WO2019150850A1 - Transducer and power-generating system using same - Google Patents
Transducer and power-generating system using same Download PDFInfo
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- WO2019150850A1 WO2019150850A1 PCT/JP2018/047490 JP2018047490W WO2019150850A1 WO 2019150850 A1 WO2019150850 A1 WO 2019150850A1 JP 2018047490 W JP2018047490 W JP 2018047490W WO 2019150850 A1 WO2019150850 A1 WO 2019150850A1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Definitions
- the present invention relates to a transducer including a flexible piezoelectric element and a power generation system using the transducer as a power generation device.
- Piezoelectric material generates electric charge when strain is generated by applying pressure.
- a power generation system for generating electric power by converting vibration energy such as environmental vibration into electric energy by utilizing the characteristics of the piezoelectric material has been developed.
- Patent Document 1 describes a power generation system in which a piezoelectric element is installed on a road surface of a road and a person or a vehicle passes over the piezoelectric element to generate power.
- this type of power generation system it is necessary to install piezoelectric elements over a wide range and a large amount of power generation is required.
- durability against repeated deformation is required, and influence from the environment such as moisture and dust must be eliminated as much as possible.
- piezoelectric materials include ceramics such as lead zirconate titanate (PZT), polymers such as polyvinylidene fluoride (PVDF) and polylactic acid, and composites in which polymer particles are filled in a polymer matrix. .
- PZT lead zirconate titanate
- PVDF polyvinylidene fluoride
- composites in which polymer particles are filled in a polymer matrix.
- PZT lead zirconate titanate
- PVDF polymers
- polylactic acid polylactic acid
- Patent Document 2 uses a power generation body in which an electret dielectric and an electrode are partially joined to form a gap therebetween.
- a laminated power generator is described in which a plurality of the power generators are stacked and a support member is interposed between the power generators.
- the power is generated by electrostatic induction according to the change in the distance between the gap formed between the electret dielectric and the electrode, and external force is easily transmitted by the support member.
- the distance change of the gap is increased.
- Patent Document 3 describes a power generation device including a resin film having a plurality of pores, a power generation element having a pair of electrodes disposed on both sides thereof, and an elastic body laminated on the power generation element. .
- the power generation device described in Patent Document 3 by providing a plurality of pores in a resin film and pressing the resin film with an elastic body having irregularities, the deformation amount of the pores is increased and the piezoelectricity is improved. Yes.
- Patent Document 4 a piezoelectric film and an elastically deformable flat plate-like base material are alternately used as components of a power generator for a mobile body that generates power based on the relative flow of an external fluid when the mobile body moves.
- the power generation units stacked on each other are described.
- the piezoelectric film is deformed by deformation of the base material.
- FIG. 7 of Patent Document 4 describes a form in which the surface of the power generation unit is covered with a resin coating material.
- the piezoelectric element in addition to a large amount of power generation, the piezoelectric element also needs durability.
- a method for imparting durability to the piezoelectric element and eliminating the influence from the environment a method of covering the piezoelectric element with a covering material as described in FIG.
- the covering material is made of resin
- the flexibility is poor, and thus the deformation of the piezoelectric element is hindered.
- the effect is diminished by the presence of the covering material, and the effect of increasing the amount of power generation cannot be exhibited.
- the present invention has been made in view of such circumstances, and an object thereof is to provide a transducer having a large amount of generated charges and excellent durability using a flexible piezoelectric element. It is another object of the present invention to provide a power generation system having a large power generation amount and excellent durability using the transducer.
- a transducer includes a piezoelectric layer including an elastomer and piezoelectric particles, an electrode layer disposed with the piezoelectric layer interposed therebetween, and an elastic layer disposed at least on the outermost layer.
- a piezoelectric element having a piezoelectric element, and an exterior material that houses the piezoelectric element, and between the exterior material and the piezoelectric element in a direction in which the piezoelectric element expands due to pressing, a gas, a non-volatile liquid, And a buffer portion in which at least one solid having a smaller elastic modulus than that of the elastic body layer is accommodated.
- a power generation system of the present invention is characterized by including the transducer of the present invention and an electric circuit for extracting electric energy from the transducer.
- the matrix (base material) of the piezoelectric layer constituting the piezoelectric element is an elastomer, and the elastic layer is disposed on the outermost layer of the piezoelectric element. Since the piezoelectric element is flexible and can be manufactured by an extrusion method or a coating method, the area can be easily increased. Further, if a relatively flexible material is used for the exterior material, it can be placed in a place having a complicated shape such as a curved surface. An elastic layer is disposed on at least the outermost layer of the piezoelectric element. That is, the elastic body layer is disposed on the outer side in the stacking direction of the piezoelectric layer and the electrode layer.
- a buffer portion is defined between the exterior material and the piezoelectric element.
- the buffer unit accommodates at least one of a gas, a non-volatile liquid, and a solid having a smaller elastic modulus than the elastic layer.
- the buffer portion is arranged in a direction that expands when the piezoelectric element is pressed in the thickness direction.
- FIG. 1 shows a schematic cross-sectional view of an example of the transducer of the present invention.
- FIG. 1A shows a state before compression
- FIG. 1B shows a state after compression.
- the transducer 10 includes a piezoelectric element 20 and an exterior material 30.
- the exterior material 30 is made of an elastomer and has a bag shape.
- the piezoelectric element 20 is accommodated in the exterior material 30.
- a buffer portion 31 is disposed between the piezoelectric element 20 and the exterior material 30.
- the buffer portion 3 is disposed so as to surround the side surface of the piezoelectric element 20, in other words, the outer periphery.
- the buffer 31 contains air.
- the piezoelectric element 20 includes a piezoelectric layer 21, a pair of electrode layers 22a and 22b, and a pair of elastic layers 23a and 23b.
- the piezoelectric layer 21 contains an elastomer and piezoelectric particles.
- the pair of electrode layers 22a and 22b is disposed on each of both surfaces in the thickness direction with the piezoelectric layer 21 interposed therebetween.
- the elastic body layer 23a is disposed on the upper surface (outside) of the electrode layer 22a.
- the elastic body layer 23b is disposed on the lower surface (outside) of the electrode layer 22b.
- the exterior material 30 when a load is applied from above the transducer 10, the exterior material 30 is deformed so as to be recessed downward, and the elastic body layer 23a of the piezoelectric element 20 is also pressed. Stretch in the direction. Along with this, the piezoelectric layer 21 and the electrode layers 22a and 22b also expand in the surface direction. Since there is a buffer portion 31 in which air is accommodated in the direction in which the piezoelectric element 20 extends, that is, on the outer peripheral side, even if the piezoelectric element 20 bulges in the outer peripheral direction, the deformation is not easily restricted by the exterior material 30.
- the buffer portion exists between the exterior material and the piezoelectric element, even when the exterior material has poor flexibility, the expansion deformation of the piezoelectric element is not easily inhibited by the exterior material. Therefore, according to the transducer of the present invention, it is possible to realize both the effect of increasing the amount of generated charges by the elastic layer and the effect of improving the durability by the exterior material.
- the transducer of the present invention is suitable as a power generation device because the amount of power generated by the piezoelectric element is large. Moreover, since the sensitivity of the piezoelectric element is high, it is easy to detect a small load. For this reason, the transducer of the present invention is used not only as a power generator, but also as a biological information sensor for measuring a pulse rate or a respiratory rate by being directly disposed on the human skin or indirectly through clothes. Can do.
- the power generation system of the present invention includes the above-described transducer of the present invention. For this reason, the power generation amount is large and the durability is excellent. In addition, the transducer can be installed in a wide area with a large area. Therefore, the power generation system of the present invention is suitable for a system that generates power by being embedded in roads, bridges, railroad rails, and the like and pressed by a moving body passing therethrough.
- FIG.1 (a) shows the state before compression
- FIG.1 (b) shows the state after compression.
- FIG. 2 the schematic of the electric power generation system of 1st embodiment is shown.
- FIG. 3 is a sectional view in the thickness direction of the transducer constituting the power generation system.
- FIG. 4 shows a circuit diagram of the power generation system.
- the transducer is shown in a top view and is shown through the exterior material for convenience of explanation.
- the power generation system 1 includes a transducer 10 and an electric circuit 40.
- the transducer 10 is electrically connected to the electric circuit 40 via the wiring 41.
- the electric circuit 40 includes a rectifier circuit 42, a capacitor 43, a switch 44, and a load 45, as indicated by being surrounded by a one-dot chain line.
- the rectifier circuit 42 converts the AC voltage output from the transducer 10 into a DC voltage.
- the capacitor 43 stores the rectified power.
- the electric power stored in the capacitor 43 is supplied to the load 45 via the switch 44.
- electrical energy is extracted from the transducer 10 by the electrical circuit 40.
- the transducer 10 includes a piezoelectric element 20 and an exterior material 30.
- the piezoelectric element 20 has a rectangular sheet shape (indicated by solid line hatching in FIG. 2), and includes five units 24 and six elastic layers 230.
- the units 24 and the elastic body layers 230 are alternately arranged in the thickness direction (vertical direction).
- Each of the five units 24 has a piezoelectric layer and a pair of electrode layers arranged therebetween (electrode layer / piezoelectric layer / electrode layer, not shown).
- the piezoelectric layer includes an elastomer and piezoelectric particles.
- the pair of electrode layers includes an elastomer and a conductive material.
- One pair of electrode layers is disposed on each of both surfaces in the thickness direction (vertical direction) of the piezoelectric layer. That is, the piezoelectric element 20 has five piezoelectric layers, and the piezoelectric layers are stacked via the electrode layers.
- a wiring 41 is connected to each electrode layer.
- the electrode layer and the electric circuit 40 are electrically connected by wiring 41.
- the six elastic layers 230 are all made of a thermoplastic elastomer and have an elastic modulus of 19 MPa.
- the six elastic layers 230 are arranged between the upper surface of the uppermost unit 24 and the lower surface of the lowermost unit 24 (that is, the outermost layer of the piezoelectric element 20) and between the adjacent units 24.
- the exterior material 30 is composed of an upper sheet and a lower sheet, and has a bag shape by the peripheral edges of both sheets being bonded together (indicated by dotted hatching in FIG. 2). Both the upper sheet and the lower sheet are made of an elastomer having excellent durability and moisture resistance.
- the piezoelectric element 20 is accommodated in the exterior material 30.
- An insertion hole for taking out the wiring 41 connected to the transducer 10 is formed in a part of the peripheral portion of the exterior member 30.
- a buffer portion 31 is disposed between the piezoelectric element 20 and the exterior material 30.
- the buffer portion 31 is arranged so as to surround the side surface in the thickness direction of the piezoelectric element 20, in other words, the outer periphery of the piezoelectric element 20.
- the buffer 31 contains air. That is, there is a gap between the outer periphery of the piezoelectric element 20 and the exterior material 30.
- the upper and lower surfaces of the piezoelectric element 20 are in contact with the exterior member 30 but are not bonded.
- the upper and lower surfaces of the piezoelectric element 20 are not bonded to the exterior material 30. Therefore, even if the piezoelectric element 20 bulges in the outer circumferential direction, the deformation is not easily restricted by the exterior material 30. Therefore, a large amount of charge can be generated by the piezoelectric element 20.
- the piezoelectric element 20 has five units 24. For this reason, compared with the case where the unit 24 is used alone (see FIG. 1 above), the amount of generated charge is larger.
- the exterior material 30 is made of an elastomer having excellent durability and moisture resistance. Therefore, in the transducer 10, both the effect of increasing the generated charge amount by the elastic layer 230 and the effect of improving the durability by the exterior material 30 are compatible. Further, since the transducer 10 is mainly composed of an elastomer material, the transducer 10 is likely to have a large area and can be easily disposed in a place having a complicated shape such as a curved surface.
- FIG. 5 shows a transparent top view of the transducer of this embodiment.
- FIG. 5 corresponds to the transducer shown in FIG. In FIG. 5, members corresponding to those in FIG.
- the transducer 10 includes five piezoelectric elements 20 and an exterior material 30.
- Each of the five piezoelectric elements 20 has a strip shape (indicated by solid line hatching in FIG. 5).
- the five piezoelectric elements 20 are arranged in parallel with each other at a predetermined interval in the short direction.
- the outer periphery of each piezoelectric element 20 is surrounded by an exterior material 30 with a buffer portion 31 therebetween. That is, the exterior material 30 is stuck not only at the peripheral portion but also between the adjacent piezoelectric elements 20 (indicated by dotted hatching in FIG. 5).
- the buffer portion 31 is disposed between the piezoelectric element 20 and the exterior material 30, that is, so as to surround the outer periphery of the piezoelectric element 20.
- the buffer 31 contains air.
- the configuration of each piezoelectric element 20 is the same as the configuration of the piezoelectric element 20 of the first embodiment (see FIG. 3 above).
- a plurality of piezoelectric elements 20 are arranged in the exterior material 30.
- the freedom degree of a shape improves, for example, it is possible to generate electricity only at a place where it is desired to generate electricity, or to thin out a piezoelectric element according to the application, thereby improving flexibility.
- the transducer 10 of the present embodiment is used as a sensor, it becomes easy to specify the place where the load is applied.
- FIG. 6 is a transparent top view of the transducer of this embodiment.
- FIG. 6 corresponds to FIG. In FIG. 6, members corresponding to those in FIG.
- the transducer 10 includes five piezoelectric elements 20 and an exterior material 30.
- Each of the five piezoelectric elements 20 has a band shape and is different only in length (indicated by solid hatching in FIG. 5). That is, the three left piezoelectric elements 20 as viewed from above are shorter than the two right piezoelectric elements 20.
- the five piezoelectric elements 20 are arranged in parallel with each other at a predetermined interval in the short direction.
- the outer periphery of each piezoelectric element 20 is surrounded by an exterior material 30 with a buffer portion 31 therebetween.
- FIG. 7 shows a transparent top view of the transducer of this embodiment.
- FIG. 7 corresponds to FIG. In FIG. 7, members corresponding to those in FIG.
- the transducer 10 includes ten piezoelectric elements 200 to 209 and an exterior material 30.
- Each of the ten piezoelectric elements 200 to 209 has a strip shape (indicated by solid line hatching in FIG. 7).
- the ten piezoelectric elements 200 to 209 are arranged in two upper and lower two layers.
- the upper five piezoelectric elements 200 to 204 extend in the front-rear direction, and are arranged in parallel to each other at a predetermined interval in the left-right direction.
- the lower five piezoelectric elements 205 to 209 extend in the left-right direction, and are arranged in parallel to each other at a predetermined interval in the front-rear direction.
- the upper five piezoelectric elements 200 to 204 and the lower five piezoelectric elements 205 to 209 are arranged in a lattice pattern.
- the electrode layers in the piezoelectric elements 200 to 209 and the electric circuit 40 are electrically connected by wirings 410 and 411.
- the exterior material 30 is partially attached not only to the peripheral portion but also to a section where the piezoelectric elements 200 to 209 are not arranged (indicated by dotted line hatching in FIG. 7).
- the buffer portion 31 is disposed between the piezoelectric elements 200 to 209 and the exterior material 30.
- the buffer 31 contains air.
- the configuration of each of the piezoelectric elements 200 to 209 is the same as the configuration of the piezoelectric element 20 of the first embodiment (see FIG. 3 above).
- a plurality of piezoelectric elements 20 are arranged in two stages in the exterior material 30. Thereby, power generation amount becomes larger. In addition, it is possible to improve the flexibility by generating power only at a place where power generation is desired or by thinning out the piezoelectric element according to the application. In addition, when the transducer 10 of the present embodiment is used as a sensor, it is possible to increase the detection area in addition to facilitating identification of a place where a load is applied.
- FIG. 8 shows a radial cross-sectional view of the transducer of this embodiment.
- members corresponding to those in FIG. 8 members corresponding to those in FIG.
- the transducer 10 is obtained by winding the sheet-like transducer 10 of the first embodiment toward one end of the sheet-like transducer 10 toward the other end.
- the piezoelectric element 20 has a spiral shape in which six layers are stacked in the radial direction. According to the present embodiment, it is possible to realize a form in which a large number of piezoelectric elements 20 are stacked by simply manufacturing the transducer 10 in a sheet shape as in the first embodiment and winding it. Therefore, when a load is applied from the radial direction of the transducer 10, a larger amount of power generation can be obtained. Further, according to the present embodiment, the present invention can be applied to a place where it is difficult to arrange a sheet-like transducer.
- transducer and the power generation system of the present invention are not limited to the above-described embodiments, and various modifications and improvements that can be made by those skilled in the art without departing from the gist of the present invention. It can be implemented in the form.
- the power generation system is configured from one transducer and an electric circuit, but a power generation system may be configured by connecting a plurality of stacked transducers to the electric circuit.
- the transducer is used as a power generation device, but the transducer of the present invention may be used as a sensor.
- a small load is easy to detect because the S / N ratio is high.
- the piezoelectric element includes a piezoelectric layer including an elastomer and piezoelectric particles, an electrode layer disposed with the piezoelectric layer interposed therebetween, and an elastic layer disposed at least on the outermost layer.
- the number of piezoelectric layers may be one layer or two or more layers. From the viewpoint of increasing the amount of power generation, it is desirable that a plurality of, for example, several tens to several hundreds of piezoelectric layers are laminated via the electrode layers.
- the elastic body layer may be disposed at least in the outermost layer. However, as shown in the above embodiment, when a plurality of piezoelectric layers are stacked via electrode layers, they may be disposed between adjacent electrode layers in the middle of the stacked body.
- an elastic body layer may be disposed between units including a piezoelectric layer and an electrode layer sandwiching the piezoelectric layer.
- the power generation amount can be further increased.
- an embodiment is shown in which one piezoelectric element is wound and used together with an exterior material. However, only a piezoelectric element may be wound and accommodated in a tubular exterior material.
- piezoelectric layer As the elastomer constituting the piezoelectric layer, one or more selected from crosslinked rubber and thermoplastic elastomer may be used. Relatively small and flexible elastomers such as urethane rubber, silicone rubber, nitrile rubber (NBR), hydrogenated nitrile rubber (H-NBR), acrylic rubber, natural rubber, isoprene rubber, ethylene-propylene-diene rubber (EPDM) Ethylene-vinyl acetate copolymer, ethylene-vinyl acetate-acrylic ester copolymer, butyl rubber, styrene-butadiene rubber, fluororubber, epichlorohydrin rubber, chloroprene rubber, chlorinated polyethylene, chlorosulfonated polyethylene, and the like.
- urethane rubber silicone rubber, nitrile rubber (NBR), hydrogenated nitrile rubber (H-NBR), acrylic rubber, natural rubber, isoprene rubber, ethylene
- an elastomer modified by introducing a functional group or the like may be used.
