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WO2019177950A1 - Ensemble de surface de nettoyage par contact et procédé de fabrication correspondant - Google Patents

Ensemble de surface de nettoyage par contact et procédé de fabrication correspondant Download PDF

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Publication number
WO2019177950A1
WO2019177950A1 PCT/US2019/021580 US2019021580W WO2019177950A1 WO 2019177950 A1 WO2019177950 A1 WO 2019177950A1 US 2019021580 W US2019021580 W US 2019021580W WO 2019177950 A1 WO2019177950 A1 WO 2019177950A1
Authority
WO
WIPO (PCT)
Prior art keywords
contact cleaning
assembly according
cleaning surface
conductive
surface assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2019/021580
Other languages
English (en)
Inventor
Sheila Hamilton
Stephen Frank Mitchell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Illinois Tool Works Inc
Original Assignee
Illinois Tool Works Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works Inc filed Critical Illinois Tool Works Inc
Priority to CN201980015641.5A priority Critical patent/CN111819011A/zh
Priority to EP19713294.7A priority patent/EP3765214B1/fr
Priority to JP2020548638A priority patent/JP2021517506A/ja
Publication of WO2019177950A1 publication Critical patent/WO2019177950A1/fr
Anticipated expiration legal-status Critical
Priority to JP2024000811A priority patent/JP2024026637A/ja
Priority to JP2025077151A priority patent/JP2025109747A/ja
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G21/00—Arrangements not provided for by groups G03G13/00 - G03G19/00, e.g. cleaning, elimination of residual charge
    • G03G21/0005—Arrangements not provided for by groups G03G13/00 - G03G19/00, e.g. cleaning, elimination of residual charge for removing solid developer or debris from the electrographic recording medium
    • G03G21/0058—Arrangements not provided for by groups G03G13/00 - G03G19/00, e.g. cleaning, elimination of residual charge for removing solid developer or debris from the electrographic recording medium using a roller or a polygonal rotating cleaning member; Details thereof, e.g. surface structure

Definitions

  • the present invention relates to a contact cleaning surface assembly for use in a contact cleaning process, in particular, but not exclusively, to a contact cleaning surface assembly comprising an elastomeric layer having a bulk conductivity.
  • the present invention also relates to a method of manufacturing a contact cleaning surface assembly.
  • Contact cleaning is used to clean substrate surfaces. Once cleaned, the substrate surfaces may be used in a variety of sophisticated processes such as in the manufacturing of electronics, photovoltaics and flat panel displays. Usually, a rubber or elastomeric cleaning roller is used to remove contaminating particles from a substrate surface and an adhesive roller can then be used to remove the contaminating particles from the cleaning roller.
  • a contact cleaning roller contacts at least the upper surface of the substrate, removing the debris by means of adhesion removal mechanisms (e.g. Van der Waals forces and adhesion forces), where the inherent properties of the material used to form the contact cleaning roller attracts the debris and causes it to stick to the surface of the contact cleaning roller. It is thought that the contact cleaning roller pulls the contaminating particles away from the substrate surface in this manner due the attractive van der Waals forces between the particles and the roller. Consequently, existing contact cleaning rollers may ensure effectiveness in removing contaminating particles by maximising contact with the substrate surface.
  • adhesion removal mechanisms e.g. Van der Waals forces and adhesion forces
  • R s Surface resistance
  • a well-known method of measuring surface resistance is provided in American National Standard Institute (ANSI) ESD STM1 1 .1 1 -2015. According to this method, any equipment for an electronics assembly factory used within 100mm of a substrate must have surface resistance of less than 1 x10 9 W.
  • ANSI American National Standard Institute
  • Typical rubber or elastomeric cleaning rollers do not ordinarily have surface resistance below 1 x10 9 W, in other words, they are insulating and not conducting. It would be desirable to provide a cleaning roller that will provide for dissipation of electrostatic charges away from the substrate to be cleaned.
