019111982A1
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WO
WIPO (PCT)
Prior art keywords
vibrating portion
flat plate
pump
base member
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/044817
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English (en)
Japanese (ja)
Inventor
宏志 浅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2019111982A1 publication Critical patent/WO2019111982A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Definitions

  • the present invention relates to a pump that delivers a fluid using a pressure change caused by flexural vibration.
  • Patent Document 1 there is a pump having a structure shown in Patent Document 1.
  • the pump shown to patent document 1 is provided with the housing
  • the actuator is flat and is disposed in the inner space of the housing so as to face one wall of the housing.
  • the wall facing the actuator has a thin central portion and functions as a passive first vibrating portion.
  • An inlet is provided at the center of the passive first vibration unit.
  • the outer edge of the actuator has an opening, which is a discharge port.
  • the negative pressure in the pump chamber separates the distance between the actuator and the passive first vibrating portion in the central region of the pump chamber, and the distance between the actuator and the passive first vibrating portion in the outer edge approaches. In this state, inhalation is realized.
  • the pump of the present invention comprises a base member, a first vibrating portion, and a drive member.
  • the base member is formed with an inlet port connected to the front surface from the rear surface.
  • the first vibrating portion has a first main surface facing the surface of the base member, and the first main surface overlaps the suction port in plan view, and is disposed at a predetermined distance from the surface, is there.
  • the driving member includes a second vibrating portion connected to a second main surface not facing the base member in the first vibrating portion, and a driving body for driving the second vibrating portion.
  • the base member is provided with a passive vibration unit that is more flexible than the first vibration unit and that vibrates passively by the vibration of the second vibration unit in a region facing the first vibration unit.
  • the first vibration unit vibrates in the same direction and in the same phase as the vibration of the central region (the connection region with the first vibration unit) of the second vibration unit, and the passive vibration unit is relative to the second vibration unit. Vibrate with phase delay. Thereby, the antinode of the vibration of the first vibrating portion and the node of the vibration of the passive first vibrating portion overlap, and the fluid is transported from the center toward the outer edge.
  • the first vibrating portion have the same or substantially the same resonance frequency as the driving member.
  • the area of the first vibrating portion and the area of the passive vibrating portion be the same as viewed in the direction in which the first vibrating portion and the passive vibrating portion face each other.
  • the area of the pump chamber is larger than that of the conventional configuration.
  • the pump of this invention is provided with a base member, a 1st vibration part, and a drive member.
  • the base member is formed with an inlet port connected to the front surface from the rear surface.
  • the first vibrating portion has a first main surface facing the surface of the base member, and the first main surface overlaps the suction port in plan view, and is disposed at a predetermined distance from the surface, is there.
  • the driving member is connected to a second main surface which does not face the base member in the first vibrating portion.
  • the first vibrating portion is more flexible than the drive member in a first direction orthogonal to the surface.
  • the space between the first main surface of the first vibrating portion and the surface of the base member is a pump chamber. Then, the first flexible vibrating portion vibrates in the height direction of the pump chamber by the force from the driving member, whereby the fluid sucked into the pump chamber from the suction port is sequentially out of the first vibrating portion. It is transported to the edge side.
  • the drive member preferably includes a drive body and a second vibrating portion.
  • the behavior of the driving body is converted to the vibration in the height direction of the pump chamber by the second vibrating unit, and the first vibrating unit vibrates.
  • the first vibrating portion it is easy to cause the first vibrating portion to generate a vibration having a predetermined amplitude in the height direction of the pump chamber.
  • the thickness of the first vibrating portion is preferably smaller than the thickness of the second vibrating portion.
  • the above-described vibration of the first vibrating unit can be realized more reliably with a simple configuration.
  • the thickness of the outer edge portion of the first vibrating portion is preferably smaller than the thickness of the center of the first vibrating portion.
  • the first vibrating portion is provided with a recess at a position facing the suction port, which is recessed from the first main surface and overlaps the suction port in plan view.
  • the recess preferably has an opening area larger than that of the bottom.
  • the size of the bottleneck portion of the flow path is further enlarged, and the flow rate is increased.
  • the first main surface of the first vibrating portion be provided with a convex portion that overlaps the suction port in plan view.
  • the convex portion rectifies the fluid from the suction port through the pump chamber to the outer edge of the first vibrating portion. Thereby, the turbulent flow of the fluid in the vicinity of the suction port is suppressed.
  • the suction port has a tapered shape in which the area at the opening surface on the first main surface side is larger than the area at a predetermined distance from the opening surface on the first main surface side.
  • the tapered shape rectifies the fluid from the suction port to the pump chamber.
  • the turbulent flow of the fluid in the vicinity of the suction port is suppressed.
  • turbulence is further suppressed by the combination with the above-mentioned convex portion.
  • the drive member is disposed in parallel to the first vibrating portion, and the approximate center of the second vibrating portion is connected to the approximate center of the first vibrating portion.
  • connection member which connects a 1st vibration part and a drive member.
  • the first vibrating portion and the drive member can be separated by a desired distance. Moreover, the 1st vibration part and drive member which were each formed separately were connected physically.
  • connection member preferably overlaps the suction port in plan view.