- the modified elastomer include carboxyl group-modified nitrile rubber (X-NBR), carboxyl group-modified hydrogenated nitrile rubber (XH-NBR), and the like.
- the generated charge amount (C) generated when a load is applied to the piezoelectric layer is expressed by the following equation (a) by the piezoelectric strain constant (C / N) of the piezoelectric layer and the applied load (N).
- Generated charge amount piezoelectric strain constant ⁇ load (a)
- Piezoelectric particles are particles of a compound having piezoelectricity.
- Ferroelectric materials having a perovskite crystal structure are known as piezoelectric compounds, for example, barium titanate, strontium titanate, potassium niobate, sodium niobate, lithium niobate, potassium sodium niobate , Potassium sodium niobate, lead zirconate titanate (PZT), barium strontium titanate (BST), bismuth lanthanum titanate (BLT), bismuth strontium tantalate (SBT), and the like.
- PZT lead zirconate titanate
- BST barium strontium titanate
- BLT bismuth lanthanum titanate
- SBT bismuth strontium tantalate
- the particle size of the piezoelectric particles is not particularly limited.
- a large particle size piezoelectric particle and a small particle size piezoelectric particle can be mixed in the elastomer.
- piezoelectric particles having a small particle diameter enter between piezoelectric particles having a large particle diameter, and pressure is easily transmitted to the piezoelectric particles.
- the piezoelectric strain constant of the piezoelectric layer is increased, and the amount of generated charges can be increased.
- the blending amount of the piezoelectric particles may be determined by taking into account the flexibility of the piezoelectric layer, and thus the piezoelectric element, and the piezoelectric performance of the piezoelectric layer. When the amount of the piezoelectric particles is increased, the piezoelectric performance of the piezoelectric layer is improved, but the flexibility is lowered. Therefore, it is desirable to adjust the blending amount of the piezoelectric particles so that desired flexibility can be realized in the combination of the elastomer and the piezoelectric particles to be used.
- the piezoelectric layer may contain reinforcing particles having a relative dielectric constant smaller than that of the piezoelectric particles, in addition to the elastomer and the piezoelectric particles.
- the relative permittivity of the reinforcing particles is preferably 100 or less, and more preferably 30 or less, on condition that the relative permittivity of the reinforcement particles is smaller than that of the piezoelectric particles.
- the structure in which piezoelectric particles having a large relative dielectric constant are connected is easy to transmit external force to the piezoelectric particles, an improvement in the piezoelectric strain constant of the formula (a) described above can be expected.
- the piezoelectric particles having a large relative dielectric constant are connected, the dielectric constant of the entire piezoelectric layer is increased.
- both the piezoelectric particles and the reinforcing particles are included in the piezoelectric layer, the connection between the piezoelectric particles having a large relative dielectric constant is divided by the intervening reinforcing particles having a smaller relative dielectric constant. Thereby, the raise of the dielectric constant as the whole piezoelectric layer can be suppressed.
- the piezoelectric strain constant can be maintained. That is, when the reinforcing particles are included in the piezoelectric layer, the dielectric constant of the entire piezoelectric layer can be made smaller than when only the piezoelectric particles are included while maintaining the piezoelectric strain constant. Therefore, a large amount of generated charge can be obtained by the above-described formula (a).
- the reinforcing particles particles having a large electric resistance are desirable.
- the electrical resistance of the reinforcing particles is large, the dielectric breakdown strength of the piezoelectric layer is increased. Thereby, in the polarization process of the piezoelectric layer which will be described later, the processing time can be shortened by applying a high electric field. In addition, since the number of piezoelectric elements that are destroyed during the polarization process can be reduced, productivity is improved.
- the reinforcing particles are chemically bonded to the elastomer.
- a network of reinforcing particles is formed in the elastomer, impurity ions obtained by ionizing a crosslinking agent, an additive, moisture in the air, and the like are difficult to move, and the electric resistance of the piezoelectric layer is increased.
- the chemical bond between the reinforcing particles and the elastomer can be realized, for example, by surface-treating the reinforcing particles.
- a surface treatment agent having a functional group capable of reacting with an elastomer polymer is reacted with the reinforcing particles in advance, and the reinforcing particles are mixed with the elastomer polymer.
- generating a hydroxyl group etc. is mentioned.
- the reinforcing particles are chemically bonded to the elastomer, the reinforcing particles are unlikely to be displaced even if the expansion and contraction are repeated.
- the reinforcing particles are difficult to peel off from the elastomer, fluctuations from the initial values of physical properties and output are reduced. Therefore, the output is stabilized and the sag resistance of the piezoelectric layer is improved.
- the elongation at break of the piezoelectric layer is increased, it is possible to suppress a decrease in piezoelectric performance due to local fracture during expansion. As a result, high piezoelectric performance can be maintained even in an extended state.
- the type of reinforcing particles is not particularly limited.
- particles such as oxides such as titanium dioxide, silica, and barium titanate, rubber, and resin can be used.
- the applied load may be attenuated by the resin particles and may not be transmitted to the piezoelectric particles.
- the reinforcing particles are more elastic than the matrix elastomer. It is better to use large particles.
- metal oxide particles such as titanium dioxide are preferable because they have a small relative dielectric constant and a large effect of improving dielectric breakdown resistance.
- a sol-gel method is preferable because particles having low crystallinity and a low relative dielectric constant can be obtained.
- the piezoelectric layer is manufactured by curing a composition obtained by adding a powder of a piezoelectric particle or a crosslinking agent to an elastomer polymer under predetermined conditions. Thereafter, the piezoelectric layer is subjected to polarization treatment. That is, a voltage is applied to the piezoelectric layer to align the polarization direction of the piezoelectric particles in a predetermined direction.
- the electrode layer may be formed on the entire surface of the piezoelectric layer, or may be formed on only a part.
- the electrode layer is desirably deformable following the piezoelectric layer.
- the flexible electrode layer can be formed from, for example, a conductive material in which a conductive material is blended with a binder, conductive fibers, or the like.
- the binder it is desirable to use at least one selected from elastomers, that is, crosslinked rubber and thermoplastic elastomer.
- Examples of the elastomer having a relatively small elastic modulus and good adhesion to the piezoelectric layer include acrylic rubber, silicone rubber, urethane rubber, urea rubber, fluorine rubber, and H-NBR.
- the type of conductive material is not particularly limited.
- electroconductive carbon materials such as metal nanowire which consists of metal carbide particles, silver, gold
- particles coated with a metal such as silver-coated copper particles may be used.
- the conductive material one of these can be used alone, or two or more can be mixed and used.
- the blending amount of the conductive material may be appropriately determined so that the electrode layer can achieve a desired volume resistivity. When the amount of the conductive material is increased, the volume resistivity of the electrode layer can be reduced, but the flexibility is lowered.
- the electrode layer may contain a crosslinking agent, a crosslinking accelerator, a dispersant, a reinforcing material, a plasticizer, an antiaging agent, a coloring agent, and the like as other components.
- a conductive paint is prepared by adding a conductive material and, if necessary, an additive to a polymer solution obtained by dissolving the polymer for the elastomer in a solvent, and stirring and mixing. Can do.
- the electrode layer may be formed by directly applying the prepared conductive paint to one surface of the piezoelectric layer.
- an electrode layer may be formed by applying a conductive paint to the releasable film, and the formed electrode layer may be transferred to one surface of the piezoelectric layer.
- the volume resistivity of the electrode layer is desirably 100 ⁇ ⁇ cm or less both in the natural state and in the stretched state from the stretched state to 10% in the uniaxial direction. More preferably, it is 10 ⁇ ⁇ cm or less. This is because when the electrical resistance of the electrode layer is large or the electrical resistance is increased due to stretching, the electromotive voltage generated in the piezoelectric layer drops at the electrode layer, and the output voltage becomes small.
- the natural state means a state in which a load is not applied and is not deformed (no load state).
- the state of 10% extension in the uniaxial direction means a state in which the length in the uniaxial direction is 1.1 times the natural state.
- the volume resistivity of the electrode is measured in both a natural state and a state in which the electrode is stretched by 10% in the uniaxial direction. If any volume resistivity is 100 ⁇ ⁇ cm or less, the “natural state and then the uniaxial direction” It is determined that the condition that the volume resistivity of the stretched state until reaching the stretched state by 10% is 100 ⁇ ⁇ cm or less ”is satisfied.
- the piezoelectric element in this invention can expand
- the breaking elongation of a unit composed of a piezoelectric layer and a pair of electrode layers disposed therebetween is 10% or more. It is desirable. More preferably, it is 30% or more.
- elongation at break is a value of elongation at break measured by a tensile test specified in JIS K6251: 2010 regardless of the form of a single layer, a unit, or the like. The tensile test is performed using a dumbbell-shaped No. 5 test piece and a tensile speed of 100 mm / min.
- the elastic layer may be arranged so as to cover the outermost electrode layer, for example.
- the elastic body layer expands in the surface direction, whereby a shearing force can be applied to the piezoelectric layer.
- a tensile force in the surface direction is applied to the piezoelectric layer, and the distortion in the surface direction of the piezoelectric layer increases.
- the strain in the surface direction of the piezoelectric layer increases, the amount of generated charge increases. As a result, the sensitivity of the piezoelectric element is improved and the amount of power generation is increased.
- the elastic modulus of the elastic body layer is desirably 50 MPa or less.
- the breaking elongation of the elastic layer is larger than the breaking elongation of the piezoelectric layer.
- the elastic modulus is a value calculated from a stress-elongation curve obtained by a tensile test specified in JIS K7127: 1999. The tensile test is performed using a test piece type 2 test piece and a tensile speed of 100 mm / min.
- the elastic layer is made of an elastomer.
- the elastic layer may be one or more selected from a crosslinked rubber and a thermoplastic elastomer.
- Elastomers with relatively low elastic modulus and good adhesion to the electrode layer include natural rubber, isoprene rubber, butyl rubber, acrylic rubber, silicone rubber, urethane rubber, urea rubber, fluoro rubber, NBR, thermoplastic polyurethane, heat Examples thereof include plastic polyester.
- thermoplastic polyurethane can be firmly bonded to the electrode layer and the piezoelectric layer by being heated and temporarily melted. By firmly adhering the elastic body layer, a decrease in sensitivity can be reduced when the elastic layer is stretched by repeated strain.
- the Poisson's ratio of the elastomer is about 0.5.
- the force applied in the thickness direction acts as the force in the surface direction as it is.
- the greater the thickness of the elastic layer the greater the effect of increasing the distortion of the piezoelectric layer and the greater the effect of increasing the amount of generated charge.
- the thickness per elastic layer is preferably 5 ⁇ m or more and 1000 ⁇ m or less, for example.
- ⁇ Exterior material> The characteristics required of the exterior material that accommodates the piezoelectric element include durability against repeated loads, water resistance, moisture resistance, flame resistance, and the like, and varies depending on the application of the transducer. Therefore, the material of the exterior material may be appropriately determined according to the use of the transducer.
- butyl rubber silicone rubber, NBR, H-NBR, acrylic rubber, natural rubber, isoprene rubber, EPDM and the like are suitable as the material for the exterior material.
- butyl rubber include regular butyl rubber, chlorinated butyl rubber, and brominated butyl rubber. One kind of these may be used alone, or two or more kinds may be mixed and used.
- part or all of the surface of the piezoelectric element may be bonded to the exterior material.
- the exterior material may be one that seals the inside, or may have a communication hole through which the contents of the buffer portion can move between the inside and the outside.
- a buffer portion that stores at least one of gas, a non-volatile liquid, and a solid having a smaller elastic modulus than the elastic layer.
- the gas include air and inert gases such as nitrogen and argon.
- the non-volatile liquid include process oil and ionic liquid.
- the solid include elastomers and foams having a smaller elastic modulus than the elastic layer.
- a piezoelectric layer, an electrode layer, an elastic body layer, and an exterior material were manufactured, and these were appropriately combined to manufacture a transducer, and its sensitivity, generated charge amount, and durability were evaluated.
- piezoelectric layer 1 First, 100 parts by mass of a carboxyl group-modified hydrogenated nitrile rubber polymer (“Terban (registered trademark) XT8889” manufactured by LANXESS) as an elastomer was dissolved in acetylacetone to prepare a polymer solution. Next, a powder of potassium sodium niobate ((K 0.5 Na 0.5 Nb 1.0 ) O 3 ) as piezoelectric particles (d50% particle diameter (median diameter): 3 ⁇ m) 385 is added to the prepared polymer solution. A part by mass was added and kneaded.
- Teban registered trademark
- XT8889 carboxyl group-modified hydrogenated nitrile rubber polymer
- the kneaded material was repeatedly passed through three rolls five times to obtain a slurry. Then, 5 parts by mass of tetrakis (2-ethylhexyloxy) titanium as a cross-linking agent was added to the obtained slurry and kneaded with an air stirrer, and then the slurry was applied onto a substrate by a bar coating method. This was heated at 150 ° C. for 1 hour to produce a piezoelectric layer 1 having a thickness of 0.06 mm (60 ⁇ m). The content of the piezoelectric particles in the piezoelectric layer 1 is 42% by volume when the elastomer is 100% by volume. The breaking elongation of the piezoelectric layer 1 was 320%.
- the used potassium sodium niobate powder was produced by the following steps.
- First mixing step K 2 CO 3 , Na 2 CO 3 , and Nb 2 O 5 powder were used as raw materials. These powders were weighed based on the composition of the desired sintered body (K 0.5 Na 0.5 Nb 1.0 ) O 3 and then wet mixed in anhydrous acetone for 16 hours. The obtained mixed powder was evaporated and further dried in an oven to volatilize acetone.
- (2) Pre-baking process The mixed powder after volatilizing acetone was put in the alumina crucible, and the crucible was put in a large crucible once. The inner crucible was placed face down so as to cover the mixed powder.
- This double crucible was put in an electric furnace and pre-baked at 910 ° C. for 10 hours.
- Second mixing step After the obtained calcined product was pulverized into a powder in a mortar, this powder was wet mixed in anhydrous acetone for 16 hours. The obtained mixed powder was evaporated and further dried in an oven to volatilize acetone.
- Main firing step The mixed powder after volatilizing acetone is put into a double crucible in the same manner as in (2), followed by firing at 150 ° C for 1 hour, 550 ° C for 3 hours, and 1098 ° C for 2 hours. went.
- Pulverization process The obtained fired product was pulverized into single particles by a ball mill.
- piezoelectric layer 2 A piezoelectric layer 2 was produced in the same manner as the piezoelectric layer 1 except that the blending amount of the piezoelectric particles with respect to the elastomer was changed to 840 parts by mass.
- the piezoelectric particle content in the piezoelectric layer 2 is 67.7% by volume when the elastomer is 100% by volume.
- the elongation at break of the piezoelectric layer 2 was 5%.
- Electrode layer 1 ⁇ Manufacture of electrode layer>
- three monomers of ethyl acrylate (EA), acrylonitrile (AN), and allyl glycidyl ether (AGE) were subjected to suspension polymerization to produce a glycidyl ether group-modified acrylic rubber polymer as an elastomer.
- the blending ratio of the monomers was 96 mass% EA, 2 mass% AN, and 2 mass% AGE.
- 68 parts by mass of a glycidyl ether group-modified acrylic rubber polymer is dissolved in butyl cellosolve acetate.
- a conductive material 35 parts by mass of a conductive material, 25 parts by mass of a dispersant, 6 parts by mass of a crosslinking agent, and crosslinking acceleration are added.
- a liquid composition was prepared by adding 1 part by mass of an agent (details of raw materials such as a conductive material will be described later). Subsequently, the liquid composition was pulverized by a wet jet mill (“Nanovaita (registered trademark)” manufactured by Yoshida Kikai Kogyo Co., Ltd.). The pulverization process was performed a total of 6 times by the pass operation (6-pass process).
- the first pass was performed with a straight nozzle (nozzle diameter 170 ⁇ m) and a processing pressure of 90 MPa, and the second and subsequent passes were performed with a cross-type nozzle (nozzle diameter 170 ⁇ m) and a processing pressure of 130 MPa.
- the liquid composition after the pulverization treatment was applied to a release-treated polyethylene terephthalate (PET) film by a bar coating method. This was heated at 150 ° C. for 2 hours to produce an electrode layer 1 having a thickness of 0.015 mm (15 ⁇ m).
- the breaking elongation of the electrode layer 1 was 320%, the volume resistivity in the natural state was 0.05 ⁇ ⁇ cm, and the volume resistivity in the 10% stretched state was 0.1 ⁇ ⁇ cm.
- the volume resistivity of the electrode layer 1 in the natural state and 10% stretched state was measured with a resistivity meter (“Loresta (registered trademark) GP” manufactured by Mitsubishi Chemical Analytech Co., Ltd.) (hereinafter, the same applies to the electrode layer 2). ).
- Conductive material Thin-layer graphite, “iGurafen- ⁇ ” manufactured by ITEC.
- Dispersant High molecular weight polyester acid amidoamine salt, Enomoto Kasei Co., Ltd. “Disparon (registered trademark) DA7301”.
- Cross-linking agent amino-terminated butadiene-acrylonitrile copolymer, CVC Thermoset Specialties Ltd. “ATBN1300 ⁇ 16”.
- Cross-linking accelerator zinc complex, KING INDUSTRIES, INC “XK-614”.
- Electrode layer 2 A conductive silver paste (“DW250-H-5” manufactured by Toyobo Co., Ltd.) was applied to the release-treated PET film by a bar coating method. This was heated at 150 ° C. for 1 hour to produce an electrode layer 2 having a thickness of 0.015 mm (15 ⁇ m). The elongation at break of the electrode layer 2 was 4%, the volume resistivity in the natural state was 0.0002 ⁇ ⁇ cm, and the volume resistivity in the 10% stretched state could not be measured due to the break.
- DW250-H-5 manufactured by Toyobo Co., Ltd.
- Elastic body layer 1 A thermoplastic polyether-based polyurethane sheet (“Esmer (registered trademark) URS” manufactured by Nippon Matai Co., Ltd., thickness 0.25 mm) was used as the elastic layer 1.
- the elastic body layer 1 had an elongation at break of 600% and an elastic modulus of 23 MPa.
- Elastic body layer 2 A thermoplastic polyester elastomer (“Hytrel (registered trademark) 3046” manufactured by Toray DuPont Co., Ltd.) was molded into a sheet shape having a thickness of 0.18 mm (180 ⁇ m) to obtain an elastic body layer 2.
- the elastic body layer 2 had an elongation at break of 550% and an elastic modulus of 19 MPa.