  • additives will necessarily have different properties to the original material and changes to the original material risk inhibiting its primary function, namely contact cleaning. This risk is especially high when attempting to modify the surface properties of a contact cleaning roller when the same surface is critical to the roller’s cleaning effectiveness. Anything that reduces the amount of the elastomer on the roller surface will potentially mean the elastomer is less able to make contact with the substrate to be cleaned, resulting in a reduced ability to contact and to attract dirt and debris. Further, a modifying additive may interfere with the usual process, as described above, by which debris is attracted to the surface of the cleaning roller. In both situations, the cleaning effectiveness of the roller will be inhibited or reduced.
  • Typical conductive additives such as fibres and particulates may not disperse evenly throughout the elastomer’s matrix.
  • the roller will have uneven surface resistance, combining portions that conduct charge away from the cleaning surface with portions that allow charge to accumulate and cause damage to the substrate.
  • a further consideration is that the incorporation of an additive into the elastomer should not affect the integrity of the elastomer or the roller. A loss of integrity or a decrease in its wear resistance may result in the roller abrading too quickly or the surface becoming damaged or pitted which further reduces its effectiveness. All these factors may increase running costs for the contact cleaning process.
  • additive materials which are not sufficiently similar to the elastomer, for example with a low bonding surface area, will mean that the surrounding elastomer cannot bind or adhere effectively to the additives. If this material is not securely embedded within the elastomer, then as the roller operates material will become dislodged and free from the roller surface, thereby contaminating the substrate being cleaned and / or being picked up by the adhesive roller, thereby shortening its life and increasing running costs. Yet further, if material is dislodged from the roller then it may result in the damage to the roller surface, again reducing cleaning effectiveness and increasing costs.
  • a further, related consequence of using a large quantity of additive is that it would lead to an increased amount of that material, and less of the elastomer, on the roller surface.
  • the problems of reduced elastomer at the roller surface have already been described above.
  • the surface resistance of the cleaning surface is less than 1 x10 9 W. Not only does this place a requirement on a contact cleaning roller to have a surface resistance less than 1 c10 9 W but, necessarily, the roller must be capable of allowing electrostatic charges to be conducted away from the cleaning surface to ground. It must also do this while it is in continuous operation, that is, the roller must allow charges to be conducted all the time it is rotating. Therefore, it may not be sufficient to provide a roller with low resistance in a localised region but it must be capable of conducting charges from the substrate surface to a suitable earthing device (i.e. to ground) at all times during its operation.
  • a suitable earthing device i.e. to ground
  • An object of the invention is to alleviate or mitigate at least one or more of the aforementioned problems.
  • An object of the invention is to alleviate or mitigate the problem of electrostatic charge build up derived from the contact cleaning surface assembly.
  • a further object is to alleviate or mitigate the problem of electrostatic charge without reducing or inhibiting the cleaning effectiveness of the contact cleaning roller, or without reducing the operating life of either the contact cleaning surface assembly or of the adhesive roller.
  • a further object of the invention is to reduce the surface resistance while minimising the quantity and maximising electrical connectivity of a non-insulating additive.
  • a yet further object of the invention is to improve connectivity while alleviating any decrease in, or yet improving, the integrity of the contact cleaning surface assembly.
  • a further object of the invention is to alleviate or mitigate electrostatic charge when using a contact cleaning surface assembly used in a suitable contact cleaning apparatus.
  • a yet object aim is to provide a method manufacturing a contact cleaning surface assembly capable of alleviating or mitigating electrostatic charge.
  • a contact cleaning surface assembly comprising an elastomeric layer with bulk conductivity (e.g. electrical conductivity), the elastomeric layer having a conductive surface for contact with a part to be cleaned and a further conductive surface in electrical contact with a conductive pathway for charge extraction from the conductive layer.
  • bulk conductivity e.g. electrical conductivity
  • the elastomeric layer is in electrical contact with the conductive pathway.
  • the elastomeric layer is in intimate contact with the conductive pathway.
  • the conductive pathway provides charge extraction from the elastomeric layer to ground (i.e. an electrical earth).
  • the conductive pathway comprises a metallic charge extraction element in contact with the conductive surface of the elastomeric layer. In certain embodiments the conductive pathway is a conductive support for the elastomeric layer.
  • the elastomeric layer is in intimate contact with the support.
  • the charge extraction path is from conductive layer to the conductive pathway.
  • the elastomeric layer is attached to the conductive support.