  • the distance between the first vibrating portion and the driving member is preferably equal to or greater than the distance between the first vibrating portion and the base member.
  • the interference between the driving member and the first vibrating portion is less likely to occur, and the propagation efficiency of the vibration is improved.
  • the second vibrating portion is vibratably supported in the direction substantially orthogonal to the main surface of the second vibrating portion at the other end of the support member having one end supported by the wall. Is preferred.
  • the second vibrating portion is supported such that the vibration directions of the first vibrating portion and the second vibrating portion coincide with each other. This further improves the propagation efficiency of the vibration.
  • the first vibrating portion preferably contains a resin.
  • the weight of the first vibration unit can be reduced.
  • the first vibrating portion is a substantially regular polygon in a plan view.
  • the distance from the suction port to the outer edge is substantially the same in all directions.
  • the vibration is transmitted about the central axis substantially symmetrically, so that a uniform radial flow can be generated regardless of the orientation.
  • the first vibrating portion is preferably circular in plan view.
  • the drive body in the drive member is a piezoelectric element.
  • the drive member has a low profile. This can reduce the height of the pump.
  • the driving body applies a force to move the center of the first vibrating portion in the first direction orthogonal to the surface, and the distance from the base member is in the central region of the first vibrating portion. After increasing, by gradually approaching the base member, it is preferable to generate vibration in which the position where the distance between the first vibrating portion and the base member is the largest moves from the center of the first vibrating portion toward the outer edge.
  • the fluid is sucked between the first vibrating portion and the base member, that is, into the pump chamber, and the fluid is swept away by the first vibrating portion from the central region of the first vibrating portion toward the outer edge.
  • the propagation efficiency of the fluid in the pump chamber is improved.
  • the distance between the first main surface and the surface is an amplitude of vibration in which the position where the distance between the first vibrating portion and the base member is the largest moves from the center of the first vibrating portion toward the outer edge. It is preferable that it is substantially the same as
  • the first main surface on the outer edge side of the center of the first vibrating portion is in close proximity to or in contact with the base member at the time of suction in which the pressure in the pump chamber consisting of the space between the first vibrating portion and the base member decreases. Contact. This suppresses the inflow of fluid from the outer edge of the first vibrating portion to the pump chamber at the time of suction.
  • the distance between the second vibrating portion of the driving member and the first vibrating portion is such that the position where the distance between the first vibrating portion and the base member is the largest is from the center of the first vibrating portion toward the outer edge It is preferable that it is about twice or less of the amplitude of the vibration which moves.
  • the flow rate or pressure can be improved as compared with the conventional configuration.
  • FIG. 1 is a side cross-sectional view showing a configuration of a pump according to a first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view showing the configuration of the pump according to the first embodiment of the present invention.
  • the pump 10 includes a flat plate 21, a drive member 22, a connection member 30, a base member 51, a wall 52, a support member 201, and a wall 202.
  • the flat plate 21 has a first major surface 210 and a second major surface 220 opposed to each other.
  • the flat plate 21 is a disk having a predetermined thickness and diameter.
  • the flat plate 21 is made of a material having a predetermined rigidity, and preferably made of the same material as the flat plate 221 described later.
  • the thickness, diameter, and material of the flat plate 21 have the same phase in the same direction as the central region of the drive member 22, that is, the portion connected by the connection member 30 by application of a drive force from the drive member 22 described later. Is set to resonate. That is, the flat plate 21 is formed in a shape having a resonance frequency substantially the same as the resonance frequency of the drive member 22.
  • the resonance frequencies are substantially the same means that, for example, the resonance frequency difference is ⁇ 10% or less.
  • the flat plate 21 corresponds to the "first vibrating portion" in the present invention.
  • the driving member 22 includes a flat plate 221 and a piezoelectric element 222.
  • the flat plate 21 has two main surfaces facing each other.
  • the flat plate 221 is a disk having a predetermined thickness and diameter.
  • the flat plate 221 is made of a material having a predetermined rigidity.
  • the flat plate 221 is disposed on the second main surface 220 side of the flat plate 21 so as to be separated from the flat plate 21. At this time, the main surface of the flat plate 221 and the main surface of the flat plate 21 are parallel. Further, in plan view (viewed in the direction orthogonal to each main surface), the center of the flat plate 221 substantially coincides with the center PO of the flat plate 21.
  • the flat plate 221 corresponds to the "second vibrating portion" in the present invention.
  • the piezoelectric element 222 is disposed on the main surface of the flat plate 221 opposite to the flat plate 21.
  • the piezoelectric element 222 is a disk. At this time, in plan view, the center of the piezoelectric element 222 and the center of the flat plate 221 substantially coincide with each other.
  • the piezoelectric element 222 is composed of a cylindrical piezoelectric body and a pair of driving electrodes.
  • One of the pair of drive electrodes is disposed on one main surface of the piezoelectric body, and the other of the pair of drive electrodes is disposed on the other main surface of the piezoelectric body.
  • connection member 30 is made of, for example, a cylindrical, highly rigid material.
  • the connection member 30 connects a central region of a predetermined area including the center of the flat plate 221 and a central region of the predetermined area including the center PO of the flat plate 21.