- Elastic body layer 3 A thermoplastic polyester elastomer (“Hytrel 4047” manufactured by Toray DuPont Co., Ltd.) was molded into a sheet shape having a thickness of 0.18 mm (180 ⁇ m) to obtain an elastic body layer 3.
- the elastic body layer 3 had an elongation at break of 500% and an elastic modulus of 46 MPa.
- Elastic body layer 4 A polyester film (“Diafoil (registered trademark)” manufactured by Mitsubishi Chemical Corporation, thickness 0.1 mm (100 ⁇ m)) was used as the elastic body layer 4.
- the elastic body layer 4 had an elongation at break of 90% and an elastic modulus of 1500 MPa.
- HT1066 chlorinated butyl rubber
- JSR butyl 365 regular butyl rubber
- polyacrylate powder ( 150 parts by mass “Aquaric (registered trademark) CS-S6” manufactured by Nippon Shokubai Co., Ltd., an average particle size of 15 ⁇ m), 5 parts by mass of zinc oxide as a crosslinking assistant, and “Tacchiroll” manufactured by Taoka Chemical Industry Co., Ltd.
- a laminated body was manufactured by appropriately combining the manufactured piezoelectric layer, electrode layer, and elastic body layer, and was housed in an exterior material to manufacture a transducer.
- the laminate was manufactured as follows. First, electrode layers were respectively arranged on two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric layer, and the piezoelectric layer and the electrode layer were pressure-bonded using a laminator (“LPD3223” manufactured by Fuji Pla Co., Ltd.). Next, the elastic layer is laminated on the upper electrode layer, or both upper and lower electrode layers, and the elastic layer is softened by applying an iron to the surface of the elastic layer to soften the elastic layer. I let you.
- the structure of the laminated body is “elastic layer / unit (electrode layer / piezoelectric layer / electrode layer)” (hereinafter referred to as “first laminated body”), and in the latter case, the structure of the laminated body.
- first laminated body the structure of the laminated body.
- second laminate the structure of the laminated body.
- All the laminates have a square thin plate shape with a length of 30 mm and a width of 30 mm.
- a direct current power source was connected to the electrode layer of the laminate, and an electric field of 20 V / ⁇ m was applied to the piezoelectric layer for 5 minutes to perform polarization treatment. Then, the aging process was performed by holding at 120 ° C. for 30 minutes.
- Example 1 A transducer was manufactured by combining the first laminated body using the piezoelectric layer 1, the electrode layer 1, and the elastic body layer 1 with the second laminated body. First, four first laminates were stacked, and one second stack was further stacked to manufacture a piezoelectric element composed of a total of five laminates. The structure of the manufactured piezoelectric element (laminated structure of each layer) is the same as that of the transducer of the first embodiment (see FIG. 3 above).
- a square-shaped exterior material sheet having a length of 40 mm and a width of 40 mm was placed on two surfaces (upper surface and lower surface) of the piezoelectric element in the thickness direction so that the centers of the surfaces coincided. And the peripheral part from 1 mm to 2 mm from the outer periphery of an exterior material sheet
- seat was welded with the techno impulse clip sealer Z1.
- a frame-shaped buffer portion having a width of 4 mm was defined between the piezoelectric element and the exterior material sheet in the diameter expansion direction of the piezoelectric element. Air is accommodated in the buffer portion.
- the manufactured transducer is referred to as the transducer of Example 1.
- Example 2 A piezoelectric element is composed only of the second laminated body (elastic body layer 1 / electrode layer 1 / piezoelectric layer 1 / electrode layer 1 / elastic body layer 1) using the piezoelectric layer 1, the electrode layer 1, and the elastic body layer 1. Except for this point, a transducer was manufactured in the same manner as in Example 1. The manufactured transducer is referred to as the transducer of Example 1.
- Example 3 A transducer was manufactured in the same manner as in Example 1 except that an elastic body was accommodated in the buffer portion instead of air.
- a silicone rubber sheet (“KE1950-10” manufactured by Shin-Etsu Chemical Co., Ltd., elastic modulus 0.4 MPa) was used as the elastic body.
- the method of accommodating the elastic body in the buffer portion is as follows. First, a square silicone rubber sheet having a length of 35 mm and a width of 35 mm was prepared, and a central portion thereof was cut into a square shape having a length of 30 mm and a width of 30 mm.
- a piezoelectric element was disposed in the cut-out portion of the silicone rubber sheet, and the outer periphery of the piezoelectric element was surrounded by silicone rubber.
- square-shaped exterior material sheets each having a length of 40 mm and a width of 40 mm were arranged on two surfaces in the thickness direction of the piezoelectric element so that the centers of the surfaces coincided with each other.
- seat was welded with the techno impulse clip sealer Z1.
- a frame-shaped buffer portion having a width of 5 mm in which silicone rubber was accommodated was defined between the piezoelectric element and the exterior material sheet in the diameter expansion direction of the piezoelectric element.
- the manufactured transducer is referred to as the transducer of Example 3.
- Example 4 A transducer was manufactured in the same manner as in Example 1 except that the elastic layer of the piezoelectric element was changed to the elastic layer 2. The manufactured transducer is referred to as the transducer of Example 4.
- Example 5 A transducer was manufactured in the same manner as in Example 1 except that the elastic layer of the piezoelectric element was changed to the elastic layer 3. The manufactured transducer is referred to as the transducer of Example 5.
- Example 6 A transducer was manufactured in the same manner as in Example 1 except that the entire two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric element were bonded to the exterior material.
- a square-shaped exterior material sheet having a length of 40 mm and a width of 40 mm is attached to a square-shaped adhesive sheet having a length of 30 mm and a width of 30 mm (“Elfan (registered trademark) UH370” manufactured by Nippon Matai Co., Ltd.) on each surface. They were pasted so that the centers coincided.
- the laminated sheets were arranged one by one on two surfaces in the thickness direction of the piezoelectric element so that the centers of the surfaces coincided with each other.
- the piezoelectric element and the exterior material were adhere
- the manufactured transducer is referred to as the transducer of Example 6.
- Example 7 A transducer was manufactured in the same manner as in Example 6 except that the size of the adhesive sheet was changed to 5 mm in length and 5 mm in width. The manufactured transducer is referred to as the transducer of Example 7. In the transducer of Example 7, a part (5 mm square) of two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric element is bonded to the exterior material.
- Example 1 A transducer was manufactured in the same manner as in Example 6 except that the size of the adhesive sheet was changed to 40 mm in length and 40 mm in width as the size of the exterior material.
- the manufactured transducer is referred to as the transducer of Comparative Example 1.
- the entire two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric element are bonded to the exterior material.
- the buffer portion is partitioned between the piezoelectric element and the exterior material sheet in the diameter expansion direction of the piezoelectric element.
- Example 2 A transducer was manufactured in the same manner as in Example 3 except that the type of the elastic body was changed to a polyester film ("Diafoil (registered trademark)" manufactured by Mitsubishi Chemical Corporation, elastic modulus 1500 MPa). The manufactured transducer is referred to as the transducer of Comparative Example 2.
- Example 3 A transducer was manufactured in the same manner as in Example 1 except that no exterior material was used. The manufactured transducer is referred to as the transducer of Comparative Example 3. The transducer of Comparative Example 3 is composed of only piezoelectric elements composed of a total of five laminated bodies.
- Example 1 A transducer was manufactured in the same manner as in Example 1 except that the piezoelectric layer and the electrode layer of the piezoelectric element were changed to the piezoelectric layer 2 and the electrode layer 2.
- the manufactured transducer is referred to as the transducer of Reference Example 1.
- Table 1 shows the configuration and evaluation results of the manufactured transducer.
- evaluation methods of unit elongation at break, volume resistivity of the electrode layer, amount of generated charges, sensitivity, and durability are as follows.
- the transducer was installed in a fatigue endurance tester (“MMT-101N” manufactured by Shimadzu Corporation), and a sine wave (frequency 1 Hz) with a compression load of 6 N was applied with a cylindrical jig having a diameter of 10 mm.
- MMT-101N manufactured by Shimadzu Corporation
- a sine wave frequency 1 Hz
- 6 N a compression load of 6 N
- the amount of charge generated at that time was measured using a charge amplifier (“NEXUS Charge Amplifier type 2692” manufactured by Brüel & Kj ⁇ r) and an oscilloscope (Yokogawa Electric Corporation “DLM2022”).
- the transducer was installed in a fatigue endurance tester (same as above), and sine waves (frequency 1 Hz) having a compression load of 2N, 4N, and 6N were sequentially applied with a cylindrical jig having a diameter of 10 mm. The amount of charge generated at that time was measured using a charge amplifier (same as above) and an oscilloscope (same as above). Then, the generated charge amount measured for each compressive load was divided by the added stress, and the average value was calculated to obtain the sensitivity of the transducer.
- the transducer was allowed to stand for 3000 hours in an environment of a temperature of 60 ° C. and a humidity of 90%. Then, the transducer was installed in a fatigue endurance tester (same as above), and a sine wave (frequency 10 Hz) with a compression load of 10 N was applied 100,000 times with a cylindrical jig having a diameter of 10 mm, and then a constant displacement vibration 5 in the tensile direction. % Sin wave (frequency 10 Hz) was applied 10,000 times. Thereafter, the sensitivity and the generated charge amount were measured by the method described above. Durability is good when both sensitivity and generated charge are 80% or more of the value before the fatigue endurance test (indicated by a circle in Table 1), and durability is less than 80%. It was evaluated as defective (indicated by x in Table 1).
- the generated charge amount was as large as 10 ⁇ 9 C order, and the sensitivity was good. Since the generated charge amount is large, it can be seen that the power generation amount is large. Further, the durability after repeated displacement was at a satisfactory level. On the other hand, according to the transducer of Comparative Example 1 having no buffer portion, the amount of generated charges was as small as 10 ⁇ 10 C order, and the sensitivity was greatly reduced. Further, in the transducer of Comparative Example 2 in which a solid (polyester film) having a larger elastic modulus than the elastic layer is disposed in the buffer portion, the generated charge amount is small and the sensitivity is low.
- the generated charge amount was large and the sensitivity was good, but the durability was deteriorated.
- the transducer of Reference Example 1 since the piezoelectric layer and the electrode layer were poor in flexibility, the volume resistivity of the electrode layer and the breaking elongation of the unit were both poor. For this reason, although the amount of generated charges was large and the sensitivity was satisfactory, the durability deteriorated.
- the transducer of Reference Example 2 uses a polyester film having a very large elastic modulus for the elastic layer, the effect of increasing the distortion of the piezoelectric layer by the elastic layer is not exhibited, and a desired generated charge amount and sensitivity can be obtained. There wasn't.
- the transducer of the present invention Since the transducer of the present invention has a large amount of power generation and excellent durability, it is useful for a power generation device that is embedded in a road and generates power by vibration from a person or a car. Moreover, since the transducer of the present invention is highly sensitive and can detect a small load, it is suitable as a biological information sensor for measuring a respiratory state and a heart rate. In addition, it is suitable as a pressure sensor for robots (including industrial use and communication use), medical use, nursing care, health use, sports equipment, and automobiles.
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Abstract
Description
本発明は、柔軟な圧電素子を備えるトランスデューサ、およびそれを発電装置として用いた発電システムに関する。 The present invention relates to a transducer including a flexible piezoelectric element and a power generation system using the transducer as a power generation device.
圧電材料は、圧力を加えて歪みが生じると電荷を発生する。この圧電材料の特性を生かして、環境振動などの振動エネルギーを電気エネルギーに変換して発電する発電システムが開発されている。例えば特許文献1には、道路の路面に圧電素子を設置して、その上を人や車両が通過することにより発電する発電システムが記載されている。この種の発電システムにおいては、圧電素子を広範囲に設置する必要があるし、発電量が大きいことが要求される。また、圧電素子においては、繰り返しの変形に対する耐久性が必要になると共に、水分や粉塵などの環境からの影響を極力排除しなければならない。
Piezoelectric material generates electric charge when strain is generated by applying pressure. A power generation system for generating electric power by converting vibration energy such as environmental vibration into electric energy by utilizing the characteristics of the piezoelectric material has been developed. For example,
圧電材料としては、チタン酸ジルコン酸鉛(PZT)などのセラミックス、ポリフッ化ビニリデン(PVDF)やポリ乳酸などの高分子、高分子マトリックス中に圧電粒子が充填された複合体などが知られている。このうち、セラミックスを用いると、面積を大きくすることは容易ではない。高分子を用いると、大面積にすることは容易になるが、発電量が小さいという問題がある。特に、樹脂の場合は、柔軟性に乏しいため、曲面などに設置しにくく耐久性にも問題がある。 Known piezoelectric materials include ceramics such as lead zirconate titanate (PZT), polymers such as polyvinylidene fluoride (PVDF) and polylactic acid, and composites in which polymer particles are filled in a polymer matrix. . Among these, when ceramics are used, it is not easy to increase the area. When a polymer is used, it is easy to increase the area, but there is a problem that the amount of power generation is small. In particular, in the case of resin, since it is poor in flexibility, it is difficult to install on a curved surface or the like, and there is a problem in durability.
高分子材料を用いた圧電素子における発電量を大きくする技術として、例えば特許文献2には、エレクトレット誘電体と電極とを部分的に接合することにより両者の間に隙間を形成した発電体を用いると共に、複数の当該発電体を積層し、発電体間に支持部材を介在させた積層発電体が記載されている。特許文献2に記載された積層発電体においては、エレクトレット誘電体と電極との間に形成された隙間の距離変化に応じた静電誘導により発電しており、支持部材で外力を伝わりやすくすることにより、隙間の距離変化を大きくしている。 As a technique for increasing the amount of power generation in a piezoelectric element using a polymer material, for example, Patent Document 2 uses a power generation body in which an electret dielectric and an electrode are partially joined to form a gap therebetween. In addition, a laminated power generator is described in which a plurality of the power generators are stacked and a support member is interposed between the power generators. In the laminated power generator described in Patent Document 2, the power is generated by electrostatic induction according to the change in the distance between the gap formed between the electret dielectric and the electrode, and external force is easily transmitted by the support member. Thus, the distance change of the gap is increased.
特許文献3には、複数の気孔を有する樹脂フィルム、およびその両側に配置される一対の電極を有する発電素子と、当該発電素子に積層される弾性体と、を備える発電デバイスが記載されている。特許文献3に記載された発電デバイスにおいては、樹脂フィルムに複数の気孔を設け、凹凸を有する弾性体で当該樹脂フィルムを押圧することにより、気孔の変形量を大きくし、圧電性を向上させている。 Patent Document 3 describes a power generation device including a resin film having a plurality of pores, a power generation element having a pair of electrodes disposed on both sides thereof, and an elastic body laminated on the power generation element. . In the power generation device described in Patent Document 3, by providing a plurality of pores in a resin film and pressing the resin film with an elastic body having irregularities, the deformation amount of the pores is increased and the piezoelectricity is improved. Yes.
特許文献4には、移動体が移動する際の外部流体の相対的な流れに基づいて発電する移動体用発電装置の構成部材として、圧電フィルムと弾性変形可能な平板状の基盤材とが交互に積層された発電ユニットが記載されている。特許文献4に記載された発電ユニットにおいては、基盤材の変形により圧電フィルムを変形させている。また、特許文献4の図7には、発電ユニットの表面が樹脂製の被覆材で被覆された形態が記載されている。
In
上述したように、圧電素子には、発電量が大きいことに加えて耐久性も必要になる。圧電素子に耐久性を付与し、環境からの影響を排除するための手法として、上記特許文献4の図7に記載されているように、圧電素子を被覆材で覆う方法が考えられる。しかしながら、被覆材が樹脂製の場合、柔軟性に乏しいため、圧電素子の変形を阻害してしまう。このため、圧電素子を変形しやすくするなどして発電量を増加させることができたとしても、被覆材の存在でその効果が減殺され、発電量の増加効果を発揮させることができなくなる。このように、圧電素子において、発電量の増加と耐久性の向上とを両立させることは困難であった。 As described above, in addition to a large amount of power generation, the piezoelectric element also needs durability. As a method for imparting durability to the piezoelectric element and eliminating the influence from the environment, a method of covering the piezoelectric element with a covering material as described in FIG. However, when the covering material is made of resin, the flexibility is poor, and thus the deformation of the piezoelectric element is hindered. For this reason, even if it is possible to increase the amount of power generation by making the piezoelectric element easy to deform, the effect is diminished by the presence of the covering material, and the effect of increasing the amount of power generation cannot be exhibited. Thus, in the piezoelectric element, it has been difficult to achieve both an increase in power generation and an improvement in durability.
本発明は、このような実情に鑑みてなされたものであり、柔軟な圧電素子を用いて、発生電荷量が大きく、耐久性に優れたトランスデューサを提供することを課題とする。また、当該トランスデューサを用いて、発電量が大きく、耐久性に優れた発電システムを提供することを課題とする。 The present invention has been made in view of such circumstances, and an object thereof is to provide a transducer having a large amount of generated charges and excellent durability using a flexible piezoelectric element. It is another object of the present invention to provide a power generation system having a large power generation amount and excellent durability using the transducer.
(1)上記課題を解決するため、本発明のトランスデューサは、エラストマーおよび圧電粒子を含む圧電層と、該圧電層を挟んで配置される電極層と、少なくとも最外層に配置される弾性体層と、を有する圧電素子と、該圧電素子を収容する外装材と、を備え、押圧により該圧電素子が伸張する方向における該外装材と該圧電素子との間には、気体、不揮発性の液体、および該弾性体層よりも弾性率が小さい固体の少なくとも一つが収容される緩衝部が区画されることを特徴とする。 (1) In order to solve the above problems, a transducer according to the present invention includes a piezoelectric layer including an elastomer and piezoelectric particles, an electrode layer disposed with the piezoelectric layer interposed therebetween, and an elastic layer disposed at least on the outermost layer. A piezoelectric element having a piezoelectric element, and an exterior material that houses the piezoelectric element, and between the exterior material and the piezoelectric element in a direction in which the piezoelectric element expands due to pressing, a gas, a non-volatile liquid, And a buffer portion in which at least one solid having a smaller elastic modulus than that of the elastic body layer is accommodated.
(2)上記課題を解決するため、本発明の発電システムは、本発明のトランスデューサと、該トランスデューサから電気エネルギーを取り出すための電気回路と、を備えることを特徴とする。 (2) In order to solve the above-described problem, a power generation system of the present invention is characterized by including the transducer of the present invention and an electric circuit for extracting electric energy from the transducer.