  • the elastomeric layer is in intimate contact with the conductive support. More specifically, the elastomeric layer is in intimate contact with the support across the entire further conductive surface of the elastomeric layer. In this way, charge extraction from the elastomeric layer to the support occurs across the entire further conductive surface of the elastomeric layer.
  • the conductive support is formed of a metallic conductor material. More specifically, the metallic conductor support is stainless steel.
  • the conductive support is formed of a non-metallic conductor material. More specifically, the non-metallic conductor support is carbon fibre.
  • the support is a shaft.
  • the charge extraction path is from conductive layer to the conductive support. More specifically, the charge extraction path is from the conductive surface of the elastomeric material through the elastomeric material to the further conductive surface of the elastomeric material to the conductive support.
  • the assembly is a roller.
  • the assembly comprises a planar (or substantially planar) sheet.
  • the elastomeric layer comprises conductive elements. More specifically, the elastomeric layer comprises a modifying agent comprising conductive elements. In this way, the modifying agent reduces the bulk resistance and surface resistance of the elastomeric layer and provides the elastomeric layer with bulk conductivity.
  • the conductive elements form a network. More specifically, the network of conductive elements is electrically conductive.
  • the conductive elements in the elastomeric layer are in proximity or contact with one another such that the network of conductive elements provides a charge path from the outer conductive surface of the elastomeric layer, through the elastomeric layer to the further conductive surface of the elastomeric layer to the conductive support. In this way, charge can be extracted away from a substrate (i.e. part to be cleaned), through the elastomeric layer to the conductive support and to ground.
  • the elastomeric layer comprises an interconnected network of conductive elements.
  • the conductive elements are elongate. In this way, the surface area of the conductive elements in contact with the elastomer of the elastomeric layer is increased and the retention of the elements in the elastomeric layer is enhanced.
  • the elongate conductive elements are hollow.
  • the conductive elements are carbon.
  • the conductive elements are nanotubes.
  • conductive elements are carbon nanotubes.
  • nanotubes are single walled carbon nanotubes. In this way, a balance is maintained between the cleaning properties of the elastomeric layer and the bulk conductivity thereof.
  • the high surface area of the nanotubes provides improvements in bonding the carbon into the elastomer when compared to particulate carbon or carbon fibres.
  • the carbon nanotubes are a single carbon atom wall thickness.
  • the surface resistance of the, or each conductive surface is less than 1 x 10 9 W. More specifically, the surface resistance of both the conductive surface and the further conductive surface of the elastomeric layer is less than 1 x 10 9 W. Yet more specifically, the surface resistance of both the conductive surface and the further conductive surface of the elastomeric layer are substantially equal.
  • the surface resistance the, or each conductive surface is in the range of about 1 x 10 6 W to about 1 x 10 9 W. More specifically, the surface resistance of both the conductive surface and the further conductive surface of the elastomeric layer is in the range of about 1 x 10 6 W to about 1 x 10 9 W. Yet more specifically, the surface resistance of both the conductive surface and the further conductive surface of the elastomeric layer are substantially equal.
  • the elongate conductive elements are dispersed uniformly throughout the elastomer material.
  • conductive elements are dispersed such that they are embedded and retained in the elastomeric material.
  • the conductive elements are orientated randomly in the elastomeric material. In certain embodiments the conductive elements have length within the range about 5 pm to about 30pm.
  • the conductive elements have diameter within the range about 1 nm to about 200nm.
  • the concentration of conductive elements in the elastomer is at least about 0.015% by weight of elastomer.
  • the elastomer comprises one of silicone rubber or polyurethane.
  • the elastomer comprises silicone.
  • a conductive silicone layer can be formed when carbon nanotubes are dispersed within the silicone material.
  • the nanotubes are retained within the silicone polymer matrix through covalent bonding.
  • Other additives, such as particulate materials are prone to migrate out of the silicone matrix due to the mobility of the silicone matrix.
  • carbon nanotubes provide a retained modifying agent retained within the silicone matrix.
  • the elastomer is a two-part, room-temperature curing silicone rubber.
  • a contact cleaning roller comprising:
  • the surface region comprises an elastomer and a plurality of elongate elements dispersed within the elastomer material, wherein the elongate elements are formed of an electrically noninsulating material.
  • a contact cleaning apparatus comprising a contact cleaning surface assembly according to the invention.
