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WO2019106992A1 - Dispositif et procédé d'inspection et dispositif de fabrication - Google Patents

Dispositif et procédé d'inspection et dispositif de fabrication Download PDF

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Publication number
WO2019106992A1
WO2019106992A1 PCT/JP2018/038544 JP2018038544W WO2019106992A1 WO 2019106992 A1 WO2019106992 A1 WO 2019106992A1 JP 2018038544 W JP2018038544 W JP 2018038544W WO 2019106992 A1 WO2019106992 A1 WO 2019106992A1
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WO
WIPO (PCT)
Prior art keywords
light
inspection
inspection apparatus
transmitted
detection unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/038544
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English (en)
Japanese (ja)
Inventor
京子 松田
裕介 榊原
真 和泉
綿野　哲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
PS&T Co Ltd
Original Assignee
Sharp Corp
PS&T Co Ltd
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Filing date
Publication date
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Publication of WO2019106992A1 publication Critical patent/WO2019106992A1/fr
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids

Definitions

  • the present disclosure relates to an inspection apparatus that performs inspection nondestructively by irradiating light.
  • Patent Document 1 discloses an example of such an inspection apparatus.
  • the object is inspected by relatively displacing the inspection object and the spot of the inspection light.
  • FIG. 12 is a diagram conceptually showing an example of variation in light intensity depending on the emission direction of light emitted from the light source.
  • a light source in particular, an LED (light emitting diode)
  • the intensity of light emitted from a light source is not uniform. Therefore, unevenness of light intensity occurs in the spot of the inspection light. The influence of such unevenness may lower the inspection accuracy. So, in the invention of patent document 1, the said nonuniformity is reduced by averaging the light of a LED light source through a diffusion plate and a fiber.
  • An object of the present disclosure is to realize an inspection apparatus capable of reducing the influence of the unevenness without using an optical system for reducing the unevenness of the light intensity of the inspection light.
  • an inspection device concerning one mode of this indication is a light source which irradiates inspection light to each of a plurality of objects, and a relative of the irradiation range of the object and the inspection light and the inspection light
  • the inspection light is continuously or intermittently applied to the object so as to generate a state included in the above, and the transmitted light is detected by the detection unit while changing the relative positional relationship.
  • An inspection method is a method for inspecting an object, comprising: irradiating each of a plurality of the objects with an inspection light; and irradiating the object and the inspection light
  • the effect of the unevenness can be reduced without using an optical system for reducing the unevenness of the light intensity of the inspection light.
  • (A) is a figure showing the composition of the inspection device concerning Embodiment 1 of this indication.
  • (B) is a figure which shows a part of structure of a test
  • (A) is a figure which shows the relationship between the measurement conditions of a target object, and a correct answer rate.
  • (B) is a figure which shows the result of having performed the measurement of the object on another conditions.
  • FIG. 1 is a figure which shows the structure of the test
  • the object 1 is an object to be inspected by the inspection apparatus 100, and is, for example, a tablet.
  • the shape of the object 1 is not limited to a cylindrical shape, and may be any shape.
  • the object 1 may be one obtained by solidifying the powder.
  • the subject 1 may be a drug or a food.
  • the object 1 may have some contents inside a capsule.
  • the capsule here may be a soft capsule. That is, the subject 1 may be any one selected from the group consisting of medicines, medicines, health care intakes, nutrients, granules, powders, films and capsules.
  • Organic substances such as hair and insects are assumed to be detected as foreign substances by inspection.
  • a piece of resin, metal or the like may be included in the substance to be detected as a foreign matter.
  • the light source 2 is a light source that irradiates the inspection light 3 continuously or intermittently to each of the plurality of objects 1 and may include, for example, a halogen lamp.
  • the inspection light 3 is irradiated such that a state in which the whole of the object 1 is included in the spot 4 (irradiation range) of the inspection light 3 occurs at least temporarily during the inspection of the object 1.