(1)本発明のトランスデューサによると、圧電素子を構成する圧電層のマトリックス(母材)はエラストマーであり、圧電素子の最外層に配置されるのは弾性体層である。圧電素子は柔軟であり、押し出し法やコーティング法による製造が可能であるため、大面積化が容易である。また、外装材にも比較的柔軟な材料を用いれば、曲面などの複雑な形状を有する場所にも配置することができる。圧電素子の少なくとも最外層には、弾性体層が配置される。すなわち、弾性体層は、圧電層および電極層の積層方向外側に配置される。圧電素子に対して、圧電層および電極層の積層方向(厚さ方向)に力を加えると(圧電素子を圧縮すると)、弾性体層が面方向に伸張することにより、圧電層にせん断力が作用する。これにより、圧電層には、厚さ方向の押圧力に加えて面方向の引張力が加わることになり、圧電層の歪みが増大する。その結果、圧電層で発生する電荷量が増加して、圧電素子における感度(S/N比(Signal-Noise Ratio:信号雑音比))や発電量が向上する。 (1) According to the transducer of the present invention, the matrix (base material) of the piezoelectric layer constituting the piezoelectric element is an elastomer, and the elastic layer is disposed on the outermost layer of the piezoelectric element. Since the piezoelectric element is flexible and can be manufactured by an extrusion method or a coating method, the area can be easily increased. Further, if a relatively flexible material is used for the exterior material, it can be placed in a place having a complicated shape such as a curved surface. An elastic layer is disposed on at least the outermost layer of the piezoelectric element. That is, the elastic body layer is disposed on the outer side in the stacking direction of the piezoelectric layer and the electrode layer. When a force is applied to the piezoelectric element in the stacking direction (thickness direction) of the piezoelectric layer and the electrode layer (when the piezoelectric element is compressed), the elastic layer expands in the plane direction, so that shear force is applied to the piezoelectric layer. Works. Thereby, in addition to the pressing force in the thickness direction, a tensile force in the surface direction is applied to the piezoelectric layer, and the distortion of the piezoelectric layer increases. As a result, the amount of charge generated in the piezoelectric layer increases, and the sensitivity (S / N ratio (Signal-Noise Ratio)) and power generation amount in the piezoelectric element are improved.
本発明のトランスデューサにおいては、外装材と圧電素子との間に緩衝部が区画される。緩衝部には、気体、不揮発性の液体、および弾性体層よりも弾性率が小さい固体の少なくとも一つが収容される。緩衝部は、圧電素子が厚さ方向に押圧された場合に伸張する方向に配置される。図1に、本発明のトランスデューサの一例の断面模式図を示す。図1(a)に圧縮前の状態を示し、図1(b)に圧縮後の状態を示す。 In the transducer of the present invention, a buffer portion is defined between the exterior material and the piezoelectric element. The buffer unit accommodates at least one of a gas, a non-volatile liquid, and a solid having a smaller elastic modulus than the elastic layer. The buffer portion is arranged in a direction that expands when the piezoelectric element is pressed in the thickness direction. FIG. 1 shows a schematic cross-sectional view of an example of the transducer of the present invention. FIG. 1A shows a state before compression, and FIG. 1B shows a state after compression.
図1(a)に示すように、トランスデューサ10は、圧電素子20と外装材30とを備えている。外装材30は、エラストマー製であり袋状を呈している。圧電素子20は、外装材30の内部に収容されている。圧電素子20と外装材30との間には、緩衝部31が配置されている。緩衝部3は、圧電素子20の側面、換言すると外周を囲むように配置されている。緩衝部31には、空気が収容されている。圧電素子20は、圧電層21と、一対の電極層22a、22bと、一対の弾性体層23a、23bと、を有している。圧電層21は、エラストマーおよび圧電粒子を含んでいる。一対の電極層22a、22bは、圧電層21を挟んで厚さ方向の両面に一つずつ配置されている。弾性体層23aは、電極層22aの上面(外側)に配置されている。弾性体層23bは、電極層22bの下面(外側)に配置されている。
As shown in FIG. 1A, the
図1(b)に白抜き矢印で示すように、トランスデューサ10の上方から荷重が加わると、外装材30が下側に凹むように変形すると共に、圧電素子20の弾性体層23aも押圧され面方向に伸張する。これに伴い、圧電層21および電極層22a、22bも面方向に伸張する。圧電素子20が伸張する方向、すなわち外周側には、空気が収容されている緩衝部31があるため、圧電素子20が外周方向に膨出しても、その変形は外装材30により規制されにくい。
1B, when a load is applied from above the
このように、外装材と圧電素子との間に緩衝部が存在することにより、外装材が柔軟性に乏しい場合でも、圧電素子の伸張変形が外装材により阻害されにくい。したがって、本発明のトランスデューサによると、弾性体層による発生電荷量増加効果と外装材による耐久性向上効果との両立を実現することができる。 As described above, since the buffer portion exists between the exterior material and the piezoelectric element, even when the exterior material has poor flexibility, the expansion deformation of the piezoelectric element is not easily inhibited by the exterior material. Therefore, according to the transducer of the present invention, it is possible to realize both the effect of increasing the amount of generated charges by the elastic layer and the effect of improving the durability by the exterior material.
本発明のトランスデューサは、圧電素子の発電量が大きいため、発電装置として好適である。また、圧電素子の感度が高いため、小さな荷重を検出しやすい。このため、本発明のトランスデューサは、発電装置としてだけでなく、人体の皮膚に直接的に、あるいは服を介して間接的に配置して、脈拍数や呼吸数を測定する生体情報センサとして用いることができる。 The transducer of the present invention is suitable as a power generation device because the amount of power generated by the piezoelectric element is large. Moreover, since the sensitivity of the piezoelectric element is high, it is easy to detect a small load. For this reason, the transducer of the present invention is used not only as a power generator, but also as a biological information sensor for measuring a pulse rate or a respiratory rate by being directly disposed on the human skin or indirectly through clothes. Can do.
(2)本発明の発電システムは、上述した本発明のトランスデューサを備える。このため、発電量が大きく、耐久性に優れる。また、トランスデューサを大面積にして、広範囲に設置することができる。したがって、本発明の発電システムは、道路、橋梁、鉄道のレールなどに埋め込んで、そこを通過する移動体からの押圧により発電するシステムに適している。 (2) The power generation system of the present invention includes the above-described transducer of the present invention. For this reason, the power generation amount is large and the durability is excellent. In addition, the transducer can be installed in a wide area with a large area. Therefore, the power generation system of the present invention is suitable for a system that generates power by being embedded in roads, bridges, railroad rails, and the like and pressed by a moving body passing therethrough.
以下、本発明のトランスデューサおよび発電システムの実施の形態について説明する。 Hereinafter, embodiments of the transducer and the power generation system of the present invention will be described.
(1)第一実施形態
まず、第一実施形態のトランスデューサおよび発電システムの構成について説明する。図2に、第一実施形態の発電システムの概略図を示す。図3に、同発電システムを構成するトランスデューサの厚さ方向断面図を示す。図4に、同発電システムの回路図を示す。図2中、トランスデューサは上面図で示されており、説明の便宜上、外装材を透過して示す。
(1) 1st embodiment First, the structure of the transducer and power generation system of 1st embodiment is demonstrated. In FIG. 2, the schematic of the electric power generation system of 1st embodiment is shown. FIG. 3 is a sectional view in the thickness direction of the transducer constituting the power generation system. FIG. 4 shows a circuit diagram of the power generation system. In FIG. 2, the transducer is shown in a top view and is shown through the exterior material for convenience of explanation.
<発電システム>
図2に示すように、発電システム1は、トランスデューサ10と、電気回路40と、を備えている。トランスデューサ10は、配線41を介して電気回路40に電気的に接続されている。図4中、一点鎖線で囲って示すように、電気回路40は、整流回路42と、コンデンサ43と、スイッチ44と、負荷45と、を備えている。整流回路42は、トランスデューサ10から出力される交流電圧を直流電圧に変換する。コンデンサ43は、整流された電力を蓄える。コンデンサ43に蓄えられた電力は、スイッチ44を介して負荷45に供給される。このように、電気回路40により、トランスデューサ10から電気エネルギーが取り出される。
<Power generation system>
As shown in FIG. 2, the
<トランスデューサ>
図2に透過上面図を、図3に厚さ方向断面図を示すように、トランスデューサ10は、圧電素子20と外装材30とを備えている。圧電素子20は、矩形シート状を呈しており(図2中、実線ハッチングで示す)、五つのユニット24と、六つの弾性体層230と、を有している。ユニット24と弾性体層230とは、厚さ方向(上下方向)に交互に配置されている。
<Transducer>
As illustrated in FIG. 2 and a cross-sectional view in the thickness direction, the
五つのユニット24は、各々、圧電層とそれを挟んで配置されている一対の電極層とを有している(電極層/圧電層/電極層、図略)。圧電層は、エラストマーおよび圧電粒子を含んでいる。一対の電極層は、エラストマーおよび導電材を含んでいる。一対の電極層は、圧電層の厚さ方向(上下方向)両面に一つずつ配置されている。すなわち、圧電素子20は、五つの圧電層を有しており、当該圧電層は、電極層を介して積層されている。電極層には、各々、配線41が接続されている。電極層と電気回路40とは、配線41により電気的に接続されている。
Each of the five
六つの弾性体層230は、いずれも熱可塑性エラストマー製であり、弾性率は19MPaである。六つの弾性体層230は、最上部のユニット24の上面および最下部のユニット24の下面(つまり圧電素子20の最外層)と、隣接するユニット24同士の間と、に配置されている。
The six
外装材30は、上側シートおよび下側シートからなり、両シートの周縁部が張り合わされている(図2中、点線ハッチングで示す)ことにより袋状を呈している。上側シートおよび下側シートは、いずれも耐久性および耐湿性に優れるエラストマー製である。圧電素子20は、外装材30の内部に収容されている。外装材30の周縁部の一部には、トランスデューサ10に接続されている配線41を取り出すための挿通孔が形成されている。
The
圧電素子20と外装材30との間には、緩衝部31が配置されている。緩衝部31は、圧電素子20の厚さ方向側面、換言すると圧電素子20の外周を囲むように配置されている。緩衝部31には、空気が収容されている。すなわち、圧電素子20の外周と外装材30との間には、隙間が存在している。圧電素子20の上下面は、外装材30に接触しているが接着されていない。
A
<作用効果>
次に、第一実施形態のトランスデューサおよび発電システムの作用効果について説明する。トランスデューサ10の上方から荷重が加わると、圧電素子20の弾性体層230が押圧され面方向に伸張する。すると、弾性体層230に引っ張られるようにして、ユニット24も面方向に伸張する。この時、ユニット24を構成する圧電層には、押圧力に加えて面方向の引張力が加わるため、圧電層の歪みが大きくなる。ここで、弾性体層230およびユニット24(圧電素子20)の外周側には、空気が収容されている緩衝部31(隙間)が存在している。また、圧電素子20の上下面は、外装材30と接着されていない。よって、圧電素子20が外周方向に膨出しても、その変形は外装材30により規制されにくい。したがって、圧電素子20により、多くの電荷を発生させることができる。また、圧電素子20は、五つのユニット24を有している。このため、ユニット24を単独で用いる場合(前出図1参照)と比較して、電荷発生量がより大きくなる。また、外装材30は、耐久性および耐湿性に優れるエラストマー製である。よって、トランスデューサ10においては、弾性体層230による発生電荷量増加効果と、外装材30による耐久性向上効果と、が両立されている。また、トランスデューサ10は、主にエラストマー材料から構成されているため、大面積化しやすく、曲面などの複雑な形状を有する場所にも配置しやすい。
<Effect>
Next, the effect of the transducer and power generation system of the first embodiment will be described. When a load is applied from above the
(2)第二実施形態
本実施形態のトランスデューサおよび発電システムと第一実施形態のそれとは、トランスデューサを構成する圧電素子の形状および配置形態のみが相違する。したがって、ここでは相違点を中心に説明する。図5に、本実施形態のトランスデューサの透過上面図を示す。図5は、前出図2に示したトランスデューサに対応している。図5中、図2と対応する部材については同じ符号で示す。
(2) Second Embodiment The transducer and power generation system of the present embodiment are different from those of the first embodiment only in the shape and arrangement of the piezoelectric elements constituting the transducer. Therefore, the difference will be mainly described here. FIG. 5 shows a transparent top view of the transducer of this embodiment. FIG. 5 corresponds to the transducer shown in FIG. In FIG. 5, members corresponding to those in FIG.
図5に示すように、トランスデューサ10は、五つの圧電素子20と外装材30とを備えている。五つの圧電素子20は、各々、帯状を呈している(図5中、実線ハッチングで示す)。五つの圧電素子20は、各々、短手方向に所定の間隔で離間して、互いに平行に配置されている。各々の圧電素子20の外周は、緩衝部31を隔てて外装材30で囲まれている。すなわち、外装材30は、周縁部だけでなく、隣接する圧電素子20同士の間も貼着されている(図5中、点線ハッチングで示す)。緩衝部31は、圧電素子20と外装材30との間、すなわち圧電素子20の外周を囲むように配置されている。緩衝部31には、空気が収容されている。個々の圧電素子20の構成は、第一実施形態の圧電素子20の構成と同じである(前出図3参照)。
As shown in FIG. 5, the
本実施形態においては、外装材30の中に、複数の圧電素子20を配置する。これにより、形状の自由度が向上し、例えば、発電させたい場所だけを発電させたり、用途に応じて圧電素子を間引いて、柔軟性を向上させたりすることができる。また、本実施形態のトランスデューサ10をセンサとして用いた場合には、荷重が加わった場所の特定が容易になる。
In the present embodiment, a plurality of
(3)第三実施形態
本実施形態のトランスデューサおよび発電システムと第二実施形態のそれとは、トランスデューサを構成する圧電素子の一部の長さのみが相違する。したがって、ここでは相違点を中心に説明する。図6に、本実施形態のトランスデューサの透過上面図を示す。図6は、前出図5に対応している。図6中、図5と対応する部材については同じ符号で示す。
(3) Third Embodiment The transducer and power generation system of the present embodiment are different from those of the second embodiment only in the length of a part of the piezoelectric elements constituting the transducer. Therefore, the difference will be mainly described here. FIG. 6 is a transparent top view of the transducer of this embodiment. FIG. 6 corresponds to FIG. In FIG. 6, members corresponding to those in FIG.
図6に示すように、トランスデューサ10は、五つの圧電素子20と外装材30とを備えている。五つの圧電素子20は、各々、帯状を呈しており、長さのみが異なる(図5中、実線ハッチングで示す)。すなわち、上方から見て左側三つの圧電素子20は、右側二つの圧電素子20よりも短い。五つの圧電素子20は、各々、短手方向に所定の間隔で離間して、互いに平行に配置されている。各々の圧電素子20の外周は、緩衝部31を隔てて外装材30で囲まれている。
As shown in FIG. 6, the
(4)第四実施形態
本実施形態のトランスデューサおよび発電システムと第二実施形態のそれとは、トランスデューサを構成する圧電素子の数および配置形態のみが相違する。したがって、ここでは相違点を中心に説明する。図7に、本実施形態のトランスデューサの透過上面図を示す。図7は、前出図5に対応している。図7中、図5と対応する部材については同じ符号で示す。
(4) Fourth Embodiment The transducer and power generation system of the present embodiment are different from those of the second embodiment only in the number and arrangement of piezoelectric elements constituting the transducer. Therefore, the difference will be mainly described here. FIG. 7 shows a transparent top view of the transducer of this embodiment. FIG. 7 corresponds to FIG. In FIG. 7, members corresponding to those in FIG.
図7に示すように、トランスデューサ10は、十個の圧電素子200~209と外装材30とを備えている。十個の圧電素子200~209は、各々、帯状を呈している(図7中、実線ハッチングで示す)。十個の圧電素子200~209は、五つずつ上下二層に配置されている。上側の五つの圧電素子200~204は、前後方向に延在しており、左右方向に所定の間隔で離間して互いに平行に配置されている。下側の五つの圧電素子205~209は、左右方向に延在しており、前後方向に所定の間隔で離間して互いに平行に配置されている。上方から見て、上側の五つの圧電素子200~204と下側の五つの圧電素子205~209とは、格子状に並んでいる。圧電素子200~209における電極層と電気回路40とは、配線410、411により電気的に接続されている。
As shown in FIG. 7, the
外装材30は、周縁部だけでなく、圧電素子200~209が配置されていない区間も部分的に貼着されている(図7中、点線ハッチングで示す)。緩衝部31は、圧電素子200~209と外装材30との間に配置されている。緩衝部31には、空気が収容されている。個々の圧電素子200~209の構成は、第一実施形態の圧電素子20の構成と同じである(前出図3参照)。
The
本実施形態においては、外装材30の中に、複数の圧電素子20を二段に配置する。これにより、発電量がより大きくなる。また、発電させたい場所だけを発電させたり、用途に応じて圧電素子を間引いて、柔軟性を向上させたりすることができる。また、本実施形態のトランスデューサ10をセンサとして用いた場合には、荷重が加わった場所の特定が容易になることに加えて、検出領域を大きくすることができる。
In the present embodiment, a plurality of
(5)第五実施形態
本実施形態のトランスデューサおよび発電システムと第一実施形態のそれとは、トランスデューサの使用形態のみが相違する。したがって、ここでは相違点を中心に説明する。図8に、本実施形態のトランスデューサの径方向断面図を示す。図8中、前出図2と対応する部材については同じ符号で示す。
(5) Fifth Embodiment The transducer and power generation system of this embodiment are different from those of the first embodiment only in the usage pattern of the transducer. Therefore, the difference will be mainly described here. FIG. 8 shows a radial cross-sectional view of the transducer of this embodiment. In FIG. 8, members corresponding to those in FIG.
図8に示すように、トランスデューサ10は、第一実施形態のシート状のトランスデューサ10を、一端を内側にして他端に向かって巻き付けたものである。トランスデューサ10の径方向断面を見ると、圧電素子20が径方向に六層積層された渦巻き状を呈している。本実施形態によると、トランスデューサ10を第一実施形態のようにシート状に製造しておき、それを巻回するだけで、圧電素子20が多数積層した形態を実現することができる。したがって、トランスデューサ10の径方向から荷重を加えると、より大きな発電量を得ることができる。また、本実施形態によると、シート状のトランスデューサを配置することが難しい場所にも適用が可能になる。
As shown in FIG. 8, the
(6)その他の実施形態
本発明のトランスデューサおよび発電システムは、上記形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において、当業者が行い得る変更、改良などを施した種々の形態にて実施することができる。
(6) Other Embodiments The transducer and the power generation system of the present invention are not limited to the above-described embodiments, and various modifications and improvements that can be made by those skilled in the art without departing from the gist of the present invention. It can be implemented in the form.
