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WO2019009396A1 - Dispositif optique - Google Patents

Dispositif optique Download PDF

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Publication number
WO2019009396A1
WO2019009396A1 PCT/JP2018/025638 JP2018025638W WO2019009396A1 WO 2019009396 A1 WO2019009396 A1 WO 2019009396A1 JP 2018025638 W JP2018025638 W JP 2018025638W WO 2019009396 A1 WO2019009396 A1 WO 2019009396A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable
axis direction
electrode
lever
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/025638
Other languages
English (en)
Japanese (ja)
Inventor
達哉 杉本
智史 鈴木
恭輔 港谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2018080743A external-priority patent/JP6514804B1/ja
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to CN201880043756.0A priority Critical patent/CN110799889B/zh
Priority to EP18828995.3A priority patent/EP3650918B1/fr
Priority to US16/625,687 priority patent/US12136893B2/en
Publication of WO2019009396A1 publication Critical patent/WO2019009396A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0059—Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0013—Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0163—Spring holders

Definitions

  • the present disclosure relates to an optical device configured as, for example, a MEMS (Micro Electro Mechanical Systems) device.
  • MEMS Micro Electro Mechanical Systems
  • Such an optical device may include a movable comb electrode having a plurality of movable comb teeth, and a fixed comb electrode having a plurality of fixed comb teeth arranged alternately with the plurality of movable comb teeth.
  • the movable comb electrode and the fixed comb electrode as described above are used as a driving electrode, a monitoring electrode, or a driving and monitoring electrode.
  • a movable comb electrode and a fixed comb electrode are used as electrodes for driving, a voltage is applied between the movable comb electrode and the fixed comb electrode to move the movable part along the moving direction. Be done.
  • a movable comb electrode and a fixed comb electrode are used as electrodes for monitoring, in order to grasp the position of the movable part moving along the moving direction, the movable comb electrode and the fixed comb electrode are used. Capacitance is detected.
  • the movable comb electrode and the fixed comb electrode When the movable comb electrode and the fixed comb electrode are used in any of the applications, the movable comb electrode moves integrally with the movable portion while the movable portion moves along the moving direction, It is preferable that the distance between the adjacent movable comb teeth and the fixed comb teeth be maintained constant. However, simply providing the movable comb electrode and the fixed comb electrode may distort the movable comb electrode when the movable part is moving along the moving direction, and the reliability as a device may be lowered. .
  • An aspect of the present disclosure is to provide a highly reliable optical device.
  • An optical device is connected between a base having a main surface, a movable portion having an optical function portion, and the base and the movable portion, and the movable portion extends in a predetermined direction perpendicular to the main surface.
  • an elastic support portion for supporting the movable portion so as to be movable, a fixed comb electrode provided on the base and having a plurality of fixed comb teeth, and at least one of the movable portion and the elastic support portion;
  • a movable comb electrode having a plurality of movable comb teeth alternately arranged with a fixed comb tooth, and at least one of the movable portion and the elastic support portion has an electrode support portion for supporting the movable comb electrode;
  • the electrode support portion has a beam portion formed such that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb in the predetermined direction.
  • the thickness of the electrode support in the predetermined direction is larger than the thickness of the movable comb in the predetermined direction, and the movable comb electrode is supported by the electrode support. It is done.
  • the movable part is moving along the predetermined direction, it is possible to suppress distortion of the electrode support part supporting the movable comb electrode. Therefore, the movable comb electrode can be moved integrally with the movable portion, and fluctuation of the distance between the movable comb and the fixed comb adjacent to each other can be suppressed. As a result, the reliability can be improved.
  • the resilient support may comprise a lever and the electrode support may extend from the lever. In this case, distortion of the movable comb electrode can be suppressed by the electrode support portion extending from the lever.
  • the movable comb electrode may be located on the opposite side of the movable portion with respect to the center of the lever in the extending direction of the lever. In this case, even if the movable portion moves largely along the predetermined direction, the movable comb teeth do not easily come out of the area between the adjacent fixed comb teeth. Therefore, when the fixed comb electrode and the movable comb electrode are used as electrodes for driving, an electrostatic force is generated between the fixed comb electrode and the movable comb electrode over the entire movable range of the movable portion. Can.
  • the movable comb electrode may be located on the movable portion side with respect to the center of the lever in the extending direction of the lever. In this case, the distance from the connection position to the base in the elastic support portion to the movable comb electrode can be secured. Therefore, when the fixed comb electrode and the movable comb electrode are used as electrodes for driving, the electrostatic force generated between the fixed comb electrode and the movable comb electrode is efficiently used as the driving force of the movable portion. Can.
  • the fixed comb electrode and the movable comb electrode are used as electrodes for monitoring, the change in capacitance between the fixed comb electrode and the movable comb electrode is large, so the position of the movable portion is easy And can be detected reliably.
  • the lever may have a beam portion formed so that the thickness of the lever in the predetermined direction is larger than the thickness of the movable comb in the predetermined direction. In this case, it is possible to more reliably suppress fluctuations in the distance between the movable comb teeth and the fixed comb teeth that are adjacent to each other, and it is possible to further improve the reliability.
  • the elastic support includes a plurality of electrode supports extending from the lever, and the plurality of electrode supports are arranged side by side along the extending direction of the lever. It is also good.
  • a driving force can be secured when the fixed comb electrode and the movable comb electrode are used as electrodes for driving.
  • the fixed comb electrode and the movable comb electrode are used as electrodes for monitoring, the position of the movable portion can be detected easily and reliably.
  • distortion of the electrode supporting portion supporting the movable comb electrode is suppressed by increasing the thickness, not the width of the electrode supporting portion. It can be arranged to line up along the
  • the thickness T1 of the electrode support in the predetermined direction and the thickness T2 of the movable comb in the predetermined direction may satisfy the following formula (1).
  • W1 width of the electrode support when viewed from a predetermined direction
  • C1 length of the electrode support when viewed from a predetermined direction
  • N number of movable combs
  • W2 predetermined direction
  • C2 the length of the movable comb when viewed from the predetermined direction.
  • distortion of the movable comb electrode can be suppressed more reliably.
  • the electrode support may be provided on the movable portion so as to be disposed along the outer edge of the movable portion.
  • the distance from the connection position to the base in the elastic support portion to the movable comb electrode can be secured. Therefore, when the fixed comb electrode and the movable comb electrode are used as electrodes for driving, the electrostatic force generated between the fixed comb electrode and the movable comb electrode is efficiently used as the driving force of the movable portion. Can.
  • the fixed comb electrode and the movable comb electrode are used as electrodes for monitoring, the change in capacitance between the fixed comb electrode and the movable comb electrode is large, so the position of the movable portion is easy And can be detected reliably.
  • the movable portion includes a main body portion provided with the optical function portion and a frame portion surrounding the main body portion when viewed from a predetermined direction, and the electrode support portion You may be comprised by the frame part.
  • the frame portion surrounding the main body portion can suppress variation in the distance between the movable comb teeth and the fixed comb teeth adjacent to each other.
  • the movable portion includes a central portion provided with the optical function portion and an outer edge portion thicker in the predetermined direction than the central portion, and the electrode support portion It may be constituted by the outer edge. In this case, it is possible to suppress variation in the distance between the movable comb teeth and the fixed comb teeth adjacent to each other due to the outer edge thicker in the predetermined direction than the central portion.
  • the elastic support may include a pair of levers and a link suspended between the pair of levers, and the electrode support may be configured by the link.
  • the link between the pair of levers can suppress variation in the distance between the movable comb and the fixed comb adjacent to each other.
  • the elastic support includes the pair of levers and the link suspended between the pair of levers
  • the electrode support includes the pair of lever and the link.
  • the movable comb electrode may be disposed over a pair of levers and links.
  • the pair of levers and the link can suppress variation in the distance between the movable comb teeth and the fixed comb teeth adjacent to each other.
  • the elastic support includes the lever and the extension extending between the lever and the movable portion when viewed from the predetermined direction
  • the electrode support includes , And may be configured by an extending portion.
  • the extending portion extending between the lever and the movable portion suppresses the fluctuation of the distance between the movable comb and the fixed comb which are adjacent to each other. it can.
  • the elastic support includes a torsion support extending along a second direction perpendicular to the predetermined direction, and a non-linearity connected between the torsion support and the movable portion.
  • the non-linearity relaxation spring has a deformation amount of the non-linearity relaxation spring around the second direction from a deformation amount of the torsional support portion around the second direction when the movable portion moves in the predetermined direction.
  • And may be configured such that the amount of deformation of the non-linearity relaxation spring in the third direction perpendicular to the predetermined direction and the second direction is larger than the amount of deformation of the torsion support in the third direction.
  • a highly reliable optical device can be provided.
  • FIG. 1 is a longitudinal sectional view of an optical module provided with an optical device according to an embodiment.
  • FIG. 2 is a plan view of the optical device shown in FIG.
  • FIG. 3 is a plan view showing a part of FIG. 2 in an enlarged manner.
  • FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG.
  • FIG. 5 is a cross-sectional view taken along the line VV of FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG.
  • FIG. 7 is a plan view showing an optical device according to a first modification.
  • FIG. 8 is a plan view showing an optical device according to a second modification.
  • FIG. 9 is a plan view showing an optical device according to a third modification.
  • FIG. 10 is a plan view showing an optical device according to a fourth modification.
  • FIG. 11 is a plan view showing an optical device according to a fifth modification.
  • the optical module 1 includes a mirror unit 2 and a beam splitter unit 3.
  • the mirror unit 2 has an optical device 10 and a fixed mirror 21.
  • the optical device 10 includes a movable mirror (movable portion) 11.
  • the beam splitter unit 3, the movable mirror 11 and the fixed mirror 21 form an interference optical system for the measurement light L 0.
  • the interference optical system here is a Michelson interference optical system.
  • the optical device 10 includes, in addition to the movable mirror 11, a base 12, a drive unit 13, a first optical function unit 17, and a second optical function unit 18.
  • the base 12 has a major surface 12 a.
  • the movable mirror 11 has a mirror surface (optical function portion) 11a along a plane parallel to the major surface 12a.
  • the movable mirror 11 is supported by the base 12 so as to be movable along a Z-axis direction (a direction parallel to the Z-axis, a predetermined direction) perpendicular to the major surface 12 a.
  • the drive unit 13 moves the movable mirror 11 along the Z-axis direction.
  • the first optical function unit 17 is disposed on one side of the movable mirror 11 in the X-axis direction (a direction parallel to the X-axis, a third direction) perpendicular to the Z-axis direction when viewed from the Z-axis direction There is.
  • the second optical function unit 18 is disposed on the other side of the movable mirror 11 in the X-axis direction when viewed from the Z-axis direction.