  • the shape of the spot 4 is circular in FIG. 1, it does not limit to a circle.
  • the inspection light 3 is irradiated to the object 1 from the exit of the inspection light 3 without passing through the light diffusing member or the like.
  • unevenness of light may be reduced by using a light diffusion member or the like, but the following problems occur when detecting the transmitted light of the inspection light 3 as in the present embodiment.
  • These members greatly lose the inspection light 3 in the process of diffusing the light. Then, since the irradiation power of the light to the object 1 decreases, the power of the light transmitted through the object 1 also decreases, which makes detection difficult. In particular, when the light is strongly scattered inside the object 1 and the transmitted light becomes weak, the problem becomes more serious. For example, tablets formed into powder may be mentioned.
  • the inspection light 3 since the inspection light 3 is irradiated to the object 1 from the exit of the inspection light 3 without passing through the light diffusing member or the like, the inspection light 3 can be effectively used.
  • the spot 4 of the inspection light 3 includes unevenness of light intensity because the inspection light 3 is irradiated to the object 1 from the exit of the inspection light 3 without passing through the light diffusion member or the like. As described later, the relative positional relationship between the object 1 and the spot 4 is changed under specific conditions to suppress the decrease in inspection accuracy due to the influence of unevenness.
  • any optical member having a small light loss may be used.
  • the light from the light source 2 may be guided to the object 1 by an optical fiber, or the light from the light source 2 may be condensed onto the object 1 by a lens.
  • an optical member for light collection and light guiding has less light loss than a light diffusing member.
  • FIG. 1B is a view showing a part of the configuration of the inspection apparatus 100 provided with the condensing lens group 61. As shown in FIG. In the example shown in (b) of FIG. 1, the inspection light 3 from the light source 2 is subjected to light distribution control by the condenser lens group 61 and is irradiated onto the object 1.
  • the number of lenses constituting the condensing lens group 61 used be three or less. If the number of lenses used for focusing is three, the spot diameter can be adjusted optimally, but if four or more lenses are used, the light loss will be large, which will lower the efficiency of inspection. Moreover, if it is up to three, it can be provided as an integrated compact condensing lens, and the problem that an optical system becomes complicated does not arise.
  • the peak wavelength of the inspection light 3 may be, for example, 600 nm or more and 2500 nm or less.
  • the peak wavelength of the inspection light 3 is not limited to this range, but in this wavelength range, it easily penetrates the object 1 and does not damage the object 1 as when irradiated with ultraviolet light. So preferred.
  • the peak wavelength of the inspection light 3 may be, for example, 800 nm or more and 1600 nm or less.
  • the peak wavelength of the inspection light 3 is preferably 800 nm or more and 1600 nm or less.
  • a halogen lamp is given as an example of the light source 2, but the type of the light source 2 is not limited to this and may be another type of lamp or the like.
  • the light source 2 may be any device that can emit light of a wavelength that can detect foreign matter, and may be, for example, any of a tungsten lamp, a phosphor, an LED, and a laser.
  • the support 5 is a member for supporting the object 1 and has an opening (not shown) for transmitting the transmitted light 8 transmitted through the object 1.
  • the inside diameter of the opening is smaller than the outside diameter of the object 1.
  • the location in which the target object 1 in the support part 5 is mounted may be formed with the transparent member which has a wavelength characteristic which permeate
  • quartz glass or synthetic quartz glass is employable, for example.
  • the recessed part for inserting the target object 1 one each may be formed in the support part 5.
  • the light source 2 and the support 5 move relative to each other.
  • the light source 2 may move, or the support 5 may move.
  • the position of the light source 2 is fixed, and the support portion 5 is moved in the direction of the arrow 110 in FIG. Therefore, the support unit 5 functions as a moving mechanism that changes the relative positional relationship between the object 1 and the spot 4 of the inspection light 3.
  • the support unit 5 continuously supplies the plurality of objects 1 to the position of the spot 4 (in other words, the inspection position by the detection unit 7).