例えば、上記実施形態においては、一つのトランスデューサと電気回路とから発電システムを構成したが、積層するなどした複数のトランスデューサを電気回路に接続して発電システムを構成してもよい。上記実施形態においては、トランスデューサを発電装置として用いたが、本発明のトランスデューサは、センサとして用いても構わない。センサとして用いると、S/N比が高いため、小さな荷重を検出しやすい。以下に、本発明のトランスデューサの構成要素を詳しく説明する。 For example, in the above-described embodiment, the power generation system is configured from one transducer and an electric circuit, but a power generation system may be configured by connecting a plurality of stacked transducers to the electric circuit. In the above embodiment, the transducer is used as a power generation device, but the transducer of the present invention may be used as a sensor. When used as a sensor, a small load is easy to detect because the S / N ratio is high. The components of the transducer of the present invention will be described in detail below.
<圧電素子>
圧電素子は、エラストマーおよび圧電粒子を含む圧電層と、該圧電層を挟んで配置される電極層と、少なくとも最外層に配置される弾性体層と、を有する。圧電層の数は、一層でも二層以上でも構わない。発電量を大きくするという観点から、複数、例えば数十~数百層程度の圧電層を、電極層を介して積層することが望ましい。弾性体層は、少なくとも最外層に配置すればよい。しかしながら、上記実施形態に示したように、複数の圧電層が電極層を介して積層される場合には、当該積層体の中間の隣接する電極層間に配置してもよい。すなわち、圧電層とそれを挟む電極層とからなるユニット間に弾性体層を配置してもよい。この場合、発電量をより大きくすることができる。上記第五実施形態においては、一つの圧電素子を外装材ごと巻回して使用する形態を示したが、圧電素子のみを巻回し、それを筒状の外装材に収容してもよい。
<Piezoelectric element>
The piezoelectric element includes a piezoelectric layer including an elastomer and piezoelectric particles, an electrode layer disposed with the piezoelectric layer interposed therebetween, and an elastic layer disposed at least on the outermost layer. The number of piezoelectric layers may be one layer or two or more layers. From the viewpoint of increasing the amount of power generation, it is desirable that a plurality of, for example, several tens to several hundreds of piezoelectric layers are laminated via the electrode layers. The elastic body layer may be disposed at least in the outermost layer. However, as shown in the above embodiment, when a plurality of piezoelectric layers are stacked via electrode layers, they may be disposed between adjacent electrode layers in the middle of the stacked body. That is, an elastic body layer may be disposed between units including a piezoelectric layer and an electrode layer sandwiching the piezoelectric layer. In this case, the power generation amount can be further increased. In the fifth embodiment, an embodiment is shown in which one piezoelectric element is wound and used together with an exterior material. However, only a piezoelectric element may be wound and accommodated in a tubular exterior material.
[圧電層]
圧電層を構成するエラストマーとしては、架橋ゴムおよび熱可塑性エラストマーから選ばれる一種以上を用いればよい。弾性率が比較的小さく柔軟なエラストマーとして、ウレタンゴム、シリコーンゴム、ニトリルゴム(NBR)、水素化ニトリルゴム(H-NBR)、アクリルゴム、天然ゴム、イソプレンゴム、エチレン-プロピレン-ジエンゴム(EPDM)、エチレン-酢酸ビニル共重合体、エチレン-酢酸ビニル-アクリル酸エステル共重合体、ブチルゴム、スチレン-ブタジエンゴム、フッ素ゴム、エピクロルヒドリンゴム、クロロプレンゴム、塩素化ポリエチレン、クロロスルホン化ポリエチレンなどが挙げられる。また、官能基を導入するなどして変性したエラストマーを用いてもよい。変性エラストマーとしては、例えば、カルボキシル基変性ニトリルゴム(X-NBR)、カルボキシル基変性水素化ニトリルゴム(XH-NBR)などが挙げられる。
[Piezoelectric layer]
As the elastomer constituting the piezoelectric layer, one or more selected from crosslinked rubber and thermoplastic elastomer may be used. Relatively small and flexible elastomers such as urethane rubber, silicone rubber, nitrile rubber (NBR), hydrogenated nitrile rubber (H-NBR), acrylic rubber, natural rubber, isoprene rubber, ethylene-propylene-diene rubber (EPDM) Ethylene-vinyl acetate copolymer, ethylene-vinyl acetate-acrylic ester copolymer, butyl rubber, styrene-butadiene rubber, fluororubber, epichlorohydrin rubber, chloroprene rubber, chlorinated polyethylene, chlorosulfonated polyethylene, and the like. Further, an elastomer modified by introducing a functional group or the like may be used. Examples of the modified elastomer include carboxyl group-modified nitrile rubber (X-NBR), carboxyl group-modified hydrogenated nitrile rubber (XH-NBR), and the like.
圧電層に荷重が加わった時に発生する発生電荷量(C)は、圧電層の圧電歪み定数(C/N)および加わった荷重(N)により、次式(a)で示される。
発生電荷量=圧電歪み定数×荷重 ・・・(a)
圧電粒子は、圧電性を有する化合物の粒子である。圧電性を有する化合物としては、ペロブスカイト型の結晶構造を有する強誘電体が知られており、例えば、チタン酸バリウム、チタン酸ストロンチウム、ニオブ酸カリウム、ニオブ酸ナトリウム、ニオブ酸リチウム、ニオブ酸カリウムナトリウム、ニオブ酸カリウムナトリウムリチウム、チタン酸ジルコン酸鉛(PZT)、チタン酸バリウムストロンチウム(BST)、チタン酸ビスマスランタン(BLT)、タンタル酸ビスマスストロンチウム(SBT)などが挙げられる。圧電粒子としては、これらのうちの一種類あるいは二種類以上を用いればよい。
The generated charge amount (C) generated when a load is applied to the piezoelectric layer is expressed by the following equation (a) by the piezoelectric strain constant (C / N) of the piezoelectric layer and the applied load (N).
Generated charge amount = piezoelectric strain constant × load (a)
Piezoelectric particles are particles of a compound having piezoelectricity. Ferroelectric materials having a perovskite crystal structure are known as piezoelectric compounds, for example, barium titanate, strontium titanate, potassium niobate, sodium niobate, lithium niobate, potassium sodium niobate , Potassium sodium niobate, lead zirconate titanate (PZT), barium strontium titanate (BST), bismuth lanthanum titanate (BLT), bismuth strontium tantalate (SBT), and the like. As the piezoelectric particles, one or more of these may be used.
圧電粒子の粒子径は、特に限定されない。例えば、平均粒子径が異なる複数種の圧電粒子粉末を用いると、エラストマー中に大粒径の圧電粒子と小粒径の圧電粒子とを混在させることができる。この場合、大粒径の圧電粒子の間に小粒径の圧電粒子が入り込み、圧電粒子に圧力が伝わりやすくなる。これにより、圧電層の圧電歪み定数が大きくなり、発生電荷量を大きくすることができる。 The particle size of the piezoelectric particles is not particularly limited. For example, when a plurality of types of piezoelectric particle powders having different average particle sizes are used, a large particle size piezoelectric particle and a small particle size piezoelectric particle can be mixed in the elastomer. In this case, piezoelectric particles having a small particle diameter enter between piezoelectric particles having a large particle diameter, and pressure is easily transmitted to the piezoelectric particles. As a result, the piezoelectric strain constant of the piezoelectric layer is increased, and the amount of generated charges can be increased.
圧電粒子の配合量は、圧電層、ひいては圧電素子の柔軟性と、圧電層の圧電性能と、を考量して決定すればよい。圧電粒子の配合量が多くなると、圧電層の圧電性能は向上するが柔軟性は低下する。したがって、使用するエラストマーと圧電粒子との組み合わせにおいて、所望の柔軟性を実現できるよう、圧電粒子の配合量を調整することが望ましい。 The blending amount of the piezoelectric particles may be determined by taking into account the flexibility of the piezoelectric layer, and thus the piezoelectric element, and the piezoelectric performance of the piezoelectric layer. When the amount of the piezoelectric particles is increased, the piezoelectric performance of the piezoelectric layer is improved, but the flexibility is lowered. Therefore, it is desirable to adjust the blending amount of the piezoelectric particles so that desired flexibility can be realized in the combination of the elastomer and the piezoelectric particles to be used.
圧電層は、エラストマーおよび圧電粒子に加えて、圧電粒子よりも比誘電率が小さい補強粒子を含んでいてもよい。補強粒子の比誘電率は、圧電粒子の比誘電率よりも小さいことを条件として、例えば100以下、さらには30以下であることが望ましい。 The piezoelectric layer may contain reinforcing particles having a relative dielectric constant smaller than that of the piezoelectric particles, in addition to the elastomer and the piezoelectric particles. The relative permittivity of the reinforcing particles is preferably 100 or less, and more preferably 30 or less, on condition that the relative permittivity of the reinforcement particles is smaller than that of the piezoelectric particles.
比誘電率が大きい圧電粒子が連結した構造は、外力が圧電粒子に伝わりやすいため、前述した式(a)の圧電歪み定数の向上が期待できる。しかしながら、比誘電率が大きい圧電粒子が連結することで、圧電層全体としての誘電率が上昇してしまう。これに対して、圧電層に圧電粒子と補強粒子との両方が含まれる場合、比誘電率が大きい圧電粒子同士の繋がりが、それよりも比誘電率が小さい補強粒子の介在により分断される。これにより、圧電層全体としての誘電率の上昇を抑制することができる。一方、補強粒子と圧電粒子とにより粒子の連結構造は維持されているため、圧電歪み定数を維持することができる。すなわち、圧電層に補強粒子が含まれる場合には、圧電歪み定数を維持したまま、圧電粒子のみが含まれる場合よりも圧電層全体の誘電率を小さくすることができる。よって、前述した式(a)により、大きな発生電荷量を得ることができる。 Since the structure in which piezoelectric particles having a large relative dielectric constant are connected is easy to transmit external force to the piezoelectric particles, an improvement in the piezoelectric strain constant of the formula (a) described above can be expected. However, when the piezoelectric particles having a large relative dielectric constant are connected, the dielectric constant of the entire piezoelectric layer is increased. On the other hand, when both the piezoelectric particles and the reinforcing particles are included in the piezoelectric layer, the connection between the piezoelectric particles having a large relative dielectric constant is divided by the intervening reinforcing particles having a smaller relative dielectric constant. Thereby, the raise of the dielectric constant as the whole piezoelectric layer can be suppressed. On the other hand, since the connection structure of the particles is maintained by the reinforcing particles and the piezoelectric particles, the piezoelectric strain constant can be maintained. That is, when the reinforcing particles are included in the piezoelectric layer, the dielectric constant of the entire piezoelectric layer can be made smaller than when only the piezoelectric particles are included while maintaining the piezoelectric strain constant. Therefore, a large amount of generated charge can be obtained by the above-described formula (a).
補強粒子としては、電気抵抗が大きい粒子が望ましい。補強粒子の電気抵抗が大きいと、圧電層の絶縁破壊強度が大きくなる。これにより、後述する圧電層の分極処理において、高い電界を印加して処理時間を短くすることができる。加えて、分極処理中に破壊する圧電素子の数を減らすことができるため、生産性が向上する。 As the reinforcing particles, particles having a large electric resistance are desirable. When the electrical resistance of the reinforcing particles is large, the dielectric breakdown strength of the piezoelectric layer is increased. Thereby, in the polarization process of the piezoelectric layer which will be described later, the processing time can be shortened by applying a high electric field. In addition, since the number of piezoelectric elements that are destroyed during the polarization process can be reduced, productivity is improved.
また、補強粒子は、エラストマーに化学結合していることが望ましい。この場合、エラストマー中に補強粒子のネットワークが形成されるため、架橋剤、添加剤、空気中の水分などがイオン化した不純物イオンが動きにくくなり、圧電層の電気抵抗が増加する。補強粒子とエラストマーとの化学結合は、例えば、補強粒子を表面処理するなどして実現することができる。表面処理の方法としては、エラストマーポリマーと反応可能な官能基を有する表面処理剤を補強粒子に予め反応させておき、当該補強粒子をエラストマーポリマーと混合する方法や、補強粒子の表面を酸、アルカリまたは亜臨界水で溶解して水酸基を生成させた後、水酸基と反応可能な官能基を有するエラストマーポリマーと混合する方法などが挙げられる。補強粒子がエラストマーに化学結合していると、伸縮を繰り返しても補強粒子が位置ずれしにくい。また、エラストマーから補強粒子が剥離しにくいため、物性や出力の初期値からの変動が少なくなる。このため、出力が安定すると共に、圧電層の耐へたり性が向上する。また、圧電層の破断伸びが大きくなるため、伸張時に局所破壊などによる圧電性能の低下を抑制することができる。その結果、伸張した状態においても高い圧電性能を維持することができる。 Also, it is desirable that the reinforcing particles are chemically bonded to the elastomer. In this case, since a network of reinforcing particles is formed in the elastomer, impurity ions obtained by ionizing a crosslinking agent, an additive, moisture in the air, and the like are difficult to move, and the electric resistance of the piezoelectric layer is increased. The chemical bond between the reinforcing particles and the elastomer can be realized, for example, by surface-treating the reinforcing particles. As a surface treatment method, a surface treatment agent having a functional group capable of reacting with an elastomer polymer is reacted with the reinforcing particles in advance, and the reinforcing particles are mixed with the elastomer polymer. Or the method of mixing with the elastomer polymer which has a functional group which can react with a hydroxyl group after melt | dissolving with subcritical water and producing | generating a hydroxyl group etc. is mentioned. When the reinforcing particles are chemically bonded to the elastomer, the reinforcing particles are unlikely to be displaced even if the expansion and contraction are repeated. Further, since the reinforcing particles are difficult to peel off from the elastomer, fluctuations from the initial values of physical properties and output are reduced. Therefore, the output is stabilized and the sag resistance of the piezoelectric layer is improved. In addition, since the elongation at break of the piezoelectric layer is increased, it is possible to suppress a decrease in piezoelectric performance due to local fracture during expansion. As a result, high piezoelectric performance can be maintained even in an extended state.
補強粒子の種類は特に限定されない。例えば、二酸化チタン、シリカ、チタン酸バリウムなどの酸化物、ゴム、樹脂などの粒子を用いることができる。但し、ゴム粒子などの比較的柔らかい粒子を含む場合には、加わった荷重が樹脂粒子にて減衰し、圧電粒子に伝わりにくくなるおそれがある。圧電粒子に力を伝達しやすくして、前述した式(a)における圧電層の圧電歪み定数を大きくし、発生電荷量を大きくするという観点から、補強粒子としては、マトリックスのエラストマーよりも弾性率が大きい粒子を採用する方がよい。例えば、比誘電率が小さく、耐絶縁破壊性の向上効果が大きいなどの理由から、二酸化チタンなどの金属酸化物粒子が好適である。金属酸化物粒子の製造方法としては、結晶性が低く比誘電率が小さい粒子が得られるという理由から、ゾルゲル法が好適である。 The type of reinforcing particles is not particularly limited. For example, particles such as oxides such as titanium dioxide, silica, and barium titanate, rubber, and resin can be used. However, when relatively soft particles such as rubber particles are included, the applied load may be attenuated by the resin particles and may not be transmitted to the piezoelectric particles. From the viewpoint of facilitating the transmission of force to the piezoelectric particles, increasing the piezoelectric strain constant of the piezoelectric layer in the above-described formula (a), and increasing the amount of generated charges, the reinforcing particles are more elastic than the matrix elastomer. It is better to use large particles. For example, metal oxide particles such as titanium dioxide are preferable because they have a small relative dielectric constant and a large effect of improving dielectric breakdown resistance. As a method for producing metal oxide particles, a sol-gel method is preferable because particles having low crystallinity and a low relative dielectric constant can be obtained.
圧電層は、エラストマーポリマーに圧電粒子の粉末や架橋剤などを加えた組成物を、所定の条件下で硬化させて製造される。その後、圧電層には分極処理が施される。すなわち、圧電層に電圧を印加して、圧電粒子の分極方向を所定の方向に揃える。 The piezoelectric layer is manufactured by curing a composition obtained by adding a powder of a piezoelectric particle or a crosslinking agent to an elastomer polymer under predetermined conditions. Thereafter, the piezoelectric layer is subjected to polarization treatment. That is, a voltage is applied to the piezoelectric layer to align the polarization direction of the piezoelectric particles in a predetermined direction.
[電極層]
電極層は、圧電粒子の分極方向に対向するように配置すればよい。電極層は、圧電層の表面全体に形成してもよく、一部のみに形成してもよい。電極層は、圧電層に追従して変形可能であることが望ましい。柔軟性を有する電極層としては、例えば、バインダーに導電材を配合した導電材料、導電性繊維などから形成することができる。バインダーとしては、エラストマー、すなわち架橋ゴムおよび熱可塑性エラストマーから選ばれる一種以上を用いることが望ましい。弾性率が比較的小さく柔軟であり、圧電層に対する粘着性が良好なエラストマーとして、アクリルゴム、シリコーンゴム、ウレタンゴム、ウレアゴム、フッ素ゴム、H-NBRなどが挙げられる。また、エポキシ基変性アクリルゴム、カルボキシル基変性水素化ニトリルゴムなどのように、官能基を導入するなどして変性したエラストマーを用いてもよい。
[Electrode layer]
What is necessary is just to arrange | position an electrode layer so as to oppose the polarization direction of a piezoelectric particle. The electrode layer may be formed on the entire surface of the piezoelectric layer, or may be formed on only a part. The electrode layer is desirably deformable following the piezoelectric layer. The flexible electrode layer can be formed from, for example, a conductive material in which a conductive material is blended with a binder, conductive fibers, or the like. As the binder, it is desirable to use at least one selected from elastomers, that is, crosslinked rubber and thermoplastic elastomer. Examples of the elastomer having a relatively small elastic modulus and good adhesion to the piezoelectric layer include acrylic rubber, silicone rubber, urethane rubber, urea rubber, fluorine rubber, and H-NBR. Moreover, you may use the elastomer modified | denatured by introduce | transducing a functional group like an epoxy group modified acrylic rubber, a carboxyl group modified hydrogenated nitrile rubber, etc.