  • Each of the first optical function unit 17 and the second optical function unit 18 is a light passing opening provided in the base 12 and is open on one side and the other side in the Z-axis direction. In the optical module 1, the second optical function unit 18 is not used as a light passing aperture.
  • At least one of the first optical function unit 17 and the second optical function unit 18 may be used as an optical function unit, or the first optical function unit 17 and the second optical function unit 18 may be used. Both of the optical function units 18 may not be used as optical function units.
  • the fixed mirror 21 has a mirror surface 21a extending along a plane parallel to the major surface 12a (a plane perpendicular to the Z-axis direction). The position of the fixed mirror 21 with respect to the base 12 is fixed.
  • the mirror surface 11a of the movable mirror 11 and the mirror surface 21a of the fixed mirror 21 face one side (the beam splitter unit 3 side) in the Z-axis direction.
  • the mirror unit 2 has a support 22, a submount 23 and a package 24.
  • the package 24 accommodates the optical device 10, the fixed mirror 21, the support 22 and the submount 23.
  • the package 24 includes a bottom wall 241, side walls 242 and a top wall 243.
  • the package 24 is formed in, for example, a rectangular box shape.
  • the package 24 has, for example, a size of about 30 ⁇ 25 ⁇ 10 (thickness) mm.
  • the bottom wall 241 and the side wall 242 are integrally formed with each other.
  • the top wall 243 faces the bottom wall 241 in the Z-axis direction, and is fixed to the side wall 242.
  • the top wall 243 is light transmissive to the measurement light L0.
  • a space S is formed by the package 24.
  • the space S is opened to the outside of the mirror unit 2 through, for example, a vent or a gap provided in the package 24.
  • the space S may be an airtight space in which a high degree of vacuum is maintained, or an airtight space filled with an inert gas such as nitrogen.
  • the support 22 is fixed to the inner surface of the bottom wall 241 via the submount 23.
  • the support 22 is formed, for example, in a rectangular plate shape.
  • the support 22 is light transmissive to the measurement light L0.
  • the base 12 of the optical device 10 is fixed to the surface 22 a of the support 22 opposite to the submount 23. That is, the base 12 is supported by the support 22.
  • a recess 22 b is formed on the surface 22 a of the support 22, and a gap (a part of the space S) is formed between the optical device 10 and the top wall 243.
  • An opening 23 a is formed in the submount 23.
  • the fixed mirror 21 is disposed on the surface 22c of the support 22 on the submount 23 side so as to be located in the opening 23a. That is, the fixed mirror 21 is disposed on the surface 22 c of the support 22 opposite to the base 12.
  • the fixed mirror 21 is disposed on one side of the movable mirror 11 in the X-axis direction when viewed from the Z-axis direction.
  • the fixed mirror 21 overlaps the first optical function unit 17 of the optical device 10 when viewed in the Z-axis direction.
  • the mirror unit 2 further includes a plurality of lead pins 25 and a plurality of wires 26.
  • Each lead pin 25 is fixed to the bottom wall 241 in a state of penetrating the bottom wall 241.
  • Each lead pin 25 is electrically connected to the drive unit 13 via the wire 26.
  • an electrical signal for moving the movable mirror 11 along the Z-axis direction is applied to the drive unit 13 via the plurality of lead pins 25 and the plurality of wires 26.
  • the beam splitter unit 3 is supported by the top wall 243 of the package 24. Specifically, the beam splitter unit 3 is fixed to the surface 243 a of the top wall 243 opposite to the optical device 10 by the optical resin 4.
  • the optical resin 4 is light transmissive to the measurement light L0.
  • the beam splitter unit 3 has a half mirror surface 31, a total reflection mirror surface 32, and a plurality of optical surfaces 33a, 33b, 33c, and 33d.
  • the beam splitter unit 3 is configured by bonding a plurality of optical blocks.
  • the half mirror surface 31 is formed of, for example, a dielectric multilayer film.
  • the total reflection mirror surface 32 is formed of, for example, a metal film.
  • the optical surface 33a is, for example, a surface perpendicular to the Z-axis direction, and overlaps the first optical function portion 17 of the optical device 10 and the mirror surface 21a of the fixed mirror 21 when viewed from the Z-axis direction.
  • the optical surface 33a transmits the measurement light L0 incident along the Z-axis direction.
  • the half mirror surface 31 is, for example, a surface inclined 45 degrees with respect to the optical surface 33a, and overlaps the first optical function portion 17 of the optical device 10 and the mirror surface 21a of the fixed mirror 21 when viewed from the Z-axis direction. ing.
  • the half mirror surface 31 reflects a part of the measurement light L0 incident on the optical surface 33a along the Z-axis direction along the X-axis direction, and the remaining part of the measurement light L0 along the Z-axis direction. Permeate to the side.
  • the total reflection mirror surface 32 is a surface parallel to the half mirror surface 31.
  • the total reflection mirror surface 32 overlaps the mirror surface 11a of the movable mirror 11 when viewed from the Z axis direction and when viewed from the X axis direction. And overlap.
  • the total reflection mirror surface 32 reflects a part of the measurement light L0 reflected by the half mirror surface 31 toward the movable mirror 11 along the Z-axis direction.
  • the optical surface 33 b is a surface parallel to the optical surface 33 a and overlaps the mirror surface 11 a of the movable mirror 11 when viewed in the Z-axis direction.
  • the optical surface 33b transmits a part of the measurement light L0 reflected by the total reflection mirror surface 32 to the movable mirror 11 side along the Z-axis direction.
  • the optical surface 33c is a surface parallel to the optical surface 33a, and overlaps the mirror surface 21a of the fixed mirror 21 when viewed from the Z-axis direction.
  • the optical surface 33 c transmits the remaining portion of the measurement light L 0 transmitted through the half mirror surface 31 to the fixed mirror 21 side along the Z-axis direction.
  • the optical surface 33 d is, for example, a surface perpendicular to the X-axis direction, and overlaps the half mirror surface 31 and the total reflection mirror surface 32 when viewed from the X-axis direction.
  • the optical surface 33d transmits the measurement light L1 along the X-axis direction.
  • the measurement light L1 is sequentially reflected by the mirror surface 11a of the movable mirror 11 and the total reflection mirror surface 32 and transmitted through the half mirror surface 31.
  • a part of the measurement light L0 and the mirror surface 21a of the fixed mirror 21 and the half mirror surface This is interference light with the remaining part of the measurement light L0 sequentially reflected by 31.
  • the optical module 1 configured as described above, when the measurement light L0 is incident on the beam splitter unit 3 from the outside of the optical module 1 via the optical surface 33a, a part of the measurement light L0 has the half mirror surface 31 and all The light is reflected sequentially by the reflection mirror surface 32 and travels toward the mirror surface 11 a of the movable mirror 11. Then, a part of the measurement light L0 is reflected by the mirror surface 11a of the movable mirror 11, travels in the opposite direction on the same optical path (optical path P1 described later), and passes through the half mirror surface 31 of the beam splitter unit 3. Do.
  • the remaining part of the measurement light L 0 passes through the half mirror surface 31 of the beam splitter unit 3, passes through the first optical function unit 17, passes through the support 22, and passes through the mirror surface 21 a of the fixed mirror 21. Progress towards The remaining portion of the measurement light L0 is reflected by the mirror surface 21a of the fixed mirror 21, travels in the opposite direction on the same optical path (optical path P2 described later), and is reflected by the half mirror surface 31 of the beam splitter unit 3. Ru.
  • the measurement light L1 is emitted from the beam splitter unit 3 to the outside of the optical module 1 via the optical surface 33d.
  • FTIR Fastier transform infrared spectrometer
  • the support 22 corrects the optical path difference between the optical path P 1 between the beam splitter unit 3 and the movable mirror 11 and the optical path P 2 between the beam splitter unit 3 and the fixed mirror 21.
  • the optical path P1 is an optical path from the half mirror surface 31 to the mirror surface 11a of the movable mirror 11 located at the reference position through the total reflection mirror surface 32 and the optical surface 33b sequentially It is a light path along which a part of the light L0 travels.
  • the optical path P2 is an optical path from the half mirror surface 31 to the mirror surface 21a of the fixed mirror 21 sequentially through the optical surface 33c and the first optical function unit 17, and is an optical path through which the remaining portion of the measurement light L0 travels. is there.
  • the support 22 has an optical path length of the optical path P1 (optical path length considering the refractive index of each medium through which the optical path P1 passes) and an optical path length of the optical path P2 (optical path length considering the refractive index of each medium through which the optical path P2 passes).
  • the optical path difference between the optical path P1 and the optical path P2 is corrected so that the difference becomes smaller (for example, eliminated).
  • the support 22 can be made of, for example, the same light transmitting material as each optical block constituting the beam splitter unit 3. In that case, the thickness (length in the Z-axis direction) of the support 22 can be made equal to the distance between the half mirror surface 31 and the total reflection mirror surface 32 in the X-axis direction.
  • the portion of the movable mirror 11 other than the mirror surface 11 a, the base 12, the drive unit 13, the first optical function unit 17, and the second optical function unit 18 are SOI (Silicon On Insulator). ) Is configured by the substrate 50. That is, the optical device 10 is configured of the SOI substrate 50.
  • the optical device 10 is formed, for example, in a rectangular plate shape.
  • the optical device 10 has, for example, a size of about 15 ⁇ 10 ⁇ 0.3 (thickness) mm.
  • the SOI substrate 50 has a support layer 51, a device layer 52 and an intermediate layer 53.
  • the support layer 51 is a first silicon layer.
  • the device layer 52 is a second silicon layer.
  • the intermediate layer 53 is an insulating layer disposed between the support layer 51 and the device layer 52.
  • the base 12 is formed by the support layer 51, the device layer 52 and part of the intermediate layer 53.
  • the major surface 12 a of the base 12 is the surface of the device layer 52 opposite to the intermediate layer 53.
  • the main surface 12 b of the base 12 opposite to the main surface 12 a is a surface of the support layer 51 opposite to the intermediate layer 53.
  • the main surface 12a of the base 12 and the surface 22a of the support 22 are bonded to each other (see FIG. 1).
  • the movable mirror 11 is disposed with a point of intersection of the axis R1 and the axis R2 as a center position (center of gravity).
  • the axis R1 is a straight line extending in the X-axis direction.
  • the axis R2 is a straight line extending in a Y-axis direction (a direction parallel to the Y-axis, a second direction) perpendicular to the X-axis direction and the Z-axis direction.
  • the optical device 10 When viewed in the Z-axis direction, the optical device 10 exhibits a shape that is line-symmetrical about the axis R1 and line-symmetrical about the axis R2.
  • the movable mirror 11 includes a main body portion 111, a frame portion 112 (electrode support portion), and a pair of connecting portions 113.
  • the main body portion 111 has a circular shape when viewed from the Z-axis direction.