  • the lens 6 is an optical member for condensing the transmitted light 8 toward the detection unit 7 and is disposed on the lower side of the support unit 5 and at a position coaxial with the opening of the support unit 5 or the transparent member There is.
  • the detection unit 7 is a device that detects transmitted light transmitted through the object 1 at a predetermined timing.
  • a polychromator-type spectrometer may be used as the detection unit 7.
  • a large number of light receiving elements are arranged at the end of a prism for dispersing light of each wavelength, and light of each wavelength can be measured simultaneously.
  • Polychromator spectrometers have the advantage of short measurement times.
  • the polychromator may be of a type using a light receiving element and a prism, or a type using a CCD (Charge Coupled Device).
  • the type of polychromator is appropriately selected according to the configuration of the inspection apparatus, the type of tablet to be measured, the wavelength of light, and the like.
  • the spectroscope provided in the detection unit 7 measures the spectrum of the received light.
  • the detection unit 7 does not have to include a spectroscope.
  • the detection unit 7 may be configured to include, for example, any one of a photodiode, a phototransistor, an avalanche photodiode, and a photomultiplier.
  • the number, arrangement, and the like of the light receiving elements in the detection unit 7 are appropriately selected according to the configuration of the foreign matter inspection apparatus, the type of the object to be measured, the wavelength of the light to be used, and the like.
  • the light transmitted through the object 1 may be guided to the detection unit 7 using an optical member such as an optical fiber.
  • the detection unit 7 does not always measure the transmitted light 8 but performs measurement intermittently. Measurement is started according to the timing when the inspection object 1 comes to the inspection position, measurement is stopped when scanning of the inspection light 3 is finished, and measurement is started again when the object 1 for the next inspection comes to the inspection position Do.
  • the light source 2 may be controlled to irradiate the inspection light 3 from the light source 2 in a pulse shape.
  • the control device 10 controls the detection unit 7 to intermittently perform the measurement of the detection unit 7.
  • the control device 10 controls the light source 2, the detection unit 7, and a drive mechanism for moving the support 5.
  • Each process by the control unit 13 may be realized by a central processing unit (CPU).
  • the control device 10 includes a determination unit 11 and a storage unit 12.
  • the determination unit 11 performs an operation with reference to the measurement data of the object 1 obtained by the detection unit 7 based on the transmitted light and the data stored in the storage unit 12, and foreign matter mixed in the object 1. Is determined.
  • the storage unit 12 is for storing information necessary for the examination.
  • the storage unit 12 is an area for temporarily storing measurement data by the detection unit 7, various programs executed by the control device 10, an area for storing data used in these programs, and these programs And a work area used when these programs are executed.
  • the various programs mentioned here are, for example, a program for performing determination, a calculation algorithm, a database, and the like.
  • the storage unit 12 can hold reference data used for determination by the determination unit 11.
  • FIG. 2 is a diagram for explaining an inspection method in the inspection apparatus 100.
  • the target 1 (target to be focused on) to be the target of the most recent inspection is the target 1A
  • the target 1 to be inspected next is the target 1B
  • the distance between the target 1A and the target 1B is M and Do.
  • the measurement start time of the detection unit 7 is S.
  • W be the width of the object 1 in the direction parallel to the transport direction.
  • the support 5 moves the object 1 in the direction of the arrow 110 in FIG.
  • the distance by which the object 1A moves from the measurement start time S to the measurement end time E is indicated by the arrow 16.
  • the measurement time t Assuming that the transport speed of the object 1 is V and the measurement time of the detection unit 7 (that is, the integration time from the measurement start time S to the measurement end time E) is t, the measurement time t indicated by the following equation (1) Within the range, the detection unit 7 measures the object 1 (detects the transmitted light 8).
  • the unit 7 measures the object 1. In other words, from the position where the spot 4 covers the whole of the object 1 to the position where the spot 4 does not cover the object 1 (the position indicated by the reference numeral 15) 7 measures the object 1; When the detection unit 7 intermittently detects the transmitted light 8, the measurement time of integration from the measurement start time S to the measurement end time E is t.