  • the flat plate 21 and the flat plate 221 which are separately formed can be connected. That is, the flat plate 21 and the flat plate 221 can be formed with high-precision dimensions and connected to each other.
  • the connection member 30 can also be formed integrally with the flat plate 21 or the flat plate 221.
  • the base member 51 is made of a material having a predetermined rigidity.
  • the base member 51 is a flat plate having a front surface and a back surface.
  • the base member 51 includes a passive vibration unit 510 and a support unit 511.
  • the thickness of the passive vibration unit 510 is thinner than the thickness of the support unit 511.
  • the passive vibration portion 510 is circular in plan view, and the support portion 511 is disposed at the outer edge of the passive vibration portion 510 in plan view.
  • the passive vibration unit 510 and the support unit 511 are integrally formed.
  • the central predetermined area of the base member 51 is thin, the thin portion becomes the passive vibration portion 510, the portion on the outer edge side of the base member 51 is thick, and the thick portion is the support portion 511.
  • one main surface of the passive vibration unit 510 and one main surface of the support unit 511 are flush with each other, and this surface is the surface of the base member 51.
  • the passive vibration part 510 and the support part 511 are separately formed, and the base member 51 may be formed by combining these.
  • a suction port 101 is formed at the center of the base member 51, that is, at the passive vibration unit 510.
  • the suction port 101 is a through hole penetrating the passive vibration unit 510 from the front surface to the back surface.
  • the diameter (cross-sectional area) of the suction port 101 is appropriately set in accordance with the specification of the pump 10.
  • the base member 51 is disposed apart from the first major surface 210 of the flat plate 21. At this time, the surface of the base member 51 faces the first major surface 210 of the flat plate 21, and the surface of the base member 51 and the first major surface 210 of the flat plate 21 are parallel. Furthermore, the base member 51 is arranged such that the suction port 101 includes the center PO of the flat plate 21 in a plan view.
  • the passive vibration unit 510 overlaps the flat plate 21 in plan view.
  • the area of the passive vibration unit 510 is substantially the same as the area of the flat plate 21. That is, the area of the vibrating area of the passive vibration unit 510 and the area of the vibrating area of the flat plate 21 are substantially the same.
  • the flat plate 21 and the passive vibration unit 510 are opposed substantially over the entire surface.
  • the shape of the passive vibration unit 510 is not limited to the area of the region in which the flat plate 21 vibrates, and may be passive so that the resonant frequency of the passive vibration unit 510 approaches the resonant frequency of the flat plate 21.
  • the diameter, thickness, and material of the vibrating portion 510 may be set. Under the present circumstances, it is more preferable to design so that a diameter may also be made to correspond.
  • the distance between the first major surface 210 of the flat plate 21 and the surface of the base member 51 (the passive vibration portion 510) is set based on the maximum amplitude of the vibration of the flat plate 21 and the passive vibration portion 510.
  • the space between the flat plate 21 and the passive vibration unit 510 is a pump chamber 110.
  • the wall 52 is an annular member having an opening at a central portion of which at least the flat plate 21 can be accommodated.
  • the wall 52 is made of a material having high rigidity.
  • the total mass of the wall 52, the wall 202, and the support portion 511 may be equal to or greater than the mass of the drive member 22 and the flat plate 21.
  • the wall 52 is disposed on the surface side of the base member 51 so that the flat plate 21 is accommodated in the opening.
  • the back surface of the wall 52 abuts on and is joined to the surface of the support portion 511 in the base member 51.
  • the wall 202 is an annular member having an opening at a central portion of which at least the flat plate 221 can be accommodated.
  • the wall 202 is made of a material having high rigidity.
  • the back surface of the wall 202 abuts on and is joined to the surface of the wall 52.
  • the height of the wall 202 is substantially the same as that of the flat plate 221.
  • a flat plate 221 is disposed in the opening of the wall 202.
  • the wall 202 and the flat plate 221 are connected by the support member 201.
  • the support member 201 is connected to the outer edge OE 22 of the flat plate 221 and the inner wall surface of the wall 202.
  • the support member 201 has a shape having a predetermined elasticity, for example, a shape having a spring property.
  • the support member 201 is formed substantially uniformly over the entire circumference of the outer edge OE 22 of the flat plate 221. By this configuration, the flat plate 221 is supported by the outer edge OE 22 on the wall 202 as a free end.
  • the support member 201 is shaped to have an opening between one support member and the other support member. This opening becomes the discharge port 102.
  • the pump 10 realizes a housing having a hollow space surrounded by the base member 51, the wall 52, the wall 202, and the flat plate 221.
  • a flat plate 21 and a pump chamber 110 formed of an opposing region of the flat plate 21 and the passive vibration portion 510 of the base member 51 are disposed.
  • the hollow space communicates with the outside through the suction port 101 at the center of the plan view (center PO of the flat plate 221), and communicates with the outside through the discharge port 102 outside the flat plate 221 in plan view. ing.
  • the pump 10 operates as follows.
  • the flat plate 221 when a drive signal is applied to the piezoelectric element 222, the flat plate 221 generates bending vibration in which the flat plate is bent in the vertical direction in a side view as shown by the dotted line in FIG.
  • the central region of the flat plate 221 moves up and down (oscillates in the direction perpendicular to the main surface (the first direction of the present invention)).