  • the main body portion 111 has a central portion 114 and an outer edge portion 115.
  • a metal film is formed on the surface of the central portion 114 on the main surface 12 b side, and a circular mirror surface 11 a is provided.
  • the central portion 114 is formed by a portion of the device layer 52.
  • the outer edge portion 115 surrounds the central portion 114 when viewed in the Z-axis direction.
  • the outer edge portion 115 has a first main body portion 115 a and a first beam portion 115 b.
  • the first main body portion 115 a is formed of a part of the device layer 52.
  • the first beam portion 115 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the first beam portion 115 b is provided on the surface of the first main portion 115 a on the main surface 12 b side.
  • the first beam portion 115 b is formed such that the thickness of the outer edge portion 115 in the Z-axis direction is larger than the thickness of the central portion 114 in the Z-axis direction.
  • the first beam portion 115b When viewed in the Z-axis direction, has an annular shape and surrounds the mirror surface 11a.
  • the first beam portion 115 b extends along the outer edge of the main body portion 111 when viewed in the Z-axis direction.
  • the outer edge of the first beam portion 115 b extends along the outer edge of the main body portion 111 at a predetermined distance from the outer edge of the main body portion 111 when viewed in the Z-axis direction.
  • the inner edge of the first beam portion 115b extends along the outer edge of the mirror surface 11a at a predetermined distance from the outer edge of the mirror surface 11a when viewed in the Z-axis direction.
  • the frame portion 112 surrounds the main body portion 111 at a predetermined distance from the main body portion 111 when viewed from the Z-axis direction.
  • the frame portion 112 has an annular shape when viewed from the Z-axis direction.
  • the frame portion 112 is disposed along the outer edge of the movable mirror 11 (to form the outer edge of the movable mirror 11).
  • the frame 112 has a second main body 112a and a second beam 112b.
  • the second main body 112 a is formed by a part of the device layer 52.
  • the second beam portion 112 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the second beam portion 112 b is provided on the surface of the second main portion 112 a on the main surface 12 b side.
  • the second beam portion 112 b is formed such that the thickness of the frame portion 112 in the Z-axis direction is larger than the thickness of the central portion 114 in the Z-axis direction.
  • the second beam portion 112 b has an annular shape when viewed in the Z-axis direction.
  • the outer edge of the second beam 112 b extends along the outer edge of the frame 112 at a predetermined distance from the outer edge of the frame 112 when viewed in the Z-axis direction.
  • the inner edge of the second beam portion 112 b extends along the inner edge of the frame portion 112 at a predetermined distance from the inner edge of the frame portion 112 when viewed in the Z-axis direction.
  • the thickness of the second beam portion 112b in the Z-axis direction is equal to the thickness of the first beam portion 115b in the Z-axis direction.
  • the width of the second beam portion 112 b is wider than the width of the first beam portion 115 b.
  • the width of the first beam portion 115b when viewed from the Z-axis direction is the length of the first beam portion 115b in the direction perpendicular to the extending direction of the first beam portion 115b, and in the present embodiment, The length of the first beam portion 115 b in the radial direction of the first beam portion 115 b. The same applies to the width of the second beam portion 112 b when viewed in the Z-axis direction.
  • Each of the pair of connecting portions 113 connects the main body portion 111 and the frame portion 112 to each other.
  • the pair of connecting portions 113 is disposed on one side and the other side in the Y-axis direction with respect to the main body portion 111.
  • Each connecting portion 113 has a third main portion 113a and a third beam portion 113b.
  • the third main body portion 113 a is formed of a part of the device layer 52.
  • the third main body portion 113a is connected to the first main body portion 115a and the second main body portion 112a.
  • the third beam portion 113 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the third beam portion 113 b is connected to the first beam portion 115 b and the second beam portion 112 b.
  • the third beam portion 113 b is provided on the surface of the third main portion 113 a on the main surface 12 b side.
  • the third beam portion 113 b is formed such that the thickness of the connection portion 113 in the Z-axis direction is larger than the thickness of the central portion 114 in the Z-axis direction.
  • the thickness of the third beam portion 113b in the Z-axis direction is equal to the thickness of each of the first beam portion 115b and the second beam portion 112b in the Z-axis direction.
  • the width of the third beam portion 113b is larger than the width of each of the first beam portion 115b and the second beam portion 112b.
  • the width of the third beam portion 113b is the length of the third beam portion 113b in the extending direction of the first beam portion 115b.
  • the movable mirror 11 further includes a pair of brackets 116 and a pair of brackets 117.
  • Each bracket 116 and each bracket 117 are formed by a part of the device layer 52.
  • Each bracket 116 extends along the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction.
  • One bracket 116 protrudes from one side of the frame 112 toward one side in the Y-axis direction, and the other bracket 116 protrudes from the side of the frame 112 toward the other side in the Y-axis direction.
  • the pair of brackets 116 is disposed on the same center line parallel to the Y-axis direction.
  • Each bracket 116 is disposed on the side of the first optical function unit 17 with respect to the center of the main body 111.
  • Each bracket 117 extends along the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction.
  • One bracket 117 protrudes from one side of the frame 112 toward one side in the Y-axis direction, and the other bracket 117 protrudes from the side of the frame 112 toward the other side in the Y-axis direction.
  • the pair of brackets 117 is disposed on the same center line parallel to the Y-axis direction.
  • Each bracket 117 is disposed on the second optical function portion 18 side with respect to the center of the main body portion 111.
  • the drive unit 13 has a first elastic support 14, a second elastic support 15, and an actuator 16.
  • first elastic support portion 14, the second elastic support portion 15, and the actuator portion 16 portions other than the fourth beam portion 141e, the fifth beam portion 147b, the sixth beam portion 151e, and the seventh beam portion 157b described later are It is formed by a part of the device layer 52.
  • Each of the first elastic support portion 14 and the second elastic support portion 15 is connected between the base 12 and the movable mirror 11.
  • the first elastic support portion 14 and the second elastic support portion 15 support the movable mirror 11 so that the movable mirror 11 can move along the Z-axis direction.
  • the first elastic support portion 14 includes a pair of levers 141, a link 142, a link 143, a pair of first torsion bars (torsion support portions) 145, a pair of second torsion bars (torsion support portions) 146, and a pair of electrode supports It has a part 147.
  • the pair of levers 141 is disposed on both sides of the first optical function portion 17 in the Y-axis direction.
  • Each lever 141 has a plate shape extending along a plane perpendicular to the Z-axis direction. In the present embodiment, each lever 141 extends along the X-axis direction.
  • the link 142 is bridged between the ends 141 a of the pair of levers 141 on the movable mirror 11 side.
  • the link 142 has a plate shape extending along a plane perpendicular to the Z-axis direction. Both ends of the link 142 extend along the Y-axis direction.
  • the middle portion of the link 142 extends along the frame portion 112 and is convexly curved toward the opposite side to the movable mirror 11.
  • the link 143 is bridged between the end 141 b of the pair of levers 141 opposite to the movable mirror 11.
  • the link 143 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction.
  • the first optical function portion 17 is an opening defined by the pair of levers 141, the link 142 and the link 143.
  • the first optical function unit 17 has a rectangular shape when viewed from the Z-axis direction.
  • the first optical function unit 17 is, for example, a cavity.
  • a material having optical transparency to the measurement light L0 may be disposed in the opening forming the first optical function unit 17.
  • the pair of first torsion bars 145 is stretched between the tip of one bracket 116 and one end 141 a and between the tip of the other bracket 116 and the other end 141 a. ing. That is, the pair of first torsion bars 145 is connected between the pair of levers 141 and the movable mirror 11 respectively. Each first torsion bar 145 extends along the Y-axis direction. The pair of first torsion bars 145 are disposed on the same center line parallel to the Y-axis direction.
  • the pair of second torsion bars 146 is respectively disposed between the end portion 141 b of the one lever 141 opposite to the movable mirror 11 and the base 12 and the other end of the other lever 141 opposite to the movable mirror 11. It is bridged between the section 141 b and the base 12. That is, the pair of second torsion bars 146 is connected between the pair of levers 141 and the base 12 respectively.
  • Each second torsion bar 146 extends along the Y-axis direction.
  • the pair of second torsion bars 146 are disposed on the same center line parallel to the Y-axis direction.
  • the end 141 b of each lever 141 is provided with a projecting portion 141 c that protrudes outward in the Y-axis direction, and the second torsion bar 146 is connected to the projecting portion 141 c.
  • Each electrode support portion 147 extends along the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction.
  • One electrode support portion 147 extends from the middle portion of one lever 141 toward the opposite side to the first optical function portion 17.
  • the other electrode support part 147 protrudes from the middle part of the other lever 141 to the opposite side to the first optical function part 17.
  • the pair of electrode support portions 147 is disposed on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.
  • the second elastic support 15 includes a pair of levers 151, a link 152, a link 153, a pair of first torsion bars (torsion support) 155, a pair of second torsion bars (torsion support) 156, and a pair of electrodes It has a part 157.
  • the pair of levers 151 is disposed on both sides of the second optical function portion 18 in the Y-axis direction.
  • Each lever 151 has a plate shape extending along a plane perpendicular to the Z-axis direction. In the present embodiment, each lever 151 extends along the X-axis direction.
  • the link 152 is bridged between the ends 151 a of the pair of levers 151 on the movable mirror 11 side.
  • the link 152 has a plate shape extending along a plane perpendicular to the Z-axis direction. Both ends of the link 152 extend along the Y-axis direction.
  • the middle portion of the link 152 extends along the frame portion 112 and is convexly curved toward the opposite side to the movable mirror 11.
  • the link 153 is bridged between the end 151 b of the pair of levers 151 opposite to the movable mirror 11.
  • the link 153 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction.
  • the second optical function portion 18 is an opening defined by the pair of levers 151, the link 152 and the link 153.
  • the second optical function unit 18 has a rectangular shape when viewed from the Z-axis direction.
  • the second optical function unit 18 is, for example, a cavity.
  • a material having optical transparency to the measurement light L0 may be disposed in the opening forming the second optical function unit 18.
  • the pair of first torsion bars 155 is stretched between the end of one bracket 117 and one end 151a, and between the end of the other bracket 117 and the other end 151a. ing. That is, the pair of first torsion bars 155 is connected between the pair of levers 151 and the movable mirror 11 respectively. Each first torsion bar 155 extends along the Y-axis direction. The pair of first torsion bars 155 is disposed on the same center line parallel to the Y-axis direction.
  • the pair of second torsion bars 156 are respectively disposed between the end 151 b of the one lever 151 opposite to the movable mirror 11 and the base 12 and the other end of the other lever 151 opposite to the movable mirror 11. It is bridged between the unit 151 b and the base 12. That is, the pair of second torsion bars 156 are respectively connected between the pair of levers 151 and the base 12. Each second torsion bar 156 extends along the Y-axis direction. The pair of second torsion bars 156 is disposed on the same center line parallel to the Y-axis direction.