  • the inspection can be performed efficiently.
  • the inspection speed is slower than the production speed of the object 1, the inspection process becomes the rate-limiting of the speed of the entire production process.
  • the measurement time can be shortened compared to two-dimensionally scanning with the light spot.
  • each target 1 is disposed on the support 5 such that the distance M between the target 1A and the target 1B is larger than the width W of the target 1A (target 1B). Further, the distance M is larger than the width of the spot 4 in the transport direction. By satisfying these conditions, it can be prevented that the object 1A and the object 1B are simultaneously measured (in other words, a plurality of objects 1 fall within the range of the spot 4 at one time).
  • the inspection apparatus 100 may include an arrangement mechanism (for example, a robot arm) that arranges the plurality of objects 1 on the support 5 by adjusting the distance between the plurality of objects 1.
  • an arrangement mechanism for example, a robot arm
  • the size of the spot 4 may be set so that a plurality of objects 1 do not fall within the range of the spot 4 at one time.
  • the lower limit of the amount of change of the relative positional relationship at which a preferable percentage of correct answers for inspection can be obtained is 2.5 mm, and the measurement time t at this time is 2 ms. Therefore, in the first embodiment, it is preferable to set the lower limit value of the measurement time t in the above equation (1) to 2 ms as the following equation (1A) indicates.
  • FIG. 3 is a flowchart illustrating an example of the flow of processing in the inspection apparatus 100.
  • the light source 2 starts irradiation of the inspection light 3 (S1).
  • the inspection light 3 always emits the inspection light 3.
  • the detection unit 7 starts the measurement (S2) at the timing when the whole of the object 1 enters the range of the spot 4 (S2), and ends the measurement when the object 1 moves a distance corresponding to the width W (YES in S3) To do (S4).
  • the detection unit 7 outputs the measurement data (data indicating the intensity of the transmitted light 8) acquired during this time to the determination unit 11.
  • the determination unit 11 measures the intensity I 0 of the inspection light 3 and the transmitted light 8 indicated by the measurement data, which are measured in advance in a state where there is no object 1 between the light source 2 and the detection unit 7 before starting the inspection. A value reflecting the difference from the intensity I is calculated, and from the value, it is determined whether foreign matter is mixed (S5).
  • the determination unit 11 refers to the absorbance A1 and the calculation model for each type of tablet read from the database stored in the storage unit 12 to calculate an index indicating the feature of the tablet, and determines the presence or absence of foreign matter contamination Do.
  • the determination method performed by the determination unit 11 may be a known method, and is not particularly limited.
  • the inspection apparatus 100 ends the process.
  • the object 1 determined to be contaminated or the lot including the same is discarded.
  • FIG. 4 is a diagram for explaining a second inspection method in the inspection apparatus 100.
  • the measurement start time S is when the spot 4 slightly covers the object 1A (or the outer edge of the spot 4 circumscribes the outer edge of the object 1A). Other conditions are the same as in the first inspection method.
  • the distance by which the object 1A moves from the measurement start time S to the measurement end time E is indicated by an arrow 18.
  • the detection unit 7 measures the object 1.
  • the detection unit 7 starts the detection of the transmitted light 8 from the state in which the target 1 to be focused is not included in the spot 4, and the upper limit of the measurement time t ′ is that the optical axis of the inspection light 3 is the object 1. It is twice the time required to cross. Also in this case, the same effect as the first inspection method can be obtained.
  • FIG. 5 is a diagram for explaining a third inspection method in the inspection apparatus 100.
  • a set of objects 1 is a target set 1C, and an interval of a plurality of target sets 1C arranged along the transport direction is M ". Further, a width of the target set 1C in a direction parallel to the transport direction is W". I assume.