導電材の種類は、特に限定されない。例えば、銀、金、銅、ニッケル、ロジウム、パラジウム、クロム、チタン、白金、鉄、およびこれらの合金などからなる金属粒子、酸化亜鉛、酸化チタンなどからなる金属酸化物粒子、チタンカーボネートなどからなる金属炭化物粒子、銀、金、銅、白金、およびニッケルなどからなる金属ナノワイヤ、カーボンブラック、カーボンナノチューブ、黒鉛、薄層黒鉛、グラフェンなどの導電性炭素材料の中から、適宜選択すればよい。また、銀被覆銅粒子など、金属で被覆された粒子を用いてもよい。導電材としては、これらの一種を単独で、あるいは二種以上を混合して用いることができる。 The type of conductive material is not particularly limited. For example, metal particles made of silver, gold, copper, nickel, rhodium, palladium, chromium, titanium, platinum, iron, and alloys thereof, metal oxide particles made of zinc oxide, titanium oxide, etc., titanium carbonate, etc. What is necessary is just to select suitably from electroconductive carbon materials, such as metal nanowire which consists of metal carbide particles, silver, gold | metal | money, copper, platinum, nickel, etc., carbon black, a carbon nanotube, graphite, thin-layer graphite, and graphene. Alternatively, particles coated with a metal such as silver-coated copper particles may be used. As the conductive material, one of these can be used alone, or two or more can be mixed and used.
導電材の配合量は、電極層が所望の体積抵抗率を実現できるよう、適宜決定すればよい。導電材の配合量が多くなると、電極層の体積抵抗率を小さくすることができるが柔軟性は低下する。電極層は、その他の成分として、架橋剤、架橋促進剤、分散剤、補強材、可塑剤、老化防止剤、着色剤などを含んでいてもよい。 The blending amount of the conductive material may be appropriately determined so that the electrode layer can achieve a desired volume resistivity. When the amount of the conductive material is increased, the volume resistivity of the electrode layer can be reduced, but the flexibility is lowered. The electrode layer may contain a crosslinking agent, a crosslinking accelerator, a dispersant, a reinforcing material, a plasticizer, an antiaging agent, a coloring agent, and the like as other components.
例えば、バインダーとしてエラストマーを用いる場合、当該エラストマー分のポリマーを溶剤に溶解したポリマー溶液に、導電材、必要に応じて添加剤を添加して、攪拌、混合することにより、導電塗料を調製することができる。調製した導電塗料を、圧電層の一面に直接塗布することにより、電極層を形成すればよい。あるいは、離型性フィルムに導電塗料を塗布して電極層を形成し、形成した電極層を、圧電層の一面に転写してもよい。 For example, when an elastomer is used as a binder, a conductive paint is prepared by adding a conductive material and, if necessary, an additive to a polymer solution obtained by dissolving the polymer for the elastomer in a solvent, and stirring and mixing. Can do. The electrode layer may be formed by directly applying the prepared conductive paint to one surface of the piezoelectric layer. Alternatively, an electrode layer may be formed by applying a conductive paint to the releasable film, and the formed electrode layer may be transferred to one surface of the piezoelectric layer.
電極層の体積抵抗率は、自然状態およびそれから一軸方向に10%伸張した状態に至るまでの伸張状態のいずれにおいても100Ω・cm以下であることが望ましい。10Ω・cm以下であるとより好適である。電極層の電気抵抗が大きい、あるいは伸張により電気抵抗が大きくなると、圧電層で発生した起電圧が電極層で降下してしまい、出力される電圧が小さくなるからである。自然状態とは、荷重が加わっておらず変形していない状態(無荷重状態)を意味する。一軸方向に10%伸張した状態とは、一軸方向における長さが自然状態の1.1倍である状態を意味する。本発明においては、電極の体積抵抗率を自然状態と一軸方向に10%伸張した状態との両方において測定し、いずれの体積抵抗率も100Ω・cm以下であれば、「自然状態およびそれから一軸方向に10%伸張した状態に至るまでの伸張状態の体積抵抗率が100Ω・cm以下」という条件を満たすと判断する。なお、本発明における圧電素子は、一軸方向だけでなく二軸方向、拡径方向などに伸張可能であることは言うまでもない。 The volume resistivity of the electrode layer is desirably 100 Ω · cm or less both in the natural state and in the stretched state from the stretched state to 10% in the uniaxial direction. More preferably, it is 10 Ω · cm or less. This is because when the electrical resistance of the electrode layer is large or the electrical resistance is increased due to stretching, the electromotive voltage generated in the piezoelectric layer drops at the electrode layer, and the output voltage becomes small. The natural state means a state in which a load is not applied and is not deformed (no load state). The state of 10% extension in the uniaxial direction means a state in which the length in the uniaxial direction is 1.1 times the natural state. In the present invention, the volume resistivity of the electrode is measured in both a natural state and a state in which the electrode is stretched by 10% in the uniaxial direction. If any volume resistivity is 100 Ω · cm or less, the “natural state and then the uniaxial direction” It is determined that the condition that the volume resistivity of the stretched state until reaching the stretched state by 10% is 100 Ω · cm or less ”is satisfied. In addition, it cannot be overemphasized that the piezoelectric element in this invention can expand | extend not only to a uniaxial direction but to a biaxial direction, a diameter expansion direction.
圧電素子を柔軟にするという観点から、圧電層と、これを挟んで配置される一対の電極層と、からなるユニット(電極層/圧電層/電極層)の破断伸びは、10%以上であることが望ましい。30%以上であるとより好適である。本明細書において、破断伸びは、単層、ユニットなどの形態を問わず、JIS K6251:2010に規定される引張試験により測定される切断時伸びの値である。引張試験は、ダンベル状5号形の試験片を用い、引張速度を100mm/minとして行うものとする。 From the viewpoint of making the piezoelectric element flexible, the breaking elongation of a unit (electrode layer / piezoelectric layer / electrode layer) composed of a piezoelectric layer and a pair of electrode layers disposed therebetween is 10% or more. It is desirable. More preferably, it is 30% or more. In this specification, elongation at break is a value of elongation at break measured by a tensile test specified in JIS K6251: 2010 regardless of the form of a single layer, a unit, or the like. The tensile test is performed using a dumbbell-shaped No. 5 test piece and a tensile speed of 100 mm / min.
[弾性体層]
弾性体層は、例えば最外層の電極層を被覆するように配置すればよい。弾性体層を配置すると、弾性体層が面方向に伸張することにより、圧電層にせん断力を作用させることができる。これにより、圧電層には、積層方向の押圧力に加えて面方向の引張力が加わることになり、圧電層の面方向の歪みが増大する。圧電層の面方向の歪みが増加すると、発生する電荷量が大きくなる。その結果、圧電素子の感度が向上し、発電量が大きくなる。
[Elastic layer]
The elastic layer may be arranged so as to cover the outermost electrode layer, for example. When the elastic body layer is disposed, the elastic body layer expands in the surface direction, whereby a shearing force can be applied to the piezoelectric layer. Thereby, in addition to the pressing force in the stacking direction, a tensile force in the surface direction is applied to the piezoelectric layer, and the distortion in the surface direction of the piezoelectric layer increases. As the strain in the surface direction of the piezoelectric layer increases, the amount of generated charge increases. As a result, the sensitivity of the piezoelectric element is improved and the amount of power generation is increased.
弾性体層による発生電荷量増加効果は、弾性体層の伸張方向における弾性率が小さい程顕著である。例えば、弾性体層の弾性率は、50MPa以下であることが望ましい。また、伸張時に弾性体層が破断して圧電素子が破壊することを防ぐため、弾性体層の破断伸びは圧電層の破断伸びよりも大きいことが望ましい。本明細書において、弾性率は、JIS K7127:1999に規定される引張試験により得られる応力-伸び曲線から算出した値である。引張試験は、試験片タイプ2の試験片を用い、引張速度を100mm/minとして行うものとする。 The effect of increasing the generated charge amount by the elastic layer is more remarkable as the elastic modulus in the stretching direction of the elastic layer is smaller. For example, the elastic modulus of the elastic body layer is desirably 50 MPa or less. Further, in order to prevent the elastic layer from breaking and the piezoelectric element from being broken when stretched, it is desirable that the breaking elongation of the elastic layer is larger than the breaking elongation of the piezoelectric layer. In this specification, the elastic modulus is a value calculated from a stress-elongation curve obtained by a tensile test specified in JIS K7127: 1999. The tensile test is performed using a test piece type 2 test piece and a tensile speed of 100 mm / min.
弾性体層は、エラストマー製であることが望ましい。すなわち、弾性体層には、架橋ゴムおよび熱可塑性エラストマーから選ばれる一種以上を用いればよい。弾性率が比較的小さく柔軟であり、電極層に対する粘着性が良好なエラストマーとして、天然ゴム、イソプレンゴム、ブチルゴム、アクリルゴム、シリコーンゴム、ウレタンゴム、ウレアゴム、フッ素ゴム、NBR、熱可塑性ポリウレタン、熱可塑性ポリエステルなどが挙げられる。なかでも、熱可塑性ポリウレタンは、熱を加えて一時的に溶融することで電極層、圧電層と強固な接着が可能になる。弾性体層を強固に接着することにより、繰り返し歪みを加えて伸張した場合などに感度低下を小さくすることができる。 Desirably, the elastic layer is made of an elastomer. In other words, the elastic layer may be one or more selected from a crosslinked rubber and a thermoplastic elastomer. Elastomers with relatively low elastic modulus and good adhesion to the electrode layer include natural rubber, isoprene rubber, butyl rubber, acrylic rubber, silicone rubber, urethane rubber, urea rubber, fluoro rubber, NBR, thermoplastic polyurethane, heat Examples thereof include plastic polyester. In particular, thermoplastic polyurethane can be firmly bonded to the electrode layer and the piezoelectric layer by being heated and temporarily melted. By firmly adhering the elastic body layer, a decrease in sensitivity can be reduced when the elastic layer is stretched by repeated strain.
エラストマーのポアソン比は略0.5である。このため、エラストマー製の弾性体層においては、厚さ方向に加えられた力がそのまま面方向の力として作用する。このため、弾性体層の厚さが大きいほど、圧電層の歪み増大効果が大きく、発生電荷量増加効果が大きくなる。一方、弾性体層の厚さが大きくなると、圧電素子が厚くなるため、単位体積あたりの発電量が小さくなるおそれがある。このため、弾性体層一層あたりの厚さは、例えば、5μm以上1000μm以下にするとよい。 The Poisson's ratio of the elastomer is about 0.5. For this reason, in the elastic body layer made of elastomer, the force applied in the thickness direction acts as the force in the surface direction as it is. For this reason, the greater the thickness of the elastic layer, the greater the effect of increasing the distortion of the piezoelectric layer and the greater the effect of increasing the amount of generated charge. On the other hand, when the thickness of the elastic layer is increased, the piezoelectric element is increased, and thus the power generation amount per unit volume may be decreased. For this reason, the thickness per elastic layer is preferably 5 μm or more and 1000 μm or less, for example.
<外装材>
圧電素子を収容する外装材に要求される特性は、繰り返し加わる荷重に対する耐久性、耐水性、耐湿性、難燃性などがあり、トランスデューサの用途により異なる。よって、外装材の材質は、トランスデューサの用途に応じて適宜決定すればよい。
<Exterior material>
The characteristics required of the exterior material that accommodates the piezoelectric element include durability against repeated loads, water resistance, moisture resistance, flame resistance, and the like, and varies depending on the application of the transducer. Therefore, the material of the exterior material may be appropriately determined according to the use of the transducer.
例えば、道路に埋め込んだり道路上にて使用する形態においては、耐久性に加えて、耐水性、耐湿性、耐オゾン性などが要求される。この場合、外装材の材料としては、ブチルゴム、シリコーンゴム、NBR、H-NBR、アクリルゴム、天然ゴム、イソプレンゴム、EPDMなどが好適である。ブチルゴムには、レギュラーブチルゴム、塩素化ブチルゴム、臭素化ブチルゴムなどがある。これらの一種を単独で、あるいは二種以上を混合して用いればよい。また、水分の透過を抑制するために、タルク、クレー、モンモリロナイト、合成スメクタイトなどの低透湿材などを配合してもよい。低透湿材などのフィラーの添加は、トランスデューサを配置する場所によって適宜調整すればよい。例えば、道路に埋め込む場合には、道路上に配置する場合と比較して、耐水性、耐湿性、耐オゾン性はそれほど高くなくてもよい。一方、コンクリートなどの硬い物の下に配置すると、圧電素子に力が加わりにくいため、感度を高める必要がある。この場合、耐久性を向上させるフィラーの量を減らして柔軟性を高めるなどの施策が必要となる。道路上に配置する場合には、荷重源に近いため感度を優先するよりも、水やオゾンなどの条件が厳しくなるため、これらに対する耐久性を高めるような配合にするとよい。 For example, in the form of being embedded in a road or used on a road, in addition to durability, water resistance, moisture resistance, ozone resistance and the like are required. In this case, butyl rubber, silicone rubber, NBR, H-NBR, acrylic rubber, natural rubber, isoprene rubber, EPDM and the like are suitable as the material for the exterior material. Examples of butyl rubber include regular butyl rubber, chlorinated butyl rubber, and brominated butyl rubber. One kind of these may be used alone, or two or more kinds may be mixed and used. Moreover, in order to suppress the permeation | transmission of a water | moisture content, you may mix | blend low moisture-permeable materials, such as a talc, clay, a montmorillonite, and a synthetic smectite. What is necessary is just to adjust suitably addition of fillers, such as a low moisture-permeable material, according to the place which arrange | positions a transducer. For example, when embedded in a road, the water resistance, moisture resistance, and ozone resistance do not have to be so high as compared with the case of being placed on the road. On the other hand, if it is placed under a hard object such as concrete, it is difficult to apply force to the piezoelectric element, so it is necessary to increase sensitivity. In this case, it is necessary to take measures such as increasing the flexibility by reducing the amount of filler for improving durability. When placed on the road, conditions such as water and ozone become stricter rather than giving priority to sensitivity because it is close to the load source.
外装材の材質によっては、圧電素子の表面(伸張方向に延在する面)の一部または全部が外装材と接着されていてもよい。しかし、圧電素子の変形をできるだけ阻害しないようにするには、圧電素子の表面と外装材とは接着されていないことが望ましい。外装材は、内部を密閉するものでもよく、内部と外部との間で緩衝部の収容物が移動可能な連通孔を有するものでもよい。また、外装材の外部に、緩衝部の収容物を一時的に収容可能な袋部を設けてもよい。 Depending on the material of the exterior material, part or all of the surface of the piezoelectric element (the surface extending in the extension direction) may be bonded to the exterior material. However, in order to prevent deformation of the piezoelectric element as much as possible, it is desirable that the surface of the piezoelectric element and the exterior material are not bonded. The exterior material may be one that seals the inside, or may have a communication hole through which the contents of the buffer portion can move between the inside and the outside. Moreover, you may provide the bag part which can accommodate the accommodation of a buffer part temporarily in the exterior of an exterior material.
<緩衝部>
押圧により圧電素子が伸張する方向における外装材と圧電素子との間には、気体、不揮発性の液体、および弾性体層よりも弾性率が小さい固体の少なくとも一つが収容される緩衝部が区画される。気体としては、空気の他、窒素、アルゴンなどの不活性ガスが挙げられる。不揮発性の液体としては、プロセスオイル、イオン性液体などが挙げられる。固体としては、弾性体層よりも弾性率が小さいエラストマー、発泡体などが挙げられる。
<Buffer part>
Between the exterior material and the piezoelectric element in the direction in which the piezoelectric element expands due to the pressing, a buffer portion that stores at least one of gas, a non-volatile liquid, and a solid having a smaller elastic modulus than the elastic layer is defined. The Examples of the gas include air and inert gases such as nitrogen and argon. Examples of the non-volatile liquid include process oil and ionic liquid. Examples of the solid include elastomers and foams having a smaller elastic modulus than the elastic layer.
次に、実施例を挙げて本発明をより具体的に説明する。圧電層、電極層、弾性体層、外装材を製造し、これらを適宜組み合わせてトランスデューサを製造してその感度、発生電荷量、および耐久性を評価した。 Next, the present invention will be described more specifically with reference to examples. A piezoelectric layer, an electrode layer, an elastic body layer, and an exterior material were manufactured, and these were appropriately combined to manufacture a transducer, and its sensitivity, generated charge amount, and durability were evaluated.
<圧電層の製造>
[圧電層1]
まず、エラストマーとしてのカルボキシル基変性水素化ニトリルゴムポリマー(ランクセス社製「テルバン(登録商標)XT8889」)100質量部をアセチルアセトンに溶解して、ポリマー溶液を調製した。次に、調製したポリマー溶液に、圧電粒子としてのニオブ酸カリウムナトリウム((K0.5Na0.5Nb1.0)O3)の粉末(d50%粒子径(メジアン径):3μm)385質量部を加えて混練した。続いて、混練物を三本ロールに五回繰り返し通して、スラリーを得た。そして、得られたスラリーに、架橋剤のテトラキス(2-エチルヘキシルオキシ)チタン5質量部を加えてエア攪拌機で混練した後、スラリーをバーコート法により基材上に塗布した。これを150℃で1時間加熱して、厚さ0.06mm(60μm)の圧電層1を製造した。圧電層1における圧電粒子の含有量は、エラストマーを100体積%とした場合の42体積%である。圧電層1の破断伸びは320%であった。
<Manufacture of piezoelectric layer>
[Piezoelectric layer 1]
First, 100 parts by mass of a carboxyl group-modified hydrogenated nitrile rubber polymer (“Terban (registered trademark) XT8889” manufactured by LANXESS) as an elastomer was dissolved in acetylacetone to prepare a polymer solution. Next, a powder of potassium sodium niobate ((K 0.5 Na 0.5 Nb 1.0 ) O 3 ) as piezoelectric particles (d50% particle diameter (median diameter): 3 μm) 385 is added to the prepared polymer solution. A part by mass was added and kneaded. Subsequently, the kneaded material was repeatedly passed through three rolls five times to obtain a slurry. Then, 5 parts by mass of tetrakis (2-ethylhexyloxy) titanium as a cross-linking agent was added to the obtained slurry and kneaded with an air stirrer, and then the slurry was applied onto a substrate by a bar coating method. This was heated at 150 ° C. for 1 hour to produce a
使用したニオブ酸カリウムナトリウムの粉末は、以下の工程により製造した。
(1)第一混合工程
原料として、K2CO3、Na2CO3、Nb2O5の粉末を用いた。これらの粉末を、目的とする焼結体(K0.5Na0.5Nb1.0)O3の組成に基づいて秤量した後、無水アセトン中で16時間湿式混合した。得られた混合粉末を、エバポレーションし、さらにオーブンで乾燥して、アセトンを揮発させた。
(2)仮焼成工程
アセトンを揮発させた後の混合粉末を、アルミナるつぼの中に入れ、そのるつぼを一回り大きなるつぼの中に入れた。内側のるつぼは、混合粉末を覆うように伏せた状態で配置した。この二重るつぼを電気炉の中に入れ、910℃で10時間仮焼成を行った。
(3)第二混合工程
得られた仮焼成物を、乳鉢で粉砕して粉末にした後、この粉末を無水アセトン中で16時間湿式混合した。得られた混合粉末を、エバポレーションし、さらにオーブンで乾燥して、アセトンを揮発させた。
(4)本焼成工程
アセトンを揮発させた後の混合粉末を、(2)と同様に二重るつぼの中に入れ、150℃で1時間、550℃で3時間、1098℃で2時間焼成を行った。
(5)粉砕工程
得られた焼成物を、ボールミルで単粒子に粉砕した。
(6)分級工程
得られた粉末を、メチルエチルケトンに混合し、遠心分離機(日立工機(株)製「CR22G」)にて分級を行い、デカンテーションで分離した後、乾燥させて、ニオブ酸ナトリウムカリウムの単粒子の粉末を得た。
The used potassium sodium niobate powder was produced by the following steps.