  • the vibration of the central region of the flat plate 221 propagates to the central region including the center PO of the flat plate 21 through the connection member 30. Thereby, the central region of the flat plate 21 moves up and down.
  • the flat plate 21 vibrates at the same frequency, in the same direction, and in the same phase as the flat plate 221.
  • the passive vibration unit 510 vibrates with a temporal phase difference with respect to the vibration of the flat plate 21 and the flat plate 221 by the coupling of the pump chamber 110 via an air spring or the like.
  • FIG. 3 and FIG. 4 are diagrams showing the operating principle of the pump according to the first embodiment of the present invention.
  • the flat plate 21 has the same direction and the same phase as the vertical movement of the central portion of the flat plate 221.
  • the passive vibration unit 510 vibrates with a predetermined phase delay with respect to the vertical movement of the central portion of the flat plate 221.
  • the antinode of the vibration of the flat plate 21 and the node of the vibration of the passive vibration unit 510 are opposed to each other, and the position at which the distance between the flat plate 21 and the passive vibration unit 510 is most separated is a movement from the center PO toward the outer edge Behave like you do. That is, the highest position in the pump chamber 110 moves from the center PO toward the outer edge according to the vibration of the flat plate 21 and the passive vibration unit 510.
  • the low pressure region (negative pressure region) in the pump chamber 110 moves from the center PO toward the outer edge, and accordingly, the fluid FL is also sucked from the suction port 101 and moves from the center PO to the outer edge It is transported towards.
  • the fluid FL is drawn into the central region of the pump chamber 110 from the outside through the suction port 101, and the volume is gradually increased while the volume is gradually increased.
  • ST5, ST6, ST7 and ST8 of FIG. 4 the fluid FL is further transported from the central region toward the outer edge in the pump chamber 110, discharged outward from the outer edge, and discharged from the discharge port 102 to the outside. Ru.
  • the fluid FL can be transported in one direction.
  • the outer edge OE21 of the flat plate 21 is a free end. Therefore, the planar area and volume of the pump chamber 110 can be larger than in the conventional configuration, and the flow rate and pressure can be improved.
  • the area of the passive vibration unit 510 can be made substantially the same as the area of the flat plate 21. Thereby, the area of the pump chamber 110 and hence the volume can be made larger than in the conventional configuration. Therefore, the pump 10 can secure a higher flow rate than the conventional configuration.
  • the pump 10 can enlarge the diameter of the suction port 101 provided in the center of the passive vibration part 510 by this structure. Thereby, the restriction of the flow rate of fluid by the suction port 101 is alleviated, and the flow rate is improved.
  • the flat plate 21 is supported only by the connection member 30 connected to the drive member 22. Therefore, it is possible to prevent the vibration energy from leaking from the flat plate 21 to the housing as in the conventional configuration supported by the housing. Thereby, the energy efficiency of the pump 10 is improved. Further, in the configuration in which the flat plate (first vibration unit) is supported on the housing, occurrence of unnecessary resonance, variation in characteristics, deterioration in temperature characteristics, and variation in characteristics due to the fixing method occur. Does not occur. Thus, the pump performance of the pump 10 is improved.
  • the drive member 22 is a laminate of the flat plate 221 and the piezoelectric element 222, the height of the drive member 22 can be reduced. Thereby, the height of the pump 10 can be reduced, and the small pump 10 can be realized.
  • the flat plate 21 and the passive vibration unit 510 are not limited to a circular shape, but may be a substantially circular shape or a substantially regular polygon shape including a regular polygon shape.
  • the vibrations in the flat plate 21 and the passive vibration unit 510 are transmitted symmetrically about the central axis, so that uniform fluid flow in the radial direction can be realized. That is, the difference in fluid flow depending on the orientation is suppressed.
  • the flat plate 21 and the passive vibration unit 510 are circular, it is possible to most effectively generate a uniform radial flow (direction from the center toward the outer periphery). That is, the difference in fluid flow depending on the orientation is most effectively suppressed.
  • the flat plate 221 is not limited to a circular shape, and may be a substantially circular shape or a regular polygon as a substantially regular polygon. Thereby, stable vertical movement of the center position can be realized.
  • the flat plate 221, the support member 201, and the wall 202 are integrally formed.
  • an opening is provided in one flat plate member by laser processing or the like so as to form the support member 201. Therefore, the flat plate 221, the support member 201, and the wall 202 are easily integrally formed.
  • the flat plate 221 can be easily arrange
  • the flat plate 21 may vibrate in the same direction and in the same phase as the central region of the flat plate 221, and the stiffness of the flat plate 21 may not completely match the stiffness of the flat plate 221.
  • the passive vibration unit 510 may be more flexible than the flat plate 221 and the flat plate 21, and the position of the antinode of the vibration of the flat plate 21 and the position of the node of the passive vibration unit 510 in the direction from the center to the outer edge Also, the position of the node of the vibration of the flat plate 21 and the position of the antinode of the passive vibration unit 510 may be substantially the same.
  • FIG. 5 is a side sectional view showing the structure of a pump according to a second embodiment of the present invention.
  • FIG. 6 is an exploded perspective view showing a configuration of a pump according to a second embodiment of the present invention.