  • the width W is the distance between the most upstream point of the transport direction and the most downstream point of the transport direction among the points forming the outer edge of each object 1 included in the target set 1C. It is.
  • the spot 4 has a size that can cover the entire target set 1C.
  • Example 1 A present Example demonstrates the result of having measured the target object 1 by the 1st inspection method.
  • the transport speed V of the target 1 is 1250 mm / s, and the width W of the target 1 in the direction parallel to the transport direction is 8 mm.
  • the light from the light source 2 is guided by a light guide using an optical fiber, and the number of lenses constituting the condensing lens group 61 used for condensing is three.
  • the lensless state the state of one sheet, the state of two sheets, and the state of three sheets were respectively tried, for the object 1 having a width W of 8 mm, three lenses constituting the condensing lens group 61 If there were, it was possible to adjust the spot size suitably.
  • the measurement time t from the start time S to the end time E of the measurement by the detection unit 7 was changed stepwise to calculate the correct answer rate of the measurement.
  • a target 1 for which the foreign substance is contained and a target 1 for which the foreign substance is not contained are prepared as an inspection target, and the correct answer is obtained, assuming that the correct determination is made whether the foreign substance is included or not.
  • the proportion of object 1 was calculated as the correct answer rate.
  • FIG. 6 is a figure which shows the relationship between the measurement conditions of the target object 1, and a correct answer rate.
  • the relative positional relationship (displacement amount) between the object 1 and the spot 4 changes from 2.5 mm to 7.5 mm by changing the measurement time t from 2 ms to 6 ms. Do.
  • the correct answer rate became 85% when the measurement time t was 4 ms. From this result, it is clear that the measurement time t should be 4 ms or more in a test that requires a correct answer rate of 85% or more.
  • (b) of FIG. 6 is the result of having performed measurement of the target object 1 on another conditions by the 1st inspection method.
  • the transport speed V of the target 1 is 250 mm / s
  • the width W of the target 1 in the direction parallel to the transport direction is 10 mm.
  • the relative positional relationship (displacement amount) between the object 1 and the spot 4 changes from 0.5 mm to 10 mm.
  • the correct answer rate became 70% when the measurement time t was 2 ms. From this result, it is clear that the measurement time t should be 2 ms or more in a test that requires a correct answer rate of 70% or more.
  • FIG. 7 is a figure which shows notionally the nonuniformity of the intensity
  • FIG. 7 in the spot 4 formed by the light source 2 used in the present embodiment, unevenness of the light intensity of substantially concentric circle occurs.
  • the illuminance decreases toward the outside of the spot 4, and when the distance between the spot 4 and the light source 2 is 50 mm, the illuminance decreases to 72% of the central portion on the circumference of 35 mm in diameter.
  • FIG. 13 is a view showing the relationship between the amount of light irradiated to the object 1 and the number of lenses constituting the condensing lens group 61.
  • the spectral data in the case where the amount of irradiated light is measured with a configuration that does not use the condensing lens group 61 using the same light source 2 and three lenses that constitute the condensing lens group 61 reduce unevenness in light intensity.
  • the irradiation light amount when the number of lenses constituting the condensing lens group 61 is three is approximately 1 ⁇ 2 as compared with the case where it is not used.
  • the light quantity of the inspection light 3 decreases as a result of the configuration to reduce the light unevenness in this way, the light passing through the object 1 becomes weak and the light quantity threshold which is the limit that the detection unit 7 can detect If it falls below the threshold, the light amount detected by the detection unit 7 will go to 0 at once.
  • the threshold of the required light amount to obtain the required accuracy of the inspection that is, the required correct answer rate, below which the inspection becomes impossible.
  • FIG. 13 A table showing the correspondence between the light quantity at a certain wavelength of the spectral data of FIG. 13 and the inspection correct answer rate is shown in FIG.
  • the value of the transmitted light amount in FIG. 14 indicates the relative value of the transmitted light amount, with the amount of light transmitted through the object 1 being the inspection light 3 emitted from the light source 2 as the transmitted light amount. . Further, the light reception amount relatively indicates the intensity of the transmitted light 8 detected by the detection unit 7.