  • a contact cleaning roller comprising:
  • the method subsequently comprises curing the elastomer.
  • the conductive elements are dispersed throughout the elastomer.
  • the conductive elements after curing, form a network.
  • the conductive elements are orientated in random orientation.
  • Figure 1 is a schematic side view of a contact cleaning apparatus employing a roller having a contact cleaning surface assembly in accordance with an embodiment of the present invention
  • Figure 2 is a schematic cross- section of a contact cleaning surface assembly in accordance with an embodiment of the present invention
  • Figure 3a is a further schematic cross-section of a contact cleaning surface assembly in accordance with a first embodiment of the present invention
  • Figure 3b is a schematic magnified cross-section of a section of contact cleaning surface assembly in Figure 3a;
  • Figure 4 is a schematic of an elongate single-walled carbon nanotube of one embodiment of the present invention.
  • FIG. 1 is a schematic side view of a contact cleaning apparatus employing a contact cleaning surface assembly being a roller in accordance with embodiments of the present invention.
  • the contact cleaning apparatus 1 comprises a contact cleaning roller 2 and an adhesive roller 3 mounted above a conveyor 4 on which a plurality of substrates 5 for cleaning are carried.
  • the contact cleaning roller 2 is elongate and generally cylindrical in shape, and is mounted on a holder (not shown) having an axis perpendicular to the plane of view about which the contact cleaning roller 2 is free to rotate. The specific structure of the contact cleaning roller 2 is described in more detail below.
  • the adhesive roller 3 is generally cylindrical in shape, and comprises a body having a surface on which adhesive is present, and is also mounted on a holder (not shown) having an axis perpendicular to the plane of view and parallel to that of the contact cleaning roller 2 about which the adhesive roller 3 is free to rotate.
  • the contact cleaning roller 2 and adhesive roller 3 are mounted in such a manner so as to be in contact with one another such that clockwise rotational movement of the contact cleaning roller 2 results in counter-clockwise rotational movement of the adhesive roller 3 and vice versa.
  • the need for the contact cleaning roller 2 and adhesive roller 3 to be in contact will be clear from the description of use below.
  • the contact cleaning roller 2 is also mounted so as to be able to be in contact with the surface of a substrate 5 to be cleaned as it passes on a conveyor located below the axis of the conveyor 4.
  • Substrates 5 to be cleaned are processed as follows.
  • a substrate 5 is positioned on the upper surface 6 of a conveyor 4, which in Figure 1 moves from right to left as indicated by arrow A.
  • the substrate 5 to be cleaned passes underneath the contact cleaning roller 2, which rotates in a clockwise direction as indicated by arrow B.
  • the upper surface of the substrate 5 is covered with debris 7 requiring removal, such as dust.
  • the contact cleaning roller 2 contacts the upper surface of the substrate 5, removing the debris 7 by means of an electrostatic removal mechanism, where the inherent polarity of the material used to form the contact cleaning roller 2 attracts the debris 7 and causes it to stick to the surface of the contact cleaning roller 2.
  • the relative attractive force between the surface of the contact cleaning roller 2 and the debris 7 is greater than that between the debris 7 and the surface of the substrate 5, hence the debris 7 is removed.
  • the now clean substrate 5 continues along the conveyor 4 to a removal station (not shown) and the lower surface 8 of the conveyor passes back, forming a loop, in a left-right direction in Figure 1 , as indicated by arrow D.
  • the adhesive roller rotating in a counter-clockwise direction as indicated by arrow C contacts the surface of the contact cleaning roller 2.
  • the adhesive force between the debris 7 and the adhesive present on the surface of the adhesive roller 3 is greater than the adhesion force holding the debris 7 onto the surface of the contact cleaning roller 2, and the debris is removed.
  • the contact cleaning roller 3 then rotates to present a clean surface to the next substrate 5 to be cleaned.
  • FIG. 2 is a schematic cross-section of a contact cleaning surface assembly in accordance with a first embodiment of the present invention.
  • the contact cleaning surface assembly in the form of a roller, is used as a contact cleaning roller in a contact cleaning system 1 as described above.
  • the roller 102 comprises a conductive pathway, being conductive support 1 10 sheathed in a conductive elastomeric layer 112.