(1) First mixing step K 2 CO 3 , Na 2 CO 3 , and Nb 2 O 5 powder were used as raw materials. These powders were weighed based on the composition of the desired sintered body (K 0.5 Na 0.5 Nb 1.0 ) O 3 and then wet mixed in anhydrous acetone for 16 hours. The obtained mixed powder was evaporated and further dried in an oven to volatilize acetone.
(2) Pre-baking process The mixed powder after volatilizing acetone was put in the alumina crucible, and the crucible was put in a large crucible once. The inner crucible was placed face down so as to cover the mixed powder. This double crucible was put in an electric furnace and pre-baked at 910 ° C. for 10 hours.
(3) Second mixing step After the obtained calcined product was pulverized into a powder in a mortar, this powder was wet mixed in anhydrous acetone for 16 hours. The obtained mixed powder was evaporated and further dried in an oven to volatilize acetone.
(4) Main firing step The mixed powder after volatilizing acetone is put into a double crucible in the same manner as in (2), followed by firing at 150 ° C for 1 hour, 550 ° C for 3 hours, and 1098 ° C for 2 hours. went.
(5) Pulverization process The obtained fired product was pulverized into single particles by a ball mill.
(6) Classification process The obtained powder is mixed with methyl ethyl ketone, classified with a centrifuge ("CR22G" manufactured by Hitachi Koki Co., Ltd.), separated by decantation, dried, and niobic acid. Sodium potassium single particle powder was obtained.
[圧電層2]
エラストマーに対する圧電粒子の配合量を840質量部に変更した点以外は、圧電層1と同様にして圧電層2を製造した。圧電層2における圧電粒子の含有量は、エラストマーを100体積%とした場合の67.7体積%である。圧電層2の破断伸びは5%であった。
[Piezoelectric layer 2]
A piezoelectric layer 2 was produced in the same manner as the
<電極層の製造>
[電極層1]
まず、エチルアクリレート(EA)、アクリロニトリル(AN)、およびアリルグリシジルエーテル(AGE)という三種類のモノマーを懸濁重合して、エラストマーとしてのグリシジルエーテル基変性アクリルゴムポリマーを製造した。モノマーの配合割合は、EAを96質量%、ANを2質量%、AGEを2質量%とした。次に、グリシジルエーテル基変性アクリルゴムポリマー68質量部を、ブチルセロソロブアセテートに溶解し、このポリマー溶液に、導電材35質量部、分散剤25質量部、架橋剤6質量部、および架橋促進剤1質量部を添加して液状組成物を調製した(導電材などの原料の詳細は後述する)。続いて、液状組成物を、湿式ジェットミル(吉田機械興業(株)製「ナノヴェイタ(登録商標)」)により粉砕処理した。粉砕処理は、パス運転により、合計6回行った(6パス処理)。1パス目は、ストレート型ノズル(ノズル径170μm)、処理圧力90MPaで行い、2パス目以降は、クロス型ノズル(ノズル径170μm)、処理圧力130MPaで行った。粉砕処理後の液状組成物を離型処理されたポリエチレンテレフタレート(PET)製のフィルム上にバーコート法により塗布した。これを150℃で2時間加熱して、厚さ0.015mm(15μm)の電極層1を製造した。電極層1の破断伸びは320%、自然状態の体積抵抗率は0.05Ω・cm、10%伸張状態の体積抵抗率は0.1Ω・cmであった。電極層1の自然状態および10%伸張状態の体積抵抗率は、抵抗率計((株)三菱ケミカルアナリテック製「ロレスタ(登録商標)GP」)により測定した(以下、電極層2についても同じ)。
<Manufacture of electrode layer>
[Electrode layer 1]
First, three monomers of ethyl acrylate (EA), acrylonitrile (AN), and allyl glycidyl ether (AGE) were subjected to suspension polymerization to produce a glycidyl ether group-modified acrylic rubber polymer as an elastomer. The blending ratio of the monomers was 96 mass% EA, 2 mass% AN, and 2 mass% AGE. Next, 68 parts by mass of a glycidyl ether group-modified acrylic rubber polymer is dissolved in butyl cellosolve acetate. In this polymer solution, 35 parts by mass of a conductive material, 25 parts by mass of a dispersant, 6 parts by mass of a crosslinking agent, and crosslinking acceleration are added. A liquid composition was prepared by adding 1 part by mass of an agent (details of raw materials such as a conductive material will be described later). Subsequently, the liquid composition was pulverized by a wet jet mill (“Nanovaita (registered trademark)” manufactured by Yoshida Kikai Kogyo Co., Ltd.). The pulverization process was performed a total of 6 times by the pass operation (6-pass process). The first pass was performed with a straight nozzle (nozzle diameter 170 μm) and a processing pressure of 90 MPa, and the second and subsequent passes were performed with a cross-type nozzle (nozzle diameter 170 μm) and a processing pressure of 130 MPa. The liquid composition after the pulverization treatment was applied to a release-treated polyethylene terephthalate (PET) film by a bar coating method. This was heated at 150 ° C. for 2 hours to produce an
液状組成物を調製するのに使用した原料の詳細は以下のとおりである。
導電材:薄層黒鉛、(株)アイテック製「iGurafen-α」。
分散剤:高分子量ポリエステル酸アミドアミン塩、楠本化成(株)「ディスパロン(登録商標)DA7301」。
架橋剤:アミノ基末端ブタジエン-アクリロニトリル共重合体、CVC Thermoset Specialties Ltd.「ATBN1300×16」。
架橋促進剤:亜鉛錯体、KING INDUSTRIES,INC「XK-614」。
The details of the raw materials used for preparing the liquid composition are as follows.
Conductive material: Thin-layer graphite, “iGurafen-α” manufactured by ITEC.
Dispersant: High molecular weight polyester acid amidoamine salt, Enomoto Kasei Co., Ltd. “Disparon (registered trademark) DA7301”.
Cross-linking agent: amino-terminated butadiene-acrylonitrile copolymer, CVC Thermoset Specialties Ltd. “ATBN1300 × 16”.
Cross-linking accelerator: zinc complex, KING INDUSTRIES, INC “XK-614”.
[電極層2]
導電性銀ペースト(東洋紡(株)製「DW250-H-5」)を、離型処理されたPET製のフィルム上にバーコート法により塗布した。これを150℃で1時間加熱して、厚さ0.015mm(15μm)の電極層2を製造した。電極層2の破断伸びは4%、自然状態の体積抵抗率は0.0002Ω・cmであり、10%伸張状態の体積抵抗率は破断により測定できなかった。
[Electrode layer 2]
A conductive silver paste (“DW250-H-5” manufactured by Toyobo Co., Ltd.) was applied to the release-treated PET film by a bar coating method. This was heated at 150 ° C. for 1 hour to produce an electrode layer 2 having a thickness of 0.015 mm (15 μm). The elongation at break of the electrode layer 2 was 4%, the volume resistivity in the natural state was 0.0002 Ω · cm, and the volume resistivity in the 10% stretched state could not be measured due to the break.
<弾性体層>
[弾性体層1]
熱可塑性のポリエーテル系ポリウレタンシート(日本マタイ(株)製「エスマー(登録商標)URS」、厚さ0.25mm)を弾性体層1とした。弾性体層1の破断伸びは600%、弾性率は23MPaであった。
<Elastic body layer>
[Elastic body layer 1]
A thermoplastic polyether-based polyurethane sheet (“Esmer (registered trademark) URS” manufactured by Nippon Matai Co., Ltd., thickness 0.25 mm) was used as the
[弾性体層2]
熱可塑性ポリエステルエラストマー(東レ・デュポン(株)製「ハイトレル(登録商標)3046」)を厚さ0.18mm(180μm)のシート状に成形して、弾性体層2とした。弾性体層2の破断伸びは550%、弾性率は19MPaであった。
[Elastic body layer 2]
A thermoplastic polyester elastomer (“Hytrel (registered trademark) 3046” manufactured by Toray DuPont Co., Ltd.) was molded into a sheet shape having a thickness of 0.18 mm (180 μm) to obtain an elastic body layer 2. The elastic body layer 2 had an elongation at break of 550% and an elastic modulus of 19 MPa.
[弾性体層3]
熱可塑性ポリエステルエラストマー(東レ・デュポン(株)製「ハイトレル4047」)を厚さ0.18mm(180μm)のシート状に成形して、弾性体層3とした。弾性体層3の破断伸びは500%、弾性率は46MPaであった。
[Elastic body layer 3]
A thermoplastic polyester elastomer (“Hytrel 4047” manufactured by Toray DuPont Co., Ltd.) was molded into a sheet shape having a thickness of 0.18 mm (180 μm) to obtain an elastic body layer 3. The elastic body layer 3 had an elongation at break of 500% and an elastic modulus of 46 MPa.
[弾性体層4]
ポリエステルフィルム(三菱ケミカル(株)製「ダイアホイル(登録商標)」、厚さ0.1mm(100μm))を弾性体層4とした。弾性体層4の破断伸びは90%、弾性率は1500MPaであった。
[Elastic body layer 4]
A polyester film (“Diafoil (registered trademark)” manufactured by Mitsubishi Chemical Corporation, thickness 0.1 mm (100 μm)) was used as the
<外装材>
まず、塩素化ブチルゴム(JSR(株)製「HT1066」)90質量部と、レギュラーブチルゴム(JSR(株)製「JSR ブチル365」)10質量部と、吸水性ポリマーのポリアクリル酸塩粉末((株)日本触媒製「アクアリック(登録商標)CS-S6」、平均粒子径15μm)150質量部と、架橋助剤の酸化亜鉛5質量部と、架橋剤(田岡化学工業(株)製「タッキロール(登録商標)201」)10質量部と、タルク(日本タルク(株)製「ミクロエース(登録商標)K-1」)200質量部と、をロールにより練り合わせ、マスターバッチを作製した。次に、マスターバッチをトルエンに溶解して、塗料を調製した。そして、調製した塗料を基材に塗布し、塗膜を乾燥させた後、150℃で20分間加熱して硬化させた。得られたシートを外装材として用いた。得られたシートの弾性率は60MPa、破断伸びは60%であった。
<Exterior material>
First, 90 parts by mass of chlorinated butyl rubber (“HT1066” manufactured by JSR Corp.), 10 parts by mass of regular butyl rubber (“JSR butyl 365” manufactured by JSR Corp.), and polyacrylate powder (( 150 parts by mass “Aquaric (registered trademark) CS-S6” manufactured by Nippon Shokubai Co., Ltd., an average particle size of 15 μm), 5 parts by mass of zinc oxide as a crosslinking assistant, and “Tacchiroll” manufactured by Taoka Chemical Industry Co., Ltd. (Registered trademark) 201 ") 10 parts by mass and 200 parts by mass of talc (" Microace (registered trademark) K-1 "manufactured by Nippon Talc Co., Ltd.) were kneaded with a roll to prepare a masterbatch. Next, the masterbatch was dissolved in toluene to prepare a paint. And after applying the prepared coating material to a base material and drying a coating film, it heated at 150 degreeC for 20 minute (s), and was hardened. The obtained sheet was used as an exterior material. The obtained sheet had an elastic modulus of 60 MPa and an elongation at break of 60%.
<トランスデューサの製造>
製造した圧電層、電極層、弾性体層を適宜組み合わせて積層体を製造し、それを外装材に収容してトランスデューサを製造した。積層体は、次のようにして製造した。まず、圧電層の厚さ方向の二面(上面および下面)に各々電極層を配置して、ラミネーター(フジプラ(株)製「LPD3223」)を用いて圧電層と電極層とを圧着した。次に、弾性体層を上側の電極層、または上下両方の電極層に積層し、弾性体層の表面にアイロンをあて、弾性体層を軟化させることにより、電極層に弾性体層を融着させた。前者の場合、積層体の構成は、「弾性体層/ユニット(電極層/圧電層/電極層)」になり(以下「第一の積層体」と称す)、後者の場合、積層体の構成は、「弾性体層/ユニット(電極層/圧電層/電極層)/弾性体層」になる(以下「第二の積層体」と称す)。いずれの積層体も、縦30mm、横30mmの正方形薄板状を呈している。積層体の電極層に直流電源を接続し、圧電層に20V/μmの電界を5分間印加して、分極処理を行った。その後、120℃で30分間保持してエージング処理を行った。
<Manufacture of transducer>
A laminated body was manufactured by appropriately combining the manufactured piezoelectric layer, electrode layer, and elastic body layer, and was housed in an exterior material to manufacture a transducer. The laminate was manufactured as follows. First, electrode layers were respectively arranged on two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric layer, and the piezoelectric layer and the electrode layer were pressure-bonded using a laminator (“LPD3223” manufactured by Fuji Pla Co., Ltd.). Next, the elastic layer is laminated on the upper electrode layer, or both upper and lower electrode layers, and the elastic layer is softened by applying an iron to the surface of the elastic layer to soften the elastic layer. I let you. In the former case, the structure of the laminated body is “elastic layer / unit (electrode layer / piezoelectric layer / electrode layer)” (hereinafter referred to as “first laminated body”), and in the latter case, the structure of the laminated body. Becomes “elastic layer / unit (electrode layer / piezoelectric layer / electrode layer) / elastic layer” (hereinafter referred to as “second laminate”). All the laminates have a square thin plate shape with a length of 30 mm and a width of 30 mm. A direct current power source was connected to the electrode layer of the laminate, and an electric field of 20 V / μm was applied to the piezoelectric layer for 5 minutes to perform polarization treatment. Then, the aging process was performed by holding at 120 ° C. for 30 minutes.
[実施例1]
圧電層1、電極層1、弾性体層1を用いた第一の積層体と第二の積層体とを組み合わせてトランスデューサを製造した。まず、第一の積層体を四つ重ね、さらに第二の積層体を一つ重ねて、合計五つの積層体からなる圧電素子を製造した。製造した圧電素子の構成(各層の積層構造)は、上記第一実施形態のトランスデューサと同じである(前出図3参照)。
[Example 1]
A transducer was manufactured by combining the first laminated body using the
圧電素子の厚さ方向の二面(上面および下面)に、縦40mm、横40mmの正方形状の外装材シートを一枚ずつ、各々の面の中心が一致するように配置した。そして、外装材シートの外周より1mmから2mmまでの周縁部を、テクノインパルスクリップシーラーZ1で溶着した。このようにして、圧電素子の拡径方向において、圧電素子と外装材シートとの間に幅4mmの枠状の緩衝部を区画した。緩衝部には空気が収容されている。製造したトランスデューサを、実施例1のトランスデューサと称す。 A square-shaped exterior material sheet having a length of 40 mm and a width of 40 mm was placed on two surfaces (upper surface and lower surface) of the piezoelectric element in the thickness direction so that the centers of the surfaces coincided. And the peripheral part from 1 mm to 2 mm from the outer periphery of an exterior material sheet | seat was welded with the techno impulse clip sealer Z1. In this manner, a frame-shaped buffer portion having a width of 4 mm was defined between the piezoelectric element and the exterior material sheet in the diameter expansion direction of the piezoelectric element. Air is accommodated in the buffer portion. The manufactured transducer is referred to as the transducer of Example 1.
[実施例2]
圧電層1、電極層1、弾性体層1を用いた第二の積層体(弾性体層1/電極層1/圧電層1/電極層1/弾性体層1)のみから圧電素子を構成した点以外は、実施例1と同様にしてトランスデューサを製造した。製造したトランスデューサを、実施例1のトランスデューサと称す。
[Example 2]
A piezoelectric element is composed only of the second laminated body (
[実施例3]
緩衝部に空気ではなく、弾性体を収容した点以外は、実施例1と同様にしてトランスデューサを製造した。弾性体としては、シリコーンゴムシート(信越化学工業(株)製「KE1950-10」、弾性率0.4MPa)を用いた。緩衝部への弾性体の収容方法は、以下のとおりである。まず、縦35mm、横35mmの正方形状のシリコーンゴムシートを準備し、その中央部分を縦30mm、横30mmの正方形状にくり抜いた。次に、シリコーンゴムシートのくり抜き部に圧電素子を配置して、圧電素子の外周をシリコーンゴムで囲んだ状態にした。この状態で、圧電素子の厚さ方向の二面に、縦40mm、横40mmの正方形状の外装材シートを一枚ずつ、各々の面の中心が一致するように配置した。そして、外装材シートの外周より4mmから5mmまでの周縁部を、テクノインパルスクリップシーラーZ1で溶着した。このようにして、圧電素子の拡径方向において、圧電素子と外装材シートとの間にシリコーンゴムが収容された幅5mmの枠状の緩衝部を区画した。製造したトランスデューサを、実施例3のトランスデューサと称す。
[Example 3]
A transducer was manufactured in the same manner as in Example 1 except that an elastic body was accommodated in the buffer portion instead of air. A silicone rubber sheet (“KE1950-10” manufactured by Shin-Etsu Chemical Co., Ltd., elastic modulus 0.4 MPa) was used as the elastic body. The method of accommodating the elastic body in the buffer portion is as follows. First, a square silicone rubber sheet having a length of 35 mm and a width of 35 mm was prepared, and a central portion thereof was cut into a square shape having a length of 30 mm and a width of 30 mm. Next, a piezoelectric element was disposed in the cut-out portion of the silicone rubber sheet, and the outer periphery of the piezoelectric element was surrounded by silicone rubber. In this state, square-shaped exterior material sheets each having a length of 40 mm and a width of 40 mm were arranged on two surfaces in the thickness direction of the piezoelectric element so that the centers of the surfaces coincided with each other. And the peripheral part from 4 mm to 5 mm from the outer periphery of an exterior material sheet | seat was welded with the techno impulse clip sealer Z1. In this manner, a frame-shaped buffer portion having a width of 5 mm in which silicone rubber was accommodated was defined between the piezoelectric element and the exterior material sheet in the diameter expansion direction of the piezoelectric element. The manufactured transducer is referred to as the transducer of Example 3.