  • the data without a lens shown by a solid line in FIG. 13 corresponds to the case where the irradiation light amount is 15000 in FIG. Further, the data of the use of three lenses indicated by the broken line in FIG. 13 corresponds to the case where the irradiation light quantity is 7500 in FIG.
  • the ratio of the amount of light lost to the inspection object to the amount of irradiated light is about 99% in this case, and when the amount of irradiated light is 15000, the amount of transmitted light is 150 and the amount of irradiated light is 7500.
  • the transmitted light amount is 75.
  • the detection unit 7 has a detectable threshold (100 in this experiment), it is detected as 150 when the transmitted light quantity is 150, but it is not detected because it falls below the detection threshold when the transmitted light quantity is 75. Will be zero. That is, in this case, since the light quantity of the inspection light 3 has become low due to the three lenses reducing light unevenness, the quantity of light to be detected rapidly decreases to 0, and the inspection becomes impossible.
  • the rate of correct answers is rapidly deteriorating when the amount of irradiation light decreases.
  • the correct answer rate is increased to 95%. If the required correct answer rate is 90%, the test can not be performed because the required correct answer rate is not reached when the irradiation light amount is 10000.
  • the percentage of light loss to the inspection object was about 99%, but this figure is not fixed.
  • the loss of light in the object to be inspected is increased, and the amount of transmitted light is further reduced, and the inspection accuracy is deteriorated. That is, the loss of light becomes large and the amount of transmitted light can not be obtained, and the amount of light loss is lower than the amount of light for obtaining a required correct answer rate or lower than the detection threshold of the detection unit 7 and inspection itself becomes impossible. More serious adverse effects on test results. Therefore, it is more important not to reduce the irradiation light amount.
  • the detection unit 7 when the light passes through the object 1 and is detected by the detection unit 7, it is not detected as it falls below the detection threshold, so that the inspection accuracy may deteriorate or the inspection may become impossible. However, if the amount of light of the inspection light 3 is large, the light travels through the object 1 to every corner and is transmitted, and the amount of light detected by the detection unit 7 increases. It becomes possible to detect evenly and inspection accuracy improves.
  • the influence of unevenness in light intensity can be reduced, so the number of optical systems can be reduced and the loss of inspection light can be suppressed.
  • the amount of irradiated light is increased as compared to the prior art.
  • the increase of the irradiation light quantity can achieve the following synergetic effect in addition to the S / N ratio improvement by simply increasing the detection light.
  • FIG. 8 is a view showing the configuration of an inspection apparatus 200 according to the present embodiment.
  • the inspection apparatus 200 includes a support 5 ⁇ / b> A instead of the support 5.
  • the support 5 ⁇ / b> A has a recess 9 for placing the object 1.
  • the bottom surface of the recess 9 is a reflective surface that reflects the light transmitted through the object 1.
  • the inspection light emitted from the light source 2 passes through the object 1, is reflected by the bottom of the recess 9, is condensed by the lens 6, and reaches the detection unit 7.
  • the same effect as that of the inspection apparatus 100 can be obtained. Furthermore, in the inspection apparatus 200, after the inspection light 3 passes through the object 1, it is reflected by the bottom of the recess 9 and passes through the object 1 again, so that the transmitted light 8 includes more information of foreign matter. Become. Therefore, the detection accuracy of the foreign substance contained in the object 1 can be enhanced.
  • FIG. 9 is a view showing the configuration of an inspection apparatus 300 according to the present embodiment.
  • a circular rotor 21 is provided as a member for supporting the object 1, instead of the linearly moving support portion 5.
  • members other than the rotor 21 such as the light source 2 are omitted.
  • the basic configuration of the inspection apparatus 300 is the same as the configuration of the inspection apparatus 100.
  • the plurality of objects 1 are arranged circumferentially along the outer edge of the rotor 21.