  • the pump 10A includes a flat plate 21A, a drive member 22, a connection member 30, a base member 51A, a wall 52, a support member 201, and a wall 202.
  • the flat plate 21A has a first main surface 210 and a second main surface 220 facing each other.
  • the flat plate 21A is a disk having a predetermined thickness and diameter.
  • the flat plate 21A is made of a flexible material.
  • the flat plate 21A is made of, for example, a material containing a resin. By using a material containing a resin, flexibility can be easily realized.
  • a resin an aramid resin, PPS, etc. can be applied and it is preferable that it is resin with a small loss coefficient. A small loss factor is consistent with the fact that vibrations are difficult to convert into heat.
  • displacement / force 1 / spring constant is used. Furthermore, specifically, it can measure by supporting the center part of flat plate 21A and pushing (or pulling) the outer edge. In addition, the flexibility of the other flat plate (for example, flat plate 221 grade
  • the flexibility of the flat plate 21A that is, the thickness, the diameter, and the material are applied in a direction perpendicular to the first main surface 210 and the second main surface 220 of the flat plate 21A by applying a driving force from a drive member 22 described later.
  • the generated vibration is set so that the flat plate 21A becomes a bending vibration (propagation of a progressive wave along the radial direction) having a spatial phase delay from the center PO toward the outer edge (along the radial direction) It is done.
  • this bending vibration having a phase delay in space, after the distance to the base member 51A increases in the central region of the flat plate 21A, the flat plate 21A and the base member are gradually approached by gradually approaching the base member 51A.
  • the position where the distance to 51A is the largest is the vibration moving from the center of the flat plate 21A toward the outer edge. At this time, the distance and the opposing area between the flat plate 21A and the base member 51A are also taken into consideration.
  • the flat plate 21A corresponds to the "first vibrating portion" in the present invention.
  • the driving member 22 includes a flat plate 221 and a piezoelectric element 222.
  • the flat plate 221 has two main surfaces facing each other.
  • the flat plate 221 is a disk having a predetermined thickness and diameter.
  • the flat plate 221 is made of a material having high rigidity.
  • the flat plate 221 is disposed apart from the flat plate 21A on the second major surface 220 side of the flat plate 21A. At this time, the main surface of the flat plate 221 and the main surface of the flat plate 21A are parallel. Further, in plan view (as viewed from the direction orthogonal to each main surface), the center of the flat plate 221 substantially coincides with the center PO of the flat plate 21A.
  • the flat plate 221 corresponds to the "second vibrating portion" in the present invention.
  • the piezoelectric element 222 is disposed on the main surface of the flat plate 221 opposite to the flat plate 21A.
  • the piezoelectric element 222 is a disk. At this time, in plan view, the center of the piezoelectric element 222 and the center of the flat plate 221 substantially coincide with each other.
  • the piezoelectric element 222 is composed of a cylindrical piezoelectric body and a pair of driving electrodes.
  • One of the pair of drive electrodes is disposed on one main surface of the piezoelectric body, and the other of the pair of drive electrodes is disposed on the other main surface of the piezoelectric body.
  • connection member 30 is made of, for example, a cylindrical, highly rigid material.
  • the connecting member 30 connects a central region of a predetermined area including the center of the flat plate 221 and a central region of a predetermined area including the center PO of the flat plate 21A.
  • the base member 51A is made of a material having high rigidity.
  • the base member 51A is a flat plate having a front surface and a back surface. Unlike the base member 51, the base member 51A has a constant thickness. Therefore, the base member 51A is hardly affected by the vibration of the flat plate 221 of the drive member 22, and hardly vibrates.
  • a suction port 101 is formed at the center of the base member 51A.
  • the suction port 101 is a through hole penetrating the base member 51A from the front surface to the back surface.
  • the diameter (cross-sectional area) of the suction port 101 is appropriately set according to the specification of the pump 10A.
  • the base member 51A is disposed apart from the first major surface 210 of the flat plate 21A. At this time, the surface of the base member 51A faces the first major surface 210 of the flat plate 21A, and the surface of the base member 51A and the first major surface 210 of the flat plate 21A are parallel. Furthermore, the base member 51A is arranged such that the suction port 101 includes the center PO of the flat plate 21A in a plan view. It is preferable that the distance between the first major surface 210 of the flat plate 21A and the surface of the base member 51A be substantially equal to the maximum amplitude of bending vibration of the flat plate 21A.
  • a space between the flat plate 21A and the base member 51A is a pressure generating portion, that is, a pump chamber 110A.
  • the wall 52 is an annular member having an opening of a size that can accommodate at least the flat plate 21A in the central portion.
  • the wall 52 is made of a material having high rigidity.
  • the wall 52 is disposed on the surface side of the base member 51A so that the flat plate 21A is accommodated in the opening.
  • the back surface of the wall 52 abuts on and is joined to the surface of the base member 51A.
  • the wall 202 is an annular member having an opening at a central portion of which at least the flat plate 221 can be accommodated.
  • the wall 202 is made of a material having high rigidity.
  • the back surface of the wall 202 abuts on and is joined to the surface of the wall 52.
  • the height of the wall 202 is substantially the same as that of the flat plate 221.