  • the end 151b of each lever 151 is provided with a protrusion 151c that protrudes outward in the Y-axis direction, and the second torsion bar 156 is connected to the protrusion 151c.
  • Each electrode support portion 157 extends along the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction.
  • One electrode support portion 157 extends from the middle portion of one lever 151 toward the opposite side to the second optical function portion 18.
  • the other electrode support portion 157 protrudes from the middle portion of the other lever 151 to the opposite side to the second optical function portion 18.
  • the pair of electrode support portions 157 is disposed on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.
  • the actuator unit 16 moves the movable mirror 11 along the Z-axis direction.
  • the actuator unit 16 includes a pair of first fixed comb electrodes 161, a pair of first movable comb electrodes 162, a pair of first fixed comb electrodes 163, a pair of first movable comb electrodes 164, and a pair of second fixes A comb electrode 165 and a pair of second movable comb electrodes 166 are provided.
  • the positions of the first fixed comb electrodes 161 and 163 and the second fixed comb electrode 165 are fixed.
  • the first movable comb electrodes 162 and 164 and the second movable comb electrode 166 move with the movement of the movable mirror 11.
  • One first fixed comb electrode 161 is provided on the surface of the device layer 52 of the base 12 facing the one electrode support portion 147.
  • the other first fixed comb electrode 161 is provided on the surface of the device layer 52 facing the other electrode support 147.
  • Each first fixed comb electrode 161 has a plurality of first fixed comb teeth 161 a extending along a plane perpendicular to the Y-axis direction. These first fixed comb teeth 161a are arranged side by side at predetermined intervals in the Y-axis direction.
  • One first movable comb electrode 162 is provided on the surface of the other side (the electrode support 157 side) of the one electrode support 147 in the X-axis direction.
  • the other first movable comb electrode 162 is provided on the other surface of the other electrode support portion 147 in the X-axis direction. That is, the pair of first movable comb electrodes 162 is supported by the pair of electrode support portions 147, respectively.
  • Each first movable comb electrode 162 has a plurality of first movable combs 162 a extending along a plane perpendicular to the Y-axis direction. These first movable comb teeth 162a are arranged side by side at predetermined intervals in the Y-axis direction.
  • first fixed comb electrode 161 and one first movable comb electrode 162 a plurality of first fixed comb teeth 161a and a plurality of first movable comb teeth 162a are alternately arranged. That is, the respective first fixed comb teeth 161 a of the one first fixed comb electrode 161 are located between the first movable comb teeth 162 a of the one first movable comb electrode 162. In the other first fixed comb electrode 161 and the other first movable comb electrode 162, the plurality of first fixed comb teeth 161a and the plurality of first movable comb teeth 162a are alternately arranged.
  • first fixed comb teeth 161 a of the other first fixed comb electrode 161 are located between the first movable comb teeth 162 a of the other first movable comb electrode 162.
  • adjacent first fixed comb teeth 161a and first movable comb teeth 162a face each other in the Y-axis direction.
  • the distance between the adjacent first fixed comb teeth 161a and the first movable comb teeth 162a is, for example, about several ⁇ m.
  • One first fixed comb electrode 163 is provided on the surface of the device layer 52 of the base 12 facing the one electrode support portion 157.
  • the other first fixed comb electrode 163 is provided on the surface of the device layer 52 facing the other electrode support portion 157.
  • Each first fixed comb electrode 163 has a plurality of first fixed comb teeth 163 a extending along a plane perpendicular to the Y-axis direction. These first fixed comb teeth 163a are arranged side by side at a predetermined interval in the Y-axis direction.
  • One first movable comb electrode 164 is provided on the surface of one side (the electrode support 147 side) of the one electrode support 157 in the X-axis direction.
  • the other first movable comb electrode 164 is provided on the surface on one side in the X-axis direction of the other electrode support portion 157. That is, the pair of first movable comb electrodes 164 is supported by the pair of electrode support portions 157, respectively.
  • Each first movable comb electrode 164 has a plurality of first movable comb teeth 164 a extending along a plane perpendicular to the Y-axis direction. These first movable comb teeth 164a are arranged side by side at a predetermined interval in the Y-axis direction.
  • first fixed comb electrode 163 and one first movable comb electrode 164 a plurality of first fixed comb teeth 163a and a plurality of first movable comb teeth 164a are alternately arranged. That is, the respective first fixed comb teeth 163 a of the one first fixed comb electrode 163 are located between the first movable comb teeth 164 a of the one first movable comb electrode 164. In the other first fixed comb electrode 163 and the other first movable comb electrode 164, a plurality of first fixed comb teeth 163a and a plurality of first movable comb teeth 164a are alternately arranged.
  • first fixed comb teeth 163 a of the other first fixed comb electrode 163 are located between the first movable comb teeth 164 a of the other first movable comb electrode 164.
  • adjacent first fixed comb teeth 163a and first movable comb teeth 164a face each other in the Y-axis direction.
  • the distance between the first fixed comb teeth 163a and the first movable comb teeth 164a adjacent to each other is, for example, about several ⁇ m.
  • the pair of second fixed comb electrodes 165 is disposed along the outer edge of the movable mirror 11.
  • the pair of second fixed comb electrodes 165 is provided on the surface of the device layer 52 of the base 12 facing the outer surface in the Y-axis direction of the frame 112.
  • Each second fixed comb electrode 165 has a plurality of second fixed comb teeth 165 a extending along a plane perpendicular to the X-axis direction. These second fixed comb teeth 165a are arranged side by side at a predetermined interval in the X-axis direction.
  • the pair of second movable comb electrodes 166 is disposed along the outer edge of the movable mirror 11.
  • the pair of second movable comb electrodes 166 is provided on the outer surface in the Y-axis direction of the frame 112. That is, the frame portion 112 constitutes an electrode support portion for supporting the second movable comb electrodes 166.
  • Each second movable comb electrode 166 has a plurality of second movable comb teeth 166 a extending along a plane perpendicular to the X-axis direction. These second movable comb teeth 166a are arranged side by side at a predetermined interval in the X-axis direction.
  • a plurality of second fixed comb teeth 165a and a plurality of second movable comb teeth 166a are alternately arranged. That is, the respective second fixed comb teeth 165 a of the one second fixed comb electrode 165 are located between the second movable comb teeth 166 a of the one second movable comb electrode 166. In the other second fixed comb electrode 165 and the other second movable comb electrode 166, a plurality of second fixed comb teeth 165a and a plurality of second movable comb teeth 166a are alternately arranged.
  • the respective second fixed comb teeth 165 a of the other second fixed comb electrode 165 are located between the second movable comb teeth 166 a of the other second movable comb electrode 166.
  • adjacent second fixed comb teeth 165a and second movable comb teeth 166a face each other in the X-axis direction.
  • the distance between the adjacent second fixed comb teeth 165a and the second movable comb teeth 166a is, for example, about several ⁇ m.
  • the base 12 is provided with a plurality of electrode pads 121 and 122.
  • Each of the electrode pads 121 and 122 is formed on the surface of the device layer 52 in an opening 12 c formed on the main surface 12 b of the base 12 so as to reach the device layer 52.
  • Each electrode pad 121 is electrically connected to the first fixed comb electrode 161, the first fixed comb electrode 163, or the second fixed comb electrode 165 through the device layer 52.
  • Some of the electrode pads 122 are electrically connected to the first movable comb electrode 162 or the first movable comb electrode 164 via the first elastic support 14 or the second elastic support 15.
  • Another electrode pad 122 is a second movable comb via the first elastic support 14 and the frame 112 of the movable mirror 11 or the second elastic support 15 and the frame 112 of the movable mirror 11. It is electrically connected to the electrode 166.
  • the wires 26 are stretched between the electrode pads 121 and 122 and the lead pins 25.
  • the first fixed comb electrodes 161 and 163 and the first movable comb electrodes 162 and 164 are used as driving electrodes. Specifically, when a voltage is applied between the plurality of electrode pads 121 and the plurality of electrode pads 122 via the plurality of lead pins 25 and the plurality of wires 26, for example, the movable member can move to one side in the Z-axis direction.
  • the Z-axis is provided by applying a periodic electrical signal to the first fixed comb electrode 161, 163 and the first movable comb electrode 162, 164 via the plurality of lead pins 25 and the plurality of wires 26.
  • the movable mirror 11 can be reciprocated at its resonant frequency level along the direction.
  • the drive unit 13 functions as an electrostatic actuator.
  • the second fixed comb electrode 165 and the second movable comb electrode 166 are used as electrodes for monitoring. Specifically, between the second fixed comb electrode 165 and the second movable comb electrode 166 via the plurality of lead pins 25 and the plurality of wires 26 and the plurality of electrode pads 121 and the plurality of electrode pads 122. Capacitance is detected. The said electrostatic capacitance changes according to the position of the movable mirror 11 in Z-axis direction. Therefore, the position of the movable mirror 11 can be feedback-controlled by adjusting the driving vibration (the magnitude of the voltage to be applied, the period, and the like) according to the detected capacitance. [Detailed configuration of each part]
  • the frame portion 112 constitutes an electrode support portion for supporting the second movable comb electrodes 166.
  • the frame portion 112 includes the second beam portion 112 b formed so that the thickness of the frame portion 112 in the Z-axis direction is larger than the thickness of the central portion 114 in the Z-axis direction.
  • the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the second movable comb teeth 166a in the Z-axis direction (see FIG. 5). That is, the second beam portion 112 b is formed such that the thickness of the frame portion 112 in the Z-axis direction is larger than the thickness of the second movable comb teeth 166 a in the Z-axis direction.
  • Each lever 141 has a fourth main body portion 141 d and a fourth beam portion 141 e.
  • the fourth main body portion 141 d is formed of a part of the device layer 52.
  • the fourth beam portion 141 e is formed of a part of the support layer 51 and the intermediate layer 53.
  • the fourth beam portion 141 e is provided on the surface of the fourth main portion 141 d on the main surface 12 b side.
  • the fourth beam portion 141 e has a long rectangular shape when viewed from the Z-axis direction.
  • the fourth beam portion 141 e is formed as follows in each lever 141.
  • the fourth beam portion 141 e is formed such that the thickness of the lever 141 in the Z-axis direction is thicker than the thickness of the first movable comb teeth 162 a in the Z-axis direction.
  • the fourth beam portion 141 e extends along the X-axis direction between both end portions 141 a and 141 b of the lever 141. That is, in the lever 141, the fourth beam portion 141 e extends between the connection position with the first torsion bar 145 and the connection position with the link 143.