  • one target 1 to be inspected is included in the irradiation range of the spot 4 of the inspection light 3 emitted from the light source 2.
  • the positional relationship between the object 1 and the spot 4 is set such that each of the objects 1 passes through the center of the spot 4.
  • R be the radius of the track 24 on which the object 1 is transported.
  • the transport speed (peripheral speed) of the object 1 is set to Vc.
  • Trajectory 24 preferably passes through the center of object 1.
  • the spot 4 covers the entire object 1A.
  • the rotor 21 moves the object 1 in the direction of the arrow 110 in FIG. 9 as it rotates.
  • the angle at which the object 1A moves from the measurement start time S to the measurement end time E is indicated by the arrow 23.
  • the detection unit 7 measures the object 1 within the range of the measurement time t indicated by the following equation (8).
  • the object 1 can cross the spot 4 to reduce the influence of the unevenness. Moreover, it becomes possible to implement
  • FIG. 10 is a diagram for explaining a second inspection method in the inspection apparatus 300.
  • the measurement start time S is when the spot 4 slightly covers the object 1A (or the outer edge of the spot 4 circumscribes the outer edge of the object 1A).
  • the other conditions are the same as in the first inspection method, and the plurality of objects 1 are disposed on the same circular trajectory 24 so that the angle Mc is larger than the angle Wc.
  • the object 1A moves to the position indicated by the reference numeral 25 between the measurement start time S and the measurement end time E.
  • the change in angle of the object 1 at this time is indicated by the arrow 26.
  • the detection unit 7 detects the object 1 within the range of the measurement time tc indicated by the following equation (9) or (10). Make a measurement.
  • FIG. 11 is a diagram for explaining a third inspection method in the inspection apparatus 300.
  • a set of objects 1 be an object set 1C.
  • the spot 4 has a size that can cover the entire target set 1C. If the target set 1C is regarded as one inspection target, the first or second inspection method in the inspection apparatus 300 can be applied to inspect a plurality of target sets 1C.
  • Embodiment 4 Other embodiments of the present disclosure will be described below.
  • FIG. 15 is a view showing the configuration of a manufacturing apparatus 900 according to this embodiment.
  • the manufacturing apparatus 900 is a manufacturing apparatus for manufacturing the object 1.
  • the manufacturing apparatus 900 includes a manufacturing unit 910, a belt conveyor 920, and an inspection apparatus 100.
  • the production unit 910 is a unit for producing the object 1.
  • the belt conveyor 920 conveys the object 1 manufactured by the manufacturing unit 910 to the inspection apparatus 100.
  • the inspection apparatus 100 inspects the object 1 conveyed by the belt conveyor 920.
  • the object 1 conveyed by the belt conveyor 920 may be moved to the support 5 (see FIG. 1 and the like) by a robot arm or the like.
  • the belt conveyor 920 and the support 5 may be configured as a series of members.
  • the manufacturing apparatus 900 is a manufacturing apparatus for manufacturing the object 1 and includes the inspection apparatus 100.
  • the manufacturing apparatus 900 by inspecting the object 1 manufactured by the manufacturing unit 910 with the inspection apparatus 100, defective products can be eliminated in a short time with high accuracy.
  • the manufacturing apparatus 900 may include the inspection apparatus 200 or 300 instead of the inspection apparatus 100.
  • control block (particularly, the determination unit 11) of the control device 10 may be realized by a logic circuit (hardware) formed in an integrated circuit (IC chip) or the like, or may be realized by software.
  • the control device 10 includes a computer that executes instructions of a program that is software that implements each function.
  • the computer includes, for example, at least one processor (control device) and at least one computer readable storage medium storing the program.
  • the processor reads the program from the recording medium and executes the program to achieve the object of the present disclosure.
  • a CPU Central Processing Unit
  • the above-mentioned recording medium a tape, a disk, a card, a semiconductor memory, a programmable logic circuit or the like can be used besides “a non-temporary tangible medium”, for example, a ROM (Read Only Memory).