  • a flat plate 221 is disposed in the opening of the wall 202.
  • the wall 202 and the flat plate 221 are connected by the support member 201.
  • the support member 201 is connected to the outer edge OE 22 of the flat plate 221 and the inner wall surface of the wall 202.
  • the support member 201 has a shape having a predetermined elasticity, for example, a shape having a spring property.
  • the support member 201 is formed substantially uniformly over the entire circumference of the outer edge OE 22 of the flat plate 221. By this configuration, the flat plate 221 is supported by the outer edge OE 22 on the wall 202 as a free end.
  • the support member 201 is shaped to have an opening between one support member and the other support member. This opening becomes the discharge port 102.
  • the pump 10A realizes a housing having a hollow space surrounded by the base member 51A, the wall 52, the wall 202, and the flat plate 221.
  • a flat plate 21A and a pump chamber 110A formed of an opposing region of the flat plate 21A and the base member 51A are disposed.
  • the hollow space communicates with the outside through the suction port 101 at the center of the plan view (center PO of the flat plate 221), and communicates with the outside through the discharge port 102 outside the flat plate 221 in plan view. ing.
  • the pump 10A operates as follows.
  • the flat plate 221 when a drive signal is applied to the piezoelectric element 222, the flat plate 221 generates bending vibration in which the flat plate is bent in the vertical direction in a side view as shown by the dotted line in FIG.
  • the central region of the flat plate 221 moves up and down (oscillates in the direction perpendicular to the main surface (the first direction of the present invention)).
  • the vibration of the central region of the flat plate 221 propagates through the connecting member 30 to the central region including the center PO of the flat plate 21A. Thereby, the central region of the flat plate 21A moves up and down.
  • FIGS. 7 and 8 are diagrams showing the operating principle of a pump according to a second embodiment of the present invention.
  • the flat plate 21A is the most base member according to the vertical movement of the center of the flat plate 221.
  • the position away from 51A behaves to move from the center PO toward the outer edge OE21. That is, the highest position in the pump chamber 110A moves from the center PO toward the outer edge OE21 according to the vertical movement of the center of the flat plate 221.
  • the region where the pressure in the pump chamber 110A is low moves from the center PO toward the outer edge OE21, and accordingly, the fluid FL is also sucked from the suction port 101, and from the center PO It is transported toward the outer edge OE21.
  • the distance between the center of the flat plate 221 and the base member 51A is sequentially increased by the bending vibration of the flat plate 221.
  • the distance between the central region including the center PO of the flat plate 21A connected to the flat plate 221 and the distance to the base member 51A increase.
  • the height of the central region including the suction port 101 of the pump chamber 110A is increased, and the negative pressure is increased. Therefore, in these states (ST1, ST2, ST3, ST4), the fluid FL is drawn from the outside into the central region of the pump chamber 110A via the suction port 101, and its volume gradually increases.
  • the center of the flat plate 221 gradually approaches the base member 51A from the position where the distance from the base member 51A is the longest. According to this operation, the central region including the center PO of the flat plate 21A also approaches the base member 51A.
  • a position where the distance between the flat plate 21A and the base member 51A is the greatest distance (a position where the height of the pump chamber 110A is the highest) by causing the flat plate 21A to vibrate with a spatial phase delay. Moves from the center PO toward the outer edge OE21. Therefore, in these states (ST5, ST6, ST7, ST8), the fluid FL is transported from the central region of the pump chamber 110A toward the outer edge in the pump chamber 110A. Then, as shown in ST8 of FIG. 8 to ST1 of FIG. 7, the fluid FL is discharged outward from the outer edge of the pump chamber 110A, and is discharged from the discharge port 102 to the outside.
  • the fluid FL can be transported in one direction by using the configuration of the pump 10A.
  • the outer edge OE21 of the flat plate 21A is a free end. Therefore, the planar area and volume of the pump chamber 110A are larger than those of the conventional configuration, and the flow rate and pressure can be improved.
  • the portion on the outer edge OE21 side of the flat plate 21A with respect to the center PO approaches the base member 51A at the time of suction. Thereby, backflow from the outer edge OE21 side at the time of inhalation can be suppressed.
  • the portion on the outer edge OE21 side of the center PO of the flat plate 21A can be brought into contact with the base member 51A at the time of inhalation. it can. Thereby, the backflow from the outer edge OE21 at the time of inhalation can be further suppressed.
  • the pump 10A can improve the flow rate.
  • the distance between the flat plate 21A and the flat plate 221 is preferably approximately twice or less the amplitude of the vibration of the flat plate 21A.
  • the flat plate 21A is supported only by the connection member 30 connected to the drive member 22. Therefore, in order to obtain the same displacement of the first vibrating portion in the conventional configuration in which the first vibrating portion is instructed by the housing, the displacement amount of the outer edge OE22 of the first vibrating portion may be smaller than that of the conventional configuration. Therefore, it can suppress that vibration energy leaks from the flat plate 21A to a housing
  • the drive member 22 is a laminate of the flat plate 221 and the piezoelectric element 222, the height of the drive member 22 can be reduced. As a result, the height of the pump 10A can be reduced, and the small pump 10A can be realized.