  • the outer edge in the Y-axis direction of the fourth beam portion 141e (the edge on the opposite side to the first optical function portion 17) is spaced a predetermined distance from the outer edge in the Y-axis direction of the lever 141 when viewed from the Z-axis direction. And extends along the outer edge.
  • An inner edge in the Y-axis direction (an edge on the first optical function portion 17 side) in the fourth beam portion 141e is spaced apart from an inner edge in the Y-axis direction in the lever 141 when viewed from the Z-axis direction. It extends along the inner edge.
  • Each electrode support portion 147 has a fifth main body portion 147a and a fifth beam portion 147b.
  • the fifth main body portion 147 a is formed of a part of the device layer 52.
  • the fifth main body portion 147a is connected to the fourth main body portion 141d.
  • the first movable comb electrode 162 extends from the fifth main body 147a.
  • the fifth beam portion 147 b is formed of the support layer 51 and a part of the intermediate layer 53.
  • the fifth beam portion 147 b is provided on the surface of the fifth main portion 147 a on the main surface 12 b side.
  • the fifth beam portion 147 b is connected to the fourth beam portion 141 e.
  • the fifth beam portion 147 b has a rectangular shape when viewed in the Z-axis direction.
  • the fifth beam portion 147 b is formed as follows in each electrode support portion 147.
  • the fifth beam portion 147 b is formed such that the thickness of the electrode support portion 147 in the Z-axis direction is larger than the thickness of the first movable comb 162 a in the Z-axis direction.
  • the fifth beam portion 147 b extends along the Y-axis direction between both ends of the electrode support portion 147.
  • the edge on one side in the X-axis direction of the fifth beam portion 147b is a predetermined distance from the edge on one side in the X-axis direction of the electrode support portion 147 when viewed from the Z-axis direction.
  • the other edge of the fifth beam portion 147b in the X-axis direction is a predetermined distance from the other edge of the electrode support portion 147 in the X-axis direction when viewed from the Z-axis direction, It extends along the
  • the thickness of the fourth beam portion 141 e in the Z-axis direction is equal to the thickness of the first beam portion 115 b in the Z-axis direction.
  • the width (the length in the Y-axis direction) of the fourth beam portion 141 e is wider than the width of the first beam portion 115 b and substantially equal to the width of the second beam portion 112 b.
  • the thickness of the fifth beam portion 147b is substantially equal to the thickness of the fourth beam portion 141e.
  • the width (the length in the X-axis direction) of the fifth beam portion 147b is approximately equal to the width of the fourth beam portion 141e or slightly smaller than the width of the fourth beam portion 141e.
  • each of the first beam portion 115b, the fourth beam portion 141e, and the fifth beam portion 147b in the Z-axis direction is thicker than the thickness of the first torsion bar 145 and the second torsion bar 146 in the Z-axis direction.
  • the thickness of the electrode support 147 in the Z-axis direction is to suppress distortion of the electrode support 147 that supports the first movable comb electrode 162 when the movable mirror 11 is moving along the Z-axis direction.
  • T1 and the thickness T2 of the first movable comb 162a in the Z-axis direction may satisfy the following formula (2).
  • W1 is the width (length in the X-axis direction) of the electrode support portion 147
  • C1 is the length (length in the Y-axis direction) of the electrode support portion 147
  • N1 is one
  • W is the number of the first movable combs 162a included in the first movable comb electrode 162
  • W2 is the width (length in the Y-axis direction) of the first movable combs 162a
  • C2 is viewed from the Z-axis direction It is a length (length in the X-axis direction) of the first movable comb teeth 162a in the case. This makes it possible to make the electrode support 147 less likely to be distorted compared to the first movable comb electrode 162.
  • Each lever 151 has a sixth body portion 151 d and a sixth beam portion 151 e.
  • the sixth main body portion 151 d is formed of a part of the device layer 52.
  • the sixth beam portion 151 e is formed of a part of the support layer 51 and the intermediate layer 53.
  • the sixth beam portion 151 e is provided on the surface of the sixth main portion 151 d on the main surface 12 b side.
  • the sixth beam portion 151 e has a long rectangular shape when viewed from the Z-axis direction.
  • the sixth beam portion 151 e is formed as follows in each lever 151.
  • the sixth beam portion 151e is formed such that the thickness of the lever 151 in the Z-axis direction is thicker than the thickness of the first movable comb 164a in the Z-axis direction.
  • the sixth beam portion 151 e extends along the X-axis direction between both ends 151 a and 151 b of the lever 151. That is, the sixth beam 151 e extends in the lever 151 between the connection position with the first torsion bar 155 and the connection position with the link 153.
  • the outer edge of the sixth beam 151e in the Y-axis direction (the edge opposite to the second optical function portion 18) is spaced from the outer edge of the lever 151 in the Y-axis direction by a predetermined distance when viewed from the Z-axis direction. And extends along the outer edge.
  • the inner edge in the Y-axis direction (the edge on the second optical function portion 18 side) in the sixth beam portion 151e is spaced apart from the inner edge in the Y-axis direction in the lever 151 when viewed from the Z-axis direction. It extends along the inner edge.
  • the sixth beam portion 151 e is formed, for example, in the same shape as the fourth beam portion 141 e.
  • Each electrode support portion 157 has a seventh main portion 157a and a seventh beam portion 157b.
  • the seventh main body portion 157 a is formed of a part of the device layer 52.
  • the seventh main body portion 157a is connected to the sixth main body portion 151d.
  • the first movable comb electrode 164 extends from the seventh main portion 157a.
  • the seventh beam portion 157 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the seventh beam portion 157b is provided on the surface of the seventh main portion 157a on the main surface 12b side.
  • the seventh beam portion 157b is connected to the sixth beam portion 151e.
  • the seventh beam portion 157b has a rectangular shape when viewed from the Z-axis direction.
  • the seventh beam portion 157 b is formed as follows in each electrode support portion 157.
  • the seventh beam portion 157b is formed such that the thickness of the electrode support portion 157 in the Z-axis direction is larger than the thickness of the first movable comb 164a in the Z-axis direction.
  • the seventh beam portion 157 b extends in the Y-axis direction across the end portions of the electrode support portion 157.
  • the edge on one side in the X-axis direction of the seventh beam portion 157b is separated from the edge on one side in the X-axis direction of the electrode support portion 157 when viewed from the Z-axis direction, It extends along the
  • the other edge of the seventh beam portion 157b in the X-axis direction is a predetermined distance from the edge of the electrode support portion 157 in the X-axis direction when viewed from the Z-axis direction, It extends along the
  • the seventh beam portion 157b is formed, for example, in the same shape as the fifth beam portion 147b.
  • the thickness of the electrode support portion 157 in the Z-axis direction in order to suppress distortion of the electrode support portion 157 supporting the first movable comb electrode 164 when the movable mirror 11 is moving along the Z-axis direction T3 and the thickness T4 of the first movable comb 164a in the Z-axis direction may satisfy the following expression (3).
  • W3 is the width (length in the X-axis direction) of the electrode support portion 157
  • C1 is the length (length in the Y-axis direction) of the electrode support portion 157
  • N2 is one
  • W4 is the width (length in the Y-axis direction) of the first movable combs 164a
  • C4 is the first movable comb 164a (Length in the X-axis direction).
  • each electrode support portion 157 and each first movable comb electrode 164 are X In the axial direction (the extending direction of the lever 151), the movable mirror 11 is disposed on the opposite side of the center B of the lever 151 (see FIG. 2).
  • the thickness of the electrode support portion 147 in the Z-axis direction is thicker than the thickness of the first movable comb teeth 162a in the Z-axis direction by forming the fifth beam portion 147b.
  • the first movable comb electrode 162 is supported by the electrode support portion 147.
  • the thickness of the electrode support portion 157 in the Z-axis direction is thicker than the thickness of the first movable comb tooth 164a in the Z-axis direction.
  • the first movable comb electrode 164 is supported.
  • the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the second movable comb teeth 166 a in the Z-axis direction.
  • a two movable comb electrode 166 is supported.
  • the first movable comb electrodes 162 and 164 and the second movable comb electrode 166 can be moved integrally with the movable mirror 11, and the first movable comb 162a and the first fixed comb 161a adjacent to each other are , The distance between the first movable comb 164a and the first fixed comb 163a, and the distance between the second movable comb 166a and the second fixed comb 165a. Can be suppressed. As a result, the reliability can be improved.
  • the first movable comb electrode 162, 164 and the first fixed comb electrode 161 are made possible by the electrode support portion 147 extending from the lever 141 and the electrode support portion 157 extending from the lever 151. It is possible to suppress the variation of the distance between 163 and 163.
  • the first movable comb electrode 162 is located on the opposite side of the movable mirror 11 with respect to the center A of the lever 141 in the X-axis direction. As a result, even if the movable mirror 11 largely moves along the Z-axis direction, the first movable comb teeth 162a are less likely to come out of the area between the first fixed comb teeth 161a adjacent to each other. Further, the first movable comb electrode 164 is positioned on the opposite side of the movable mirror 11 with respect to the center B of the lever 151 in the X-axis direction.
  • the first movable comb teeth 164a are less likely to come out of the area between the first fixed comb teeth 163a adjacent to each other. Therefore, between the first fixed comb electrode 161 and the first movable comb electrode 162, and between the first fixed comb electrode 163 and the first movable comb electrode 164 over the entire movable range of the movable mirror 11. An electrostatic force can be generated between them.
  • each electrode support portion 147 and each first movable comb electrode 162 are positioned between points C and C that divides the lever 141 into three equal parts in the X-axis direction. doing. Further, each electrode support portion 157 and each first movable comb electrode 164 are located between points D and D which divides the lever 151 into three equal parts in the X-axis direction. As a result, between the first fixed comb electrode 161 and the first movable comb electrode 162, and the first fixed comb electrode 163 and the first movable comb electrode 164 over the entire movable range of the movable mirror 11. In the above, it is possible to achieve both the generation of electrostatic force and efficient use of the electrostatic force as the driving force of the movable mirror 11.
  • the lever 141 has the fourth beam portion 141e formed such that the thickness of the lever 141 in the Z-axis direction is larger than the thickness of the first movable comb 162a in the Z-axis direction.
  • the lever 151 has a sixth beam portion 151e formed such that the thickness of the lever 151 in the Z-axis direction is thicker than the thickness of the first movable comb 164a in the Z-axis direction.
  • the thickness T1 of the electrode support portion 147 in the Z-axis direction and the thickness T2 of the first movable comb teeth 162a in the Z-axis direction satisfy the above-mentioned equation (2).
  • the thickness T3 of the electrode support portion 157 in the Z-axis direction and the thickness T4 of the first movable comb teeth 164a in the Z-axis direction satisfy the above-mentioned equation (3). Accordingly, it is possible to more reliably suppress the change in the distance between the first movable comb electrodes 162 and 164 and the first fixed comb electrodes 161 and 163.