  • the roller 102 is elongate and generally cylindrical in shape, and is mounted via a mounting mechanism onto a holder (not shown) for use in a contact cleaning apparatus 1 .
  • the conductive shaft 1 10 is coaxial with the conductive elastomeric layer 1 12.
  • the shaft 1 10 may be used to mount the roller 102, and in the rotational movement of the roller 102 in use.
  • such a shaft 1 10 is formed from a conductive material such as, for example metal or non-metallic or composite conductive material (e.g. stainless steel, or carbon fibre composite).
  • the conductive shaft 1 10 is sheathed in an elastomeric material 1 12, such as, for example, rubber or other natural or synthetic elastomer material.
  • the elastomer material is substantially homogeneous.
  • the conductive elastomeric layer 1 12 has a conductive outer surface 1 14 having a surface resistance of less than 1 x 10 9 W.
  • the conductive elastomeric layer 1 12 has a conductive inner surface 1 13 having a surface resistance of less than 1 x 10 9 W and in contact with conductive shaft 1 10. In this way a conductive pathway is formed from the outer surface 1 14 to the inner surface 1 13 and to the shaft 1 10.
  • the electrostatic charge created at the surface 1 14 during use of the contact cleaning roller 102 to clean a part (not shown), is conducted through the layer 1 12 to the conductive pathway provided by the conductive shaft 1 10.
  • Figure 3a is a schematic cross-section of a contact cleaning surface assembly, in the form of roller 102, in accordance with an embodiment of the present invention.
  • Figure. 3b is a schematic magnified cross-section of a section of the same roller 102.
  • the roller 102 comprises an elastomeric layer 1 12 having an outer conductive surface 1 14 and an inner conductive surface 1 13.
  • the conductive elastomeric layer 1 12 sheathes and is attached to a conductive stainless steel shaft 1 10.
  • the outer surface 1 14 is available to clean debris from a substrate surface in the manner described above.
  • the elastomeric layer is a two-part, room temperature curing silicone rubber.
  • the elastomeric layer 1 12 comprises a plurality of elongate single-walled carbon nanotubes 1 16 dispersed and embedded within the elastomer material.
  • the elongate single-walled carbon nanotubes 1 16 are dispersed within the elastomer of the layer 1 12 and form an interconnected network of carbon nanotubes 1 18.
  • the dispersal of the nanotubes 1 16 within the elastomer is such that the members are spread in random orientation through substantially the whole thickness of the surface region 1 12, from the inner conductive surface 1 13 in contact with conductive shaft 1 10 to the outer conductive surface 1 14.
  • the nanotubes also spread substantially across the axial width of the roller 102.
  • the whole surface region 1 12 has reduced electrical resistance, or increased electrical conductivity, compared to the elastomer alone.
  • the elastomeric layer 1 12 has a bulk conductivity provided by the interconnected network of carbon nanotubes 1 18.
  • the bulk conductivity of the elastomer material in layer 1 12 provides a charge path to ground for electrical charges generated during the cleaning operation. Consequently, not only does the roller exhibit reduced electrical resistance when it is new, but the effect will last throughout its useful life, even as the outer surface 1 14 wears down.
  • the dispersal of the elongate carbon elements 1 16 and formation of the network 1 18 is such that the decreased surface resistance at conductive surface 1 13 and 1 14, as measured according to ANSI ESD STM1 1 .1 1 -2015, is less than 1 x10 9 W. Furthermore, as the whole elastomeric layer 1 14 has reduced electrical resistance, the roller 102 can provide a path to allow electrostatic charge to be conducted to ground away from the substrate surface.
  • Fig. 4 depicts an elongate single-walled carbon nanotube 1 16 of one embodiment of the present invention.
  • the nanotube 1 16 is one of a plurality of similar elongate single-walled carbon nanotubes that are dispersed within the elastomeric layer 1 12.
  • Each single-walled carbon nanotube 1 16 can vary in length within the range 5-30pm and have a diameter within the range 1 -200nm.
  • single-walled carbon nanotubes comprise 0.02% by weight of the elastomer comprising the elastomeric layer 1 12.