  • a RAM Random Access Memory
  • the program may be supplied to the computer via any transmission medium (communication network, broadcast wave, etc.) capable of transmitting the program.
  • any transmission medium communication network, broadcast wave, etc.
  • one aspect of the present disclosure may also be realized in the form of a data signal embedded in a carrier wave in which the program is embodied by electronic transmission.

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  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
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  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

La présente invention concerne la réduction de l'influence de l'irrégularité de l'intensité lumineuse d'une lumière d'inspection sans utiliser de système optique pour réduire l'irrégularité d'intensité lumineuse. Un dispositif d'inspection (100) éclaire de façon continue ou par intermittence chaque objet (1) à l'aide d'une lumière d'inspection (3) tout en changeant la relation de position relative entre les objets (1) et la plage d'éclairage, de façon à créer une condition dans laquelle la totalité de chaque objet (1) se trouve dans la plage d'éclairage de la lumière d'inspection (3), et pendant le changement de ladite relation de position relative, le dispositif d'inspection provoque la détection par une unité de détection (7) de toute lumière transmise (8).
PCT/JP2018/038544 2017-11-28 2018-10-16 Dispositif et procédé d'inspection et dispositif de fabrication Ceased WO2019106992A1 (fr)

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JP2017-228182 2017-11-28
JP2017228182A JP2021028572A (ja) 2017-11-28 2017-11-28 検査装置、検査方法および製造装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210299783A1 (en) * 2018-08-22 2021-09-30 Autoliv Development Ab Device and method for inspecting laser welding protective glass

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7707619B2 (ja) * 2021-04-07 2025-07-15 ウシオ電機株式会社 光測定装置および光測定方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002039940A (ja) * 2000-07-21 2002-02-06 Techno Ishii:Kk 被検出物の空洞化検出方法及びその装置
JP2002162358A (ja) * 2000-11-22 2002-06-07 Ishii Ind Co Ltd 被検出物の変異部検出方法及びその変異部検出装置
US20040151360A1 (en) * 2001-07-02 2004-08-05 Eric Pirard Method and apparatus for measuring particles by image analysis
JP2004219375A (ja) * 2003-01-17 2004-08-05 Kubota Corp 果菜類の品質評価装置
WO2008001785A1 (fr) * 2006-06-26 2008-01-03 Toshiba Solutions Corporation APPAREIL d'inspection de spécimen, et procédé d'inspection de spécimen
JP2013044729A (ja) * 2011-08-26 2013-03-04 Sumitomo Electric Ind Ltd 塗布状態測定方法
JP2014160013A (ja) * 2013-02-20 2014-09-04 Aomori Prefectural Industrial Technology Research Center 非破壊検査装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002039940A (ja) * 2000-07-21 2002-02-06 Techno Ishii:Kk 被検出物の空洞化検出方法及びその装置
JP2002162358A (ja) * 2000-11-22 2002-06-07 Ishii Ind Co Ltd 被検出物の変異部検出方法及びその変異部検出装置
US20040151360A1 (en) * 2001-07-02 2004-08-05 Eric Pirard Method and apparatus for measuring particles by image analysis
JP2004219375A (ja) * 2003-01-17 2004-08-05 Kubota Corp 果菜類の品質評価装置
WO2008001785A1 (fr) * 2006-06-26 2008-01-03 Toshiba Solutions Corporation APPAREIL d'inspection de spécimen, et procédé d'inspection de spécimen
JP2013044729A (ja) * 2011-08-26 2013-03-04 Sumitomo Electric Ind Ltd 塗布状態測定方法
JP2014160013A (ja) * 2013-02-20 2014-09-04 Aomori Prefectural Industrial Technology Research Center 非破壊検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210299783A1 (en) * 2018-08-22 2021-09-30 Autoliv Development Ab Device and method for inspecting laser welding protective glass

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