  • the electrode support (frame 112) is provided on the movable mirror 11 so as to be disposed along the outer edge of the movable mirror 11.
  • the distance from the connection position of the first elastic support portion 14 and the second elastic support portion 15 to the base 12 to the second movable comb electrode 166 can be secured.
  • the change in capacitance between the second fixed comb electrode 165 and the second movable comb electrode 166 is large, the position of the movable mirror 11 can be detected easily and reliably.
  • the frame portion 112 constitutes an electrode support portion.
  • the frame portion 112 surrounding the main body portion 111 can suppress variation in the distance between the second movable comb electrode 166 and the second fixed comb electrode 165.
  • the movable mirror 11 is separated from the main body 111 by a predetermined distance from the main body 111 when viewed from the Z-axis direction. And a connecting portion 113 that connects the two.
  • the cross-sectional force (bending moment) from the first torsion bars 145 and 155 is less likely to be transmitted to the main body 111, and the main body 111 is distorted when the movable mirror 11 is moving along the Z-axis direction. It can be suppressed.
  • the thickness of the outer edge portion 115 in the Z-axis direction is thicker than the thickness of the central portion 114 in the Z-axis direction.
  • the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the central portion 114 in the Z-axis direction.
  • each lever 141 is provided with a pair of electrode support portions 147.
  • Each electrode support portion 147 is provided with a first movable comb electrode 162.
  • the pair of electrode support portions 147 is formed in each lever 141 as follows.
  • the pair of electrode support portions 147 is arranged side by side along the X-axis direction.
  • One electrode support portion 147 is disposed at the same position as the electrode support portion 147 of the above embodiment.
  • the other movable electrode support portion 147 and the first movable comb electrode 162 supported by the other electrode support portion 147 are located on the movable mirror 11 side with respect to the center A of the lever 141 in the X-axis direction. . More specifically, the first movable comb electrode 162 supported by the other electrode support portion 147 and the other electrode support portion 147 separates the lever 141 into three equal parts from points C and C in the X-axis direction. Is also located on the movable mirror 11 side.
  • each lever 151 is provided with a pair of electrode support portions 157.
  • Each of the electrode support portions 157 is provided with a first movable comb electrode 164.
  • the pair of electrode support portions 157 is formed as follows in each lever 151.
  • the pair of electrode support portions 157 is arranged side by side along the X-axis direction.
  • One electrode support portion 157 is disposed at the same position as the electrode support portion 157 of the above embodiment.
  • the other electrode support portion 157 and the first movable comb electrode 164 supported by the other electrode support portion 157 are located on the movable mirror 11 side with respect to the center A of the lever 151 in the X-axis direction. .
  • the first movable comb electrode 164 supported by the other electrode support portion 157 and the other electrode support portion 157 separates the lever 151 into three equal parts in the X-axis direction from points D and D. Is also located on the movable mirror 11 side.
  • the other first movable comb electrode 162 is positioned on the movable mirror 11 side with respect to the center A of the lever 141 in the X-axis direction.
  • the other first movable comb electrode 164 is located on the movable mirror 11 side with respect to the center B of the lever 151 in the X-axis direction.
  • the distance from the connection position of the second elastic support portion 15 to the base 12 to the other first movable comb electrode 164 can be secured.
  • the electrostatic force generated between the first fixed comb electrode 161 and the first movable comb electrode 162 and between the first fixed comb electrode 163 and the first movable comb electrode 164 can be used as the movable mirror 11. It can be used efficiently as a driving force for
  • the pair of electrode support portions 147 and the pair of electrode support portions 157 are arranged side by side along the X-axis direction. As a result, since the plurality of electrode support portions 147 and 157 are provided, the driving force can be secured. In the first modification, the distortion of the electrode support portions 147 and 157 supporting the first movable comb electrodes 162 and 164 is suppressed by increasing the thickness of the electrode support portions 147 and 157 instead of the width.
  • the plurality of electrode support portions 147 and 157 can be arranged in line along the X-axis direction. Note that one lever 141 may be provided with three or more electrode support portions. The same applies to the lever 151.
  • the optical device 10 may be configured as a second modification shown in FIG.
  • the first elastic support portion 14 includes a pair of levers 141, a link 142, a link 143, a pair of first torsion bars 145, a pair of second torsion bars 146, a pair of second levers 171, and a link 172. And a pair of third torsion bars 173.
  • Each lever 141 has a shape in which an end portion 141 b is bent toward the first optical function portion 17 side.
  • the pair of second levers 171 is disposed on both sides of the lever 141 in the Y-axis direction.
  • Each second lever 171 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the lever 141.
  • the link 172 is bridged between the ends 171 a of the pair of second levers 171 opposite to the movable mirror 11.
  • the link 172 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction.
  • the link 172 is disposed on the side opposite to the first optical function unit 17 with respect to the link 143 and extends along the link 143.
  • the pair of second torsion bars 146 are respectively disposed between the end 141 b of one lever 141 and the end 171 a of one second lever 171 and the end 141 b of the other lever 141 and the other second lever It is bridged with the end 171a of 171.
  • the pair of third torsion bars 173 is disposed between the end portion 171 b on the movable mirror 11 side of the one second lever 171 and the base 12 and the end portion 171 b on the movable mirror 11 side of the other second lever 171 and the base It is bridged between 12 and.
  • a first movable comb electrode 162 having a plurality of first movable comb teeth 162 a is provided on the surface of the link 172 opposite to the first optical function unit 17. That is, the link 172 constitutes an electrode support portion for supporting the first movable comb electrode 162.
  • Each link 172 includes an eighth body portion 172a and an eighth beam portion 172b.
  • the eighth main body portion 172 a is formed of a part of the device layer 52.
  • the first movable comb electrode 162 extends from the eighth main portion 172a.
  • the eighth beam portion 172 b is formed of the support layer 51 and a part of the intermediate layer 53.
  • the eighth beam portion 172 b is provided on the surface of the eighth main portion 172 a on the main surface 12 b side.
  • the eighth beam portion 172 b is formed such that the thickness of the link 172 in the Z-axis direction is larger than the thickness of the first movable comb 162 a in the Z-axis direction.
  • the eighth beam portion 172 b extends along the Y-axis direction between both ends of the link 172.
  • the edge on one side in the X-axis direction in the eighth beam portion 172b is spaced along the edge at a predetermined distance from the edge on one side in the X-axis direction in the link 172 when viewed from the Z-axis direction Extend.
  • the other edge of the eighth beam portion 172b in the X-axis direction extends along the edge at a predetermined distance from the other edge of the link 172 in the X-axis direction, as viewed in the Z-axis direction. Extend.
  • the second elastic support portion 15 includes a pair of levers 151, a link 152, a link 153, a pair of first torsion bars 155, a pair of second torsion bars 156, a pair of second levers 181, a link 182, and a pair of first Three torsion bars 183 are provided.
  • Each lever 151 has a shape in which an end 151 b is bent toward the second optical function portion 18 side.
  • the pair of second levers 181 is disposed on both sides of the lever 151 in the Y-axis direction.
  • Each second lever 181 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the lever 151.
  • the link 182 is bridged between the ends 181 a of the pair of second levers 181 opposite to the movable mirror 11.
  • the link 182 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction.
  • the link 182 is disposed on the side opposite to the second optical function unit 18 with respect to the link 153 and extends along the link 153.
  • the pair of second torsion bars 156 are respectively disposed between the end 151 b of one lever 151 and the end 181 a of one second lever 181 and the end 151 b of the other lever 151 and the other second lever It is bridged between the end 181a and the end 181a.
  • the pair of third torsion bars 183 is disposed between the end 181 b of the one second lever 181 on the movable mirror 11 side and the base 12, and the other end 181 b of the second lever 181 on the movable mirror 11 side and the base It is bridged between 12 and.
  • a first movable comb electrode 164 having a plurality of first movable comb teeth 164 a is provided on the surface of the link 182 opposite to the second optical function unit 18. That is, the link 182 constitutes an electrode support portion that supports the first movable comb electrode 164.
  • Each link 182 has a ninth body portion 182a and a ninth beam portion 182b.
  • the ninth main body portion 182 a is formed of a part of the device layer 52.
  • the first movable comb electrode 164 extends from the ninth main portion 182a.
  • the ninth beam portion 182 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the ninth beam portion 182 b is provided on the surface of the ninth main portion 182 a on the main surface 12 b side.
  • the ninth beam portion 182 b is formed such that the thickness of the link 182 in the Z-axis direction is larger than the thickness of the first movable comb 164 a in the Z-axis direction.
  • the ninth beam portion 182 b extends in the Y-axis direction across the ends of the link 182.
  • the edge on one side in the X-axis direction of the ninth beam portion 182b is spaced along the edge at a predetermined distance from the edge on one side in the X-axis direction of the link 182 when viewed from the Z-axis direction Extend.
  • the other edge of the ninth beam portion 182b in the X-axis direction extends along the edge at a predetermined distance from the other edge of the link 182 in the X-axis direction, as viewed in the Z-axis direction. Extend.
  • the first movable comb electrodes 162 and 164, the second movable comb electrode 166, the first fixed comb electrodes 161 and 163, and the second fixed comb teeth The variation of the distance between the electrode 165 and the electrode 165 can be suppressed, and the reliability can be enhanced.
  • the first movable comb electrode 162, 164 is configured by the link 172 bridged between the pair of second levers 171 and the link 182 bridged between the pair of second levers 181. It is possible to suppress the change in the distance between the first fixed comb electrode 161 and the first fixed comb electrode 161, and
  • the optical device 10 may be configured as a third modification shown in FIG.
  • the second fixed comb electrode 165 and the second movable comb electrode 166 are not provided.
  • the frame portion 112 exhibits an octagonal ring shape when viewed from the Z-axis direction
  • the second beam portion 112 b exhibits an octagonal ring shape when viewed from the Z-axis direction.
  • the movable mirror 11 has one bracket 116 and one bracket 117.
  • the bracket 116 is provided on the surface of the frame portion 112 on the first optical function portion 17 side so as to protrude to the first optical function portion 17 side.
  • the bracket 117 is provided on the surface of the frame portion 112 on the second optical function portion 18 side so as to protrude to the second optical function portion 18 side.
  • the first elastic support portion 14 includes a pair of levers 141, a link 142, a pair of first torsion bars 145, a pair of second torsion bars 146, a pair of brackets 174, a pair of extending portions 175, a pair of brackets 176, and links 177 and a pair of non-linearity relief springs 178.
  • the pair of levers 141 extends from the movable mirror 11 side to both sides of the first optical function portion 17 in the Y-axis direction along a plane perpendicular to the Z-axis direction.