  • the flat plate 21A is not limited to a circular shape, and may be a substantially circular shape or a substantially regular polygon shape including a regular polygon shape.
  • the vibrations in the flat plate 21A are transmitted on the central axis in a symmetrical manner, so that uniform fluid flow in the radial direction can be realized. That is, the difference in fluid flow depending on the orientation is suppressed.
  • the flat plate 21A is circular, it is possible to most effectively generate a uniform flow of fluid in the radial direction (the direction from the center toward the outer periphery). That is, the difference in fluid flow depending on the orientation is most effectively suppressed.
  • the thickness of the flat plate 21A is preferably smaller than the thickness of the flat plate 221. Thereby, the flexibility having the above-mentioned properties of the flat plate 21A can be easily realized.
  • the flat plate 221 is not limited to a circular shape, and may be a substantially circular shape or a regular polygon as a substantially regular polygon. Thereby, stable vertical movement of the center position can be realized.
  • the flat plate 221, the support member 201, and the wall 202 are integrally formed.
  • an opening is provided in one flat plate member by laser processing or the like so as to form the support member 201. Therefore, the flat plate 221, the support member 201, and the wall 202 are easily integrally formed.
  • the flat plate 221 can be easily arrange
  • the bonding area between the connecting member 30 and the flat plate 21A is preferably as small as possible based on the bonding strength against vibration, etc., but the area where the flat plate 21A can realize the bending vibration having the above-mentioned spatial phase delay. If it is
  • FIG. 9 is a partial side cross-sectional view showing the structure of a pump according to a third embodiment of the present invention.
  • the pump 10B according to the third embodiment differs from the pump 10A according to the second embodiment in the shape of the flat plate 21B.
  • the other configuration of the pump 10B is the same as that of the pump 10A, and the description of the same parts will be omitted.
  • the base member 51B has the same configuration as the base member 51A.
  • the thickness at the outer edge OE21 is smaller than the thickness at the center PO. At this time, the thickness of the flat plate 21B gradually decreases from the center PO toward the outer edge OE21. That is, the flat plate 21B has a tapered shape that narrows from the center PO toward the outer edge OE21.
  • the vibration having the above-described spatial phase delay can be realized more reliably and easily.
  • the first main surface 210 of the flat plate 21B is flat.
  • the height of the pump chamber 110B becomes constant from the center PO to the outer edge OE21. That is, the height of the pump chamber 110B can be prevented from gradually increasing from the center to the outer edge. As a result, it is possible to suppress the decrease in pump performance while reliably and easily realizing the above-described vibration having the spatial phase delay by the flat plate 21B.
  • FIG. 10 is a partial side cross-sectional view showing the configuration of a pump according to a fourth embodiment of the present invention.
  • the pump 10C according to the fourth embodiment is different from the pump 10A according to the second embodiment in that a recess 60 is provided.
  • the other configuration of the pump 10C is the same as that of the pump 10A, and the description of the same parts will be omitted.
  • the base member 51C is the same as the base member 51A.
  • the recess 60 is a cylindrical or regular polygonal tubular shape which is recessed from the first major surface 210 of the flat plate 21C.
  • the opening area of the recess 60 is larger than the opening area of the suction port 101 on the side of the pump chamber 110C.
  • the recess 60 overlaps the suction port 101 in plan view of the pump 10C.
  • the center of the recess 60 is preferably coincident with the center PO of the flat plate 21C and the center of the suction port 101.
  • the inlet radius is expanded from the inner diameter of the suction port 101 to the inner diameter of the recess 60 out of 2 ⁇ ⁇ (inlet radius) ⁇ (height of the pump chamber) which is the smallest channel cross-sectional area of the pump chamber 110C. can do. Therefore, the flow rate can be increased, and the pump performance is improved.
  • the depth of the recess 60 is equal to the sum of the thickness of the flat plate 21C and the thickness of the connecting member 30, but (1) the depth to the middle position in the thickness direction of the flat plate 21C, (2 It is also possible to select a depth which corresponds to the thickness of the flat plate 21C, (3) a depth obtained by adding the thickness of the flat plate 21C and the position to an intermediate position of the connecting member 30, or the like. This depth may be appropriately set in consideration of the above-described effect of increasing the flow rate and the like.
  • FIG. 11 is a partial side cross-sectional view showing the configuration of a pump according to a fifth embodiment of the present invention.
  • the pump 10D according to the fifth embodiment differs from the pump 10C according to the fourth embodiment in that the connecting member 30 is omitted.
  • the other configuration of the pump 10D is the same as that of the pump 10C, and the description of the same portions will be omitted.
  • the base member 51D is the same as the base member 51C.
  • the flat plate 23 has a recess 230.
  • the recess 230 has a shape that is recessed from the first main surface 231 facing the base member 51D toward the second main surface 232 opposite to the first main surface 231.
  • the opening area of the recess 230 is larger than the opening area of the suction port 101 on the side of the pump chamber 110D.
  • the recess 230 overlaps the suction port 101 in plan view of the pump 10D.
  • the center of the recess 230 preferably coincides with the center PO of the flat plate 23 and the center of the suction port 101.
  • connection member 30 can be omitted, and the configuration of the pump 10D can be simplified.