[実施例4]
圧電素子の弾性体層を、弾性体層2に変更した点以外は、実施例1と同様にしてトランスデューサを製造した。製造したトランスデューサを、実施例4のトランスデューサと称す。
[Example 4]
A transducer was manufactured in the same manner as in Example 1 except that the elastic layer of the piezoelectric element was changed to the elastic layer 2. The manufactured transducer is referred to as the transducer of Example 4.
[実施例5]
圧電素子の弾性体層を、弾性体層3に変更した点以外は、実施例1と同様にしてトランスデューサを製造した。製造したトランスデューサを、実施例5のトランスデューサと称す。
[Example 5]
A transducer was manufactured in the same manner as in Example 1 except that the elastic layer of the piezoelectric element was changed to the elastic layer 3. The manufactured transducer is referred to as the transducer of Example 5.
[実施例6]
圧電素子の厚さ方向の二面(上面および下面)全体を外装材に接着した点以外は、実施例1と同様にしてトランスデューサを製造した。まず、縦40mm、横40mmの正方形状の外装材シートに、縦30mm、横30mmの正方形状の接着シート(日本マタイ(株)製「エルファン(登録商標)UH370」)を、各々の面の中心が一致するように貼り合わせた。次に、この積層シートを圧電素子の厚さ方向の二面に一枚ずつ、各々の面の中心が一致するように配置した。そして、接着シートの部分に対応する積層シートの表面をアイロンで加熱することにより、接着シートを介して圧電素子と外装材とを接着した。それから、外装材シートの外周より1mmから2mmまでの周縁部を、テクノインパルスクリップシーラーZ1で溶着した。このようにして、圧電素子の拡径方向において、圧電素子と外装材シートとの間に幅4mmの枠状の緩衝部を区画した。緩衝部には空気が収容されている。製造したトランスデューサを、実施例6のトランスデューサと称す。
[Example 6]
A transducer was manufactured in the same manner as in Example 1 except that the entire two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric element were bonded to the exterior material. First, a square-shaped exterior material sheet having a length of 40 mm and a width of 40 mm is attached to a square-shaped adhesive sheet having a length of 30 mm and a width of 30 mm (“Elfan (registered trademark) UH370” manufactured by Nippon Matai Co., Ltd.) on each surface. They were pasted so that the centers coincided. Next, the laminated sheets were arranged one by one on two surfaces in the thickness direction of the piezoelectric element so that the centers of the surfaces coincided with each other. And the piezoelectric element and the exterior material were adhere | attached through the adhesive sheet by heating the surface of the lamination sheet corresponding to the part of an adhesive sheet with an iron. Then, the peripheral part from 1 mm to 2 mm from the outer periphery of the exterior material sheet was welded with a techno impulse clip sealer Z1. In this manner, a frame-shaped buffer portion having a width of 4 mm was defined between the piezoelectric element and the exterior material sheet in the diameter expansion direction of the piezoelectric element. Air is accommodated in the buffer portion. The manufactured transducer is referred to as the transducer of Example 6.
[実施例7]
接着シートの大きさを縦5mm、横5mmに変更した点以外は、実施例6と同様にしてトランスデューサを製造した。製造したトランスデューサを、実施例7のトランスデューサと称す。実施例7のトランスデューサにおいては、圧電素子の厚さ方向の二面(上面および下面)の一部(5mm四方)が外装材に接着されている。
[Example 7]
A transducer was manufactured in the same manner as in Example 6 except that the size of the adhesive sheet was changed to 5 mm in length and 5 mm in width. The manufactured transducer is referred to as the transducer of Example 7. In the transducer of Example 7, a part (5 mm square) of two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric element is bonded to the exterior material.
[比較例1]
接着シートの大きさを、外装材の大きさと同じ縦40mm、横40mmに変更した点以外は、実施例6と同様にしてトランスデューサを製造した。製造したトランスデューサを、比較例1のトランスデューサと称す。比較例1のトランスデューサにおいては、圧電素子の厚さ方向の二面(上面および下面)の全体が外装材に接着されている。また、圧電素子と積層されていない外装材の周縁部も接着シートを介して接着されているため、圧電素子の拡径方向において、圧電素子と外装材シートとの間には緩衝部は区画されていない。
[Comparative Example 1]
A transducer was manufactured in the same manner as in Example 6 except that the size of the adhesive sheet was changed to 40 mm in length and 40 mm in width as the size of the exterior material. The manufactured transducer is referred to as the transducer of Comparative Example 1. In the transducer of Comparative Example 1, the entire two surfaces (upper surface and lower surface) in the thickness direction of the piezoelectric element are bonded to the exterior material. Further, since the peripheral portion of the exterior material that is not laminated with the piezoelectric element is also bonded via the adhesive sheet, the buffer portion is partitioned between the piezoelectric element and the exterior material sheet in the diameter expansion direction of the piezoelectric element. Not.
[比較例2]
弾性体の種類を、ポリエステルフィルム(三菱ケミカル(株)製「ダイアホイル(登録商標)」、弾性率1500MPa)に変更した点以外は、実施例3と同様にしてトランスデューサを製造した。製造したトランスデューサを、比較例2のトランスデューサと称す。
[Comparative Example 2]
A transducer was manufactured in the same manner as in Example 3 except that the type of the elastic body was changed to a polyester film ("Diafoil (registered trademark)" manufactured by Mitsubishi Chemical Corporation, elastic modulus 1500 MPa). The manufactured transducer is referred to as the transducer of Comparative Example 2.
[比較例3]
外装材を用いない点以外は、実施例1と同様にしてトランスデューサを製造した。製造したトランスデューサを、比較例3のトランスデューサと称す。比較例3のトランスデューサは、合計五つの積層体からなる圧電素子のみからなる。
[Comparative Example 3]
A transducer was manufactured in the same manner as in Example 1 except that no exterior material was used. The manufactured transducer is referred to as the transducer of Comparative Example 3. The transducer of Comparative Example 3 is composed of only piezoelectric elements composed of a total of five laminated bodies.
[参考例1]
圧電素子の圧電層および電極層を、圧電層2および電極層2に変更した点以外は、実施例1と同様にしてトランスデューサを製造した。製造したトランスデューサを、参考例1のトランスデューサと称す。
[Reference Example 1]
A transducer was manufactured in the same manner as in Example 1 except that the piezoelectric layer and the electrode layer of the piezoelectric element were changed to the piezoelectric layer 2 and the electrode layer 2. The manufactured transducer is referred to as the transducer of Reference Example 1.
[参考例2]
圧電素子の弾性体層を、弾性体層4に変更した点以外は、実施例1と同様にしてトランスデューサを製造した。製造したトランスデューサを、参考例2のトランスデューサと称す。
[Reference Example 2]
A transducer was manufactured in the same manner as in Example 1 except that the elastic layer of the piezoelectric element was changed to the
<トランスデューサの評価>
表1に、製造したトランスデューサの構成および評価結果を示す。表1中、ユニットの破断伸び、電極層の体積抵抗率、発生電荷量、感度、耐久性の評価方法は、以下のとおりである。
<Evaluation of transducer>
Table 1 shows the configuration and evaluation results of the manufactured transducer. In Table 1, evaluation methods of unit elongation at break, volume resistivity of the electrode layer, amount of generated charges, sensitivity, and durability are as follows.
[ユニットの破断伸び]
圧電層およびそれを挟んで配置される一対の電極層からなるユニットの破断伸びを、上述した方法で測定し、破断伸びが10%以上なら良好(表1中、○印で示す)、10%未満なら不良(表1中、×印で示す)と評価した。
[Unit elongation at break]
The elongation at break of the unit composed of the piezoelectric layer and a pair of electrode layers arranged between them is measured by the method described above. If the elongation at break is 10% or more, good (indicated by a circle in Table 1), 10% If it was less than that, it was evaluated as defective (indicated by x in Table 1).
[電極層の体積抵抗率]
電極層の自然状態の体積抵抗率と、10%伸張状態の体積抵抗率と、の両方が100Ω・cm以下の場合を良好(表1中、○印で示す)、いずれか一方が100Ω・cmを超える、あるいは測定不可の場合を不良(表1中、×印で示す)と評価した。
[Volume resistivity of electrode layer]
Good when both the volume resistivity in the natural state of the electrode layer and the volume resistivity in the 10% stretched state are 100 Ω · cm or less (indicated by ○ in Table 1), either one is 100 Ω · cm The case where the value exceeds or was not measurable was evaluated as defective (indicated by x in Table 1).
[発生電荷量]
トランスデューサを疲労耐久試験機((株)島津製作所製「MMT-101N」)に設置して、直径10mmの円柱状の治具で圧縮荷重6Nのsin波(周波数1Hz)を加えた。その時の発生電荷量を、チャージアンプ(ブリュエル・ケアー社製「NEXUS Charge Amplifier type2692」)とオシロスコープ(横河電機(株)「DLM2022」)とを用いて測定した。
[Amount of generated charge]
The transducer was installed in a fatigue endurance tester (“MMT-101N” manufactured by Shimadzu Corporation), and a sine wave (
[感度]
トランスデューサを疲労耐久試験機(同上)に設置して、直径10mmの円柱状の治具で圧縮荷重2N、4N、6Nのsin波(周波数1Hz)を順に加えた。その時の発生電荷量を、チャージアンプ(同上)とオシロスコープ(同上)とを用いて測定した。そして、各々の圧縮荷重ごとに測定された発生電荷量を加えた応力で除し、その平均値を算出して、トランスデューサの感度とした。
[sensitivity]
The transducer was installed in a fatigue endurance tester (same as above), and sine waves (
[耐久性]
トランスデューサを温度60℃、湿度90%の環境下で3000時間静置した。それから、トランスデューサを疲労耐久試験機(同上)に設置して、直径10mmの円柱状の治具で圧縮荷重10Nのsin波(周波数10Hz)を10万回加えた後、引張方向に定変位振動5%のsin波(周波数10Hz)を1万回加えた。その後、上述した方法で、感度および発生電荷量を測定した。感度および発生電荷量の両方の値が、疲労耐久試験前の値に対して80%以上である場合を耐久性良好(表1中、○印で示す)、80%未満である場合を耐久性不良(表1中、×印で示す)と評価した。
The transducer was allowed to stand for 3000 hours in an environment of a temperature of 60 ° C. and a humidity of 90%. Then, the transducer was installed in a fatigue endurance tester (same as above), and a sine wave (
表1に示すように、緩衝部を有する実施例1~7のトランスデューサによると、いずれも発生電荷量が10-9Cオーダーと大きくなり、感度も良好であった。発生電荷量が大きいことから、発電量が大きいことがわかる。また、変位を繰り返した後の耐久性も満足いくレベルであった。これに対して、緩衝部を有さない比較例1のトランスデューサによると、発生電荷量が10-10Cオーダーと小さくなり、感度も大幅に低下した。また、緩衝部に弾性体層よりも弾性率が大きい固体(ポリエステルフィルム)を配置した比較例2のトランスデューサにおいても、発生電荷量が小さく、感度が低くなった。また、外装材を有しない比較例3のトランスデューサによると、発生電荷量は大きく、感度も良好であったが、耐久性が悪くなった。なお、参考例1のトランスデューサにおいては、圧電層および電極層が柔軟性に乏しかったため、電極層の体積抵抗率、ユニットの破断伸びがいずれも不良であった。このため、発生電荷量が大きく感度も満足いくレベルであったが、耐久性が悪くなった。また、参考例2のトランスデューサは、弾性体層に弾性率が非常に大きいポリエステルフィルムを用いたため、弾性体層による圧電層の歪み増大効果が発揮されず、所望の発生電荷量および感度が得られなかった。 As shown in Table 1, according to the transducers of Examples 1 to 7 having the buffer portion, the generated charge amount was as large as 10 −9 C order, and the sensitivity was good. Since the generated charge amount is large, it can be seen that the power generation amount is large. Further, the durability after repeated displacement was at a satisfactory level. On the other hand, according to the transducer of Comparative Example 1 having no buffer portion, the amount of generated charges was as small as 10 −10 C order, and the sensitivity was greatly reduced. Further, in the transducer of Comparative Example 2 in which a solid (polyester film) having a larger elastic modulus than the elastic layer is disposed in the buffer portion, the generated charge amount is small and the sensitivity is low. Further, according to the transducer of Comparative Example 3 having no exterior material, the generated charge amount was large and the sensitivity was good, but the durability was deteriorated. In the transducer of Reference Example 1, since the piezoelectric layer and the electrode layer were poor in flexibility, the volume resistivity of the electrode layer and the breaking elongation of the unit were both poor. For this reason, although the amount of generated charges was large and the sensitivity was satisfactory, the durability deteriorated. In addition, since the transducer of Reference Example 2 uses a polyester film having a very large elastic modulus for the elastic layer, the effect of increasing the distortion of the piezoelectric layer by the elastic layer is not exhibited, and a desired generated charge amount and sensitivity can be obtained. There wasn't.
本発明のトランスデューサは、発電量が大きく耐久性に優れるため、道路に埋め込んで人や車からの振動により発電する発電装置などに有用である。また、本発明のトランスデューサは、感度が高く小さな荷重を検出可能であるため呼吸状態や心拍数を測定する生体情報センサとして好適である。この他、ロボット(産業用、コミュニケーション用を含む)、医療用、介護用、健康用、スポーツ機器、自動車などの圧力センサとして好適である。 Since the transducer of the present invention has a large amount of power generation and excellent durability, it is useful for a power generation device that is embedded in a road and generates power by vibration from a person or a car. Moreover, since the transducer of the present invention is highly sensitive and can detect a small load, it is suitable as a biological information sensor for measuring a respiratory state and a heart rate. In addition, it is suitable as a pressure sensor for robots (including industrial use and communication use), medical use, nursing care, health use, sports equipment, and automobiles.
1:発電システム、10:トランスデューサ、20、200~209:圧電素子、21:圧電層、22a、22b:電極層、23a、23b、230:弾性体層、24:ユニット(電極層/圧電層/電極層)、30:外装材、31:緩衝部、40:電気回路、41、410、411:配線、42:整流回路、43:コンデンサ、44:スイッチ、45:負荷。 1: power generation system, 10: transducer, 20, 200 to 209: piezoelectric element, 21: piezoelectric layer, 22a, 22b: electrode layer, 23a, 23b, 230: elastic layer, 24: unit (electrode layer / piezoelectric layer / Electrode layer), 30: exterior material, 31: buffer, 40: electric circuit, 41, 410, 411: wiring, 42: rectifier circuit, 43: capacitor, 44: switch, 45: load.
Claims (11)
該圧電素子を収容する外装材と、を備え、
押圧により該圧電素子が伸張する方向における該外装材と該圧電素子との間には、気体、不揮発性の液体、および該弾性体層よりも弾性率が小さい固体の少なくとも一つが収容される緩衝部が区画されることを特徴とするトランスデューサ。 A piezoelectric element having a piezoelectric layer including an elastomer and piezoelectric particles, an electrode layer disposed with the piezoelectric layer interposed therebetween, and an elastic body layer disposed at least on the outermost layer;
An exterior material that houses the piezoelectric element,
A buffer that accommodates at least one of gas, a non-volatile liquid, and a solid having a smaller elastic modulus than the elastic layer between the exterior material and the piezoelectric element in a direction in which the piezoelectric element expands due to pressing. A transducer characterized in that the section is partitioned.
該圧電素子の表面は、前記外装材に接着されていない請求項1ないし請求項7のいずれかに記載のトランスデューサ。 In the piezoelectric element, when the surface extending in the extension direction is the surface,
The transducer according to claim 1, wherein a surface of the piezoelectric element is not bonded to the exterior material.
該トランスデューサから電気エネルギーを取り出すための電気回路と、
を備える発電システム。 A transducer according to claim 9;
An electrical circuit for extracting electrical energy from the transducer;
A power generation system comprising:
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| JP2018015185A JP7045777B2 (en) | 2018-01-31 | 2018-01-31 | Transducer and power generation system using it |
| JP2018-015185 | 2018-07-10 |
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| PCT/JP2018/047490 Ceased WO2019150850A1 (en) | 2018-01-31 | 2018-12-25 | Transducer and power-generating system using same |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021158215A (en) * | 2020-03-26 | 2021-10-07 | 三菱ケミカル株式会社 | Laminated piezoelectric sheet |
| CN115252238A (en) * | 2022-08-04 | 2022-11-01 | 北京安颂科技有限公司 | Pressure measuring device and pressure measuring equipment |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR102375721B1 (en) * | 2019-11-04 | 2022-03-17 | (주)에스제이인스트루먼트 | A Ultrasonic Transducer Assembly |
| FR3117678B1 (en) * | 2020-12-16 | 2024-02-23 | Arkema France | Composite article based on a thermoplastic matrix integrating at least one transducer comprising a piezoelectric polymer |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014072285A (en) * | 2012-09-28 | 2014-04-21 | Tokai Rubber Ind Ltd | Transducer |
| WO2014185530A1 (en) * | 2013-05-16 | 2014-11-20 | 三井化学株式会社 | Pressing-detection device and touch panel |
| WO2016121278A1 (en) * | 2015-01-28 | 2016-08-04 | 京セラ株式会社 | Laminated piezoelectric element, injection device provided with same, and fuel injection system |
| JP2017028323A (en) * | 2015-07-16 | 2017-02-02 | 住友理工株式会社 | Piezoelectric sensor |
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| JP4922879B2 (en) * | 2007-03-30 | 2012-04-25 | 東海ゴム工業株式会社 | Actuator |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014072285A (en) * | 2012-09-28 | 2014-04-21 | Tokai Rubber Ind Ltd | Transducer |
| WO2014185530A1 (en) * | 2013-05-16 | 2014-11-20 | 三井化学株式会社 | Pressing-detection device and touch panel |
| WO2016121278A1 (en) * | 2015-01-28 | 2016-08-04 | 京セラ株式会社 | Laminated piezoelectric element, injection device provided with same, and fuel injection system |
| JP2017028323A (en) * | 2015-07-16 | 2017-02-02 | 住友理工株式会社 | Piezoelectric sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021158215A (en) * | 2020-03-26 | 2021-10-07 | 三菱ケミカル株式会社 | Laminated piezoelectric sheet |
| JP7491013B2 (en) | 2020-03-26 | 2024-05-28 | 三菱ケミカル株式会社 | Multilayer Piezoelectric Sheet |
| CN115252238A (en) * | 2022-08-04 | 2022-11-01 | 北京安颂科技有限公司 | Pressure measuring device and pressure measuring equipment |
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| JP7045777B2 (en) | 2022-04-01 |
| JP2019134070A (en) | 2019-08-08 |
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