  • Each lever 141 includes a first portion 141 f disposed on the movable mirror 11 side, and a second portion 141 g disposed on the opposite side of the movable mirror 11 with respect to the first portion 141 f.
  • the first portions 141f extend so as to be apart from each other as the distance from the movable mirror 11 increases.
  • Each second portion 141 g extends along the X-axis direction.
  • the pair of brackets 174 is provided on the surface of the first portion 141 f on the movable mirror 11 side so as to protrude to the movable mirror 11 side.
  • Each bracket 174 has a shape bent in a crank shape on the same side when viewed from the Z-axis direction.
  • Each extension portion 175 has a rectangular shape when viewed from the Z-axis direction.
  • One extending portion 175 extends between one lever 141 and the movable mirror 11 and protrudes outward beyond the movable mirror 11 in the Y-axis direction.
  • the other extension portion 175 extends between the other lever 141 and the movable mirror 11, and protrudes outward beyond the movable mirror 11 in the Y-axis direction.
  • the pair of extension portions 175 are disposed on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.
  • a first movable comb electrode 162 having a plurality of first movable comb teeth 162 a is provided on the surface on both sides in the X axis direction of the extension portion 175. That is, the extension portion 175 constitutes an electrode support portion that supports the first movable comb electrode 162.
  • Each extension portion 175 has a tenth main body portion 175a and a tenth beam portion 175b.
  • the tenth main body portion 175 a is formed of a part of the device layer 52.
  • the first movable comb electrode 162 extends from the tenth main body portion 175a.
  • the tenth beam portion 175 b is formed of the support layer 51 and a part of the intermediate layer 53.
  • the tenth beam portion 175 b is provided on the surface of the tenth main portion 175 a on the main surface 12 b side.
  • the tenth beam portion 175 b is formed such that the thickness of the extension portion 175 in the Z-axis direction is larger than the thickness of the first movable comb 162 a in the Z-axis direction.
  • the tenth beam portion 175 b extends along the Y-axis direction between both ends of the extension portion 175.
  • the edge on one side in the X-axis direction in the tenth beam portion 175b is spaced apart from the edge on one side in the X-axis direction in the extension portion 175 when viewed from the Z-axis direction, It extends along the
  • the other edge of the tenth beam portion 175b in the X-axis direction is a predetermined distance from the edge of the extension portion 175 in the X-axis direction when viewed from the Z-axis direction, It extends along the
  • the pair of brackets 176 is provided on the surface of the extension portion 175 on the side of the first optical function portion 17 so as to protrude to the side of the first optical function portion 17.
  • Each of the brackets 176 has a cranked shape on the same side (but opposite to each bracket 174) when viewed in the Z-axis direction.
  • the tip of one bracket 176 faces the tip of one bracket 174 in the Y-axis direction.
  • the tip of the other bracket 176 faces the tip of the other bracket 174 in the Y-axis direction.
  • the link 177 is bridged between the inner ends of the pair of extensions 175.
  • the link 177 has a substantially U shape opened toward the movable mirror 11 when viewed from the Z-axis direction.
  • the link 177 faces the bracket 116 of the movable mirror 11 in the Y-axis direction. More specifically, the link 177 extends in the X-axis direction and has a pair of side portions 177a facing each other in the Y-axis direction, and the bracket 116 is disposed between the pair of side portions 177a.
  • the pair of first torsion bars 145 are respectively disposed between the tip of one bracket 174 and the tip of one bracket 176 and between the tip of the other bracket 174 and the tip of the other bracket 176. It has been crossed.
  • the pair of second torsion bars 146 is bridged between the end 141 b of the one lever 141 and the base 12 and between the end 141 b of the other lever 141 and the base 12, respectively.
  • a pair of non-linearity relaxation springs 178 are arranged on one side and the other side in the Y-axis direction with respect to the bracket 116.
  • Each non-linearity relaxation spring 178 is connected to the movable mirror 11 via the bracket 116 and to the first torsion bar 145 via the link 177, the extension portion 175 and the bracket 176. That is, each non-linearity relaxation spring 178 is connected between the movable mirror 11 and the first torsion bar 145.
  • Each non-linearity relaxation spring 178 has a pair of plate-like portions 178 a bridged between the bracket 116 and the pair of side portions 177 a of the link 177.
  • Each plate-like portion 178a has a flat plate shape perpendicular to the X-axis direction.
  • the pair of plate-like portions 178a face each other in the X-axis direction.
  • the plate-like portion 178a located on one side in the X-axis direction is disposed along one plane perpendicular to the X-axis direction, and on the other side in the X-axis direction The plate-like portion 178a located is disposed along another plane perpendicular to the X-axis direction.
  • each plate-like portion 178 a is longer than each of the length of the first torsion bar 145 and the length of the second torsion bar 146.
  • the width (length in the X-axis direction) of each plate-like portion 178 a is narrower than each of the width of the first torsion bar 145 and the width of the second torsion bar 146.
  • the deformation of the non-linearity relaxation spring 178 in the X-axis direction is larger than the deformation of the first torsion bar 145 and the second torsion bar 146 in the X-axis direction.
  • the amounts of deformation of the first torsion bar 145, the second torsion bar 146, and the non-linearity relaxation spring 178 around the Y-axis direction mean, for example, the absolute value of the amount of twist (twist angle).
  • the amount of deformation of the first torsion bar 145, the second torsion bar 146, and the non-linearity relaxation spring 178 in the X-axis direction means, for example, the absolute value of the amount of bending.
  • the length of the plate portion 178a is the width
  • the length of the plate-like portion 178a not including the portion means the width of the plate-like portion 178a means the width of the plate-like portion 178a not including the widening portion.
  • the second elastic support portion 15 includes a pair of levers 151, a link 152, a pair of first torsion bars 155, a pair of second torsion bars 156, a pair of brackets 184, a pair of extending portions 185, a pair of brackets 186, and links 187 and a pair of non-linearity relief springs 188.
  • the pair of levers 151 extends from the movable mirror 11 side to both sides of the second optical function portion 18 in the Y-axis direction along a plane perpendicular to the Z-axis direction.
  • Each lever 151 has a first portion 151f disposed on the movable mirror 11 side, and a second portion 151g disposed on the opposite side of the movable mirror 11 with respect to the first portion 151f.
  • the first portions 151f extend so as to be apart from each other as the distance from the movable mirror 11 increases.
  • Each second portion 151g extends along the X-axis direction.
  • the pair of brackets 184 is provided on the surface of the first portion 151 f on the movable mirror 11 side so as to protrude to the movable mirror 11 side.
  • Each of the brackets 184 has a shape bent in a crank shape on the same side (but the side opposite to the respective brackets 174) when viewed from the Z-axis direction.
  • Each extension portion 185 has a rectangular shape when viewed from the Z-axis direction.
  • One extending portion 185 extends between one lever 151 and the movable mirror 11 and protrudes outward beyond the movable mirror 11 in the Y-axis direction.
  • the other extension portion 185 extends between the other lever 151 and the movable mirror 11 and protrudes outward beyond the movable mirror 11 in the Y-axis direction.
  • the pair of extension portions 185 are disposed on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.
  • a first movable comb electrode 164 having a plurality of first movable comb teeth 164 a is provided on the surface on both sides in the X axis direction of the extension portion 185.
  • the extension portion 185 constitutes an electrode support portion that supports the first movable comb electrode 164.
  • Each extension portion 185 includes an eleventh main portion 185a and an eleventh beam portion 185b.
  • the eleventh main body portion 185 a is formed of a part of the device layer 52.
  • the first movable comb electrode 164 extends from the eleventh main body 185 a.
  • the eleventh beam portion 185 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the eleventh beam portion 185 b is provided on the surface of the eleventh main portion 185 a on the main surface 12 b side.
  • the eleventh beam portion 185 b is formed such that the thickness of the extension portion 185 in the Z-axis direction is larger than the thickness of the first movable comb 164 a in the Z-axis direction.
  • the eleventh beam portion 185 b extends along the Y-axis direction between both ends of the extending portion 185.
  • the edge on one side in the X-axis direction in the eleventh beam portion 185 b is spaced from the edge on one side in the X-axis direction in the extending portion 185 at a predetermined distance when viewed from the Z-axis direction.
  • the edge on the other side in the X-axis direction in the eleventh beam portion 185 b is spaced apart from the edge on the other side in the X-axis direction in the extending portion 185 by a predetermined distance when viewed from the Z-axis direction It extends along the
  • the pair of brackets 186 is provided on the surface of the extension portion 185 on the side of the second optical function portion 18 so as to protrude to the side of the second optical function portion 18.
  • Each of the brackets 186 has a cranked shape on the same side (but opposite to each bracket 184) when viewed from the Z-axis direction.
  • the tip of one bracket 186 faces the tip of one bracket 184 in the Y-axis direction.
  • the tip of the other bracket 186 faces the tip of the other bracket 184 in the Y-axis direction.
  • the link 187 is bridged between the inner ends of the pair of extensions 185.
  • the link 187 has a substantially U shape opened toward the movable mirror 11 when viewed in the Z-axis direction.
  • the link 187 faces the bracket 117 of the movable mirror 11 in the Y-axis direction. More specifically, the link 187 extends in the X-axis direction, and has a pair of side portions 187a facing each other in the Y-axis direction, and the bracket 117 is disposed between the pair of side portions 187a.
  • the pair of first torsion bars 155 is disposed between the end of one bracket 184 and the end of one bracket 186 and between the end of the other bracket 184 and the end of the other bracket 186. It has been crossed.
  • the pair of second torsion bars 156 are respectively bridged between the end 151 b of the one lever 151 and the base 12 and between the end 151 b of the other lever 151 and the base 12.
  • the pair of non-linearity relaxation springs 188 are disposed on one side and the other side in the Y-axis direction with respect to the bracket 117.
  • Each non-linearity relaxation spring 188 is connected to the movable mirror 11 via the bracket 117 and to the first torsion bar 155 via the link 187, the extension portion 185 and the bracket 186. That is, each non-linearity relaxation spring 188 is connected between the movable mirror 11 and the first torsion bar 155.
  • Each non-linearity relief spring 188 has a pair of plate-like portions 188 a bridged between the bracket 117 and the pair of side portions 187 a of the link 187.
  • Each plate-like portion 188a has a flat plate shape perpendicular to the X-axis direction.
  • the pair of plate-like portions 188a face each other in the X-axis direction.
  • the plate-like portion 188a located on one side in the X-axis direction is disposed along one plane perpendicular to the X-axis direction, and on the other side in the X-axis direction.
  • the plate portion 188a located is disposed along another plane perpendicular to the X-axis direction.
  • Each plate-like portion 188a is formed, for example, in the same shape as the plate-like portion 178a.
  • the length of each plate-like portion 188 a is longer than each of the length of the first torsion bar 155 and the length of the second torsion bar 156.