  • a recessed part 230 can be implement
  • the recess 230 is tapered such that the opening area is larger than the bottom area.
  • FIG. 12 is a partial side cross-sectional view showing a configuration of a pump according to a sixth embodiment of the present invention.
  • a pump 10E according to the sixth embodiment is different from the pump 10A according to the second embodiment in that a projection 24 is provided on a flat plate 21E and a tapered opening 120 is provided in the suction port 101.
  • the other configuration of the pump 10E is the same as that of the pump 10A, and the description of the same parts will be omitted.
  • the base member 51E has the same configuration as the base member 51A.
  • the pump 10 ⁇ / b> E is provided with a protrusion 24.
  • the protrusions 24 are disposed on the first major surface 210 of the flat plate 21E.
  • the protrusion 24 has a hemispherical shape as shown in FIG. 12, and the side with the larger area is in contact with the first major surface 210.
  • the protrusions 24 are made of a material having high rigidity. The protrusion 24 overlaps the suction port 101 in plan view.
  • the opening on the side of the pump chamber 110E in the suction port 101 that is, on the side of the flat plate 21E is a tapered opening 120, and the cross-sectional area gradually increases from the back side to the opening side. .
  • the fluid entering the pump chamber 110E through the suction port 101 is smoothly transmitted into the pump chamber 110E by the tapered opening 120 and the projection 24.
  • the turbulent flow at the time of inhalation can be suppressed, and energy loss can be suppressed.
  • At least one of the projection 24 and the tapered opening 120 may be provided. However, by providing the projection 24 and the tapered opening 120, the effect of suppressing turbulent flow is improved, and energy loss can be suppressed more effectively.
  • FIG. 13 is a partial side cross-sectional view showing a configuration of a pump according to a seventh embodiment of the present invention.
  • the pump 10F according to the seventh embodiment is different from the pump 10A according to the second embodiment in that a driving member 22F is provided.
  • the other configuration of the pump 10F is the same as that of the pump 10A, and the description of the same portions will be omitted.
  • the drive member 22F is a voice coil motor (VCM).
  • VCM voice coil motor
  • the voice coil motor is used as the drive member 22F.
  • vertical vibration with a predetermined resonance frequency is added to the central region including the center PO of the flat plate 21F that is the first vibration unit.
  • Other drive members can be substituted.
  • each embodiment can also be partially combined suitably. And the effect according to a combination can be acquired by these combination.
  • the pump which concerns on each above-mentioned embodiment is applicable to a sphygmomanometer, a breast pump, a negative pressure closing therapy apparatus etc., for example.
  • the device performance of a sphygmomanometer, a breast pump, a negative pressure closing therapy apparatus etc. improves by using the pump which concerns on the above-mentioned each embodiment.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

La présente invention concerne une pompe (10) qui est pourvue d'une plaque plate (21), d'un élément d'entraînement (22) et d'un élément de base (51). L'élément de base (51) posède un orifice d'aspiration (101) qui est relié de sa surface arrière à sa surface avant. La plaque plate (21), dont la forme est plane, possède une première surface primaire (210) qui chevauche l'orifice d'aspiration (101) dans une vue en plan et qui est agencée dans une position espacée d'une distance prédéterminée de la surface avant. L'élément d'entraînement (22) comprend une plaque plate (221) reliée à la plaque plate (21) du côté opposé à l'élément de base (51), et un élément piézoélectrique (222) constituant un corps d'entraînement afin d'entraîner la plaque plate (221). Dans une région faisant face à la plaque plate (21), l'élément de base (51) est pourvu d'une section à vibration passive (510) ayant une flexibilité supérieure par rapport à la plaque plate (21) et pouvant vibrer passivement au moyen de la vibration de la plaque plate (221).
PCT/JP2018/044817 2017-12-08 2018-12-06 Pompe Ceased WO2019111982A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2017-235658 2017-12-08
JP2017235658 2017-12-08
JP2018063500 2018-03-29
JP2018-063500 2018-03-29

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WO2019111982A1 true WO2019111982A1 (fr) 2019-06-13

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022165200A1 (fr) * 2021-01-28 2022-08-04 Lansinoh Laboratories, Inc. Moteur d'aspiration à bobine mobile avec vibration et/ou libération

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009148005A1 (fr) * 2008-06-05 2009-12-10 株式会社村田製作所 Microsoufflante piézoélectrique
JP2015092082A (ja) * 2011-04-11 2015-05-14 株式会社村田製作所 流体制御装置およびポンプ接続方法
WO2015133283A1 (fr) * 2014-03-07 2015-09-11 株式会社村田製作所 Soufflante

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009148005A1 (fr) * 2008-06-05 2009-12-10 株式会社村田製作所 Microsoufflante piézoélectrique
JP2015092082A (ja) * 2011-04-11 2015-05-14 株式会社村田製作所 流体制御装置およびポンプ接続方法
WO2015133283A1 (fr) * 2014-03-07 2015-09-11 株式会社村田製作所 Soufflante

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022165200A1 (fr) * 2021-01-28 2022-08-04 Lansinoh Laboratories, Inc. Moteur d'aspiration à bobine mobile avec vibration et/ou libération

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