  • the elongate single-walled carbon nanotubes 1 16 are dispersed so that they form a conductive network (1 18, Figure 3b) extending substantially throughout the elastomeric layer 1 12. Hence, should any electrostatic charge begin to accumulate on the outer surface 1 14, it will immediately be dissipated away from the surface substrate to the shaft 1 10 before causing damage to the substrate.
  • the elongate single-walled carbon nanotubes 1 16 ensure efficient interconnectivity in network 1 18.
  • the nanotubes 1 16 sufficiently reduce the electrically insulating properties of the elastomer when added in very low amounts due to their low weight per unit length and high surface area per unit length.
  • only a small quantity is required to ensure effective reduction of the surface resistance of the roller 102 and to provide the elastomeric layer with the required bulk conductivity.
  • elongate single-walled carbon nanotubes 1 16 provides high surface area for a given weight of elements which ensures sufficient bonding with the surrounding elastomer that each elongate member 1 16 is embedded securely within the elastomeric layer 1 12. Hence, as the elastomeric layer conductive surface 1 14 wears down in use, elongate elements 1 16 cannot detach or come loose from the roller 102.
  • the embedding of the elongate single-walled carbon nanotubes 1 16 ensures that the integrity of the elastomer does not deteriorate and may even improve or reinforce the surface region 1 12.
  • the nanotubes 1 16 form a charge path from the outer conductive surface 1 14, through the interconnected network 1 18 to the inner conductive surface 1 13 and on to conductive shaft 1 10. From the shaft 1 10 the charge can be earthed with any suitable grounding device (not shown).
  • the earthing device may be electrically connected to the contact cleaning roller by any suitable means.
  • the elastomer of the surface region 1 12 comprises a polyurethane or silicone rubber.
  • the elastomer may also be a heat-cured silicone, or other material appropriate for contact cleaning rollers, as known to the person skilled in the art.
  • the cleaning surface assembly may clean both sides of a substrate (i.e. part to be cleaned). Both sides may be cleaned simultaneously or separately.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning In Electrography (AREA)
  • Rolls And Other Rotary Bodies (AREA)
  • Cleaning In General (AREA)
  • Electrostatic Charge, Transfer And Separation In Electrography (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Elimination Of Static Electricity (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

L'invention concerne un ensemble de surface de nettoyage par contact et un procédé pour sa fabrication, l'ensemble de surface de nettoyage par contact comprenant une couche élastomère possédant une conductivité en masse (par exemple, une conductivité électrique), la couche élastomère (112) possédant une surface conductrice (114) pour un contact avec une pièce à nettoyer et une autre surface conductrice (113) en contact électrique avec une voie conductrice (110) pour l'extraction de charges de la couche conductrice (112).
PCT/US2019/021580 2018-03-12 2019-03-11 Ensemble de surface de nettoyage par contact et procédé de fabrication correspondant Ceased WO2019177950A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201980015641.5A CN111819011A (zh) 2018-03-12 2019-03-11 接触式清洁表面组装件及其制造方法
EP19713294.7A EP3765214B1 (fr) 2018-03-12 2019-03-11 Ensemble de surface de nettoyage par contact et procédé de fabrication correspondant
JP2020548638A JP2021517506A (ja) 2018-03-12 2019-03-11 接触クリーニング表面アセンブリ及びその製造方法
JP2024000811A JP2024026637A (ja) 2018-03-12 2024-01-05 接触クリーニング表面アセンブリ及びその製造方法
JP2025077151A JP2025109747A (ja) 2018-03-12 2025-05-07 接触クリーニング表面アセンブリ及びその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1803873.7A GB2574179B (en) 2018-03-12 2018-03-12 Contact cleaning surface assembly
GB1803873.7 2018-03-12

Publications (1)

Publication Number Publication Date
WO2019177950A1 true WO2019177950A1 (fr) 2019-09-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2019/021580 Ceased WO2019177950A1 (fr) 2018-03-12 2019-03-11 Ensemble de surface de nettoyage par contact et procédé de fabrication correspondant

Country Status (5)

Country Link
EP (1) EP3765214B1 (fr)
JP (3) JP2021517506A (fr)
CN (1) CN111819011A (fr)
GB (1) GB2574179B (fr)
WO (1) WO2019177950A1 (fr)

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CN111819011A (zh) 2020-10-23
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