  • the width of each plate-like portion 188a is narrower than the width of the first torsion bar 155 and the width of the second torsion bar 156, respectively.
  • Each of the first optical function unit 17 and the second optical function unit 18 is a light passing aperture formed in the SOI substrate 50.
  • Each of the first optical function unit 17 and the second optical function unit 18 has a circular shape when viewed from the Z-axis direction.
  • the extension portion 175 extending between the lever 141 and the movable mirror 11 when viewed from the Z-axis direction, and the lever 151 and the movable mirror 11 when viewed from the Z-axis direction.
  • the extension portion 185 extending between the first and second movable comb electrodes can suppress variation in the distance between the first movable comb electrodes 162 and 164 and the first fixed comb electrodes 161 and 163.
  • the first elastic support portion 14 has the non-linearity relaxation spring 178 and the second elastic support portion 15 has the non-linearity relaxation spring 188, the first torsion bars 145 and 155 and the second torsion bar 146 , 156 can be prevented from causing non-linearity.
  • the non-linearity relaxation springs 178 and 188 are provided as such, it is possible to suppress variation in the distance between the first movable comb electrodes 162 and 164 and the first fixed comb electrodes 161 and 163. be able to.
  • the optical device 10 may be configured as a fourth modification shown in FIG.
  • the fourth modification is different from the third modification in the following points.
  • the first movable comb electrode 162 is disposed across the first portion 141 f of the pair of levers 141 and the link 142. That is, the pair of levers 141 and the link 142 constitute an electrode support portion for supporting the first movable comb electrode 162.
  • the pair of levers 141 and the link 142 may be referred to as an electrode support portion 179.
  • the first movable comb electrode 164 is disposed across the first portion 151 f of the pair of levers 151 and the link 152. That is, the pair of levers 151 and the link 152 constitute an electrode support portion for supporting the first movable comb electrode 164.
  • the pair of levers 141 and the link 142 may be referred to as an electrode support portion 189.
  • a pair of middle portions 175A is provided instead of the pair of extension portions 175.
  • Each intermediate portion 175A is connected to the lever 141 via the brackets 174 and 176 and the first torsion bar 145, and is connected to the bracket 116 via the link 177 and the non-linearity relaxation spring 178.
  • a pair of intermediate portions 185A is provided instead of the pair of extension portions 185.
  • Each intermediate portion 185A is connected to the lever 151 via the brackets 184 and 186 and the first torsion bar 155, and is connected to the bracket 117 via the link 187 and the non-linearity relaxation spring 188.
  • the first optical function unit 17 When viewed from the Z-axis direction, the first optical function unit 17 is disposed on one side of the movable mirror 11 in the Y-axis direction, and the second optical function unit 18 is the other of the movable mirror 11 in the Y-axis direction. It is arranged on the side.
  • a first movable comb electrode 162 having a plurality of first movable comb teeth 162 a is provided on the surface of the electrode support portion 179 opposite to the movable mirror 11.
  • Each electrode support portion 179 has a twelfth main portion 179a and a twelfth beam portion 179b.
  • the twelfth main body portion 179 a is formed of a part of the device layer 52.
  • the first movable comb electrode 162 extends from the twelfth main portion 179a.
  • the twelfth beam portion 179 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the twelfth beam portion 179 b is provided on the surface of the twelfth main portion 179 a on the main surface 12 b side.
  • the twelfth beam portion 179b is formed such that the thickness of the electrode support portion 179 in the Z-axis direction is larger than the thickness of the first movable comb teeth 162a in the Z-axis direction.
  • the twelfth beam portion 179 b extends between both ends of the electrode support portion 179.
  • the edge on one side in the X-axis direction in the twelfth beam portion 179b is separated from the edge on one side in the X-axis direction in the electrode support portion 179 when viewed from the Z-axis direction, It extends along the
  • the edge on the other side in the X-axis direction in the twelfth beam portion 179b is separated from the edge on the other side in the X-axis direction in the electrode support portion 179 by a predetermined distance when viewed from the Z-axis direction It extends along the
  • a first movable comb electrode 164 having a plurality of first movable comb teeth 164 a is provided on the surface of the electrode support portion 189 opposite to the movable mirror 11.
  • Each electrode support portion 189 has a thirteenth main body portion 189a and a thirteenth beam portion 189b.
  • the thirteenth main body portion 189 a is formed of a part of the device layer 52.
  • the first movable comb electrode 164 extends from the thirteenth main body portion 189a.
  • the thirteenth beam portion 189 b is formed of a part of the support layer 51 and the intermediate layer 53.
  • the thirteenth beam portion 189 b is provided on the surface of the thirteenth main portion 189 a on the main surface 12 b side.
  • the thirteenth beam portion 189 b is formed such that the thickness of the electrode support portion 189 in the Z-axis direction is larger than the thickness of the first movable comb 164 a in the Z-axis direction.
  • the thirteenth beam portion 189 b extends between both ends of the electrode support portion 189.
  • the edge on one side in the X-axis direction in the thirteenth beam portion 189b is separated from the edge on one side in the X-axis direction in the electrode support portion 189 when viewed from the Z-axis direction, It extends along the
  • the other edge of the thirteenth beam portion 189b in the X-axis direction is a predetermined distance from the edge of the other side of the X-axis direction of the electrode support portion 189 when viewed from the Z-axis direction. It extends along the
  • the electrode supporting portions 179 and 189 can suppress variation in the distance between the first movable comb electrodes 162 and 164 and the first fixed comb electrodes 161 and 163. .
  • the optical device 10 may be configured as in the fifth modification shown in FIG.
  • the frame portion 112 and the connection portion 113 are not provided, and the brackets 116 and 117 are directly connected to the main body portion 111.
  • the pair of second movable comb electrodes 166 are provided on the outer surface of the outer edge portion 115 of the main body 111 in the Y-axis direction. That is, in the fifth modification, the outer edge portion 115 constitutes an electrode support portion for supporting the respective second movable comb electrodes 166.
  • the outer edge portion 115 has the first beam portion 115 b formed such that the thickness of the outer edge portion 115 in the Z-axis direction is larger than the thickness of the central portion 114 in the Z-axis direction.
  • the first movable comb electrodes 162 and 164, the second movable comb electrode 166, the first fixed comb electrodes 161 and 163, and the second fixed comb teeth are suppressed, and the reliability can be enhanced.
  • the distance between the second movable comb electrode 166 and the second fixed comb electrode 165 is changed by the outer edge portion 115 which is thicker in the Z-axis direction than the central portion 114. Can be suppressed.
  • the first fixed comb electrode 161, 163 and the first movable comb electrode 162, 164 are used as drive electrodes
  • the second fixed comb is used.
  • the tooth electrode 165 and the second movable comb electrode 166 are used as monitoring electrodes
  • the first electrode is used as a monitoring electrode and the second electrode is for driving. It may be used as an electrode of The second electrode may be omitted and only the first electrode may be provided.
  • the first electrode may be used as a driving electrode, or may be used as a driving and monitoring electrode.
  • the first electrode may be omitted and only the second electrode may be provided.
  • the second electrode may be used as a driving electrode, or may be used as a driving and monitoring electrode.
  • each of the main body portion 111 and the mirror surface 11a may have an arbitrary shape such as a rectangular shape or an octagonal shape when viewed from the Z-axis direction.
  • the frame portion 112 may have an arbitrary ring shape such as a rectangular ring shape or an octagonal ring shape when viewed from the Z-axis direction.
  • Each of the first beam portion 115b, the second beam portion 112b, the third beam portion 113b, the fourth beam portion 141e, the fifth beam portion 147b, the sixth beam portion 151e, and the seventh beam portion 157b is formed in any shape. May be done.
  • the beam portion may extend obliquely with respect to the X-axis direction or the Y-axis direction, or may extend in a zigzag manner.
  • the arrangement, number, length, width and thickness of each beam may be set arbitrarily. At least one of these beams may be omitted.
  • the first beam portion 115b is provided on the surface of the first main body portion 115a on the main surface 12b side, but the first beam portion 115b is the surface of the first main body portion 115a on the main surface 12a side It may be provided on top.
  • the shape of the first torsion bars 145 and 155 and the second torsion bars 146 and 156 is not limited, and may be any shape such as a bar.
  • Each of the first optical function unit 17 and the second optical function unit 18 may have an arbitrary shape such as a circular shape or an octagonal shape when viewed from the Z-axis direction.
  • the optical device 10 may include a movable portion provided with another optical function portion other than the mirror surface 11 a instead of the movable mirror 11.
  • a lens etc. are mentioned, for example.
  • the actuator unit 16 is not limited to the electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like.
  • the optical module 1 is not limited to that which comprises FTIR, but may comprise another optical system.
  • Extension part 175b ... 10th beam part, 185b ... 11th beam part, 178, 188 ... Non-linearity relaxation spring, 179, 189 ... Electrode support part, 179b ... 12th beam part, 189b ... 13th beam part.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

Selon la présente invention, ce dispositif optique comprend : une base ayant une surface principale ; une section mobile comprenant une section de fonction optique ; une section de support élastique servant à porter la section mobile de telle sorte que la section mobile puisse se déplacer le long d'une direction prédéterminée perpendiculaire à la surface principale ; une électrode de peigne fixe comprenant une pluralité de dents de peigne fixes ; et une électrode de peigne mobile ayant une pluralité de dents de peigne mobiles agencées de manière alternée avec la pluralité de dents de peigne fixes. La section mobile et/ou la section de support élastique comprend une section de support d'électrode servant à soutenir l'électrode de peigne mobile. La section de support d'électrode comprend une section de poutre formée de telle sorte que l'épaisseur de la section de support d'électrode dans une direction prédéterminée soit plus épaisse que l'épaisseur des dents de peigne mobiles dans la direction prédéterminée.
PCT/JP2018/025638 2017-07-06 2018-07-06 Dispositif optique Ceased WO2019009396A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201880043756.0A CN110799889B (zh) 2017-07-06 2018-07-06 光学装置
EP18828995.3A EP3650918B1 (fr) 2017-07-06 2018-07-06 Dispositif optique
US16/625,687 US12136893B2 (en) 2017-07-06 2018-07-06 Optical device having fixed and movable comb electrodes

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
JP2017133093 2017-07-06
JP2017-133093 2017-07-06
JP2017-220237 2017-11-15
JP2017220237 2017-11-15
JP2017235021 2017-12-07
JP2017235022 2017-12-07
JP2017-235025 2017-12-07
JP2017-235021 2017-12-07
JP2017235025 2017-12-07
JP2017-235022 2017-12-07
JP2018-080743 2018-04-19
JP2018080743A JP6514804B1 (ja) 2017-07-06 2018-04-19 光学デバイス

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CN110799889B (zh) 2022-06-03
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CN110799889A (zh) 2020-02-14

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